TWI452335B - Method and system for obtaining object image using confocal microscope - Google Patents

Description

Method and system for acquiring image of measured object using confocal microscope structure

The present invention relates to a method for acquiring an image of a measured object using a confocal microscope structure, and more particularly to an optical characteristic of a surface of each scanning position in order to average the light that is scanned to the object to be measured as much as possible: reflectance, roughness A method and system for acquiring an object image using a confocal microscope structure in which the difference between the acquired signals caused by the difference in degree and the angle of reflection is adjusted by the acousto-optic deflector and then scanned.

In general, a confocal microscope uses a laser as a light source, using light emitted from a point source to cause the focus of the sample to be confocal with the gap of the photodetector or the focus of the pinhole to prevent coke. The portion outside the plane appears on the photodetector, so the resolution of the focal plane of the confocal microscope is as high as 1.4 times compared to the conventional fluorescence microscope, and the confocal microscope has a needle on the optical axis. Holes or slit masks, etc., so that only the precisely focused light can be selected in the specimen or reflected light at the specimen to improve resolution and visualization.

Moreover, the confocal microscope can reconstruct a two-dimensional image into a three-dimensional image or a stereoscopic image through a predetermined software, so that an XZ section image that could not be observed before can be observed and reconstructed by confocal microscopy. The shape of the volume of the structure is such that it is easy to obtain an image of the desired direction.

Such a confocal microscope employs a light deflection device such as a scanning mirror (galvanometer), a MEMS (Micro Electro Mechanical System) element, or an acousto-optic deflector in order to deflect light to a scanning position on the XY plane of the sample to be scanned.

Among them, a scanning mirror (galvanometer) is a device that attaches a mirror (mirror) to a rotating shaft, and has the advantage of being capable of high-speed driving with a simple structure, and a MEMS (microelectromechanical system) is a mirror structure. A miniaturized, highly integrated system.

Further, the acousto-optic deflector is a widely used means for deflecting incident light, and as shown in Fig. 1, it can be constituted by a piezoelectric transducer (a) and a medium (b).

If a radio frequency signal of a certain frequency distributed by the control unit is transmitted to the piezoelectric transducer (a) through the radio frequency modulator, the piezoelectric transducer (a) pressurizes the medium according to the radio frequency signal and at the transmitted frequency (b) To generate an acoustic wave (c) having a wavelength Λ and propagating into the medium (b).

As a result, a periodic change in refractive index occurs in the medium (b) due to the acousto-optic effect caused by the generated acoustic wave (c).

This change in refractive index can be regarded as a diffraction grating which diffracts the incident light like atomic diffraction X-ray (Bragd diffraction) on the surface of the crystal.

It is assumed that the frequency of the generated acoustic wave (c) is f and the forward speed is v. Since v = f Λ, the period of the refractive index change in the medium (b) can be obtained.

That is, as shown in FIG. 2, assuming that the incident light has a wavelength λ, the deflection angle (0) of the incident light caused by the acoustic wave (c) can be expressed by the following formula.

Sin θ=λ/2Λ=λf/2v

That is, the deflection angle (θ) of the incident light can be changed by adjusting the frequency f of the acoustic wave (c). The frequency f of such a sound wave (c) can be determined by controlling the frequency of the radio frequency signal.

The acousto-optic deflector operating on this principle can be used to control the incident light to be deflected in the scanning direction on the XY plane of the object to be scanned, and to obtain light from each scanning position to obtain a map to be scanned. image.

In many cases, the height of each scanning position (unit pixel) of the general object is different, so after focusing on the height of a certain part of the object, the scanning is performed in steps to complete the detection of the height.

That is, as shown in FIG. 3, if the light scanned by the scanning optical system (1) is accurately focused on the surface of each scanning position of the scanning area (2) in the object to be detected, the light reflected from each scanning position can also be in the gap. The slit of the mask (3) is accurately focused to obtain light through the photodetector (4).

As shown in FIG. 4, if the light focus is not accurately formed at each scanning position of the object (2), the light focus is not formed on the slit of the slit mask (3), so the photodetector is 4) The light intensity of the obtained light is relatively low.

Therefore, the height (three-dimensional topography) result of the entire scanning area can be obtained by integrating the light detected from the mutually different scanning positions to form an overall image of the scanning area.

However, the difference between the highest signal value and the minimum signal value detected from each scanning position at this time differs depending on surface characteristics such as reflectance, roughness, and reflection angle of each portion of the scanning position.

As a result, there is a problem that the detection accuracy of the entire scanning area is not uniform.

On the other hand, in order to solve such a problem, it has been proposed to detect the light intensity at each scanning position according to the portion to be scanned in the object to be tested, and on the basis of this, directly change the light source when performing light scanning for each scanning position. The method of outputting light to scan.

However, although the above method can improve the detection accuracy, after the preliminary scanning, it is necessary to adjust the intensity of the light generated by the light source according to the reflectance of each scanning position formed on the basis of the preliminary scanning, and thus there is a problem that the overall processing time is lengthened.

Moreover, it is necessary to change the output light from the light source at each scanning position, thereby further increasing the overall process time, and it is also difficult to adjust the light output of the light source for each scanning position.

The present invention has been made to solve the above problems in the prior art, and an object thereof is to provide a method and system for acquiring an object image using a confocal microscope structure, according to a reflection of a surface of each scanning position in a scanning area. The difference in brightness of the image caused by the difference between the detection signals caused by the difference in optical characteristics such as the ratio, the roughness, and the reflection angle, and the intensity of the scanning light is adjusted according to the intensity of light detected from each scanning position, and obtained The image is used to improve the detection accuracy of the scanning area.

The above objectives are achieved by the following technical means. A method for acquiring an image of a measured object using a confocal microscope structure according to the present invention generates light at a position above the object to be measured, and uses an acousto-optic deflector to sequentially deflect the light onto the XY plane of the scanning area while scanning. To obtain an image, the method includes the following steps: an intensity information acquisition step of generating light through a microscope light source, and inputting the light to an optical path of the scanning unit, so that the generated light is irradiated onto the entire scanning area, and The camera acquires and analyzes an overall image of the scanned area to obtain light intensity information of each scanning position; and an information setting step of mapping the obtained light intensity information of each scanning position to position information of each scanning position To set mapping information; a loading step of loading the mapping information stored in the information setting step according to the control signal; and a transmitting step of setting the sound intensity information based on the loaded mapping information and transmitting the sound intensity information to the sound and light deflector; a step of inputting the light outputted by the acousto-optic deflector while outputting, while being deflected, according to Sound intensity information, the light intensity is adjusted, and the output light is scanned by the scanning unit to each scanning position and reflected, the reflected light enters the scanning unit; the recording step is detected by the photodetector by each scanning a light that is reflected by the position and enters the scanning unit, and records the detected light detection signal; a Z-axis scanning step that changes the distance between the object to be tested and the scanning unit by a predetermined distance in the Z-axis direction, and sequentially Performing the transmitting step, the scanning step, and the recording step, to record the light detecting signals of each scanning position at different distances, wherein the recording of the light detecting signals of each scanning position at the different distances is performed at least once; An image acquisition step of selecting one of a plurality of light detection signals transmitted through each of the scanning positions detected in the Z-axis scanning step, and forming an image of each scanning position according to the sound intensity information to obtain The overall image of the scanned area.

The light detection signal selected from the plurality of light detection signals at each scanning position in the image acquisition step may be a light detection signal when the voltage of the photodetector is the highest voltage.

Moreover, the mapping information stored in the information setting step may be information input from the outside. The optical characteristic of the surface of each scanning position may be at least one of a reflectance, a roughness, and a reflection angle of the surface of each scanning position.

The above object of the present invention can be achieved by the following technical means, and another embodiment of the present invention provides an image receiving system for an object to be measured using a confocal microscope structure, which includes: a light source unit located at the object to be tested Above, a scanning area for generating light and outputting it to the object to be scanned; a deflection unit comprising an acousto-optic deflector for deflecting light onto the XY plane of the scanning area according to the control The light deflector receives the light output from the light source unit, and deflects and outputs the light, and the deflected light is adjusted according to the transmitted sound intensity information, and the output is adjusted; the scanning unit is configured to receive the deflection through the deflection unit The output light is scanned and scanned to each scanning position, and the light reflected from each scanning position is input; the microscope unit has a microscope light source that generates light, and the generated light is input to the scanning unit. On the optical path, the generated light is irradiated onto the entire scanning area to obtain an overall image of the scanning area; the optical splitter It is disposed in the scanning unit for transmitting light input from the deflection unit and reflecting light input from each scanning position; a light detecting unit located at a side of the scanning unit for detecting transmission through the beam splitting unit a reflected light; a control unit for controlling the deflection unit to deflect light onto an XY plane of the scanning area and analyze each scanning position in the scanning area through an overall image acquired by the microscope unit The light intensity is set to map information, and the sound intensity information is set by carrying the mapping information, and is selected from a plurality of light detection signals detected by the light detecting unit at different Z-axis separation distances of each scanning position. One of the light detection signals forms an image for each scanning position.

Wherein, the beam splitter may be a half mirror or a Polarizing Beam Splitter.

Moreover, the scanning unit preferably has a beam splitter, a scanning lens, a lens barrel, a quarter-wave plate, and an objective lens, and the light input from the light source unit passes through the beam splitter, the scanning lens, the lens barrel, and the 1/4 wavelength. The plate and the objective lens are scanned to each scanning position, and the light reflected at each scanning position passes through the objective lens, the quarter-wave plate, the lens barrel lens, and the scanning lens, and is reflected by the beam splitter.

In addition, the light detecting unit may include: a first condensing mirror for receiving the light reflected from the beam splitter and collecting the collected light beam; and a light receiving cover for receiving the concentrated light beam from the first concentrating mirror; the photodetector It is used to receive light transmitted through the light receiving cover and convert its light intensity into an electrical signal.

