USD1110977S1 - Susceptor - Google Patents
SusceptorInfo
- Publication number
- USD1110977S1 USD1110977S1 US29/954,966 US202429954966F USD1110977S US D1110977 S1 USD1110977 S1 US D1110977S1 US 202429954966 F US202429954966 F US 202429954966F US D1110977 S USD1110977 S US D1110977S
- Authority
- US
- United States
- Prior art keywords
- susceptor
- view
- elevational view
- ornamental design
- side elevational
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Description
Claims (1)
- The ornamental design for a susceptor as shown and described.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2024-002982D | 2024-02-13 | ||
| JP2024002982F JP1773329S (en) | 2024-02-13 | 2024-02-13 | Susceptor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| USD1110977S1 true USD1110977S1 (en) | 2026-02-03 |
Family
ID=91483714
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US29/954,966 Active USD1110977S1 (en) | 2024-02-13 | 2024-07-30 | Susceptor |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | USD1110977S1 (en) |
| JP (1) | JP1773329S (en) |
Citations (50)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3295559A (en) * | 1962-09-17 | 1967-01-03 | Union Carbide Corp | Induction heating susceptor and method for producing same |
| US5584936A (en) * | 1995-12-14 | 1996-12-17 | Cvd, Incorporated | Susceptor for semiconductor wafer processing |
| US6214122B1 (en) * | 1997-03-17 | 2001-04-10 | Motorola, Inc. | Rapid thermal processing susceptor |
| US20030085223A1 (en) * | 2001-09-28 | 2003-05-08 | Neilson Zeng | Patterned microwave susceptor element and microwave container incorporating same |
| US20040011293A1 (en) * | 2002-07-16 | 2004-01-22 | International Business Machines Corporation | Susceptor pocket with beveled projection sidewall |
| US20050217585A1 (en) * | 2004-04-01 | 2005-10-06 | Blomiley Eric R | Substrate susceptor for receiving a substrate to be deposited upon |
| US20050223994A1 (en) * | 2004-04-08 | 2005-10-13 | Blomiley Eric R | Substrate susceptors for receiving semiconductor substrates to be deposited upon and methods of depositing materials over semiconductor substrates |
| US20050284372A1 (en) * | 2004-06-28 | 2005-12-29 | Applied Materials, Inc. | Chamber component having grooved surface with depressions |
| US20060057826A1 (en) * | 2002-12-09 | 2006-03-16 | Koninklijke Philips Electronics N.V. | System and method for suppression of wafer temperature drift in cold-wall cvd systems |
| US20070144442A1 (en) * | 2005-12-22 | 2007-06-28 | Kyocera Corporation | Susceptor |
| USD559993S1 (en) * | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
| USD559994S1 (en) * | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
| US7459057B2 (en) * | 1998-05-15 | 2008-12-02 | Applied Materials, Inc. | Substrate retainer |
| US20120263569A1 (en) * | 2011-04-14 | 2012-10-18 | Scott Wayne Priddy | Substrate holders and methods of substrate mounting |
| USD724553S1 (en) * | 2013-09-13 | 2015-03-17 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
| USD743357S1 (en) * | 2013-03-01 | 2015-11-17 | Asm Ip Holding B.V. | Susceptor |
| US20150368829A1 (en) * | 2014-06-23 | 2015-12-24 | Applied Materials, Inc. | Substrate thermal control in an epi chamber |
