TW202424496A - Probe module and test method for unit under test with inclined conductive contacts, and unit under test, and test system conducive to providing a fixing device to effectively fix the probe during the installation process of the probe - Google Patents

Abstract

A probe module comprises a probe base and at least one divergent probe unit containing probes arranged in a row, wherein the inner extension portions of the two furthest outer probes extend outward divergently and obliquely from a divergent inner surface of the probe of the probe base. The unit under test has conductive contacts arranged in at least one row, wherein the two furthest outer contacts extend divergently and obliquely from one end of the first main edge to the other end of the second main edge. When the probe module detects the unit under test, the first main edge of the unit under test is closer to the divergent inner surface of the probe than the second main edge. The inclination angle of the outer probe of at least one divergent probe unit is smaller than the inclination angle of the outer contact of the unit under test. This probe module is conducive to providing a fixing device to effectively fix the probe during the installation process of the probe.

Description

Probe module and testing method for unit under test with inclined conductive contacts, unit under test and testing system

The present invention relates to a probe module of a probe card, and in particular to a probe module and a testing method for a unit to be tested having inclined conductive contacts, the unit to be tested, and a testing system comprising the probe module and the unit to be tested.

Please refer to FIG. 1, which shows a unit under test 10 with inclined conductive contacts. The unit under test 10 may be an unpackaged chip (die) or a packaged chip (chip). The unit under test 10 has a plurality of first conductive contacts 11 for outputting signals arranged in one or more rows, and a plurality of second conductive contacts 12 for inputting signals arranged in a row. For example, the unit under test 10 shown in FIG. 1 has three rows of first conductive contacts 11 arranged from a first long side 131 of a substrate 13 toward a second long side 132, and a row of second conductive contacts 12 arranged along the second long side 132 of the substrate 13. The first and second conductive contacts 11, 12 are arranged in a plurality of rows, and the arrangement direction of each row is substantially parallel to an imaginary dividing axis L perpendicular to the first and second long sides 131, 132, and the rows close to the imaginary dividing axis L, such as those included in a middle block 14 in FIG. 1, wherein the first and second conductive contacts 11, 12 are arranged in a plurality of rows. The long sides 111 and 121 of the conductive contacts 11 and 12 are substantially parallel to the imaginary dividing axis L, and the first and second conductive contacts 11 and 12 that are farther from the imaginary dividing axis L are inclined conductive contacts. The inclined conductive contact that is closer to one end of the first long side 131 of the substrate 13 (the upper end in FIG. 1 ) is closer to the substrate 13 than the same inclined conductive contact that is farther from one end of the first long side 131 of the substrate 13 (the lower end in FIG. 1 ). The inclined conductive contacts near the imaginary dividing axis L, that is, they are inclined from top to bottom and from inside to outside in the direction of FIG. 1 , and the first and second conductive contacts 11 and 12 that are farther away from the imaginary dividing axis L have larger angles relative to the imaginary dividing axis L. For example, the long sides 111 and 121 of the first and second conductive contacts 11 and 12 included in the two outer blocks 15 and 16 in FIG. 1 have the largest inclination angle θ relative to the imaginary dividing axis L.

The aforementioned unit under test 10 can be tested using a probe card with a cantilever probe. To simplify the diagram, FIG1 schematically shows only the probe 17 corresponding to the third row of first conductive contacts 11 in the outer blocks 15 and 16. In practice, the probe card may be provided with a probe corresponding to each conductive contact 11 and 12, or with probes corresponding to a row or several rows of conductive contacts 11 and 12. The cantilever section 171 of the probe 17 may extend from a probe base 18 located above the outer side of the first long side 131 of the unit under test 10 to above the conductive contacts, so that a contact section (not shown in the figure) of the probe 17 extending downward from the end of the cantilever section 171 of the probe 17 may touch the corresponding conductive contact. In detail, the cantilever section 171 of the probe 17 includes a fixing portion 172 fixed to the probe holder 18, an inner extension portion 173 extending from the probe holder 18 toward the unit under test 10, and an outer extension portion 174 extending in the opposite direction to the inner extension portion 173, and the contact section extends downward from the end of the inner extension portion 173. The cantilever section 171 of the probe 17 is set at the same angle as the corresponding conductive contact, so the angle of the cantilever section 171 of the probe 17 set at the outermost side is the largest.

