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TWI680041B - Multi-point diamond cutter - Google Patents

Multi-point diamond cutter Download PDF

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Publication number
TWI680041B
TWI680041B TW104143755A TW104143755A TWI680041B TW I680041 B TWI680041 B TW I680041B TW 104143755 A TW104143755 A TW 104143755A TW 104143755 A TW104143755 A TW 104143755A TW I680041 B TWI680041 B TW I680041B
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TW
Taiwan
Prior art keywords
diamond cutter
point
base
sharp
inclined surface
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TW104143755A
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Chinese (zh)
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TW201636176A (en
Inventor
曾山浩
Hiroshi Soyama
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日商三星鑽石工業股份有限公司
Mitsuboshi Diamond Industrial Co., Ltd.
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Publication of TW201636176A publication Critical patent/TW201636176A/en
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Publication of TWI680041B publication Critical patent/TWI680041B/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0005Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
    • B28D5/0011Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Dicing (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

本發明之多點鑽石刀具,即使因進行刻劃而尖點磨耗,亦能減少刀具之更換次數。其解決手段為:對鑽石刀具10之基座11之角從基座之兩側面形成傾斜面,且以稜線之兩側作為尖點P1~P16。使鑽石刀具10傾斜,使一個尖點接觸基板且不滾動地進行刻劃。在尖點因刻劃而磨耗時,藉由使鑽石刀具10旋轉而使其他的尖點接觸基板以進行刻劃。藉此,能夠在一個鑽石刀具中使用複數個尖點,能夠減少刀具更換頻度。 The multi-point diamond cutter of the present invention can reduce the number of tool replacements even if the sharp points are worn due to scoring. The solution is as follows: the corners of the base 11 of the diamond cutter 10 form inclined surfaces from both sides of the base, and the two sides of the ridge line are used as sharp points P1 to P16. Tilt the diamond cutter 10 so that one sharp point contacts the substrate and scribing without rolling. When the sharp point is worn by the scoring, the diamond cutter 10 is rotated to cause the other sharp points to contact the substrate to perform the scoring. Thereby, a plurality of sharp points can be used in one diamond tool, and the frequency of tool replacement can be reduced.

Description

多點鑽石刀具 Multi-point diamond cutter

本發明係關於一種用於藉由鑽石尖點刻劃玻璃基板或矽晶圓等脆性材料基板之多點鑽石刀具。 The present invention relates to a multi-point diamond cutter for scoring a brittle material substrate such as a glass substrate or a silicon wafer with diamond sharp points.

一直以來,為了刻劃玻璃基板或矽晶圓,係使用一種使用有刻劃輪或由單結晶鑽石構成之鑽石尖點的工具。針對玻璃基板,主要係使用相對於基板滾動之刻劃輪,但從提高刻劃後之基板強度等優點觀之,亦探討使用固定刃之鑽石尖點。專利文獻1、2中,提出用於刻劃藍寶石晶圓或氧化鋁晶圓(alumina wafer)等硬度較高之基板的尖點切刀。在該等專利文獻中,使用於角錐之稜線上設有切點之工具、或前端形成圓錐之工具。此外,在專利文獻3中,提出為了刻劃玻璃板而使用具有圓錐形前端之玻璃劃線器的刻劃裝置。 To scribe glass substrates or silicon wafers, a tool that uses a scribe wheel or a diamond tip made of single crystal diamond has been used. For glass substrates, the scribe wheel that rolls relative to the substrate is mainly used. However, from the perspective of improving the strength of the substrate after scribed, etc., the point of the diamond with a fixed blade is also discussed. Patent Documents 1 and 2 propose sharp-point cutters for scoring high-hardness substrates such as sapphire wafers and alumina wafers. In these patent documents, a tool provided with a tangent point on a ridgeline of a pyramid or a tool having a cone at the front end is used. In addition, Patent Document 3 proposes a scoring device using a glass scriber having a conical tip for scoring a glass plate.

