1247855 九、發明說明： 【發明所屬之技術領域】 關真空旋轉式機 本發明係有關一種真空裝置，更特別有 械引入裝置， 【先前技術】 真空系統係為提供】 常需 二丁延仃，舉凡半$ 體、光電、平面顯不|§以及表面鍵膜處理等產 T度杲，都是>J 用到真空系統及裝置的幾個例子。 空系統下工作的裝置。一般來說，為了因應特殊的:二， 要高度真空的環境’使製程於真空中進行，舉凡半謂 糸雷、早而翩杀哭以菸志而雜胳各…^ . 由於真空系統係與外界隔絕的系統，為了操作真空系統 内的各種元件，需要某些特殊裝置才能達成，機械引入 (mechanical feedthrough)則為達成上述目的的一種裝置。機 械引入可分為以下幾種··旋轉引入（rotaiT feedthr〇ugh)、線 性引入（linear feedthrough)與流體引入（fiuid feedthr〇ugh) 等。 第1圖為真空系統之習用機械引入裝置該裝置包 含：一外殼（housing) 110、複數假磁極片（p〇ie piece)120、 複數個磁鐵（111&81^1:)130、磁性流體（£6〇*〇!111丨(1)140及一軸 (shaft) 150等。該裝置100構造複雜且價格昂貴，若運用 在功能要求相對簡單的系統下，則顯得大材小用。此外， 由於該裝置具有磁性流體，因此不適合施加偏壓（bias)，在 需要施加偏壓的環境下，則有不適使用之憾。 1247855 為此’本發明提出一種直办 ± 決上述問題。 一知轉式機械引入裝置’以解 【發明内容】 本發明係提供一猶直& #紅， f 、二轉式機械引入裝置，由於該_ =造相對簡單’其造價亦相對低廉，可應用於僅需1 施加偏壓的環境。 ⑶^運用在需要 為達上述目的，本發明接仲 如供—種真空旋轉式機械引入穿 置，配置於真空腔體的外壁上，該褒置包含：一本體、： ^、複數個軸承、複數個旋轉動力用〇型環及複數個固定 =環等。該本體内部係為—貫通的圓柱型中空結構， 於其中包含該軸，可使續產Λ Μ 以軸猎由兩端的該等軸承轉動。該 專疋轉動力用0型環配置於該軸與該本體間，提供氣密 用，該等固定用〇型環則配置於該本體的凸緣上，使該裝 置藉由該凸緣固定於真空腔壁上時，可提供氣密用。該襞 置的。玄軸兩h，可各自與其他裝置連結，以使真空腔體外 部的動力’藉由該轴的轉動，順利地傳遞至真空腔體内部。 根據本發明之真空旋轉式機械引入裝置，由於其構造相 對簡單且其零件易於獲得，因此其造價相對低廉可運用 於要求相對簡單的系統中。此外，若設置一絕緣體於該襞 置的凸緣（flange)上，可產生絕緣效果，因此適用於須施加 偏壓的環境下。 本發明之真空旋轉式機械引入裝置，其構造簡單且零件 便宜，目匕该裝置之造價才目對低廉；χ其零件可就近獲得， 1247855 =:::=求此外，一置做改良 和優點能更明1247855 IX. Description of the invention: [Technical field of the invention] Vacuum rotary rotary machine The present invention relates to a vacuum device, and more particularly to a mechanical introduction device. [Prior Art] A vacuum system is provided. $ Body, Photoelectric, Planar Display | § and surface bond film processing, etc., are all examples of vacuum systems and devices used by J. A device that operates under an empty system. Generally speaking, in order to respond to special: Second, to a highly vacuum environment, the process is carried out in a vacuum, and it is said that the half is said to be thunder, and the early killing of the crying is caused by the smoke and the miscellaneous... ^. Because of the vacuum system Externally isolated systems require special equipment to operate the various components within the vacuum system, and mechanical feedthrough is a means of achieving the above objectives. Mechanical introduction can be divided into the following types: rotation introduction (rotaiT feedthr〇ugh), linear introduction (through feed) and fluid introduction (fiuid feedthr〇ugh). Figure 1 is a conventional mechanical introduction device for a vacuum system. The device comprises: a housing 110, a plurality of pseudo-magnetic pole pieces 120, a plurality of magnets (111 & 81^1:) 130, and a magnetic fluid ( £6〇*〇!111丨(1)140 and a shaft 150, etc. The device 100 is complicated in construction and expensive, and is used in a system with relatively simple functional requirements, and is therefore overused. The magnetic fluid is therefore unsuitable for applying a bias, and in the environment where a bias voltage is required, it is unfortunate. 1247855 For this reason, the present invention proposes a direct operation to solve the above problem. The invention provides a straightening &#红, f, two-turn mechanical introduction device, because the _ = relatively simple 'its cost is relatively low, can be applied to only 1 application bias The environment of the pressure. (3) ^ used in order to achieve the above purpose, the present invention, such as a vacuum rotary mechanical introduction through, is disposed on the outer wall of the vacuum chamber, the device comprises: a body,: ^, Multiple The bearing body and the plurality of rotary power use 〇-shaped ring and a plurality of fixed=rings, etc. The internal body of the