KR20110113055A - Image Acquisition Method and System of Measurement Object Using Confocal Microscopy Structure - Google Patents

Abstract

The present invention relates to a method and system for acquiring an image of a measurement object using a confocal microscope structure. The method for acquiring an image of a measurement object using a confocal microscope structure according to the present invention generates light from an upper portion of an object to be subjected to acoustic optical deflection. An image acquisition method of a measurement object using a confocal microscope structure in which light is scanned while deflecting light sequentially on an XY plane of a scan area by using a light source, wherein the light is generated through a microscope light source, and the generated light is An intensity information acquisition step of acquiring the intensity information of the light at each scan position by inputting onto the optical path of the scanning unit to irradiate the entire scan area and acquiring and analyzing the entire image of the scan area with a camera; An information setting step of mapping the obtained light intensity information of each scan position to position information of each scan value and setting and storing the light intensity information as macro information; A loading step of loading mapping information stored in the information setting step according to a control signal; A transmission step of setting acoustic intensity information based on the loaded mapping information and transmitting the acoustic intensity information to the acoustic optical deflector; The light inputted to the acousto-optic deflector and output is deflected and at the same time the light intensity is adjusted according to the sound intensity information, and the output light is scanned and reflected to each scan position through a scanning unit, and then the reflected light is An injection step input to the injection unit; A recording step of detecting light reflected from each scan position input to the scanning unit with a photodetector and recording the detected photodetection signal; Changing the separation distance between the measurement object and the scanning unit in a Z-axis direction, and sequentially performing the transmission step, the scanning step, and the recording step to record the light detection signal of each scan position according to the change of the separation distance. However, the Z-axis scanning step of performing the light detection signal of each scan position according to the change of the separation distance at least once; An image acquisition step of acquiring an entire image of the scan area by forming an image of each scan position according to the sound intensity information by selecting any one from a plurality of light detection signals of each scan position detected through the Z-axis scan step. It is achieved by an image acquisition method of a measurement object using a confocal microscope structure characterized in that it comprises a. As a result, the intensity of light to be scanned according to the intensity of light detected from each scan position corresponds to a difference in brightness of an image due to a difference in detection signal that varies depending on surface information such as reflectivity, roughness and reflection angle of each scan position in the scan area. Provided are a method and system for acquiring an image of a measurement object using a confocal microscope structure capable of improving the measurement accuracy of a scan area by acquiring an image by adjusting the image.

Description

Image acquisition method and system for measuring object using confocal microscope structure {METHOD AND SYSTEM FOR OBTAINING OBJECT IMAGE USING CONFOCAL MICROSCOPE}

The present invention relates to a method for acquiring an image of a measurement object using a confocal microscope structure, and more particularly, an acquisition signal that varies depending on optical properties such as reflectivity, roughness, and reflection angle, which are optical characteristics of each scanning position surface of light to be scanned into the measurement object to be scanned. The present invention relates to an image acquisition method and system using a confocal microscope structure that can improve measurement accuracy by scanning and controlling the intensity of light in an acoustic optical deflector so as to level the difference as much as possible.

In general, confocal microscopy uses light from a point source with a laser as a light source to confocal the focus of the sample and onto the photodetector slit or pinhole, so that portions other than the focal plane are light. By not appearing on the detector, the resolution of the focal plane is 1.4 times higher than that of a conventional fluorescence microscope, and a pinhole or slit mask is installed on the optical axis to focus the light passing through or reflected from the sample. By allowing you to select only those rays that fit exactly, you can increase the resolution and visualize.

In addition, in confocal microscopy, two-dimensional images can be reconstructed into three-dimensional or three-dimensional images again using certain software, so that images of XZ sections that were not previously observed can be observed and are bulky. The shape of the structure can be reconstructed through a confocal microscope to easily obtain the image in the desired direction.

Such a confocal microscope employs an optical deflector such as a scan mirror (galvanometer), a MEMS device or an acoustic optical deflector to deflect the light to the scan position to be scanned on the XY plane of the sample.

Here, the scan mirror (galvanometer) is a mirror (reflective mirror) attached to the rotating axis, there is an advantage that can be driven relatively high speed with a simple structure, MEMS (micoroelectromechanical systems) is a compact, high-speed integration of this reflecting mirror structure It is.

In addition, the acoustic optical deflector is a widely used means for deflecting incident light, and may be formed of a piezoelectric transducer (a) and a medium (b) as shown in FIG. 1.

In the piezoelectric transducer (a), when an RF signal having a predetermined frequency allocated from the controller is transmitted through the RF modulator, the piezoelectric transducer (a) pressurizes the medium (b) according to the frequency transmitted by the RF signal and the wavelength Λ Acoustic waves c are generated and propagated into the medium b. As a result, a periodic change of the refractive index occurs in the medium portion b by the acoustic optical effect of the generated acoustic wave c.

This change in refractive index can be thought of as a diffraction grating and diffracts the incident light as if it diffracts (Bragg diffraction) X-rays at atoms on the crystal surface.