| US20160133504A1 (en) * | 2014-11-12 | 2016-05-12 | Applied Materials, Inc. | Susceptor design to reduce edge thermal peak |
| USD770992S1 (en) * | 2015-06-12 | 2016-11-08 | Hitachi High-Technologies Corporation | Electrode cover for a plasma processing apparatus |
| USD784276S1 (en) * | 2013-08-06 | 2017-04-18 | Applied Materials, Inc. | Susceptor assembly |
| US20170117228A1 (en) * | 2015-10-27 | 2017-04-27 | Siltronic Ag | Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer |
| USD810705S1 (en) * | 2016-04-01 | 2018-02-20 | Veeco Instruments Inc. | Self-centering wafer carrier for chemical vapor deposition |
| US20180144969A1 (en) * | 2016-11-18 | 2018-05-24 | Applied Materials, Inc. | Hybrid substrate carrier |
| USD830981S1 (en) * | 2017-04-07 | 2018-10-16 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate processing apparatus |
| USD864134S1 (en) * | 2018-10-24 | 2019-10-22 | Asm Ip Holding B.V. | Susceptor |
| US20210066113A1 (en) * | 2017-09-07 | 2021-03-04 | Showa Denko K.K. | Susceptor, cvd apparatus, and method for manufacturing epitaxial wafer |
| US20210202294A1 (en) * | 2019-12-26 | 2021-07-01 | Showa Denko K.K. | Susceptor |
| US20210225688A1 (en) * | 2020-01-21 | 2021-07-22 | Asm Ip Holding B.V. | Susceptor with sidewall humps for uniform deposition |
| US20210375663A1 (en) * | 2018-10-04 | 2021-12-02 | Toyo Tanso Co., Ltd. | Susceptor |
| US20220013337A1 (en) * | 2020-07-08 | 2022-01-13 | Taiwan Semiconductor Manufacturing Company Limited | Plasma etcher edge ring with a chamfer geometry and impedance design |
| US20220246462A1 (en) * | 2019-04-16 | 2022-08-04 | Tokai Carbon Korea Co., Ltd | Sic edge ring |
| JP1741174S (en) | 2022-10-20 | 2023-04-06 | Susceptor | |
| JP1741176S (en) | 2022-10-20 | 2023-04-06 | Cover base for susceptor | |
| JP1745924S (en) | 2022-10-20 | 2023-06-08 | Susceptor | |
| JP1745873S (en) | 2022-10-20 | 2023-06-08 | Susceptor | |
| USD992614S1 (en) * | 2018-12-06 | 2023-07-18 | Tokyo Electron Limited | Focus ring |
| JP1766095S (en) | 2023-12-01 | 2024-03-19 | susceptor | |
| USD1030687S1 (en) * | 2022-05-31 | 2024-06-11 | Asm Ip Holding B.V. | Susceptor |
| US20240243002A1 (en) * | 2023-01-16 | 2024-07-18 | Ngk Insulators, Ltd. | Ceramic susceptor |
| USD1037186S1 (en) * | 2021-10-22 | 2024-07-30 | Nuflare Technology, Inc. | Susceptor ring |
| US20240282618A1 (en) * | 2023-02-20 | 2024-08-22 | Kioxia Corporation | Jig, semiconductor manufacturing apparatus, and method of operating semiconductor manufacturing apparatus |
| USD1047884S1 (en) * | 2021-10-22 | 2024-10-22 | Nuflare Technology, Inc. | Susceptor cover |
| USD1067204S1 (en) * | 2022-05-31 | 2025-03-18 | Asm Ip Holding B.V. | Susceptor |
| USD1079661S1 (en) * | 2023-08-31 | 2025-06-17 | Kokusai Electric Corporation | Susceptor of semiconductor manufacturing apparatus |
| USD1082731S1 (en) * | 2023-01-11 | 2025-07-08 | Nuflare Technology, Inc. | Susceptor |
| USD1082729S1 (en) * | 2023-01-11 | 2025-07-08 | Nuflare Technology, Inc. | Susceptor cover |
| USD1082728S1 (en) * | 2023-01-11 | 2025-07-08 | Nuflare Technology, Inc. | Susceptor |
| USD1093328S1 (en) * | 2023-01-11 | 2025-09-16 | Nuflare Technology, Inc. | Susceptor |
| USD1094323S1 (en) * | 2023-01-11 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor unit |
