WO2005109482A1

WO2005109482A1 - Gas supply integration unit

Info

Publication number: WO2005109482A1
Application number: PCT/JP2005/007308
Authority: WO
Inventors: Akihiro Takeichi; Tatsuhito Aoyama; Toshikazu Miwa; Takashi Inoue
Original assignee: Ckd Corporation
Priority date: 2004-05-10
Filing date: 2005-04-15
Publication date: 2005-11-17
Also published as: KR20070011549A; CN100440454C; TWI343464B; CN1950931A; JP4567370B2; TW200538678A; JP2005322797A; KR101074265B1

Abstract

A gas supply integration unit for supplying a process gas, which is liable to be liquefied at room temperatures and pressures, while heating and insulating the process gas. The unit comprises a plurality of gas units. Each gas unit is formed of a first manual valve (22) installed in an outlet flow passage, an air operated valve (26) installed at a position where the first manual valve (22) is allowed to communicate with a process gas common flow passage (44), and a second manual valve (25) installed at a position where the first manual valve (22) is allowed to communicate with a purge gas common flow passage (43) which are integrally connected in series to each other through flow passage blocks (46) and unit fixing plates (15). The unit also comprises holding members (18) formed in a U-shape in cross section and to which the flow passage blocks (46) and the unit fixing plates (15) are fitted and plane heaters (16) fixedly held between the holding members (18), the flow passage blocks (46), and the unit fixing plates (15).

Description

Specification

Gas supply integrated unit

Technical field

The present invention relates to a gas supply integrated unit used in a semiconductor manufacturing apparatus or the like, and more particularly, to dichlorosilane which is liable to liquefy unless external heat is removed at room temperature where the vaporization temperature is high. (Or dichlorosilane), WF6, HBr, etc. It is related to a gas supply integrated unit that supplies process gas with high accuracy without liquefaction.

Background art

[0002] Conventionally, as an insulating film in a semiconductor integrated circuit, a silicon oxide thin film or the like formed by a vapor phase has been frequently used. The vapor phase film formation of strong silicon oxide or the like is generally performed by a chemical vapor deposition method on a wafer placed in a film forming tank.

[0003] When a process gas is supplied, which easily liquefies dichlorosilane (or dichlorosilane) or the like, it is necessary to heat a high-pressure cylinder, a pipe, a mass flow controller, a reaction chamber, and the like, which are supply routes of the process gas. . The reason is that if dichlorosilane (or dichlorosilane) is mixed in the middle of the supply route, the flow rate cannot be measured accurately, and the performance of the manufactured semiconductor integrated circuit or the like deteriorates. In addition, there was a problem b that dichlorosilane (or dichlorosilane) or the like clogged the thin tube of the solenoid valve equipped with a mass flow meter and made flow measurement inaccurate.

In order to prevent liquefaction of process gas such as dichlorosilane (or dichlorosilane), the gas supply device of Patent Document 1 uses, for example, piping, fittings, gas valves 62 and 64, and an electromagnetic valve with a mass flow meter as shown in FIG. On both sides of the gas unit constituted by the valve 61, etc., the tape-shaped heater 60 is held and arranged in holding grooves 53, 54 formed in the heat transfer block 51 and the sub heat transfer block 52. Thereby, the dichlorosilane (or dichlorosilane) or the like is heated and kept at a temperature higher than the vaporization temperature.

As shown in FIG. 10, the upper surface of the heat transfer block 51 is a contact surface 65 that contacts the solenoid valve 61 with a mass flow meter from below, and heats and heats the solenoid valve 61 with a mass flow meter. Is Patent document 1: JP-A-7-286720

Disclosure of the invention

Problems to be solved by the invention

[0004] However, the gas supply device of Patent Document 1 has the following problems.

(1) To reduce the cost of the gas supply device, miniaturization and integration are desired. However, the gas supply device shown in Fig. 9 has a heat transfer block 51 and a sub heat transfer block on both sides of the gas unit. Since the tape-shaped heaters 60 are provided in the holding grooves 53 and 54 formed in the gas unit 52, the width of the gas unit is larger than that of the gas unit that does not require a heater.

