201111533 六、發明說明： 【發明所屬之技術領域】 [0001] 本發明涉及鍍膜技術領域’尤其涉及一種濺鍍料架。 [先前技術3 [〇〇〇2] 濺鍍係利用高能粒子（如離子）轟擊濺鍍靶表面，使被 轟擊出之粒子（如原子、離子等）沈積於鍵件表面。濺 鍍因具有較佳沈積效率、精確控制成份及較低製造成本 等優點，被廣泛應用。 [0003]於濺鍍工藝中採用料架固定鍍件。該料架包括主軸及複 數沿主轴i向方向間隔設置於主轴之固持件。該主轴一 端與㈣裝置相連。每根固持件自主解半行於主轴徑 向之方向延伸，其中軸線垂直於绿之中⑽。該固持 件未與絲相連C於㈣祕° _時，該主軸 於驅動裝置之驅動下以藏紗為中心旋轉，從而帶動固 持於固持件種件圍___，達成對複數鑛件批 量鍍膜。 [_針對不同尺寸之鍍件，需改變相鄰兩111持件之間距’以 避免相鄰兩相互_，造成鍍件被就部分未被鑛 膜，即，需對應設0同之誠裝置，這無疑會增加生 產成本。若制^料架，則需於滿足相鄰兩锻件不相 互重4之條件下選擇性減㈣持件’這樣—來，必然 有部分固持件空置，降低生產效率。 闺有鑑於此，提供-種轉據锻件尺寸$活調整相鄰兩固 持件間距之舰料㈣降低生產成本及提高生產效率實 098133079 為必要。 表單編號A0101 第4頁/共18頁 0982056661-0 201111533 , 【發明内容】 [0006] 以下以實施例為例說明一種相鄰兩固持件間距可調之潑 鍍料架。 [0007] 一種濺鍍料架，其包括主軸、複數固持件及複數彈性件 。s玄主轴包括第一端面、與第一端面相對之第二端面以 及連接於第一端面與第二端面之間之週面。該主轴自第 一端面沿其轴向設有收容槽及通道，具有平行於第一端 面之内表面。該通道止於該内表面，並貫穿該收容槽， 其將主轴位於第一端面與内表面之間之部分分割為至少 〇 兩相互隔開之定位體。各定位體具有平行於主軸軸向之 定位面，其自該定位面朝定位體内部設有複數沿主轴轴 向排列之卡位切口。該複數卡位切口之數量大於該複數 固持件之數量，各卡位切口貫通週面，並與該收容槽及 通道相通，用於收容卡繁一固持件。該複數固持件中每 相鄰兩固持件藉由一彈性件相連。每個固，件之兩端位 I | £ i： ·' 於該主軸外，用於固持鍍徉，各杳枝务杈容於該收容槽 0 内，用於於發生彈性變形時使得5該相鄰兩固持件中之至 少一個於通道巧省勤後卡旁養對3巍隻卡位切〇從而改變 該相鄰兩固持件間距。 [0008] 本技術方案提供之濺鍍料架設置了通道、彈性件及卡位 切口，可於固定相鄰兩固持件中之—個之情況下藉由彈 性件之彈性形變來調節相鄰兩固持件之間之距離，並將 調節好間距之各固持件卡位於對應之卡位切口，達成相 鄰兩固持件間距可調，由此避免相鄰兩鍍件相互遮撞。 另’每個定位體闕設之卡位切口之數量大於固持件之 098133079 表單編號A0101 第5頁/共18頁 0982056661-0 201111533 數1，使得可使用全部固持件來固定鍍件，避免了固持 件閒置’提高了鍍膜效率。 【實施方式】 [0009] [0010] [0011] 以下結合附圖及實施例對本技術方案提供之濺鍍料架進 行詳細說明。 請一併參見圖1至圖;3，本技術方案一實施例提供之濺鍍 料架100包括主轴110、複數固持件120及複數彈性件13〇 。該複數固持件1 2 0及複數彈性件1 3 0可移動地收容於主 轴110。相鄰兩固持件12〇藉由__彈性件丨3 〇相連。 主軸110呈圓柱體狀，其具有第一端面1101 '第二端面 1102及週面1107。第一端面1101與第二端面1102相對 ，且相互平行。週面1107設於第一端面11〇1及第二端面 1102之間，並與第一端面丨1〇1及第二端面11〇2相連。主 軸110自第一端面11 〇 1之中心區域沿主軸丨丨〇之轴向設有 圓柱體狀之收容槽1103 ’由此主軸11〇於該收容槽nog 内具有平行於第一端面丨1〇1及第二端函丨1〇2之内表面 110 6。主轴11 〇還自第一端面11 〇 1沿其轴向開設有第一 通道1104及第二通道11〇5。第一通道11〇4及第二通道 1105均止於内表面11〇6 ’並貫穿收容槽11〇3。第一通道 1104及第二通道11〇5於内表面11〇6之投影相交於收容槽 11 03於内表面1106之投影之中心區域。第一通道11 〇4與 第二通道1105相互配合地將主抽11〇位於第一端面hoi 及内表面1106之間之部分沿平行於主軸11()之轴向之方向 分割成四相互隔開之定位體，即第一定位體11 〇 a、第二 定位體110b、第三定位體ll〇c及第四定位體。 098133079 表單編號A0101 第6頁/共18頁 0982056661-0 201111533 [0012] Ο201111533 VI. Description of the Invention: [Technical Field of the Invention] [0001] The present invention relates to the field of coating technology, and particularly relates to a sputter rack. [Prior Art 3 [〇〇〇2] Sputtering uses high-energy particles (such as ions) to bombard the surface of a target, so that bombarded particles (such as atoms, ions, etc.) are deposited on the surface of the member. Sputtering is widely used because of its advantages of better deposition efficiency, precise control composition and lower manufacturing cost. [0003] The rack is used to fix the plated part in the sputtering process. The rack includes a main shaft and a plurality of retaining members spaced apart from each other in the direction of the main shaft i. The spindle is connected to the (4) device at one end. Each of the retaining members autonomously splits halfway in the direction of the radial direction of the main shaft, wherein the axis is perpendicular to the green (10). When the retaining member is not connected to the wire C, the spindle is rotated by the driving device and driven by the driving device, thereby driving the holding of the retaining member to ___, thereby achieving batch coating of the plurality of mineral parts. [_For different sizes of plated parts, it is necessary to change the distance between two adjacent 111 pieces to avoid adjacent two mutual _, causing the plated parts to be partially unmineralized, that is, to be equipped with the same device. This will undoubtedly increase production costs. If the rack is made, it is necessary to selectively reduce (4) the holding member under the condition that the two adjacent forgings do not overlap each other by 4, so that some of the holding members are vacant and the production efficiency is lowered. In view of this, it is necessary to provide a kind of forging piece size to adjust the spacing of adjacent two retaining parts (4) to reduce production costs and increase production efficiency. Form No. A0101 Page 4 of 18 0982056661-0 201111533, SUMMARY OF THE INVENTION [0006] The following is an example to illustrate a splash plating rack with adjustable spacing between two adjacent holding members. [0007] A sputter rack includes a main shaft, a plurality of retaining members, and a plurality of elastic members. The sinusoidal main shaft includes a first end surface, a second end surface opposite to the first end surface, and a circumferential surface connected between the first end surface and the second end surface. The main shaft is provided with a receiving groove and a passage along the axial direction from the first end surface, and has an inner surface parallel to the first end surface. The passage terminates in the inner surface and extends through the receiving groove, and divides a portion of the main shaft between the first end surface and the inner surface into at least two spaced apart positioning bodies. Each of the positioning bodies has a positioning surface parallel to the axial direction of the main shaft, and a plurality of locking portions arranged along the axial direction of the main shaft are disposed from the positioning surface toward the positioning body. The number of the plurality of card slots is greater than the number of the plurality of retaining members, and the card slots are cut through the peripheral surface and communicate with the receiving slots and the passages for receiving the card retaining members. Each of the two holding members of the plurality of holders is connected by an elastic member. The two ends of each solid piece, I | £ i: ·', are used to hold the rhodium plated outside the main shaft, and each of the twigs is accommodated in the receiving groove 0 for making elastic deformation At least one of the adjacent two holding members cuts the card position of the three adjacent cards after the channel is saved, thereby changing the spacing between the adjacent two holding members. [0008] The sputter rack provided by the technical solution is provided with a channel, an elastic member and a card slot cutout, and the two adjacent two holding members can be used to adjust the adjacent two by elastic deformation of the elastic