TWI411697B - Sputtering bracket and sputtering device using the same - Google Patents

Abstract

A sputtering bracket includes a main body, at least one substrate clamp and a turnover controlling device. The main body includes a rotation axis. The main body can rotate around the rotation axis. The main body includes a plurality of through holes defined therein. Each substrate clamp is fixed in each through hole correspondingly. The substrate clamp is connected to the main body by an axis. Each axis of the substrate clamp has a turnover guiding groove. The turnover controlling device includes at least one turnover pole and a controlling unit. The controlling unit is configured for controlling the turnover pole moving close to the turnover groove of the substrate clamp. When the main body is rotating around the rotation axis, the turnover pole will make the substrate clamp turn over by the guiding of the turnover groove. The present invention also provides a sputtering device using the sputtering bracket.

Description

Coated stent and coating machine

The invention relates to a coating device, in particular to a coating stent and a coating machine.

Generally, optical components such as Lens and filters of optical products such as cameras, digital cameras, and camera lens modules are required to prevent incident light from being reflected by partial incident light when passing through each component. Loss of energy, it is necessary to plate anti-reflection film on both sides of each optical lens, or to coat one side of the filter with a film that can filter out a certain section of light (such as infrared filter, ultraviolet filter), and The other side is coated with an anti-reflection film, and these optical films are used to increase the anti-reflection performance of the optical element and prevent loss of optical energy.

The coating method of the optical film is usually carried out by thermal evaporation or sputtering. When optical films are coated on both sides of the optical component, the coating process usually includes: vacuuming, heating, coating, cooling, vacuum breaking, manual flipping of the optical component fixture, vacuuming, heating, coating on the other side, cooling, breaking Vacuum, removal of optical components, etc. (see "Spinning brackets for hollow cylindrical coatings" by Su Chengbin et al., "Iron Plating Technology and Sensors", No. 2, 1980, for a cylindrical A bracket for coating optical parts and a method of using the same). The coating process includes two vacuuming, heating, coating, cooling and vacuum breaking processes, which take up a considerable amount of process time, so how to avoid the process repeating and reduce the process time, mass production of the two-sided coating components Speaking is an extremely important topic.

In view of the above, it is necessary to provide a coating holder and a coating machine for automatically turning the coated substrate holder in a coating apparatus.

A coated stent comprises: a bracket body having a central rotating shaft, the bracket body is rotatable about the central rotating shaft, the bracket body is provided with a plurality of receiving through holes; at least one substrate clamp, each of the a substrate holder correspondingly disposed in each of the receiving through holes, the substrate holder and the bracket body being connected by a rotating shaft, wherein each of the substrate clamps is connected with a turning guide groove at a rotating shaft; and a turning surface control The device includes: at least one flipping rod and a control element, wherein the control element is configured to control the flipping rod to move to a position close to the turning guide groove of the substrate holder, so that the bracket body is wound When the center shaft rotates, the flip lever is guided by the turning guide groove to drive the substrate holder to turn over.

A coating machine comprising: a vacuum container; at least one target disposed in the vacuum container; and a coating bracket disposed opposite the target, the coating bracket comprising: a bracket body having a central rotating shaft, the bracket body The bracket body is rotatable about the central rotating shaft, and the bracket body is provided with a plurality of receiving through holes; at least one substrate holder, wherein each of the substrate holders is correspondingly disposed in each of the receiving through holes, the substrate holder and The bracket bodies are connected by a rotating shaft, wherein each of the substrate clamps is connected with a turning guide groove at a rotating shaft; and a turning surface control device comprising at least one turning rod and a control element, The control element is configured to control the position of the flipping rod to be close to the turning guide groove of the substrate holder, so that the turning rod is guided by the turning guide groove when the bracket body rotates around the central rotating shaft Next, the substrate fixture is turned over.

Compared with the prior art, the coating holder and the coating machine can automatically flip the coated substrate fixture, which can save the time of vacuuming and vacuuming, thereby greatly saving the advantages of the processing time.

