TW460664B - Microvalve for controlling fluid flow - Google Patents

Abstract

A microvalve for controlling fluid flow, including a body portion having at least one opening formed therein, a shutter located adjacent to and substantially parallel with the body portion, and a drive mechanism for causing the shutter to pivot with respect to the body portion so that the shutter is brought into and out of alignment with the opening of the body portion, wherein the microvalve is in a closed position and an open position, respectively.

Description

460664 A7 B7 V. Description of the Invention (1) Technical Field The present invention relates to a microvalve that controls fluid flow, and more specifically, to a shutter used in such a microvalve. 'It can be via—or multiple comb drives. Rotate around the axis between the open and closed positions. The Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs prints so-called micro-types and other types of micro-valves, non-straight 14 F) ui (click here to avoid holding on 5 'conductor, medium' until the background of the invention is currently using micro-valves to control The flow of fluid. There are several designs that are micro-motor systems or "M EMS" types. Obviously, it is better to drive this valve using heat or static electricity. In both cases, the slit or its type of opening is opened Placed in the open or closed position, the structure is based on the type of shutter to allow and prevent fluid from flowing out. Typically, the lateral movement of the shutter of the conventional technology is linear. The lateral movement of the shutter can also be linear ( (I.e., rotating), such as the independent provisional patent application 6 0/6 '6 2 5' is named Microvalve For Controlling 1 Flow ", which is owned by the assignee of the present invention, and is incorporated herein by reference. Maximize the number of openings to minimize the amount of movement. To avoid continuous power to this microvalve, it is best to use: a latching system to keep the shutter in place. One of the examples of door locks cannot be granted to Schumm,] r.United States Lee 8 3 7, 3 9 4, which is equipped with a detent or ratchet to help the sliding part of the semi-micro actuator to be fixed in the on or off position. From this patent, independent actuators can be used to move in two directions. Sliding part. In this method, the actuator must overcome the resistance of the pawl / ratchet to move the sliding part to the desired position. Obviously, this requires the actuating device to generate a large force. (CNS) A4 specifications (2) 0 × 297 mm) (Please read the precautions on the back before filling out this page) ---------Order --------- line—ί, .— ΙΙΙΙΙΙΙΙΙΙΙΙΙΙί — — — — — — — —. -4- 6 Ο 6 6 4 Α7 --------------- 5. Description of the invention (2) Therefore, the actuator needs a larger Electricity. In addition, the 394 patent is a semiconductor valve whose electrical action is a thermal reaction, which includes and includes a cantilever-shaped deformation element 'which is deformed by resistance heating. It can be further understood that although the micro valve disclosed in the article can be used Any environment 'but one of the special applications is in the field of metal-air batteries. Metal-air electricity Has a decisive advantage over its various electrochemical cells 'such as typical alkaline (zinc / manganese dioxide) or lithium fluids. Metal-air batteries make gaseous agents' like oxygen or air, it does not need to be like solid substrates Ground is stored in the battery. Gas-acting substances can enter the battery through holes or holes in the battery case. Therefore, 'metal-air batteries have higher energy ^! Degrees (watts per unit mass)' result in higher power Output and lighter weight. Particularly useful in applications that require light batteries, it can provide more energy in the same package volume or the same energy in smaller packages. Metal-air batteries are also environmentally safe and do not leak in general. : Metal-air batteries are made from one or more tritium chemical batteries. Each battery typically includes a metal anode and an air cathode, and has an insulator to electrically insulate the two. An electrolyte is present in the anode, the cathode, and the insulator. The metal anode is generally composed of fine metal powder, such as, but not limited to, zinc, aluminum, or magnesium, mixed with an aqueous electrolyte such as potassium hydroxide and gelatinized to form a paste. The cathode of the air has a catalytic structure, and its design is favorable for reducing gas. It is typically composed of activated carbon, a binder, and a catalyst, and the current collector of the M metal is formed into a sheet shape. Air cathodes usually contain water-based polymers such as polytetrafluoroethylene or polypropylene: diol, which are directly added to the paper. The size of the paper applies to Chinese solid standards (CNS> A4 specification (2) 0 X 297 mm) — -5 -(Please read the notes on the back before filling this page) Take --------- Order --------- Line 丨 --- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 460664 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ------- _______B7____ V. Description of the invention (3) Pole-in-chip and / or made into the same range film (c 0 e X tensveve 1 rn). Water-repellent polymer prevents electrolyte from leaking out of the battery through the cathode. In a metal-air battery, oxygen, through a series of reactions, interacts with the metal in the battery to generate an electric current. For example, in a zinc-air battery, oxygen generates a charge / discharge reaction at the cathode (positive electrode): 1/2 〇 2 + Η 2 〇 + 2 e-+ 2 〇Η —_ At the same time, the charge / discharge occurs at the anode / Discharge reaction is (negative electrode)

Zn + 20H- + Zn〇 + H2〇 + 2 e — Therefore, the total reaction of a zinc-air battery is: Z η + 1/2 0 2 + Zn η Ο:. .. ...: Typically, the metal- The air battery uses the air in the surrounding environment, which contains about 21% of oxygen, as the role of the battery. The ambient air enters through the air holes in the enclosure. Inside the enclosure, the oxygen in the surrounding air reacts with the battery. The oxygen in the air is exhausted and leaves the enclosure. Therefore, the ambient air entering or being sucked into the outer power is sufficient to obtain the desired power output. However, allowing the surrounding air to flow freely into the metal-air battery will cause several problems, which will reduce the efficiency of the metal-air battery: reduce, or cause the battery to comply with the Chinese National Standard (CNS) A4 specification (210 X 7 of 7). (Mm), Xiang -------- Order --------- line- (Please read the notes on the back before filling this page) -6-460664 A7 B7 V. Description of the invention (4 ) Early failure. First, the ambient air entering the electrochemical cell will continue to react with the anode, regardless of whether the battery provides power to the load. Therefore, unless air is removed when the battery is not supplying power to the load, the battery's capacity will continue to decrease. Another problem with allowing the surrounding air to flow freely as a substrate is that it is difficult to maintain proper humidity in the battery. The equilibrium vapor pressure of metal-air batteries is derived from balanced relative humidity, which is typically about 50-60%. If the humidity of the surrounding environment is greater than the equilibrium relative humidity of the metal-air battery, the metal-air battery will absorb the moisture in the air passing through the cathode, and the battery will fail due to a condition called flooding, which will also cause The battery is leaking. If the ambient humidity is less than the equilibrium relative humidity of the metal-air battery, the metal-air battery will release water vapor 'from the electrolyte through the air cathode and will fail due to drying. In addition, impurities in the surrounding air, such as carbon dioxide, can also reduce the capacity of the battery. Therefore, in order to make the operation of metal-air batteries more efficient and longer-lived, the inflow of ambient air should be controlled 'so that air will only enter the battery when the battery provides electrical energy to the load. '· ·· Design air exchange control for metal-air batteries, and control the system to control the flow of air into and out of the metal-air batteries for the following reasons: (1) to prevent continuous battery reactions; (2) to prevent battery humidity changes ; And (3) prevent the carbon dioxide from entering the battery when the battery does not provide electricity to the load. Some designs, such as' use a mechanism that is physically operated by the user, a valve or hole cover is attached to the switch that opens the electrical device, so when the switch moves, the cover also opens. See, for example, U.S. Patents 2 '4 6 8 and 4 3 0 issued to Derksen on April 26, 1949; April 19, 1990 This paper applies the Chinese National Standard for Painting (CNS) A4 specification (210 X 597 public reply) (Please read the precautions on the back before filling out this page) k --------- Order --------- Line — Printed by the Employees ’Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 460664 A7 B7 5. Description of the invention (5) US patent 4,9 1 3, 9 8 3 issued to Cheiky on the 3rd, the name is.

