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WO2003024555A2 - Process for controlling the hydraulic chamber pressure of a diaphragm pump - Google Patents

Process for controlling the hydraulic chamber pressure of a diaphragm pump Download PDF

Info

Publication number
WO2003024555A2
WO2003024555A2 PCT/US2002/029542 US0229542W WO03024555A2 WO 2003024555 A2 WO2003024555 A2 WO 2003024555A2 US 0229542 W US0229542 W US 0229542W WO 03024555 A2 WO03024555 A2 WO 03024555A2
Authority
WO
WIPO (PCT)
Prior art keywords
pressure
hydraulic chamber
pump
purge valve
signal
Prior art date
Application number
PCT/US2002/029542
Other languages
French (fr)
Other versions
WO2003024555A3 (en
Inventor
Umetsu Tomonori
Original Assignee
Mykrolis Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mykrolis Corporation filed Critical Mykrolis Corporation
Publication of WO2003024555A2 publication Critical patent/WO2003024555A2/en
Publication of WO2003024555A3 publication Critical patent/WO2003024555A3/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B49/00Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
    • F04B49/02Stopping, starting, unloading or idling control
    • F04B49/022Stopping, starting, unloading or idling control by means of pressure

Definitions

  • This invention generally relates to hydraulic chamber pressure control on a diaphragm pump and specifically to real-time control of the pressure of a hydraulic chamber on diaphragm dispense pumps.
  • Diaphragm pumps are used in pumping a wide variety of materials especially when the materials are abrasive, have high viscosity, consist of slurries that might damage other pump designs, have a high purity requirement or are not robust. These pumps are extremely useful in applications where accuracy and precision are essential, such as for dispensing.
  • U.S. Patent Nos. 6,105,829; 4,690,621; 5,167,837; 5,772,899 and 5,262,068 are examples of diaphragm pumps that dispense fluids with accuracy and precision. Yet, others join such accuracy and precision needs, such as elimination of downtime.
  • the '068 patent emphasizes the importance of the purge valve for purging bubbles from the dispense fluid.
  • the IntelliGen allows the operator only the ability to monitor hydraulic chamber pressure and indicate certain error conditions, via the pump system serial communications line. This system will provide the following pressure indications:
  • Last Filtration Pressure the filtration pressure during the last dispense cycle
  • Last Dispense Pressure the hydraulic chamber pressure at the end of the last dispense
  • the IntelliGen will also provide the following Error indications:
  • This invention provides a process for controlling the pressure of a hydraulic chamber on a diaphragm pump that uses the dispense fluid purge valve, a pressure transducer signal and a cpu.
  • Figure 1 provides a pressure control system diagram.
  • Figure 2 provides a flow chart setting forth how the system works.
  • the present invention provides a process that uses the pressure transducer signal from a pressure transducer on a hydraulic chamber and the dispense fluid purge valve to alleviate pressure on a diaphragm when the hydraulic chamber goes below a predetermined vacuum setpoint. Indeed, the present invention provides a means to prevent pulling vacuum on the hydraulic chamber of a diaphragm dispense pump.
  • the process performs this by using the pressure transducer signal and comparing it against a vacuum set point. Should that setpoint be reached, a cpu will send a signal to the pump motor to stop the motor. Then, a signal is sent to the solenoid valves (sol.vlves) that control the pneumatics that operate the dispense purge valve (purge vlve). By opening this valve, air is allowed into the dispense fluid. This in turn alleviates the vacuum condition on the hydraulic chamber side of the diaphragm by eliminating the pressure from the dispense-fluid side of the diaphragm.
  • the main additional feature of this new pump system software is to provide a level of pressure control that will protect the pump against damage and failure due to operating under a high vacuum condition.
  • the pump system software monitors the hydraulic chamber pressure during dispensing, purging and filtration. When the software detects the pressure exceeding the preset pressure range, it stops the pump operation, opens the purge valve immediately, and indicates an error to the host computer. This is not only for protection from fatal damage and failure, but also for detection of abnormal pump operation.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

A process and system for controlling the pressure of a hydraulic chamber on a diaphragm pump. Such process and system particularly adapted to alleviate vacuum conditions in the diaphragm dispense chamber.

