TWI786473B - Real time monitoring system for a motion carrier - Google Patents

Abstract

A real time monitoring system for a motion carrier includes a sensor, a signal converter, a wireless transmitting module, a power supply module, an analysis processor and a database. The sensor is used to sense the motion state signal of the motion carrier. The signal converter receives the motion state signal transmitted by the sensor and processes the motion state signal and converts it into a processed motion state signal. The wireless transmitting module receives the processed motion state signal from the signal converter and transmits the processed motion state signal to the remote end via the internet. The power supply module is used to provide power energy. The analysis processor receives the processed motion state signal through the internet and analyzes it, and then remotely monitors whether the motion carrier is abnormal in real time.

Description

Sports carrier real-time monitoring system

A real-time monitoring system, especially a real-time monitoring system for moving carriers.

In recent years, semiconductor integrated circuits have experienced exponential growth. Technological advances in IC materials and designs have produced multiple generations of ICs, each generation having smaller and more complex circuits than the previous generation. During the development of integrated circuits, when the geometric size (that is, the smallest component or line that can be produced in the process) shrinks, the functional density (that is, the number of interconnected devices per chip area) Usually increases. Generally speaking, such a shrinking process can provide the benefits of increasing production efficiency and reducing manufacturing costs. However, such a shrinking process will also increase the complexity of manufacturing and producing integrated circuits.

Integrated circuits are produced by processing wafers with a series of semiconductor manufacturing machines (abbreviated as manufacturing machines). Each manufacturing machine usually executes an integrated circuit manufacturing work (also known as a manufacturing process or process) on a wafer according to a predefined or predetermined process recipe (process recipe), wherein the above-mentioned The process recipe defines various parameters of the process. For example, integrated circuit manufacturing usually uses multiple manufacturing tools related to production and support to complete multiple processes, and the integrated circuit manufacturer needs to focus on monitoring the hardware of each manufacturing tool and the associated Process to confirm and maintain the stability, repeatability and yield of integrated circuit manufacturing. Such tool monitoring can be accomplished with an analytical device that monitors the manufacturing tools during the process and identifies errors that occur at the manufacturing tools that may cause the process to deviate from what was originally expected. Although existing methods and systems for condition monitoring of manufacturing machines are sufficient to achieve their goals, these methods and systems are not satisfactory in every respect.

With the continuous development of the degree of mechanization, many mechanical components are gradually replacing manual execution of various actions, so that automated production can be realized. Moreover, compared with manual work, the use of mechanical components has higher precision. Therefore, for some occasions that require high precision, mechanical components are the best choice. However, as the mechanism is used for a long time, the problem of damage to the mechanism or components is likely to occur, thereby affecting the accuracy of the mechanism, which may cause the problem that the mechanism hits other workpieces during the operation. Therefore , the accuracy confirmation of mechanism components is very important.

Press, at present, the abnormal detection of the existing moving carrier is still mainly manual. Taking the screw as an example, the wear caused by the movement will cause the gap between the slide table and the screw to increase, which will reduce the accuracy and stability of its positioning. , the detection usually uses the experience of a human (master) to judge whether the operation is normal by means of listening and identifying, but usually when the abnormal sound of the mechanism can be identified manually, the loss has reached a considerable degree, or even close to failure. Therefore, how to solve the problems and deficiencies of the above-mentioned prior art is the subject that the related industry is eager to research and develop.

The present invention proposes a real-time monitoring system for a moving carrier, which can know the moving state of the moving carrier in real time to grasp the health status and attenuation trend of the moving carrier.

The invention provides a real-time monitoring system for a moving carrier. The real-time monitoring system for a moving carrier includes a sensor, a signal converter, a wireless transmitting module, a power supply module, an analysis processor and a database. The signal converter is electrically connected to the sensor. The wireless transmitting module is electrically connected to the signal converter. The power supply module is electrically connected to the sensor, the signal converter and the wireless transmitting module. The sensor is used for sensing the motion state signal of the motion carrier. The database is connected to the analysis processor. The signal converter receives the motion state signal sent by the sensor, processes the motion state signal and converts it into a processed motion state signal. The wireless transmitting module receives the processed motion state signal from the signal converter and transmits the processed motion state signal to the remote end through the Internet. The power supply module is used for providing power energy. The analysis processor receives the processed motion status signal through the Internet and analyzes it, and then remotely monitors whether the motion carrier is abnormal in real time. The database stores a standard signal of the normal operation status of the motion carrier. The analysis processor obtains the standard signal from the database, and compares the processed motion state signal with the standard signal to instantly determine whether the motion carrier is abnormal, wherein the motion carrier is a screw type motion carrier or a non-screw type motion carrier carrier.