(2) The gas supply device requires many components for heating and keeping heat, such as the heater 60, the heat transfer block 51, and the sub-heat transfer block 52, on both sides of the gas unit, resulting in high costs.

Accordingly, it is an object of the present invention to provide a gas supply integrated unit for supplying a process gas which can easily be liquefied at normal temperature and normal pressure while heating and maintaining the temperature so as to solve the above problem.

Means for solving the problem

[0005] The gas supply integrated unit of the present invention has the following configuration in order to solve the above problems.

(1) A first manual valve provided in the outlet flow path, an air operated valve provided at a position communicating the first manual valve with the process gas common flow path, and a common flow of the purge gas and the first manual valve. A second manual valve provided at a position communicating with the passage is integrally connected in series with the passage block and the unit fixing plate, and the cross section of the gas supply integrated unit having a plurality of gas units is U-shaped. A holding member into which the flow path block and the unit fixing plate are fitted, and a flat heater sandwiched and fixed between the holding member and the flow path block and the unit fixing plate. It is characterized by having.

(2) In the gas supply integrated unit according to (1), the gas unit is fitted to the holding member, and a rail to be fastened, and a plate-like shape sandwiched between the holding member and the rail. And a spacer member.

(3) In the gas supply integrated unit according to (1), one or two or more flat heaters disposed in contact with the bottom surface of the gas unit, and a holding member for holding the flat heater, A holding member fixing plate for fixing the holding member by sandwiching the flat heater between the holding member, the flow path block, and the unit fixing plate is provided.

The invention's effect

[0006] The gas supply integrated unit of the present invention has the following functions and effects.

The gas supply integrated unit of the present invention includes a first manual valve provided in an outlet flow path, an air operated valve provided at a position communicating the first manual valve with a process gas common flow path, In a gas supply integrated unit including a plurality of gas units in which a manual valve and a second manual valve provided at a position communicating the purge gas common flow path are integrally connected in series by a flow path block and a unit fixing plate, Is a U-shape, and a holding member to which the flow path block and the unit fixing plate are fitted is fixed between the holding member, the flow path block and the unit fixing plate. Since the gas unit has the flat heater, the external dimensions of the gas unit can be made exactly the same as those of the gas unit which does not require the flat heater. Therefore, the outer dimensions do not change even in the entire gas supply integrated unit in which the gas units are integrated. Furthermore, since the channel block of the gas unit and the unit fixing plate are heated and maintained from the back, only one flat heater and one holding member are required for one gas unit as components for heating and maintaining the temperature. Therefore, the number of parts can be reduced and the cost can be reduced.

[0007] Further, the gas supply integrated unit of the present invention has a plate-like shape in which the gas unit is fitted to and fastened to the holding member, and a rail which is held between the holding member and the rail. Since there is a spacer member, by removing the spacer member, the flat heater can be removed and another flat heater can be mounted while maintaining the state in which the gas supply integrated pipe can be used. . Thus, the replacement of the flat heater is easy and the maintenance is easy. In addition, the gas supply integrated unit of the present invention includes one or more flat heaters disposed in contact with the bottom surface of the gas unit, a holding member for holding the flat heater, and a holding member for holding the flat heater. Since a holding member fixing plate for fixing the holding member is provided between the member and the flow path block and the unit fixing plate, the gas heater does not require one flat heater and one holding member for each gas unit. If the plane heater and the holding member are one or two or more in the entire supply and accumulation unit, the number of parts for heating and keeping the gas supply and accumulation unit is small, and the cost can be reduced. Furthermore, the number of flat heaters is reduced. By doing so, wiring becomes easy, and the flat heater can be easily replaced.

Brief Description of Drawings

FIG. 1 is a plan view showing a configuration of a gas supply integrated unit according to a first embodiment of the present invention.

FIG. 2 is a front view of a gas supply integrated unit according to a first embodiment of the present invention.