member. The distance between the holding members and the fixing members of the adjusted spacing are located at the corresponding card slot cutouts, and the spacing between the adjacent two holding members is adjusted, thereby preventing the adjacent two plating members from colliding with each other. In addition, the number of card slots for each positioning body is larger than that of the holder 098133079 Form No. A0101 Page 5 / 18 pages 0982056661-0 201111533 Number 1, so that all the holding parts can be used to fix the plated parts, avoiding the holding Idle idle' improves coating efficiency. [Embodiment] [0010] [0010] The sputter rack provided by the present technical solution will be described in detail below with reference to the accompanying drawings and embodiments. Referring to FIG. 1 to FIG. 3, a sputter rack 100 according to an embodiment of the present invention includes a main shaft 110, a plurality of holding members 120, and a plurality of elastic members 13A. The plurality of holders 120 and the plurality of elastic members 130 are movably received in the main shaft 110. The adjacent two holding members 12 are connected by the __elastic member 丨3 。. The main shaft 110 has a cylindrical shape and has a first end surface 1101 'second end surface 1102 and a peripheral surface 1107. The first end surface 1101 is opposite to the second end surface 1102 and is parallel to each other. The circumferential surface 1107 is disposed between the first end surface 11〇1 and the second end surface 1102, and is connected to the first end surface 丨1〇1 and the second end surface 11〇2. The main shaft 110 is provided with a cylindrical receiving groove 1103 from the central portion of the first end surface 11 〇 1 along the axial direction of the main shaft '. The main shaft 11 is parallel to the first end surface 丨1 in the receiving groove nog. 1 and the inner surface 110 6 of the second end function 〇1〇2. The main shaft 11 is also provided with a first passage 1104 and a second passage 11〇5 in the axial direction from the first end face 11 〇 1 . The first passage 11〇4 and the second passage 1105 are both stopped at the inner surface 11〇6' and penetrate the receiving groove 11〇3. The projections of the first channel 1104 and the second channel 11〇5 on the inner surface 11〇6 intersect at a central region of the projection of the receiving groove 103 from the inner surface 1106. The first passage 11 〇4 and the second passage 1105 cooperate with each other to divide the portion of the main pump 11 〇 between the first end face hoi and the inner surface 1106 into four parallel directions parallel to the axial direction of the main shaft 11 (). The positioning body is the first positioning body 11 〇a, the second positioning body 110b, the third positioning body 11〇c, and the fourth positioning body. 098133079 Form No. A0101 Page 6 of 18 0982056661-0 201111533 [0012] Ο
