TWI835560B - Thermal field element, single crystal furnace, liquid leakage detection device and method thereof - Google Patents

Abstract

The invention provides a thermal field element, a single crystal furnace, a liquid leakage detection device and a method. The thermal field element includes: a bottom heater. The bottom heater includes a top surface and a bottom surface arranged oppositely. The bottom heater is provided with a through-top heater. The first bolt holes on the surface and bottom surface; a tray-shaped bottom cover plate, the bottom cover plate includes an opposite top plate surface and a bottom plate surface, the bottom heater is set on the top plate surface and the bottom surface directly contacts the top plate surface, the bottom cover plate is insulated and Made of high temperature resistant material, the bottom cover is provided with a second bolt hole corresponding to the first bolt hole; and a bottom electrode, the bottom electrode is located on the side of the chassis surface away from the top disk surface, and the bottom electrode is passed through the first bolt hole and the fastening bolt in the second bolt hole directly connects to the base heater.

Description

Thermal field element, single crystal furnace, liquid leakage detection device and method thereof

The invention belongs to the technical field of crystal pulling, and in particular relates to a thermal field element, a single crystal furnace, a liquid leakage detection device and a method thereof.

In related technologies, silicon wafers used to produce semiconductor electronic components such as integrated circuits are mainly produced by slicing single crystal silicon rods drawn by the Czochralski (CZ) method. The Czochralski method involves melting polycrystalline silicon in a crucible made of quartz to obtain a silicon melt, immersing a single crystal seed crystal into the silicon melt, and continuously lifting the seed crystal to move away from the surface of the silicon melt, whereby during the movement Single crystal silicon rods grow at the phase interface. During the drawing process of silicon single crystal ingots, abnormal leakage of silicon material sometimes occurs. However, the crystal pulling furnace equipment in the related technology does not have the function of weighing the crystal ingot and remaining silicon material. The operator can only rely on the operator to pay attention to the furnace at all times. situation to discover silicone liquid leakage. If the silicon material leakage is not detected in time, the hot silicon material will flow into the exhaust pipe for too long and cause major abnormal accidents.

Embodiments of the present invention provide a thermal field element, a single crystal furnace, a liquid leakage detection device and a method thereof, which can detect liquid leakage in a timely manner.

The technical solutions provided by the embodiments of the present invention are as follows: In a first aspect, an embodiment of the present invention provides a thermal field element, including: A bottom heater, the bottom heater includes a top surface and a bottom surface arranged oppositely, and the bottom heater is provided with a first bolt hole penetrating the top surface and the bottom surface; The bottom cover is in the shape of a tray. The bottom cover includes a top surface and a bottom surface that are opposite to each other. The bottom heater is arranged on the top surface and the bottom surface is in direct contact with the top surface. The bottom cover is made of insulating and high-temperature resistant materials. Made, the bottom cover is provided with a second bolt hole corresponding to the first bolt hole; and The bottom electrode is located on the side of the chassis surface away from the top disk surface, and the bottom electrode is directly connected to the bottom heater through fastening bolts passed through the first bolt hole and the second bolt hole. .

Exemplarily, the material of the bottom cover plate is a high temperature resistant ceramic material.

Exemplarily, the center of the bottom cover is also provided with a through hole penetrating the top surface and the bottom surface.

Exemplarily, the bottom heater surrounds the periphery of the through hole.

In a second aspect, an embodiment of the present invention provides a liquid leakage detection device, including: As for the thermal field element as described above, the bottom heater, the bottom cover plate and the bottom electrode are respectively located below the crucible in the single crystal furnace; An electrical detector, connected to the bottom heater, is used to instantly detect the electrical parameters of the bottom heater; A processor, connected to the electrical detector, used to instantly determine whether there is leakage from the crucible on the bottom heater based on the electrical parameter instantaneously fed back from the electrical detector; The alarm is connected to the processor and is used to alarm when the immediate judgment result is that there is liquid leakage on the bottom heater.

Exemplarily, the electrical parameter includes the resistance value of the bottom heater; The processor is used to receive the real-time resistance value of the bottom heater fed back by the electrical detector, and determine whether there is leakage from the crucible on the bottom heater based on the numerical change of the real-time resistance value fed back within a predetermined time. Leakage.

In a third aspect, embodiments of the present invention provide a single crystal furnace, which includes: furnace body; A crucible installed in the furnace body; and The liquid leakage detection device as described in the second aspect is provided in the furnace body.

In a fourth aspect, embodiments of the present invention provide a liquid leakage detection method, which is applied to the liquid leakage detection device as described above. The method includes the following steps: Instantly detect the electrical parameters of the bottom heater through the electrical detector; The processor receives the electrical parameter instantaneously fed back from the electrical detector, and immediately determines whether there is liquid leakage from the crucible on the bottom heater.

