TW478196B - Microvalve for controlling fluid flow - Google Patents

Abstract

A microvalve for controlling fluid flow includes a body portion having a least one opening formed therein, a shutter located adjacent to and substantially parallel with the body portion and having at least one opening formed therein, and a drive mechanism for causing the shutter to rotate with respect to the body portion so that the shutter is brought into and out of alignment with the opening of the body portion, wherein the microvalve is in a closed position and an open position, respectively. The drive mechanism of the microvalve further includes at least one first comb drive positioned adjacent the shutter and a second comb drive positioned adjacent each first comb drive. The first comb drive includes a member which is movable so as to engage and disengage the shutter and the second comb drive includes a member which is movable so as to deflect the first comb drive member, wherein deflection of the first comb drive member, causes the shutter to rotate a predetermined amount when the first comb drive member is engaged therewith. An alternative drive mechanism includes at least one actuator, a rotation gear hub located adjacent to and operatively connected to the actuator, and a rotation gear operatively connected to the rotation gear hub and the shutter, wherein the rotation gear hub is caused to rotate upon being driven by the actuator so that the rotation gear and the shutter are caused to rotate. Yet another alternative drive mechanism includes at least one comb drive for impacting a periphery of the shutter with a predetermined force so as to rotate the shutter a designated amount.

Description

478196 Printed by A7 _ B7____ of the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of the Invention (1) Technical Field The present invention relates to a micro valve that controls fluid flow. More specifically, it relates to a shutter used in such a micro valve. Related, it can be rotated between open and closed positions via one or more comb drives. BACKGROUND OF THE INVENTION Microvalves are currently used to control the flow of fluids, and several designs are of the type known as a micro-motor system or "MEMS". Obviously, it is better to drive such microvalves using heat or static electricity. In both cases, the slit or other type of opening is placed in an open or closed position, and the structure is preferably a shutter type to allow and prevent fluid from flowing out of it. Typically, the lateral movement of a conventional microvalve shutter is linear. The lateral movement of the shutter can also be non-linear (ie, rotating), such as the independent provisional patent application 6 0/1 4 6, 6 2 5, named "Microvalve For Controlling Fluid Flow ", the assignee of the present invention Owned, incorporated herein by reference. In this way, the amount of movement is minimized by maximizing the number of openings. To avoid continuous power to this microvalve, it is best to use a latching system to keep the shutter in place. One example of a latch is disclosed in U.S. Patent No. 5,837,394 to Schumm, Jr., which is provided with a detent or ratchet to help the sliding portion of the semiconductor microactuator be fixed in an open or closed position. It is known from this patent that independent actuators are used to move the sliding portion in two directions. In this method, the actuator must overcome the resistance of the pawl / ratchet to move the sliding portion to the desired position. Obviously, This requires a large force from the actuator. This paper size is in accordance with China National Standard (CNS) A4 (210 X 297 cm). 4-(Please read the precautions on the back before filling this page) 478196 A7 __ B7 V. Invention Explanation (2) Therefore, the actuator requires a large amount of power. In addition, the patent of / 34 is a semiconductor valve whose electrical action is a thermal reaction. It includes and includes a cantilever deformation element which is deformed by the resistance heating. It can be further understood that although the microvalves disclosed in this article can be used in any environment, one of the special applications is in the field of metal-air batteries. Metal-air batteries have decisive advantages over their various electrochemical cells, such as typical Alkaline (zinc / manganese dioxide) or lithium fluids. Metal-air batteries allow gaseous agents, such as oxygen or air, which do not need to be stored in the battery like solid substrates. Gaseous agents can pass through the battery case Holes or holes into the battery. Therefore, metal-air batteries have a higher energy density (wattage per unit mass), resulting in higher power output and lighter weight. It is particularly useful in applications that require lightweight batteries, It can provide more energy in the same packaging volume or the same energy in smaller packages. Metal-air batteries also have environmental Complete and non-leakage occurs. Metal-air batteries are composed of one or more electrochemical cells. Each battery typically includes a metal anode and an air cathode, and has an insulator to electrically connect the two. Insulation, electrolyte exists in anode, cathode and insulator. Metal anode is usually composed of particulate metal powder, such as, but not limited to, zinc, aluminum or magnesium, mixed with aqueous electrolyte, such as potassium hydroxide, and gelled into Paste. The air cathode is a catalyzed structure, which is designed to reduce oxygen. It is typically composed of activated carbon, a binder, and a catalyst. It is formed into a thin sheet with a metal current collector. Air cathodes are often combined with water-repellent polymerization Materials, such as polytetrafluoroethylene or polypropylene glycol, directly add yin ---- j ------ 0 (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

w T a H «1 -ϋ I ϋ ..1 II ϋ H ϋ ϋ n · 1 n ϋ H ϋ ϋ I n ϋ I ϋ ϋ I n H ϋ ϋ I This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -5- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478196 A7 _ B7 V. Description of the invention (3) In the pole piece and / or made into a coextensive film. Water-repellent polymer prevents electrolyte from leaking out of the battery through the cathode. In a metal-air battery, oxygen, through a series of reactions, interacts with the metal in the battery to generate an electric current. For example, in a zinc-air battery, oxygen generates a charge / discharge reaction at the cathode (positive electrode): I / 2O2 + H2O + 2 0 Hr 2 0 Η ~ At the same time, the charge / discharge reaction that occurs at the anode is (negative electrode) ) Z π + 2 0 H + Zn〇 + H2〇 + 2e Therefore, the total reaction of a zinc-air battery is: ZΠ + 1/202 ΠΓ2Π0 Typically, metal-air batteries use air in the surrounding environment, which contains about 2 1% of oxygen is used as a battery. The ambient air enters through the air holes in the enclosure. Inside the enclosure, the oxygen in the surrounding air reacts with the battery. The oxygen in the air is exhausted and leaves the enclosure. Therefore, the surrounding air enters or is sucked into the casing, which is enough to obtain the required power output. However, allowing the surrounding air to flow freely into the metal-air battery creates several problems, which can reduce the efficiency of the metal-air battery 'or cause the battery ϋ nn > ϋ ϋ ϋ n 11 ϋ I · ΜΜ ΜΜ ΜΜ ΜΜ WΜ! W κν · n ϋ nn ϋ H · 1_— I ^, n · ϋ n ϋ an ϋ β— nn ϋ ϋ ϋ · ϋ ϋ 1 H 1 · — ^ 1 1— ί ^ 1 H ϋ 〆V system (please read first Note on the back, please fill in this page again) This paper size is applicable to China National Standard (CNS) A4 specification (210 X 297 mm) -6-478196 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economy ) Early failure. First of all, the ambient air entering the electrochemical cell will continue to react with the anode, regardless of whether the battery provides power to the load. Therefore, unless air is removed when the battery is not supplying power to the load, the battery's capacity will continue to decrease. Another problem with allowing the surrounding air to flow freely as a substrate is that it is difficult to maintain proper humidity in the battery. The equilibrium vapor pressure of metal-air batteries is derived from balanced relative humidity, which is typically about 50-60%. If the humidity of the surrounding environment is greater than the equilibrium relative humidity of the metal-air battery, the metal-air battery will absorb the moisture in the air passing through the cathode, and the battery will fail due to a condition called flooding, which will also cause The battery is leaking. If the ambient humidity is less than the