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WO2006101923A2 - Capteur fabry-perot haute intensite - Google Patents

Capteur fabry-perot haute intensite Download PDF

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Publication number
WO2006101923A2
WO2006101923A2 PCT/US2006/009400 US2006009400W WO2006101923A2 WO 2006101923 A2 WO2006101923 A2 WO 2006101923A2 US 2006009400 W US2006009400 W US 2006009400W WO 2006101923 A2 WO2006101923 A2 WO 2006101923A2
Authority
WO
WIPO (PCT)
Prior art keywords
lens
sensor assembly
diaphragm
reflective surface
ball
Prior art date
Application number
PCT/US2006/009400
Other languages
English (en)
Other versions
WO2006101923A3 (fr
Inventor
William N. Gilber
Larry A. Jeffers
Richard L. Lopushansky
Frederick J. Gillham
Original Assignee
Davidson Instruments, Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Davidson Instruments, Inc filed Critical Davidson Instruments, Inc
Priority to EP06738462.8A priority Critical patent/EP1869737B1/fr
Publication of WO2006101923A2 publication Critical patent/WO2006101923A2/fr
Publication of WO2006101923A3 publication Critical patent/WO2006101923A3/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G02B6/322—Optical coupling means having lens focusing means positioned between opposed fibre ends and having centering means being part of the lens for the self-positioning of the lightguide at the focal point, e.g. holes, wells, indents, nibs
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02068—Auto-alignment of optical elements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
    • G01D5/35312—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Fabry Perot
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/34—Optical coupling means utilising prism or grating