If an acoustic wave c having a frequency f and a traveling speed v is generated, since v = fΛ, the period of refractive index change in the medium portion b can be known.

That is, as shown in FIG. 2, if the incident light has the wavelength λ, the deflection angle θ of the incident light caused by the acoustic wave c may be expressed as follows.

sinθ = λ / 2 2 = λf / 2v

That is, it can be seen that the deflection angle θ of the incident light can be changed by adjusting the frequency f of the acoustic wave c. The frequency f of this acoustic wave c can be determined by controlling the frequency of the RF signal.

By using the acoustic optical deflector operated on the same principle, it is possible to control the incident light to be deflected in the scanning direction on the XY plane of the measurement object to be scanned, and to obtain light from each scan position to obtain an image of the measurement object to be scanned. .

In general, each scan position of the measurement object is different in height from each scan position (unit pixel), and the height measurement is completed by scanning step by step focusing on the height of any part of the measurement object.

That is, as shown in FIG. 3, if the focus of the light scanned through the scanning optical system 1 is accurately formed on the surface of each scan position of the scan area 2 of the measurement object, the focus of the light reflected from each scan position is also slit. It is precisely formed in the slit of the mask 3 so that light can be obtained through the photodetector 4.

However, as shown in FIG. 4, when the optical focus is not formed accurately at each scan position of the measurement object 2, the optical focus formed in the slit of the slit mask 3 also does not coincide with the photodetector 4. The light obtained from) is obtained with light having a relatively low intensity.

Therefore, the overall height of the scan area is obtained by combining the light detected from different scan positions with different heights, resulting in the height (three-dimensional shape) of the entire scan area. Since the difference in signal values varies depending on the surface of reflectance, roughness and reflection angle of each part of the scan position, there is a problem in that the measurement accuracy of the entire scan area is not uniform.

On the other hand, in order to solve this problem, the intensity of light is measured for each scan position according to the portion of the measurement object to be scanned, and based on this, scanning while changing the light output of the light source directly when scanning the light at each scan position This has been proposed.

However, although the proposed method can improve the measurement accuracy, the overall process time is increased because the intensity of light generated from the light source must be adjusted according to the reflectivity of each scan position based on the initial scan after performing the initial scan.

In addition, since the light output from the light source should be changed at every scan position, the overall process time was further increased, and there was a difficulty in controlling the light output of the light source at every scan position.

Accordingly, an object of the present invention is to solve such a conventional problem, and corresponds to a brightness difference of an image due to a detection signal difference that varies depending on optical characteristics such as reflectivity, roughness, and reflection angle of each scan position surface of the scan area. According to the present invention, there is provided a method and system for acquiring an object to be measured using a confocal microscope structure which can improve the measurement accuracy of the scan area by acquiring an image by adjusting the intensity of light to be scanned according to the intensity of light detected from each scan position. .

The object of the present invention is to measure light using a confocal microscope structure in which light is generated from an upper portion of a measurement object, and an image is scanned by deflecting light sequentially on an XY plane of a scan area using an acoustic optical deflector. In the image acquisition method of the object, the light is generated through a microscope light source, and the generated light is input to the optical path of the scanning unit so that the generated light is irradiated to the entire scan area, and the camera acquires and analyzes the entire image of the scan area. An intensity information obtaining step of obtaining intensity information of light at each scan position; An information setting step of mapping the obtained light intensity information of each scan position to position information of each scan position and setting it as mapping information; A loading step of loading mapping information stored in the information setting step according to a control signal; A transmission step of setting acoustic intensity information based on the loaded mapping information and transmitting the acoustic intensity information to the acoustic optical deflector; The light inputted to the acousto-optic deflector and output is deflected and at the same time the light intensity is adjusted according to the sound intensity information, and the output light is scanned and reflected to each scan position through a scanning unit, and then the reflected light is An injection step input to the injection unit; A recording step of detecting light reflected from each scan position input to the scanning unit with a photodetector and recording the detected photodetection signal; Changing the separation distance between the measurement object and the scanning unit in a Z-axis direction, and sequentially performing the transmission step, the scanning step, and the recording step to record the light detection signal of each scan position according to the change of the separation distance. However, the Z-axis scanning step of performing the light detection signal of each scan position according to the change of the separation distance at least once; An image acquisition step of acquiring an entire image of the scan area by forming an image of each scan position according to the sound intensity information by selecting any one from a plurality of light detection signals of each scan position detected through the Z-axis scan step. It is achieved by an image acquisition method of a measurement object using a confocal microscope structure characterized in that it comprises a.

Here, the light detection signal selected from the plurality of light detection signals of each scan position in the image acquisition step may be a light detection signal when the voltage of the light detector is at the maximum voltage.

In addition, the mapping information stored in the information setting step may be input from the outside. The optical characteristic of each scan location surface may be at least one of reflectivity, roughness, and reflection angle of each scan location surface.