專利文獻1:日本特開2003-183040號公報 Patent Document 1: Japanese Patent Application Laid-Open No. 2003-183040

專利文獻2:日本特開2005-079529號公報 Patent Document 2: Japanese Patent Laid-Open No. 2005-079529

專利文獻3:日本特開2013-043787號公報 Patent Document 3: Japanese Patent Application Publication No. 2013-043787

在利用習知的固定刃之工具進行刻劃時,由於尖點磨耗,因此必須變更尖點。角錐形或圓錐形之工具中,可使用之尖點的頂點為2處 或者最大4處。因此,在變更2處或4處之尖點時必須更換工具,會有更換頻度高的問題。此外,在由工具所進行之刻劃中,必須使尖點以適當的角度接觸基板。然而,習知的工具,在變更尖點時必須使工具沿軸方向旋轉,而不容易以良好精度設定該接觸角度。 When scoring is performed using a conventional fixed-blade tool, the sharp point must be changed due to abrasion of the sharp point. In a pyramid or cone tool, the apex of the sharp point can be 2 Or up to 4 places. Therefore, the tool must be changed when changing the sharp points at two or four points, and there is a problem of frequent replacement. In addition, in the scoring performed by the tool, the sharp point must be brought into contact with the substrate at an appropriate angle. However, in conventional tools, it is necessary to rotate the tool in the axial direction when changing the sharp point, and it is not easy to set the contact angle with good accuracy.

本發明係有鑑於此種習知問題而完成,其目的在於提供一種即便使用於刻劃之尖點產生磨耗,亦能夠容易地變更尖點位置而減少更換頻度之鑽石刀具。 The present invention has been made in view of such a conventional problem, and an object thereof is to provide a diamond cutter that can easily change the position of the sharp point and reduce the frequency of replacement even if the sharp point used for scoring is worn.

為了解決該課題,本發明之多點鑽石刀具,具有:基座,係具有既定厚度之角柱狀,且具有2個底面與複數個外周面;稜線,係該外周面之交線;以及傾斜面,至少從一方之底面朝向稜線研磨而成;該基座之至少外周面以鑽石(金剛石)形成,並以該傾斜面與該稜線之交點作為尖點。 In order to solve this problem, the multi-point diamond cutter of the present invention includes a base having an angular columnar shape with a predetermined thickness, and having two bottom surfaces and a plurality of outer peripheral surfaces; a ridge line, an intersection of the outer peripheral surfaces; , At least one side is ground from the bottom surface toward the ridge line; at least the outer peripheral surface of the base is formed of diamond (diamond), and the intersection of the inclined surface and the ridge line is used as a sharp point.

此處,亦可為:該傾斜面,具有從該基座之一方之底面形成之第1傾斜面、與從該基座之另一方之底面形成之第2傾斜面。 Here, the inclined surface may include a first inclined surface formed from a bottom surface of one side of the base and a second inclined surface formed from a bottom surface of the other side of the base.

此處,亦可為:具有從該基座之相鄰的2個外周面朝向該稜線之端部研磨形成之2個研磨面、及該2個研磨面之交線的第2稜線,且以該2個研磨面與該第2稜線之交點作為尖點。 Here, it may be a second edge line having two polishing surfaces formed by grinding from two adjacent peripheral surfaces of the base toward the end of the edge line, and a second edge line intersecting the line of the two polishing surfaces. An intersection of the two polished surfaces and the second edge line is defined as a sharp point.

此處,亦可為:該各傾斜面,係藉由雷射加工形成。 Here, the inclined surfaces may be formed by laser processing.

此處,亦可為:該2個研磨面係藉由機械加工形成。 Here, the two polishing surfaces may be formed by machining.

根據具有上述特徵之本發明,能夠在鑽石刀具之周圍設置多個尖點。因此能夠獲得以下效果:即使一個尖點磨耗,亦能夠藉由改變鑽 石刀具之固定角度而使用新的尖點,能夠減少鑽石刀具之更換頻度。進一步地,由於能夠在刀具相對於基板之安裝角度維持一定之狀態下變更尖點,因此能夠容易設定尖點之接觸角度。 According to the present invention having the above-mentioned features, a plurality of sharp points can be provided around the diamond cutter. Therefore, the following effects can be obtained: even if a sharp point is worn, the drill can be changed by changing Using new sharp points with a fixed angle of the stone cutter can reduce the frequency of diamond cutter replacement. Further, since the sharp point can be changed while the mounting angle of the tool with respect to the substrate is maintained constant, the contact angle of the sharp point can be easily set.