Definitions

  • the present invention relates to sensors for measuring the absolute length of a gap in a Fabry-Perot interferometer, and more particularly to a Fabry-Perot sensor that provides a more intense signal.
  • ⁇ 875182: ⁇ light reflected by the interferometer is captured by the fiber.
  • the light delivery fiber is not precisely centered on the ball lens axis or if the interferometer is not precisely perpendicular to the axis of the incident light transmitted by the ball lens, then the reflected light from the diaphragm does not re-enter the fiber because the reflected light spot that is re-imaged by the ball lens is not centered on the end of the input fiber.
  • the results from the Fabry-Perot interferometer-based sensor are compromised.
  • a Fabry-Perot interferometer-based sensor with a ball lens and alignment scheme that reflects high intensity light signals would provide benefits such as improved power budget, improved signal to noise ratio, and would be welcomed by the industry.
  • the present application discloses a sensor assembly that comprises an optical fiber having an optical axis, a lens in optical communication with the optical fiber, the lens having an optical axis and the lens capable of transmitting a beam of light, a reflective surface, the reflective surface spaced from the lens such that the beam of light transmitted from the lens is capable of reflecting from the reflective surface back to the lens, and an alignment device capable of aligning the beam of light transmitted from the lens substantially perpendicular with the reflective surface.
  • a Fabry-Perot sensor assembly that comprises an optical fiber, a ball lens in optical communication with the optical fiber the ball lens capable of transmitting a beam of light, a window having a first surface and a second surface, a diaphragm spaced from and parallel to the second surface of the
  • a sensor assembly comprises a body having a socket, a ball rotatably positioned in the socket of the body, an optical fiber, at least a portion of the optical fiber positioned in the ball, a ball lens attached to the optical fiber, the ball lens capable of transmitting a beam of light, a diaphragm having a reflective surface, the diaphragm spaced from the ball lens such that the beam of light transmitted by the ball lens is capable of reflecting from the surface of the diaphragm back to the ball lens, and wherein rotation of the ball aligns the beam of light transmitted from the ball lens substantially perpendicular with the reflective surface of the mesa diaphragm.
  • Figure IA is a concept drawing of a Fabry-Perot interferometer based sensor assembly with a ball lens and Fabry-Perot gap, wherein the window is a wedge with nonparallel surfaces.
  • Figure IB is a concept drawing of a Fabry-Perot interferometer based sensor assembly with a ball lens, a Fabry-Perot gap, and a wedge-shaped spacer that is used with a window having parallel surfaces.
  • Figure 2 is a concept drawing of sensor assembly with ball lens and Fabry- Perot gap, wherein the two surfaces of the window are plane parallel (where one
  • Figure 5 shows a cross section of a second reflector in the Fabry-Perot interferometer with a mesa diaphragm configuration.
  • Figure 6 shows a cross section of a second reflector in the Fabry-Perot interferometer with a plug diaphragm configuration.
  • Figure 7 shows a cross section of a second reflector in the Fabry-Perot interferometer with a bellows diaphragm configuration.
  • Figure 8 shows a cross section of a second reflector in the Fabry-Perot interferometer with a spherical depression.
  • Figure 9 shows a flexible transducer incorporating an embodiment of a Fabry- Perot interferometer based sensor.
  • Figure 10 shows a cross-section drawing of ball and socket alignment device of an optical fiber with fused ball lens.
  • FIG. IA An embodiment of a Fabry-Perot interferometer based sensor 10 is shown in FIG. IA. In this embodiment, a wedge shaped window assembly 15 is used rather than a plane-parallel window as an alignment device.
  • the Fabry-Perot interferometer based sensor 10 comprises a transducer body 11, a ferrule 20, an optical fiber 25 having an optical fiber axis 27, a lens 30 having a lens optical axis 32, and a Fabry-Perot sensor 40.
  • a ball lens being shown in FIG. 1, any sort of lens that focuses and collimates light can be used, e.g., a graded index lens or a ball lens.
  • the Fabry-Perot sensor 40 comprises a wedge shaped window assembly 15 and a diaphragm 42 having an optical axis 45 and a reflective surface 49.
  • the wedge shaped window assembly 15 comprises one surface 52 that serves as the first partially reflector in a Fabry-Perot interferometer where the window assembly 15 is located between the lens 30 and a second reflector 49 in the Fabry-Perot interferometer, which allows for proper operation of the invention with long gaps. Rotation of the
  • ⁇ 875182: ⁇ wedge-shaped window assembly 15 causes a change in the angle of refraction into and out of the window assembly 15 until the window assembly 15 is in the precise rotational location where the column or beam of light transmitted from the lens 30, is perpendicular to the first reflective surface 52 on the window assembly 15. Additionally, the lens optical axis 32 is perpendicular to the surface 49 of the diaphragm 42, as well as the optical axis 27 of the optical fiber 25 being perpendicular to the first reflective surface 52 of the window assembly 15 and the surface 49 of the diaphragm 42.
  • the window surfaces 51, 52 can be maintained parallel to each other and parallel to the second reflector surface 49 in the Fabry-Perot sensor. Plane- parallel windows are easier to manufacture.
  • the alignment device comprises a wedge-shaped spacer 61 located between the lens and the reflective surface as shown in FIG. IB. Accordingly, to provide the angle tuning, the wedge- shaped spacer 61 is inserted until the column or beam of light transmitted from the lens 30, is perpendicular to the reflective surface on the diaphragm. Spacers 61 with different wedge angles can be matched to different transducer bodies to correct for variation in manufacturing tolerances of the transducer bodies and to optimize light transmission.
  • the alignment device comprises a surface 213 of the transducer body 211 that mates with the window assembly 215 that is machined at
  • the window assembly 215 does not need to be rotated to bring the window 215 into precise alignment with the transducer 211. It is simply attached to the transducer body 211 at any rotational position.
  • the transducer body 211 is machined at a predetermined angle to produce the desired tilt angle of the Fabry-Perot interferometer based sensor.
  • the alignment device comprises the transducer body 211 having its end surface or face 213 machined at an angle relative to its axis to align the beam of light transmitted from the lens perpendicular with the reflective surface 249 of the diaphragm.
  • the desired tilt angle of the transducer body 211 is also when a light beam transmitted from the ball lens 230 is perpendicular to the end face 213 of the transducer body 211. This ensures the light beam is perpendicular to the diaphragm surface 249, as shown in FIG. 2.
  • This approach can also be used even when there is no ball lens and no window, to correct for any misalignment of the light beam with the transducer body and second reflector of the Fabry-Perot sensor, i.e. the diaphragm surface.
  • the method for pointing the light beam to achieve perpendicularity with the diaphragm is to use a metal ball-and-socket assembly shown in Figure 10.
  • the Fabry-Perot interferometer based sensor 1000 comprises a ferrule 1020, an optical fiber 1025, a lens 1030, a Fabry-Perot sensor 1040, and an alignment device.
  • the alignment device comprises a body 1060 having a socket 1065, and a ball 1070.
  • the Fabry-Perot sensor 1040 comprises a window assembly 1015 and a diaphragm 1042.
  • the window assembly 1015 comprises one surface 1052 that serves as the first reflector in a Fabry-Perot interferometer where the window 1015 is between the lens 1030 and a second
  • the window assembly 1015 also includes another surface 1051 parallel to the surface 1052.
  • the ball 1070 can be a metal ball, but is not limited to such. It can be of any material.
  • the ball 1070 is rotatably attached in the socket 1065.
  • Held inside the metal ball 1070 is the ferrule 1020 that holds the optical fiber 1025 and lens 1030.
  • the metal ball 1070 can be rotated in its mating socket 1065 through two degrees of freedom about the center-of-rotation 1072, as shown by the arrow.
  • a 2mm diameter ball lens that is configured according to the drawing in Figure 3 has the design parameters presented in Table 1.
  • the tilt angle is an input parameter to the ray trace.
  • the same tilt angle is applied to each window surface C and D and the reflector E.
  • Figure 4 shows what happens if the fiber de-center remains 0.05mm and the tilt angle is set to 0.
  • the reflected rays miss the end of the fiber. Compare Figure 4 with Figure 3, where the reflected rays re-enter the fiber.
  • the object and image size in Figure 3 is roughly .065mm (total spot size, not rms).
  • the size of the image (reflected spot) is roughly .115mm and is not centered about the object (fiber end).
  • Figures 1 and 2 A light delivery fiber and a ball lens are not attached to one another.
  • the non-attached case results in two unwanted reflective surfaces (the fiber end and the ball lens input surface) that could interfere with the desired signal from the Fabry-Perot sensor.
  • the ball lens 1030 is attached to the optical fiber 1025. More specifically, the ball lens 1030 is fused and centered on the end of the optical fiber 1025 minimizing the de-centering problem and eliminating two unwanted reflective surfaces.
  • a ball lens is fused to the silica optical fiber by heating the end of the fiber to the melting point.
  • the ball lens 1030 can be bonded to the optical fiber 1025 using an adhesive.
  • the typical diameter of the ball lens formed in this manner is 340 ⁇ m.
  • An additional way to improve the performance of the Fabry-Perot interferometer based sensor is to machine a feature (such as a circular groove) into the diaphragm that causes the surface of the diaphragm to translate without bending as the diaphragm deflects.
  • This feature could be configured as a mesa 500 (which is the circular groove cut into the diaphragm substantially surrounding the flat mesa reflective surface of the diaphragm), a plug 600, or a bellows 700 as depicted in Figures 5, 6, and 7, respectively.
  • the mesa diaphragm 500 includes a circular groove 510 cut therein.
  • the circular groove 510 surrounds the reflective surface 549 of the diaphragm 500.
  • Another way to improve the performance of the Fabry-Perot interferometer based sensor 10 is to attach a glass plate and/or dielectric coating 49 to the surface of
  • ⁇ 875182: ⁇ 10 the diaphragm 42 that allows the reflectance of the diaphragm 42 to be optimized and to remain uniform with time and temperature.
  • the performance of the Fabry-Perot interferometer based sensor could be improved by machining a concave spherical depression 810 as depicted in Figure 8 in the center of the diaphragm 800 to provide modal control of the Fabry- Perot gap.
  • the depth of the spherical depression must be less than the minimum gap that is to be measured with the Fabry-Perot sensor.
  • the features of the second reflector in the Fabry-Perot interferometer based sensor combine to enable a transducer head 900 to be fabricated that is very short and very small in diameter.
  • the small size allows the transducer head 900 to be placed on then end of a flexible probe 910 for use in locations where space and access are very limited, forming a flexible transducer.
  • Combustor baskets in Siemens Westinghouse turbines contain J-tubes used to examine the combustor basket with a horoscope.
  • a flexible transducer may be installed in this location but there are physical limitations to the size of the transducer head and the pigtail assembly that contains the leads. It is straightforward to design and build a fiber optic transducer that fits within the size envelope defined by the gas turbine combustor basket J-tube. One design is shown in Figure 9. The size constraints include the diameter and length of the transducer and the flexibility of the pigtail assembly that must be pressure sealed.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un capteur à base d'interféromètre Fabry-Perot dans lequel, lorsqu'une lumière réfléchie insuffisante provenant du capteur rentre dans une fibre, les résultats sont compromis. En conséquence, un ensemble capteur comprend une fibre optique à axe optique; une lentille en communication optique avec la fibre optique, ladite lentille comprenant un axe optique et étant capable de transmettre un faisceau lumineux; une surface réfléchissante écartée de la lentille de sorte que le faisceau lumineux transmis à partir de cette lentille est capable de se réfléchir de la surface réfléchissante vers la lentille, et un dispositif d'alignement capable d'aligner le faisceau lumineux transmis sensiblement perpendiculairement à partir de la lentille vers la surface réfléchissante.
PCT/US2006/009400 2005-03-16 2006-03-16 Capteur fabry-perot haute intensite WO2006101923A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP06738462.8A EP1869737B1 (fr) 2005-03-16 2006-03-16 Capteur fabry-perot haute intensite

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US66220205P 2005-03-16 2005-03-16
US60/662,202 2005-03-16
US77428906P 2006-02-17 2006-02-17
US60/774,289 2006-02-17

Publications (2)

Publication Number Publication Date
WO2006101923A2 true WO2006101923A2 (fr) 2006-09-28
WO2006101923A3 WO2006101923A3 (fr) 2008-01-17

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/009400 WO2006101923A2 (fr) 2005-03-16 2006-03-16 Capteur fabry-perot haute intensite

Country Status (3)