The above object is, according to another embodiment of the present invention, in the image acquisition system of the measurement object using a confocal microscope structure, which is located above the measurement object, generates light and outputs it to the scan area to be scanned among the measurement object A light source unit; The light output from the light source unit is deflected to be outputted, and the deflected light is deflected onto the XY plane of the scan area, including an acoustic optical deflector, the intensity of which is adjusted according to the transmitted acoustic intensity information. A deflection unit which is controlled to be; A scanning unit which receives the light deflected and output through the deflection unit and scans the light to each scan position, and the light reflected from each scan position is input; A microscope unit for generating light, the microscope unit for inputting the generated light onto the optical path of the scanning unit so as to irradiate the entire scanning area to obtain an entire image of the scanning area; An optical splitter installed in the scanning unit to transmit light input from the deflection unit and reflect light input from each scan position; A light detecting unit positioned at a side of the scanning unit to detect light reflected through the light splitting unit; The deflection unit is controlled so that light is deflected on the XY plane of the scan area, and the mapping information is set by analyzing the intensity of light at each scan location of the scan area through the entire image obtained through the microscope unit. Load the information to set the sound intensity information, and select any one of the plurality of light detection signal according to the change in the Z-axis distance of each scan position detected from the light detection unit image of each scan position It is achieved by the image acquisition system of the measurement object using a confocal microscope structure characterized in that it comprises a controller unit for forming a.

The light splitter may be a half mirror or a polarizing beam splitter.

The scanning unit may include a light splitter, a scan lens, a tube lens, a quarter wave plate, and an objective lens, and the light input from the light source unit may include the light splitter, scan lens, tube lens quarter wave plate, and the like. Scanning through the objective lens to each scan position, the light reflected from each scan position is reflected by the optical splitter through the objective lens, quarter-wave plate, tube lens, scan lens.

In addition, the light detecting unit receives a light reflected by the light splitter and collects the light into a focused light, a light receiving mask for receiving light focused from the light collecting lens, and a light passing through the light receiving mask. It may include a photo detector for converting the intensity of the light into an electrical signal.

In addition, a slit or pinhole may be formed in the light-receiving mask so that the light focused in the light collecting lens passes.

On the other hand, the deflection unit is preferably controlled by including one acoustic optical deflector and one optical deflector to deflect light onto the XY plane of the scan area.

In addition, the optical deflector may be positioned on an optical path of light transmitted from the light source unit through the light splitter.

In addition, the optical deflector may be any one of a scan mirror, a galvanometer or a MEMS mirror.

On the other hand, the deflection unit may be provided with a pair of acoustic optical deflectors so as to deflect light onto the XY plane of the scan area, and may be controlled respectively.

In this case, the light receiving mask is preferably controlled to move in synchronization with the light deflected on the XY plane by the pair of acoustic optical deflectors.

The microscope unit may include a first light splitter disposed between the quarter-wave plate of the scanning unit and the tube lens to reflect the light inputted to the entire scan area, and to generate and output light. And a second light splitter configured to reflect light emitted from the microscope light source to the first light splitter, to transmit light reflected from the first light splitter, and to pass through the second light splitter. It may include a camera to image the light to obtain the entire image of the scan area.

The controller unit may further include an image analyzer which analyzes and transmits the intensity of light at each scan position of the scan area from the image acquired from the camera, and the intensity of the light transmitted from the image analyzer at each scan position. A mapping information setting unit configured to set the information and mapping the position information of each scan position, a mapping information loading unit which loads the stored mapping information according to an external control signal, and transmits the stored mapping information to the information setting unit, and each scan according to the loaded mapping information. An information setting unit including sound intensity information setting unit for setting the sound intensity information so as to adjust the intensity of the light deflected to the position and transmitting the sound intensity information to the acoustic optical deflector; and recording an image of each scan position based on the transmitted light detection signal. It may include an image forming unit for forming the entire image of the scan area.

According to the present invention, the scanning of the light in accordance with the intensity of the light detected from each scan position to correspond to the difference in the brightness of the image by the detection signal difference that varies depending on the surface information such as the reflectivity, roughness and reflection angle of each scan position of the scan area Provided are an image acquisition method and system for measuring an object using a confocal microscope structure capable of improving the measurement accuracy of a scan area by acquiring an image by adjusting the intensity.

1 is a schematic diagram of an acoustic optical deflection unit;
2 is a conversion diagram of light input to an acoustic optical deflection unit;
3 and 4 is a focus of the confocal microscope structure,
5 is a schematic diagram of an image acquisition system of a measurement object using a confocal microscope structure according to a first embodiment of the present invention;
6 is a detailed view of the controller unit of FIG. 5;
7 is an algorithm of an image acquisition method of a measurement object using the system of FIG. 5;
8 is a graph showing the size of the light detection signal of each scan position obtained by a conventional image acquisition method;
9 is an image obtained according to the graph result of FIG. 8,
10 is a graph showing the magnitude of the light detection signal according to the change in the Z-axis separation distance of each scan position obtained by setting the sound intensity information according to the mapping information;
FIG. 11 is an image obtained according to the graph result of FIG. 10.

