CN114184126A

CN114184126A - Portable detection device and environment monitoring method applying same

Info

Publication number: CN114184126A
Application number: CN202210105825.4A
Authority: CN
Inventors: 黄智强
Original assignee: AU Optronics Corp
Current assignee: AUO Corp
Priority date: 2021-09-28
Filing date: 2022-01-28
Publication date: 2022-03-15
Anticipated expiration: 2042-01-28
Also published as: CN114184126B; TW202314423A; TWI843016B

Abstract

The invention discloses a portable detection device and an environment monitoring method using the same. The portable detection device includes a camera, a detector, a processor and a display. The camera is used to capture barcode images of barcodes. The detector is used to detect the environmental information of the location of the barcode. The processor is used for analyzing the barcode image to obtain the location of the barcode. The display is used to display the environmental information of the location of the barcode.

Description

Portable detection device and environment monitoring method applying same

Technical Field

The embodiment of the invention relates to a portable detection device and an environment monitoring method applying the same.

Background

The clean room is configured with a plurality of machines, and environmental information of the clean room needs to be monitored in order to ensure normal operation of the machines or to find out the reason of failure of the machines. In the current detection mode, a detector detects environmental information in a clean room, and personnel record the detection position. However, the manual recording of the detected location often causes problems such as manual error recording and inconsistent (or inconsistent) recorded locations of different people, which results in the detected environmental information being not objective. Therefore, it is an object of the present invention to provide a new environmental monitoring mechanism for clean room.

Disclosure of Invention

The embodiment of the invention relates to a portable detection device and an environment monitoring method using the same, which can improve the prior art problems.

According to an embodiment of the present invention, a portable detecting device for environmental monitoring in a clean room is provided. The portable detection device comprises a camera, a detector, a processor and a display. The camera is used for capturing a bar code image of a bar code. The detector is used for detecting environmental information of a position of the bar code. The processor is used for analyzing the bar code image to obtain the position of the bar code. The display is used for displaying the environment information of the position of the bar code.

According to an embodiment of the present invention, an environmental monitoring method applied to a clean room is provided. The environment monitoring method comprises the following steps. Capturing a bar code image of a bar code; analyzing the bar code image to obtain a position of the bar code; detecting environmental information of the position of the bar code; and displaying the position environment information of the bar code.

For a better understanding of the above and other aspects of the present invention, reference should be made to the following detailed description of the preferred embodiments, which is to be read in connection with the accompanying drawings:

drawings

FIG. 1 is a diagram illustrating a relative arrangement of a plurality of tools in a clean room according to an embodiment of the present invention.

FIG. 2 is a block diagram of a portable detection device for environmental monitoring in a clean room according to an embodiment of the present invention.

FIG. 3 is a diagram illustrating the display of FIG. 1 displaying environment information.

Fig. 4 is a flowchart illustrating an environment monitoring method using the portable detection device of fig. 2.

Wherein, the reference numbers:

10 dust-free chamber

11: machine table

12 bar code

100 portable detection device

110 camera

120: detector

130, processor

140 display

150 wireless communicator

160 alarm

E1 environmental information

M1 Bar code image

M2 surrounding image

P1 position

S1 warning signal

S110-S140 step

Detailed Description

In the drawings, the thickness of layers, films, panels, regions, etc. have been exaggerated for clarity. Like reference numerals refer to like elements throughout the specification. It will be understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "connected to" another element, it can be directly on or connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" or "directly connected to" another element, there are no intervening elements present. As used herein, "connected" may refer to physical and/or electrical connections. Further, "electrically connected" or "coupled" may mean that there are additional elements between the two elements.

The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms, including "at least one", unless the content clearly indicates otherwise. "or" means "and/or". As used herein, the term "and/or" includes any and all combinations of one or more of the associated listed items. It will be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of stated features, regions, integers, steps, operations, elements, and/or components, but do not preclude the presence or addition of one or more other features, regions integers, steps, operations, elements, components, and/or groups thereof.

Furthermore, relative terms, such as "lower" or "bottom" and "upper" or "top," may be used herein to describe one element's relationship to another element, as illustrated. It will be understood that relative terms are intended to encompass different orientations of the device in addition to the orientation depicted in the figures. For example, if the device in one of the figures is turned over, elements described as being on the "lower" side of other elements would then be oriented on "upper" sides of the other elements. Thus, the exemplary term "lower" can include both an orientation of "lower" and "upper," depending on the particular orientation of the figure. Similarly, if the device in one of the figures is turned over, elements described as "below" or "beneath" other elements would then be oriented "above" the other elements. Thus, the exemplary terms "below" or "beneath" can encompass both an orientation of above and below.

