TW202437528A - Sensor packaging structure and method for packaging sensor - Google Patents
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- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
- H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
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- H10F39/80—Constructional details of image sensors
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- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
Description
本發明是有關於一種感測器技術領域,且特別是有關於一種感測器的封裝結構及其封裝方法。The present invention relates to a sensor technology field, and in particular to a sensor packaging structure and a packaging method thereof.
感測器是一種能感受到被測量的資訊,並將感受到的資訊按一定規律變換成為電信號或其他所需形式的資訊輸出,以滿足資訊的傳輸、處理、存儲、顯示、記錄和控制等要求的檢測裝置。A sensor is a detection device that can sense the information being measured and convert the sensed information into electrical signals or other required forms of information output according to certain rules to meet the requirements of information transmission, processing, storage, display, recording and control.
一種內部具備半導體晶片的感測器,其可以具有各種封裝結構。例如,板上晶片(COB)封裝、覆晶薄膜(COF)封裝、玻璃上晶片(COG)封裝、晶片級晶片規模(WLCSP)封裝、球柵陣列(IBGA)封裝和塑膠無鉛晶片載體(PLCC)封裝等。A sensor with a semiconductor chip inside, which can have various packaging structures, such as chip on board (COB) packaging, chip on film (COF) packaging, chip on glass (COG) packaging, wafer level chip scale (WLCSP) packaging, ball grid array (IBGA) packaging, and plastic lead-free chip carrier (PLCC) packaging.
相關技術中的一種感測器,其採用板上晶片(COB)封裝的方式進行封裝,並且,通過引線鍵合(wire bonding)工藝將晶片與PCB板電連接。具體的,將切分好的晶片黏貼到基板上,並將晶片上的導電焊盤通過引線引出並電連接至基板上。然後,在晶片的非感光區域塗布環氧樹脂膠以形成阻壩,並在阻壩上覆蓋透光蓋板,從而將晶片的感光區域封裝在基板、阻壩和透光蓋板形成的空間內,以對感光區域形成防護。A sensor in the related art is packaged in a chip-on-board (COB) packaging method, and the chip is electrically connected to the PCB board through a wire bonding process. Specifically, the cut chip is pasted on the substrate, and the conductive pads on the chip are led out through wires and electrically connected to the substrate. Then, epoxy resin is applied to the non-photosensitive area of the chip to form a barrier, and a transparent cover is covered on the barrier, so that the photosensitive area of the chip is packaged in the space formed by the substrate, the barrier and the transparent cover to protect the photosensitive area.
上述感測器的封裝過程中,塗布環氧樹脂膠的用量不好把握,塗布環氧樹脂膠時容易產生溢膠以及塗布不均等不良,進而影響感光區域的感光性能和密封性能。In the packaging process of the above-mentioned sensor, it is difficult to control the amount of epoxy resin applied, and it is easy to cause overflow and uneven application of epoxy resin, thereby affecting the photosensitivity and sealing performance of the photosensitive area.
本發明提供一種感測器的封裝結構及其封裝方法,以利於避免溢膠以及塗佈不均等不良,進而提高封裝後感測器的感光性能以及密封性能。The present invention provides a packaging structure and a packaging method for a sensor, which are useful for avoiding defects such as glue overflow and uneven coating, thereby improving the photosensitivity and sealing performance of the packaged sensor.
本發明的感測器的封裝結構,包括基板,所述基板包括中心區域以及圍繞所述中心區域的外圍區域;感測器晶片,所述感測器晶片安裝在所述中心區域,所述感測器晶片包括感光區域以及圍繞所述感光區域的非感光區域,所述非感光區域背離所述基板的一側表面設置有多個焊盤,所述外圍區域靠近所述感測器晶片的一側表面設置有與所述焊盤一一對應的導電墊;接合線,所述接合線的一端與所述焊盤連接,另一端與所述導電墊連接;透明蓋板,所述透明蓋板設置在所述感測器晶片背離所述基板的一側;以及DAF膜,位於所述透明蓋板與所述感測器晶片之間,所述DAF膜設置有與所述感光區域相對的貫通孔,所述DAF膜包括覆蓋所述非感光區域的第一部,所述第一部背離所述感測器晶片的一側表面與所述透明蓋板貼合。The sensor packaging structure of the present invention comprises a substrate, wherein the substrate comprises a central area and a peripheral area surrounding the central area; a sensor chip, wherein the sensor chip is mounted in the central area, wherein the sensor chip comprises a photosensitive area and a non-photosensitive area surrounding the photosensitive area, wherein a plurality of pads are arranged on a side surface of the non-photosensitive area away from the substrate, and a conductive pad corresponding to the pads is arranged on a side surface of the peripheral area close to the sensor chip; A bonding wire, one end of which is connected to the pad, and the other end of which is connected to the conductive pad; a transparent cover plate, which is arranged on a side of the sensor chip away from the substrate; and a DAF film, which is located between the transparent cover plate and the sensor chip, and the DAF film is provided with a through hole opposite to the photosensitive area, and the DAF film includes a first part covering the non-photosensitive area, and the first part is bonded to the transparent cover plate on a side surface away from the sensor chip.
