WO2015002216A1 - 色素多量体、着色組成物、硬化膜、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子および画像表示装置 - Google Patents
色素多量体、着色組成物、硬化膜、カラーフィルタ、カラーフィルタの製造方法、固体撮像素子および画像表示装置 Download PDFInfo
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- WO2015002216A1 WO2015002216A1 PCT/JP2014/067615 JP2014067615W WO2015002216A1 WO 2015002216 A1 WO2015002216 A1 WO 2015002216A1 JP 2014067615 W JP2014067615 W JP 2014067615W WO 2015002216 A1 WO2015002216 A1 WO 2015002216A1
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- 125000001981 tert-butyldimethylsilyl group Chemical group [H]C([H])([H])[Si]([H])(C([H])([H])[H])[*]C(C([H])([H])[H])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
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- LPSKDVINWQNWFE-UHFFFAOYSA-M tetrapropylazanium;hydroxide Chemical compound [OH-].CCC[N+](CCC)(CCC)CCC LPSKDVINWQNWFE-UHFFFAOYSA-M 0.000 description 1
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- QAEDZJGFFMLHHQ-UHFFFAOYSA-N trifluoroacetic anhydride Chemical compound FC(F)(F)C(=O)OC(=O)C(F)(F)F QAEDZJGFFMLHHQ-UHFFFAOYSA-N 0.000 description 1
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- SRPWOOOHEPICQU-UHFFFAOYSA-N trimellitic anhydride Chemical compound OC(=O)C1=CC=C2C(=O)OC(=O)C2=C1 SRPWOOOHEPICQU-UHFFFAOYSA-N 0.000 description 1
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 description 1
- 125000003960 triphenylenyl group Chemical group C1(=CC=CC=2C3=CC=CC=C3C3=CC=CC=C3C12)* 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
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- ZTWTYVWXUKTLCP-UHFFFAOYSA-N vinylphosphonic acid Chemical compound OP(O)(=O)C=C ZTWTYVWXUKTLCP-UHFFFAOYSA-N 0.000 description 1
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- 125000004933 β-carbolinyl group Chemical group C1(=NC=CC=2C3=CC=CC=C3NC12)* 0.000 description 1
Classifications
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
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- C08F224/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by a heterocyclic ring containing oxygen
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- C07D—HETEROCYCLIC COMPOUNDS
- C07D311/00—Heterocyclic compounds containing six-membered rings having one oxygen atom as the only hetero atom, condensed with other rings
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- C07D311/88—Nitrogen atoms
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
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- C08F12/04—Monomers containing only one unsaturated aliphatic radical containing one ring
- C08F12/14—Monomers containing only one unsaturated aliphatic radical containing one ring substituted by hetero atoms or groups containing heteroatoms
- C08F12/26—Nitrogen
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
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- C08F12/02—Monomers containing only one unsaturated aliphatic radical
- C08F12/32—Monomers containing only one unsaturated aliphatic radical containing two or more rings
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C08G18/3819—Low-molecular-weight compounds having heteroatoms other than oxygen having nitrogen
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C09B11/00—Diaryl- or thriarylmethane dyes
- C09B11/04—Diaryl- or thriarylmethane dyes derived from triarylmethanes, i.e. central C-atom is substituted by amino, cyano, alkyl
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- C09B11/00—Diaryl- or thriarylmethane dyes
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- C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
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- C09B23/00—Methine or polymethine dyes, e.g. cyanine dyes
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- C09B23/08—Methine or polymethine dyes, e.g. cyanine dyes the polymethine chain containing an odd number of >CH- or >C[alkyl]- groups more than three >CH- groups, e.g. polycarbocyanines
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- C09B69/00—Dyes not provided for by a single group of this subclass
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- C09B69/00—Dyes not provided for by a single group of this subclass
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- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
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- C08F290/08—Macromolecular compounds obtained by polymerising monomers on to polymers modified by introduction of aliphatic unsaturated end or side groups on to polymers modified by introduction of unsaturated side groups
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- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
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- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
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Definitions
- the present invention relates to a dye multimer, a coloring composition and a cured film using the same.
- the present invention also relates to a color filter having a cured film, a method of manufacturing the color filter, a solid-state imaging device having the color filter, and an image display device.
- pigment dispersion method colored photosensitivity in which a pigment is dispersed in various photosensitive compositions It is a method of manufacturing a color filter by a photolithographic method using a composition. That is, the curable composition is applied onto a substrate using a spin coater, a roll coater or the like, dried to form a coating film, and the coating film is pattern-exposed and developed to obtain colored pixels. A color filter is produced by repeating this operation for a desired hue.
- the above method is stable against light and heat because it uses a pigment, and the positional accuracy is sufficiently secured because patterning is performed by the photolithographic method, and it is suitable as a method suitable for manufacturing a color filter for a color display, etc. It has been widely used.
- Dyes are generally inferior in light resistance and heat resistance to pigments.
- ITO indium tin oxide
- the dye tends to suppress the radical polymerization reaction, and therefore, in a system using radical polymerization as a curing means, it is difficult to design a colored photosensitive composition.
- the following points become problems.
- the colored layer is required to be a thin film of 1 ⁇ m or less. Therefore, it is necessary to add a large amount of dye in the curable composition to obtain the desired absorption, resulting in the aforementioned problems.
- JP 2012-32754 A Japanese Patent Application Publication No. 2007-138051 JP 2000-162429 A JP 2003-246935 A
- the present invention is intended to solve such problems, and it is an object of the present invention to provide a dye multimer capable of appropriately forming a pattern when forming a pattern. Further, the present invention relates to a coloring composition using such a dye polymer, a cured film using the coloring composition, a color filter, a method of manufacturing a color filter, a solid-state imaging device, and an image display device.
- the present inventors have found that the above problems can be solved by using a dye multimer having a non-nucleophilic counter anion.
- the above problems are solved by the following means ⁇ 1>, preferably by ⁇ 2> to ⁇ 17>.
- a dye multimer having a non-nucleophilic counter anion has a partial structure derived from a dye selected from dipyrromethene dyes, triarylmethane dyes, xanthene dyes, and cyanine dyes, ⁇ 1> The pigment
- General formula (A) (In the general formula (A), X 1 represents a group forming the main chain, L 1 represents a single bond or a divalent linking group. Dye I represents a dye structure having a cationic site.)
- General formula (C) (In the general formula (C), L 3 represents a single bond or a divalent linking group.
- Dye III represents a dye structure having a cationic site. M represents 0 or 1.)
- General formula (D) (In general formula (D), L 4 represents an n-valent linking group. N represents an integer of 2 to 20.
- Dye IV represents a dye structure having a cationic site.
- ⁇ 12> The colored composition according to any one of ⁇ 9> to ⁇ 11>, which is for forming a colored layer of a color filter.
- a method for producing a color filter comprising the steps of: patterning a photoresist layer by exposure and development to obtain a resist pattern; and dry etching the colored layer using the resist pattern as an etching mask.
- the color filter manufactured by the manufacturing method of the color filter which has a cured film as described in ⁇ 16> ⁇ 13>, or the color filter as described in ⁇ 14> or ⁇ 15>.
- the solid-state image sensor or image display apparatus which has a color filter as described in ⁇ 17> ⁇ 16>.
- a dye multimer which can appropriately form a pattern when forming a pattern. Furthermore, it has become possible to provide a coloring composition using a dye polymer, a cured film using the coloring composition, a color filter, a method of manufacturing a color filter, a solid-state imaging device and an image display device.
- the dye multimer, the coloring composition, the cured film, the color filter, the pattern forming method, the method for producing a color filter, the solid-state imaging device and the image display device of the present invention will be described in detail below.
- the notations not describing substitution and non-substitution include those having no substituent and those having a substituent.
- the "alkyl group” includes not only an alkyl group having no substituent (unsubstituted alkyl group) but also an alkyl group having a substituent (substituted alkyl group).
- radiation in the present specification means, for example, a bright line spectrum of a mercury lamp, far ultraviolet rays represented by an excimer laser, extreme ultraviolet rays (EUV light), X-rays, electron beams and the like. In the present invention, light means actinic rays or radiation.
- the "exposure” in the present specification is not only exposure by far ultraviolet rays represented by a mercury lamp or excimer laser, X-rays, EUV light, etc., but also drawing by particle beams such as electron beams or ion beams Also included in the exposure.
- a numerical range represented using “to” means a range including the numerical values described before and after “to” as the lower limit value and the upper limit value.
- the total solid content refers to the total mass of the components excluding the solvent from the total composition of the coloring composition.
- (meth) acrylate represents both or either of acrylate and methacrylate
- (meth) acrylic represents both or either of acrylic and methacryl
- ( ) Acryloyl represents both or either of acryloyl and methacryloyl.
- a monomer as used herein is distinguished from an oligomer and a polymer and refers to a compound having a weight average molecular weight of 2,000 or less.
- the polymerizable compound refers to a compound having a polymerizable functional group, and may be a monomer or a polymer.
- the polymerizable functional group refers to a group involved in the polymerization reaction.
- Me in the chemical formula represents a methyl group
- Et represents an ethyl group
- Pr represents a propyl group
- Bu represents a butyl group
- Ph represents a phenyl group
- the term "process” is included in the term if the intended function of the process is achieved, even if it can not be clearly distinguished from other processes, not only the independent process. .
- the present invention has been made in view of the above-mentioned circumstances, and an object thereof is to provide a coloring composition excellent in color characteristics.
- the dye multimer of the present invention is characterized by having (A) a non-nucleophilic counter anion. With such a configuration, decomposition of the dye can be more effectively suppressed even in an excessive heating process. Such a problem is likely to occur in dyes, but the present invention can be preferably adopted even when using pigments, particularly when using pigments having performance similar to dyes.
- the coloring composition of the present invention (hereinafter sometimes referred to simply as “the composition of the present invention") comprises (A) a dye multimer having a non-nucleophilic counter anion and (B) a polymerizable compound. It is characterized by containing.
- the coloring composition of the present invention further comprises (C) a pigment (except for (A) a pigment multimer having a non-nucleophilic counter anion) and / or (D) a photopolymerization initiator. It is preferable to include, and if necessary, other components such as a crosslinking agent may be included. With such a configuration, color transfer to another pattern is suppressed, and a pattern having excellent pattern formability can be formed.
- the present invention it is possible to provide a cured film having excellent color characteristics and a color filter having the cured film. Further, according to the present invention, it is possible to provide a pattern forming method and a color filter manufacturing method capable of forming a colored pattern excellent in color characteristics. Furthermore, according to the present invention, it is possible to provide a solid-state imaging device and an image display device (a liquid crystal display device, an organic EL display device, etc.) provided with a color filter excellent in color characteristics.
- the coloring composition of the present invention contains at least one kind of dye multimer having a non-nucleophilic counter anion (hereinafter sometimes simply referred to as "dye multimer (A)").
- non-nucleophilic means the property which does not carry out the nucleophilic attack of the pigment by heating.
- Dye multimer (A) is generally a multimer having a partial structure derived from a dye whose maximum absorption wavelength is in the range of 400 nm to 780 nm in its molecular structure, and is a dimer, trimer and Includes structures such as polymers.
- the dye multimer of the present invention more preferably contains a repeating unit containing a dye monomer, and more preferably contains a repeating unit containing a dye monomer and a repeating unit having a polymerizable group. It is more preferable to include a repeating unit having a repeating unit containing a repeating unit having a polymerizable group and a repeating unit having an acid group.
- the dye structure has a cation site.
- the dye multimer (A) functions as, for example, a coloring agent in the coloring composition of the present invention.
- the dye multimer (A) of the present invention preferably has a maximum absorption wavelength of 420 to 700 nm, more preferably 450 to 650 nm.
- the acid value of the dye multimer (A) of the present invention is preferably 5 to 100 mg KOH / g, more preferably 15 to 60 mg KOH / g.
- the repeating unit containing the structure derived from the dye makes the total repeating unit 100 mol%
- it is preferably 10 to 100 mol% in the dye multimer (A) of the present invention, and 50 to 100 More preferably, it is mole%, and particularly preferably 60 to 100 mole%.
- the non-nucleophilic counter anion in the dye multimer (A) and the partial structure derived from the dye will be described below.
- the non-nucleophilic counter anion possessed by the dye multimer (A) may be an organic anion or an inorganic anion, and is preferably an organic anion.
- Examples of the counter anion used in the present invention include known non-nucleophilic anions described in paragraph 0075 of JP-A-2007-310315, the contents of which are incorporated herein.
- anion such as bis (sulfonyl) imide anion
- tris (sulfonyl) methide anion, tetraarylborate anion B - (CN) n1 ( OR a) 4-n1 (R a is alkyl of 1 to 10 carbon atoms Group or an aryl group having 6 to 10 carbon atoms, n 1 represents 1 to 4; PF n 2 R P (6- n 2) ⁇ (R P represents a fluorinated alkyl group having 1 to 10 carbon atoms; n 2 Is an integer of 1 to 6) and BF n3 R P (4-n3) - (R P is a fluorinated alkyl group having 1 to 10 carbon atoms, and n3 is an integer of 1 to 4)
- AN-1 a structure represented by the following general formula (AN-1) is preferable.
- X 1 and X 2 each independently represent a halogen atom, an alkyl group or an aryl group.
- X 1 and X 2 may combine with each other to form a ring.
- 1 and Y 2 each independently represent -SO 2 -or -CO-.
- Each of X 1 and X 2 independently is preferably a fluorine atom or an alkyl group having 1 to 10 carbon atoms having a fluorine atom or an aryl group having 6 to 10 carbon atoms, and more preferably a perfluoroalkyl group having 1 to 10 carbon atoms And a perfluoroalkyl group having 1 to 4 carbon atoms is more preferable, and a trifluoromethyl group is particularly preferable.
- Y 1 and Y 2 at least one of -SO 2 - preferably represents an, both -SO 2 - and more preferably represents.
- the tris (sulfonyl) methide anion which is a non-nucleophilic counter anion is preferably a structure represented by the following general formula (AN-2).
- AN-2 X 3 , X 4 and X 5 each independently represent a fluorine atom or an alkyl group having a carbon number of 1 to 10).
- Each of X 3 , X 4 and X 5 independently has the same meaning as X 1 , and the preferred range is also the same.
- the tetraaryl borate anion which is a non-nucleophilic counter anion is preferably a compound represented by the following general formula ((AN-5).
- (AN-5) Ar 1 , Ar 2 , Ar 3 and Ar 4 each independently represent an aryl group.)
- Ar 1 , Ar 2 , Ar 3 and Ar 4 are each independently preferably an aryl group having 6 to 20 carbon atoms, more preferably an aryl group having 6 to 14 carbon atoms, and further preferably an aryl group having 6 to 10 carbon atoms preferable.
- the aryl group represented by Ar 1 , Ar 2 , Ar 3 and Ar 4 may have a substituent.
- halogen atom an alkyl group, an aryl group, an alkoxy group, a carbonyl group, a carbonyloxy group, a carbamoyl group, a sulfo group, a sulfonamide group, a nitro group and the like, with a halogen atom and an alkyl group being preferable
- a fluorine atom and an alkyl group are more preferable, and a fluorine atom and a perfluoroalkyl group having 1 to 4 carbon atoms are more preferable.
- Ar 1 , Ar 2 , Ar 3 and Ar 4 are each independently preferably a phenyl group having a halogen atom and / or an alkyl group having a halogen atom, and a phenyl group having a fluorine atom and / or an alkyl group having fluorine Is more preferred.
- the non-nucleophilic counter anion is also —B (CN) n1 (OR a ) 4-n1 (R a represents an alkyl group having 1 to 10 carbon atoms or an aryl group having 6 to 10 carbon atoms, and n1 is Preferably represents an integer of 1 to 4).
- R a as alkyl group having 1 to 10 carbon atoms preferably an alkyl group having 1 to 6 carbon atoms, more preferably an alkyl group having 1 to 4 carbon atoms.
- R a as the aryl group having 6 to 10 carbon atoms is preferably a phenyl group or a naphthyl group.
- n1 is preferably 1 to 3, and more preferably 1 to 2.
- the non-nucleophilic counter anion is also -PF 6 R P (6- n 2) - (R P represents a fluorinated alkyl group having 1 to 10 carbon atoms, and n 2 represents an integer of 1 to 6) Is preferred.
- R P is preferably an alkyl group having a fluorine atom of 1 to 6 carbon atoms, more preferably an alkyl group having 1 to 4 carbon atoms of fluorine, and still more preferably a perfluoroalkyl group of 1 to 3 carbon atoms.
- n2 is preferably an integer of 1 to 4, and more preferably 1 or 2.
- the non-nucleophilic counter anion is also -BF n3 R P (4-n3) - (R P represents a fluorinated alkyl group having 1 to 10 carbon atoms, and n3 represents an integer of 1 to 4) Is preferred.
- R P is preferably an alkyl group having a fluorine atom of 1 to 6 carbon atoms, more preferably an alkyl group having 1 to 4 carbon atoms of fluorine, and still more preferably a perfluoroalkyl group of 1 to 3 carbon atoms.
- the mass per molecule of the non-nucleophilic counter anion used in the present invention is preferably 100 to 1,000, more preferably 200 to 500.
- the dye multimer of the present invention may contain only one type of non-nucleophilic counter anion, or may contain two or more types.
- the dye structure in the present invention is a portion derived from the dye in the dye multimer (A), and is a dye obtained by removing a hydrogen atom from a specific dye capable of forming a dye structure (hereinafter also referred to as a dye compound). It refers to a structure that can be linked to a multimeric linkage (such as a polymer chain or a dendrimer core). The details of these will be described below.
- the dye structure in the dye multimer (A) is not particularly limited as long as it has a cationic site in the molecule, and various types including known dye structures can be applied.
- dipyrromethene dyes carbonium dyes (diphenylmethane dyes, triarylmethane dyes, xanthene dyes, acridine dyes, etc.), polymethine dyes (oxonol dyes, merocyanine dyes, arylidene dyes, styryl dyes, cyanine dyes, croconium dyes, etc.),
- dipyrromethene dyes carbonium dyes (diphenylmethane dyes, triarylmethane dyes, xanthene dyes, acridine dyes, etc.), polymethine dyes (oxonol dyes, merocyanine dyes, arylidene dyes, styryl dyes, cyanine dyes, croconium dyes, etc.),
- Subphthalocyanine dyes and dye structures derived from dyes selected from those metal complex dyes can be mentioned.
- a dye structure derived from a dye selected from dipyrromethene dyes, carbonium dyes and polymethine dyes is preferable from the viewpoint of color characteristics, and triarylmethane dyes, xanthene dyes, cyanine dyes, quinophthalone dyes, phthalocyanine dyes And a dye structure derived from a dye selected from subphthalocyanine dyes, more preferably a dye structure derived from a dye selected from dipyrromethene dyes, triarylmethane dyes, xanthene dyes, and cyanine dyes, selected from xanthene dyes Particularly preferred are dye structures derived from dyes. When such a dye is used, the heat resistance and the light resistance tend to be further improved.
- dye multimer (A) particularly preferred dyes (dye compounds) capable of forming a dye structure are described in detail.
- Dipyrromethene dye is a dye multimer having a partial structure derived from a dipyrromethene dye shown below as a partial structure of a dye moiety.
- a dipyrromethene compound and a dipyrromethene metal complex compound obtained from the dipyrromethene compound and a metal or a metal compound are preferable.
- a compound having a dipyrromethene structure is referred to as a dipyrromethene compound
- a complex in which a compound having a dipyrromethene structure is coordinated to a metal or a metal compound is referred to as a dipyrromethene metal complex compound.
- a dipyrromethene metal complex compound As a dipyrromethene metal complex compound, a dipyrromethene metal complex compound obtained from a dipyrromethene compound represented by the following general formula (M) and a metal or a metal compound and a tautomer thereof are preferable, and among them, the following general formula as a preferable embodiment
- M dipyrromethene metal complex compound represented by the following general formula (M)
- the dipyrromethene metal complex compound represented by (7) or the dipyrromethene metal complex compound represented by the following general formula (8) is mentioned, and the dipyrromethene metal complex compound represented by the general formula (8) is more preferable.
- dye structure which includes "specific complex” suitably as a pigment
- the following compounds form a cationic structure, but for example, a metal atom coordinated by the general formula (M) can form a cationic structure.
- R 4 to R 10 each independently represent a hydrogen atom or a monovalent substituent, provided that R 4 and R 9 do not combine with each other to form a ring. .
- the site is not particularly limited, but is preferably introduced at any one site of R 4 to R 9 in terms of synthetic compatibility, and any one of R 4 , R 6 , R 7 and R 9 is preferred. It is more preferably introduced in one, and further preferably introduced in any one of R 4 and R 9 .
- Examples of the monovalent substituent when R 4 to R 9 in the general formula (M) represent a monovalent substituent include the substituents listed in the section of the substituent group A described later.
- the monovalent substituent represented by R 4 to R 9 in the general formula (M) is a substitutable group, it may further have the substituent described for R 4 to R 9 If two or more substituents are present, those substituents may be the same or different.
- R 4 and R 5 in general formula (M) R 5 and R 6 , R 7 and R 8 , and R 8 and R 9 are each independently bonded to each other to be 5, 6, or 7 members Member may form a saturated or unsaturated ring. However, R 4 and R 9 do not combine with each other to form a ring.
- the formed 5-, 6-, and 7-membered rings are further substitutable groups, they may be substituted by the substituents described in R 4 to R 9 above, and two or more of them may be substituted. When substituted by a substituent, those substituents may be the same or different.
- R 4 and R 5 in the general formula (M), R 5 and R 6 , R 7 and R 8 , and R 8 and R 9 are each independently bonded to each other to have no substituent
- R 10 in the general formula (M) preferably represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group or a heterocyclic group.
- the above-mentioned halogen atom, alkyl group, aryl group and heterocyclic group have the same meanings as the halogen atom, alkyl group, aryl group and heterocyclic group of Substituent Group A described later, and the preferred ranges thereof are also the same.
- R 10 represents an alkyl group, an aryl group or a heterocyclic group
- the alkyl group, the aryl group and the heterocyclic group may be further substitutable groups.
- the substituents may be substituted with the substituents described in the section, and when substituted with two or more substituents, those substituents may be the same or different.
- the specific complex in the present invention is a complex in which the dipyrromethene compound represented by the general formula (M) described above or the tautomer thereof is coordinated to a metal or a metal compound.
- the metal or metal compound any metal or metal compound capable of forming a complex may be used, and a divalent metal atom, a divalent metal oxide, a divalent metal hydroxide, Or a divalent metal chloride is included.
- metals or metal compounds include metals such as Zn, Mg, Si, Sn, Rh, Pt, Pd, Mo, Pb, Cu, Ni, Co, Fe, etc., AlCl, InCl, FeCl, TiCl, and the like.
- metal chlorides such as SnCl 2 , SiCl 2 and GeCl 2 , metal oxides such as TiO and VO, and metal hydroxides such as Si (OH) 2 .
- VO is preferred, Zn, Mg, Si, Pt, Pd, Cu, Ni, Co or VO is more preferred, and Zn is particularly preferred.
- R 4 and R 9 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, a silyl group, a hydroxyl group, Cyano group, alkoxy group, aryloxy group, heterocyclic oxy group, acyl group, alkoxycarbonyl group, carbamoyl group, amino group, anilino group, heterocyclic amino group, carbonamide group, ureido group, imide group, alkoxycarbonylamino group , Aryloxycarbonylamino group, sulfonamide group, azo group, alkylthio group, arylthio group, heterocyclic thio group, alkylsulfonyl group, arylsulfonyl group, or phosphinoylamino group; R 5 and R 8 each represent Independently, hydrogen atom, halogen atom
- R 4 and R 9 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, a cyano group or an acyl group , Alkoxycarbonyl group, carbamoyl group, amino group, heterocyclic amino group, carbonamide group, ureido group, imide group, alkoxycarbonylamino group, aryloxycarbonylamino group, sulfonamide group, azo group, alkylsulfonyl group, arylsulfonyl R 5 and R 8 each independently represent an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, a cyano group, a nitro group, an acyl group, an alkoxycarbonyl group, an aryloxy group Carbonyl group, carbamoyl group, imide group, alkyl
- R 4 and R 9 each independently represent a hydrogen atom, an alkyl group, an aryl group, a heterocyclic group, an amino group, a heterocyclic amino group, A carbonamido group, a ureido group, an imide group, an alkoxycarbonylamino group, a sulfonamide group, an azo group, an alkylsulfonyl group, an arylsulfonyl group, or a phosphinoylamino group; and R 5 and R 8 are each independently An alkyl group, an aryl group, a heterocyclic group, a cyano group, an acyl group, an alkoxycarbonyl group, a carbamoyl group, an alkylsulfonyl group, or an arylsulfonyl group; R 6 and R 7 each independently represent a hydrogen atom or an alkyl group
- dipyrromethene metal complex compound represented by the general formula (7) or the general formula (8) described in detail below is also a particularly preferred embodiment of the dipyrromethene dye.
- Dipyrromethene Metal Complex Compound Represented by General Formula (7) One of the preferable embodiments of the dye structure in the dye multimer (A) is a dye structure derived from a dipyrromethene metal complex compound represented by the following general formula (7) It is.
- the following compounds form a cationic structure, but, for example, Ma of the general formula (7) can form a cationic structure.
- R 4 to R 9 each independently represent a hydrogen atom or a monovalent substituent, and R 10 represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group or a heterocyclic ring
- Ma represents a metal atom or a metal compound
- X 1 represents a group capable of binding to Ma
- X 2 represents a group capable of neutralizing the charge of Ma
- X 1 and X 2 represent And each other may form a 5-, 6-, or 7-membered ring together with Ma, provided that R 4 and R 9 do not combine with each other to form a ring).
- the dipyrromethene metal complex compound represented by General formula (7) contains a tautomer.
- the introduction site of is not particularly limited, but is preferably introduced at any one of R 4 to R 9 in terms of synthetic compatibility, and any of R 4 , R 6 , R 7 and R 9 It is more preferred to be introduced in one or more, and further preferable to be introduced in any one of R 4 and R 9 .
- any one of R 4 to R 10 , X 1 and X 2 in the above-mentioned general formula (7) a method of giving an alkali-soluble group to two or more substituents can be used.
- substituents any one of R 4 to R 9 and X 1 is preferable, any one of R 4 , R 6 , R 7 and R 9 is more preferable, and any one of R 4 and R 9 is more preferable.
- the dipyrromethene metal complex compound represented by the general formula (7) may have a functional group other than the alkali-soluble group, as long as the effect of the present invention is not impaired.
- R 4 ⁇ R 9 medium in the general formula (7) has the same meaning as R 4 ⁇ R 9 in the general formula (M), preferable embodiments thereof are also the same.
- Ma represents a metal atom or a metal compound.
- the metal atom or metal compound may be any metal atom or metal compound capable of forming a complex, and is a divalent metal atom, a divalent metal oxide, a divalent metal hydroxide, or It contains divalent metal chlorides.
- metal oxides such as TiO, V ⁇ O, and metal hydroxides such as Si (OH) 2 .
- Fe, Zn, Mg, Si, Pt, Pd, Mo, Mn, Cu as a metal atom or a metal compound, from the viewpoints of stability of the complex, spectral characteristics, heat resistance, light resistance, and production suitability.
- Zn are particularly preferred.
- R 10 represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group or a heterocyclic group, preferably a hydrogen atom.
- X 1 may be any group as long as it can be bonded to Ma, and specifically, water, alcohols (eg, methanol, ethanol, propanol), etc. Chelate] ([1] Sakaguchi Takeichi and Ueno Keihei (1995: Minami-Edo), [2] (1996), [3] (1997), etc.). Among them, in terms of production, water, a carboxylic acid compound, and an alcohol are preferable, and water and a carboxylic acid compound are more preferable.
- Examples of the “group neutralizing the charge of Ma” represented by X 2 in the general formula (7) include, for example, a halogen atom, a hydroxyl group, a carboxylic acid group, a phosphoric acid group, a sulfonic acid group and the like. From the viewpoint of production, halogen atoms, hydroxyl groups, carboxylic acid groups and sulfonic acid groups are preferable, and hydroxyl groups and carboxylic acid groups are more preferable.
- X 1 and X 2 may be combined with each other to form a 5-, 6-, or 7-membered ring with Ma.
- the formed 5-, 6-, and 7-membered rings may be saturated or unsaturated rings.
- the 5-, 6-, and 7-membered rings may be composed of only carbon atoms, and form a heterocycle having at least one atom selected from nitrogen atom, oxygen atom, and / or sulfur atom. It may be done.
- R 4 to R 9 are each independently a preferred embodiment described in the explanation of R 4 to R 9
- R 10 is described in the explanation of R 10 Ma is Zn, Cu, Co, or VOO
- X 1 is water or a carboxylic acid compound
- X 2 is a hydroxyl group or a carboxylic acid group
- X 1 and X 2 are And may be bonded to each other to form a 5- or 6-membered ring.
- Dipyrromethene Metal Complex Compound Represented by General Formula (8) One of the preferable embodiments of the dye structure in the dye multimer (A) is derived from the dipyrromethene metal complex compound represented by the following general formula (8) It is a pigment structure.
- the following compounds form a cationic structure, but, for example, Ma of the general formula (8) can form a cationic structure.
- each of R 11 and R 16 independently represents an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, an alkoxy group, an aryloxy group, an alkylamino group, an arylamino group or a heterocyclic ring
- R 12 to R 15 each independently represent a hydrogen atom or a substituent
- R 17 represents a hydrogen atom, a halogen atom, an alkyl group, an aryl group or a heterocyclic group
- Ma is an amino group
- the site to introduce the dipyrromethene metal complex compound represented by the general formula (8) into structural units represented by the general formulas (A) to (C) described later and the polymer represented by the general formula (D) is There is no particular limitation as long as the effects of the present invention are not impaired, but any one of R 11 to R 17 , X 1 and Y 1 to Y 2 is preferable. Among these, it is preferable that any one of R 11 to R 16 and X 1 be introduced, and more preferably any of R 11 , R 13 , R 14 and R 16 in terms of synthetic compatibility. It is an embodiment inserted in one, more preferably an embodiment inserted in any one of R 11 and R 16 .
- the dye multimer (A) has an alkali-soluble group
- a method for introducing the above-mentioned alkali-soluble group when using a dye monomer or a structural unit having an alkali-soluble group, in the above general formula (8)
- a method can be used in which an alkali-soluble group is provided to any one or two or more substituents of R 11 to R 17 , X 1 , and Y 1 to Y 2 .
- substituents any one of R 11 to R 16 and X 1 is preferable, any one of R 11 , R 13 , R 14 and R 16 is more preferable, and any one of R 11 and R 16 is more preferable.
- the dipyrromethene metal complex compound represented by the general formula (8) may have a functional group other than the alkali-soluble group as long as the effect of the present invention is not impaired.
- R 12 to R 15 have the same meanings as R 5 to R 8 in the general formula (M), and preferred embodiments are also the same.
- R 17 has the same meaning as R 10 in the general formula (M), and preferred embodiments are also the same.
- Ma is synonymous with Ma in the said General formula (7), and its preferable range is also the same.
- an alkoxycarbonyl group, an aryloxycarbonyl group, a carbamoyl group, an alkylsulfonyl group, an arylsulfonyl group, a nitrile Group, imide group, or carbamoylsulfonyl group is preferable, alkoxycarbonyl group, aryloxycarbonyl group, carbamoyl group, alkylsulfonyl group, nitrile group, imide group, carbamoylsulfonyl group is more preferable, alkoxycarbonyl group, aryloxycarbonyl group A carbamoyl group, a nitrile group, an imide group and a carbamoylsulfonyl group are more preferable, and an alkoxycarbonyl group, an aryloxycarbonyl group and a carbamoyl group are particularly preferable
- a substituted or unsubstituted alkyl group, a substituted or unsubstituted aryl group, a substituted or unsubstituted heterocyclic group is preferred, and a substituted or unsubstituted alkyl group, substituted or unsubstituted is more preferable It is a substituted aryl group.
- specific examples of the more preferable alkyl group, aryl group and heterocyclic group can be the same as the specific examples listed for R 6 and R 7 in the general formula (M).