Metal-Air Battery Power Supply r /; and, H. R. Espig & D. F. Porter, Power Sources 4: Research and Development in Non-Mechanical Electrical Power Sources, Proceedings of the 8th International Symposium held at

Brighton ‘Orie] Press, September 1972, pp. 3 4 2 However, 'in these designs, the air exchange system needs to be operated by the operator' and the electrical device needs a switch compatible with the battery air exchange system. The automatic air exchange system is contained in the battery and does not require user's operation. However, it is typically a parasitic source of severe energy capacity of the battery, which will also shorten the battery life. One such design is disclosed in U.S. Patent No. 4,1 7 7 1 3 2 7 issued to Mathews et al. On December 4, 1979, entitled `` Metal-Air Battery Power Having Electrically Operated Air Access Vent Cover '', which uses A valve cover, combined with an electrically operated double: metal actuator, is used to cover the air entry hole when the battery is not in use. Its action is to apply a current to the bimetal actuator to heat the bimetal, and the system will bend or lower by the thermal expansion coefficient of the hole. However, electrical actuators are a substantial source of parasitic consumption of metal-air batteries and can reduce battery life. In addition to this, U.S. Patent No. 5,304, 4 31, issued to Br ο keke chu ra m. Jr on April 19, 1994, named " Flmd Depolarized E1 ec ΐ ΐ ι · oc hem ι ca 1 Battery with Automatic Valve ": U.S. Patent 5, 4, 9 9 '5 6 9, issued to B r 〇〇ke S chumm' J l · on September 12, 1995 For Fluid Depolarized This paper size applies Chinese National Standard (CNS) A4 (2) 0 X 297 mm (Please read the precautions on the back before filling this page) --------- Order --- ------ Line—Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 606 64 A7 _ B7 V. Description of the Invention (6)

Battery with Improved Automatic Valve; U.S. Patent 5 '5 4 1,0 1 6 issued to Brooke Schumm, Jr on July 30, 1996, entitled' Electrical Appliance with Auiomatic Valve Especially for Fluid Depolarized Electrochemical Battery 'Reveals Combination Thermally-reactive semiconductor microactuators are placed at the inlet of the fluid and allow ambient air to enter when the battery supplies power to the load. In this design, it is necessary to consume several microwatts of electricity to heat the resistive element to open the thermal reaction valve and keep the valve open during battery use. Therefore, as described in the foregoing on '3 9 4', its design also continuously parasitic consumes the battery, which will reduce the battery life. / So ‘we need a micro valve’, especially a micro valve for an air exchange system for metal-air batteries. It does not require a latching system and at the same time minimizes parasitic consumption of the battery during operation. I also have a need 'to miniaturize the micro-valves used in metal-air batteries so that they can be placed in standard battery packs: and maximize the size of the batteries that can provide power. I also need ginger .. Microvalves can be produced in large quantities to reduce costs, and most batteries can: use them as air exchange systems. Invention __ In a first embodiment of the present invention, 'a micro valve for controlling a fluid flow 1¾ is disclosed, which includes: a body portion having at least one hole formed therein:-the shutter 1 is adjacent to the body portion and is substantially parallel to the body portion ; And, a driving mechanism for causing the shutter to rotate around the axis with respect to the main body portion, so that the paper size of the shutter and the main body portion conforms to the Chinese National Standard (CNS) A4 specification (2) 0 X 297 public love) (please first (Read the notes on the back and fill out this page)