Prior to the description, in the various embodiments, components having the same configuration will be representatively described in the first embodiment using the same reference numerals, and in other embodiments, different configurations from the first embodiment will be described. do.

Hereinafter, an image acquisition method and system for measuring an object using a confocal microscope structure according to a first embodiment of the present invention will be described in detail with reference to the accompanying drawings.

5 is a schematic diagram of an image acquisition system of a measurement object using a confocal microscope structure according to the first embodiment of the present invention.

5, the image acquisition system of the measurement object using the confocal microscope structure according to the present invention is a light source unit 10, a deflection unit 20, a scanning unit 30, a light detection unit 40, a controller unit It comprises a 50 and the microscope unit 60.

The light source unit 10 may be positioned above the scan area of the measurement object T and may include a light source 11 and an optical expander 12.

In this case, the measurement object T may be positioned on a predetermined stage, and the stage may be controlled to be movable in the Z direction by a predetermined driving means.

Here, the light source 11 is a laser provided with a He-Ne laser or a diode laser to generate light to output light in the Z-axis direction of the measurement target T.

The optical expander 12 is positioned in front of the light source 11 to perform spatial filtering of the light output from the light source 12 to deform and expand the light.

The deflection unit 20 includes an acoustic optical deflector 21 for deflecting the input light in the X-axis direction or the Y-axis direction, and a deflection in one axial direction different from the deflection axial direction from the acoustic optical deflector 21. It may be configured to include an optical deflector 22.

That is, the light input from the light source 12 may be deflected through the deflection unit 20 onto the XY plane of the scan area.

The acoustic optical deflector 21 is a predetermined angle by the piezoelectric actuator to press the medium at a predetermined period in accordance with the acoustic frequency transmitted from the controller unit 50 to be described later as in the prior art at a predetermined angle In the first axis direction.

In addition, the piezoelectric actuator may adjust the intensity of the input light by pressing the medium part to a predetermined intensity according to the sound intensity information transmitted from the controller unit 50.

At this time, the light intensity I of the acoustic optical deflector 21 has a relationship with the acoustic intensity P of the transmitted acoustic intensity information.

That is, in the case of isotropic interaction,

Where I ₀ is the intensity of the input light, I ₁ is the intensity of the output light, P is the acoustic intensity, M, H, L are the characteristic constants of the acoustic optical deflector, and λ ₀ is the wavelength of the input light. have.

In addition, even in the case of anisotropic interaction, the relationship with the acoustic intensity of the acoustic intensity information in the form of a vector can be explained.

In other words, this means that the deflection angle can be independently adjusted to the intensity of light without being affected by the acoustic frequency.

The optical deflector 22 may be any one of a scan mirror, a galvano mirror or a MEMS mirror, and deflects light input and driven by predetermined driving information transmitted from the controller unit 50 to be described later to a second axis. It is prepared to.

The light may be deflected on the XY plane of the scan area through the acoustic optical deflector 21 and the optical deflector 22, and in particular, the intensity of light deflected through the acoustic optical deflector 21 may be adjusted and output. Can be.

The scanning unit 30 includes a housing 30A, and includes a light splitter 31, a scan lens 32, a tube lens 33, 1 / from the direction of the light source unit 10 inside the housing 30A. The four-wavelength plate 34 and the objective lens 35 are sequentially installed and may be installed to be movable in the Z direction by a predetermined driving means.

The light deflected through the acoustic optical deflector 21 passes through the light splitter 31, the scan lens 32, the tube lens 33, the quarter wave plate 34, and the objective lens 35. Scanned to the scan position, the light reflected from each scan position is reflected by the optical splitter 31 through the objective lens 35, the quarter-wave plate 34, the tube lens 33, the scan lens 32 .

Here, the light splitter 31 may be formed of any one of a half mirror or a polarizing beam splitter (PBS) to separate transmittance and reflectance according to a wavelength.

The optical splitter 31 is positioned between the acoustic optical deflector 21 and the optical deflector 22, and the optical splitter 31 transmits the light that is deflected from the acoustic optical deflector 21 and inputs the scan. The light input from the region may be reflected by changing wavelengths while passing through the quarter-wave plate 34.

As a result, the light from the light source unit to the scan area and the light input from the scan area can be separated through the light splitter 31 and the quarter wave plate 34.

The scan lens 32 is installed so that the light deflected through the optical deflector 22 focuses on the image plane 32a, and the light focused on the image plane 32a passes through the tube lens 33 in parallel. It is installed to be output as light and transmitted to the objective lens (35).

The light deflected by the acoustooptic deflection unit 20 through the scan lens 32 and the tube lens 33 can be accurately transmitted to the objective lens 35.

The light detecting unit 40 includes a light collecting lens 41, a light receiving mask 42, and a light detector 43 to detect light reflected from each scan position of the scan area.