本發明的感測器的封裝結構,有利於提高封裝後感測器的感光性能以及密封性能。具體地,本申請使用DAF膜作為阻壩。DAF膜設置有貫通孔,DAF膜包括第一部,第一部背離感測器晶片的一側表面與透明蓋板貼合。裝配時,可以先將DAF膜與透明蓋板貼合,然後再將二者整體朝向感測器晶片壓合。壓合完成後,貫通孔與感光區域正對,以避讓感測器晶片的感光區域。第一部將感測器晶片的非感光區域覆蓋,同時還將接合線處於非感光區域的一部分包裹。此時,由於DAF膜的厚度以及用量可控,DAF膜在固化前有黏性但不會流動,從而壓合後不會發生先前技術中的溢膠現象,使得感光區域不會被DAF膜覆蓋,繼而利於提高封裝後感測器的感光性能。第二方面,DAF膜的厚度均勻,壓合時可以使DAF膜與透明蓋板之間以及DAF膜與感測器晶片的非感光區域之間均緊密貼合,從而還有利於提高DAF膜的支撐性能和密封性能,進而還利於提高封裝後感測器的可靠性。此外,DAF膜相較於環氧樹脂膠更為常見,從而還有利於降低感測器的封裝成本。The packaging structure of the sensor of the present invention is beneficial to improving the photosensitivity and sealing performance of the sensor after packaging. Specifically, the present application uses a DAF film as a barrier. The DAF film is provided with a through hole, and the DAF film includes a first part, and the first part is bonded to a transparent cover plate on a side surface facing away from the sensor chip. During assembly, the DAF film can be bonded to the transparent cover plate first, and then the two can be pressed together toward the sensor chip. After the pressing is completed, the through hole is directly opposite to the photosensitive area to avoid the photosensitive area of the sensor chip. The first part covers the non-photosensitive area of the sensor chip, and also wraps a portion of the bonding wire in the non-photosensitive area. At this time, since the thickness and amount of the DAF film can be controlled, the DAF film is sticky but does not flow before curing, so the glue overflow phenomenon in the previous technology will not occur after pressing, so that the photosensitive area will not be covered by the DAF film, which is conducive to improving the photosensitivity of the sensor after packaging. Secondly, the thickness of the DAF film is uniform, and the DAF film and the transparent cover plate and the DAF film and the non-photosensitive area of the sensor chip can be tightly fitted during pressing, which is also conducive to improving the support and sealing performance of the DAF film, and further helps to improve the reliability of the sensor after packaging. In addition, DAF film is more common than epoxy resin glue, which is also conducive to reducing the packaging cost of the sensor.
在本發明的一實施例中,上述的封裝結構還包括設置在外圍區域的密封劑,密封劑配置為密封感測器晶片、接合線、第一部以及透明蓋板。In one embodiment of the present invention, the above-mentioned packaging structure further includes a sealant disposed in the peripheral area, and the sealant is configured to seal the sensor chip, the bonding wire, the first part and the transparent cover.
在本發明的一實施例中,上述的DAF膜還包括覆蓋外圍區域的第二部,第二部背離感測器晶片的一側表面與透明蓋板貼合,接合線位於DAF膜中。In one embodiment of the present invention, the DAF film further includes a second portion covering the peripheral area, a surface of the second portion facing away from the sensor chip is bonded to the transparent cover plate, and the bonding wire is located in the DAF film.
在本發明的一實施例中,上述的封裝結構還包括設置在外圍區域的塑封膠柱,塑封膠柱位於第二部以及透明蓋板的外側,塑封膠柱配置為密封第二部以及透明蓋板。In one embodiment of the present invention, the packaging structure further includes a plastic encapsulation column disposed in the peripheral area, the plastic encapsulation column is located outside the second part and the transparent cover plate, and the plastic encapsulation column is configured to seal the second part and the transparent cover plate.
在本發明的一實施例中,上述的DAF膜邊緣與透明蓋板邊緣平齊。In one embodiment of the present invention, the edge of the DAF film is flush with the edge of the transparent cover plate.
在本發明的一實施例中,上述的基板背離感測器晶片的一側表面設置有多個外部連接端子。In one embodiment of the present invention, a plurality of external connection terminals are disposed on a surface of the substrate facing away from the sensor chip.
