A7 ____B7___ 五、發明說明（1 ) 本發明相關領域 本發明是有關於真空滲碳方法，用以進行該方法的真 空滲碳裝置，和其經滲碳處理的鋼產品》 先前技蘸la明 鐵及鋼在作表面改良時所最廣泛使用的滲碳處理方法 通常是在氣相中進行氣體滲碳處理；然而，氣體滲碳處理 會有製造異常表面層、具有不適於進行高溫滲碳作用的高 溫爐結構^產生炭黑、和具有許多太複雜而無法控制之滲 碳條件等等的問題，於是已有人說明一種使用真空滲碳高 溫爐的真空滲碳方法以求克服這些問題。 先前的真空滲透方法是使用氣相飽和脂族烴類來作爲 滲碳氣體。於是，甲烷型式的氣體-比如甲烷氣體（ ch4)、丙烷氣體（c3h8)及丁烷氣體（C4Hi。）已 被用作氣相飽和脂族烴類；這些滲碳氣體被直接供應到真 空滲碳髙溫爐的加熱室中，其中包含有鋼材的工作件被加 熱到約9 0 0-1 0 0 0 °C *彼會在加熱室中發生熱解作 用（thermolysed)，.同時在該方法製備之經活化的碳會 滲透進鋼材的表面，進而由其表面引發滲碳及分散作用。 爲使滲碳氣體能完全供應到工作件的表面，此時有必 要使滲碳氣體滲透到全部的工作f表面，因此使暫留有工 作件的加熱室保持真空，以及可藉著使剛供應進來還在上 方的滲碳氣體攪拌，或藉著連續加入（pulsed.admission )來變化高溫爐的壓力。 本紙張尺度適用中國國家標準（CNS)A4規格（210 * 297公釐） (請先閱讀背面之注意事項再填寫本頁) ^ -----—------! 經濟部智慧財產局員工消费合作社印製 -4 - A7 A7 經濟部智慧財產局貝工消费合作社印製 _ B7_ 五、發明說明（2 ) 就此而言，先前對真空滲碳方法的認知是通常應該使 用烴類來作滲碳氣體以便產生強烈的滲碳作用，以及所使 用烴類是氣相飽和脂族烴類，比如上述的甲烷型氣體。 原因是咸諳技藝人士認知到甲烷型氣體在鋼材進行滲 碳時所用'^髙至約1 1 0 o°c的溫度範圍內是很安定的， 以及儘管滲碳粉末的安定性會減少和有產生炭黑，但彼會 隨著分子量的增加而變得更強，反之吾人也認知到氣相不 飽和脂族烴類，.比如炔屬氣體要比甲烷型氣體不安定，以 及熱解作用會進展得比滲透作用好，以致彼在用作滲碳氣 體時將只會製造出炭黑，所以完全不適用作滲碳氣體（參 見Kawakami& Gosh a "Kinzoku hyomen koka shori gitutsu"〔金屬表面硬化處理〕"MikiShoten ( 1971年10月25曰）第139頁）。 因此，實際上只有氣相飽和脂族烴類甲烷型氣體，比 如甲烷氣體（CH4)、丙烷氣體（C3H8)及丁烷氣體 (C4H10)，可用作滲碳氣體*而氣相不飽和烴類乙炔 型氣體仍忽略不用。 然而，儘管傳統的真空滲碳方法已解決了氣體滲碳的 品質問題，但彼仍牽涉到底下列出的問題· 這些問題如下。 _ 1 ·會有許多炭黑被製造出來’致使維修操作複雜且 爾。 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 x 297公« ) 5 I--f、----I!訂·1111!· # t 《請先閱讀背面之注意事項再填寫本頁) * - B7 五、發明說明（3 ) 2.要在插入加熱室之工作件數量不會減少及無須增 加氣體品質下來有均一的滲碳作用是很難的。 <請先閲讀背面之注意事項再填寫本頁) 3 . 'll對工作件上的小直徑孔洞及窄的裂隙進行滲碳 是不適當的。 4 .設備成本高，並且只限於特殊用途。 5 .和氣體滲碳作用相比，生產率低及處理成本髙。 經濟部智慧財產局員工消費合作社印製 先前滲碳氣體熱解的機制可以底下的方程式表之。 C3H8—〔C〕+C2He+H2 C2He—〔 C〕+ C Η 4 + Η 2 CH4 —〔C〕+2H2 在上面的方程式中，〔C〕是對滲碳有貢獻之經活化 的碳。經活化的碳如果是來自高g爐內部空間的分解而非 工作件表面的分解時，將只會變成炭黑，而這就是真空滲 碳會製造出炭黑的原因。 爲減少該炭黑的製造的措施包括以下幾個。 本纸張尺度適用中國國家標準（CNS)A4規格（210*297公釐） A7 經濟部智慧財產局員工消費合作社印製 ______B7____五、發明說明（4 ) a .使用經惰性氣體稀釋的滲碳氣體（氣體壓力和先 前方法所用者一樣）以便使高溫爐中滲碳氣體量儘可能的 稀薄· w·- b .使氧源（比如醇類）與滲碳氣體混合到不會製造 出異常的層，如此經活化的碳部份是以C 0來進行滲碳， 以及過量的C 0氣體可由高溫爐中趕走》 c . 一項 牽涉到在接近 子化和可有效 其餘空間分解 所有這些 來自該設備及 質。 還有就是 件之間的間隙 隙時，則使用 將滲碳情形的 或裂隙的內部 獲得適當的滲 氣體循環裝置 室的髙溫爐中 除了可抵消炭黑外還有其他好處的措施，彼 工作件表面產生電漿以使稀薄的滲碳氣體離 地應用對工作件表面的吸力，如此因高溫爐 產生的炭黑將很少（電漿滲碳作用）· 對策可減少所產生的炭黑量，但它們的問題 處理的成本上揚，以及喪失了真空滲碳的本 試著要獲得 不恰當或當 甲烷型氣體 深度無法避 深處或者當 碳表面深度 、氣體混合 進行時，則 均一的滲碳作用時，當裝載工作 工作件有小直徑的孔洞或窄的裂 作爲滲碳氣體來進行真空滲碳時 免不會有變化，這是因爲在孔洞 相鄰兩f彼此間太靠近時是無法 。比如，當滲碳處理是在配備有 裝置或髙速氣體噴灌裝置之加熱 當在工作件中直徑爲4毫米和深 仁紙張尺度適用中國國家標準（CNS)A4規格（210 * 297公爱 (請先閱讀背面之注意事項再填寫本頁> 4^· — — —----訂 -------.^! 7 A7 A7 經濟部智慧財產局貝工消費合作社印製 ___B7_ 五、發明說明（5 ) 2 8毫米的孔洞開啓時，在孔洞底部的有效滲碳表面深度 約爲0.3 0毫米*這與在工作件外表面之約爲0.5 1毫 米者差很多。 有人提議該滲碳表面深度變化的發生是因爲氫原子數 要比碳原^數目大，以及在加熱室進行分解以製備原子當 中，所分解製備得到的氣體當中有較多的氫分子，而這就 會使得滲碳分子的平均自由路徑減少了 * 因此爲了進行滲碳處理以便可在小直徑孔洞內壁表面 可確保有所需求的滲碳表面深度，則滲碳處理是在將碳供 應到孔洞中或是供應超過需求量的滲碳氣體及使氣體流動 混合之下來進行的，但如此會導致炭黑產生量的增加。 本發明概要 本發明是對上述那些問題的回應，其目標是要提供一 種真空滲碳方法及裝置，和經滲碳處理的鋼產品，彼可減 少炭黑的生成，促使包括深凹處內壁的工作件整個表面有 均一的滲碳作用，以及減少氣體及熱量的用量· 本發明的真空滲碳方法爲其中滲碳處理是以使真空滲 碳高溫爐中加熱室之鋼材的工作件進行真空加熱，以及將 滲碳氣體供應進加熱室中來進行的方法。 其特徵爲使用氣相不飽和脂@烴類作爲滲碳氣體，以 及滲碳處理是在真空度S 1 k P a的加熱室中進行· 希望使用炔鹰氣體，尤其是乙炔氣體，來作爲上述的 氣相不飽和烴類。 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公釐） (請先閱讀背面之注意事項再填寫本頁) --------^---------^ 8 經濟部智慧財產局員工消費合作社印製 A7 _B7______ 五、發明說明（6 ) 此外，本發明的真空滲碳方法可應用到其中氮（N) 有與碳（C )同時滲透進鋼材表面的滲碳氮化處理，以及 也可應用到簡單的真空滲碳方法。此時除了以乙快氣體作 爲滲碳氣體外，還加上以氨氣（nh3)來作爲氣相氮源 〇 同樣地，本發明真空滲碳裝置所提供的真空滲碳室提 供有一個用以對來自鋼材之工作件加熱的加熱室，和一個 供應炔屬氣體進入上述加熱室的滲碳氣體源，以及一個對 加熱室抽真空的真空抽取設備，其特徵爲真空滲碳是在 SlkPa下進行的。 還有就是，經本發明滲碳的鋼產品爲其中提供有內徑 D之閉合孔洞的鋼產品，其中閉合孔洞的內壁有經滲碳處 理，其特徴爲沿著上述之閉合孔洞內壁表面之滲碳表面深 度的菡域會在延伸至距孔洞開口末端之深度L之間-其中 深度L在1 2至5 0之間-幾乎是均質的· 爲了在無炭黑之下達到真空滲碳（減壓氣體滲碳）， 吾人希望除了對滲碳有直接貢獻的碳以外，高溫爐內沒有 其他的分解發生，因此吾人希望供應到高溫爐內的碳源要 儘可能地分解或只在工作件表面作用，而非在高溫爐材料 或在高溫爐空間內發生分解或起反應。 由該條件觀點看來*吾人希望滲碳氣體爲化學不安定 的活性氣體，而非先前真空滲碳方法用作滲碳氣體的安定 甲烷型氣體· 因此，本發明的真空滲碳方法是使用較具化學活性和 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公爱） (請先閱讀背面之注意事項再填寫本頁) 裝 — II 訂-!-----^、 9 A7 ____B7_ 五、發明說明（7 ) 比飽和脂族烴類氣體-比如甲焼氣體或丙烷氣體等-要更 容易反應及分解的不飽和脂族烴類氣體來作爲滲碳氣體。 然而，當使用這些不飽和氣體時，如在高溫爐中的停 留時間超過極限時將會比先前技藝所用的飽和烴類情形要 更容易發_生熱解而產生炭黑，因此需要嚴格限制氣體停留 在高溫爐內的時間，以及需在適合於工作件表面進行反應 及分.解但不適於發生熱解的時間範圍內將氣體排出髙溫爐 外· 因此.，和先前真空滲碳方法相比，本發明的真空滲碳 方法是以極低的高爐內壓力-1 kP a -來進行以便縮短 滲碳氣體停留在高溫爐內的時間，如此可在工作件表面有 分解反應發生，以及在高溫爐空間內將幾乎沒有任何炭黑 產生。 同樣地，爲了將碳供應進來後於工作件表面分解所產 製的複合氣體移走，以及使新供應進來的氣體分散開來， 在先前真空滲碳方法中，氣體壓力會稍髙（1 5_70 kPa)，以及複合氣體可使用像風扇之類的在高溫爐內 藉著混合以降低壓力或藉著連續的氣體输入而得以減少， 並且使新鮮髙壓的氣體以連績方式進來以確保供應至工作 件表面之碳的數量。很自然的，這意謂著有比進行滲碳所 需要多得多的滲碳氣體被供應進來，而這卻有利於更多炭 黑的生成。 相反地，本發明真空滲碳方法是使用氣相不飽和脂族 烴類作爲滲碳氣體’同時屬於氣相不飽和脂族烴類乙烯氣 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝 — II 訂·!-----0 經濟部智慧財產局負工消费合作社印5^ A7 ___B7_ 五、發明說明（8 ) 體（c2h4)或乙炔氣體（c2ii2)與先前使用的甲烷型 氣體的不同處在於其氫原子數目相對於碳原子數目要少些 〇 基於該理由，於是當滲碳氣體在加熱室中分解以製備原 子碳時沒有許多分解氣體，比如氫氣，分子生成，因 此會阻礙滲碳氣體分子與工作件接觸的氫氣分子數目將會 減少•如果滲碳處理當中的壓力不髙以及滲碳氣體分子的 平均自由路徑有獲得延伸，則滲碳氣體分子將很容易滲透 進環繞工作件之深凹處附近的內壁；此外由於滲碳氣體分 子具化學活性，彼等是容易分解的不飽和烴類，彼等會在 短時間內輕易地與工作件表面作用，即令未加到髙溫和未 進行長時間處理亦然，於是連同澱積得到的原子碳可供應 到工作件表面處這件事實來看，這表示工作件的每個部份 都是經過均一滲碳處理的。 經濟部智慧財產局員工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 該滲碳處理的均一性會隨著高溫爐的壓力越低而越好。 就此而言，對提供有內徑D之閉合孔洞的工作件來說，當 以0.0 2 k P a的髙溫爐內壓力來進行滲碳處理時，則 其中總滲碳表面深度幾乎爲均一之深度L的區域可在 L/D比值最高爲3 6之下達到。如果使高溫爐內壓力甚 至更低，則其中總滲碳表面深度幾乎爲均一之深度L的區 域可在L/D比值最髙爲5 0之了達到•道樣的數字以先 前的氣體滲碳方法，或以真空滲碳方法或電漿滲碳方法當 然是達不到的。 本發明是在$ 1 k P a -和先前真空滲碳法相比下是 本纸張尺度適用中國國家標準（CNS)A4規格（21〇 x 297公爱） -11 - 經濟部智慧財產局貝工消費合作社印製 A7 B7 五、發明說明（9 ) 極低的-之下來進行滲碳處理，因此氣體供應至加熱室到 以抽吸裝置抽走以維持低壓之間的時間，即氣體在加熱室 中的停留時間，會縮短。由於停留時間短，則在該時間內 未分解的滲碳氣體可在彼於加熱室中分解及炭黑生成之前 被由加熱~1由移走，同時可避免在加熱室中有炭黑生成》 因此，儘管使用不安定且容易分解的氣相不飽和烴類 作滲碳氣體》彼有可能使工作件發生滲碳，同時可在不阻 礙滲碳下來防止炭黑的生成，因爲所需量的滲碳氣體可在 短時間內釋著與工作件表面接觸以引發滲碳作用來得以分 解，同時容易製造炭黑的不分解滲碳氣體可直接由加熱室 連同分解後製備的氣體（氫氣等等）被排掉。經分解製備 之氣體也會在短時間內被由加熱室中排掉的這項事實也有 助於滲碳氣體分子平均自由路徑的進一步延伸，並有助於 工作件上各個部份都有均一的滲碳作用。 另外就是，藉著測定被真空幫浦排出去的滲碳氣體用 量，則有可能適當調節進入加熱室之滲碳氣體的數量，進 而可保持所用的滲碳氣體量在最低量。 