· Line III, printed by members of the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperation, printed -9-4606 64 printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, printed A7 V. Sealing or staggering the invention description (7), so that The microvalves are in the open and closed positions respectively. The driving mechanism of the micro-valve also includes a first impact comb drive to cause the shutter to rotate clockwise, and a second impact comb drive to cause the shutter to rotate counterclockwise. The first and second stops are configured to limit the shutter in the clockwise and counterclockwise directions, respectively. In a second embodiment of the present invention, a micro-valve for controlling fluid flow is disclosed, comprising: a body portion having at least one opening formed thereon; a shutter adjacent to the body portion and substantially parallel to the body portion; and a drive The mechanism is used to cause the shutter to rotate about the axis with respect to the main body portion, so that the shutter is aligned or staggered with the hole of the main body portion, so that the micro valve is in the open and closed positions, respectively. The driving mechanism of the micro valve includes at least one actuator, a rotating gear shaft, adjacent to the actuator and driven by the actuator ', and a rotating gear connected to the shutter and the rotating gear shaft, where the rotating gear shaft is driven by the actuator After the rotation, the 'rotation gear and shutter are rotated and rotated around the axis, respectively. The driving mechanism may also include a connecting operation of the first end of the spur gear and the rotating gear shaft, and a connecting operation of the second end with the rotating gear shaft. Therefore, the rotation of the rotating gear shaft causes the rotating gear to rotate and the shutter to rotate about the shaft. In a third embodiment of the present invention, a fluid-breathing voltage battery ' includes a container ', a volt battery disposed in the container, and a fluid exchange system. The fluid exchange system further includes a micro valve having a first state and a second state, wherein the micro valve is disposed in the container so that the micro valve is adapted to allow fluid to enter the battery when in the first state, and when in the second state Generally, the fluid is prevented from flowing into the battery, and a controller and a micro valve electric meter are used in the controller. The controller is suitable for starting the micro valve: state change. The microvalve is also suitable for the paper size of China National Standard (CNS) A4 (2) 0X 297. --- * ---------; equipment -------- order-- ------- Line— (Please read the precautions on the back before filling this page) -10-460664 A7 B7 V. Description of the invention (8) It includes a body part with at least one hole formed on it; a shutter , Adjacent to and substantially parallel to the main body portion, and the first and second comb drives are used to cause the door to rotate about the axis relative to the main body portion, so that the shutter is aligned or staggered with the hole of the main body portion = simple illustration of the drawing Although the description is based on the scope of the patent application, and specifically points out and clarifies the subject matter of the present invention, it is believed that the present invention will be better understood from the following description and the accompanying drawings: FIG. 1 Is a top view of a microvalve according to the present invention, with the shutter in the closed position: FIG. 2 is a top view of the microvalve depicted in FIG. 1, with the shutter in the open position; FIG. 3 is FIG. 1 and FIG. Fig. 4 is a side view of the microvalve depicted in Fig. 2; Fig. 4 is an enlarged view of one of the comb drives depicted in Figs. 1-2;-Fig. 5 A top view of the microvalve of the second embodiment of the present invention, with the door in the closed position: FIG. 6 is a top view of the microvalve depicted in FIG. 5. The shutter in FIG. 1 is in the open position; 7 is a top view of the microvalve of the third embodiment of the present invention, where _ closed ::: 踣: 'Suppose 8 is suitable for the description; ::: top view of the microvalve! S 'The shutter is applicable to the MS standard (CNS) A4 specification (210 ^ male cage) -1 1-(Please read the precautions on the back before filling this page) ¥ Staff of the Ministry of Economic Affairs Printed by the Consumer Cooperative ----- ----- I W .______________________ 4 A7 B7 V. Description of the Invention (9) Figure 9 is a side view of the microvalve depicted in Figure 5-8; Figure 1 0 Figure 5-8 shows a comb drive driver diagram. A cross-sectional view of a metal-air battery, including at least one micro valve of the present invention to control the air flowing into the battery; ffil air battery Top view main components comparison table 10 Microvalve '(Please read the precautions on the back before filling out this page) Clothing 4 Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer Cooperatives 2 2 2 3 3 2 9 4 8? Shutter body part Body part The small hole on the shutter. Percussion comb drive. Percussion comb drive. Pivot point. First stop. Second stop. Main circular extension. Impact portion. Impact direction arrow. Impact direction arrow. ---------line! -12-4 606 6 4 Α7 Β7 V. Description of the invention (3) Fixed fingers 2 5 Impact truss 2 9 4 4 4 δ 4 6 14 18 2 4 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 3 2 2 4 First elastic cross girder Second elastic cross girder pivot frame Shaft cover Microvalve shutter body part Hole axis point rotation direction arrow Main circular part Approximately circular part shaft hole pivot frame Tooth-comb drive Comb drive "· Duanyuan rotation gear shaft movement direction arrow movement direction arrow This paper size applies the Chinese National Standard (CNS) A4 specification (210 ^ 297 mm). '衣 · ------- Order --------- line (please read the precautions on the back before filling this page) -13-^ 606 6 4 V. Description of the invention (11) 13 5 Direction arrow 121 Basic fingers 12 3 Fixed finger A7 B7 2 7 2 9 4 0 4 2 4 4 4 6 4 8 4 5 4 3 17 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 7 7 7 7 7 9 4 Two elastic truss linear gears. The first side of the first set of toothed spur gears. The second side of the second set of toothed spur gears. Fluid-breathing volt battery container, volt battery micro-valve controller, air path, valve seat, top cover, water-repellent layer, metal top cover (please read the precautions on the back before filling this page). --------- Line 丨 This paper size is applicable to 'Chinese National Standard (CNS) A4 specification (2) 0 X 297 mm] -14-460664 Α7 Β7 V. Description of the invention (12) 7 Second micro Valve 4 Opening 4 Metal bottom cover 2 Opening 6 Valve seat 15 Bottom cover 8 Water repellent layer δ Connection line 9 Connection line 1 Connection line 3 Connection line 0 8 Air cathode 10 Metal anode 13 Insulator (Please read the note on the back first Please fill in this page for further information.) The preferred embodiment of the present invention, printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, includes an electrostatically driven MEMS microvalve designed to control fluid flow. In this application, the term "electrostatic drive" means that the drive mechanism is derived from a fixed charge generated by an electrostatic potential between two surfaces. This is different from thermally driven microvalves. Thermally driven microvalves use resistive elements that provide the thermal energy required to drive the valve. This resistance element is the drain of the battery or other power source to drive the valve. The magnetic or inductive system uses a continuous current in the loop to generate an external magnetic field, and then the magnetic force is generated by the magnetic field. However, the electrostatic valve uses the electricity in the battery: the charge to drive the valve 'so -------- order ------------ line 1 This paper size applies to China National Standard (CNS) A4 specifications (2) 〇χ_297 mm) -15-4 60664

V. Description of the invention (13 'The parasitic consumption of the battery is much smaller than the thermal or magnetic valve. In a preferred embodiment, the micro valve is designed to consume power only during the transition period', that is, the period from the on state to the off state, The opposite is also true. More specifically, as can be seen from the microvalve 10 of FIGS. 1 and 2, the shutter 12 is adjacent to and substantially parallel to the wood body portion 14, and at least one hole is formed in the body portion 1 & 18 (see Figure 3). Conversely, the shutter 12 does not have any large holes corresponding to the body 11.8. However, 'the shutter 12 preferably includes a plurality of smaller holes 1 5' although the shutter 12 is closed Position, thereby allowing a given amount of drag to leak through the shutter 12 'as discussed further in this article (see Figure 2). It can further be seen in the figure k that the microvalve .10 also includes a drive mechanism to Employees of the Intellectual Property Bureau of the Ministry of Economic Affairs have printed a comb-type drive 1 so that the aperture 1 of the shutter 1 4 is in the closed position, including the shutter 1 2 1 δ indicates that the shutter 1 2 is in fluid flow) from the open position to the closed position. Shaft rotation through door 1 2 Contact stop 3 6 'When shifting ft' Actuators 2 0 and 22 are better , To rotate around the axis with respect to the main body part 12 so as to turn the shutter 12 to be aligned with the main body part 8 'or the turning hole 丨 8, wherein the micro valve 1 0 and the open position are respectively. It must be understood that the rotation of the shutter 1 2 around the pivot point 2 4 travels a distance in an arc (in order. As shown in FIG. 1, the shutter 12 is in the closed position: set (that is, the main body part 1 4 The holes 1 of 8 are aligned: so as to substantially prevent '必 #' from rotating clockwise around the axis to reach the portrayed in Figure 2. On the contrary, the shutter 12 must be turned counterclockwise around the axis. To prevent the shutter 12 from turning clockwise Directional or counterclockwise heads are configured with first and second stops 3 6, 3 8 to prevent impinging comb drives 20 and 2. The first and second 38 also help the shutter 12 to stay in position When you want to change it, it will be hit by the impact comb drive 20 or 22 2. Head, clothing -------- tT ----------- line (Please read the note on the back first Please fill in this page for more details.) This paper size is applicable to China National Standard (CNS) A4 specification (2 〖〇χ 297mm） -16-A7

460664 V. Description of the invention (14) The shape of the shutter 12 is preferably substantially circular, and includes a main circular portion 2 6 and an extension 2 8 extending from the main circular portion 26. The shutter 1 2 is based on an axis. The point 24 is the axis about which it rotates, and the impact portion 30 extends from the main circular portion 26 in the direction opposite to the axis point 24. Although the shutter 丄 2 shown in the figure is a circular structure ', it must be understood that as long as the shutter 1 2 is aligned with the hole 1 8 in the main body 邰 1 4 when it is in the closed position, it is not aligned with the hole 18 when it is in the open position. Any shape can be used. In this way, a short distance can be obtained by turning the I central door 1 2 around the shaft. A larger entire valve hole can be obtained. This design minimizes the distance required to move the shutter 12 to minimize the power required to drive the microvalve 丄 〇. When the power required to drive the microvalve 10 can be reduced to a certain level, it is allowed to use electrostatic drive technology, such as μ E M S. It must be understood that ′ Although the impact comb drives 20 and 22 of the driving mechanism are better designed with an electrostatic type, driving mechanisms of conventional technologies such as thermal, magnetic, or piezoelectric can also be used. As can be understood from Figures 1 and 2, the relative positions of the impact comb drives 20 and 22 of the driving mechanism and the shutter 1 €, when they move in the directions shown by arrows 3 2 and 34 respectively, _., Can Touched its impact part 30. More specifically, as shown in FIG. 4, each of the percussion comb drives 20 and 22 also includes a plurality of suspended basic fingers 2 1 and a plurality of fixed fingers 2 3 ′. When a potential is applied between the two to generate an electrostatic force, the base finger 21 is pulled toward the fixed finger 23. In addition, each electrostatic comb drive 20 and 22 is configured with ..-impact beam 25. It can be seen from the figure that the direction of the impact truss 25 is substantially parallel to the direction of the base finger 21, and therefore, they also move in the directions of the arrows 32 and 34. The first and second bombs are 2 7 and 2 9 scales, applicable to China National Standard (CNS) A4 specifications (2) 0 X 97 Chu (Please read the precautions on the back before filling this page)

Clothing -------- Order --------- I Member of the Intellectual Property Bureau of the Ministry of Economic Affairs and Consumer Cooperation tt Printed -17-4 6 0 6 6 4 A7 B7 V. Description of the Invention (15> Connection To the impact beam 25 and fixed so as to suspend the impact comb drives 20 and 22. In this way, the impact beam 25 'and the base finger 21 can be moved forward and backward without any friction. In this application, ', elastic beams mean a mechanical structure that can provide a spring-like restoring force to the entire system after displacement. An important factor for properly driving the shutter 12 is to strike the beam 25 to properly Of the force hits the impact portion 3 0 of the shutter 12 so that the shutter 12 is pivoted to the desired position (ie, adjacent to the first stop 3 6 in the open position and adjacent to the second stop 3 8 in the closed position) Therefore, this force must at least cause the shutter 12 to rotate from one position to the other position, but less than the maximum force that causes the shutter 12 to rebound from the stop, and the stop position must be such that the impact portion 3 of the shutter 1 2 0 will not hit the impact comb drive 20 and 22 of the impact comb drive 2 after turning to position. Although the impact comb The maximum impact force provided by the actuators 20 and 22 is when the resonance drive is performed, but the force exerted by the impact comb drivers 20 and 22 can be controlled by changing the applied voltage. It must be understood that the impact Comb-type ri mover: The applied force is the impact truss of impact comb drives 20 and 22, and the impact is fast. Door 1 2 (Please read the precautions on the back before filling this page) -Line. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. BJ B—The fast-moving rotating shaft is wound between the distance. 1, really 'I Xiao Mingzhi is the best, more powerful. 4 1 to 4 „3 by the rubbing of the shaft of the frame hole to pivot to cover 4 places 8 2 4 2 points 2gr axis point extension Axial extension 2 at 1 2 out of the door 1 fast to watch the door can be 3,, pictured from the ground # ΐΚ. _-≪ When the door, Shaanxi is here, Λ. Outside fixed this. Its stop makes static 5 hold 4 Cover 4 Axis 4 1Λ py Force K Parallel axis, Pivot at 4 o'clock and 2 Hours A suitable paper scale (c Standard bidder