| USD1094321S1 (en) * | 2022-10-20 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor cover |
-
2024
- 2024-02-13 JP JP2024002982F patent/JP1773329S/en active Active
- 2024-07-30 US US29/954,966 patent/USD1110977S1/en active Active
Patent Citations (52)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3295559A (en) * | 1962-09-17 | 1967-01-03 | Union Carbide Corp | Induction heating susceptor and method for producing same |
| US5584936A (en) * | 1995-12-14 | 1996-12-17 | Cvd, Incorporated | Susceptor for semiconductor wafer processing |
| US6214122B1 (en) * | 1997-03-17 | 2001-04-10 | Motorola, Inc. | Rapid thermal processing susceptor |
| US7459057B2 (en) * | 1998-05-15 | 2008-12-02 | Applied Materials, Inc. | Substrate retainer |
| US20030085223A1 (en) * | 2001-09-28 | 2003-05-08 | Neilson Zeng | Patterned microwave susceptor element and microwave container incorporating same |
| US20040011293A1 (en) * | 2002-07-16 | 2004-01-22 | International Business Machines Corporation | Susceptor pocket with beveled projection sidewall |
| US20060057826A1 (en) * | 2002-12-09 | 2006-03-16 | Koninklijke Philips Electronics N.V. | System and method for suppression of wafer temperature drift in cold-wall cvd systems |
| US20050217585A1 (en) * | 2004-04-01 | 2005-10-06 | Blomiley Eric R | Substrate susceptor for receiving a substrate to be deposited upon |
| US20050223994A1 (en) * | 2004-04-08 | 2005-10-13 | Blomiley Eric R | Substrate susceptors for receiving semiconductor substrates to be deposited upon and methods of depositing materials over semiconductor substrates |
| US20050284372A1 (en) * | 2004-06-28 | 2005-12-29 | Applied Materials, Inc. | Chamber component having grooved surface with depressions |
| USD559993S1 (en) * | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
| USD559994S1 (en) * | 2005-03-30 | 2008-01-15 | Tokyo Electron Limited | Cover ring |
| US20070144442A1 (en) * | 2005-12-22 | 2007-06-28 | Kyocera Corporation | Susceptor |
| US20120263569A1 (en) * | 2011-04-14 | 2012-10-18 | Scott Wayne Priddy | Substrate holders and methods of substrate mounting |
| USD743357S1 (en) * | 2013-03-01 | 2015-11-17 | Asm Ip Holding B.V. | Susceptor |
| USD784276S1 (en) * | 2013-08-06 | 2017-04-18 | Applied Materials, Inc. | Susceptor assembly |
| USD724553S1 (en) * | 2013-09-13 | 2015-03-17 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
| US20150368829A1 (en) * | 2014-06-23 | 2015-12-24 | Applied Materials, Inc. | Substrate thermal control in an epi chamber |
| US20160133504A1 (en) * | 2014-11-12 | 2016-05-12 | Applied Materials, Inc. | Susceptor design to reduce edge thermal peak |
| USD770992S1 (en) * | 2015-06-12 | 2016-11-08 | Hitachi High-Technologies Corporation | Electrode cover for a plasma processing apparatus |
| US20170117228A1 (en) * | 2015-10-27 | 2017-04-27 | Siltronic Ag | Susceptor for holding a semiconductor wafer having an orientation notch, a method for depositing a layer on a semiconductor wafer, and semiconductor wafer |
| USD810705S1 (en) * | 2016-04-01 | 2018-02-20 | Veeco Instruments Inc. | Self-centering wafer carrier for chemical vapor deposition |
| US20180144969A1 (en) * | 2016-11-18 | 2018-05-24 | Applied Materials, Inc. | Hybrid substrate carrier |
