TW202221507A - Real time monitoring system for a motion carrier - Google Patents

Abstract

A real time monitoring system for a motion carrier includes a sensor, a signal converter, a wireless transmitting module, a power supply module, an analysis processor and a database. The sensor is used to sense the motion state signal of the motion carrier. The signal converter receives the motion state signal transmitted by the sensor and processes the motion state signal and converts it into a processed motion state signal. The wireless transmitting module receives the processed motion state signal from the signal converter and transmits the processed motion state signal to the remote end via the internet. The power supply module is used to provide power energy. The analysis processor receives the processed motion state signal through the internet and analyzes it, and then remotely monitors whether the motion carrier is abnormal in real time.

Description

Real-time monitoring system for sports carrier

A real-time monitoring system, especially a real-time monitoring system for sports carriers.

In recent years, semiconductor integrated circuits have experienced exponential growth. Technological advances in integrated circuit materials and design have resulted in multiple generations of integrated circuits, each of which has smaller and more complex circuits than the previous generation. During the development of integrated circuits, as the geometry size (ie, the smallest component or line that can be produced in the process) shrinks, the functional density (ie, the number of interconnects per wafer area) shrinks. Usually increases. In general, such downsizing processes can provide the benefits of increased production efficiency and lower manufacturing costs, however, such downsizing processes also increase the complexity of manufacturing and producing integrated circuits.

Integrated circuits are produced by processing wafers with a series of semiconductor fabrication machines (referred to as fabrication machines). Each fabrication tool typically performs an integrated circuit fabrication job (also referred to as a manufacturing process or process) on a wafer according to a predefined or predetermined process recipe, wherein the above The process program defines various parameters of the above-mentioned process. For example, IC manufacturing typically uses multiple manufacturing machines that are related in production and support to complete multi-pass processes, and IC manufacturers need to focus on monitoring the hardware and associated hardware of each manufacturing machine. process to confirm and maintain the stability, repeatability and yield of integrated circuit manufacturing. Such tool monitoring can be accomplished by an analytical device that monitors the manufacturing tool during the process and identifies errors that occur at the manufacturing tool and that may cause the process to deviate from its intended conditions. Although existing methods and systems for condition monitoring of manufacturing machines are sufficient to achieve their goals, these methods and systems are not satisfactory in every respect.

With the continuous development of the degree of mechanization, many mechanical components are gradually replacing the manual execution of various actions, so that automated production can be realized. Moreover, compared with manual operations, the use of mechanical components has higher precision for operation. Therefore, for some occasions requiring high precision, mechanical components are the best choice. However, with the long-term use of the mechanical components, the problem of damage to the mechanical components or components is easy to occur, which will affect the accuracy of the mechanical components, and may cause the mechanical components to hit other workpieces during operation. Therefore, , the accuracy confirmation of the mechanical parts is very important.

At present, the abnormal detection of the existing moving carriers is still mainly manual. Taking the screw as an example, the wear caused by the movement will increase the gap between the sliding table and the screw, and reduce the accuracy and stability of its positioning. , When testing, it is usually judged whether the operation is normal by the experience of manual (old master) and the method of listening to the recognition. However, when the abnormal sound of the mechanism can be manually recognized, the wear and tear has reached a considerable degree, or even close to failure. Therefore, how to solve the above-mentioned problems and deficiencies of the prior art is the subject that the relevant industry is eager to develop.

The present invention proposes a real-time monitoring system for a sports carrier, which can instantly know the sports state of the sports carrier to grasp the health state and decay trend of the sports carrier.

The invention provides a real-time monitoring system for a moving carrier. The real-time monitoring system for a moving carrier for monitoring a moving carrier includes a sensor, a signal converter, a wireless transmitting module, a power supply module, an analysis processor and a database. The signal converter is electrically connected to the sensor. The wireless transmitting module is electrically connected to the signal converter. The power supply module is electrically connected to the sensor, the signal converter and the wireless transmission module. The sensor is used for sensing the motion state signal of the motion carrier. The database is connected to the analysis processor. The signal converter receives the motion state signal sent by the sensor and processes the motion state signal and converts it into a processed motion state signal. The wireless transmitting module receives the processed motion state signal sent from the signal converter and transmits the processed motion state signal to the remote end through the Internet. The power supply module is used to provide power energy. The analysis processor receives the processed motion state signal through the Internet and analyzes it, so as to remotely monitor whether the motion carrier is abnormal in real time. The database stores a standard signal of the normal operating state of the motion carrier. The analysis processor obtains the standard signal from the database, and compares the processed motion state signal with the standard signal to immediately determine whether the motion carrier is abnormal, wherein the motion carrier is a screw-type motion carrier or a non-screw-type motion carrier vector.