Rule 1-4 I) A • 18-460664 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (16) A protrusion 4 6 is provided at the tip, which is also used to limit the shutter 丄 2 and the body Airflow between the 1 and 4 sections. It should be understood that the projection 46 extends from the lower surface of the shutter 丄 2 'and is preferably located at the edge of the shutter 12. As mentioned earlier, the shutter 2 (preferably made of compound silicon) preferably has a plurality of small holes 1 5. When the shutter 12 is in the closed position, a predetermined amount of airflow is allowed to pass through the shutter i 2. The hole i 5 has a dual purpose, which can be used to provide an acid (such as hydrofluoric acid) 'and thus release the initial oxide layer between the shutter 12 and the body portion 14 (preferably made of sand), which is a conventional technique . In this way, the oxide can be released in a more uniform manner than from only the sides. Therefore, the structure and size of the 'shutter hole 15' are designed to maximize the dual functions of bleed and uniform oxide release. It should also be understood that changing the protrusions 4 6 can also control the leaked flow rate, so that only a portion of the periphery of the shutter i 2 can leak, for example in a curved section. From Figure 1-2, it can be understood that during operation, the micro valve 10 is electrostatically actuated between the first (closed) position and the first (open) position. The base finger 2 '1 and the static force generated between the fixed fingers 2 3 make the impact truss 25 fast. The impact portion 3 0 of the door makes the shutter Γ 2 around the axis point with sufficient force. 2 4 Turn counterclockwise to reach the position adjacent to the second stop 38. It must be understood that the impact comb drive 20 or the impact comb drive 2 2 is powered only during the time when the shutter 12 position is changed, and the time does not exceed about 1 millisecond. The second embodiment of the microvalve of the present invention is represented by the reference number 100, as shown in FIG. 5-10. It can be seen from the figure that the structure of _microvalve 1 〇〇. Is similar to that of 徴 valve] 0, and also includes shutter 1 1 2, · 'adjacent to the main body 1 1 This paper size applies to Chinese national standards (CNS> A4 specifications) (210 X 297 mm) ------------- Clothing -------- Order · -------- (Please read the precautions on the back before filling in this Page) -19- 4 60664 A7 B7 V. Description of the invention (17) 4 and substantially parallel to it, the body part 1 1 4 has at least one hole 1 1 8. The micro valve 1 0 0 also includes a driving mechanism, In the following, more specifically, the shutter 1 12 is rotated about the axis with respect to the main body 1 1 4 so that the shutter 1 12 is aligned or staggered with the hole 1 1 8 of the main body 1 1 4. The micro valve 1 0 0 is in the closed position and the open position respectively. As discussed for the micro valve 10, the shutter 1 1 2 rotates around the axis as the shutter 1 1 2 moves around the axis 1 2 4 travels in an arc (in order to Arrows 1 丨 6). As shown in Figures 5 and 7, 'Shutter 1 1 2 is in the closed position (that is, shutter 1 1 2 is aligned with the hole 1 1 8 in the main body 1 1 4 to prevent the fluid from flowing through roughly. ) 'Must be rotated clockwise to reach the figure The open position depicted in 6 i 8. On the contrary, the shutter 1 1 2 must be rotated counterclockwise to return to the closed position. The shape of the shutter 1 1 2 is preferably substantially circular, including the main round portion 1 2 6 and The substantially circular portion 1 2 8 extending from the main circular portion 1 2 6, the shutter i " rotates around the pivot point, 2 4. Let Mu see that '部 工 2 8 has a hole 1 3 3 so that it can be Rotate around the pivot 榘; b 4 · _ 1 .. It also has a plurality of teeth 1 3 0 ′ located on at least part of the circumference. Therefore, the portion 1 2 8 is referred to herein as a rotating gear. Description of 1 2 'The shutter 1 1 2 is a circular structure, but any shape that is aligned with the hole 1 1 8 of the main body 1 1 4 in the closed position and staggered with the hole 1 1 8 in the open position is required. Can be used. The difference from the drive mechanism of the micro valve 10 is that the drive mechanism of the micro valve 100 does not use an impact method to cause the shutter 1 i 2 to rotate around the axis. Instead, it is a comb drive 1 2 0 and 1 2 2 (using (Static design is better), when this paper size is in accordance with Chinese National Standard (CNS) A4 specification (2) ο X 297 Please note this page before filling in this page) Packing -------- Order ------ I--Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs-20-4 6 0 6 6 4 A7 B7 5 Explanation of the invention (18) When moving in the directions shown by arrows 1 2 and 1 · 3 4 respectively, it interfaces with a rotating gear shaft 1 3 6 having a plurality of teeth 1 3 8. More specifically, the way in which the comb drives 1 2 0 and 1 2 2 interact with the rotating gear shaft 1 3 6 'is similar to what Ernest J. Garcia and Jeffery Sniegowski of Sandia National Laboratories famously called " Surface M ic _ omachined M icroengine's report. By interfacing with the rotating gear shaft 1 3 6 in this way, the rotating gear shaft 1 3 6 is caused to rotate (in the direction shown by the arrow 1 35). Similar to the impact comb drives 20 and 22, each comb drive 1 20 and 1 22 includes a plurality of suspended basic fingers 1 2 1 and a plurality of fixed fingers 1 2 3, where, when When a potential is applied between the two and an electrostatic force is generated, the base finger 1 2 1 is pulled toward the fixed finger 1 2 3. In addition, 'each comb drive 1 2 0 and 1 2 2 is provided with a truss 1 2 5' the direction of the truss 1 2 5 is substantially parallel to the direction of the base finger 1 2 1 'and interfaces with the rotating gear shaft 1 3 6 'And move in the directions of arrows 1 2 3 and 1 3 4. The first and second elastic cross beams 1 2 7 and 彳 2. +9 are connected to the-truss 1 2 5 and are fixed 'in order to suspend the comb drive ,, 1 2 0 and 1 2 2 (see Fig. 10) . As shown in Figures 5 and 6, the 'rotating gear shaft 1 3 6 is directly connected through the teeth 1 3 8 and the plurality of teeth 1 2 0 of the rotating gear 1 2 8 of the shutter 1 1 2: In this way, when the gear shaft 1 is rotated 3 6 When the comb drive 1 2 0 and] 2 2 are driven to rotate, the shutter 1 1 2 is caused to rotate about the axis. Another example of the drive mechanism of the micro valve 1 ◦ 0 includes a spur gear 1 4 0 between the rotating gear shaft 1 3 6 and the rotating gear 1 2 8 'It can be seen from Figures 7 and 8 that this paper scale is applicable to China National Standards (CN fine grid ⑵0, Hu Ge (please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs ^ --- I I --- Order ------- --Line 1C ------------------------- 4 6 0 6 6 4 A7 B7 V. Description of the invention (19) 'Spur gear 1 4 0 It has a first set of teeth 1 4 2, which is located on the first side 1 4 4 ′ and interacts with a tooth 1 3 8 of the rotating gear shaft 1 3 6, and a second set of teeth 1 4 6, which is located on the second side 1 4 8, and The teeth 1 3 0 of the rotating gear 1 2 8 interact. Therefore, when the rotating gear shaft 1 3 6 rotates clockwise, the spur gear 1 4 0 moves upward, thereby causing the rotating gear 1 2 8 to rotate counterclockwise, and Rotate the shutter 1 1 2 from the open position to the closed position. When the rotating gear shaft 1 3 6 rotates counterclockwise, the 'straight tooth · wheel 1 4 0 moves downwards, so that the rotating gear 1 2 8 is clockwise Turn and move the shutter 1 1 2 from the closed position The shaft rotates to the open position. Because the drive mechanism of the micro valve 100 is non-impact type, it is very precise. There is no situation like the micro valve 100 is turned too far or not enough. Therefore, no stop is required, and the micro valve 1 is partially opened. 0 〇 is very easy. Driving the shutter 1 1 2 in this way can also overcome some of the torque problems of the micro valve 10. '1' As can be understood from Figure 9, shutter 1 12 and shutter: 12 phase The same as' is rotating around the pivot point 1 2 4 'rubbed by the pivot frame 1 4 1. More specifically,' the rotating gear 1 2 8 attached to the shutter 1 1 2 includes a hole 1 3 3, sleeved on Pivot frame 1 4 1 is up and held in place with —shaft cover 1 4 5. Therefore, when '® shutter 1 1 2 is rotated around it, pivot frame 1 4 1 remains stationary. In addition, at the distal end of shutter 1 1 2 A protrusion 1 4 3 is provided, which is also used to restrict the door at j] 2. The air flow between the body 1 and 4 is understood that the protrusion 1 4 3 extends from the lower surface of the shutter 1 1 2 and is located at the shutter 1 1 2 It ’s better to have a good relationship with the teacher. 1'㈣1 1 2 J, as mentioned before; It is also best to have a number of paper sizes that are applicable to China National Standard (CNS) A4 specifications (2] 〇X · 297 male also) --------------- '¥ II (Please read the notes on the back before filling this page) Order --------- Online 丨. Staff of Intellectual Property Bureau, Ministry of Economic Affairs Printed by the consumer cooperative 4 A7 V. Description of the invention (20 holes 1 1 7 'are like holes 1 5 on the shutter 12 (see Figure 6). The size and structure of these holes 1 1 7 are also designed to maximize flow and allow acid to release the dual function between the shutter 12 and the body 14. During operation, the micro valve 1 0 0 is in the first (closed) position and opened) and the force generated by the straight door 1 10 is driven by the i position of the drive shaft 1 through the base electrostatic force 2 2 between the positions. Take an amount sufficient to make the rotating gear 1 4 0 1 2 rotate around the axis point 0 from the open position 1 2 0 1 2 3 3 3 to make the shutter. Similarly, the electric actuation is the amount required to drive the rotating gear shaft 1 3 and the rotating gear 1 2 8 by driving the truss 1 2 5 through the comb-driven base fingers 1 2 1 and the fixed fingers 1 ( ). Next, turn the gear 1 2 8 to turn 1 2 4 clockwise to the open position. The electrostatically-actuated closed position is the electrostatic force generated by the base finger 1 2 1 in 1 2 2 so that Yan 1 2 5 operates with a force sufficient to turn the toothed wheel 1 2 8 to 1 1 2 around the axis point 1 2 4: counterclockwise: · Needle rotation This can be directly, driven, or shown in Figure 6 as shown in Figure 6) For the given oxide second (opener 1 2 0 2 3 interim 6 Rotate, directly or actuated to cause the fast micro valve to move through the comb and the fixed fingers. The required distance to close is to move the spur gear 1 4 0 in a straight upward direction. (Please read the precautions on the back first. (Fill in this page) --1 丨 II 1 Order --- III--1 1-Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, the aspect of the present invention and the electrostatically driven MEMS micro valve fluid (air or liquid) flows into Or out of the battery), including batteries that can be used to encompass such valves, or methods of controlling the flow of fluid into and / or out of the battery. For example, the battery may include +-or more metal-air batteries, one or more fuel cells. Electricity, control @-or multiple volt batteries, or a combination of them .. *; in each case, the fluid flow may or may: help to provide the appropriate degree) ¾ China National Standard (CNS) A4 Specifications (2) 0 X 297 Gongchu 23-4 6 0 6 6 4 A7 B7 V. Description of the Invention (21) For example, in the case of metal-air batteries, fluid cathodes are provided, and in the case of fuel cells, fluid cathodes are provided. In the case of an anode 'or a volt battery used in seawater, a fluid electrolyte is provided. ® 1 1 _ shows a cross-sectional view of a typical example of a fluid-respiratory volt battery 75. It has a container 7 9 and at least one volt battery 74 is placed in the container 7 9. The container 7 9 may be cylindrical, oblique, or even flat circular as shown in the figure (that is, a button battery). The fluid exchange system of the battery 75 includes at least one micro valve 76 of the present invention, and a control element 7 8 'electrically connected thereto to control the flow of fluid in the battery 75. It must be understood that the controller 7 8 is similar to 0 9/0 5 4 ’0 1 2’, which was filed on April 2, 1998. The name is BaUery Having a Built-in