body is a through-cylindrical hollow structure, and the shaft is included therein, so that the continuation of the Λ Μ The bearing is rotated. The special rotational force is disposed between the shaft and the body by a 0-ring, and is provided for airtightness. The fixing cymbal ring is disposed on the flange of the body, so that the device is When the flange is fixed on the wall of the vacuum chamber, it can be used for airtightness. The two sides of the vertical axis can be connected with other devices so that the power outside the vacuum chamber can be smoothly rotated by the shaft. The vacuum rotary mechanical introduction device according to the present invention is relatively inexpensive to manufacture in a relatively simple system because it is relatively simple in construction and easy to obtain parts thereof. The insulator can be insulated on the flange of the device and is therefore suitable for use in an environment where a bias voltage is to be applied. The vacuum rotary mechanical introduction device of the present invention is simple in construction and inexpensive in parts. Dagger cost of the apparatus of the mesh was low; [chi] components which can conveniently be obtained, seeking = 1247855 = ::: Further, a home improvements and advantages made clear
為了讓本發明之上述和其他目的、特徵、 ，下文將配合所附圖#，作詳細說明如下 【實施方式】 雖然本發明可表現為不同形式之實施例，但附圖所示者 及於下文中說明者係為本發明可之較佳實施例，並請了解 本文所揭不者係考量為本發明之一範 將本發明限制於圖示及/或所描述之特:實且 :本文的_，將盡可能在所有附圖中採用相同的參考 標號，以標不相同或類似的元件。 第2圖為根據本發明之真空旋轉式機械引入裝置之立 體爆炸圖，第3圖則為根據本發明之真空旋轉式機械引入 裝置之剖面圖。參考第2與3圖’真空旋轉式機械引入裝 置200包含：-本體21〇、一軸22〇、一第一轴承、一 第二軸承232 ' —第一軸用c型扣環241、 型=環242、-第一孔用c型扣環251、一第二孔用c型 扣環252、一固定用〇型環28〇及複數個旋轉動力用。型 環290。該本冑21〇為中空的圓筒狀外型，其外表面具有 一圓形的凸緣（flange)21h明顯地，於該凸緣211兩側將 該本體210外部區分為一大氣段212與一真空段213。該 本體210内部係為一‘空心結構，用以容納該軸22〇，可概 略分為三段，由該本體210之該大氣段212至該真空段 213，計有本體内大氣段261、本體内中間段262及本體内 1247855 真空段263。該等三段的每一段皆為圓柱形，且具有共同 軸心但内徑不一，該本體内中間段262的内徑為最小。 該軸220為圓柱狀外形，可概略分為五段，由一端至另 一端計有大氣段軸221、第一軸承段軸222、中間段軸223、 第二軸承段軸224及真空段軸225。該等五段軸22卜222、 223、224與225皆有共同軸心但外徑不一，該中間段軸223 的外徑最大且略小於該本體内中間段262的内徑。該第一 軸承段軸222的外徑小於該本體内大氣段26丨的内徑；該 第二軸承段軸224的外徑小於該本體内真空段263的内 徑。该中間段軸223的長度等於本體内中間段262的長度； 該第一軸承段軸222的長度大於該本體内大氣段261的長 度’该第二軸承段軸224的長度大於該本體内真空段263 的長度。該大氣段軸221與該真空段軸225的表面，分別 具有沿軸向延伸整段的長條形第一凹槽228與第二凹槽 229 〇 該軸220配置於該本體210内，並使該大氣段軸221伸 出該本體内大氣段261之外，且該中間段軸223的兩端與 3本體内中間段262的兩端切齊。此外，該等旋轉動力用 〇型環290配置於本體内中間段262上的複數個環形淺薄 導槽（未示出）與該中間段軸223之間，並可於該等旋轉 動力用Ο型環290上塗抹真空膏，以使該裝置2〇〇配置於 真空系統時，能夠碟保真空腔内的真空度。該第_輛承尸 軸222與該本體内大氣段261間，配置該第一轴承231， 其内徑略大於該第一軸承段轴222的外徑，而其外徑則略 小於該本體内大氣段261的内徑，可因此套在該第一轴表 1247855 t軸3的周圍而安置於該本體内大氣段261 a。此外， 並於5亥第一軸承段軸222上配置該第一軸用c型扣環 241 ’使其位於該第一軸承段軸222上的一環形淺薄導槽内 厂、出）此外’還配置該第一孔用c型扣環25 1，使其 位於該本體内大氣段261内壁上的-環形淺薄導槽内（未 不出）。該第一軸用c型扣環241與該第一孔用c型扣環 251的作用，在於固定該第一轴承23ι，使其無法沿該轴 220移動。於該第二軸承段軸224與該本體内真空段 間：具有该第二軸承232、f亥第二軸用c型扣環Μ與該 第：孔用c型扣環252，其配置方式與作用，均類似於該 第轴承231、該第一軸用C型扣環241與該第-孔用C 型扣環251的配置方式與作用，在此不再贅述。 述之4真空疑轉式機械引入裝置2〇〇可配置於一真 玉I體上，藉由該凸緣211上的複數個孔291(見第4圖）， 可固疋於真空腔體上。面向該真空段213的該凸緣a。上， 有一環形的淺薄導槽（未示出），其内有該固定用〇型環 28〇胃’當該裝置200藉該凸緣211固定於真空腔的外壁時， 可提供良好的氣密，使得外界的氣體分子，不會藉由該凸The above and other objects, features, and advantages of the present invention will be described in detail below with reference to the accompanying drawings. FIG. 