1352741 100年08月31日修正^^頁 六、發明說明： 【發明所屬之技術領域】 [0001 ] 本發明涉及·一種锻膜裝置，尤其涉及·種锻膜用轉盤及 鍍膜機。 【先前技術】 [0002] 通常，照相機、數碼相機、照相手機鏡頭模組等光學産 品之各種光學鏡片（Lens) '濾光片等光學元件，因爲要 避免入射光於經過每個元件時，部分入射光反射而導致 之光能損耗，需要於每一個光學鏡片之兩面鍍抗反射膜 ，或是於濾光片之一面鍍可濾掉某區段光之薄膜（如紅外 濾光片，紫外濾光片），而於另一面鍍抗反射膜，藉由這 些光學薄膜以增加光學元件之抗反射性能，防止光能損 耗。 [0003] 所述光學薄膜之鍍膜方式多以熱蒸鍍或濺鍍方式進行。 當光學元件兩面均需鍍上光學薄膜時，其鍍膜過程中通 常包括：抽真空、加熱、一面鍍膜、冷却、破真空、手 動翻轉光學元件夹具、抽真空、加熱、另一面鑛膜、冷 却、破真空、取出光學元件等步驟。該鍍膜過程中包括 兩次抽真空、加熱、鍵膜、冷却以及破真空過程’佔去 相當多之製程時間，所以如何避免所述過程之重復進行 ，減少製程時間，對於兩面鍍膜之元件量産來講尤為重 要。 [0004] 有鑑於此，提供一種自動翻面之鍍膜用轉盤及鍍膜機實 爲必要。 【發明内容】 095100589 表單編號A0101 第4頁/共13頁 1003318310-0 1352741 ‘ 1100年08月31日核正替換頁 [0005] 以下，將以實施例說明一種自動翻面之鍍膜用轉盤及鍍 膜機。 [0006] 一種鍍膜用轉盤，包括：一個轉盤本體；設置於該轉盤 本體上之至少一個安裝口；至少一個基片夾具，每個基 片夾具對應收容於一個安裝口内，每個基片夾具對應設 有一個馬達，該馬達用於驅動相應的基片夾具翻轉。 [0007] 及，一種鍍膜機，其包括：一個真空容器；設置於該真 空容器内之至少一個鍍靶；及與該鍍靶相對設置之鍍膜 用轉盤。其中，該鍍膜用轉盤具有：一個轉盤本體；設 置於該轉盤本體上之至少一個安裝口；至少一個基片夾 具，每個基片夾具對應收容於一個安裝口内，每個基片 夾具對應設有一個馬達，該馬達用於驅動相應的基片夾 具翻轉。 [0008] 相較於先前技術，所述基片夾具藉由馬達控制相對於所 述轉盤本體翻轉，將先前技術中光學元件夾具之手動翻 轉結構實現可控電動化，避免由於先前技術中之手動翻 轉而導致之真空抽氣模組、加熱器、鑛膜鑛乾及充氣模 組等元件之重復使用，减小設備損耗，降低設備成本。 【實施方式】 [0009] 下面，結合附圖對本發明作進一步詳細說明。 [0010] 如第一圖及第二圖所示，本發明較佳實施例提供之鍍膜 用轉盤1包括：轉盤本體11 ;設置於該轉盤本體11上之至 少一個安裝口 12 ;至少一個基片夾具13，每個基片夾具 13分別對應收容於一個安裝口 12内；每個基片夾具13對 095100589 表單編號A0101 第5頁/共13頁 1003318310-0 1352741 100年08月Μ日核正替換百 應設有一個馬達15，該馬達15用於驅動相應之基片夾具 13翻轉。 [0011] 所述轉盤本體11用導熱性能良好之金屬圓盤製成，如銅 圓盤、鋁圓盤、鉑圓盤、鉛圓盤或鋅圓盤等。 [0012] 所述安裝口 12貫通轉盤本體11，其大小要求基片夾具13 於所述安裝口 12内翻轉時不與轉盤本體11碰撞，可爲圓 形、正方形、長方形或其他軸線對稱形狀。 [0013] 所述基片夾具13用於夾持基片2，可采用螺絲擰固、卡扣 或鎖固等方式夾持。該基片夾具13可爲圓形框體、部分 圓弧框體、正方形框體、長方形框體、棱形框體、 ”形框體、“ L”形框體或“ I ”形體等。本實施例中 ，基片夾具13爲長方形框體。 [0014] 所述基片夾具13與轉盤本體11之間藉由轉軸14連接。所 述馬達15套設於轉軸14上，用於驅動該轉軸14旋轉。本 實施例中，轉軸14設於基片夾具13之軸線位置。轉軸14 還可設置於使基片夾具13與轉盤本體11之間達成軸連接 之其他位置，如基片夾具13之一端，此時，安裝口 12應 具有足够基片夾具13及基片2翻轉之空間。 [0015] 另外，該轉轴14一端與所述基片夾具13可旋轉連接，另 一端與轉盤本體11固接；或者該轉轴14一端與所述基片 夹具13固接，另一端與轉盤本體11可旋轉連接；或者該 轉軸14兩端均與所述基片夾具13及轉盤本體11可旋轉連 接。 [0016] 所述馬達15可間接控制基片夾具13翻轉。該馬達15由一 095100589 表單編號Α0101 第6頁/共13頁 1003318310-0 1352741 100年08月31日修正替換頁 個電池模組（圖未示）驅動，而無須另外電源，此外於 該電池模組之開關上裝設一個無線裝置，利用遙控等方 式來控制電池模組工作，從而可實現對基片夾具13翻轉 之自動控制。 [0017] 請同時參閱第二圖及第三圖，使用上述鍍膜用轉盤1之鍍 膜機100包括：一個真空容器9 ;設置於該真空容器9内之 至少一個鍍靶3 ;及與鍍靶3相對設置之鍍膜用轉盤1。本 圖僅對一個夾持於基片夾具13上之基片2進行兩面鍍膜予 以表示。 [0018] 所述鍍膜機100還包括：位於真空容器9底部之真空抽氣 模組4，用於使真空容器9内形成真空環境；帶動鍍膜用 轉盤1句速旋轉之旋轉桿7 ;位於真空容器9底部之加熱器 6，用於加熱基片2 ;充氣模組5，用於向真空容器9内充 氣。 [0019] 當使用上述鍍膜機100對基片2進行兩面鍍膜時，具體進 行下述操作。 [0020] 步驟一，將複數具有相對之第一表面21及第二表面22之 基片2分別用基片夾具13夾持固定，此時，所述基片2之 第一表面21與鍍靶（即陰極）3相對。 [0021] 步驟二，將真空容器9密封，用真空抽氣模組4對真空容 器9抽氣，使真空容器9内部形成真空環境；鍍膜用轉盤1 在旋轉桿7之作用下，於水平面内以旋轉桿7爲轴心勻速 旋轉；用加熱器6對基片2加熱。 [0022] 步驟三，待所有基片2被均勻加熱後，給鍍靶3接上電壓 095100589 表單編號A0101 第7頁/共13頁 1003318310-0 1352741 100年08月31日修正替換g 使其放出電子8，該電子8沈積於所述基片2之第一表面21 上形成鍍膜。 [0023] 步驟四，對鍍靶3斷電，遙控馬達15驅動基片夾具13翻轉 。從而，所述基片2之第二表面22與鍍靶3相對。 [0024] 步驟五，給鍍靶3接上電壓使其放出電子8，該電子8沈積 於所述基片2之第二表面22上形成鍍膜。 [0025] 步驟六，關掉電源，由充氣模組5充氣進真空容器9内， 冷却後取出兩相對表面21 ' 22均鍍有鍍膜之基片2。 [0026] 由上述操作步驟可以看出，使用本實施例提供之鍍臈用 轉盤1之鍍膜機1〇〇對基片2進行兩面鍍膜時，藉由馬達15 控制基片夹具13帶動基片2進行翻轉，只需要進行抽真空 、加熱、一面鑛膜、翻轉基片夾具13、另一面鑛膜、冷 却、破真空及取出光學元件等步驟，即可實現基片2之兩 面鍍膜，劣略先前技術中重復之冷却、破真空、抽真空 及加熱等步驟，可减小設備重復損耗，降低設備使用成 本，同時，可降低製程時間，提高生産效率。 [0027] 綜上所述，本發明確已符合發明專利之要件，遂依法提 出專利申請。