TWD226540S - Hub with gas deflectors - Google Patents

Abstract

【Design Description】;Diagram 1 is a view of the hub with a gas deflector. ; The front view is a view of the hub with a gas deflector in perspective view 1. ;The rear view is the view of the hub with the gas deflector in perspective view 1. ; The left side view is a view of the hub with a gas deflector in perspective view 1. ; The right side view is the view of the hub with the gas deflector in the perspective view 1. ; Top view 1 is a view of the hub with a gas deflector in perspective view 1. ; The perspective view 2 is a view of the hub with the gas deflector of the perspective view 1 . ; The bottom view is the view of the hub with the gas deflector in the perspective view 1. ; Top view 2 is a view of the hub with a gas deflector in top view 1, in which section lines 10-10 and 11-11 indicate the cross-sections of section 1 and section 2. ; Cross-sectional view 1 is a top view 2 of a hub with a gas deflector. ; Cross-sectional view 2 is a top view of the hub with a gas deflector. The hub shown with a gas deflector is used in semiconductor processing equipment and is configured to deflect and/or direct gas or fluid flowing onto the hub. The hub with the gas deflector may be positioned within a processing chamber, load lock, or other wafer processing portion of a semiconductor processing tool. The hub contains four deflectors to which gas and/or fluid can flow. ;The applicant reserves the right to change any solid line or part thereof in any drawing accompanying the application to the subject of a design not claimed by changing the solid line or part thereof to a broken line (such as a dashed or dotted line). The applicant reserves the right to change any broken line or portion thereof in any drawing to be the subject of the claimed design by changing the broken line or portion thereof to a solid line. The Applicant also reserves the right to remove any broken lines or portions thereof, including the complete or partial removal of any dashed or dotted lines. Applicant also reserves the right to create additional views based on any views contained herein. ; It will be understood that, in order to assist observers in understanding the shapes of the entities depicted in the drawings, some of the drawings may contain "tangent edge" lines, which represent where two surfaces meet in a smooth manner, such as this Surfaces are tangent to each other where they meet. Tangent lines, which can appear as thin solid lines, do not represent actual visible line features and are provided for reference only. The applicant reserves the right to completely delete tangent lines from any drawing that includes tangent lines, and to import any tangent lines from any drawing in the corresponding view of a drawing that does not have tangent lines, and if The right where clarity requires the conversion of such tangent lines into solid lines (or the insertion of solid lines between closely spaced tangent lines to indicate sharply rounded edges).

Description

Hub with gas deflector

Perspective view 1 is a view of a hub with a gas deflector.

The front view is the perspective view of the hub with the gas deflector of FIG. 1 .

The rear view is a perspective view of the hub with the gas deflector in perspective view 1 .

The left side view is the perspective view of the hub with gas deflector in perspective view 1 .

The right side view is the perspective view of the hub with gas deflector in perspective view 1 .

Top view 1 is a view of the hub with gas deflector in perspective view 1 .

Perspective view 2 is a view of the hub with gas deflector in perspective view 1 .

The bottom view is the perspective view of the hub with gas deflector in perspective view 1 .

Top view 2 is a view of the hinge with the gas deflector of top view 1 , wherein the section lines 10 - 10 , 11 - 11 indicate the sections of sectional views 1 and 2 .

The sectional view 1 is a view of the hub with the gas deflector in the top view 2 .

Sectional Figure 2 is a view of the hub with the gas deflector from the top view 2 .

The illustrated hub with gas deflectors is used in semiconductor processing equipment and is configured to deflect and/or direct gas or fluid flowing onto the hub. Hubs with gas deflectors can be positioned on Within processing chambers, load locks, or other wafer processing portions of semiconductor processing tools. The hub contains four deflectors to which gas and/or fluid can flow.

Applicants reserve the right to alter any solid line or portion thereof in any of the drawings accompanying the application to the subject of an unclaimed design by altering the solid line or portion thereof to a broken line, such as a dashed or dotted line. Applicant reserves the right to alter any broken line or portion thereof in any drawing to be the subject of the claimed design by changing the broken line or portion thereof to a solid line. Applicant also reserves the right to delete any broken lines or parts thereof, including the complete or partial deletion of any dotted lines. Applicant also reserves the right to create additional views by anyone based on the views contained herein.

It should be understood that some of the drawings may contain "tangent edge" lines, which indicate where two surfaces meet in a smooth manner, such as the Surfaces are tangent to each other where they meet. Tangent lines, which may appear as thin solid lines, do not represent actual visible line features, but are provided for reference only. Applicants reserve the right to delete trim lines entirely from any of the drawings that include trim lines, and to import any trim lines from any of the drawings into corresponding views of drawings that do not, and if The right to convert such trimmed lines to solid lines (or to insert solid lines between closely spaced trimmed lines to indicate sharply rounded edges) for reasons of clarity.

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