Description

PROCESS FOR CONTROLLING THE HYDRAULIC CHAMBER PRESSURE
OF A DIAPHRAGM PUMP
BACKGROUND OF THE INVENTION
Field of the Invention This invention generally relates to hydraulic chamber pressure control on a diaphragm pump and specifically to real-time control of the pressure of a hydraulic chamber on diaphragm dispense pumps.
Background Information
Diaphragm pumps are used in pumping a wide variety of materials especially when the materials are abrasive, have high viscosity, consist of slurries that might damage other pump designs, have a high purity requirement or are not robust. These pumps are extremely useful in applications where accuracy and precision are essential, such as for dispensing.
U.S. Patent Nos. 6,105,829; 4,690,621; 5,167,837; 5,772,899 and 5,262,068 are examples of diaphragm pumps that dispense fluids with accuracy and precision. Yet, others join such accuracy and precision needs, such as elimination of downtime. The '068 patent, for example, emphasizes the importance of the purge valve for purging bubbles from the dispense fluid.
Current products sold by Mykrolis Corporation of Bedford, Massachusetts, such as the IntelliGen® dispense pump and the RGEN™-01 dispense pump sold by Tokyo Electron Limited of Japan, provide a variety of alarms to the operator so the operator will know when such pumps are not operating according to a specific process.
The IntelliGen allows the operator only the ability to monitor hydraulic chamber pressure and indicate certain error conditions, via the pump system serial communications line. This system will provide the following pressure indications:
• Present Pressure - current hydraulic chamber pressure
• Last Filtration Pressure - the filtration pressure during the last dispense cycle • Last Dispense Pressure - the hydraulic chamber pressure at the end of the last dispense
The IntelliGen will also provide the following Error indications:
• Low pressure during filtration - warning alarm; there is also a command to set the alarm pressure value.
• Filter pressure - warning alarm for clogged filter
What is desirable is for such dispense pumps is to control the hydraulic chamber pressure.
SUMMARY OF THE INVENTION
This invention provides a process for controlling the pressure of a hydraulic chamber on a diaphragm pump that uses the dispense fluid purge valve, a pressure transducer signal and a cpu.
BRIEF DESCRIPTION OF THE DRAWING
Figure 1 provides a pressure control system diagram.
Figure 2 provides a flow chart setting forth how the system works.
DESCRIPTION OF THE SPECIFIC EMBODIMENTS
The present invention provides a process that uses the pressure transducer signal from a pressure transducer on a hydraulic chamber and the dispense fluid purge valve to alleviate pressure on a diaphragm when the hydraulic chamber goes below a predetermined vacuum setpoint. Indeed, the present invention provides a means to prevent pulling vacuum on the hydraulic chamber of a diaphragm dispense pump.
As provided in Figures 1 and 2, the process performs this by using the pressure transducer signal and comparing it against a vacuum set point. Should that setpoint be reached, a cpu will send a signal to the pump motor to stop the motor. Then, a signal is sent to the solenoid valves (sol.vlves) that control the pneumatics that operate the dispense purge valve (purge vlve). By opening this valve, air is allowed into the dispense fluid. This in turn alleviates the vacuum condition on the hydraulic chamber side of the diaphragm by eliminating the pressure from the dispense-fluid side of the diaphragm.
In the case that the internal pressure of hydraulic chamber becomes very high vacuum, there is a possibility of fatal damage on the pump so that the pump cannot maintain dispense volume accuracy and repeatability. The main additional feature of this new pump system software is to provide a level of pressure control that will protect the pump against damage and failure due to operating under a high vacuum condition.
The pump system software monitors the hydraulic chamber pressure during dispensing, purging and filtration. When the software detects the pressure exceeding the preset pressure range, it stops the pump operation, opens the purge valve immediately, and indicates an error to the host computer. This is not only for protection from fatal damage and failure, but also for detection of abnormal pump operation.

Claims

1. A method for controlling the pressure in a hydraulic chamber of a diaphragm pump that includes a pressure transducer, the method comprising: setting a vacuum level setpoint for the hydraulic chamber; monitoring a signal from the pressure transducer; and if the signal exceeds the setpoint, opening a dispense fluid purge valve sufficient to allow the vacuum condition to return above the vacuum level setpoint.
2. The method of claim 1 , wherein the pump is shut off prior to opening the purge valve.
3. The method of claim 1 , wherein the pump is shut off concurrent to opening the purge valve.
4. The method of claim 1 further comprising the step of an error signal being sent to dispense track on which said pump is installed.
5. A system for controlling the pressure in a hydraulic chamber of a diaphragm pump, the system comprising: a pressure transducer configured to sense the pressure of the hydraulic chamber a provide a signal; a purge valve on the pneumatic line; solenoid valves that control said purge valve; a cpu; and control software, whereby the cpu receives a pressure transducer signal that the control software compares against a previously programmed setpoint and if the pressure transducer signal represents that the hydraulic chamber pressure exceeds that setpoint, the control software directs the pump to stop operation and directs the purge valve to open.
PCT/US2002/029542 2001-09-18 2002-09-18 Process for controlling the hydraulic chamber pressure of a diaphragm pump WO2003024555A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US32325301P 2001-09-18 2001-09-18
US60/323,253 2001-09-18

Publications (2)

Publication Number Publication Date
WO2003024555A2 true WO2003024555A2 (en) 2003-03-27
WO2003024555A3 WO2003024555A3 (en) 2004-02-26

Family

ID=23258366

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2002/029542 WO2003024555A2 (en) 2001-09-18 2002-09-18 Process for controlling the hydraulic chamber pressure of a diaphragm pump

Country Status (2)

Country Link
TW (1) TW580478B (en)
WO (1) WO2003024555A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150167659A1 (en) * 2011-08-25 2015-06-18 Ecolab Usa Inc. Diaphragm pump for dosing a fluid capable of automatic degassing and an according method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2631538A (en) * 1949-11-17 1953-03-17 Wilford C Thompson Diaphragm pump
US5295790A (en) * 1992-12-21 1994-03-22 Mine Safety Appliances Company Flow-controlled sampling pump apparatus
US5624394A (en) * 1994-10-28 1997-04-29 Iolab Corporation Vacuum system and a method of operating a vacuum system
US6168048B1 (en) * 1998-09-22 2001-01-02 American Air Liquide, Inc. Methods and systems for distributing liquid chemicals
US6325932B1 (en) * 1999-11-30 2001-12-04 Mykrolis Corporation Apparatus and method for pumping high viscosity fluid

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150167659A1 (en) * 2011-08-25 2015-06-18 Ecolab Usa Inc. Diaphragm pump for dosing a fluid capable of automatic degassing and an according method
US10823164B2 (en) * 2011-08-25 2020-11-03 Ecolab Usa Inc. Diaphragm pump for dosing a fluid capable of automatic degassing and an according method

Also Published As

Publication number Publication date
WO2003024555A3 (en) 2004-02-26
TW580478B (en) 2004-03-21

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