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WO2012058830A1 - 线宽量测装置 - Google Patents

线宽量测装置 Download PDF

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Publication number
WO2012058830A1
WO2012058830A1 PCT/CN2010/079153 CN2010079153W WO2012058830A1 WO 2012058830 A1 WO2012058830 A1 WO 2012058830A1 CN 2010079153 W CN2010079153 W CN 2010079153W WO 2012058830 A1 WO2012058830 A1 WO 2012058830A1
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WO
WIPO (PCT)
Prior art keywords
line width
light source
measuring device
platform
width measuring
Prior art date
Application number
PCT/CN2010/079153
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English (en)
French (fr)
Inventor
贺成明
林勇佑
Original Assignee
深圳市华星光电技术有限公司
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Application filed by 深圳市华星光电技术有限公司 filed Critical 深圳市华星光电技术有限公司
Priority to US12/997,890 priority Critical patent/US20120113246A1/en
Publication of WO2012058830A1 publication Critical patent/WO2012058830A1/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/04—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving
    • G01B11/046—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness specially adapted for measuring length or width of objects while moving for measuring width

Definitions

  • the present invention relates to a line width measuring device, and more particularly to a line width measuring device that affects image taking by adding a compensation light source to avoid shadowing of an edge of a pattern to be tested.
  • FIG. 1 is a schematic diagram of line width measurement in the prior art.
  • an image capturing device 91 such as a CCD lens
  • the image capturing device is usually assembled with a light source device 90, and the light source device 90 provides a forward illumination light source directly above the pattern to be tested 92, so that the image capturing device can be taken out clearly. image.
  • the line width measurement technique still has the following problem in practical use: since the light source device 90 is vertically projected onto the pattern to be tested in a radial manner, the edge of the pattern to be tested 92 may be The edge is not illuminated by the light source device 90 due to the thickness relationship, thereby generating a shadow.
  • the line width measurement needs to be converted from a color picture to a gray level picture, which will be converted by means of computer calculus.
  • the shadow is converted into a gray scale value, a diagonal line is displayed, that is, the edge of the pattern to be tested may be accurately captured and defined by the shadow interference. Therefore, the generation of the shadow affects the accuracy of the image capturing, so that the line width measurement produces an error.
  • the main object of the present invention is to provide a line width measuring device which can compensate for the illumination of the shaded portion of the light source to be measured by increasing the light source of the side light source, thereby improving the accuracy of image taking by the image taking device.
  • the present invention provides a line width measuring device, the line width measuring device comprising:
  • An image capturing device is disposed above the platform and facing the measuring area of the platform, and the image capturing device captures an image of the pattern to be tested in the measuring area;
  • a main light source device disposed above the platform, the main light source device providing forward illumination corresponding to the measurement area, the incident direction of the illumination being perpendicular to the platform;
  • At least one compensation light source device is disposed above the platform, and the at least one compensation light source device provides compensation illumination corresponding to the measurement area.
  • the incident direction of the at least one compensation light source is at an oblique angle to the platform.
  • the oblique angle is between 30 and 60 degrees, for example 45 degrees.
  • the line width measuring device comprises two compensating light source devices respectively located on two sides of the main light source device.
  • the line width measuring device further includes a computer, and the computer is connected to the image capturing device to receive an image captured by the image capturing device.
  • the at least one compensating light source device is a light emitting diode assembly, a cold cathode fluorescent tube or an incandescent lamp.
  • the pattern to be tested is a transparent electrode layer of a liquid crystal glass or a black matrix layer of a color filter.
  • the compensation light source device can compensate for the illumination of the shaded portion of the pattern to be measured, especially when the compensation light source device is disposed on both sides of the main light source device, so that the pattern to be tested can be sufficiently illuminated, thereby improving The accuracy of the image taking device to take the image to be measured.
  • 1 is a schematic diagram of a prior art line width measurement.