- R 11 and R 16 each represent an alkyl group (preferably a linear, branched or cyclic alkyl group having 1 to 36 carbon atoms, more preferably 1 to 12 carbon atoms, Group, ethyl group, propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, hexyl group, 2-ethylhexyl group, dodecyl group, cyclopropyl group, cyclopentyl group, cyclohexyl group, 1-adamantyl group), alkenyl Group (preferably an alkenyl group having a carbon number of 2 to 24, more preferably a carbon number of 2 to 12, and examples thereof include a vinyl group, an allyl group and a 3-buten-1-yl group) and an aryl group (preferably a carbon number of 6 to 6).
- alkyl group preferably a linear, branched or cyclic alkyl group having 1 to 36 carbon
- an aryl group having 6 to 18 carbon atoms for example, a phenyl group, a naphthyl group
- a heterocyclic group preferably having a carbon number of 1 to 24, more preferably Or a heterocyclic group having 1 to 12 carbon atoms, for example, 2-thienyl group, 4-pyridyl group, 2-furyl group, 2-pyrimidinyl group, 2-pyridyl group, 2-benzothiazolyl group, 1-imidazolyl group, 1-pyrazolyl group, benzotriazol-1-yl group
- alkoxy group preferably having 1 to 36 carbon atoms, more preferably 1 to 18 carbon atoms
- examples thereof include a methoxy group, an ethoxy group, and a propyloxy group, For example, butoxy, hexyloxy, 2-ethylhexyloxy, dodecyloxy, cyclohexyloxy), aryloxy (preferably having 6 to 24 carbon atoms,
- an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, an alkylamino group, an arylamino group and a heterocyclic amino group are preferable, and an alkyl group, an alkenyl group, an aryl group and a hetero
- the cyclic group is more preferable, the alkyl group, the alkenyl group and the aryl group are more preferable, and the alkyl group is particularly preferable.
- an alkyl group, an alkenyl group, an aryl group, a heterocyclic group, an alkoxy group, an aryloxy group, an alkylamino group, an arylamino group or a heterocyclic amino group represented by R 11 and R 16 is And when it is a further substitutable group, it may be substituted by the substituents described in the section of Substituent Group A described later, and when it is substituted by two or more substituents, those groups The substituents may be the same or different.
- X 2 and X 3 each independently represent NR, a nitrogen atom, an oxygen atom or a sulfur atom.
- R is a hydrogen atom, an alkyl group (preferably a linear, branched or cyclic alkyl group having 1 to 36 carbon atoms, more preferably 1 to 12 carbon atoms, and examples thereof include a methyl group, an ethyl group, Propyl group, isopropyl group, butyl group, isobutyl group, tert-butyl group, hexyl group, 2-ethylhexyl group, dodecyl group, cyclopropyl group, cyclopentyl group, cyclohexyl group, 1-adamantyl group, alkenyl group (preferably carbon)
- the alkenyl group is preferably an alkenyl group having a number of 2 to 24, more preferably 2 to 12 carbon atoms, and for example, a vinyl group, an allyl group or
- alkylsulfonyl group preferably alkylsulfonyl group having 1 to 24 carbon atoms, more preferably 1 to 18 carbon atoms, for example, methylsulfonyl group, ethylsulfonyl group, isopropylsulfonyl group, cyclohexylsulfonyl group
- An arylsulfonyl group preferably having 6 to 24 carbon atoms, more preferably 6 to 18 carbon atoms
- Arylsulfonyl group represented, for example, a phenylsulfonyl group, a naphthylsulfonyl group).
- Y 1 and Y 2 each independently represent NR C , a nitrogen atom or a carbon atom
- R C has the same meaning as R in X 2 and X 3 above, and preferred embodiments are also It is similar.
- R 11 and Y 1 are bonded to each other to form a 5-membered ring (for example, cyclopentane ring, pyrrolidine ring, tetrahydrofuran ring, dioxolane ring, tetrahydrothiophene ring, pyrrole ring, furan ring) together with carbon atoms Thiophene ring, indole ring, benzofuran ring, benzothiophene ring), 6-membered ring (eg, cyclohexane ring, piperidine ring, piperazine ring, morpholine ring, tetrahydropyran ring, dioxane ring, pentamethylene sulfide ring, dithian ring, benzene ring, A piperidine ring, a piperazine ring, a pyridazine ring, a quinoline ring, a quinazoline ring,
- R 16 and Y 2 are mutually bonded to form a 5-membered ring (for example, cyclopentane ring, pyrrolidine ring, tetrahydrofuran ring, dioxolane ring, tetrahydrothiophene ring, pyrrole ring, furan ring) together with carbon atoms , Thiophene ring, indole ring, benzofuran ring, benzothiophene ring), 6-membered ring (eg, cyclohexane ring, piperidine ring, piperidine ring, piperazine ring, morpholine ring, tetrahydropyran ring, dioxane ring, pentamethylene sulfide ring, dithiane ring, benzene ring) , A piperidine ring, a piperazine ring, a pyridazine ring, a quinoline
- R 11 and R 16 are each independently preferably a monovalent substituent having a steric parameter -Es' value of 1.5 or more, and is 2.0 or more. Is more preferable, 3.5 or more is further preferable, and 5.0 or more is particularly preferable.
- the steric parameter -Es' value is a parameter representing the steric bulk of the substituent, and it is described in the literature (JA Macphee, et al, Tetrahedron, Vol. 34, pp 3553 to 3562, Toshio Fujita, Chemical special edition 107 And Druck Design, published Feb. 20, 1986 (Chem. Dojin)-use the Es' value.
- X 1 represents a group capable of binding to Ma, and specific examples thereof include the same groups as X 1 in the above general formula (7), and preferred embodiments are also the same.
- a represents 0, 1 or 2;
- X 2 is NR (R is a hydrogen atom, an alkyl group ), Nitrogen atom or oxygen atom,
- X 3 is NR (R is a hydrogen atom or alkyl group), or oxygen atom
- Y 1 is NR C ( RC is a hydrogen atom or alkyl group), nitrogen atom, or a carbon atom, Y 2 is a nitrogen atom or a carbon atom, each independently R 11 and R 16 are an alkyl group, an aryl group, a heterocyclic group, an alkoxy group or alkylamino group
- X 1 Is a group bonded via an oxygen atom, and a is 0 or 1 R 11 and Y
- R 12 to R 15 are each independently the preferred embodiment described in the explanation of R 5 to R 8 in the compound represented by the general formula (M)
- R 17 is the preferred embodiment described in the description of R 10 in the above general formula (M)
- Ma is Zn
- X 2 and X 3 are oxygen atoms
- Y 1 is NH And Y 2 is a nitrogen atom
- R 11 and R 16 are each independently an alkyl group, an aryl group, a heterocyclic group, an alkoxy group, or an alkylamino group
- X 1 is a group bonded via an oxygen atom And a is 0 or 1.
- R 11 and Y 1 may be bonded to each other to form a 5- or 6-membered ring, or R 16 and Y 2 may be bonded to each other to form a 5- or 6-membered ring.
- the molar absorption coefficient of the dipyrromethene metal complex compound represented by the above general formula (7) and the general formula (8) is preferably as high as possible from the viewpoint of coloring power.
- the maximum absorption wavelength ⁇ max is preferably 520 nm to 580 nm, and more preferably 530 nm to 570 nm, from the viewpoint of improving color purity. By being in this region, a color filter having good color reproducibility can be produced using the coloring composition of the present invention.
- the dye multimer (A) having a dye structure derived from a dipyrromethene dye preferably has an absorbance of 1,000 times or more of the maximum absorption wavelength ( ⁇ max) relative to the absorbance at 450 nm, and is 10,000 times or more Is more preferably, and more preferably 100,000 times or more.
- ⁇ max the maximum absorption wavelength
- the maximum absorption wavelength and the molar absorption coefficient are measured by a spectrophotometer cary 5 (manufactured by Varian).
- the melting point of the dipyrromethene metal complex compound represented by the general formula (7) and the general formula (8) should not be too high from the viewpoint of solubility.
- the dipyrromethene metal complex compounds represented by the general formula (7) and the general formula (8) are disclosed in U.S. Patent Nos. 4,774,339, 5,433,896, and JP-A-2001-240761. No. 2002-155052, Japanese Patent No. 3614586, Aust. J. Chem, 1965, 11, 1835-1845, J. Am. H. Boger et al, Heteroatom Chemistry, Vol. 1, No. 5, 389 (1990) and the like. Specifically, the method described in paragraphs [0131] to [0157] of JP-A-2008-292970 can be applied.
- (PM-8) and (PM-10) are particularly preferable from the viewpoint of color characteristics and heat resistance.
- Triarylmethane Dye One of the aspects of the dye multimer according to the present invention is one having a partial structure derived from a triarylmethane dye (triarylmethane compound).
- the dye multimer (A) includes a dye multimer having a partial structure derived from a compound (triarylmethane compound) represented by the following general formula (TP) as a partial structure of a dye moiety.
- the triarylmethane compound is a generic term for compounds having a dye moiety containing a triarylmethane skeleton in the molecule.
- Rtp 1 to Rtp 4 each independently represent a hydrogen atom, an alkyl group or an aryl group.
- Rtp 5 is a hydrogen atom, an alkyl group, an aryl group or NRtp 9
- Rtp 10 Rtp 9 and Rtp 10 represent a hydrogen atom, an alkyl group or an aryl group
- Rtp 6 , Rtp 7 and Rtp 8 represent a substituent
- a, b and c each represent an integer of 0 to 4.
- a And when b and c are 2 or more, Rtp 6 , Rtp 7 and Rtp 8 may be respectively linked to form a ring, and
- X ⁇ represents a non-nucleophilic anion.
- Rtp 1 to Rtp 6 a hydrogen atom, a linear or branched alkyl group having 1 to 5 carbon atoms, and a phenyl group are preferable.
- Rtp 5 is preferably a hydrogen atom or NRtp 9 Rtp 10 , particularly preferably NRtp 9 Rtp 10 .
- Rtp 9 and Rtp 10 are preferably a hydrogen atom, a linear or branched alkyl group having 1 to 5 carbon atoms, or a phenyl group.
- Rtp 6 , Rtp 7 and Rtp 8 the substituents listed in the section of Substituent Group A to be described later can be used, and in particular, a linear or branched alkyl group having 1 to 5 carbon atoms, An alkenyl group having 1 to 5 carbon atoms, an aryl group having 6 to 15 carbon atoms, a carboxyl group or a sulfo group is preferable, and a linear or branched alkyl group having 1 to 5 carbon atoms, an alkenyl group having 1 to 5 carbon atoms, phenyl Groups or carboxyl groups are more preferred.
- Rtp 6 and Rtp 8 are preferably an alkyl group having 1 to 5 carbon atoms
- Rtp 7 is preferably an alkenyl group (particularly preferably a phenyl group in which two adjacent alkenyl groups are linked), a phenyl group or a carboxyl group.
- Each of a, b and c independently represents an integer of 0 to 4.
- a and b are each preferably 0 or 1
- c is preferably an integer of 0 to 2.
- X - represents a non-nucleophilic counter anion (same below unless otherwise stated).
- (tp-4), (tp-5), (tp-6) and (tp-8) are particularly preferable from the viewpoint of color characteristics and heat resistance.
- a preferred embodiment of the dye multimer in the present invention is one having a partial structure derived from a xanthene dye (xanthene compound).
- the dye multimer (A) includes a dye multimer having a partial structure derived from a xanthene compound represented by the following general formula (J) as a partial structure of a dye moiety.
- R 81 , R 82 , R 83 and R 84 each independently represent a hydrogen atom or a monovalent substituent, and R 85 each independently represents a monovalent substituent.
- m is .
- X represents an integer of 0-5 - represents a non-nucleophilic counter anion).
- R 81 to R 84 and R 85 in the general formula (J) are the same as the substituents mentioned in the section of the substituent group A described later.
- R 81 and R 82 in the general formula (J), R 83 and R 84 , and R 85 when m is 2 or more are each independently bonded to each other to be 5-membered, 6-membered or 7-membered saturated It may form a ring or a 5-, 6- or 7-membered unsaturated ring.
- the 5-, 6- or 7-membered ring to be formed is a further substitutable group, it may be substituted by the substituents described for R 81 to R 85 above, and two or more substituents may be substituted.
- substituted by groups the substituents may be the same or different.
- R 81 and R 82 in the above general formula (J), R 83 and R 84 , and R 85 when m is 2 or more are each independently bonded to each other and have no substituent, 5-membered
- the 5-, 6- and 7-membered saturated ring or 5-membered, 6-membered and 7-membered -Membered unsaturated ring includes, for example, pyrrole ring, furan ring, thiophene ring, pyrazole ring, imidazole ring, triazole ring, oxazole ring, thiazole ring, pyrrolidine ring, piperidine ring, cyclopentene ring, cyclohexene ring, benzene ring, pyridine A ring, a pyrazine ring and a pyridazine ring can be mentioned
- R 82 and R 83 are preferably a hydrogen atom or a substituted or unsubstituted alkyl group
- R 81 and R 84 are preferably a substituted or unsubstituted alkyl group or a phenyl group
- R 85 is preferably a halogen atom, a linear or branched alkyl group having 1 to 5 carbon atoms, a sulfo group, a sulfonamido group, a carboxyl group or an amide group, and a sulfo group, a sulfonamido group, a carboxyl group, More preferably, it is an amido group.
- R 85 is preferably bonded to the adjacent part of the carbon linked to the xanthene ring.
- the substituent which the phenyl group of R 81 and R 84 has is particularly preferably a hydrogen atom, a halogen atom, a linear or branched alkyl group having 1 to 5 carbon atoms, a sulfo group, a sulfonamide group or a carboxyl group.
- the compound having a xanthene skeleton represented by the general formula (J) can be synthesized by a method described in the literature. Specifically, methods described in Tetrahedron Letters, 2003, vol. 44, No. 23, pages 4355 to 4360, Tetrahedron, 2005, vol. 61, No. 12, pages 3097 to 3106, etc. Can be applied.
- the dye multimer (A) includes a dye multimer having a partial structure derived from a compound (cyanine compound) represented by the following general formula (PM) as a partial structure of a dye moiety.
- the cyanine compound is a generic term for compounds having a dye moiety containing a cyanine skeleton in the molecule.
- the ring Z1 and the ring Z2 each independently represent a heterocyclic ring which may have a substituent.
- L represents an integer of 0 or more and 3 or less.
- X ⁇ represents a non-nucleophilic pair Represents an anion.
- ring Z1 and ring Z2 each independently include oxazole, benzoxazole, oxazoline, thiazole, thiazoline, benzothiazole, indolenine, benzoindolenine, 1,3-thiadiazine and the like.
- the substituents that may be taken by ring Z1 and ring Z2 are the same as the substituents listed in the section of substituent group A described later.
- X - represents a non-nucleophilic counter anion.
- the compound represented by Formula (PM) is preferably a compound represented by the following Formula (PM-2).
- ring Z 5 and the ring Z 6 each independently represent a benzene ring which may have a substituent or a naphthalene ring which may have a substituent.
- - represents a non-nucleophilic counter anion).
- n represents an integer of 0 or more and 3 or less.
- a 1 and A 2 independently represents an oxygen atom, a sulfur atom, a selenium atom, a carbon atom or a nitrogen atom.
- R 1 and R 2 each independently represent a monovalent aliphatic hydrocarbon group having 1 to 20 carbon atoms which may have a substituent.
- R 3 and R 4 each independently represent a hydrogen atom or a monovalent aliphatic hydrocarbon group having 1 to 6 carbon atoms, or one R 3 and one R 4 are formed together And a divalent aliphatic hydrocarbon group having 2 to 6 carbon atoms.
- Each of a and b independently represents an integer of 0 or more and 2 or less.
- the structures represented by (pm-1) to (pm-6) and (pm-9) are preferable, and among them, from the viewpoint of color characteristics and heat resistance, (pm-1) and (pm)
- the dye structure represented by -2) is particularly preferred.
- the dye multimer (A) includes a dye multimer having a partial structure derived from a subphthalocyanine dye represented by the following general formula (SP) as a partial structure of a dye moiety.
- SP general formula
- the subphthalocyanine dye is a generic term for compounds having a dye moiety containing a subphthalocyanine skeleton in the molecule.
- the following compounds form a cationic structure, but, for example, a boron atom of the general formula (SP) can form a cationic structure.
- Z 1 to Z 12 each independently represent a hydrogen atom, an alkyl group, an aryl group, a hydroxy group, a mercapto group, an amino group, an alkoxy group, an aryloxy group or a thioether group.
- X is a non-nucleophilic counter anion
- the alkyl group which Z 1 to Z 12 in general formula (SP) may have represents a linear or branched substituted or unsubstituted alkyl group.
- Z 1 to Z 12 in particular, a carbon number of 1 to 20 is preferable, and a carbon number of 1 to 10 is more preferable.
- the substituent which may be possessed by Z 1 to Z 12 include the substituents mentioned in the section of Substituent Group A to be described later, and a fluorine atom, a hydroxy group and a mercapto group are particularly preferable.
- Substituent group A The substituent which the dye multimer may have includes a halogen atom, an alkyl group, a cycloalkyl group, an alkenyl group, a cycloalkenyl group, an alkynyl group, an aryl group, a heterocyclic group, a cyano group, a hydroxyl group, a nitro group, Carboxyl group, alkoxy group, aryloxy group, silyloxy group, heterocyclic oxy group, acyloxy group, carbamoyloxy group, amino group (including alkylamino group and anilino group), acylamino group, aminocarbonylamino group, alkoxycarbonylamino group Aryloxycarbonylamino group, sulfamoylamino group, alkyl or arylsulfonylamino group, mercapto group, alkylthio group, arylthio group, heterocyclic thio group,
- a halogen atom eg, fluorine atom, chlorine atom, bromine atom, iodine atom
- linear or branched alkyl group linear or branched substituted or unsubstituted alkyl group, preferably alkyl group having 1 to 30 carbon atoms
- alkyl group having 1 to 30 carbon atoms For example, methyl, ethyl, n-propyl, isopropyl, tert-butyl, n-octyl, 2-chloroethyl, 2-cyanoethyl, 2-ethylhexyl
- a cycloalkyl group preferably having a carbon number of 3 to 30
- An unsubstituted cycloalkyl group such as cyclohexyl and cyclopentyl can be mentioned, and a polycycloalkyl group such as a bicycloalkyl group (preferably a substituted or unsubstituted bicycloal
- a linear or branched alkenyl group (a linear or branched substituted or unsubstituted alkenyl group, preferably an alkenyl group having a carbon number of 2 to 30, for example, vinyl, allyl, prenyl, geranyl, oleyl), cycloalkenyl Group (preferably, a substituted or unsubstituted cycloalkenyl group having a carbon number of 3 to 30, and examples thereof include 2-cyclopenten-1-yl and 2-cyclohexen-1-yl; a polycycloalkenyl group such as bicyclo)
- An alkenyl group (preferably a substituted or unsubstituted bicycloalkenyl group having a carbon number of 5 to 30), for example, bicyclo [2,2,1] hept-2-en-1-yl, bicyclo [2,2,2] Octo-2-en-4-yl) or a tricycloalkenyl group, particularly preferably a monocyclic cycl
- An aryl group (preferably a substituted or unsubstituted aryl group having a carbon number of 6 to 30, for example, phenyl, p-tolyl, naphthyl, m-chlorophenyl, o-hexadecanoylaminophenyl), a heterocyclic group (preferably 5 to 6) 7-membered substituted or unsubstituted, saturated or unsaturated, aromatic or non-aromatic, monocyclic or fused heterocyclic group, more preferably, the ring constituting atoms are selected from carbon atoms, nitrogen atoms and sulfur atoms And a heterocyclic group having at least one hetero atom of any of nitrogen atom, oxygen atom and sulfur atom, more preferably a 5- or 6-membered aromatic heterocyclic group having 3 to 30 carbon atoms.
- An alkoxy group preferably, a substituted or unsubstituted alkoxy group having a carbon number of 1 to 30; for example, methoxy, ethoxy, isopropoxy, tert-butoxy, n-octyloxy, 2-methoxyethoxy
- an aryloxy group preferably Is a substituted or unsubstituted aryloxy group having a carbon number of 6 to 30, and examples thereof include phenoxy, 2-methylphenoxy, 2,4-di-tert-amylphenoxy, 4-tert-butylphenoxy, 3-nitrophenoxy, 2-tetradecanoylaminophenoxy
- silyloxy group preferably a silyloxy group having 3 to 20 carbon atoms, for example, trimethylsilyloxy, tert-butyldimethylsilyloxy
- heterocyclic oxy group preferably a carbon number of 2 to 20 30 substituted or unsubstituted heterocyclic oxy groups , Hetero
- An acyloxy group (preferably a formyloxy group, a substituted or unsubstituted alkylcarbonyloxy group having 2 to 30 carbon atoms, a substituted or unsubstituted arylcarbonyloxy group having 6 to 30 carbon atoms, for example, formyloxy, acetyloxy , Pivaloyloxy, stearoyloxy, benzoyloxy, p-methoxyphenylcarbonyloxy), carbamoyloxy group (preferably, a substituted or unsubstituted carbamoyloxy group having 1 to 30 carbon atoms, for example, N, N-dimethylcarbamoyloxy, N, N-diethylcarbamoyloxy, morpholinocarbonyloxy, N, N-di-n-octylaminocarbonyloxy, Nn-octylcarbamoyloxy), alkoxycarbonyloxy group (preferably having a carbon number
- Amino group preferably, amino group, substituted or unsubstituted alkylamino group having 1 to 30 carbon atoms, substituted or unsubstituted arylamino group having 6 to 30 carbon atoms, heterocyclic amino group having 0 to 30 carbon atoms
- amino, methylamino, dimethylamino, anilino, N-methyl-anilino, diphenylamino, N-1,3,5-triazin-2-ylamino an acylamino group (preferably a formylamino group, carbon number) 1-30 substituted or unsubstituted alkylcarbonylamino group, substituted or unsubstituted arylcarbonylamino group having 6 to 30 carbon atoms, and examples thereof include formylamino, acetylamino, pivaloylamino, lauroylamino, benzoylamino, and the like.
- amy A carbonylamino group preferably, a substituted or unsubstituted aminocarbonylamino group having 1 to 30 carbon atoms, for example, carbamoylamino, N, N-dimethylaminocarbonylamino, N, N-diethylaminocarbonylamino, morpholinocarbonylamino
- An alkoxycarbonylamino group preferably a substituted or unsubstituted alkoxycarbonylamino group having a carbon number of 2 to 30, and examples thereof include methoxycarbonylamino, ethoxycarbonylamino, tert-butoxycarbonylamino, n-octadecyloxycarbonylamino, N-methyl- Methoxycarbonylamino),
- An aryloxycarbonylamino group (preferably, a substituted or unsubstituted aryloxycarbonylamino group having 7 to 30 carbon atoms, for example, phenoxycarbonylamino, p-chlorophenoxycarbonylamino, mn-octyloxyphenoxycarbonylamino)
- a sulfamoylamino group (preferably a substituted or unsubstituted sulfamoylamino group having 0 to 30 carbon atoms, for example, sulfamoylamino, N, N-dimethylaminosulfonylamino, Nn-octylamino A sulfonylamino), an alkyl or arylsulfonylamino group (preferably a substituted or unsubstituted alkylsulfonylamino group having 1 to 30 carbon atoms, a substituted or unsubstituted aryls
- alkylthio group preferably a substituted or unsubstituted alkylthio group having 1 to 30 carbon atoms, for example, methylthio, ethylthio, n-hexadecylthio
- an arylthio group preferably a substituted or unsubstituted arylthio group having 6 to 30 carbon atoms
- heterocyclic thio group preferably a substituted or unsubstituted heterocyclic thio group having a carbon number of 2 to 30
- the heterocyclic part is the aforementioned heterocyclic group
- the heterocyclic moiety described in is preferred, for example, 2-benzothiazolylthio, 1-phenyltetrazol-5-ylthio), a sulfamoyl group (preferably a substituted or unsubstituted sulfamo
- An alkyl or arylsulfinyl group (preferably a substituted or unsubstituted alkylsulfinyl group having 1 to 30 carbon atoms, a 6 to 30 substituted or unsubstituted arylsulfinyl group, for example, methylsulfinyl, ethylsulfinyl, phenylsulfinyl, p-methylphenylsulfinyl), an alkyl or arylsulfonyl group (preferably, a substituted or unsubstituted alkylsulfonyl group having 1 to 30 carbon atoms, a 6 to 30 substituted or unsubstituted arylsulfonyl group, for example, methylsulfonyl) , Ethylsulfonyl, phenylsulfonyl, p-methylphenylsulfonyl), an acyl group (preferably a for
- An alkoxycarbonyl group (preferably a substituted or unsubstituted alkoxycarbonyl group having a carbon number of 2 to 30, for example, methoxycarbonyl, ethoxycarbonyl, tert-butoxycarbonyl, n-octadecyloxycarbonyl), a carbamoyl group (preferably, a carbon number 1 to 30 substituted or unsubstituted carbamoyl, such as carbamoyl, N-methylcarbamoyl, N, N-dimethylcarbamoyl, N, N-di-n-octylcarbamoyl, N- (methylsulfonyl) carbamoyl), aryl or hetero
- a ring azo group (preferably a substituted or unsubstituted arylazo group having 6 to 30 carbon atoms, a substituted or unsubstituted heterocyclic azo group having 3 to 30 carbon atoms (the hetero ring
- a phosphinyl oxy group (preferably a substituted or unsubstituted phosphinyl oxy group having 2 to 30 carbon atoms, for example, diphenoxy phosphinyl oxy, dioctyl oxy phosphinyl oxy), a phosphinyl amino group (for example Preferably, it is a substituted or unsubstituted phosphinylamino group having 2 to 30 carbon atoms, for example, dimethoxyphosphinylamino, dimethylaminophosphinylamino), a silyl group (preferably having a carbon number of 3 to 30) Or unsubstituted silyl groups such as trimethylsilyl, tert-butyldimethylsilyl, phenyldimethylsilyl).
- those having a hydrogen atom may have a hydrogen atom portion in the functional group substituted by any of the above groups.
- the functional group that can be introduced as a substituent include an alkylcarbonylaminosulfonyl group, an arylcarbonylaminosulfonyl group, an alkylsulfonylaminocarbonyl group, and an arylsulfonylaminocarbonyl group, and specifically, methylsulfonylaminocarbonyl, p-Methylphenylsulfonylaminocarbonyl, acetylaminosulfonyl, benzoylaminosulfonyl group can be mentioned.
- the dye multimer (A) used in the coloring composition of the present invention is not particularly limited, and includes at least one of the repeating units represented by the following general formula (A) and the general formula (C) It is preferable that it is the pigment
- the repeating unit represented by the general formula (A) may be contained in one kind or in two or more kinds in one kind of dye multimer. The same applies to general formulas (C) to (D). Furthermore, as described later, other repeating units may be included.
- the dye multimer represented by formula (A) is preferably contained. These will be sequentially described.
- X 1 represents a group forming a main chain. That is, it refers to a portion that forms a repeating unit corresponding to the main chain formed by the polymerization reaction.
- the X 1 is not particularly limited as long as it is a linking group formed from a known polymerizable monomer, but particularly the linking groups represented by the following (XX-1) to (X-24) are preferable, (XX (Meth) acrylic linking chains represented by -1) and (XX-2), styrenic linking chains represented by (XX-10) to (XX-17), and (XX-24) Is more preferably selected from vinyl-based linking chains, (meth) acrylic linking chains represented by (XX-1) and (XX-2), and styrenic linking chains represented by (XX-11) Is more preferred.
- L 1 represents a single bond or a divalent linking group.
- L 1 is more preferably a single bond or an alkylene group, and more preferably a single bond or-(CH 2 ) n-(n is an integer of 1 to 5).
- each R independently represents a hydrogen atom, an alkyl group, an aryl group or a heterocyclic group.
- the divalent linking group represented by L 1 may be a group capable of ionically bonding or coordinating with DyeI. In this case, either an anionic group or a cationic group may be used.
- Examples of the anionic group -COO -, -PO 3 H - , -SO 3 -, -SO 3 NH -, -SO 3 N - CO- and the like, -COO -, -PO 3 H - , - SO 3 - is preferred.
- Examples of the cationic group include substituted or unsubstituted onium cations (eg, ammonium, pyridinium, imidazolium, phosphonium and the like), with preference given to ammonium cations.
- L 1 When L 1 has a group capable of forming an ionic bond or a coordinate bond with Dye I, L 1 is an anion moiety (—COO ⁇ , —SO 3 ⁇ , —O ⁇ , etc.) possessed by Dye I or a cation moiety (above) It can bind to onium cations, metal cations, etc.).
- DyeI represents a dye structure derived from the dye compound described above.
- the dye multimer having a repeating unit represented by the general formula (A) is prepared by addition polymerization of a monomer having a dye residue (1), (2) an isocyanate group, an acid anhydride group or an epoxy group It can be synthesized by a method of reacting a polymer having a highly reactive functional group with a dye having a functional group (hydroxyl group, primary or secondary amino group, carboxyl group, etc.) capable of reacting with the highly reactive group.
- known addition polymerization (radical polymerization, anionic polymerization, cationic polymerization) can be applied to the addition polymerization, among them, synthesis by radical polymerization is particularly preferable because the reaction conditions can be relaxed and the dye structure is not decomposed.
- the dye multimer having the repeating unit represented by the general formula (A) in the present invention is obtained by radical polymerization using a dye monomer having an ethylenically unsaturated bond from the viewpoint of heat resistance. It is preferably a radical polymer.
- L 3 represents a single bond or a divalent linking group.
- m represents a substituted
- Dye multimers having a repeating unit represented by formula (C) are synthesized by sequential polymerization.
- Sequential polymerization includes polyaddition (eg, reaction of diisocyanate compound with diol, reaction of diepoxy compound with dicarboxylic acid, reaction of tetracarboxylic acid dianhydride with diol, etc.) and polycondensation (eg, dicarboxylic acid) And the reaction of a diol, and the reaction of a dicarboxylic acid and a diamine.
- polyaddition reaction eg, reaction of diisocyanate compound with diol, reaction of diepoxy compound with dicarboxylic acid, reaction of tetracarboxylic acid dianhydride with diol, etc.
- polycondensation eg, dicarboxylic acid
- L 4 represents an n-valent linking group.
- N represents an integer of 2 to 20.
- Dye IV represents a dye structure having a cationic site.
- n is preferably 3 to 15, particularly preferably 3 to 6.
- n-valent linking group in which n is 3 or more is a substituted or unsubstituted arylene group (such as 1,3,5-phenylene group, 1,2,4-phenylene group, 1,4,5,8-naphthalene group) And a heterocyclic ring (for example, 1,3,5-triazine group etc.), an alkylene linking group and the like as a central mother nucleus, and a linking group formed by substitution of the above-mentioned divalent linking group can be mentioned.
- arylene group such as 1,3,5-phenylene group, 1,2,4-phenylene group, 1,4,5,8-naphthalene group
- a heterocyclic ring for example, 1,3,5-triazine group etc.
- L 4 in the formula (D) below the present invention is not limited thereto.
- part shown by * represents a connection site
- the general formula (A) The dye multimer having the repeating unit represented by the above, the dye multimer having the repeating unit represented by the general formula (C), and the dye multimer represented by the general formula (D) have a partial structure derived from the dye Are linked by a covalent bond in the molecular structure, the colored composition containing the above-mentioned dye multimer is excellent in heat resistance. For this reason, when the said coloring composition is applied to pattern formation which has a high temperature process, since it is effective in the color transfer suppression to the other adjacent coloring pattern, it is preferable. In addition, the compound represented by the general formula (A) is preferred because the molecular weight of the dye multimer can be easily controlled.
- the dye multimer (A) of the present invention may have another functional group in the dye structure part of the above-mentioned dye multimer.
- Examples of other functional groups include polymerizable groups, acid groups and alkali-soluble groups.
- the dye multimer (A) of the present invention may contain other repeating units in addition to the above-mentioned repeating unit containing a dye structure.
- Other repeating units may have a functional group.
- a repeating unit containing at least one of a polymerizable group, an acid group and an alkali-soluble group is exemplified.