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US (2) US20060274323A1 (fr)
EP (1) EP1869737B1 (fr)
WO (1) WO2006101923A2 (fr)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7492463B2 (en) 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
US7864329B2 (en) 2004-12-21 2011-01-04 Halliburton Energy Services, Inc. Fiber optic sensor system having circulators, Bragg gratings and couplers
US7835598B2 (en) 2004-12-21 2010-11-16 Halliburton Energy Services, Inc. Multi-channel array processor
US8432552B2 (en) * 2005-03-16 2013-04-30 Halliburton Energy Services, Inc. High intensity Fabry-Perot sensor
EP1869737B1 (fr) 2005-03-16 2021-05-12 Davidson Instruments, Inc. Capteur fabry-perot haute intensite
WO2007033069A2 (fr) 2005-09-13 2007-03-22 Davidson Instruments Inc. Algorithme de poursuite pour processeur de signal a reseau lineaire a schemas de correlation croisee de fabry-perot et son procede d'utilisation
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
US7743661B2 (en) 2006-04-26 2010-06-29 Halliburton Energy Services, Inc. Fiber optic MEMS seismic sensor with mass supported by hinged beams
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
US7787128B2 (en) 2007-01-24 2010-08-31 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters
GB0724411D0 (en) * 2007-12-14 2008-01-30 Stfc Science & Technology Optical sensor
EP2363685B1 (fr) * 2010-02-09 2013-11-20 Attocube Systems AG Dispositif de détection de la position avec interféromètre Fabry-Pérot confocal
JP5434719B2 (ja) * 2010-03-19 2014-03-05 セイコーエプソン株式会社 光フィルターおよび分析機器
US8655117B2 (en) 2011-03-11 2014-02-18 University of Maribor Optical fiber sensors having long active lengths, systems, and methods
GB2508908B (en) 2012-12-14 2017-02-15 Gen Electric Resonator device
JP6089674B2 (ja) * 2012-12-19 2017-03-08 セイコーエプソン株式会社 波長可変干渉フィルター、波長可変干渉フィルターの製造方法、光学フィルターデバイス、光学モジュール、及び電子機器
MX360145B (es) 2013-12-20 2018-10-24 Halliburton Energy Services Inc Sensores opticos en herramientas de adquisicion de registros en el interior del pozo.
JP2016065937A (ja) * 2014-09-24 2016-04-28 パイオニア株式会社 波長可変光フィルタ及び波長可変光フィルタの製造方法
CN105509816B (zh) 2016-01-29 2018-02-16 苏州弘开传感科技有限公司 一种基于法布里珀罗原理的传感器
KR102560803B1 (ko) 2016-07-05 2023-07-31 더 제너럴 하스피탈 코포레이션 능동적으로 제어되는 광학 이미징 장치를 위한 시스템들 및 방법들
CN106643918A (zh) * 2017-03-15 2017-05-10 中国科学院武汉岩土力学研究所 基于光纤光栅的岩体应力位移一体化测试装置及系统
JP6754464B2 (ja) * 2019-04-23 2020-09-09 パイオニア株式会社 波長可変光フィルタ
CN116839639A (zh) * 2022-03-24 2023-10-03 华为技术有限公司 光纤传感器和检测设备

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572669A (en) 1979-01-22 1986-02-25 Rockwell International Corporation Method and apparatus for a Fabry-Perot multiple beam fringe sensor
US5349439A (en) 1989-01-18 1994-09-20 Photonetics Opto-electronic measuring device with optical air wedge spectral analysis arrangement
US5920670A (en) 1996-06-07 1999-07-06 3M Innovative Properties Company Multiple alignment connector ferrule
US20020016536A1 (en) 1999-03-12 2002-02-07 Cas Medical Systems, Inc. Laser diode optical transducer assembly for non-invasive spectrophotometric blood oxygenation monitoring
US6430337B1 (en) 1998-09-03 2002-08-06 Agere Systems Optoelectronics Guardian Corp. Optical alignment system
US20030039428A1 (en) 2000-09-20 2003-02-27 Koji Okamoto Optical fiber interferosensor, signal-processing system for optical fiber interferosensor and recording medium
US20040086228A1 (en) 2002-11-04 2004-05-06 Harris Corporation And Florida Institute Of Technology Fiber optic fabry-perot interferometer and associated methods
US6854899B1 (en) 1999-05-20 2005-02-15 Tyco Electronics Amp Gmbh Ferrule for an optical fiber and process for fastening the ferrule on the optical fiber
US20050036742A1 (en) 2003-08-29 2005-02-17 Dean David L. Molded fiber optic ferrule with integrally formed geometry features

