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TWI319599B - Resist stripping device and method of resist stripping - Google Patents

Resist stripping device and method of resist stripping

Info

Publication number
TWI319599B
TWI319599B TW95132141A TW95132141A TWI319599B TW I319599 B TWI319599 B TW I319599B TW 95132141 A TW95132141 A TW 95132141A TW 95132141 A TW95132141 A TW 95132141A TW I319599 B TWI319599 B TW I319599B
Authority
TW
Taiwan
Prior art keywords
resist stripping
stripping device
resist
stripping
Prior art date
Application number
TW95132141A
Other languages
Chinese (zh)
Other versions
TW200811932A (en
Inventor
Chien Chih Chen
Chao Wen Shih
Original Assignee
Phoenix Prec Technology Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Phoenix Prec Technology Corp filed Critical Phoenix Prec Technology Corp
Priority to TW95132141A priority Critical patent/TWI319599B/en
Publication of TW200811932A publication Critical patent/TW200811932A/en
Application granted granted Critical
Publication of TWI319599B publication Critical patent/TWI319599B/en

Links

TW95132141A 2006-08-31 2006-08-31 Resist stripping device and method of resist stripping TWI319599B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95132141A TWI319599B (en) 2006-08-31 2006-08-31 Resist stripping device and method of resist stripping

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95132141A TWI319599B (en) 2006-08-31 2006-08-31 Resist stripping device and method of resist stripping

Publications (2)

Publication Number Publication Date
TW200811932A TW200811932A (en) 2008-03-01
TWI319599B true TWI319599B (en) 2010-01-11

Family

ID=44767893

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95132141A TWI319599B (en) 2006-08-31 2006-08-31 Resist stripping device and method of resist stripping

Country Status (1)

Country Link
TW (1) TWI319599B (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI864846B (en) * 2023-06-27 2024-12-01 友達光電股份有限公司 Deposition layer removal method

Also Published As

Publication number Publication date
TW200811932A (en) 2008-03-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees