TWI843016B - Portable detection device and environment monitoring method using the same - Google Patents

Abstract

A portable detection device includes a camera, a detector, a processor and a display. The camera is configured to capture an image of a barcode. The detector is configured to detect environmental information of a location where the barcode is located. The processor is configured to analyze the image to obtain the location of the barcode. The display is configured to display the environmental information at the location of the barcode.

Description

Portable detection device and environmental monitoring method using the same

The present invention relates to a portable detection device and an environmental monitoring method using the same.

There are many kinds of machines in the clean room. In order to ensure the normal operation of the machine or find out the reason for the failure of the machine, it is necessary to monitor the environmental information of the clean room. The current detection method is that the detector detects the environmental information in the clean room, and the personnel record the detection position. However, the method of manually recording the detection position often causes problems such as human error and inconsistency (or deviation) in the positions recorded by different personnel, resulting in the detected environmental information being not objective. Therefore, proposing a new clean room environment monitoring mechanism is one of the goals of the industry in this technical field.

The present invention relates to a portable detection device and an environmental monitoring method using the same, which can improve the aforementioned known problems.

According to an embodiment of the present invention, a portable detection device for clean room environment monitoring is provided. The portable detection device includes a camera, a detector, a processor and a display. The camera is used to capture a barcode image of a barcode. The detector is used to detect environmental information of a location of the barcode. The processor is used to analyze the barcode image to obtain the location of the barcode. The display is used to display the environmental information of the location of the barcode.

According to an embodiment of the present invention, an environmental monitoring method for use in a clean room is proposed. The environmental monitoring method includes the following steps. Capturing a barcode image of a barcode; analyzing the barcode image to obtain a location of the barcode; detecting environmental information of the location of the barcode; and displaying the environmental information of the location of the barcode.

In order to better understand the above and other aspects of the present invention, the following is a specific example and a detailed description with the attached drawings as follows:

10: Clean room

11: Machine

12: Barcode

100: Portable detection device

110: Camera

120: Detector

130: Processor

140: Display

150: Wireless communicator

160: Alarm

E1: Environmental information

M1: Barcode image

M2: Surrounding images

P1: Location

S1: Warning signal

S110~S140: Steps

Figure 1 shows the relative configuration of several machines in a clean room according to an embodiment of the present invention.

Figure 2 shows a functional block diagram of a portable detection device for clean room environment monitoring according to an embodiment of the present invention.

Figure 3 is a schematic diagram showing the display of environmental information in Figure 1.

FIG. 4 is a flow chart showing an environmental monitoring method using the portable detection device of FIG. 2.

In the accompanying drawings, the thickness of layers, films, panels, regions, etc., is exaggerated for clarity. Throughout the specification, the same figure reference numerals represent the same elements. It should be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected to" another element, it can be directly on or connected to another element, or an intermediate element may also exist. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intermediate elements. As used herein, "connection" may refer to physical and/or electrical connection. Furthermore, "electrical connection" or "coupling" may be the presence of other elements between two elements.

The terms used herein are for the purpose of describing specific embodiments only and are not limiting. As used herein, unless the context clearly indicates otherwise, the singular forms "a", "an", and "the" are intended to include the plural forms, including "at least one". " or "means" and/or". As used herein, the term "and/or" includes any and all combinations of one or more of the relevant listed items. It should also be understood that when used in this specification, the term "includes" and/or "includes" specifies the presence of the features, regions, wholes, steps, operations, elements, and/or parts, but does not exclude the presence or addition of one or more other features, regions, wholes, steps, operations, elements, parts, and/or combinations thereof.

In addition, relative terms such as "lower" or "bottom" and "upper" or "top" may be used herein to describe the relationship of one element to another element, as shown in the figures. It should be understood that relative terms are intended to include different orientations of the device in addition to the orientation shown in the figures. For example, if the device in one figure is flipped, the elements described as being on the "lower" side of other elements will be oriented on the "upper" side of the other elements. Therefore, the exemplary term "lower" can include both "lower" and "upper" orientations, depending on the particular orientation of the figure. Similarly, if the device in one figure is flipped, the elements described as being "below" or "beneath" other elements will be oriented as being "above" other elements. Therefore, the exemplary term "below" or "beneath" can include both "upper" and "lower" orientations.

As used herein, "approximately", "approximately", or "substantially" includes the stated value and the average value within an acceptable deviation range of a particular value determined by a person of ordinary skill in the art, taking into account the measurement in question and the specific amount of error associated with the measurement (i.e., the limitations of the measurement system). For example, "approximately" can mean within one or more standard deviations of the stated value, or within ±30%, ±20%, ±10%, ±5%. Furthermore, "approximately", "approximately", or "substantially" as used herein can select a more acceptable deviation range or standard deviation based on the optical properties, etching properties, or other properties, and can apply to all properties without using one standard deviation.

Unless otherwise defined, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by a person of ordinary skill in the art to which the present invention belongs. It will be further understood that those terms as defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant art and the present invention, and will not be interpreted as an idealized or overly formal meaning unless expressly so defined herein.