Family Cites Families (261)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1432149A (en) 1922-01-06 1922-10-17 William E Bellingham Automobile windshield accessory
DE1293457B (de) * 1962-10-02 1969-04-24 Gen Precision Inc Interferometer zur Messung von Winkelaenderungen
GB1168971A (en) 1966-07-08 1969-10-29 Melvin Seymour Cook Improvements in or relating to Optical Measurement of Length
US3923400A (en) 1974-01-03 1975-12-02 Itek Corp Real-time wavefront correction system
US4329058A (en) 1979-01-22 1982-05-11 Rockwell International Corporation Method and apparatus for a Fabry-Perot multiple beam fringe sensor
US4210029A (en) 1979-05-04 1980-07-01 Lad Research Industries, Inc. Differential fiber optic differential pressure sensor
DE3142164A1 (de) 1980-10-27 1982-06-16 Rosemount Engineering Co. Ltd., Bognor Regis, Sussex Vorrichtung zur messung von druckunterschieden
DE3044183A1 (de) 1980-11-24 1982-06-24 Reinhard Dipl.-Phys. Dr. 7250 Leonberg Ulrich Verfahren zur optischen messung von laengen und laengenaenderungen und anordnung zur durchfuehrung des verfahrens
DE3172569D1 (en) 1981-03-07 1985-11-14 Kernforschungsz Karlsruhe Differential pressure detector
DE3127333C2 (de) 1981-07-10 1986-03-20 Siemens Ag, 1000 Berlin Und 8000 Muenchen Modulationsvorrichtung zur optischen Signalübertragung
US4418981A (en) 1982-01-19 1983-12-06 Gould Inc. Quadrature fiber-optic interferometer matrix
JPS58208610A (ja) 1982-05-17 1983-12-05 ブリティッシュ・テクノロジー・グループ・リミテッド 物体の表面検査装置
DE3372249D1 (en) 1983-03-30 1987-07-30 Ibm Deutschland Crosstalk compensation circuit for electro-optical scanning devices
DE3411096C2 (de) 1983-06-30 1987-01-29 Siemens AG, 1000 Berlin und 8000 München Mehrkanaliges Meßwerterfassungs-, -übertragungs- und -verarbeitungssystem
US4606638A (en) 1983-11-03 1986-08-19 Zygo Corporation Distance measuring interferometer and method of use
US4583228A (en) 1983-11-21 1986-04-15 At&T Bell Laboratories Frequency stabilization of lasers
US4873989A (en) 1984-03-08 1989-10-17 Optical Technologies, Inc. Fluid flow sensing apparatus for in vivo and industrial applications employing novel optical fiber pressure sensors
NO850865L (no) 1984-03-10 1985-09-11 Int Standard Electric Corp Fiberoptisk sensor
US4907035A (en) 1984-03-30 1990-03-06 The Perkin-Elmer Corporation Universal edged-based wafer alignment apparatus
GB8408383D0 (en) 1984-03-31 1984-05-10 Jackson D A Optical pressure-sensing apparatus
US4640616A (en) 1984-12-06 1987-02-03 The Cambridge Instrument Company Plc Automatic refractometer
US4648083A (en) 1985-01-03 1987-03-03 The United States Of America As Represented By The Secretary Of The Navy All-optical towed and conformal arrays
JPS61235731A (ja) 1985-04-11 1986-10-21 Sharp Corp 感圧素子
JPS62201301A (ja) 1986-02-28 1987-09-05 Tomohiko Akuta レ−ザ−干渉測長機
US4668889A (en) 1986-06-06 1987-05-26 Adams Donald L Static overpressure protection system for differential pressure transducer
US4755668A (en) 1986-10-03 1988-07-05 Optical Technologies, Inc. Fiber optic interferometric thermometer with serially positioned fiber optic sensors
US4787741A (en) 1986-10-09 1988-11-29 Mcdonnell Douglas Corporation Fiber optic sensor
US4777358A (en) 1987-03-30 1988-10-11 Geo-Centers, Inc. Optical differential strain gauge
US4806016A (en) 1987-05-15 1989-02-21 Rosemount Inc. Optical displacement sensor
EP0315346B1 (fr) 1987-10-28 1993-02-10 Borg-Warner Automotive Transmission And Engine Components Corporation Courroie à maillons pour transmission continûment variable à pivot cambré
US4844616A (en) 1988-05-31 1989-07-04 International Business Machines Corporation Interferometric dimensional measurement and defect detection method
US4972077A (en) 1988-08-08 1990-11-20 Schlumberger Industries Limited Wavelength multiplexed optical transducer with a swept wavelength optical source
US4968144A (en) 1989-03-09 1990-11-06 Wayne State University Single beam AC interferometer
US4999014A (en) 1989-05-04 1991-03-12 Therma-Wave, Inc. Method and apparatus for measuring thickness of thin films
US4914666A (en) 1989-05-04 1990-04-03 At&T Bell Laboratories Random-access digitally -tuned optical frequency synthesizer
US5060526A (en) 1989-05-30 1991-10-29 Schlumberger Industries, Inc. Laminated semiconductor sensor with vibrating element
FR2647931B1 (fr) 1989-06-06 1994-09-09 Thomson Csf Reseau de capteurs relies a une centrale distante d'alimentation, de controle et de traitement
US4995697A (en) 1989-09-07 1991-02-26 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Fiber optic sensing system
GB8920364D0 (en) 1989-09-08 1989-10-25 Downs Michael J Optical measuring instruments
US5034603A (en) 1989-11-06 1991-07-23 Wilson Keith E Integrated optics wavelength stabilization unit
US5094534A (en) 1989-12-27 1992-03-10 Dylor Corporation Coherence selective fiber optic interferometric sensor system
ATE92192T1 (de) 1990-03-09 1993-08-15 Landis & Gyr Business Support Vorrichtung zum messen einer magnetischen induktion.
DE4016471A1 (de) 1990-05-22 1991-11-28 Bosch Gmbh Robert Mikromechanischer neigungssensor
EP0460357A3 (en) 1990-06-08 1992-07-29 Landis & Gyr Betriebs Ag Device for optical measurement of pressure differences
GB9022969D0 (en) 1990-10-23 1990-12-05 Rosemount Ltd Displacement measurement apparatus
US5225888A (en) 1990-12-26 1993-07-06 International Business Machines Corporation Plasma constituent analysis by interferometric techniques
US5128798A (en) 1991-02-07 1992-07-07 International Business Machines Corporation Addressable wedge etalon filter
US5835214A (en) 1991-02-22 1998-11-10 Applied Spectral Imaging Ltd. Method and apparatus for spectral analysis of images
US5177805A (en) 1991-04-01 1993-01-05 American Research Corp. Of Va. Optical sensors utilizing multiple reflection
WO1992017757A1 (fr) 1991-04-05 1992-10-15 Mark Iv Transducer Corporation Dispositif de pression differentielle
US5784507A (en) 1991-04-05 1998-07-21 Holm-Kennedy; James W. Integrated optical wavelength discrimination devices and methods for fabricating same
US6501551B1 (en) 1991-04-29 2002-12-31 Massachusetts Institute Of Technology Fiber optic imaging endoscope interferometer with at least one faraday rotator
US5218426A (en) 1991-07-01 1993-06-08 The United States Of America As Represented By The Secretary Of Commerce Highly accurate in-situ determination of the refractivity of an ambient atmosphere
US5239400A (en) 1991-07-10 1993-08-24 The Arizona Board Of Regents Technique for accurate carrier frequency generation in of DM system
GB2258725B (en) 1991-07-30 1995-06-21 Rosemount Ltd A method of decoding a spectrally modulated light signal
US5283625A (en) 1991-08-19 1994-02-01 Litton Systems, Inc. Interferometer phase modulation controller apparatus using ratios of two pairs of harmonic signals
US5218418A (en) 1991-10-30 1993-06-08 Layton Michael R Differential fiber optic sensor and method
US5181080A (en) 1991-12-23 1993-01-19 Therma-Wave, Inc. Method and apparatus for evaluating the thickness of thin films
EP0562211A1 (fr) * 1992-03-25 1993-09-29 International Business Machines Corporation Coupleurs fibre optique à alignement automatique
FI98095C (fi) 1992-05-19 1997-04-10 Vaisala Technologies Inc Oy Fabry-Perot resonaattoriin perustuva optinen voima-anturi, jossa ilmaisimen osana toimii pyyhkäisevä Fabry-Perot resonaattori
CA2074289C (fr) 1992-07-21 1999-09-14 Claude Belleville Capteur optique du type fabry-perot pour mesurer un parametre physique
US5351317A (en) 1992-08-14 1994-09-27 Telefonaktiebolaget L M Ericsson Interferometric tunable optical filter
US5361130A (en) 1992-11-04 1994-11-01 The United States Of America As Represented By The Secretary Of The Navy Fiber grating-based sensing system with interferometric wavelength-shift detection
US5276501A (en) 1992-11-06 1994-01-04 Martin Marietta Corporation Fabry-Perot readout technique using wavelength tuning
WO1994011708A1 (fr) 1992-11-06 1994-05-26 Martin Marietta Corporation Systeme de lecture d'un detecteur optique interferometrique
DE9215389U1 (de) 1992-11-12 1994-03-17 Flohe GmbH & Co, 44579 Castrop-Rauxel Die Induktivität eines gekühlten Hochstromkabels erhöhender Leiterabschnitt
EP0600142B1 (fr) 1992-11-30 1999-05-06 STMicroelectronics S.r.l. Architecture à haute performance pour la génération de RAM à une seule porte