The invention will be further described in detail below with reference to the accompanying drawings.

As shown in FIG. 1 , it is a coated stent 100 provided by an embodiment of the present invention. The coating holder 100 includes a holder body 110, a plurality of substrate holders 120, and a turning surface control device 130 for controlling the substrate holder 120 to be inverted.

The bracket body 110 is made of a metal having good thermal conductivity and has a semi-spherical shape, and the material thereof may be one or more of metals such as copper, aluminum or stainless steel. In this embodiment, the bracket body 110 is a stainless steel semi-spherical ball. The bracket body 110 has a central rotating shaft 101 about which the bracket body 110 can rotate. The bracket body 110 is provided with a plurality of receiving through holes 112, and the plurality of receiving through holes 112 are square in shape. Of course, the shape can also be set to a shape such as a fan shape or a circle shape. The plurality of receiving through holes 112 are arranged in a row on the bracket body 110, and the plurality of receiving through holes 112 on each row are on the same level line.

Each of the substrate holders 120 is disposed in each of the receiving through holes 112. The substrate holder 120 is made of a metal having good thermal conductivity, and the material thereof may be one or more of metals such as copper, aluminum or stainless steel. Of course, the material of the substrate holder 120 may also be a plastic material, for example, a synthetic material of PC (polycarbonate) plus ABS (acrylonitrile-butadiene-styrene copolymer), or a composite material of PC and glass fiber. Wait. The shape of the substrate fixture 120 can be The shape of the fan, the circle, the square, or the like is such that it can be installed in the receiving through hole 112 of the bracket body 110 and does not collide with the bracket body 110 when flipped. In the embodiment, the substrate holder 120 is square. The plurality of substrate holders 120 are the same size and symmetrically distributed on the holder body 110.

Each of the substrate holders 120 is provided with at least one through hole 122 for receiving the workpiece to be coated and exposing the opposite surfaces to be plated of the workpiece to be coated. The workpiece to be coated is a glass lens or a plastic lens.

Referring to FIG. 2 together, each of the substrate holders 120 and the holder body 110 are connected by a rotating shaft 124. In this embodiment, the rotating shaft 124 is disposed at the axial position of the substrate holder 120. Each of the receiving through holes 112 is oppositely disposed with two grooves (not shown). The rotating shaft 124 of each of the substrate holders 120 can be locked in the corresponding groove to be fixed in the receiving through hole 112. . Each of the substrate holders 120 is provided with a turning guide groove 126 corresponding to the rotating shaft 124. The turning guide groove 126 is provided on the outer side of the end of the rotating shaft 124 of each of the substrate holders 120.

The turning guide groove 126 is a half moon shape, and is formed by a first block 1261 and a second block 1262 cooperating. The first block 1261 has a half moon shape, and the second block 1262 has a circular arc end and a square end. The second block 1262 is disposed inside the half moon of the first block 1261, and one end of the circular arc The first stop 1261 and the second stop 1262 cooperate to form the turning guide groove 126. Of course, the turning guide groove 126 may also have a circular arc shape, a U shape, a horseshoe shape, or the like, as long as the structure for guiding the substrate clamp 120 to be reversed can be realized.

The flip control device 130 includes at least one flip lever 132 and a control member 134 for controlling the flip lever 132 to move downward and relatively move into the flip guide groove 126 of the substrate holder, thereby When the holder body 110 is rotated, the substrate holder 120 is flipped over. The control element 134 is an electric motor, an electromagnetic pump or a magnetic current motor.

The control element 134 can control the flip lever 132 to move down or up, thereby causing the flip control device 130 to be in an active or inactive state. Since the coating holder 100 is coated, the holder body 110 is continuously rotated, for example, in a counterclockwise direction. Rotating the bracket body 110 counterclockwise causes each of the substrate holders 120 fixed thereto to move from left to right in the horizontal direction. This flip control device 130 utilizes this phenomenon to effect the flipping of the substrate holder 120.

