JP2010105051A - Diesinking electric discharge machining method and diesinking electric discharge machine - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an electric discharge machining method and an electric discharge machine for machining a deep and thin slit. <P>SOLUTION: In this diesinking electric discharge machining method, pulse-like voltage is applied between a workpiece 2 and a belt-like tool electrode 11 while gripping the tool electrode 11 by a frame 18 and moving the tool electrode 11 relatively in the transverse direction of the tool electrode 11 in such a way that the vertical direction of thickness of the tool electrode 11 becomes the direction of advance of machining for forming the slit to perform electric discharge machining. This method comprises a fixing process for sticking the workpiece 2 to a holder 36 while maintaining electric conductivity and a machining process for machining the workpiece 2 to form the slit in it by using the tool electrode 11. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention uses a strip-like, ribbon-like, or blade-like tool electrode that has a width that is significantly smaller than its length and a thickness that is significantly smaller than its width. The present invention relates to a sculpting electric discharge machining method and a sculpting electric discharge machining apparatus.

  As a technique for electric discharge machining of a workpiece using a tool electrode, wire electric discharge machining that processes an arbitrary shape by controlling the trajectory of a wire while feeding a wire-shaped electrode, or the shape of a tool electrode There is a sculpture electric discharge machining to transfer to. In such electric discharge machining, an arc discharge is generated between the tool electrode and the work piece to melt and remove the work piece by minute, so that the tool electrode and the work piece are machined in a non-contact state. The

  Conventionally, wire electric discharge machining has been widely used for slit machining for forming a slit in a workpiece using such electric discharge machining. However, in wire electric discharge machining, since a wire electrode having a diameter of about 0.3 mm is usually used, the tension that can be applied without breaking the wire is not so large. Therefore, the wire vibration during processing cannot be sufficiently suppressed, and the vicinity of the center of the workpiece in the plate thickness direction (that is, the vicinity of the upper and lower end surfaces of the workpiece (that is, the vicinity of both support points of the wire) Further, there is a problem that the processing slit width in the vicinity of the center portion equidistant from both the support points of the wire is widened, and the processing shape accuracy of the slit portion is lowered.

  This tendency becomes more prominent as the wire becomes thinner, and becomes more prominent as the distance between the support points of the wire becomes longer. Therefore, as the slit width to be processed becomes thinner, the accuracy of the processing slit width deteriorates, and the workpiece becomes The greater the thickness, the worse the processing slit width accuracy. Further, when a plurality of slits are processed at a time using a plurality of electrodes, a mechanism for feeding and winding is required for each wire electrode, which complicates the mechanism. Therefore, it is not practical to process many slits at the same time by using many electrodes at the same time.

  On the other hand, Patent Document 1 discloses a sculpting electric discharge machining using a blade-like tool electrode in slit machining on a workpiece. In the technique described in Patent Document 1, both ends of a blade-like electrode are gripped with very strong tension to perform sculpting electric discharge machining. In order to machine a slit having the same width as a machining slit using wire electric discharge machining, it is necessary to make the thickness of the blade-like electrode approximately the same as the diameter of the wire electrode. Since the diameter can be several tens to several hundred times larger than the diameter, the blade-like electrode can be given a significantly stronger tension than the wire electrode. Therefore, when a blade-shaped tool electrode is used, the tool electrode vibration during processing can be greatly reduced as compared with the case of using a wire electrode. Therefore, when a thin slit is processed on a thick workpiece, the shape accuracy is high. Can process slits.

  By the way, when electric discharge machining a workpiece using a tool electrode, it is necessary to process the workpiece quickly while efficiently discharging machining waste generated between the tool electrode and the workpiece. In electric discharge machining described in Patent Document 1, a machining groove cleaning plate having a thickness smaller than that of the tool electrode is provided on the same line as the longitudinal direction of the tool electrode, and the work table is moved each time the discharge conditions are switched. Thus, grooving is performed on the workpiece while eliminating the processing waste accumulated in the processing groove.

JP-A-1-188233

  In Patent Document 1, each time the discharge condition is switched, the processing groove cleaning thin plate is moved into the processing gap (groove) to discharge the processing waste. For this reason, machining waste cannot be discharged during machining, and machining needs to be interrupted in order to discharge the machining waste. Since the processing groove cleaning thin plate positioned at the end of the tool electrode needs to be moved over the entire length of the processing groove in order to discharge the processing waste, a long time is required for the operation of discharging the processing waste. Therefore, it has been difficult in practice to avoid a significant decrease in machining efficiency while preventing abnormal discharge due to stagnation of machining waste only with this method.

  Therefore, a well-known jump operation realized by general sculpting electric discharge machining for discharging machining scraps in the machining gap, that is, the tool electrode and the work piece are periodically separated in a period of several seconds and brought close to each other. In combination, the pumping action associated with the change in the volume of the machining gap formed between the tool electrode and the workpiece is generated, and the operation of discharging the machining waste as the machining fluid flows out and flows in the machining gap is also used. There is a need to.

  However, in the case of slit machining using a blade-shaped electrode, there is a problem that when the machined slit becomes deep, sufficient jumping action cannot be obtained in the jump operation.

  In order to obtain a machining waste discharging action by the jump operation, it is necessary to change the volume of the machining gap by jumping the electrode and to allow a clean machining fluid to flow into the machining gap from the outside. In the jump operation, since the machining fluid corresponding to the volume of the tool electrode drawn out from the machining part flows into the machining gap, the tool electrode occupies most of the machined part before the jump operation. Thus, when many parts of the tool electrode are pulled out from the machining part by the jumping operation, the machining waste discharging effect is sufficiently obtained. However, in the case of slit machining using a blade electrode, the width of the tool electrode in the machining depth direction is small, so when the machining slit becomes deep, the jump operation only moves the tool electrode inside the machined slit, The tool electrode is not pulled out from the machining slit. Therefore, the jump operation in this case can only have the effect of circulating the machining fluid existing inside the machined slit, and the flow of machining fluid from the outside of the machining slit part to the machining gap can hardly be expected, Sufficient machining waste discharging action cannot be obtained.

  That is, with the technique disclosed in Patent Document 1, it is substantially difficult to effectively eliminate machining waste and prevent abnormal discharge while avoiding a reduction in machining efficiency. Even when they are used together, if the machining depth is larger than the width of the electrode in the machining progress direction, a sufficient machining waste discharging effect cannot be obtained. Therefore, the technique disclosed in Patent Document 1 is a technique for a shallow slit process in which the processing depth is approximately the same as the width of the electrode in the processing progress direction.