- the dye multimer (A) of the present invention may have other repeating units in addition to the repeating units represented by the general formulas (A) to (C).
- the other repeating unit may be contained in only one type or in two or more types in one dye multimer.
- the dye multimer (A) of the present invention may have other functional groups in the dye multimer represented by the above general formulas (A) to (D). The details of these will be described below.
- the dye multimer (A) of the present invention preferably contains a polymerizable group. Only one type of polymerizable group may be contained, or two or more types may be contained.
- the dye structure may contain a polymerizable group, or other parts may contain it.
- an embodiment in which the portion other than the dye structure contains a polymerizable group is also preferable.
- a radical, an acid, a known polymerizable group crosslinkable by heat can be used.
- a group containing an ethylenically unsaturated bond, a cyclic ether group (epoxy group, oxetane group), a methylol group And the like and in particular, a group containing an ethylenically unsaturated bond is preferable, a (meth) acryloyl group is more preferable, and (meth) derived from glycidyl (meth) acrylate and 3,4-epoxy-cyclohexylmethyl (meth) acrylate An acryloyl group is more preferred.
- the polymerizable group is preferably contained in the dye polymer as a repeating unit having a polymerizable group, and more preferably contained as a repeating unit having an ethylenically unsaturated bond. That is, an example of a preferred embodiment of the dye multimer (A) of the present invention is an embodiment in which the dye multimer (A) contains a repeating unit containing a dye monomer and a repeating unit having a polymerizable group, It is more preferable to contain a repeating unit containing a monomer and a repeating unit having an ethylenically unsaturated bond.
- Method of modifying a dye polymer with a polymerizable group-containing compound and introducing it Any known method can be used without particular limitation as a method of modifying the dye multimer with a polymerizable group-containing compound and introducing it.
- Any known method can be used without particular limitation as a method of modifying the dye multimer with a polymerizable group-containing compound and introducing it.
- (a) a method of reacting a carboxylic acid possessed by dye multimer and an unsaturated bond-containing epoxy compound (b) a method of reacting a hydroxyl group or amino group possessed by dye multimer and an unsaturated compound containing isocyanate compound
- dye multimer has react, and a unsaturated bond containing carboxylic acid compound is preferable from a manufacturing viewpoint.
- the unsaturated bond-containing epoxy compound in the method of reacting the carboxylic acid of the (a) dye polymer with the unsaturated bond-containing epoxy compound glycidyl methacrylate, glycidyl acrylate, allyl glycidyl ether, 3,4-epoxy-
- cyclohexylmethyl acrylate, 3,4-epoxy-cyclohexylmethyl methacrylate and the like but glycidyl methacrylate and 3,4-epoxy-cyclohexylmethyl methacrylate are particularly preferable because of their excellent crosslinkability and storage stability.
- Reaction conditions can use well-known conditions.
- 2-isocyanatoethyl methacrylate 2-isocyanatoethyl methacrylate as an unsaturated bond-containing isocyanate compound in the method of reacting the hydroxyl group or amino group of the (b) dye multimer with the unsaturated bond-containing isocyanate compound And 1,1-bis (acryloyloxymethyl) ethyl isocyanate and the like, but 2-isocyanatoethyl methacrylate is preferable because of its excellent crosslinkability and storage stability.
- Reaction conditions can use well-known conditions.
- carboxylic acid compound having a (meth) acryloyloxy group as the unsaturated bond-containing carboxylic acid compound in the method of reacting the epoxy compound of the (c) dye polymer with the unsaturated bond-containing carboxylic acid compound
- methacrylic acid and acrylic acid are preferable, and methacrylic acid is particularly preferable because of its excellent crosslinkability and storage stability. Reaction conditions can use well-known conditions.
- a radically polymerizable polymerizable group-containing compound in the method of copolymerizing a radically polymerizable dye monomer and a radically polymerizable polymerizable group-containing compound in particular, an allyl group-containing compound (for example, (meth)) Allyl acrylate etc., epoxy group-containing compounds (eg, glycidyl (meth) acrylate, 3,4-epoxy-cyclohexylmethyl (meth) acrylate etc.), oxetane group-containing compounds (eg, 3-methyl-3-oxetanylmethyl (meth) And the like), methylol group-containing compounds (eg, N- (hydroxymethyl) acrylamide and the like), and in particular, epoxy compounds and oxetane compounds are preferable.
- Reaction conditions can use well-known conditions.
- a method of introducing a polymerizable group a method of reacting a carboxylic acid possessed by a dye multimer, a carboxylic acid possessed by a dye multimer, and an unsaturated bond-containing epoxy compound is particularly preferable.
- the amount of the polymerizable group possessed by the dye multimer (A) is preferably 0.1 to 2.0 mmol, more preferably 0.2 to 1.5 mmol, per 1 g of the dye multimer (A). Particular preference is given to 0.3 to 1.0 mmol.
- the ratio of repeating units containing repeating units having a polymerizable group in the dye multimer (A) is, for example, preferably 5 to 50 moles, and more preferably 10 to 20 moles, relative to 100 moles of all repeating units.
- a method of reacting a carboxylic acid possessed by a dye polymer, a carboxylic acid possessed by a dye polymer and an unsaturated bond-containing epoxy compound is particularly preferable.
- repeating unit having a polymerizable group The following specific examples may be mentioned as the repeating unit having a polymerizable group. However, the present invention is not limited to these.
- a dye monomer having an ethylenically unsaturated bond is preferable from the viewpoint of substrate adhesion and surface roughness, and among them, methacryloyl group, acryloyl group, styryl group or vinyloxy group is preferable, and methacryloyl group.
- methacryloyl group is more preferable, and a methacryloyl group is more preferable.
- Acid group and alkali-soluble group possessed by dye multimer (A) >> Examples of the acid group that may be possessed by the dye multimer (A) in the present invention include a carboxylic acid group, a sulfonic acid group and a phosphoric acid group. Moreover, as an alkali soluble group, phenolic hydroxyl group and carboxylic acid are illustrated. In the present invention, preferably, the acid group and / or the alkali-soluble group is contained in the multimer (A) as a repeating unit having an acid group and / or an alkali-soluble group.
- the acid value of the repeating unit having an acid group is preferably 15 mg KOH / g to 110 mg KOH / g, more preferably 20 mg KOH / g to 90 mg KOH / g, and preferably 30 mg KOH / g to 60 mg KOH / g. More preferable.
- the acid value of the dye multimer can be calculated, for example, from the average content of acid groups in the dye multimer.
- resin which has a desired acid value can be obtained by changing content of the monomer unit containing the acidic radical which comprises pigment
- a method for introducing an alkali-soluble group into a dye multimer a method in which an alkali-soluble group is previously introduced into a dye monomer, a monomer other than a dye monomer having an alkali-soluble group ((meth) acrylic acid, acrylic Acid caprolactone modified products, (meth) acrylic acid 2-hydroxyethyl anhydride succinic acid modified products, (meth) acrylic acid 2-hydroxyethyl phthalic acid modified products, (meth) acrylic acid 2-hydroxyethyl 1 2-cyclohexanedicarboxylic acid anhydride modified products, carboxylic acid containing monomers such as styrene carboxylic acid, itaconic acid, maleic acid, norbornene carboxylic acid, phosphoric acid containing monomers such as acid phosphooxyethyl methacrylate, vinylphosphonic acid, vinyl sulfonic acid, Such as 2-acrylamido-2-methylsulfonic acid A method of copolymerizing acid containing monomer
- the amount of alkali soluble group possessed by the dye multimer (A) is preferably 0.3 mmol to 2.0 mmol, more preferably 0.4 mmol to 1.5 mmol, per 1 g of the dye multimer (A). Particularly preferred is 0.5 mmol to 1.0 mmol.
- the dye multimer (A) contains a repeating unit containing a dye monomer and a repeating unit having an acid group
- the proportion of the repeating unit containing a repeating unit having an acid group contains the dye monomer
- 5 to 70 mol is preferable, and 10 to 50 mol is more preferable, with respect to 100 mol of the repeating unit.
- Other functional groups possessed by the dye multimer (A) include lactones, acid anhydrides, amides, development promoting groups such as -COCH 2 CO-, cyano groups, long chain and cyclic alkyl groups, aralkyl groups, aryl groups, poly
- the hydrophilicity adjusting group such as an alkylene oxide group, a hydroxyl group, a maleimide group, an amino group and the like can be mentioned and can be introduced appropriately.
- a method of introduction a method of previously introducing into a dye monomer, and a method of copolymerizing a monomer having the above functional group can be mentioned.
- the weight average molecular weight of the dye multimer (A) is preferably 2,000 to 20,000, more preferably 3,000 to 15,000, and 4,000 to 10,000. Particularly preferred.
- the weight average molecular weight and the number average molecular weight can be determined by gel permeation chromatography (GPC).
- GPC gel permeation chromatography
- the ratio [(Mw) / (Mn)] of the weight average molecular weight (Mw) of the dye multimer (A) to the number average molecular weight (Mn) is preferably 1.0 to 3.0, and 1 It is more preferably 6 to 2.5, and particularly preferably 1.6 to 2.0.
- the glass transition temperature (Tg) of the dye multimer (A) according to the present invention is preferably 50 ° C. or more, and more preferably 100 ° C. or more.
- the 5% weight loss temperature by thermogravimetric analysis (TGA measurement) is preferably 120 ° C. or more, more preferably 150 ° C. or more, and still more preferably 200 ° C. or more.
- the molar absorptivity of the dye multimer (A) used in the coloring composition of the present invention is preferably as high as possible from the viewpoint of coloring power.
- the reduced viscosity of the dye multimer (A) used in the coloring composition of the present invention is preferably 4.0 to 10.0, more preferably 5.0 to 9.0, from the viewpoint of color transfer. Preferably, it is more preferably 6.0 to 7.0.
- the reduced viscosity can be measured, for example, using a Ubbelohde viscometer.
- the dye multimer (A) according to the present invention is preferably a compound that dissolves in the following organic solvent.
- organic solvent esters (eg, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl lactate, butyl acetate, methyl 3-methoxypropionate, etc.), ethers (eg, methyl cellosolve acetate, ethyl cellosolve acetate) And propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, etc., ketones (methyl ethyl ketone, cyclohexanone, 2-heptanone, 3-heptanone etc.), aromatic hydrocarbons (eg, toluene, xylene etc.), these solvents
- it is preferably dissolved in an amount of 1% by mass to 50% by mass, more preferably 5% by mass to 40% by mass, and still more preferably 10% by mass to 30% by mass.
- the dye multimer (A) may be used alone or in combination of two or more. When using 2 or more types, it is preferable that the total amount corresponds to content mentioned later.
- the content of the dye multimer (A) in the coloring composition of the present invention is set in consideration of the content ratio with the (B) pigment described later.
- the mass ratio of the dye multimer to the pigment (dye multimer (A) / pigment) is preferably 0.1 to 5, more preferably 0.2 to 2, and still more preferably 0.3 to 1.
- the coloring composition of the present invention is used to form a coloring layer of a color filter.
- the coloring composition used in the present invention preferably comprises (B) a curable compound and (C) a pigment.
- the curable compound (B) include a polymerizable compound and an alkali-soluble resin (including an alkali-soluble resin containing a polymerizable group), which can be appropriately selected depending on the use and the production method.
- the coloring composition of this invention contains (D) photoinitiator.
- the colored composition of the present invention comprises (A) dye multimer of the present invention, alkali soluble resin as a curable compound, (C) pigment and (D) photopolymerization Compositions comprising an initiator are preferred. Furthermore, components such as surfactants and solvents may be included. Moreover, when forming a colored layer by dry etching, the composition containing the (A) pigment
- the coloring composition of the present invention contains a polymerizable compound.
- a polymerizable compound crosslinkable by radicals, acids, and heat can be used, and examples thereof include polymerizable compounds containing an ethylenically unsaturated bond, cyclic ether (epoxy, oxetane), methylol and the like.
- the polymerizable compound is suitably selected from compounds having at least one, preferably two or more terminal ethylenically unsaturated bonds, from the viewpoint of sensitivity. Among them, tetrafunctional or higher polyfunctional polymerizable compounds are preferable, and pentafunctional or higher polyfunctional polymerizable compounds are more preferable.
- Such compounds are widely known in the industrial field, and they can be used in the present invention without particular limitation. These may be, for example, any of chemical forms such as monomers, prepolymers, that is, dimers, trimers and oligomers or mixtures thereof and multimers thereof.
- the polymerizable compound in the present invention may be used alone or in combination of two or more.
- examples of monomers and prepolymers thereof include unsaturated carboxylic acids (eg, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid etc.) and esters thereof, amides, etc.
- unsaturated carboxylic acids eg, acrylic acid, methacrylic acid, itaconic acid, crotonic acid, isocrotonic acid, maleic acid etc.
- esters thereof preferably esters of unsaturated carboxylic acids and aliphatic polyhydric alcohol compounds, and amides of unsaturated carboxylic acids and aliphatic polyhydric amine compounds, and multimers thereof. is there.
- addition reaction products of unsaturated carboxylic acid esters or amides having a nucleophilic substituent such as hydroxyl group, amino group, mercapto group etc.
- a compound having at least one addition-polymerizable ethylene group and having an ethylenically unsaturated group having a boiling point of 100 ° C. or more under normal pressure is also preferable.
- Examples thereof include monofunctional acrylates and methacrylates such as polyethylene glycol mono (meth) acrylate, polypropylene glycol mono (meth) acrylate and phenoxyethyl (meth) acrylate; polyethylene glycol di (meth) acrylate, trimethylolethane tri ( (Meth) acrylate, neopentyl glycol di (meth) acrylate, pentaerythritol tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, hexanediol ( Meta) acrylate, trimethylolpropane tri (acryloyloxypropyl) ether, tri (acryloyloxyethyl) isocyanate Those obtained by adding ethylene oxide or propylene oxide to a
- Polyfunctional (meth) acrylate obtained by reacting a compound having a cyclic ether group such as glycidyl (meth) acrylate and an ethylenically unsaturated group with a polyfunctional carboxylic acid can also be mentioned.
- it has a fluorene ring and is described in, for example, JP-A-2010-160418, JP-A-2010-129825, and JP-A-4364216, and an ethylenically unsaturated group is described. It is also possible to use a compound having two or more functions, a cardo resin.
- radically polymerizable monomers represented by the following general formulas (MO-1) to (MO-5) can also be suitably used.
- T is an oxyalkylene group
- the terminal on the carbon atom side is bonded to R.
- n 0 to 14 and m is 1 to 8.
- a plurality of R and T in one molecule may be identical to or different from each other.
- compounds described in paragraph Nos. 0248 to 0251 of JP-A-2007-269779 can be used. It can also be suitably used in the invention.
- dipentaerythritol triacrylate commercially available as KAYARAD D-330; Nippon Kayaku Co., Ltd.
- dipentaerythritol tetraacrylate commercially available as KAYARAD D-320; Nippon Kayaku Co., Ltd.
- Dipentaerythritol penta (meth) acrylate (commercially available as KAYARAD D-310; Nippon Kayaku Co., Ltd.), dipentaerythritol hexa (meth) acrylate (commercially available as KAYARAD DPHA; Nippon Kayaku Co., Ltd.) And a structure in which these (meth) acryloyl groups are mediated by ethylene glycol and propylene glycol residues. These oligomer types can also be used.
- the polymerizable compound is a polyfunctional monomer, and may have an acid group such as a carboxyl group, a sulfonic acid group or a phosphoric acid group. If the ethylenic compound has an unreacted carboxyl group as in the case of a mixture as described above, this can be used as it is, but, if necessary, to the hydroxyl group of the above ethylenic compound Non-aromatic carboxylic acid anhydride may be reacted to introduce an acid group.
- non-aromatic carboxylic acid anhydrides include tetrahydrophthalic anhydride, alkylated tetrahydrophthalic anhydride, hexahydrophthalic anhydride, alkylated hexahydrophthalic anhydride, succinic anhydride, anhydride Maleic acid is mentioned.
- the monomer having an acid group is an ester of an aliphatic polyhydroxy compound and an unsaturated carboxylic acid, and a non-aromatic carboxylic acid anhydride is reacted with an unreacted hydroxyl group of the aliphatic polyhydroxy compound.
- Polyfunctional monomers having an acid group are preferred, and particularly preferred in this ester, the aliphatic polyhydroxy compound is pentaerythritol and / or dipentaerythritol.
- Examples of commercially available products include M-510 and M-520 as polybasic acid-modified acrylic oligomers manufactured by Toagosei Co., Ltd.
- One of these monomers may be used alone, but two or more of these monomers may be used in combination because it is difficult to use a single compound in production.
- a polyfunctional monomer having no acid group and a polyfunctional monomer having an acid group may be used in combination as monomers.
- the acid value of the polyfunctional monomer having an acid group is preferably 0.1 mg KOH / g to 40 mg KOH / g, particularly preferably 5 mg KOH / g to 30 mg KOH / g.
- the acid value of the polyfunctional monomer is too low, the development dissolution property is deteriorated, and when too high, the production and handling become difficult, the photopolymerization performance is deteriorated, and the curability such as the surface smoothness of the pixel is deteriorated. Therefore, in the case of using two or more kinds of polyfunctional monomers having different acid groups in combination, or in the case of using a polyfunctional monomer having no acid group, the acid group as the entire polyfunctional monomer is adjusted to fall within the above range. Is preferred.
- polyfunctional monomer which has a caprolactone structure is not particularly limited as long as it has a caprolactone structure in the molecule, and examples thereof include trimethylol ethane, ditrimethylol ethane, trimethylol propane, ditrimethylol propane and penta ⁇ -caprolactone modified polyfunctional ( ⁇ ) obtained by esterifying (meth) acrylic acid and ⁇ -caprolactone with a polyhydric alcohol such as erythritol, dipentaerythritol, tripentaerythritol, glycerin, diglycerol, trimethylolmelamine Mention may be made of meta) acrylates.
- polyfunctional monomers having a caprolactone structure represented by the following general formula (Z-1) are preferable.
- R 1 represents a hydrogen atom or a methyl group
- m represents a number of 1 or 2
- “*” represents a bond.
- R 1 represents a hydrogen atom or a methyl group, and “*” represents a bond.
- polyfunctional monomers having a caprolactone structure can be used alone or in combination of two or more.
- the specific monomer in the present invention is also preferably at least one selected from the group of compounds represented by the following general formulas (Z-4) or (Z-5).
- E are each independently, - ((CH 2) yCH 2 O) -, or - ((CH 2) yCH ( CH 3) O) - And each y independently represents an integer of 0 to 10.
- Each X independently represents an acryloyl group, a methacryloyl group, a hydrogen atom or a carboxyl group.
- the total of acryloyl group and methacryloyl group is three or four, m each independently represents an integer of 0 to 10, and the sum of each m is an integer of 0 to 40 is there. However, when the sum of each m is 0, any one of X is a carboxyl group.
- n independently represents an integer of 0 to 10
- the sum of n is an integer of 0 to 60.
- any one of X is a carboxyl group.
- n is preferably an integer of 0 to 6, and more preferably an integer of 0 to 4.
- the total of each n is preferably an integer of 3 to 60, more preferably an integer of 3 to 24, and particularly preferably an integer of 6 to 12.
- the compounds represented by the above general formula (Z-4) or the general formula (Z-5) may be used alone or in combination of two or more.
- a form in which all six X's are an acryloyl group is preferable.
- the total content of the compound represented by Formula (Z-4) or Formula (Z-5) in the polymerizable compound is preferably 20% by mass or more, and more preferably 50% by mass or more.
- the compounds represented by the above general formula (Z-4) or (Z-5) are ring-opened ethylene oxide or propylene oxide in pentaerythritol or dipentaerythritol which is a conventionally known step.
- the compound can be synthesized from the step of bonding the ring-opened skeleton by addition reaction, and the step of reacting the terminal hydroxyl group of the ring-opened skeleton with, for example, (meth) acryloyl chloride to introduce a (meth) acryloyl group.
- Each step is a well-known step, and those skilled in the art can easily synthesize a compound represented by general formula (i) or (ii).
- pentaerythritol derivatives and / or dipentaerythritol derivatives are more preferable.
- Specific examples thereof include compounds represented by the following formulas (a) to (f) (hereinafter also referred to as “exemplified compounds (a) to (f)”), and among them, exemplified compounds (a) and (f) b), (e) and (f) are preferred.
- SR-494 which is a tetrafunctional acrylate having four ethyleneoxy chains manufactured by Sartmar, Nippon Kayaku Co., Ltd.
- examples thereof include DPCA-60, which is a hexafunctional acrylate having 6 pentylene oxy chains, and TPA-330, which is a trifunctional acrylate having 3 isobutylene oxy chains.
- urethane acrylates as described in JP-B-48-41708, JP-A-51-37193, JP-B-2-32293 and JP-B-2-16765. Further, urethane compounds having an ethylene oxide-based skeleton described in JP-B-58-49860, JP-B-56-17654, JP-B-62-39417, and JP-B-62-39418 are also suitable.
- cyclic ether for example, as those having an epoxy group, as bisphenol A epoxy resin, JER-827, JER-828, JER-834, JER-1001, JER-1002, JER-1003 JER-1055, JER-1007, JER-1009, JER-1010 (all available from Japan Epoxy Resins Co., Ltd.), EPICLON 860, EPICLON 1050, EPICLON 1051, EPICLON 1055 (all available from DIC Corporation), etc., and bisphenol F Type epoxy resins, such as JER-806, JER-807, JER-4004, JER-4005, JER-4007, JER-4010 (all manufactured by Japan Epoxy Resins Co., Ltd.), EPICLON 83 EPICLON 835 (all, DIC Corporation), LCE-21, RE-602S (all, Nippon Kayaku Co., Ltd.), etc., and as phenol novolac epoxy resins, JER-152, J
- cresol novolac type epoxy resins such as EPICLON N-660, EPICLON N-665, EPICLON N-670, EPICLON N-673, EPICLON N-680, EPICLON N-690, EPICLON N-695 (all, DIC Corporation) EOCN-1020 (all manufactured by Nippon Kayaku Co., Ltd.), and as aliphatic epoxy resins, ADEKA RESIN EP-4080S, EP-4085S, EP-4088S (all, manufactured by ADEKA) Celoxide 2021 P, Celloxide 2081, Celloxide 2083, Celloxide 2085, EHPE-3150 (1,2-epoxy-4- (2-oxiranyl) cyclohexane adduct of 2,2-bis (hydroxymethyl) -1-butanol), EPOLEAD PB 3600, the same PB 4700 (above, Daicel Chemical Industries, Ltd.), Denacol EX-211L, EX-212L, EX-214L, EX
- the details of the structure, single use or combined use, details of usage methods such as addition amount can be arbitrarily set in accordance with the final performance design of the coloring composition.
- a structure having a high unsaturated group content per molecule is preferable, and in many cases, a bifunctional or more functional is preferable.
- trifunctional or higher functional groups are preferable, and further, different functional group number and different polymerizable groups (for example, acrylic acid ester, methacrylic acid ester, styrenic compound, It is also effective to control both sensitivity and intensity by using vinyl ether compounds in combination.
- the selection and use method of the polymerizable compound is also for compatibility and dispersibility with other components (for example, a photopolymerization initiator, a material to be dispersed, an alkali-soluble resin, etc.) contained in the coloring composition It is an important factor, and it may be possible to improve the compatibility, for example, by the use of a low purity compound or a combination of two or more.
- a specific structure may be selected from the viewpoint of improving the adhesion to a hard surface such as a support.
- the content of the polymerizable compound in the coloring composition of the present invention is preferably 0.1% by mass to 90% by mass, and more preferably 1.0% by mass to 60% by mass with respect to the total solid content in the coloring composition. More preferably, it is 2.0% by mass to 40% by mass.
- the composition of the present invention may contain only one type of polymerizable compound, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- the colored composition of the present invention preferably further contains (C) a pigment.
- a pigment As the pigment used in the present invention, various conventionally known inorganic pigments or organic pigments can be used, and it is preferable to use an organic pigment.
- the pigment preferably has high transmittance.
- inorganic pigments include black pigments such as carbon black and titanium black, and metal compounds represented by metal oxides, metal complex salts, etc. Specifically, iron, cobalt, aluminum, cadmium, lead, copper, Mention may be made of metal oxides such as titanium, magnesium, chromium, zinc and antimony, and composite oxides of the above metals.
- organic pigment for example, C. I. Pigment yellow 11, 24, 31, 53, 83, 93, 99, 108, 110, 138, 139, 147, 150, 151, 154, 155, 167, 180, 185, 199; C. I. Pigment orange 36, 38, 43, 71; C. I. Pigment red 81, 105, 122, 149, 150, 155, 171, 175, 176, 177, 179, 209, 220, 224, 242, 254, 255, 264, 270; C. I. Pigment violet 19, 23, 32, 39; C. I. Pigment blue 1, 2, 15, 15: 1, 15: 3, 15: 6, 16, 22, 60, 66; C. I. Pigment green 7, 36, 37, 58; C. I. Pigment brown 25, 28; C. I. Pigment black 1; Etc. can be mentioned.
- the following can be mentioned as a pigment which can be preferably used in the present invention.
- the present invention is not limited to these.
- the coloring composition of the present invention has a partial structure (preferably a partial structure derived from xanthene dye) derived from xanthene dye, azo dye or squarylium dye as the above-mentioned dye multimer, a red colorant (preferably red dye) And a yellow colorant (preferably, a yellow pigment) to give a red colored composition.
- a partial structure preferably a partial structure derived from xanthene dye
- azo dye or squarylium dye as the above-mentioned dye multimer
- red colorant preferably red dye
- a yellow colorant preferably, a yellow pigment
- red pigments anthraquinone pigments, perylene pigments, diketopyrrolopyrrole pigments alone or at least one of them, disazo yellow pigments, isoindoline yellow pigments, quinophthalone yellow pigments or perylene red pigments And the like can be used.
- anthraquinone pigments C.I. I. Pigment red 177
- perylene pigments include C.I. I. Pigment red 155, C.I. I. Pigment red 224
- examples of the diketopyrrolopyrrole pigment include C.I. I. Pigment red 254, and C.I. I.
- the mixing with pigment yellow 139 is preferred.
- the mass ratio of the red pigment to the yellow pigment is preferably 100: 5 to 100: 50. If it is 100: 4 or less, it is difficult to suppress the light transmittance of 400 nm to 500 nm, and if it is 100: 51 or more, the main wavelength tends to be a short wavelength and color resolution may not be able to be improved. In particular, the range of 100: 10 to 100: 30 is optimum as the above mass ratio. In addition, in the case of the combination of red pigments, it can adjust according to the spectroscopy to be calculated
- the green pigment it is possible to use a halogenated phthalocyanine-based pigment alone or a mixture thereof with a disazo-based yellow pigment, a quinophthalone-based yellow pigment, an azomethine-based yellow pigment or an isoindoline-based yellow pigment.
- a disazo-based yellow pigment e.g., a quinophthalone-based yellow pigment, an azomethine-based yellow pigment or an isoindoline-based yellow pigment.
- the mixing with pigment yellow 185 is preferred.
- the mass ratio of the green pigment to the yellow pigment is preferably 100: 5 to 100: 150.
- the mass ratio is particularly preferably in the range of 100: 30
- a blue pigment a phthalocyanine-based pigment can be used alone, or a mixture of this with a dioxazine-based purple pigment can be used.
- the mixing with pigment violet 23 is preferred.
- the mass ratio of the blue pigment to the purple pigment is preferably 100: 0 to 100: 100, and more preferably 100: 10 or less.
- carbon, titanium black, iron oxide, titanium oxide alone or in combination is used as a pigment for the black matrix, and a combination of carbon and titanium black is preferable.
- the mass ratio of carbon to titanium black is preferably in the range of 100: 0 to 100: 60.
- the coloring composition of the present invention is preferably blended with a pigment other than black, and is suitable for a blue pigment.
- the primary particle size of the pigment is preferably 100 nm or less from the viewpoint of color unevenness and contrast, and is preferably 5 nm or more from the viewpoint of dispersion stability.
- the primary particle size of the pigment is more preferably 5 to 75 nm, still more preferably 5 to 55 nm, and particularly preferably 5 to 35 nm.
- the primary particle size of the pigment can be measured by a known method such as an electron microscope.
- the pigment is preferably a pigment selected from anthraquinone pigments, diketopyrrolopyrrole pigments, phthalocyanine pigments, quinophthalone pigments, isoindoline pigments, azomethine pigments, and dioxazine pigments.
- C.I. I. Pigment red 177 anthraquinone pigment
- C.I. I. Pigment red 254 diketopyrrolopyrrole pigment
- C.I. I. Pigment green 7, 36, 58 C.I. I. Pigment blue 15: 6 (phthalocyanine pigment), C.I. I. Pigment yellow 138 (quinophthalone pigment), C.I. I. Pigment yellow 139, 185 (isoindoline pigment), C.I. I. Pigment yellow 150 (azomethine pigment), C.I. I. Pigment Violet 23 (dioxazine pigment) is particularly preferred.
- the content of the pigment is preferably 10% by mass to 70% by mass, more preferably 20% by mass to 60% by mass, and further preferably 25% by mass with respect to all the components excluding the solvent contained in the coloring composition. % By mass to 50% by mass.
- the composition of the present invention may contain only one type of pigment, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- the coloring composition of this invention contains a photoinitiator from a viewpoint of a further sensitivity improvement.
- the photopolymerization initiator is not particularly limited as long as it has the ability to initiate polymerization of the polymerizable compound, and can be appropriately selected from known photopolymerization initiators. For example, those having photosensitivity to light rays visible from the ultraviolet region are preferable.
- it may be an activator that produces an action with a photoexcited sensitizer and generates active radicals, or may be an initiator that initiates cationic polymerization depending on the type of monomer.
- the photopolymerization initiator preferably contains at least one compound having a molecular absorption coefficient of at least about 50 in the range of about 300 nm to 800 nm (more preferably 330 nm to 500 nm).
- the photopolymerization initiator examples include halogenated hydrocarbon derivatives (for example, those having a triazine skeleton, those having an oxadiazole skeleton, etc.), acyl phosphine compounds such as acyl phosphine oxide, hexaarylbiimidazole, oxime
- halogenated hydrocarbon derivatives for example, those having a triazine skeleton, those having an oxadiazole skeleton, etc.
- acyl phosphine compounds such as acyl phosphine oxide, hexaarylbiimidazole, oxime
- An oxime compound such as a derivative, an organic peroxide, a thio compound, a ketone compound, an aromatic onium salt, a ketoxime ether, an aminoacetophenone compound, a hydroxyacetophenone and the like can be mentioned, and an oxime compound is preferable.
- trihalomethyl triazine compounds benzyl dimethyl ketal compounds, ⁇ -hydroxy ketone compounds, ⁇ -amino ketone compounds, acyl phosphine compounds, phosphine oxide compounds, metallocene compounds, oxime compounds, triallyl imidazole dimers, oniums
- compounds selected from the group consisting of compounds, benzothiazole compounds, benzophenone compounds, acetophenone compounds and derivatives thereof, cyclopentadiene-benzene-iron complexes and salts thereof, halomethyl oxadiazole compounds and 3-aryl substituted coumarin compounds are preferred.
- trihalomethyl triazine compounds More preferable are trihalomethyl triazine compounds, ⁇ -amino ketone compounds, acyl phosphine compounds, phosphine oxide compounds, oxime compounds, triallyl imidazole dimers, triaryl imidazole compounds, benzimidazole compounds, onium compounds, benzophenone compounds, acetophenone compounds.
- the triarylimidazole compound may also be a mixture with benzimidazole.
- the following compounds are exemplified as the trihalomethyl triazine compound. Ph is a phenyl group.
- the following compounds are illustrated as a triaryl imidazole compound and a
- a commercially available product can also be used as the trihalomethyl triazine compound, and for example, TAZ-107 (manufactured by Midori Kagaku Co., Ltd.) can also be used.
- TAZ-107 manufactured by Midori Kagaku Co., Ltd.
- the coloring composition of the present invention is used for the preparation of a color filter provided in a solid-state imaging device, since it is necessary to form a fine pattern in a sharp shape, there are residues on the unexposed area together with curability. Development is important. From such a viewpoint, it is particularly preferable to use an oxime compound as the polymerization initiator.