Please refer to Figures 1 and 2. Figure 1 shows a relative configuration diagram of several machines 11 in a clean room 10 according to an embodiment of the present invention, and Figure 2 shows a functional block diagram of a portable detection device 100 for clean room environment monitoring according to an embodiment of the present invention. The portable detection device 100 includes a camera 110, a detector 120, a processor 130, a display 140, a wireless communicator 150, and an alarm 160.

The detector 120, the processor 130 and the wireless communicator 150 may be circuit structures formed by semiconductor processes. The processor 130 may be electrically connected to the camera 110, the detector 120, the display 140 and/or the wireless communicator 150 to transmit control signals to these components and/or receive signals from these components to control the operation of these components.

As shown in FIG. 1, several machines 11 are arranged in a clean room 10. The machine 11 includes, for example, a measuring instrument, a baking machine, a dry etching machine, an exposure developer, a coating machine, a film forming machine and/or other processing machines required for semiconductor manufacturing processes. At least one of these barcodes 12 can be arranged on at least one of these machines 11. For example, three barcodes 12 can be arranged on each of at least one machine 11. In a machine 11, at least one barcode 12 can be arranged on at least one side of the machine 11, for example, three barcodes 12 can be arranged on three different sides of the machine 11. In addition, the barcode 12 is, for example, a two-dimensional barcode or a three-dimensional barcode.

As shown in FIG. 2, the camera 110 is used to capture the barcode image of the barcode 12. The detector 120 is used to detect the environmental information E1 of the location P1 of the barcode 12. The processor 130 is used to analyze the barcode image M1 to obtain the location P1 of the barcode 12. The display 140 is used to display the environmental information E1 of the location P1 of the barcode 12. In this way, the environmental information E1 detected by the detector 120 and its location P1 have (or have) a corresponding relationship, making the detected environmental information E1 more objective. In detail, the environmental information E1 of the embodiment of the present invention corresponds to a specific location P1, and this location P1 is obtained by scanning the barcode 12, so there will be no problem of human misremembering the location. Moreover, the relative position of the barcode 12 and the machine 11 is fixed, so that the detected environmental information E1 has a high degree of clarity (the corresponding location P1 is clear), and there will be no problems such as human error or misrecording.

Environmental information E1 is information outside the machine 11 in the clean room 10, for example, it may include the temperature, humidity, wind speed, suspended particle concentration, number of suspended particles and/or other environmental information occurring in the clean room 10.

As shown in FIG. 2 , the camera 110 is further used to capture the surrounding image M2 of the barcode 12 when the environmental information E1 is abnormal. The processor 130 is further used to determine the cause of the abnormality based on the surrounding image M2 and the environmental information E1. Specifically, when the environmental information E1 is abnormal, the processor 130 determines whether there is an abnormality in the surrounding image M2 (e.g., human interference); when the surrounding image M2 is abnormal, it indicates that the abnormal environmental information E1 may be caused by human interference (not the abnormality caused by the environmental information E1 itself), so the processor 130 can ignore the abnormal environmental information E1. In this embodiment, the camera 110 is, for example, detachable and can be detached from the housing of the portable detection device 100 to be placed separately at a specific location in the clean room 10 to continuously capture (photograph) the surrounding images M2 near the barcode 12 or the machine 11 where the barcode 12 is configured. In addition, the detached camera 110 and the portable detection device 100 can communicate with each other using wireless communication technology.

In addition, the number of detectors 120 is at least one, which can detect the types of the aforementioned environmental information E1, such as a temperature sensor, a humidity sensor, a wind speed sensor and/or a suspended particle concentration sensor. In this way, the portable detection device 100 can achieve the technical effect of one device with multiple detections.

As shown in FIG. 1, the display 140 is used to display the relative configuration diagram of several machines 11 and the relative configuration diagram of these barcodes 12. In addition, the display 140 can mark the barcode 12 and/or machine 11 corresponding to the environmental information E1. For example, in the relative configuration diagram displayed on the display 140, the image of the barcode 12 or machine 11 corresponding to the environmental information E1 can be highlighted or flashed, so that the monitoring personnel can understand the barcode 12 and/or machine 11 corresponding to the currently detected environmental information E1.

As shown in FIG. 2, the wireless communicator 150 is used to transmit environmental information E1 to an external electronic device, such as a server. The external electronic device can collect environmental information E1 of at least one portable electronic device 100 and process it, such as storing and analyzing it.

As shown in FIG. 2 , the alarm device 160 can send out an alarm signal S1. When the environmental information E1 is abnormal, the alarm device 160 sends out an alarm signal S1. In one example, the alarm device 160 is, for example, a sound generator, and the alarm signal S1 is an alarm sound. In another example, the alarm device 160 is, for example, a light emitter, and the alarm signal S1 is an alarm light. In other examples, the alarm device 160 is, for example, a vibrator, and the alarm signal S1 is a vibration signal. In addition, the alarm signal S1 can be an alarm text, which can be displayed by the display 140. In this example, the alarm device 160 can be selectively omitted. In addition, the processor 130 can determine whether the environmental information E1 is equal to or higher than the threshold value T1 (the threshold value T1 is shown in FIG. 3); when the environmental information E1 is equal to or higher than the threshold value T1, the processor 130 controls the alarm device 160 to send out an alarm signal S1.