  The fact that the technique disclosed in Patent Document 1 is intended for relatively shallow slit processing is also found from the configuration for gripping the electrodes. Moreover, it turns out that the technique disclosed in Patent Document 1 is intended for processing in which the distance between two processed slits is relatively wide. This is because, in the technique disclosed in Patent Document 1, thin plate electrodes for groove processing are installed on both sides of an electrode body, and tension is applied to the thin plate electrodes by gripping portions provided at both ends of the electrode body. Accordingly, when the machining slit becomes deep, the workpiece remaining between the two machined slits interferes with the electrode main body, so that the slit cannot be machined too deeply. In addition, the electrode body is located between the two thin plate electrodes for groove processing. In order to apply tension to the thin plate electrode for groove processing using this electrode body, the electrode body must have a relatively thick structure. There is. Therefore, since the interval between the two thin plate electrodes for groove processing located on both sides of the electrode body cannot be reduced, the interval between the machining slits cannot be reduced, and the workpiece cannot be sliced thinly.

  Therefore, in the technology as described above, for example, for processing a silicon block used in a solar cell or the like, such as cutting a workpiece with high precision with a thin and small cutting margin, or processing a deep and narrow slit. Application has not been realized by conventional wire electric discharge machining or sculpting electric discharge machining using a blade-like electrode.

  The present invention has been made in view of the above, and it is an object of the present invention to establish a technique for cutting a workpiece with high precision with a thin and small cutting allowance, or processing a deep and narrow slit by electric discharge machining. It is what.

  Another object of the present invention is to obtain an electric discharge machining method and an electric discharge machining apparatus that can quickly process a workpiece while efficiently discharging machining waste generated between the tool electrode and the workpiece.

  While gripping the tool electrode and moving the tool electrode relatively so that the vertical direction of the thickness of the strip-shaped tool electrode becomes the slit forming processing progress direction, the workpiece electrode is interposed between the work electrode and the tool electrode. In a sculpting electric discharge machining method in which a pulsed voltage is applied to perform electric discharge machining, a fixing step of bonding the workpiece to a workpiece holding member while maintaining conductivity, and slitting the workpiece. And a processing step.

  Since the work piece is bonded to the work piece holding member while maintaining conductivity, the work piece does not fall after being processed, and it is possible to process a deep and narrow slit. Play.

  DESCRIPTION OF EMBODIMENTS Embodiments of a sculpting electric discharge machining method and a sculpting electric discharge machining apparatus according to the present invention will be described below in detail based on the drawings. Note that the present invention is not limited to the embodiments.

Embodiment 1 FIG.
First, the concept of electric discharge machining according to the present embodiment will be described. FIG. 1 is an explanatory diagram for explaining the concept of electric discharge machining according to the present embodiment. For convenience of explanation, the longitudinal direction of the tool electrode 11 is hereinafter referred to as the Z-axis direction, and the short (width) direction is referred to as the X-axis. The direction and the thickness direction will be described as the Y-axis direction.

  As shown in the drawing, when the workpiece 2 such as a silicon block for solar cells is subjected to electric discharge machining using a blade-like (thin strip-like) tool electrode 11 for sculpting discharge, the tool electrode 11 is moved in the thickness direction. By moving along a plane perpendicular to the (Y-axis direction) (that is, a plane parallel to the X-axis direction and the Z-axis direction), a groove having a width wider than the thickness of the tool electrode 11 by the discharge gap length is formed. Process to 2. As shown in the figure, the most common method is to make the tool electrode 11 upright and make the width direction (X-axis direction) of the tool electrode 11 coincide with the machining progress direction. It demonstrates as a process advancing direction. However, the electric discharge machining in the present invention is not limited to this, and the machining progress direction and the width direction of the tool electrode 11 are different, for example, the machining is advanced in the horizontal direction with the tool electrode 11 tilted from the vertical direction. It is also included. In practice, a plurality of tool electrodes 11 are arranged side by side to process the workpiece 2, and a plurality of processing slits (processing grooves) are processed at a time.

  Next, an electric discharge machining apparatus according to an embodiment of the present invention will be described with reference to FIG. The electric discharge machining apparatus 100 processes the slit groove by performing the engraving electric discharge machining on the workpiece 2 held by the holder 36 using the blade-shaped tool electrode 11 held by the electrode mechanism 1. The apparatus is configured as follows.

  A plurality of blade-shaped tool electrodes 11 are held in a state of being arranged in the electrode mechanism 1. The electrode mechanism 1 is connected to the main shaft 3 and driven and controlled in the Z-axis direction, that is, the longitudinal direction of the tool electrode 11 based on a command from the NC control device 31. Further, the surface plate 35 on which the workpiece 2 is placed moves in the XY axis direction together with the machining tank 33 via the motor 32 based on a command from the machining program of the NC control device 31.

  The machining power source 37 supplies a pulse voltage between the tool electrode 11 via the electrode mechanism 1 and the workpiece 2 via the surface plate 35 and the holder 36, thereby processing oily liquid, deionized water or the like. Electric discharge machining is performed in the machining tank 33 storing the liquid. The machining power source 37 is configured to be able to individually apply a pulse voltage to each tool electrode 11 and is generally an assembly of a plurality of independent power sources connected to each tool electrode 11. . Each power source in the processing power source 37 processes the workpiece 2 by repeatedly generating a small energy discharge of a low peak short pulse at a high frequency with respect to the workpiece 2 for each tool electrode 11. A group pulse voltage having a pulse width of 1 μsec to 4 μsec and a discharge peak current in the range of 10 A to 50 A is applied to each tool electrode 11. The voltage pulse applied by the machining power source 37 may be unipolar or bipolar.

  The holder 36 holds the workpiece 2 while maintaining electrical conductivity with the workpiece 2 on at least one surface of the workpiece 2, and measures such as adhesion with a conductive adhesive are used for the holding. Is used. As shown in FIG. 2, when the longitudinal direction of the tool electrode 11 is set to the vertical direction and the machining is started from the front side surface of the workpiece 2, the holder 36 has the bottom and top surfaces of the workpiece 2, And the workpiece 2 is hold | maintained from the at least any one surface of the back side surface processed at the end of a process. In the case of a configuration in which the workpiece 2 is held by the holder 36 from the bottom or top surface of the workpiece 2, the holder 36 holding the workpiece 2 is simultaneously slitted simultaneously with the processing of the workpiece 2. . Further, in the case of a configuration in which the workpiece 2 is held from the back side surface, the processing is performed to a position where the holding surface of the holder 36 is slightly processed.

  Further, the machining liquid adjusting unit 38 adjusts the machining liquid 34 in the machining tank 33 to a predetermined temperature with a cooler, and removes machining debris in the machining liquid 34 with a filter. Execute the necessary circular management.

  The NC control device 31 performs servo control so that the tool electrode 11 and the workpiece 2 are opposed to each other with a minute gap, and controls the motor 32 so that the tool electrode 11 and the workpiece 2 are relative to each other in the machining progress direction. Control the position. Further, the NC control device 31 controls the main shaft 3 to reciprocate the electrode mechanism 1 in the Z-axis direction intermittently or continuously. In other words, the NC control device 31 causes the electrode mechanism 1 to perform a sliding operation. The NC control device 31 here corresponds to the sliding means described in the claims.

