US2757788A - Vaporizer for the evaporation of metals, especially in high vacua - Google Patents
Vaporizer for the evaporation of metals, especially in high vacua Download PDFInfo
- Publication number
- US2757788A US2757788A US448582A US44858254A US2757788A US 2757788 A US2757788 A US 2757788A US 448582 A US448582 A US 448582A US 44858254 A US44858254 A US 44858254A US 2757788 A US2757788 A US 2757788A
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- US
- United States
- Prior art keywords
- tubes
- vaporizer
- evaporation
- metals
- rods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000006200 vaporizer Substances 0.000 title claims description 23
- 230000008020 evaporation Effects 0.000 title claims description 8
- 238000001704 evaporation Methods 0.000 title claims description 8
- 229910052751 metal Inorganic materials 0.000 title description 17
- 239000002184 metal Substances 0.000 title description 17
- 150000002739 metals Chemical class 0.000 title description 8
- 239000000919 ceramic Substances 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 9
- 238000010438 heat treatment Methods 0.000 description 13
- 239000004020 conductor Substances 0.000 description 7
- 239000000126 substance Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 108010001496 Galectin 2 Proteins 0.000 description 1
- 102100021735 Galectin-2 Human genes 0.000 description 1
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000003779 heat-resistant material Substances 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910001338 liquidmetal Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 239000011669 selenium Substances 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22B—PRODUCTION AND REFINING OF METALS; PRETREATMENT OF RAW MATERIALS
- C22B5/00—General methods of reducing to metals
- C22B5/02—Dry methods smelting of sulfides or formation of mattes
- C22B5/16—Dry methods smelting of sulfides or formation of mattes with volatilisation or condensation of the metal being produced
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Definitions
- the present invention relates to the design of a vaporizer for the evaporation of metals or alloys especially in high vacua.
- metals are deposited by evaporation upon other substances, to produce conducting layers on insulating materials, for example, for the manufacture of electrical condensers, to coat cheap material with a corrosion-resistant metallic layer, to obtain a high-quality surface, or else to obtain other efliects, for example, to deposit metallic layers upon the base of selenium dry-disc rectifiers.
- Vaporizers require long heating-up periOds and following the switching-off of the current the cooling of the vaporizer also takes a long time.
- Vaporizers made of conducting material, which are heated by the flow of current need very large currents for heating and are suited only for small amounts of metal.
- the vaporizer according to this invention is characterized in that it is composed of ceramic tubes, rods, or the like, which may preferably be heated with electrical heating conductors, and also serve to insulate the heating conductor wires. in consequence of its small heat capacity the vaporizer can be heated rapidly and no unnecessary large currents have to be used for the heating. Consequently a longer service life and a saving of heating wire results.
- the vaporizer according to this invention being made of ceramic insulating tubes is also characterized by its great simplicity and can be constructed in any size. Hereby it is not necessary to seal the joints and spaces between the tubes, as in consequence of its high surface tension the melted metal will not run out. It was just this property of the liquid metal, which in heretofore known Vaporizers was considered to be undesirable, and steps were taken to attain a proper moistening of the vaporizers walls.
- a vaporizer for metals is constructed of a plurality of ceramic insulating tubes, which in a simple manner are kept together by metallic wires, bands, or any other device.
- the tubes are put ice together and are connected with one another in such a way that a vessel having the shape of a long-stretched trough results.
- the front sides are preferably closed by bundling-in short rods made of the same material. Instead of these rods, pieces of tube may also be used, if their inner diameter is not too large.
- a plurality of such vaporize-rs can be arranged in a row or in a plane, so as to permit rapid interchanging, assembly, or disassembly.
- the heating conductor is preferably pulled through the tubes forming the vaporizer in zigzag fashion and subsequently heats the tube walls directly.
- Fig. 1 shows a vaporizer according to this invention in perspective view
- Fig. 2 demonstrates a horizontal cross-section, located approximately in the region of the metallic melt, and in Figures 3 to 6 illustrate different examples of the assembly of the ceramic tubes.