Exemplarily, when the electrical parameter includes the resistance value of the bottom heater, the processor receives the electrical parameter instantaneously fed back from the electrical detector, and immediately determines whether there is leakage from the crucible on the bottom heater. Liquid leakage, including: The processor receives the real-time resistance value of the bottom heater fed back by the electrical detector, and determines whether there is leakage from the crucible on the bottom heater based on the numerical change of the real-time resistance value fed back within a predetermined time. Leakage.

The advantages brought by the embodiments of the present invention are as follows: In the above scheme, the structure of the traditional single crystal furnace thermal field element is optimized, and the bottom heater is directly fixed on the bottom electrode through bolt connection, so that the bottom surface of the bottom heater can directly contact the top plate surface of the bottom cover, and the bottom The cover plate material is made of high-temperature resistant insulating material. When the bottom heater is powered on, the bottom cover plate is insulated and will not affect the electrical parameters of the bottom heater due to the heat generated by the bottom heater when powered on. In this way, during the crystal pulling process, the bottom cover plate can be continuously Monitor the electrical parameter data of the bottom heater. When silicon material leaks, the silicon material will flow onto the bottom heater, and the electrical parameters of the bottom heater will change. Therefore, it can be judged whether the bottom heater is on the bottom heater by monitoring the electrical parameters of the bottom heater. If there is leakage, detect the abnormality in time and take timely measures to ensure personnel safety and reduce losses.

In order to make the purpose, technical solutions and advantages of the embodiments of the present invention more clear, the technical solutions of the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings of the embodiments of the present invention. Obviously, the described embodiments are some, but not all, of the embodiments of the present invention. Based on the described embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without progressive labor fall within the scope of protection of the present invention.

Unless otherwise defined, technical terms or scientific terms used in the present invention shall have the usual meaning understood by a person with ordinary skill in the field to which the present invention belongs. "First", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Likewise, similar words such as "a", "an" or "the" do not indicate a quantitative limit, but rather indicate the presence of at least one. Words such as "include" or "include" mean that the elements or things appearing before the word include the elements or things listed after the word and their equivalents, without excluding other elements or things. Words such as "connected" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "Down", "Left", "Right", etc. are only used to express relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

As shown in Figure 1, the thermal field element provided by the embodiment of the present invention includes: a bottom heater 10, a bottom cover plate 20 and a bottom electrode 30. The bottom heater 10 includes a top surface and a bottom surface arranged oppositely. The bottom heater 10 The bottom cover 20 is provided with a first bolt hole that penetrates the top surface and the bottom surface; the bottom cover 20 is tray-shaped and includes an opposite top surface and a bottom surface. The bottom heater 10 is disposed on the top surface and the bottom surface. Directly contacting the top plate surface, the bottom cover 20 is made of insulating and high-temperature resistant materials, so that when the bottom heater 10 is powered on, the bottom cover 20 will not heat or affect the electrical parameters of the bottom heater 10; the bottom The cover plate 20 is provided with a second bolt hole corresponding to the first bolt hole; the bottom electrode 30 is located on the side of the chassis surface away from the top surface, and the bottom electrode 30 is passed through the first bolt hole and The fastening bolt 40 in the second bolt hole is directly connected to the bottom heater 10 .

In the above solution, in the traditional thermal field element, the bottom heater 10 is fixed on the bottom electrode 30 through bottom feet and screws, and the bottom cover 20 is made of conductive graphite material. However, in the present invention, the traditional single crystal furnace heat The structure of the field element is optimized, and the bottom heater 10 is directly fixed on the bottom electrode 30 through bolt connection, so that the bottom surface of the bottom heater 10 can directly contact the top surface of the bottom cover 20, and the material of the bottom cover 20 is selected to be high temperature resistant. Insulating material, the bottom cover 20 is insulated when the bottom heater 10 is powered on, and will not affect the electrical parameters of the bottom heater 10 due to the heat generated by the bottom heater 10 being powered on. In this way, the bottom cover 20 can be continuously monitored during the crystal pulling process. Electrical parameter data of the heater 10. When silicon material leaks, the silicon material will flow onto the bottom heater 10, and the electrical parameters of the bottom heater 10 will change. Therefore, the bottom heater can be judged by monitoring the electrical parameters of the bottom heater 10. 10. Check whether there is any leakage, detect abnormalities in time and take timely measures to ensure personnel safety and reduce losses.

As some exemplary embodiments, the bottom cover 20 is made of high-temperature resistant ceramic material. Of course, it can be understood that the bottom cover 20 can also be made of any other suitable insulating and high-temperature-resistant material, such as mica material, and is not limited thereto.