FIG. 3 is a circuit diagram showing the configuration of FIG. 1.

FIG. 4 is a perspective view showing an assembling order of the gas unit according to the first embodiment of the present invention.

FIG. 5 is a cross-sectional view taken along a line AA in FIG. 1.

FIG. 6 is a view showing attachment and detachment of a heater 16 in FIG.

FIG. 7 is a plan view showing a configuration of a gas supply integrated unit according to a second embodiment of the present invention.

FIG. 8 is a sectional view taken along the line BB of FIG. 7.

FIG. 9 is a perspective view of a conventional gas supply device.

FIG. 10 is a diagram illustrating the heat transfer block of FIG. 9.

Explanation of symbols

[0009] 10 Renole

12 Renole

15 Unit fixing plate

16 Flat heater

17 Flat heater

18 Holding member

19 Spacer material

22 1st manual valve

25 2nd manual valve

26 Air operated valve

43 Common purge gas flow path

44 Process gas common flow path

46 Flow path block

47 Holding member fixing plate

48 Holding member BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of a gas supply integrated unit according to the present invention will be described with reference to the accompanying drawings.

(First Example)

FIG. 1 is a plan view showing the configuration of a gas supply integrated unit that supplies process gas to five lines, and FIG. 2 is a front view of FIG. FIG. 3 shows the circuit diagram of FIG.

The two rails 10 and 12 are fixed at both ends in parallel by rail fixing bars 13 and 14. Retainer fixing rods 13, 14 mm parallel bars, purge gas unit, process gas unit, gas units A, B, C, D, E from left to right along rails 10, 12 by unit fixing plate 15, respectively Is mounted so as to be able to move in parallel. The circuit configuration of the equipment to be installed in each of the purge gas unit, process gas unit, and gas units A, B, C, D, and E is shown in Fig. 3.The purge gas manual valve 29 is not shown via the purge gas supply port 28! Connect with The purge gas manual valve 29 is connected to one port of the second manual valves 25A, 25B, 25C, 25D, and 25E via the air operated valve 32, the check valve 33, and the purge gas common flow path 43. A pressure gauge 31 is connected to a flow path that connects the purge gas manual valve 29 and the air operated valve 32. The other ports of the second manual valves 25A, 25B, 25C, 25D, 25E are connected to one port of the regulators 24A, 24B, 24C, 24D, 24E.

The process gas manual valve 35 is connected to a process gas tank (not shown) via a process gas supply port 34. The process gas manual valve 35 is connected to one of the air operated valves 26A, 26B, 26C, 26D, and 26E via an air operated valve 37 and a process gas common flow path 44. A pressure gauge 36 is connected to a flow path connecting the process gas manual valve 35 and the air operated valve 37.

The other ports of the air operated valves 26A, 26B, 26C, 26D, 26E are connected to one port of the regulators 24A, 24B, 24C, 24D, 24E. The other ports of the regulators 24A, 24B, 24C, 24D, 24E are connected to the process gas outlets 21A, 21B, 21C, 21D, 21E via the first manual valves 22A, 22B, 22C, 22D, 22E. . Regulators 24A, 24B, 24C, 24D, 24E communicate with the first manual valves 22A, 22B, 22C, 22D, 22E. Pressure gauges 23A, 23B, 23C, 23D, 23E are connected to the road.

The end of the process gas common flow path 44 is sealed by the process gas common flow path end manual valve 41. The end of the purge gas common flow path 43 is sealed by a purge gas common flow path end manual valve 38.

FIG. 4 is a perspective view showing an assembling sequence of a gas unit of one line of the gas supply integrated unit. The same applies to any of the gas units, namely the gas unit, process gas unit and gas units A, B, C, D and E. In the gas unit, each device is integrally connected in series by a unit fixing plate 15 via a flow path block 46 (see FIG. 2). The unit fixing plate 15 and the flat heater 16 disposed below the unit fixing plate 15 are fitted to the U-shaped cross section of the holding member 18. The unit fixing plate 15 is fixed to the rails 10 and 12 by fastening means 20 by holding a plate-shaped spacer member 19 between the holding member 18 and the rails 10 and 12.