As used herein, "about", "approximately", or "substantially" includes the stated value and the average value within an acceptable range of deviation of the specified value as determined by one of ordinary skill in the art, taking into account the measurement in question and the specified amount of error associated with the measurement (i.e., the limitations of the measurement system). For example, "about" may mean within one or more standard deviations of the stated value, or within ± 30%, ± 20%, ± 10%, ± 5%. Further, as used herein, "about", "approximately" or "substantially" may be selected based on optical properties, etch properties, or other properties, with a more acceptable range of deviation or standard deviation, and not all properties may be applied with one standard deviation.

Unless defined otherwise, all terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. It will be further understood that terms, such as those defined in commonly used dictionaries, should be interpreted as having a meaning that is consistent with their meaning in the context of the relevant art and the present invention and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

Referring to fig. 1 and 2, fig. 1 is a diagram illustrating a relative arrangement of a plurality of machines 11 of a clean room 10 according to an embodiment of the invention, and fig. 2 is a functional block diagram of a portable detection device 100 for environmental monitoring of a clean room according to an embodiment of the invention. The portable detection device 100 includes a camera 110, a detector 120, a processor 130, a display 140, a wireless communicator 150 and an alarm 160.

The detector 120, the processor 130, and the wireless communicator 150 may be a circuit (circuit) structure formed by a semiconductor process. The processor 130 may be electrically connected to the camera 110, the detector 120, the display 140 and/or the wireless communicator 150 to transmit control signals to these components and/or receive signals from these components to control the operations of these components.

As shown in fig. 1, a plurality of tools 11 are disposed in the clean room 10. The tool 11 may include a metrology tool, a bake machine, a dry etcher, an exposure and development machine, a coater, a film forming machine, and/or other processing tools required for semiconductor processing. At least one of the bar codes 12 may be disposed on at least one of the tools 11. For example, three bar codes 12 may be disposed on each of the at least one machine 11. In a machine 11, at least one barcode 12 may be disposed on at least one side of the machine 11, for example, three barcodes 12 may be disposed on three different sides of the machine 11. The barcode 12 is, for example, a two-dimensional barcode or a three-dimensional barcode.

As shown in fig. 2, the camera 110 is used for capturing a barcode image of the barcode 12. The detector 120 is used to detect the environmental information E1 of the position P1 of the barcode 12. The processor 130 is configured to analyze the barcode image M1 to obtain the position P1 of the barcode 12. The display 140 is used for displaying the environmental information E1 of the position P1 of the barcode 12. Thus, the environmental information E1 detected by the detector 120 has a corresponding relationship with (or has) the position P1, so that the detected environmental information E1 is more objective. In detail, the environmental information E1 of the embodiment of the present invention corresponds to the specific location P1, and the location P1 is obtained by scanning the barcode 12, so that the problem of recording the location by mistake does not occur. Moreover, the relative position between the barcode 12 and the machine 11 is fixed, so that the detected environmental information E1 has high clarity (the corresponding position P1 is clear), and the problems such as human error and error recording do not occur.

The environmental information E1 is information outside the machine 11 in the space of the clean room 10, and may include, for example, temperature, humidity, wind speed, aerosol concentration, aerosol particle count, and/or other environmental information occurring in the clean room 10.

As shown in fig. 2, the camera 110 is further configured to: when the environmental information E1 is abnormal, the surrounding image M2 of the barcode 12 is captured. The processor 130 is further configured to: the cause of the abnormality is determined based on the surrounding image M2 and the environmental information E1. In detail, when the environmental information E1 is abnormal, the processor 130 determines whether there is an abnormality (e.g., human interference) in the surrounding image M2; when the surrounding image M2 has an abnormality, the environmental information E1 indicating the abnormality may be caused by human interference (not caused by the environmental information E1 itself), so the processor 130 may ignore the abnormal environmental information E1. In the present embodiment, the camera 110 is detachable, for example, and can be detached from the housing of the portable detection device 100 to be separately placed at a specific position of the clean room 10, and continuously capture (photograph) the image M2 around the barcode 12 or the machine 11 configured with the barcode 12. In addition, the detached camera 110 and the portable inspection device 100 can communicate with each other by using wireless communication technology.

In addition, the number of the detectors 120 is at least one, and the detectors may detect the type of the environmental information E1, such as a temperature sensor, a humidity sensor, a wind speed sensor, and/or a suspended particle concentration sensor. Thus, the portable detection device 100 can achieve the technical effect of one-machine-multiple detection.

As shown in fig. 1, the display 140 is used for displaying the relative arrangement diagrams of the plurality of tools 11 and the relative arrangement diagrams of the barcodes 12. In addition, the display 140 may mark the barcode 12 and/or the machine 11 corresponding to the environmental information E1, for example, in the relative layout diagram displayed on the display 140, the image of the barcode 12 or the machine 11 corresponding to the environmental information E1 may be whitened or flash, so that the monitoring personnel can know the barcode 12 and/or the machine 11 corresponding to the currently detected environmental information E1.