  • FIG. 2 is a schematic diagram of an existing line width measuring device for taking an image integration edge of a measured image.
  • Figure 3 is a schematic view of a line width measuring device according to a first embodiment of the present invention.
  • Fig. 4 is a schematic view showing the imaging integration of the edge of the detected image according to the present invention.
  • Figure 5 is a schematic illustration of a line width measuring device in accordance with a second embodiment of the present invention.
  • FIG. 3 is a schematic diagram of a line width measuring device according to a first embodiment of the present invention.
  • the line width measuring device comprises a platform 10, an image capturing device 20, a main light source device 30 and at least one compensating light source device 31.
  • the platform 10 has a measuring area 11 , and the surface of the platform 10 can provide a component pattern 100 to be tested, and the placed area is the measuring area 11 .
  • the component pattern 100 to be tested mainly refers to a related component in the field of liquid crystal display (LCD), such as an indium tin oxide (ITO) transparent electrode layer of a liquid crystal glass or a black matrix layer of a color filter (CF) (BM). ), but not limited to this.
  • LCD liquid crystal display
  • ITO indium tin oxide
  • CF color filter
  • the image capturing device 20 is disposed above the platform 10 and can be mounted on a support frame (not shown) disposed on the platform 10.
  • the image capturing device 20 is opposite to the measuring area 11 of the platform 10, and image capturing of the device pattern 100 to be tested is performed in the measuring area 11.
  • the main light source device 30 is disposed above the platform 10.
  • the main light source device 30 provides forward illumination corresponding to the measurement area 11 with an incident direction of illumination perpendicular to the platform surface 10.
  • the main light source device 30 may be a light emitting diode (LED) component, a cold cathode fluorescent tube (Cold) Cathode Fluorescent Lamp, CCFL), incandescent lamp.
  • the at least one compensation light source device 31 is disposed above the platform 10.
  • the line width measuring device includes two compensating light source devices 31 respectively located at two sides of the main light source device 30, wherein the compensating light source device 31 may be a light emitting diode assembly and a cold cathode. Fluorescent tube (Cold Cathode Fluorescent Lamp, CCFL), incandescent lamp.
  • the compensation light source device 31 provides compensation illumination corresponding to the measurement area 11 , and the incident direction of the illumination is at an oblique angle to the platform 10 , and the oblique angle is preferably between 30 and 60 degrees, especially 45 degrees. .
  • the line width measuring device further includes a computer 40.
  • the computer 40 is connected to the image capturing device 20 and receives an image captured by the image capturing device 20.
  • FIG. 5 is a schematic diagram of a line width measuring device according to a second embodiment of the present invention.
  • the line width measuring device of the second embodiment of the present invention is similar to the line width measuring device of the first embodiment of the present invention, and therefore the same component symbols and names are used, but the difference is that the compensation light source device 31
  • the direction of incidence is perpendicular to the platform 10. Since the compensating light source device 31 is provided with a divergent beam (divergent Light), so that its light can still provide compensated illumination corresponding to the edge of the measurement zone 11.
  • a divergent beam divergent Light
  • the line width measuring device of the present invention complements the portion of the element pattern 100 to be tested that cannot be illuminated by the light source at the top by adding the compensation light source device 31 with additional illumination.
  • FIG. 4 when the image capturing screen is converted into a gray scale by a computer integral calculation method, it can be seen that there is no shadow at the edge of the component pattern 100 to be tested, and the integral curve of the grayscale value is one.
  • the vertical line which means that there is no fuzzy space defining the edge, so the edge can be precisely defined.
  • the edge of the pattern to be tested cannot provide complete illumination, thereby generating a shadow, which causes the image capturing accuracy to be disturbed.
  • the line width measuring device of the present invention of FIG. 3 can effectively avoid the shadow generation by supplementing the illumination of the edge of the element pattern 100 to be tested with additional illumination by adding at least one compensation light source device 31 beside the main light source device 30. Further, the accuracy of taking the image of the component pattern 100 to be measured by the image capturing device 20 is improved.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