本發明的感測器的封裝方法,包括提供基板,基板包括中心區域以及圍繞中心區域的外圍區域,外圍區域設置有多個導電墊;在中心區域安裝感測器晶片,感測器晶片包括感光區域以及圍繞感光區域的非感光區域,非感光區域背離基板的一側表面設置有與導電墊一一對應的焊盤;提供接合線,將接合線的一端與焊盤連接,另一端與導電墊連接;提供透明蓋板;在透明蓋板的一側貼合DAF膜,DAF膜設置有貫通孔;將DAF膜與感測器晶片貼合,以使貫通孔與感光區域相對,DAF膜覆蓋非感光區域。The packaging method of the sensor of the present invention comprises providing a substrate, the substrate comprising a central area and a peripheral area surrounding the central area, a plurality of conductive pads are arranged in the peripheral area; installing a sensor chip in the central area, the sensor chip comprising a photosensitive area and a non-photosensitive area surrounding the photosensitive area, a surface of the non-photosensitive area facing away from the substrate is provided with pads corresponding to the conductive pads one by one; providing a bonding wire, connecting one end of the bonding wire to the pad and the other end to the conductive pad; providing a transparent cover plate; laminating a DAF film on one side of the transparent cover plate, the DAF film being provided with a through hole; laminating the DAF film to the sensor chip so that the through hole is opposite to the photosensitive area and the DAF film covers the non-photosensitive area.
在本發明的一實施例中,上述的感測器的封裝方法還包括在外圍區域填滿密封劑,密封劑緊貼DAF膜的外側壁以及透明蓋板的外側壁,密封劑配置為密封感測器晶片、接合線、DAF膜以及透明蓋板。In one embodiment of the present invention, the packaging method of the sensor further includes filling the peripheral area with a sealant, the sealant is tightly attached to the outer wall of the DAF film and the outer wall of the transparent cover plate, and the sealant is configured to seal the sensor chip, bonding wire, DAF film and transparent cover plate.
本發明的感測器的封裝方法,包括提供基板,基板包括中心區域以及圍繞中心區域的外圍區域,外圍區域設置有多個導電墊;在中心區域安裝感測器晶片,感測器晶片包括感光區域以及圍繞感光區域的非感光區域,非感光區域背離基板的一側表面設置有與導電墊一一對應的焊盤;提供接合線,將接合線的一端與焊盤連接,另一端與導電墊連接;提供透明蓋板;在透明蓋板的一側貼合DAF膜,DAF膜設置有貫通孔,DAF膜包括第一部和第二部;將DAF膜與感測器晶片貼合,以使貫通孔與感光區域相對,使第一部覆蓋非感光區域,使第二部覆蓋外圍區域,接合線位於DAF膜中。The packaging method of the sensor of the present invention comprises providing a substrate, the substrate comprising a central area and a peripheral area surrounding the central area, the peripheral area being provided with a plurality of conductive pads; installing a sensor chip in the central area, the sensor chip comprising a photosensitive area and a non-photosensitive area surrounding the photosensitive area, the non-photosensitive area being provided with pads corresponding to the conductive pads on a side surface facing away from the substrate; providing bonding wires to connect the conductive pads to the substrate; One end of the bonding wire is connected to the pad, and the other end is connected to the conductive pad; a transparent cover is provided; a DAF film is bonded to one side of the transparent cover, the DAF film is provided with a through hole, and the DAF film includes a first part and a second part; the DAF film is bonded to the sensor chip so that the through hole is opposite to the photosensitive area, the first part covers the non-photosensitive area, and the second part covers the peripheral area, and the bonding wire is located in the DAF film.
在本發明的一實施例中,上述的感測器的封裝方法還包括在外圍區域設置塑封膠柱,塑封膠柱緊貼DAF膜的外側壁以及透明蓋板的外側壁,塑封膠柱配置為密封第二部以及透明蓋板。In one embodiment of the present invention, the packaging method of the sensor further includes arranging a plastic encapsulation column in the peripheral area, the plastic encapsulation column is tightly attached to the outer wall of the DAF film and the outer wall of the transparent cover plate, and the plastic encapsulation column is configured to seal the second part and the transparent cover plate.
為使本發明的上述目的、特徵和優點能夠更加明顯易懂,下面結合圖式對本發明的具體實施方式做詳細的說明。在下面的描述中闡述了很多具體細節以便於充分理解本發明。但是本發明能夠以很多不同於在此描述的其它方式來實施,本領域技術人員可以在不違背本發明內涵的情況下做類似改進,因此本發明不受下面公開的具體實施例的限制。In order to make the above-mentioned purposes, features and advantages of the present invention more clearly understandable, the specific implementation of the present invention is described in detail below in conjunction with the drawings. In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.
在本發明的描述中,需要理解的是,術語“中心”、“縱向”、“橫向”、“長度”、“寬度”、“厚度”、“上”、“下”、“前”、“後”、“左”、“右”、“豎直”、“水平”、“頂”、“底”、“內”、“外”、“順時針”、“逆時針”、“軸向”、“徑向”、“周向”等指示的方位或位置關係為基於圖式所示的方位或位置關係,僅是為了便於描述本發明和簡化描述,而不是指示或暗示所指的裝置或元件必須具有特定的方位、以特定的方位構造和操作,因此不能理解為對本發明的限制。In the description of the present invention, it is necessary to understand that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.
此外,術語“第一”、“第二”僅用於描述目的,而不能理解為指示或暗示相對重要性或者隱含指明所指示的技術特徵的數量。由此,限定有“第一”、“第二”的特徵可以明示或者隱含地包括至少一個該特徵。在本發明的描述中,“多個”的含義是至少兩個,例如兩個,三個等,除非另有明確具體的限定。In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present invention, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.