- the vaporizer of Fig. 1 consists of a plurality of ceramic tubes 1, which by the insertion of ceramic rods 2, preferably made of the same material but of shorter length, at the front sides are arranged in a tube-like structure.
- the bundle of tubes is kept together for instance by two metallic bands 3.
- the heating conductor is pulled through the three bottom tubes, which are subsequently heated.
- Fig. 2 shows the cross-section of the inventive vaporizer of Fig. 1 in the region of the metallic melt 5.
- the tubes 1 represent the wall of the vaporizer tube and are passed through by the heating conductor 4.
- the front sides are closed by the short ceramic rods 2.
- the liquid metallic melt pulls itself. together in dome-like manner at the open ends as well as at the gaps between the tubes, and consequently the metal will not flow out.
- FIG. 3 Four embodiments for assembling or bundling the tubes are presented in Figures 3 to 6.
- the tubes 1 and the rods 2 can be kept together by means of wrapping the same with a wire or band 3 made of an appropriate metal and being simultaneously employed as loop 3a for suspending the vaporizer, as this is indicated at Fig. 3.
- the tubes and rods, of which the vaporizer is constituted are placed in a piece of sheet metal 6 having a correspondingly designed cutout. At its upper end this piece of sheet metal can be equipped with devices, for example, with a hole 6a, for suspending the vaporizer, or else it may be provided at its lower end with stands for setting it up or mounting it.
- the tube bundle is covered with a cap 7 made of appropriate metal, being simultaneously employed for mounting the vaporizer on a base plate, preferably with a stand 7a.
- the mounting system for the tube bundle may also consist of appropriately shaped plates 8a and 8b, made of a heat-resistant material, between which the tubes are clamped in.
- Vaporizers designed according to this invention are characterized by most simple construction and their extremely low heat capacity, and can be applied to advantage in all these processes, in which metals are to be vaporized, particularly in high vacua.
- a vaporizer for the evaporation of materials comprising a plurality of ceramic tubes, at least two of said tubes being spaced apart to receive said material to be evaporated, and closure members in the form of short rods arranged to stop up the opening time formed at both ends of the tubes, said rods lying between said tubes in close contact therewith.
- a vaporizer according to claim 1 in which the tubes and rods are placed in end plates having curvatures accommodating the ends thereof.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Manufacturing & Machinery (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Physical Vapour Deposition (AREA)
Description
Aug. 7, 1956 Filed Aug. 9, 1954 J. WEBER VAPORIZER FOR THE EVAPORATION OF METALS, ESPECIALLY IN HIGH VACUA F 1' gal 2 Sheets-Sheet l Fig.2
INVENTOR J. WE BER WW/WA ATTORNEY Aug. 7, 1956 J. WEBER 2,757,788
VAPORIZER FOR THE. EVAPORATION OF METALS, ESPECIALLY IN HIGH VACUA Filed Aug. 9. 1954 2 Sheeis-Sheet 2 INVENTOR J. WEBER W O/M1 ATTORNEY United States Patent VAPORIZER FOR THE EVAPORATION OF NIETAL'S, ESPECIALLY IN HIGH VACUA Joachim Weber, Nurnberg, Germany, assignor to International Standard Electric Corporation, New York, N. Y., a corporation of Delaware Application August 9, 1954, Serial No. 448,582
Claims priority, application Germany August '12, 1953 '3 Claims. (Cl. 206-.4)
The present invention relates to the design of a vaporizer for the evaporation of metals or alloys especially in high vacua.
In numerous technical processes metals are deposited by evaporation upon other substances, to produce conducting layers on insulating materials, for example, for the manufacture of electrical condensers, to coat cheap material with a corrosion-resistant metallic layer, to obtain a high-quality surface, or else to obtain other efliects, for example, to deposit metallic layers upon the base of selenium dry-disc rectifiers.