In addition, as some exemplary embodiments, as shown in FIG. 1 , the center of the bottom cover 20 is also provided with a through hole 21 penetrating the top plate surface and the bottom plate surface, and the bottom heater 10 surrounds the through hole 21 .

In the single crystal furnace, in the thermal field element provided by the embodiment of the present invention, the bottom heater 10, the bottom cover plate 20 and the bottom electrode 30 are located below the crucible. Therefore, when liquid leakage occurs in the crucible, The leaked silicon liquid will fall onto the bottom cover 20 and the bottom heater 10 .

It should be noted that, as shown in FIG. 1 , the bottom cover 20 is in the shape of a tray, and raised rims 22 can be provided around its periphery to prevent leakage from leaking out from the four peripheries. The central through hole 21 allows the crucible shaft to pass through.

In a more specific embodiment, as shown in FIG. 1 , the bottom heater 10 may be roughly rhombus-shaped, and the electrodes may be two, respectively connected to diagonal corners of the rhombus of the bottom heater 10 . Of course, it can be understood that in practical applications, the specific structure of the bottom heater 10 is not limited to this.

In addition, it should be noted that, in addition to the bottom heater 10, the thermal field element provided by the embodiment of the present invention may also include a main heater, etc. The main heater may be disposed on the outer peripheral side of the crucible, and the bottom heater may The device 10 can be arranged below the crucible. For the specific structure of the main heater, a main heater in a conventional thermal field can be used, which will not be described again here.

In a second aspect, as shown in Figure 2, an embodiment of the present invention provides a liquid leakage detection device, including: In the thermal field element provided by the embodiment of the present invention, the bottom heater 10, the bottom cover plate 20 and the bottom electrode 30 are respectively located below the crucible in the single crystal furnace; The electrical detector 50 is connected to the bottom heater 10 and is used to detect the electrical parameters of the bottom heater 10 in real time; The processor 60 is connected to the electrical detector 50 and is used to instantly determine whether there is liquid leakage from the crucible on the bottom heater 10 based on the electrical parameters immediately fed back from the electrical detector 50; The alarm 70 is connected to the processor 60 and is used to issue an alarm when the immediate judgment result is that there is currently liquid leakage on the bottom heater 10 .

In the above solution, since the bottom heater 10 is directly fixed on the bottom electrode 30 through bolt connection, the bottom surface of the bottom heater 10 can directly contact the top surface of the bottom cover 20, and the bottom cover 20 is made of high-temperature resistant insulating material. , when the bottom heater 10 is powered on, the bottom cover 20 is insulated, and will not affect the electrical parameters of the bottom heater 10 due to the heat generated by the bottom heater 10 being powered on. In this way, the bottom heater can be continuously monitored during the crystal pulling process. 10. Electrical parameter data. When silicon material leaks, the silicon material will flow onto the bottom heater 10, and the electrical parameters of the bottom heater 10 will change. Therefore, the electrical parameters of the bottom heater 10 can be monitored to determine whether the bottom heater 10 has sufficient electrical parameters. Whether there is leakage, detect abnormalities in time and take timely measures to ensure personnel safety and reduce losses.

Exemplarily, the electrical parameter includes the resistance value of the bottom heater 10; the processor 60 is configured to receive the instantaneous resistance value of the bottom heater fed back by the electrical detector 50, and based on the feedback value within a predetermined time. The numerical value of the instantaneous resistance value changes to determine whether there is liquid leakage from the crucible on the bottom heater 10 .

Using the above solution, since the bottom cover 20 in direct contact with the bottom heater 10 is insulated, the resistance of the bottom heater 10 will not be affected after the bottom heater 10 is powered on, while the presence of liquid leakage will affect the bottom heating. The resistance value of the bottom heater 10 changes, so the resistance data of the bottom heater 10 is continuously monitored during the crystal pulling process. When silicon leakage occurs, the silicon material will flow to the bottom heater, and the resistance of the bottom heater 10 changes from the original resistance. The resistance value has changed since the value remained unchanged. When the resistance value fluctuates, an alarm can occur, so that on-site personnel can detect abnormalities in time and take timely measures.

In addition, embodiments of the present invention also provide a single crystal furnace, which includes: furnace body; A crucible installed in the furnace body; and The liquid leakage detection device provided by the embodiment of the present invention is provided in the furnace body, wherein the bottom heater 10, the bottom cover 20 and the bottom electrode 30 are located below the crucible.

In addition, embodiments of the present invention provide a liquid leakage detection method, which is applied to the liquid leakage detection device as described above. The method includes the following steps: Step S01: Instantly detect the electrical parameters of the bottom heater 10 through the electrical detector 50; Step S02: The processor 60 receives the electrical parameters immediately fed back from the electrical detector 50, and immediately determines whether there is liquid leakage from the crucible on the bottom heater 10.

