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WO2008099832A1 - Electric discharge slice machining method, electric discharge slice machining apparatus, and semiconductor wafer manufacturing method - Google Patents

Electric discharge slice machining method, electric discharge slice machining apparatus, and semiconductor wafer manufacturing method Download PDF

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Publication number
WO2008099832A1
WO2008099832A1 PCT/JP2008/052306 JP2008052306W WO2008099832A1 WO 2008099832 A1 WO2008099832 A1 WO 2008099832A1 JP 2008052306 W JP2008052306 W JP 2008052306W WO 2008099832 A1 WO2008099832 A1 WO 2008099832A1
Authority
WO
WIPO (PCT)
Prior art keywords
electric discharge
work
machining
slits
tool electrodes
Prior art date
Application number
PCT/JP2008/052306
Other languages
French (fr)
Japanese (ja)
Inventor
Tatsushi Sato
Hidetaka Katougi
Original Assignee
Mitsubishi Electric Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corporation filed Critical Mitsubishi Electric Corporation
Publication of WO2008099832A1 publication Critical patent/WO2008099832A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H9/00—Machining specially adapted for treating particular metal objects or for obtaining special effects or results on metal objects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/26—Apparatus for moving or positioning electrode relatively to workpiece; Mounting of electrode
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/26—Apparatus for moving or positioning electrode relatively to workpiece; Mounting of electrode
    • B23H7/28—Moving electrode in a plane normal to the feed direction, e.g. orbiting
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23H—WORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00—Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/26—Apparatus for moving or positioning electrode relatively to workpiece; Mounting of electrode
    • B23H7/30—Moving electrode in the feed direction

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)

Abstract

An electric discharge machining method for machining a work (2) by applying a pulse voltage between the work (2) and band-like tool electrodes (11) while holding the tool electrodes (11) and relatively moving the tool electrodes (11) in such a way that the direction vertical to the thickness of the tool electrodes (11) is parallel to the direction in which slits are formed by machining. In the machining step, an electrodes member holding the arranged band-like tool electrodes (11) by means of a frame (18) to form the slits spaced by predetermined distances is used, the work (2) is so placed that all the regions being machined of the work (2) are included in the slits and is machined. Thus, an electric discharge machining method for cutting a work into thin slices with high precision and with slight machining allowance or forming deep and thin slits, through the cutting and the slit formation have been difficult by conventional electric discharge machining using a wire electrode, is provided.
PCT/JP2008/052306 2007-02-14 2008-02-13 Electric discharge slice machining method, electric discharge slice machining apparatus, and semiconductor wafer manufacturing method WO2008099832A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007033960A JP2010105051A (en) 2007-02-14 2007-02-14 Diesinking electric discharge machining method and diesinking electric discharge machine
JP2007-033960 2007-02-14

Publications (1)

Publication Number Publication Date
WO2008099832A1 true WO2008099832A1 (en) 2008-08-21

Family

ID=39690060

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/052306 WO2008099832A1 (en) 2007-02-14 2008-02-13 Electric discharge slice machining method, electric discharge slice machining apparatus, and semiconductor wafer manufacturing method

Country Status (2)

Country Link
JP (1) JP2010105051A (en)
WO (1) WO2008099832A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014084277A1 (en) * 2012-11-28 2014-06-05 新日鉄住金マテリアルズ株式会社 Electric discharge machining device
CN104858512A (en) * 2015-05-07 2015-08-26 北京航空航天大学 Machining device for synchronously electrolyzing and cutting multiple complicated curved-surface parts
JP7590497B2 (en) 2022-06-24 2024-11-26 日揚科技股▲分▼有限公司 Electric discharge machining equipment

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104907648B (en) * 2015-07-08 2017-03-01 上海交通大学 Arc profile discharge cutting processing method based on compound current interruption and efficient chip removal
CN112643160B (en) * 2020-12-25 2021-12-07 航天精工股份有限公司 Discontinuity inspection sample preparation device for high lock nut
KR102471140B1 (en) * 2021-08-30 2022-11-28 김득일 apparatus

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224991U (en) * 1975-08-12 1977-02-22
JPS55147216U (en) * 1979-04-02 1980-10-23
JPS6292192U (en) * 1985-11-28 1987-06-12
JPH01188233A (en) * 1988-01-20 1989-07-27 Babcock Hitachi Kk Electrode for working thin groove
JPH08243981A (en) * 1995-03-08 1996-09-24 Sasa Eng:Kk Band knife tensile force display device and band knife tensile force adjusting device
JP2004186589A (en) * 2002-12-05 2004-07-02 Denso Corp Method and apparatus for manufacturing semiconductor substrate

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5224991U (en) * 1975-08-12 1977-02-22
JPS55147216U (en) * 1979-04-02 1980-10-23
JPS6292192U (en) * 1985-11-28 1987-06-12
JPH01188233A (en) * 1988-01-20 1989-07-27 Babcock Hitachi Kk Electrode for working thin groove
JPH08243981A (en) * 1995-03-08 1996-09-24 Sasa Eng:Kk Band knife tensile force display device and band knife tensile force adjusting device
JP2004186589A (en) * 2002-12-05 2004-07-02 Denso Corp Method and apparatus for manufacturing semiconductor substrate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014084277A1 (en) * 2012-11-28 2014-06-05 新日鉄住金マテリアルズ株式会社 Electric discharge machining device
CN104858512A (en) * 2015-05-07 2015-08-26 北京航空航天大学 Machining device for synchronously electrolyzing and cutting multiple complicated curved-surface parts
JP7590497B2 (en) 2022-06-24 2024-11-26 日揚科技股▲分▼有限公司 Electric discharge machining equipment

Also Published As

Publication number Publication date
JP2010105051A (en) 2010-05-13

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