在本發明中,除非另有明確的規定和限定,術語“安裝”、“相連”、“連接”、“固定”等術語應做廣義理解,例如,可以是固定連接,也可以是可拆卸連接,或成一體;可以是機械連接,也可以是電連接;可以是直接相連,也可以通過中間媒介間接相連,可以是兩個元件內部的連通或兩個元件的相互作用關係,除非另有明確的限定。對於本領域的普通技術人員而言,可以根據具體情況理解上述術語在本發明中的具體含義。In the present invention, unless otherwise clearly defined and limited, the terms "installation", "connection", "connection", "fixation" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be a connection between two components or an interaction relationship between two components, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
在本發明中,除非另有明確的規定和限定,第一特徵在第二特徵“上”或“下”可以是第一和第二特徵直接接觸,或第一和第二特徵通過中間媒介間接接觸。而且,第一特徵在第二特徵“之上”、“上方”和“上面”可是第一特徵在第二特徵正上方或斜上方,或僅僅表示第一特徵水平高度高於第二特徵。第一特徵在第二特徵“之下”、“下方”和“下面”可以是第一特徵在第二特徵正下方或斜下方,或僅僅表示第一特徵水平高度小於第二特徵。In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" and "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.
需要說明的是,當元件被稱為“固定於”或“設置於”另一個元件,它可以直接在另一個元件上或者也可以存在居中的元件。當一個元件被認為是“連接”另一個元件,它可以是直接連接到另一個元件或者可能同時存在居中元件。本文所使用的術語“垂直的”、“水平的”、“上”、“下”、“左”、“右”以及類似的表述只是為了說明的目的,並不表示是唯一的實施方式。It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and do not represent the only implementation method.
如圖1所示,為先前技術中的一種感測器的封裝結構1的示意圖。其包括基板2、設置在基板2上的感測器晶片3、連接基板2和感測器晶片3的接合線4、位於感測器晶片3邊緣的阻壩5、位於阻壩5上的蓋板6以及位於蓋板6和感測器晶片3外側的密封劑7。密封劑7用於密封感測器3和蓋板6。感測器晶片3包括感光區域31和圍繞感光區域的非感光區域32,阻壩5位於非感光區域32,其由環氧樹脂膠固化後形成。感測器晶片3的感光區域31封裝在基板2、阻壩5和蓋板6形成的空間內,以對感光區域31形成防護。As shown in FIG1 , it is a schematic diagram of a
上述感測器的封裝結構1,存在以下問題:其塗布環氧樹脂膠的用量不好把握,從而致使環氧樹脂膠被蓋板6擠壓時會產生溢膠不良,多餘的膠會覆蓋在感光區域31上,進而影響感測器的性能。此外,塗布環氧樹脂膠時還易發生塗布不均的現象,使得形成的阻壩5與蓋板6之間貼合不佳,還會影響阻壩5的密封性能以及支撐性能,進而還不利於提高感測器的可靠性。The
基於此,本申請提出一種感測器的封裝結構及其封裝方法,以利於避免溢膠以及塗布不均等不良,進而提高封裝後感測器的感光性能以及可靠性。Based on this, the present application proposes a packaging structure and a packaging method for a sensor, so as to avoid defects such as glue overflow and uneven coating, thereby improving the photosensitivity and reliability of the packaged sensor.
本申請第一方面的實施例提出一種感測器的封裝結構100。如圖2所示,該封裝結構100包括基板110、感測器晶片120、接合線130、透明蓋板140以及DAF(Die attach film)膜150。基板110包括中心區域110a以及圍繞中心區域110a的外圍區域110b。感測器晶片120安裝在中心區域110a,感測器晶片120包括感光區域120a以及圍繞感光區域120a的非感光區域120b。非感光區域120b背離基板110的一側表面設置有多個焊盤121,外圍區域110b靠近感測器晶片120的一側表面設置有與焊盤121一一對應的導電墊111。接合線130的一端與焊盤121連接,另一端與導電墊111連接。透明蓋板140設置在感測器晶片120背離基板110的一側。DAF膜150位於透明蓋板140與感測器晶片120之間,DAF膜150設置有與感光區域120a相對的貫通孔151,DAF膜150包括覆蓋非感光區域120b的第一部152,第一部152背離感測器晶片120的一側表面與透明蓋板140貼合。The embodiment of the first aspect of the present application provides a