[0014] The operation and effect of the gas supply integrated unit according to the first embodiment of the present invention thus provided will be described. First, the overall operation of the gas supply integrated unit will be described. When supplying the process gas to the semiconductor manufacturing process, open the process gas manual valve 35 and the first manual valves 22A, 22B, 22C, 22D and 22E, and operate the air operated valve 37 and the air operated valves 26A, 26B, 26C and 26D. , 26E open by signal. The purge gas manual valve 29 and the second manual valves 25A, 25B, 25C, 25D, and 25E of the purge gas circuit are closed, and the air operated valve 32 is closed by a signal. As a result, process gas is supplied from a process gas tank (not shown) to the process gas supply port 34, the process gas manual valve 35, the air operated valve 37, the process gas common flow path 44, and the air operated valves 26A, 26B, 26C, 26D, 26E. Flow to the regulators 24A, 24B, 24C, 24D, and 24E, and the first manual valves 22A, 22B, 22C, 22D, and 22E also pass through the process gas outputs PI 21A, 21B, 21C, 21D, and 21E. It flows to the supply destination.

Next, when the maintenance of the gas unit needs to be performed, the maintenance is performed after the supply of the process gas is stopped. At this time, since the circuit is exposed to the atmosphere, a purge gas, which is a nitrogen gas, is introduced into the circuit to remove moisture in the atmosphere. That is, the process gas manual valve 35 is closed, and the air operate valve 37 is closed by a signal to shut off the flow of the process gas. o Then, open the manual gas valve 29 and the second manual valves 25A, 25B, 25C, 25D, and 25E, and open the air operated valve 32 by a signal. In this way, a purge gas, which is a nitrogen gas, is introduced into each line of the gas units A, B, C, D and E from a purge gas tank (not shown). That is, the purge gas passes through the purge gas manual valve 29, the air operated valve 32, the check valve 33, the purge gas common flow path 43, the second manual valve 25A, 25B, 25C, 25D, 25E, and the regulators 24A, 24B, It flows to 24C, 24D, 24E, and the first manual valves 22A, 22B, 22C, 22D, 22E are also discharged to the exhaust system via the process gas outlets 21A, 21B, 21C, 21D, 21E. After a predetermined time, the purge gas manual valve 29 and the second manual valves 25A, 25B, 25C, 25D, and 25E are closed, and the air operated valve 32 is closed by a signal to stop the flow of the purge gas.

Next, the operation of the flat heater 16 will be described. The same applies to the purge gas unit, the process gas unit, and the gas units A, B, C, D, and E. The plane heater 16 is disposed below the unit fixing plate 15 and is fitted to the U-shaped cross section of the holding member 18. When the plane heater 16 is energized to generate Joule heat while the process gas is flowing through the gas supply integrated unit, the heat is transferred via the unit fixing plate 15 to the purge gas unit, the process gas unit, and the gas unit A. , B, C, D, and E are transmitted to the flow path block 46 and the equipment attached to the flow path block 46. In this manner, heat is transferred to the devices attached to the flow path block 46 and the unit fixing plate 15 of the gas unit, so that the temperature inside the gas unit through which the process gas flows is maintained at or above the condensation temperature of the process gas. You. Accordingly, it is possible to prevent various inconveniences caused by the process gas being liquefied in the process gas unit and the gas units A, B, C, D, and E.

Next, the operation of the spacer member 19 will be described with reference to FIG. 5 showing a cross section taken along the line AA of FIG. 1 and FIG. 6 showing attachment and detachment of the flat heater 16. The same applies to the force purge gas unit, process gas unit, and gas units A, B, C, and D described in the cross-sectional view of the gas unit E. The unit fixing plate 15 and the flat heater 16 disposed below the unit fixing plate 15 are fitted into the U-shaped cross section of the holding member 18, and the unit fixing plate 15 is attached to the holding member 18, the rail 10, and the rail. A plate-shaped spacer member 19 is sandwiched between the rails 12 and fixed to the rails 10 and 12 by fastening means 20. When the flat heater 16 needs to be replaced, the gas supply integrated unit can be used by removing the fastening means 20 and removing the spacer member 16. 6, the flat heater 16 can be removed and another flat heater 16 can be attached as shown in FIG.