  Here, the main shaft 3 is configured to reciprocate the electrode mechanism 1, but the tool electrode 11 that is held by the electrode mechanism 1 that holds the holder 36 and the workpiece 2 by the main shaft 3 and is fixed to the surface plate 35. It is good also as a structure which makes the holder 36 and the to-be-processed object 2 reciprocate in the longitudinal direction of the tool electrode 11, performing electrical discharge machining between.

  Here, the surface plate 35 is driven by the motor 32, and the electrode mechanism 1 is driven by the main shaft 3. However, any driving system in which the tool electrode 11 and the workpiece 2 are driven in the XYZ axial directions relatively. May be used.

  Next, a detailed configuration of the electrode mechanism 1 will be described with reference to FIGS. 3, 4, 5, and 6. As shown in FIGS. 3 and 4, the plurality of tool electrodes 11 made of a thin and elongated blade-shaped conductive material are alternately stacked with spacers 12 whose surfaces are non-conductors such as ceramics. The electrode holding portions 14A and 14B are passed through the holes provided at both ends in the longitudinal direction of 11 and the holes provided in the spacer 12, so that the electrodes are positioned and fixed in a parallel shape at a predetermined interval. In other words, the tool electrode 11 has one end of the tool electrode 11 fixed in a comb shape. Here, the electrode holding portions 14A and 14B correspond to the connecting members described in the claims. Note that the electrode holding portions 14A and 14B are made of a non-conductive material on the surface in contact with the hole provided in the tool electrode 11, and the respective tool electrodes 11 are not electrically connected to each other via the electrode holding portions 14A and 14B. It is configured as follows. Each tool electrode 11 is connected with an individual power supply line 51 from an independent power source constituting the machining power source 37.

  Then, as shown in FIG. 5, the electrode holding portions 14A and 14B are fixed to the frame 18 at intervals slightly wider than the intervals between the holes provided at both ends of the tool electrode 11, whereby the tool electrode 11 is moved in the longitudinal direction. A predetermined tension is applied, and the electrode mechanism 1 is formed. When the thickness of the tool electrode 11 is about 100 μm, the tension applied in the longitudinal direction of the tool electrode 11 is 1 kgf or more, preferably 3 kgf or more and about 30 kgf or less, more preferably about 10 kgf.

  Here, when the thickness of the workpiece 2 is about 150 mm and the width of the slit to be processed is about 100 μm, the thickness of the tool electrode 11 in the Y-axis direction is about 50 to 100 μm, the short direction, that is, the X-axis. The width in the direction is preferably about 1 to 3 mm, and the height in the longitudinal direction, that is, the Z-axis direction is preferably about 180 to 220 mm. The material is preferably a conductive spring material such as white (silver), phosphor bronze, and beryllium copper, but it may be a general metal material such as pure copper or iron, and a ribbon-like foil made of these materials as a tool electrode. Is composed.

  Further, in order to avoid the collision between the spacer 12 and the workpiece 2 due to the reciprocating motion of the electrode mechanism 1 in the Z-axis direction, the distance between the upper spacer 12 and the lower spacer 12 is one way of the reciprocating motion. The distance is set larger than the sum of the process distance, the thickness of the workpiece 2 in the Z-axis direction, and the thickness of the holder 36.

  Further, the frame 18 that holds the tool electrode 11 has the following structure so as not to interfere with the workpiece 2 even if the slit is processed deeply. The frame 18 is a space larger than the thickness of the workpiece 2 in the Y-axis direction in the Y-axis direction (that is, the thickness direction of the tool electrode 11), and in the Z-axis direction (that is, the longitudinal direction of the tool electrode). The space is larger than the sum of the thickness of the workpiece 2 and the holder 36 in the Z-axis direction and the one-way process distance of the reciprocating motion of the tool electrode 11 from three or four directions in the Y-axis direction and the Z-axis direction. Yes. In other words, the frame 18 is a wall surface disposed at a position surrounding the tool electrode 11, and the workpiece whose wall surface is processed by the tool electrode 11 when the tool electrode 11 is advanced in the slit forming processing advance direction. The tool electrode 11 is held using a wall surface that does not pass through the machining position 2. Thus, the frame 18 is an outer holding tool for holding the tool electrode 11 on the outside, and the workpiece 2 is placed so that the entire machining area of the workpiece 2 is included in the slit portion formed by the tool electrode 11. It is placed. In many cases, a portion of the tool electrode 11 excluding a portion not subjected to electric discharge machining, such as a hole penetrating the electrode holding portions 14A and 14B, is configured to be held in this space, but the space surrounded by the frame 18 and the tool There is no problem even if the position of the electrode 11 with respect to the part to be subjected to electric discharge machining is shifted in the machining progress direction.

  As the machining progresses, the relative position of the tool electrode 11, the workpiece 2 and the holder 36 in the machining progress direction changes, and the positional relationship as shown in FIG. 6 is obtained, but the frame 18 is as described above. Since the tool electrode 11 is held from the outside of the workpiece 2 in the Y-axis direction and the Z-axis direction, the frame 18 passes outside the workpiece 2 and the holder 36 from the start to the end of the processing. The frame 18, the workpiece 2 and the holder 36 do not interfere with each other.

  Practically, the width in the Y-axis direction of the space surrounded by the frame 18 is made about 10 mm or more larger than the thickness of the workpiece 2 in the Y-axis direction, and the width in the Z-axis direction of the space surrounded by the frame 18 is If the frame 18 is configured to be about 10 mm or more larger than the sum of the thickness of the workpiece 2 in the Z-axis direction and the one-way process distance of the relative reciprocation of the tool electrode 11 and the workpiece 2 in the Z-axis direction, The above can be easily realized.

  In the above description, the workpiece 2 is surrounded by the frame 18, but elements that hold the tool electrode 11 among the components of the electrode mechanism 1 such as the electrode holding portions 14 </ b> A and 14 </ b> B are used as a part of the frame 18. Thus, the same effect can be obtained as a configuration surrounding the workpiece 2.

  Next, a method of connecting each power supply line 51 from each tool electrode 11 to the machining power source 37 will be described with reference to FIG. In order to generate discharge from each tool electrode 11 individually, it is necessary to connect the power supply line 51 connected to each tool electrode 11 to each power source constituting the machining power source 37 in parallel for each tool electrode 11. . However, when the tool electrode 11 or the spacer 12 is thin, it is difficult to connect the power supply line 51 only to the target tool electrode 11 without making contact with the adjacent tool electrode 11 or power supply line 51. Therefore, for example, each tool electrode 11 is provided with a convex power supply connection portion for connecting to the power supply line 51 in a stepped manner to prevent contact with the adjacent tool electrode 11 or power supply line 51. Specifically, as shown in FIG. 7, any one of the power supply connection portions 52 </ b> A to 52 </ b> C having a different position in the longitudinal direction on the tool electrode is provided in the vicinity of the longitudinal end portion of the tool electrode 11. As a result, when the tool electrodes 11 and the spacers 12 are alternately stacked, the power connection portions 52A to 52C are positioned at a predetermined interval. It becomes easy to connect and conduction between the tool electrodes 11 can be prevented.

