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TW200622106A - Vacuum rotary feedthrough apparatus - Google Patents

Vacuum rotary feedthrough apparatus

Info

Publication number
TW200622106A
TW200622106A TW093141386A TW93141386A TW200622106A TW 200622106 A TW200622106 A TW 200622106A TW 093141386 A TW093141386 A TW 093141386A TW 93141386 A TW93141386 A TW 93141386A TW 200622106 A TW200622106 A TW 200622106A
Authority
TW
Taiwan
Prior art keywords
vacuum rotary
rotary feedthrough
feedthrough apparatus
vacuum
vacuum system
Prior art date
Application number
TW093141386A
Other languages
Chinese (zh)
Other versions
TWI247855B (en
Inventor
Ching-Fu Yang
Chun-Kue Fu
Original Assignee
Metal Ind Res & Dev Ct
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Metal Ind Res & Dev Ct filed Critical Metal Ind Res & Dev Ct
Priority to TW93141386A priority Critical patent/TWI247855B/en
Application granted granted Critical
Publication of TWI247855B publication Critical patent/TWI247855B/en
Publication of TW200622106A publication Critical patent/TW200622106A/en

Links

Landscapes

  • Rolling Contact Bearings (AREA)
  • Taps Or Cocks (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Drying Of Semiconductors (AREA)

Abstract

The present invention relates to an apparatus for rotary mechanical feedthrough in a vacuum system. The apparatus is effectively capable of preventing the leakage and thus provides a good vacuum. The power can be transmitted to the vacuum system fully by the apparatus.
TW93141386A 2004-12-30 2004-12-30 Vacuum rotary feedthrough apparatus TWI247855B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW93141386A TWI247855B (en) 2004-12-30 2004-12-30 Vacuum rotary feedthrough apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW93141386A TWI247855B (en) 2004-12-30 2004-12-30 Vacuum rotary feedthrough apparatus

Publications (2)

Publication Number Publication Date
TWI247855B TWI247855B (en) 2006-01-21
TW200622106A true TW200622106A (en) 2006-07-01

Family

ID=37400650

Family Applications (1)

Application Number Title Priority Date Filing Date
TW93141386A TWI247855B (en) 2004-12-30 2004-12-30 Vacuum rotary feedthrough apparatus

Country Status (1)

Country Link
TW (1) TWI247855B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI688720B (en) * 2018-11-02 2020-03-21 財團法人金屬工業研究發展中心 Mechanical feed-through device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI688720B (en) * 2018-11-02 2020-03-21 財團法人金屬工業研究發展中心 Mechanical feed-through device

Also Published As

Publication number Publication date
TWI247855B (en) 2006-01-21

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Legal Events

Date Code Title Description
MK4A Expiration of patent term of an invention patent