equilibrium relative humidity of the metal-air battery, the metal-air battery will release water vapor from the electrolyte through the air cathode, and will fail due to drying. In addition, impurities in the surrounding air, such as carbon dioxide, can also reduce the capacity of the battery. Therefore, in order to make the operation of metal-air batteries more efficient and longer-lived, the inflow of ambient air should be controlled so that the air is allowed to enter the battery only when the battery provides power to the load. There are several reasons for designing an air exchange control system for metal-air batteries to control ambient air in and out of metal-air batteries: (1) to prevent the battery from reacting continuously; (2) to prevent the humidity of the battery from changing; and (3) when the battery Prevents carbon dioxide from entering the battery when no power is being supplied to the load. Some designs, for example, use a mechanism that is physically operated by the user, a valve or hole cover is attached to the switch that opens the electrical device, so when the switch is moved, the cover also opens. See, for example, U.S. Patent 2,468,43, issued to Derksen on April 26, 1949; April, 1990 This paper is sized to the Chinese National Standard (CNS) A4 (210 X 297 mm) -II — — — — — — — — — — — · III l · III «— — — — — — I— I _ (Please read the notes on the back before filling out this page) r 1 ϋ I n I _ 478196 A7 B7 V. Description of the Invention (5) US Patent 4,9 1 3, 9 8 3 issued to Cheiky on the 3rd, named `` Metal-Air Battery Power Supply; and, HR Espig & DF Porter, Power Sources 4: Research and Development in Non-Mechanical Electrical Power Sources, Proceedings of the 8th International Symposium held at Brighton, September 1972 (Oriel Press), page 3 42. However, in these designs, the air exchange system needs to be operated by the operator, and the electrical device needs a switch that is compatible with the battery air exchange system. The automatic air exchange system is contained in the battery and does not require user operation. However, it is typically a parasitic source of severe energy capacity of the battery, which will also shorten the battery life. One such design is disclosed in U.S. Patent No. 4,17,3,2, 7 issued to Ma thews et al. On December 4, 1979, entitled "Metal-Air Battery Power Having Electrically Operated Air Access Vent Cover", which uses A valve cover, combined with an electrically operated bimetal actuator, is used to cover the air entry hole when the battery is not in use. Its action is to apply a current to the bi-metallic actuator to heat the bi-metal, and to bend or lower the system by different coefficients of thermal expansion. However, electrical actuators are a substantial source of parasitic consumption of metal-air batteries and can reduce battery life. In addition to this, U.S. Patent No. 5,30,4,3,1, issued to Brooke Schumm, Jr. on April 19, 1994, was named "

Fluid Depolarized Electrochemical Battery with Automatic Valve " US Patent 5,499,569 issued to Brooke Schumm, Jr on September 12, 995, entitled "Fluid Depolarized Battery (Please read the precautions on the back before filling out this page) · · ： ------------ II ---- I · The paper size printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -8- 478196 A7 B7 V. Description of the invention (6) with Improved Automatic Valve; US Patent 5,5 4 1, 0 16 granted to Brooke Schumm, Jr on July 30, 1996, named "Electrical Appliance with Automatic Valve Especially for Fluid Depolarized Electrochemical Battery "" Revealed a thermally-reactive semiconductor microactuator and placed at the fluid inlet "Allowing ambient air to enter when the battery supplies power to the load. In this design, several microwatts of power are required to heat the resistor Element to open the thermal reaction valve 'and keep the valve open during battery use. Therefore, as described earlier in / 3 9 4, Its design also continuously consumes the battery, which will reduce the life of the battery. Therefore, we need a micro valve, especially a micro valve for the air exchange system of metal-air batteries, which does not require a latching system and can also operate During this period, the parasitic consumption of the battery is minimized. I also have a need to miniaturize the microvalves used in metal-air batteries so that they can be arranged in standard battery packaging and maximize the size of the battery that can provide power. We also need such microvalves to be mass-produced to reduce costs, and most batteries can use them as air exchange systems. SUMMARY OF THE INVENTION In a first embodiment of the present invention, a method for controlling fluid flow is disclosed. A microvalve includes: a body portion having at least one hole formed thereon; a shutter adjacent to the body portion and substantially parallel to the body portion; at least one hole formed thereon; and a driving mechanism for causing the shutter to be relatively The size of the paper is adapted to the Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back first) (Fill in this page again.) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs I Xinϋ — 1 · I ϋ βϋ I 一 > i stupid hn 1 mKmg i tmm§ mamarn i ^ i ϋ ϋ · ϋ e ^ i I ϋ · 1_1 mmmmme I in Mu aal ϋ = 口 矣 -9- 478196 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (7) Move the shutter to align or stagger the hole with the hole of the body to make the micro The valves are in the open and closed positions, respectively. The driving mechanism of the microvalve further includes at least one first comb driver adjacent to the shutter, and a second comb driver adjacent to each of the first comb drivers. The first comb drive includes a movable member for engaging or disengaging with the shutter, and the second comb drive includes a movable member for offsetting the first comb drive member, wherein when the first comb When the shape driver member is engaged with the shutter, the displacement of the first comb driver member causes the shutter to rotate a predetermined amount. Another driving mechanism includes at least one actuator, a rotating gear shaft is adjacent to the actuator and connected to the actuator, and a rotating gear is connected to the shutter and the rotating gear shaft is operated, wherein the rotating gear shaft is driven by the actuator to rotate, Therefore, the rotation gear and the shutter are also rotated. There is another driving mechanism, including at least one comb driver, which strikes the periphery of the shutter with a predetermined force to rotate the shutter by a specified amount. In a second embodiment of the present invention, a fluid-breathing voltage battery is disclosed, which includes a container, a volt battery is disposed in the container, and a fluid parent exchange system. The fluid exchange system further includes a micro valve having a first state and a second state, wherein the micro valve is disposed in the container so that the micro valve is adapted to allow fluid to enter the battery when in the first state, and when in the second state The fluid is substantially prevented from flowing into the battery, and a controller is electrically connected to the microvalve, where the controller is adapted to initiate a change in the state of the microvalve. The micro-valve also includes a body portion having at least one hole formed therein; a shutter adjacent to and substantially parallel to the body portion, and first and second comb drivers for causing the shutter to rotate relative to the body portion to enable the shutter Align or stagger with the holes in the body. (Please read the precautions on the back before filling in this page) ·! This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ^ OJa nnn I n ϋ III ϋ I ϋ ϋ I ϋ ϋ ϋ n ϋ nn · ϋ ϋ ϋ n · ϋ I nn I ϋ · -10- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478196 A7 _ B7 V. Description of the invention (8) The drawings are simply explained. The scope of the patent is the conclusion, and I specifically point out and seek the subject matter of the present invention, but I believe that the present invention can be better understood from the following description in conjunction with the accompanying drawings: FIG. Top view of the micro valve, where the shutter is in the closed position, and the drive mechanism is not engaged with it; FIG. 2 is a top view of the micro valve shown in FIG. 1, where the shutter is in the open position, and the drive mechanism is engaged with it; 3 is a top view of the microvalve depicted in FIGS. 1 and 2, where the shutter is rotated by a predetermined amount by the driving mechanism; FIG. 4 is a top view of the microvalve depicted in FIGS. The mechanism is released from