本申請中,封裝結構100包括基板110、感測器晶片120、接合線130、透明蓋板140以及DAF膜150。基板110為感測器晶片120的承載板結構。基板110包括中心區域110a以及圍繞中心區域110a的外圍區域110b。中心區域110a是指用於放置感測器晶片120的區域,外圍區域110b是指實現基板110與感測器晶片120電連接的區域。如圖2所示,在基板110的厚度方向上,基板110可以為層疊結構,其包括位於中間的主體層112、位於主體層112上方的上基板113以及位於主體層112下方的下基板114。主體層112中可以形成單層或多層的佈線,上基板113可以通過主體層112的佈線電連接到下基板114。主體層112可以包括各種材料。例如,主體層112可以包括矽、陶瓷、有機材料、玻璃或環氧樹脂中的至少一種。在一些實施例中,基板110可以為基於環氧樹脂的印刷電路板(PCB)。在一些實施例中,基板110可以為矩形、方形等,然而基板110的形狀不限於此。導電墊111形成於上基板113的外圍區域110b中。進一步地,導電墊111可以位於上基板113的外圍區域110b中相對的兩側,或者,導電墊111可以均勻設置在上基板113的外圍區域110b中,本申請對此不作限制。In the present application, the
感測器晶片120可以安裝在基板110的中心區域110a上。例如,可以通過黏接層123將感測器晶片120固定在基板110的上基板113的中心區域110a。在一些實施例中,感測器晶片120可以直接安裝在基板110上,或者,在另一些實施例中,基板110的中心區域110a設置有凹槽,感測器晶片120放置於凹槽中並通過黏接層123與基板110固定連接,本申請對此不作限制。進一步地,感測器晶片120可以是CCD(Charge Coupled Device)晶片或者CMOS(Complementary Metal-Oxide Semiconductor)晶片等,本申請對此不作限制。The
感測器晶片120包括感光區域120a以及非感光區域120b。其中,感光區域120a背離基板110的一側表面設置有多個感光畫素單元122,感光畫素單元122可以佈置成陣列結構。每個感光畫素單元122可以吸收入射光,產生並累積與入射光的量相對應的電荷,然後通過感測器晶片120的畫素電晶體將累積的電荷發送到外部。進一步地,在感光畫素單元122的上方還可以設置濾光器和微透鏡,從而利於提高光吸收效率。非感光區域120b背離基板110的一側表面設置有多個焊盤121,焊盤121用於實現感測器晶片120與基板110的電連接。多個焊盤121可以位於非感光區域120b中相對的兩側,或者,可以均勻設置在非感光區域120b中,本申請對此不作限制。一一對應是指一個焊盤121對應連接一個導電墊111。The
接合線130可以實現焊盤121和導電墊111的連接。接合線130可以包括例如金(Au)、銅(Cu)、銀(Ag)和鋁(Al)中的至少一種。The
透明蓋板140在感測器晶片120的上方。透明蓋板140可以包括例如透明玻璃、透明樹脂或透射陶瓷中的至少一種。DAF膜150位於透明蓋板140與感測器晶片120之間。DAF膜150為半固態膠膜,有黏性但不會流動。DAF膜150在半固態的狀態下具有高彈性,可以將感測器晶片120覆蓋,同時將接合線130包裹。通過烘烤達到固化點後,DAF膜150變成不可逆的固態,從而形成用於密封及支撐的阻壩結構。The
本申請實施例的感測器的封裝結構100,有利於提高封裝後感測器的感光性能以及可靠性。具體地,本申請使用DAF膜150作為阻壩。DAF膜150設置有貫通孔151,DAF膜150包括第一部152,第一部152背離感測器晶片120的一側表面與透明蓋板140貼合。裝配時,可以先將DAF膜150與透明蓋板140貼合,然後再將二者整體朝向感測器晶片120壓合。壓合完成後,貫通孔151與感光區域120a正對,以避讓感測器晶片120的感光區域120a。第一部152將感測器晶片120的非感光區域120b覆蓋,同時還將接合線130處於非感光區域120b的一部分包裹。此時,由於DAF膜150的厚度以及用量可控,DAF膜150在固化前有黏性但不會流動,從而在壓合後不會發生先前技術中的溢膠現象,使得感光區域120a不會被DAF膜150覆蓋,繼而利於提高封裝後感測器的感光性能。第二方面,DAF膜150的厚度均勻,壓合時可以使DAF膜150與透明蓋板140之間以及DAF膜150與感測器晶片120的非感光區域120b之間均緊密貼合,從而還有利於提高DAF膜150的支撐性能和密封性能,進而還利於提高封裝後感測器的可靠性。此外,DAF膜150相較於環氧樹脂膠更為常見,從而還有利於降低感測器的封裝成本。The
本申請中,DAF膜150包括覆蓋非感光區域120b的第一部152是指,DAF膜150可以僅具有第一部152,也可以具有除開第一部152外其他的部分。In the present application, the
當DAF膜150僅具有第一部152時,在一些實施例中,如圖2所示,封裝結構100還包括設置在外圍區域110b的密封劑160,密封劑160配置為密封感測器晶片120、接合線130、第一部152以及透明蓋板140。When the
本實施例中,封裝結構100還包括密封劑160。密封劑160可以形成在基板110的上基板113的外圍區域110b上,以覆蓋感測器晶片120、第一部152和透明蓋板140的側表面。同樣,密封劑160可以在覆蓋第一部152的同時覆蓋接合線130處於外圍區域110b的另一部分。密封劑160可以與DAF膜150一起防止或減小感測器晶片120的感光區域120a被異物污染的可能性,進而利於進一步提高密封性能和可靠性。附加地,密封劑160還可以保護感測器晶片120免受外部衝擊。密封劑160可採用例如環氧模塑化合物(EMC)。然而,密封劑160的材料不限於EMC。In this embodiment, the
在另一些實施例中,如圖3所示,DAF膜150還包括覆蓋外圍區域110b的第二部153,第二部153背離感測器晶片120的一側表面與透明蓋板140貼合,接合線130位於DAF膜150中。In some other embodiments, as shown in FIG. 3 , the