Exemplarily, when the electrical parameter includes the resistance value of the bottom heater 10, step S02 specifically includes: The processor 60 receives the real-time resistance value of the bottom heater fed back by the electrical detector 50, and determines whether there is a defect on the bottom heater 10 based on the numerical change of the real-time resistance value fed back within a predetermined time. Leakage from the crucible.

The following points need to be explained: (1) The drawings of the embodiments of the present invention only relate to the structures disclosed in the embodiments of the present invention, and other structures may refer to common designs; (2) For the sake of clarity, in the drawings used to describe embodiments of the present invention, the thicknesses of layers or regions are exaggerated or reduced, that is, these drawings are not drawn according to actual scale. It can be understood that when such as layers, When an element such as a film, region or substrate is referred to as being "on" or "under" another element, it can be "directly on" or "under" the other element or intervening elements may be present; (3) If there is no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other to obtain new embodiments.

The above are only specific embodiments of the present invention, but the protection scope of the present invention is not limited thereto. The protection scope of the present invention should be subject to the protection scope of the patent application.

10: Bottom heater 20:Bottom cover 21:Through hole 22:convex edge 30: Bottom electrode 40: Fastening bolts 50: Electrical detector 60: Processor 70:Alarm

Figure 1 shows a schematic structural diagram of a thermal field element provided in an embodiment of the present invention; Figure 2 shows a schematic structural diagram of a liquid leakage detection device provided in an embodiment of the present invention.

10: Bottom heater 20:Bottom cover 21:Through hole 22:convex edge 30: Bottom electrode 40: Fastening bolts

Claims (9)

A thermal field element includes: a bottom heater, the bottom heater includes a top surface and a bottom surface arranged oppositely, the bottom heater is provided with a first bolt hole penetrating the top surface and the bottom surface; a tray-shaped bottom Cover plate, the bottom cover plate includes a top plate surface and a bottom plate surface that are opposite to each other. The bottom heater is arranged on the top plate surface and the bottom surface directly contacts the top plate surface. The bottom cover plate is made of insulating and high-temperature resistant materials. The bottom The cover plate is provided with a second bolt hole corresponding to the first bolt hole; and a bottom electrode. The bottom electrode is located on the side of the chassis surface away from the top surface, and the bottom electrode is passed through the first bolt hole. and the fastening bolts in the second bolt holes are directly connected to the bottom heater. The thermal field element according to claim 1, wherein the bottom cover is made of high-temperature resistant ceramic material. The thermal field element according to claim 1, wherein the center of the bottom cover is further provided with a through hole penetrating the top surface and the bottom surface. The thermal field element according to claim 3, wherein the bottom heater surrounds the periphery of the through hole. A liquid leakage detection device, including: the thermal field element as described in any one of claims 1 to 4, the bottom heater, the bottom cover plate and the bottom electrode are respectively located under the crucible in the single crystal furnace; an electrical detector , connected to the bottom heater, used to instantly detect the electrical parameters of the bottom heater; the processor, connected to the electrical detector, used to instantly judge the bottom heating based on the electrical parameters instantaneously fed back from the electrical detector Check whether there is any liquid leakage from the crucible; The alarm is connected to the processor and is used to alarm when the immediate judgment result is that there is liquid leakage on the bottom heater. The liquid leakage detection device according to claim 5, wherein the electrical parameter includes the resistance value of the bottom heater; the processor is used to receive the instant resistance value of the bottom heater fed back by the electrical detector, and calculate the resistance value according to the predetermined time. The numerical change of the real-time resistance value fed back in the heater is used to determine whether there is liquid leakage from the crucible on the bottom heater. A single crystal furnace, which includes: a furnace body; a crucible provided in the furnace body; and a liquid leakage detection device as described in claim 5 or 6 provided in the furnace body. A liquid leakage detection method, applied to the liquid leakage detection device as described in claim 5 or 6, the method includes the following steps: instantaneously detecting the electrical parameters of the bottom heater through the electrical detector; receiving data from the bottom heater through the processor The electrical detector immediately feeds back the electrical parameters and immediately determines whether there is liquid leakage from the crucible on the bottom heater. The method of claim 8, wherein when the electrical parameter includes the resistance value of the bottom heater, the processor receives the electrical parameter instantaneously fed back from the electrical detector, and immediately determines the resistance of the bottom heater. Whether there is leakage from the crucible specifically includes: receiving the real-time resistance value of the bottom heater fed back by the electrical detector through the processor, and judging based on the numerical change of the real-time resistance value fed back within a predetermined time. Is there any liquid leakage from the crucible on the bottom heater?