10、30‧‧‧多點鑽石刀具 10, 30‧‧‧ multi-point diamond cutter

11、31‧‧‧基座 11, 31‧‧‧ base

12、32‧‧‧貫通孔 12, 32‧‧‧through holes

13a~13h、33a~33h‧‧‧稜線 13a ~ 13h, 33a ~ 33h‧‧‧Edge

14a~14h、34a~34h‧‧‧第1傾斜面 14a ~ 14h, 34a ~ 34h‧‧‧The first inclined surface

15a~15h、35a~35h‧‧‧第2傾斜面 15a ~ 15h, 35a ~ 35h ‧‧‧ 2nd inclined surface

21a、51c‧‧‧第3傾斜面 21a, 51c‧‧‧3rd inclined surface

36a、36b~43a、43b‧‧‧研磨面 36a, 36b ~ 43a, 43b‧‧‧ polished surface

P1~P16‧‧‧尖點 P1 ~ P16‧‧‧ sharp points

圖1,係本發明之第1實施形態之多點鑽石刀具之前視圖及側視圖。 FIG. 1 is a front view and a side view of a multi-point diamond cutter according to the first embodiment of the present invention.

圖2,係顯示使用第1實施形態之多點鑽石刀具的刻劃之側視圖。 Fig. 2 is a side view showing the scribing using the multi-point diamond cutter of the first embodiment.

圖3,係顯示本發明之第1實施形態之變形例之多點鑽石刀具之主要部分之放大圖。 FIG. 3 is an enlarged view of a main part of a multi-point diamond cutter showing a modified example of the first embodiment of the present invention.

圖4,係本發明之第2實施形態之鑽石刀具之前視圖及側視圖。 4 is a front view and a side view of a diamond cutter according to a second embodiment of the present invention.

圖5,係放大本發明之第2實施形態之鑽石刀具之主要部分之仰視圖。 FIG. 5 is an enlarged bottom view of a main part of a diamond cutter according to a second embodiment of the present invention.

圖6,係放大本發明之第2實施形態之鑽石刀具之主要部分之側視圖及仰視圖。 FIG. 6 is a side view and a bottom view of an enlarged main part of a diamond cutter according to a second embodiment of the present invention.

圖7,係顯示本發明之第2實施形態之變形例之多點鑽石刀具之主要部分之放大圖。 FIG. 7 is an enlarged view of a main part of a multi-point diamond cutter showing a modified example of the second embodiment of the present invention.

接下來針對本發明之第1實施形態進行說明。圖1係顯示本實施形態之多點鑽石刀具(以下,簡稱鑽石刀具)10之一例之前視圖及側視圖。該鑽石刀具10係以具一定的厚度且由旋轉對稱之任意數量的邊形成之多角形之角柱作為基座。本實施形態中,以單結晶鑽石構成具一定厚度之正八角柱之基座11,在其中心具有貫通孔12。在該情形中,在基座11之八角形外周面均等地形成稜線13a~13h,該等稜線13a~13h與平行於多角柱 之厚度方向且通過貫通孔12之軸(在圖1(a)中為垂直於紙面之軸)平行。 Next, a first embodiment of the present invention will be described. FIG. 1 is a front view and a side view showing an example of a multi-point diamond cutter (hereinafter, simply referred to as a diamond cutter) 10 according to this embodiment. The diamond cutter 10 is based on a polygonal corner post having a certain thickness and formed by any number of sides of rotational symmetry. In this embodiment, a base 11 having a regular octagonal pillar having a certain thickness is formed of a single crystal diamond, and has a through hole 12 in the center thereof. In this case, ridge lines 13a to 13h are evenly formed on the octagonal outer peripheral surface of the base 11, and the ridge lines 13a to 13h are parallel to the polygonal pillars. The thickness direction is parallel to the axis passing through the through hole 12 (the axis perpendicular to the paper surface in FIG. 1 (a)).