本发明公开一种线宽量测装置，其包含一平台、一取像装置、一主光源装置及至少一补偿光源装置。所述取像装置设于所述平台上方而正对所述平台的一量测区而于所述量测区撷取一待测图案的影像。所述主光源装置设于所述平台上方而对应所述量测区提供正向照明，其照明的入射方向与所述平台呈垂直。所述至少一补偿光源装置设于所述平台上方而对应所述量测区提供补偿照明。通过补偿光源装置的增设，可以避免待测图案的边缘产生阴影而干扰取像，进而可提升取像的精准度。

Description

线宽量测装置 技术领域
本发明是有关于一种线宽量测装置，特别是有关于一种通过增加补偿光源，以避免待测图案的边缘产生阴影而影响取像的线宽量测装置。
 背景技术
随着半导体制程的发展，积体电路元件越来越精密。因此在半导体制程中，掩膜或晶圆的细微线路图案的线宽、线距等关键尺寸(Critical Dimension，CD)的控制是一个很重要的环节。一般而言，制造商会使用线宽量测装置对线路图案进行关键尺寸的检测，其可以用来量测线宽、线距是否准确而没有偏移。
请参考图1所示，图1为现有技术进行线宽量测的示意图。现有技术是使用一取像装置91(如CCD镜头)对一待测图案92进行撷取影像，再通过电脑处理进行线宽量测。而所述取像装置通常会跟一光源装置90组装在一起，由所述光源装置90于所述待测图案92的正上方提供正向照明光源，让所述取像装置得以撷取出清晰的影像。
然而随着半导体尺寸缩小时，其制程上所能容忍的线宽误差也越来越小。因此，所述线宽量测技术在实际使用上仍具有下列问题：由于所述光源装置90是以放射状的方式垂直投射于所述待测图案上，故所述待测图案92的边缘可能会因为厚度关系而使边缘无法被所述光源装置90照射到，进而产生阴影。请参考图2所示，由于线宽量测需先由彩色画面转换成灰阶画面，其中会通过电脑以积分演算方式来进行转换。而所述阴影经过转换成灰阶数值时，会呈现斜线，亦即所述待测图案的边缘会受到阴影干扰无法被精确撷取及界定。因此所述阴影的产生会影响取像的精准度，使得线宽量测产生误差。
故，有必要提供一种线宽量测装置，以解决现有技术所存在的问题。
 技术问题
本发明的主要目的在于提供一种线宽量测装置，其可以通过增加侧面的光源对待测图案的阴影部分进行照明的补偿，进而提升取像装置对待测图案进行取像的精确度。
 技术解决方案
为达成本发明的前述目的，本发明提供一种线宽量测装置，所述线宽量测装置包含：
一平台，具有一量测区；
一取像装置，设于所述平台上方并正对所述平台的量测区，所述取像装置于所述量测区撷取一待测图案的影像；
一主光源装置，设于所述平台上方，所述主光源装置对应所述量测区提供正向照明，其照明的入射方向与所述平台呈垂直；以及
至少一补偿光源装置，设于所述平台上方，所述至少一补偿光源装置对应所述量测区提供补偿照明。
在本发明的一实施例中，所述至少一补偿光源的入射方向与所述平台呈一斜角度。
在本发明的一实施例中，所述斜角度介于30至60度之间，例如为45度。
在本发明的一实施例中，所述线宽量测装置包含两补偿光源装置，分别位于所述主光源装置的两侧。
在本发明的一实施例中，所述线宽量测装置更包含一计算机，所述计算机连接所述取像装置，而接收所述取像装置所撷取的影像。
在本发明的一实施例中，所述至少一补偿光源装置是发光二极管组件、冷阴极萤光灯管或白炽灯。
在本发明的一实施例中，所述待测图案是液晶玻璃的透明电极层或彩色滤光片的黑色矩阵层。
 有益效果
所述补偿光源装置可对待测图案的阴影部分进行照明的补偿，尤其是当所述补偿光源装置设置于所述主光源装置的两侧时，将可使待测图案获得充足的照明，进而提升取像装置对待测图案进行取像的精确度。
 附图说明
图1是一现有技术进行线宽量测的示意图。
图2是一现有线宽量测装置对受测图形边缘进行取像积分的示意图。