The condenser lens 41 receives the light reflected through the above-described quarter wave plate 34 to generate condensed light.

As shown, the light receiving mask 42 may be a slit mask having a slit 42a or a pinhole mask (not shown) having a pin hole, and the light collecting lens 41 may be formed through the slit 42a or the pinhole. The focused light can be received from the light source.

The photodetector 43 is provided with a photodiode or the like and receives the light passing through the slit 42a of the light receiving mask 42 to convert the light intensity into an electric signal.

The microscope unit 60 includes a first light splitter 61, a microscope light source 62, a diffusion lens 63, a second light splitter 64, and an image acquisition unit 65.

Here, the first light splitter 61 and the second light splitter 64 may be provided in the same configuration as the above-described light splitter 31, and in this embodiment, are provided with a half mirror.

The first light splitter 63 is installed between the tube lens 33 and the quarter wave plate 34 to input light output through the microscope light source 62 onto the optical path of the scanning unit 30. The light may be irradiated to the entire scan area, and may be reflected so that the image acquisition unit 65 acquires the light reflected from the scan area.

The microscope light source 62 is formed of a member corresponding to the laser unit 11 and the like of the above-described light source unit is configured to output light, the diffusion lens 63 is installed to diffuse the light output from the microscope light source 61. do.

The second light splitter 64 reflects the light output from the microscope light source 62 to the first light splitter 61, and is installed to transmit the light transmitted from the first light splitter 61.

The image acquisition unit 65 includes a condenser lens 65B for condensing the light transmitted through the second light splitter 64 and a camera 65A for receiving the condensed light to acquire the entire scan area image. .

The microscope unit 60 irradiates light to the entire scan area by using the optical path of the scanning unit 30, thereby quickly obtaining the entire scan area image.

6 is a detailed view of the controller unit of FIG. 5. 5 and 6, the controller unit 50 includes an information setting unit 51, an image analyzing unit 52, a mapping information setting unit 53, a mapping information loading unit 54, and an image forming unit ( 55).

The information setting unit 51 includes an acoustic frequency information setting unit 51A, an acoustic intensity information setting unit 51B, and a driving information setting unit 51C.

The acoustic frequency information setting unit 51A may set acoustic frequency information which is a control signal of the deflection angle of the acoustic optical deflector 21, and the driving information setting unit 51C is a deflection angle control signal of the optical deflector 22. Drive information can be set.

The sound intensity information setting unit 51B may set the sound intensity information, which is a control signal for controlling the intensity of light output through the acoustic optical deflector 21.

Here, each information set in each setting unit is set by the administrator or based on mapping information of the scan area loaded by the mapping information loading unit 54 to be described later by a predetermined control signal. The photodetection signal of the photodetector 43 obtained from the light may be set to be acquired at a predetermined level or more.

As a result, the acoustic optical deflector 21 deflects the input light according to the transmitted acoustic frequency information in either the X-axis or Y-axis direction, and simultaneously adjusts and outputs the light according to the acoustic intensity information. The optical deflector 22 deflects the input light according to the transmitted driving information in one axial direction different from the acoustic optical deflector 21 and outputs it.

Accordingly, the light input to the deflection unit 20 may be sequentially deflected onto the XY plane of the scan area, and at the same time, the intensity of the light may be adjusted and output.

The image analyzer 52 analyzes the intensity of the light at each scan position from the entire image of the scan area acquired from the camera 65A, obtains the intensity information of the light at each scan position, and obtains the intensity information of the light at each scan position. It is configured to transmit to the mapping information setting unit 53.

The mapping information setting unit 53 may be configured to map light intensity information of each scan position transmitted from the image analyzer 52 to position information of each scan position, and store the mapping information as mapping information in predetermined storage means.

The mapping information loading unit 54 may be configured to load the mapping information stored by a predetermined external signal or a control signal to load the mapping information of the corresponding scan area and transmit the mapping information to the information setting unit 51 described above.

The image forming unit 55 is connected to the photodetector 43 and a plurality of light detection signals of each scan position detected as the separation distance in the Z-axis direction of the measurement object T and the scanning unit 20 is changed. Any one of them may be configured to form a signal size (image) of each scan position.

Here, the selected photodetection signal may be a photodetection signal at the maximum voltage of the photodetector 43.

As a result, an image of each scan position may be recorded to form a whole image of the scan area through a predetermined algorithm, and the whole image may be configured to be displayed through a predetermined display means.

An image acquisition method using an image acquisition system of a measurement object using the above confocal microscope structure will be described. 7 is an algorithm of an image acquisition method of a measurement object using the system of FIG. 5.

5 to 7, light is generated from the microscope light source 62 and output to the second light splitter 64 (S10).

The second light splitter 64 reflects the light input from the microscope light source 62 and inputs it to the first light splitter 61 (S11).

The input light is reflected by the first light splitter 61 and irradiated to the entire scan area by using the optical path of the scanning unit 30 (S12).