  In addition, the electrode mechanism 1 may be configured by combining two or four or more types of power connection portions having different longitudinal positions in the tool electrode 11 and combining the tool electrodes 11 having these power connection portions. . Further, the number of types of the power supply connection portion is set based on the thickness of the tool electrode 11 and the spacer 12, the thickness of the power supply line 51, the size necessary for the joint between the power supply line 51 and the tool electrode 11, and the like.

  Next, an actual machining operation will be described with reference to FIG. The workpiece 2 and the electrode mechanism 1 are placed opposite to each other in a machining tank 33 filled with a machining liquid 34, and are applied relatively close to each other in the X-axis direction to apply a pulse voltage from a machining power source 37, whereby the tool electrode 11 A discharge is generated between the workpiece 2 and the workpiece 2. As a result, machining in the X-axis direction by the electrode mechanism 1 proceeds, and slits having a width slightly larger than the thickness of the tool electrode 11 are formed in the workpiece 2 by the number of tool electrodes 11.

  At this time, the machining is performed in the X-axis direction while controlling the main shaft 3 to reciprocate the electrode mechanism 1 in the Z-axis direction, but the frame 18 holding the tool electrode 11 is the workpiece 2 as described above. In addition, since the structure passes through the outside of the holder 36 that is joined to the bottom surface and the top surface of the workpiece 2, interference with the workpiece 2 and the holder 36 even if the groove processing is performed deeply. Absent.

  After the workpiece 2 has been completely processed in the processing progress direction, the workpiece 2 is immersed in a chemical solution that peels off the adhesive that bonds the workpiece 2 and the holder 36, or is heated from the holder 36 by a process such as heating. When separated, a thin plate having a thickness obtained by subtracting a predetermined discharge gap from the thickness of the spacer 12 is obtained.

  Here, when the holder 36 holds the workpiece 2 from the bottom surface or the upper surface, the holder 36 is also subjected to electric discharge machining together with the workpiece 2, but the workpiece 2 remains without being processed. Since the holder 36 also remains on the bottom surface or top surface of the thin plate portion, the workpiece 2 does not fall after processing. Further, when the holder 36 holds the workpiece 2 from the back side, the holder 36 is slightly processed at the end of processing, but the thin plate left unprocessed in the workpiece 2 is processed. Since the holder 36 that is in contact with the portion continues to hold the workpiece 2, the workpiece 2 does not fall after processing.

  Next, the significance of reciprocating the tool electrode 11 and the workpiece 2 relatively in the Z-axis direction will be described. In the following description, for the sake of convenience, the case where the workpiece 2 is fixed and the tool electrode 11 is moved will be described. However, since the effect is based on the relative movement between the two, the same description will be given regardless of which is moved. Is established.

  While the tool electrode 11 is reciprocating in the Z-axis direction, the machining liquid 34 existing around the tool electrode 11 in the machining slit moves together with the tool electrode 11 due to the viscosity of the machining liquid 34. As a result, a part of the machining fluid in the machining slit moves in the Z-axis direction together with the tool electrode 11 by the reciprocating motion of the tool electrode 11 in the Z-axis direction, and flows out of the machining slit. It flows into the machining slit together with the tool electrode 11 from the outside.

  Along with the outflow and inflow of the machining liquid 34, machining waste and bubbles generated in the machining gap are discharged out of the machining slit. The greater the amount of the machining fluid 34 that is exchanged with the reciprocating motion of the tool electrode 11 in the Z-axis direction, the stronger the machining waste discharge action, and the less likely it is to cause abnormal discharge, thereby greatly improving machining accuracy. It should be noted that the wider the width of the tool electrode 11 in the short direction, the stronger the machining waste discharging action, and the longer the tool electrode 11 reciprocating distance, the stronger the machining waste discharging action.

  On the other hand, the narrower the width of the tool electrode 11, the smaller the error of the machining groove width due to the parallelism error between the short direction (width direction) of the tool electrode 11 and the machining progress direction, and the shorter the reciprocating distance. The variation in the machining gap length due to an error in parallelism between the longitudinal direction of the tool electrode 11 and the reciprocating direction is reduced. For this reason, it is necessary to obtain optimum parameters by appropriately determining the width of the tool electrode 11 in the short direction and the distance of the reciprocating motion by experiments.

  In the present embodiment, for example, when the thickness (Y-axis direction) of the tool electrode 11 is about 10 μm to 500 μm, the width in the short direction of the tool electrode 11 is about 500 μm to 25 mm, and the reciprocating distance is about 100 μm. As described above, the parallelism and the roughness of the processed surface can be improved by setting the thickness of the workpiece to be equal to or less than the thickness in the Z-axis direction, preferably 5 mm or less.

  Note that the width of the tool electrode 11 in the short direction and the distance of the reciprocating motion are the viscosity of the machining liquid 34, the speed of the reciprocating motion, the size of the machining waste, the material and thickness of the workpiece 2, and the material of the tool electrode 11. You may set based on.

  In the description of the present embodiment, the electrode mechanism 1 is arranged so that the longitudinal direction of the tool electrode 11 is vertical, and the electrode mechanism 1 is reciprocated in the vertical direction. However, the longitudinal direction of the tool electrode 11 is The electrode mechanism 1 may be disposed so as to be in a horizontal direction or an oblique direction, and the workpiece 2 may be processed while the electrode mechanism 1 is reciprocated in the longitudinal direction of the tool electrode 11.

  However, when the longitudinal direction of the tool electrode 11 is set to the vertical direction, not only the viscosity of the machining liquid but also the action of gravity acts on the discharge of the machining waste and bubbles generated in the machining gap. Thereby, while discharge | emission of process waste is accelerated | stimulated downward, discharge | emission of air bubbles is accelerated | stimulated and it becomes possible to discharge | emit process waste efficiently.

  In the description of the present embodiment, the moving speed of the tool electrode 11 in the Z-axis direction has not been mentioned. Similar to the jump operation in the general sculpture electric discharge machining, the same movement speed may be used for the forward path and the backward path when the tool electrode 11 is moved. However, unlike the normal jump operation, the tool electrode 11 and the workpiece 2 remain close to each other even during the reciprocating motion in the Z-axis direction. 11 also occurs during the reciprocating motion in the Z-axis direction. Accordingly, in the reciprocating motion of the tool electrode 11 in the Z-axis direction, if different movement (moving) speeds are adopted in the forward path and the backward path, the machining waste and bubbles gradually move in one direction and are discharged. And more bubbles can be discharged.

  Further, the reciprocating motion in the Z-axis direction of the tool electrode 11 in the present embodiment is not accompanied by the movement of the tool electrode in the direction opposite to the machining progress direction as in the jump operation in the conventional sculpting electric discharge machining. For this reason, a minute gap between the tool electrode 11 and the workpiece 2 can be maintained even during the reciprocating motion, and electric discharge can be continuously generated between the tool electrode 11 and the workpiece 2. That is, according to the present embodiment, unlike the jump operation in the conventional sculpture electric discharge machining, since the electric discharge machining can be performed in parallel while the machining waste is being discharged from the machining gap, high-speed slit machining is performed. Realized.

