TWI418946B - The method of fitting the liquid crystal panel - Google Patents

Description

Liquid crystal panel bonding method

The present invention relates to a bonding apparatus for a liquid crystal panel in which a color filter substrate and a TFT substrate are bonded together by a photocurable sealant in a step of assembling a liquid crystal panel, and a method of bonding a liquid crystal panel.

The liquid crystal screen used for a liquid crystal television or the like is composed of a liquid crystal panel, a driver for controlling the liquid crystal panel, and a back light source for backlighting the liquid crystal panel. The liquid crystal panel displays a screen by enclosing a liquid crystal and controlling a voltage applied to the liquid crystal to transmit or block light from the back light source.

Fig. 5 is a cross-sectional view showing an example of the configuration of the liquid crystal panel (color liquid crystal panel). Further, the figure is enlarged in the longitudinal direction from the lateral direction for the sake of easy understanding.

The liquid crystal panel is configured by sandwiching a liquid crystal 107 between a color filter substrate 101 and a TFT substrate 102 which are bonded together by a sealant (adhesive) 109.

In the color filter substrate 101, a light-shielding film 104 (hereinafter abbreviated as BM) called a black matrix is formed on a transparent substrate (hereinafter, a glass substrate is used, but a transparent resin substrate may be used). The color filter 103, the alignment film 106, the transparent electrode 105, and the like.

Further, a driving element for driving the liquid crystal is formed on the TFT substrate 102, for example, a TFT element 108, a liquid crystal driving electrode 110 formed of a transparent conductive film, and a wiring (not shown) connecting these.

The BM 104 is formed of, for example, a chrome vapor deposited film or a black resin, and has a function of shielding so that light from the back surface light source does not leak from a portion (a portion other than the liquid crystal) that is not related to the display of the image, such as a portion of the TFT element 108 or the wiring. So that the portrait is destroyed.

The color filter substrate 101 and the TFT substrate 102 are fabricated in separate steps before the step of bonding the liquid crystal and bonding them.

Hereinafter, the operation of bonding the color filter substrate and the TFT substrate is referred to as bonding of the panels. Recently, in the laminating step of the panel, a manufacturing method called a One Drop Fill (ODF) has been gradually adopted. The dropping method is described, for example, in Patent Document 1.

The procedure for including the bonding of the panel using the dropping method will be briefly described using Fig. 5.

(1) The color filter substrate 101 and the TFT substrate 102 are fabricated in separate steps. Generally, a transparent substrate 100 (also referred to as a mother glass substrate) can form a plurality of screens (which are respectively cut into a liquid crystal panel after completion).

(2) A sealant 109 which is itself a photocurable adhesive is applied so as to surround the periphery of a plurality of screens formed on the transparent substrate 100. The substrate to which the sealant 109 is applied may be either one of the color filter substrate 101 and the TFT substrate 102. Further, the width of the sealant is about 1 mm to 1.5 mm.

(3) The liquid crystal is dropped and stays in the picture surrounded by the sealant 109. The other substrate is placed in alignment and placed thereon, and the sealant 109 is irradiated with light of a wavelength at which the sealant 109 is cured over one of the substrates. In general, the photocurable resin is mainly an ultraviolet curable sealant having a sensitivity in the range of 300 nm to 400 nm.

A light source that emits light of a wavelength that hardens the sealant is usually a rod-shaped high-pressure mercury lamp or a metal halide lamp. These lamps are effective in emitting ultraviolet rays in the range of 300 nm to 400 nm corresponding to the sensitivity of the ultraviolet curable sealant, and are rod-shaped, so that it is easy to increase the size of the transparent substrate (parent glass substrate). Specifically, the rod-shaped lamps having the light-emitting lengths corresponding to the width of the transparent substrate are arranged side by side in accordance with the number of the lengths of the transparent substrates. Then, the entire transparent substrate is irradiated together.

(4) The sealant is hardened by light from the lamp, and the color filter substrate 101 and the TFT substrate 102 are bonded together (and then). The sealant combines the sealing of the liquid crystal and the subsequent function of the two substrates.

Further, before bonding, a spherical fine particle called a spacer may be sprayed between the color filter substrate 101 and the TFT substrate 102 to secure a space required for sandwiching the liquid crystal.

Figure 6 shows the LCD panel that has been attached. In the figure, one transparent substrate is formed with four screens.

(5) Next, the substrate is divided (cut) according to each screen, and loaded into a personal computer or a television as a display screen.

As described above, in the bonding step of the liquid crystal panel, an ultraviolet curing type sealing agent is used, and ultraviolet rays are irradiated in order to harden it. However, liquid crystals sometimes undergo deterioration or changes in characteristics after being irradiated with ultraviolet rays. Therefore, when the liquid crystal panel is irradiated with ultraviolet rays, it is irradiated through a mask in which the light shielding portion is formed. The light shielding portion of the mask is formed such that the sealant is exposed to ultraviolet rays, but the screen in which the liquid crystal is present is not irradiated.

In the field of manufacturing semiconductor devices and printed wiring board devices, a mask used for an exposure device that exposes a circuit pattern is known to be formed by vapor-depositing a metal such as chromium in quartz glass.

However, in the lamination of the liquid crystal panel, it is increasingly difficult to use the mask used in the exposure device. In recent years, the transparent substrate of the liquid crystal panel has been enlarged, and it may exceed 2 m on one side. In the case where such a large substrate is irradiated with ultraviolet rays at a time, the mask must also be a large mask corresponding to the size of the substrate.

Such a large-sized quartz glass is not only expensive, but also requires a large-scale dedicated vapor deposition device when a large quartz glass is vapor-deposited to form a light-shielding portion, and the manufacturing cost of the mask becomes very high.

In order to avoid the high cost of manufacturing the mask, a method of substituting the color filter substrate of the liquid crystal panel as a mask is gradually adopted. That is, a color filter substrate on which a color filter of R (red) G (green) B (blue) is to be formed as a product is taken out from the process before being bonded to the TFT substrate, and this substitute is used as a cover. cover.

The color filter formed on the color filter substrate transmits RGB visible light, but the transmittance of ultraviolet light is about 2%, so it can be used as a mask for preventing ultraviolet rays from being irradiated onto the liquid crystal.

As long as a color filter substrate is used as a mask, and the liquid crystal panel to be bonded is aligned to perform ultraviolet irradiation, color filtering is applied to the color filter substrate used as a mask and the panel to be bonded. Since the substrates are substantially the same, the portion of the screen of the liquid crystal panel is shielded by ultraviolet rays due to the color filter used as the color filter substrate of the mask, and the sealant on the outside of the screen is exposed to ultraviolet rays.

Even if a color filter substrate is taken out from the process for use as a mask, since it is one of the mass-produced color filter substrates, the cost is compared with the case of separately fabricating a mask for vapor-depositing the metal on quartz glass. Cheap. Further, a color filter substrate used as a hood is not used as a product of a so-called liquid crystal panel.

[Patent Document 1] Japanese Patent Laid-Open No. 9-73096

Fig. 7 shows a schematic configuration of an apparatus for using a color filter substrate as a mask and bonding the panel.

Reference numeral 10 is a light-irradiating portion in which a plurality of rod-shaped lamps 11 that emit ultraviolet rays are contained. Reference numeral 12 is a groove-shaped mirror that reflects ultraviolet rays emitted from the lamp 11. The ultraviolet rays radiated from the lamp 11 are directly reflected by the mirror 12, and are then emitted from the light exit opening 13 formed at the lower portion of the light irradiation portion 10 toward the panel P to be bonded.

A color filter substrate (hereinafter referred to as a mask) M serving as a mask may be disposed between the light irradiation portion 10 and the panel P. The ultraviolet ray from the light-irradiating portion 10 is irradiated onto the panel P to be bonded via the mask M.

As described above, the panel P is composed of two substrates of the color filter substrate 101 and the TFT substrate 102, and the liquid crystal 107 is interposed between the screens surrounded by the ultraviolet curable sealant 109. In the ultraviolet ray irradiation, the panel P is placed on the side of the light-irradiating portion 10, and the color filter substrate 101 is placed on the workpiece stage WS side and placed on the workpiece stage WS.

