TWI450991B - Fixing frame used in sputtering process - Google Patents

Description

Sputtering rack

The invention relates to the field of coating technology, in particular to a sputtering rack.

Sputtering uses high-energy particles (such as ions) to bombard the surface of the target, so that the bombarded particles (such as atoms, ions, etc.) are deposited on the surface of the plated part. Sputtering is widely used because of its advantages of better deposition efficiency, precise control composition, and lower manufacturing cost.

The rack is fixed in the sputtering process. The rack comprises a main shaft and a plurality of retaining members spaced apart from each other along the axial direction of the main shaft. One end of the spindle is connected to the drive unit. The autonomous axis of each of the retaining members extends in a direction parallel to the radial direction of the main axis, wherein the axis is perpendicular to the central axis of the main shaft. One end of the holder that is not connected to the main shaft is used to hold the plated member. During sputtering, the main shaft is rotated around the sputtering target by the driving device, thereby driving the plated member held by the holding member to rotate around the sputtering target, thereby achieving batch coating of the plurality of plating parts.

For different sizes of plated parts, it is necessary to change the distance between two adjacent holding members to avoid the mutual shielding between the two plated parts, so that the covered part of the plated part is not coated, that is, it is necessary to set different sputtering devices, which is undoubtedly Will increase production costs. If the same rack is used, the retaining member needs to be selectively used under the condition that the adjacent two plating members do not overlap each other, so that some retaining members are inevitably vacant, thereby reducing production efficiency.

In view of the above, it is necessary to provide a sputter rack that can flexibly adjust the spacing of adjacent two retaining members according to the size of the plated member to reduce production cost and increase production efficiency.

In the following, an embodiment is taken as an example to illustrate a sputter rack with adjustable spacing between two adjacent retaining members.

A sputter rack includes a main shaft, a plurality of retaining members and a plurality of elastic members. The main shaft includes a first end surface, a second end surface opposite to the first end surface, and a circumferential surface connected between the first end surface and the second end surface. The main shaft is provided with a receiving groove and a passage along the axial direction from the first end surface, and has an inner surface parallel to the first end surface. The passage terminates in the inner surface and extends through the receiving groove, and divides a portion of the main shaft between the first end surface and the inner surface into at least two spaced apart positioning bodies. Each of the positioning bodies has a positioning surface parallel to the axial direction of the main shaft, and a plurality of locking slits arranged along the axial direction of the main shaft are disposed from the positioning surface toward the positioning body. The number of the plurality of card slots is greater than the number of the plurality of retaining members. The card slots are cut through the peripheral surface and communicate with the receiving slots and the passages for receiving and holding a retaining member. Each of the two adjacent retaining members of the plurality of retaining members is connected by an elastic member. The two ends of each of the holding members are located outside the main shaft for holding the plating member, and the elastic members are received in the receiving groove for moving at least one of the adjacent two holding members in the passage when the elastic deformation occurs. The card is then clamped to the corresponding card slot cutout to change the spacing of the adjacent two holders.

The sputter rack provided by the technical solution is provided with a channel, an elastic member and a card slot cutout, and the elastic deformation of the elastic member can be used to adjust between the adjacent two holding members while fixing one of the adjacent two holding members. The distance between the holders of the adjusted spacing is located at the corresponding card slot cutout, and the spacing between the adjacent two holding members is adjusted, thereby preventing the adjacent two plated members from blocking each other. In addition, the number of the card slot cutouts provided by each positioning body is larger than the number of the holding members, so that all the holding members can be used to fix the plating members, thereby avoiding the idleness of the holding members and improving the coating efficiency.

The sputter rack provided by the technical solution will be described in detail below with reference to the accompanying drawings and embodiments.

Referring to FIG. 1 to FIG. 3 , the sputter rack 100 of the first embodiment of the present invention includes a main shaft 110 , a plurality of holding members 120 , and a plurality of elastic members 130 . The plurality of holders 120 and the plurality of elastic members 130 are movably received in the main shaft 110. The adjacent two holding members 120 are connected by an elastic member 130.