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . The invention is described as a preferred embodiment of the invention, and it is to be understood that the invention is not limited to the scope of the invention and the invention is limited to the illustrated and/or described. The same reference numerals will be used throughout the drawings to identify different or similar elements. Fig. 2 is a perspective exploded view of a vacuum rotary mechanical introduction device according to the present invention, and Fig. 3 is a sectional view of a vacuum rotary mechanical introduction device according to the present invention. Referring to Figures 2 and 3, the vacuum rotary mechanical introduction device 200 includes: - a body 21 〇, a shaft 22 〇, a first bearing, a second bearing 232 ' - a first shaft with a c-shaped buckle 241, a type = a ring 242. The first hole is formed by a c-type buckle 251, a second hole c-type buckle 252, a fixed 〇-shaped ring 28〇, and a plurality of rotary powers. Type ring 290. The 胄21〇 is a hollow cylindrical outer shape, and the outer surface thereof has a circular flange 21h. The outer portion of the body 210 is divided into an atmospheric section 212 and the outer side of the flange 211. A vacuum section 213. The inside of the body 210 is a hollow structure for accommodating the shaft 22, which can be roughly divided into three sections. From the atmospheric section 212 of the body 210 to the vacuum section 213, the body inner section 261 and the body are included. The inner middle section 262 and the body 1248785 vacuum section 263. Each of the three segments is cylindrical and has a common axis but a different inner diameter, and the inner diameter of the intermediate portion 262 is minimized. The shaft 220 has a cylindrical shape and can be roughly divided into five sections. The one end to the other end includes an atmospheric section shaft 221, a first bearing section shaft 222, an intermediate section shaft 223, a second bearing section shaft 224, and a vacuum section shaft 225. . The five-section shafts 22, 222, 223, 224, and 225 have a common axis but different outer diameters, and the outer diameter of the intermediate shaft 223 is the largest and slightly smaller than the inner diameter of the intermediate portion 262 in the body. The outer diameter of the first bearing segment shaft 222 is smaller than the inner diameter of the inner portion 26 丨 of the body; the outer diameter of the second bearing segment shaft 224 is smaller than the inner diameter of the vacuum section 263 of the body. The length of the intermediate section shaft 223 is equal to the length of the intermediate section 262 of the body; the length of the first bearing section shaft 222 is greater than the length of the atmospheric section 261 of the body. The length of the second bearing section shaft 224 is greater than the vacuum section of the body. The length of 263. The surface of the atmospheric section shaft 221 and the vacuum section shaft 225 respectively have an elongated first groove 228 and a second groove 229 extending in the axial direction, and the shaft 220 is disposed in the body 210, and The atmospheric section shaft 221 extends beyond the atmospheric section 261 of the body, and both ends of the intermediate section shaft 223 are aligned with both ends of the intermediate portion 262 of the body. In addition, the rotary power 〇-ring 290 is disposed between the plurality of annular shallow guide grooves (not shown) on the intermediate section 262 of the body and the intermediate section shaft 223, and can be used for the rotary power type A vacuum paste is applied to the ring 290 to ensure the vacuum in the vacuum chamber when the device 2 is disposed in the vacuum system. The first bearing 231 is disposed between the first carrier shaft 222 and the body inner portion 261, and has an inner diameter slightly larger than an outer diameter of the first bearing segment shaft 222, and