As shown in fig. 2, the wireless communicator 150 is configured to transmit the environment information E1 to an external electronic device, such as a server. The external electronic device can collect and process the environmental information E1 of the at least one portable electronic device 100, such as storing, analyzing, and the like.

As shown in fig. 2, the alarm 160 may send an alarm signal S1. When the environmental information E1 is abnormal, the alarm 160 sends an alarm signal S1. In one example, the alarm 160 is a sound generator, and the alarm signal S1 is an alarm sound. In another example, the alarm 160 is a light emitter, and the alarm signal S1 is an alarm light. In other examples, the alarm 160 is a vibrator, and the alarm signal S1 is a vibration signal. In addition, the warning signal S1 can be a warning word displayed by the display 140, and in this case, the warning indicator 160 can be optionally omitted. In addition, the processor 130 may determine whether the environmental information E1 is equal to or higher than a threshold T1 (the threshold T1 is shown in fig. 3); when the environmental information E1 is equal to or higher than the threshold T1, the processor 130 controls the alarm 160 to send an alarm signal S1.

Referring to fig. 3, a diagram of the display 140 of fig. 1 displaying the environment information E1 is shown. The display 140 is further used for displaying the corresponding relationship between the environmental information E1 and time, such as a relationship curve. The detector 120 may continuously detect the environmental information E1 for a period of time, and the display 140 may display the trend of the environmental information E1 for the period of time. The period of time is, for example, several seconds, several minutes, several hours, several days, etc., and the length of the period of time depends on the actual requirement, and the embodiment of the present invention is not limited. In another embodiment, the display 140 may display the environmental information E1 in relation to time, which may also be represented by a table, not limited to a curve. In other embodiments, the display 140 may only display the environmental information E1, and not the time. Alternatively, the display 140 may display only the abnormal environment information E1 but not the normal environment information E1.

Referring to fig. 4, a flowchart of an environment monitoring method applying the portable detection device 100 of fig. 2 is shown.

In step S110, the camera 110 captures a barcode image M1 of the barcode 12. In step S120, the processor 130 analyzes the barcode image M1 to obtain the position P1 of the barcode 12. In step S130, the detector 120 detects the environmental information E1 of the location P1 of the barcode 12. In step S140, the display 140 displays the environmental information E1 of the location P1 of the barcode 12. Other embodiments of the environment monitoring method are described above, and are not described herein again.

In summary, the present invention provides a portable detecting device and an environment monitoring method using the same, in which the detected environment information corresponds to a specific location (for example, obtained by scanning a barcode), and thus the detected environment information is objective (compared to when the detected location is uncertain).

The present invention is capable of other embodiments, and various changes and modifications may be made by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.

Claims

1. A portable detection device applied to clean room environment monitoring, comprising:

a camera for capturing a barcode image of a barcode;

a processor for analyzing the barcode image to obtain a location of the barcode;

a detector for detecting an environmental information of the location of the barcode; and

a display for displaying the environmental information of the location of the barcode.

2. The portable detection device as claimed in claim 1, wherein the camera is further used for:

When the environmental information is abnormal, capture a surrounding image of the barcode;

Among them, the processor is more used to:

According to the surrounding image and the environmental information, determine the cause of the abnormality.

3. The portable detection device of claim 1, wherein the environmental information comprises temperature, humidity, wind speed, aerosol concentration and/or aerosol number.

4. The portable detection device of claim 1, wherein the display is further used for:

showing a relative arrangement diagram of a plurality of machines, wherein the barcode is arranged on one of the machines; and

A diagram showing the relative arrangement of these barcodes.

5. The portable detection device of claim 1, wherein the display is further used for:

A corresponding relationship between the environmental information and time is displayed.

6. The portable detection device of claim 1, further comprising:

a warning device for:

When the environmental information is abnormal, a warning signal is issued.

7. An environmental monitoring method applied to a clean room, comprising:

capturing a barcode image of a barcode;

analyze the barcode image to obtain a location of the barcode;

detecting a contextual information of the location of the barcode; and

The environmental information of the location of the barcode is displayed.

8. The environmental monitoring method as claimed in claim 7, further comprising:

When the environmental information is abnormal, capture a surrounding image of the barcode; and

9. The environment monitoring method according to claim 7, wherein the environment information comprises temperature, humidity, wind speed, aerosol concentration and/or aerosol number.

10. The environmental monitoring method as claimed in claim 7, further comprising:

A diagram showing the relative arrangement of these barcodes.

11. The environmental monitoring method as claimed in claim 7, further comprising:

12. The environmental monitoring method of claim 7, further comprising:

When the environmental information is abnormal, a warning signal is issued.