The controller described in the Controller patent application is preferred, and this article is incorporated into the dream test of this article. The micro valve 76 can be placed near the top of the air path 82 in the battery 75. The microvalve 7 6 is held in position by the valve seat 8 7. The valve seat 8 7 preferably includes a portion rolled to the top cover 1 1 i, and the opening 8 8 in the microvalve 7 6 and the metal top 8 6 In the meantime, it is better to have a single layer; a water-repellent layer 8 (such as polytetrafluoroethylene or polypropylene glycol) 'to diffuse air into the path 8 2. It is better to arrange a plurality of openings 8 4 around the metal top cover 8 6 (see FIG. 12). The number and size of the openings 8 4 flow into the battery 7 5 as needed. IIIJ / ii ′ Second micro The valve 7 7 is adjacent to the bottom of the air path 82 in order to control the empty k-flow entering from the opening 92 in the metal bottom cover 9 4. The micro valve 7 7 is also held in position by the valve seat 9 6. Like the valve seat 8 7, it preferably also includes a part rolled to the bottom cover 1 1 5, and the micro abyss 7 7 and the opening 9 2 Standards are applicable to China National Standard (CNS) A4 specifications (2) 0 X 297 g t (Please read the precautions on the back before filling out this page) Order --------- Line 1 " Bureau of Intellectual Property, Ministry of Economic Affairs Printed by the employee consumer cooperative -24-460664 A7 B7 V. Description of the invention (22) (Please read the precautions on the back before filling this page) It is best to have a water-repellent layer 9 8 to diffuse the air into the path 8 2 . Although the water-repellent layers 8 8 and 98 shown in the figure are only on one side of the micro-valves 76 and 7 7, they can also be disposed at several other positions. For example, a water-repellent layer may be placed on each side of each of the microvalves 76 and 7 to restrict the flow of water vapor into or out of each microvalve. In addition, a water-repellent layer may be placed at the openings 8.4 and 92 on the top and bottom metal covers 86, 94. It must also be understood that carbon dioxide-removing materials can also be placed in the same location as the water-repellent film.