Metals, which are to be vaporized especially in high vacua, have hitherto been placed into suitable crucibles which are heated by a heating winding made of resistant wire. It is also known to use conducting substances, for instance carbon, as material for the crucibles, which are heated directly by the passing of a current. Vaporizers having crucibles with a separated heating winding not only are of complicated construction, they also present the disadvantages that in order to insulate the heating wire from the vaporizing crucible, usually made of metal, additional insulating tubes consisting of highly refractory substances are needed, which in most cases are provided with a wrapping of metal or of insulation.
Such an arrangement has a very large heat capacity and consequently excessive amounts of energy are required in order to raise and to keep the temperature of the entire arrangement to a certain level. Consequently the heating wires are excessively strained and a repeated replacement of the heating conductors becomes necessary. On the other hand such Vaporizers require long heating-up periOds and following the switching-off of the current the cooling of the vaporizer also takes a long time. Vaporizers made of conducting material, which are heated by the flow of current need very large currents for heating and are suited only for small amounts of metal.
These disadvantages are avoided by the vaporizer according to this invention. It is characterized in that it is composed of ceramic tubes, rods, or the like, which may preferably be heated with electrical heating conductors, and also serve to insulate the heating conductor wires. in consequence of its small heat capacity the vaporizer can be heated rapidly and no unnecessary large currents have to be used for the heating. Consequently a longer service life and a saving of heating wire results. The vaporizer according to this invention being made of ceramic insulating tubes is also characterized by its great simplicity and can be constructed in any size. Hereby it is not necessary to seal the joints and spaces between the tubes, as in consequence of its high surface tension the melted metal will not run out. It was just this property of the liquid metal, which in heretofore known Vaporizers was considered to be undesirable, and steps were taken to attain a proper moistening of the vaporizers walls.
A vaporizer for metals according to this invention is constructed of a plurality of ceramic insulating tubes, which in a simple manner are kept together by metallic wires, bands, or any other device. The tubes are put ice together and are connected with one another in such a way that a vessel having the shape of a long-stretched trough results. The front sides are preferably closed by bundling-in short rods made of the same material. Instead of these rods, pieces of tube may also be used, if their inner diameter is not too large. A plurality of such vaporize-rs can be arranged in a row or in a plane, so as to permit rapid interchanging, assembly, or disassembly. The heating conductor is preferably pulled through the tubes forming the vaporizer in zigzag fashion and subsequently heats the tube walls directly.
The above-mentioned and other features and objects of this invention and the manner of attaining them will become more apparent and the invention itself will be best understood by reference to the following description of an embodiment of the invention taken in conjunction with the accompanying drawings, in which:
Fig. 1 shows a vaporizer according to this invention in perspective view,
Fig. 2 demonstrates a horizontal cross-section, located approximately in the region of the metallic melt, and in Figures 3 to 6 illustrate different examples of the assembly of the ceramic tubes.
The vaporizer of Fig. 1 consists of a plurality of ceramic tubes 1, which by the insertion of ceramic rods 2, preferably made of the same material but of shorter length, at the front sides are arranged in a tube-like structure. The bundle of tubes is kept together for instance by two metallic bands 3. The heating conductor is pulled through the three bottom tubes, which are subsequently heated.
Fig. 2 shows the cross-section of the inventive vaporizer of Fig. 1 in the region of the metallic melt 5. The tubes 1 represent the wall of the vaporizer tube and are passed through by the heating conductor 4. The front sides are closed by the short ceramic rods 2. In consequence of the surface tension the liquid metallic melt pulls itself. together in dome-like manner at the open ends as well as at the gaps between the tubes, and consequently the metal will not flow out.
Four embodiments for assembling or bundling the tubes are presented in Figures 3 to 6. The tubes 1 and the rods 2 can be kept together by means of wrapping the same with a wire or band 3 made of an appropriate metal and being simultaneously employed as loop 3a for suspending the vaporizer, as this is indicated at Fig. 3. In the embodiment of Fig. 4 the tubes and rods, of which the vaporizer is constituted, are placed in a piece of sheet metal 6 having a correspondingly designed cutout. At its upper end this piece of sheet metal can be equipped with devices, for example, with a hole 6a, for suspending the vaporizer, or else it may be provided at its lower end with stands for setting it up or mounting it. In the embodiment of Fig. 5 the tube bundle is covered with a cap 7 made of appropriate metal, being simultaneously employed for mounting the vaporizer on a base plate, preferably with a stand 7a.