還有就是’因爲很容易起作用及分解之具化學活性的 氣相不飽和脂族烴類被用作本發明真空滲碳方法的滲碳氣 體，該氣體可很容易與工作件表面作用及分解以便在未供 應更多的滲碳氣體之前-這在先前的甲烷氣體情形中是必 須的-就可引發滲碳處理的，所以氣體供應置可保持低到 上述的碳原子數目約爲兩倍之用以使工作件表面進行滲碳A7 ____B7___ 5. Description of the invention (1) Related fields of the present invention The present invention relates to a vacuum carburizing method, a vacuum carburizing device for performing the method, and a carburized steel product thereof. The most widely used carburizing treatment method for steel and surface modification is usually gas carburizing in the gas phase; however, gas carburizing treatment will produce abnormal surface layers and is not suitable for high-temperature carburizing. The structure of the high-temperature furnace produces problems such as carbon black, and many too complex and uncontrollable carburizing conditions. Therefore, a vacuum carburizing method using a vacuum carburizing high-temperature furnace has been described to overcome these problems. Previous vacuum infiltration methods used gas-phase saturated aliphatic hydrocarbons as the carburizing gas. Thus, methane-type gases such as methane gas (ch4), propane gas (c3h8), and butane gas (C4Hi.) Have been used as gas phase saturated aliphatic hydrocarbons; these carburizing gases are directly supplied to vacuum carburizing In the heating chamber of the autoclave furnace, the work pieces containing steel are heated to about 9 0 to 0 0 0 ° C. * They will be pyrolysed in the heating chamber, and prepared in this method. Activated carbon penetrates into the surface of the steel, which in turn causes carburization and dispersion. In order for the carburizing gas to be completely supplied to the surface of the work piece, it is necessary to allow the carburizing gas to permeate the entire surface of the work piece. Therefore, the heating chamber where the work piece is temporarily held is vacuumed, and the fresh supply can be made by The carburizing gas that comes in is still agitated, or the pressure of the high temperature furnace is changed by continuous addition (pulsed.admission). This paper size applies to China National Standard (CNS) A4 specifications (210 * 297 mm) (Please read the precautions on the back before filling this page) ^ -----—------! Intellectual Property of the Ministry of Economic Affairs Printed by the Bureau's Consumer Cooperative Cooperative-4-A7 A7 Printed by the Shell Property Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economy As a carburizing gas to produce a strong carburizing effect, and the hydrocarbons used are gas-phase saturated aliphatic hydrocarbons, such as the methane-type gas described above. The reason is that the salty artisans recognize that methane gas is very stable in the temperature range from ^ 髙 to about 110 ° C when carburizing steel, and that although the stability of carburizing powder will be reduced and there is Carbon black is produced, but it will become stronger as the molecular weight increases. On the other hand, we also recognize that gas-phase unsaturated aliphatic hydrocarbons, such as acetylene gases, are more unstable than methane-type gases, and pyrolysis will Progress is better than osmosis, so that when used as carburizing gas, he will only produce carbon black, so it is completely unsuitable for carburizing gas (see Kawakami & Gosh a " Kinzoku hyomen koka shori gitutsu " [Metal surface hardening Treatment] " MikiShoten (October 25, 1971) p.139). Therefore, only gas-phase saturated aliphatic hydrocarbon methane-type gases, such as methane gas (CH4), propane gas (C3H8), and butane gas (C4H10), can be used as carburizing gas * and gas phase unsaturated hydrocarbons The acetylene type gas is still ignored. However, although the traditional vacuum carburizing method has solved the quality problems of gas carburizing, they still involve the problems listed below. These problems are as follows. _ 1 · A lot of carbon black will be manufactured ’which makes maintenance operations complicated and difficult. This paper size is applicable to China National Standard (CNS) A4 specification (21〇x 297 male «) 5 I--f 、 ---- I! Order · 1111! · # T" Please read the precautions on the back before filling in this Page) *-B7 V. Description of the invention (3) 2. It is difficult to have a uniform carburizing effect without reducing the number of work pieces inserted into the heating chamber and without increasing the gas quality. < Please read the notes on the back before filling this page) 3. 'll Carburizing small diameter holes and narrow cracks on the work piece is not appropriate. 4. Equipment cost is high, and it is limited to special purpose. 5. Compared with gas carburizing, the productivity is low and the treatment cost is high. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. The previous mechanism of carburizing gas pyrolysis can be shown in the following equation. C3H8— [C] + C2He + H2 C2He— [C] + C Η 4 + Η 2 CH4 — [C] + 2H2 In the above equation, [C] is activated carbon that contributes to carburization. Activated carbon will only become carbon black if it comes from the decomposition of the internal space of the high-g furnace instead of the surface of the work piece. This is why vacuum carburization will produce carbon black. Measures to reduce the production of this carbon black include the following. This paper size applies to China National Standard (CNS) A4 specifications (210 * 297 mm) A7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs ______B7____ V. Description of the invention (4) a. Use infiltration diluted with inert gas Carbon gas (gas pressure is the same as that used in the previous method) in order to make the amount of carburizing gas in the high-temperature furnace as thin as possible. W ·-b. Mix the oxygen source (such as alcohol) with the carburizing gas so as not to cause abnormalities. Layer, so the activated carbon part is carburized with C 0, and excess C 0 gas can be driven away from the high-temperature furnace. C. One involves the decomposition of all of these in near-protonation and effective remaining space. From the equipment and quality. When there is a gap between the parts, the soaking furnace in which the carburizing condition or the interior of the fissure is used to obtain a proper gas permeability circulation device room has other measures besides offsetting carbon black. Plasma is generated on the surface of the workpiece so that the thin carburizing gas can be applied to the surface of the work piece, so that the carbon black produced by the high temperature furnace will be very small (plasma carburization). The countermeasure can reduce the amount of carbon black produced. However, the cost of their problem handling is rising, and the vacuum carburization has been lost. This attempt to obtain improper or uniform carburization when the depth of methane-type gas cannot be avoided or when the carbon surface depth and gas mixing are carried out During the operation, when the loading work piece has small diameter holes or narrow cracks as the carburizing gas for vacuum carburizing, it will not change, because it is impossible when the two adjacent f of the hole are too close to each other. For example, when the carburizing treatment is performed on a heating device equipped with a device or a high-speed gas sprinkler, when the diameter of the work piece is 4 mm and the paper size of the deep kernel is applicable to the Chinese National Standard (CNS) A4 specification (210 * 297 public love (please Read the notes on the back before filling in this page> 4 ^ · — — ——— Order -------. ^! 7 A7 A7 Printed by the Shellfish Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs ___B7_ 5 Explanation of the invention (5) When the 8 mm hole is opened, the effective carburizing surface depth at the bottom of the hole is about 0.30 mm *, which is much different from that of the outer surface of the work piece, which is about 0.5 1 mm. The change in the depth of the carbon surface occurs because the number of hydrogen atoms is greater than the number of carbon atoms, and because the decomposition in the heating chamber to prepare the atoms, there are more hydrogen molecules in the decomposed and prepared gas, which will cause infiltration. The average free path of the carbon molecules is reduced * Therefore, in order to perform carburizing treatment so that the required carburizing surface depth can be ensured on the inner wall surface of the small diameter hole, the carburizing treatment is to supply carbon into the hole or supply Exceeding demand Carbon gas and gas flow are mixed, but this will lead to an increase in the amount of carbon black produced. SUMMARY OF THE INVENTION The present invention is a response to the above problems, and its object is to provide a vacuum carburizing method and apparatus, and The carburized steel products can reduce the formation of carbon black, promote uniform carburization of the entire surface of the work piece including the inner wall of the deep recess, and reduce the amount of gas and heat. The vacuum carburization method of the present invention The carburizing process is a method in which the workpiece of the steel in the heating chamber in the vacuum carburizing high-temperature furnace is subjected to vacuum heating, and the carburizing gas is supplied into the heating chamber. It is characterized by the use of gas-phase unsaturated fats @ Hydrocarbons are used as carburizing gas, and the carburizing treatment is performed in a heating chamber with a vacuum of S 1 k Pa. It is desirable to use acetylene gas, especially acetylene gas, as the above-mentioned gas-phase unsaturated hydrocarbon. The dimensions are applicable to China National Standard (CNS) A4 (210x297 mm) (Please read the precautions on the back before filling this page) -------- ^ --------- ^ 8 Ministry of Economic Affairs Intellectual property Printed by employee consumer cooperative A7 _B7______ 5. Description of the invention (6) In addition, the vacuum carburizing method of the present invention can be applied to the carburizing and nitriding treatment in which nitrogen (N) has penetrated into the steel surface at the same time as carbon (C), and It can also be applied to a simple vacuum carburizing method. In this case, in addition to the acetylene gas as the carburizing gas, ammonia gas (nh3) is also used as the gas phase nitrogen source. Similarly, the vacuum carburizing device of the present invention The provided vacuum carburizing chamber is provided with a heating chamber for heating work pieces from steel, a carburizing gas source for supplying acetylene gas into the heating chamber, and a vacuum extraction device for evacuating the heating chamber. It is characterized in that vacuum carburization is performed under SlkPa. In addition, the carburized steel product according to the present invention is a steel product provided with a closed hole having an inner diameter D, wherein the inner wall of the closed hole is subjected to carburizing treatment, which is particularly along the surface of the inner wall of the closed hole described above. The plutonium at the depth of the carburized surface will be between the depth L extending from the opening end of the hole-where the depth L is between 12 and 50-almost homogeneous. To achieve vacuum carburization without carbon black ( Decompression gas carburization), I hope that no decomposition will occur in the high-temperature furnace except for carbon that directly contributes to carburization. Therefore, I hope that the carbon source supplied to the high-temperature furnace should be decomposed as much as possible or only on the work piece. Surface effect, not decomposition or reaction in high temperature furnace materials or in high temperature furnace space. From this point of view, I hope that the carburizing gas is a chemically unstable reactive gas, rather than a stable methane-type gas used as a carburizing gas in the previous vacuum carburizing method. Therefore, the vacuum carburizing method of the present invention uses Chemically active and this paper size applies Chinese National Standard (CNS) A4 specifications (210x297 public love) (Please read the precautions on the back before filling out this page) Installation — Order II-! ----- ^, 9 A7 ____B7_ V. Explanation of the invention (7) As a carburizing gas, an unsaturated aliphatic hydrocarbon gas that is easier to react and decompose than a saturated aliphatic hydrocarbon gas such as formazan gas or propane gas. However, when using these unsaturated gases, if the residence time in the high-temperature furnace exceeds the limit, it will be easier to generate carbon black by pyrolysis than the saturated hydrocarbons used in the prior art, so the gas needs to be strictly restricted The time to stay in the high-temperature furnace, and the time required to react and separate on the surface of the work piece. The gas is discharged out of the high-temperature furnace within the time range suitable for pyrolysis but not suitable for pyrolysis. Therefore, it is similar to the previous vacuum carburizing method. In contrast, the vacuum carburizing method of the present invention is performed at a very low blast furnace pressure -1 kP a-in order to shorten the time for carburizing gas to stay in the high temperature furnace, so that a decomposition reaction can occur on the surface of the work piece, and There will be almost no carbon black produced in the high-temperature furnace space. Similarly, in order to remove the composite gas produced after the carbon supply comes in and decompose on the surface of the work piece, and to disperse the newly supplied gas, in the previous vacuum carburizing method, the gas pressure will be slightly increased (1 5_70 kPa), and composite gas can be reduced by mixing in a high-temperature furnace such as a fan to reduce the pressure or by continuous gas input, and freshly pressurized gas comes in in a continuous manner to ensure supply to The amount of carbon on the surface of the work piece. Naturally, this means that much more carburizing gas is supplied than is required for carburizing, which is beneficial for the production of more carbon black. In contrast, the vacuum carburizing method of the present invention uses gas-phase unsaturated aliphatic hydrocarbons as the carburizing gas, and also belongs to gas-phase unsaturated aliphatic hydrocarbon ethylene gas. The paper size is applicable to Chinese National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling out this page) Pack — II order ·! ----- 0 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 5 ^ A7 ___B7_ V. Description of the invention (8 ) Body (c2h4) or acetylene gas (c2ii2) differs from the previously used methane gas in that the number of hydrogen atoms is smaller than the number of carbon atoms. For this reason, when the carburizing gas is decomposed in a heating chamber to In the preparation of atomic carbon, there are not many decomposition gases, such as hydrogen, molecules are generated, so the number of hydrogen molecules that will prevent the carburizing gas molecules from contacting the work piece will be reduced. • If the pressure in the carburizing process is not high and the average of carburizing gas molecules is If the free path is extended, the carburized gas molecules will easily penetrate into the inner wall near the deep recess around the work piece; in addition, due to the chemical activity of the carburized gas molecules, they Unsaturated hydrocarbons that are easily decomposed, they will easily interact with the surface of the work piece in a short period of time, even if it has not been added to the cymbals and has not been treated for a long time, so the atomic carbon obtained with the deposition can be supplied to the work Looking at the fact on the surface of the piece, this means that each part of the work piece is uniformly carburized. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) The uniformity of the carburizing treatment will be better as the pressure of the high temperature furnace is lower. In this regard, for a work piece provided with a closed hole having an inner diameter D, when the carburizing treatment is performed at a pressure of 0.0 2 k P a high temperature furnace, the total carburizing surface depth is almost uniform. A region of depth L can be reached below a maximum L / D ratio of 36. If the pressure in the high-temperature furnace is made even lower, the area in which the total carburized surface depth is almost uniform and the depth L can be reached at a maximum L / D ratio of 50. • Road-like numbers with previous gas carburization Of course, either vacuum carburizing or plasma carburizing cannot be achieved. Compared with the previous vacuum carburizing method, the present invention is applicable to the Chinese paper standard (CNS) A4 specification (21 × 297), compared with the previous vacuum carburizing method. Printed by the Consumer Cooperative A7 B7 V. Description of the invention (9) Very low-Carburizing treatment is performed below, so the time between the gas supply to the heating chamber and the pumping device to maintain the low pressure, that is, the gas in the heating chamber The dwell time will be shortened. Due to the short residence time, the carburizing gas that has not been decomposed during this time can be removed by heating ~ 1 before it is decomposed in the heating chamber and carbon black is generated. At the same time, carbon black formation in the heating chamber can be avoided. Therefore, despite the use of unstable and easily decomposed gas-phase unsaturated hydrocarbons as carburizing gas, it is possible to carburize the work piece and prevent the formation of carbon black without impeding carburization because the required amount of The carburizing gas can be released in contact with the surface of the work piece in a short time to initiate carburizing to be decomposed. At the same time, the non-decomposing carburizing gas that is easy to produce carbon black can be directly heated by the heating chamber together with the decomposed gas (hydrogen, etc.) ) Excluded. The fact that the gas produced by the decomposition will also be discharged from the heating chamber in a short period of time also helps to further extend the average free path of the carburizing gas molecules, and helps all parts of the work piece to be uniform Carburizing effect. In addition, by measuring the amount of carburizing gas exhausted by the vacuum pump, it is possible to appropriately adjust the amount of carburizing gas entering the heating chamber so as to keep the amount of carburizing gas used to a minimum. There is also 'Because chemically active gas-phase unsaturated aliphatic hydrocarbons which are easy to function and decompose are used as the carburizing gas of the vacuum carburizing method of the present invention, the gas can easily interact with and decompose the surface of the work piece. So that the carburizing treatment can be initiated before more carburizing gas is supplied-which was necessary in the previous methane gas case-so the gas supply can be kept as low as about twice the number of carbon atoms mentioned above Used to carburize the surface of the work piece
