US10008181B2 - Field-effect transistor, display element, image display device, and system - Google Patents

Field-effect transistor, display element, image display device, and system Download PDF

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Publication number: US10008181B2
Authority: US; United States
Prior art keywords: layer; insulating layer; field; effect transistor; gate insulating
Prior art date: 2016-03-11
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

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US15/452,886

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English (en)

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US20170263210A1 (en

Inventor

Ryoichi Saotome

Naoyuki Ueda

Yuki Nakamura

Yukiko Abe

Shinji Matsumoto

Yuji Sone

Sadanori Arae

Minehide Kusayanagi

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Ricoh Co Ltd

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Ricoh Co Ltd

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2016-03-11

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2017-03-08

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2018-06-26

2017-03-08 Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd

2017-09-14 Publication of US20170263210A1 publication Critical patent/US20170263210A1/en

2018-05-21 Assigned to RICOH COMPANY, LTD. reassignment RICOH COMPANY, LTD. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ABE, YUKIKO, ARAE, Sadanori, KUSAYANAGI, Minehide, MATSUMOTO, SHINJI, NAKAMURA, YUKI, SAOTOME, Ryoichi, SONE, YUJI, UEDA, NAOYUKI

2018-05-23 Priority to US15/987,144 priority Critical patent/US10403234B2/en

2018-06-26 Application granted granted Critical

2018-06-26 Publication of US10008181B2 publication Critical patent/US10008181B2/en

Status Active legal-status Critical Current

2037-03-08 Anticipated expiration legal-status Critical

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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G5/00—Control arrangements or circuits for visual indicators common to cathode-ray tube indicators and other visual indicators
- G09G5/10—Intensity circuits
- H01L27/1225—
- H01L27/124—
- H01L27/3262—
- H01L27/3276—
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D30/00—Field-effect transistors [FET]
- H10D30/60—Insulated-gate field-effect transistors [IGFET]
- H10D30/67—Thin-film transistors [TFT]
- H10D30/674—Thin-film transistors [TFT] characterised by the active materials
- H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
- H10D30/6756—Amorphous oxide semiconductors
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/421—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer
- H10D86/423—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs having a particular composition, shape or crystalline structure of the active layer comprising semiconductor materials not belonging to the Group IV, e.g. InGaZnO
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/441—Interconnections, e.g. scanning lines
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D86/00—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D86/40—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
- H10D86/60—Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
- H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/124—Insulating layers formed between TFT elements and OLED elements
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/131—Interconnections, e.g. wiring lines or terminals
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/04—Structural and physical details of display devices
- G09G2300/0421—Structural details of the set of electrodes
- G09G2300/0426—Layout of electrodes and connections
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2300/00—Aspects of the constitution of display devices
- G09G2300/08—Active matrix structure, i.e. with use of active elements, inclusive of non-linear two terminal elements, in the pixels together with light emitting or modulating elements
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G2320/00—Control of display operating conditions
- G09G2320/06—Adjustment of display parameters
- G09G2320/0626—Adjustment of display parameters for control of overall brightness
- G09G2320/0646—Modulation of illumination source brightness and image signal correlated to each other
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09G—ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
- G09G3/00—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
- G09G3/20—Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters

Definitions

the present disclosure relates to a field-effect transistor, a display element, an image display device, and a system.
FETs Field-effect transistors
FETs are transistors which control electric current between a source electrode and a drain electrode based on the principle that an electric field is applied to a gate electrode to provide a gate in a flow of electrons or holes utilizing an electric field of a channel.
the FETs have been used as, for example, switching elements and amplifying elements.
the FETs are low in gate current and have a flat structure, and thus can be easily produced and integrated as compared with bipolar transistors.
the FETs are essential elements in integrated circuits used in the existing electronic devices.
the FETs have been applied to, for example, active matrix displays as thin film transistor (TFTs).
FPDs flat panel displays
LCDs liquid crystal displays
EL organic electroluminescent
FPDs are driven by a driving circuit containing TFTs using amorphous silicon or polycrystalline silicon in an active layer.
the FPDs have been required to have an increased size, improved definition and image quality, and an increased driving speed.
TFTs that have high carrier mobility, a high on/off ratio, small changes in properties over time, and small variation between the elements.
Non-Patent Literature 1 a TFT using InGaZnO 4 in a semiconductor layer (for example, K. Nomura, and 5 others “Room-temperature fabrication of transparent flexible thin film transistors using amorphous oxide semiconductors”, NATURE , VOL. 432, 25, Nov., 2004, pp. 488 to 492 (hereinafter may be referred to as Non-Patent Literature 1)).
the TFT is required to have a small change in threshold voltage.
One reason why the threshold voltage of the TFT will change is that moisture, oxygen, hydrogen, and other substances in the atmosphere are adsorbed onto or released from the semiconductor layer. Also, the threshold voltage will change as a result of repeating ON and OFF of the TFT many times for a long time.
a bias temperature stress (BTS) test is generally performed as a method for evaluating a change in threshold voltage as a result of such ON and OFF operations repeated many times for a long time.
This test is a method of evaluating a change in threshold voltage when constant voltage is continuously applied between a gate electrode and a source electrode of a field-effect transistor, or a method of evaluating a change in threshold voltage when constant voltage is continuously applied between a gate electrode and a source electrode and between a drain electrode and a source electrode.
the TFT In order to suppress a change in threshold voltage of the TFT, the TFT generally has a passivation layer.
the passivation layer refers to a layer having functions such as separation and protection of semiconductors from moisture, oxygen, hydrogen, and other substances in the atmosphere. Also, the passivation layer may be called a protection layer.
a field-effect transistor containing a protection layer (passivation layer) having a laminated structure one layer of which is SiO 2 , Si 3 N 4 , SiON, Al 2 O 3 , Ta 2 O 5 , TiO 2 , HfO 2 , ZrO 2 , or Y 2 O 3
a field-effect transistor containing a passivation layer of SiO 2 is disclosed (for example, Y.
Non-Patent Literature 2 Japanese Unexamined Patent Application Publication No. 2015-111653 (hereinafter may be referred to as Patent Literature 2)).
a field-effect transistor includes a substrate, a passivation layer, a gate insulating layer, which is formed between the substrate and the passivation layer, a source electrode and a drain electrode, which are formed to be in contact with the gate insulating layer, a semiconductor layer, which is formed at least between the source electrode and the drain electrode and is in contact with the gate insulating layer, the source electrode, and the drain electrode, and a gate electrode, which is in contact with the gate insulating layer and faces the semiconductor layer via the gate insulating layer.
the passivation layer is formed of a single layer containing a paraelectric amorphous oxide containing a Group A element which is an alkaline earth metal and a Group B element which is at least one selected from the group consisting of Ga, Sc, Y, and lanthanoid.
the gate insulating layer contains at least one selected from the group consisting of oxides of Si, nitrides of Si, and oxynitrides of Si.
FIG. 1 is a diagram for explaining an image display device
FIG. 2 is a diagram for explaining one example of a display element of the present disclosure
FIG. 3A is a view illustrating one example (bottom contact/bottom gate) of a field-effect transistor of the present disclosure
FIG. 3B is a view illustrating one example (top contact/bottom gate) of a field-effect transistor of the present disclosure
FIG. 3C is a view illustrating one example (bottom contact/top gate) of a field-effect transistor of the present disclosure
FIG. 3D is a view illustrating one example (top contact/top gate) of a field-effect transistor of the present disclosure
FIG. 4 is a schematic structural view illustrating one example of an organic EL element
FIG. 5 is a schematic structural view illustrating one example of a display element of the present disclosure
FIG. 6 is a schematic structural view illustrating another example of a display element of the present disclosure.
FIG. 7 is a diagram for explaining a display control device
FIG. 8 is a diagram for explaining a liquid crystal display
FIG. 9 is a diagram for explaining a display element in FIG. 8 ;
FIG. 10 is a schematic view illustrating field-effect transistors produced in Examples 1 to 7 and Comparative Example 1;
the present disclosure has an object to provide a field-effect transistor including a passivation layer formed of a single layer, the field-effect transistor exhibiting a small change in threshold voltage in the BTS test.
the present disclosure can provide a field-effect transistor including a passivation layer formed of a single layer, the field-effect transistor exhibiting a small change in threshold voltage in the BTS test.
a field-effect transistor of the present disclosure includes a substrate, a passivation layer, a gate insulating layer, a source electrode, a drain electrode, a semiconductor layer, and a gate electrode; and if necessary, further includes other members.
the passivation layer is formed of a single layer containing a paraelectric amorphous oxide containing a Group A element which is an alkaline earth metal and a Group B element which is at least one selected from the group consisting of Ga, Sc, Y, and lanthanoid.
the gate insulating layer contains at least one selected from the group consisting of oxides of Si, nitrides of Si, and oxynitrides of Si.
the field-effect transistor containing the passivation layer described in the above Non-Patent Literature 2 is evaluated for reliability in the BTS test.
a change in threshold voltage ( ⁇ Vth) is larger as the test time passes, and thus it cannot be said that sufficient reliability mentioned in the present disclosure can be ensured.
the protection layer (passivation layer) has a laminated structure.
Patent Literature 2 describes Comparative Examples where the protection layer (passivation layer) is a single layer, in comparison to Examples where the protection layer (passivation layer) has a laminated structure.
the field-effect transistor described in Comparative Example 6 containing a gate insulating layer of Al 2 O 3 and a protection layer (passivation layer) formed of a single layer containing a rare earth element and an alkaline earth metal, has a large change in threshold voltage in the BTS test and indicates that sufficient reliability cannot be ensured (the experiment corresponding to Comparative Example 6 of this Patent Literature 2 is conducted as a comparative experiment in the present disclosure, and results of this experiment are presented in Comparative Example 1 below).
the present inventors conducted extensive studies and have found that even in a field-effect transistor containing a passivation layer of a single layer, by specifying the kinds of the passivation layer and a gate insulating layer and combining the specific passivation layer and the specific gate insulating layer, a field-effect transistor having a small change in threshold voltage in the BTS test can be obtained.
the field-effect transistor of the present disclosure having the above configuration, where the passivation layer is a single layer, is a field-effect transistor having a small change in threshold voltage in the BTS test and exhibiting high reliability.
a shape, a structure, and a size of the substrate are not particularly limited and may be appropriately selected depending on the intended purpose.
a material of the substrate is not particularly limited and may be appropriately selected depending on the intended purpose. Examples of the material include glass and plastics.
the glass is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the glass include alkali-free glass and silica glass.
the plastics are not particularly limited and may be appropriately selected depending on the intended purpose.
examples of the plastics include polycarbonate (PC), polyimide (PI), polyethylene terephthalate (PET), and polyethylene naphthalate (PEN).
pre-treatments such as oxygen plasma, UV ozone, and UV radiation washing, are preferably performed on the substrate to clean a surface of the substrate and improve adhesiveness.
the passivation layer in the present disclosure a layer having functions such as separation and protection of semiconductors from moisture, oxygen, hydrogen, and other substances in the atmosphere. Also, the passivation layer may be called a protection layer.
the passivation layer is generally formed above the substrate.
the passivation layer contains a paraelectric amorphous oxide.
the passivation layer is preferably formed of the paraelectric amorphous oxide itself.
the passivation layer is formed of a single layer.
the single layer means a layer formed of the same kind of component and is intended to exclude a laminated structure where two or more layers formed of different kinds of component are laminated.
the paraelectric amorphous oxide contains a Group A element which is an alkaline earth metal and a Group B element which is at least one selected from the group consisting of Ga (gallium), Sc (scandium), Y (yttrium), and lanthanoid.
the paraelectric amorphous oxide preferably contains a Group C element which is at least one of Al (aluminium), Ti (titanium), Zr (zirconium), Hf (hafnium), Nb (niobium), and Ta (tantalum).
the paraelectric amorphous oxide further contains other component according to the necessity.
the passivation layer is formed of an amorphous material. This is because when the passivation layer is formed of a crystalline material, moisture, oxygen, and hydrogen in the atmosphere are adsorbed onto or released from the semiconductor layer through, for example, grain boundaries, leading to deterioration in reliability of transistors.
the passivation layer it is necessary for the passivation layer to be a paraelectric in terms of reducing hysteresis in transfer characteristics of transistors. Although such a special case that transistors are used for memories and other applications is exceptional, in general, the existence of hysteresis is not preferable in devices utilizing switching characteristics of transistors.
the paraelectric is a dielectric other than a piezoelectric, a pyroelectric, and a ferroelectric.
the paraelectric refers to a dielectric that neither generates polarization by pressure nor has spontaneous polarization in the absence of an external electric field.
the piezoelectric, the pyroelectric, and the ferroelectric are needed to be crystals for developing their characteristics. That is, when a passivation layer is formed of an amorphous material, this passivation layer naturally becomes a paraelectric.
the paraelectric amorphous oxide is stable in the atmosphere and can stably form an amorphous structure in a wide range of compositions.
oxides containing a Group A element which is an alkaline earth metal and a Group B element which is at least one selected from the group consisting of Ga, Sc, Y, and lanthanoid are stable in the atmosphere and can stably form an amorphous structure in a wide range of compositions.
simple oxides of alkaline earth metals tend to react with moisture or carbon dioxide in the atmosphere to easily form hydroxides or carbonates and therefore such simple oxides alone are not suitable for use in electronic devices.
simple oxides of Ga, Sc, Y, and lanthanoid tend to be crystallized and problematically cause leakage current when attempted to be used in electronic devices.
the present inventors have found that the paraelectric amorphous oxide containing a Group A element which is an alkaline earth metal and a Group B element which is at least one selected from the group consisting of Ga, Sc, Y, and lanthanoid stably forms an amorphous film in a wide range of compositions. Because the paraelectric amorphous oxide is stably present in a wide range of compositions, a dielectric constant and a linear expansion coefficient of the paraelectric amorphous oxide to be formed can be variably controlled depending on the compositional ratio.
the present inventors have found that the passivation layer containing the paraelectric amorphous oxide exhibits excellent barrier properties against moisture, oxygen, and hydrogen in the atmosphere.
