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WO2008126614A1 - 弾性波素子 - Google Patents

弾性波素子 Download PDF

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Publication number
WO2008126614A1
WO2008126614A1 PCT/JP2008/054591 JP2008054591W WO2008126614A1 WO 2008126614 A1 WO2008126614 A1 WO 2008126614A1 JP 2008054591 W JP2008054591 W JP 2008054591W WO 2008126614 A1 WO2008126614 A1 WO 2008126614A1
Authority
WO
WIPO (PCT)
Prior art keywords
elastic wave
electrode
electrode finger
finger
wave device
Prior art date
Application number
PCT/JP2008/054591
Other languages
English (en)
French (fr)
Inventor
Hajime Kando
Shunsuke Kido
Takeshi Nakao
Daisuke Yamamoto
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to JP2009509009A priority Critical patent/JP5024373B2/ja
Priority to CN2008800030743A priority patent/CN101595641B/zh
Priority to EP08721995.2A priority patent/EP2128982B1/en
Publication of WO2008126614A1 publication Critical patent/WO2008126614A1/ja
Priority to US12/542,733 priority patent/US8390400B2/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02921—Measures for preventing electric discharge due to pyroelectricity
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/0023—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output
    • H03H9/0028—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output using surface acoustic wave devices
    • H03H9/0047—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output using surface acoustic wave devices having two acoustic tracks
    • H03H9/0066—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output using surface acoustic wave devices having two acoustic tracks being electrically parallel
    • H03H9/0071—Networks for transforming balanced signals into unbalanced signals and vice versa, e.g. baluns, or networks having balanced input and output using surface acoustic wave devices having two acoustic tracks being electrically parallel the balanced terminals being on the same side of the tracks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02858—Means for compensation or elimination of undesirable effects of wave front distortion
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02881—Means for compensation or elimination of undesirable effects of diffraction of wave beam
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14594—Plan-rotated or plan-tilted transducers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/64—Filters using surface acoustic waves

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

　共振周波数付近の共振特性を改善することができ、電極指間の短絡不良や絶縁性の劣化が生じ難い、弾性波素子を提供する。 　圧電体に接するようにＩＤＴ電極３が形成されており、ＩＤＴ電極３が複数本の電極指を有し、該複数本の電極指が、弾性波伝搬方向において隣り合っておりかつ異なる電位に接続される第１，第２の電極指３１，３２と、第１の電極指３１の電極指長さ方向外側に配置されたギャップ３３を介して対向されている第１のダミー電極指３４とを含み、ギャップ近傍において、第１の電極指３１及び第１のダミー電極指３４の内の少なくとも一方において、少なくとも一方の電極指の側縁から弾性波伝搬方向に突出するように第１の凸部１１～１４が形成されている、弾性波素子１。
PCT/JP2008/054591 2007-03-27 2008-03-13 弾性波素子 WO2008126614A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009509009A JP5024373B2 (ja) 2007-03-27 2008-03-13 弾性波素子
CN2008800030743A CN101595641B (zh) 2007-03-27 2008-03-13 弹性波元件
EP08721995.2A EP2128982B1 (en) 2007-03-27 2008-03-13 Elastic wave device
US12/542,733 US8390400B2 (en) 2007-03-27 2009-08-18 Acoustic wave element having an electrode finger with a protrusion

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-082350 2007-03-27
JP2007082350 2007-03-27

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/542,733 Continuation US8390400B2 (en) 2007-03-27 2009-08-18 Acoustic wave element having an electrode finger with a protrusion

Publications (1)

Publication Number Publication Date
WO2008126614A1 true WO2008126614A1 (ja) 2008-10-23

Family

ID=39863744

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/054591 WO2008126614A1 (ja) 2007-03-27 2008-03-13 弾性波素子

Country Status (6)