- stepper exposure is used for curing exposure, but this exposure machine may be damaged by halogen, and the amount of addition of the polymerization initiator also needs to be suppressed low.
- an oxime compound as the photopolymerization initiator (D) for forming a fine pattern as in a solid-state imaging device.
- halogenated hydrocarbon compound having a triazine skeleton examples include, for example, Wakabayashi et al., Bull. Chem. Soc. Japan, 42, 2924 (1969), a compound described in British Patent No. 1388492, a compound described in JP-A-53-133428, a compound described in German Patent No. 3337024, an F. compound. C. Schaefer et al. Org. Chem. 29, 1527 (1964), compounds described in JP-A-62-58241, compounds described in JP-A-5-281728, compounds described in JP-A-5-34920, specification of U.S. Pat. No. 4,129,976 Compounds described in Japanese Patent Application Publication No. 2013-77009, paragraph 0075, and the like.
- an acridine derivative is illustrated as a photoinitiator other than the above.
- Specific examples thereof include the compounds described in paragraph 0076 of JP-A-2013-077099, the contents of which are incorporated in the present specification.
- ketone compound As said ketone compound, the compound as described in stage number 0077 of Unexamined-Japanese-Patent No. 2013-077009 etc. are mentioned, for example, These content is integrated in this-application specification.
- a hydroxyacetophenone compound, an aminoacetophenone compound, and an acyl phosphine compound can also be suitably used. More specifically, for example, an aminoacetophenone initiator described in JP-A-10-291969 and an acylphosphine oxide initiator described in Japanese Patent No. 4225898 can also be used.
- a hydroxyacetophenone type initiator IRGACURE (registered trademark)-184, DAROCUR (registered trademark)-1173, IRGACURE (registered trademark)-500, IRGACURE (registered trademark)-2959, IRGACURE (registered trademark)-127 (trade name) All of them can be manufactured by BASF.
- aminoacetophenone initiators can be used as aminoacetophenone initiators.
- aminoacetophenone initiator a compound described in JP-A-2009-191179 in which the absorption wavelength is matched to a long wave light source such as 365 nm or 405 nm can also be used.
- an acylphosphine initiator commercially available products IRGACURE (registered trademark)-819 and DAROCUR (registered trademark)-TPO (trade name: all manufactured by BASF Corporation) can be used as an acylphosphine initiator.
- an oxime compound is mentioned.
- compounds described in JP-A-2001-233842 compounds described in JP-A-2000-80068, and compounds described in JP-A-2006-342166 can be used.
- TRONLY TR-PBG-304 As oxime compounds, TRONLY TR-PBG-304, TRONLY TR-PBG-309, TRONLY TR-PBG-305 (made by CHANGZHOU TRONLY NEW ELECTRONIC MATERIALS CO., LTD.), ADEKA ARC
- Luz NCI-831 and Adeka ARKles NCI-930 manufactured by Adeka can also be used.
- oxime compounds other than those described above compounds described in JP-T-2009-519904, in which an oxime is linked to the carbazole N-position, compounds described in US Pat. No. 7,626,957, in which a hetero substituent is introduced into a benzophenone moiety, Compounds described in JP-A-2010-15025 and U.S. Patent Publication 2009-292039, in which a nitro group is introduced to a dye site, ketooxime compounds described in WO2009-131189, triazine skeleton and oxime skeleton have the same molecule
- the compound described in US Pat. No. 7,556,910, the compound described in JP-A 2009-221114 having an absorption maximum at 405 nm and good sensitivity to a g-line light source may be used.
- the cyclic oxime compounds described in JP-A-2007-231000 and JP-A-2007-322744 can also be suitably used.
- cyclic oxime compounds cyclic oxime compounds fused to a carbazole dye described in, for example, JP-A-2010-32985 and JP-A-2010-185072 have high light absorption and high sensitivity. preferable.
- the compound described in JP-A-2009-242469, which has an unsaturated bond at a specific site of the oxime compound can also be used preferably because high sensitivity can be achieved by regenerating the active radical from the polymerization inactive radical. it can.
- an oxime compound having a specific substituent as shown in JP-A-2007-269779, or an oxime compound having a thioaryl group as shown in JP-A-2009-191061 can be mentioned.
- an oxime compound which is a photopolymerization initiator a compound represented by the following general formula (OX-1) is preferable.
- the N—O bond of the oxime may be an oxime compound of (E) form, an oxime compound of (Z) form, or a mixture of (E) form and (Z) form. .
- R and B each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group.
- the monovalent substituent represented by R is preferably a monovalent nonmetal atomic group.
- the monovalent nonmetal atomic group include an alkyl group, an aryl group, an acyl group, an alkoxycarbonyl group, an aryloxycarbonyl group, a heterocyclic group, an alkylthiocarbonyl group and an arylthiocarbonyl group.
- these groups may have one or more substituents.
- the substituent mentioned above may be further substituted by the other substituent.
- substituents examples include a halogen atom, an aryloxy group, an alkoxycarbonyl group or an aryloxycarbonyl group, an acyloxy group, an acyl group, an alkyl group, an aryl group and the like.
- the alkyl group is preferably an alkyl group having a carbon number of 1 to 30, and specifically, methyl group, ethyl group, propyl group, butyl group, hexyl group, octyl group, decyl group, dodecyl group, octadecyl group, isopropyl group , Isobutyl, sec-butyl, tert-butyl, 1-ethylpentyl, cyclopentyl, cyclohexyl, trifluoromethyl, 2-ethylhexyl, phenacyl, 1-naphthoylmethyl, 2-naphthoyl Methyl group, 4-methylsulfanylphenacyl group, 4-phenylsulfanylphenacyl group, 4-dimethylaminophenacyl group, 4-cyanophenacyl group, 4-methylphenacyl group, 2-methylphenacyl group, 3-fluorophenayl
- the aryl group is preferably an aryl group having a carbon number of 6 to 30, and specifically, phenyl group, biphenyl group, 1-naphthyl group, 2-naphthyl group, 9-anthryl group, 9-phenanthryl group, 1-pyrenyl group Group, 5-naphthacenyl group, 1-indenyl group, 2-azulenyl group, 9-fluorenyl group, terphenyl group, quarter phenyl group, o-tolyl group, m-tolyl group, p-tolyl group, xylyl group, o- Cumenyl group, m-cumenyl group and p-cumenyl group, mesityl group, pentalenyl group, binaphthalenyl group, ternaphthalenyl group, quarternaphthalenyl group, heptarenyl group, biphenylenyl group, indasenyl group, flu
- the acyl group is preferably an acyl group having a carbon number of 2 to 20. Specifically, an acetyl group, a propanoyl group, a butanoyl group, a trifluoroacetyl group, a pentanoyl group, a benzoyl group, a 1-naphthoyl group, and a 2-naphthoyl group , 4-Methylsulfanylbenzoyl group, 4-phenylsulfanylbenzoyl group, 4-dimethylaminobenzoyl group, 4-diethylaminobenzoyl group, 2-chlorobenzoyl group, 2-methylbenzoyl group, 2-methoxybenzoyl group, 2-butoxybenzoyl group Group, 3-chlorobenzoyl group, 3-trifluoromethylbenzoyl group, 3-cyanobenzoyl group, 3-nitrobenzoyl group, 4-fluorobenzoyl group, 4-
- the alkoxycarbonyl group is preferably an alkoxycarbonyl group having a carbon number of 2 to 20, and specifically, a methoxycarbonyl group, an ethoxycarbonyl group, a propoxycarbonyl group, a butoxycarbonyl group, a hexyloxycarbonyl group, an octyloxycarbonyl group, decyl. Examples thereof include an oxycarbonyl group, an octadecyloxycarbonyl group, and a trifluoromethyloxycarbonyl group.
- aryloxycarbonyl group examples include phenoxycarbonyl group, 1-naphthyloxycarbonyl group, 2-naphthyloxycarbonyl group, 4-methylsulfanylphenyloxycarbonyl group, 4-phenylsulfanylphenyloxycarbonyl group, 4-dimethylamino Phenyloxycarbonyl group, 4-diethylaminophenyloxycarbonyl group, 2-chlorophenyloxycarbonyl group, 2-methylphenyloxycarbonyl group, 2-methoxyphenyloxycarbonyl group, 2-butoxyphenyloxycarbonyl group, 3-chlorophenyloxycarbonyl group , 3-trifluoromethylphenyloxycarbonyl group, 3-cyanophenyloxycarbonyl group, 3-nitrophenyloxycarbonyl group, 4-fluorophenyl Oxycarbonyl group, 4-cyanophenyl oxycarbonyl group, and, 4-methoxy phenyloxycarbony
- the heterocyclic group is preferably an aromatic or aliphatic heterocyclic ring containing a nitrogen atom, an oxygen atom, a sulfur atom or a phosphorus atom.
- thienyl group benzo [b] thienyl group, naphtho [2,3-b] thienyl group, thianthrenyl group, furyl group, pyranyl group, isobenzofuranyl group, chromenyl group, xanthenyl group, phenoxatyi.
- alkylthiocarbonyl group examples include methylthiocarbonyl group, propylthiocarbonyl group, butylthiocarbonyl group, hexylthiocarbonyl group, octylthiocarbonyl group, decylthiocarbonyl group, octadecylthiocarbonyl group, and trifluoromethylthiocarbonyl group. Can be illustrated.
- arylthiocarbonyl group 1-naphthylthiocarbonyl group, 2-naphthylthiocarbonyl group, 4-methylsulfanylphenylthiocarbonyl group, 4-phenylsulfanylphenylthiocarbonyl group, 4-dimethylaminophenylthiocarbonyl group , 4-diethylaminophenylthiocarbonyl group, 2-chlorophenylthiocarbonyl group, 2-methylphenylthiocarbonyl group, 2-methoxyphenylthiocarbonyl group, 2-butoxyphenylthiocarbonyl group, 3-chlorophenylthiocarbonyl group, 3-triphenylthiocarbonyl group Fluoromethylphenylthiocarbonyl group, 3-cyanophenylthiocarbonyl group, 3-nitrophenylthiocarbonyl group, 4-fluorophenylthiocarbonyl group, 4-cyanophenylthiocarbonyl group,
- the monovalent substituent represented by B represents an aryl group, a heterocyclic group, an arylcarbonyl group or a heterocyclic carbonyl group. Also, these groups may have one or more substituents. As the substituent, the above-mentioned substituents can be exemplified. Moreover, the substituent mentioned above may be further substituted by the other substituent.
- Y, X and n are respectively synonymous with Y, X and n in General Formula (OX-2) described later, and preferred examples are also the same.
- examples of the divalent organic group represented by A include an alkylene group having 1 to 12 carbon atoms, a cycloalkylene group and an alkynylene group. Also, these groups may have one or more substituents. As the substituent, the above-mentioned substituents can be exemplified. Moreover, the substituent mentioned above may be further substituted by the other substituent.
- an unsubstituted alkylene group an alkyl group (for example, a methyl group, an ethyl group, a tert-butyl group, dodecyl group) from the viewpoint of enhancing sensitivity and suppressing coloring due to heating and aging.
- an alkyl group for example, a methyl group, an ethyl group, a tert-butyl group, dodecyl group
- alkylene group substituted alkylene group, alkenyl group (eg, vinyl group, allyl group) substituted alkylene group, aryl group (eg, phenyl group, p-tolyl group, xylyl group, cumenyl group, naphthyl group, anthryl group) Groups, phenanthryl groups, styryl groups) -substituted alkylene groups are preferred.
- the aryl group represented by Ar is preferably an aryl group having a carbon number of 6 to 30, and may have a substituent.
- substituents those similar to the substituents introduced into the substituted aryl group mentioned as the specific example of the aryl group which may have a substituent can be exemplified. Among them, a substituted or unsubstituted phenyl group is preferable from the viewpoint of enhancing sensitivity and suppressing coloring due to heating and aging.
- the structure of “SAr” formed of Ar in the above formula (OX-1) and S adjacent thereto is preferably a structure shown below in view of sensitivity.
- Me represents a methyl group
- Et represents an ethyl group.
- the oxime compound is preferably a compound represented by the following general formula (OX-2).
- R and X each independently represent a monovalent substituent
- a and Y each independently represent a divalent organic group
- Ar represents an aryl group
- n is 0 to It is an integer of five.
- R, A and Ar in General Formula (OX-2) have the same meanings as R, A and Ar in General Formula (OX-1), and preferred examples are also the same.
- the monovalent substituent represented by X in the general formula (OX-2) is, for example, an alkyl group, an aryl group, an alkoxy group, an aryloxy group, an acyloxy group, an acyl group, an alkoxycarbonyl group, an amino group or a heterocyclic ring And halogen atoms. Also, these groups may have one or more substituents. As the substituent, the above-mentioned substituents can be exemplified. Moreover, the substituent mentioned above may be further substituted by the other substituent.
- X in the general formula (OX-2) an alkyl group is preferable from the viewpoint of solvent solubility and improvement of absorption efficiency in a long wavelength region.
- n represents an integer of 0 to 5, preferably an integer of 0 to 2.
- Examples of the divalent organic group represented by Y in General Formula (OX-2) include the structures shown below. In the groups shown below, “*” represents a bonding position between Y and the adjacent carbon atom in the above formula (OX-2).
- the following structure is preferable from the viewpoint of high sensitivity.
- the oxime compound is preferably a compound represented by the following general formula (OX-3) or (OX-4).
- R and X each independently represent a monovalent substituent
- A represents a divalent organic group
- Ar represents an aryl group
- n is 0 It is an integer of ⁇ 5.
- R, X, A, Ar and n in the general formula (OX-3) or (OX-4) respectively have the same meanings as R, X, A, Ar and n in the above general formula (OX-2) Preferred examples are also the same.
- the oxime compound has a maximum absorption wavelength in a wavelength range of 350 nm to 500 nm, preferably an absorption wavelength in a wavelength range of 360 nm to 480 nm, and particularly preferably one having a high absorbance at 365 nm and 455 nm.
- the oxime compound preferably has a molar absorption coefficient at 365 nm or 405 nm of 1,000 to 300,000, more preferably 2,000 to 300,000, from the viewpoint of sensitivity, and more preferably 5,000 to 200 And particularly preferably 1,000.
- the molar absorption coefficient of the compound may be a known method, and specifically, for example, 0.01 g of an ethyl acetate solvent is used in a UV-visible spectrophotometer (Varry Carry-5 spctrophotometer). It is preferable to measure at a concentration of / L.
- the coloring composition of the present invention contains (D) a photopolymerization initiator
- the content of the photopolymerization initiator is 0.1% by mass or more and 50% by mass or less based on the total solid content of the coloring composition Is more preferably 0.5% by mass to 30% by mass, and still more preferably 1% by mass to 20% by mass. Within this range, better sensitivity and patternability can be obtained.
- the composition of the present invention may contain only one type of photopolymerization initiator, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- a pigment dispersant can be used in combination as desired.
- pigment dispersants include polymer dispersants [for example, polyamide amine and its salt, polycarboxylic acid and its salt, high molecular weight unsaturated acid ester, modified polyurethane, modified polyester, modified poly (meth) acrylate (Meth) acrylic copolymers, naphthalene sulfonic acid formalin condensates], and surfactants such as polyoxyethylene alkyl phosphates, polyoxyethylene alkyl amines, alkanolamines, and pigment derivatives etc.
- Polymer dispersants can be further classified into linear polymers, terminal modified polymers, graft polymers, and block polymers according to their structures.
- terminal-modified polymers having an anchor site on the pigment surface include polymers having a phosphoric acid group at the terminals described in JP-A-3-112929 and JP-A-2003-533455, etc., JP-A-2002 Examples thereof include polymers having a sulfonic acid group at the terminal as described in JP-273191A and the like, and polymers having a partial skeleton of an organic dye and a heterocycle described in JP-A-9-77994 and the like.
- polymers described in JP-A-2007-277514 in which two or more anchor sites (acid group, basic group, partial skeleton of organic dye, heterocyclic ring, etc.) are introduced at the polymer end are also available. It is excellent in dispersion stability and preferable.
- polyester type dispersants and the like can be mentioned.
- JP-A-54-37082, JP-A-8-507960, and JP 2009-258668, etc. reaction product of poly (lower alkylenimine) and polyester
- JP, 9-169821, etc. reaction product of polyallylamine and polyester
- JP 10-339949 A Copolymers of a macromonomer and a nitrogen atom monomer described in JP-A-2004-37986, International Publication Pamphlet WO2010 / 110491, etc.
- amphoteric dispersion resin having a basic group and an acidic group described in JP-A-2009-203462 has the dispersibility of the pigment dispersion, the dispersion stability, and the developability exhibited by the coloring composition using the pigment dispersion. Particularly preferred from the viewpoint of
- a known macromonomer can be used as a macromonomer to be used when producing a graft type polymer having an anchor site to a pigment surface by radical polymerization, and a macromonomer AA-6 (terminally manufactured by Toagosei Co., Ltd.) Poly (methyl methacrylate) in which the group is methacryloyl, AS-6 (polystyrene in which the terminal is methacryloyl), AN-6S (copolymer of styrene and acrylonitrile in which the terminal is methacryloyl), AB-6 Butyl acrylate having a methacryloyl group as the terminal group, Plaxel FM5 ( ⁇ -caprolactone 5-mole equivalent adduct of 2-hydroxyethyl methacrylate) manufactured by Daicel Chemical Industries, Ltd., FA 10 L (2-hydroxyethyl acrylate) ⁇ -caprolactone (10 molar equivalent adduct), and JP-A 2-27
- polyester-based macromonomers that are particularly excellent in flexibility and lipophilicity are particularly preferable from the viewpoint of the dispersibility of the pigment dispersion, the dispersion stability, and the developability exhibited by the colored composition using the pigment dispersion, Furthermore, polyester-based macromonomers represented by polyester-based macromonomers described in JP-A-2-272009 are particularly preferable.
- block type polymer having an anchor site to the pigment surface block type polymers described in JP-A 2003-49110, JP-A 2009-52010, etc. are preferable.
- the pigment dispersant that can be used in the present invention is also available as a commercial product, and specific examples thereof include “DA-7301” manufactured by Tochigi Kasei Co., Ltd., “Disperbyk-101 (polyamidoamine phosphate) manufactured by BYK Chemie ), 107 (carboxylic acid ester), 110, 111 (copolymer containing an acid group), 130 (polyamide), 161, 162, 163, 164, 165, 166, 170 (polymer copolymer) "," BYK-P104, P105 (high molecular weight unsaturated polycarboxylic acid), EFKA “EFKA 4047, 4050 to 4010 to 4165 (polyurethane type), EFKA 4330 to 4340 (block copolymer), 4400 to 4402 (modified polyacrylate), 5010 (polyesteramide), 5765 (high molecular weight polycarboxylic acid Salts), 6220 (fatty acid polyester), 6745 (phthalocyanine derivative),
- Sol Sparse 5000 (phthalocyanine derivative), 22000 (Azo pigment derivative), 13240 (polyester amine), 3000, 17000, 27000 (polymer having a functional part at the end), 24000, 28000, 32000, 38500 (graft type polymer) ", manufactured by Nikko Chemical Co., Ltd.”
- NIKKOR T106 (polyoxyethylene sorbitan monooleate), MYS-IEX (polyoxyethylene monostearate), manufactured by Kawaken Fine Chemical Co., Ltd. Hinoacto T-8000 E, etc., Shin-Etsu Chemical Co., Ltd. manufactured, organosiloxane polymer -KP 341, Yusho Co., Ltd.
- W 001: cationic surfactant polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenyl ether, polyoxyethylene nonyl phenyl ether And nonionic surfactants such as polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester, anionic surfactants such as "W004, W005, W017", “EFKA-46, EFKA-” manufactured by Morishita Sangyo Co., Ltd.
- Dispers Aid 6 Disperse A 8
- disperse aid 15 disperse aid 9100 ", etc.
- ADEKA PLURONIC L31, F38, L42, L44, L61, L64, F68, P72, P95, F77, P84, F87 "manufactured by ADEKA Co., Ltd. , P94, L101, P103, F108, L121, P-123 "and” Ionette (trade name) S-20 "manufactured by Sanyo Chemical Industries, Ltd., and the like.
- pigment dispersants may be used alone or in combination of two or more. In the present invention, it is particularly preferable to use a combination of a pigment derivative and a polymer dispersant.
- the pigment dispersant may be used in combination with an alkali-soluble resin together with a terminal modified polymer having an anchor site on the pigment surface, a graft polymer, and a block polymer.
- alkali-soluble resin (meth) acrylic acid copolymer, itaconic acid copolymer, crotonic acid copolymer, maleic acid copolymer, partially esterified maleic acid copolymer, etc., and carboxylic acid in the side chain And the like, and particularly preferred is (meth) acrylic acid copolymer.
- the total content of the pigment dispersant is preferably 1 part by mass to 80 parts by mass, and more preferably 5 parts by mass to 70 parts by mass with respect to 100 parts by mass of the pigment. Part is more preferable, and 10 parts by mass to 60 parts by mass is more preferable.
- the specific dispersion resin is preferably 50% by mass or more, more preferably 60% by mass or more, and still more preferably 70% by mass or more, of the dispersant components contained in the coloring composition.
- the composition of the present invention may contain only one type of pigment dispersant, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- the amount thereof used is preferably in the range of 5 parts by mass to 100 parts by mass in terms of mass with respect to 100 parts by mass of the pigment, and 10 parts by mass to 80 More preferably, it is in the range of parts.
- the amount of the pigment derivative used is preferably in the range of 1 to 30 parts by mass in terms of mass with respect to 100 parts by mass of the pigment, and 3 to 20 parts by mass It is more preferably in the range, and particularly preferably in the range of 5 parts by mass to 15 parts by mass.
- the total content of the colorant and the dispersant component is 50% by mass or more and 90% by mass or less based on the total solid content of the coloring composition Is more preferably 55% by mass or more and 85% by mass or less and still more preferably 60% by mass or more and 80% by mass or less.
- the coloring composition of the present invention preferably further contains an alkali soluble resin.
- the molecular weight of the alkali-soluble resin is not particularly limited, but preferably Mw is 5,000 to 100,000. Also, Mn is preferably 1000 to 20,000.
- the alkali-soluble resin is a linear organic polymer, and promotes at least one alkali solubility in a molecule (preferably a molecule having an acrylic copolymer or a styrene copolymer as a main chain) It can be suitably selected from alkali-soluble resins having a group. From the viewpoint of heat resistance, polyhydroxystyrene resins, polysiloxane resins, acrylic resins, acrylamide resins, and acrylic / acrylamide copolymer resins are preferable. From the viewpoint of control of developability, acrylic resins and acrylamide resins are preferable. Resins and acrylic / acrylamide copolymer resins are preferred.
- Examples of groups promoting alkali solubility include, for example, carboxyl groups, phosphoric acid groups, sulfonic acid groups, and phenolic hydroxyl groups, but they are soluble in organic solvents and developed with weak alkaline aqueous solutions. Possible are preferred, and (meth) acrylic acid is mentioned as being particularly preferred. These acid groups may be of only one type, or of two or more types.
- Examples of the monomer capable of giving an acid group after the above polymerization include a monomer having a hydroxyl group such as 2-hydroxyethyl (meth) acrylate, a monomer having an epoxy group such as glycidyl (meth) acrylate, and 2-isocyanatoethyl (meth) acrylate. And monomers having an isocyanate group such as acrylate.
- the monomers for introducing these acid groups may be only one type or two or more types.
- a monomer having an acid group and / or a monomer capable of providing an acid group after polymerization hereinafter, may be referred to as "monomer for introducing an acid group").
- a known radical polymerization method can be applied to the production of the alkali-soluble resin.
- the polymerization conditions such as temperature, pressure, type of radical initiator and amount thereof, type of solvent, etc. when producing an alkali-soluble resin by radical polymerization method can be easily set by those skilled in the art, and the conditions are determined experimentally. You can also do so.
- a polymer having a carboxylic acid in a side chain is preferable, and a methacrylic acid copolymer, an acrylic acid copolymer, an itaconic acid copolymer, a crotonic acid copolymer Maleic acid copolymer, partially esterified maleic acid copolymer, alkali-soluble phenol resin such as novolak resin, etc., acid cellulose derivative having carboxylic acid in side chain, acid anhydride added to polymer having hydroxyl group are listed.
- copolymers of (meth) acrylic acid and other monomers copolymerizable therewith are suitable as the alkali-soluble resin.
- alkyl (meth) acrylates examples include alkyl (meth) acrylates, aryl (meth) acrylates, vinyl compounds and the like.
- alkyl (meth) acrylate and aryl (meth) acrylate methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, butyl (meth) acrylate, isobutyl (meth) acrylate, pentyl (meth) acrylate, Hexyl (meth) acrylate, octyl (meth) acrylate, phenyl (meth) acrylate, benzyl (meth) acrylate, tolyl (meth) acrylate, naphthyl (meth) acrylate, cyclohexyl (meth) acrylate, etc., vinyl compounds such as styrene, ⁇ -methylstyrene, vinyl tolu
- a compound represented by the following general formula (ED) and / or a compound represented by the following general formula (ED2) (hereinafter, these compounds may be referred to as "ether dimer") is essential. It is also preferable to include a polymer (a) formed by polymerizing monomer components to be used.
- R 1 and R 2 each independently represent a hydrogen atom or a hydrocarbon group having 1 to 25 carbon atoms which may have a substituent.
- General formula (ED2) In general formula (ED2), R represents a hydrogen atom or an organic group having 1 to 30 carbon atoms. As a specific example of the general formula (ED2), the description in JP-A-2010-168539 can be referred to.
- the colored composition of the present invention can form a cured coating film which is extremely excellent not only in heat resistance but also in transparency.
- the hydrocarbon group having 1 to 25 carbon atoms which may have a substituent represented by R 1 and R 2 in the above general formula (ED) showing the ether dimer is not particularly limited.
- Linear or branched alkyl groups such as methyl, ethyl, n-propyl, isopropyl, n-butyl, isobutyl, tert-butyl, tert-amyl, stearyl, lauryl, 2-ethylhexyl; aryl groups such as phenyl; Alicyclic groups such as cyclohexyl, tert-butylcyclohexyl, dicyclopentadienyl, tricyclodecanyl, isobornyl, adamantyl, 2-methyl-2-adamantyl; substituted with an alkoxy such as 1-methoxyethyl or 1-ethoxyethyl Alkyl groups; alkyl groups substituted with an aryl group such as benzyl; and the like.
- an acid such as methyl, ethyl, cyclohexyl, benzyl and the like, and a primary
- ether dimer examples include, for example, dimethyl-2,2 '-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2'-[oxybis (methylene)] bis-2-propenoate, (N-propyl) -2,2 '-[oxybis (methylene)] bis-2-propenoate, di (isopropyl) -2,2'-[oxybis (methylene)] bis-2-propenoate, di (n-butyl) ) -2,2 '-[oxybis (methylene)] bis-2-propenoate, di (isobutyl) -2,2'-[oxybis (methylene)] bis-2-propenoate, di (tert-butyl) -2, 2 '-[Oxybis (methylene)] bis-2-propenoate, di (tert-amyl) -2,2'-[oxybis (methylene)] bis-2-pro Nooate, di (steary
- dimethyl-2,2 '-[oxybis (methylene)] bis-2-propenoate, diethyl-2,2'-[oxybis (methylene)] bis-2-propenoate, dicyclohexyl-2,2'- [Oxybis (methylene)] bis-2-propenoate and dibenzyl-2,2 '-[oxybis (methylene)] bis-2-propenoate are preferred.
- One of these ether dimers may be used alone, or two or more thereof may be used.
- the structure derived from the compound represented by the above general formula (ED) may be copolymerized with other monomers.
- alkali-soluble resin which has a polymeric group.
- an alkali-soluble resin having a polymerizable group an alkali-soluble resin containing an allyl group, a (meth) acrylic group, an allyloxyalkyl group or the like in a side chain is useful.
- the polymer containing the above-mentioned polymerizable group include Diamond NR series (made by Mitsubishi Rayon Co., Ltd.), Photomer 6173 (containing COOH containing polyurethane acrylic oligomer. Diamond Shamrock Co.
- an alkali-soluble resin containing these polymerizable groups an isocyanate group and an OH group are reacted in advance to leave one unreacted isocyanate group, and a compound containing a (meth) acryloyl group and an acrylic resin containing a carboxyl group And an unsaturated group-containing acrylic resin obtained by the reaction of an acrylic resin containing a carboxyl group and a compound having both an epoxy group and a polymerizable double bond in the molecule.
- Resin acid pendant epoxy acrylate resin, polymerizable double bond-containing acrylic resin obtained by reacting acrylic resin containing OH group with dibasic acid anhydride having polymerizable double bond, acrylic resin containing OH group and isocyanate Resin in which a compound having a polymerizable group is reacted, JP-A-2002-229207 Resin obtained by basic treatment of a resin having an ester group having a leaving group such as a halogen atom or a sulfonate group at the ⁇ position or ⁇ position described in JP-A-2003-335814 and JP-A-2003-335814. And the like.
- the alkali-soluble resin may also contain a structural unit derived from an ethylenically unsaturated monomer represented by the following formula (X).
- formula (X) (In formula (X), R 1 represents a hydrogen atom or a methyl group, R 2 represents an alkylene group having 2 to 10 carbon atoms, and R 3 represents a hydrogen atom or a carbon number of 1 to 7 which may contain a benzene ring Represents an alkyl group of 20. n represents an integer of 1 to 15.)
- the carbon number of the alkylene group of R 2 is preferably 2 to 3.
- the carbon number of the alkyl group of R 3 is 1 to 20, more preferably 1 to 10, and the alkyl group of R 3 may contain a benzene ring.
- Examples of the alkyl group containing a benzene ring represented by R 3 include benzyl and 2-phenyl (iso) propyl.
- alkali-soluble resin in particular, a multicomponent copolymer comprising benzyl (meth) acrylate / (meth) acrylic acid copolymer and benzyl (meth) acrylate / (meth) acrylic acid / other monomers is suitable .
- benzyl (meth) acrylate / (meth) acrylic acid / (meth) acrylic acid-2-hydroxyethyl copolymer obtained by copolymerizing 2-hydroxyethyl methacrylate, as described in JP-A-H07-140654.
- -Hydroxypropyl (meth) acrylate / polystyrene macromonomer / benzyl methacrylate / methacrylic acid copolymer 2-hydroxy-3-phenoxypropyl acrylate / polymethyl methacrylate macromonomer / benzyl methacrylate / methacrylic acid copolymer, 2-hydroxyethyl Methacrylate / polystyrene macromonomer / methyl methacrylate / methacrylic acid copolymer, 2-hydroxyethyl methacrylate / polystyrene macromonomer / benzyl methacrylate / methacrylic acid copolymer, etc.
- Are particularly preferred examples include a copolymer of benzyl methacrylate / methacrylic acid.
- Binder Resins Described in 0098 and Binder Resins Used in Examples Binder Resins Described in Paragraphs 0022 to 0032 of JP 2012-137531 A and Binder Resins Used in Examples Binder resins described in paragraphs 0132 to 0143 of 024934 and binder resins used in the examples, binder resins used in paragraphs 0092 to 0098 of JP 2011-242752 A and examples, Paragraph number of the open 2012-032770 gazette It preferred to use a binder resin according to 030-0072. The contents of these are incorporated herein. More specifically, the following resins are preferred.
- the acid value of the alkali-soluble resin is preferably 30 mg KOH / g to 200 mg KOH / g, more preferably 50 mg KOH / g to 150 mg KOH / g, and particularly preferably 70 mg KOH / g to 120 mg KOH / g.
- the weight average molecular weight (Mw) of the alkali-soluble resin is preferably 2,000 to 50,000, more preferably 5,000 to 30,000, and particularly preferably 7,000 to 20,000.
- the content of the alkali-soluble resin is preferably 1% by mass to 15% by mass, more preferably 2% by mass, with respect to the total solid content of the coloring composition. It is ⁇ 12% by mass, particularly preferably 3% by mass to 10% by mass.
- the composition of the present invention may contain only one alkali-soluble resin, or two or more alkali-soluble resins. When it contains two or more types, it is preferable that the total amount becomes the said range.
