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USD1110977S1 - Susceptor - Google Patents

Susceptor

Info

Publication number
USD1110977S1
USD1110977S1 US29/954,966 US202429954966F USD1110977S US D1110977 S1 USD1110977 S1 US D1110977S1 US 202429954966 F US202429954966 F US 202429954966F US D1110977 S USD1110977 S US D1110977S
Authority
US
United States
Prior art keywords
susceptor
view
elevational view
ornamental design
side elevational
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/954,966
Inventor
Takafumi Kido
Masataka Iwasaki
Takuto UMETSU
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nuflare Technology Inc
Original Assignee
Nuflare Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nuflare Technology Inc filed Critical Nuflare Technology Inc
Application granted granted Critical
Publication of USD1110977S1 publication Critical patent/USD1110977S1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Description

FIG. 1 is a front perspective view of a susceptor showing our new design;
FIG. 2 is a rear perspective view thereof;
FIG. 3 is a front elevational view thereof;
FIG. 4 is a rear elevational view thereof;
FIG. 5 is a left side elevational view thereof;
FIG. 6 is a right side elevational view thereof;
FIG. 7 is a top plan view thereof;
FIG. 8 is a bottom plan view thereof; and,
FIG. 9 is a cross sectional view taken along line 9-9 in FIG. 3 .

Claims (1)

    CLAIM
  1. The ornamental design for a susceptor as shown and described.
US29/954,966 2024-02-13 2024-07-30 Susceptor Active USD1110977S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2024-002982D 2024-02-13
JP2024002982F JP1773329S (en) 2024-02-13 2024-02-13 Susceptor

Publications (1)

Publication Number Publication Date
USD1110977S1 true USD1110977S1 (en) 2026-02-03

Family

ID=91483714

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/954,966 Active USD1110977S1 (en) 2024-02-13 2024-07-30 Susceptor

Country Status (2)

Country Link
US (1) USD1110977S1 (en)
JP (1) JP1773329S (en)

