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TWD226236S - 用於基板處理腔室的互鎖處理套件的支撐環 - Google Patents

用於基板處理腔室的互鎖處理套件的支撐環 Download PDF

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Publication number
TWD226236S
TWD226236S TW111304571F TW111304571F TWD226236S TW D226236 S TWD226236 S TW D226236S TW 111304571 F TW111304571 F TW 111304571F TW 111304571 F TW111304571 F TW 111304571F TW D226236 S TWD226236 S TW D226236S
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TW
Taiwan
Prior art keywords
substrate processing
support ring
processing chamber
process kit
interlocking process
Prior art date
Application number
TW111304571F
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English (en)
Inventor
薩希堤 納拉功達
強納森 賽門斯
黄昕暐
彼特 村岡
安德列亞斯 史密德
Original Assignee
美商應用材料股份有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by 美商應用材料股份有限公司 filed Critical 美商應用材料股份有限公司
Publication of TWD226236S publication Critical patent/TWD226236S/zh

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Abstract

【物品用途】;本設計所請求之用於基板處理腔室的互鎖處理套件的支撐環係用於基板製程。;【設計說明】;無

Description

用於基板處理腔室的互鎖處理套件的支撐環
本設計所請求之用於基板處理腔室的互鎖處理套件的支撐環係用於基板製程。
TW111304571F 2022-03-18 2022-09-14 用於基板處理腔室的互鎖處理套件的支撐環 TWD226236S (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29/831,297 USD1055006S1 (en) 2022-03-18 2022-03-18 Support ring for an interlocking process kit for a substrate processing chamber
US29/831,297 2022-03-18

Publications (1)

Publication Number Publication Date
TWD226236S true TWD226236S (zh) 2023-07-01

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ID=84900707

Family Applications (1)

Application Number Title Priority Date Filing Date
TW111304571F TWD226236S (zh) 2022-03-18 2022-09-14 用於基板處理腔室的互鎖處理套件的支撐環

Country Status (3)

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US (1) USD1055006S1 (zh)
JP (1) JP1734728S (zh)
TW (1) TWD226236S (zh)

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Also Published As

Publication number Publication date
USD1055006S1 (en) 2024-12-24
JP1734728S (ja) 2023-01-17

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