Moreover, the light receiving cover may be provided with slits or pinholes for transmitting the concentrated light beam formed by the collection of the first collecting mirror.

In addition, the deflection unit preferably includes an acousto-optic deflector and a light deflector for deflecting light onto the XY plane of the scanning area and is separately controlled.

Further, the light deflector is preferably located on the optical path of the light transmitted from the light source unit through the beam splitter.

Moreover, the light deflector can be any one of a scanning mirror, a galvanometer, or a MEMS mirror.

Alternatively, the deflection unit may be formed by a pair of acousto-optic polarizers for deflecting light onto the XY plane of the scanning area and controlled separately.

Wherein, the light receiving cover is preferably controlled to move in synchronization with light that is deflected by the pair of acousto-optic deflectors on the XY plane.

Moreover, the microscope unit may include: a first beam splitter disposed between the quarter-wave plate of the scanning unit and the barrel lens for reflecting the input light to be irradiated to the scanning area In the entire field; a microscope light source for generating and outputting light; and a second beam splitter for reflecting light output from the microscope light source to the first beam splitter and reflecting from the first beam splitter to be incident The light passes through; the camera images the light transmitted through the second beam splitter to form an overall image of the scanned area.

In addition, the control unit may include: an image analyzing unit that analyzes and transmits the light intensity of each scanning position in the scanning area through the image acquired from the camera; and a mapping information setting unit that will analyze the image from the image The light intensity transmitted by the unit is set to the light intensity information of each scanning position, and is mapped to the position information of each scanning position; the information carrying unit is mounted, and the stored mapping information is carried according to the external control signal, and the mapping is performed. The information is transmitted to the information setting unit; the information setting unit includes a sound intensity information setting unit, and the sound intensity information setting unit sets the sound intensity information according to the loaded mapping information to adjust the light intensity deflected to each scanning position, and The sound intensity information is transmitted to the acousto-optic deflector; an imaging unit that records an image of each scan position based on the transmitted light detection signal to form an overall image of the scan area.

According to the present invention, there is provided a method and system for acquiring an image of an object to be measured using a confocal microscope structure, which is detected according to different optical characteristics such as reflectance, roughness and reflection angle of a surface of each scanning position in a scanning region. The difference in luminance of the image caused by the difference between the signals, correspondingly adjusting the intensity of the scanning light according to the intensity of light detected from each scanning position and obtaining an image, can improve the detection accuracy of the scanning region.

Before explaining the present invention, it should be noted that in the following embodiments, the same component symbols are used for the structural elements having the same structure, and are representatively illustrated in the first embodiment, and in the remaining embodiments, A structure different from the first embodiment will be described.

Hereinafter, a method and system for acquiring an object to be measured using a confocal microscope structure according to a first embodiment of the present invention will be described in detail with reference to the drawings.

FIG. 5 is a schematic diagram of a sample image acquisition system using a confocal microscope structure according to a first embodiment of the present invention.

As shown in FIG. 5, the object image acquisition system of the present invention using a confocal microscope structure includes a light source unit (10), a deflection unit (20), a scanning unit (30), a light detecting unit (40), and a control unit. (50) and microscope unit (60).

The light source unit (10) is located above the scanning area of the object (T) and may include a light source (11) and a light diffuser (12).

Wherein, the object to be tested (T) can be located on a predetermined platform, and the platform can be controlled to be movable in the Z-axis direction by a predetermined driving means.

The light source (11) is a laser for outputting light and outputting the light to the Z-axis direction of the object to be tested (T), such as a He-Ne laser or a diode laser.

The light diffuser (12) is located in front of the light source (11) for spatially filtering the light output from the light source (12) to deform and diffuse the light and output it.

The deflection unit (20) may comprise an acousto-optic deflector (21) for deflecting incident light in the X-axis direction or the Y-axis direction, and another axial deflection for different direction from the aforementioned yaw axis A light deflector (22) of the light of the acousto-optic deflector (21).

That is, incident light from the light source (12) can be deflected through the deflection unit (20) onto the XY plane of the scanning area.

Similarly to the prior art, the acousto-optic deflector (21) pressurizes the medium by a piezoelectric piezoelectric actuator for a predetermined period to generate a predetermined sound wave based on the audio transmitted by the control unit (50), which will be described later. The incident light is deflected toward the first axis at an angle.

Moreover, according to the sound intensity information transmitted by the control unit (50), the piezoelectric actuator pressurizes the medium with a certain intensity, thereby adjusting the intensity of the incident light and outputting it.

At this time, the light intensity (I) of the acousto-optic deflector (21) is associated with the sound intensity (P) of the transmitted sound intensity information.

That is, under isotropic interaction, the following formula can be used for explanation.

Where I ₀ is the intensity of the incident light; I ₁ is the intensity of the output light; P is the sound intensity; M, H, L are the characteristic coefficients of the acousto-optic deflector; λ ₀ is the wavelength of the incident light.

In addition, under the anisotropic interaction, the relationship between the sound intensity and the sound intensity of the sound intensity information can also be explained by the vector form.

That is, this means that it is possible to adjust the light intensity independently without being affected by the deflection angle and the audio frequency.

The light deflector (22) may be any one of a scanning mirror, a galvanometer or a MEMS mirror configured to drive incident light to the second axis in accordance with predetermined driving information transmitted from a control unit (50), which will be described later. Direction deflection.

Through such an acousto-optic deflector (21) and a light deflector (22), the light can be deflected onto the XY plane of the scanning area, in particular, the light deflected by the acousto-optic deflector (21) is adjusted and output. .

The scanning unit (30) includes a housing (30A), and inside the housing (30A), a beam splitter (31), a scanning lens (32), and a lens barrel are sequentially disposed from the direction of the light source unit (10). 33), a quarter-wave plate (34) and an objective lens (35), and are movable in the Z-axis direction by a predetermined driving means.

The light deflected by the acousto-optic deflector (21) is scanned into the scanning area via the beam splitter (31), the scanning lens (32), the lens barrel (33), the quarter-wave plate (34), and the objective lens (35). At each scanning position, the light reflected at each scanning position passes through the objective lens (35), the quarter-wave plate (34), the lens barrel (33), the scanning lens (32), and then the beam splitter (31). Reflected at the place.

Wherein, the beam splitter (31) may be constituted by any one of a half mirror or a polarizing beam splitter (PBS), and is configured to change its transmittance and reflectance according to the wavelength. Thereby it is possible to separate the two rays.

The beam splitter (31) is disposed between the acousto-optic deflector (21) and the light deflector (22), and the beam splitter (31) can transmit light incident from the acousto-optic deflector (21) through deflection, and The light incident from the scanning area is reflected by changing its wavelength during the passage of the quarter-wave plate (34).

As a result, the light that is incident from the light source unit (10) toward the scanning area and the light that is incident from the scanning area can be separated by the spectroscope (31) and the quarter-wave plate (34).

The scanning lens (32) is arranged to allow light deflected by the light deflector (22) to be focused on the upper plane (32a), and the light focused on the upper plane (32a) is output as parallel light after passing through the lens barrel (33). And passed to the objective lens (35).

Light deflected by such an acousto-optic deflector (21) can be accurately transmitted to the objective lens (35) through the scanning lens (32) and the lens barrel (33).

The light detecting unit (40) includes a first collecting mirror (41), a light receiving cover (42) and a photodetector (43) for detecting light reflected from each scanning position in the scanning area.

The first condensing mirror (41) receives the light reflected by the 1/4 wavelength plate (34) and makes it a condensed beam.

As shown, the mask (42) may be a slit mask having a slit (42a) or a pinhole mask (not shown) having a pin hole through which the slit (42a) or The pinhole receives a concentrated beam from the first condenser (41).

The photodetector (43) is composed of a photodiode or the like which receives light transmitted through the slit (42a) of the light receiving cover (42) and converts its light intensity into an electrical signal.

The microscope unit (60) includes a first beam splitter (61), a microscope light source (62), a diffusion lens (63), a second beam splitter (64), and an image acquisition portion (65).

The first beam splitter (61) and the second beam splitter (64) may have the same structure as the above-mentioned beam splitter (31), and in the embodiment, the first beam splitter is constituted by a semi-transparent mirror.

The first beam splitter (61) is disposed between the lens barrel lens (33) and the quarter-wavelength plate (34) for injecting light transmitted through the microscope light source (62) into the optical path of the scanning unit (30). Thereby, the entire scanning area is irradiated with light, and the light reflected by the scanning area is reflected for acquisition by the image acquiring unit (65).

The microscope light source (62) is composed of a member corresponding to the laser portion (11) of the light source unit (10) for outputting light, and the diffusion lens (63) is disposed to diffuse from the microscope light source (61). Output light.

The second beam splitter (64) is arranged to reflect light output by the microscope source (62) to the first beam splitter (61) and to transmit light transmitted by the first beam splitter (61).

The image acquisition unit (65) includes a second condensing mirror (65B) for collecting light transmitted through the second beam splitter (64), and a camera (65A) that receives the collected light and acquires an overall image of the scanned area.

The microscope unit (60) can illuminate the entire scanning area through the optical path of the scanning unit (30), and thereby quickly acquire an overall image of the scanning area.

Figure 6 is a block diagram showing the specific structure of the control unit of Figure 5. As shown in FIG. 5 and FIG. 6, the control unit (50) includes an information setting unit (51), an image analyzing unit (52), a mapping information setting unit (53), a mapping information loading unit (54), and an imaging unit ( 55).

The information setting unit (51) includes an audio information setting unit (51A), a sound intensity information setting unit (51B), and a driving information setting unit (51C).

The audio information setting unit (51A) can set a control signal of the deflection angle of the acousto-optic deflector (21): audio information, and the driving information setting unit (51C) can set the control signal of the deflection angle of the optical deflector (22): driving information .

The sound intensity information setting unit (51B) may set a control signal for controlling the light intensity output through the acousto-optic deflector (21): sound intensity information.