the shutter after the shutter is rotated; FIG. 5 is depicted in FIGS. 1 to 4 Fig. 6 is a top view of the micro valve, the driving mechanism of which is returned to the original position; Fig. 6 is a top view of the micro valve depicted in Figs. 1 to 5, where the shutter is rotated to the open position by the driving mechanism; Fig. 7 is Fig. 1 is a side view of the micro valve with the shutter in the closed position; Fig. 8 is a side view of the micro valve with the shutter in the open position; Fig. 9 is a micro view of the invention Top view of the second embodiment of the valve, with the shutter part opened; FIG. 10 is an enlarged top view of the microvalve part depicted in FIG. 9, showing that this paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -11-. V ----------- r --- ^ --------- ^ I ^ _wl (Please read the notes on the back before filling in this Page) 478196 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (9) Its gear system; Figure 11 is a side view of a second embodiment of the microvalve depicted in Figures 9 and 10 Figure 12 is a top view of a third embodiment of the microvalve of the present invention, with the shutter in the closed position; Figure 13 is a cross-sectional view of a metal-air battery, including At least one micro-valve of the present invention for controlling the air flowing into the cell; FIG. 14 is a metal depicted in the FIG. 13 - is a top view of an air battery. Component table 10 Micro valve 12 Shutter 14 Body part 18 Hole in body part 16 Hole in shutter 19 Support member 16 Small hole in shutter 17 Drive mechanism 2 4 Shaft 2 6 Main round part 2 8 Hole 2 0 First comb Actuator 25 First comb drive member 3 0 Arrow of first member moving direction This paper size applies to China National Standard (CNS) A4 (210 x 297 mm) -12- • nn · ϋ II— n ϋ in nn I n I nnn mj mi an I】, I nmnnnnn I ^^^ 1 n &V; (Please read the precautions on the back before filling out this page) kill — —- 478196 Printed by A7, Consumers ’Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs _B7_V. Description of the invention (10) 2 2 Second comb drive 2 7 Second comb drive member 3 2 Arrow of moving direction of the second member 3 4 Stabilizer 2 1 gr 〇und finger 2 3 Fixed finger Object 29 Elastic cross member 4 4 Bracket 4 5 Shaft cover 4 6 Bulge 4 7 Bulge 15 Small hole in shutter 100 Microvalve 1 1 2 Shutter 114 Body portion 117 Drive mechanism 12 4 Shaft 113 Ring portion 115 Spoke 119 Arc hole 1 2 6 Center section 128 Center hole 133 Round section 135 Round The size of the paper is subject to the Chinese National Standard (CNS) A4 (210 X 297 mm) -13-• in ϋ _1 tMm ί ϋ, I Μ ·· Μ ·· 雷 \ Please read the precautions on the back first (Fill in this page) nn ϋ ϋ _ 478196 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Invention Description (118 12 0 12 2 13 6 13 8 1 4〇14 1 14 5 13 0 2 0 0 2 12 2 14 18 Ben 2 4 5 2 4 7 2 1 6 2 18 2 2 0 2 2 4 2 2 2 2 2 1 2 2 3 2 2 5 2 2 7 A7 _B7 11) Hole in the body part First comb drive Second comb Driver rotation gear shaft tooth rotation gear holder shaft cover small hole on the shutter micro valve shutter body hole protrusion convex body hole shutter comb drive shaft second comb drive gr und fingers Fixed finger members (please read the precautions on the back before filling this page) * Order --------- Line 丨 This paper size applies to China National Standard (CNS) A4 (210 X 297) (Centi) -14- 478196 A7 _B7 V. Description of the invention (12) 2 3 1 Arrows in the direction of component movement 229 Elastic beam 231 Elastic beam 7 5 Fluid-breathing volt battery 7 9 Container 78 volt battery 7 6 Micro valve 7 8 Controller 8 2 Air path 8 7 Valve seat (please read the precautions on the back before filling out this page) • _____ Consumption by employees of the Intellectual Property Bureau of the Ministry of Economic Affairs Cooperative printed 1 1 4 Top cover 8 8 Water repellent layer 8 6 Metal top cover 7 7 Second microvalve 8 4 Opening hole 9 4 Metal bottom cover 9 2 Opening 9 6 Valve seat 1 1 5 Bottom cover 9 8 Water-repellent layer 8 5 connecting line 8 9 connecting line 9 1 connecting line 9 3 connecting line-order --------- line! This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -15- 478196 A7 B7 V. Description of the invention (13) 10 8 Air cathode 110 Metal cathode 113 Insulator invention Detailed description of the preferred implementation of the invention Examples include an electrostatically driven M EMS microvalve 'designed to control fluid flow. In this application, the term "electrostatic drive" means that the drive mechanism is derived from a fixed charge generated by an electrostatic potential between two surfaces. This is different from "thermally driven" microvalves, which use a resistive element to provide the thermal energy needed to drive the valve. This resistive element is a parasitic drain in the battery ’or requires another power source to drive the valve. The magnetic or inductive system uses the connection in the loop to buy current to generate an external magnetic field, which then generates magnetic force. However, the electrostatic valve uses the charge in the battery to drive the valve, so the parasitic consumption of the battery is far less than that of a thermal or magnetic valve. In the preferred embodiment, the microvalve is designed to consume power only during the transition period, i.e. during the change from the open state to the closed state, and vice versa. More specifically, it can be seen from the micro valve 10 of Figs. 1 to 8 that the shutter 12 is adjacent to and substantially parallel to the body portion 14, and at least one hole 18 is formed in the body portion 14. The shutter 12 is formed with one or more holes 16 corresponding to the holes 18 of the body. As can be seen from the microvalve 10 of Figs. 1 to 6, the shutter 12 may include a support member 19 which crosses the hole 16 so as to divide it into a substantially symmetrical portion. The shutter 12 also includes a plurality of small holes 15. When the shutter 12 is in the closed position, it allows a predetermined amount of leakage to flow through the shutter 12 as discussed further herein (see Figures 1-6). This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling out this page) · !! Printed by the Employees' Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs

I: H, H ϋ nn ϋ 1 ϋ ϋ nnnnnn —i I n 1 nn ϋ ϋ ϋ n ϋ I 478196 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Explanation of the invention (14) Further view from the figure The micro valve 10 also includes a driving mechanism 17 that rotates the shutter 12 with respect to the main body portion 14 so as to turn the shutter hole 16 to align with the hole 18 of the main body portion 14 or rotate away from the hole 1 g. , So that the micro valve 10 is in the open position and the closed position, respectively. It should be understood that the rotation of the shutter 12 includes the movement of the shutter 12 around the axis 2 4 clockwise or counterclockwise. As shown in Figures 1 and 7, 'The shutter 12 is in the closed position (that is, the holes 16 of the shutter 12 are staggered from the holes 18 of the main body 14 to prevent the fluid from flowing substantially), which must be clockwise or counterclockwise. Turn the hour hand approximately 180. To place it in the open position depicted in Figures 6 and 8. Next, the shutter 1 2 must continue to rotate 1 8 0 in the same direction (or opposite direction). To return to the closed position. The shape of the shutter 12 is preferably substantially circular, and includes a main circular portion 26 and a hole 2 8 (see FIGS. 7 and 8) located approximately at the center point, where the shutter 12 is rotated about an axis 24. Although the shutter 1 2 shown in the figure is a circular structure, it must be understood that as long as the shutter hole 16 can be aligned with the hole 1 8 in the main body portion 14 when in the open position, it is not aligned with the hole 1 when in the closed position. 