the paraelectric amorphous oxide preferably contains a Group C element which is at least one selected from the group consisting of Al, Ti, Zr, Hf, Nb, and Ta.
a Group C element which is at least one selected from the group consisting of Al, Ti, Zr, Hf, Nb, and Ta.
Group A element which is an alkaline earth metal in the paraelectric amorphous oxide examples include Be (beryllium), Mg (magnesium), Ca (calcium), Sr (strontium), and Ba (barium). These alkaline earth metals may be used alone or in combination.
Examples of the Group B element which is at least one selected from the group consisting of Ga, Sc, Y, and lanthanoid in the paraelectric amorphous oxide include Ga (gallium), Sc (scandium), Y (yttrium), La (lanthanum), Ce (cerium), Pr (praseodymium), Nd (neodymium), Pm (promethium), Sm (samarium), Eu (europium), Gd (gadolinium), Tb (terbium), Dy (dysprosium), Ho (holmium), Er (erbium), Tm (thulium), Yb (ytterbium), and Lu (lutetium).
An atomic ratio (NA:NB) between a total number of atoms of the Group A element (NA) and a total number of atoms of the Group B element (NB) in the paraelectric amorphous oxide is not particularly limited and may be appropriately selected depending on the intended purpose, but preferably satisfies the following range.
NA:NB (from 3 through 50) at %:(from 50 through 97) at %
NA+NB 100 at %
An atomic ratio (NA:NB:NC) among the total number of atoms of the Group A element (NA), the total number of atoms of the Group B element (NB), and a total number of atoms of the Group C element (NC) in the paraelectric amorphous oxide is not particularly limited and may be appropriately selected depending on the intended purpose, but preferably satisfies the following range.
NA:NB:NC (from 3 through 47) at %:(from 50 through 94) at %:(from 3 through 47) at %
NA+NB+NC 100 at %
the ratios of the Group A element, the Group B element, and the Group C element in the paraelectric amorphous oxide can be calculated, for example, by analyzing a cationic element of the oxide through X-ray fluorescence spectrometry, electron probe microanalysis (EPMA), or inductively coupled plasma atomic emission spectroscopy (ICP-AES).
a dielectric constant of the passivation layer is not particularly limited and may be appropriately selected depending on the intended purpose.
the dielectric constant can be measured, for example, by producing a capacitor, in which a lower electrode, a dielectric layer (the passivation layer), and an upper electrode are laminated, and measuring the produced capacitor using an LCR meter.
a linear expansion coefficient of the passivation layer is not particularly limited and may be appropriately selected depending on the intended purpose.
the linear expansion coefficient can be measured, for example, by using a thermomechanical analysis device. In this measurement, the linear expansion coefficient can be measured by separately producing a measurement sample having the same composition as the passivation layer, without producing the field-effect transistor.
a formation method of the passivation layer is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the formation method include a method of forming a film by a vacuum process, such as sputtering, pulsed laser deposition (PLD), chemical vapor deposition (CVD), or atomic layer deposition (ALD) and patterning the film through photolithography.
PLD pulsed laser deposition
CVD chemical vapor deposition
ALD atomic layer deposition
the passivation layer can be formed by preparing a coating liquid containing a precursor of the paraelectric amorphous oxide (a passivation-layer-coating liquid), coating or printing the coating liquid onto an object to be coated, and baking the resultant under appropriate conditions.
a coating liquid containing a precursor of the paraelectric amorphous oxide a passivation-layer-coating liquid
An average film thickness of the passivation layer is preferably from 10 nm through 1,000 nm, more preferably from 20 nm through 500 nm.
the passivation-layer-coating liquid contains an alkaline-earth-metal-containing compound (Group-A-element-containing compound), a Group-B-element-containing compound, and a solvent, preferably contains at least one Group-C-element-containing compound, and further contains other component according to the necessity.
Alkaline-earth-metal-containing compound Group-A-element-containing compound
Group-B-element-containing compound Group-B-element-containing compound
a solvent preferably contains at least one Group-C-element-containing compound, and further contains other component according to the necessity.
alkaline-earth-metal-containing compound examples include inorganic alkaline earth metal compounds and organic alkaline earth metal compounds.
alkaline earth metals in the alkaline-earth-metal-containing compound include Be (beryllium), Mg (magnesium), Ca (calcium), Sr (strontium), and Ba (barium).
Examples of the inorganic alkaline earth metal compounds include alkaline earth metal nitrate, alkaline earth metal sulfate, alkaline earth metal chlorides, alkaline earth metal fluorides, alkaline earth metal bromides, and alkaline earth metal iodides.
alkaline earth metal nitrate examples include magnesium nitrate, calcium nitrate, strontium nitrate, and barium nitrate.
alkaline earth metal sulfate examples include magnesium sulfate, calcium sulfate, strontium sulfate, and barium sulfate.
alkaline earth metal chlorides examples include magnesium chloride, calcium chloride, strontium chloride, and barium chloride.
alkaline earth metal fluorides examples include magnesium fluoride, calcium fluoride, strontium fluoride, and barium fluoride.
alkaline earth metal bromides examples include magnesium bromide, calcium bromide, strontium bromide, and barium bromide.
alkaline earth metal iodides examples include magnesium iodide, calcium iodide, strontium iodide, and barium iodide.
the organic alkaline earth metal compounds are not particularly limited and may be appropriately selected depending on the intended purpose, so long as the organic alkaline earth metal compounds are each a compound containing an alkaline earth metal and an organic group.
the alkaline earth metal and the organic group are bonded, for example, via an ionic bond, a covalent bond, or a coordinate bond.
the organic group is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the organic group include alkyl groups which may have substituents, alkoxy groups which may have substituents, acyloxy groups which may have substituents, phenyl groups which may have substituents, acetyl acetonate groups which may have substituents, and sulfonic acid groups which may have substituents.
Examples of the alkyl groups include alkyl groups containing from 1 through 6 carbon atoms.
Examples of the alkoxy groups include alkoxy groups containing from 1 through 6 carbon atoms.
acyloxy groups include: acyloxy groups containing from 1 through 10 carbon atoms; acyloxy groups part of which is substituted with a benzene ring, such as benzoic acid; acyloxy groups part of which is substituted with a hydroxyl group, such as lactic acid; and acyloxy groups containing two or more carbonyl groups, such as oxalic acid and citric acid.
organic alkaline earth metal compound examples include magnesium methoxide, magnesium ethoxide, diethyl magnesium, magnesium acetate, magnesium formate, acetylacetone magnesium, magnesium 2-ethylhexanoate, magnesium lactate, magnesium naphthenate, magnesium citrate, magnesium salicylate, magnesium benzoate, magnesium oxalate, magnesium trifluromethanesulfonate, calcium methoxide, calcium ethoxide, calcium acetate, calcium formate, acetylacetone calcium, calcium dipivaloyl methanate, calcium 2-ethylhexanoate, calcium lactate, calcium naphthenate, calcium citrate, calcium salicylate, calcium neodecanoate, calcium benzoate, calcium oxalate, strontium isopropoxide, strontium acetate, strontium formate, acetylacetone strontium, strontium 2-ethylhexanoate, strontium lactate, strontium naph
An amount of the alkaline-earth-metal-containing compound in the passivation-layer-coating liquid is not particularly limited and may be appropriately selected depending on the intended purpose.
Group B elements in the Group-B-element-containing compound include Ga (gallium), Sc (scandium), Y (yttrium), La (lanthanum), Ce (cerium), Pr (praseodymium), Nd (neodymium), Pm (promethium), Sm (samarium), Eu (europium), Gd (gadolinium), Tb (terbium), Dy (dysprosium), Ho (holmium), Er (erbium), Tm (thulium), Yb (ytterbium), and Lu (lutetium).
Examples of the Group-B-element-containing compound include inorganic Group-B-element-containing compounds and organic Group-B-element-containing compounds.
Examples of the inorganic Group-B-element-containing compounds include nitrates of the Group B elements, sulfates of the Group B elements, fluorides of the Group B elements, chlorides of the Group B elements, bromides of the Group B elements, and iodides of the Group B elements.
nitrates of the Group B elements examples include gallium nitrate, scandium nitrate, yttrium nitrate, lanthanum nitrate, cerium nitrate, praseodymium nitrate, neodymium nitrate, samarium nitrate, europium nitrate, gadolinium nitrate, terbium nitrate, dysprosium nitrate, holmium nitrate, erbium nitrate, thulium nitrate, ytterbium nitrate, and lutetium nitrate.
Examples of the sulfates of the Group B elements include gallium sulfate, scandium sulfate, yttrium sulfate, lanthanum sulfate, cerium sulfate, praseodymium sulfate, neodymium sulfate, samarium sulfate, europium sulfate, gadolinium sulfate, terbium sulfate, dysprosium sulfate, holmium sulfate, erbium sulfate, thulium sulfate, ytterbium sulfate, and lutetium sulfate.
Examples of the fluorides of the Group B elements include gallium fluoride, scandium fluoride, yttrium fluoride, lanthanum fluoride, cerium fluoride, praseodymium fluoride, neodymium fluoride, samarium fluoride, europium fluoride, gadolinium fluoride, terbium fluoride, dysprosium fluoride, holmium fluoride, erbium fluoride, thulium fluoride, ytterbium fluoride, and lutetium fluoride.
Examples of the chlorides of the Group B elements include gallium chloride, scandium chloride, yttrium chloride, lanthanum chloride, cerium chloride, praseodymium chloride, neodymium chloride, samarium chloride, europium chloride, gadolinium chloride, terbium chloride, dysprosium chloride, holmium chloride, erbium chloride, thulium chloride, ytterbium chloride, and lutetium chloride.
bromides of the Group B elements examples include gallium bromide, scandium bromide, yttrium bromide, lanthanum bromide, praseodymium bromide, neodymium bromide, samarium bromide, europium bromide, gadolinium bromide, terbium bromide, dysprosium bromide, holmium bromide, erbium bromide, thulium bromide, ytterbium bromide, and lutetium bromide.
Examples of the iodides of the Group B elements include gallium iodide, scandium iodide, yttrium iodide, lanthanum iodide, cerium iodide, praseodymium iodide, neodymium iodide, samarium iodide, europium iodide, gadolinium iodide, terbium iodide, dysprosium iodide, holmium iodide, erbium iodide, thulium iodide, ytterbium iodide, and lutetium iodide.
the organic Group-B-element-containing compound is not particularly limited and may be appropriately selected depending on the intended purpose, so long as the organic Group-B-element-containing is a compound containing a Group B element and an organic group.
the Group B element and the organic group are bonded, for example, via an ionic bond, a covalent bond, or a coordinate bond.
the organic group is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the organic group include alkyl groups which may have substituents, alkoxy groups which may have substituents, acyloxy groups which may have substituents, acetyl acetonate groups which may have substituents, and cyclopentadienyl groups which may have substituents.
Examples of the alkyl groups include alkyl groups containing from 1 through 6 carbon atoms.
Examples of the alkoxy groups include alkoxy groups containing from 1 through 6 carbon atoms.
Examples of the acyloxy groups include acyloxy groups containing from 1 through 10 carbon atoms.
Examples of the organic Group-B-element-containing compound include tris(cyclopentadienyl)gallium, scandium isopropoxide, scandium acetate, tris(cyclopentadienyl)scandium, yttrium isopropoxide, yttrium 2-ethylhexanoate, tris(acetylacetonato)yttrium, tris(cyclopentadienyl)yttrium, lanthanum isopropoxide, lanthanum 2-ethylhexanoate, tris(acetylacetonato)lanthanum, tris(cyclopentadienyl)lanthanum, cerium 2-ethylhexanoate, tris(acetylacetonato)cerium, tris(cyclopentadienyl)cerium, praseodymium isopropoxide, praseodymium oxalate, tris(acetylaceton
An amount of the Group-B-element-containing compound in the passivation-layer-coating liquid is not particularly limited and may be appropriately selected depending on the intended purpose.
Group C element examples include Al (aluminium), Ti (titanium), Zr (zirconium), Hf (hafnium), Nb (niobium), and Ta (tantalum).
Examples of the Group-C-element-containing compound include inorganic compounds of the Group C elements and organic compounds of the Group C elements.