The main shaft 110 has a cylindrical shape and has a first end surface 1101, a second end surface 1102, and a circumferential surface 1107. The first end surface 1101 is opposite to the second end surface 1102 and is parallel to each other. The circumferential surface 1107 is disposed between the first end surface 1101 and the second end surface 1102 and is connected to the first end surface 1101 and the second end surface 1102. The main shaft 110 is provided with a cylindrical receiving groove 1103 in the axial direction of the main shaft 110 from the central portion of the first end surface 1101. The main shaft 110 has a parallel to the first end surface 1101 and the second end surface 1102 in the receiving groove 1103. Surface 1106. The main shaft 110 also has a first passage 1104 and a second passage 1105 extending from the first end surface 1101 in the axial direction thereof. The first channel 1104 and the second channel 1105 both stop on the inner surface 1106 and penetrate the receiving groove 1103. The projections of the first channel 1104 and the second channel 1105 on the inner surface 1106 intersect at a central region of the projection of the receiving groove 1103 at the inner surface 1106. The first channel 1104 and the second channel 1105 cooperate with each other to divide the portion of the main shaft 110 between the first end surface 1101 and the inner surface 1106 in a direction parallel to the axial direction of the main shaft 110 into four spaced apart positioning bodies, that is, A positioning body 110a, a second positioning body 110b, a third positioning body 110c, and a fourth positioning body 110d.

Referring to FIG. 2, the first positioning body 110a is disposed between the second positioning body 110b and the fourth positioning body 110d, and has a first positioning surface 1101a opposite to the second positioning body 110b and a fourth positioning body 110d. The second positioning surface 1101d. The second positioning body 110b is disposed between the first positioning body 110a and the third positioning body 110c, and has a third positioning surface 1102a opposite to the first positioning surface 1101a and a fourth positioning surface 1102d opposite to the third positioning body 110c. . The third positioning body 110c is disposed between the second positioning body 110b and the fourth positioning body 110d, and has a fifth positioning surface 1103a opposite to the fourth positioning surface 1102d and a sixth positioning surface 1103d opposite to the fourth positioning body 110d. . The fourth positioning body 110d is disposed between the first positioning body 110a and the third positioning body 110c, and has a seventh positioning surface 1104a opposite to the sixth positioning surface 1103d and an eighth positioning surface 1104d opposite to the second positioning surface 1101d. . The first positioning surface 1101a is coplanar with the seventh positioning surface 1104a, the third positioning surface 1102a is coplanar with the sixth positioning surface 1103d, the second positioning surface 1101d is coplanar with the fourth positioning surface 1102d, and the eighth positioning surface 1104d and the fifth The positioning surface 1103a is coplanar. Each of the aforementioned positioning faces is parallel to the central axis of the main shaft 110.

Referring to FIG. 1 and FIG. 2 together, the first positioning body 110a is provided with a plurality of first card slot cutouts 1107a from the second positioning surface 1101d toward the first positioning body 110a. The plurality of first card slot cutouts 1107a are disposed parallel to each other along the axial direction of the spindle 110. One end of each of the first card slot cutouts 1107a extends through the peripheral surface 1107, and the other opposite end communicates with the receiving slot 1103. Each of the first card slot cutouts 1107a is also in communication with the second channel 1105. The distance between each adjacent two first card slot cutouts 1107a may be increased, decreased, equally spaced or randomly arranged according to the size of the plated member. The number of the first card slot cutouts 1107a is greater than the number of the holders 120, so that a first card slot cutout 1107a can be flexibly selected according to the size of the plated member to secure the holder 120. The third positioning body 110c is provided with a plurality of second card slits 1107b from the fifth positioning surface 1103a toward the inside thereof. The plurality of second card slot cutouts 1107b are also arranged along the axial direction of the spindle 110. Each of the second card slot cutouts 1107b extends through the peripheral surface 1107 and communicates with the receiving slot 1103 and the second channel 1105. The first latching slot 1107b is in one-to-one correspondence with each of the first latching slots 1107a for mating with the first latching cutout 1107a. The card holding member 120 is housed. Similarly, the second positioning body 110b is provided with a plurality of third card slot cutouts 1107c from the third positioning surface 1102a, and the fourth positioning body 110d is provided with a plurality of third card slot cutouts from the seventh positioning surface 1104a. One-to-one corresponding fourth card slot cutout 1107d. The plurality of third card slot cutouts and the fourth card slot cutouts 1107d are all arranged along the axial direction of the main axis 110, and each of the third card slot cutouts 1107c and the fourth card slot cutout 1107c corresponding to the fourth card slot cutout 1107d and A first card slot cutout 1107a and a second card slot cutout 1107b are equidistant from the inner surface 1106 such that the holder 120 received in the first channel 1104 and the second channel 1105 is at an appropriate angle about the central axis of the spindle 110. After being rotated, the card can be received and stuck in the third card slot cutout 1107c and the fourth card slot cutout 1107d.