請參見圖2 ’第一定位體ii〇a設於第二定位體1101)及第 四定位體ll〇d之間，其具有與第二定位體i10b相對之第 一定位面1101a及與第四定位體11 〇d相對之第二定位面 llOld。第二定位體ii〇b設於第一定位體i i〇a與第三定 位體110c之間，其具有與第一定位面ii〇ia相對之第三 定位面1102a及與第三定位體11 〇c相對之第四定位面 1102d。第三定位體ii〇c設於第二定位體ii〇b及第四定 位體110d之間，其具有與第四定位面ii〇2d相對之第五 定位面1103a及與第四定位體ii〇d相對之第六定位面 1103d。第四定位體ii〇d設於第一定位體ii〇a及第三定 位體110c之間，其具有與第六定位面11 〇3d相對之第七 定位面1104 a及與第二定位面lioid相對之第八定位面 1104d。第一定位面u〇ia·^第七定位面1104a共面，第 三定位面1102a與第六定位面ll〇3d共面.，第二定位面 llOld與第四定位面ii〇2d共面，第八定位面ii〇4d與第 五定位面1103a共面、前述各定也奋丰杆鼓主軸110之中 轴線。 3Γ f丨；j Ή ' V ο [0013]Referring to FIG. 2, the first positioning body ii〇a is disposed between the second positioning body 1101 and the fourth positioning body 110d, which has a first positioning surface 1101a and a fourth surface opposite to the second positioning body i10b. The positioning body 11 〇d is opposite to the second positioning surface 11Old. The second positioning body ii〇b is disposed between the first positioning body ii〇a and the third positioning body 110c, and has a third positioning surface 1102a and a third positioning body 11 opposite to the first positioning surface ii〇ia. c is opposite to the fourth positioning surface 1102d. The third positioning body ii〇c is disposed between the second positioning body ii〇b and the fourth positioning body 110d, and has a fifth positioning surface 1103a and a fourth positioning body ii〇 opposite to the fourth positioning surface ii〇2d. d is opposite to the sixth positioning surface 1103d. The fourth positioning body ii〇d is disposed between the first positioning body ii〇a and the third positioning body 110c, and has a seventh positioning surface 1104 a opposite to the sixth positioning surface 11 〇 3d and a second positioning surface liid The eighth positioning surface 1104d is opposite. The first positioning surface u〇ia·^the seventh positioning surface 1104a is coplanar, the third positioning surface 1102a is coplanar with the sixth positioning surface 11〇3d, and the second positioning surface 11Old is coplanar with the fourth positioning surface ii〇2d. The eighth positioning surface ii 〇 4d is coplanar with the fifth positioning surface 1103a, and the aforementioned axis is the central axis of the drum shaft 110. 3Γ f丨;j Ή ' V ο [0013]
Cg 詩. ^ fγϊ :，! Μ P 'Huai %：· # 清一併參見圖1及圖2，第一定位體ll〇a自第二定位面 11 Old朝第一定位體11 〇a内部設有複數第一卡位切口 1107a。該複數第—^位切口 1107a沿主轴11〇轴向相互 平行設置。每個第—^位切口 1107a—端貫穿週面11〇7 ’另一相對端與收容槽1103相通。每個第一卡位切口 1107a還與第二通道11〇5相通。每相鄰兩第一卡位切口 1107a之間距可按鑛件尺寸呈遞增、遞減、等間距或無規 設置。該第一卡位切口 1107a之個數大於固持件12〇之個 098133079 表單編號A0101 第7頁/共18頁 0982056661-0 201111533 數，以便後續根據鍍件尺寸靈活選擇一第一卡位切口 11 07a來卡緊固持件12〇。第三定位體n〇c自第五定位面 11 03a朝其内部設有複數第二卡位切口 u〇7b。該複數第 一卡位切口 11 〇 7b亦沿主軸丨丨〇軸向排列設置。每個第二 卡位切口 1107b貫通週面ι1〇7，並與收容槽11〇3及第二 通道1105相通，其與每個第一卡位切口 n〇7a_ 一對應 ，用於與該第一卡位切口 i 1〇78配合收容並卡緊固持件 120。同樣地，第二定位體11〇b自第三定位面u〇2a朝其 内部開設有複數第三卡位切口丨1〇7c，第四定位體丨1〇d 自第七定位面1104a朝其内部開設有複數與第三卡位切口 對應之第四卡位切口 1107d ^該複數第三卡位切口及 第四卡位切口 110 7 d均沿主軸11 〇之轴向排列’且每個第 三卡位切口 1107c、與該第三卡位切口 y 07c對應之第四 卡位切口 1107d及一第一卡位切口 11073及一第二卡位切 口 1107b與内表面1106之距離相等，以使收容於第一通 道1104及第二通道1105内之固持件120圍繞主軸11〇之中 轴線做適當角度之旋轉後’能收容並卡位於第三卡位切 口 1107c及第四卡位切口 11〇7d。 [0014] 每個固持件120包括第一固定桿121及第二固定桿122。 第一固定桿121與第二固定桿122相交於彼此之幾何中心 ’形成“十”字形狀。第一固定桿121及第二固定桿122 分別收容於第一通道1104及第二通道11〇5内，且第一固 定桿121之兩端部及第二固定桿122之兩端部分別伸出週 面1107外，用於固定鍍件。第一固定桿121及第二固定桿 122可於外力作用下分別沿主轴110之軸向於第一通道 098133079 表單編號A0101 第8頁/共18頁 0982056661-0 201111533 * 1104及第二通道11 05内移動，並可圍繞主轴11 0之中轴 線旋轉一定角度，直至第一固定桿121卡於第一卡位切口 1107a及第二卡位切口 11〇71)内，第二固定桿122卡於第 二卡位切口 ll〇7c及第四卡位切口11〇7(1内。 [0015]請—併參見圖1、圖2及圖3，複數彈性件130收容於收容 槽11 03内。每個彈性件13〇設於相鄰兩固持件12〇之間。 彈性件130之兩端分別與相鄰之兩固持件120中第一固定 才干121及第二固定桿122之相交部分相連。彈性件13〇於 〇 #力作用下可發生彈性形變，並於外力消失後恢復自然 長度，以此改變相鄰兩固持件12〇之間距。 _6] *用本實施例提供之錢链料架1◦。固定銀件進行鑛膜前， f先將锻件分別固定於第一固定桿121及第二固定桿 122之兩端面或兩端部1該固定可借助銷釘或其他手段得 以實施，、钱件待鍍媒面正對乾材2〇〇即可。其次，請 參見圖3及圖4 ’於滿气相鄰兩第一固定样i 2工及相鄰兩第 -固疋幹122之間距大於敗件八批原和下，即，須使相 ◎ •兩鍍件不相互遮擋，將相鄰兩Ίΐ)持件120中之其中-個 位置固疋，施予另-固持件12〇之第一固定桿121或第二 固疋杯122外力’設於該相鄰兩固持件12〇之間之彈性件 (圖未不）將發生彈性形變，相鄰兩固持件i2q之間距得 以調節。後’以主轴110之中轴線為中心，旋轉該位置未 固定之固持件120之第—固定桿121及第二固定桿122, 直至將第-固定桿121卡於第一卡位切口 11〇7认第二卡 位切口 1107b ’將第二固定桿122卡於第三卡位切口 1107c及第四卡位切aii〇7d，即可開始對鑛件進行鍵膜 098133079 表單編號A0101 第9頁/共 頁 0982056661-0 201111533 [0017] 當採用本實施例之濺鍍料架100對下一批鍍件進行鍍膜時 ，需將已鍍好膜之鍍件從固持件120取下，後根據欲鍍膜 鍍件之尺寸決定係否要施加外力於彈性件130，調整相鄰 兩固持件120之間距來避免相鄰兩鍍件相互遮擋。 [0018] 本實施例之濺鍍料架100開設有複數卡位切口，可根據鍍 件之尺寸大小利用彈性件130之彈性形變來靈活選擇固持 件120具體卡位於哪個卡位切口，由此避免相鄰兩鍍件相 互遮擋。與先前技術相比，本實施例之濺鍍料架100適合 於不同尺寸之鍍件之鍍膜工藝，無需針對不同尺寸之鍍 件配備不同之濺鍍料架，節約了生產成本。另，各定位 體開設之卡位切口數多於固持件數，即使需針對鍍件尺 寸調節相鄰兩固持件之間距，亦能使用全部固持件來固 定鍍件，避免了固持件閒置，提高了鍍膜效率。 [0019] 本技術方案之濺鍍料架不限於前述結構，本領域普通技 術人員可根據本技術方案之技術構思對實施例提供之濺 鍍料架100作其他各種相應之改變與變形。例如，固持件 120僅包括第一固定桿121或第二固定桿122，對應地， 主軸110僅設置有第一通道1104或第二通道1105，即， 自第一端面1101沿主軸110軸向將主軸110位於第一端面 1101及内表面1106之間之部分一分為二，由此得到兩相 對設置之定位體，自各定位體之定位面向其内部開設複 數沿主軸11 0軸向依次排列之卡位切口來收容卡緊該固持 件。舉凡熟悉本案技藝之人士援依本發明之精神所作之 等效修飾或變化，皆應涵蓋於以下申請專利範圍内。 098133079 表單編號A0101 第10頁/共18頁 0982056661-0 201111533 【圖式簡單說明】 [0020] 圖1係本技術方案實施例提供之濺鍍料架非使用狀態之示 意圖。 [0021] 圖2係圖1所示濺鍍料架之俯視圖。 [0022] 圖3係圖1所示濺鍍料架之分解示意圖。 [0023] 圖4係採用本技術方案實施例提供之濺鍍裝置對鍍件鍍膜 之不意圖。 〇 [0024] 【主要元件符號說明】 濺鍍料架：100 [0025] 主轴：110 [0026] 固持件：120 [0027] 彈性件：130 [0028] 第一端面：1101 [0029] 第二端面：1102 〇 [0030] 週面：1107 [0031] 收容槽：1103 [0032] 内表面：1106 [0033] 第一通道：1104 [0034] 第二通道：1105 [0035] 第一定位體：110a [0036] 第二定位體：ll〇b 098133079 表單編號A0101 第Cg 诗. ^ fγϊ :,! Μ P 'Huai %:· #清一见 See Figure 1 and Figure 2, the first positioning body 11〇a from the second positioning surface 11 Old towards the first positioning body 11 〇a There are a plurality of first card slot cutouts 1107a. The plurality of first position slits 1107a are arranged in parallel with each other along the axial direction of the main shaft 11'. Each of the first slits 1107a-end penetrates the peripheral surface 11〇7' and the other opposite end communicates with the receiving groove 1103. Each of the first card slots 1107a is also in communication with the second channel 11A5. The distance between each adjacent two first card slot cutouts 1107a may be incremented, decremented, equally spaced or randomly arranged according to the size of the ore member. The number of the first card slot 1107a is greater than the number of the holder 12 098133079, the form number A0101, the 7th page, the 18th page, the number of pages 0982056661-0 201111533, so that a first card slot cut 11 07a can be flexibly selected according to the size of the plated part. Come to the card to fasten the holder 12〇. The third positioning body n〇c is provided with a plurality of second card slot cutouts u〇7b from the fifth positioning surface 11 03a. The plurality of first card slots 11 〇 7b are also arranged along the axial axis of the spindle. Each of the second card slot cutouts 1107b extends through the peripheral surface ι1〇7 and communicates with the receiving slot 11〇3 and the second channel 1105, and corresponds to each of the first card slot cutouts n〇7a_ for the first The card slot cutouts i 1 〇 78 cooperate to receive and hold the fasteners 120. Similarly, the second positioning body 11〇b is provided with a plurality of third card indentations 丨1〇7c from the third positioning surface u〇2a, and the fourth positioning body 丨1〇d is from the seventh positioning surface 1104a toward the same. a fourth card slot cutout 1107d corresponding to the third card slot cutout is provided in the interior. The plurality of third card slot cutouts and the fourth card slot cutout 110 7d are all arranged along the axial direction of the spindle 11 ' and each third The card slot cutout 1107c, the fourth card slot cutout 1107d corresponding to the third card slot cutout y 07c, and a first card slot cutout 11073 and a second card slot cutout 1107b are equal to the inner surface 1106 so as to be received in The holding member 120 in the first passage 1104 and the second passage 1105 is rotated at an appropriate angle around the central axis of the main shaft 11 ' and can be received and locked in the third latching slit 1107c and the fourth latching slit 11〇7d. [0014] Each of the holders 120 includes a first fixing rod 121 and a second fixing rod 122. The first fixing rod 121 and the second fixing rod 122 intersect at a geometric center of each other to form a "ten" shape. The first fixing rod 121 and the second fixing rod 122 are respectively received in the first passage 1104 and the second passage 11〇5, and the two ends of the first fixing rod 121 and the two ends of the second fixing rod 122 respectively protrude. Outside the 1107 surface, it is used to fix the plated parts. The first fixing rod 121 and the second fixing rod 122 can be respectively along the axial direction of the main shaft 110 under the external force to the first passage 098133079. Form No. A0101 Page 8 / 18 pages 0982056661-0 201111533 * 1104 and the second passage 11 05 Moving inwardly and rotating around a central axis of the main shaft 11 0 until the first fixing rod 121 is caught in the first locking slit 1107a and the second locking slit 11〇71), and the second fixing rod 122 is stuck The second card slot incision 11〇 and the fourth card slot incision 11〇7 (1). [0015] Please, and referring to FIG. 1 , FIG. 2 and FIG. 3 , the plurality of elastic members 130 are received in the receiving slot 11 03 . The elastic members 13 are disposed between the two adjacent retaining members 12 。. The two ends of the elastic member 130 are respectively connected with the intersecting portions of the first fixed receptacle 121 and the second fixed rod 122 of the two adjacent retaining members 120. The elastic deformation of the piece 13 can be elastically deformed, and the natural length is restored after the external