Wherein, each information set in each setting unit may be set by an administrator, or may be set to be based on mapping information of a scanning area carried by the mapping information loading unit (54) according to a predetermined control signal, a photodetector (43) The light detection signal obtained from the light at each scanning position of the scanning area can be maintained at a certain level or more.

As a result, the acousto-optic deflector (21) deflects the incident light toward either of the X-axis or the Y-axis direction according to the transmitted audio information, and adjusts the intensity according to the intensity information.

Further, the optical deflector (22) deflects the incident light toward an axial direction different from the deflection direction caused by the acousto-optic deflector (21) based on the transmitted drive information, and outputs it.

Thereby, the light incident on the deflection unit (20) can be sequentially deflected toward the XY plane of the scanning area, and its intensity is adjusted and output.

The image analyzing unit (52) is configured to analyze the light intensity of each scanning position from the entire image of the scanning area acquired by the camera (65A) to acquire the light intensity information of each scanning position, and each of the acquired The light intensity information of the scanning position is transmitted to the mapping information setting unit (53).

The mapping information setting unit (53) may be configured to map light intensity information of each scanning position transmitted by the image analyzing unit (52) to position information of each scanning position as mapping information and save it to a predetermined schedule. Storage device.

The mapping information loading unit (54) may be configured to mount the stored mapping information based on a predetermined external signal or control signal indicating that the mapping information of the corresponding scanning area is mounted, and transmit the stored mapping information to the information setting unit (51). .

The imaging unit (55) may be configured to be coupled to the photodetector (43) and detected during a change in distance from the Z-axis between the object (T) and the scanning unit (30) One of the plurality of light detecting signals at each scanning position is selected to form a signal intensity (image) of each scanning position.

The selected photodetection signal may be a photodetection signal of the photodetector (43) at the highest voltage.

As a result, it is possible to configure an image for each scanning position and form an entire image of the scanning area through a predetermined algorithm, and the entire image is displayed through a predetermined display device.

Next, an image acquisition method using the image acquisition system of the object to which the confocal microscope structure is applied will be described. Fig. 7 is an algorithm of a method of acquiring an object image to which the system shown in Fig. 5 is applied.

As shown in Figures 5 through 7, light is generated by the microscope source (62) and output to the second beam splitter (64, S10).

The second beam splitter (64) reflects incident light from the microscope source (62) and inputs it to the first beam splitter (61, S11).

The input light is reflected by the first beam splitter (61), and then transmitted through the optical path of the scanning unit (30) to the entire scanning area (S12).

The light reflected by the scanning area is incident on the scanning unit (30) and reflected toward the second beam splitter (64) through the first beam splitter (61) (S13).

The light reflected by the first beam splitter (61) passes through the second beam splitter (64), and the passed light is collected by the second condenser (65B), and the entire image of the scanned area is acquired by the camera (65A) (S14) .

The acquired overall image of the scanned area is transmitted to an image analyzing unit (52), and the image analyzing unit (52) analyzes the light of each scanning position through the transmitted whole image to obtain the light intensity of each scanning position. After the information is transmitted to the mapping information setting unit (53, S15).

The light intensity information transmitted to each scanning position of the mapping information setting unit (53) is mapped to the position information of each scanning position, whereby the mapping information is set and saved to a predetermined storage device (S16).

In this way, the microscopic unit (60) acquires the entire image of the scanned area and sets the mapping information of each scanning position, and after performing a scan on the entire scanning area, the light intensity is set according to the surface information of each scanning position. Compared with the way of storing, it is more efficient and quick to set and store mapping information.

Next, light is generated by the light source unit (10) disposed above the object to be tested (P), and this light is output to the scanning area (S20).

Then, if a control signal indicating that the mapping information corresponding to each scanning position in the scanning area is mounted by the administrator, the mapping information loading unit (54) loads the mapping information of the corresponding scanning area from the stored mapping information, and It is transmitted to the information setting unit (51, S30).

The information setting unit (51) sets the audio information and the driving information based on the transmitted mapping information to deflect the light to each scanning position, and sets the sound intensity information so as to be reflected at each scanning position and in the photodetector (43). The detected light intensity is adjusted to the set light intensity and is detected (S40).

Among them, the set light intensity can be set by the administrator.

The deflection unit (20) deflects the incident light according to the transmitted audio information and the driving information. In particular, the acousto-optic deflector (21) adjusts the light intensity according to the sound intensity information while deflecting the incident light (S50).

Then, the output light is scanned by the scanning unit (30) to each scanning position and reflected and re-entered into the scanning unit (30, S60).

The light input to the scanning unit (30) is reflected by the spectroscope (31), detected by the photodetector (43), and the imaging unit (55) records the detected photodetection signal (S70).

Next, on the z-axis, the distance between the scanning unit (30) and the object to be tested (T) is changed by a predetermined distance, and steps S60 to S70 are sequentially performed (S80).

Wherein, the predetermined distance can be set by the administrator, and the step S80 can be performed multiple times.

Moreover, the imaging unit (55) can select any one of the plurality of light detection signals obtained by the change in the distance on the Z axis of each scanning position detected by the step S80, and form each of them on the basis of The image of the position is scanned, whereby an overall image of the scanned area is acquired (S90).