本實施例中,DAF膜150包括覆蓋非感光區域120b的第一部152以及覆蓋外圍區域110b的第二部153。也就是說,DAF膜150既覆蓋感測器晶片120的非感光區域120b,同時還覆蓋基板110的外圍區域110b。此時,接合線130整體也位於DAF膜150中。如此,第一方面,DAF膜150的用量和厚度可控,壓合後不會發生先前技術中的溢膠現象,使得感光區域120a不會被DAF膜150覆蓋,繼而利於提高封裝後感測器的感光性能。第二方面,DAF膜150的厚度均勻,彈性高,壓合時可以使DAF膜150與透明蓋板140之間、DAF膜150與感測器晶片120的非感光區域120b之間以及DAF膜150與基板110的外圍區域110b之間均緊密貼合,從而還有利於提高DAF膜150的支撐性能和密封性能,進而還利於提高封裝後感測器的可靠性。第三方面,第一部152以及第二部153背離感測器晶片120的一側表面均與透明蓋板140貼合,從而有利於提高透明蓋板140與DAF膜150的貼合面積,進而利於進一步提高封裝後感測器的密封性能和可靠性。In this embodiment, the
進一步地,如圖4所示,封裝結構100還包括設置在外圍區域110b的塑封膠柱170,塑封膠柱170位於第二部153以及透明蓋板140的外側,塑封膠柱170配置為密封第二部153以及透明蓋板140。Furthermore, as shown in FIG. 4 , the
本實施例中,封裝結構100還包括塑封膠柱170,塑封膠柱170可以形成在基板110的上基板113的外圍區域110b上,以緊貼DAF膜150的第二部153外側表面和透明蓋板140的外側表面,從而對第二部153以及透明蓋板140形成密封。這樣,通過DAF膜150以及塑封膠柱170的雙重防護,可以防止或減小感測器晶片120的感光區域120a被異物污染的可能性,從而進一步提高封裝後的可靠性。附加地,塑封膠柱170還可以進一步保護感測器晶片120免受外部衝擊。塑封膠柱170可採用例如環氧模塑化合物(EMC)。然而,塑封膠柱170的材料不限於EMC。In this embodiment, the
在一些實施例中,如圖3或圖4所示,DAF膜150邊緣與透明蓋板140邊緣平齊。若DAF膜150邊緣與透明蓋板140邊緣不平齊,那麼在製作位於DAF膜150外側的塑封膠柱170時,可能會在塑封膠柱170與DAF膜150外側表面之間或者在塑封膠柱170與透明蓋板140外側表面之間產生間隙,從而不利於提高塑封膠柱170的密封性能。此外,由於DAF膜150邊緣與透明蓋板140邊緣不平齊,塑封膠柱170為不規則形狀,還不便於對塑封膠柱170的製作。也就是說,本實施例中,一方面有利於降低塑封膠柱170的製作難度,另一方面還有利於提高塑封膠柱170的密封效果。In some embodiments, as shown in FIG. 3 or FIG. 4 , the edge of the
在一些實施例中,如圖2所示,基板110背離感測器晶片120的一側表面設置有多個外部連接端子115。外部連接端子115可以設置在下基板114背離感測器晶片120的一側表面上。外部連接端子115可以包括例如焊球。通過外部連接端子115,可以將該封裝結構100與外部基板連接,從而實現感測器的外部通訊。In some embodiments, as shown in FIG. 2 , a plurality of
如圖5所示,本申請第二方面提出一種感測器的封裝方法,包括:As shown in FIG5 , the second aspect of the present application proposes a sensor packaging method, comprising:
提供基板110,基板110包括中心區域110a以及圍繞中心區域110a的外圍區域110b,外圍區域110b設置有多個導電墊111。A
在中心區域110a安裝感測器晶片120,感測器晶片120包括感光區域120a以及圍繞感光區域120a的非感光區域120b,非感光區域120b背離基板110的一側表面設置有與導電墊111一一對應的焊盤121。The
提供接合線130,將接合線130的一端與焊盤121連接,另一端與導電墊111連接。A
提供透明蓋板140。A
在透明蓋板140的一側貼合DAF膜150,DAF膜150設置有貫通孔151。A
將DAF膜150與感測器晶片120貼合,以使貫通孔151與感光區域120a相對,DAF膜150覆蓋非感光區域120b。The
本申請實施例的感測器的封裝方法,採用DAF膜150黏接透明蓋板140以及感測器晶片120,形成如圖2所示的封裝結構100,從而有利於提高封裝後感測器的感光性能以及可靠性。具體地,感測器晶片120安裝在中心區域110a中,且接合線130將感測器晶片120的焊盤121連接到基板110的導電墊111上,實現二者的電連接。如圖7所示,感測器晶片120與基板110先實現電連接。然後,DAF膜150設置有貫通孔151,DAF膜150再與透明蓋板140實現貼合。最後再將DAF膜150與透明蓋板140整體朝向感測器晶片120以及基板110壓合。壓合完成後,如圖2所示,貫通孔151與感光區域120a正對,以避讓感測器晶片120的感光區域120a。DAF膜150將感測器晶片120的非感光區域120b覆蓋,同時還將接合線130處於非感光區域120b的一部分包裹。此時,由於DAF膜150的厚度以及用量可控,DAF膜150在固化前有黏性但不會流動,從而壓合後不會發生先前技術中的溢膠現象,使得感光區域120a不會被DAF膜150覆蓋,繼而利於提高封裝後感測器的感光性能。第二方面,DAF膜150的厚度均勻,壓合前,DAF膜150提前與透明蓋板140實現緊密貼合。壓合後,DAF膜150與感測器晶片120的非感光區域120b也緊密貼合,從而還有利於提高DAF膜150的支撐性能和密封性能,進而還利於提高封裝後感測器的可靠性。此外,DAF膜150相較於環氧樹脂膠更為常見,從而還有利於降低感測器的封裝成本。The packaging method of the sensor of the embodiment of the present application uses a