force disappears, thereby changing the distance between the adjacent two holding members 12 _6] * The money chain rack 1 provided by the embodiment ◦ Before fixing the silver piece to the film, f first fixes the forging to the first fixed rod 121 and the second The fixing of the two ends or the two end portions 1 of the fixing rod 122 can be carried out by means of a pin or other means, and the surface of the money piece to be plated is facing the dry material. Secondly, please refer to Fig. 3 and Fig. 4 The distance between the two adjacent first fixed samples i 2 and the adjacent two first solid-solid dry 122 is greater than the original and the lower of the eight pieces of the defeat, that is, the two sides are not shielded from each other and will be adjacent One of the two holding members 120 is fixed, and the first fixing rod 121 or the second fixing cup 122 of the other holding member 12 is disposed between the adjacent two holding members 12? The elastic member (not shown) will be elastically deformed, and the distance between the adjacent two holding members i2q can be adjusted. After the 'the center axis of the main shaft 110 is centered, the first fixing rod 121 and the second fixing rod 122 of the holding member 120 which are not fixed at the position are rotated until the first fixing rod 121 is stuck to the first clamping slit 11〇. 7 Recognizing the second card slot cutout 1107b 'The second fixing rod 122 is clamped to the third card slot cutout 1107c and the fourth card slot is cut aii〇7d, and the bonding film of the ore member can be started. 098133079 Form No. A0101 Page 9/ A total of 0982056661-0 201111533 [0017] When the next batch of plated parts is coated by the sputter rack 100 of the embodiment, the plated parts of the plated film are removed from the holding part 120, and then according to the desired coating. The size of the plated member determines whether an external force is applied to the elastic member 130, and the distance between the adjacent two holding members 120 is adjusted to prevent the adjacent two plated members from blocking each other. [0018] The sputter rack 100 of the embodiment is provided with a plurality of card slot cutouts, and the elastic deformation of the elastic member 130 can be used according to the size of the plated member to flexibly select which card position in the retaining member 120 is specifically located, thereby avoiding Adjacent two plated parts are shielded from each other. Compared with the prior art, the sputter rack 100 of the present embodiment is suitable for the coating process of different sizes of plated parts, and does not need to be equipped with different sputter racks for different sizes of plated parts, thereby saving production cost. In addition, the number of the card slots of each positioning body is more than the number of holding parts. Even if the distance between the adjacent two holding members is adjusted for the size of the plated parts, all the holding members can be used to fix the plated parts, thereby avoiding the idle parts being idle and improving. The