此外,本實施形態中,對基座11如圖1所示般以從八方之角部分之多角柱的兩底面朝向外周面交叉之稜線去角的方式進行研磨。亦即,從基座11之一方之面之8個角朝向基座11之稜線以小於基座11厚度之1/2的範圍進行研磨形成第1傾斜面14a~14h。此時,以基座11之底面之邊與傾斜面之夾角相等之方式,亦即研磨成傾斜面成為以稜線之一端為頂點的等腰三角形。上述之傾斜面可藉由雷射加工或機械加工容易形成。此外,亦可在雷射加工之後進一步進行機械研磨,以進一步形成精密的研磨面。據此,能夠以各稜線13a~13h與第1傾斜面14a~14h之交點為頂點,如圖1(b)所示在基座之側視觀察下,於右側形成8個尖點P1~P8。此時,基座11之傾斜面14a~14h成為頂面。此處,所謂的頂面,意指與形成稜線之2個外周面相接,且共有稜線之一端的面。 In addition, in the present embodiment, as shown in FIG. 1, the base 11 is polished so as to be angled from the two bottom surfaces of the polygonal pillars of the octagonal corner portion to the ridge line crossing the outer peripheral surface. That is, from the eight corners of one surface of the base 11 toward the ridge line of the base 11 in a range smaller than 1/2 of the thickness of the base 11, the first inclined surfaces 14 a to 14 h are polished. At this time, the angle between the side of the bottom surface of the base 11 and the inclined surface is equal, that is, the inclined surface becomes an isosceles triangle with one end of the ridgeline as the vertex. The inclined surface can be easily formed by laser processing or machining. In addition, mechanical polishing may be performed after laser processing to further form a precise polished surface. According to this, the intersections of the ridgelines 13a to 13h and the first inclined surfaces 14a to 14h can be used as apexes. As shown in Fig. 1 (b), when viewed from the side of the base, eight sharp points P1 to P8 are formed on the right . At this time, the inclined surfaces 14a to 14h of the base 11 become top surfaces. Here, the so-called top surface means a surface which is in contact with two outer peripheral surfaces forming a ridgeline and shares one end of the ridgeline.

接下來,從基座11之另一方之面以同樣之方式朝向基座11之外周在小於基座厚度之1/2的範圍進行研磨形成第2傾斜面15a~15h。據此,能夠以各稜線13a~13h與第2傾斜面15a~15h之交點為尖點,如圖1(b)所示在基座之側視觀察下,於左側形成8個尖點P9~P16。如上所述,藉由以稜線13a~13h之兩端作為尖點P1~P16,而能夠對八角形之鑽石刀具10於外周形成16處之尖點。 Next, from the other surface of the base 11 to the outer periphery of the base 11 in the same manner, the second inclined surface 15a to 15h are formed by grinding in a range smaller than 1/2 of the thickness of the base. According to this, the intersections of the ridgelines 13a to 13h and the second inclined surfaces 15a to 15h can be used as sharp points. As shown in FIG. 1 (b), when viewed from the side of the base, eight sharp points P9 are formed on the left side. P16. As described above, by using both ends of the ridge lines 13a to 13h as the sharp points P1 to P16, it is possible to form 16 sharp points on the outer periphery of the octagonal diamond cutter 10.

接下來,針對使用本實施形態之鑽石刀具10進行刻劃的情形,利用圖2進行說明。在對基板20進行刻劃時,如圖2(a)所示,使鑽石刀具10傾斜成稜線與脆性材料基板所形成之角度為θ,將1個尖點P1以接觸於基板20之方式固定並使鑽石刀具10往圖示之箭頭A方向移動,以 進行刻劃。此時,由於不使鑽石刀具10滾動,因此能夠以同一尖點進行刻劃。在與基板20接觸之尖點P1因磨耗而劣化的情形時,如圖2(b)所示,以貫通孔12為中心使鑽石刀具10旋轉45°,使相鄰之尖點P2接觸基板20並以同樣之方式進行刻劃。即便使鑽石刀具10旋轉45°,由於刃前端之稜線接觸基板之角度θ不變,因此容易設定尖點變更時之相對於基板之接觸角度。 Next, a case where the scribe is performed using the diamond cutter 10 of this embodiment will be described with reference to FIG. 2. When scoring the substrate 20, as shown in FIG. 2 (a), the diamond cutter 10 is tilted so that the angle formed by the ridge line and the brittle material substrate is θ, and one sharp point P1 is fixed to contact the substrate 20 And move the diamond cutter 10 in the direction of arrow A in the figure to Scratching. At this time, since the diamond cutter 10 is not rolled, the scribe can be performed with the same sharp point. When the sharp point P1 in contact with the substrate 20 deteriorates due to abrasion, as shown in FIG. 2 (b), the diamond cutter 10 is rotated 45 ° around the through hole 12 as a center, and the adjacent sharp point P2 contacts the substrate 20 And scribe in the same way. Even if the diamond cutter 10 is rotated 45 °, the angle θ at which the ridge line at the tip of the blade contacts the substrate does not change, so it is easy to set the contact angle with respect to the substrate when the sharp point is changed.