The selected light detecting signal may be a light detecting signal when the signal intensity of the photodetector (43) is maximum, that is, when the photodetector (43) is at the maximum voltage.

In this way, it is possible to average the difference in the optical intensity of the acquired image (photodetection signal) differently depending on the optical characteristics of the surface of each scanning position, such as the reflectance, the roughness, and the reflection angle. Thereby, the detection accuracy of the measured object can be improved.

Moreover, since the light intensity transmitted through the acousto-optic deflector can be deflected while adjusting the light intensity, it is not necessary to provide an additional control means for adjusting the intensity, and the scanning area can be scanned with high precision and speed.

On the other hand, as another example of the mapping information setting method, mapping information including light intensity information for each scanning position can be directly input from the outside.

The mapping information input from the outside may be a map containing surface information and light intensity information on the scanning area.

Therefore, when the map is input, the mapping information can be easily set and stored according to the light intensity information of each scanning position in the drawing.

When the map is provided, the mapping information loading unit (54) may load the mapping information of each scanning position in the scanning area based on the predetermined control signal, and transmit it to the information setting unit (51). .

Through the above method, the mapping information can be easily set, and the light is adjusted based on this, so as to maximize the performance of the photodetector and then scan with the adjusted light, thereby improving the detection accuracy.

The image obtained by the above-described image acquisition method and the conventional image acquisition method of the present invention will be described below as a specific example.

In this specific example, it is assumed that the object to be tested is fixed, and only the scanning unit moves in the Z-axis direction, and the same scanning area is scanned.

8 is a graph for indicating the light detection signal intensity of each scanning position acquired according to the conventional image acquisition method, and FIG. 9 is an image acquired according to the graph result of FIG.

Referring to FIG. 8, it is shown that the light having a single intensity is scanned into the scanning area, and the scanning unit (30) and the measured object (T) are adjusted in the Z-axis multiple times in the scanning position 1~ The light detection signal at the scanning position recorded at the scanning position 4 is scanned.

Wherein, for the scanning position 1 and the scanning position 2, the detected light intensity is the strongest when the distance between the scanning unit and the object to be tested is 40 μm, and the 40 μm can be regarded as the scanning position 1 and the scanning position 2 the height of.

Further, as for the scanning position 3, it can be seen that the light intensity is too weak as a whole, and for the scanning position 4, the light intensity is too strong at 40 μm to 60 μm.

Through the light detection signals thus detected at different Z-axis separation distances, the imaging unit selects the light detection signals at the maximum voltage among the light detection signals, and based on this, each scan as shown in FIG. 9 is formed. The image of the location.

That is, the bright place is too bright, the dark place is too dark, and thus the image with severe deviation of the light intensity at different scanning positions is obtained, and finally the detection accuracy is only lowered.

In contrast, the results of the image acquisition method according to the present invention are as follows.

FIG. 10 is a graph showing the magnitude of the light detection signal obtained in the case where the Z-axis separation distance is obtained at each scanning position, which is obtained by setting the sound intensity information according to the mapping information, and FIG. 11 is according to FIG. The image obtained from the graph results.

As shown in FIG. 10, if the mapping information including the scanning position 1 to the scanning position 4 is mounted by a predetermined control signal, the light intensity information detected at each scanning position included in the mapping information can be appropriately selected. Set the sound intensity information.

If it is assumed that the light intensity information included in the mapping information is the same as the light detection signal detected at different Z-axis distances based on the conventional method, the sound of each scanning position separated from the Z axis can be separated. The strong information is set such that the scanning position 3 whose overall photodetection signal is too low is higher at the corresponding Z-axis separation distance, and the scanning position 4 where the photodetection signal is too high as a whole is separated by the corresponding Z-axis. The light detection signal shown below is lower.

According to the sound intensity information thus set, the acousto-optic deflector can adjust the light intensity for each scanning position and output, and the light detection signal detected at each scanning position can be a graph as shown in the figure.

On the basis of the detected light detection signals according to the Z-axis separation distance, the imaging unit selects the light detection signals at the maximum voltage among the light detection signals, and based on this, forms an image of each scanning position, such as Figure 11 shows.

That is, it is possible to make the dark portion brighter to a certain extent or more, and to make the bright portion darker to a certain extent, thereby reducing the light intensity deviation at each scanning position, thereby improving the detection accuracy.

Further, by setting the sound intensity information based on the light intensity detected from each scanning position, it is possible to adjust the light intensity of the scanning light to obtain an averaged image, and it is possible to improve the detection accuracy of the entire scanning area.

The scope of the present invention is not limited to the above embodiments, and various embodiments of the embodiments can be implemented within the scope of the appended claims. The scope of the invention, which can be varied by those skilled in the art to which the invention pertains, is intended to be within the scope of the invention.