The line I controller 78 is preferably placed on the negative side of the battery, because both positive and negative batteries are easily connected to this position. Although the controller 78 is preferably electrically connected to all the microvalves (76 and 77, and any other microvalves in the battery 75), it is also possible to use a separate controller for each microvalve. However, if the controller is on the positive side of the battery, a connection cable from the negative side of the battery is required to provide a negative connection. The controller 7 8 can also be arranged in other different positions, including the inner surfaces of the top or bottom metal covers 8 6 and 9 4 ', the top of the valve seats 8 7 and 9 6 or even combined with the micro valves 7 6 and 7' 7. . Within itself. It is important to understand that the positive and negative terminals of the battery 75, the micro-valves 76 and 7 7 ', and the controller 78 need to be connected. Of course, the valve seats 8 7 and 9 6 of the microvalves 7 6 and 7 7 are preferably metal assemblies' which carry a positive battery charge. The metal top cover 8 6 and the valve seat 8 7 are preferably connected by a connecting wire 8 5 because lowering the metal top cover 8 6 and spot welding with the valve seat 8 7 will prevent air from flowing into the air path from the opening 8 4. Diameter 8 2 unless other measures are taken (ie, if the opening in the gold top cover 86 is located above the water repellent layer 8 8 _ middle position, or if the metal top cover 86 is made of metal mesh, perforated gold (, Or belong to) ¾ metal paper size ϋ 闬 Chinese National Standard (CNS) A4 specifications (2) 0 X 297 --- ~~~~ -25-4 D tS 0 4 a7 B7 V. Description of the invention (23 Cheng). The end of the connection line 8 and the controller 7 valve 7 7 and micro valve 7 must be clear, the type is better, as in this way, depending on the allowance) can be provided in the ambient air. Due to or off), this is an attractive choice for micro-types. One or more micro-valves 9, 9 1 and 9 3 minutes 8 rooms, 7 8 6 controllers. There may be another type of micro-valve in the battery 75 that controls the flow of electric current into the battery, and the micro-valve that is negative to this array can be selected by the valve 76 and / or the micro-valve. Although not shown in the figure, the container 7 'can be electrically connected adjacent to the container " and " electrically connected for continuous current flow. " Electronic ground connection noun means a connection between electronic components, such as a crystal or a diode. In this application, a subset of the "connection", so all "electronic connections", but not all "electrical connections" As can be further seen from the figure, the battery 7 employees of the Intellectual Property Bureau of the Ministry of Economic Affairs consume Cooperative printed I? Don't arrange it between the negative of the battery 75 and the micro valve 7 7 and the micro-additional micro valve to the amount of air in the pool of the array. (Depending on the number of opened microvalves, it will not continue to be exposed to four after the load, so it is a bi-stable design (that is, open 7 7 is only partially opened. The other is shown, but the battery 7 5 can have 3 peripheral configurations.) It means that the connection can be connected and `` electronic connection '' and other electrical and electronic connections included in the current path. It is `` electrical connection-connection '' +: can be considered as 'electrical connection' electronic connection. 5 The volt battery 7 4 includes an air cathode 1 0 8 ', a metal anode 1 1 0, and an insulator 1 1 3 therebetween. Covers 1 1 1 and 1 1 5 made of an insulating material are arranged in the volt battery 7 4 The two ends of the valve seat 8 7 and 9 6 are in contact with the air cathode 108 respectively. If necessary, another water-repellent layer can be arranged between the air path 8 2 and the air cathode 108. Of course, other battery architectures It is also possible to use the microvalve described in this article 'including anode is one, cylindrical plug, located in electrical specifications (210 x 297 mm) (Please read the precautions on the back before filling this page)

-26- 46〇664 A7 ~~ '~~ ---' B7 V. Description of the invention (24) (Please read the precautions on the back before filling this page) 丨 Also the center ’air cathode is surrounded on the outside. Another design is the spiral or “Swiss roll” shape of the anode and cathode. It must be understood that in order to use these battery designs, some other modifications may be required, such as including the air passage between the container and the air cathode, and the openings are formed on the sides of the housing instead of the ends. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs It is best to use a single controller 7 8 or a second controller to open and / or close the microvalves 76 and 77. The term "controller" used in this application means a circuit that receives at least one input signal and provides at least one output signal, that is, the function of an input signal. The controller 7 8 can monitor and / or manage the fluid flow between the metal-air electrochemical cell and the external environment. For example, the 'controller 7 8 allows air to enter the volt battery 74 when oxygen is needed to provide the current required by the load. When the load is cut off or only a minimum amount of current is required, the controller 7 8 closes or partially closes the microvalves 7 6 and 7 7 to stop or slow down the reaction in the volt battery 74 and the battery is protected until the load Need more / current. At this time, the controller 78 opens the micro valve 76 so that the volt battery 7: 4 can generate the current required by the load. In this regard, it must also be understood that the volt, special battery 7 4 is best to provide power to the microvalves 7 6 and 7 7. The reason for this is that even when the microvalve is in the closed position, there is still leaking fluid from the microvalve. flow past. In the best case, the controller 78 and / or the second controller can provide a signal for adjusting the power supplied by the volt battery 7 4 to drive the microvalves 76 and 77. The controller 78 can also be used to perform other functions. In addition to controlling the fluid flowing into and / or out of one or more electrochemical cells, the operating efficiency and / or safety of one or more electrochemical cells can be further improved. Controller 7 8 This paper size applies Chinese national standard (CNS> A4 specification (2) 0 X 297 public love) -27- 4 6 0 6 6 4 A7 _ B7 V. Description of invention (25) The operations that can be performed include : Use a DC / DC converter to extend the life of the battery; directly monitor the electrochemical characteristics of a specific battery to control the charge cycle of the electrochemical battery; in the event of overheating, reverse polarity, Yazuro, overvoltage, overcharge, Events such as over-discharge or generation of excess hydrogen: Risi, used to cut off the connection to provide safety, monitor the state of charge of a specific electrochemical cell, and provide this information to the user, device, or as The purpose of stomach guarantee. These functions are described in detail in the co-pending U.S. patent application filed on April 2, 1998, 0 9/0 5 4, 0 2 2 0 0 9/0 5 4, and 7 4. The names and names are Battery Havin.a

Built-in Controller 〃, are incorporated herein by reference. Although specific embodiments and / or individual features of the present invention have been illustrated and described, those skilled in the art will appreciate that other changes and modifications can be made without departing from the spirit and scope of the invention. It must be understood that various combinations of these embodiments and features can be better implemented in the present invention. '(Please read the precautions on the back before filling out this page): Clothing -------- Order -------- Line — Printed on moderate paper by the Employee Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs Standard standard A4 is) 1 I9 ··

Claims (1)

