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WO2004095553A3 - Verfahren zur herstellung einer verspannten schicht auf einem substrat und schichtstruktur - Google Patents

Verfahren zur herstellung einer verspannten schicht auf einem substrat und schichtstruktur Download PDF

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Publication number
WO2004095553A3
WO2004095553A3 PCT/DE2004/000780 DE2004000780W WO2004095553A3 WO 2004095553 A3 WO2004095553 A3 WO 2004095553A3 DE 2004000780 W DE2004000780 W DE 2004000780W WO 2004095553 A3 WO2004095553 A3 WO 2004095553A3
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WO
WIPO (PCT)
Prior art keywords
layer
producing
substrate
strained
layer structure
Prior art date
Application number
PCT/DE2004/000780
Other languages
English (en)
French (fr)
Other versions
WO2004095553A2 (de
Inventor
Siegfried Mantl
Bernhard Hollaender
Original Assignee
Forschungszentrum Juelich Gmbh
Siegfried Mantl
Bernhard Hollaender
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Forschungszentrum Juelich Gmbh, Siegfried Mantl, Bernhard Hollaender filed Critical Forschungszentrum Juelich Gmbh
Priority to EP04727506A priority Critical patent/EP1616346A2/de
Priority to JP2006504301A priority patent/JP5065676B2/ja
Priority to US10/553,562 priority patent/US7416965B2/en
Publication of WO2004095553A2 publication Critical patent/WO2004095553A2/de
Publication of WO2004095553A3 publication Critical patent/WO2004095553A3/de

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/26—Bombardment with radiation
    • H01L21/263—Bombardment with radiation with high-energy radiation
    • H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
    • H01L21/26506—Bombardment with radiation with high-energy radiation producing ion implantation in group IV semiconductors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02439—Materials
    • H01L21/02441—Group 14 semiconducting materials
    • H01L21/0245—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/791—Arrangements for exerting mechanical stress on the crystal lattice of the channel regions
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/751—Insulated-gate field-effect transistors [IGFET] having composition variations in the channel regions

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Recrystallisation Techniques (AREA)

Abstract

Die Erfindung betrifft ein Verfahren zur Herstellung einer Schichtstruktur umfassend eine verspannte Schicht auf einem Substrat mit den Schritten: Erzeugung eines Defektbereichs in einem zu der zu verspannenden Schicht benachbarten Schicht, Relaxation mindestens einer zu der verspannenden Schicht benachbarten Schicht. Der Defektbereich wird insbesondere im Substrat erzeugt. Es können epitaktisch weitere Schichten angeordnet werden. Derartig gebildete Schichtstrukturen sind vorteilhaft geeignet für verschiedenartigste Bauelemente.
PCT/DE2004/000780 2003-04-22 2004-04-15 Verfahren zur herstellung einer verspannten schicht auf einem substrat und schichtstruktur WO2004095553A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP04727506A EP1616346A2 (de) 2003-04-22 2004-04-15 Verfahren zur herstellung einer verspannten schicht auf einem substrat und schichtstruktur
JP2006504301A JP5065676B2 (ja) 2003-04-22 2004-04-15 基板上に歪層を製造する方法及び層構造
US10/553,562 US7416965B2 (en) 2003-04-22 2004-04-15 Method for producing a strained layer on a substrate and corresponding layer structure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10318284A DE10318284A1 (de) 2003-04-22 2003-04-22 Verfahren zur Herstellung einer verspannten Schicht auf einem Substrat und Schichtstruktur
DE10318284.5 2003-04-22

Publications (2)

Publication Number Publication Date
WO2004095553A2 WO2004095553A2 (de) 2004-11-04
WO2004095553A3 true WO2004095553A3 (de) 2004-12-23

Family

ID=33304880

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2004/000780 WO2004095553A2 (de) 2003-04-22 2004-04-15 Verfahren zur herstellung einer verspannten schicht auf einem substrat und schichtstruktur

Country Status (5)

Country Link
US (1) US7416965B2 (de)
EP (1) EP1616346A2 (de)
JP (1) JP5065676B2 (de)
DE (1) DE10318284A1 (de)
WO (1) WO2004095553A2 (de)