- the coloring composition of the present invention in addition to the above-described components, is an organic solvent, a crosslinking agent, a polymerization inhibitor, a surfactant, an organic carboxylic acid, an organic carboxylic acid anhydride, insofar as the effects of the present invention are not impaired. You may contain other components, such as a thing.
- the coloring composition of the present invention may contain an organic solvent.
- the organic solvent is basically not particularly limited as long as the solubility of each component and the coatability of the coloring composition are satisfied, but in particular, the solubility, coatability and safety of the ultraviolet absorber, alkali soluble resin and dispersant. It is preferable to select in consideration of the nature. Moreover, when preparing the coloring composition in this invention, it is preferable that an at least 2 type of organic solvent is included.
- organic solvents examples include esters such as ethyl acetate, n-butyl acetate, isobutyl acetate, amyl formate, isoamyl acetate, isobutyl acetate, butyl propionate, isopropyl butyrate, ethyl butyrate, butyl butyrate, methyl lactate, ethyl lactate Alkyl oxyacetate (eg, methyl oxyacetate, ethyl oxyacetate, butyl oxyacetate (eg, methyl methoxyacetate, ethyl methoxyacetate, butyl methoxyacetate, methyl ethoxyacetate, ethyl ethoxyacetate etc.), alkyl 3-hydroxypropionate Esters (eg methyl 3-oxypropionate, ethyl 3-oxypropionate etc.
- esters such as ethyl acetate, n-butyl acetate, is
- Alkyl oxypropionates eg, methyl 2-oxypropionate, ethyl 2-oxypropionate, propyl 2-oxypropionate, etc.
- ethers For example, diethylene glycol dimethyl ether, tetrahydrofuran, ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, methyl cello
- ketones such as methyl ethyl ketone, cyclohexanone, cyclopentanone, 2-heptanone, 3-heptanone etc., and aromatic hydrocarbons
- ketones such as methyl ethyl ketone, cyclohexanone, cyclopentanone, 2-heptanone, 3-heptanone etc.
- aromatic hydrocarbons For example, toluene, xylene and the like are preferably mentioned.
- methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl cellosolve acetate, ethyl lactate, diethylene glycol dimethyl ether, butyl acetate, methyl 3-methoxypropionate, 2-heptanone, cyclohexanone, ethyl are particularly preferable in this case.
- the content of the organic solvent in the coloring composition is preferably from 5% by mass to 80% by mass, and preferably 5% by mass to 60% by mass, from the viewpoint of coatability. More preferably, 10% by mass to 50% by mass is particularly preferable.
- the composition of the present invention may contain only one type of organic solvent, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- a crosslinking agent may be additionally used in the coloring composition of the present invention to further increase the hardness of a cured film obtained by curing the coloring composition.
- the crosslinking agent is not particularly limited as long as it can perform film curing by a crosslinking reaction, and for example, at least at least one selected from (a) epoxy resin, (b) methylol group, alkoxymethyl group, and acyloxymethyl group At least one substituent selected from melamine compounds, guanamine compounds, glycoluril compounds or urea compounds, (c) methylol groups, alkoxymethyl groups, and acyloxymethyl groups, which are substituted by one substituent; A phenol compound, a naphthol compound or a hydroxyanthracene compound is mentioned.
- the compounding amount of the crosslinking agent is not particularly limited, but preferably 2 to 30% by mass, and 3 to 20% by mass of the total solid content of the composition. More preferable.
- the composition of the present invention may contain only one type of crosslinking agent, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- ⁇ polymerization inhibitor In the colored composition of the present invention, it is desirable to add a small amount of a polymerization inhibitor in order to prevent unnecessary thermal polymerization of the polymerizable compound during the production or storage of the colored composition.
- a polymerization inhibitor which can be used in the present invention, hydroquinone, p-methoxyphenol, di-tert-butyl-p-cresol, pyrogallol, tert-butyl catechol, benzoquinone, 4,4′-thiobis (3-methyl-6- (6-methyl) tert-Butylphenol), 2,2'-methylenebis (4-methyl-6-tert-butylphenol), N-nitrosophenylhydroxyamine cerous salt and the like.
- the addition amount of the polymerization inhibitor is preferably about 0.01% by mass to about 5% by mass with respect to the mass of the entire composition.
- the composition of the present invention may contain only one type of polymerization inhibitor, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- surfactant Various surfactants may be added to the coloring composition of the present invention from the viewpoint of further improving the coating properties.
- various surfactants such as a fluorine-based surfactant, a nonionic surfactant, a cationic surfactant, an anionic surfactant, a silicone surfactant and the like can be used.
- the coloring composition of the present invention further improves the liquid properties (in particular, the fluidity) when prepared as a coating liquid by containing a fluorine-based surfactant, the uniformity of the coating thickness and the saving of the coating Liquidity can be further improved. That is, in the case of forming a film using a coating liquid to which a coloring composition containing a fluorine-based surfactant is applied, the interfacial tension between the surface to be coated and the coating liquid is reduced to wet the surface to be coated The properties are improved, and the coatability on the surface to be coated is improved. For this reason, even in the case where a thin film of about several ⁇ m is formed with a small amount of liquid, it is effective in that film formation with a uniform thickness with small thickness unevenness can be more suitably performed.
- the liquid properties in particular, the fluidity
- the fluorine content in the fluorine-based surfactant is preferably 3% by mass to 40% by mass, more preferably 5% by mass to 30% by mass, and particularly preferably 7% by mass to 25% by mass.
- the fluorine-based surfactant having a fluorine content in this range is effective in terms of the uniformity of the thickness of the coating film and the liquid saving property, and the solubility in the coloring composition is also good.
- fluorine-based surfactants include Megafac F171, F172, F173, F176, F177, F141, F142, F143, F44, R30, F437, F475, F479, and the like.
- Same F482, same F554, same F780, same F781 above, DIC Corporation
- Florard FC430 same FC431, same FC171 (above, Sumitomo 3M Co., Ltd.)
- Surfron S-382 same SC-101, The SC-103, SC-104, SC-105, SC1068, SC-381, SC-383, S393, KH-40 (all manufactured by Asahi Glass Co., Ltd.) and the like can be mentioned.
- nonionic surfactants include glycerol, trimethylolpropane, trimethylolethane and their ethoxylates and propoxylates (eg, glycerol propoxylate, glycerine ethoxylate, etc.), polyoxyethylene lauryl ether, polyoxyethylene Stearyl ether, polyoxyethylene oleyl ether, polyoxyethylene octyl phenyl ether, polyoxyethylene nonyl phenyl ether, polyethylene glycol dilaurate, polyethylene glycol distearate, sorbitan fatty acid ester (Pluronic L10, L31, L61, L62 manufactured by BASF, 10R5, 17R2, 25R2, Tetronics 304, 701, 704, 901, 904, 150R1) Solsperse 20000 (Lubrizol Japan Co., Ltd.), and the like.
- cationic surfactants include phthalocyanine derivatives (trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.), organosiloxane polymer KP341 (manufactured by Shin-Etsu Chemical Co., Ltd.), (meth) acrylic acid Co) polymer poly flow No. 75, no. 90, no. 95 (manufactured by Kyoeisha Chemical Co., Ltd.), W001 (manufactured by Yusho Co., Ltd.), and the like.
- phthalocyanine derivatives trade name: EFKA-745, manufactured by Morishita Sangyo Co., Ltd.
- organosiloxane polymer KP341 manufactured by Shin-Etsu Chemical Co., Ltd.
- (meth) acrylic acid Co) polymer poly flow No. 75, no. 90, no. 95 manufactured by Kyoeisha Chemical Co., Ltd.
- W001 manufactured by Yusho Co., Ltd.
- anionic surfactant examples include W004, W005, W017 (manufactured by Yusho Co., Ltd.), and the like.
- silicone type surfactant for example, Toray Dow Corning Co., Ltd. product "Tore silicone DC3PA”, “Tore silicone SH7PA”, “Tore silicone DC11PA”, “Tore silicone SH21PA”, “Tore silicone SH28PA”, “Tore silicone SH21PA” Silicone SH29PA, Toray Silicone SH30PA, Toray Silicone SH8400, Momentive Performance Materials' TSF-4440, TSF-4300, TSF-4445, TSF-4460, TSF “4452”, “KP341”, “KF6001”, “KF6002” manufactured by Shin-Etsu Silicone Co., Ltd., “BYK307”, “BYK323”, “BYK330” manufactured by BIC Chemie, and the like.
- the addition amount of the surfactant is preferably 0.001% by mass to 2.0% by mass, and more preferably, the total mass of the coloring composition.
- the content is 0.005% by mass to 1.0% by mass.
- the composition of the present invention may contain only one surfactant or two or more surfactants. When it contains two or more types, it is preferable that the total amount becomes the said range.
- the coloring composition of the present invention may contain an organic carboxylic acid having a molecular weight of 1000 or less and / or an organic carboxylic acid anhydride. Specifically as an organic carboxylic acid compound, aliphatic carboxylic acid or aromatic carboxylic acid is mentioned.
- aliphatic carboxylic acids include monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, glycolic acid, acrylic acid and methacrylic acid, oxalic acid, malonic acid, succinic acid, Glutaric acid, adipic acid, pimelic acid, cyclohexanedicarboxylic acid, cyclohexene dicarboxylic acid, itaconic acid, citraconic acid, dicarboxylic acids such as maleic acid and fumaric acid, and tricarboxylic acids such as tricarballylic acid and aconic acid.
- monocarboxylic acids such as formic acid, acetic acid, propionic acid, butyric acid, valeric acid, pivalic acid, caproic acid, glycolic acid, acrylic acid and methacrylic acid, oxalic acid, malonic acid, succinic acid, Glutaric acid,
- aromatic carboxylic acids include carboxylic acids such as benzoic acid and phthalic acid in which a carboxyl group is directly bonded to a phenyl group, and carboxylic acids in which a carboxyl group is bonded from a phenyl group via a carbon bond.
- carboxylic acids such as benzoic acid and phthalic acid in which a carboxyl group is directly bonded to a phenyl group
- carboxylic acids in which a carboxyl group is bonded from a phenyl group via a carbon bond.
- those having a molecular weight of 600 or less, particularly 50 to 500 and specifically, for example, maleic acid, malonic acid, succinic acid and itaconic acid are preferable.
- organic carboxylic acid anhydrides include aliphatic carboxylic acid anhydrides and aromatic carboxylic acid anhydrides. Specifically, for example, acetic acid anhydride, trichloroacetic acid anhydride, trifluoroacetic acid anhydride, tetrahydrophthalic acid anhydride Succinic anhydride, maleic anhydride, citraconic anhydride, itaconic anhydride, glutaric anhydride, 1,2-cyclohexene dicarboxylic acid anhydride, n-octadecyl succinic anhydride, 5-norbornene-2,3-dicarboxylic acid anhydride, etc. Aliphatic carboxylic anhydrides may be mentioned.
- aromatic carboxylic anhydride examples include phthalic anhydride, trimellitic anhydride, pyromellitic anhydride, naphthalic anhydride and the like. Among these, those having a molecular weight of 600 or less, particularly 50 to 500, and specifically, for example, maleic anhydride, succinic anhydride, citraconic anhydride and itaconic anhydride are preferable.
- the amount of the organic carboxylic acid and / or the organic carboxylic acid anhydride added is usually 0.01 to 10% by weight based on the total solids. Preferably, it is in the range of 0.03 to 5% by weight, more preferably 0.05 to 3% by weight.
- the composition of the present invention may contain only one type of organic carboxylic acid and / or organic carboxylic acid anhydride, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- various additives for example, fillers, adhesion promoters, antioxidants, ultraviolet light absorbers, aggregation inhibitors and the like can be added to the coloring composition, if necessary.
- these additives include those described in paragraphs [0155] to [0156] of JP-A-2004-295116, the contents of which are incorporated herein.
- the coloring composition of the present invention may contain the sensitizer and the light stabilizer described in paragraph 0078 of JP-A-2004-295116, and the thermal polymerization inhibitor described in paragraph 0081 of the same publication.
- the composition of the present invention may contain only one type of each of the above components, or may contain two or more types. When it contains two or more types, it is preferable that the total amount becomes the said range.
- the coloring composition of the present invention is prepared by mixing the above-mentioned components.
- each component which comprises a coloring composition may be mix
- the order of introduction and working conditions at the time of blending are not particularly limited.
- the composition may be prepared by dissolving and dispersing all the components simultaneously in a solvent, or, if necessary, appropriately setting each component as two or more solutions / dispersions at the time of use ) And these may be mixed to prepare a composition.
- the colored composition prepared as described above can be used after being separated by filtration using a filter or the like.
- the colored composition of the present invention is preferably filtered with a filter for the purpose of removing foreign matter and reducing defects. It can be used without particular limitation as long as it is conventionally used for filtration applications and the like.
- a fluorine resin such as PTFE (polytetrafluoroethylene), a polyamide resin such as nylon-6 or nylon-6, 6, a polyolefin resin (including high density and ultrahigh molecular weight) such as polyethylene and polypropylene (PP), etc. Filter by Among these materials, polypropylene (including high density polypropylene) is preferable.
- the pore diameter of the filter is preferably 7.0 ⁇ m or less, more preferably 3.0 ⁇ m or less, still more preferably 2.5 ⁇ m or less, still more preferably 2.0 ⁇ m or less, and particularly preferably 0.5 ⁇ m or less. By setting this range, it is possible to reliably remove fine foreign matter which inhibits the preparation of a uniform and smooth colored composition in a later step.
- the filtering with the first filter may be performed only once or may be performed twice or more.
- the pore size here can refer to the nominal value of the filter manufacturer.
- the second filter can be formed of the same material as the first filter described above.
- the filtering with the first filter may be performed only with the dispersion, and the second filtering may be performed after mixing other components.
- the colored composition of the present invention is preferably used for forming a colored layer of a color filter. More specifically, since the colored composition of the present invention can form a cured film excellent in heat resistance and color characteristics, it is suitably used to form a colored pattern (colored layer) of a color filter. .
- the coloring composition of the present invention is suitably used for forming a coloring pattern such as a color filter used in an image display device such as a solid-state imaging device (for example, CCD, CMOS etc.) or a liquid crystal display (LCD). Can. Furthermore, it can be used suitably also as preparation applications, such as printing ink, inkjet ink, and a paint. Among them, color filters for solid-state imaging devices such as CCD and CMOS can be suitably used as a production application.
- the cured film of the present invention is formed by curing the colored composition of the present invention.
- Such a cured film is preferably used for a color filter.
- the colored composition of the present invention is applied on a support to form a colored composition layer, and an unnecessary portion is removed to form a colored pattern.
- the pattern formation method of the present invention can be suitably applied to the formation of a colored pattern (pixel) of a color filter.
- a color filter may be produced by patterning by a so-called photolithography method, or a pattern may be formed by dry etching.
- a step of applying a coloring composition onto a support to form a coloring composition layer a step of exposing the above coloring composition layer in a pattern, and And d) developing and removing the unexposed area to form a colored pattern.
- a process for forming a resist layer, a process for patterning the photoresist layer by exposure and development to obtain a resist pattern, and a process for dry etching the colored layer using the resist pattern as an etching mask The method is illustrated.
- the photolithographic method is more preferable. The details of these will be described below.
- color filter for solid-state imaging device may be simply referred to as “color filter”.
- Step of Forming a Colored Composition Layer the coloring composition of this invention is applied on a support body, and a coloring composition layer formation process is formed.
- an imaging element such as a charge coupled device (CCD) or a complementary metal oxide semiconductor (CMOS) is provided on a substrate (for example, a silicon substrate)
- CMOS complementary metal oxide semiconductor
- the colored pattern in the present invention may be formed on the imaging device forming surface side (front surface) of the substrate for a solid-state imaging device, or may be formed on the imaging device non-forming surface side (rear surface).
- a light shielding film may be provided between colored patterns in the solid-state imaging device or on the back surface of the substrate for the solid-state imaging device.
- a subbing layer may be provided on the support to improve the adhesion with the upper layer, to prevent the diffusion of substances, or to planarize the substrate surface.
- the subbing layer may contain a solvent, an alkali-soluble resin, a polymerizable compound, a polymerization inhibitor, a surfactant, a photopolymerization initiator and the like, and each of these components may be added to the composition of the present invention described above. It is preferable to select suitably.
- various coating methods such as slit coating, ink jet method, spin coating, cast coating, roll coating, screen printing can be applied.
- Drying (pre-baking) of the colored composition layer applied on the support can be carried out at a temperature of 50 ° C. to 140 ° C. for 10 seconds to 300 seconds by a hot plate, an oven or the like.
- the colored composition layer formed in the colored composition layer forming step is pattern-exposed through a mask having a predetermined mask pattern, using an exposure apparatus such as a stepper, for example. Thereby, a cured film is obtained.
- an exposure apparatus such as a stepper, for example.
- ultraviolet rays such as g-line and i-line are preferably used (particularly preferably i-line).
- Irradiation dose is more preferably 30mJ / cm 2 ⁇ 1500mJ / cm 2 is preferably 50mJ / cm 2 ⁇ 1000mJ / cm 2, 80mJ / cm 2 ⁇ 500mJ / cm 2 is particularly preferred.
- the thickness of the cured film (colored film) is preferably 1.0 ⁇ m or less, more preferably 0.1 ⁇ m to 0.9 ⁇ m, and still more preferably 0.2 ⁇ m to 0.8 ⁇ m.
- the film thickness is preferably 1.0 ⁇ m or less, high resolution and high adhesion can be obtained, which is preferable.
- a cured film having a thin film thickness of 0.7 ⁇ m or less can also be suitably formed, and the obtained cured film is developed in a pattern forming step to be described later to form a thin film. Although it is possible to obtain a colored pattern excellent in developability, surface roughness suppression and pattern shape.
- the colored composition layer in the non-light-irradiated portion in the exposure step is eluted in the aqueous alkali solution, and only the photocured portion remains.
- the developing solution an organic alkaline developing solution which does not cause damage to the underlying imaging element or circuit is desirable.
- the development temperature is usually 20 ° C. to 30 ° C.
- the development time is conventionally 20 seconds to 90 seconds. In recent years, it may be carried out for 120 seconds to 180 seconds in order to remove more residue.
- the process of shaking off the developer every 60 seconds and further supplying the developer anew may be repeated several times.
- alkaline agent used for a developing solution for example, ammonia water, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, tetrapropylammonium hydroxide, tetrabutylammonium hydroxide, benzyltrimethylammonium hydroxide
- Organic alkaline compounds such as choline, pyrrole, piperidine and 1,8-diazabicyclo- [5,4,0] -7-undecene and the like, and the concentration of these alkali agents is 0.001% to 10% by mass
- An alkaline aqueous solution diluted with pure water to preferably 0.01% by mass to 1% by mass is preferably used as a developer.
- An inorganic alkali may be used for the developer, and as the inorganic alkali, for example, sodium hydroxide, potassium hydroxide, sodium carbonate, sodium hydrogencarbonate, sodium borate, sodium metaborate and the like are preferable.
- the developing solution which consists of such alkaline aqueous solution, generally it wash
- Post-baking is a heat treatment after development to complete the curing, and a heat curing treatment is usually performed at 100 ° C. to 240 ° C., preferably 200 ° C. to 240 ° C.
- This post-baking treatment is carried out continuously or batchwise using a heating means such as a hot plate, convection oven (hot air circulation dryer), high frequency heater or the like so that the coated film after development is under the above conditions. be able to.
- the dry etching can be performed using an etching gas with the colored layer as a mask and the patterned photoresist layer as a mask. Specifically, a positive or negative radiation sensitive composition is applied onto the colored layer and dried to form a photoresist layer. In the formation of the photoresist layer, it is preferable to further perform a pre-bake treatment. In particular, as a process for forming a photoresist, it is desirable that the heat treatment (PEB) after exposure and the heat treatment (post-bake treatment) after development be performed.
- PEB heat treatment
- post-bake treatment post-bake treatment
- a positive type radiation sensitive composition As a photoresist, for example, a positive type radiation sensitive composition is used.
- the positive type radiation sensitive composition may be a positive type photosensitive to radiation such as ultraviolet (g ray, h ray, i ray), far ultraviolet ray including excimer laser, etc., electron beam, ion beam and X ray.
- Positive resist compositions suitable for resists can be used.
- the radiation g-ray, h-ray and i-ray are preferable, and i-ray is more preferable among them.
- a composition containing a quinone diazide compound and an alkali-soluble resin is preferable as the positive type radiation sensitive composition.
- the positive radiation-sensitive composition containing a quinonediazide compound and an alkali-soluble resin is that the quinonediazide group is decomposed by irradiation with light having a wavelength of 500 nm or less to form a carboxyl group, and as a result, it becomes alkaline soluble to alkaline insoluble. It is used. Since this positive photoresist has extremely excellent resolution, it is used for the fabrication of integrated circuits such as ICs and LSIs.
- a naphthoquinone diazide compound is mentioned as a quinone diazide compound. Examples of commercially available products include FHi 622 BC "(manufactured by Fujifilm Electronics Materials Co., Ltd.).
- the thickness of the photoresist layer is preferably 0.1 to 3 ⁇ m, more preferably 0.2 to 2.5 ⁇ m, and still more preferably 0.3 to 2 ⁇ m.
- coating of a photoresist layer can be suitably performed using the application method in a colored layer as stated above.
- the photoresist layer is exposed and developed to form a resist pattern (patterned photoresist layer) provided with a group of resist through holes.
- the formation of the resist pattern is not particularly limited, and can be performed by appropriately optimizing the conventionally known photolithography technology.
- a resist through hole group in the photoresist layer By providing a resist through hole group in the photoresist layer by exposure and development, a resist pattern as an etching mask used in the next etching is provided on the colored layer.
- Exposure of the photoresist layer is carried out by subjecting a positive or negative radiation sensitive composition to exposure through g-ray, h-ray, i-ray or the like, preferably i-ray, through a predetermined mask pattern. Can. After exposure, development processing with a developer is performed to remove the photoresist in accordance with the area where the colored pattern is to be formed.
- any developer can be used as the developer as long as it does not affect the colored layer containing a colorant and dissolves the exposed part of the positive resist and the uncured part of the negative resist, for example, various organic compounds.
- Combinations of solvents and alkaline aqueous solutions can be used.
- an alkaline aqueous solution prepared by dissolving an alkaline compound to a concentration of 0.001 to 10% by mass, preferably 0.01 to 5% by mass, is suitable.
- alkaline compound examples include sodium hydroxide, potassium hydroxide, sodium carbonate, sodium borate, sodium metaborate, aqueous ammonia, ethylamine, diethylamine, dimethylethanolamine, tetramethylammonium hydroxide, tetraethylammonium hydroxide, choline, Pyrrole, piperidine, 1,8-diazabicyclo [5.4.0] -7-undecene and the like can be mentioned.
- an alkaline aqueous solution is used as a developing solution, washing treatment with water is generally performed after development.
- the resist pattern as an etching mask, patterning is performed by dry etching so that through holes are formed in the colored layer. Thereby, a coloring pattern is formed.
- the through hole group is provided in a checkered manner in the colored layer. Therefore, the first colored pattern in which the through holes are provided in the colored layer has a plurality of square-shaped first colored pixels in a checkered manner.
- the colored layer is dry etched using the resist pattern as an etching mask.
- Representative examples of dry etching are disclosed in JP-A-59-126506, JP-A-59-46628, JP-A-58-9108, JP-A-58-2809, JP-A-57-148706, JP-A-61-41102, etc. There are methods described in each of the publications.
- the dry etching is preferably performed in the following manner from the viewpoint of forming the pattern cross section closer to a rectangle or from the viewpoint of reducing damage to the support.
- a mixed gas of fluorine-based gas and oxygen gas (O 2 ) etching is performed to a region (depth) where the support is not exposed, and after this first-stage etching, nitrogen gas ( Second step etching using a mixed gas of N 2 ) and oxygen gas (O 2 ), preferably to the vicinity of the region (depth) where the support is exposed, and over-etching performed after the support is exposed And the form containing is preferable.
- Dry etching is performed by obtaining etching conditions in advance by the following method.
- (1) The etching rate (nm / min) in the first stage etching and the etching rate (nm / min) in the second stage etching are respectively calculated.
- (2) The time for etching the desired thickness in the first stage etching and the time for etching the desired thickness in the second stage etching are respectively calculated.
- (3) The first stage of etching is performed in accordance with the etching time calculated in (2) above.
- the second stage of etching is performed in accordance with the etching time calculated in (2) above.
- the etching time may be determined by end point detection, and the second etching may be performed according to the determined etching time.
- (5) The over-etching time is calculated with respect to the total time of the above (3) and (4), and the over-etching is performed.
- the mixed gas used in the etching step of the first step preferably contains a fluorine-based gas and an oxygen gas (O 2 ) from the viewpoint of processing the organic material to be etched into a rectangular shape.
- damage to the support can be avoided by etching to the area where the support is not exposed.
- damage to the support is performed after etching is performed to a region where the support is not exposed by the mixed gas of fluorine-based gas and oxygen gas in the etching step of the first step. From the viewpoint of avoidance, it is preferable to perform the etching process using a mixed gas of nitrogen gas and oxygen gas.
- the ratio of the latter in the total etching amount (the sum of the etching amount in the first step etching step and the etching amount in the second step etching step) is preferably in the range of more than 0% and 50% or less And 10 to 20% is more preferable.
- the etching amount refers to an amount calculated from the difference between the remaining film thickness of the film to be etched and the film thickness before etching.
- the etching preferably includes an over-etching process.
- the over-etching process is preferably performed with the over-etching ratio set. Moreover, it is preferable to calculate the over-etching ratio from the etching processing time to be performed first.
- the over-etching ratio can be set arbitrarily, it is preferably 30% or less of the etching processing time in the etching step, and it is 5 to 25% in terms of etching resistance of the photoresist and maintaining rectangularity of the pattern to be etched. Is more preferable, and 10 to 15% is particularly preferable.
- the resist pattern ie, the etching mask
- the removal of the resist pattern preferably includes the steps of: applying a stripping solution or a solvent onto the resist pattern to make the resist pattern removable; and removing the resist pattern using cleaning water.
- a step of applying a stripping solution or a solvent on the resist pattern to make the resist pattern removable for example, a step of applying a stripping solution or a solvent on at least a resist pattern, and stagnating for a predetermined time for paddle development Can be mentioned.
- the time for which the stripping solution or solvent is stagnated is not particularly limited, but is preferably several tens of seconds to several minutes.
- a process of removing the resist pattern using cleaning water for example, a process of removing the resist pattern by spraying cleaning water onto the resist pattern from a spray type or shower type spray nozzle can be mentioned.
- washing water pure water can be preferably used.
- examples of the injection nozzle include an injection nozzle in which the entire support is included in the injection range, and an injection nozzle which is a movable injection nozzle and whose movable range includes the entire support.
- the spray nozzle is movable, the resist pattern can be removed more effectively by moving the support from the center to the end of the support twice or more during the process of removing the resist pattern to spray the washing water. be able to.
- the stripping solution generally contains an organic solvent, but may further contain an inorganic solvent.
- organic solvent for example, 1) hydrocarbon compound, 2) halogenated hydrocarbon compound, 3) alcohol compound, 4) ether or acetal compound, 5) ketone or aldehyde compound, 6) ester compound 7) Polyhydric alcohol compounds, 8) carboxylic acids or acid anhydride compounds thereof, 9) phenolic compounds, 10) nitrogen-containing compounds, 11) sulfur-containing compounds, 12) fluorine-containing compounds.
- the stripping solution preferably contains a nitrogen-containing compound, and more preferably contains a non-cyclic nitrogen-containing compound and a cyclic nitrogen-containing compound.
- the non-cyclic nitrogen-containing compound is preferably a non-cyclic nitrogen-containing compound having a hydroxyl group.
- monoisopropanolamine, diisopropanolamine, triisopropanolamine, N-ethylethanolamine, N, N-dibutylethanolamine, N-butylethanolamine, monoethanolamine, diethanolamine, triethanolamine and the like It is preferably monoethanolamine, diethanolamine or triethanolamine, more preferably monoethanolamine (H 2 NCH 2 CH 2 OH).
- cyclic nitrogen-containing compounds isoquinoline, imidazole, N-ethylmorpholine, ⁇ -caprolactam, quinoline, 1,3-dimethyl-2-imidazolidinone, ⁇ -picoline, ⁇ -picoline, ⁇ -picoline, 2- Pipecoline, 3-pipecoline, 4-pipecoline, piperazine, piperidine, pyrazine, pyridine, pyrrolidine, N-methyl-2-pyrrolidone, N-phenylmorpholine, 2,4-lutidine, 2,6-lutidine and the like, and preferred Is N-methyl-2-pyrrolidone, N-ethyl morpholine, more preferably N-methyl-2-pyrrolidone (NMP).
- NMP N-methyl-2-pyrrolidone
- the stripping solution preferably contains a non-cyclic nitrogen-containing compound and a cyclic nitrogen-containing compound.
- a non-cyclic nitrogen-containing compound at least one selected from monoethanolamine, diethanolamine, and triethanolamine, and cyclic It is more preferable to contain at least one selected from N-methyl-2-pyrrolidone and N-ethyl morpholine as the nitrogen-containing compound, and it is even more preferable to contain monoethanolamine and N-methyl-2-pyrrolidone.
- the resist pattern 52 formed on the first colored pattern 12 only needs to be removed, and the deposit as the etching product adheres to the side wall of the first colored pattern 12 However, the deposit may not be completely removed.
- the deposit means an etching product adhering to and deposited on the side wall of the colored layer.
- the content of the non-cyclic nitrogen-containing compound is 9 parts by mass to 11 parts by mass with respect to 100 parts by mass of the stripping solution, and the content of the cyclic nitrogen-containing compound is 100 parts by mass of the stripping solution.
- those which are 65 parts by mass or more and 70 parts by mass or less are desirable.
- the stripping solution is preferably one obtained by diluting a mixture of a non-cyclic nitrogen-containing compound and a cyclic nitrogen-containing compound with pure water.
- the manufacturing method of this invention may have a well-known process as a manufacturing method of the color filter for solid-state image sensors as processes other than the above as needed.
- a curing step of curing the formed colored pattern by heating and / or exposure may be included, if necessary.
- the coloring composition according to the present invention when used, for example, clogging of the nozzle or piping of the discharge unit of the coating device or contamination due to adhesion, sedimentation or drying of the coloring composition or pigment in the coating device may occur. is there. Therefore, in order to efficiently clean the contamination caused by the coloring composition of the present invention, it is preferable to use the solvent for the above-mentioned composition as a cleaning solution. Also, Japanese Patent Application Laid-Open Nos. 7-128867, 7-146562, 8-278637, 2000-273370, 2006-85140, 2006-291191, and the like.
- the cleaning solution described in JP2007-2101A, JP2007-2102A, JP2007-281523A, and the like can also be suitably used as the removal of the colored composition according to the present invention.
- alkylene glycol monoalkyl ether carboxylate and alkylene glycol monoalkyl ether are preferable.
- These solvents may be used alone or in combination of two or more. When mixing 2 or more types, it is preferable to mix the solvent which has a hydroxyl group, and the solvent which does not have a hydroxyl group.
- the mass ratio of the solvent having a hydroxyl group to the solvent having no hydroxyl group is 1/99 to 99/1, preferably 10/90 to 90/10, and more preferably 20/80 to 80/20.
- the surfactant related to the composition described above may be added to the cleaning solution.
- the color filter of the present invention uses the coloring composition of the present invention, it can perform exposure with an excellent exposure margin, and the formed coloring pattern (colored pixel) is excellent in the pattern shape, and the surface of the pattern is rough or Since the residue in the developing unit is suppressed, the color characteristic is excellent.
- the color filter of the present invention can be suitably used for solid-state imaging devices such as CCDs and CMOSs, and is particularly suitable for high-resolution CCDs and CMOSs having one million pixels or more.
- the color filter for solid-state imaging device of the present invention can be used, for example, as a color filter disposed between a light receiving portion of each pixel constituting a CCD or a CMOS and a microlens for collecting light.