Please refer to FIG. 2 to FIG. 5 , which are schematic perspective views of one of the substrate holders 120 of the coating holder 100 according to the embodiment of the present invention. Each of the substrate holder 120 and the flip lever 132 are in different states.

Please refer to FIG. 2, which is a state in which the substrate jig 120 is not turned over. Since the bracket body 110 rotates counterclockwise, the substrate holder 120 is relatively moved from left to right. Therefore, the flip lever 132 will relatively move into the flip guide groove 126 as shown in FIG.

The first stopper 1261 of the turning guide groove 126 has a half moon shape and an inner side thereof has an arc shape. When the substrate jig 120 is relatively moved, due to the resistance of the flip bar 132, a certain pressing force is generated in the arc, and the pressing force causes the substrate jig 120 to start to flip, as shown in FIG. Show.

When the substrate holder 120 is turned over to a position of approximately 90 degrees, the flip lever 132 is also relatively moved to the rearmost face of the flip guide groove 126. The substrate holder 120 continues to move under the rotation of the holder body 110, so that the flip lever 132 does not stay on the face of the flip guide groove 126, but drives the substrate holder 120 to flip, as shown in FIG.

The substrate holder 120 has been flipped 180 degrees, and the flip lever 132 is also about to leave the flip guide slot 126 relative to the position of the substrate holder 120. Thus, the substrate holder 120 realizes an automatic flip function, and the substrate holder passing through the flip lever 132 in the same horizontal direction will move to the position of the flip lever 132, thereby realizing the other substrate holder. Turn over.

Each row of substrate holders 120 can be provided with a flip bar 132 correspondingly, so that a row of substrate holders 120 can be turned by a flip bar 132. In this embodiment, the bracket body 110 is provided with two rows of substrate fixtures 120, and the flipping rods 132 are correspondingly disposed two, thereby realizing the flipping of the two rows of the substrate fixtures 120.

When all of the substrate holders 120 have been turned over, the holder body 110 can be set to pause and the flip member 132 can be lifted up using the control member 134 to move away from the substrate holder 120. Then, the coating device is restarted, and the coated workpiece is coated on the other side.

The present invention further provides a coating machine (not shown) using the above-mentioned coating stent 100, comprising: a vacuum container (not shown); at least one target (not shown) disposed in the vacuum container; and opposite to the target The coated stent 100.

When the coating machine is used, firstly, one side of the coated substrate is plated. After the one surface is plated, the flipping control device 130 on the coating holder 100 is used to control each substrate holder 120 to be flipped by 180 degrees, and then the other surface can be coated. Since the flip control device 130 can be controlled by an electronically controlled or remotely controlled device, the flipping action of the substrate holder 120 can be automatically performed.

Compared with the prior art, the coating holder and the coating machine can automatically flip the coated substrate fixture, which can save the time of vacuuming and vacuuming, thereby greatly saving the advantages of the processing time.

In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or variations made by persons skilled in the art in light of the spirit of the invention are intended to be included within the scope of the following claims.

Coated stent ‧‧100

Bracket body ‧‧‧110

Substrate fixture ‧‧120

Flip control device ‧‧‧130

Center shaft ‧ ‧ 101

Having a through hole ‧‧112

Through hole ‧‧122

Rotary ‧‧‧124

Guide slot ‧‧‧126

First stop ‧‧1126

Second block ‧‧1126

Flip ‧ ‧ ‧ 132

Control element ‧‧‧134

FIG. 1 is a schematic perspective view of a coated stent according to an embodiment of the invention.

2 to FIG. 5 are perspective views of the substrate holder of the coated stent of FIG. 1 at different angles when flipped.