According to the method and system for acquiring an object image using the confocal microscope structure of the present invention, it is possible to detect the optical characteristics of the surface of each scanning position due to the difference in reflectance, roughness, and reflection angle of each scanning position. The difference in luminance of the image caused by the difference between the signals, correspondingly adjusts the intensity of the scanning light according to the intensity of light detected from each scanning position and obtains an image, thereby improving the detection accuracy of the scanning area.

1. . . Scanning optical system

2. . . Scanning area

3. . . Gap mask

4. . . Photodetector

10. . . Light source unit

11. . . light source

12. . . Light diffuser

20. . . Deflection unit

twenty one. . . Acousto-optic deflector

twenty two. . . Light deflector

30. . . Scanning unit

30A. . . case

31. . . Splitter

32. . . Scanning lens

32a. . . flat

33. . . Barrel lens

34. . . 1/4 wavelength plate

35. . . Objective lens

40. . . Light detection unit

41. . . First concentrating mirror

42. . . Photomask

42a. . . Gap

43. . . Photodetector

50. . . control unit

51. . . Information setting unit

51A. . . Audio information setting unit

51B. . . Sound intensity information setting unit

51C. . . Drive information setting unit

52. . . Image analysis unit

53. . . Mapping information setting unit

54. . . Mapping information piggyback unit

55. . . Imaging unit

60. . . Microscope unit

61. . . First beam splitter

62. . . Microscope light source

63. . . Diffusion lens

64. . . Second beam splitter

65. . . Image acquisition department

65A. . . camera

65B. . . Second concentrating mirror

a. . . Piezoelectric converter

b. . . medium

c. . . Sound wave

T. . . Measured object

1 is a schematic view of an acousto-optic deflection unit.

2 is a light conversion diagram of the incident sound and light deflection unit.

3 and 4 are focus views of the confocal microscope structure.

Fig. 5 is a schematic diagram of an object image acquisition system using the confocal microscope structure provided by the first embodiment of the present invention.

Figure 6 is a detailed structural view of the control unit of Figure 5.

Fig. 7 is an algorithm of a method for acquiring an object image using the system shown in Fig. 5.

Fig. 8 is a graph for showing the magnitude of a light detecting signal for each scanning position obtained by a conventional image capturing method.

Fig. 9 is an image obtained based on the results of the graph shown in Fig. 8.

Fig. 10 is a graph showing the magnitudes of photodetection signals obtained in the case where the Z-axis separation distances are obtained at each scanning position, which are obtained by setting the sound intensity information based on the mapping information.

Fig. 11 is an image obtained based on the results of the graph shown in Fig. 10.

10. . . Light source unit

11. . . light source

12. . . Light diffuser

20. . . Deflection unit

twenty one. . . Acousto-optic deflector

twenty two. . . Light deflector

30. . . Scanning unit

30A. . . case

31. . . Splitter

32. . . Scanning lens

32a. . . flat

33. . . Barrel lens

34. . . 1/4 wavelength plate

35. . . Objective lens

40. . . Light detection unit

41. . . First concentrating mirror

42. . . Photomask

42a. . . Gap

43. . . Photodetector

60. . . Microscope unit

61. . . First beam splitter

62. . . Microscope light source

63. . . Diffusion lens

64. . . Second beam splitter

65. . . Image acquisition department

65A. . . camera

65B. . . Second concentrating mirror

Claims (16)