coating efficiency. [0019] The sputter rack of the present invention is not limited to the foregoing structure, and those skilled in the art can make various other corresponding changes and modifications to the sprinkling rack 100 provided by the embodiment according to the technical concept of the technical solution. For example, the holder 120 includes only the first fixing rod 121 or the second fixing rod 122. Correspondingly, the main shaft 110 is only provided with the first passage 1104 or the second passage 1105, that is, from the first end surface 1101 along the axial direction of the main shaft 110. The portion of the main shaft 110 between the first end surface 1101 and the inner surface 1106 is divided into two parts, thereby obtaining two oppositely disposed positioning bodies, and a plurality of cards arranged in the axial direction of the main shaft 11 0 are opened from the positioning surface of each positioning body. A bit cut is received to receive the retaining member. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims. 098133079 Form No. A0101 Page 10 of 18 0982056661-0 201111533 [Simple Description of the Drawings] [0020] FIG. 1 is a schematic view showing the non-use state of the sputter rack provided by the embodiment of the present technical solution. 2 is a top plan view of the sputter rack shown in FIG. 1. 3 is an exploded perspective view of the sputter rack shown in FIG. 1. [0023] FIG. 4 is a schematic view of coating a plating member by using a sputtering apparatus provided by an embodiment of the present technical solution. 〇[0024] [Description of main component symbols] Sputter rack: 100 [0025] Spindle: 110 [0026] Holder: 120 [0027] Elastic: 130 [0028] First end face: 1101 [0029] Second end face :1102 〇[0030] Circumferential: 1107 [0031] accommodating groove: 1103 [0032] Inner surface: 1106 [0033] First channel: 1104 [0034] Second channel: 1105 [0035] First locator: 110a [ 0036] Second positioning body: ll〇b 098133079 Form number A0101
18 頁 0982056661-0 201111533 [0037] 第三定位體： 110c [0038] 第四定位體： 110d [0039] 第一定位面： 1101a [0040] 第二定位面： llOld [0041] 第三定位面： 1102a [0042] 第四定位面： 1102d [0043] 第五定位面： 1103a [0044] 第六定位面： 1103d [0045] 第七定位面： 1104a [0046] 第八定位面： 1104d [0047] 第一卡位切口 ：1107a [0048] 第二卡位切口 :1107b [0049] 第三卡位切口 ：1107c [0050] 第四卡位切口 ：1107d [0051] 第一固定杆： 121 [0052] 第二固定杆： 122 [0053] 靶材：200 098133079 表單編號A0101 第12頁/共18頁 0982056661-018 pages 0982056661-0 201111533 [0037] Third positioning body: 110c [0038] Fourth positioning body: 110d [0039] First positioning surface: 1101a [0040] Second positioning surface: llOld [0041] Third positioning surface: 1102a [0042] Fourth positioning surface: 1102d [0043] Fifth positioning surface: 1103a [0044] Six positioning surface: 1103d [0045] Seven positioning surface: 1104a [0046] Eight positioning surface: 1104d [0047] One card position cut: 1107a [0048] Second card position cut: 1107b [0049] Third card position cut: 1107c [0050] Fourth card position cut: 1107d [0051] First fixed rod: 121 [0052] Fixing rod: 122 [0053] Target: 200 098133079 Form No. A0101 Page 12 of 18 0982056661-0