In an embodiment of the present invention, if the moving carrier is a non-screw type moving carrier, the power supply module provides power energy by means of a battery.

In an embodiment of the present invention, if the moving carrier is the screw-type moving carrier, the power supply module provides power energy by means of electromagnetic induction power generation.

In an embodiment of the present invention, the analysis processor has a wireless receiving module for receiving the processed motion state signal.

In an embodiment of the present invention, the motion state signal includes, but is not limited to, a vibration signal, a current signal, a torque signal and a temperature signal.

To sum up, the present invention proposes a real-time monitoring system for motion carriers, which has the following effects: 1. The health status and decay trend of the sports carrier can be grasped 2. Reduce troubleshooting and repair time 3. Effectively reduce production costs.

The following describes in detail with specific embodiments, when it is easier to understand the purpose, technical content, characteristics and effects of the present invention.

In order to solve the problem of abnormal failure of the existing motion carrier, the inventor has made many years of research and development to improve the criticism of the existing product. The follow-up will introduce in detail how the present invention uses a motion carrier real-time monitoring system to achieve the most efficient functional demands. .

The embodiments or embodiments disclosed below are used to illustrate or complete various technical features of the present invention, and the specific embodiments of the described components and configurations are used to simplify the description of the present invention, so that the disclosure can be more thorough and complete, so as to The scope of the present disclosure will be fully conveyed to those skilled in the art. Of course, the present disclosure can also be implemented in many different forms and is not limited to the embodiments described below.

With the continuous development of the degree of mechanization, many mechanical components are gradually replacing the manual execution of various actions, so that automated production can be realized. Moreover, compared with manual operations, the use of mechanical components has higher precision for operation. Therefore, for some occasions requiring high precision, mechanical components are the best choice. However, with the long-term use of the mechanical components, the problem of damage to the mechanical components or components is easy to occur, which will affect the accuracy of the mechanical components, and may cause the mechanical components to hit other workpieces during operation. Therefore, , the accuracy confirmation of the mechanical parts is very important.

Please refer to the first figure, the first figure is a schematic diagram of the real-time monitoring system of the sports carrier of the present invention. As shown in FIG. 1 , the real-time monitoring system for moving carriers according to the embodiment of the present invention includes a sensor 110 , a signal converter 120 , a wireless transmission module 130 , a power supply module 160 , an analysis processor 150 and a database 150 . The signal converter 120 is electrically connected to the sensor 110 . The wireless transmission module 130 is electrically connected to the signal converter 120 . The power supply module 160 is electrically connected to the sensor 110 , the signal converter 120 and the wireless transmission module 130 . Database 150 is connected to analysis processor 140 . It should be noted that, the real-time monitoring system 100 of the motion carrier according to the embodiment of the present invention integrates the sensor 110 , the signal converter 120 , the wireless transmission module 130 and the power supply module 160 into a whole module, which is placed on the motion carrier MR superior.

At present, the abnormal detection of the existing moving carriers is still mainly manual. Taking the screw as an example, the wear caused by the movement will increase the gap between the sliding table and the screw, and reduce the accuracy and stability of its positioning. Usually, the manual (master) experience is used to judge whether the operation is normal or not by listening to the recognition method. However, when the abnormal sound of the mechanism can be manually recognized, the wear and tear has reached a considerable degree, or even close to failure. Therefore, an embodiment of the present invention proposes a real-time monitoring system 100 for a moving carrier to solve the above problems. Further, in the real-time monitoring system 100 of the motion carrier of the present invention, the sensor 110 is used to sense the motion state signal MS of the motion carrier MR in real time, wherein the motion state signal includes but is not limited to vibration signal, current signal, torque force signal and temperature signal. Next, the signal converter 120 receives the motion state signal sent by the sensor 110 and processes the motion state signal MS and converts it into a processed motion state signal AMS, that is to say, the signal converter 120 converts the motion state signal The MS performs noise reduction or other necessary signal processing operations. After that, the wireless transmitting module 130 will receive the processed motion state signal AMS sent from the signal converter 120, and the wireless transmitting module 130 will transmit the processed motion state signal AMS to the remote end through the Internet, so as to Allows remote equipment or operators to analyze and monitor motion carrier MR in real time.