The light reflected from the scan area is input to the scanning unit 30 and is reflected toward the second light splitter 64 through the first light splitter 61 (S13).

The light reflected by the first light splitter 61 passes through the second light splitter 64, and the transmitted light is collected by the condenser lens 65B to obtain an entire image of the scan area through the camera 65A. (S14).

The entire image of the acquired scan area is transmitted to the image analyzer 52, and the image analyzer 52 analyzes the light at each scan position through the transmitted whole image to acquire and map the intensity information of the light at each scan position. The data is transmitted to the information setting unit 53 (S15).

The mapping information setting unit 53 maps the intensity information of the light at each scan position to the position information of each scan position, sets the mapping information, and stores it in the predetermined storage means (S16).

As such, acquiring the entire image of the scan area through the microscope unit 60 and setting mapping information of each scan position sets the intensity of light according to the surface information of each scan position by scanning the entire conventional scan area once. Compared to storing the information, mapping information can be set more quickly and efficiently.

Subsequently, light is generated from the light source unit 10 positioned above the measurement object P and output to the scan area (S20).

When a control signal for loading mapping information corresponding to each scan position of the scan area is applied by the administrator, the mapping information loading unit 54 loads the mapping information of the corresponding scan area from the stored mapping information and sets the information setting unit ( 51) (S30).

The information setting unit 51 sets the acoustic frequency information and the driving information so that the light is deflected to each scan position based on the mapping information transmitted, and the intensity of the light reflected from each scan position and detected by the photodetector 43 is preset. Sound intensity information is set to be detected by the intensity of the light (S40). Herein, the preset light intensity may be set by the manager.

The deflection unit 20 deflects the input light according to the transmitted acoustic frequency information and the driving information. In particular, the acoustic optical deflector 21 adjusts the intensity of the light according to the acoustic intensity information at the same time as the deflection (S50). . Subsequently, the output light is scanned and reflected at each scan position through the scanning unit 30 and then inputted back to the scanning unit 30 (S60).

The light input to the scanning unit 30 is reflected by the light splitter 31 and detected by the light detector 43, and the detected light detection signal is recorded by the image forming unit 55 (S70).

Subsequently, the separation distance between the scanning unit 30 and the measurement target T is changed by a predetermined distance with respect to the Z-axis direction, and steps S60 to S70 are sequentially performed (S80). Here, the predetermined distance may be set by the administrator, and step S80 may be performed a plurality of times.

In addition, the image forming unit 55 selects any one of the plurality of light detection signals according to the change of the Z-axis separation distance of each scan position detected through the step S80, and forms an image of each scan position based on this. An entire image of the scan area may be acquired (S90).

Here, the selected photodetection signal may be a photodetection signal when the signal size of the photodetector 43 is maximum, that is, when the photodetector 43 is the maximum voltage.

Through this method, it is possible to equalize the difference in the intensity of light of the acquired image (photodetection signal), which varies depending on the optical characteristics of the surface of each scan position, such as reflectivity, roughness, and reflection angle, thereby improving the measurement accuracy of the measurement object. Can be.

In addition, since the light output through the acoustic optical deflector can simultaneously adjust the intensity of the light at the same time, a separate control means for adjusting the intensity is not required, so that high-precision scan and quick scan of the scan area can be enabled.

On the other hand, as another example of the method of setting the mapping information, there may be a case where the mapping information including the intensity information of the light of each scan position is directly input from the outside.

Here, the mapping information input from the outside may be a diagram including surface information of the scan area and light intensity information.

Therefore, when the drawing is input, mapping information can be easily set and stored from the intensity information of the light of each scan position in the drawing.

Even when the drawings are provided, the mapping information loading unit 54 loads the mapping information of each scan position of the scan area and transmits the mapping information to the information setting unit 51 by a predetermined control signal as in the other methods.

In this way, the mapping information can be easily set, and the measurement accuracy can be improved by adjusting and scanning the light to maximize the performance of the photodetector.

An image obtained through the image acquisition method and the conventional image acquisition method of the present invention described above will be described with specific examples. In this specific example, it is assumed that the measurement object is fixed, and only the scanning unit moves in the Z-axis direction, and it is assumed that the same scan area is scanned.

FIG. 8 is a graph showing the magnitude of the photodetection signal of each scan position obtained by a conventional image acquisition method, and FIG. 9 is an image obtained according to the graph result of FIG. 8.

Referring to FIG. 8, light having a single intensity is scanned into the scan area, and the Z-axis separation distance between the scanning unit 20 and the measurement object T is adjusted a plurality of times, and the angles recorded at the scan positions 1 to 4 are recorded. The light detection signal for each scan position is shown.

Here, the strongest light is detected in the scan position 1 and the scan position 2 at a distance of 40 μm between the scanning unit and the measurement object, and the 40 μm may be determined as the height of the scan position 1 and the scan position 2.

In addition, it can be seen that the scan position 3 is in a state where the intensity of light is generally insufficient. In the case of scan position 4, the intensity of light is oversaturated at 40 μm to 60 μm.