I 所需總碳量。就此而言，有數+倍需要量的滲碳被供應到 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） ------------r5, --------t---------♦ (請先閲讀背面之注意事項再填寫本頁) -12 - A7 ____B7__ 五、發明說明（IQ ) 先前真空滲碳方法的高溫爐中。此外，本發明的真空滲碳 方法是在S 1 k P a的低壓下進行，如此加熱室本身可在 相對於加熱室的外界下呈現出絕熱效應，所以幅射熱量損 (請先閱讀背面之注意事項再填寫本頁) 失將很少，同時維持加熱室內部溫度所需的熱量也可減少 〇 因此，本發明真空滲碳方法可產生許多好處，與先前 真空滲碳方法相比其中有可使炭黑的生成下降，儘管敢於 使用在先前技藝因其只會容易製造炭黑而忽略不用的氣相 未飽和脂.族烴類來作爲滲碳氣體，每一部份的工作件-包 括深凹處的內壁表面-都可均一地進行滲碳，以及所用的 氣體置及熱量可獲得減少。 此外，以本發明真空滲碳方法可使加熱室在相對於加 熱室外頭可呈現出絕熱效應是因爲加熱室內部保持在 5 1 k P a的低壓下；因此真空室本身對水冷卻或熱絕緣 的需求就下降，於是包括加熱室之真空容器的外壁結構只 要考慮能維持低壓，而無須有特殊的絕緣結構，而這有助 於製程數目及製造成本的降低。 經濟部智慧財產局員工消費合作社印製 順便提及，離子滲碳法及電漿滲碳法爲用於使工作件 進行低壓滲碳的已知方法，但當工作件有深的凹處時，則 使用這些滲碳方法時將無法避免有滲碳變異的產生，因爲 經離子化的氣體無法到達凹處的底部’以及儘管所生成的 炭黑比先前真空滲碳方法所製備者要少’但炭黑的生成卻 無法與本發明真空滲碳方法一樣保持很少；此外，這些方 法還有的缺點就是設備成本很髙。 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐) 71 " A7 B7 五 '發明說明（11 ) 當以乙炔氣體作爲烯靥氣體或炔屬氣體來用作氣相不 飽和脂族烴類時，彼的組成氫原子將比乙烯氣體情形者來 得少，彼較具活性且更容易進行滲碳處理，用量可減少， 以及處理成本可降低》 還有i是，除了以乙块氣體作滲碳氣體外，另外加入 氨（nh3)來作爲氣相氮源以進行滲碳處理時，則將有 可能在較低的溫度驟冷，於是扭變將可減少》 圖式簡要說明 圖1顯示本發明真空滲碳裝置體系形式的橫截面圖。 圖2顯示本發明真空滲碳高溫爐操作模式的圖形。 圖3是以本發明真空滲碳方法進行滲碳之樣品的橫截 面圖。 圖4顯示在進行本發明真空滲碳方法時高溫爐內滲碳 表面深度及壓力之間關係以及炭黑生成的圖形。 圖5顯示以本發明真空滲碳方法進行滲碳之樣品的整 個滲碳層的橫截面圖，以及代表滲碳表面深度均一性的圈 形》 · 元伴符號說明 1 :真空滲碳爐 2 :加熱室 2 a :發熱元件 2 b :隔熱材料 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） (請先閱讀背面之注意事項再填寫本頁) 裝--------訂---------_ 經濟部智慧財產局員工消費合作社印製 -14 - A7 ___B7__ 五、發明說明（12 ) 3 :冷卻室 3 a :油槽 4 :真空容器 5 :入口門 5 a _ :內部入口門 6 :中間門 .6 a :內部中間門 7 :出口門 8 :.內部輸送裝置 9 :垂直移動平台 1 0 :工作件樣品 1 1 :閉合孔洞 1 2 :閉合孔洞 V :真空抽取設備 C :滲碳氣體源 G:惰性氣體源 Μ :工作件 較佳骼系的說明 本發明體系的形式依據附圖來說明如下。 圖1顯示一個本發明真空滲碳裝置體系的形式：真空 滲碳爐1有提供一個以真空容器4覆蓋的加熱室2，以及 鄰接該加熱室2的冷卻室3· 加熱室2是由在高溫真空環境及在大氣下爲化學上及 本纸張尺度適用中國國家標準（CNS)A4規格（210 x 297公釐） <請先閲讀背面之注意事項再填寫本頁) 裝--------訂---------户 經濟部智慧財產局員工消費合作社印製 -15 - 經濟部智慧財產局員工消費合作社印製 A7 ______B7___ 五、發明說明（13 ) 機械上安定的*熱元件2 a，以及一個隔熱材料2 b所組 成。經再結晶處理的碳化矽發熱元件或在其表面上有氧化 鋁噴灌塗層形成的這類元件可用作發熱元件2 a。高純度 的陶瓷纖維可用作隔熱材料2b·冷卻室3的外壁是由部 份的真空％器4所構成，同時彼提供有一個油槽3a。 真空抽取設備V有與加熱室2及冷卻室3相連；加熱 室2也有與溶於丙酮中之乙炔氣體的滲碳氣體源C-彼可 供應乙炔氣體-相連，而冷卻室3則與氮氣源的惰性氣體 源G等-彼可加壓到大氣壓或以上-相連。 在加熱室2的上方末端有一個入口門5，在其下方末 端有一個中間門6，以及在冷卻室3的下方末端有一個出 口門7;以及有一個內部输送裝置8用來將工作件Μ由加 熱室2的上方末端輸送到冷卻室3的下方末端。冷卻室2 中還有一個垂直移動平台9用來將工作件Μ放進油槽3 a 中和將其帶出來。此外，在加熱室2的內部入口門5 a及 內部中間門6 a處有加熱零件，其末端是關閉的。 使用以該方式組合之真空滲碳裝置的真空滲碳方法接 著將參照圖2來作解釋•大氣壓下使加熱室2預加熱到所 需求的溫度· 製程L _ 開啓入口門5、5 a，並將第一個工作件Ml输送進 加熱室2中，然後立即將入口門5、5 a關閉· $紙張尺^適用中國國家標準（CNS>A4規格（210 x 297公釐) "7" ' ί裝--------訂---------的' (請先閱讀背面之注意事項再填寫本頁) 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（14 ) MM-2- 以真空抽取設備V來對加熱室2抽真空直到真空度爲 〇. 0 5 kP a，同時使第一個工作件Ml真空加熱到所 需求的溫度（ 9 0 0°C)，然後將來自滲碳氣體源C的乙 炔氣體供·%進加熱室2中（此時加熱室2中的壓力變爲 〇. lkPa)，並進行滲碳作用。停止乙块的供應，在 加熱室2內的真空度再度爲0.0 5 kP a時進行擴散作用 ，並在溫度掉到8 5 0 °C的驟冷溫度時進行徐熱熱處理。 在此同時.，對冷卻室3抽真空· 製程3 開啓中間門6、6 a ，以內部輸送裝置8將第一個工 作件Μ 1輸送到冷卻室3的垂直移動平台9之上，然後立 即關閉中間門6 、6 a.。- 製程4 在垂直移動平台9下降以使第一個工作件Μ 1進行驟 冷時，藉著供應來自惰性氣體源G的惰性氣體來使冷卻室 3加壓到大氣壓或以上。在該製程當中，將空氣加入處於 高溫的加熱室2中以使其達大氣壓，然後開啓入口門5、 5a，接著立即關閉入口門5、ga ·順便提及，之所以 要對冷卻室加壓以達大氣壓或以上是要防止加進加熱室2 中的空氣會進入冷卻室3中》 本紙張尺度適用中國國家標準（CNS>A4規格<210 * 297公芨） -------------ί 裝--------訂---------.^- (請先Μ讀背面之注意事項再填寫本頁) - -17 - A7 B7__ 五、發明說明（15 ) 使垂直移動平台9上升，開啓出口門7，並立即將第 —個工作件Ml輸送到高溫爐1外，立即關閉出口門7，以 及抽真空來使冷卻室3冷卻。在此同時以如製程2方式來 處理第2 工作件Μ 2。 其後重覆製程3 - 5來正常進行後績工作件的滲碳處 理。. 圖3顯示以一個該方式進行滲碳之工作件例子的橫截 面圖：將提供有內徑6毫米及深2 8毫米的閉合孔洞1 1 和內徑4毫米及深2 8毫米的閉合孔洞1 2的外徑2 0毫 米及長3 0毫米的工作件樣品1 0 —次一個放在3 0 0個 寬4 0 0毫米、長6 0 0毫米及髙5 0毫米的平板中，並 將6個這類平板中的放在加熱室2中其他平板的頂端，以 及當以9 0 0°C的滲碳溫度處理時，在滲碳時間爲4 0分 鐘、擴散時間爲7 0分鐘和驟冷溫度爲8 5 0 °C下，各個 工作件的有效滲碳表面深度t。約爲〇. 5 1毫米，而小 尺寸孔洞12底部的有效滲碳表面深度t2約爲0. 49 毫米。於是經證實使用該體系的真空滲碳方法時，可在變 異數約爲0· 02毫米下以均一方式對各個部份進行滲碳 處理。 此外’在加熱室2內並無顯著的炭黑累稹，即令在重 覆該實驗數百次亦然。同樣地，在將內徑4毫米及深5 0 毫米的閉合孔洞放在長度幾乎是上述樣品1〇之2倍的樣 品中，於是在以相同方式對彼進行滲碳處理時，外表面的 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） (請先閱讀背面之注意事項再填寫本頁) 裝—--訂·！ — 1!!^ 經濟部智慧財產局具工消費合作社印製 -18 - A7 __B7____ 五、發明說明（16 ) 有效滲碳表面深度與孔洞底部的有效滲碳表面深度二者間 差異可保持低到約爲0. 03毫米，這表示以該體系的真 空滲碳方法將有可能對每個部份進行均一的滲碳處理。 就此而言，當工作件樣品1 0以先前真空滲碳方法使 用先前的每烷型氣體作滲碳氣體來作滲碳處理時，儘管作 了約兩倍的滲碳處理及供應了 21 0倍之滲碳氣體進入加 熱室2中，仍會有滲碳變異性產生，工作件樣品1 0的外 表面有效滲碳表面深度爲0. 51毫米，而內徑爲4毫米 之孔洞1_2底部的有效滲碳表面深度爲0. 30毫米•還 有就是，使用先前的真空滲碳方法在重覆5 — 2 0次的滲 碳處理後會有燒盡現象發生，將有大童的炭黑累積在加熱 室2內，於是必須作清潔工作。以一般進行的氣體滲碳處 理來看，吾人無法預期滲碳處理可達到孔洞1 2的底部。 順便提及，在加熱室內部真空度5 1 k P a下以本發 明真空滲碳方法進行滲碳處理時將有可能避免滲碳中工作 件的變異性，即令使用乙炔氣體作爲滲碳氣體亦然，以及 可在減少炭黑生成之際來進行滲碳處理；然而，並不希望 在加熱室內部壓力超過1 k P a下來進行滲碳處理；因爲 將無法減少炭黑的生成，同時滲碳處理也會變得不均一。 如進一步降低加熱室內部的壓力，則將有可能增加本 發明的好處，以及加熱室自身的絕熱效果會顯示的更有效 以致水冷卻或絕緣等都變得不需要，並且可提升節約能源 的儍點，所以由該觀點看來，吾人希望滲碳處理是在加熱 室內部的壓力較宜下降到SO. 3 kP a，更適宜下降到 -------- ——-- - --- 一 本紙張尺度適用中國國家標準（CNS)A4規格（210x297公爱） 1〇 (請先閱讀背面之注意事項再填寫本頁) · I--I---訂·！- ----.^ 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明說明（Π ) $〇.11^?3，下來進行。 圖4顯示在9 3 0 °c的溫度，使用乙炔氣體在暫留時 間、滲碳時間及擴散時間分別爲3 0分鐘、3 0分鐘及 4 5分鐘（參見圖2 )下對直徑2 0毫米及長3 0毫米的 樣品（S'" CM4 15)-其上提供有直徑6毫米及深2 7 毫米之閉合孔洞-進行滲碳處理時，滲碳表面深度與高溫 爐內壓力二者的關係*以及還有炭黑的生成β A線代表在 閉合孔洞底部滲碳表面深度的變化*以及B線顯示在工作 件樣品表.面的滲碳表面深度的變化。 由圖4可清楚看出，和樣品表面的關係是當髙溫爐內 壓力SI. OkPa時，可獲得幾乎固定的滲碳表面深度 。然而，爲了要使閉合孔洞內外有均一地滲碳處理，吾人 希望高溫爐內壓力SO. 3kPa。 有關炭黑的生成：當高溫爐內壓力S1. OkPa時 不會有任何的問題。 I. 圖5顯示對外徑20毫米及長182毫米-其上提供 有深175毫米及內徑爲3. 4毫米的閉合孔洞-的樣品 (S CM4 1 5 )進行本發明滲碳方法時所形成之滲碳餍 狀態的橫截面圖’以及代表滲碳均一性的圓形·此時高溫 爐內的溫度爲930 °C，爐內壓力爲〇. 〇2kPa，以 及滲碳時間和擴散時間總和爲4 3 0分鐘；以如前面敘述 的將樣品裝載上去* 由圖5可明顯看出在閉合孔洞的內壁中，可在距閉合 孔洞開口之1 2 2毫米深度處獲得一個總滲碳表面深度幾 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝--------訂---------.