惟，以上所述者僅為本發明之較佳實施例 ，自不能以此限制本案之申請專利範圍。舉凡熟悉本案 技藝之人士援依本案之創作精神所作之等效修飾或變化 ，皆應涵蓋於以下申請專利範圍内。 [0028] 【圖式簡單說明】 第一圖是本發明較佳實施例之鍍膜用轉盤之示意圖。 [0029] 095100589 第二圖是本發明較佳實施例之鍍膜用轉盤局部之拆解示 表單編號Α0101 第8 1/乒13苜 乐 δ 貝/升 id 貝 1003318310-0 1352741 100年08月31日修正替換頁 意圖。 [0030] 第三圖是本發明較佳實施例之鍍膜機之示意圖。 【主要元件符號說明】 [0031] 鍍膜用轉盤：1 [0032] 轉盤本體：11 [0033] 安裝口 ： 1 2 [0034] 基片夾具：13 [0035] 轉軸：14 [0036] 馬達：15 [0037] 基片：2 [0038] 第一表面：21 [0039] 第二表面：22 [0040] 鍍靶：3 [0041] 真空抽氣模組：4 [0042] 充氣模組：5 [0043] 加熱器：6 [0044] 旋轉桿：7 [0045] 電子：8 [0046] 真空容器：9 [0047] 鍍膜機：100 095100589 表單編號A0101 第9頁/共13頁 1003318310-01352741 Aug. 31, 2014 Revision ^^ Page 6. Description of the Invention: [Technical Field of the Invention] [0001] The present invention relates to a forged film apparatus, and more particularly to a rotary disk and a coating machine for a forged film. [Prior Art] [0002] Generally, various optical lenses (Lens) such as cameras, digital cameras, camera lens modules, etc., optical components such as filters, are required to avoid incident light passing through each component. The optical energy loss caused by the reflection of the incident light requires plating an anti-reflection film on both sides of each optical lens, or plating a film on one side of the filter to filter out a certain section of light (such as an infrared filter, a UV filter). The light film is coated on the other side, and the anti-reflection film is coated on the other side, and the optical film is used to increase the anti-reflection performance of the optical element to prevent loss of light energy. [0003] The coating method of the optical film is mostly performed by thermal evaporation or sputtering. When optical films are coated on both sides of the optical component, the coating process usually includes: vacuuming, heating, coating, cooling, vacuum breaking, manual flipping of the optical component fixture, vacuuming, heating, another surface film, cooling, The steps of breaking the vacuum, taking out the optical components, and the like. The coating process includes two vacuuming, heating, bonding film, cooling and vacuum breaking process, which take up a considerable amount of process time, so how to avoid the process repeating and reduce the processing time, mass production of the two-sided coating components It is especially important. In view of the above, it is necessary to provide a turntable and a coater for coating a film that is automatically turned over. SUMMARY OF THE INVENTION 095100589 Form No. A0101 Page 4 / Total 13 Page 1003318310-0 1352741 'August 31, 1100 Nuclear Replacement Page [0005] Hereinafter, a turntable and a coating for automatic flip coating will be described by way of examples. machine. [0006] A turntable for coating, comprising: a turntable body; at least one mounting mouth disposed on the turntable body; at least one substrate clamp, each substrate clamp correspondingly received in a mounting opening, each substrate fixture corresponding to A motor is provided for driving the corresponding substrate holder to flip. And a coating machine comprising: a vacuum