As described in detail above, according to the gas supply integrated unit of the first embodiment, the first manual valve 22 provided in the outlet flow path, the first manual valve 22 and the process gas common flow path 44 An air operated valve 26 provided at a position communicating the first manual valve 22 and a second manual valve 25 provided at a position communicating the first manual valve 22 and the purge gas common flow path 43 are provided with a flow path block 46 and a unit fixing plate 1. In a gas supply integrated unit including a plurality of gas units connected in series and integrally by 5, a cross-section is U-shaped, and a holding member 18 to which the flow path block 46 and the unit fixing plate 15 are fitted is provided. Since the gas heater has a flat heater 16 sandwiched and fixed between the holding member 18, the flow path block 46 and the unit fixing plate 15, the outer dimensions of the gas unit are completely different from those of the gas unit which does not require the flat heater 16. Can be the same. Therefore, the outer dimensions do not change even in the entire gas supply integrated unit in which the gas units are integrated. In addition, since the flow path block 46 of the gas unit and the unit fixing plate 15 are back-heated and heat-retained, one flat heater and one holding member are provided for one gas unit as heat-insulation parts. Just required, cost can be reduced by reducing the number of parts.

Further, according to the gas supply integrated unit of the first embodiment, the gas unit is fitted to the holding member 18 and the rails 10 and 12 to be fastened, and the space between the holding member 18 and the rail 10 and the rail 12 is narrow. Since it has the plate-shaped spacer member 19 to be held, the flat heater 16 can be easily replaced and maintenance is easy. That is, by removing the spacer member 19, the flat heater 16 can be removed and another flat heater 16 can be attached while the gas supply integrated unit can be used.

(Second embodiment)

Next, a second embodiment of the gas supply integrated unit according to the present invention will be described with reference to the accompanying drawings. FIG. 7 is a plan view showing the configuration of the gas supply integrated unit similar to that of FIG. 1, and FIG. 8 shows a cross section taken along the line BB of FIG. Two rails 10, 12 Force Both ends are fixed in parallel by rail fixing rods 13, 14. The purge gas unit, process gas unit, and gas units A, B, C, D, and E move from left to right along the rails 10 and 12 in parallel with the rail fixing bars 13 and 14, respectively, by the unit fixing plate 15. Mounted as possible. The plane heater 17 has a force of one sheet or two or more sheets. FIGS. 7 and 8 show an example of two sheets. The two flat heaters 17 are in contact with the lower part of the unit fixing plate 15 to which the purge gas unit, the process gas unit, and the gas units A, B, C, D, and E are fixed, respectively, and extend in the longitudinal direction of the unit fixing plate 15. They are arranged orthogonally. The two flat heaters 17 are held by holding members 48, respectively, and the holding members 48 are fixed by fastening means 49 and two holding member fixing plates 47. One holding member fixing plate 47 is mounted on the left side of the process gas unit in parallel with the rail fixing bar 13, and the other holding member fixing plate 47 is mounted on the right side of the gas unit E in parallel with the rail fixing bar 14. . The two holding member fixing plates 47 are fixed at both ends to the rails 10 and 12, respectively.

The operation and effect of the gas supply integrated unit according to the second embodiment of the present invention will be described. The operation of the gas supply integrated unit as a whole is the same as in the first embodiment, and will not be described. The plane heater 17 is disposed in contact with the lower part of the unit fixing plate 15 and is held by a holding member 48. When the process heater is energized while the process gas is flowing through the gas supply integrated unit to generate Joule heat, the heat is transmitted via the unit fixing plate 15 to the purge gas unit, the process gas unit, and the gas unit A. , B, C, D, and E are transmitted to the equipment attached to the flow path block 46. In this way, heat is transferred to the devices attached to the flow path block 46 of each unit, so that the temperature inside the gas unit through which the process gas flows is maintained at or above the condensation temperature of the process gas. Therefore, it is possible to prevent various problems caused by liquefaction of the process gas in the process gas units and the gas cuts A, B, C, D, and E.