Please refer to FIG. 3, which shows a schematic diagram of the display 140 of FIG. 1 displaying the environmental information E1. The display 140 is further used to display the corresponding relationship between the environmental information E1 and time, such as a relationship curve. The detector 120 can continuously detect the environmental information E1 for a period of time, and the display 140 can display the change trend of the environmental information E1 within the period of time. The period of time can be, for example, a few seconds, a few minutes, a few hours, a few days, etc. The length of the period of time depends on actual needs and is not limited by the embodiment of the present invention. In another embodiment, the display 140 can display the relationship between the environmental information E1 and time, which can also be expressed in a table, not limited to a curve. In other embodiments, the display 140 may only display the environmental information E1 without displaying the time. Alternatively, the display 140 may only display abnormal environmental information E1 without displaying normal environmental information E1.

Please refer to Figure 4, which shows a flow chart of an environmental monitoring method using the portable detection device 100 of Figure 2.

In step S110, the camera 110 captures the barcode image M1 of the barcode 12. In step S120, the processor 130 analyzes the barcode image M1 to obtain the location P1 of the barcode 12. In step S130, the detector 120 detects the environmental information E1 of the location P1 of the barcode 12. In step S140, the display 140 displays the environmental information E1 of the location P1 of the barcode 12. The remaining embodiments of the environmental monitoring method have been described above and will not be repeated here.

In summary, the present invention provides a portable detection device and an environmental monitoring method using the same, wherein the detected environmental information corresponds to a clear location (for example, obtained by scanning a barcode), so the detected environmental information is more objective (compared to when the detection location is uncertain).

In summary, although the present invention has been disclosed as above by the embodiments, it is not intended to limit the present invention. Those with common knowledge in the technical field to which the present invention belongs can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope defined in the attached patent application.

100: Portable detection device

110: Camera

120: Detector

130: Processor

140: Display

150: Wireless communicator

160: Alarm

E1: Environmental information

M1: Barcode image

M2: Surrounding images

P1: Location

S1: Warning signal

Claims (10)

A portable detection device for use in clean room environment monitoring includes: a camera for capturing a barcode image of a barcode, wherein the barcode is disposed on a machine and the relative position of the barcode and the machine is fixed; a processor for analyzing the barcode image to obtain a location of the barcode; a detector for detecting environmental information of the location of the barcode; and a display for displaying the barcode image. The environmental information of the location of the barcode; the camera is further used to: when the environmental information is abnormal, capture a surrounding image of the barcode; wherein the processor is further used to: when the environmental information is abnormal, determine whether the surrounding image is abnormal; when the surrounding image is abnormal, ignore the abnormal environmental information; and when the surrounding image is not abnormal, determine the cause of the abnormality based on the environmental information. A portable detection device as described in claim 1, wherein the environmental information includes temperature, humidity, wind speed, suspended particle concentration and/or suspended particle count. A portable detection device as described in claim 1, wherein the display is further used to: display a relative configuration diagram of a plurality of the machines, wherein the barcode is configured on one of the machines; and display a relative configuration diagram of the barcodes. The portable detection device as described in claim 1, wherein the display is further used to: display a corresponding relationship between the environmental information and time. The portable detection device as described in claim 1 further includes: an alarm for: issuing an alarm signal when the environmental information is abnormal. A method for environmental monitoring in a clean room includes: a camera capturing a barcode image of a barcode, wherein the barcode is disposed on a machine and the relative position of the barcode and the machine is fixed; a processor analyzing the barcode image to obtain a location of the barcode; a detector detecting environmental information of the location of the barcode; and a display displaying the environmental information of the location of the barcode. The environmental monitoring method further includes: when the environmental information is abnormal, the camera captures an image of the surroundings of the barcode; when the environmental information is abnormal, the processor determines whether the surrounding image is abnormal; When the surrounding image is abnormal, the processor ignores the abnormal environmental information; and when the surrounding image is not abnormal, the processor determines the cause of the abnormality based on the environmental information. An environmental monitoring method as described in claim 6, wherein the environmental information includes temperature, humidity, wind speed, suspended particle concentration and/or suspended particle count. The environmental monitoring method as described in claim 6 further includes: the display displays a relative configuration diagram of a plurality of the machines, wherein the barcode is configured on one of the machines; and the display displays a relative configuration diagram of the barcodes. The environmental monitoring method as described in claim 6 further includes: the display device displays a corresponding relationship between the environmental information and time. The environmental monitoring method as described in claim 6 further includes: when the environmental information is abnormal, an alarm device sends a warning signal.

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