This is because when the color filter substrate 101 faces the light-irradiating portion 10 side, the light can not be applied to the sealant 109 which forms a portion below the BM 104, and may not be cured and may remain.

Further, in Fig. 7, in order to avoid the drawing being too complicated, the alignment film and the transparent electrode of the panel P shown in Fig. 5 are omitted.

The ultraviolet rays emitted from the light irradiation unit 10 are incident on the mask M. The portion of the mask M where the color filter 103 is formed is shielded by ultraviolet rays and passes through other portions. The ultraviolet rays that have passed through the mask M are irradiated onto the sealant 109 applied to the outside of the screen of the panel P.

Before the ultraviolet rays are irradiated onto the panel P and bonded, the color filter substrate 101 and the TFT substrate 102 are aligned, and the screen formed therebetween is correct and matched.

The order of alignment of the color filter substrate and the TFT substrate will be described using FIG.

In the color filter substrate 101 and the TFT substrate 102, alignment marks for alignment of two or more positions are formed on each of the substrates in each process. Here, the alignment mark formed on the color filter substrate 101 is referred to as CAM, and the alignment mark formed on the TFT substrate 102 is referred to as TAM.

The workpiece stage WS on which the panel P to be attached is placed is a position where the alignment marks of the panel P (the color filter side alignment mark CAM and the TFT side alignment mark TAM) come (two parts). A through hole or a slit 201 is formed (shown as a through hole in Fig. 2).

An alignment microscope 301 for detecting the alignment mark is provided below the through hole 201. The alignment microscope 301 receives an alignment mark (CAM, TAM) image of the panel P placed on the workpiece stage WS via the through hole 201. The alignment marks (CAM, TAM) received by the alignment microscope 301 are sent to the control unit 40 for image processing.

An example of the color filter side alignment mark CAM and the TFT side alignment mark TAM received by the alignment microscope 301 is shown in the circle of Fig. 8. In the figure, the alignment mark CAM of the color filter substrate is a cross type, and the alignment mark TAM of the TFT substrate is constituted by four L-shapes of a cross bar of the alignment mark CAM sandwiching the color filter substrate.

Each of the alignment marks CAM and TAM is simultaneously detected by the alignment microscope 301 (the interval between the color filter substrate 101 and the TFT substrate 102 is narrower than the depth of focus of the alignment microscope 301, and two alignment marks can be simultaneously detected), and The TFT substrate 102 is moved in such a manner that the alignment mark CAM and the TAM form a predetermined positional relationship, and then placed on the color filter substrate 101. Further, since the sealant 109 is uncured in this state, the TFT substrate 102 can be moved after the TFT substrate 102 is placed on the color filter substrate 101. Further, the color filter substrate 101 side can be moved to be aligned.

As described above, the alignment marks used when aligning the two substrates are formed into different shapes on the two substrates. Because if the shapes of the alignment marks of both sides are the same, the alignment cannot be completed for the following reasons.

If the shapes of the two marks are the same, and if two marks are to be detected by the alignment microscope, one of the marks may become an obstacle and the other mark may not be detected. Further, even if both of them can be detected, it is impossible to determine which one is the alignment mark of the substrate, and therefore it is not known which substrate has to be moved in which direction.

In addition, in the case where only one mark can be detected, it is impossible to distinguish whether the marks of the two substrates accidentally overlap, or one mark runs out of the field of view of the alignment microscope.

Here, when the color filter substrate is used as a mask and the ultraviolet rays are applied to the panel to be bonded, it is necessary to position the color filter substrate as a mask and the panel. When the position of the mask is aligned with the panel, the alignment mark for alignment can use the alignment mark CAM formed on the color filter substrate.

However, the color filter substrate used as the mask and the color filter substrate of the panel to be bonded are originally the same, and thus the alignment marks CAM formed may be the same shape. Therefore, when the color filter substrate mask is aligned with the panel in order to perform ultraviolet irradiation, the above-described problems occur and the alignment cannot be performed.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a liquid crystal panel in which a sealant between two substrates is bonded by light through a mask, even if the alignment mark of the mask is The alignment marks of the panels to be bonded are the same, and the position of the mask and the panel can be aligned.