- the film thickness of the colored pattern (colored pixel) in the color filter of the present invention is preferably 2.0 ⁇ m or less, more preferably 1.0 ⁇ m or less, and still more preferably 0.7 ⁇ m or less.
- the size (pattern width) of the colored pattern (colored pixel) is preferably 2.5 ⁇ m or less, more preferably 2.0 ⁇ m or less, and particularly preferably 1.7 ⁇ m or less.
- the solid-state imaging device of the present invention includes the color filter of the present invention described above.
- the configuration of the solid-state imaging device according to the present invention is the configuration provided with the color filter according to the present invention, and is not particularly limited as long as it functions as a solid-state imaging device. .
- a support there are provided a plurality of photodiodes constituting a light receiving area of a solid-state imaging device (CCD image sensor, CMOS image sensor, etc.) and transfer electrodes made of polysilicon or the like, It has a light shielding film made of tungsten or the like in which only the light receiving portion of the photodiode is opened, and has a device protective film made of silicon nitride or the like formed on the light shielding film to cover the entire light shielding film and the photodiode light receiving portion It is a structure which has a color filter for solid-state image sensors of this invention on a device protective film. Furthermore, a configuration having a condensing means (for example, a micro lens etc. hereinafter the same) on the device protective layer and under the color filter (closer to the support), or a constitution having a condensing means on the color filter Or the like.
- a condensing means for example, a micro lens etc. hereinafter the same
- the color filter of the present invention can be used not only for the above solid-state imaging device but also for image display devices such as liquid crystal display devices and organic EL display devices, and is particularly suitable for use in liquid crystal display devices.
- the liquid crystal display device provided with the color filter of the present invention can display a high quality image excellent in display characteristics with good color tone of the display image.
- the color filter of the present invention may be used in a color TFT liquid crystal display device.
- the color TFT liquid crystal display device is described, for example, in “Color TFT liquid crystal display (Kyoritsu Publishing Co., Ltd., published in 1996)”.
- the present invention is applied to a liquid crystal display device with a wide viewing angle such as IPS or other horizontal electric field drive method, MVA or other pixel division method, STN, TN, VA, OCS, FFS, R-OCB, etc. it can.
- the color filter in the present invention can also be used for a bright and high-definition color-filter on array (COA) system.
- COA color-filter on array
- the required characteristics for the color filter layer are required to have the required characteristics for the interlayer insulating film, that is, the low dielectric constant and the stripping solution resistance, in addition to the usual required characteristics as described above.
- the color filter of the present invention since a dye multimer having excellent hue is used, the color purity, light transmittance, etc. are good and the coloration of the colored pattern (pixel) is excellent, so the resolution is high and the long-term durability is excellent.
- a liquid crystal display device of a COA system can be provided.
- a resin film may be provided on the color filter layer.
- the liquid crystal display device provided with the color filter in the present invention is composed of various members such as an electrode substrate, a polarizing film, a retardation film, a backlight, a spacer, a viewing angle ensuring film, in addition to the color filter in the present invention.
- the color filter of the present invention can be applied to a liquid crystal display composed of these known members.
- these members for example, “'94 Liquid crystal display peripheral materials and chemicals market (Kentaro Shima, Inc., CMSC Co., Ltd. 1994 issue),” “Present state and future prospects of liquid crystal related market in 2003 (second volume) Co., Ltd. Fuji Chimera Research Institute, published in 2003).
- backlight see SID meeting Digest 1380 (2005) (A. Konno et. Al), pages 18 to 24 of Monthly Display December 2005 (Yasuhiro Shima), pages 25 to 30 (Takaaki Yagi), etc. Have been described.
- the color filter according to the present invention When the color filter according to the present invention is used in a liquid crystal display device, high contrast can be realized when it is combined with a conventionally known cold cathode tube three wavelength tube, but red, green and blue LED light sources (RGB-LED) By using as a backlight, it is possible to provide a liquid crystal display device having high luminance and high color purity and good color reproducibility.
- RGB-LED red, green and blue LED light sources
- Rhodamine B was dissolved in 125 g of chloroform, 9.6 g (62.6 mmol) of phosphorus oxychloride was added dropwise while cooling with an ice bath. Thereafter, the mixture is heated at an external temperature of 65 ° C. for 3 hours, cooled to 20 ° C., 9.8 g (75.2 mmol) of 2-hydroxyethyl methacrylate is added while cooling in an ice bath, and 30.8 g (304 mmol) of triethylamine is added Added. The internal temperature was adjusted to 20 ° C., and after stirring for 3 hours, 100 g of chloroform was added, and after liquid separation with water, the chloroform layer was concentrated.
- the mixture was partitioned with 200 mL of ethyl acetate and 100 mL of water, and the ethyl acetate layer was concentrated to obtain 17.2 g of (X-1).
- Maximum absorption wavelength ( ⁇ max) 552 nm (methanol solution).
- Synthesis Example 7 ⁇ Synthesis of Dye Monomer (X-7)> The same procedure as in Synthesis Example 1 was repeated except that potassium bis (trifluoromethanesulfonyl) imide was changed to sodium tetrakis [3,5-bis (trifluoromethyl) phenyl] borate (37.0 g). 45.2 g of monomer (X-6) was obtained.
- Synthesis Example 8 ⁇ Synthesis of Dye Monomer (X-8)> A dye monomer (X-8) was prepared in the same manner as in Synthesis Example 1 except that potassium bis (trifluoromethanesulfonyl) imide was changed to tetrakis [4-fluorophenyl] borate sodium hydrate (17.3 g). ) was obtained 32.2 g.
- Synthesis Example 9 ⁇ Synthesis of Dye Monomer (X-9)> The same procedure as in Synthesis Example 1 was repeated except that 2-hydroxyethyl methacrylate was changed to 2-hydroxyethyl acrylate (8.73 g), to obtain 17.4 g of a dye monomer (X-9).
- Synthesis Example 10 ⁇ Synthesis of Dye Monomer (X-10)> The same procedure was performed as in Synthesis Example 1 except that 2-hydroxyethyl methacrylate was changed to N- (2-hydroxyethyl) acrylamide (8.65 g), to obtain 17.1 g of a dye monomer (X-10).
- 2-hydroxyethyl methacrylate was changed to N- (2-hydroxyethyl) acrylamide (8.65 g), to obtain 17.1 g of a dye monomer (X-10).
- Synthesis Example 11 ⁇ Synthesis of Dye Monomer (X-11)> The same procedure as in Synthesis Example 1 was repeated except that 2-hydroxyethyl methacrylate was changed to N- (2-hydroxyethyl) methacrylamide (8.92 g), 17.2 g of dye monomer (X-11) Obtained.
- Synthesis Example 12 ⁇ Synthesis of Dye Monomer (X-12)> The same procedure as in Synthesis Example 1 was repeated except that 2-hydroxyethyl methacrylate was changed to 2-hydroxyethyl 4-vinylbenzoate (14.4 g), to obtain 18.4 g of dye monomer (X-12).
- 2-hydroxyethyl methacrylate was changed to 2-hydroxyethyl 4-vinylbenzoate (14.4 g), to obtain 18.4 g of dye monomer (X-12).
- Synthesis Example 13 ⁇ Synthesis of Dye Monomer (X-13)> The same operation as in Synthesis Example 1 was carried out except that 2-hydroxyethyl methacrylate was changed to 5-hydroxypentyl methacrylate (12.9 g), to obtain 17.9 g of a dye monomer (X-13).
- Synthesis Example 14 ⁇ Synthesis of Dye Monomer (X-14)> The same operation was performed except that rhodamine B in Synthesis Example 1 was changed to the following compound (a) (18.9 g), to obtain 19.5 g of a dye monomer (X-14).
- Rhodamine B was dissolved in 125 g of chloroform, 9.6 g (62.6 mmol) of phosphorus oxychloride was added dropwise while cooling with an ice bath. Thereafter, the mixture was heated at an external temperature of 65 ° C. for 3 hours, cooled to 20 ° C., transferred to a dropping funnel, and added dropwise to a solution of 200 g of 1,5-pentanediol and 30.8 g (304 mmol) of triethylamine while cooling with ice. The internal temperature was adjusted to 20 ° C., and after stirring for 3 hours, 100 g of chloroform was added, and after liquid separation with water, the chloroform layer was concentrated.
- the mixture was partitioned with 200 mL of ethyl acetate and 100 mL of water, and the ethyl acetate layer was concentrated to obtain 17.2 g of (X-1).
- ⁇ max 552 nm (methanol solution).
- Rhodamine B was dissolved in 125 g of chloroform.
- 9.6 g (62.6 mmol) of phosphorus oxychloride was added dropwise while cooling with an ice bath.
- the mixture is heated at an external temperature of 65 ° C. for 3 hours, cooled to 20 ° C., and 9.9 g (75.2 mmol) of 2,2-dimethyl-1,3-dioxolane-4-methanol is added while cooling with an ice bath.
- 30.8 g (304 mmol) of triethylamine were added.
- m / z (posi) indicates the molecular weight observed in the positive mode of MALDI TOF MASS
- m / z (nega) indicates the molecular weight observed in the negative mode of MALDI TOF MASS, respectively.
- Monomer (X-1) (16.4 g), methacrylic acid (0.80 g), dodecyl mercaptan (0.51 g), propylene glycol 1-monomethyl ether 2-acetate (hereinafter also referred to as "PGMEA") (46. 6 g) were mixed and half added to a three neck flask and heated to 80 ° C. under a nitrogen atmosphere. To the remaining solution, add 2,2'-azobis (isobutyric acid) dimethyl) (trade name: V601, manufactured by Wako Pure Chemical Industries, Ltd.) (0.58 g) and dissolve it in a three-necked flask over 2 hours It dripped.
- PGMEA propylene glycol 1-monomethyl ether 2-acetate
- raw material monomers A to D represent monomers represented by the following structural formula.
- HEMA stands for 2-hydroxyethyl methacrylate
- BzMA stands for benzyl methacrylate.
- Monomer (X-1) (16.4 g), methacrylic acid (1.60 g), dodecyl mercaptan (0.51 g), propylene glycol 1-monomethyl ether 2-acetate (hereinafter also referred to as “PGMEA”) (46. 6 g) were mixed and half added to a three neck flask and heated to 80 ° C. under a nitrogen atmosphere. To the remaining solution, add 2,2'-azobis (isobutyric acid) dimethyl) (trade name: V601, manufactured by Wako Pure Chemical Industries, Ltd.) (0.58 g) and dissolve it in a three-necked flask over 2 hours It dripped.
- PGMEA propylene glycol 1-monomethyl ether 2-acetate
- Resist Solution The components of the following composition were mixed and dissolved to prepare a resist solution for undercoat layer.
- PGMEA Propylene glycol monomethyl ether acetate
- ethyl lactate 36.67 parts
- Alkali-soluble resin benzyl methacrylate / methacrylic acid / methacrylic acid 2-hydroxyethy
- fluorosurfactant F-475, manufactured by DIC Co., Ltd. 0.83 parts
- photopolymerization initiator trihalomethyltriazine-based photopolymerization initiator (TAZ-107, manufactured by Midori Kagaku Co., Ltd.) 0.586 Department
- subbing layer coated silicon wafer substrate A 6 inch silicon wafer was heat treated in an oven at 200 ° C. for 30 minutes. Next, the above resist solution is coated on this silicon wafer to a dry film thickness of 1.5 ⁇ m, and further dried by heating in an oven at 220 ° C. for 1 hour to form an undercoat layer, and a silicon wafer with an undercoat layer I got the substrate.
- Pigment Dispersion Blue pigment dispersion 1 was prepared as follows. C. I. Pigment Blue 15: 6 (blue pigment, average particle size 55 nm), and a mixture consisting of 5.0 parts of the pigment dispersant Disperbyk 111 and 82.0 parts of PGMEA, as a beads mill (zirconia beads) The pigment dispersion was prepared by mixing and dispersing for 3 hours with a 0.3 mm diameter).
- dispersion treatment was carried out at a flow rate of 500 g / min under a pressure of 2000 kg / cm 3 using a high pressure disperser NANO-3000-10 (manufactured by Nippon Bei Co., Ltd.) with a pressure reducing mechanism.
- This dispersion process was repeated 10 times to obtain a blue pigment dispersion 1 (CI Pigment Blue 15: 6 dispersion, 13% pigment concentration) used for the coloring composition of the example or the comparative example.
- the particle size of the pigment in the resulting blue pigment dispersion was measured by a dynamic light scattering method (Microtrac Nanotrac UPA-EX 150 (manufactured by Nikkiso Co., Ltd.)) and found to be 24 nm.
- I-1) is IRGACURE (registered trademark) -OXE01
- I-2) is IRGACURE (registered trademark) -OXE02 (manufactured by BASF)
- I-3) is IRGACURE (registered trademark)-379
- I) -4) is DAROCUR (registered trademark) -TPO (all manufactured by BASF Corp.).
- the silicon wafer on which the coloring pattern is formed is fixed to the horizontal rotary table by a vacuum chuck method, and the silicon wafer substrate is rotated at a rotational speed of 50 r. p. m. While rotating at the same time, pure water was supplied in the form of a shower from a jet nozzle from above the rotation center to perform a rinse process, and then spray drying was performed. As described above, a monochrome color filter having a coloring pattern formed of the coloring composition of the example or the comparative example was produced. Thereafter, the size of the colored pattern was measured using a length measurement SEM “S-9260A” (manufactured by Hitachi High-Technologies Corporation). The exposure amount at which the pattern size becomes 1.0 ⁇ m was taken as the optimum exposure amount.
- Performance evaluation 5-1 One hundred colored patterns were observed, and the number of defective patterns was counted. It indicates that the larger the number, the more the pattern defects and the worse. The results are shown in the following table.
- Pattern linearity One hundred patterns were observed with a length measurement SEM to determine pattern linearity. A: The shape is rectangular, and the side of the pattern is a straight line B: The shape is rectangular, and the side of the pattern is a slightly distorted straight line but there is no problem in practical use C: The shape is rounded and the pattern is flat The side is rough and there is a problem in practical use
- the resulting colored film is subjected to spectral measurement, and the transmittance fluctuation at 550 nm after peeling (when the transmittance before solvent immersion is T0 and the transmittance after solvent immersion is T2, formula
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Abstract
Description
上記の方法は、顔料を用いることから光や熱に対して安定であると共に、フォトリソ法によってパターニングを行うことから位置精度が充分に確保され、カラーディスプレー用カラーフィルタ等の製造に好適な方法として広く利用されてきた。
(1)染料は、一般に顔料に比べて、耐光性、耐熱性に劣る。特に、液晶ディスプレイなどの電極として多用されているITO(酸化インジウムスズ)の成膜時の高温工程により、光学特性が変化してしまうという問題がある。
(2)染料は、ラジカル重合反応を抑制する傾向があるため、ラジカル重合を硬化手段として用いる系では、着色感光性組成物の設計に困難が伴う。
特に、カラーフィルタの作製にフォトリソ法を用いる場合には、以下に示す点が問題となる。
(3)通常の染料は、アルカリ水溶液または有機溶剤(以下単に溶剤ともいう)への溶解度が低いため、所望のスペクトルを有する着色感光性組成物を得るのが困難である。
(4)染料は、着色感光性組成物中の他の成分と相互作用を示すことが多く、露光部、未露光部の溶解性(現像性)の調節が難しい。
(5)染料のモル吸光係数(ε)が低い場合には多量の染料を添加しなければならず、そのために着色感光性組成物中の重合性化合物(モノマー)やバインダー、光重合開始剤等の他の成分を相対的に減らさざるを得ず、組成物の硬化性、硬化後の耐熱性、現像性等が低下する。
具体的には、下記手段<1>により、好ましくは、<2>~<17>により、上記課題は解決された。
<1>(A)非求核性の対アニオンを有する色素多量体。
<2>(A)非求核性の対アニオンを有する色素多量体が、ジピロメテン色素、トリアリールメタン色素、キサンテン色素、およびシアニン色素から選択される色素に由来する部分構造を有する、<1>に記載の色素多量体。
<3>非求核性の対アニオンを有する色素多量体が、キサンテン色素に由来する部分構造を有する、<1>または<2>に記載の色素多量体。
<4>非求核性対アニオンが、イミドアニオン、トリス(スルホニル)メチドアニオン、テトラアリールボレートアニオン、B-(CN)n1(ORa)4-n1、PFn2RP (6-n2) -およびBFn3RP (4-n3) -から選択される、<1>~<3>のいずれかに記載の色素多量体;B-(CN)n1(ORa)4-nにおいて、Raは炭素数1~10のアルキル基または炭素数6~10のアリール基を表し、n1は1~4の整数を表す;PFn2RP (6-n2) -において、RPは炭素数1~10のフッ素化アルキル基を表し、n2は1~6の整数を表す;BFn3RP (4-n3) -において、RPは炭素数1~10のフッ素化アルキル基を表し、n3は1~4の整数を表す。
<5>色素多量体が下記繰り返し単位を有する、<1>~<4>のいずれかに記載の色素多量体。
一般式(A)
一般式(C)
一般式(D)
<6>色素多量体が、重合性基を有する、<1>~<5>のいずれかに記載の色素多量体。
<7>色素多量体が、エチレン性不飽和結合を含む基を有する、<1>~<6>のいずれかに記載の色素多量体。
<8>色素多量体が、酸基を有する繰り返し単位を有する、<1>~<7>のいずれかに記載の色素多量体。
<9><1>~<8>のいずれかに記載の(A)色素多量体、(B)硬化性化合物および(C)顔料を含む、着色組成物。
<10>着色組成物が、さらに(D)光重合開始剤を含む、<9>に記載の着色組成物。
<11>(D)光重合開始剤が、オキシム化合物である、<10>に記載の着色組成物。
<12>カラーフィルタの着色層形成用である、<9>~<11>のいずれかに記載の着色組成物。
<13><9>~<12>のいずれかに記載の着色組成物を硬化してなる硬化膜。
<14><9>~<12>のいずれかに記載の着色組成物を支持体上に適用して着色組成物層を形成する工程と、着色組成物層をパターン状に露光する工程と、未露光部を現像除去して着色パターンを形成する工程とを含むカラーフィルタの製造方法。
<15><9>~<12>のいずれかに記載の着色組成物を支持体上に適用して着色組成物層を形成し、硬化して着色層を形成する工程、
着色層上にフォトレジスト層を形成する工程、
露光および現像することによりフォトレジスト層をパターニングしてレジストパターンを得る工程、および
レジストパターンをエッチングマスクとして着色層をドライエッチングする工程を含む、カラーフィルタの製造方法。
<16><13>に記載の硬化膜を有するカラーフィルタ、または<14>または<15>に記載のカラーフィルタの製造方法によって製造したカラーフィルタ。
<17><16>に記載のカラーフィルタを有する固体撮像素子または画像表示装置。
また、本明細書中における「放射線」とは、例えば、水銀灯の輝線スペクトル、エキシマレーザーに代表される遠紫外線、極紫外線(EUV光)、X線、電子線等を意味する。また、本発明において光とは、活性光線または放射線を意味する。本明細書中における「露光」とは、特に断らない限り、水銀灯、エキシマレーザーに代表される遠紫外線、X線、EUV光などによる露光のみならず、電子線、イオンビーム等の粒子線による描画も露光に含める。
本明細書において、全固形分とは、着色組成物の全組成から溶剤を除いた成分の総質量をいう。
また、本明細書において、“単量体”と“モノマー”とは同義である。本明細書における単量体は、オリゴマーおよびポリマーと区別され、重量平均分子量が2,000以下の化合物をいう。本明細書において、重合性化合物とは、重合性官能基を有する化合物のことをいい、単量体であっても、ポリマーであってもよい。重合性官能基とは、重合反応に関与する基を言う。