container; at least one plating target disposed in the vacuum container; and a plating turntable disposed opposite the plating target. The coating turntable has: a turntable body; at least one mounting mouth disposed on the turntable body; at least one substrate clamp, each substrate clamp is correspondingly received in a mounting opening, and each substrate fixture is correspondingly disposed A motor for driving the corresponding substrate holder to flip. [0008] Compared with the prior art, the substrate fixture is controlled to be flipped relative to the turntable body by motor control, and the manual flip structure of the prior art optical component clamp is controllable and electrically controlled, avoiding manual operation due to the prior art. Repeated use of components such as vacuum pumping modules, heaters, mineral film ore and air-filled modules caused by overturning, reducing equipment loss and reducing equipment costs. Embodiments [0009] Hereinafter, the present invention will be further described in detail with reference to the accompanying drawings. [0010] As shown in the first and second figures, the turntable 1 for coating of a preferred embodiment of the present invention includes: a turntable body 11; at least one mounting opening 12 disposed on the turntable body 11; at least one substrate The clamps 13, each of the substrate clamps 13 are respectively accommodated in one of the mounting openings 12; each of the substrate clamps 13 is 095100589, the form number A0101, the fifth page, the total of 13 pages, 1003318310-0 1352741, the first day of August 100, the replacement of the core Hundreds should be provided with a motor 15 for driving the corresponding substrate holder 13 to flip. [0011] The turntable body 11 is made of a metal disc having good thermal conductivity, such as a copper disc, an aluminum disc, a platinum disc, a lead disc or a zinc disc. [0012] The mounting port 12 passes through the turntable body 11 and has a size that does not collide with the turntable body 11 when the substrate clamp 13 is flipped inside the mounting opening 12, and may be circular, square, rectangular or other axis-symmetrical shape. [0013] The substrate holder 13 is used for clamping the substrate 2, and can be clamped by screwing, snapping or locking. The substrate holder 13 may be a circular frame body, a partial arc frame body, a square frame body, a rectangular frame body, a prismatic frame body, a "shaped frame body, an "L" shaped frame body, or an "I" shaped body. In the embodiment, the substrate holder 13 is a rectangular frame. [0014] The substrate holder 13 and the turntable body 11 are connected by a rotating shaft 14. The motor 15 is sleeved on the rotating shaft 14 for driving the rotating shaft. 