Examples of the inorganic compounds of the Group C elements include aluminium nitrate, aluminium sulfate, aluminium fluoride, aluminium chloride, aluminium bromide, aluminium iodide, aluminium hydroxide, aluminium phosphate, ammonium aluminum sulfate, titanium sulfide, titanium fluoride, titanium chloride, titanium bromide, titanium iodide, zirconium sulfate, zirconium carbonate, zirconium fluoride, zirconium chloride, zirconium bromide, zirconium iodide, hafnium sulfate, hafnium fluoride, hafnium chloride, hafnium bromide, hafnium iodide, niobium fluoride, niobium chloride, niobium bromide, tantalum fluoride, tantalum chloride, and tantalum bromide.
the organic compounds of the Group C elements are not particularly limited and may be appropriately selected depending on the intended purpose, so long as the organic compounds of the Group C elements are each a compound containing a Group C element and an organic group.
the Group C element and the organic group are bonded, for example, via an ionic bond, a covalent bond, or a coordinate bond.
the organic group is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the organic group include alkyl groups which may have substituents, alkoxy groups which may have substituents, acyloxy groups which may have substituents, acetyl acetonate groups which may have substituents, and cyclopentadienyl groups which may have substituents.
Examples of the alkyl groups include alkyl groups containing from 1 through 6 carbon atoms.
Examples of the alkoxy groups include alkoxy groups containing from 1 through 6 carbon atoms.
Examples of the acyloxy groups include acyloxy groups containing from 1 through 10 carbon atoms.
organic compounds of the Group C elements include aluminium isopropoxide, aluminium-sec-butoxide, triethylaluminium, diethylaluminium ethoxide, aluminium acetate, acetylacetone aluminium, aluminium hexafluoroacetylacetonate, aluminium 2-ethylhexanoate, aluminium lactate, aluminium benzoate, aluminium di(s-butoxide)acetoacetic acid ester chelate, aluminium trifluoromethanesulfonate, titanium isopropoxide, bis(cyclopentadienyl)titanium chloride, zirconium butoxide, zirconium isopropoxide, zirconium bis(2-ethylhexanoate)oxide, zirconium (n-butoxide)bisacetylacetonate, zirconium tetrakis(acetylacetonate), tetrakis(cyclopentadie
An amount of the Group-C-element-containing compound in the passivation-layer-coating liquid is not particularly limited and may be appropriately selected depending on the intended purpose.
the solvent is not particularly limited and may be appropriately selected depending on the intended purpose, so long as the solvent is capable of stably dissolving or dispersing the above various compounds.
the solvent include toluene, xylene, mesitylene, cymene, pentylbenzene, dodecylbenzene, bicyclohexyl, cyclohexylbenzene, decane, undecane, dodecane, tridecane, tetradecane, pentadecane, tetralin, decalin, isopropanol, ethyl benzoate, N,N-dimethylformamide, propylene carbonate, 2-ethyl hexanoate, mineral spirits, dimethylpropylene urea, 4-butyrolactone, 2-methoxy ethanol, propylene glycol, and water.
An amount of the solvent in the passivation-layer-coating liquid is not particularly limited and may be appropriately selected depending on the intended purpose.
An atomic ratio (NA:NB) between a total number of atoms of the Group A element (NA) and a total number of atoms of the Group B element (NB) in the passivation-layer-coating liquid is not particularly limited and may be appropriately selected depending on the intended purpose, but preferably satisfies the following range.
NA:NB (from 3 through 50) at %:(from 50 through 97) at %
NA+NB 100 at %
An atomic ratio (NA:NB:NC) among the total number of atoms of the Group A element (NA), the total number of atoms of the Group B element (NB), and a total number of atoms of the Group C element (NC) in the passivation-layer-coating liquid is not particularly limited and may be appropriately selected depending on the intended purpose, but preferably satisfies the following range.
NA:NB:NC (from 3 through 47) at %:(from 50 through 94) at %:(from 3 through 47) at %
NA+NB+NC 100 at %
the formation method of the passivation layer contains a coating step and a heat treatment step and further contains other steps according to the necessity.
the coating step is not particularly limited and may be appropriately selected depending on the intended purpose, so long as the coating step is a step of coating the passivation-layer-coating liquid onto an object to be coated.
a method of the coating is not particularly limited and may be appropriately selected depending on the intended purpose. Examples of the method include: a method of forming a film through a solution process and patterning the film through photolithography; and a method of directly forming a film having a desired shape by printing, such as inkjet printing, nanoimprinting, or gravure printing. Examples of the solution process include dip coating, spin coating, die coating, and nozzle printing.
the heat treatment step is not particularly limited and may be appropriately selected depending on the intended purpose, so long as the heat treatment step is a step of heat-treating the passivation-layer-coating liquid coated on the object to be coated.
the passivation-layer-coating liquid coated on the object to be coated may be dried through air drying. As a result of the heat treatment, the solvent is evaporated and the paraelectric amorphous oxide is generated.
evaporation treatment evaporation of the solvent
generation treatment generation of the paraelectric amorphous oxide
the temperature be elevated to generate the paraelectric amorphous oxide.
at the time of generation of the paraelectric amorphous oxide for example, at least one selected from the group consisting of the alkaline-earth-metal-containing compound (Group-A-element-containing compound), the Group-B-element-containing compound, and Group-C-element-containing compound is decomposed.
a temperature of the evaporation treatment is not particularly limited and may be appropriately selected depending on the solvent contained.
the temperature of the evaporation treatment is from 80° C. through 180° C.
it is effective to use a vacuum oven for reducing the required temperature.
a time of the evaporation treatment is not particularly limited and may be appropriately selected depending on the intended purpose. For example, the time of the evaporation treatment is from 1 minute through 1 hour.
a temperature of the generation treatment is not particularly limited and may be appropriately selected depending on the intended purpose.
the temperature of the generation treatment is preferably 100° C. or higher but lower than 550° C., more preferably from 200° C. through 500° C.
the time of the generation treatment is not particularly limited and may be appropriately selected depending on the intended purpose. For example, the time of the generation treatment is from 1 hour through 5 hours.
the evaporation treatment and the generation treatment may be continuously performed or may be performed in a divided manner of a plurality of steps.
a method of the heat treatment is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the method of the heat treatment include a method of heating the object to be coated.
An atmosphere in the heat treatment is not particularly limited and may be appropriately selected depending on the intended purpose. However, the atmosphere is preferably an oxygen atmosphere. When the heat treatment is performed in the oxygen atmosphere, decomposed products can be promptly discharged to the outside of the system and generation of the paraelectric amorphous oxide can be accelerated.
the heat treatment in view of acceleration of reaction of the generation treatment, it is effective to apply ultraviolet rays having a wavelength of 400 nm or shorter to the material after the evaporation treatment.
Applying the ultraviolet rays having a wavelength of 400 nm or shorter can cleave chemical bonds of the organic material contained in the material after the evaporation treatment and can decompose the organic material. Therefore, the paraelectric amorphous oxide can be efficiently formed.
the ultraviolet rays having a wavelength of 400 nm or shorter are not particularly limited and may be appropriately selected depending on the intended purpose. Examples of the ultraviolet rays include ultraviolet rays having a wavelength of 222 nm emitted from an excimer lamp. It is also preferable to apply ozone instead of or in combination with the ultraviolet rays. Applying the ozone to the material after the evaporation treatment accelerates generation of the oxide.
the gate insulating layer is generally formed between the substrate and the passivation layer.
the gate insulating layer contains at least one selected from the group consisting of oxides of Si, nitrides of Si, and oxynitrides of Si.
a formation method of the gate insulating layer is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the formation method include: vacuum film forming methods such as sputtering, chemical vapor deposition (CVD), and atomic layer deposition (ALD); and printing methods such as spin coating, die coating, and inkjetting.
An average film thickness of the gate insulating layer is not particularly limited and may be appropriately selected depending on the intended purpose. It is preferably from 50 nm through 3 ⁇ m, more preferably 100 nm through 1 ⁇ m.
the present inventors have found that by combining a gate insulating layer containing at least one selected from the group consisting of oxides of Si, nitrides of Si, and oxynitrides of Si, with a passivation layer containing a paraelectric amorphous oxide containing a Group A element which is an alkaline earth metal and a Group B element which is at least one selected from the group consisting of Ga, Sc, Y, and lanthanoid, even if the passivation layer has a single layer structure rather than a laminated structure, a field-effect transistor having a small change in threshold voltage in the BTS test can be obtained. Therefore, it is possible to provide a field-effect transistor exhibiting high reliability by combining the specific gate insulating layer defined in the present disclosure with the specific passivation layer defined in the present disclosure.
the source electrode and the drain electrode are not particularly limited and may be appropriately selected depending on the intended purpose, so long as the source electrode and the drain electrode are electrodes configured to take electric current out from the field-effect transistor.
the source electrode and the drain electrode are formed to be in contact with the gate insulating layer.
a material of the source electrode and the drain electrode is not particularly limited and may be appropriately selected depending on the intended purpose.
the material include: metals (e.g., Mo, Al, Au, Ag, and Cu) and alloys of these metals; transparent conductive oxides, such as indium tin oxide (ITO) and antimony-doped tin oxide (ATO); and organic conductors, such as polyethylene dioxythiophene (PEDOT) and polyaniline (PANT).
a formation method of the source electrode and the drain electrode is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the formation method include: (i) a method of forming a film through sputtering or dip coating and patterning the film through photolithography; and (ii) a method of directly forming a film having a desired shape through a printing process, such as inkjet printing, nanoimprinting, or gravure printing.
An average film thickness of the source electrode and the drain electrode is not particularly limited and may be appropriately selected depending on the intended purpose. However, the average film thickness is preferably from 20 nm through 1 ⁇ m, more preferably from 50 nm through 300 nm.
the semiconductor layer is formed at least between the source electrode and the drain electrode.
the “between” means a position at which the semiconductor layer allows the field-effect transistor to function together with the source electrode and the drain electrode.
the position of the semiconductor layer is not particularly limited and may be appropriately selected depending on the intended purpose, so long as the position is the above-described position.
the semiconductor layer is in contact with the gate insulating layer, the source electrode, and the drain electrode.
a material of the semiconductor layer is not particularly limited and may be appropriately selected depending on the intended purpose. Examples of the material include silicon semiconductors and oxide semiconductors.
Examples of the silicon conductors include amorphous silicon and polycrystalline silicon.
oxide semiconductors examples include In—Ga—Zn—O, In—Zn—O, and In—Mg—O.
oxide semiconductors are preferable.
a formation method of the semiconductor layer is not particularly limited and may be appropriately selected depending on the intended purpose.
the formation method include: a method of forming a film through a vacuum process (e.g., sputtering, pulsed laser deposition (PLD), chemical vapor deposition (CVD), or atomic layer deposition (ALD)) or a solution process (e.g., dip coating, spin coating, or die coating) and patterning the film through photolithography; and a method of directly forming a film having a desired shape through a printing method, such as inkjet printing, nanoimprinting, or gravure printing.
a vacuum process e.g., sputtering, pulsed laser deposition (PLD), chemical vapor deposition (CVD), or atomic layer deposition (ALD)
a solution process e.g., dip coating, spin coating, or die coating