an outer diameter slightly smaller than the inner body. The inner diameter of the atmospheric section 261 can thus be placed around the first shaft table 124785 t-axis 3 and placed in the body inner air section 261a. In addition, the first shaft c-type clasp 241' is disposed on the first bearing segment shaft 222 of the 5th first bearing segment shaft 222 so as to be located in a circular shallow guide groove on the first bearing segment shaft 222. The first hole is configured with a c-shaped retaining ring 25 1 so as to be located in a ring-shaped shallow thin guide groove on the inner wall of the inner air portion 261 of the body (not shown). The first shaft c-type clasp 241 and the first hole c-type clasp 251 function to fix the first bearing 23ι so as not to move along the shaft 220. Between the second bearing segment shaft 224 and the vacuum section of the body: the second bearing 232, the second shaft c-type buckle Μ and the first hole c-type buckle 252, the arrangement manner and The action is similar to the arrangement and function of the first bearing 231, the first shaft C-type buckle 241 and the first-hole C-type buckle 251, and will not be described herein. The vacuum-inducing mechanical introduction device 2 can be disposed on a body of a jade, and a plurality of holes 291 (see FIG. 4) on the flange 211 can be fixed to the vacuum chamber. The flange a facing the vacuum section 213. Above, there is an annular shallow thin guide groove (not shown) having the fixed 〇-shaped ring 28 in the stomach. When the device 200 is fixed to the outer wall of the vacuum chamber by the flange 211, it can provide good airtightness. So that the external gas molecules will not be caused by the convex
緣2U與真空腔外壁的間隙，進入真空腔内，目而達到隔 絕的效果D 裝置於真空腔外壁上的該真空旋轉式機械引入裝置 2〇〇 ’可藉由該軸220上的該第一凹槽228與外界連動。位 於該本體21〇内的該等軸承231與232 ’則使該軸22〇可 自由地繞軸轉動，動力可因此傳遞至真空腔内，藉由位於 真空腔内的該第二凹槽229,帶動腔内的其他裝置，達到 !247855 方疋轉式機械引入的目的。 根據本發明i述實施例t真空旋轉式機械引入裝置，其 中的該等0形環28G、携係使用氟橡膠，其擁有良好的财 熱、耐酸與耐溶劑等特性。其餘元件如該本體21()、該轴 220、該等軸承231與232以及該等c型扣環川、⑷、 251與252等’皆以不鏽鋼製成。此外，若於該凸緣2ΐι ，真空腔外壁間置入絕緣體51〇(見第5圖），使該裝置2〇〇 裝設於真空腔外壁上時，能與真空腔體絕緣，可因此達到 施加偏壓於真空系統的㈣。本發明上述實施例的該凸緣 ，雖以圓形做揭示，但本發明所屬技術領域中具有通常 σ識者應瞭解，其可以為方形杏並 裝置200之功能。_方^其他形狀，而不會影響該 根據本發明上述實施例之真空旋轉式機械引人裝置，很 1地看出，其零件易於獲得，且價格便宜、組裝簡單。 置★可:艮據本發明上述實施例之真空旋轉式機械引入裝 置，可自仃組裝且採購成本低廉； 會因待料而致停工；設備之交貨㈣因：：易於獲仔’不 大的降低。 #之“期限因材料易於獲得而大 «本發明已以前述實施例揭示，然其並非用 毛月’任何本發明所屬技術領域中具有通常 疋本 脫離本發明之精神和範圍内，當可作各種 ’在不 因此本發明之俘，蘇門火 ，、修改。 為準。保hi視後附之中請專利範_界定者 明 【圖式簡單說 10 1247855 第1圖··為習用真空旋 第^ 械％入装置之剖示圖。 第2圖·為根據本發明之真外 體爆炸圖。 、"^疋轉式機械引入裝置之立 弟3圖·為根據本發 面圖 明之真空旋轉式 機械引入裝置之剖 第4圖··為根據本發明之真空旋 視圖。 疋得式機械引入裝置之前 弟5圖.為根據本發明直 <具二方疋轉式機械引入萝罢★ 面圖，該炎罟駐士凡私古介—μ 裝置之剖 喝我置I δ又於真空腔壁上， 緣用。 a者間有一絕緣體做絕 【主 要元件符號說明】 100 機械引入裝置 110 外殼 120 磁極片 130 磁鐵 140 磁性流體 150 軸 201 真空旋轉式機械引入裝置 210 本體 211 凸緣 212 大氣段 213 真空段 220 轴 221 大氣段幸由 222 第一軸承段轴 223 中間段軸 224 第二軸承段軸 225 真空段軸 228 第一凹槽 229 第二凹槽 1247855 231 第一軸承 232 第二軸承 241 第一軸用C型扣環 242 第二軸用C型扣環 251 第一孔用C型扣環 252 第二孔用C型扣環 261 本體内大氣段 262 本體内中間段 263 本體内真空段 280 固定用0型環 290 旋轉動力用0型環 291 子L 510 絕緣體 12The gap between the edge 2U and the outer wall of the vacuum chamber enters the vacuum chamber to achieve the effect of isolation. The vacuum rotary mechanical introduction device 2' on the outer wall of the vacuum chamber can be the first on the shaft 220. The groove 228 is interlocked with the outside. The bearings 231 and 232' located in the body 21〇 enable the shaft 22 to be freely pivoted, and the power can be transmitted to the vacuum chamber by the second recess 229 located in the vacuum chamber. Drive the other devices in the chamber to achieve the purpose of the !247855 square-turn mechanical introduction. According to the embodiment of the present invention, the vacuum rotary mechanical introduction device, wherein the O-rings 28G and the fluororubbers are used, have good characteristics of heat, acid and solvent resistance. The remaining components such as the body 21 (), the shaft 220, the bearings 231 and 232, and the c-shaped buckles, (4), 251 and 252, etc. are all made of stainless steel. In addition, if the flange 2 is placed between the outer wall of the vacuum chamber and the insulator 51 is placed between the outer wall of the vacuum chamber (see Fig. 5), the device 2 can be insulated from the vacuum chamber when it is mounted on the outer wall of the vacuum chamber, thereby achieving Apply a bias voltage to the vacuum system (4). The flange of the above-described embodiment of the present invention is disclosed in the form of a circle, but it should be understood by those skilled in the art that it can be a square apricot and the function of the device 200. Other shapes without affecting the vacuum rotary mechanical inductive device according to the above-described embodiment of the present invention, it is apparent that the parts are easy to obtain, inexpensive, and simple to assemble. The vacuum rotary mechanical introduction device according to the above embodiment of the present invention can be self-assembled and has low procurement cost; it will be shut down due to waiting for delivery; the delivery of the device (4) due to: easy to get a little 'not big The reduction. The term "the term" is readily available because the material is readily available. The present invention has been disclosed in the foregoing embodiments, and it is not intended to be used in the technical scope of the present invention. Various 'in the absence of the invention of the captive, Sumen fire, and modification. Prevail. Bao hi see the attached patent patent _ define the person clearly [schematic simple statement 10 1247855 first figure · for the practice vacuum Fig. 2 is a diagram of the explosion of the true outer body according to the present invention. , "^ The dynasty of the mechanical introduction device of the turret type 3 is a vacuum according to the present invention Section 4 of the rotary mechanical introduction device is a vacuum rotation view according to the present invention. The prior art mechanical introduction device is shown in Fig. 5. In accordance with the present invention, it is introduced into the machine according to the present invention. In the face view, the sputum of the sect of the sect of the sect of the sect of the sect of the sputum, the sputum of the device, I set the δ and the wall of the vacuum chamber, and the edge is used. There is an insulator between the two. [Main component symbol description] 100 Mechanical introduction device 110 Housing 120 pole piece 130 magnet 140 Fluid 150 Axis 201 Vacuum rotary mechanical introduction device 210 Body 211 Flange 212 Atmospheric section 213 Vacuum section 220 Shaft 221 Atmospheric section Fortunately 222 First bearing section shaft 223 Intermediate section shaft 224 Second bearing section shaft 225 Vacuum section shaft 228 First groove 229 second groove 124785 231 first bearing 232 second bearing 241 C-ring for the first shaft 242 C-ring for the second shaft 251 C-ring for the second hole 252 for the second hole C-type buckle 261 The body's atmospheric section 262 The middle section of the body 263 The body vacuum section 280 Fixed 0-ring 290 Rotary power 0-ring 291 Sub-L 510 Insulator 12