^' 經濟部智慧財產局員工消費合作社印製 A7 __B7 五、發明說明（l8 ) 乎均一（2. 1毫米）的區域*和總滲碳深度會在深度爲 1 5 6毫米時變爲零。.於是當閉合孔洞的內徑爲D以及距 其中總滲碳表面深度幾乎均一之區域的孔洞開口末端的深 度爲L時，則可獲得的區域在L/D至3 6之間。所以， 高溫爐內也力越低，則滲碳均一性就越大，以及有可能藉 著降低爐內壓力來達到的深度是在其中總滲碳處理幾乎均 —之區域L的L/D約爲5 0者。 (請先閱讀背面之注意事項再填寫本頁) -------—訂 — — — — —----梦 '. 經濟部智慧財產局員工消費合作社印製 適 度 尺 張一紙 本 21 /V 格 規 A4 S) N (C 準 標 家 釐 公 97 2I Total carbon required. In this regard, several + times the required amount of carburizing is supplied to the paper size applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 public love) ------------ r5,- ------- t --------- ♦ (Please read the precautions on the back before filling this page) -12-A7 ____B7__ V. Description of the Invention (IQ) High temperature of the previous vacuum carburizing method In the furnace. In addition, the vacuum carburizing method of the present invention is performed under a low pressure of S 1 k Pa, so that the heating chamber itself can exhibit adiabatic effects under the outside of the heating chamber, so the radiation heat loss (please read the Please fill in this page again.) The loss will be small, and the heat required to maintain the temperature inside the heating chamber can be reduced. Therefore, the vacuum carburizing method of the present invention can generate many benefits. Reduce the production of carbon black, although dare to use in the previous technology because it can only easily produce carbon black and ignore unused gas-phase unsaturated lipids. Hydrocarbons as carburizing gas, each part of the work-including deep The inner wall surface of the recess can be uniformly carburized, and the gas and heat used can be reduced. In addition, with the vacuum carburizing method of the present invention, the heating chamber can exhibit adiabatic effects relative to the outside head of the heating chamber because the interior of the heating chamber is maintained at a low pressure of 5 kPa; therefore, the vacuum chamber itself is cooled by water or thermally insulated. The demand for power is reduced, so the outer wall structure of the vacuum container including the heating chamber only needs to be considered to maintain a low voltage without the need for a special insulation structure, which helps reduce the number of processes and manufacturing costs. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economics Incidentally, the ion carburizing method and plasma carburizing method are known methods for low-pressure carburizing of work pieces, but when the work piece has deep recesses, Then the use of these carburizing methods will not avoid the occurrence of carburizing variations, because the ionized gas can not reach the bottom of the recess 'and although the carbon black produced is less than that prepared by the previous vacuum carburizing method', The formation of carbon black cannot be kept as small as the vacuum carburizing method of the present invention; in addition, these methods also have the disadvantage that the equipment cost is very high. This paper size applies Chinese National Standard (CNS) A4 specification (210 X 297 mm) 71 " A7 B7 Five 'invention description (11) When acetylene gas is used as olefinic gas or acetylene gas for gas phase When saturated aliphatic hydrocarbons, their composition hydrogen atoms will be less than those in the case of ethylene gas, they are more active and easier to carry out carburizing treatment, the amount can be reduced, and the treatment cost can be reduced. "I is, in addition to When block B gas is used as carburizing gas and ammonia (nh3) is added as a gas phase nitrogen source for carburizing treatment, it may be quenched at a lower temperature, so the distortion will be reduced. Description FIG. 1 shows a cross-sectional view of a system form of a vacuum carburizing apparatus according to the present invention. Fig. 2 is a diagram showing an operation mode of the vacuum carburizing high-temperature furnace according to the present invention. Fig. 3 is a cross-sectional view of a sample subjected to carburizing by the vacuum carburizing method of the present invention. Fig. 4 is a graph showing the relationship between the depth and pressure of the carburized surface in a high temperature furnace and the formation of carbon black when the vacuum carburizing method of the present invention is performed. Fig. 5 shows a cross-sectional view of the entire carburized layer of a sample subjected to carburizing by the vacuum carburizing method of the present invention, and a ring shape representing the uniformity of the depth of the carburized surface. Heating chamber 2 a: Heating element 2 b: Thermal insulation material The paper size is applicable to China National Standard (CNS) A4 (210 X 297 public love) (Please read the precautions on the back before filling this page) ---- Order ---------_ Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economy -14-A7 ___B7__ V. Description of the invention (12) 3: Cooling chamber 3 a: Oil tank 4: Vacuum container 5 : Entrance door 5 a _: Internal entrance door 6: Intermediate door. 6 a: Internal intermediate door 7: Exit door 8: Internal conveying device 9: Vertical moving platform 1 0: Work piece sample 1 1: Closed hole 1 2: Closed hole V: Vacuum extraction equipment C: Carburizing gas source G: Inert gas source M: Description of the preferred framework of the work piece The form of the system of the present invention is described below with reference to the drawings. Fig. 1 shows the form of a vacuum carburizing device system according to the present invention: the vacuum carburizing furnace 1 has a heating chamber 2 provided with a vacuum container 4 and a cooling chamber 3 adjacent to the heating chamber 2. The heating chamber 2 is heated at a high temperature. The vacuum environment and the atmosphere are chemically and the paper size applies the Chinese National Standard (CNS) A4 specification (210 x 297 mm) < Please read the precautions on the back before filling