US5420688A (en) 1992-12-14 1995-05-30 Farah; John Interferometric fiber optic displacement sensor
US5359681A (en) 1993-01-11 1994-10-25 University Of Washington Fiber optic sensor and methods and apparatus relating thereto
DE4314486C2 (de) 1993-05-03 1998-08-27 Heidenhain Gmbh Dr Johannes Absolutinterferometrisches Meßverfahren sowie dafür geeignete Laserinterferometeranordnung
US5559358A (en) 1993-05-25 1996-09-24 Honeywell Inc. Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
JPH0766482A (ja) 1993-08-26 1995-03-10 Anritsu Corp 可変波長光源
US5401958A (en) 1993-09-08 1995-03-28 General Electric Company Optical temperature compensation of spectral modulation sensors by spectrographic interrogation having a dispersive element
US20020015155A1 (en) 1993-09-21 2002-02-07 Ralf-Dieter Pechstedt Interferometer integrated on silicon-on-insulator chip
US5386729A (en) 1993-09-22 1995-02-07 The Babcock & Wilcox Company Temperature compensated microbend fiber optic differential pressure transducer
US5401956A (en) 1993-09-29 1995-03-28 United Technologies Corporation Diagnostic system for fiber grating sensors
US5451772A (en) 1994-01-13 1995-09-19 Mechanical Technology Incorporated Distributed fiber optic sensor
US5509023A (en) 1994-03-10 1996-04-16 At&T Corp. Laser control arrangement for tuning a laser
US5526114A (en) 1994-07-20 1996-06-11 Eselun; Steven A. Time multiplexed fringe counter
US5497233A (en) 1994-07-27 1996-03-05 Litton Systems, Inc. Optical waveguide vibration sensor and method
FI945124A0 (fi) 1994-10-31 1994-10-31 Valtion Teknillinen Spektrometer
US5550373A (en) 1994-12-30 1996-08-27 Honeywell Inc. Fabry-Perot micro filter-detector
US5557406A (en) 1995-02-28 1996-09-17 The Texas A&M University System Signal conditioning unit for fiber optic sensors
JP3304696B2 (ja) 1995-04-17 2002-07-22 株式会社先進材料利用ガスジェネレータ研究所 光学式センサ
US5682237A (en) 1995-05-26 1997-10-28 McDonnell Douglas Fiber strain sensor and system including one intrinsic and one extrinsic fabry-perot interferometer
US5646762A (en) 1995-11-07 1997-07-08 Lucent Technologies Inc. Optical communication system using tandem Fabry-Perot etalon for wavelength selection
US5892357A (en) 1995-12-08 1999-04-06 Lockheed Martin Idaho Technologies Company Electro-optic voltage sensor for sensing voltage in an E-field
US6307629B1 (en) 1997-08-12 2001-10-23 Lj Laboratories, L.L.C. Apparatus and method for measuring optical characteristics of an object
US5641956A (en) 1996-02-02 1997-06-24 F&S, Inc. Optical waveguide sensor arrangement having guided modes-non guided modes grating coupler
DE19615366B4 (de) 1996-04-19 2006-02-09 Carl Zeiss Jena Gmbh Verfahren und Einrichtung zum Nachweis physikalischer, chemischer, biologischer oder biochemischer Reaktionen und Wechselwirkungen
FR2748578B1 (fr) 1996-05-10 1998-05-29 Commissariat Energie Atomique Dispositif optomecanique et application a des capteurs en optique integree
US6020963A (en) 1996-06-04 2000-02-01 Northeastern University Optical quadrature Interferometer
US5832157A (en) 1996-07-12 1998-11-03 Mcdermott Technology, Inc. Fiber optic acoustic emission sensor
DE19628200B4 (de) 1996-07-12 2007-03-01 Deutsches Zentrum für Luft- und Raumfahrt e.V. Vorrichtung zur Durchführung interferometrischer Messungen
US5760391A (en) 1996-07-17 1998-06-02 Mechanical Technology, Inc. Passive optical wavelength analyzer with a passive nonuniform optical grating
US6088144A (en) 1996-09-13 2000-07-11 Lucent Technologies Inc. Detection of frequency-modulated tones in electromagnetic signals
US5796007A (en) 1996-09-23 1998-08-18 Data Instruments, Inc. Differential pressure transducer
US5872628A (en) 1996-09-27 1999-02-16 The Regents Of The University Of California Noise pair velocity and range echo location system
US6940588B2 (en) 1997-02-14 2005-09-06 Jds Uniphase Inc. Measuring response characteristics of an optical component
US5929990A (en) 1997-03-19 1999-07-27 Litton Systems, Inc. Fabry-perot pressure sensing system with ratioed quadrature pulse detection
US5889590A (en) 1997-03-28 1999-03-30 General Electric Company Optical cavity sensor
US5852498A (en) 1997-04-04 1998-12-22 Kairos Scientific Inc. Optical instrument having a variable optical filter
US6281976B1 (en) 1997-04-09 2001-08-28 The Texas A&M University System Fiber optic fiber Fabry-Perot interferometer diaphragm sensor and method of measurement
US5949740A (en) 1997-06-06 1999-09-07 Litton Systems, Inc. Unbalanced fiber optic Michelson interferometer as an optical pick-off
US5963321A (en) 1997-07-31 1999-10-05 Virginia Tech Intellectual Properties, Inc. Self-calibrating optical fiber pressure, strain and temperature sensors
IL121509A (en) 1997-08-11 2000-02-17 Eci Telecom Ltd Device and method for monitoring and controlling laser wavelength
CA2301069C (fr) 1997-08-19 2004-11-23 University Of Maryland Reseau de capteurs a fibres optiques a multiplexage rapide sur grande echelle
US6016702A (en) 1997-09-08 2000-01-25 Cidra Corporation High sensitivity fiber optic pressure sensor for use in harsh environments
US5986749A (en) 1997-09-19 1999-11-16 Cidra Corporation Fiber optic sensing system
DE69833232T2 (de) 1997-10-20 2006-09-28 Nippon Telegraph And Telephone Corp. Vorrichtung zur Erzeugung optischer Pakete mit scheibenförmigem abstimmbarem optischem Filter
US5923030A (en) 1997-11-10 1999-07-13 The United States Of America As Represented By The Secretary Of The Navy System and method for recovering a signal of interest from a phase modulated signal using quadrature sampling
US20010013934A1 (en) 1997-11-15 2001-08-16 Malcolm Paul Varnham Seismic sensor with interferometric sensing apparatus
US6057911A (en) 1997-11-17 2000-05-02 Northrop Grumman Corporation Fiber optic fabry-perot sensor for measuring absolute strain
US5999261A (en) 1998-02-10 1999-12-07 Seagate Technology, Inc. Split phase high performance, high frequency, high dynamic range interferometer
US6151114A (en) 1998-03-31 2000-11-21 The Boeing Company Coherent laser warning system
US6667935B2 (en) 1998-04-03 2003-12-23 The Board Of Trustees Of The Leland Stanford Junior University Apparatus and method for processing optical signals from two delay coils to increase the dynamic range of a sagnac-based fiber optic sensor array
DE19817357B4 (de) 1998-04-18 2008-10-30 Robert Bosch Gmbh Mikromechanisches Bauelement
US6115521A (en) * 1998-05-07 2000-09-05 Trw Inc. Fiber/waveguide-mirror-lens alignment device
RU2152601C1 (ru) 1998-06-16 2000-07-10 Научный центр волоконной оптики при Институте общей физики РАН Волоконно-оптический датчик давления (его варианты) и способ его изготовления
US5949801A (en) 1998-07-22 1999-09-07 Coretek, Inc. Tunable laser and method for operating the same
US6118534A (en) 1998-07-30 2000-09-12 B. F. Goodrich Company Sensor and method for measuring changes in environmental conditions
US6522797B1 (en) 1998-09-01 2003-02-18 Input/Output, Inc. Seismic optical acoustic recursive sensor system
US6137621A (en) 1998-09-02 2000-10-24 Cidra Corp Acoustic logging system using fiber optics
US6078706A (en) 1998-09-22 2000-06-20 The United States Of America As Represented By The Secretary Of The Navy Quasi-static fiber pressure sensor
US6122415A (en) 1998-09-30 2000-09-19 Blake; James N. In-line electro-optic voltage sensor
US6331892B1 (en) 1998-10-16 2001-12-18 New Focus, Inc. Interferometer for monitoring wavelength in an optical beam
US6282215B1 (en) 1998-10-16 2001-08-28 New Focus, Inc. Continuously-tunable external cavity laser
CA2353567C (fr) 1998-12-04 2007-11-20 Cidra Corporation Sonde manometrique a reseau de bragg
BR9915956B1 (pt) 1998-12-04 2011-10-18 sensor de pressão, e, método para sensoriar pressão.
US6310990B1 (en) 2000-03-16 2001-10-30 Cidra Corporation Tunable optical structure featuring feedback control
US6396605B1 (en) 1999-01-26 2002-05-28 Trw Inc. Apparatus and method for tuning an optical interferometer
US6330388B1 (en) 1999-01-27 2001-12-11 Northstar Photonics, Inc. Method and apparatus for waveguide optics and devices
US6075613A (en) 1999-02-26 2000-06-13 General Scanning, Inc. Optical scanner calibration device
US6714566B1 (en) 1999-03-01 2004-03-30 The Regents Of The University Of California Tunable laser source with an integrated wavelength monitor and method of operating same