Citations (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3295559A (en) * 1962-09-17 1967-01-03 Union Carbide Corp Induction heating susceptor and method for producing same
US5584936A (en) * 1995-12-14 1996-12-17 Cvd, Incorporated Susceptor for semiconductor wafer processing
US6214122B1 (en) * 1997-03-17 2001-04-10 Motorola, Inc. Rapid thermal processing susceptor
US20030085223A1 (en) * 2001-09-28 2003-05-08 Neilson Zeng Patterned microwave susceptor element and microwave container incorporating same
US20040011293A1 (en) * 2002-07-16 2004-01-22 International Business Machines Corporation Susceptor pocket with beveled projection sidewall
US20050217585A1 (en) * 2004-04-01 2005-10-06 Blomiley Eric R Substrate susceptor for receiving a substrate to be deposited upon
US20050223994A1 (en) * 2004-04-08 2005-10-13 Blomiley Eric R Substrate susceptors for receiving semiconductor substrates to be deposited upon and methods of depositing materials over semiconductor substrates
US20050284372A1 (en) * 2004-06-28 2005-12-29 Applied Materials, Inc. Chamber component having grooved surface with depressions
US20060057826A1 (en) * 2002-12-09 2006-03-16 Koninklijke Philips Electronics N.V. System and method for suppression of wafer temperature drift in cold-wall cvd systems
US20070144442A1 (en) * 2005-12-22 2007-06-28 Kyocera Corporation Susceptor
USD559993S1 (en) * 2005-03-30 2008-01-15 Tokyo Electron Limited Cover ring
USD559994S1 (en) * 2005-03-30 2008-01-15 Tokyo Electron Limited Cover ring
US7459057B2 (en) * 1998-05-15 2008-12-02 Applied Materials, Inc. Substrate retainer
US20120263569A1 (en) * 2011-04-14 2012-10-18 Scott Wayne Priddy Substrate holders and methods of substrate mounting
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD743357S1 (en) * 2013-03-01 2015-11-17 Asm Ip Holding B.V. Susceptor
US20150368829A1 (en) * 2014-06-23 2015-12-24 Applied Materials, Inc. Substrate thermal control in an epi chamber
US20160133504A1 (en) * 2014-11-12 2016-05-12 Applied Materials, Inc. Susceptor design to reduce edge thermal peak
USD770992S1 (en) * 2015-06-12 2016-11-08 Hitachi High-Technologies Corporation Electrode cover for a plasma processing apparatus
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
US20170117228A1 (en) * 2015-10-27 2017-04-27 Siltronic Ag Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer
USD810705S1 (en) * 2016-04-01 2018-02-20 Veeco Instruments Inc. Self-centering wafer carrier for chemical vapor deposition
US20180144969A1 (en) * 2016-11-18 2018-05-24 Applied Materials, Inc. Hybrid substrate carrier
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor
US20210066113A1 (en) * 2017-09-07 2021-03-04 Showa Denko K.K. Susceptor, cvd apparatus, and method for manufacturing epitaxial wafer
US20210202294A1 (en) * 2019-12-26 2021-07-01 Showa Denko K.K. Susceptor
US20210225688A1 (en) * 2020-01-21 2021-07-22 Asm Ip Holding B.V. Susceptor with sidewall humps for uniform deposition
US20210375663A1 (en) * 2018-10-04 2021-12-02 Toyo Tanso Co., Ltd. Susceptor
US20220013337A1 (en) * 2020-07-08 2022-01-13 Taiwan Semiconductor Manufacturing Company Limited Plasma etcher edge ring with a chamfer geometry and impedance design
US20220246462A1 (en) * 2019-04-16 2022-08-04 Tokai Carbon Korea Co., Ltd Sic edge ring
JP1741174S (en) 2022-10-20 2023-04-06 Susceptor
JP1741176S (en) 2022-10-20 2023-04-06 Cover base for susceptor
JP1745924S (en) 2022-10-20 2023-06-08 Susceptor
JP1745873S (en) 2022-10-20 2023-06-08 Susceptor
USD992614S1 (en) * 2018-12-06 2023-07-18 Tokyo Electron Limited Focus ring
JP1766095S (en) 2023-12-01 2024-03-19 susceptor
USD1030687S1 (en) * 2022-05-31 2024-06-11 Asm Ip Holding B.V. Susceptor
US20240243002A1 (en) * 2023-01-16 2024-07-18 Ngk Insulators, Ltd. Ceramic susceptor
USD1037186S1 (en) * 2021-10-22 2024-07-30 Nuflare Technology, Inc. Susceptor ring
US20240282618A1 (en) * 2023-02-20 2024-08-22 Kioxia Corporation Jig, semiconductor manufacturing apparatus, and method of operating semiconductor manufacturing apparatus
USD1047884S1 (en) * 2021-10-22 2024-10-22 Nuflare Technology, Inc. Susceptor cover
USD1067204S1 (en) * 2022-05-31 2025-03-18 Asm Ip Holding B.V. Susceptor
USD1079661S1 (en) * 2023-08-31 2025-06-17 Kokusai Electric Corporation Susceptor of semiconductor manufacturing apparatus
USD1082731S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1082729S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor cover
USD1082728S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1093328S1 (en) * 2023-01-11 2025-09-16 Nuflare Technology, Inc. Susceptor
USD1094323S1 (en) * 2023-01-11 2025-09-23 Nuflare Technology, Inc. Susceptor unit
USD1094321S1 (en) * 2022-10-20 2025-09-23 Nuflare Technology, Inc. Susceptor cover

Patent Citations (52)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3295559A (en) * 1962-09-17 1967-01-03 Union Carbide Corp Induction heating susceptor and method for producing same
US5584936A (en) * 1995-12-14 1996-12-17 Cvd, Incorporated Susceptor for semiconductor wafer processing
US6214122B1 (en) * 1997-03-17 2001-04-10 Motorola, Inc. Rapid thermal processing susceptor
US7459057B2 (en) * 1998-05-15 2008-12-02 Applied Materials, Inc. Substrate retainer
US20030085223A1 (en) * 2001-09-28 2003-05-08 Neilson Zeng Patterned microwave susceptor element and microwave container incorporating same
US20040011293A1 (en) * 2002-07-16 2004-01-22 International Business Machines Corporation Susceptor pocket with beveled projection sidewall
US20060057826A1 (en) * 2002-12-09 2006-03-16 Koninklijke Philips Electronics N.V. System and method for suppression of wafer temperature drift in cold-wall cvd systems
US20050217585A1 (en) * 2004-04-01 2005-10-06 Blomiley Eric R Substrate susceptor for receiving a substrate to be deposited upon
US20050223994A1 (en) * 2004-04-08 2005-10-13 Blomiley Eric R Substrate susceptors for receiving semiconductor substrates to be deposited upon and methods of depositing materials over semiconductor substrates
US20050284372A1 (en) * 2004-06-28 2005-12-29 Applied Materials, Inc. Chamber component having grooved surface with depressions
USD559993S1 (en) * 2005-03-30 2008-01-15 Tokyo Electron Limited Cover ring
USD559994S1 (en) * 2005-03-30 2008-01-15 Tokyo Electron Limited Cover ring
US20070144442A1 (en) * 2005-12-22 2007-06-28 Kyocera Corporation Susceptor
US20120263569A1 (en) * 2011-04-14 2012-10-18 Scott Wayne Priddy Substrate holders and methods of substrate mounting
USD743357S1 (en) * 2013-03-01 2015-11-17 Asm Ip Holding B.V. Susceptor
USD784276S1 (en) * 2013-08-06 2017-04-18 Applied Materials, Inc. Susceptor assembly
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
US20150368829A1 (en) * 2014-06-23 2015-12-24 Applied Materials, Inc. Substrate thermal control in an epi chamber
US20160133504A1 (en) * 2014-11-12 2016-05-12 Applied Materials, Inc. Susceptor design to reduce edge thermal peak
USD770992S1 (en) * 2015-06-12 2016-11-08 Hitachi High-Technologies Corporation Electrode cover for a plasma processing apparatus
US20170117228A1 (en) * 2015-10-27 2017-04-27 Siltronic Ag Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer
USD810705S1 (en) * 2016-04-01 2018-02-20 Veeco Instruments Inc. Self-centering wafer carrier for chemical vapor deposition
US20180144969A1 (en) * 2016-11-18 2018-05-24 Applied Materials, Inc. Hybrid substrate carrier
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
US20210066113A1 (en) * 2017-09-07 2021-03-04 Showa Denko K.K. Susceptor, cvd apparatus, and method for manufacturing epitaxial wafer
US20210375663A1 (en) * 2018-10-04 2021-12-02 Toyo Tanso Co., Ltd. Susceptor
USD864134S1 (en) * 2018-10-24 2019-10-22 Asm Ip Holding B.V. Susceptor
USD992614S1 (en) * 2018-12-06 2023-07-18 Tokyo Electron Limited Focus ring
US20220246462A1 (en) * 2019-04-16 2022-08-04 Tokai Carbon Korea Co., Ltd Sic edge ring
US20210202294A1 (en) * 2019-12-26 2021-07-01 Showa Denko K.K. Susceptor
US20210225688A1 (en) * 2020-01-21 2021-07-22 Asm Ip Holding B.V. Susceptor with sidewall humps for uniform deposition
US20220013337A1 (en) * 2020-07-08 2022-01-13 Taiwan Semiconductor Manufacturing Company Limited Plasma etcher edge ring with a chamfer geometry and impedance design
USD1047884S1 (en) * 2021-10-22 2024-10-22 Nuflare Technology, Inc. Susceptor cover
USD1037186S1 (en) * 2021-10-22 2024-07-30 Nuflare Technology, Inc. Susceptor ring
USD1030687S1 (en) * 2022-05-31 2024-06-11 Asm Ip Holding B.V. Susceptor
USD1067204S1 (en) * 2022-05-31 2025-03-18 Asm Ip Holding B.V. Susceptor
JP1745924S (en) 2022-10-20 2023-06-08 Susceptor
USD1094321S1 (en) * 2022-10-20 2025-09-23 Nuflare Technology, Inc. Susceptor cover
USD1094322S1 (en) * 2022-10-20 2025-09-23 Nuflare Technology, Inc. Susceptor
JP1745873S (en) 2022-10-20 2023-06-08 Susceptor
USD1094320S1 (en) * 2022-10-20 2025-09-23 Nuflare Technology, Inc. Susceptor
JP1741176S (en) 2022-10-20 2023-04-06 Cover base for susceptor
JP1741174S (en) 2022-10-20 2023-04-06 Susceptor
USD1082729S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor cover
USD1082731S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1082728S1 (en) * 2023-01-11 2025-07-08 Nuflare Technology, Inc. Susceptor
USD1093328S1 (en) * 2023-01-11 2025-09-16 Nuflare Technology, Inc. Susceptor
USD1094323S1 (en) * 2023-01-11 2025-09-23 Nuflare Technology, Inc. Susceptor unit
US20240243002A1 (en) * 2023-01-16 2024-07-18 Ngk Insulators, Ltd. Ceramic susceptor
US20240282618A1 (en) * 2023-02-20 2024-08-22 Kioxia Corporation Jig, semiconductor manufacturing apparatus, and method of operating semiconductor manufacturing apparatus
USD1079661S1 (en) * 2023-08-31 2025-06-17 Kokusai Electric Corporation Susceptor of semiconductor manufacturing apparatus
JP1766095S (en) 2023-12-01 2024-03-19 susceptor

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
Epitaxy Wafer Carrier,https://www.semicorex.com/epitaxy-wafer-carrier.html, Copyright © 2023. (Year: 2023). *
TaC Coated Wafer Susceptor,https://www.semicorex.com/tac-coated-wafer-susceptor.html, Copyright © 2023. (Year: 2023). *

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