此外,當尖點P1~P8之8處的尖點全部磨耗時,即將鑽石刀具10反轉,以稜線與脆性材料基板所形成之角度為θ之方式再次固定,使另一方之側面之尖點P9~P16依序接觸基板進行刻劃。據此能夠進一步改變8次尖點位置進行刻劃,能夠合計變更16次尖點進行刻劃。 In addition, when the sharp points at 8 of the sharp points P1 to P8 are worn out, the diamond cutter 10 is reversed, and the angle formed by the ridge line and the brittle material substrate is fixed again to make the sharp points on the other side. P9 ~ P16 contact the substrate in order to score. According to this, it is possible to further change the position of the sharp point 8 times to perform the scribe, and to change the sharp point 16 times in total to perform the scribe.

接下來,針對第1實施形態之變形例進行說明。第1實施形態中,以基座之外周之傾斜面作為頂面,以第1傾斜面之三角形之頂點作為尖點。圖3係其變形例,如顯示1個尖點P1之周邊部分之放大圖所示,對接近稜線之部分進一步以些微角度進行研磨,形成第3傾斜面21a,使該傾斜面21a成為頂面。針對其他的傾斜面亦相同。此外,針對第2傾斜面亦同樣地,對第2傾斜面之接近稜線之部分進一步以些微傾斜之方式進行研磨,形成第4傾斜面。據此,能夠對各尖點之位置進行微調,更正確且精密地進行加工。 Next, a modification of the first embodiment will be described. In the first embodiment, an inclined surface on the outer periphery of the base is used as a top surface, and a vertex of a triangle of the first inclined surface is used as a sharp point. FIG. 3 is a modification example. As shown in an enlarged view showing a peripheral portion of one sharp point P1, the portion close to the ridge line is further polished at a slight angle to form a third inclined surface 21a, and the inclined surface 21a becomes a top surface. . The same applies to other inclined surfaces. Further, similarly to the second inclined surface, the portion close to the ridge line of the second inclined surface is further polished in a slightly inclined manner to form a fourth inclined surface. According to this, it is possible to finely adjust the positions of the sharp points, and to perform processing more accurately and precisely.

接下來,針對本發明之第2實施形態使用圖4、圖5進行說明。圖4係顯示本實施形態之多點鑽石刀具(以下,簡稱鑽石刀具)30之一例的前視圖及側視圖。該鑽石刀具30係以單結晶鑽石構成旋轉對稱之多角形之角柱之底面為八角形之基座31,於其中心具有貫通孔32。此時,在基座31之八角形外周面均等地形成有稜線33a~33h,該等稜線33a~33h與平行 於多角柱之厚度方向且通過貫通孔32之軸(在圖4(a)中為垂直於紙面之軸)平行。 Next, a second embodiment of the present invention will be described using FIGS. 4 and 5. FIG. 4 is a front view and a side view showing an example of a multi-point diamond cutter (hereinafter, simply referred to as a diamond cutter) 30 according to this embodiment. The diamond cutter 30 is a base 31 formed of a symmetric polygonal corner post formed of a single crystal diamond with a octagonal base, and has a through hole 32 in the center. At this time, ridge lines 33a to 33h are uniformly formed on the octagonal outer peripheral surface of the base 31, and the ridge lines 33a to 33h are parallel to each other. The axis passing through the through hole 32 in the thickness direction of the polygonal column (the axis perpendicular to the paper surface in FIG. 4 (a)) is parallel.