US6545760B1 (en) 1999-03-25 2003-04-08 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Apparatus and method for measuring strain in optical fibers using rayleigh scatter
KR100332833B1 (ko) 1999-04-23 2002-04-17 윤덕용 투과형 외인성 패브리-페롯 광섬유 센서와, 이를 이용한 변형률 및 온도 측정방법
US6771905B1 (en) 1999-06-07 2004-08-03 Corvis Corporation Optical transmission systems including optical switching devices, control apparatuses, and methods
US6486984B1 (en) 1999-06-07 2002-11-26 Agilent Technologies, Inc. Wavelength monitor using hybrid approach
US6469817B1 (en) 1999-06-18 2002-10-22 Trw Inc. Apparatus and method employing two optical signals for stabilizing an optical interferometer
GB2353139B (en) 1999-08-12 2001-08-29 United Microelectronics Corp Inductor and method of manufacturing the same
EP1212581A4 (fr) 1999-08-23 2003-01-02 Coretek Inc Dispositif de reference en longueur d'onde
US6178001B1 (en) 1999-09-08 2001-01-23 Nortel Networks Limited Method and apparatus for optical frequency modulation characterization of laser sources
NO324337B1 (no) 1999-09-15 2007-09-24 Optoplan As Anordning for maling av optiske bolgelengder
US6493088B1 (en) 1999-10-04 2002-12-10 Nortel Networks Limited Method and apparatus for high resolution monitoring of optical signals
US6212306B1 (en) 1999-10-07 2001-04-03 David J. F. Cooper Method and device for time domain demultiplexing of serial fiber Bragg grating sensor arrays
US6439055B1 (en) 1999-11-15 2002-08-27 Weatherford/Lamb, Inc. Pressure sensor assembly structure to insulate a pressure sensing device from harsh environments
US6388434B1 (en) 2000-01-17 2002-05-14 Bechtel Bwxt Idaho, Llc Electro-optic high voltage sensor
US6304686B1 (en) 2000-02-09 2001-10-16 Schlumberger Technology Corporation Methods and apparatus for measuring differential pressure with fiber optic sensor systems
EP1254356A1 (fr) 2000-02-11 2002-11-06 Rosemount, Inc. Capteur de pression differentielle sans huile
US6496265B1 (en) 2000-02-16 2002-12-17 Airak, Inc. Fiber optic sensors and methods therefor
JP3288672B2 (ja) 2000-02-17 2002-06-04 科学技術振興事業団 試料の物理的性質の測定装置
US6603560B1 (en) 2000-03-15 2003-08-05 The Regents Of The University Of Michigan High sensitivity fiber optic interferometric MEMS
US6583882B2 (en) 2000-03-17 2003-06-24 Honeywell International Inc. Apparatus and method using digitally controlled integration for signal detection with improved noise characteristics
DE10014175C2 (de) 2000-03-23 2002-12-12 Daimler Chrysler Ag Anordnung aus mehreren faseroptischen Bragg-Gitter-Sensoren und Verfahren zur Meßwertbestimmung in einer solchen
JP4460031B2 (ja) * 2000-03-28 2010-05-12 古河電気工業株式会社 アレイ導波路型回折格子
US6328647B1 (en) 2000-04-06 2001-12-11 Jon E. Traudt Pressure differential detecting system, and method of use
US6538748B1 (en) 2000-04-14 2003-03-25 Agilent Technologies, Inc Tunable Fabry-Perot filters and lasers utilizing feedback to reduce frequency noise
NL1015131C1 (nl) 2000-04-16 2001-10-19 Tmp Total Micro Products B V Inrichting en werkwijze voor het schakelen van elektromagnetische signalen of bundels.
DE10021669A1 (de) 2000-05-05 2001-11-08 Abb Research Ltd Faseroptischer Stromsensor
US6608685B2 (en) 2000-05-15 2003-08-19 Ilx Lightwave Corporation Tunable Fabry-Perot interferometer, and associated methods
US6838660B2 (en) 2000-06-02 2005-01-04 Airak, Inc. Fiber optic sensor system and method for measuring the pressure of media
US6668105B2 (en) 2000-07-27 2003-12-23 Systems Planning & Analysis, Inc. Fiber optic strain sensor
US6333941B1 (en) 2000-08-01 2001-12-25 Micro Photonix Integration Corporation Tunable optical transmitter and tunable light source
US6674928B2 (en) 2000-08-01 2004-01-06 The United States Of America As Represented By The Secretary Of The Navy Optical sensing device containing fiber Bragg gratings
US6687036B2 (en) 2000-11-03 2004-02-03 Nuonics, Inc. Multiplexed optical scanner technology
US6747743B2 (en) 2000-11-10 2004-06-08 Halliburton Energy Services, Inc. Multi-parameter interferometric fiber optic sensor
US6785004B2 (en) 2000-11-29 2004-08-31 Weatherford/Lamb, Inc. Method and apparatus for interrogating fiber optic sensors
US20020109081A1 (en) 2000-12-20 2002-08-15 Tarvin Jeffrey A. Measuring system with comb filter interferometer and multiplexer
KR100388499B1 (ko) 2000-12-22 2003-06-25 한국전자통신연구원 가변광필터 및 그 가변광필터를 이용한 광통신 소자
US6690687B2 (en) 2001-01-02 2004-02-10 Spectrasensors, Inc. Tunable semiconductor laser having cavity with ring resonator mirror and mach-zehnder interferometer
WO2002063372A1 (fr) 2001-01-16 2002-08-15 Santur Corporation Dispositif optique accordable utilisant un miroir a systeme microelectromecanique a balayage
US6597458B2 (en) 2001-02-02 2003-07-22 Texas Christian University Method and system for stabilizing and demodulating an interferometer at quadrature
US6778307B2 (en) 2001-02-21 2004-08-17 Beyond 3, Inc. Method and system for performing swept-wavelength measurements within an optical system
US6735224B2 (en) 2001-03-01 2004-05-11 Applied Optoelectronics, Inc. Planar lightwave circuit for conditioning tunable laser output
US6925213B2 (en) 2001-03-09 2005-08-02 University Of Cincinnati Micromachined fiber optic sensors
US6581465B1 (en) 2001-03-14 2003-06-24 The United States Of America As Represented By The Secretary Of The Navy Micro-electro-mechanical systems ultra-sensitive accelerometer
US6717965B2 (en) 2001-07-06 2004-04-06 Intel Corporation Graded thin film wedge interference filter and method of use for laser tuning
US6643025B2 (en) 2001-03-29 2003-11-04 Georgia Tech Research Corporation Microinterferometer for distance measurements
AU2002256193A1 (en) 2001-04-11 2002-10-28 Modern Optical Technologies Llc. Method and apparatus for measuring pressure
GB2375184A (en) 2001-05-02 2002-11-06 Marconi Caswell Ltd Wavelength selectable optical filter
US20030020926A1 (en) 2001-05-15 2003-01-30 Nicolae Miron Tunable band pass optical filter unit with a tunable band pass interferometer
US6909548B2 (en) 2001-06-13 2005-06-21 Jds Uniphase Inc. Optical filter using a linear variable filter with elliptical beam geometry
US6898338B2 (en) 2001-06-18 2005-05-24 Weatherford/Lamb, Inc. Fabry-Perot sensing element based on a large-diameter optical waveguide
US6915048B2 (en) 2001-06-18 2005-07-05 Cidra Corporation Fabry-perot filter/resonator
US6668111B2 (en) 2001-06-28 2003-12-23 The Charles Stark Draper Laboratory Optical microcavity resonator sensor
US6901088B2 (en) 2001-07-06 2005-05-31 Intel Corporation External cavity laser apparatus with orthogonal tuning of laser wavelength and cavity optical pathlength
US6822979B2 (en) 2001-07-06 2004-11-23 Intel Corporation External cavity laser with continuous tuning of grid generator
US6631146B2 (en) 2001-07-06 2003-10-07 Intel Corporation Tunable laser control system
EP1421421A4 (fr) 2001-07-20 2005-10-05 Essex Corp Procede et appareil de traitement de signaux optiques via une ligne a retard a derivation optique
WO2003012531A1 (fr) 2001-08-02 2003-02-13 Aegis Semiconductor Instruments optiques accordables
US6741357B2 (en) 2001-08-14 2004-05-25 Seagate Technology Llc Quadrature phase shift interferometer with unwrapping of phase
US6914681B2 (en) 2001-08-22 2005-07-05 Agilent Technologies, Inc. Interferometric optical component analyzer based on orthogonal filters
US6882428B2 (en) 2001-08-28 2005-04-19 Agilent Technologies, Inc. Optical analyzer and method for reducing relative intensity noise in interferometric optical measurements using a continuously tunable laser
US6985235B2 (en) 2001-08-30 2006-01-10 Micron Optics, Inc. Cascaded fiber fabry-perot filters
KR100419424B1 (ko) 2001-09-22 2004-02-19 삼성전자주식회사 파장 분할 다중화 시스템에서의 광신호 성능 검사 장치
US6549687B1 (en) 2001-10-26 2003-04-15 Lake Shore Cryotronics, Inc. System and method for measuring physical, chemical and biological stimuli using vertical cavity surface emitting lasers with integrated tuner
WO2003040648A1 (fr) 2001-11-05 2003-05-15 Zygo Corporation Compensation d'erreur cyclique interferometrique
NO315177B1 (no) 2001-11-29 2003-07-21 Sinvent As Optisk forskyvnings-sensor
US6776049B2 (en) 2001-12-07 2004-08-17 Alliant Techsystems Inc. System and method for measuring stress at an interface
