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USD825504S1 - Target profile for a physical vapor deposition chamber target - Google Patents

Target profile for a physical vapor deposition chamber target Download PDF

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Publication number
USD825504S1
USD825504S1 US29/610,166 US201729610166F USD825504S US D825504 S1 USD825504 S1 US D825504S1 US 201729610166 F US201729610166 F US 201729610166F US D825504 S USD825504 S US D825504S
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United States
Prior art keywords
target
vapor deposition
physical vapor
deposition chamber
profile
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US29/610,166
Inventor
Fuhong Zhang
William Johanson
Yu Liu
Adolph Miller Allen
Brij Datta
Keith A. Miller
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Applied Materials Inc
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Applied Materials Inc
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Priority to US29/610,166 priority Critical patent/USD825504S1/en
Assigned to APPLIED MATERIALS, INC. reassignment APPLIED MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ALLEN, ADOLPH MILLER, DATTA, Brij, JOHANSON, WILLIAM, LIU, YU, MILLER, KEITH A, ZHANG, FUHONG
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FIG. 1 is a perspective view of a target profile for a physical vapor deposition chamber target, showing my new design;
FIG. 2 is a top plan view thereof;
FIG. 3 is a bottom plan view thereof;
FIG. 4 is a left side elevation view thereof;
FIG. 5 is a right side elevation view thereof;
FIG. 6 is a back elevation view thereof;
FIG. 7 is a front elevation view thereof; and,
FIG. 8 is a cross sectional view taken along line 8-8 of FIG. 2.
The dashed lines in FIGS. 1-8 represent disclaimed matter that forms no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a target profile for a physical vapor deposition chamber target, as shown and described.
US29/610,166 2015-04-21 2017-07-10 Target profile for a physical vapor deposition chamber target Active USD825504S1 (en)

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US29/524,557 USD797067S1 (en) 2015-04-21 2015-04-21 Target profile for a physical vapor deposition chamber target
US29/610,166 USD825504S1 (en) 2015-04-21 2017-07-10 Target profile for a physical vapor deposition chamber target

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