Next, the attachment / detachment of the flat heater 17 will be described with reference to a plan view showing the configuration of the gas supply integrated unit of the second embodiment in FIG. 7 and FIG. There are two flat heaters 17 on the left and right as viewed from the right side of FIG. The mounting state of the left plane heater 17 shows a state in which the holding member 48 is not tightened by the fastening means 49 in FIG. 8, and the mounting state of the right plane heater 17 in FIG. Indicates the state of being tightened by 49. For example, when the right side heater 17 needs to be replaced when viewed from the right side direction in FIG. 7, the state of the left side heater 17 is also checked by looking at the right side force in FIG. 7 (see FIG. 8). Then, while maintaining the state in which the gas supply integrated unit can be used, the flat heater 17 was pulled out in the direction of arrow K1 shown in FIG. 7, removed, and another flat heater 17 was inserted in the direction of arrow K2 shown in FIG. After that, the holding member 48 is fixed to the holding member fixing plate 47 by the fastening means 49.

As described in detail above, according to the gas supply integrated unit of the second embodiment, one or more flat heaters 17 disposed in contact with the bottom surface of the gas cut, and the flat heater 17 17 and a holding member fixing plate 47 for fixing the holding member 48 by sandwiching the flat heater 17 between the holding member 48, the flow path block 46 and the unit fixing 15. The external dimensions of the gas unit can be made exactly the same as those of the gas unit that does not require the flat heater 17. Therefore, the external dimensions do not change even in the entire gas supply integrated unit in which the gas units are integrated. Furthermore, one flat heater 17 and one holding member 48 are not required for each gas unit, and the flat heater 17 and the holding member 48 need only be one or two or more in the entire gas supply integrated unit. Therefore, the number of components for heating and keeping the gas supply integrated unit is small and the cost can be reduced. Further, since the number of the flat heaters 17 is reduced, wiring becomes easy, and the flat heaters 17 can be easily replaced.

Although one embodiment of the present invention has been described, the present invention is not limited to the above-described embodiment, and various applications are possible.

For example, in the above embodiment, the air supply valve is mounted on the gas supply integrated unit. However, the type and arrangement of the mounted fluid control devices are not limited thereto, and can be changed as appropriate.

For example, in the second embodiment, when attaching and detaching the flat heater 7, the flat heater 17 is pulled out in the direction of arrow K1 shown in FIG. 7 and removed, and another flat heater 17 is inserted in the direction of arrow K2 shown in FIG. The flat heater 17 may be pulled out in the direction of arrow K2 shown in FIG. 7 and removed, and another flat heater 17 may be inserted in the direction of arrow K1 shown in FIG.

Claims

The scope of the claims

[1] A first manual valve provided in an outlet flow path, an air operated valve provided in a position communicating the first manual valve with a process gas common flow path, and a common purge gas with the first manual valve. A second manual valve provided at a position that communicates with the flow path is integrally connected in series by a flow path block and a unit fixing plate. A holding member into which the flow path block and the unit fixing plate are fitted,

A gas supply integrated unit, comprising: a flat heater sandwiched and fixed between the holding member, the flow path block, and the unit fixing plate.

[2] In the gas supply integrated unit according to claim 1,

A gas supply assembly comprising: a rail to which the gas unit is fitted and fastened to the holding member; and a plate-shaped spacer member sandwiched between the holding member and the rail. unit.

[3] In the gas supply integrated unit according to claim 1,

One or more flat heaters disposed in contact with the bottom surface of the gas unit, a holding member for holding the flat heater,

A gas supply integrated unit comprising: a holding member fixing plate for fixing the holding member by sandwiching the flat heater between the holding member, the flow path block, and the unit fixing plate.