a method of directly forming a film having a desired shape through a printing method such as inkjet printing, nanoimprinting
An average film thickness of the semiconductor layer is not particularly limited and may be appropriately selected depending on the intended purpose.
the average film thickness of the semiconductor layer is preferably from 5 nm through 1 ⁇ m, more preferably from 10 nm through 0.5 ⁇ m.
the gate electrode is not particularly limited and may be appropriately selected depending on the intended purpose, so long as the gate electrode is an electrode configured to apply gate voltage to the field-effect transistor.
the gate electrode is in contact with the gate insulating layer and faces the semiconductor layer via the gate insulating layer.
a material of the gate electrode is not particularly limited and may be appropriately selected depending on the intended purpose.
the material include: metals (e.g., Mo, Al, Au, Ag, and Cu) and alloys of these metals; transparent conductive oxides, such as indium tin oxide (ITO) and antimony-doped tin oxide (ATO); and organic conductors, such as polyethylene dioxythiophene (PEDOT) and polyaniline (PAM).
a formation method of the gate electrode is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the formation method include: (i) a method of forming a film through sputtering, or dip coating and patterning the film through photolithography; and (ii) a method of directly forming a film having a desired shape through a printing process, such as inkjet printing, nanoimprinting, or gravure printing.
An average film thickness of the gate electrode is not particularly limited and may be appropriately selected depending on the intended purpose. However, the average film thickness of the gate electrode is preferably from 20 nm through 1 ⁇ m, more preferably from 50 nm through 300 nm.
a structure of the field-effect transistor is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the structure of the field-effect transistor include the following structures:
a field-effect transistor containing the substrate, the gate electrode formed on the substrate, the gate insulating layer formed on the gate electrode, the source electrode and the drain electrode formed on the gate insulating layer, the semiconductor layer formed between the source electrode and the drain electrode, and the passivation layer formed on the semiconductor layer; and (2) a field-effect transistor containing the substrate, the source electrode and the drain electrode formed on the substrate, the semiconductor layer formed between the source electrode and the drain electrode, the gate insulating layer formed on the source electrode, the drain electrode, and the semiconductor layer, the gate electrode formed on the gate insulating layer, and the passivation layer formed on the gate electrode.
Examples of the field-effect transistor having the structure of (1) include a bottom contact/bottom gate field-effect transistor ( FIG. 3A ) and a top contact/bottom gate field-effect transistor ( FIG. 3B ).
Examples of the field-effect transistor having the structure of (2) include a bottom contact/top gate field-effect transistor ( FIG. 3C ) and a top contact/top gate field-effect transistor ( FIG. 3D ).
reference numeral 21 denotes a substrate
22 denotes a gate electrode
23 denotes a gate insulating layer
24 denotes a source electrode
25 denotes a drain electrode
26 denotes an oxide semiconductor layer
27 denotes a passivation layer.
the field-effect transistor is suitably used in the display element described below, but use of the field-effect transistor is not limited to the use in the display element.
the field-effect transistor can be used for IC cards and ID tags.
a display element of the present disclosure contains at least a light control element and a driving circuit configured to drive the light control element and further contains other members according to the necessity.
the light control element is not particularly limited and may be appropriately selected depending on the intended purpose, so long as the light control element is an element configured to control light output according to a driving signal.
Examples of the light control element include electroluminescent (EL) elements, electrochromic (EC) elements, liquid crystal elements, electrophoretic elements, and electrowetting elements.
the driving circuit is not particularly limited and may be appropriately selected depending on the intended purpose, so long as the driving circuit is a circuit containing the field-effect transistor of the present disclosure and configured to drive the light control element.
the other members are not particularly limited and may be appropriately selected depending on the intended purpose.
the display element includes the field-effect transistor of the present disclosure, long service life and high-speed operation can be realized.
An image display device of the present disclosure includes at least a plurality of display elements, a plurality of wired lines, and a display control device.
the image display device further includes other members according to the necessity.
the image display device is a device configured to display an image corresponding to image data.
the plurality of display elements are not particularly limited and may be appropriately selected depending on the intended purpose, so long as the plurality of display elements are the display elements of the present disclosure arranged in a form of matrix.
the plurality of wired lines are not particularly limited and may be appropriately selected depending on the intended purpose, so long as the plurality of wired lines are wired lines configured to individually apply gate voltage to the field-effect transistors in the plurality of display elements.
the display control device is not particularly limited and may be appropriately selected depending on the intended purpose, so long as the display control device is a device configured to individually control the gate voltage of the field-effect transistors via the plurality of wired lines correspondingly to the image data.
the other members are not particularly limited and may be appropriately selected depending on the intended purpose.
the image display device includes the display elements of the present disclosure, long service life and high-speed operation can be realized.
the image display device can be used as a display unit in mobile information devices (e.g., mobile phones, portable music players, portable video players, electronic books, and personal digital assistants (PDAs)) and camera devices (e.g., still cameras and video cameras). Moreover, the image display device can be used as a unit configured to display various pieces of information in transportation systems (e.g., cars, aircraft, trains, and ships). Furthermore, the image display device can be used as a unit configured to display various pieces of information in measuring devices, analysis devices, medical equipment, and advertising media.
mobile information devices e.g., mobile phones, portable music players, portable video players, electronic books, and personal digital assistants (PDAs)
camera devices e.g., still cameras and video cameras
the image display device can be used as a unit configured to display various pieces of information in transportation systems (e.g., cars, aircraft, trains, and ships).
transportation systems e.g., cars, aircraft, trains, and ships
the image display device can be used as a unit
a system of the present disclosure includes at least the image display device of the present disclosure and an image-data-generating device.
the image-data-generating device is a device configured to generate image data based on image information to be displayed and to output the image data to the image display device.
a television device will be described as one example of the system of the present disclosure.
the television device as one example of the system of the present disclosure can have the structure described in the paragraphs [0038] to [0058] and FIG. 1 in Japanese Unexamined Patent Application Publication No. 2010-074148.
the image display device of the present disclosure can have the structure described in the paragraphs [0059] and [0060] and FIGS. 2 and 3 in Japanese Unexamined Patent Application Publication No. 2010-074148.
FIG. 1 illustrates a display 310 in which display elements are arranged in a form of matrix.
the display 310 contains “n” scanning lines (X0, X1, X2, X3, . . . Xn ⁇ 2, Xn ⁇ 1) arranged along the X axis direction at constant intervals, “m” data lines (Y0, Y1, Y2, Y3, . . . Ym ⁇ 1) arranged along the Y axis direction at constant intervals, and “m” current supply lines (Y0i, Y1i, Y2i, Y3i, . . . Ym ⁇ 1i) arranged along the Y axis direction at constant intervals.
Each of the display elements can be identified by each of the scanning lines and each of the data lines.
FIG. 2 is a schematic diagram illustrating one example of the display element of the present disclosure.
the display element contains an organic electroluminescent (EL) element 350 and a drive circuit 320 configured to emit light from the organic EL element 350 .
the display 310 is an organic EL display of a so-called active matrix system.
the display 310 is a 32-inch color display. Note that, a size of the display is not limited to this size.
the drive circuit 320 of FIG. 2 will be described.
the drive circuit 320 contains two field-effect transistors 11 and 12 and a capacitor 13 .
the field-effect transistor 11 operates as a switching element.
a gate electrode G is coupled to a predetermined scanning line and a source electrode S is coupled to a predetermined data line.
a drain electrode D is coupled to one terminal of the capacitor 13 .
the capacitor 13 is configured to memorize the state of the field-effect transistor 11 ; i.e., data.
the other terminal of the capacitor 13 is coupled to a predetermined current supply line.
the field-effect transistor 12 is configured to supply large electric current to the organic EL element 350 .
a gate electrode G is coupled to a drain electrode D of the field-effect transistor 11 .
a drain electrode D is coupled to an anode of the organic EL element 350 and a source electrode S is coupled to a predetermined current supply line.
the organic EL element 350 is driven by the field-effect transistor 12 .
the field-effect transistors 11 and 12 each contain a substrate 21 , a gate electrode 22 , a gate insulating layer 23 , a source electrode 24 , a drain electrode 25 , an oxide semiconductor layer 26 , and a passivation layer.
the field-effect transistors 11 and 12 can be formed with the materials and by the processes mentioned in the descriptions of the field-effect transistor of the present disclosure.
FIG. 4 is a schematic structural view illustrating one example of an organic EL element.
the organic EL element 350 contains a cathode 312 , an anode 314 , and an organic EL thin film layer 340 .
a material of the cathode 312 is not particularly limited and may be appropriately selected depending on the intended purpose.
the material include aluminium (Al), magnesium (Mg)-silver (Ag) alloy, aluminium (Al)-lithium (Li) alloy, and indium tin oxide (ITO).
the magnesium (Mg)-silver (Ag) alloy becomes a high-reflective electrode if having a sufficient thickness, and an extremely thin film (less than about 20 nm) of the Mg—Ag alloy becomes a semi-transparent electrode.
FIG. 4 light is taken out from the side of the anode, but light can be taken out from the side of the cathode by making the cathode as a transparent or semi-transparent electrode.
a material of the anode 314 is not particularly limited and may be appropriately selected depending on the intended purpose.
the material include indium tin oxide (ITO), indium zinc oxide (IZO), and silver (Ag)-neodymium (Nd) alloy. Note that, in the case where a silver alloy is used, the resultant electrode becomes a high-reflective electrode, which is suitable for taking light out from the side of the cathode.
the organic EL thin film layer 340 contains an electron transporting layer 342 , a light emitting layer 344 , and a hole transporting layer 346 .
the electron transporting layer 342 is coupled to a cathode 312
the hole transporting layer 346 is coupled to an anode 314 .
the light emitting layer 344 emits light, when a predetermined voltage is applied between the anode 314 and the cathode 312 .
the electron transporting layer 342 and the light emitting layer 344 may form a single layer.
an electron injecting layer may be disposed between the electron transporting layer 342 and the cathode 312 .
a hole injecting layer may be disposed between the hole transporting layer 346 and the anode 314 .
the above-described light control element in FIG. 4 is a so-called “bottom emission” organic EL element, in which light is taken out from the side of the substrate.
the light control element may be a “top emission” organic EL element, in which light is taken out from the opposite side to the substrate.
FIG. 5 illustrates one example of a display element combining an organic EL element 350 and a drive circuit 320 .
the display element contains a substrate 31 , first and second gate electrodes 32 and 33 , a gate insulating layer 34 , first and second source electrodes 35 and 36 , first and second drain electrodes 37 and 38 , first and second oxide semiconductor layers 39 and 40 , first and second passivation layers 41 and 42 , and an interlayer insulating layer 43 , an organic EL layer 44 , and a cathode 45 .
the first drain electrode 37 and the second gate electrode 33 are coupled to each other via a through-hole formed in the gate insulating layer 34 .
FIG. 5 is drawn as if the capacitor was formed between the second gate electrode 33 and the second drain electrode 38 .
the position of the capacitor formed is not limited and a capacitor having a necessary capacity can be appropriately designed at a necessary position.
the second drain electrode 38 functions as an anode of the organic EL element 350 .
the substrate 31 , the first and second gate electrodes 32 and 33 , the gate insulating layer 34 , the first and second source electrodes 35 and 36 , the first and second drain electrodes 37 and 38 , the first and second oxide semiconductor layers 39 and 40 , and the first and second passivation layers 41 and 42 can be formed with the materials and by the processes mentioned in the descriptions of the field-effect transistor of the present disclosure.
first passivation layer 41 and the second passivation layer 42 correspond to the passivation layer of the field-effect transistor of the present disclosure.
the gate insulating layer 34 corresponds to the gate insulating layer of the field-effect transistor of the present disclosure.
a material of the interlayer insulating layer 43 is not particularly limited and may be appropriately selected depending on the intended purpose.
the material include organic materials, inorganic materials, and organic-inorganic composite materials.
organic materials examples include: resins, such as polyimide, acrylic resins, fluororesins, non-fluororesins, olefin resins, and silicone resins; and photosensitive resins using these resins.
resins such as polyimide, acrylic resins, fluororesins, non-fluororesins, olefin resins, and silicone resins
photosensitive resins using these resins include: resins, such as polyimide, acrylic resins, fluororesins, non-fluororesins, olefin resins, and silicone resins.
inorganic materials examples include spin-on-glass (SOG) materials, such as AQUAMICA, available from AZ Electronic Materials.
SOG spin-on-glass
organic-inorganic composite materials examples include the organic-inorganic composite compounds containing a silane compound disclosed in Japanese Unexamined Patent Application Publication No. 2007-158146.
the interlayer insulating layer preferably has barrier properties against moisture, oxygen, and hydrogen contained in the atmosphere.
a formation process of the interlayer insulating layer is not particularly limited and may be appropriately selected depending on the intended purpose.
Examples of the formation process include: a method of directly forming a film having a desired shape through spin coating, inkjet printing, slit coating, nozzle printing, gravure printing, or dip coating; and a method of patterning a photosensitive material through photolithography.
Production methods of the organic EL layer 44 and the cathode 45 are not particularly limited and may be appropriately selected depending on the intended purpose. Examples of the production methods include: vacuum film forming methods (e.g., vacuum deposition and sputtering); and solution processes (e.g., inkjet printing and nozzle coating).
vacuum film forming methods e.g., vacuum deposition and sputtering
solution processes e.g., inkjet printing and nozzle coating
the substrate 31 , the gate insulating layer 34 , and the second drain electrode (anode) 38 are required to be transparent.
the structure of the display element may be a structure where the organic EL element 350 is disposed above the drive circuit 320 .
the organic EL element is a so-called “bottom emission” organic EL element where emitted light is taken out from the side of the substrate, and therefore the drive circuit 320 is required to be transparent.
the source electrode and the drain electrode or the anode preferably used are conductive transparent oxides, such as ITO, In 2 O 3 , SnO 2 , ZnO, Ga-doped ZnO, Al-doped ZnO, and Sb-doped SnO 2 .
conductive transparent oxides such as ITO, In 2 O 3 , SnO 2 , ZnO, Ga-doped ZnO, Al-doped ZnO, and Sb-doped SnO 2 .
the display control device 400 contains an image-data-processing circuit 402 , a scanning-line-driving circuit 404 , and a data-line-driving circuit 406 .
the image-data-processing circuit 402 determines brightness of a plurality of display elements 302 in the display 310 based on output signals of the image output circuit.
the scanning-line-driving circuit 404 individually applies voltage to “n” scanning lines according to the instructions of the image-data-processing circuit 402 .
the data-line-driving circuit 406 individually applies voltage to “m” data lines according to the instructions of the image-data-processing circuit 402 .
the above embodiment refers to a case where the organic EL thin film layer contains an electron transporting layer, a light emitting layer, and a hole transporting layer, but this embodiment is not limitative.
an electron transporting layer and a light emitting layer may be combined as a single layer.
an electron injecting layer may be disposed between the electron transporting layer and the cathode.
a hole injecting layer may be disposed between the hole transporting layer and the anode.
the above embodiment refers to a so-called “bottom emission” organic EL element where emitted light is taken out from the side of the substrate, but this embodiment is not limitative.
light may be taken out from the opposite side of the substrate by using a high-reflective electrode (e.g., a silver (Ag)-neodymium (Nd) alloy electrode) as the anode 314 and using a semi-transparent electrode (e.g., a magnesium (Mg)-silver (Ag) alloy electrode) or a transparent electrode (e.g., an ITO electrode) as the cathode 312 .
a high-reflective electrode e.g., a silver (Ag)-neodymium (Nd) alloy electrode
a semi-transparent electrode e.g., a magnesium (Mg)-silver (Ag) alloy electrode
a transparent electrode e.g., an ITO electrode
the above embodiment refers to a case where the light control element is an organic EL element, but this embodiment is not limitative.
the light control element may be an electrochromic element.
the display 310 is an electrochromic display.
the light control element may be a liquid crystal element.
the display 310 is a liquid crystal display. As illustrated as one example in FIG. 8 , it is not necessary to provide a current supply line for a display element 302 ′.
a drive circuit 320 ′ may be produced with one field-effect transistor 14 , which is similar to each of the field-effect transistors ( 11 and 12 ), and a capacitor 15 .
a gate electrode G is coupled to a predetermined scanning line and a source electrode S is coupled to a predetermined data line.
a drain electrode D is coupled to a pixel electrode of a liquid crystal element 370 and the capacitor 15 .
referential numerals 16 and 372 each denote a counter electrode (common electrode) of the liquid crystal element 370 .
the light control element may be an electrophoretic element. Moreover, the light control element may be an electrowetting element.
the above embodiment refers to a case where the display is a color display, but this embodiment is not limitative.
the field-effect transistor according to the present embodiment can also be used for products other than the display elements (e.g., IC cards and ID tags).
the display element, the image display device, and the system each using the field-effect transistor of the present disclosure achieve high-speed operations and a long service life.
a gate electrode 92 was formed on a glass substrate (substrate 91 ). Specifically, an Al (aluminium) alloy film was formed on the glass substrate (substrate 91 ) by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the gate electrode 92 to be formed. Moreover, resist-pattern-free regions of the Al alloy film were removed by etching. Thereafter, the resist pattern was also removed to form the gate electrode 92 formed of the Al alloy film.
a gate insulating layer 93 was formed on the substrate and the gate electrode. Specifically, a SiO 2 film was formed on the substrate and the gate electrode by chemical vapor deposition (CVD) so as to have an average film thickness of about 300 nm.
CVD chemical vapor deposition
a source electrode 94 and a drain electrode 95 were formed on the gate insulating layer 93 .
an Al (aluminium) alloy film was formed on the gate insulating layer 93 by DC sputtering so as to have an average film thickness of about 100 nm.
a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the source electrode 94 and the drain electrode 95 to be formed.
resist-pattern-free regions of the Al alloy film were removed by RIE. Thereafter, the resist pattern was also removed to form the source electrode 94 and the drain electrode 95 , each of which was formed of the Al alloy film.
an oxide semiconductor layer 96 was formed. Specifically, a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Mg—In based oxide film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the oxide semiconductor layer 96 to be formed. Moreover, resist-pattern-free regions of the Mg—In based oxide film were removed by etching. Thereafter, the resist pattern was also removed to form the oxide semiconductor layer 96 . As a result, the oxide semiconductor layer 96 was formed in a manner that a channel was formed between the source electrode 94 and the drain electrode 95 .
a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm.
the passivation-layer-coating liquid was dropped and spin-coated on the substrate under predetermined conditions (rotation was performed at 1,000 rpm for 5 seconds and then at 3,000 rpm for 20 seconds, and the rotation was stopped so as to be 0 rpm in 5 seconds). Subsequently, the resultant was subjected to an evaporation treatment in the atmosphere at 120° C. for 1 hour and then baking in the O 2 atmosphere at 400° C. for 3 hours, to form a paraelectric amorphous oxide film as a passivation layer 97 .
the average film thickness of the passivation layer was 135 nm.
an interlayer insulating layer 98 was formed. Specifically, a positive photosensitive organic-inorganic composite material (ADEKA Nanohybrid Silicone FX series, available from ADEKA CORPORATION) was spin-coated on the passivation layer 97 , and the resultant was subjected to prebake, exposure by an exposing device, and developing, to obtain a desired pattern. Thereafter, the resultant was post-baked at 150° C. for 1 hour and then at 200° C. for 1 hour.
ADEKA Nanohybrid Silicone FX series available from ADEKA CORPORATION
the resultant was subjected to a heat treatment at 230° C. for 1 hour as a heating treatment of a post treatment, to complete a field-effect transistor.
the average film thickness of the interlayer insulating layer was about 1,500 nm.
a gate electrode 92 was formed on a glass substrate (substrate 91 ). Specifically, an Al (aluminium) alloy film was formed on the glass substrate (substrate 91 ) by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the gate electrode 92 to be formed. Moreover, resist-pattern-free regions of the Al alloy film were removed by etching. Thereafter, the resist pattern was also removed to form the gate electrode 92 formed of the Al alloy film.
a gate insulating layer 93 was formed on the substrate and the gate electrode. Specifically, a Si 3 N 4 film was formed on the substrate and the gate electrode by chemical vapor deposition (CVD) so as to have an average film thickness of about 300 nm.
CVD chemical vapor deposition
a source electrode 94 and a drain electrode 95 were formed on the gate insulating layer 93 .
an Al (aluminium) alloy film was formed on the gate insulating layer 93 by DC sputtering so as to have an average film thickness of about 100 nm.
a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the source electrode 94 and the drain electrode 95 to be formed.
resist-pattern-free regions of the Al alloy film were removed by RIE. Thereafter, the resist pattern was also removed to form the source electrode 94 and the drain electrode 95 , each of which was formed of the Al alloy film.
an oxide semiconductor layer 96 was formed. Specifically, a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Mg—In based oxide film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the oxide semiconductor layer 96 to be formed. Moreover, resist-pattern-free regions of the Mg—In based oxide film were removed by etching. Thereafter, the resist pattern was also removed to form the oxide semiconductor layer 96 . As a result, the oxide semiconductor layer 96 was formed in a manner that a channel was formed between the source electrode 94 and the drain electrode 95 .
a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm.
the passivation-layer-coating liquid was dropped and spin-coated on the substrate under predetermined conditions (rotation was performed at 1,000 rpm for 5 seconds and then at 3,000 rpm for 20 seconds, and the rotation was stopped so as to be 0 rpm in 5 seconds). Subsequently, the resultant was subjected to an evaporation treatment in the atmosphere at 120° C. for 1 hour and then baking in the O 2 atmosphere at 400° C. for 3 hours, to form a paraelectric amorphous oxide film as a passivation layer 97 .
the average film thickness of the passivation layer was 135 nm.