图3是本发明第一实施例线宽量测装置的示意图。
图4是本发明对受测图形边缘进行取像积分的示意图。
图5是本发明第二实施例线宽量测装置的示意图。
 本发明的最佳实施方式
为让本发明上述目的、特征及优点更明显易懂，下文特举本发明较佳实施例，并配合附图，作详细说明如下。再者，本发明所提到的方向用语，例如「上」、「下」、「前」、「后」、「左」、「右」、「内」、「外」、「侧面」等，仅是参考附加图式的方向。因此，使用的方向用语是用以说明及理解本发明，而非用以限制本发明。
请参照图3所示，图3是本发明第一实施例的线宽量测装置的示意图。其中所述线宽量测装置是包含有一平台10、一取像装置20、一主光源装置30以及至少一补偿光源装置31。
所述平台10具有一量测区11，所述平台10的表面可提供一待测的元件图案100置放，所置放的区域即为所述量测区11。所述待测的元件图案100主要是指液晶显示器(LCD)领域的相关组件，例如是液晶玻璃的铟锡氧化物(ITO)透明电极层或彩色滤光片(CF)的黑色矩阵层(BM)，但并不限于此。
所述取像装置20是设于所述平台10上方，其可装设于一设于所述平台10上的支撑架(图中未绘示)。所述取像装置20是正对所述平台10的量测区11，而于所述量测区11内对所述待测的元件图案100进行影像撷取。
所述主光源装置30，设于所述平台10上方。所述主光源装置30对应所述量测区11提供正向照明，其照明的入射方向与所述平台表面10呈垂直。所述主光源装置30可以是发光二极管(LED)组件、冷阴极萤光灯管(Cold Cathode Fluorescent Lamp，CCFL)、白炽灯。
所述至少一补偿光源装置31是设于所述平台10上方。例如，在本实施例中，所述线宽量测装置是包含两补偿光源装置31，分别位于所述主光源装置30的两侧，其中所述补偿光源装置31可以是发光二极管组件、冷阴极萤光灯管(Cold Cathode Fluorescent Lamp，CCFL)、白炽灯。所述补偿光源装置31对应所述量测区11提供补偿照明，其照明的入射方向与所述平台10呈一斜角度，所述斜角度优选介于30至60度之间，特别是45度。
所述线宽量测装置更包含一计算机40。所述计算机40连接所述取像装置20，而接收所述取像装置20所撷取的影像。
请参照图5所示，图5是本发明第二实施例的线宽量测装置的示意图。本发明第二实施例的线宽量测装置相似于本发明第一实施例的线宽量测装置，因此沿用相同的元件符号与名称，但其不同之处在于：所述补偿光源装置31的入射方向是与所述平台10呈垂直。由于所述补偿光源装置31是提供一发散光束(divergent light)，因此其光线仍可对应所述量测区11的边缘提供补偿照明。
本发明线宽量测装置通过增加所述补偿光源装置31，以额外的照明来补足所述待测的元件图案100的边缘无法由顶部的光源照射到的部分。请参照图4所示，当取像画面通过电脑积分演算方式转换成灰阶，可看出所述待测的元件图案100的边缘处已无阴影产生，且在灰阶值的积分曲线呈一垂直线，亦即表示不会有界定边缘的模糊空间，故所述边缘可被精准的界定出。
综上所述，相较于现有线宽量测装置对于待测图案的边缘无法提供完全的照明，进而产生阴影，导致取像精准度受到干扰。图3的本发明线宽量测装置通过在所述主光源装置30旁增设至少一补偿光源装置31来利用额外的照明补足待测的元件图案100的边缘的照明不足，确实可以有效避免阴影产生，进而提高所述取像装置20对待测的元件图案100取像的精准性。
本发明已由上述相关实施例加以描述，然而上述实施例仅为实施本发明的范例。必需指出的是，已公开的实施例并未限制本发明的范围。相反地，包含于权利要求书的精神及范围的修改及均等设置均包括于本发明的范围内。
 本发明的实施方式
工业实用性
序列表自由内容

Claims (16)