Each of the holders 120 includes a first fixing rod 121 and a second fixing rod 122. The first fixing rod 121 and the second fixing rod 122 intersect at the geometric center of each other to form a "ten" shape. The first fixing rod 121 and the second fixing rod 122 are respectively received in the first passage 1104 and the second passage 1105, and the two ends of the first fixing rod 121 and the two ends of the second fixing rod 122 respectively extend out of the circumferential surface. Outside 1107, used to fix plating parts. The first fixing rod 121 and the second fixing rod 122 are respectively movable in the axial direction of the main shaft 110 in the first passage 1104 and the second passage 1105 under an external force, and can be rotated around the central axis of the main shaft 110 by a certain angle until the first A fixing rod 121 is caught in the first card slot cutout 1107a and the second card slot cutout 1107b, and the second fixing bar 122 is locked in the third card slot cutout 1107c and the fourth card slot cutout 1107d.

Referring to FIG. 1 , FIG. 2 and FIG. 3 , the plurality of elastic members 130 are received in the receiving groove 1103 . Each elastic member 130 is disposed between two adjacent holders 120. The two ends of the elastic member 130 are respectively connected to the intersecting portions of the first fixing rod 121 and the second fixing rod 122 of the two adjacent holding members 120. The elastic member 130 can be elastically deformed under the action of an external force, and restores the natural length after the external force disappears, thereby changing the distance between the adjacent two holding members 120.

Before the plating is fixed by using the sputter rack 100 provided in this embodiment, the plating members are first fixed to the end faces or both end portions of the first fixing rod 121 and the second fixing rod 122, respectively. This fixing can be carried out by means of a pin or other means as long as the plated surface to be coated faces the target 200. Next, referring to FIG. 3 and FIG. 4, under the principle that the distance between the adjacent two first fixing rods 121 and the adjacent two second fixing rods 122 is larger than the size of the plating member, that is, the adjacent two plating members are not mutually The occlusion fixes one of the two adjacent retaining members 120, and applies an external force of the first fixing rod 121 or the second fixing rod 122 of the other holding member 120 to provide elasticity between the adjacent two holding members 120. The member (not shown) will undergo elastic deformation, and the distance between adjacent two holding members 120 can be adjusted. Then, the first fixing rod 121 and the second fixing rod 122 of the holding member 120 that are not fixed at the position are rotated around the central axis of the main shaft 110 until the first fixing rod 121 is engaged with the first locking portion 1107a and the first The second card slot 1107b, the second fixing rod 122 is clamped to the third card slot 1107c and the fourth card slot 1107d, and the plating of the plated member can be started.

When the next batch of plated parts is coated by the sputter rack 100 of the embodiment, the plated parts of the plated film are removed from the holding member 120, and then determined according to the size of the plated plate to be applied. The external force is applied to the elastic member 130 to adjust the distance between the adjacent two holding members 120 to prevent the adjacent two plating members from blocking each other.

The sputter rack 100 of the embodiment is provided with a plurality of card slot cutouts, and the elastic deformation of the elastic member 130 can be used according to the size of the plated member to flexibly select which card slot in the retaining member 120 is specifically located, thereby avoiding adjacent two The plated parts are shielded from each other. Compared with the prior art, the sputter rack 100 of the present embodiment is suitable for the coating process of different sizes of plated parts, and does not need to be equipped with different sputter racks for different sizes of plated parts, thereby saving production cost. In addition, the number of the card slots of each positioning body is more than the number of holding parts. Even if the distance between the adjacent two holding members is adjusted for the size of the plated parts, all the holding members can be used to fix the plated parts, thereby avoiding the idle parts being idle and improving. The coating efficiency.