  However, in the present embodiment, even if the jump operation in the conventional sculpture electric discharge machining is used together, the effect by the reciprocating motion of the tool electrode 11 in the Z-axis direction can be obtained. Absent. In particular, as seen when the machining slit is shallow, the machining performance is improved by the combined use of the jump operation when the effect of discharging the machining waste by the jump operation exceeds the reduction in machining efficiency due to the machining interruption.

  As described above, according to the present embodiment, the holder is provided on at least one of the surfaces that form the workpiece and the surface that the blade-shaped tool electrode crosses and the surface that is processed at the end of the processing. Since the workpiece is fixed and the holder is processed together with the workpiece, the workpiece remaining after the completion of processing is held by the holder, so that an effect of preventing the workpiece from falling can be obtained.

  In addition, according to the present embodiment, an electrode mechanism that applies a strong tension while holding a thin blade-shaped tool electrode from the outside of the workpiece during processing is used in a direction perpendicular to the thickness direction of the tool electrode. Since slit machining is performed, the effect of cutting the workpiece with high precision with a small cutting margin and the effect of preventing the electrode mechanism other than the tool electrode from interfering with the workpiece during deep slit machining are obtained. .

  In addition, according to the present embodiment, an electrode mechanism that holds a plurality of blade-shaped tool electrodes longer than the thickness of the workpiece so that the thickness directions of the tool electrodes are parallel to each other while leaving a gap therebetween. Can be used to process a plurality of slits in the workpiece at the same time by machining the EDM in the direction perpendicular to the thickness direction of each tool electrode. There is no need to perform a winding process or a feeding process of the tool electrode 11, and an effect of performing a large number of slits on the workpiece with a simple configuration is obtained.

  Further, according to the present embodiment, since the power supply portions are provided in a plurality of positions in a stepwise manner, even when the distance between the tool electrodes is narrow, an effect that the power supply lines can be connected without short-circuiting each other can be obtained. In addition, according to the present embodiment, since the slit processing is performed while reciprocating in the longitudinal direction of the thin blade-shaped tool electrode, it is possible to discharge the processing waste even in the slit processing deeper than the width of the tool electrode, An effect of realizing deep slit processing without causing abnormal discharge can be obtained.

  Further, according to the present embodiment, the electrode structure is formed by alternately laminating blade-shaped tool electrodes and thin plate-like spacers at both ends thereof, and the distance between the spacers at both ends is set larger than the thickness of the workpiece. Therefore, the tool electrode can be reciprocated in the longitudinal direction, and the effect of realizing deep slit processing can be obtained.

  Further, according to the present embodiment, since the longitudinal direction of the tool electrode is set to the vertical direction, not only the viscosity of the machining fluid but also the action of gravity acts on the discharge of machining waste and bubbles generated in the machining gap. Therefore, the effect that the processing waste can be efficiently discharged is obtained.

  In the present embodiment, in the reciprocating motion of the tool electrode in the longitudinal direction, different moving speeds are adopted for the forward path and the return path, so that the machining waste and bubbles gradually move in one direction and are discharged. An effect of discharging more processing waste and bubbles can be obtained. Further, in the present embodiment, since electric discharge is continuously generated during the reciprocating motion of the tool electrode in the longitudinal direction, an effect of realizing high-speed slit machining can be obtained.

Embodiment 2. FIG.
In the present embodiment, another modification of the electrode mechanism 1 will be described. FIG. 9 is a diagram for explaining a mechanism for applying tension in the longitudinal direction of the tool electrode 11 in the present embodiment, and FIG. 10 is a diagram for explaining a structure for fixing the electrode mechanism 1 to the frame 18.

  First, a mechanism for applying tension in the longitudinal direction of the tool electrode 11 in the present embodiment will be described. In the electrode mechanism 1 in the present embodiment, the center portions are convex at both ends of the electrode holding portions 14A and 14B, and the generally arcuate tension portions 13X and 13Y are formed. As shown in FIG. That is, it is mounted in a direction facing the tool electrode 11 (opposite side). More specifically, both ends of the electrode holding portions 14A and 14B inserted in the through holes of the tool electrode 11 and the through holes of the spacer 12 are inserted into the through holes provided at both ends in the longitudinal direction of the tension portions 13X and 13Y. After that, the nuts 13Z are screwed into both ends of the electrode holding portions 14A and 14B and fastened, or fixed with an adhesive. When fastening with nuts, screws as shown in FIG. 9 are formed at both ends of the electrode holding portions 14A and 14B. With the tension portions 13X and 13Y attached to the electrode holding portions 14A and 14B, the curved portions are expanded by pushing the curved arcuate convex portions of the tension portions 13X and 13Y in the direction indicated by the arrows in FIG. The tool electrodes 11 are given tension in the longitudinal direction while being kept parallel to each other.

  Next, a structure for fixing the electrode mechanism 1 thus configured to the frame 18 will be described. As shown in FIG. 10, the electrode holding portions 14A and 14B are longer than the size of the frame 18 in the Y-axis direction, and screws are formed at both ends thereof, and the through holes 41A and 41B provided in the frame 18 are formed in the through holes 41A and 41B. Has been inserted. The frame 18 is also provided with screw holes 41X and 41Y for bolts 17X and 17Y used when pressing the tops of the tension portions 13X and 13Y. Here, when tension is applied to the tool electrode 1 by pushing the top portions of the tension portions 13X and 13Y with the bolts 17X and 17Y, the distance between the electrode holding portions 14A and 14B increases, so that the through hole 41A provided in the frame 18 is increased. 41B or 41B is formed larger in the (at least) longitudinal direction of the tool electrode 1 than the diameter of the screw formed at both ends of the electrode holding portions 14A and 14B to be inserted. Even if the distance between 14A and 14B increases, it is comprised so that fastening is possible.

  With the above configuration, the bolts 17X and 17Y are tightened to apply tension in the longitudinal direction of the tool electrode 11, and the nuts 15A and 15B are attached to the screw portions at both ends of the electrode holding portions 14A and 14B from the outside of the frame 18. Then, the electrode mechanism 1 is fixed to the frame 18 by tightening.

  Since the distance between the electrode holding portions 14A and 14B is increased by pressing the tension portions 13X and 13Y with the bolts 17X and 17Y, the nuts 15A and 15B are formed at both ends of the electrode holding portions 14A and 14B. Tightening of a nut (at least one of the nuts 15A and 15B when both nuts 15A and 15B correspond) is tightened through through holes 41A and 41B formed larger than the diameter of the screw Executed after the tightening of the bolts 17X and 17Y.