an interlayer insulating layer 98 was formed. Specifically, a positive photosensitive organic-inorganic composite material (ADEKA Nanohybrid Silicone FX series, available from ADEKA CORPORATION) was spin-coated on the passivation layer 97 , and the resultant was subjected to prebake, exposure by an exposing device, and developing, to obtain a desired pattern. Thereafter, the resultant was post-baked at 150° C. for 1 hour and then at 200° C. for 1 hour.
ADEKA Nanohybrid Silicone FX series available from ADEKA CORPORATION
the resultant was subjected to a heat treatment at 230° C. for 1 hour as a heating treatment of a post treatment, to complete a field-effect transistor.
the average film thickness of the interlayer insulating layer was about 1,500 nm.
a gate electrode 92 was formed on a glass substrate (substrate 91 ). Specifically, an Al (aluminium) alloy film was formed on the glass substrate (substrate 91 ) by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the gate electrode 92 to be formed. Moreover, resist-pattern-free regions of the Al alloy film were removed by etching. Thereafter, the resist pattern was also removed to form the gate electrode 92 formed of the Al alloy film.
a gate insulating layer 93 was formed on the substrate and the gate electrode. Specifically, a SiON film was formed on the substrate and the gate electrode by chemical vapor deposition (CVD) so as to have an average film thickness of about 300 nm.
CVD chemical vapor deposition
a source electrode 94 and a drain electrode 95 were formed on the gate insulating layer 93 .
an Al (aluminium) alloy film was formed on the gate insulating layer 93 by DC sputtering so as to have an average film thickness of about 100 nm.
a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the source electrode 94 and the drain electrode 95 to be formed.
resist-pattern-free regions of the Al alloy film were removed by RIE. Thereafter, the resist pattern was also removed to form the source electrode 94 and the drain electrode 95 , each of which was formed of the Al alloy film.
an oxide semiconductor layer 96 was formed. Specifically, a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Mg—In based oxide film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the oxide semiconductor layer 96 to be formed. Moreover, resist-pattern-free regions of the Mg—In based oxide film were removed by etching. Thereafter, the resist pattern was also removed to form the oxide semiconductor layer 96 . As a result, the oxide semiconductor layer 96 was formed in a manner that a channel was formed between the source electrode 94 and the drain electrode 95 .
a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm.
the passivation-layer-coating liquid was dropped and spin-coated on the substrate under predetermined conditions (rotation was performed at 1,000 rpm for 5 seconds and then at 3,000 rpm for 20 seconds, and the rotation was stopped so as to be 0 rpm in 5 seconds). Subsequently, the resultant was subjected to an evaporation treatment in the atmosphere at 120° C. for 1 hour and then baking in the O 2 atmosphere at 400° C. for 3 hours, to form a paraelectric amorphous oxide film as a passivation layer 97 .
the average film thickness of the passivation layer was 135 nm.
an interlayer insulating layer 98 was formed. Specifically, a positive photosensitive organic-inorganic composite material (ADEKA Nanohybrid Silicone FX series, available from ADEKA CORPORATION) was spin-coated on the passivation layer 97 , and the resultant was subjected to prebake, exposure by an exposing device, and developing, to obtain a desired pattern. Thereafter, the resultant was post-baked at 150° C. for 1 hour and then at 200° C. for 1 hour.
ADEKA Nanohybrid Silicone FX series available from ADEKA CORPORATION
the resultant was subjected to a heat treatment at 230° C. for 1 hour as a heating treatment of a post treatment, to complete a field-effect transistor.
the average film thickness of the interlayer insulating layer was about 1,500 nm.
a gate electrode 92 was formed on a glass substrate (substrate 91 ). Specifically, an Al (aluminium) alloy film was formed on the glass substrate (substrate 91 ) by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the gate electrode 92 to be formed. Moreover, resist-pattern-free regions of the Al alloy film were removed by etching. Thereafter, the resist pattern was also removed to form the gate electrode 92 formed of the Al alloy film.
a gate insulating layer 93 was formed on the substrate and the gate electrode. Specifically, a SiO 2 film was formed on the substrate and the gate electrode by chemical vapor deposition (CVD) so as to have an average film thickness of about 300 nm.
CVD chemical vapor deposition
a source electrode 94 and a drain electrode 95 were formed on the gate insulating layer 93 .
an Al (aluminium) alloy film was formed on the gate insulating layer 93 by DC sputtering so as to have an average film thickness of about 100 nm.
a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the source electrode 94 and the drain electrode 95 to be formed.
resist-pattern-free regions of the Al alloy film were removed by RIE. Thereafter, the resist pattern was also removed to form the source electrode 94 and the drain electrode 95 , each of which was formed of the Al alloy film.
an oxide semiconductor layer 96 was formed. Specifically, a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Mg—In based oxide film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the oxide semiconductor layer 96 to be formed. Moreover, resist-pattern-free regions of the Mg—In based oxide film were removed by etching. Thereafter, the resist pattern was also removed to form the oxide semiconductor layer 96 . As a result, the oxide semiconductor layer 96 was formed in a manner that a channel was formed between the source electrode 94 and the drain electrode 95 .
a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm.
the passivation-layer-coating liquid was dropped and spin-coated on the substrate under predetermined conditions (rotation was performed at 1,000 rpm for 5 seconds and then at 3,000 rpm for 20 seconds, and the rotation was stopped so as to be 0 rpm in 5 seconds). Subsequently, the resultant was subjected to an evaporation treatment in the atmosphere at 120° C. for 1 hour and then baking in the O 2 atmosphere at 400° C. for 3 hours, to form a paraelectric amorphous oxide film as a passivation layer 97 .
the average film thickness of the passivation layer was 135 nm.
an interlayer insulating layer 98 was formed. Specifically, a positive photosensitive organic-inorganic composite material (ADEKA Nanohybrid Silicone FX series, available from ADEKA CORPORATION) was spin-coated on the passivation layer 97 , and the resultant was subjected to prebake, exposure by an exposing device, and developing, to obtain a desired pattern. Thereafter, the resultant was post-baked at 150° C. for 1 hour and then at 200° C. for 1 hour.
ADEKA Nanohybrid Silicone FX series available from ADEKA CORPORATION
the resultant was subjected to a heat treatment at 230° C. for 1 hour as a heating treatment of a post treatment, to complete a field-effect transistor.
the average film thickness of the interlayer insulating layer was about 1,500 nm.
a gate electrode 92 was formed on a glass substrate (substrate 91 ). Specifically, an Al (aluminium) alloy film was formed on the glass substrate (substrate 91 ) by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the gate electrode 92 to be formed. Moreover, resist-pattern-free regions of the Al alloy film were removed by etching. Thereafter, the resist pattern was also removed to form the gate electrode 92 formed of the Al alloy film.
a gate insulating layer 93 was formed on the substrate and the gate electrode. Specifically, a Si 3 N 4 film was formed on the substrate and the gate electrode by chemical vapor deposition (CVD) so as to have an average film thickness of about 300 nm.
CVD chemical vapor deposition
a source electrode 94 and a drain electrode 95 were formed on the gate insulating layer 93 .
an Al (aluminium) alloy film was formed on the gate insulating layer 93 by DC sputtering so as to have an average film thickness of about 100 nm.
a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the source electrode 94 and the drain electrode 95 to be formed.
resist-pattern-free regions of the Al alloy film were removed by RIE. Thereafter, the resist pattern was also removed to form the source electrode 94 and the drain electrode 95 , each of which was formed of the Al alloy film.
an oxide semiconductor layer 96 was formed. Specifically, a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Mg—In based oxide film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the oxide semiconductor layer 96 to be formed. Moreover, resist-pattern-free regions of the Mg—In based oxide film were removed by etching. Thereafter, the resist pattern was also removed to form the oxide semiconductor layer 96 . As a result, the oxide semiconductor layer 96 was formed in a manner that a channel was formed between the source electrode 94 and the drain electrode 95 .
a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm.
the passivation-layer-coating liquid was dropped and spin-coated on the substrate under predetermined conditions (rotation was performed at 1,000 rpm for 5 seconds and then at 3,000 rpm for 20 seconds, and the rotation was stopped so as to be 0 rpm in 5 seconds). Subsequently, the resultant was subjected to an evaporation treatment in the atmosphere at 120° C. for 1 hour and then baking in the O 2 atmosphere at 400° C. for 3 hours, to form a paraelectric amorphous oxide film as a passivation layer 97 .
the average film thickness of the passivation layer was 135 nm.
an interlayer insulating layer 98 was formed. Specifically, a positive photosensitive organic-inorganic composite material (ADEKA Nanohybrid Silicone FX series, available from ADEKA CORPORATION) was spin-coated on the passivation layer 97 , and the resultant was subjected to prebake, exposure by an exposing device, and developing, to obtain a desired pattern. Thereafter, the resultant was post-baked at 150° C. for 1 hour and then at 200° C. for 1 hour.
ADEKA Nanohybrid Silicone FX series available from ADEKA CORPORATION
the resultant was subjected to a heat treatment at 230° C. for 1 hour as a heating treatment of a post treatment, to complete a field-effect transistor.
the average film thickness of the interlayer insulating layer was about 1,500 nm.
0.05 mL of a 2-ethylhexanoic acid solution of neodymium 2-ethylhexanoate (Nd content: 12%, Strem 60-2400, available from Strem Chemicals Inc.), 0.32 g of europium 2-ethylhexanoate (Strem 93-6311, available from Strem Chemicals Inc.), 0.12 mL of a toluene solution of barium 2-ethylhexanoate (Ba content: 8%, Wako 021-09471, available from Wako Chemical, Ltd.), 0.03 mL of a mineral spirit solution of zirconium oxide 2-ethylhexanoate (Zr content: 12%, Wako 269-01116, available from Wako Chemical, Ltd.), and 0.06 mL of a 2-ethylhexanoic acid solution of hafnium 2-ethyl
a gate electrode 92 was formed on a glass substrate (substrate 91 ). Specifically, an Al (aluminium) alloy film was formed on the glass substrate (substrate 91 ) by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the gate electrode 92 to be formed. Moreover, resist-pattern-free regions of the Al alloy film were removed by etching. Thereafter, the resist pattern was also removed to form the gate electrode 92 formed of the Al alloy film.
a gate insulating layer 93 was formed on the substrate and the gate electrode. Specifically, a SiON film was formed on the substrate and the gate electrode by chemical vapor deposition (CVD) so as to have an average film thickness of about 300 nm.
CVD chemical vapor deposition
a source electrode 94 and a drain electrode 95 were formed on the gate insulating layer 93 .
an Al (aluminium) alloy film was formed on the gate insulating layer 93 by DC sputtering so as to have an average film thickness of about 100 nm.
a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the source electrode 94 and the drain electrode 95 to be formed.
resist-pattern-free regions of the Al alloy film were removed by RIE. Thereafter, the resist pattern was also removed to form the source electrode 94 and the drain electrode 95 , each of which was formed of the Al alloy film.
an oxide semiconductor layer 96 was formed. Specifically, a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Mg—In based oxide film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the oxide semiconductor layer 96 to be formed. Moreover, resist-pattern-free regions of the Mg—In based oxide film were removed by etching. Thereafter, the resist pattern was also removed to form the oxide semiconductor layer 96 . As a result, the oxide semiconductor layer 96 was formed in a manner that a channel was formed between the source electrode 94 and the drain electrode 95 .
a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm.
the passivation-layer-coating liquid was dropped and spin-coated on the substrate under predetermined conditions (rotation was performed at 1,000 rpm for 5 seconds and then at 3,000 rpm for 20 seconds, and the rotation was stopped so as to be 0 rpm in 5 seconds). Subsequently, the resultant was subjected to an evaporation treatment in the atmosphere at 120° C. for 1 hour and then baking in the O 2 atmosphere at 400° C. for 3 hours, to form a paraelectric amorphous oxide film as a passivation layer 97 .
the average film thickness of the passivation layer was 135 nm.