The sputter rack of the present invention is not limited to the foregoing structure, and those skilled in the art can make various other corresponding changes and modifications to the sputter rack 100 provided by the embodiment according to the technical idea of the technical solution. For example, the holder 120 includes only the first fixing rod 121 or the second fixing rod 122. Correspondingly, the main shaft 110 is only provided with the first passage 1104 or the second passage 1105, that is, from the first end surface 1101 along the axial direction of the main shaft 110. The portion of the main shaft 110 between the first end surface 1101 and the inner surface 1106 is divided into two parts, thereby obtaining two oppositely disposed positioning bodies, and a plurality of card positions arranged along the axial direction of the main shaft 110 are opened from the positioning surface of each positioning body. The slit is received to clamp the holder. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

100‧‧‧ Splashing rack

110‧‧‧ Spindle

120‧‧‧ holding parts

130‧‧‧Flexible parts

1101‧‧‧ first end face

1102‧‧‧second end face

1107‧‧‧Sun

1103‧‧‧ receiving trough

1106‧‧‧ inner surface

1104‧‧‧First Passage

1105‧‧‧second channel

110a‧‧‧First locator

110b‧‧‧Second locator

110c‧‧‧ third positioning body

110d‧‧‧fourth positioning body

1101a‧‧‧First positioning surface

1101d‧‧‧Second positioning surface

1102a‧‧‧3rd positioning surface

1102d‧‧‧Four positioning surface

1103a‧‧‧Fifth positioning surface

1103d‧‧‧ sixth positioning surface

1104a‧‧‧ seventh positioning surface

1104d‧‧‧8th positioning surface

1107a‧‧‧first card position incision

1107b‧‧‧Second card position incision

1107c‧‧‧ third card incision

1107d‧‧‧fourth card incision

121‧‧‧First fixed rod

122‧‧‧Second fixed rod

200‧‧‧ targets

FIG. 1 is a schematic view showing a non-use state of a sputter rack provided by an embodiment of the present technical solution.

Figure 2 is a plan view of the sputter rack shown in Figure 1.

Figure 3 is an exploded perspective view of the sputter rack shown in Figure 1.

FIG. 4 is a schematic view showing plating of a plating member by using a sputtering apparatus provided in an embodiment of the present technical solution.

100‧‧‧ Splashing rack

110‧‧‧ Spindle

120‧‧‧ holding parts

121‧‧‧First fixed rod

122‧‧‧Second fixed rod

130‧‧‧Flexible parts

Claims (6)

A sputtering rack comprising a main shaft and a plurality of retaining members, the main shaft comprising a first end surface, a second end surface opposite to the first end surface, and a circumferential surface connected between the first end surface and the second end surface, wherein the improvement is that The sputter rack further includes a plurality of elastic members, the main shaft is provided with a receiving groove and a passage along the axial direction from the first end surface, and has an inner surface parallel to the first end surface, the passage stops at the inner surface and penetrates the receiving portion a slot that divides a portion of the main shaft between the first end surface and the inner surface into at least two spaced apart positioning bodies; each positioning body has a positioning surface parallel to the spindle axis, and the positioning body is disposed from the positioning surface toward the positioning body a plurality of card slot cutouts arranged along the axial direction of the spindle, wherein the number of the plurality of card slot cutouts is greater than the number of the plurality of latching members, and the card slot cutouts penetrate the peripheral surface and communicate with the receiving slot and the channel for receiving the clamping and holding Each of the two holding members of the plurality of holding members is connected by an elastic member, and the two ends of each of the holding members are located outside the main shaft for holding the plating member, and the elastic members are received in the receiving groove for to Elastically deformed so that the adjacent two of the holding member within the channel at least one of the clamping movement corresponds to the latching notch to vary the pitch of two adjacent holder. The sputter rack of claim 1, wherein each of the retaining members comprises a first fixing rod and a second fixing rod intersecting the first fixing rod, the passage comprising a first passage and a second passage, The first channel and the second channel cooperate with each other to divide a portion of the main shaft between the first end surface and the inner surface into four spaced apart positioning bodies, each positioning body having two positioning surfaces, and the four positioning bodies Each of the card slot cutouts is disposed in one-to-one correspondence, and the first fixing bar and the second fixing bar are clamped to each other. The sputter rack of claim 2, wherein the plurality of card slot cutouts are provided on each of the positioning surfaces of each of the positioning bodies. The sputter rack of claim 2, wherein the first fixed rod and the second fixed rod intersect at a geometric center of each other. The sputter rack of claim 4, wherein the two ends of each elastic member are respectively connected to the intersection of the first fixing rod and the second fixing rod of the two adjacent holding members. The sputter rack of claim 1, wherein the plurality of card slots are equally spaced along the axial axis of the spindle.