14 Rotation. In this embodiment, the rotating shaft 14 is disposed at the axial position of the substrate holder 13. The rotating shaft 14 can also be disposed at other positions for achieving the axial connection between the substrate holder 13 and the rotating body 11, such as the substrate holder 13. At one end, at this time, the mounting opening 12 should have sufficient space for the substrate holder 13 and the substrate 2 to be inverted. [0015] In addition, one end of the rotating shaft 14 is rotatably connected to the substrate holder 13, and the other end is connected to the rotating body 11. Or one end of the rotating shaft 14 is fixedly connected to the substrate holder 13 and the other end is rotatably connected to the rotating body 11; or both ends of the rotating shaft 14 are rotatably connected to the substrate holder 13 and the rotating body 11 [0016] The motor 15 can indirectly control the flip of the substrate holder 13. The horse Up to 15 by 095100589 Form No. 1010101 Page 6/Total 13 Page 1003318310-0 1352741 Correction of the replacement page of the battery module (not shown) on August 31, 31, without additional power supply, in addition to the battery module A wireless device is installed on the switch, and the battery module is controlled by a remote control, etc., thereby realizing automatic control of the flipping of the substrate fixture 13. [0017] Please refer to the second and third figures at the same time, using the above coating The coater 100 for the turntable 1 includes: a vacuum container 9; at least one plating target 3 disposed in the vacuum container 9; and a plating turntable 1 disposed opposite the plating target 3. This figure is only one for the base. The substrate 2 on the sheet holder 13 is coated on both sides. [0018] The coating machine 100 further includes: a vacuum pumping module 4 at the bottom of the vacuum container 9 for forming a vacuum environment in the vacuum container 9; The rotating plate 7 for rotating the coating rotary disk 1; the heater 6 at the bottom of the vacuum container 9 for heating the substrate 2; and the inflation module 5 for inflating the inside of the vacuum container 9. [0019] When the above coating is used Machine 100 to substrate [2] When performing double-sided coating, the following operations are specifically performed. [0020] Step 1, the plurality of substrates 2 having the first surface 21 and the second surface 22 are respectively clamped and fixed by the substrate holder 13, and at this time, The first surface 21 of the substrate 2 is opposed to the plating target (ie, the cathode) 3. [0021] Step 2, the vacuum container 9 is sealed, and the vacuum container 9 is evacuated by the vacuum pumping module 4 to make the inside of the vacuum container 9. The vacuum environment is formed; the coating turntable 1 is rotated at a constant speed in the horizontal plane by the rotating rod 7 under the action of the rotating rod 7, and the substrate 2 is heated by the heater 6. [0022] Step 3, after all the substrates 2 are uniformly heated, the plating target 3 is connected to the voltage 095100589. Form No. A0101 Page 7 / Total 13 pages 1003318310-0 1352741 Correction of the replacement of g for the release of g on August 31, 100 The electrons 8 are deposited on the first surface 21 of the substrate 2 to form a plating film. [0023] In