an interlayer insulating layer 98 was formed. Specifically, a positive photosensitive organic-inorganic composite material (ADEKA Nanohybrid Silicone FX series, available from ADEKA CORPORATION) was spin-coated on the passivation layer 97 , and the resultant was subjected to prebake, exposure by an exposing device, and developing, to obtain a desired pattern. Thereafter, the resultant was post-baked at 150° C. for 1 hour and then at 200° C. for 1 hour.
ADEKA Nanohybrid Silicone FX series available from ADEKA CORPORATION
the resultant was subjected to a heat treatment at 230° C. for 1 hour as a heating treatment of a post treatment, to complete a field-effect transistor.
the average film thickness of the interlayer insulating layer was about 1,500 nm.
a gate electrode 92 was formed on a glass substrate (substrate 91 ). Specifically, an Al (aluminium) alloy film was formed on the glass substrate (substrate 91 ) by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the gate electrode 92 to be formed. Moreover, resist-pattern-free regions of the Al alloy film were removed by etching. Thereafter, the resist pattern was also removed to form the gate electrode 92 formed of the Al alloy film.
a gate insulating layer 93 was formed on the substrate and the gate electrode. Specifically, a SiO 2 film was formed on the substrate and the gate electrode by chemical vapor deposition (CVD) so as to have an average film thickness of about 300 nm.
CVD chemical vapor deposition
a source electrode 94 and a drain electrode 95 were formed on the gate insulating layer 93 .
an Al (aluminium) alloy film was formed on the gate insulating layer 93 by DC sputtering so as to have an average film thickness of about 100 nm.
a photoresist was coated on the Al alloy film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the source electrode 94 and the drain electrode 95 to be formed.
resist-pattern-free regions of the Al alloy film were removed by RIE. Thereafter, the resist pattern was also removed to form the source electrode 94 and the drain electrode 95 , each of which was formed of the Al alloy film.
an oxide semiconductor layer 96 was formed. Specifically, a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Mg—In based oxide film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the oxide semiconductor layer 96 to be formed. Moreover, resist-pattern-free regions of the Mg—In based oxide film were removed by etching. Thereafter, the resist pattern was also removed to form the oxide semiconductor layer 96 . As a result, the oxide semiconductor layer 96 was formed in a manner that a channel was formed between the source electrode 94 and the drain electrode 95 .
a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm.
the passivation-layer-coating liquid was dropped and spin-coated on the substrate under predetermined conditions (rotation was performed at 1,000 rpm for 5 seconds and then at 3,000 rpm for 20 seconds, and the rotation was stopped so as to be 0 rpm in 5 seconds). Subsequently, the resultant was subjected to an evaporation treatment in the atmosphere at 120° C. for 1 hour and then baking in the O 2 atmosphere at 400° C. for 3 hours, to form a paraelectric amorphous oxide film as a passivation layer 97 .
the average film thickness of the passivation layer was 135 nm.
an interlayer insulating layer 98 was formed. Specifically, a positive photosensitive organic-inorganic composite material (ADEKA Nanohybrid Silicone FX series, available from ADEKA CORPORATION) was spin-coated on the passivation layer 97 , and the resultant was subjected to prebake, exposure by an exposing device, and developing, to obtain a desired pattern. Thereafter, the resultant was post-baked at 150° C. for 1 hour and then at 200° C. for 1 hour.
ADEKA Nanohybrid Silicone FX series available from ADEKA CORPORATION
the resultant was subjected to a heat treatment at 230° C. for 1 hour as a heating treatment of a post treatment, to complete a field-effect transistor.
the average film thickness of the interlayer insulating layer was about 1,500 nm.
a gate electrode 92 was formed on a glass substrate (substrate 91 ). Specifically, a Mo (molybdenum) film was formed on the glass substrate (substrate 91 ) by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Mo film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the gate electrode 92 to be formed. Moreover, resist-pattern-free regions of the Mo film were removed by etching. Thereafter, the resist pattern was also removed to form the gate electrode 92 formed of the Mo film.
a Mo (molybdenum) film was formed on the glass substrate (substrate 91 ) by DC sputtering so as to have an average film thickness of about 100 nm.
a photoresist was coated on the Mo film, and the resultant was subjected to pre
a gate insulating layer 93 was formed on the substrate and the gate electrode. Specifically, an Al 2 O 3 film was formed as the gate insulating layer 93 on the substrate and the gate electrode by RF sputtering so as to have an average film thickness of about 300 nm.
a source electrode 94 and a drain electrode 95 were formed on the gate insulating layer 93 .
a Mo (molybdenum) film was formed on the gate insulating layer 93 by DC sputtering so as to have an average film thickness of about 100 nm.
a photoresist was coated on the Mo film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the source electrode 94 and the drain electrode 95 to be formed.
resist-pattern-free regions of the Mo film were removed by RIE. Thereafter, the resist pattern was also removed to form the source electrode 94 and the drain electrode 95 , each of which was formed of the Mo film.
an oxide semiconductor layer 96 was formed. Specifically, a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm. Thereafter, a photoresist was coated on the Mg—In based oxide film, and the resultant was subjected to prebake, exposure by an exposing device, and developing, to form a resist pattern having the same pattern as a pattern of the oxide semiconductor layer 96 to be formed. Moreover, resist-pattern-free regions of the Mg—In based oxide film were removed by etching. Thereafter, the resist pattern was also removed to form the oxide semiconductor layer 96 . As a result, the oxide semiconductor layer 96 was formed in a manner that a channel was formed between the source electrode 94 and the drain electrode 95 .
a Mg—In based oxide (In 2 MgO 4 ) film was formed by DC sputtering so as to have an average film thickness of about 100 nm.
the passivation-layer-coating liquid was dropped and spin-coated on the substrate under predetermined conditions (rotation was performed at 3,000 rpm for 20 seconds and the rotation was stopped so as to be 0 rpm in 5 seconds). Subsequently, the resultant was subjected to an evaporation treatment in the atmosphere at 120° C. for 1 hour and then baking in the O 2 atmosphere at 400° C. for 3 hours, to form a paraelectric amorphous oxide film as a passivation layer 97 .
an interlayer insulating layer 98 was formed. Specifically, a positive photosensitive organic-inorganic composite material (ADEKA Nanohybrid Silicone FX series, available from ADEKA CORPORATION) was spin-coated on the passivation layer 97 , and the resultant was subjected to prebake, exposure by an exposing device, and developing, to obtain a desired pattern. Thereafter, the resultant was post-baked at 150° C. for 1 hour and then at 200° C. for 1 hour.
ADEKA Nanohybrid Silicone FX series available from ADEKA CORPORATION
the resultant was subjected to a heat treatment at 230° C. for 1 hour as a heating treatment of a post treatment, to complete a field-effect transistor.
the average film thickness of the interlayer insulating layer was about 1,500 nm.
the transistor characteristics were evaluated by measuring a relationship (Vgs ⁇ Ids) between the voltage (Vgs) between the gate electrode 92 and the source electrode 94 and the current (Ids) between the drain electrode 95 and the source electrode 94 , when the voltage between the drain electrode 95 and the source electrode 94 (Vds) was +10 V.
a field-effect mobility in a saturated region was calculated from the evaluation result of the transistor characteristics (Vgs ⁇ Ids).
a subthreshold swing (SS) was calculated as an index for sharpness of the rise of Ids upon the application of Vgs.
threshold voltage (Vth) was calculated as a voltage value at the time of the rise of Ids upon the application of Vgs.
Table 2 presents the mobility, the on/off ratio, the subthreshold swing, and the Vth calculated from the transistor characteristics of each of the field-effect transistors produced in Examples 1 to 7 and Comparative Example 1.
the mobility is high, the on/off ratio is high, the subthreshold swing is low, and the Vth is around 0 V, are expressed as excellent transistor characteristics.
the on/off ratio is 1.0 ⁇ 10 8 or greater
the subthreshold swing is 0.7 or less
the Vth is within a range of ⁇ 5 V
the results are expressed as excellent transistor characteristics.
a bias temperature stress (BTS) test was performed on each of the field-effect transistors produced in Examples 1 to 7 and Comparative Example 1 in the atmosphere (temperature: 50° C. and relative humidity: 50%) for 100 hours.
Vgs ⁇ Ids Vgs ⁇ Ids
Table 3 presents the values of ⁇ Vth with respect to the stress time of 100 hours in the BTS test performed on each of the field-effect transistors of Examples 1 to 7 and Comparative Example 1.
⁇ Vth denotes a change of Vth from 0 hours of the stress time through a certain stress time.
e in the vertical axis in the graph of FIG. 11 and in the horizontal axis in the graph of FIG. 12 denotes “the exponent of 10.”
e ⁇ 3 denotes “1.0 ⁇ 10 ⁇ 3 ” and “0.001”
1e+05 denotes “1.0 ⁇ 10 +5 ” and “100,000.”
Example 4 It is found from FIG. 12 and Table 3 that the field-effect transistor produced in Example 4 had a small shift in ⁇ Vth and exhibited excellent reliability in the BTS test. Similarly, it is found from Table 3 that each of the field-effect transistors produced in Examples 1 to 3 and 5 to 7 had a small shift in ⁇ Vth and exhibited excellent reliability in the BTS test.
a field-effect transistor including:
a gate insulating layer which is formed between the substrate and the passivation layer
a source electrode and a drain electrode which are formed to be in contact with the gate insulating layer
a semiconductor layer which is formed at least between the source electrode and the drain electrode and is in contact with the gate insulating layer, the source electrode, and the drain electrode;
a gate electrode which is in contact with the gate insulating layer and faces the semiconductor layer via the gate insulating layer
the passivation layer is formed of a single layer containing a paraelectric amorphous oxide containing a Group A element which is an alkaline earth metal and a Group B element which is at least one selected from the group consisting of Ga, Sc, Y, and lanthanoid, and wherein the gate insulating layer contains at least one selected from the group consisting of oxides of Si, nitrides of Si, and oxynitrides of Si.
paraelectric amorphous oxide contains at least one selected from the group consisting of Al, Ti, Zr, Hf, Nb, and Ta.
the semiconductor layer contains an oxide semiconductor.
a display element including:
a light control element configured to control light output according to a driving signal
a driving circuit containing the field-effect transistor according to any one of ⁇ 1> to ⁇ 3> and configured to drive the light control element.
the light control element contains an electroluminescent element, an electrochromic element, a liquid crystal element, an electrophoretic element, or an electrowetting element.
An image display device configured to display an image corresponding to image data, the image display device including:
each of the plurality of display elements being the display element according to ⁇ 4> or ⁇ 5>;
a display control device configured to individually control the gate voltage of the field-effect transistors via the plurality of wired lines correspondingly to the image data.
a system including:
an image-data-generating device configured to generate image data based on image information to be displayed and to output the image data to the image display device.
the field-effect transistor according to any one of ⁇ 1> to ⁇ 3>, the display element according to ⁇ 4> or ⁇ 5>, the image display device according to ⁇ 6>, and the system according to ⁇ 7> can solve the above existing problems and achieve the object of the present disclosure.

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US10699632B2 (en)	2020-06-30	Field-effect transistor having dual gate oxide insulating layers, display element, image display device, and system
US10565954B2 (en)	2020-02-18	Field-effect transistor, display element, image display device, and system
US11876137B2 (en)	2024-01-16	Field-effect transistor including a metal oxide composite protective layer, and display element, image display device, and system including the field-effect transistor
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US10600916B2 (en)	2020-03-24	Field-effect transistor, display element, image display device, and system
US10269293B2 (en)	2019-04-23	Field-effect transistor (FET) having gate oxide insulating layer including SI and alkaline earth elements, and display element, image display and system including FET
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