8 Any shape aligned can be used. In this way, the shutter 1 2 need only be shifted by a shortest distance to obtain a larger entire valve hole. When the power required to drive the microvalve 10 can be reduced to a level that can be provided by electrostatic drive technology, the use of electrostatic drive technology is allowed. It should be understood that other shutter 12 structures, including modifications to this structure, and the number and type of holes in it, will be discussed further in this article. It should be understood that the driving mechanism 17 preferably includes at least one first comb drive 20 located adjacent to the shutter 12 and having a movable member. The paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297) Mm) • n ϋ ϋ nnnnnn ϋ ϋ I * n 1 _1 nnn ϋ J ″ · I nn · 1 ni amemm I ^, n-(Please read the notes on the back before filling this page) IIII. 478196 A7 V. Description of the invention (15) 25 so as to be able to frictionally engage and disengage from the periphery of the shutter 2 (see the front 30 in FIG. 14). It should be noted that, in FIGS. 2 and 3, the first comb-shaped driver member 25 is frictionally engaged with the shutter 2 and is disengaged frictionally in FIGS. The driving mechanism 17 also includes a second comb driver, and its position is adjacent to each first comb driver 20. The comb driver 22 also includes a device member 2 5 with a substantially vertical head 3 2) causing the first comb to act as the first Comb drive composition The first comb drive, the Intellectual Property Bureau of the Ministry of Economic Affairs, the employee ’s consumer cooperative, the brakes, a certain amount of affinity, move the first comb rotation (that is, against the angle of the shutter 1 2) 5 and shutter drive member. Due to the amount of rotation of the first and second comb drive clockwise or clockwise, its range can be seen, the phase member of 2 5 2 7 'is preferably positioned straight with the first comb drive, its (See Figure 3-5 for the offset of the arrow-shaped driver member 25. It should be understood that when the member 25 is frictionally engaged with the shutter 12 (see the offset of the actuator member 25, the shutter 12 is turned one and the first The two comb-shaped drive members 25 and 27 can be pushed or pulled with the biasing member 25 to cause the shutter 12 to be clockwise in the desired direction). The first comb-shaped drive member 25 can be seen first. Comb drive member 2 5 can be offset by 1 or 2 degrees The second comb-shaped driver member 27 is positioned opposite to the first comb-shaped member, and when the first comb-shaped driver member 12 is frictionally engaged (see FIGS. 2 and 3), the second comb-shaped member 27 is shifted. The relative position of the second comb-shaped driver member 2 7 and the first comb-shaped driver member 25 can also be the second comb-shaped driver member 2 7 when the first comb-shaped driver member 25 and the shutter 12 are frictionally disengaged. It is offset. Due to the length of the second comb drive member 27, it is better to configure a stabilizer 3 4 so that the offset occurs in the stabilizer 3 4 (please read the precautions on the back before filling this page) Icon ^ 1111111 I — — — — — — — — — — — — — — — — — — — — — — This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -18- Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau ’s Consumer Cooperatives 478196 A7 B7 V. Description of the invention (16) One end close to the first comb drive member 25. Although conventional drive mechanisms such as thermal, magnetic, or piezoelectric can also be used, the drive The comb drives 20 and 22 of the mechanism 17 are electrostatically set. More specifically, each of the first and second comb drives 20 and 22 also includes a plurality of suspended ground fingers 2 1 and a plurality of fixed fingers 2 3. When a potential is applied between the two and an electrostatic force is generated, the ground finger 21 is pulled toward the fixed finger 23. As can be seen from the figure, 'the first and second comb drivers 2 0 and 22 are connected The directions of the members 25 and 27 are substantially parallel to the directions of the grund fingers 21, so they also move in the directions of the arrows 30 and 32. An elastic cross member 29 is connected to the members 25 and 27, and it is fixed so as to suspend the first and second comb drives 20 and 22. In this way, the members 25 and 27 and the ground fingers 21 can be moved back and forth without any friction. In the present application, "elastic beam" means a mechanical structure 'which can provide a spring-like restoring force to the entire system through displacement. An important factor for properly driving the shutter 12 is that when the first comb drive member 25 is frictionally disengaged (or retracted) from the shutter 12 (see FIG. 4), it is to be held offset by the second comb drive member 27. Otherwise, the shutter 1 2 will be turned back to its original position. It should be understood that once the first comb drive member 25 is frictionally disengaged (see FIG. 5), the second comb drive member 27 pulls the first comb drive member 25 back to its non-offset position so that This cycle can continue until the shutter 12 is rotated to the desired position relative to the main body. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) _ 19 _ n — ^ 1 ϋ ϋ ϋ ϋ ϋ -· An t · ϋ · ϋ I nnn ϋ · ϋ _1 I γ 1 1_1- 1_1 * ι · 1 · ϋ * ϋ (Please read the precautions on the back before filling this page) -Line 丨. 478196 Ministry of Economic Affairs Intellectual Property Printed by the Consumer Cooperative of the Bureau A7 B7 V. Description of the invention (17) As can be seen from Figures 1 to 6, the driving mechanism 17 preferably includes a pair of first comb drives 20, and is located adjacent to the shutter 12 Opposite side. In this way, the rotation of the shutter 12 is easier to control. Therefore, it is preferable that all of the first comb driver members 25 are moved substantially synchronously so as to frictionally engage or disengage with the shutter 12. Similarly, the second comb drive member 27 is also preferably moved substantially synchronously so as to cause the first comb drive member 25 connected to it to be simultaneously shifted (in the same direction) or not shifted. In order to enable the shutter 12 to rotate about the shaft 24 with minimum friction, it can be seen from FIGS. 7 and 8 that the shaft 2 4 includes a bracket 4 4. More specifically, the center hole 2 8 of the shutter 12 is sleeved on the bracket 4 4 and fixed by a shaft cover 4 5. Therefore, when the shutter 12 is rotated around it, the bracket 4 4 remains still. In addition, a pair of projections 4 6 and 4 7 are provided on the shutter 12, which is also used to restrict the airflow between the shutter 12 and the main body 14. It should be understood that the protrusions 4 6 extend from the lower surface of the shutter 12 and are located at the edge of the shutter 12, and the protrusions 4 7 extend from the lower surface of the shutter 12 and are located around the shutter portion 16 in different ways. In the case of leakage from the body portion hole 18 is allowed. As mentioned earlier, the shutter 12 (preferably made of polysilicon) preferably has a plurality of small holes 15. When the shutter 12 is in the closed position, a predetermined amount of airflow is allowed to pass through the shutter 12. The hole 15 has a dual purpose, which can be used to provide an acid (such as hydrofluoric acid) and therefore release the initial oxide layer between the shutter 12 and the body portion 14 (preferably made of silicon), which is a conventional technique . In this way, the oxide can be released in a more uniform manner than from only the sides. Therefore, the structure and size of the shutter holes 15 are designed to maximize the dual functions of bleed and uniform oxide release. It must also be understood that changing the protrusions 4 6 and I ϋ 1_1 n mmmmM i · — n in n iBBai ϋ n In I 0 tmmw n ϋ n §_1 I ϋ V .V · a · ^ I · aa ··· II nn 1 1 I— n 1 § §1 · ϋ _1 ϋ 1 nnn —m ϋ n -1 · -— -ϊ I side i ^ (Please read the precautions on the back before filling this page) This paper size applies to China Standard (CNS) A4 specification (210 X 297 mm) -20- 478196 A7 B7 V. Description of the invention (18) 4 7 The leakage flow can also be controlled, so that the periphery of the shutter 12 or the shutter hole 16 is only partially Leakage, for example in a curved section. (Please read the precautions on the back before filling out this page.) From Figure 1-6, you can understand that during operation, the microvalve 10 is electrostatically actuated between the first (closed) position and the second (open) position. At the beginning, the electrostatic force generated between the g r oo n d fingers 21 and the fixed fingers 23 in the first comb driver 20 causes the member 25 to frictionally engage with the shutter 12. Thereafter, the electrostatic force generated between the ground fingers 21 and the fixed fingers 23 in the second comb driver 22 causes the member 27 to cause the first comb driver member 25 to shift to clockwise Or turn the shutter 1 2 counterclockwise — both the amount. After this incremental rotation of the shutter 12, the electrostatic force in the first comb drive 20 is cut off, so that the ground finger 2 1 returns to its original position, and the component 2 5 is retracted or removed from the shutter 1 2 Disengage frictionally. Then, the electrostatic force in the second comb driver 22 is cut off, so that the ground fingers 21 and the member 27 are returned to the original position, and the first comb driver member 25 is returned to the non-offset position. Position, if necessary, at this time, prepare another incremental rotation cycle. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs The second embodiment of the microvalve of the present invention is indicated by reference number 100, as shown in Fig. 9-11. It can be seen from the figure that the structure of the micro valve 1 00 is similar to that of the micro valve 10, and also includes the shutter 1 12, which is adjacent to and substantially parallel to the main body portion 1 1 4 and the shutter 1 12 and the main body portion 1 1 4 At least one hole is formed in the periphery of each. The microvalve 100 also includes a driving mechanism 1 1 7 ', which will be discussed in more detail below. The shutter 1 12 is rotated relative to the main body portion 1 1 4 so that the shutter hole is aligned or staggered with the hole of the main body 1 1 4. In this way, the micro valve 1 00 is in the open position and closed, respectively. This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) jTT-478196 A7 V. Description of the invention (19). As discussed for the microvalve 10, the rotation of the shutter 1 12 travels about the axis 1 2 4. Although the shape of the shutter 1 12 can be the shutter 12 described above, another design is depicted in FIGS. 9 and 11. As can be seen from the figure, the shutter 1 1 2 is preferably substantially circular, and includes a ring portion 1 1 3 defining its periphery. A plurality of intersecting members or spokes 1 1 5 extend across the inner diameter of the annular portion 1 1 3, and the adjacent spokes 1 1 5 and a portion of the annular portion 1 1 3 define an arcuate hole 1 1 9. The shutter 1 1 2 also includes a central portion 1 2 6, which has a hole 1 2 8 at its center point, and the shutter 1 1 2 rotates around an axis 1 2 4 in the hole. It can be seen from the figure that the circular portion located in the arcuate hole i 1 9, wherein the circular portion 1 3 3 is a solid 'circular portion 1 3 5 is an opening. In this way, when the circular portion 1 3 5 is aligned with the corresponding hole 1 1 8 in the body portion 1 1 4 'the shutter 1 1 2 is in the open position, and when the circular portion 1 3 3 is in the body portion hole 1 1 8 Alignment is in the closed position. To further depict the relationship between the circular portions 1 3 3 and 1 3 5 and the body portion holes 1 1 8, FIG. 9 shows that the shutters 1 12 are in a half-open position. It must be understood that this shutter 1 12 structure requires less rotation (approximately 60 degrees) than shutter 12 to change the position (from open to closed, and vice versa). Of course, the number and size of the circular sections 1 3 3 and 1 3 5 should be the same as those of the main body holes 1 8; Different from the drive mechanism 17 of the micro valve 10, the drive mechanism 11 of the micro valve 100 is a self-locking, gear-type design. According to this design, the drive mechanism 1 1 7 includes the first and second comb drives 1 2 0 and 1 2 2 (preferably an electrostatic design), and their positions can be plural (please read the note on the back first) Please fill in this page for matters) · ----- 丨 丨 Order --------- line 丨 * 丨 丨 丨 Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper applies Chinese national standards (CNS) ) A4 size (210 X 297 mm) -22- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478196 A7 B7___ V. Description of the invention (20) Rotating gear shaft 1 3 6 with teeth 1 3 6 interface. More specifically, the manner in which the first and second comb drives 120 and 122 are interacting with the rotating gear shaft 136 is similar to what Ernest J. Garcia and Jeffery J. Sniegowski of Sandia National Laboratories famously called " Surface Micromachined Microengine "report. By interfacing with the rotating gear shaft 1 3 6 in this way, the first and second comb drives 1 2 0 and 1 2 2 cause the rotating gear shaft 1 3 6 Rotate (clockwise or counterclockwise, as shown by arrow 1 34). Same as comb drives 20 and 22, each comb drive 1 2 0 and 1 2 2 includes a plurality of floating ground fingers Object and a plurality of fixed fingers, wherein when a potential is applied between the two to generate an electrostatic force, the ground finger is pulled toward the fixed finger. In addition, the first and second comb drives 1 A truss is arranged on 20 and 12, and the direction of the truss is substantially parallel to the direction of the grundund fingers. In this way, the truss is interposed with the rotating gear shaft 1 3 6 and the arrow 1 3 4 Direction of movement. Elastic cross beams are also connected to the trusses and fixed to allow suspension Comb drivers 1 2 0 and 1 2 2 (see Fig. 9). As shown in Figs. 9 and 10, the gear shaft 1 3 6 passes through the teeth 1 3 8 and the shutter 1 1 2 at least partially on the peripheral edge of a plurality of teeth 1 4 2 directly or indirectly (via one or more intermediate rotating gears 1 4 0). In this way, 'when the rotating gear shaft 1 3 6 is driven by the comb drives 1 2 0 and 1 2 2', the shutter is caused 1 1 2 rotation. It should be understood that the intermediate rotation gear 1 4 0 acts as a torque converter, thereby generating a torque that more easily drives the shutter 1 1 2. From Figure 1 1 you can understand 'Shutter 1 1 2 and Figures 7 and 8 The paper size of the shutter is applicable to the Chinese National Standard (CNS) A4 specification (21G X 297 public love) --- (Please read the precautions on the back before filling out this page) 唓. 丨 丨 一 δι ϋ · ϋ ϋ n ϋ ϋ I n ϋι ϋ I n ί 1 · -1 ^ 1 m ϋ nn · ϋ · ϋ nn I n ί ϋ —ϋ ϋ · 478196 A7 B7 V. Description of the invention (21) 1 2 Same, it is around the axis 1 2 4 Rotate. More specifically, the hole 1 2 8 of the shutter 1 12 is placed on the bracket 1 4 4 and is held in position by a shaft cover 1 4 3. Therefore, when the shutter 1 12 is rotated around it, the bracket 4 4 remains Quiet In addition, a protrusion 1 4 5 is arranged around each of the circular portions 1 3 3. Its function is to limit the distance between the shutter 1 1 2 and the body portion 1 1 4 when the shutter 1 12 is in the closed position. airflow. The circular portion 1 3 3 of the shutter 1 12 also preferably has a plurality of small holes 1 3 0 (see FIG. 9), similar to the holes 15 of the shutter 12. Similarly, the size and structure of these holes 130 are also designed to provide a predetermined leakage and allow the acid to release the dual function of the oxide layer between the shutter 12 and the body portion 14 to maximize. During operation, the microvalve 1 0 0 is electrostatically actuated between the first (closed) position and the second (open) position via the ground finger 1 in the comb drives 1 2 0 and 1 2 2 The electrostatic force generated between 21 and the fixed fingers 1 2 3 causes the respective trusses to cause the rotating gear shaft 1 3 6 to rotate, and the force is sufficient to rotate the intermediate gear 1 4 0. Then, the rotation of the intermediate gear 1 40 causes the shutter 1 12 to rotate clockwise (or counterclockwise) around the axis 1 2 4 to the open position. The micro valve 1 00 is electrostatically actuated from the open position to the closed position through the ground fingers 1 2 1 and the fixed fingers 1 2 3 in the comb drives 1 2 0 and 1 2 2. The electrostatic force 'makes the truss to operate the rotating gear shaft 1 3 6 with a force sufficient to rotate the intermediate gear 1 40 to rotate the shutter 1 1 2 around the shaft 1 2 4 counterclockwise (or clockwise) to close s position. Although a plurality of intermediate gears 1 4 0 are shown in FIGS. 9 and 10, the shutter 1 1 2 can directly pass through the gear shaft 1 3 6 and the teeth 1 4 2 of the shutter 1 1 2 to the paper standard. Chinese national standards ( CNS) A4 size (210 X 297 mm) (Please read the precautions on the back before filling out this page) Min-order --------- line! Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economics Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economics 478196 A7 ___ B7 V. Description of Invention (22) Still another example of the drive mechanism 2 17 is a design using the above-mentioned microvalves 10 and 100. Although the shutter design depicted in FIGS. 1 and 9 is used, the microvalve 2 0 0 depicted in FIG. 12 has a shutter 2 1 2 and a body portion 2 1 4 ′ as shown in FIGS. 1-8 (note that the protrusion 2 4 5 and 2 4 7 are indicated by hidden lines). As shown in FIG. 12, the shutter 2 12 and the main body portion 214 are each formed with an oval hole 216 and 218. When the micro valve 200 is in the open position, the two holes are aligned, and when in the closed position, the two holes are staggered. . It can be seen that the driving mechanism 2 1 7 is a simpler design, including at least one comb driver 2 2 0, which is used to hit the periphery of the shutter 2 1 2 so that the shutter 2 1 2 rotates around the axis 2 2 4 by a predetermined Amount (clockwise or counterclockwise, depending on its direction). Preferably, a second impact comb drive 2 2 2 is arranged adjacent to the shutter 2 1 2 and opposite to the comb drive 2 2 0. It should be understood that the first and second comb drives 2 2 0 and 2 2 2 are similar to the comb drives 2 0, 2 2, 1 2 0, and 1 2 2 described previously, including a plurality of ground fingers 2 2 1 And a plurality of fixed fingers 2 2 3, when an electrostatic force is generated by applying a potential between the two, the ground fingers 2 2 1 are pulled toward the fixed fingers 2 2 3. It can be seen from the figure that the directions of the members 2 2 5 and 2 2 7 connected to the first and second comb drives 20 and 22 are substantially parallel to the direction of the ground fingers 2 2 1, 'So, They also move in the same direction (see arrow 2 3 1). Elastic cross-links 2 2 9 and 2 3 1 are connected to the members 2 2 5 and 2 2 7 respectively, which are fixed to suspend the first and second comb drives 2 2 0 and 2 2 2 This paper size is applicable to China Standard (CNS) A4 specification (210 X 297 mm) _ _ -----: ------------- l --- order -------- -Line # ------ ： ---.-------------- (Please read the notes on the back before filling this page) 478196 Α7 Β7 Employees of Intellectual Property Bureau, Ministry of Economic Affairs Printed by Consumer Cooperatives V. Invention Description (23). In this way, the members 2 2 5 and 2 2 7 and the ground fingers 2 2 1 can be moved back and forth without any friction. During operation, the micro valve 200 is electrostatically actuated between the first (closed) position and the second (open) position, which can be performed incrementally or in a single operation. This action is caused by the electrostatic force between gr und fingers 2 2 1 and fixed fingers 2 2 3 in the comb drives 2 2 0 and 2 2 2, and then the members 2 2 5 and 2 2 7 Hit the periphery of the shutter 2 1 2 at a very shallow angle. Next, cut off the electrostatic force generated between the ground fingers 2 2 1 and the fixed fingers 2 2 3 in the comb drives 2 2 0 and 2 2 2 to return the members 2 2 5 and 2 2 7 to their The original position. If necessary, the comb drives 2 2 0 and 2 2 2 continue this sequence to rotate the shutter 2 1 2 to the desired position with respect to the main body portion. Aspects of the present invention relate to electrostatically driven MEMS microvalves (which can be used to control the flow of fluid (air or liquid) into or out of a battery), batteries that include such valves, or methods of controlling the flow of fluid into and / or out of a battery. For example, the battery may include one or more metal-air batteries, one or more fuel cells, one or more volt batteries, or a hybrid battery composed of them. In each case, the flow of fluid can or can help provide electricity, such as a fluid cathode in the case of metal-air batteries, a fluid anode in the case of fuel cells, or a volt battery used in seawater The case is to provide a fluid electrolyte. Fig. 11 shows a cross-sectional view of a typical example of a fluid-breathing volt battery 75, which has a container 79, and at least one volt battery 74 is placed in the container 79. The container 7 9 can be a cylindrical, oblique square as shown in the figure 1 ^ mn * ^ 1 n ^ 1 · I in I «I nn · ϋ l ϋ n Ί aMmmmm nn mmt il II ϋ-(Please read the back first Please note this page before filling in this page) This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -26- 478196

V. Description of the invention (24) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, even flat round (ie button batteries). The fluid exchange system of the battery 75 includes at least one micro 76 of the present invention, and a controller 7 8 electrically connected thereto, for controlling the fluid flow in the battery 75. It must be understood that the controller 78 is similar to the control described in the patent application entitled "Battery Having a BinlMn Controller" filed on April 9, 1998, No. 09/050, No. 01 The device is better, which is incorporated herein by reference. The micro valve 76 can be placed near the top of the air path 82 in the battery 75. The micro valve 7 6 is held in position by the valve seat 8. The valve seat 8 7 preferably includes a part rolled to the top cover 1 1 1, and the micro valve 7 6 and the opening 8 4 in the metal top cover 8 6 It is preferable to have a water-repellent layer 8 8 (such as polytetrafluoroethylene or polypropylene glycol) to diffuse air into the path 8 2. It is best to arrange a plurality of openings 8 4 (see FIG. 12) around the metal top cover 8 6 at intervals. The number and size of the openings 8 4 depends on the air flowing into the battery 75. A second micro-valve 7 7 is adjacent to the bottom of the air path 82 to control the flow of air entering through the opening 92 in the metal bottom cover 94. The micro valve 7 7 is also held in position by the valve seat 9 6. Like the valve seat 8 7, it preferably also includes a part that is folded to the bottom cover 1 1 5, and the most between the micro valve 7 7 and the opening 9 2. It has a water-repellent layer 9 8 to diffuse air into the path 8 2. Although the water-repellent layers 8 8 and 98 shown in the figure are only on one side of the micro-valves 76 and 7 7, they can also be disposed at several other positions. For example, a water-repellent layer may be placed on each side of each of the microvalves 76 and 7 to restrict the flow of water vapor into or out of each microvalve. In addition, a water-repellent layer may be placed at the openings 8 4 and 92 on the top and bottom metal covers 86 and 94. At the same time (please read the precautions on the back before filling this page). 隹 ----- r --- Order --------- line 丨-^ I -II »I n · -I ϋ« nn nn flu in nnnn-This paper size is in accordance with Chinese National Standard (CNS) A4 (210 X 297 mm) -27-478196 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of invention (25) It is understood that carbon dioxide-removing material can also be placed in the same position as a water-repellent film. The controller 78 is preferably placed on the negative side of the battery, because the positive and negative, ® 'cells are easily connected to this position. Although the controller 78 is preferably electrically connected to all the microvalves (76 and 77, and any other microvalves in the battery 75), it is also possible to use a separate controller for each microvalve. However, if the 'controller' is located on the positive side of the battery, it needs a connection line from the negative side of the battery in order to provide a negative connection. The controller 7 8 can also be arranged in other different positions, including the inner surfaces of the top or bottom metal covers 8 6 and 9 4, the top of the valve seats 8 7 and 9 6, or even combined with the micro valves 7 6 and 7 7 themselves. Inside. It must be understood that the positive and negative terminals of the battery 7 5, the micro valves 76 and 7 7, and the controller 7 8 need to be connected. Of course, the valve seats 8 7 and 9 6 of the micro valves 7 6 and 7 7 are preferably metal assemblies, which carry a positive battery charge. The metal top cover 8 6 and the valve seat 8 7 are preferably connected by a connecting wire 8 5, because lowering the metal top cover 8 6 and spot welding with the valve seat 8 7 will prevent air from entering the air path 8 from the opening 8 4 2. Unless other measures are taken (ie, if the opening in the metal roof 86 is located in the middle above the water-repellent layer 88, or if the metal roof 86 is made of a metal mesh, perforated metal or expanded metal ). The connecting wires 8 9, 9 1 and 9 3 are respectively arranged between the negative terminal of the battery 7 5 and the controller 7 8, between the controller 7 8 and the micro valve 7 7, and between the micro valve 7 7 and the micro valve 76. It should be noted that there may be additional microvalves in the battery 75, and the type of the array is better 'as another method to control the amount of air entering the battery. In this way, the amount of air flowing into the battery is allowed (depending on the number of opened microvalves. The paper size is subject to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -28- -ϋ * ^ 1 —ϋ in ϋ · ϋ H n H ϋ I · n · ϋ I n Hu -ϋ · ϋ yy β · ϋ I · · ϋ n II 11 I ^^^ 1 ϋ · 1 an n 1 I mMmt i_i n ϋ βϋ Μϋ I n ϋ ϋ ϋ I n ϋ _ (Please read the notes on the back before filling this page) 478196 A7 B7 V. Description of the invention (26) (Please read the notes on the back before filling this page) And 疋) Can provide local current, and It will not continue to be exposed to ambient air after the load is switched off. Since the microvalves of this array can be of a bi-stable design (ie open or closed), this is another attractive option for microvalves 76 and / or microvalves 7 7 to only partially open. Although not shown in the figure, the battery 75 may have one or more microvalves and may be disposed adjacent to the periphery of the container 79. Terms such as "electrical ground connection" and "electrical connection" mean that the connection can be used for continuous current flow. "Electronic ground connection" and "electronic connection," and the like mean connections between electronic components, such as transistors or diodes included in the current path. "Electronic connection" in this application is, electrical connection ", So all" electronic connections "can be considered" electrical connections ", but not all" electrical connections "are" electronic connections ". Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. It can be further seen from the figure that the volt battery 7 4 of the battery 7 5 includes an air cathode 1 0 8, a metal anode 1 1 0, and an insulator 1 1 3 between the two. . Sealing sheets 1 1 1 and 1 15 made of insulating material are arranged at both ends of the volt battery 74, and the valve seats 8 7 and 96 are in contact with the air cathode 108 respectively. If necessary, another water-repellent layer may be arranged between the air path 82 and the air cathode 108. Of course, other battery architectures can use the microvalves described herein, including the anode being a cylindrical plug located in the center of the battery and the air cathode surrounding the outside. Another design is the spiral or “Swiss roll” shape of the anode and cathode. It should be understood that in order to use these other battery designs, some other modifications may be required, such as including air passages between the container and the air cathode, and openings formed on the sides of the enclosure rather than on both ends. It is best to use a single controller 7 8 or a second controller to open -29- This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 478196 A7 B7 V. Description of the invention (27) And / or close the microvalves 7 6 and 7 7. The name "controller" used in this application. The word means a circuit that receives at least one input signal and provides at least one output signal, that is, the function of the input signal. The controller 7 8 can monitor and / or manage Fluid flow between a metal-air electrochemical cell and the outside environment. For example, 'When oxygen is needed to provide the current required by the load, the controller 7 8 allows air to enter the volt battery 74. When the load is cut off or only a minimum amount is needed The controller 7 8 closes or partially closes the microvalves 7 6 and 7 7 'to stop or slow down the reaction in the volt battery 7 4' and the battery is protected 'until the load requires more current. At this time, The controller 7 8 opens the micro valve 7 6 so that the volt battery 74 can generate the current required by the load. At the same time, it must be understood that the volt battery 7 4 preferably can provide power to the micro valves 7 6 and 7 7. The reason for this is that even when the micro-valve is in the closed position, leaking fluid still flows through the micro-valve. The best case is that the controller 7 8 and / or the second controller can provide an adjustable volt battery 7 4 to Actuated microvalve 7 The signals of the electric power of 6 and 7 7. The controller 7 8 can also be used to perform other functions, in addition to controlling the fluid flowing into and / or out of one or more electrochemical cells, it can further enhance the operation of one or more electrochemical cells. Efficiency and / or safety. The operations that the controller 7 8 can perform include, for example: using a DC / DC converter to extend the life of the battery; directly monitoring the electrochemical characteristics of a particular battery to control the charge cycle of the electrochemical battery; In the event of overheating, reverse polarity, short circuit, overvoltage, overcharge, overdischarge, or excessive hydrogen generation, it is used to cut the connection to provide safety, monitor the charge status of a specific electrochemical cell, and report this information Provided to users, devices, or as quality This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) _ 3〇_ (Please read the precautions on the back before filling this page) Wisdom of the Ministry of Economy Printed by the Consumer Cooperative of the Property Bureau-AW · III L--II ^ · 1111111 «I ^ _wl — — — Ι1ΊΙΙ.Ι ---- I -------- 478196 A7 ____B7__ V. Description of the Invention (2 8) Purpose of warranty. These functions are described in detail in co-pending U.S. patent applications filed on April 2, 1998, 09/0 5 4, 0 1 2 and 0 9/0 5 4, 0 7 4. The names are "BatteryHavinga Built-in Controller" and are incorporated herein by reference. Although specific embodiments and / or individual features of the present invention have been illustrated and described, those skilled in the art should understand that These can be changed and modified without departing from the spirit and scope of the invention. In addition, it should be understood that various combinations of these embodiments and features may lead to better implementation of the present invention. ___________________ (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs ----------- line ---------------, ---.-- ----------- 31 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

Claims (1)

478196 A8 B8 C8 D8 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 6. Patent application scope 1. A micro valve for controlling fluid flow, including: (a)-the body part, at least one hole is formed on it; ( b) a shutter adjacent to the body portion and substantially parallel to the body portion, the shutter being formed with at least one hole; and (c) a driving mechanism for causing the shutter to rotate relative to the body portion to allow the shutter and the body to rotate The holes in the part are aligned or staggered, so that the micro valve is in the open position and the closed position, respectively. 2 · If the micro valve of the scope of patent application, the drive mechanism further comprises: (a) at least one first comb drive, the position is adjacent to the shutter 'the first comb drive includes a member, which can be moved to Engages or disengages with the shutter; and (b) a second comb drive is positioned adjacent to each of the first comb drives, the second comb drive includes a member that is movable to offset the first comb drive The drive; wherein, when the first comb drive member is engaged with the shutter, the displacement of the first comb drive member causes the shutter to rotate a predetermined amount \ • ν.: 3 The microvalve, the first and the comb drive member are coupled together. 4 · The microvalve according to item 2 of the patent application, wherein the second comb-shaped actuator member can be offset by pushing the first comb-shaped actuator member in a first direction. 5 · If the micro valve of the scope of patent application No. 3, wherein the second comb drive member can be pulled in the second direction by the first comb drive member (please read the precautions on the back before filling this page) 搴 · Order --------- line ιηιιι ------ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -32- 478196 A8 B8 C8 _D8 To offset it. (Please read the precautions on the back before filling out this page) 6 · If the micro valve of the second patent application scope, the first comb drive member is still driven by the second comb when it is detached from the shutter Benefit: Component offset. 7. The microvalve according to item 6 of the patent application, wherein after the first comb driver member is released from the shutter, the first comb driver member is returned to a non-offset position by the second comb driver member. 8 · The micro valve according to item 2 of the patent application scope, wherein the predetermined amount of the shutter rotation depends on the angle at which the first comb driver member can be shifted. 