  1. 一种线宽量测装置，其包含：
    一平台，具有一量测区；
    一取像装置，设于所述平台上方并正对所述平台的量测区，所述取像装置于所述量测区撷取一待测图案的影像；以及
    一主光源装置，设于所述平台上方，所述主光源装置对应所述量测区提供正向照明，其照明的入射方向与所述平台呈垂直；
    其特征在于：所述线宽量测装置进一步包含：
    两补偿光源装置，设于所述平台上方且分别位于所述主光源装置的两侧，所述两补偿光源装置对应所述量测区提供补偿照明，且所述两补偿光源的入射方向与所述平台呈一斜角度。
  2. 如权利要求1所述的线宽量测装置，其特征在于：所述斜角度介于30至60度之间。
  3. 如权利要求2所述的线宽量测装置，其特征在于：所述斜角度为45度。
  4. 如权利要求1所述的线宽量测装置，其特征在于：所述线宽量测装置更包含一计算机，所述电脑连接所述取像装置，而接收所述取像装置所撷取的影像。
  5. 如权利要求1所述的线宽量测装置，其特征在于：所述主光源装置是发光二极管组件、冷阴极萤光灯管或白炽灯。
  6. 如权利要求1所述的线宽量测装置，其特征在于：所述补偿光源装置是发光二极管组件、冷阴极萤光灯管或白炽灯。
  7. 如权利要求1所述的线宽量测装置，其特征在于：所述待测图案是液晶玻璃的透明电极层或彩色滤光片的黑色矩阵层。
  8. 一种线宽量测装置，其包含：
    一平台，具有一量测区；
    一取像装置，设于所述平台上方并正对所述平台的量测区，所述取像装置于所述量测区撷取一待测图案的影像；以及
    一主光源装置，设于所述平台上方，所述主光源装置对应所述量测区提供正向照明，其照明的入射方向与所述平台呈垂直；
    其特征在于：所述线宽量测装置进一步包含：
    至少一补偿光源装置，设于所述平台上方，所述至少一补偿光源装置对应所述量测区提供补偿照明。
  9. 如权利要求8所述的线宽量测装置，其特征在于：所述至少一补偿光源的入射方向与所述平台呈一斜角度。
  10. 如权利要求9所述的线宽量测装置，其特征在于：所述斜角度介于30至60度之间。
  11. 如权利要求10所述的线宽量测装置，其特征在于：所述斜角度为45度。
  12. 如权利要求8所述的线宽量测装置，其特征在于：所述线宽量测装置包含两补偿光源装置，分别位于所述主光源装置的两侧。
  13. 如权利要求8所述的线宽量测装置，其特征在于：所述线宽量测装置更包含一计算机，所述计算机连接所述取像装置，而接收所述取像装置所撷取的影像。
  14. 如权利要求8所述的线宽量测装置，其特征在于：所述主光源装置是发光二极管组件、冷阴极萤光灯管或白炽灯。
  15. 如权利要求8所述的线宽量测装置，其特征在于：所述至少一补偿光源装置是发光二极管组件、冷阴极萤光灯管或白炽灯。
  16. 如权利要求8所述的线宽量测装置，其特征在于：所述待测图案是液晶玻璃的透明电极层或彩色滤光片的黑色矩阵层。
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US9074886B2 (en) 2012-07-09 2015-07-07 Shenzhen China Star Optoelectronics Technology Co., Ltd. Line-width measurement device and measurement method using the same
CN102768017B (zh) * 2012-07-09 2014-06-25 深圳市华星光电技术有限公司 线宽量测装置及其方法
CN102914266B (zh) * 2012-11-15 2015-04-22 深圳市华星光电技术有限公司 一种线宽量测装置
CN110379726B (zh) * 2019-07-31 2022-07-22 厦门华联电子股份有限公司 一种联排cob-led排测的方法
CN110906867B (zh) * 2019-11-29 2021-09-17 苏州精濑光电有限公司 一种线宽量测方法和线宽量测机
CN112964179B (zh) * 2021-02-05 2022-10-14 合肥清溢光电有限公司 一种用于cd测量机的线宽测量误差补偿方法

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