The image forming unit selects the photodetection signal at the maximum voltage among the photodetection signals through the photodetection signal according to the detected Z-axis separation distance, and forms an image of each scan position based on the photodetection signal as shown in FIG. 9. Can be.

In other words, the bright part is too bright and the dark part is too dark to obtain an image with a large variation in the intensity of light for each scan position, resulting in low measurement accuracy.

On the other hand, according to the image acquisition method according to the present invention is as follows. FIG. 10 is a graph showing the magnitude of the light detection signal according to the change in the Z-axis separation distance of each scan position obtained by setting the sound intensity information according to the mapping information, and FIG. 11 is an image obtained according to the graph result of FIG. 10. .

Referring to FIG. 10, when mapping information including scan positions 1 to 4 is loaded by a predetermined control signal, sound intensity information is appropriately set according to intensity information of light detected at each scan position included in the mapping information. Can be.

If it is assumed that the intensity information of light included in the mapping information is the same as the light detection signal according to the change of the Z-axis separation distance according to the conventional method described above, the light detection signal of the scan position 3 in which the light detection signal is generally low is Acoustic intensity information on the Z-axis separation distance of each scan position is set so that the optical detection signal of scan position 4, where the optical detection signal is oversaturated, appears low at the Z-axis separation distance. Can be.

The acoustic optical deflector adjusts and outputs the light intensity for each scan position according to the set sound intensity information. Accordingly, the light detection signal detected for each scan position may be as shown in the graph.

The image forming unit selects the photodetection signal at the maximum voltage among the photodetection signals based on the detected photodetection distance according to the Z-axis separation distance, and forms an image of each scan position based on the photodetection signal as shown in FIG. 11. Can be.

That is, the dark portion may be formed to be brighter than a certain level, and the bright portion may be formed to be darker to a certain level, thereby reducing variation in intensity of light for each scan position, thereby improving measurement accuracy.

In addition, by setting the acoustic intensity information according to the intensity of light detected from each scan position, the intensity of the light to be scanned is adjusted to obtain an image, thereby obtaining a flattened image, thereby improving the measurement accuracy of the entire scan area. have.

The scope of the present invention is not limited to the above-described embodiment, but may be embodied in various forms of embodiments within the scope of the appended claims. Without departing from the gist of the invention claimed in the claims, it is intended that any person skilled in the art to which the present invention pertains falls within the scope of the claims described in the present invention to various extents which can be modified.

※ Explanation of code for main part of drawing ※
10: light source unit 11: laser unit
12: optical expander 20: deflection unit
21: Acoustic optical deflector 22: Optical deflector
30: scanning unit 31: light splitter
32: scan lens 33: tube lens
34: 1/4 wavelength plate 35: objective lens
40: light detecting unit 41: condensing lens
42: light receiving mask 43: photodetector
50: controller unit 51: information setting unit
51A: Acoustic frequency information setting unit 51B: Acoustic intensity information setting unit
51C: drive information setting unit 52: image analysis unit
53: mapping information setting unit 55: image forming unit
54: mapping information loading unit 60: microscope unit
61: first light splitter 62: microscope light source
63 diffused lens 64 second light splitter
65: image acquisition unit 65A: camera
65B: Condensing Lens

Claims (16)