Coated stent ‧‧100

Bracket body ‧‧‧110

Substrate fixture ‧‧120

Flip control device ‧‧‧130

Center shaft ‧ ‧ 101

Having a through hole ‧‧112

Through hole ‧‧122

Rotary ‧‧‧124

Flip ‧ ‧ ‧ 132

Control element ‧‧‧134

Claims (20)

A coated stent comprises: a bracket body having a central rotating shaft, the bracket body is rotatable about the central rotating shaft, the bracket body is provided with a plurality of receiving through holes; at least one substrate clamp, each of the a substrate holder correspondingly disposed in each of the receiving through holes, the substrate holder and the holder body being connected by a rotating shaft, wherein each of the substrate holders is connected with a turning guide groove at a rotating shaft; and a turning surface a control device, the flip control device comprising at least one flipping lever and a control element for controlling the flipping lever to move to a position close to the flipping guide groove of the substrate holder, so that the bracket body When the rotating shaft rotates around the center axis, the flipping bar guides the substrate clamp to turn over under the guiding of the turning guide groove. The coated stent of claim 1, wherein the turned guide groove is disposed on an outer side of the end of the rotating shaft of each of the substrate holders. The coated stent according to claim 1, wherein the turned guide groove has a circular arc shape and is formed by a first stopper and a second stopper. The coated stent of claim 3, wherein the first stopper is a half moon shape, the second stopper has a circular arc at one end and a square at one end, and the second stopper is disposed at the first stopper The inside of the half moon shape, and one end of the circular arc shape is abutted so that the first stopper and the second stopper cooperate to form the turning guide groove. The coated stent of claim 1, wherein the stent The body has a semi-spherical spherical shape, and the plurality of receiving through holes are arranged in a row on the bracket body, and the plurality of receiving through holes on each row are on the same horizontal line. The coated stent of claim 1, wherein the plurality of substrate holders are the same size and symmetrically distributed on the stent body. The coated stent of claim 1, wherein the control element is an electric motor, an electromagnetic pump or a magnetic current motor. The coated stent of claim 1, wherein the substrate holder has a plurality of through holes for receiving the workpiece to be coated. The coated stent of claim 1, wherein the substrate holder material is selected from one or more of copper, aluminum, stainless steel or plastic. The coated stent of claim 1, wherein the stent body material is selected from one or more of copper, aluminum, and stainless steel. A coating machine comprising: a vacuum container; at least one target disposed in the vacuum container; and a coating bracket disposed opposite the target, the coating bracket comprising: a bracket body having a central rotating shaft, the bracket body The bracket body is rotatable about the central rotating shaft, and the bracket body is provided with a plurality of receiving through holes; at least one substrate holder, wherein each of the substrate holders is correspondingly disposed in each of the receiving through holes, the substrate holder and The bracket bodies are connected by a rotating shaft, wherein each of the substrate clamps is connected with a turning guide groove at a rotating shaft; and a turning surface control device comprising at least one turning rod and a control element, a control element for controlling movement of the flip lever to the base When the flipping guide groove of the sheet jig is close to the position, so that the bracket body rotates around the central rotating shaft, the turning rod is guided by the turning guiding groove to drive the substrate fixture to turn over. The coating machine of claim 11, wherein the turning guide groove is disposed on an outer side of the end of the rotating shaft of each of the substrate holders. The coating machine of claim 11, wherein the turning guide groove has a circular arc shape and is formed by a first block and a second block. The coating machine of claim 13, wherein the first block has a half moon shape, the second block has a circular arc at one end and a square at one end, and the second block is disposed at the first block. The inside of the half moon shape, and one end of the circular arc shape is abutted so that the first stopper and the second stopper cooperate to form the turning guide groove. The coating machine of claim 11, wherein the bracket body has a semi-spherical spherical shape, and the plurality of receiving through holes are arranged in a row on the bracket body, and the plurality of receiving through holes on each row Located on the same horizontal line. The coating machine of claim 11, wherein the plurality of substrate holders are the same size and symmetrically distributed on the holder body. The coating machine of claim 11, wherein the control element is an electric motor, an electromagnetic pump or a magnetic current motor. The coating machine of claim 11, wherein the substrate holder has a plurality of through holes for accommodating the workpiece to be coated. The coating machine of claim 11, wherein the substrate holder material is selected from one or more of copper, aluminum, stainless steel or plastic. The coating machine according to claim 11, wherein the bracket is The bulk material is selected from one or more of copper, aluminum, and stainless steel.