this page) Installation ----- --- Order --------- Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs-15-Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ______B7___ 5. Description of the invention (13) Mechanically stable * Composed of a thermal element 2 a and a thermal insulation material 2 b. A recrystallized silicon carbide heating element or an element formed by spraying an aluminum oxide coating on its surface can be used as the heating element 2a. High-purity ceramic fibers can be used as the heat-insulating material 2b. The outer wall of the cooling chamber 3 is composed of a partial vacuum device 4 and an oil tank 3a is provided. The vacuum extraction device V is connected to the heating chamber 2 and the cooling chamber 3. The heating chamber 2 is also connected to a carburizing gas source C- which can supply acetylene gas- dissolved in acetone, and the cooling chamber 3 is connected to a nitrogen source. An inert gas source G, etc.-which can be pressurized to atmospheric pressure or above-is connected. There is an entrance door 5 at the upper end of the heating chamber 2, an intermediate door 6 at the lower end thereof, and an exit door 7 at the lower end of the cooling chamber 3; and an internal conveying device 8 is used to move the work piece M It is conveyed from the upper end of the heating chamber 2 to the lower end of the cooling chamber 3. There is also a vertical moving platform 9 in the cooling chamber 2 for putting the work piece M into the oil tank 3a and taking it out. In addition, there are heating parts at the inner entrance door 5 a and the inner middle door 6 a of the heating chamber 2, and the ends are closed. The vacuum carburizing method using the vacuum carburizing device combined in this way will be explained with reference to FIG. 2. The heating chamber 2 is preheated to the required temperature under atmospheric pressure. Process L _ Open the entrance doors 5, 5 a, and Convey the first work piece M1 into the heating chamber 2, and then immediately close the entrance doors 5, 5a · $ paper rule ^ Applicable to China National Standard (CNS > A4 size (210 x 297 mm) " 7 " ' Installed -------- Ordered --------- '(Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Invention Explanation (14) MM-2- The vacuum extraction device V is used to evacuate the heating chamber 2 until the vacuum degree is 0.05 kPa, and at the same time, the first work piece M1 is vacuum-heated to the required temperature (9 0 0 ° C), then supply acetylene gas from the carburizing gas source C into the heating chamber 2 (at this time the pressure in the heating chamber 2 becomes 0. lkPa), and perform carburizing. Stop the supply of block B , When the degree of vacuum in the heating chamber 2 is 0.0 5 kP a again, and when the temperature drops to a quenching temperature of 8 50 ° C Xu heat treatment. At the same time, evacuate the cooling chamber 3. Process 3 Open the intermediate doors 6, 6a, and use the internal conveying device 8 to convey the first work piece M1 to the vertical moving platform 9 of the cooling chamber 3. And then immediately close the intermediate doors 6 and 6 a.-Process 4 When the vertical moving platform 9 descends to quench the first work piece M 1, it is cooled by supplying an inert gas from an inert gas source G The chamber 3 is pressurized to atmospheric pressure or above. In this process, air is added to the heating chamber 2 at a high temperature to bring it to atmospheric pressure, and then the entrance doors 5, 5a are opened, and then the entrance doors 5, ga are closed immediately. The reason why the cooling chamber is pressurized to atmospheric pressure or above is to prevent the air added into the heating chamber 2 from entering the cooling chamber 3 "This paper size applies to Chinese national standards (CNS > A4 specifications < 210 * 297)芨) ------------- ί Loading -------- Order ---------. ^-(Please read the notes on the back before filling in this (Page)--17-A7 B7__ V. Description of the invention (15) Raise the vertical moving platform 9 and open the exit door 7, and immediately start the first work M1 is conveyed outside the high-temperature furnace 1, the exit door 7 is immediately closed, and the vacuum chamber 3 is evacuated to cool the cooling chamber 3. At the same time, the second work piece M 2 is processed in the same manner as the process 2. Thereafter, the processes 3 to 5 are repeated. Carburizing of the work piece after the normal operation. Figure 3 shows a cross-sectional view of an example of a work piece that has been carburized in this way: closed holes 1 1 and inner with an inner diameter of 6 mm and a depth of 28 mm will be provided Closed holes with a diameter of 4 mm and a depth of 28 mm 1 2 Outer diameters of 20 mm and a length of 30 mm Samples of work pieces 10 — next one is placed on 300 pieces of width 400 mm and length 600 mm And 毫米 50 mm slabs, and 6 of these slabs were placed on top of other slabs in heating chamber 2, and when treated at 900 ° C carburizing temperature, the carburizing time was 4 At 0 minutes, diffusion time is 70 minutes, and quenching temperature is 850 ° C, the effective carburized surface depth t of each work piece. 49 mm。 