  In the above embodiment, a U-shaped frame that surrounds the workpiece from three sides on both sides in the Y-axis direction and one side in the Z-axis direction is adopted, and the electrode holding portion 14B is substituted for the remaining direction in the Z-axis direction. However, if the lower side of the frame is also provided outside the electrode holding portion 14B to connect the left and right sides, and the frame is formed in a square shape, a more rigid configuration can be obtained. Also in the present embodiment, it is possible to use a method for preventing a short circuit with an adjacent tool electrode or power supply line by providing a stepped power supply unit as described in the first embodiment. is there. The frame 18 in the present embodiment corresponds to the first holding unit described in the claims.

  As described above, according to the present embodiment, since the tension applied to the tool electrode can be adjusted by changing the screwing amount of the bolt, the material, width, thickness, length, etc. of the tool electrode are changed. In addition, the optimum tension can be applied to the tool electrode without remanufacturing the frame.

  In addition, according to the present embodiment, an electrode mechanism that applies a strong tension while holding a thin blade-shaped tool electrode from the outside of the workpiece during processing is used in a direction perpendicular to the thickness direction of the tool electrode. Since slit machining is performed, the effect of cutting the workpiece with high precision with a small cutting margin and the effect of preventing the electrode mechanism other than the tool electrode from interfering with the workpiece during deep slit machining are obtained. .

  In addition, according to the present embodiment, an electrode mechanism that holds a plurality of blade-shaped tool electrodes longer than the thickness of the workpiece so that the thickness directions of the tool electrodes are parallel to each other while leaving a gap therebetween. Can be used to process a plurality of slits in the workpiece at the same time by machining the EDM in the direction perpendicular to the thickness direction of each tool electrode. There is no need to perform a winding process or a feeding process of the tool electrode 11, and an effect of performing a large number of slits on the workpiece with a simple configuration is obtained. Further, according to the present embodiment, since the power supply portions are provided in a plurality of positions in a stepwise manner, even when the distance between the tool electrodes is narrow, an effect that the power supply lines can be connected without short-circuiting each other can be obtained.

Embodiment 3 FIG.
In the present embodiment, another modification of the electrode mechanism 1 will be described with reference to FIGS. In the present embodiment, a positioning pin 22 for fixing the position of the tool electrode 11 on the frame 18 surrounding the workpiece 2 during processing, and a top 23 for applying tension by winding the blade-shaped tool electrode 11. Is provided.

  The frame 18 has a shape as shown in FIG. 11, and in the same manner as in the first embodiment, the Y-axis direction (that is, the thickness of the tool electrode 11 is set so as not to interfere with the workpiece even when the slit is processed deeply. In the Z-axis direction (that is, the longitudinal direction of the tool electrode) and the thickness in the Z-axis direction of the workpiece and the holder and the tool electrode. The space larger than the sum of the one-way process distances of 11 reciprocating motions is a U-shape or a B-shape that surrounds a space from three or four directions in the Y-axis direction and the Z-axis direction. However, in the case of a U-shape, it has a shape surrounding from both sides in the Z-axis direction and one side in the Y-axis direction.

  As shown in FIG. 11, both ends of the tool electrode 11 are wound around the top 23 via the side surface of the positioning pin 22. A set of two positioning pins 22 is provided on the frame 18, one for each of the tool electrodes 11, one on each side of the workpiece 2 in the longitudinal direction of the tool electrode 11. The positioning pin 22 is installed so that the side surface is parallel to the width direction of the tool electrode 11, and the position of the tool electrode 11 in the thickness direction (that is, the Y-axis direction) is determined by the position of the side surface. One piece 23 is provided on the frame 18 for each of the positioning pins 22, and the tool electrode 11 is wound around the side surface of the positioning pin 22. A predetermined tension is applied to the tool electrode 11 by adjusting the winding amount of the tool electrode 11 by the rotation amount of the top 23. The rotation angle of the top 23 may be set and fixed by fastening with a screw. However, if a ratchet mechanism that prevents reverse rotation is employed, the winding operation of the tool electrode 11 and the setting operation of the rotation angle of the top 23 can be performed. It becomes easy.

  The above configuration is applied to each of the plurality of tool electrodes 11. At this time, as shown in FIG. 11, the plurality of positioning pins 22 are installed so that the positions of the side surfaces thereof are shifted little by little, so that the plurality of tool electrodes 11 are separated from each other by a minute gap in the Y-axis direction. Installed in parallel. It is to be noted that each tool electrode 11 is electrically insulated from each other and needs to be connected to a machining power source in a state where a pulse voltage can be individually applied, as in the first embodiment. In order to realize this connection, for example, the tool electrode 11 is insulated from the frame 18, the positioning pin 22, and the top 23, and the tool electrode 11 has a gradual power supply connection portion as already described with reference to FIG. There is a method of providing.

  In order to insulate the tool electrode 11 from the frame 18, for example, the tool electrode 11 is placed away from the frame 18 so as not to be in direct contact, the entire frame 18 is made of insulating ceramics, or the surface of the frame 18 is A method of applying an insulating paint or the like is conceivable. In order to insulate the tool electrode 11 from the positioning pin 22 and the top 23, the surface of the positioning pin 22 and the top 23 in contact with the tool electrode 11 is made of an insulating material. A method such as configuring is conceivable.

  In the above-described embodiment, the tool electrode is insulated from the positioning pin and the frame. However, a configuration in which power is supplied through the positioning pin and the frame corresponding to each tool electrode is also possible. For example, it is possible to fix each positioning pin and piece to each other by measures such as fixing the conductive positioning pin or piece to the frame via a bush or sleeve made of an insulator, or to the frame made of an insulator. If a tool electrode is installed in an electrically insulated state, each tool electrode is in a conductive state with its respective positioning pin or piece, but other tool electrodes and other Since the positioning pins and tops that are in contact with the tool electrodes are in a non-conducting state, it is possible to supply power separately to each tool electrode by connecting a power supply line to the positioning pins and tops that are in conduction. The effect which can implement | achieve and can omit a power supply connection part is acquired.

  In the above embodiment, the tool electrode 11 is stretched on one side of the frame 18, but as shown in FIG. 12, the frame 18 is divided into two pieces to hold the both ends of the positioning pins 22 and the top 23, If a method such as alternately stretching the tool electrodes 11 on both surfaces of the frame 18 is adopted, the bias of the tension applied to the frame 18 can be greatly reduced, so that the tool electrode 11 when a large number of tool electrodes 11 are installed is used. The bending of the frame 18 due to the bias in tension can be prevented. The frame 18 in the present embodiment corresponds to the second holding portion described in the claims.

  As described above, according to the present embodiment, each tool electrode is individually installed with a corresponding positioning pin and frame, so that an optimum tension is applied to each tool electrode without remanufacturing the frame. In addition, even when the tool electrode is partially damaged, only the damaged part can be replaced without disassembling the whole.

  Further, according to the present embodiment, the tool electrode is installed in a state in which the conductive positioning pins and the pieces are electrically insulated from each other, and the feeder wire is connected to the positioning pins and the pieces. The effect that the structure which supplies electric power to each tool electrode individually can be realized easily is obtained.