此外,本實施形態中,對基座31如圖4所示以從八方之角部分之兩側以去角之方式進行研磨。亦即,從一方之面之角朝向基座31之內側在小於基座厚度之1/2的範圍進行研磨形成第1傾斜面34a~34h。從基座31之另一方之側面形成第2傾斜面35a~35h。此時,以基座31之底面之邊與傾斜面之夾角相等之方式進行研磨。 In this embodiment, as shown in FIG. 4, the base 31 is polished to be chamfered from both sides of the octagonal corner portion. That is, the first inclined surfaces 34a to 34h are polished by grinding from the corner of one surface toward the inside of the base 31 in a range smaller than 1/2 of the thickness of the base. The second inclined surfaces 35a to 35h are formed from the other side surface of the base 31. At this time, polishing is performed so that the angle between the side of the bottom surface of the base 31 and the inclined surface is equal.

此實施形態中,於形成第1傾斜面34a~34h、第2傾斜面35a~35h之後,在稜線33a~33h之兩端部分,從夾著稜線相鄰之2個外周面進一步進行研磨,使頂面與稜線之夾角變大。圖5係在圖4(b)之右中央以一點鏈線所示之圓B之放大圖,圖6(a)係在圖4(b)之右下方以一點鏈線所示之圓C之放大圖,圖6(b)係其仰視圖。此研磨,如圖5所示,於稜線33a之一端形成三角形之較小的研磨面36a、36b、及研磨面36a、36b之交線的新的稜線(第2稜線)。以同樣之方式,於稜線33c之一端形成三角形之研磨面38a、38b、及研磨面38a、38b之交線的新的稜線(第2稜線)。針對其他的稜線亦相同,於各稜線33a~33h之一端形成研磨面36a、36b~43a、43b、及研磨面36a、36b~43a、43b之交線的第2稜線。而且,相鄰之研磨面36a與36b、37a與37b、…相交之新的稜線之一端,亦即第2稜線與頂面之交點成為尖點P1~P8。此時,三角形之研磨面36a、36b相交之線,為構成尖點之一端的稜線。針對其他的角,各研磨面37a、37b、38a、38b、…之交線亦為構成尖點之一端的稜線。 In this embodiment, after the first inclined surfaces 34a to 34h and the second inclined surfaces 35a to 35h are formed, at both ends of the ridgelines 33a to 33h, the two outer peripheral surfaces adjacent to each other between the ridgelines are further polished, so that The angle between the top surface and the ridgeline becomes larger. Fig. 5 is an enlarged view of a circle B shown by a one-dot chain line in the right center of Fig. 4 (b), and Fig. 6 (a) is a circle of a circle C indicated by a one-dot chain line at the lower right of Fig. 4 (b). Enlarged view, Figure 6 (b) is its bottom view. In this polishing, as shown in FIG. 5, a new ridgeline (second ridgeline) is formed at one end of the ridgeline 33a at a small triangular grinding surface 36a, 36b and the intersection of the grinding surfaces 36a, 36b. In the same manner, a new ridgeline (second ridgeline) is formed at one end of the ridgeline 33c at a triangular polishing surface 38a, 38b and an intersection of the polishing surfaces 38a, 38b. The same is true for other ridgelines, and a second ridgeline at the intersection of the grinding surfaces 36a, 36b to 43a, 43b, and the grinding surfaces 36a, 36b to 43a, 43b is formed at one end of each of the ridgelines 33a to 33h. Moreover, one end of the new edge line where the adjacent abrasive surfaces 36a and 36b, 37a and 37b, ... intersect, that is, the intersection point of the second edge line and the top surface becomes the sharp points P1 to P8. At this time, the line where the triangular abrasive surfaces 36a and 36b intersect is a ridge line forming one end of the sharp point. For other angles, the intersection of each of the polishing surfaces 37a, 37b, 38a, 38b, ... is also a ridge line forming one end of the sharp point.