step four, the plating target 3 is powered off, and the remote control motor 15 drives the substrate holder 13 to be turned over. Thereby, the second surface 22 of the substrate 2 is opposed to the plating target 3. [0024] Step 5, the plating target 3 is connected to a voltage to discharge the electrons 8, and the electrons 8 are deposited on the second surface 22 of the substrate 2 to form a plating film. [0025] Step 6: Turn off the power supply, inflate the vacuum module 5 into the vacuum container 9, and after cooling, take out the two opposite surfaces 21'22 and plate the coated substrate 2. [0026] It can be seen from the above operation steps that when the substrate 2 is coated on both sides by using the coating machine 1 of the iridium-plating turntable 1 provided in this embodiment, the substrate holder 13 drives the substrate 2 by the motor 15 to drive the substrate 2 To perform the inversion, only the steps of vacuuming, heating, one side of the mineral film, flipping the substrate holder 13, the other side of the mineral film, cooling, vacuuming, and taking out the optical components are required to realize the coating on both sides of the substrate 2, which is inferior to the previous Repeated steps of cooling, vacuuming, vacuuming and heating in the technology can reduce the equipment's repeated loss and reduce the equipment cost. At the same time, the process time can be reduced and the production efficiency can be improved. [0027] In summary, the present invention has indeed met the requirements of the invention patent, and the patent application is filed according to law. However, the above description is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application of the present invention. Equivalent modifications or changes made by those who are familiar with the skill of the case in accordance with the creative spirit of this case shall be covered by the following patent applications. BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] Fig. 1 is a schematic view showing a turntable for coating a film according to a preferred embodiment of the present invention. [0029] 095100589 The second figure is a partial disassembly of the turntable for coating film according to a preferred embodiment of the present invention. Form No. 1010101 No. 8 1/Ping 13 Le Le δ Bei/Leng id Bei 1003318310-0 1352741 100 August 31 Fix the replacement page intent. [0030] The third figure is a schematic view of a coating machine in accordance with a preferred embodiment of the present invention. [Main component symbol description] [0031] Coating turntable: 1 [0032] Turntable body: 11 [0033] Mounting port: 1 2 [0034] Substrate fixture: 13 [0035] Shaft: 14 [0036] Motor: 15 [ 0037] Substrate: 2 [0038] First surface: 21 [0039] Second surface: 22 [0040] Plating target: 3 [0041] Vacuum evacuation module: 4 [0042] Inflatable module: 5 [0043] Heater: 6 [0044] Rotating rod: 7 [0045] Electronics: 8 [0046] Vacuum container: 9 [0047] Coating machine: 100 095100589 Form number A0101 Page 9 / Total 13 pages 1003318310-0