  Further, according to the present embodiment, since the frame 18 is used as two frames and both ends of the positioning pins 22 and the tops 23 are held, the tension of the tool electrodes 11 when the large number of tool electrodes 11 are installed is uneven. Thus, the effect of preventing the frame 18 from being bent can be obtained.

  In addition, according to the present embodiment, since the tool electrodes 11 are alternately stretched on both surfaces of the frame 18, the bending of the frame 18 due to the bias of the tension of the tool electrodes 11 when a large number of tool electrodes 11 are installed. The effect of preventing is obtained.

  In addition, according to the present embodiment, an electrode mechanism that applies a strong tension while holding a thin blade-shaped tool electrode from the outside of the workpiece during processing is used in a direction perpendicular to the thickness direction of the tool electrode. Since slit machining is performed, the effect of cutting the workpiece with high precision with a small cutting margin and the effect of preventing the electrode mechanism other than the tool electrode from interfering with the workpiece during deep slit machining are obtained. .

  In addition, according to the present embodiment, an electrode mechanism that holds a plurality of blade-shaped tool electrodes longer than the thickness of the workpiece so that the thickness directions of the tool electrodes are parallel to each other while leaving a gap therebetween. Can be used to process a plurality of slits in the workpiece at the same time by machining the EDM in the direction perpendicular to the thickness direction of each tool electrode. There is no need to perform a winding process or a feeding process of the tool electrode 11, and an effect of performing a large number of slits on the workpiece with a simple configuration is obtained. Further, according to the present embodiment, since the power supply portions are provided in a plurality of positions in a stepwise manner, even when the distance between the tool electrodes is narrow, an effect that the power supply lines can be connected without short-circuiting each other can be obtained.

Embodiment 4 FIG.
In the present embodiment, a modification of the reciprocating motion of the tool electrode 11 will be described. FIG. 13 is a diagram illustrating an example of a movement path of the tool electrode 11, and shows a cross-sectional view of the tool electrode 11 and the workpiece 2 as viewed from the Y-axis direction.

  In the first embodiment, the processing electrode and the bubbles are discharged by reciprocating the tool electrode 11 in the longitudinal direction. However, in the present embodiment, the tool electrode 11 is processed in one of the forward path and the return path of the reciprocating movement. Move in a state slightly retracted from the direction of travel.

  For example, as shown in FIG. 13, the tool electrode 11 advances in the machining progress direction by the servo function of the NC control device 31, and advances the slit machining to the workpiece 2 (1). During this processing, the tool electrode 11 is moved by a predetermined distance (distance L), for example, downward in the Z-axis direction (2). Thereby, the processing waste and bubbles in the processing gap generated by processing the workpiece 2 are discharged from the lower surface side of the workpiece 2. Next, the tool electrode 11 is retracted by a predetermined minute distance (distance B) in the direction opposite to the machining progress direction at the turn-back position of the reciprocating motion, and moved upward by a predetermined distance (distance L) in the Z-axis direction. Further, it is moved forward by a predetermined minute distance (distance B) in the processing progress direction (3). Thereby, bubbles in the processing gap generated by processing the workpiece 2 are discharged from the upper surface side of the workpiece 2. By repeating these processes (1) to (3), the processing is advanced. In addition, you may perform a process (1) and a process (2) simultaneously.

  Here, the predetermined minute distance B is preferably several times or more of about 10 μm, which is the processing gap length during processing, for example, about 100 μm is adopted. Therefore, among the above processing steps, in the step (3) in which the tool electrode 11 is retracted by a predetermined minute distance B and the distance from the workpiece 2 is increased, almost no discharge occurs, and no effect is obtained. It seems not to be obtained. However, since the tool electrode 11 and the workpiece 2 are close to each other in the step (1), the machining waste and bubbles in the vicinity of the workpiece 2 are moved in the moving direction of the tool electrode 11 by the movement of the tool electrode 11. Since the tool electrode 11 and the workpiece 2 are separated from each other in the step (3) retracted by the minute distance B, even if the tool electrode 11 moves, the processing scraps and bubbles in the vicinity of the workpiece 2 remain on the tool electrode 11. A state of not moving in the moving direction is realized. Therefore, by repeating the above processing steps (1) to (3), the processing waste and bubbles existing in the processing gap continue to move in the direction in which the tool electrode 11 moves in step (1), and finally the processing gap. It is discharged outside. In particular, as shown in FIG. 13, the method of moving the tool electrode vertically downward in step (1) has the effect of moving the machining waste that is difficult to discharge in the same direction as the direction of gravity compared to bubbles. Therefore, the effect of discharging processing waste is high.

  In the present embodiment as well, the effect of promoting the discharge of the machining waste by executing the reciprocating motion of the tool electrode at different speeds in the forward path and the backward path as described in the description of the first embodiment can be used together. .

  As described above, according to the present embodiment, when the tool electrode is reciprocated in the longitudinal direction, the tool electrode is moved in a state slightly retracted from the machining progress direction in either the forward path or the return path. Therefore, even in difficult machining where machining jumps and air bubbles cannot be eliminated without using the known jumping operation in the normal sculpture electric discharge machining and the method shown in the first embodiment of the present invention. , It is possible to efficiently remove the processing waste and bubbles and continue the processing.

  Further, according to the present embodiment, since the direction in which the tool electrode is moved without being retracted is set vertically downward, it is possible to move the processing waste that is difficult to discharge compared to the bubbles in the same direction as the direction of gravity, An effect of efficiently discharging the processing waste can be obtained.

  In the present embodiment, in the reciprocating motion of the tool electrode in the longitudinal direction, different moving speeds are adopted for the forward path and the return path, so that the machining waste and bubbles gradually move in one direction and are discharged. An effect of discharging more processing waste and bubbles can be obtained.

  As described above, the sculpting electric discharge machining method and the sculpting electric discharge machining apparatus according to the present invention are suitable for electric discharge machining when machining a slit shape on a workpiece using a strip-shaped tool electrode.

It is explanatory drawing for demonstrating the concept of the electrical discharge machining which concerns on embodiment. It is a figure which shows the structure of the electric discharge machining apparatus which concerns on embodiment. It is a figure (1) for demonstrating the structure of an electrode mechanism. It is a figure (2) for demonstrating the structure of an electrode mechanism. It is a figure which shows the structure of an electrode mechanism. It is a figure for demonstrating the relative position of the work progress direction of a tool electrode, a to-be-processed object, and a holder. It is a figure for demonstrating the structure of the tool electrode in the case of connecting a processing power supply for every tool electrode. It is a figure for demonstrating the structure and operation | movement of an electrode mechanism. It is a figure for demonstrating the tension | tensile_strength of the longitudinal direction given to a tool electrode. It is a figure which shows the structure of the electrode mechanism at the time of attaching a tool electrode to a flame | frame with a tension | pulling part. It is a top view which shows an example of the other structure of an electrode mechanism. It is sectional drawing which shows the structure of the electrode mechanism in the case of pinching a tool electrode with two flame | frames. It is a figure which shows an example of the movement path | route of an electrode mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Electrode mechanism 2 Work piece 3 Main shaft 11 Tool electrode 12 Spacer 13X, 13Y Tensile part 13Z, 15A, 15B Nut 14A, 14B Electrode holding part 17X, 17Y Bolt 18 Frame 22 Positioning pin 23 Top 31 NC controller 32 Motor 33 Processing tank 34 Processing liquid 35 Surface plate 36 Holder 37 Processing power supply 38 Processing liquid adjustment part 41A, 41B Through hole 41X, 41Y Screw hole 51 Feed line 52A-52C Power supply connection part 100 Electric discharge machining apparatus

