TWD198069S - 基板處理裝置用氣體供給噴嘴 - Google Patents
基板處理裝置用氣體供給噴嘴Info
- Publication number
- TWD198069S TWD198069S TW107306662F TW107306662F TWD198069S TW D198069 S TWD198069 S TW D198069S TW 107306662 F TW107306662 F TW 107306662F TW 107306662 F TW107306662 F TW 107306662F TW D198069 S TWD198069 S TW D198069S
- Authority
- TW
- Taiwan
- Prior art keywords
- gas supply
- substrate processing
- supply nozzle
- nozzle
- processing equipment
- Prior art date
Links
- 239000000758 substrate Substances 0.000 title abstract 4
- 238000000034 method Methods 0.000 abstract 1
- 235000012431 wafers Nutrition 0.000 abstract 1
Abstract
【物品用途】;本設計的物品是基板處理裝置用氣體供給噴嘴，為一種應用在處理晶圓的基板處理裝置的氣體供給噴嘴；本物品是連接於配置在基板處理裝置的處理室內的氣體供給噴嘴，用以將氣體導入到氣體供給噴嘴。另外，在本設計中，如「B-B部分放大圖」所示，形成階梯狀部分是用以插入噴嘴的部分。;【設計說明】;除了「俯視圖」、「仰視圖」及「A-A剖面圖」外，繪製在其他圖示中的細線，皆為用來表現立體表面的形狀。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JPD2018-15810F JP1624354S (zh) | 2018-07-19 | 2018-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TWD198069S true TWD198069S (zh) | 2019-06-11 |
Family
ID=65269366
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW107306662F TWD198069S (zh) | 2018-07-19 | 2018-11-12 | 基板處理裝置用氣體供給噴嘴 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | USD890572S1 (zh) |
| JP (1) | JP1624354S (zh) |
| TW (1) | TWD198069S (zh) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP1624352S (zh) * | 2018-07-19 | 2019-02-12 | ||
| JP1644261S (zh) * | 2019-03-20 | 2019-10-28 | ||
| USD967941S1 (en) * | 2020-04-28 | 2022-10-25 | Hypertherm, Inc. | Intensifier cylinder |
| JP1684258S (zh) * | 2020-07-27 | 2021-04-26 | ||
| JP1685215S (ja) * | 2020-08-18 | 2024-05-10 | 基板処理装置用ガス導入管 | |
| USD1003409S1 (en) * | 2021-04-07 | 2023-10-31 | No Limit Enterprises, Inc. | Coolant line |
| JP1731676S (zh) * | 2022-05-30 | 2022-12-08 | ||
| USD1064239S1 (en) * | 2022-08-18 | 2025-02-25 | Nanjing Maoxiyan E-Commerce Co., Ltd | Decorative pipe |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US45556A (en) * | 1864-12-20 | Petee oockee | ||
| US3484122A (en) * | 1968-01-12 | 1969-12-16 | Herman J Schellstede | Drill pipe protector and method of constructing the same |
| TWD124998S1 (zh) * | 2007-05-08 | 2008-09-21 | 東京威力科創股份有限公司 | 半導體製造用氣體供給管 |
| US20100264646A1 (en) * | 2009-04-16 | 2010-10-21 | Jean-Marc Follini | Structures for wire routing in wired drill pipe |
| CA140752S (en) * | 2011-01-20 | 2012-01-25 | Victaulic Co Of America | Pipe |
| USD675298S1 (en) * | 2012-03-26 | 2013-01-29 | Clayton Anthony Gridley | Water pipe assembly for pump training |
| KR102107324B1 (ko) * | 2015-11-30 | 2020-05-07 | 빅톨릭 컴패니 | 스프링클러 어댑터 및 파이프 플러그 |
| JP1563647S (zh) | 2016-01-29 | 2016-11-21 | ||
| JP1573205S (zh) * | 2016-08-29 | 2020-03-23 | ||
| JP1586728S (zh) * | 2017-02-10 | 2017-09-25 | ||
| USD873392S1 (en) * | 2017-08-31 | 2020-01-21 | Rotary Connections International Ltd. | Drill pipe |
| USD872843S1 (en) * | 2017-12-06 | 2020-01-14 | Michael Stoffa, Sr. | Valve attachment for a pipe |
-
2018
- 2018-07-19 JP JPD2018-15810F patent/JP1624354S/ja active Active
- 2018-11-12 TW TW107306662F patent/TWD198069S/zh unknown
- 2018-12-07 US US29/672,652 patent/USD890572S1/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| USD890572S1 (en) | 2020-07-21 |
| JP1624354S (zh) | 2019-02-12 |
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