| USD830981S1 (en) * | 2017-04-07 | 2018-10-16 | Asm Ip Holding B.V. | Susceptor for semiconductor substrate processing apparatus |
| US20210066113A1 (en) * | 2017-09-07 | 2021-03-04 | Showa Denko K.K. | Susceptor, cvd apparatus, and method for manufacturing epitaxial wafer |
| US20210375663A1 (en) * | 2018-10-04 | 2021-12-02 | Toyo Tanso Co., Ltd. | Susceptor |
| USD864134S1 (en) * | 2018-10-24 | 2019-10-22 | Asm Ip Holding B.V. | Susceptor |
| USD992614S1 (en) * | 2018-12-06 | 2023-07-18 | Tokyo Electron Limited | Focus ring |
| US20220246462A1 (en) * | 2019-04-16 | 2022-08-04 | Tokai Carbon Korea Co., Ltd | Sic edge ring |
| US20210202294A1 (en) * | 2019-12-26 | 2021-07-01 | Showa Denko K.K. | Susceptor |
| US20210225688A1 (en) * | 2020-01-21 | 2021-07-22 | Asm Ip Holding B.V. | Susceptor with sidewall humps for uniform deposition |
| US20220013337A1 (en) * | 2020-07-08 | 2022-01-13 | Taiwan Semiconductor Manufacturing Company Limited | Plasma etcher edge ring with a chamfer geometry and impedance design |
| USD1047884S1 (en) * | 2021-10-22 | 2024-10-22 | Nuflare Technology, Inc. | Susceptor cover |
| USD1037186S1 (en) * | 2021-10-22 | 2024-07-30 | Nuflare Technology, Inc. | Susceptor ring |
| USD1030687S1 (en) * | 2022-05-31 | 2024-06-11 | Asm Ip Holding B.V. | Susceptor |
| USD1067204S1 (en) * | 2022-05-31 | 2025-03-18 | Asm Ip Holding B.V. | Susceptor |
| JP1745924S (en) | 2022-10-20 | 2023-06-08 | Susceptor | |
| USD1094321S1 (en) * | 2022-10-20 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor cover |
| USD1094322S1 (en) * | 2022-10-20 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor |
| JP1745873S (en) | 2022-10-20 | 2023-06-08 | Susceptor | |
| USD1094320S1 (en) * | 2022-10-20 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor |
| JP1741176S (en) | 2022-10-20 | 2023-04-06 | Cover base for susceptor | |
| JP1741174S (en) | 2022-10-20 | 2023-04-06 | Susceptor | |
| USD1082729S1 (en) * | 2023-01-11 | 2025-07-08 | Nuflare Technology, Inc. | Susceptor cover |
| USD1082731S1 (en) * | 2023-01-11 | 2025-07-08 | Nuflare Technology, Inc. | Susceptor |
| USD1082728S1 (en) * | 2023-01-11 | 2025-07-08 | Nuflare Technology, Inc. | Susceptor |
| USD1093328S1 (en) * | 2023-01-11 | 2025-09-16 | Nuflare Technology, Inc. | Susceptor |
| USD1094323S1 (en) * | 2023-01-11 | 2025-09-23 | Nuflare Technology, Inc. | Susceptor unit |
| US20240243002A1 (en) * | 2023-01-16 | 2024-07-18 | Ngk Insulators, Ltd. | Ceramic susceptor |
| US20240282618A1 (en) * | 2023-02-20 | 2024-08-22 | Kioxia Corporation | Jig, semiconductor manufacturing apparatus, and method of operating semiconductor manufacturing apparatus |
| USD1079661S1 (en) * | 2023-08-31 | 2025-06-17 | Kokusai Electric Corporation | Susceptor of semiconductor manufacturing apparatus |
| JP1766095S (en) | 2023-12-01 | 2024-03-19 | susceptor |
Non-Patent Citations (2)
| Title |
|---|
| Epitaxy Wafer Carrier,https://www.semicorex.com/epitaxy-wafer-carrier.html, Copyright © 2023. (Year: 2023). * |
| TaC Coated Wafer Susceptor,https://www.semicorex.com/tac-coated-wafer-susceptor.html, Copyright © 2023. (Year: 2023). * |
Also Published As
| Publication number | Publication date |
|---|---|
| JP1773329S (en) | 2024-06-18 |
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