此外,亦以同樣之方式對稜線之另一端,針對傾斜面35a~ 35h與稜線之交點,從側面以同樣之方式進行研磨形成研磨面。然後,以新形成之研磨面之交線即第2稜線與傾斜面35a~35h之交點作為尖點P9~P16。當藉由機械加工形成上述之研磨面時,即能夠高精度地進行加工,能夠將尖點之位置加工於所欲之位置。此外,能夠配合成為刻劃對象之工件任意地設定頂面與稜線之角度。 In addition, the other end of the ridgeline is also directed to the inclined surface 35a ~ At the intersection of 35h and the ridge line, the surface is polished in the same manner from the side to form a polished surface. Then, the intersection point of the newly formed polishing surface, that is, the intersection of the second edge line and the inclined surface 35a to 35h is used as the sharp points P9 to P16. When the above-mentioned polished surface is formed by machining, it can be processed with high accuracy, and the position of the sharp point can be processed at a desired position. In addition, the angle between the top surface and the ridgeline can be arbitrarily set in accordance with the workpiece to be scribed.

在使用該鑽石刀具30進行刻劃時,使1個尖點P1接觸基板20進行刻劃。而且,在該尖點已磨耗時,以與上述之實施形態同樣之方式使鑽石刀具30沿插通於貫通孔之未圖示之軸旋轉45°,使相鄰之尖點接觸基板20進行刻劃。 When scoring is performed using the diamond cutter 30, one sharp point P1 is brought into contact with the substrate 20 to perform scoring. When the sharp point has been worn, the diamond cutter 30 is rotated 45 ° along an axis (not shown) inserted in the through hole in the same manner as in the above embodiment, so that the adjacent sharp point contacts the substrate 20 for engraving. Draw.

又,當尖點P1~P8之8處的尖點全部磨耗時,將鑽石刀具30反轉,使另一方之側面之尖點P9~P16依序接觸基板進行刻劃。據此能夠進一步改變8次尖點位置進行刻劃,能夠合計變更16次尖點進行刻劃。 In addition, when all the sharp points at 8 of the sharp points P1 to P8 are worn, the diamond cutter 30 is reversed so that the sharp points P9 to P16 on the other side contact the substrate in order to score. According to this, it is possible to further change the position of the sharp point 8 times to perform the scribe, and to change the sharp point 16 times in total to perform the scribe.

接下來,針對第2實施形態之變形例進行說明。第2實施形態中,亦以基座之外周之傾斜面作為頂面,以第1傾斜面之三角形之頂點作為尖點。圖7係其變形例,如顯示1個尖點P3之周邊部分之放大圖所示,對傾斜面34c之中、接近稜線之三角形之部分進一步以些微角度進行研磨,形成第3傾斜面51c,使該傾斜面51c成為頂面。針對其他的傾斜面亦相同。此外,針對第2傾斜面亦同樣地,對第2傾斜面之接近稜線之部分進一步以些微傾斜之方式進行研磨,形成第4傾斜面。據此,能夠對各尖點之位置進行微調,更正確地進行加工。 Next, a modification of the second embodiment will be described. In the second embodiment, the inclined surface on the outer periphery of the base is also used as the top surface, and the vertex of the triangle of the first inclined surface is used as the sharp point. FIG. 7 is a modification example. As shown in an enlarged view showing a peripheral portion of one sharp point P3, a part of the inclined surface 34c that is close to a ridge line triangle is further polished at a slight angle to form a third inclined surface 51c. The inclined surface 51c is made a top surface. The same applies to other inclined surfaces. Further, similarly to the second inclined surface, the portion close to the ridge line of the second inclined surface is further polished in a slightly inclined manner to form a fourth inclined surface. According to this, it is possible to finely adjust the positions of the sharp points, and to perform processing more accurately.

第1、第2實施形態中,雖係於正八角形之基座周圍設有16處尖點,但並不限於正八角形,可以任意邊數之多角形作為基座。例如, 亦可為正十二角形而設置24處尖點。於此情形,較佳為在變更尖點時如上所述般於相鄰之尖點互相不干擾的範圍內,於外周部盡量設置多個尖點。藉此在各尖點磨耗時只要使鑽石刀具旋轉即可變更尖點,能夠減少鑽石刀具之更換頻度。 In the first and second embodiments, although there are 16 sharp points around the base of the regular octagon, it is not limited to the regular octagon, and a polygon with any number of sides can be used as the base. E.g, There are also 24 sharp points for regular dodecagon. In this case, it is preferable to set a plurality of sharp points on the outer peripheral portion as much as possible when the sharp points are changed so that adjacent sharp points do not interfere with each other as described above. As a result, when the sharp points are worn, the sharp points can be changed by rotating the diamond cutter, which can reduce the frequency of replacing the diamond cutter.

