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USD563949S1 - Microwave introducing antenna for a plasma processing apparatus - Google Patents

Microwave introducing antenna for a plasma processing apparatus Download PDF

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Publication number
USD563949S1
USD563949S1 US29/281,079 US28107907F USD563949S US D563949 S1 USD563949 S1 US D563949S1 US 28107907 F US28107907 F US 28107907F US D563949 S USD563949 S US D563949S
Authority
US
United States
Prior art keywords
processing apparatus
plasma processing
microwave introducing
introducing antenna
antenna
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
US29/281,079
Inventor
Jun Yamashita
Cai zhong Tian
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: TIAN, CAI ZHONG, YAMASHITA, JUN
Application granted granted Critical
Publication of USD563949S1 publication Critical patent/USD563949S1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

FIG. 1 is a front view of a microwave introducing antenna for a plasma processing apparatus showing our new design:
FIG. 2 is a right side view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a sectional view taken along line 4—4 of FIG. 1 thereof; and,
FIG. 5 is a perspective view thereof.

Claims (1)

    CLAIM
  1. The ornamental design for a microwave introducing antenna for a plasma processing apparatus, as shown.
US29/281,079 2006-12-15 2007-06-14 Microwave introducing antenna for a plasma processing apparatus Expired - Lifetime USD563949S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006-034513 2006-02-10
JP2006034513 2006-12-15

Publications (1)

Publication Number Publication Date
USD563949S1 true USD563949S1 (en) 2008-03-11

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ID=39155853

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/281,079 Expired - Lifetime USD563949S1 (en) 2006-12-15 2007-06-14 Microwave introducing antenna for a plasma processing apparatus

Country Status (2)

Country Link
US (1) USD563949S1 (en)
TW (1) TWD123706S1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD572707S1 (en) * 2006-12-15 2008-07-08 Tokyo Electron Limited Microwave introducing antenna for a plasma processing apparatus
USD589034S1 (en) * 2006-12-15 2009-03-24 Tokyo Electron Limited Microwave introducing antenna for a plasma processing apparatus

Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0248806B2 (en) 1984-05-22 1990-10-26 Matsushita Electric Ind Co Ltd NENSHOSOCHI
US5175561A (en) * 1989-08-21 1992-12-29 Radial Antenna Laboratory, Ltd. Single-layered radial line slot antenna
JPH0590834A (en) 1991-04-30 1993-04-09 Toppan Printing Co Ltd Production of radial line slot antenna
JPH05226927A (en) 1992-02-14 1993-09-03 Mitsubishi Electric Corp Slot array antenna
JPH0567918B2 (en) 1984-01-25 1993-09-27 Matsushita Electric Works Ltd
US5661498A (en) * 1992-12-18 1997-08-26 Toppan Printing Co., Ltd. Polarization-universal radial line slot antenna
US6124833A (en) * 1996-12-18 2000-09-26 The University Of Queensland Radial line slot antenna
US20020020498A1 (en) * 2000-05-26 2002-02-21 Tadahiro Ohmi Plasma processing apparatus and plasma processing method
US20040021611A1 (en) * 2001-07-31 2004-02-05 Tamotsu Iida Plane antenna and method for manufacturing the same
US20040036660A1 (en) * 2002-08-21 2004-02-26 Huor Ou Hok Radial line slot antenna
US20050211382A1 (en) * 2000-03-30 2005-09-29 Tokyo Electron Ltd. Plasma processing apparatus
US20050250338A1 (en) * 1997-01-29 2005-11-10 Tadahiro Ohmi Plasma device
US20060118241A1 (en) * 2001-03-28 2006-06-08 Tadahiro Ohmi & Tokyo Electron Limited Plasma processing apparatus
US20070134895A1 (en) * 2002-05-16 2007-06-14 Tokyo Electron Limited Nitriding method of gate oxide film
US7233297B1 (en) * 2004-07-13 2007-06-19 Hrl Laboratories, Llc Steerable radial line slot antenna
US20070163617A1 (en) * 2004-02-19 2007-07-19 Tokyo Electron Limited Method for cleaning treatment chamber iIn substrate treating apparatus and method for detecting endpoint of cleaning

Patent Citations (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0567918B2 (en) 1984-01-25 1993-09-27 Matsushita Electric Works Ltd
JPH0248806B2 (en) 1984-05-22 1990-10-26 Matsushita Electric Ind Co Ltd NENSHOSOCHI
US5175561A (en) * 1989-08-21 1992-12-29 Radial Antenna Laboratory, Ltd. Single-layered radial line slot antenna
JPH0590834A (en) 1991-04-30 1993-04-09 Toppan Printing Co Ltd Production of radial line slot antenna
JPH05226927A (en) 1992-02-14 1993-09-03 Mitsubishi Electric Corp Slot array antenna
US5661498A (en) * 1992-12-18 1997-08-26 Toppan Printing Co., Ltd. Polarization-universal radial line slot antenna
US6124833A (en) * 1996-12-18 2000-09-26 The University Of Queensland Radial line slot antenna
US20050250338A1 (en) * 1997-01-29 2005-11-10 Tadahiro Ohmi Plasma device
US20050211382A1 (en) * 2000-03-30 2005-09-29 Tokyo Electron Ltd. Plasma processing apparatus
US20020020498A1 (en) * 2000-05-26 2002-02-21 Tadahiro Ohmi Plasma processing apparatus and plasma processing method
US20060118241A1 (en) * 2001-03-28 2006-06-08 Tadahiro Ohmi & Tokyo Electron Limited Plasma processing apparatus
US20040021611A1 (en) * 2001-07-31 2004-02-05 Tamotsu Iida Plane antenna and method for manufacturing the same
US20070134895A1 (en) * 2002-05-16 2007-06-14 Tokyo Electron Limited Nitriding method of gate oxide film
US20040036660A1 (en) * 2002-08-21 2004-02-26 Huor Ou Hok Radial line slot antenna
US20070163617A1 (en) * 2004-02-19 2007-07-19 Tokyo Electron Limited Method for cleaning treatment chamber iIn substrate treating apparatus and method for detecting endpoint of cleaning
US7233297B1 (en) * 2004-07-13 2007-06-19 Hrl Laboratories, Llc Steerable radial line slot antenna

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD572707S1 (en) * 2006-12-15 2008-07-08 Tokyo Electron Limited Microwave introducing antenna for a plasma processing apparatus
USD589034S1 (en) * 2006-12-15 2009-03-24 Tokyo Electron Limited Microwave introducing antenna for a plasma processing apparatus

Also Published As

Publication number Publication date
TWD123706S1 (en) 2008-07-11

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