US6894787B2 (en) * 2001-12-21 2005-05-17 Honeywell International Inc. Optical pressure sensor
US20030132375A1 (en) 2002-01-17 2003-07-17 Blazo Stephen Frank Tunable laser calibration system
US6816514B2 (en) 2002-01-24 2004-11-09 Np Photonics, Inc. Rare-earth doped phosphate-glass single-mode fiber lasers
KR100412324B1 (ko) 2002-01-28 2003-12-31 주식회사 아이세스 다중형 광섬유 브래그 그레이팅 센서 시스템
US7230959B2 (en) 2002-02-22 2007-06-12 Intel Corporation Tunable laser with magnetically coupled filter
US6868736B2 (en) 2002-02-22 2005-03-22 Sentec Corporation Ultra-miniature optical pressure sensing system
US6650420B2 (en) 2002-02-27 2003-11-18 The United States Of America As Represented By The Secretary Of The Navy Nanoscale vibrometric measurement apparatus and method
US6825934B2 (en) 2002-03-14 2004-11-30 Agilent Technologies, Inc. Vibration noise mitigation in an interferometric system
US7317739B2 (en) 2002-03-15 2008-01-08 Princeton University Mode-locked laser using a mode-locking wavelength selective reflector
US6917736B1 (en) 2002-05-09 2005-07-12 Purdue Research Foundation Method of increasing number of allowable channels in dense wavelength division multiplexing
US7009691B2 (en) 2002-05-29 2006-03-07 Agilent Technologies, Inc. System and method for removing the relative phase uncertainty in device characterizations performed with a polarimeter
US6647160B1 (en) 2002-06-17 2003-11-11 National Chiao Tung University Fiber bragg grating sensor system
DE60202137T2 (de) 2002-06-19 2005-03-31 John R. Sandercock Stabilisiertes Fabry-Perot Interferometer und Verfahren zum Stabilisieren eines Fabry-Perot Interferometers
US6850461B2 (en) 2002-07-18 2005-02-01 Pgs Americas, Inc. Fiber-optic seismic array telemetry, system, and method
TW531671B (en) 2002-07-22 2003-05-11 Delta Electronics Inc Tunable filter applied in optical networks
US6947218B2 (en) 2002-08-30 2005-09-20 Research Electro-Optics, Inc. Fabry-perot etalon with independently selectable resonance frequency and free spectral range
US7139081B2 (en) 2002-09-09 2006-11-21 Zygo Corporation Interferometry method for ellipsometry, reflectometry, and scatterometry measurements, including characterization of thin film structures
WO2004029671A2 (fr) 2002-09-26 2004-04-08 Prime Photonics, Inc. Stabilisation du point q actif destine a des capteurs interferometriques lineaires
US6901176B2 (en) 2002-10-15 2005-05-31 University Of Maryland Fiber tip based sensor system for acoustic measurements
US6842254B2 (en) 2002-10-16 2005-01-11 Fiso Technologies Inc. System and method for measuring an optical path difference in a sensing interferometer
TW557365B (en) 2002-10-16 2003-10-11 Delta Electronics Inc Fabry-Perot device compensating for an error of full width at half maximum and method of making the same
US6933491B2 (en) 2002-12-12 2005-08-23 Weatherford/Lamb, Inc. Remotely deployed optical fiber circulator
ES2294086T3 (es) 2002-12-16 2008-04-01 Aston Photonic Technologies Ltd. Sistema de interrogacion de una red de guias de onda opticas y sistema sensor.
US6898339B2 (en) 2002-12-16 2005-05-24 Schlumberger Technology Corporation Multiple mode pre-loadable fiber optic pressure and temperature sensor
WO2004059357A1 (fr) 2002-12-20 2004-07-15 Micron Optics, Inc. Support de ferrule a compensation thermique pour un filtre fabry-perot a fibre
US7065108B2 (en) 2002-12-24 2006-06-20 Electronics And Telecommunications Research Institute Method of wavelength tuning in a semiconductor tunable laser
JP4062606B2 (ja) 2003-01-20 2008-03-19 フジノン株式会社 低可干渉測定／高可干渉測定共用干渉計装置およびその測定方法
US7139295B2 (en) 2003-01-27 2006-11-21 Fibera, Inc. Tunable wavelength locker, tunable wavelength spectrum monitor, and relative wavelength measurement system
GB0302434D0 (en) 2003-02-03 2003-03-05 Sensor Highway Ltd Interferometric method and apparatus for measuring physical parameters
US6886404B2 (en) 2003-02-05 2005-05-03 Fibersonde Corporation Fiber optic accelerometer
US7047816B2 (en) 2003-03-21 2006-05-23 Weatherford/Lamb, Inc. Optical differential pressure transducer utilizing a bellows and flexure system
US6879421B2 (en) 2003-03-28 2005-04-12 Beyond 3, Inc. Method and system for performing swept-wavelength measurements within an optical system incorporating a reference resonator
US6955085B2 (en) 2003-06-02 2005-10-18 Weatherford/Lamb, Inc. Optical accelerometer or displacement device using a flexure system
US7099015B2 (en) 2003-08-25 2006-08-29 Ivan Melnyk Fiber optic sensing device for measuring a physical parameter
US7019837B2 (en) 2003-08-27 2006-03-28 Weatherford/Lamb, Inc Method and apparatus for reducing crosstalk interference in an inline Fabry-Perot sensor array
WO2005024365A2 (fr) 2003-09-04 2005-03-17 Luna Energy, Llc Capteur optique avec capteurs de pression et de temperature co-implantes
BRPI0414871A (pt) 2003-10-03 2006-11-28 Sabeus Inc sensor de pressão fabry-perot reforçado
US20050073690A1 (en) 2003-10-03 2005-04-07 Abbink Russell E. Optical spectroscopy incorporating a vertical cavity surface emitting laser (VCSEL)
US6829073B1 (en) 2003-10-20 2004-12-07 Corning Incorporated Optical reading system and method for spectral multiplexing of resonant waveguide gratings
US7173713B2 (en) * 2004-03-04 2007-02-06 Virginia Tech Intellectual Properties, Inc. Optical fiber sensors for harsh environments
US7183531B2 (en) 2004-03-31 2007-02-27 Micron Technology, Inc. Amplification with feedback capacitance for photodetector signals
US7355726B2 (en) 2004-04-15 2008-04-08 Davidson Instruments Inc. Linear variable reflector sensor and signal processor
EP1586854A3 (fr) 2004-04-15 2006-02-08 Davidson Instruments Conditionneur de signal interféromètrique pour la mesure de la longueur absolue d'entrefers dans un interféromètre Fabry-Pérot à fibres optiques
US7492463B2 (en) 2004-04-15 2009-02-17 Davidson Instruments Inc. Method and apparatus for continuous readout of Fabry-Perot fiber optic sensor
US7305158B2 (en) 2004-04-15 2007-12-04 Davidson Instruments Inc. Interferometric signal conditioner for measurement of absolute static displacements and dynamic displacements of a Fabry-Perot interferometer
US7134346B2 (en) 2004-04-15 2006-11-14 Davidson Instruments Inc. Differential pressure transducer with Fabry-Perot fiber optic displacement sensor
US7187453B2 (en) 2004-04-23 2007-03-06 Opsens Inc. Optical MEMS cavity having a wide scanning range for measuring a sensing interferometer
US20050242096A1 (en) 2004-04-29 2005-11-03 Jaghab John J Safety cup lip
US20060034569A1 (en) 2004-08-11 2006-02-16 General Electric Company Novel folded Mach-Zehnder interferometers and optical sensor arrays
US7511823B2 (en) 2004-12-21 2009-03-31 Halliburton Energy Services, Inc. Fiber optic sensor
US7864329B2 (en) 2004-12-21 2011-01-04 Halliburton Energy Services, Inc. Fiber optic sensor system having circulators, Bragg gratings and couplers
US7835598B2 (en) 2004-12-21 2010-11-16 Halliburton Energy Services, Inc. Multi-channel array processor
EP1869737B1 (fr) 2005-03-16 2021-05-12 Davidson Instruments, Inc. Capteur fabry-perot haute intensite
US7405829B2 (en) 2005-06-17 2008-07-29 Jds Uniphase Corporation Apparatus and method for characterizing pulsed optical signals
WO2007033069A2 (fr) 2005-09-13 2007-03-22 Davidson Instruments Inc. Algorithme de poursuite pour processeur de signal a reseau lineaire a schemas de correlation croisee de fabry-perot et son procede d'utilisation
US20080297808A1 (en) 2005-12-06 2008-12-04 Nabeel Agha Riza Optical Sensor For Extreme Environments
US20070252998A1 (en) 2006-03-22 2007-11-01 Berthold John W Apparatus for continuous readout of fabry-perot fiber optic sensor
US7434472B2 (en) 2006-03-31 2008-10-14 Leitko Travis W Differential pressure transducer configurations including displacement sensor
US7684051B2 (en) 2006-04-18 2010-03-23 Halliburton Energy Services, Inc. Fiber optic seismic sensor based on MEMS cantilever
US7743661B2 (en) 2006-04-26 2010-06-29 Halliburton Energy Services, Inc. Fiber optic MEMS seismic sensor with mass supported by hinged beams
US8115937B2 (en) 2006-08-16 2012-02-14 Davidson Instruments Methods and apparatus for measuring multiple Fabry-Perot gaps
US7787128B2 (en) 2007-01-24 2010-08-31 Halliburton Energy Services, Inc. Transducer for measuring environmental parameters