Country Link
US (1) US8390400B2 (ja)
EP (1) EP2128982B1 (ja)
JP (1) JP5024373B2 (ja)
KR (1) KR20090125104A (ja)
CN (1) CN101595641B (ja)
WO (1) WO2008126614A1 (ja)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011087282A (ja) * 2009-09-15 2011-04-28 Murata Mfg Co Ltd 弾性境界波フィルタ及びそれを備える分波器
JP2011135469A (ja) * 2009-12-25 2011-07-07 Murata Mfg Co Ltd 弾性波装置
WO2011142183A1 (ja) * 2010-05-10 2011-11-17 株式会社村田製作所 弾性表面波装置
JP2012109671A (ja) * 2010-11-15 2012-06-07 Murata Mfg Co Ltd 弾性波素子及びラダー型フィルタ
WO2012090873A1 (ja) * 2010-12-28 2012-07-05 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
WO2012132877A1 (ja) * 2011-03-28 2012-10-04 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
JP2012253738A (ja) * 2011-05-06 2012-12-20 Kyocera Corp 弾性波素子およびそれを用いた弾性波装置
JP2018174595A (ja) * 2014-11-28 2018-11-08 株式会社村田製作所 弾性波装置
WO2019172374A1 (ja) * 2018-03-09 2019-09-12 株式会社村田製作所 弾性波装置
WO2019177028A1 (ja) * 2018-03-14 2019-09-19 株式会社村田製作所 弾性波装置
WO2020100744A1 (ja) * 2018-11-16 2020-05-22 株式会社村田製作所 弾性波装置

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5263390B2 (ja) * 2009-04-23 2013-08-14 パナソニック株式会社 アンテナ共用器とこれを搭載した電子機器
JP2012065272A (ja) * 2010-09-17 2012-03-29 Nippon Dempa Kogyo Co Ltd 弾性波デバイス
JP5931868B2 (ja) * 2011-06-28 2016-06-08 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
US9647633B2 (en) * 2012-04-25 2017-05-09 Kyocera Corporation Acoustic wave element, branching filter and communication module
KR101690492B1 (ko) * 2013-05-29 2016-12-28 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
KR102083803B1 (ko) * 2014-06-23 2020-03-03 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
CN108886353B (zh) * 2016-04-11 2022-03-22 株式会社村田制作所 弹性波元件以及弹性波装置
JP6477973B2 (ja) * 2016-06-24 2019-03-06 株式会社村田製作所 弾性波素子および弾性波フィルタ装置
DE102016118124B4 (de) * 2016-09-26 2023-11-30 Snaptrack, Inc. Elektroakustischer Wandler mit verbesserter ESD Festigkeit
US10523179B2 (en) 2017-09-18 2019-12-31 Snaptrack, Inc. Acoustic resonator with optimized outer perimeter
US11171627B2 (en) 2018-10-01 2021-11-09 Qorvo Us, Inc. Wave apodization for guided SAW resonators
DE102019120942A1 (de) * 2019-08-02 2021-02-04 RF360 Europe GmbH Elektroakustischer Resonator
CN116210152A (zh) * 2020-10-27 2023-06-02 华为技术有限公司 谐振器及其制作方法、滤波器、电子设备
US12143090B2 (en) * 2021-10-29 2024-11-12 Qorvo Us, Inc. Surface acoustic wave (SAW) structures with transverse mode suppression

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110809A (ja) 1986-10-29 1988-05-16 Matsushita Electric Ind Co Ltd 弾性表面波伝播素子
JPH06164297A (ja) 1992-02-12 1994-06-10 Kokusai Electric Co Ltd 弾性表面波共振子
JPH06350383A (ja) 1993-06-04 1994-12-22 Kokusai Electric Co Ltd 弾性表面波共振子
US6791236B1 (en) 2000-10-11 2004-09-14 Yuri Abramov Method utilizing the saw velocity dispersion effect for weighting by shaping the electrode fingers of a saw interdigital transducer and apparatus produced thereby
JP2004343259A (ja) * 2003-05-13 2004-12-02 Matsushita Electric Ind Co Ltd 弾性表面波フィルタ
JP2006186435A (ja) 2004-12-24 2006-07-13 Kyocera Corp 弾性表面波装置
WO2006109591A1 (ja) 2005-04-08 2006-10-19 Murata Manufacturing Co., Ltd. 弾性波素子

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5797215A (en) * 1980-12-08 1982-06-16 Seiko Epson Corp Surface acoustic wave device
JPS62286305A (ja) * 1986-06-05 1987-12-12 Toshiba Corp 弾性表面波装置
JP3651291B2 (ja) 1998-12-14 2005-05-25 セイコーエプソン株式会社 弾性表面波装置
JP4103614B2 (ja) * 2003-02-10 2008-06-18 日本電気株式会社 移動通信における異常切断原因解析システム，方法，異常切断呼調査装置およびプログラム
JP2008035220A (ja) * 2006-07-28 2008-02-14 Kyocera Corp 弾性表面波装置及び通信装置
EP2066026B1 (en) * 2006-09-22 2016-04-13 Murata Manufacturing Co. Ltd. Longitudinally coupled resonator type surface acoustic wave filter device
US7576471B1 (en) * 2007-09-28 2009-08-18 Triquint Semiconductor, Inc. SAW filter operable in a piston mode