In one embodiment of the present invention, if the moving carrier is a non-screw moving carrier, the power supply module provides power supply energy in the form of a battery.

In one embodiment of the present invention, if the moving carrier is the screw-like moving carrier, the power supply module provides power supply energy in the form of electromagnetic induction power generation.

In one embodiment of the present invention, the analysis processor has a wireless receiving module to receive the processed motion state signal.

In an embodiment of the present invention, the motion state signal includes but not limited to vibration signal, current signal, torque signal and temperature signal.

In summary, the present invention proposes a real-time monitoring system for moving carriers, which has the following effects: 1. Can grasp the health status and attenuation trend of the sports carrier 2. Reduce troubleshooting and maintenance time 3. Effectively reduce production costs.

In the following detailed description by means of specific embodiments, it will be easier to understand the purpose, technical content, characteristics and effects of the present invention.

In order to solve the problem of abnormal faults of existing motion carriers, the inventor has spent years of research and development to improve the existing products. The follow-up will introduce in detail how the present invention uses a motion carrier real-time monitoring system to achieve the most efficient functional demands. .

The implementation methods or examples disclosed below are used to illustrate or complete various technical features of the present invention. The specific embodiments of the described components and configuration methods are used to simplify the description of the present invention, so that the disclosure can be more thorough and complete, and to fully convey the scope of this disclosure to those skilled in the art. Of course, the present disclosure can also be implemented in many different forms, and is not limited to the embodiments described below.

With the continuous development of the degree of mechanization, many mechanical components are gradually replacing manual execution of various actions, so that automated production can be realized. Moreover, compared with manual work, the use of mechanical components has higher precision. Therefore, for some occasions that require high precision, mechanical components are the best choice. However, as the mechanism is used for a long time, the problem of damage to the mechanism or components is likely to occur, thereby affecting the accuracy of the mechanism, which may cause the problem that the mechanism hits other workpieces during the operation. Therefore , the accuracy confirmation of mechanism components is very important.

Please refer to the first figure. The first figure is a schematic diagram of the real-time monitoring system for moving carriers of the present invention. As shown in FIG. 1 , the moving carrier real-time monitoring system of the embodiment of the present invention includes a sensor 110 , a signal converter 120 , a wireless transmission module 130 , a power supply module 160 , an analysis processor 150 and a database 150 . The signal converter 120 is electrically connected to the sensor 110 . The wireless transmitting module 130 is electrically connected to the signal converter 120 . The power supply module 160 is electrically connected to the sensor 110 , the signal converter 120 and the wireless transmitting module 130 . The database 150 is connected to the analysis processor 140 . It should be noted that the moving carrier real-time monitoring system 100 of the embodiment of the present invention integrates the sensor 110, the signal converter 120, the wireless transmission module 130 and the power supply module 160 into a whole module, which is placed on the moving carrier MR superior.

At present, the abnormal detection of the existing moving carrier is still mainly manual. Taking the screw as an example, the wear caused by the movement will cause the gap between the slide table and the screw to increase, which will reduce the accuracy and stability of its positioning. It is usually judged whether the operation is normal by the experience of a manual (master) by listening to the identification method, but usually when the abnormal sound of the mechanism can be identified manually, the loss has reached a considerable degree, or even close to failure. Therefore, the embodiment of the present invention proposes a moving carrier real-time monitoring system 100 to solve the above problems. Further, in the moving carrier real-time monitoring system 100 of the present invention, the sensor 110 is used to sense the moving state signal MS of the moving carrier MR in real time, wherein the moving state signal includes but not limited to vibration signal, current signal, torque signal and temperature signal. Next, the signal converter 120 receives the motion state signal sent by the sensor 110 and processes the motion state signal MS and converts it into a processed motion state signal AMS, that is to say, the signal converter 120 converts the motion state signal to MS performs noise reduction or other necessary signal processing operations. Afterwards, the wireless transmitting module 130 will receive the processed motion state signal AMS transmitted from the signal converter 120, and the wireless transmitting module 130 will transmit the processed motion state signal AMS to the remote end through the Internet, so as to Allow remote equipment or operators to analyze and monitor motion carrier MR in real time.