進一步地,封裝方法還包括:Furthermore, the packaging method further comprises:
在外圍區域110b填充密封劑160,密封劑160緊貼DAF膜150的外側壁以及透明蓋板140的外側壁,密封劑160配置為密封感測器晶片120、接合線130、DAF膜150以及透明蓋板140。The
本實施例中,在外圍區域110b還填充有密封劑160。密封劑160可以形成在基板110的外圍區域110b上,以覆蓋感測器晶片120、DAF膜150和透明蓋板140的側表面。同樣,密封劑160可以在覆蓋DAF膜150的同時覆蓋接合線130處於外圍區域110b的另一部分。密封劑160可以與DAF膜150一起防止或減小感測器晶片120的感光區域120a被異物污染的可能性,從而進一步提封裝密封性。附加地,密封劑160還可以保護感測器晶片120免受外部衝擊。In this embodiment, the
如圖6所示,本申請第三方面的實施例提出一種感測器的封裝方法,包括:As shown in FIG6 , an embodiment of the third aspect of the present application provides a sensor packaging method, comprising:
提供基板110,基板110包括中心區域110a以及圍繞中心區域110a的外圍區域110b,外圍區域110b設置有多個導電墊111。A
在中心區域110a安裝感測器晶片120,感測器晶片120包括感光區域120a以及圍繞感光區域120a的非感光區域120b,非感光區域120b背離基板110的一側表面設置有與導電墊111一一對應的焊盤121。The
提供接合線130,將接合線130的一端與焊盤121連接,另一端與導電墊111連接。A
提供透明蓋板140。A
在透明蓋板140的一側貼合DAF膜150,DAF膜150設置有貫通孔151,DAF膜150包括第一部152和第二部153。A
將DAF膜150與感測器晶片120貼合,以使貫通孔151與感光區域120a相對,使第一部152覆蓋非感光區域120b,使第二部153覆蓋外圍區域110b,接合線130位於DAF膜150中。The
本申請實施例的感測器的封裝方法,採用DAF膜150黏接透明蓋板140以及感測器晶片120,形成如圖3所示的封裝結構100,從而有利於提高封裝後感測器的感光性能以及可靠性。其相比於第二方面所述的感測器的封裝方法,區別在於,本實施中,DAF膜150包括第一部152和第二部153,貼合後使第一部152覆蓋非感光區域120b,使第二部153覆蓋外圍區域110b,接合線130位於DAF膜150中。也就是說,DAF膜150既覆蓋感測器晶片120的非感光區域120b,同時還覆蓋基板110的外圍區域110b。如圖8所示,感測器晶片120與基板110先實現電連接。然後,DAF膜150設置有貫通孔151,DAF膜150再與透明蓋板140實現貼合。最後再將DAF膜150與透明蓋板140整體朝向感測器晶片120以及基板110壓合。由於DAF膜150具有高彈性,DAF膜150包括第一部152和第二部153,DAF膜150被感測器晶片120以及基板110壓縮而變形,第一部152形變量大,第二部153形變量大,從而形成如圖3所示的結構,圖中虛線為第一部152和第二部153的分界線。此時,接合線130整體也位於DAF膜150中。這樣,第一方面,壓合後不會發生先前技術中的溢膠現象,使得感光區域120a不會被DAF膜150覆蓋,繼而利於提高封裝後感測器的感光性能。第二方面,DAF膜150的厚度均勻,壓合時可以使DAF膜150與透明蓋板140之間、DAF膜150與感測器晶片120的非感光區域120b之間以及DAF膜150與基板110之間均緊密貼合,從而還有利於提高DAF膜150的支撐性能和密封性能,進而還利於提高封裝後感測器的可靠性。第三方面,第一部152以及第二部153背離感測器晶片120的一側表面均與透明蓋板140貼合,從而有利於提高透明蓋板140與DAF膜150的貼合面積,進而利於進一步提高封裝後感測器的密封性能和可靠性。The packaging method of the sensor of the embodiment of the present application uses a
進一步地,在一些實施例中,封裝方法還包括:Furthermore, in some embodiments, the packaging method further comprises:
在外圍區域110b設置塑封膠柱170,塑封膠柱170緊貼DAF膜150的外側壁以及透明蓋板140的外側壁,塑封膠柱170配置為密封第二部153以及透明蓋板140。The
本實施例中,封裝結構100還包括塑封膠柱170,塑封膠柱170可以形成在基板110的上基板113的外圍區域110b上,以緊貼DAF膜150的第二部153外側表面和透明蓋板140的外側表面,從而對第二部153以及透明蓋板140形成密封。這樣,通過DAF膜150以及塑封膠柱170的雙重防護,從而可以防止或減小感測器晶片120的感光區域120a被異物污染的可能性,提高封裝的密封性能。附加地,塑封膠柱170還可以進一步保護感測器晶片120免受外部衝擊。In this embodiment, the
以上所述實施例的各技術特徵可以進行任意的組合,為使描述簡潔,未對上述實施例中的各個技術特徵所有可能的組合都進行描述,然而,只要這些技術特徵的組合不存在矛盾,都應當認為是本說明書記載的範圍。The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