As demonstrated in Fig. 6 the mounting system for the tube bundle may also consist of appropriately shaped plates 8a and 8b, made of a heat-resistant material, between which the tubes are clamped in.
The embodiments of this invention, which have been demonstrated in the figures do not present the only ones possible. The material used for tubes and mounting system also is determined by the type of application, the temperature strain, the mechanical stresses, etc.
Vaporizers designed according to this invention are characterized by most simple construction and their extremely low heat capacity, and can be applied to advantage in all these processes, in which metals are to be vaporized, particularly in high vacua.
While I have described above the principles of my 3 invention in connection with specific apparatus, it is to be clearly understood that this description is made only by way of example and not as a limitation to the scope of my invention as set forth in the objects thereof and in the accompanying claims.
What is claimed is:
1. A vaporizer for the evaporation of materials comprising a plurality of ceramic tubes, at least two of said tubes being spaced apart to receive said material to be evaporated, and closure members in the form of short rods arranged to stop up the opening time formed at both ends of the tubes, said rods lying between said tubes in close contact therewith.
'2. A vaporizer according to claim 1 in which the structure consisting of tubes and rods includes clamping members which hold the tubes and rods together.
3. A vaporizer according to claim 1 in which the tubes and rods are placed in end plates having curvatures accommodating the ends thereof.
References Cited in the file of this patent UNITED STATES PATENTS 2,584,660 Bancroft Feb. 5, 1952
Claims (1)
1. A VAPORIZER FOR THE EVAPORATION OF MATERIALS COMPRISING A PLURALITY OF CERAMIC TUBES, AT LEAST TWO OF SAID TUBES BEING SPACED APART TO RECEIVE SAID MATERIAL TO BE EVAPORATED, AND CLOSURE MEMBERS IN THE FORM OF SHORT RODS ARRANGED TO STOP UP THE OPENING THUS FORMED AT BOTH ENDS OF THE TUBES, SAID RODS LYING BETWEEN SAID TUBES IN CLOSE CONTACT THEREWITH.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE751444X | 1953-08-12 |
Publications (1)
Publication Number | Publication Date |
---|---|
US2757788A true US2757788A (en) | 1956-08-07 |
Family
ID=6652008
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US448582A Expired - Lifetime US2757788A (en) | 1953-08-12 | 1954-08-09 | Vaporizer for the evaporation of metals, especially in high vacua |
Country Status (2)
Country | Link |
---|---|
US (1) | US2757788A (en) |
GB (1) | GB751444A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3117210A (en) * | 1959-07-13 | 1964-01-07 | Wisconsin Alumni Res Found | Apparatus for evaporating materials |
US3514575A (en) * | 1967-08-10 | 1970-05-26 | Sylvania Electric Prod | Metal-evaporating source |
US3515852A (en) * | 1967-08-10 | 1970-06-02 | Sylvania Electric Prod | Metal-evaporating source |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2584660A (en) * | 1949-09-24 | 1952-02-05 | Eastman Kodak Co | Vacuum coating process and apparatus therefor |
-
1954
- 1954-08-06 GB GB22917/54A patent/GB751444A/en not_active Expired
- 1954-08-09 US US448582A patent/US2757788A/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2584660A (en) * | 1949-09-24 | 1952-02-05 | Eastman Kodak Co | Vacuum coating process and apparatus therefor |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3117210A (en) * | 1959-07-13 | 1964-01-07 | Wisconsin Alumni Res Found | Apparatus for evaporating materials |
US3514575A (en) * | 1967-08-10 | 1970-05-26 | Sylvania Electric Prod | Metal-evaporating source |
US3515852A (en) * | 1967-08-10 | 1970-06-02 | Sylvania Electric Prod | Metal-evaporating source |
Also Published As
Publication number | Publication date |
---|---|
GB751444A (en) | 1956-06-27 |
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