此外,上述實施形態中,雖以單結晶鑽石構成圓板整體,但由於只要於接觸脆性材料基板之表面部分具有鑽石層即可,因此亦可於超硬合金或燒結鑽石製之基座之刃前端部分之表面形成多結晶鑽石層並於此形成傾斜面。此外,亦可使用摻雜硼等之雜質、具有導電性之單結晶或多結晶鑽石。藉由使用具有導電性之鑽石,能夠利用放電加工容易地形成缺口。 In addition, in the above-mentioned embodiment, although the entire circular plate is made of single crystal diamond, since it only needs to have a diamond layer on the surface portion contacting the brittle material substrate, it can also be used on the blade of a base made of cemented carbide or sintered diamond. A polycrystalline diamond layer is formed on the surface of the front end portion, and an inclined surface is formed there. In addition, it is also possible to use a single crystal or polycrystalline diamond doped with impurities such as boron and having conductivity. By using a diamond with conductivity, a notch can be easily formed by electric discharge machining.

本發明之多點鑽石刀具可使用於刻劃脆性材料基板之刻劃裝置,尤其對於使鑽石刀具之磨耗變多的硬度高之刻劃對象亦能夠有效地使用。 The multi-point diamond cutter of the present invention can be used for a scoring device for scoring a brittle material substrate, and can be effectively used especially for scoring objects with high hardness that increase the wear of the diamond cutter.

Claims (6)

一種多點鑽石刀具,具有:基座,具有既定厚度之角柱狀,且具有2個底面與複數個外周面;稜線,係該外周面之交線;以及傾斜面,至少從一方之底面朝向稜線研磨而成;該基座之至少外周面係以鑽石形成;以該傾斜面與該稜線之交點作為尖點。A multi-point diamond cutter has: a base, an angular pillar having a predetermined thickness, and having two bottom surfaces and a plurality of outer peripheral surfaces; a ridge line, which is the intersection of the outer peripheral surfaces; and an inclined surface, from at least one of the bottom surfaces toward the ridge line Grinded; at least the outer peripheral surface of the base is made of diamond; the intersection of the inclined surface and the ridgeline is used as a sharp point. 如申請專利範圍第1項之多點鑽石刀具,其中,該傾斜面,具有從該基座之一方之底面形成之第1傾斜面、與從該基座之另一方之底面形成之第2傾斜面。For example, the multi-point diamond cutter of item 1 of the patent application scope, wherein the inclined surface has a first inclined surface formed from the bottom surface of one side of the base and a second inclined surface formed from the bottom surface of the other side of the base. surface. 如申請專利範圍第1或2項之多點鑽石刀具,其具有從該基座之相鄰的2個外周面朝向該稜線之端部研磨形成之2個研磨面、及該2個研磨面之交線的第2稜線,且以該傾斜面與該第2稜線之交點作為尖點。For example, the multi-point diamond cutter of item 1 or 2 of the patent application scope has two grinding surfaces formed by grinding from two adjacent peripheral surfaces of the base toward the end of the ridge line, and two grinding surfaces of the two grinding surfaces. A second edge line of the intersection line, and an intersection point of the inclined surface and the second edge line is used as a sharp point. 如申請專利範圍第1或2項之多點鑽石刀具,其中,該各傾斜面,係藉由雷射加工形成。For example, the multi-point diamond cutters in the scope of patent application No. 1 or 2, wherein each inclined surface is formed by laser processing. 如申請專利範圍第3項之多點鑽石刀具,其中,該各傾斜面,係藉由雷射加工形成。For example, the multi-point diamond cutter of item 3 of the patent application scope, wherein the inclined surfaces are formed by laser processing. 如申請專利範圍第3項之多點鑽石刀具,其中,該2個研磨面係藉由機械加工形成。For example, the multi-point diamond cutter of item 3 of the patent application scope, wherein the two grinding surfaces are formed by machining.
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