以上所述實施例僅表達了本發明的幾種實施方式,其描述較為具體和詳細,但並不能因此而理解為對發明申請專利範圍的限制。應當指出的是,對於本領域的普通技術人員來說,在不脫離本發明構思的前提下,還可以做出若干變形和改進,這些都屬於本發明的保護範圍。因此,本發明專利的保護範圍應以所附發明申請專利範圍的請求項為准。The above-mentioned embodiments only express several implementation methods of the present invention, and the description is relatively specific and detailed, but it should not be understood as limiting the scope of the invention patent application. It should be pointed out that for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention. Therefore, the protection scope of the present invention patent shall be based on the claims of the attached invention patent application scope.
5:阻壩
6:蓋板
100、1:封裝結構
110、2:基板
110a:中心區域
110b:外圍區域
111:導電墊
112:主體層
113:上基板
114:下基板
115:外部連接端子
120、3:感測器晶片
120a、31:感光區域
120b、32:非感光區域
121:焊盤
122:感光畫素單元
123:黏接層
130、4:接合線
140:透明蓋板
150:DAF膜
151:貫通孔
152:第一部
153:第二部
160、7:密封劑
170:塑封膠柱
5: Barrier
6:
圖1為先前技術中的感測器的封裝結構的結構示意圖。 圖2是依照本發明的實施例的感測器的封裝結構的其中一種結構示意圖。 圖3是依照本發明的實施例的感測器的封裝結構的另一種結構示意圖。 圖4是依照本發明的實施例的感測器的封裝結構的又一種結構示意圖。 圖5是依照本發明的實施例的感測器的封裝方法的流程示意圖。 圖6為圖5所示的封裝方法製作的封裝結構的分解示意圖。 圖7是依照本發明的實施例的另一種感測器的封裝方法的流程示意圖。 圖8是如圖7所示的封裝方法製作的封裝結構的分解示意圖。 FIG. 1 is a schematic diagram of a packaging structure of a sensor in the prior art. FIG. 2 is a schematic diagram of one of the packaging structures of a sensor according to an embodiment of the present invention. FIG. 3 is another schematic diagram of a packaging structure of a sensor according to an embodiment of the present invention. FIG. 4 is another schematic diagram of a packaging structure of a sensor according to an embodiment of the present invention. FIG. 5 is a schematic diagram of a process flow of a packaging method of a sensor according to an embodiment of the present invention. FIG. 6 is a schematic diagram of a decomposition of a packaging structure made by the packaging method shown in FIG. 5. FIG. 7 is a schematic diagram of a process flow of another packaging method of a sensor according to an embodiment of the present invention. FIG. 8 is a schematic diagram of a decomposition of a packaging structure made by the packaging method shown in FIG. 7.
100:封裝結構 100:Packaging structure
110:基板 110: Substrate
110a:中心區域 110a: Central area
110b:外圍區域 110b: Outer area
111:導電墊 111: Conductive pad
112:主體層 112: Subject layer
113:上基板 113: Upper substrate
114:下基板 114: Lower substrate
115:外部連接端子 115: External connection terminal
120:感測器晶片 120: Sensor chip
120a:感光區域 120a: Photosensitive area
120b:非感光區域 120b: non-photosensitive area
121:焊盤 121: Solder pad
122:感光畫素單元 122: Photosensitive pixel unit
123:黏接層 123: Adhesive layer
130:接合線 130:Joining line
140:透明蓋板 140: Transparent cover
150:DAF膜 150:DAF membrane
151:貫通孔 151:Through hole
152:第一部
152:
160:密封劑 160: Sealant
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