本発明は、上記の状況に鑑みてなされたものであり、色特性に優れたな着色組成物を提供することを目的とする。
このような構成とすることにより、他のパターンへの色移りが抑制され、かつ、パターン形成性に優れたパターンを形成可能になる。
さらに、従来、色素多量体を配合した着色組成物では、微細パターンをフォトリソグラフィ法で形成する際、パターン欠損が発生したり、パターンの直線性が悪化する場合があった。これに対し、本発明では、パターン欠損を抑制したり、パターン直線性の悪化を抑制したりすることが可能になる。
また、色素多量体を配合した着色組成物では、ドライエッチング法でパターンを形成する際、フォトレジストの現像液に対する耐性や、剥離液に対する耐性が悪い場合があった。これに対し、本発明では、フォトレジストの現像液に対する耐性を向上させたり、剥離液に対する耐性を向上させることが可能になる。
以下、本発明の詳細について説明する。
本発明の着色組成物は、非求核性の対アニオンを有する色素多量体(以下、単に「色素多量体(A)」ということがある。)の少なくとも1種を含有する。
ここで、非求核性とは、加熱により色素を求核攻撃しない性質を意味する。
色素多量体(A)は、本発明の着色組成物において、例えば着色剤として機能する。
また、本発明の色素多量体(A)は、最大吸収波長が420~700nmであることが好ましく、450~650nmであることがより好ましい。
さらに、本発明の色素多量体(A)の酸価は、5~100mgKOH/gであることが好ましく、15~60mgKOH/gであることがより好ましい。
本発明では、色素に由来する構造を含む繰り返し単位が合計繰り返し単位を100モル%としたとき、本発明の色素多量体(A)中、10~100モル%であることが好ましく、50~100モル%であることがさらに好ましく、60~100モル%であることが特に好ましい。
以下、色素多量体(A)における非求核性の対アニオン、および色素に由来する部分構造について説明する。
色素多量体(A)が有する非求核性の対アニオンには、有機アニオンであっても、無機アニオンであってもよく、有機アニオンが好ましい。本発明で用いられる対アニオンの例として、特開2007-310315号公報の段落番号0075に記載の公知の非求核性アニオンが挙げられ、これらの内容は本願明細書に組み込まれる。
好ましくは、イミドアニオン(例えばビス(スルホニル)イミドアニオン)、トリス(スルホニル)メチドアニオン、テトラアリールボレートアニオン、B-(CN)n1(ORa)4-n1(Raは炭素数1~10のアルキル基または炭素数6~10のアリール基を表し、n1は1~4を表す)、PFn2RP (6-n2) -(RPは炭素数1~10のフッ素化アルキル基を表し、n2は1~6の整数を表す)およびBFn3RP (4-n3) -(RPは炭素数1~10のフッ素化アルキル基を表し、n3は1~4の整数を表す)が挙げられ、ビス(スルホニル)イミドアニオン、トリス(スルホニル)メチドアニオンおよびテトラアリールボレートアニオンから選択されることがより好ましく、ビス(スルホニル)イミドアニオンであることがさらに好ましい。このような非求核性の対アニオンを用いることにより、本発明の効果がより効果的に発揮される傾向にある。
Y1およびY2は、少なくとも一方が-SO2-を表すことが好ましく、いずれも-SO2-を表すことがより好ましい。
Ar1、Ar2、Ar3およびAr4が表わすアリール基は、置換基を有しても良い。置換基を有する場合、ハロゲン原子、アルキル基、アリール基、アルコキシ基、カルボニル基、カルボニルオキシ基、カルバモイル基、スルホ基、スルホンアミド基、ニトロ基等が挙げられ、ハロゲン原子およびアルキル基が好ましく、フッ素原子、アルキル基がより好ましく、フッ素原子、炭素数1~4のペルフルオロアルキル基がさらに好ましい。
n1は、1~3が好ましく、1~2がより好ましい。
本発明の色素多量体は、非求核性対アニオンを1種類のみ含んでいても良いし、2種類以上を含んでいても良い。
本発明における色素構造とは、色素多量体(A)における色素に由来する部分であり、色素構造を形成しうる具体的な色素(以下、色素化合物とも称する。)から水素原子を除いた、色素多量体連結部(ポリマー鎖やデンドリマーのコア等)と連結可能である構造をいう。以下、これらの詳細について説明する。
本発明に係る色素多量体(A)の態様の一つは、下記に示すジピロメテン色素に由来する部分構造を、色素部位の部分構造として有する色素多量体である。
なお、本発明では、ジピロメテン構造を含む化合物をジピロメテン化合物と称し、ジピロメテン構造を含む化合物に金属または金属化合物に配位した錯体をジピロメテン金属錯体化合物と称する。
色素多量体(A)における色素構造の好ましい態様の一つは、下記一般式(M)で表される化合物(ジピロメテン化合物)またはその互変異性体が、金属または金属化合物に配位した錯体(以下、適宜「特定錯体」と称する。)を色素部位として含む色素構造である。本発明では、下記化合物がカチオン構造を形成するが、例えば、一般式(M)が配位する金属原子がカチオン構造を形成しうる。
R10がアルキル基、アリール基、または、ヘテロ環基を表す場合の、アルキル基、アリール基、および、ヘテロ環基が、さらに置換可能な基である場合には、後述する置換基群Aの項において説明した置換基で置換されていてもよく、2個以上の置換基で置換されている場合には、それらの置換基は同一であっても異なっていてもよい。
本発明における特定錯体は、既述の一般式(M)で表されるジピロメテン化合物またはその互変異性体が金属または金属化合物に配位した錯体である。
ここで、金属または金属化合物としては、錯体を形成可能な金属または金属化合物であればいずれであってもよく、2価の金属原子、2価の金属酸化物、2価の金属水酸化物、または2価の金属塩化物が含まれる。金属または金属化合物としては、例えば、Zn、Mg、Si、Sn、Rh、Pt、Pd、Mo、Mn、Pb、Cu、Ni、Co、Fe等の金属の他に、AlCl、InCl、FeCl、TiCl2、SnCl2、SiCl2、GeCl2などの金属塩化物、TiO、VO等の金属酸化物、Si(OH)2等の金属水酸化物も含まれる。
これらの中でも、錯体の安定性、分光特性、耐熱、耐光性、および製造適性等の観点から、Fe、Zn、Mg、Si、Pt、Pd、Mo、Mn、Cu、Ni、Co、TiO、またはVOが好ましく、Zn、Mg、Si、Pt、Pd、Cu、Ni、Co、またはVOがさらに好ましく、Znが特に好ましい。
色素多量体(A)における色素構造の好適な態様の一つは、下記一般式(7)で表されるジピロメテン金属錯体化合物に由来する色素構造である。本発明では、下記化合物がカチオン構造を形成するが、例えば、一般式(7)のMaがカチオン構造を形成しうる。
なお、一般式(7)で表されるジピロメテン金属錯体化合物は、互変異性体を含む。
一般式(7)における中のR4~R9は、上記一般式(M)におけるR4~R9と同義であり、好ましい態様も同様である。
例えば、Zn、Mg、Si、Sn、Rh、Pt、Pd、Mo、Mn、Pb、Cu、Ni、Co、Fe等、およびAlCl、InCl、FeCl、TiCl2、SnCl2、SiCl2、GeCl2などの金属塩化物、TiO、V=O等の金属酸化物、Si(OH)2等の金属水酸化物が含まれる。
なお、一般式(8)で表されるジピロメテン金属錯体化合物は、互変異性体を含む。
上記R13およびR14としては、置換または無置換のアルキル基、置換または無置換のアリール基、置換または無置換のヘテロ環基が好ましく、さらに好ましくは置換または無置換のアルキル基、置換または無置換のアリール基である。ここで、より好ましいアルキル基、アリール基、およびヘテロ環基の具体例は、一般式(M)の上記R6およびR7において列記した具体例を同様に挙げることができる。
ここで、立体パラメータ-Es’値は、置換基の立体的嵩高さを表すパラメータであり、文献(J.A.Macphee,et al,Tetrahedron,Vol.34,pp3553~3562、藤田稔夫編 化学増刊107 構造活性相関とドラックデザイン、1986年2月20日発行(化学同人))に示されている-Es'値を用いる。
aは0、1、または2を表す。
カルボニウム色素の中でも、トリアリールメタン色素、キサンテン色素が好ましい。
トリアリールメタン色素
本発明に係る色素多量体の態様の一つは、トリアリールメタン色素(トリアリールメタン化合物)に由来する部分構造を有するものである。上記色素多量体(A)としては、下記一般式(TP)で表される化合物(トリアリールメタン化合物)に由来する部分構造を、色素部位の部分構造として有する色素多量体が含まれる。本発明においてトリアリールメタン化合物とは、分子内にトリアリールメタン骨格を含む色素部位を有する化合物を総称するものである。
本発明における色素多量体の好ましい態様は、キサンテン色素(キサンテン化合物)に由来する部分構造を有するものである。上記色素多量体(A)としては、下記一般式(J)で表されるキサンテン化合物に由来する部分構造を、色素部位の部分構造として有する色素多量体が含まれる。
上記一般式(J)中のR81とR82、R83とR84、およびmが2以上の場合のR85同士は、各々独立に、互いに結合して、置換基を有しない5員、6員並びに7員の飽和環または5員、6員並びに7員の不飽和環を形成する場合、置換基を有しない5員、6員並びに7員の飽和環または5員、6員並びに7員の不飽和環としては、例えば、ピロール環、フラン環、チオフェン環、ピラゾール環、イミダゾール環、トリアゾール環、オキサゾール環、チアゾール環、ピロリジン環、ピペリジン環、シクロペンテン環、シクロヘキセン環、ベンゼン環、ピリジン環、ピラジン環、ピリダジン環が挙げられ、好ましくは、ベンゼン環、ピリジン環が挙げられる。
本発明に係る色素多量体の態様の一つは、シアニン色素(シアニン化合物)に由来する部分構造を有するものである。上記色素多量体(A)としては、下記一般式(PM)で表される化合物(シアニン化合物)に由来する部分構造を、色素部位の部分構造として有する色素多量体が含まれる。本発明においてシアニン化合物とは、分子内にシアニン骨格を含む色素部位を有する化合物を総称するものである。
環Z1および環Z2が取りうる置換基は、後述する置換基群Aの項で挙げた置換基と同様である。X-は非求核性の対アニオンを表す。
nは、0以上3以下の整数を表す。
A1およびA2は、それぞれ独立に、酸素原子、硫黄原子、セレン原子、炭素原子または窒素原子を表す。
R1およびR2は、それぞれ独立に、置換基を有していてもよい1価の炭素数1~20の脂肪族炭化水素基を表す。
R3およびR4は、それぞれ独立に水素原子または1価の炭素数1~6の脂肪族炭化水素基を表すか、1個のR3と1個のR4とが一緒になって形成された2価の炭素数2~6の脂肪族炭化水素基を表す。
aおよびbは、それぞれ独立に、0以上2以下の整数を表す。
本発明に係る色素多量体の態様の一つは、サブフタロシアニン色素に由来する部分構造を有するものである。上記色素多量体(A)としては、下記一般式(SP)で表されるサブフタロシアニン色素に由来する部分構造を、色素部位の部分構造として有する色素多量体が含まれる。本発明においてサブフタロシアニン色素とは、分子内にサブフタロシアニン骨格を含む色素部位を有する化合物を総称するものである。本発明では、下記化合物がカチオン構造を形成するが、例えば、一般式(SP)のホウ素原子がカチオン構造を形成しうる。
一般式(SP)中のZ1~Z12が有してもよいアルキル基は直鎖または分岐の置換または無置換のアルキル基を表す。Z1~Z12としては、特に、炭素数1~20が好ましく、炭素数1~10がさらに好ましい。Z1~Z12が有してもよい置換基としては後述する置換基群Aの項で挙げた置換基が挙げられるが、特にフッ素原子、ヒドロキシ基およびメルカプト基が好ましい。
色素多量体が有してもよい置換基としては、ハロゲン原子、アルキル基、シクロアルキル基、アルケニル基、シクロアルケニル基、アルキニル基、アリール基、ヘテロ環基、シアノ基、ヒドロキシル基、ニトロ基、カルボキシル基、アルコキシ基、アリールオキシ基、シリルオキシ基、ヘテロ環オキシ基、アシルオキシ基、カルバモイルオキシ基、アミノ基(アルキルアミノ基、アニリノ基を含む)、アシルアミノ基、アミノカルボニルアミノ基、アルコキシカルボニルアミノ基、アリールオキシカルボニルアミノ基、スルファモイルアミノ基、アルキルまたはアリールスルホニルアミノ基、メルカプト基、アルキルチオ基、アリールチオ基、ヘテロ環チオ基、スルファモイル基、スルホ基、アルキルまたはアリールスルフィニル基、アルキルまたはアリールスルホニル基、アシル基、アリールオキシカルボニル基、アルコキシカルボニル基、カルバモイル基、アリールまたはヘテロ環アゾ基、イミド基、ホスフィノ基、ホスフィニル基、ホスフィニルオキシ基、ホスフィニルアミノ基、シリル基などが挙げられる。以下詳細に記述する。
本発明の着色組成物に用いる色素多量体(A)としては、特に定めるものではないが、下記一般式(A)、および一般式(C)で表される繰り返し単位の少なくとも一つを含んでなる色素多量体であるか、または、一般式(D)で表される色素多量体であることが好ましい。一般式(A)で表される繰り返し単位は、1種類の色素多量体中に、1種類のみ含まれていても良いし、2種類以上含まれていてもよい。一般式(C)~(D)についても同様である。さらに、後述するとおり、他の繰り返し単位を含んでいてもよい。
本発明では、一般式(A)で表される色素多量体を含むことが好ましい。これらを順次説明する。
一般式(A)
以下、一般式(A)について詳細に説明する。
(XX-1)~(XX-24)中、*で示された部位でL1と連結していることを表す。
Meはメチル基を表す。また、(XX-18)および(XX-19)中のRは、水素原子、炭素数1~5のアルキル基またはフェニル基を表す。
L1が表わす2価の連結基としては、DyeIとイオン結合または配位結合可能な基であってもよい。この場合、アニオン性基またはカチオン性基のどちらでもよい。
アニオン性基としては、-COO-、-PO3H-、-SO3 -、-SO3NH-、-SO3N-CO-等が挙げられ、-COO-、-PO3H-、-SO3 -が好ましい。
カチオン性基としては、置換または無置換のオニウムカチオン(例えば、アンモニウム、ピリジニウム、イミダゾリウムおよびホスホニウム等)が挙げられ、特にアンモニウムカチオンが好ましい。
L1がDyeIとイオン結合または配位結合可能な基を有する場合、L1は、DyeIが有しているアニオン部(-COO-、-SO3 -、-O-等)やカチオン部(上記オニウムカチオンや金属カチオン等)と結合することができる。
付加重合には公知の付加重合(ラジカル重合、アニオン重合、カチオン重合)が適用できるが、このうち、特にラジカル重合により合成することが反応条件を穏和化でき、色素構造を分解させないため好ましい。ラジカル重合には、公知の反応条件を適用することができる。
中でも、本発明における一般式(A)で表される繰り返し単位を有する色素多量体は、耐熱性の観点から、エチレン性不飽和結合を有する色素単量体を用いてラジカル重合して得られたラジカル重合体であることが好ましい。
次に、一般式(C)で表される色素多量体について詳細を説明する。
一般式(C)
mは0または1を表すが、1であることが好ましい。
次に、一般式(D)で表される色素多量体について詳細を説明する。
一般式(D)において、nが2の場合、L4で表される2価の連結基としては、炭素数1~30の置換もしくは無置換のアルキレン基(例えば、メチレン基、エチレン基、トリメチレン基、プロピレン基、ブチレン基など)、炭素数6~30の置換もしくは無置換のアリーレン基(例えば、フェニレン基、ナフタレン基等)、置換もしくは無置換のヘテロ環連結基、-CH=CH-、-O-、-S-、-NR-(Rは、それぞれ独立に、水素原子、アルキル基、アリール基、またはヘテロ環基を表す。)、-C(=O)-、-SO-、-SO2-、およびこれらを2個以上連結して形成される連結基が好適に挙げられる。
本発明の色素多量体(A)は、上述した色素多量体の色素構造部分に他の官能基を有していても良い。他の官能基としては、重合性基、酸基およびアルカリ可溶性基等が例示される。
また、本発明の色素多量体(A)は、上述した色素構造を含む繰り返し単位の他に、他の繰り返し単位を含んでいても良い。他の繰り返し単位は、官能基を有していても良い。
また、他の繰り返し単位としては、重合性基、酸基およびアルカリ可溶性基の少なくとも1種を含む繰り返し単位が例示される。
すなわち、本発明の色素多量体(A)は、上記一般式(A)~(C)で表される繰り返し単位のほかに、他の繰り返し単位を有していてもよい。他の繰り返し単位は、1つの色素多量体中に、1種類のみ含まれていても良いし、2種類以上含まれていてもよい。
また、本発明の色素多量体(A)は、上記一般式(A)~(D)で表される色素多量体中に、他の官能基を有していても良い。以下、これらの詳細について説明する。
本発明の色素多量体(A)は重合性基を含むことが好ましい。重合性基は1種類のみ含んでいても良いし、2種類以上含んでいても良い。
重合性基は、色素構造が重合性基を含んでいても良いし、他の部分が含んでいても良い。本発明では、色素構造が重合性基を含むことが好ましい。このような構成とすることにより耐熱性が向上する傾向にある。
また、本発明では、色素構造以外の他の部分が重合性基を含む態様も好ましい。
重合性基としては、ラジカル、酸、熱により架橋可能な公知の重合性基を用いることができ、例えば、エチレン性不飽和結合を含む基、環状エーテル基(エポキシ基、オキセタン基)、メチロール基等が挙げられるが、特にエチレン性不飽和結合を含む基が好ましく、(メタ)アクリロイル基がさらに好ましく、(メタ)アクリル酸グリシジルおよび3,4-エポキシーシクロヘキシルメチル(メタ)アクリレート由来の(メタ)アクリロイル基がさらに好ましい。
重合性基は、色素多量体中に、重合性基を有する繰り返し単位として含まれることが好ましく、エチレン性不飽和結合を有する繰り返し単位として含まれることがより好ましい。すなわち、本発明の色素多量体(A)の好ましい実施形態の一例は、色素多量体(A)が色素単量体を含む繰り返し単位と重合性基を有する繰り返し単位を含有する態様であり、色素単量体を含む繰り返し単位とエチレン性不飽和結合を有する繰り返し単位を含有することがより好ましい。
色素多量体を重合性基含有化合物で変性して導入する方法としては、特に制限なく公知の方法を用いることができる。例えば、(a)色素多量体が有するカルボン酸と不飽和結合含有エポキシ化合物とを反応させる方法、(b)色素多量体が有するヒドロキシル基またはアミノ基と不飽和結合含有イソシアネート化合物とを反応させる方法、(c)色素多量体が有するエポキシ化合物と不飽和結合含有カルボン酸化合物とを反応させる方法が製造上の観点から好ましい。
(2)色素単量体と重合性基含有化合物を共重合して導入する方法としては、特に制限なく公知の方法を用いることができるが、(d)ラジカル重合可能な色素単量体とラジカル重合可能な重合性基含有化合物とを共重合する方法、(e)重付加可能な色素単量体と重付加可能な重合性基含有化合物とを共重合する方法が好ましい。
また、色素多量体(A)が重合性基を有する繰り返し単位を含有する繰り返し単位の割合は、全繰り返し単位100モルに対し、例えば、5~50モルが好ましく、10~20モルがより好ましい。
本発明における色素多量体(A)が有していてもよい酸基としては、カルボン酸基、スルホン酸基、リン酸基が例示される。また、アルカリ可溶性基としては、フェノール性水酸基、カルボン酸が例示される。
本発明では好ましくは、酸基および/またはアルカリ可溶性基は、酸基および/またはアルカリ可溶性基を有する繰り返し単位として、多量体(A)中に含まれることが好ましい。
酸基を有する繰り返し単位の酸価としては、15mgKOH/g~110mgKOH/gであることが好ましく、20mgKOH/g~90mgKOH/gであることがより好ましく、30mgKOH/g~60mgKOH/gであることがさらに好ましい。
本発明において、色素多量体の酸価は、例えば、色素多量体中における酸基の平均含有量から算出することができる。また、色素多量体を構成する酸基を含有するモノマー単位の含有量を変化させることで所望の酸価を有する樹脂を得ることができる。
また、色素多量体(A)が色素単量体を含む繰り返し単位と酸基を有する繰り返し単位を含有する場合、酸基を有する繰り返し単位を含有する繰り返し単位の割合は、色素単量体を含む繰り返し単位100モルに対し、例えば、5~70モルが好ましく、10~50モルがより好ましい。
導入方法として、色素単量体にあらかじめ導入しておく方法、および上記官能基を有するモノマーを共重合する方法が挙げられる。
重量平均分子量および数平均分子量は、ゲルパーミエーションクロマトグラフィー(GPC)により求めることができる。
また、色素多量体(A)の重量平均分子量(Mw)と、数平均分子量(Mn)との比〔(Mw)/(Mn)〕は1.0~3.0であることが好ましく、1.6~2.5であることがさらに好ましく、1.6~2.0であることが特に好ましい。
有機溶剤としては、エステル類(例えば、3-エトキシプロピオン酸メチル、3-エトキシプロピオン酸エチル、乳酸エチル、酢酸ブチル、3-メトキシプロピオン酸メチル等)、エーテル類(例えばメチルセロソルブアセテート、エチルセロソルブアセテート、プロピレングリコールモノメチルエーテル、プロピレングリコールモノメチルエーテルアセテート等)、ケトン類(メチルエチルケトン、シクロヘキサノン、2-ヘプタノン、3-ヘプタノン等)、芳香族炭化水素類(例えば、トルエン、キシレン等)が挙げられ、これら溶剤に対し、1質量%以上50質量%以下溶解することが好ましく、より好ましくは5質量%以上40質量%以下、さらに好ましくは10質量%以上30質量%以下であることが好ましい。この領域にあることで、本発明の着色組成物をカラーフィルタ等の作製に適用する際に、好適な塗布面状や、他色塗布後の溶出による濃度低下を低減させることができるようになる。
顔料に対する色素多量体の質量比(色素多量体(A)/顔料)としては、0.1~5が好ましく、0.2~2がよりに好ましく、0.3~1がさらに好ましい。
次に、本発明の着色組成物について説明する。本発明の着色組成物は、カラーフィルタの着色層の形成に用いられる。本発明で用いる着色組成物は、好ましくは、(B)硬化性化合物および(C)顔料を含む。(B)硬化性化合物としては、重合性化合物やアルカリ可溶性樹脂(重合性基を含むアルカリ可溶性樹脂を含む)が例示され、用途や製造方法に応じて適宜選択される。さらに、本発明の着色組成物は、(D)光重合開始剤を含んでいることが好ましい。
例えば、フォトレジストによって、着色層を形成する場合、本発明の着色組成物は、本発明の(A)色素多量体、硬化性化合物としてのアルカリ可溶性樹脂、(C)顔料および(D)光重合開始剤を含む組成物が好ましい。さらに、界面活性剤、溶剤等の成分を含んでいてもよい。
また、ドライエッチングによって、着色層を形成する場合、本発明の(A)色素多量体、硬化性化合物としての重合性化合物、(C)顔料および(D)光重合開始剤を含む組成物が好ましい。さらに、界面活性剤、溶剤等の成分を含んでいてもよい。
以下、これらの詳細について説明する。
本発明の着色組成物は、重合性化合物を含有する。
ラジカル、酸、熱により架橋可能な公知の重合性化合物を用いることができ、例えば、エチレン性不飽和結合、環状エーテル(エポキシ、オキセタン)、メチロール等を含む重合性化合物が挙げられる。重合性化合物は、感度の観点から、末端エチレン性不飽和結合を少なくとも1個、好ましくは2個以上有する化合物から好適に選ばれる。中でも、4官能以上の多官能重合性化合物が好ましく、5官能以上の多官能重合性化合物がさらに好ましい。
これらの具体的な化合物としては、特開2009-288705号公報の段落番号〔0095〕~〔0108〕に記載されている化合物を本発明においても好適に用いることができる。
多官能カルボン酸にグリシジル(メタ)アクリレート等の環状エーテル基とエチレン性不飽和基を有する化合物を反応させ得られる多官能(メタ)アクリレートなども挙げることができる。
また、その他の好ましい重合性化合物として、特開2010-160418号公報、特開2010-129825号公報、特許第4364216号明細書等に記載される、フルオレン環を有し、エチレン性不飽和基を2官能以上有する化合物、カルド樹脂も使用することが可能である。
上記一般式(MO-1)~(MO-5)で表される重合性化合物の各々において、複数存在するRの少なくとも1つは、-OC(=O)CH=CH2、または、-OC(=O)C(CH3)=CH2で表される基を表す。
上記一般式(MO-1)~(MO-5)で表される重合性化合物の具体例としては、特開2007-269779号公報の段落番号0248~段落番号0251に記載されている化合物を本発明においても好適に用いることができる。
酸基を有する多官能モノマーの好ましい酸価としては、0.1mgKOH/g~40mgKOH/gであり、特に好ましくは5mgKOH/g~30mgKOH/gである。多官能モノマーの酸価が低すぎると現像溶解特性が落ち、高すぎると製造や取扱いが困難になり光重合性能が落ち、画素の表面平滑性等の硬化性が劣るものとなる。従って、異なる酸基の多官能モノマーを2種以上併用する場合、或いは酸基を有しない多官能モノマーを併用する場合、全体の多官能モノマーとしての酸基が上記範囲に入るように調整することが好ましい。
カプロラクトン構造を有する多官能性単量体としては、その分子内にカプロラクトン構造を有する限り特に限定されるものではないが、例えば、トリメチロールエタン、ジトリメチロールエタン、トリメチロールプロパン、ジトリメチロールプロパン、ペンタエリスリトール、ジペンタエリスリトール、トリペンタエリスリトール、グリセリン、ジグリセロール、トリメチロールメラミン等の多価アルコールと、(メタ)アクリル酸およびε-カプロラクトンをエステル化することにより得られる、ε-カプロラクトン変性多官能(メタ)アクリレートを挙げることができる。なかでも下記一般式(Z-1)で表されるカプロラクトン構造を有する多官能性単量体が好ましい。
本発明において、カプロラクトン構造を有する多官能性単量体は、単独でまたは2種以上を混合して使用することができる。
上記一般式(Z-4)中、アクリロイル基およびメタクリロイル基の合計は3個または4個であり、mは各々独立に0~10の整数を表し、各mの合計は0~40の整数である。但し、各mの合計が0の場合、Xのうちいずれか1つはカルボキシル基である。
上記一般式(ii)中、アクリロイル基およびメタクリロイル基の合計は5個または6個であり、nは各々独立に0~10の整数を表し、各nの合計は0~60の整数である。但し、各nの合計が0の場合、Xのうちいずれか1つはカルボキシル基である。
上記一般式(Z-5)中、nは、0~6の整数が好ましく、0~4の整数がより好ましい。
また、各nの合計は、3~60の整数が好ましく、3~24の整数がより好ましく、6~12の整数が特に好ましい。
また、一般式(Z-4)または一般式(Z-5)中の-((CH2)yCH2O)-または-((CH2)yCH(CH3)O)-は、酸素原子側の末端がXに結合する形態が好ましい。
具体的には、下記式(a)~(f)で表される化合物(以下、「例示化合物(a)~(f)」ともいう。)が挙げられ、中でも、例示化合物(a)、(b)、(e)、(f)が好ましい。
重合性化合物の市販品としては、ウレタンオリゴマーUAS-10、UAB-140(山陽国策パルプ社製)、UA-7200」(新中村化学社製、DPHA-40H(日本化薬社製)、UA-306H、UA-306T、UA-306I、AH-600、T-600、AI-600(共栄社製)などが挙げられる。
また、着色組成物に含有される他の成分(例えば、光重合開始剤、被分散体、アルカリ可溶性樹脂等)との相溶性、分散性に対しても、重合性化合物の選択・使用法は重要な要因であり、例えば、低純度化合物の使用や2種以上の併用により相溶性を向上させうることがある。また、支持体などの硬質表面との密着性を向上させる観点で特定の構造を選択することもあり得る。
本発明の組成物は、重合性化合物を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物は、さらに、(C)顔料を含有することが好ましい。
本発明で使用する顔料としては、従来公知の種々の無機顔料または有機顔料を用いることができ、有機顔料を用いることが好ましい。上記顔料としては、高透過率であることが好ましい。
C.I.ピグメントイエロー11,24,31,53,83,93,99,108,109,110,138,139,147,150,151,154,155,167,180,185,199,;
C.I.ピグメントオレンジ36,38,43,71;
C.I.ピグメントレッド81,105,122,149,150,155,171,175,176,177,179,209,220,224,242,254,255,264,270;
C.I.ピグメントバイオレット19,23,32,39;
C.I.ピグメントブルー1,2,15,15:1,15:3,15:6,16,22,60,66;
C.I.ピグメントグリーン7,36,37,58;
C.I.ピグメントブラウン25,28;
C.I.ピグメントブラック1;
等を挙げることができる。
C.I.ピグメントオレンジ36,71,
C.I.ピグメントレッド122,150,171,175,177,209,224,242,254,255,264,
C.I.ピグメントバイオレット19,23,32,
C.I.ピグメントブルー15:1,15:3,15:6,16,22,60,66,
C.I.ピグメントグリーン7,36,37,58;
C.I.ピグメントブラック1
本発明の着色組成物が、上述した色素多量体としてキサンテン色素、アゾ染料またはスクアリリウム色素に由来する部分構造(好ましくはキサンテン色素に由来する部分構造)を有する場合、赤色の着色剤(好ましくは赤色の顔料)や黄色の着色剤(好ましくは黄色の顔料)との併用により、赤色の着色組成物とすることができる。上述した色素多量体と、赤色の着色剤または黄色の着色剤との質量比は、10:100~100:10が好ましい。
上記組合せの具体例を以下に示す。例えば、赤の顔料として、アントラキノン系顔料、ペリレン系顔料、ジケトピロロピロール系顔料単独またはそれらの少なくとも一種と、ジスアゾ系黄色顔料、イソインドリン系黄色顔料、キノフタロン系黄色顔料またはペリレン系赤色顔料と、の混合などを用いることができる。例えば、アントラキノン系顔料としては、C.I.ピグメントレッド177が挙げられ、ペリレン系顔料としては、C.I.ピグメントレッド155、C.I.ピグメントレッド224が挙げられ、ジケトピロロピロール系顔料としては、C.I.ピグメントレッド254が挙げられ、色分解性の点でC.I.ピグメントイエロー139との混合が好ましい。また、赤色顔料と黄色顔料との質量比は、100:5~100:50が好ましい。100:4以下では400nmから500nmの光透過率を抑えることが困難であり、また100:51以上では主波長が短波長寄りになり、色分解能を上げることができない場合がある。特に、上記質量比としては、100:10~100:30の範囲が最適である。尚、赤色顔料同士の組み合わせの場合は、求める分光に併せて調整することができる。
顔料の一次粒子サイズは、電子顕微鏡等の公知の方法で測定することができる。
本発明の組成物は、顔料を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物は、光重合開始剤を含有することが、さらなる感度向上の観点から好ましい。
上記光重合開始剤としては、上記重合性化合物の重合を開始する能力を有する限り、特に制限はなく、公知の光重合開始剤の中から適宜選択することができる。例えば、紫外線領域から可視の光線に対して感光性を有するものが好ましい。また、光励起された増感剤と何らかの作用を生じ、活性ラジカルを生成する活性剤であってもよく、モノマーの種類に応じてカチオン重合を開始させるような開始剤であってもよい。
また、上記光重合開始剤は、約300nm~800nm(330nm~500nmがより好ましい。)の範囲内に少なくとも約50の分子吸光係数を有する化合物を、少なくとも1種含有していることが好ましい。
具体的には、トリハロメチルトリアジン化合物としては、以下の化合物が例示される。なお、Phはフェニル基である。
特に、本発明の着色組成物を固体撮像素子が備えるカラーフィルタの作製に使用する場合には、微細なパターンをシャープな形状で形成する必要があるために、硬化性とともに未露光部に残渣がなく現像されることが重要である。このような観点からは、重合開始剤としてはオキシム化合物を使用することが特に好ましい。特に、固体撮像素子において微細なパターンを形成する場合、硬化用露光にステッパー露光を用いるが、この露光機はハロゲンにより損傷される場合があり、重合開始剤の添加量も低く抑える必要があるため、これらの点を考慮すれば、固体撮像素子の如き微細パターンを形成するには(D)光重合開始剤としては、オキシム化合物を用いるのが特に好ましい。
ヒドロキシアセトフェノン系開始剤としては、IRGACURE(登録商標)-184、DAROCUR(登録商標)-1173、IRGACURE(登録商標)-500、IRGACURE(登録商標)-2959,IRGACURE(登録商標)-127(商品名:いずれもBASF社製)を用いることができる。アミノアセトフェノン系開始剤としては、市販品であるIRGACURE(登録商標)-907、IRGACURE(登録商標)-369、および、IRGACURE(登録商標)-379(商品名:いずれもBASF社製)を用いることができる。アミノアセトフェノン系開始剤として、365nmまたは405nm等の長波光源に吸収波長がマッチングされた特開2009-191179号公報に記載の化合物も用いることができる。また、アシルホスフィン系開始剤としては市販品であるIRGACURE(登録商標)-819やDAROCUR(登録商標)-TPO(商品名:いずれもBASF社製)を用いることができる。
市販品ではIRGACURE(登録商標)-OXE01(BASF社製)、IRGACURE(登録商標)-OXE02(BASF社製)も好適に用いられる。
オキシム化合物としては、TRONLY TR-PBG-304、TRONLY TR-PBG-309、TRONLY TR-PBG-305(常州強力電子新材料有限公司社(CHANGZHOU TRONLY NEW ELECTRONIC MATERIALS CO.,LTD)製)、アデカアークルズNCI-831、アデカアークルズNCI-930(ADEKA社製)などの市販品も使用できる。
また、オキシム化合物の特定部位に不飽和結合を有する特開2009-242469号公報に記載の化合物も、重合不活性ラジカルから活性ラジカルを再生することで高感度化を達成でき好適に使用することができる。
具体的には、光重合開始剤であるオキシム化合物としては、下記一般式(OX-1)で表される化合物が好ましい。なお、オキシムのN-O結合が(E)体のオキシム化合物であっても、(Z)体のオキシム化合物であっても、(E)体と(Z)体との混合物であってもよい。
一般式(OX-1)中、Rで表される一価の置換基としては、一価の非金属原子団であることが好ましい。
上記一価の非金属原子団としては、アルキル基、アリール基、アシル基、アルコキシカルボニル基、アリールオキシカルボニル基、複素環基、アルキルチオカルボニル基、アリールチオカルボニル基等が挙げられる。また、これらの基は、1以上の置換基を有していてもよい。また、前述した置換基は、さらに他の置換基で置換されていてもよい。
置換基としてはハロゲン原子、アリールオキシ基、アルコキシカルボニル基またはアリールオキシカルボニル基、アシルオキシ基、アシル基、アルキル基、アリール基等が挙げられる。
具体的には、チエニル基、ベンゾ[b]チエニル基、ナフト[2,3-b]チエニル基、チアントレニル基、フリル基、ピラニル基、イソベンゾフラニル基、クロメニル基、キサンテニル基、フェノキサチイニル基、2H-ピロリル基、ピロリル基、イミダゾリル基、ピラゾリル基、ピリジル基、ピラジニル基、ピリミジニル基、ピリダジニル基、インドリジニル基、イソインドリル基、3H-インドリル基、インドリル基、1H-インダゾリル基、プリニル基、4H-キノリジニル基、イソキノリル基、キノリル基、フタラジニル基、ナフチリジニル基、キノキサリニル基、キナゾリニル基、シンノリニル基、プテリジニル基、4aH-カルバゾリル基、カルバゾリル基、β-カルボリニル基、フェナントリジニル基、アクリジニル基、ペリミジニル基、フェナントロリニル基、フェナジニル基、フェナルサジニル基、イソチアゾリル基、フェノチアジニル基、イソキサゾリル基、フラザニル基、フェノキサジニル基、イソクロマニル基、クロマニル基、ピロリジニル基、ピロリニル基、イミダゾリジニル基、イミダゾリニル基、ピラゾリジニル基、ピラゾリニル基、ピペリジル基、ピペラジニル基、インドリニル基、イソインドリニル基、キヌクリジニル基、モルホリニル基、および、チオキサントリル基が例示できる。
下記の構造中、Y、X、および、nは、それぞれ、後述する一般式(OX-2)におけるY、X、および、nと同義であり、好ましい例も同様である。
中でも、式(OX-1)におけるAとしては、感度を高め、加熱経時による着色を抑制する点から、無置換のアルキレン基、アルキル基(例えば、メチル基、エチル基、tert-ブチル基、ドデシル基)で置換されたアルキレン基、アルケニル基(例えば、ビニル基、アリル基)で置換されたアルキレン基、アリール基(例えば、フェニル基、p-トリル基、キシリル基、クメニル基、ナフチル基、アンスリル基、フェナントリル基、スチリル基)で置換されたアルキレン基が好ましい。
なかでも、感度を高め、加熱経時による着色を抑制する点から、置換または無置換のフェニル基が好ましい。
また、式(2)におけるnは、0~5の整数を表し、0~2の整数が好ましい。
一般式(OX-3)または(OX-4)におけるR、X、A、Ar、および、nは、上記一般式(OX-2)におけるR、X、A、Ar、および、nとそれぞれ同義であり、好ましい例も同様である。
化合物のモル吸光係数は、公知の方法を用いることができるが、具体的には、例えば、紫外可視分光光度計(Varian社製Carry-5 spctrophotometer)にて、酢酸エチル溶媒を用い、0.01g/Lの濃度で測定することが好ましい。
本発明の組成物は、光重合開始剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物が顔料を有する場合は、顔料分散剤を、所望により併用することができる。
本発明に用いうる顔料分散剤としては、高分子分散剤〔例えば、ポリアミドアミンとその塩、ポリカルボン酸とその塩、高分子量不飽和酸エステル、変性ポリウレタン、変性ポリエステル、変性ポリ(メタ)アクリレート、(メタ)アクリル系共重合体、ナフタレンスルホン酸ホルマリン縮合物〕、および、ポリオキシエチレンアルキルリン酸エステル、ポリオキシエチレンアルキルアミン、アルカノールアミン等の界面活性剤、および、顔料誘導体等を挙げることができる。
高分子分散剤は、その構造からさらに直鎖状高分子、末端変性型高分子、グラフト型高分子、ブロック型高分子に分類することができる。
本発明の組成物は、顔料分散剤を、それぞれ、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