A method for acquiring an image of an object to be measured by using a confocal microscope structure, which generates light above the object to be measured, and uses an acousto-optic deflector to sequentially deflect the light onto the XY plane of the scanning area while scanning Acquiring an image includes the following steps: an intensity information acquisition step of generating light through a microscope light source and inputting the light to an optical path of the scanning unit to cause the generated light to illuminate the entire scanning area and through the camera Obtaining and analyzing an overall image of the scanned area to obtain light intensity information of each scanning position; and an information setting step of mapping the obtained light intensity information of each scanning position to position information of each scanning position, a mapping information is provided; a loading step of loading the mapping information stored in the information setting step according to the control signal; and a transmitting step of setting the sound intensity information based on the mounted mapping information and transmitting the sound intensity information to the acousto-optic deflector; The light outputted from the acousto-optic deflector is outputted while it is deflected, according to the sound Information, the light intensity is adjusted, and the output light is scanned by the scanning unit to each scanning position and reflected, the reflected light enters the scanning unit; the recording step is detected by the photodetector and reflected by each scanning position And entering the light of the scanning unit, and recording the detected light detection signal; and a Z-axis scanning step of changing a distance between the object to be tested and the scanning unit by a predetermined distance in the Z-axis direction, and sequentially performing the a transmitting step, the scanning step, the recording step, to record light detection signals of each scanning position at different distances, wherein recording of the light detection signals of each scanning position at the different distances is performed at least once; And an acquisition step of selecting one of a plurality of light detection signals for each scanning position detected in the Z-axis scanning step, and forming an image of each scanning position according to the sound intensity information to obtain the scanning The overall image of the area. A method of acquiring an image of a measured object using a confocal microscope structure according to claim 1, wherein the light detecting signal selected from the plurality of light detecting signals at each scanning position in the image acquiring step is The photodetection signal when the voltage of the photodetector is the highest voltage. The method for acquiring an image of an object to be measured using a confocal microscope structure according to the first aspect of the patent application, wherein the mapping information stored in the information setting step is externally input. The method for acquiring an image of an object to be measured using a confocal microscope structure according to claim 1, wherein the optical characteristic of the surface of each scanning position is a reflection ratio, a roughness, and a reflection angle of the surface of each scanning position. At least one. An object image acquisition system using a confocal microscope structure, comprising: a light source unit located above the object to be used for generating light and outputting the scan area to be scanned in the object to be tested; a deflection unit comprising an acousto-optic deflector for deflecting light onto the XY plane of the scanning area according to the control, the acousto-optic deflector receiving the light output from the light source unit, deflecting the output, and deflecting The light is output according to the transmitted sound intensity information, and the scanning unit is configured to receive the light output after being deflected by the deflection unit, and scan it to each scanning position, and input from each scanning. a light reflected from the position; a microscope unit having a microscope light source that generates light, and the generated light is input to the optical path of the scanning unit, so that the generated light is irradiated onto the entire scanning area to obtain the scan An overall image of the region; a beam splitter disposed in the scanning unit for transmitting light input from the deflection unit and reflecting from each a light input unit; a light detecting unit located at a side of the scanning unit for detecting light reflected by the light splitting unit; and a control unit for controlling the deflecting unit to deflect light to the scanning area And analyzing the light intensity of each scanning position in the scanning area through the whole image acquired by the microscope unit to set mapping information, and carrying the mapping information to set the sound intensity information, and from the light detecting unit One of the plurality of light detecting signals at different Z-axis separation distances of each scanning position is detected to select one of the light detecting signals to form an image of each scanning position. An object image acquisition system using a confocal microscope structure as in claim 5, wherein the beam splitter is a half mirror or a polarizing beam splitter. An object image acquisition system using a confocal microscope structure according to claim 5, wherein the scanning unit has a beam splitter, a scanning lens, a lens barrel, a quarter wave plate, and an objective lens, and is input from the light source unit. The light passes through the beam splitter, the scanning lens, the lens barrel, the quarter-wave plate, and the objective lens, and is scanned to each scanning position, and the light reflected from each scanning position passes through the objective lens, the quarter-wave plate, and the lens barrel. The lens and the scanning lens are reflected by the beam splitter. An object image acquisition system using a confocal microscope structure according to claim 5, wherein the light detecting unit comprises: a first condensing mirror for receiving light reflected from the beam splitter and collecting the same a light beam; a light receiving cover for receiving a concentrated light beam from the first collecting mirror; and a photodetector that receives light transmitted through the light receiving cover and converts the light intensity into an electrical signal. An object image acquisition system using a confocal microscope structure according to the eighth aspect of the invention, wherein the light receiving cover is provided with a slit or a pinhole for transmitting a concentrated light beam formed by the first collecting mirror. An object image acquisition system using a confocal microscope structure according to claim 5, wherein the deflection unit comprises an acousto-optic deflector and a light deflector for deflecting light to an XY plane of the scanning area. Up and controlled separately. An object image acquisition system using a confocal microscope structure according to claim 10, wherein the light deflector is located on an optical path of light passing through the light splitter from the light source unit. The object image acquisition system using the confocal microscope structure of claim 11, wherein the light deflector is any one of a scanning mirror, a galvanometer, or a MEMS mirror. An object image acquisition system using a confocal microscope structure according to claim 8 wherein the deflection unit is constituted by a pair of acousto-optic polarizers for deflecting light onto an XY plane of the scanning area, and They are controlled separately. An object image acquisition system using a confocal microscope structure according to claim 13 wherein the mask is controlled to move in synchronization with light deflected by the pair of acousto-optic polarizers on the XY plane. An object image acquisition system using a confocal microscope structure as claimed in claim 7 wherein the microscope unit comprises: a first beam splitter disposed between the quarter-wave plate of the scanning unit and the lens barrel for reflecting the input light to illuminate the entire scanning area; the microscope light source is used for Generating and outputting light; a second beam splitter for reflecting light output from the microscope light source to the first beam splitter and transmitting light reflected from the first beam splitter; the camera Light rays transmitted through the second beam splitter are imaged to form an overall image of the scanned area. An object image acquisition system using a confocal microscope structure according to claim 15 wherein the control unit comprises: an image analysis unit that analyzes and transmits the image in the scan area through an image acquired from the camera Light intensity at each scanning position; a mapping information setting unit that sets the light intensity transmitted from the image analyzing unit to the light intensity information of each scanning position and maps it to the position information of each scanning position; The information piggybacking unit is configured to carry the stored mapping information according to the external control signal and transmit the stored mapping information to the mapping information setting unit; the information setting unit includes a sound intensity information setting unit, and the sound intensity information setting unit is configured to be mounted The mapping information sets the sound intensity information to adjust the light intensity deflected to each scanning position, and transmits the sound intensity information to the sound and light deflector; the imaging unit records each scan based on the transmitted light detection signal The image of the location to form an overall image of the scanned area.