Next, the analysis processor 140 receives the processed motion state signal AMS through the Internet and analyzes it, so as to remotely monitor whether the motion carrier MR is abnormal in real time. The database 150 stores the standard signal of the normal operation state of the moving carrier MR, so the analysis processor 140 obtains the standard signal from the database 150, and compares the processed motion state signal AMS with the standard signal for real-time judgment Whether the moving carrier MR is abnormal, wherein the moving carrier MR is a screw-type moving carrier or a non-screw-type moving carrier, and the power supply module 160 is used to provide power supply energy. It should be understood that, in actual situations, the analysis processor 140 has a wireless receiving module (not shown) to receive the processed motion state signal AMS.

In one embodiment, if the motion carrier MR is a non-screw type motion carrier, the power supply module 160 provides power supply energy in the form of a battery; in another embodiment, if the motion carrier MR is a screw type motion carrier, the power supply module 160 The module 160 provides power supply energy by means of electromagnetic induction power generation.

In summary, a real-time monitoring system for moving carriers proposed by the present invention has the following effects: 1. Can grasp the health status and attenuation trend of the sports carrier 2. Reduce troubleshooting and maintenance time 3. Effectively reduce production costs.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Therefore, all equivalent changes or modifications based on the features and spirit described in the scope of the application of the present invention shall be included in the scope of the patent application of the present invention.

100: Motion carrier real-time monitoring system 110: sensor 120: signal converter 130: Wireless transmitter module 140: Analysis Processor 150: Database 160: Power supply module MR: Motion Carrier MS: Motion status signal AMS: Processed Motion Status Signal

The first figure is a schematic diagram of the moving carrier real-time monitoring system of the present invention.

100: Motion carrier real-time monitoring system

110: sensor

120: signal converter

130: Wireless transmitter module

140: Analysis Processor

150: Database

160: Power supply module

MR: Motion Carrier

MS: Motion status signal

AMS: Processed Motion Status Signal

Claims (4)

A moving carrier real-time monitoring system is used to monitor a moving carrier in real time. The moving carrier real-time monitoring system includes: a sensor for sensing a moving state signal of the moving carrier. The moving state signal includes a vibration signal, an electric current Signal, torque signal and temperature signal; a signal converter, electrically connected to the sensor, the signal converter receives the motion state signal transmitted by the sensor and processes the motion state signal and converts it into a A processed motion state signal; a wireless transmitting module, electrically connected to the signal converter, the wireless transmitting module receives the processed motion state signal transmitted from the signal converter and converts the processed motion The status signal is sent to the remote end through an Internet; a power supply module is electrically connected to the sensor, the signal converter and the wireless transmission module and used to provide power; an analysis processor, through the The Internet receives and analyzes the processed motion status signal, and then remotely monitors whether the motion carrier is abnormal in real time; and a database is connected to the analysis processor, and the database stores the normal operation of the motion carrier A standard signal of state, wherein the analysis processor obtains the standard signal from the database, and compares the processed motion state signal with the standard signal to instantly determine whether the motion carrier is abnormal, wherein the The motion carrier is a screw type motion carrier or a non-screw type motion carrier. The moving carrier real-time monitoring system as described in Claim 1, wherein if the moving carrier is the non-screw moving carrier, the power supply module provides power supply energy in the form of a battery. The moving carrier real-time monitoring system as described in Claim 1, wherein if the moving carrier is the screw type moving carrier, the power supply module provides power supply energy by means of electromagnetic induction power generation. The moving carrier real-time monitoring system as described in Claim 1, wherein the analyzing processor has a wireless receiving module to receive the processed moving state signal.

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