Next, the analysis processor 140 receives the processed motion state signal AMS through the Internet and analyzes it, so as to remotely monitor whether the motion carrier MR is abnormal in real time. The database 150 will store the standard signal of the normal operation state of the motion carrier MR, so the analysis processor 140 obtains the standard signal from the database 150, and compares the processed motion state signal AMS with the standard signal for real-time judgment Whether the motion carrier MR is abnormal, wherein the motion carrier MR is a screw type motion carrier or a non-screw type motion carrier, and the power supply module 160 is used to provide power energy. It should be understood that, in an actual situation, the analysis processor 140 has a wireless receiving module (not shown) to receive the processed motion state signal AMS.

In one embodiment, if the motion carrier MR is a non-screw-type motion carrier, the power supply module 160 provides power energy in a battery mode; in another embodiment, if the motion carrier MR is a screw-type motion carrier, the power supply The module 160 provides power energy by means of electromagnetic induction power generation.

To sum up, the real-time monitoring system for a motion carrier proposed by the present invention has the following effects: 1. The health status and decay trend of the sports carrier can be grasped 2. Reduce troubleshooting and repair time 3. Effectively reduce production costs.

Only the above descriptions are only preferred embodiments of the present invention, and are not intended to limit the scope of the present invention. Therefore, all equivalent changes or modifications made according to the features and spirits described in the scope of the application of the present invention shall be included in the scope of the application for patent of the present invention.

100: Real-time monitoring system for sports carrier 110: Sensor 120: Signal Converter 130: Wireless transmitter module 140: Analysis Processor 150:Database 160: Power Supply Module MR: Motion Carrier MS: motion status signal AMS: Processed motion status signal

The first figure is a schematic diagram of the real-time monitoring system of the sports carrier of the present invention.

100: Real-time monitoring system for sports carrier

110: Sensor

120: Signal Converter

130: Wireless transmitter module

140: Analysis Processor

150:Database

160: Power Supply Module

MR: Motion Carrier

MS: motion status signal

AMS: Processed motion status signal

Claims (5)

A motion carrier real-time monitoring system for monitoring a motion carrier in real time, the motion carrier real-time monitoring system comprising: a sensor for sensing a motion state signal of the motion carrier; a signal converter electrically connected to the sensor, the signal converter receiving the motion state signal sent by the sensor and processing the motion state signal and converting it into a processed motion state signal; a wireless transmission module electrically connected to the signal converter, the wireless transmission module receives the processed motion state signal transmitted from the signal converter and transmits the processed motion state signal through an internet sent to the remote; a power supply module, electrically connected to the sensor, the signal converter and the wireless transmission module, and used for providing power; an analysis processor that receives the processed motion state signal through the Internet and analyzes it, so as to remotely monitor whether the motion carrier is abnormal in real time; and a database, connected to the analysis processor, the database stores a standard signal of the normal operating state of the motion carrier, The analysis processor obtains the standard signal from the database, and compares the processed motion state signal with the standard signal, so as to immediately determine whether the motion carrier is abnormal, The motion carrier is a screw-type motion carrier or a non-screw-type motion carrier. The real-time monitoring system for a motion carrier according to claim 1, wherein if the motion carrier is the non-screw type motion carrier, the power supply module provides power energy by means of a battery. The real-time monitoring system for a motion carrier according to claim 1, wherein if the motion carrier is the screw-type motion carrier, the power supply module provides power energy by means of electromagnetic induction power generation. The real-time monitoring system for motion carriers according to claim 1, wherein the analysis processor has a wireless receiving module for receiving the processed motion state signal. The real-time monitoring system for a motion carrier according to claim 1, wherein the motion state signal includes but is not limited to a vibration signal, a current signal, a torque signal and a temperature signal.

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