A8B8C8D8 460664 6. Scope of patent application 1. A micro-valve for controlling fluid flow, including: (a)-a main body portion having at least one hole formed therein; (b)-a shutter, adjacent to the main body portion and substantially parallel to the main body portion And C c) a driving mechanism 'for causing the shutter to rotate about the axis with respect to the body portion' to align or stagger the shutter with the hole of the body portion 'so that the microvalve is in the closed position and the open position, respectively. 2. The micro valve according to item 1 of the patent application scope, wherein the driving mechanism hits a part of the shutter to cause the shutter to rotate about an axis. 3. The micro-valve according to item 1 of the scope of patent application; further comprising a first stop 'for limiting the clockwise rotation of the shutter in the clockwise direction. 4 _ The micro valve according to item 1 of the scope of patent application, further comprising a second stopper for restricting the shutter to rotate around the axis in the counterclockwise direction. 5. The micro-valve according to item 1 of the scope of patent application, the driving mechanism further comprises: (a) a first percussion comb drive, 'throwing to cause the shutter to rotate clockwise around the axis; and ( b) a second impact-type comb drive for causing the shutter to rotate around the axis in a counterclockwise direction. 6. The micro-valve according to item 5 of the patent application, the shutter further comprising an extension extending outward from its periphery, which is struck by the first and second impact comb drives. '' 7. The micro-valve of item 6 of the patent application, the shutter striking portion is located substantially on the opposite side of the rotation axis. 、 This paper size applies to China National Standard (CNS) A4 specification (210 χ'297 mm) (Please read the precautions on the back before filling this page) tr ·., -------- line L Ministry of Economy Printed by Intellectual Property Co., Ltd. Employee Consumer Cooperative -29-4 60664 A8 B8 C8 D8 VI. Application for Patent Scope 8 · For example, the micro valve of the scope of patent application No. 5 in which the shutter is the first and second impact comb The shaped driver strikes with a predetermined force so as to control the amount by which the shutter rotates around the axis within a specified movement range. 9. The microvalve of the first scope of the patent application, wherein the power for operating the first and second impact comb drives is provided only during the shutter changing position. 1 0 _If the micro valve of the scope of the patent application, further includes-a convex portion 'extends between the shutter and the body portion' when the micro valve is in the closed position 'the flow of fluid is affected by the convex portion The restriction of the line of contact with the body portion allows a given amount of fluid to leak through / through the microvalve. 1 1 · The driving mechanism of the micro valve according to item 1 of the patent application further includes: C a) at least one actuator; (b) a rotating gear shaft adjacent to and connected to the actuator for operation; and '' (c)-a rotating gear, connected to the rotating gear. shaft __ and the shutter operation;, where 'the rotating gear shaft is rotated after being driven by the actuator,' so that the rotating gear causes the shutter to oppose The main body part is rotated around the axis to the desired 12. For example, the micro valve of item 11 in the scope of the patent application, wherein the shutter is rotated around the axis to a position intermediate the open and closed positions to allow a portion of the M fluid to flow therethrough. Too. 1 3 · If the i-valve in item 11 of the scope of patent application, the size of this paper is applicable to China National Standard (CNS) A4 (210 χ'297 mm) (Please read the precautions on the back before writing (This page) -nnnn ί n 一 δ ,, tnnn —an II So that the shutter can rotate around the axis between the open 460664 gear shaft and clockwise and counterclockwise rotation. 1 4 · The micro valve according to item 1 of the scope of patent application, further comprising a controller 'for supplying power to the driving mechanism. 1 δ. If the microvalve of the scope of patent application, the driving mechanism further comprises: (a) at least one actuator; (b)-a rotating gear shaft is adjacent to the actuator and is actuated by the actuator Impact; (c) a rotating gear 'connected to the shutter; and (d) a spur gear' first end connected to the rotating gear shaft and a second end connected to the rotating gear; wherein 'the rotation The gear shaft is driven by the actuator to rotate, so that the rotating ring wheel indirectly causes the shutter to rotate around the shaft to a desired position relative to the body portion. ： ： 1. 6. If the micro: valve of item 15 of the scope of patent application, the shutter can be rotated around the axis to the middle between the open and closed positions to allow a partial amount of fluid to flow from it. Too. 17 · The micro valve according to item 15 of the scope of patent application, wherein the rotation gear 岫 W rotates clockwise and counterclockwise to rotate the shutter around the axis between the open and closed positions. 18. · __ · '· A type of fluid-breathing volt battery, including: (a) —container: (b) —Volt battery is placed in the container and this paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the notes on the back before filling this page) Order --------- line! Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs-31-Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 C8 D8 VI. Patent Application Scope (C) A fluid exchange system, including: (1) a micro valve with A first state and a second state, the micro valve is disposed in the container, so that the micro valve is adapted to allow fluid to enter the battery when in the first state, and substantially prevent the fluid from flowing into the battery when in the second state The micro-valve further includes: (a) a body portion having at least one hole formed therein; (b) a shutter adjacent to the body portion and substantially parallel to the body portion; and (c) first and second comb drives ,: Adjacent to the shutter; wherein the first and second comb drivers cause the shutter to rotate about the axis relative to the main body portion, so that the shutter is aligned or staggered with the hole of the main body portion; and (2) —the controller and The micro valve is electrically connected, and the controller is adapted to initiate a state change of the micro valve :. : '1 9. If the battery: No. 18 in the scope of patent application, the position of the micro valve is adjacent to the top middle part of the container. 20. The battery according to item 18 of the scope of patent application, wherein the position of the micro valve is adjacent to the bottom middle portion of the container. 2 1. The battery according to item 18 of the patent application scope, wherein the controller is positioned adjacent to the top portion of the container. 2 2. The battery according to item 18 of the patent application scope, wherein bit K of the controller is adjacent to the bottom portion of the container. 2 3. If you ask for the battery of item 18 of the patent fan garden, the paper size of this fluid exchange is applicable to Chinese National Standard (CNS) A4 Regulation 4 (210 X 297 mm) (Please read the precautions on the back before filling (This page) vr ~ order --------- line! -32-4 6 0 6 64 A8 B8 C8 D8 6. Scope of patent application The system further includes a first micro valve positioned adjacent to the middle part of the top of the container and a second micro valve positioned adjacent to the middle part of the bottom of the container. 24. If the battery of item 18 of the patent application scope, the fluid exchange system further includes a plurality of microvalves arranged in the container in an array and electrically connected to the controller, each of the microvalves has a first state, The fluid is allowed to flow into the battery, and the second state substantially prevents the fluid from flowing into the battery. 25. The battery according to item 24 of the patent application, wherein the array can be placed in a specified state to allow a desired proportion of fluid to flow into the battery. 2 6. The battery according to item 18 of the patent application scope, wherein the controller is located adjacent to the micro valve. 27. The battery according to item 18 of the patent application, wherein the micro valve is positioned adjacent to the periphery of the container. 28. The pond according to item 18 of the patent application scope, wherein the battery provides power to the fluid exchange system. · (Please read the notes on the back before filling this page) Online! Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs This paper is sized to the Chinese National Standard (CNS) A4 (210 * 297 mm) -33-