The effective carburized surface depth t2 at the bottom of the small-sized hole 12 is about 0.51 mm. Therefore, it has been confirmed that when the vacuum carburizing method of this system is used, carburizing treatment can be performed on each part in a uniform manner with a variation number of about 0.02 mm. In addition, there is no significant accumulation of carbon black in the heating chamber 2, even if the experiment is repeated hundreds of times. Similarly, in the case where a closed hole having an inner diameter of 4 mm and a depth of 50 mm was placed in a sample almost twice as long as the above-mentioned sample, so when they were carburized in the same manner, Paper size applies to China National Standard (CNS) A4 specification (210 X 297 public love) (Please read the precautions on the back before filling this page). — 1 !! ^ Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs and Industrial Cooperatives -18-A7 __B7____ V. Description of the invention (16) The difference between the effective carburized surface depth and the effective carburized surface depth at the bottom of the hole can be kept as low as possible It is about 0.03 mm, which means that the vacuum carburizing method of this system will make it possible to uniformly carburize each part. In this regard, when the work piece sample 10 was carburized by the previous vacuum carburizing method using the previous per-alkane type gas as the carburizing gas, although approximately twice the carburizing treatment was performed and 210 times was supplied The carburizing gas enters the heating chamber 2 and there will still be carburizing variability. The effective carburizing surface depth of the outer surface of the work piece sample 10 is 0.51 mm, and the inner diameter of the 4 mm hole 1_2 is effective at the bottom. The depth of carburized surface is 0.30 mm. Also, after the carburizing treatment is repeated 5-20 times using the previous vacuum carburization method, burnout will occur, and the carbon black of older children will accumulate in Inside the heating chamber 2, cleaning work must be performed. From the perspective of gas carburizing treatment, we can not expect that the carburizing treatment can reach the bottom of the hole 12. Incidentally, when the vacuum carburizing method of the present invention is used for carburizing under a vacuum degree of 5 1 k Pa inside the heating chamber, it is possible to avoid the variability of the work piece in carburizing, even if acetylene gas is used as the carburizing gas. Of course, and carburizing treatment can be performed while reducing the generation of carbon black; however, it is not desirable to perform carburizing treatment when the pressure inside the heating chamber exceeds 1 kPa; because it will not be possible to reduce the production of carbon black while carburizing Treatment can also become uneven. If the pressure inside the heating chamber is further reduced, it is possible to increase the benefits of the present invention, and the thermal insulation effect of the heating chamber itself will be displayed more effectively, so that water cooling or insulation will not be needed, and it will increase the energy efficiency. From this point of view, I hope that the pressure of carburizing treatment in the heating chamber should be lowered to SO. 3 kP a, and more suitable to be lowered to -------- ---- -One paper size applies Chinese National Standard (CNS) A4 specification (210x297 public love) 1〇 (Please read the precautions on the back before filling this page) · I--I --- Order ·! -----. ^ Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of Invention (Π) $ 〇.11 ^? 3 Fig. 4 shows that at a temperature of 9 30 ° C, the use of acetylene gas at a retention time, carburizing time and diffusion time of 30 minutes, 30 minutes, and 45 minutes (see Fig. 2) for a diameter of 20 mm And 30 mm long samples (S '" CM4 15)-with closed holes 6 mm in diameter and 27 mm in depth-when carburizing, the depth of the carburized surface and the pressure in the high temperature furnace The relationship * and the formation of carbon black β A line represents the change in the depth of the carburized surface at the bottom of the closed hole * and the B line shows the change in the depth of the carburized surface on the surface of the work piece sample. It can be clearly seen from Fig. 4 that the relationship with the sample surface is that when the pressure in the autoclave furnace is SI. OkPa, an almost constant carburized surface depth can be obtained. However, in order to have uniform carburizing treatment inside and outside the closed hole, I hope that the pressure in the high-temperature furnace is SO. 3kPa. Regarding the formation of carbon black: there is no problem when the pressure in the high-temperature furnace is S1. OkPa. I. FIG. 5 shows a sample (S CM4 1 5) formed by carrying out the carburizing method of the present invention on a sample (S CM4 1 5) having an outer diameter of 20 mm and a length of 182 mm-provided with a closed hole having a depth of 175 mm and an inner diameter of 3.4 mm. Cross-section view of the carburizing state and the circle representing the carburization uniformity. At this time, the temperature in the high-temperature furnace is 930 ° C, the pressure in the furnace is 0.02kPa, and the sum of the carburizing time and the diffusion time is 4 30 minutes; load the sample up as described above * It can be clearly seen from Figure 5 that in the inner wall of the closed hole, a total carburized surface depth can be obtained at a depth of 122 mm from the opening of the closed hole Several paper sizes are applicable to China National Standard (CNS) A4 (210 X 297 mm) (Please read the precautions on the back before filling this page) -. ^ 'Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 __B7 V. Description of the invention (18) The area of uniformity (2.1 mm) * and the total carburizing depth will change at a depth of 156 mm Is zero. Therefore, when the inner diameter of the closed hole is D and the depth from the opening end of the hole in an area where the total carburizing surface depth is almost uniform is L, the available area is between L / D and 36. Therefore, the lower the force in the high-temperature furnace, the greater the uniformity of carburization, and the depth that can be achieved by reducing the pressure in the furnace is about the L / D of the area L in which the total carburizing treatment is almost uniform. For 50 people. (Please read the notes on the back before filling out this page) --------- Order — — — — ————————————— 'Dream'. Printed a moderate ruler on a piece of paper by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 21 / V standard A4 S) N (C standard standard 97 mm