The present invention solves the above problems in the following manner.

A liquid crystal panel is a liquid crystal panel in which a photocurable sealant and a liquid crystal are sandwiched between a color filter substrate and a TFT substrate, and the light-curable sealant is cured by irradiating light through a shade. A bonding apparatus for a liquid crystal panel in which two substrates are bonded together, comprising: a light irradiation portion that irradiates light; and a mask support means that supports the color filter substrate as a light shielding cover; a liquid crystal panel, and a workpiece stage formed with a through hole or a slit; a microscope disposed on a lower side of the through hole or the slit of the workpiece stage, and used for detecting an alignment mark formed on the hood and the panel; a workpiece stage moving mechanism that moves the workpiece stage in the horizontal direction (XYθ direction); and the alignment microscope is not moved in the horizontal direction, but is detected by the alignment microscope in time and is detected as the hood The alignment mark of the color filter substrate and the alignment mark of the panel, and the two alignment marks detected form a predetermined positional relationship The hood panel and the control unit the relative movement.

In the above-described bonding apparatus of the liquid crystal panel, the bonding of the panels is performed in the following order.

(1) The alignment mark of the color filter substrate (hereinafter referred to as a mask) used as a hood forms a focus position of the alignment microscope, and the mask is brought close to the alignment microscope. Further, the alignment mark of the panel to be bonded (hereinafter referred to as a panel) is moved in the horizontal direction (XYθ direction) by about 1000 μm to 2000 μm in a manner other than the field of view of the alignment microscope.

(2) Using the alignment microscope, the alignment mark of the mask is detected through the through hole or the slit of the workpiece stage and the panel. The position coordinates are stored in the control unit as the position of the mask alignment mark.

(3) The panel which is horizontally moved in the above (1) is restored by the alignment mark of the panel entering the field of view of the alignment microscope. The alignment mark of the panel moves (down) the alignment microscope in the vertical direction (Z direction) so as to align the focus position of the microscope.

(4) Using the alignment microscope, the alignment mark of the panel is detected. The position coordinate is stored in the control unit as the position of the panel alignment mark.

In addition, at this time, if the depth of focus of the alignment microscope is deep, sometimes the alignment mark of the mask is detected together with the alignment mark of the panel, so in this case, the panel is also aligned. The microscopes are moved together downwards, so that the alignment marks of the mask are separated from the depth of focus of the alignment microscope.

(5) The control unit is configured such that the position of the mask alignment mark and the position of the panel alignment mark form a predetermined positional relationship (for example, coincident), as long as the mask or the panel or both of them are oriented How many distances can be moved in one direction to perform calculations. According to the result, the mask and the panel are relatively moved.

(6) After the alignment of the mask and the panel is completed, the panel is bonded by irradiating light onto the panel via the mask.

The present invention can attain the following effects.

Since the position of the alignment microscope is not moved in the horizontal direction XYθ direction, but is shifted in time to detect the alignment mark of the mask and the alignment mark of the panel, and then the position is memorized, and according to the memorized alignment The marked image is aligned, so even if the alignment mark of the mask is the same as the shape of the alignment mark of the panel, one alignment mark does not become the other alignment mark, so that it cannot be detected, and There is a problem that it is impossible to discriminate which one is the mask and which one is the alignment mark of the panel, and the position of the mask and the panel can be aligned.

Fig. 1 shows a schematic configuration of a bonding apparatus for a liquid crystal panel of the present invention. In addition, this figure is a cross-sectional view in the direction orthogonal to the longitudinal direction of a rod-shaped lamp, and the same code|symbol is attached|subjected by the same thing as FIG. 5, FIG. The configuration of the panel P to be attached is described in [Prior Art], and therefore will be omitted here.

The light irradiation unit 10 houses a plurality of lamps 11 that emit ultraviolet rays. The lamp 11 is, for example, a rod-shaped high pressure mercury lamp or a metal halide lamp as described above. The lamp 11 is a number of bar-shaped lamps corresponding to the length of the width of the panel juxtaposed to the length of the panel in such a manner that the panel can be processed at one time. Further, instead of the lamp, a plurality of LEDs that emit ultraviolet rays may be arranged in parallel as a light source of ultraviolet rays.

The ultraviolet ray radiated from the lamp 11 is directly or reflected by the groove-shaped mirror 12, and is then emitted from the light-emitting opening 13 formed at the lower portion of the light-irradiating portion 10 toward the liquid crystal panel P to be bonded.

A color filter substrate (hereinafter referred to as a mask) M serving as a mask may be disposed between the light irradiation portion 10 and the panel P.

The color filter substrate used as the mask M must have at least R (red) G (green) B (blue) color filter 103 and a plurality of alignment marks CAM. However, other such as a transparent electrode or an alignment film may be formed. That is, even if it has not been completed as a color filter substrate, it can be used as a mask. The color filter substrate that can be used as a mask in the present application also includes a substrate that has not yet been completed as a color filter substrate.

Since the mask M has the same size as the panel P, it cannot be directly held by the opaque mask stage. Therefore, the mask M is first held by the mask holding means 501 whose width is larger than the mask M and which is permeable to ultraviolet rays, and the mask holding means 501 is supported by the opaque mask stage MS.

The material of the mask holding means 501 is, for example, quartz. A vacuum suction groove (not shown) is formed on the lower surface side of the mask holding means 501 (the side where the mask M is held), and the mask M is held by supplying a vacuum to the vacuum adsorption groove.

The workpiece stage moving mechanism 202 is provided on the workpiece stage WS on which the panel P to be bonded can be placed. The workpiece stage moving mechanism 202 causes the workpiece stage WS to face the X direction (the horizontal direction of the drawing), the Y direction (the front internal direction), the Z direction (the vertical direction), and the θ direction according to the signal from the control unit 40 (and The direction of rotation around the axis orthogonal to the XY direction) moves.

Further, a through hole 201 is formed at a position where the alignment marks (CAM, TAM) of the panel P of the workpiece stage W come. An alignment microscope 301 for detecting an alignment mark is provided below the through hole 201. Further, instead of the through hole 201, a slit may be formed in the workpiece stage WS to be used.

The alignment marks (CAM, TAM) placed on the panel of the workpiece stage WS are received by the alignment microscope 301 via the through holes 201 (or slits).

The alignment mark CAM of the mask M received by the alignment microscope 301 or the alignment marks CAM and TAM of the panel are sent to the control unit 40 for image processing and are memorized.

Further, an alignment microscope moving mechanism 302 is provided in the alignment microscope 301. The alignment microscope moving mechanism 302 moves the alignment microscope 301 in the Z direction based on the signal from the control unit 40.

The bonding procedure of the bonding apparatus mask and the panel using the liquid crystal panel of FIG. 1 is demonstrated using FIG. 2, FIG. 3, and FIG. Further, in the drawing, the workpiece stage moving mechanism 202 and the alignment microscope moving mechanism 302 are omitted.

Moreover, since the alignment mark CAM formed on the mask M is the same as the alignment mark CAM of the color filter substrate formed on the panel, in order to avoid confusion, the alignment mark CAM of the mask M is called MCAM, and is to be bonded. The alignment mark CAM of the panel is called PCAM.

Figure 2 (a). The workpiece stage WS and the alignment microscope 301 are conveyed in a state of being vertically lowered in the vertical direction (Z direction) by the workpiece stage moving mechanism 202 and the alignment microscope moving mechanism 302, and the panel P to be bonded is The mutually overlapping state is carried, and the color filter substrate 101 is placed below the workpiece stage WS.

Figure 2 (b). The workpiece stage WS is moved (raised) in the vertical direction (Z direction) by the alignment microscope moving mechanism 302 by the workpiece stage moving mechanism 202. At this time, the workpiece stage WS is also moved approximately 1000 μm to 2000 μm in the horizontal direction (XY direction) by the workpiece stage moving mechanism 202. Therefore, the alignment marks PCAM and TAM of the panel P are separated from the field of view of the alignment microscope 301.

When the alignment microscope 301 reaches the position (the focus position of the alignment microscope) at which the alignment mark MCAM of the mask M can be detected, the rise of the workpiece stage WS and the alignment microscope 301 is stopped.

The alignment microscope 301 can detect the mask through the through hole 201 (or the slit) formed in the workpiece stage WS and the two transparent substrates (the TFT substrate 102 and the color filter substrate 101) of the panel P without any of them. The alignment mark of M is MCAM.

The alignment microscope 301 detects and receives only the image of the alignment mark MCAM of the mask M. The mask alignment mark MCAM image is sent to the control unit 40 for image processing, and its coordinate position is memorized.

Figure 3 (c). By the workpiece stage moving mechanism 202, the workpiece stage WS moves in the horizontal direction so that the alignment marks PCAM and TAM of the panel P are separated from the field of view of the alignment microscope 301 in the second drawing (b). The amount (1000μm~2000μm) moves in the opposite direction. At the same time, the alignment microscope 301 is lowered in the vertical direction (Z direction) by the alignment microscope moving mechanism 302 until the position of the alignment mark PCAM formed by the panel P on the workpiece stage WS (ie, the focus position) can be detected. .

The alignment microscope 301 detects and receives only the image of the alignment mark PCAM (or both PCAM and TAM) of the panel P. The alignment mark PCAM image (or PCAM image and TAM image) is sent to the control unit 40 for image processing, and its position coordinates are memorized.

When the position of the alignment microscope 301 is the alignment mark MCAM of the mask M in the second figure (b), and the alignment mark PCAM of the panel P is detected in the third figure (c), the vertical direction (Z) Although the position of the direction) changes, the position in the horizontal direction (XYθ direction) does not change.

Figure 3 (d). The control unit 40 is configured to form a predetermined positional relationship (for example, coincident) with the position of the mask alignment mark MCAM and the position of the panel alignment mark PCAM, and the workpiece stage WS placed on the panel P is provided. How many distances can be moved in either direction of XYθ to perform the calculation.

According to the result, the control unit 40 moves the workpiece stage WS by the workpiece stage moving mechanism 202, and aligns the position of the mask M and the panel P.

In addition, this alignment can be performed by moving the mask side, and both the panel and the mask can be moved.

Figure 4 (e). The workpiece stage WS is moved by the workpiece stage moving mechanism 202 so that the distance between the mask M and the panel P is close to about 500 μm of the exposure gap. Then, the panel P is irradiated with ultraviolet rays from the light irradiation unit 10 via the mask M.

The ultraviolet rays emitted from the light irradiation unit 10 enter the mask M, and are partially shielded from the portion in which the color filter 103 is formed, and pass through other portions. The ultraviolet rays passing through the mask M pass through the TFT substrate 102 and are irradiated onto the sealant 109.

The sealant 109 irradiated with the ultraviolet ray is hardened by the light reaction, and the color filter substrate 101 and the TFT substrate 102 are bonded together in a state in which the liquid crystal is sandwiched.

Further, in the third diagram (c), in the case where the depth of focus of the alignment microscope 301 is deep, even if the alignment microscope 301 descends to the alignment mark PCAM of the panel P to form a focus position, the alignment mark of the mask M may be masked. The MCAM is also within the depth of focus so that both the alignment mark MCAM of the mask M and the alignment mark PCAM of the panel P are detected.

In this case, the workpiece stage WS is also lowered together with the alignment microscope 30, and the distance from the alignment microscope 301 to the mask M is lengthened so that the alignment mark MCAM of the mask M is from the focus depth of the alignment microscope 301. Leave so that only the alignment mark PCAM of the panel P is detected.

As described above, in the state in which the position of the alignment microscope 301 is not moved in the horizontal direction (XYθ direction) by the alignment microscope 301, the alignment mark MCAM of the mask M is detected and received in time. The alignment of the panel P marks the image of the PCAM and memorizes the individual positional information in the control 40. Next, the position is aligned based on the image of the individual alignment mark of the memory, that is, the position coordinates of the MCAM image and the position coordinates of the PCAM image.