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63110809A (ja) 1986-10-29 1988-05-16 Matsushita Electric Ind Co Ltd 弾性表面波伝播素子
JPH06164297A (ja) 1992-02-12 1994-06-10 Kokusai Electric Co Ltd 弾性表面波共振子
JPH06350383A (ja) 1993-06-04 1994-12-22 Kokusai Electric Co Ltd 弾性表面波共振子
US6791236B1 (en) 2000-10-11 2004-09-14 Yuri Abramov Method utilizing the saw velocity dispersion effect for weighting by shaping the electrode fingers of a saw interdigital transducer and apparatus produced thereby
JP2004343259A (ja) * 2003-05-13 2004-12-02 Matsushita Electric Ind Co Ltd 弾性表面波フィルタ
JP2006186435A (ja) 2004-12-24 2006-07-13 Kyocera Corp 弾性表面波装置
WO2006109591A1 (ja) 2005-04-08 2006-10-19 Murata Manufacturing Co., Ltd. 弾性波素子

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011087282A (ja) * 2009-09-15 2011-04-28 Murata Mfg Co Ltd 弾性境界波フィルタ及びそれを備える分波器
JP2011135469A (ja) * 2009-12-25 2011-07-07 Murata Mfg Co Ltd 弾性波装置
WO2011142183A1 (ja) * 2010-05-10 2011-11-17 株式会社村田製作所 弾性表面波装置
JP5083469B2 (ja) * 2010-05-10 2012-11-28 株式会社村田製作所 弾性表面波装置
JP2012109671A (ja) * 2010-11-15 2012-06-07 Murata Mfg Co Ltd 弾性波素子及びラダー型フィルタ
JP5562441B2 (ja) * 2010-12-28 2014-07-30 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
WO2012090873A1 (ja) * 2010-12-28 2012-07-05 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
US9503049B2 (en) 2010-12-28 2016-11-22 Kyocera Corporation Acoustic wave element and acoustic wave device using same
JP5833102B2 (ja) * 2011-03-28 2015-12-16 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
CN103384961A (zh) * 2011-03-28 2013-11-06 京瓷株式会社 弹性波元件以及使用其的弹性波装置
US9350320B2 (en) 2011-03-28 2016-05-24 Kyocera Corporation Acoustic wave element and acoustic wave device using same
WO2012132877A1 (ja) * 2011-03-28 2012-10-04 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
JP2012253738A (ja) * 2011-05-06 2012-12-20 Kyocera Corp 弾性波素子およびそれを用いた弾性波装置
JP2018174595A (ja) * 2014-11-28 2018-11-08 株式会社村田製作所 弾性波装置
WO2019172374A1 (ja) * 2018-03-09 2019-09-12 株式会社村田製作所 弾性波装置
WO2019177028A1 (ja) * 2018-03-14 2019-09-19 株式会社村田製作所 弾性波装置
US11444601B2 (en) 2018-03-14 2022-09-13 Murata Manufacturing Co., Ltd. Acoustic wave device
WO2020100744A1 (ja) * 2018-11-16 2020-05-22 株式会社村田製作所 弾性波装置
JPWO2020100744A1 (ja) * 2018-11-16 2021-09-27 株式会社村田製作所 弾性波装置
US12021500B2 (en) 2018-11-16 2024-06-25 Murata Manufacturing Co., Ltd. Acoustic wave device

Also Published As

Publication number Publication date
US8390400B2 (en) 2013-03-05
KR20090125104A (ko) 2009-12-03
EP2128982A1 (en) 2009-12-02
EP2128982A4 (en) 2013-07-24
JPWO2008126614A1 (ja) 2010-07-22
US20090295507A1 (en) 2009-12-03
EP2128982B1 (en) 2019-01-23
CN101595641A (zh) 2009-12-02
CN101595641B (zh) 2013-05-08
JP5024373B2 (ja) 2012-09-12

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