また、顔料誘導体を併用する場合、顔料誘導体の使用量としては、顔料100質量部に対し、質量換算で1質量部~30質量部の範囲にあることが好ましく、3質量部~20質量部の範囲にあることがより好ましく、5質量部~15質量部の範囲にあることが特に好ましい。
本発明の着色組成物は、さらに、アルカリ可溶性樹脂を含有することが好ましい。
アルカリ可溶性樹脂の分子量としては、特に定めるものではないが、Mwが5000~100,000であることが好ましい。また、Mnは1000~20,000であることが好ましい。
なお、重合後に酸基を付与しうるモノマーを単量体成分として酸基を導入する場合には、重合後に例えば後述するような酸基を付与するための処理が必要となる。
一般式(ED2)
一般式(X)
上記式(X)において、R2のアルキレン基の炭素数は、2~3であることが好ましい。また、R3のアルキル基の炭素数は1~20であるが、より好ましくは1~10であり、R3のアルキル基はベンゼン環を含んでもよい。R3で表されるベンゼン環を含むアルキル基としては、ベンジル基、2-フェニル(イソ)プロピル基等を挙げることができる。
さらに、特開2012-32767号公報に記載の段落番号0029~0063に記載の共重合体(B)および実施例で用いられているアルカリ可溶性樹脂、特開2012-208474号公報の段落番号0088~0098に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2012-137531号公報の段落番号0022~0032に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2013-024934号公報の段落番号0132~0143に記載のバインダー樹脂および実施例で用いられているバインダー樹脂、特開2011-242752号公報の段落番号0092~0098および実施例で用いられているバインダー樹脂、特開2012-032770号公報の段落番号0030~0072の記載のバインダー樹脂を用いること好ましい。これらの内容は本願明細書に組み込まれる。より具体的には、下記の樹脂が好ましい。
また、アルカリ可溶性樹脂の重量平均分子量(Mw)としては、2,000~50,000が好ましく、5,000~30,000がさらに好ましく、7,000~20,000が特に好ましい。
本発明の組成物は、アルカリ可溶性樹脂を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物は、上述の各成分に加えて、本発明の効果を損なわない範囲で、さらに、有機溶剤、架橋剤、重合禁止剤、界面活性剤、有機カルボン酸、有機カルボン酸無水物などの他の成分を含んでいてもよい。
本発明の着色組成物は、有機溶剤を含有してもよい。
有機溶剤は、各成分の溶解性や着色組成物の塗布性を満足すれば基本的には特に制限はないが、特に紫外線吸収剤、アルカリ可溶性樹脂や分散剤等の溶解性、塗布性、安全性を考慮して選ばれることが好ましい。また、本発明における着色組成物を調製する際には、少なくとも2種類の有機溶剤を含むことが好ましい。
本発明の組成物は、有機溶剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物に補足的に架橋剤を用い、着色組成物を硬化させてなる硬化膜の硬度をより高めることもできる。
架橋剤としては、架橋反応により膜硬化を行なえるものであれば、特に限定はなく、例えば、(a)エポキシ樹脂、(b)メチロール基、アルコキシメチル基、およびアシロキシメチル基から選ばれる少なくとも1つの置換基で置換された、メラミン化合物、グアナミン化合物、グリコールウリル化合物またはウレア化合物、(c)メチロール基、アルコキシメチル基、およびアシロキシメチル基から選ばれる少なくとも1つの置換基で置換された、フェノール化合物、ナフトール化合物またはヒドロキシアントラセン化合物、が挙げられる。中でも、多官能エポキシ樹脂が好ましい。
架橋剤の具体例などの詳細については、特開2004-295116号公報の段落0134~0147の記載を参照することができる。
本発明の着色組成物中に架橋剤を含有する場合、架橋剤の配合量は、特に定めるものではないが、組成物の全固形分の2~30質量%が好ましく、3~20質量%がより好ましい。
本発明の組成物は、架橋剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物においては、上記着色組成物の製造中または保存中において、重合性化合物の不要な熱重合を阻止するために、少量の重合禁止剤を添加することが望ましい。
本発明に用いうる重合禁止剤としては、ハイドロキノン、p-メトキシフェノール、ジ-tert-ブチル-p-クレゾール、ピロガロール、tert-ブチルカテコール、ベンゾキノン、4,4’-チオビス(3-メチル-6-tert-ブチルフェノール)、2,2’-メチレンビス(4-メチル-6-tert-ブチルフェノール)、N-ニトロソフェニルヒドロキシアミン第一セリウム塩等が挙げられる。
本発明の着色組成物中に重合禁止剤を含有する場合、重合禁止剤の添加量は、全組成物の質量に対して、約0.01質量%~約5質量%が好ましい。
本発明の組成物は、重合禁止剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物には、塗布性をより向上させる観点から、各種の界面活性剤を添加してもよい。界面活性剤としては、フッ素系界面活性剤、ノニオン系界面活性剤、カチオン系界面活性剤、アニオン系界面活性剤、シリコーン系界面活性剤などの各種界面活性剤を使用できる。
即ち、フッ素系界面活性剤を含有する着色組成物を適用した塗布液を用いて膜形成する場合においては、被塗布面と塗布液との界面張力を低下させることにより、被塗布面への濡れ性が改善され、被塗布面への塗布性が向上する。このため、少量の液量で数μm程度の薄膜を形成した場合であっても、厚みムラの小さい均一厚の膜形成をより好適に行える点で有効である。
本発明の着色組成物に界面活性剤を含有する場合、界面活性剤の添加量は、着色組成物の全質量に対して、0.001質量%~2.0質量%が好ましく、より好ましくは0.005質量%~1.0質量%である。
本発明の組成物は、界面活性剤を、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物は、分子量1000以下の有機カルボン酸、および/または有機カルボン酸無水物を含有していてもよい。
有機カルボン酸化合物としては、具体的には、脂肪族カルボン酸または芳香族カルボン酸が挙げられる。脂肪族カルボン酸としては、例えば、ギ酸、酢酸、プロピオン酸、酪酸、吉草酸、ピバル酸、カプロン酸、グリコール酸、アクリル酸、メタクリル酸等のモノカルボン酸、シュウ酸、マロン酸、コハク酸、グルタル酸、アジピン酸、ピメリン酸、シクロヘキサンジカルボン酸、シクロヘキセンジカルボン酸、イタコン酸、シトラコン酸、マレイン酸、フマル酸等のジカルボン酸、トリカルバリル酸、アコニット酸等のトリカルボン酸等が挙げられる。また、芳香族カルボン酸としては、例えば、安息香酸、フタル酸等のフェニル基に直接カルボキシル基が結合したカルボン酸、およびフェニル基から炭素結合を介してカルボキシル基が結合したカルボン酸類が挙げられる。これらの中では、特に分子量600以下、とりわけ分子量50~500のもの、具体的には、例えば、マレイン酸、マロン酸、コハク酸、イタコン酸が好ましい。
本発明の組成物は、有機カルボン酸および/または有機カルボン酸無水物を、それぞれ、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
これら分子量1000以下の有機カルボン酸、および/または有機カルボン酸無水物を添加することによって、高いパターン密着性を保ちながら、着色組成物の未溶解物の残存をより一層低減することが可能である。
本発明の着色組成物においては、特開2004-295116号公報の段落0078に記載の増感剤や光安定剤、同公報の段落0081に記載の熱重合防止剤を含有することができる。
本発明の組成物は、上記成分を、それぞれ、1種類のみを含んでいてもよいし、2種類以上含んでいてもよい。2種類以上含む場合は、その合計量が上記範囲となることが好ましい。
本発明の着色組成物は、前述の成分を混合することで調製される。
なお、着色組成物の調製に際しては、着色組成物を構成する各成分を一括配合してもよいし、各成分を溶剤に溶解・分散した後に逐次配合してもよい。また、配合する際の投入順序や作業条件は特に制約を受けない。例えば、全成分を同時に溶剤に溶解・分散して組成物を調製してもよいし、必要に応じては、各成分を適宜2つ以上の溶液・分散液としておいて、使用時(塗布時)にこれらを混合して組成物として調製してもよい。
上記のようにして調製された着色組成物は、フィルタなどを用いて濾別した後、使用に供することができる。
本発明の着色組成物は、異物の除去や欠陥の低減などの目的で、フィルタで濾過することが好ましい。従来からろ過用途等に用いられているものであれば特に限定されることなく用いることができる。例えば、PTFE(ポリテトラフルオロエチレン)等のフッ素樹脂、ナイロン-6、ナイロン-6,6等のポリアミド系樹脂、ポリエチレン、ポリプロピレン(PP)等のポリオレフィン樹脂(高密度、超高分子量を含む)等によるフィルタが挙げられる。これら素材の中でもポリプロピレン(高密度ポリプロピレンを含む)が好ましい。
フィルタの孔径は、0.01μm以上が好ましく、0.05μm以上がより好ましい。また、フィルタの孔径は7.0μm以下が好ましく、3.0μm以下がより好ましく、2.5μm以下がさらに好ましく、2.0μm以下がよりさらに好ましく、0.5μm以下が特に好ましい。この範囲とすることにより、後工程において均一及び平滑な着色組成物の調製を阻害する、微細な異物を確実に除去することが可能となる。
また、上述した範囲内で異なる孔径の第1のフィルタを組み合わせてもよい。ここでの孔径は、フィルタメーカーの公称値を参照することができる。市販のフィルタとしては、例えば、日本ポール株式会社、アドバンテック東洋株式会社、日本インテグリス株式会社(旧日本マイクロリス株式会社)又は株式会社キッツマイクロフィルタ等が提供する各種フィルタの中から選択することができる。
第2のフィルタは、上述した第1のフィルタと同様の材料等で形成されたものを使用することができる。
例えば、第1のフィルタでのフィルタリングは、分散液のみで行い、他の成分を混合した後で、第2のフィルタリングを行ってもよい。
次に、本発明における硬化膜、パターン形成方法およびカラーフィルタについて、その製造方法を通じて詳述する。
本発明の硬化膜は、本発明の着色組成物を硬化してなる。かかる硬化膜はカラーフィルタに好ましく用いられる。
本発明のパターン形成方法は、カラーフィルタが有する着色パターン(画素)の形成に好適に適用することができる。
本発明の組成物は、いわゆるフォトリソグラフィ法でパターン形成によって、カラーフィルタを製造してもよいし、ドライエッチング法によってパターンを形成してもよい。
すなわち、本発明のカラーフィルタの第一の製造方法として、着色組成物を支持体上に適用して着色組成物層を形成する工程と、上記着色組成物層をパターン状に露光する工程と、未露光部を現像除去して着色パターンを形成する工程とを含むカラーフィルタの製造方法が例示される。
また、本発明のカラーフィルタの第二の製造方法として、着色組成物を支持体上に適用して着色組成物層を形成し、硬化して着色層を形成する工程、上記着色層上にフォトレジスト層を形成する工程、露光および現像することにより上記フォトレジスト層をパターニングしてレジストパターンを得る工程、および上記レジストパターンをエッチングマスクとして上記着色層をドライエッチングする工程を含む、カラーフィルタの製造方法が例示される。
本発明では、フォトリソグラフィ法で製造することがより好ましい。
以下これらの詳細を述べる。
着色組成物層を形成する工程では、支持体上に、本発明の着色組成物を適用して着色組成物層形成工程を形成する。
本発明における着色パターンは、固体撮像素子用基板の撮像素子形成面側(おもて面)に形成されてもよいし、撮像素子非形成面側(裏面)に形成されてもよい。
固体撮像素子における着色パターンの間や、固体撮像素子用基板の裏面には、遮光膜が設けられていてもよい。
また、支持体上には、必要により、上部の層との密着改良、物質の拡散防止或いは基板表面の平坦化のために下塗り層を設けてもよい。下塗り層には、溶剤、アルカリ可溶性樹脂、重合性化合物、重合禁止剤、界面活性剤、光重合開始剤等を配合でき、これらの各成分は、上述の本発明の組成物に配合する成分から適宜選択されることが好ましい。
<<露光する工程>>
露光工程では、着色組成物層形成工程において形成された着色組成物層を、例えば、ステッパー等の露光装置を用い、所定のマスクパターンを有するマスクを介してパターン露光する。これにより、硬化膜が得られる。
露光に際して用いることができる放射線(光)としては、特に、g線、i線等の紫外線が好ましく(特に好ましくはi線)用いられる。照射量(露光量)は30mJ/cm2~1500mJ/cm2が好ましく50mJ/cm2~1000mJ/cm2がより好ましく、80mJ/cm2~500mJ/cm2が特に好ましい。
膜厚を、1.0μm以下とすることにより、高解像性、高密着性を得られるため、好ましい。
また、本工程においては、0.7μm以下の薄い膜厚を有する硬化膜も好適に形成することができ、得られた硬化膜を、後述するパターン形成工程にて現像処理することで、薄膜でありながらも、現像性、表面荒れ抑制、およびパターン形状に優れた着色パターンを得ることができる。
次いでアルカリ現像処理を行うことにより、露光工程における光未照射部分の着色組成物層がアルカリ水溶液に溶出し、光硬化した部分だけが残る。
現像液としては、下地の撮像素子や回路などにダメージを起さない、有機アルカリ現像液が望ましい。現像温度としては通常20℃~30℃であり、現像時間は、従来20秒~90秒であった。より残渣を除去するため、近年では120秒~180秒実施する場合もある。さらには、より残渣除去性を向上するため、現像液を60秒ごとに振り切り、さらに新たに現像液を供給する工程を数回繰り返す場合もある。
なお、現像液には無機アルカリを用いてもよく、無機アルカリとしては、例えば、水酸化ナトリウム、水酸化カリウム、炭酸ナトリウム、炭酸水素ナトリウム、硅酸ナトリウム、メタ硅酸ナトリウムなどが好ましい。
なお、このようなアルカリ性水溶液からなる現像液を使用した場合には、一般に現像後純水で洗浄(リンス)する。
ポストベークは、硬化を完全なものとするための現像後の加熱処理であり、通常100℃~240℃、好ましくは200℃~240℃の熱硬化処理を行う。
このポストベーク処理は、現像後の塗布膜を、上記条件になるようにホットプレートやコンベクションオーブン(熱風循環式乾燥機)、高周波加熱機等の加熱手段を用いて、連続式あるいはバッチ式で行うことができる。
ドライエッチングは、着色層を、パターニングされたフォトレジスト層をマスクとしてエッチングガスを用いて行うことができる。具体的には、着色層上にポジ型またはネガ型の感放射線性組成物を塗布し、これを乾燥させることによりフォトレジスト層を形成する。フォトレジスト層の形成においては、さらにプリベーク処理を施すことが好ましい。特に、フォトレジストの形成プロセスとしては、露光後の加熱処理(PEB)、現像後の加熱処理(ポストベーク処理)を実施する形態が望ましい。
具体的には、ポジ型の感放射線性組成物として、キノンジアジド化合物およびアルカリ可溶性樹脂を含有する組成物が好ましい。キノンジアジド化合物およびアルカリ可溶性樹脂を含有するポジ型の感放射線性組成物は、500nm以下の波長の光照射によりキノンジアジド基が分解してカルボキシル基を生じ、結果としてアルカリ不溶状態からアルカリ可溶性になることを利用するものである。このポジ型フォトレジストは解像力が著しく優れているので、ICやLSI等の集積回路の作製に用いられている。キノンジアジド化合物としては、ナフトキノンジアジド化合物が挙げられる。市販品としては例えばFHi622BC」(富士フイルムエレクトロニクスマテリアルズ社製)などが挙げられる。
フッ素系ガスと酸素ガス(O2)との混合ガスを用い、支持体が露出しない領域(深さ)までエッチングを行なう第1段階のエッチングと、この第1段階のエッチングの後に、窒素ガス(N2)と酸素ガス(O2)との混合ガスを用い、好ましくは支持体が露出する領域(深さ)付近までエッチングを行なう第2段階のエッチングと、支持体が露出した後に行なうオーバーエッチングとを含む形態が好ましい。以下、ドライエッチングの具体的手法、並びに第1段階のエッチング、第2段階のエッチング、およびオーバーエッチングについて説明する。
(1)第1段階のエッチングにおけるエッチングレート(nm/min)と、第2段階のエッチングにおけるエッチングレート(nm/min)とをそれぞれ算出する。(2)第1段階のエッチングで所望の厚さをエッチングする時間と、第2段階のエッチングで所望の厚さをエッチングする時間とをそれぞれ算出する。(3)上記(2)で算出したエッチング時間に従って第1段階のエッチングを実施する。(4)上記(2)で算出したエッチング時間に従って第2段階のエッチングを実施する。あるいはエンドポイント検出でエッチング時間を決定し、決定したエッチング時間に従って第2段階のエッチングを実施してもよい。(5)上記(3)、(4)の合計時間に対してオーバーエッチング時間を算出し、オーバーエッチングを実施する。
上記のうち、アルキレングリコールモノアルキルエーテルカルボキシレートおよびアルキレングリコールモノアルキルエーテルが好ましい。
これら溶媒は、単独で用いても2種以上を混合して用いてもよい。2種以上を混合する場合、水酸基を有する溶剤と水酸基を有しない溶剤とを混合することが好ましい。水酸基を有する溶剤と水酸基を有しない溶剤との質量比は、1/99~99/1、好ましくは10/90~90/10、さらに好ましくは20/80~80/20である。プロピレングリコールモノメチルエーテルアセテート(PGMEA)とプロピレングリコールモノメチルエーテル(PGME)の混合溶剤で、その比率が60/40であることが特に好ましい。なお、汚染物に対する洗浄液の浸透性を向上させるために、洗浄液には前掲の本組成物に関する界面活性剤を添加してもよい。
本発明のカラーフィルタは、CCD、CMOS等の固体撮像素子に好適に用いることができ、特に100万画素を超えるような高解像度のCCDやCMOS等に好適である。本発明の固体撮像素子用カラーフィルタは、例えば、CCDまたはCMOSを構成する各画素の受光部と、集光するためのマイクロレンズと、の間に配置されるカラーフィルタとして用いることができる。
また、着色パターン(着色画素)のサイズ(パターン幅)としては、2.5μm以下が好ましく、2.0μm以下がより好ましく、1.7μm以下が特に好ましい。
本発明の固体撮像素子は、既述の本発明のカラーフィルタを備える。本発明の固体撮像素子の構成としては、本発明におけるカラーフィルタが備えられた構成であり、固体撮像素子として機能する構成であれば特に限定はないが、例えば、以下のような構成が挙げられる。
さらに、上記デバイス保護層上であってカラーフィルタの下(支持体に近い側)に集光手段(例えば、マイクロレンズ等。以下同じ)を有する構成や、カラーフィルタ上に集光手段を有する構成等であってもよい。
本発明のカラーフィルタは、上記固体撮像素子のみならず、液晶表示装置や有機EL表示装置などの、画像表示装置に用いることができ、特に液晶表示装置の用途に好適である。本発明のカラーフィルタを備えた液晶表示装置は、表示画像の色合いが良好で表示特性に優れた高画質画像を表示することができる。
また、本発明におけるカラーフィルタは、明るく高精細なCOA(Color-filter On Array)方式にも供することが可能である。COA方式の液晶表示装置にあっては、カラーフィルタ層に対する要求特性は、前述のような通常の要求特性に加えて、層間絶縁膜に対する要求特性、すなわち低誘電率および剥離液耐性が必要とされることがある。本発明のカラーフィルタにおいては、色相に優れた色素多量体を用いることから、色純度、光透過性などが良好で着色パターン(画素)の色合いに優れるので、解像度が高く長期耐久性に優れたCOA方式の液晶表示装置を提供することができる。なお、低誘電率の要求特性を満足するためには、カラーフィルタ層の上に樹脂被膜を設けてもよい。
これらの画像表示方式については、例えば、「EL、PDP、LCDディスプレイ-技術と市場の最新動向-(東レリサーチセンター調査研究部門 2001年発行)」の43ページなどに記載されている。
バックライトに関しては、SID meeting Digest 1380(2005)(A.Konno et.al)や、月刊ディスプレイ 2005年12月号の18~24ページ(島 康裕)、同25~30ページ(八木隆明)などに記載されている。
<色素単量体(X-2)の合成>
合成例1のカリウム=ビス(トリフルオロメタンスルホニル)イミドをカリウム=ビス(トリフルオロエタンスルホニル)イミド(17.4g)に変更した以外は同様に操作を行い、色素単量体(X-2)を19.5g得た。
<色素単量体(X-3)の合成>
合成例1のカリウム=ビス(トリフルオロメタンスルホニル)イミドをシクロヘキサフルオロプロパン-1,3-ビス(スルホニル)イミドカリウム塩(13.8g)に変更した以外は同様に操作を行い、色素単量体(X-3)を18.5g得た。
<色素単量体(X-4)の合成>
合成例1のカリウム=ビス(トリフルオロメタンスルホニル)イミドをカリウム=トリス(トリフルオロメタンスルホニル)メチド(25.9g)に変更した以外は同様に操作を行い、色素単量体(X-4)を19.4g得た。
<色素単量体(X-5)の合成>
合成例1のカリウム=ビス(トリフルオロメタンスルホニル)イミドをテトラメチルアンモニウムトリス(ペンタフルオロエチル)トリフルオロホスフェート(21.7g)に変更した以外は同様に操作を行い、色素単量体(X-4)を18.5g得た。
<色素単量体(X-6)の合成>
合成例1のカリウム=ビス(トリフルオロメタンスルホニル)イミドをリチウム=テトラシアノボレート(5.10g)に変更した以外は同様に操作を行い、色素単量体(X-6)を14.2g得た。
<色素単量体(X-7)の合成>
合成例1のカリウム=ビス(トリフルオロメタンスルホニル)イミドをテトラキス[3,5-ビス(トリフルオロメチル)フェニル]ほう酸ナトリウム水和物(37.0g)に変更した以外は同様に操作を行い、色素単量体(X-6)を45.2g得た。
<色素単量体(X-8)の合成>
合成例1のカリウム=ビス(トリフルオロメタンスルホニル)イミドをテトラキス[4-フルオロフェニル]ほう酸ナトリウム水和物(17.3g)に変更した以外は同様に操作を行い、色素単量体(X-8)を32.2g得た。
<色素単量体(X-9)の合成>
合成例1のメタクリル酸2-ヒドロキシエチルをアクリル酸2-ヒドロキシエチル(8.73g)に変更した以外は同様に操作を行い、色素単量体(X-9)を17.4g得た。
<色素単量体(X-10)の合成>
合成例1のメタクリル酸2-ヒドロキシエチルをN-(2-ヒドロキシエチル)アクリルアミド(8.65g)に変更した以外は同様に操作を行い、色素単量体(X-10)を17.1g得た。
<色素単量体(X-11)の合成>
合成例1のメタクリル酸2-ヒドロキシエチルをN-(2-ヒドロキシエチル)メタクリルアミド(8.92g)に変更した以外は同様に操作を行い、色素単量体(X-11)を17.2g得た。
<色素単量体(X-12)の合成>
合成例1のメタクリル酸2-ヒドロキシエチルを4-ビニル安息香酸2-ヒドロキシエチル(14.4g)に変更した以外は同様に操作を行い、色素単量体(X-12)を18.4g得た。
<色素単量体(X-13)の合成>
合成例1のメタクリル酸2-ヒドロキシエチルをメタクリル酸5-ヒドロキシペンチル(12.9g)に変更した以外は同様に操作を行い、色素単量体(X-13)を17.9g得た。
<色素単量体X-17の合成>
<色素単量体X-18の合成>
<色素多量体(S-1)の合成>
合成例1におけるモノマー(X-1)およびメタクリル酸を下記表2に記載のモノマーおよび仕込み量に変更した以外は同様の操作を行い、色素多量体(S-2)~(S-23)、(S-28)、(S-29)および(S-H1)を合成した。
<色素多量体(S-26)の合成>
<<酸価の測定>>
酸価については、電位差滴定法に従って測定した。具体的には、プロピレングリコールモノメチルエーテルと水との9対1混合溶剤に溶かし、0.1モル/Lの水酸化カリウム水溶液で滴定し、滴定曲線上の変曲点までの滴定量から、酸価(mgKOH/g)を算出した。
色素多量体1.0gにPGMEA19.0gを添加し溶解させた。この溶液を粘度計定数が0.003mm2/s2{cst/s}のウベローデ管に入れ、30℃で測定した。
還元粘度の単位は、g(色素多量体)/g(色素多量体+PGMEAの合計質量)である。
下記組成の成分を混合して溶解し、下塗り層用レジスト液を調製した。
<下塗り層用レジスト液の組成>
・溶剤:プロピレングリコールモノメチルエーテルアセテート(PGMEA) 19.20部
・溶剤:乳酸エチル 36.67部
・アルカリ可溶性樹脂:メタクリル酸ベンジル/メタクリル酸/メタクリル酸-2-ヒドロキシエチル共重合体(モル比=60/22/18、重量平均分子量15,000、数平均分子量9,000)の40%PGMEA溶液 30.51部
・ジペンタエリスリトールヘキサアクリレート 12.20部
・重合禁止剤:p-メトキシフェノール 0.0061部
・フッ素系界面活性剤:F-475、DIC(株)製 0.83部
・光重合開始剤:トリハロメチルトリアジン系の光重合開始剤 (TAZ-107、みどり化学社製) 0.586部
6インチのシリコンウエハをオーブン中で200℃のもと30分加熱処理した。次いで、このシリコンウエハ上に、上記レジスト液を乾燥膜厚が1.5μmになるように塗布し、さらに220℃のオーブン中で1時間加熱乾燥させて下塗り層を形成し、下塗り層付シリコンウエハ基板を得た。
3-1.青色(Blue15:6)顔料分散液の調製
青色顔料分散液1を、以下のようにして調製した。
C.I.Pigment Blue15:6を13.0部(青色顔料、平均粒子サイズ55nm)、および顔料分散剤であるDisperbyk111を5.0部、PGMEA82.0部からなる混合液を、ビーズミル(beads mill)(ジルコニアビーズ0.3mm径)により3時間混合・分散して、顔料分散液を調製した。その後さらに、減圧機構付き高圧分散機NANO-3000-10(日本ビーイーイー(株)製)を用いて、2000kg/cm3の圧力下で流量500g/分として分散処理を行なった。この分散処理を10回繰り返し、実施例または比較例の着色組成物に用いる青色用顔料分散液1(C.I.Pigment Blue15:6分散液、顔料濃度13%)を得た。
得られた青色顔料分散液について、顔料の粒子サイズを動的光散乱法(Microtrac Nanotrac UPA-EX150(日機装社(Nikkiso Co., Ltd.)製))により測定したところ、24nmであった。
なお、表に示す顔料(PR254、PY139)の詳細は以下の通りである。
~赤色顔料~
・C.I.ピグメントレッド254(PR254)(粒子サイズ26nm)
~黄色顔料~
・C.I.ピグメントイエロー139(PY139)(粒子サイズ29nm)
(1)実施例1~39、比較例1~2の着色組成物
下記の各成分を混合して分散、溶解し、着色組成物の調液後に、0.45μmナイロンフィルタでろ過することにより、実施例1~39、比較例1~2の各着色組成物を得た。
・シクロヘキサノン 1.133部
・アルカリ可溶性樹脂(下記J1またはJ2:下記表に記載の化合物)
0.030部
・ソルスパース20000(1%シクロヘキサン溶液、日本ルーブリゾール(株)製) 0.125部
・光重合開始剤(下記(I-1)~(I-8):下記に記載の化合物)
0.012部
・色素多量体(下記表に記載の化合物)(ただし、比較例1および2は所定の色素単量体を用いた) 固形分として0.040部
・下記表に記載の顔料を含む顔料分散液(顔料濃度13.0%)
0.615部
・ジペンタエリスリトールヘキサアクリレート
0.070部
・グリセロールプロポキシレート(1%シクロヘキサン溶液)
0.048部
<パターン形成>
上記のように調製した実施例および比較例の着色組成物の各々を、上記2で得られた下塗り層付シリコンウエハ基板の下塗り層上に塗布し、着色組成物層(塗布膜)を形成した。そして、この塗布膜の乾燥膜厚が0.6μmになるように、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行なった。
その後、照射された塗布膜が形成されているシリコンウエハ基板をスピン・シャワー現像機(DW-30型、(株)ケミトロニクス製)の水平回転テーブル上に載置し、CD-2000(富士フイルムエレクトロニクスマテリアルズ(株)製)を用いて23℃で60秒間パドル現像を行ない、シリコンウエハ基板に着色パターンを形成した。
以上のようにして、実施例または比較例の着色組成物により形成された着色パターンを有する単色のカラーフィルタを作製した。
その後、測長SEM「S-9260A」(日立ハイテクノロジーズ(株)製)を用いて、着色パターンのサイズを測定した。パターンサイズが1.0μmとなる露光量を最適露光量とした。
5-1.パターン欠損
着色パターンを100個観察し、欠損しているパターンの個数を数えた。個数が多いほどパターン欠損が多く、劣ることを示す。結果を下記表に示す。
パターン100個を測長SEMで観察し、パターン直線性を判定した。
A:形状は矩形であり、パターンの辺が直線である
B:形状は矩形であり、パターンの辺がややゆがんだ直線であるが実用上問題ないレベル
C:形状は丸みをおびており、パターンの辺は粗く、実用上問題があるレベル
上記得た着色組成物が塗布されたガラス基板を、上記基板面で接するように200℃のホットプレートに載置して1時間加熱した後、色度計MCPD-1000(大塚電子(株)製)にて、加熱前後での色差(ΔE*ab値)を測定して熱堅牢性を評価する指標とし、下記判定基準に従って評価した。ΔE*ab値は、値の小さい方が、耐熱性が良好なことを示す。なお、ΔE*ab値は、CIE1976(L*,a*,b*)空間表色系による以下の色差公式から求められる値である(日本色彩学会編 新編色彩科学ハンドブック(昭和60年)p.266)。
ΔE*ab={(ΔL*)2+(Δa*)2+(Δb*)2}1/2
各カラーフィルタにおける着色パターンの吸光度を、MCPD-3000(大塚電子(株)製)にて測定した(吸光度A)。
カラーフィルタの着色パターン形成面に、乾燥膜厚が1μmとなるようにCT-2000L溶液(富士フイルムエレクトロニクスマテリアルズ(株)製、透明下地剤)を塗布し、乾燥させて、透明膜を形成した後、280℃で5分間加熱処理を行なった。
加熱終了後、着色パターンに隣接する透明膜の吸光度を、MCPD-3000(大塚電子(株)製)にて測定した(吸光度B)。
得られた透明膜の吸光度Bの値について、加熱前に測定した着色パターンの吸光度Aの値に対する割合[%]を算出した〔下記(式A)〕。これを隣接ピクセルへの色移りを評価する指標とした。
(式A) 色移り(%)=吸光度B/吸光度A×100
これに対し、非求核性の対アニオンを有さない色素多量体やモノマータイプの色素を用いた場合、上記のいずれか1つ以上の効果が達成できないことが分かった。
着色組成物の調製
下記成分を混合・溶解して、実施例37~72、比較例3~4の各着色組成物を得た。
・シクロヘキサノン 1.133部
・色素多量体(下記表に記載の化合物) 固形分として0.040部
・上述の青色顔料分散液(顔料濃度13.0%) 0.615部
・重合性化合物(EHPE-3150(ダイセル化学社製、2,2-ビス(ヒドロキシメチル)-1-ブタノールの1,2-エポキシ-4-(2-オキシラニル)シクロヘキサン付加物)) 0.070部
・グリセロールプロポキシレート(1%シクロヘキサン溶液)
0.048部
7-1.耐アルカリ現像液性(現像液耐性)
ガラス基板上に、上記着色組成物を膜厚が0.6μmになるようにスピンコーターを用いて塗布し、100℃のホットプレートを用いて120秒間加熱処理(プリベーク)を行った。次いで、220℃のホットプレートを用いて300秒間加熱処理(ポストベーク)を行い、硬化膜を作製した。
このようにして得られたカラーフィルタを、紫外可視近赤外分光光度計UV3600(島津製作所製)の分光光度計(レファレンス:ガラス基板)で300nm~800nmの波長域で透過率を測定した。また、OLYMPUS製光学顕微鏡 BX60を用いて、反射観測(倍率50倍)にて微分干渉像を観察した。
次いで、アルカリ現像液FHD-5(富士フイルムエレクトロニクスマテリアルズ(株)製)の中に5分間浸漬し、乾燥させた後に再度分光測定を実施し、溶剤浸漬前後の波長550nmにおける透過率変動(溶剤浸漬前の上記透過率をT0、溶剤浸漬後の上記透過率をT1とした場合に、式|T0-T1|で表される値を評価した。
7-1で作製した着色膜上にポジ型フォトレジスト「FHi622BC」(富士フイルムエレクトロニクスマテリアルズ社製)を塗布し、プリベークを実施し、膜厚0.8μmのフォトレジスト層を形成した。続いて、フォトレジスト層を、i線ステッパー(キャノン(株)製)を用い、350mJ/cm2の露光量でパターン露光し、フォトレジスト層の温度または雰囲気温度が90℃となる温度で1分間、加熱処理を行なった。その後、フォトレジスト剥離液「MS230C」(富士フイルムエレクトロニクスマテリアルズ社製)を使用して120秒間、剥離処理を実施してレジストパターンを除去し、さらに純水による洗浄、スピン乾燥を実施した。その後、100℃で2分間の脱水ベーク処理を行った。
Claims (17)
- (A)非求核性の対アニオンを有する色素多量体。
- 前記(A)非求核性の対アニオンを有する色素多量体が、ジピロメテン色素、トリアリールメタン色素、キサンテン色素、およびシアニン色素から選択される色素に由来する部分構造を有する、請求項1に記載の色素多量体。
- 前記非求核性の対アニオンを有する色素多量体が、キサンテン色素に由来する部分構造を有する、請求項1または2に記載の色素多量体。
- 前記非求核性対アニオンが、イミドアニオン、トリス(スルホニル)メチドアニオン、テトラアリールボレートアニオン、B-(CN)n1(ORa)4-n1、PFn2RP (6-n2) -およびBFn3RP (4-n3) -から選択される、請求項1~3のいずれか1項に記載の色素多量体;
B-(CN)n1(ORa)4-nにおいて、Raは炭素数1~10のアルキル基または炭素数6~10のアリール基を表し、n1は1~4の整数を表す;PFn2RP (6-n2) -において、RPは炭素数1~10のフッ素化アルキル基を表し、n2は1~6の整数を表す;BFn3RP (4-n3) -において、RPは炭素数1~10のフッ素化アルキル基を表し、n3は1~4の整数を表す。 - 前記色素多量体が、重合性基を有する、請求項1~5のいずれか1項に記載の色素多量体。
- 前記色素多量体が、エチレン性不飽和結合を含む基を有する、請求項1~6のいずれか1項に記載の色素多量体。
- 前記色素多量体が、酸基を有する繰り返し単位を有する、請求項1~7のいずれか1項に記載の色素多量体。
- 請求項1~8のいずれか1項に記載の(A)色素多量体、(B)硬化性化合物および(C)顔料を含む、着色組成物。
- 前記着色組成物が、さらに(D)光重合開始剤を含む、請求項9に記載の着色組成物。
- 前記(D)光重合開始剤が、オキシム化合物である、請求項10に記載の着色組成物。
- カラーフィルタの着色層形成用である、請求項9~11のいずれか1項に記載の着色組成物。
- 請求項9~12のいずれか1項に記載の着色組成物を硬化してなる硬化膜。
- 請求項9~12のいずれか1項に記載の着色組成物を支持体上に適用して着色組成物層を形成する工程と、前記着色組成物層をパターン状に露光する工程と、未露光部を現像除去して着色パターンを形成する工程とを含むカラーフィルタの製造方法。
- 請求項9~12のいずれか1項に記載の着色組成物を支持体上に適用して着色組成物層を形成し、硬化して着色層を形成する工程、
前記着色層上にフォトレジスト層を形成する工程、
露光および現像することにより前記フォトレジスト層をパターニングしてレジストパターンを得る工程、および
前記レジストパターンをエッチングマスクとして前記着色層をドライエッチングする工程を含む、カラーフィルタの製造方法。 - 請求項13に記載の硬化膜を有するカラーフィルタ、または請求項14または15に記載のカラーフィルタの製造方法によって製造したカラーフィルタ。
- 請求項16に記載のカラーフィルタを有する固体撮像素子または画像表示装置。
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JP2013010814A (ja) * | 2011-06-28 | 2013-01-17 | Toppan Printing Co Ltd | 重合性二重結合を持つトリアリールメタン染料、トリアリールメタン染料を側鎖に持つ高分子化合物、カラーフィルタ用着色組成物、カラーフィルタ、液晶表示装置及び有機el表示装置 |
JP2013107954A (ja) * | 2011-11-18 | 2013-06-06 | Nippon Kayaku Co Ltd | ローダミン化合物 |
WO2014126167A1 (ja) * | 2013-02-15 | 2014-08-21 | 和光純薬工業株式会社 | 着色組成物 |
Cited By (2)
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WO2016121194A1 (ja) * | 2015-01-29 | 2016-08-04 | 富士フイルム株式会社 | 着色組成物、カラーフィルタ、パターン形成方法、カラーフィルタの製造方法、固体撮像素子、および、画像表示装置 |
JPWO2016121194A1 (ja) * | 2015-01-29 | 2017-12-14 | 富士フイルム株式会社 | 着色組成物、カラーフィルタ、パターン形成方法、カラーフィルタの製造方法、固体撮像素子、および、画像表示装置 |
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CN105339438A (zh) | 2016-02-17 |
US9605101B2 (en) | 2017-03-28 |
CN105339438B (zh) | 2018-03-16 |
JP6152074B2 (ja) | 2017-06-21 |
KR20160013932A (ko) | 2016-02-05 |
KR101800225B1 (ko) | 2017-11-22 |
TWI615679B (zh) | 2018-02-21 |
JP2015028144A (ja) | 2015-02-12 |
US20160108161A1 (en) | 2016-04-21 |
TW201502703A (zh) | 2015-01-16 |
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