Claims (25)

While gripping the tool electrode and moving the tool electrode relatively so that the vertical direction of the thickness of the strip-shaped tool electrode becomes the slit forming processing progress direction, the workpiece electrode is interposed between the work electrode and the tool electrode. In the sculpting electric discharge machining method that applies pulsed voltage and performs electric discharge machining,
An adhering step of adhering the workpiece to the workpiece holding member while maintaining conductivity;
A processing step of slitting the workpiece;
An electric discharge machining method characterized by comprising:   2. The electric discharge machining method according to claim 1, wherein, in the machining step, the workpiece holding member is slit when the workpiece is slit.   In the machining step, an electrode member in which a plurality of strip-shaped tool electrodes arranged to form a slit with a predetermined interval is held by an outer holder, and the entire workpiece machining area is included in the slit portion. The electric discharge machining method according to claim 1 or 2, wherein the workpiece is mounted on the workpiece.   In the machining step, the tool electrode and the workpiece are relatively moved in the longitudinal direction of the tool electrode with the tool electrode interposed in a slit formed in the workpiece. 4. The electric discharge machining method according to claim 3, further comprising a moving step.   The sliding step relatively moves the tool electrode and the workpiece while maintaining an electric discharge between the workpiece and the tool electrode during the electric discharge machining of the workpiece. The die-sinking electric discharge machining method according to claim 4.   The said sliding process moves the said tool electrode and a to-be-processed object relatively in the state which stopped the discharge between the to-be-processed object and the said tool electrode. Die-sinking electrical discharge machining method.   In the sliding step, the tool electrode and the workpiece are moved in the longitudinal direction of the tool electrode, and the tool electrode and the workpiece are moved in different directions. 7. The electric discharge machining method according to any one of claims 4 to 6, wherein the electric discharge machining method is moved.   8. The sliding step is configured to retract a predetermined distance in a direction in which an inter-electrode distance between the tool electrode and the workpiece is separated at a return position of the tool electrode during the reciprocating motion. The EDM method described in 1. The workpiece and the tool electrode are moved while the tool electrode is gripped by an outer holder and the tool electrode is moved relatively so that the vertical direction of the thickness of the band-shaped tool electrode becomes the slit forming process progressing direction. In the sculpting EDM device that applies a pulse voltage between and
A plurality of the tool electrodes are arranged so as to form slits spaced apart from each other by a predetermined distance, and the slit portion has such a size that the entire workpiece processing region is included in the slit portion. Engraving EDM.   A wall surface disposed at a position surrounding the tool electrode, and the wall surface does not pass a machining position of a workpiece to be machined by the tool electrode when the tool electrode is advanced in the slit formation machining direction. The electric discharge machining apparatus according to claim 9, wherein the tool electrode is held using a wall surface.   10. The electric discharge machining apparatus according to claim 9, wherein the tool electrode has one end fixed to a comb-teeth shape.   A plurality of the tool electrodes are stacked in the vicinity of both ends of the tool electrode via spacers, and a connecting member is passed through through holes provided in the spacer and the tool electrode so that the connecting member extends in the tool electrode longitudinal direction. The electric discharge machining apparatus according to claim 11, wherein the electric discharge machining apparatus is held in a state where tension is applied. A first holding part for holding the connecting member from the front side and the back side of the tool electrode;
A curved member that is held in a state in which the top is pressed against the first holding part and through which the connecting member passes in the vicinity of both ends;
With
13. The bending member according to claim 9, wherein the bending member is stretched by the pressing of the top portion and applies tension in the longitudinal direction of the tool electrode to the connecting member by stretching of the bending member. The sculpture electric discharge machine described. Each of the tool electrodes includes a power supply connection portion connected to each machining power source for each tool electrode,
14. The sculpture discharge according to claim 9, wherein each of the power supply connection portions is disposed at a position different from the position of the adjacent power supply connection portion in the longitudinal direction of the tool electrode. Processing equipment. A second holding part for holding the tool electrode on one annular main surface;
A plurality of the tool electrodes are arranged on the main surface so that the main surface and the short direction of the tool electrode are perpendicular to each other, and the second holding is performed in a state where a tension is applied in the tool electrode longitudinal direction. The electric discharge machining apparatus according to claim 11, wherein the electric discharge machining apparatus is held by a portion. A top for holding a longitudinal end of the tool electrode and applying tension in the longitudinal direction of the tool electrode by winding the tool electrode by rotation,
A pin that rotates in contact with the main surface of the tool electrode and leads the end of the tool electrode to the top;
The EDM apparatus according to claim 15, further comprising:   The electric discharge machining apparatus according to claim 16, wherein the tool electrode is supplied with power through the frame or pin.   The shape engraving according to any one of claims 15 to 17, wherein the second holding portion is composed of two sheets, and the tool electrode is disposed between the second holding portions. Electric discharge machine.   The electric discharge machining apparatus according to any one of claims 16 to 18, wherein the tool electrode is held by each piece provided in each of the second holding portions.   The apparatus further comprises sliding means for relatively moving the tool electrode and the workpiece in the longitudinal direction of the tool electrode in a state where the tool electrode is interposed in a slit formed in the workpiece. The electric discharge machining apparatus according to any one of claims 9 to 19, wherein   The sliding means relatively moves the tool electrode and the workpiece while maintaining the electric discharge between the workpiece and the tool electrode during the electric discharge machining of the workpiece. The die-sinking electric discharge machining apparatus according to claim 20.   21. The sliding means according to claim 20, wherein the tool electrode and the workpiece are relatively moved in a state where the discharge between the workpiece and the tool electrode is suspended. Die-sinking EDM.   The sliding means moves the tool electrode at different moving speeds in a forward direction and a return path in a reciprocating motion in which the tool electrode and the workpiece are relatively moved in the longitudinal direction of the tool electrode. The die-sinking electric discharge machining apparatus according to any one of claims 20 to 22, wherein the electric discharge machining apparatus is moved.   The sliding means retracts the tool electrode by a predetermined distance in a direction in which a distance between the tool electrode and the workpiece is separated at a position where the tool electrode is folded back during the reciprocating motion. 24. The die-sinking electric discharge machining apparatus according to claim 23, wherein the electric discharge machining apparatus is moved back to the original position by being advanced in the slit forming machining direction.   The slit electric discharge machining apparatus according to any one of claims 9 to 24, wherein the slit formed by the tool electrode is in a vertical direction.

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