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4572669A (en) 1979-01-22 1986-02-25 Rockwell International Corporation Method and apparatus for a Fabry-Perot multiple beam fringe sensor
US5349439A (en) 1989-01-18 1994-09-20 Photonetics Opto-electronic measuring device with optical air wedge spectral analysis arrangement
US5920670A (en) 1996-06-07 1999-07-06 3M Innovative Properties Company Multiple alignment connector ferrule
US6430337B1 (en) 1998-09-03 2002-08-06 Agere Systems Optoelectronics Guardian Corp. Optical alignment system
US20020016536A1 (en) 1999-03-12 2002-02-07 Cas Medical Systems, Inc. Laser diode optical transducer assembly for non-invasive spectrophotometric blood oxygenation monitoring
US6854899B1 (en) 1999-05-20 2005-02-15 Tyco Electronics Amp Gmbh Ferrule for an optical fiber and process for fastening the ferrule on the optical fiber
US20030039428A1 (en) 2000-09-20 2003-02-27 Koji Okamoto Optical fiber interferosensor, signal-processing system for optical fiber interferosensor and recording medium
US20040086228A1 (en) 2002-11-04 2004-05-06 Harris Corporation And Florida Institute Of Technology Fiber optic fabry-perot interferometer and associated methods
US20050036742A1 (en) 2003-08-29 2005-02-17 Dean David L. Molded fiber optic ferrule with integrally formed geometry features

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1869737A4

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EP1869737A4 (fr) 2011-06-29
EP1869737B1 (fr) 2021-05-12
US20090207417A1 (en) 2009-08-20
WO2006101923A3 (fr) 2008-01-17
US20060274323A1 (en) 2006-12-07
US7782465B2 (en) 2010-08-24
EP1869737A2 (fr) 2007-12-26

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