9 · The micro valve according to item 2 of the patent application scope, wherein the driving mechanism further comprises a pair of first comb drivers, the positions of which are adjacent to opposite sides of the shutter, wherein the components of the first comb driver move substantially synchronously To engage or disengage the shutter. 1 0. The micro valve according to item 9 of the patent application scope, wherein the driving mechanism further includes a pair of second comb drivers, the positions of which are adjacent to the first comb driver, wherein the components of the second comb driver are substantially synchronized Ground so as to cause the first comb drive member to shift or not shift. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 1 1 · The micro valve of item 2 of the scope of the patent of Rushen, in which the configuration of the first and second comb drives is such that the first comb drive member and the second The comb drive member is a substantially vertical structure. 1 2 · If the microvalve of the third item of the patent application, when the first comb drive member is engaged with the shutter, the second comb drive member is shifted by a predetermined amount. 1 3 · If the micro valve of item 1 of the scope of patent application, the paper size of the drive mechanism is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) Γ33--478196 A8 B8 C8 D8 ^, scope of patent application One step includes: (a) at least one actuator; (b) a rotating gear shaft, which is adjacent to the actuator; and #connecting operation with it-the rotating gear 'is connected with the rotating gear shaft and the shutter operation; wherein When the rotary gear shaft is driven by the actuator & _ 1 go, if the rotary gear is caused to cause the shutter to rotate relative to the main body _ & to the desired position 1 4 Turn the shutter clockwise or counter-clockwise. 1 5 · According to the patent application, the range of the first needle rotation range further includes at least one gear between the wheel and the rotation, wherein the intermediate tooth rotates the gear. 1 6 · If part of the periphery of the patent application has a number of teeth printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, the number 1 tooth will be printed. W, the micro-valve which should be rotated so as to be 3 items in the open and close positions, the driving mechanism is driven by the rotating gear shaft and the rotary gear wheel shaft, and the 3 item micro-valves are driven, and the shutter is driven by at least the intermediate gear. In the micro valve of the item, the driving mechanism strikes the periphery of the shutter with a predetermined force so as to control the rotation of the shutter within a specified position. 1 8 · As for the micro valve of item 17 in the scope of patent application, each of the percussion comb drives further includes: a plurality of suspended ground fingers and fixed fingers -H ϋ ϋ nn ϋ nnnn 1 n I · Nnnn .1- VI ϋ y J · I · 1 nn ϋ ϋ n I ϋ —A ^ in I * nnnnnnn I nn ϋ I n I nnn ϋ i _ (Please read the notes on the back before filling this page) This Paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -34-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 478196 A8 B8 C8 D8 When the electrostatic force is applied, the grund fingers are pulled toward the fixed fingers; (b)-a group of elastic cross beams are arranged at the fixed end to suspend the shutter at one end of the shutter. 1 9 · The micro valve according to item 1 of the patent application scope, further comprising a protrusion extending between the shutter and the body portion, wherein when the micro valve is in the closed position, the fluid flow is affected by the protrusion and The restriction of the contact line between the body parts' allows a given amount of fluid to leak through the microvalve. 2 0. The micro valve according to item 1 of the patent application scope, wherein the shutter hole is on the side of the shutter that is off-center. 2 1 · The micro valve according to item 1 of the patent application scope, wherein the shutter can be moved to a position intermediate between the open and closed positions to allow the micro valve to be half-open. 2 2 · The micro valve according to item 1 of the patent application scope, wherein the drive mechanism is controlled to rotate the shutter so as to rotate the shutter to a desired position relative to the main body. 2 3 · The micro valve according to item 1 of the patent application scope, wherein the shutter can be rotated in at least one of clockwise and counterclockwise directions to move the shutter between the open and closed positions. 24. The micro valve according to item 1 of the scope of patent application, further comprising a controller for supplying power to the driving mechanism only during the shutter changing position. 2 5 · The microvalve according to item 1 of the scope of patent application, further comprising an axis ′ located approximately at the center point of the shutter, and the shutter rotates around it. I paper size applies to China National Standard (CNS) A4 specifications (210 X 297 public love 3535- — — — — — — — — — — — — IIIIIII «ΙΙΙΙΙΙΙΙ1I (Please read the precautions on the back before (Fill in this page) 478196 A8 B8 C8 D8 6. Scope of patent application 2 6 · If the micro valve of the scope of patent application 1 is applied, the shutter step_ includes a support member that spans the shutter hole. 2 7 · If applied The microvalve of the first scope of the patent, each of the body portion and the shutter includes a plurality of holes symmetrically formed thereon, wherein the shutter hole is brought into alignment with or offset from the hole of the body portion to The micro-valves are respectively placed in the open and closed positions. 2 8 · If the micro-valve of the scope of patent application No. 1, the shutter further includes: (a)-an outer ring member; (b) a plurality of approximately symmetrically-crossing members, extending Traverse the annular member so as to define an arcuate region between an adjacent pair of intersecting members and the portion of the annular member; and (c) define a substantially circular member in each of the regions, of which half The circular member is a hole, and the other half of the circular member is solid; wherein the circular member of the hole is brought into alignment with the hole of the body portion to place the microvalve in the open position, and the solid The circular member is brought into alignment with the hole of the body portion to place the microvalve in the closed position. 2 9. A fluid-breathing volt battery, including: (a) a container; (b) -A volt battery is disposed in the container; and (c) a fluid exchange system, including: (1) a micro valve having a first state and a second state, the micro valve is disposed in the container so that the micro valve Applicable when the paper size of this paper applies Chinese National Standard (CNS) A4 specifications (21 × 297 mm) -36-(Please read the precautions on the back before filling this page) m-line · Ministry of Economic Affairs Intellectual Property Printed by the Bureau ’s Consumer Cooperatives 478196 A8 B8 C8 D8 VI. Allow fluid to enter the battery when in the patent application state, and generally prevent the fluid from flowing into the battery when in the second state. The microvalve further includes: Part on which at least forming There is a hole; (b) a shutter, which is adjacent to and substantially parallel to the body portion; and (c) a drive mechanism for causing the shutter to rotate relative to the body portion, so that the shutter hole is brought into contact with the body The holes in the part are aligned or staggered so that the micro valve is in the open position and the closed position respectively; and (2) — the controller is electrically connected to the micro valve, and the controller is suitable for initiating the state change of the micro valve. -A method for controlling the flow of fluid through a micro-body with a body portion and a shutter, the body portion has at least one hole formed, and the shutter has at least one hole formed, the shutter is adjacent to the body portion and is substantially parallel to it, The steps include: (a) meshing with the periphery of the shutter; (b) rotating the shutter by a predetermined amount; (c) detaching from the periphery of the shutter; (d) repeating steps (a), (b), and (c) until The shutter is rotated until the shutter hole is at a correct position with respect to the body portion hole. This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) -37-(Please read the precautions on the back before filling this page) Click _ Printed by the Intellectual Property Bureau Staff Consumer Cooperative of the Ministry of Economic Affairs, δ, I ί 1 ϋ n I ϋ ϋ I ϋ II nnnn ϋ ϋ n · 1 II ϋ I ϋ n I n · 1.