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DE102004048096A1 (de) * 2004-09-30 2006-04-27 Forschungszentrum Jülich GmbH Verfahren zur Herstellung einer verspannten Schicht auf einem Substrat und Schichtstruktur
US7229901B2 (en) * 2004-12-16 2007-06-12 Wisconsin Alumni Research Foundation Fabrication of strained heterojunction structures
JP4654710B2 (ja) * 2005-02-24 2011-03-23 信越半導体株式会社 半導体ウェーハの製造方法
FR2891281B1 (fr) * 2005-09-28 2007-12-28 Commissariat Energie Atomique Procede de fabrication d'un element en couches minces.
FR2892855B1 (fr) * 2005-10-28 2008-07-18 Commissariat Energie Atomique Procede de fabrication d'une structure en couches minces et structure en couches minces ainsi obtenue
US7666771B2 (en) * 2005-12-09 2010-02-23 Semequip, Inc. System and method for the manufacture of semiconductor devices by the implantation of carbon clusters
FR2896255B1 (fr) * 2006-01-17 2008-05-09 Soitec Silicon On Insulator Procede d'ajustement de la contrainte d'un substrat en un materiau semi-conducteur
EP1808886A3 (de) * 2006-01-17 2009-08-12 S.O.I.T.E.C. Silicon on Insulator Technologies Verfahren zur Justierung der Beanspruchung eines Substrats in einem Halbleitermaterial
DE102006004870A1 (de) * 2006-02-02 2007-08-16 Siltronic Ag Halbleiterschichtstruktur und Verfahren zur Herstellung einer Halbleiterschichtstruktur
JP4649511B2 (ja) * 2006-02-15 2011-03-09 富士通株式会社 光導波路デバイス
DE102006010273B4 (de) * 2006-03-02 2010-04-15 Forschungszentrum Jülich GmbH Verfahren zur Herstellung einer verspannten Schicht auf einem spannungskompensierten Schichtstapel mit geringer Defektdichte, Schichtstapel und dessen Verwendung
US7514726B2 (en) * 2006-03-21 2009-04-07 The United States Of America As Represented By The Aministrator Of The National Aeronautics And Space Administration Graded index silicon geranium on lattice matched silicon geranium semiconductor alloy
US7888197B2 (en) * 2007-01-11 2011-02-15 International Business Machines Corporation Method of forming stressed SOI FET having doped glass box layer using sacrificial stressed layer
US7494886B2 (en) 2007-01-12 2009-02-24 International Business Machines Corporation Uniaxial strain relaxation of biaxial-strained thin films using ion implantation
US7906358B2 (en) * 2007-10-18 2011-03-15 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Epitaxial growth of cubic crystalline semiconductor alloys on basal plane of trigonal or hexagonal crystal
US7943414B2 (en) * 2008-08-01 2011-05-17 Semiconductor Energy Laboratory Co., Ltd. Method for manufacturing SOI substrate
JP2011166129A (ja) * 2010-01-15 2011-08-25 Sumitomo Chemical Co Ltd 半導体基板、電子デバイス及び半導体基板の製造方法
US8361889B2 (en) * 2010-07-06 2013-01-29 International Business Machines Corporation Strained semiconductor-on-insulator by addition and removal of atoms in a semiconductor-on-insulator
DE102010046215B4 (de) 2010-09-21 2019-01-03 Infineon Technologies Austria Ag Halbleiterkörper mit verspanntem Bereich, Elektronisches Bauelement und ein Verfahren zum Erzeugen des Halbleiterkörpers.
US8501600B2 (en) * 2010-09-27 2013-08-06 Applied Materials, Inc. Methods for depositing germanium-containing layers
US9583364B2 (en) 2012-12-31 2017-02-28 Sunedison Semiconductor Limited (Uen201334164H) Processes and apparatus for preparing heterostructures with reduced strain by radial compression
US9614026B2 (en) 2013-03-13 2017-04-04 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration High mobility transport layer structures for rhombohedral Si/Ge/SiGe devices
FR3003686B1 (fr) * 2013-03-20 2016-11-04 St Microelectronics Crolles 2 Sas Procede de formation d'une couche de silicium contraint
US9305781B1 (en) 2015-04-30 2016-04-05 International Business Machines Corporation Structure and method to form localized strain relaxed SiGe buffer layer
CN111733378B (zh) * 2020-05-15 2022-12-13 中国兵器科学研究院宁波分院 一种钢表面的涂层结构及其制备方法

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WO2002071495A1 (en) * 2001-03-02 2002-09-12 Amberwave Systems Corporation Relaxed silicon germanium platform for high speed cmos electronics and high speed analog circuits
US20020185686A1 (en) * 2001-06-12 2002-12-12 International Business Machines Corporation Relaxed SiGe layers on Si or silicon-on-insulator substrates by ion implantation and thermal annealing
WO2003092058A2 (de) * 2002-04-24 2003-11-06 Forschungszentrum Jülich GmbH Verfahren zur herstellung einer oder mehrerer einkri­stalliner schichten mit jeweils unterschiedlicher gitterstruktur in einer ebene einer schichtenfolge
WO2003098664A2 (en) * 2002-05-15 2003-11-27 The Regents Of The University Of California Method for co-fabricating strained and relaxed crystalline and poly-crystalline structures
WO2004082001A1 (de) * 2003-03-10 2004-09-23 Forschungszentrum Jülich GmbH Verfahren zur herstellung einer spannungsrelaxierten schichtstruktur auf einem nicht gitterangepassten substrat sowie verwendung eines solchen schichtsystems in elektronischen und/oder optoelektronischen bauelementen

Also Published As

Publication number Publication date
WO2004095553A2 (de) 2004-11-04
US7416965B2 (en) 2008-08-26
JP5065676B2 (ja) 2012-11-07
EP1616346A2 (de) 2006-01-18
DE10318284A1 (de) 2004-11-25
JP2006524427A (ja) 2006-10-26
US20060211221A1 (en) 2006-09-21

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