In the method of acquiring an image of a measurement object using a confocal microscope structure that generates light from the top of the measurement object and acquires an image by scanning while deflecting light on the XY plane of the scan area by using an acoustic optical deflector,
Generates light through a microscope light source, inputs the generated light onto the optical path of the scanning unit so that the generated light is irradiated to the entire scan area, and acquires and analyzes the entire image of the scan area by a camera to obtain intensity information of light at each scan position. Obtaining intensity information obtaining step;
An information setting step of mapping the obtained light intensity information of each scan position to position information of each scan position and setting it as mapping information;
A loading step of loading mapping information stored in the information setting step according to a control signal;
A transmission step of setting acoustic intensity information based on the loaded mapping information and transmitting the acoustic intensity information to the acoustic optical deflector;
The light inputted to the acousto-optic deflector and output is deflected and at the same time the light intensity is adjusted according to the sound intensity information, and the output light is scanned and reflected to each scan position through a scanning unit, and then the reflected light is An injection step input to the injection unit;
A recording step of detecting light reflected from each scan position input to the scanning unit with a photodetector and recording the detected photodetection signal;
Changing the separation distance between the measurement object and the scanning unit in a Z-axis direction, and sequentially performing the transmission step, the scanning step, and the recording step to record the light detection signal of each scan position according to the change of the separation distance. However, the Z-axis scanning step of performing the light detection signal of each scan position according to the change of the separation distance at least once;
An image acquisition step of acquiring an entire image of the scan area by forming an image of each scan position according to the sound intensity information by selecting any one from a plurality of light detection signals of each scan position detected through the Z-axis scan step. Image acquisition method of the measurement object using a confocal microscope structure comprising a. The method of claim 1,
In the image acquisition step, the light detection signal selected from the plurality of light detection signals of each scan position is a light detection signal when the voltage of the light detector is at the maximum voltage. Way. The method of claim 1,
The mapping information stored in the information setting step is an image acquisition method using a confocal microscope structure, characterized in that the input from the outside. The method of claim 1,
The optical characteristic of each scan position surface is at least one of reflectivity, roughness, and reflection angle of each scan position surface. In the image acquisition system of the measurement object using a confocal microscope structure,
A light source unit positioned above the measurement object and configured to generate light and output the light to a scan area to be scanned among the measurement objects;
The light output from the light source unit is deflected to be outputted, and the deflected light is deflected onto the XY plane of the scan area, including an acoustic optical deflector, the intensity of which is adjusted according to the transmitted acoustic intensity information. A deflection unit which is controlled to be;
A scanning unit which receives the light deflected and output through the deflection unit and scans the light to each scan position, and the light reflected from each scan position is input;
A microscope unit for generating light, the microscope unit for inputting the generated light onto the optical path of the scanning unit so as to irradiate the entire scanning area to obtain an entire image of the scanning area;
An optical splitter installed in the scanning unit to transmit light input from the deflection unit and reflect light input from each scan position;
A light detecting unit positioned at a side of the scanning unit to detect light reflected through the light splitting unit;
The deflection unit is controlled so that light is deflected on the XY plane of the scan area, and the mapping information is set by analyzing the intensity of light at each scan location of the scan area through the entire image obtained through the microscope unit. Load the information to set the sound intensity information, and select any one of the plurality of light detection signal according to the change in the Z-axis distance of each scan position detected from the light detection unit image of each scan position A controller unit for forming a; image acquisition system of the measurement object using a confocal microscope structure comprising a. 6. The method of claim 5,
The optical splitter is a half mirror (polar mirror) or a polarizing beam splitter (Polarizing Beam Splitter) image acquisition system using a confocal microscope structure, characterized in that. 6. The method of claim 5,
The scanning unit includes a light splitter, a scan lens, a tube lens, a quarter wave plate, and an objective lens, and the light input from the light source unit is divided into the light splitter, the scan lens, the tube lens quarter wave plate, and the objective lens. Scanned to each scan position through the light, the light reflected from each scan position is reflected by the optical splitter through the objective lens, quarter-wave plate, tube lens, the scanning lens using a confocal microscope structure Image acquisition system of measurement object. 6. The method of claim 5,
The light detecting unit receives a light reflected by the light splitter and collects the light as a focused light, a light receiving mask for receiving the light focused from the light collecting lens, and a light passing through the light receiving mask to receive the light. An image acquisition system of a measurement object using a confocal microscope structure comprising a photodetector for converting the intensity into an electrical signal. The method of claim 8,
The light receiving mask is an image acquisition system using a confocal microscope structure, characterized in that the slit or pinhole formed to pass the light focused by the condensing lens. 6. The method of claim 5,
The deflection unit includes an acoustic optical deflector and an optical deflector to deflect light onto the XY plane of the scan area, respectively. The image acquisition system using the confocal microscope structure is controlled. . The method of claim 10,
And the optical deflector is positioned on an optical path of light transmitted from the light source unit to the optical splitter. 12. The method of claim 11,
The optical deflector is an image acquisition system using a confocal microscope structure, characterized in that any one of a scan mirror, galvanometer or MEMS mirror. The method of claim 8,
And the deflection unit is provided as a pair of acoustic optical deflectors so as to deflect the light onto the XY plane of the scan area, and is controlled respectively. The method of claim 13,
And the light receiving mask is controlled to move in synchronization with light deflected on an XY plane by the pair of acoustic optical deflectors. The method of claim 7, wherein
The microscope unit,
A first light splitter installed between the quarter-wave plate of the scanning unit and the tube lens to reflect the input light to the entire scanning area, a microscope light source for generating and outputting light, and the microscope The light output from the light source is reflected by the first light splitter, and the second light splitter which transmits the light reflected by the first light splitter and the light transmitted through the second light splitter are formed to form the scan area. An image acquisition system of a measurement object using a confocal microscope structure, characterized in that it comprises a camera for acquiring the entire image. 16. The method of claim 15,
The controller unit,
An image analyzer which analyzes and transmits the intensity of light at each scan position of the scan area from the image obtained from the camera;
A mapping information setting unit for setting the intensity of the light transmitted from the image analyzer as the intensity information of the light at each scan position and mapping the position information to the position information of each scan position;
A mapping information loading unit for loading stored mapping information according to an external control signal and transmitting the stored mapping information to the information setting unit;
An information setting unit including an acoustic intensity information setting unit for setting the acoustic intensity information so as to adjust the intensity of light deflected to each scan position according to the mapping information to be loaded and transmitting the acoustic intensity information to the acoustic optical deflector;
And an image forming unit configured to record an image of each scan position based on the transmitted light detection signal to form an entire image of the scan area.

Images