Therefore, even if the alignment mark of the mask is the same as the shape of the alignment mark of the panel, there is no possibility that the alignment mark of one side cannot be detected because the alignment mark becomes the other alignment mark, and it does not occur. It is a matter of discriminating which one is the mask and which is the alignment mark of the panel, and the position of the mask and the panel can be aligned.

10. . . Ultraviolet irradiation device

11. . . light

12. . . Reflector

13. . . Light exit

40. . . Control department

100. . . Transparent substrate

101. . . Color filter substrate

102. . . TFT substrate

103. . . Color filter

104. . . Black matrix (BM)

105. . . Transparent electrode

106. . . Oriented film

107. . . Liquid crystal (layer)

108. . . TFT element

109. . . Sealants

110. . . Liquid crystal drive electrode

201. . . Through hole

202. . . Workpiece stage moving mechanism

301. . . Alignment microscope

302. . . Aligning with a microscope moving mechanism

501. . . Mask retention means

52. . . Shading

M. . . Mask

P. . . (LCD panel

MS. . . Mask stage

WS. . . Workpiece stage

CAM. . . Alignment mark of color filter substrate

TAM. . . Alignment mark of TFT substrate

MCAM. . . Mask alignment mark

PCAM. . . Panel alignment mark

Fig. 1 is a schematic configuration diagram of a bonding apparatus for a liquid crystal panel of the present invention.

Fig. 2 is an explanatory diagram (1) of the order in which the mask and the panel are bonded.

Fig. 3 is an explanatory view (2) of the order in which the mask and the panel are bonded.

Fig. 4 is an explanatory view (3) of the order in which the mask and the panel are bonded.

Fig. 5 is a cross-sectional view showing a configuration example of a liquid crystal panel (color liquid crystal panel).

Fig. 6 is a schematic view of a liquid crystal panel that has been attached.

Fig. 7 is a schematic view showing a device in which a color filter substrate is used as a mask and the panel is attached.

Fig. 8 is an explanatory view showing the order of alignment of the color filter substrate and the substrate.

10. . . Ultraviolet irradiation device

11. . . Stick light

12. . . Reflector

13. . . Light exit

40. . . Control department

201. . . Through hole

202. . . Workpiece stage moving mechanism

301. . . Alignment microscope

302. . . Aligning with a microscope moving mechanism

501. . . Mask retention means

MS. . . Mask stage

M. . . Mask

WS. . . Workpiece stage

CAM. . . Alignment mark of color filter substrate

TAM. . . Alignment mark of TFT substrate

Claims (1)

A method of bonding a liquid crystal panel by using an alignment mark detecting means to detect alignment formed on a liquid crystal panel in which a photocurable sealant and a liquid crystal are sandwiched between a color filter substrate and a TFT substrate to have an integral shape Marking and positioning of the alignment mark on the hood to align the liquid crystal panel, illuminating the liquid crystal panel via the hood, and curing the photocurable sealant, and bonding the liquid crystal panel to which the two substrates are bonded The bonding method is characterized in that it includes a first step of holding a color filter substrate as a light shielding cover in a mask holding means, and a liquid crystal panel that is to be bonded to a panel holding means in which a through hole or a slit is formed a second step of: causing the panel holding means and the alignment mark detecting means provided under the panel holding means to rise in a vertical direction, and moving the panel holding means in a horizontal direction to form an alignment formed on the liquid crystal panel a third step of marking the field of view from the alignment mark detecting means; and using the alignment mark detecting means via the through hole or a fourth step of detecting an alignment mark formed on the hood by the liquid crystal panel; and moving the panel holding means in a horizontal direction to move the alignment mark formed on the liquid crystal panel to the alignment mark detecting means In the field of view, the alignment mark detecting means is moved not in the horizontal direction but in the vertical direction, and together with the alignment mark detecting means The panel holding means is lowered to remove the alignment mark formed on the hood by the alignment mark detecting means; and the alignment mark detecting means detects and is detected through the through hole or the slit a sixth step of forming an alignment mark formed on the liquid crystal panel having the same shape as the alignment mark of the hood; and position information of the two alignment marks detected by the fourth and sixth steps, The seventh step of aligning the mask holding means with the panel holding means to align the hood with the liquid crystal panel.