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WO2008114615A1 - 磁気抵抗効果素子を用いた位置検知装置 - Google Patents

磁気抵抗効果素子を用いた位置検知装置 Download PDF

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Publication number
WO2008114615A1
WO2008114615A1 PCT/JP2008/054018 JP2008054018W WO2008114615A1 WO 2008114615 A1 WO2008114615 A1 WO 2008114615A1 JP 2008054018 W JP2008054018 W JP 2008054018W WO 2008114615 A1 WO2008114615 A1 WO 2008114615A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
sensing elements
magnet
position sensing
device employing
Prior art date
Application number
PCT/JP2008/054018
Other languages
English (en)
French (fr)
Inventor
Tsutomu Takeya
Takafumi Noguchi
Original Assignee
Alps Electric Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co., Ltd. filed Critical Alps Electric Co., Ltd.
Priority to JP2009505126A priority Critical patent/JP4768066B2/ja
Publication of WO2008114615A1 publication Critical patent/WO2008114615A1/ja
Priority to US12/256,879 priority patent/US8102172B2/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00Arrangements or instruments for measuring magnetic variables
    • G01R33/02Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09Magnetoresistive devices
    • G01R33/093Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00Galvanomagnetic devices
    • H10N50/10Magnetoresistive devices
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D2205/00Indexing scheme relating to details of means for transferring or converting the output of a sensing member
    • G01D2205/90Two-dimensional encoders, i.e. having one or two codes extending in two directions

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)

Abstract

【課題】 磁石とこの磁石に対向して移動する検知器を用いて、位置検知を正確にできるようにした磁気抵抗効果素子を用いた位置検知装置を提供する。 【解決手段】 磁石2の円形の表面2aがN極に着磁され、背面2bがS極に着磁されている。検知器10は、磁石2の表面2aから離れた位置でX-Y平面内で移動する。検知器10内には一対のX方向検知素子20X1,20X2と、一対のY方向検知素子20Y1,20Y2が設けられている。X方向検知素子20X1,20X2では、自由磁性層に与えられているバイアス磁界の方向Bが互いに逆向きであり、Y方向へ移動したときに、X方向検知素子20X1,20X2の一方の感度の低下を他方の感度の向上で補う。これはY方向検知素子20Y1,20Y2においても同じである。そのため、検知器10から、X方向の位置検知出力とY方向の位置検知出力を正確に得ることができる。
PCT/JP2008/054018 2007-03-20 2008-03-06 磁気抵抗効果素子を用いた位置検知装置 WO2008114615A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009505126A JP4768066B2 (ja) 2007-03-20 2008-03-06 磁気抵抗効果素子を用いた位置検知装置
US12/256,879 US8102172B2 (en) 2007-03-20 2008-10-23 Position detector including magnetoresistive elements

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-073283 2007-03-20
JP2007073283 2007-03-20
JP2008001286 2008-01-08
JP2008-001286 2008-01-08

Publications (1)

Publication Number Publication Date
WO2008114615A1 true WO2008114615A1 (ja) 2008-09-25

Family

ID=39765725

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/054018 WO2008114615A1 (ja) 2007-03-20 2008-03-06 磁気抵抗効果素子を用いた位置検知装置

Country Status (3)

Country Link
US (1) US8102172B2 (ja)
JP (1) JP4768066B2 (ja)
WO (1) WO2008114615A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010266305A (ja) * 2009-05-14 2010-11-25 Alps Electric Co Ltd 磁気抵抗効果素子を用いた位置検知装置
JP2012508116A (ja) * 2008-11-07 2012-04-05 アドバンスド アナリシス アンド インテグレイション リミテッド アライメントシステム
JP2014126476A (ja) * 2012-12-27 2014-07-07 Alps Electric Co Ltd 位置検知装置
CN112179258A (zh) * 2020-09-24 2021-01-05 长虹美菱股份有限公司 一种箱体夹具位置检测装置及检测方法

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US8878522B2 (en) * 2011-12-20 2014-11-04 Gm Global Technology Operations, Llc Magnetic linear position sensor
CN102590768B (zh) * 2012-03-14 2014-04-16 江苏多维科技有限公司 一种磁电阻磁场梯度传感器
US8939028B2 (en) * 2012-05-10 2015-01-27 Infineon Technologies Ag Integrated sensors and sensing methods
US9310446B2 (en) * 2012-10-18 2016-04-12 Analog Devices, Inc. Magnetic field direction detector
US20180164930A1 (en) * 2015-06-02 2018-06-14 Widevantage Inc. Input device, operation method of input device, and electronic device corresponding to input device
DE102016100254B4 (de) * 2016-01-08 2023-03-02 Infineon Technologies Ag Vorrichtung und Verfahren zur Unterscheidung von Daten einer Mehrzahl von mehrdimensionalen Magnetfeldsensoren
US11294003B2 (en) 2016-03-23 2022-04-05 Analog Devices International Unlimited Company Magnetic field detector
JP6485491B2 (ja) * 2017-06-08 2019-03-20 Tdk株式会社 磁気センサ及びカメラモジュール
US10739165B2 (en) 2017-07-05 2020-08-11 Analog Devices Global Magnetic field sensor
US11175353B2 (en) * 2018-02-16 2021-11-16 Analog Devices International Unlimited Company Position sensor with compensation for magnet movement and related position sensing method
JP7184058B2 (ja) * 2020-02-21 2022-12-06 Tdk株式会社 ストロークセンサの取り付け方法、ブレーキシステムの製造方法、及びストロークセンサと構造物とオフセット防止手段の集合体
US11493527B2 (en) * 2020-10-21 2022-11-08 Infineon Technologies Ag Zero-gauss-magnet for differential, twist-insensitive magnetic speed sensors

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JP2002232039A (ja) * 2001-02-02 2002-08-16 Sony Corp スピンバルブ型巨大磁気抵抗効果素子、磁気抵抗効果型磁気ヘッド、およびこれらの製造方法
JP2006276983A (ja) * 2005-03-28 2006-10-12 Yamaha Corp ポインティングデバイス用の磁気センサ

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FR2743930B1 (fr) * 1996-01-19 2000-04-07 Fujitsu Ltd Capteur magnetique pour lecture de supports d'enregistrement
JP3498737B2 (ja) * 2001-01-24 2004-02-16 ヤマハ株式会社 磁気センサの製造方法
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012508116A (ja) * 2008-11-07 2012-04-05 アドバンスド アナリシス アンド インテグレイション リミテッド アライメントシステム
JP2010266305A (ja) * 2009-05-14 2010-11-25 Alps Electric Co Ltd 磁気抵抗効果素子を用いた位置検知装置
JP2014126476A (ja) * 2012-12-27 2014-07-07 Alps Electric Co Ltd 位置検知装置
CN112179258A (zh) * 2020-09-24 2021-01-05 长虹美菱股份有限公司 一种箱体夹具位置检测装置及检测方法
CN112179258B (zh) * 2020-09-24 2022-07-05 长虹美菱股份有限公司 一种箱体夹具位置检测装置及检测方法

Also Published As

Publication number Publication date
US8102172B2 (en) 2012-01-24
US20090051353A1 (en) 2009-02-26
JP4768066B2 (ja) 2011-09-07
JPWO2008114615A1 (ja) 2010-07-01

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