When setting the probe 17 on the probe holder 18, the probe 17 is first placed at the desired angle, and then the fixing portion 172 of the cantilever section 171 of the probe 17 is fixed with black glue. After the probe 17 is completely set, the black glue becomes a part of the probe holder 18. Finally, the outer extension portion 174 of the cantilever section 171 of the probe 17 can be bent to the desired angle according to the desired connection point of its end. However, the probe configuration of the conventional probe card mentioned above actually makes it difficult to fix the probe 17 on the probe holder 18, and it is easy for the probe 17 to deviate from the desired position and angle that has been originally placed.

In addition, for the micro-sized unit under test 10, the range in which the corresponding probes 17 can be distributed is very small, that is, the distance between the outermost probes 17 in the same row of probes 17 will be very small, and the outer extensions 174 of the probes 17 shown in FIG. 1 will gradually approach each other after extending from the probe holder 18, causing the outer extensions 174 of the probes 17 to easily cross and overlap up and down. In particular, when the probe holder 18 is provided with a plurality of rows of probes 17 at different height positions, the problem of the outer extensions 174 of the probes 17 crossing and overlapping up and down is more serious, resulting in the difficulty in determining the arrangement position of the probes 17 in the subsequent stages of the probe card manufacturing process, making it difficult to perform the step of electrically connecting the probes 17 to the circuit board.

In view of the above-mentioned deficiencies, the main purpose of the present invention is to provide a probe module for a unit under test having inclined conductive contacts, which is conducive to providing a fixing device to effectively fix the probe during the installation process of the probe.

More specifically, please refer to FIG. 1 . During the installation of the probe 17 , when the probe 17 has been placed on the probe holder 18 at a desired position and angle but has not yet been fixed, the outer extension 174 of the probe 17 will cross each other at a distance from the probe holder 18 . At this time, if a fixing device can be temporarily disposed between the intersection of the outer extension 174 of the probe 17 and the probe holder 18 , the probe 17 can be effectively temporarily fixed. Then, the fixing portion 172 of the probe 17 can be fixed with black glue. After the probe 17 is fixed, the fixing device can be removed. In this way, the probe 17 can be prevented from deviating from the desired position and angle that has been originally placed.

To achieve the above-mentioned purpose, the probe module provided by the present invention for a unit under test having inclined conductive contacts is used to detect at least one unit under test, wherein the unit under test has a first main edge, a second main edge, two side edges connecting the first main edge and the second main edge, and a plurality of conductive contacts, each conductive contact having a first end facing the first main edge and a second end facing the second main edge. The unit to be tested can define a central axis passing through the first main edge and the second main edge at the second end, the conductive contacts are arranged in at least one row, and the same row of conductive contacts includes two outer contacts that are respectively closest to the side edges. Each outer contact is inclined relative to the central axis in a manner that its first end is closer to the central axis than the second end, and a tilt angle relative to the central axis can be defined. The probe module includes a probe holder and at least one probe unit. The probe unit includes a plurality of probes. The plurality of probes include two outer probes that are farthest apart. Each probe includes a cantilever section and a contact section. The cantilever section includes a fixed portion fixed to the probe holder, and an inner extension section and an outer extension section respectively connected to two ends of the fixed portion and extending from the probe holder. The inner extension section has a first end connected to the probe holder and a second end connected to the contact section. The probe module can define a reference center axis. The contact sections of the probes of the same probe unit are arranged in a row perpendicular to the reference center axis to contact the same row of conductive contacts of the same unit to be tested. The probe seat has a probe divergent inner side surface, and when the probe module detects the unit to be tested, the first main edge of the unit to be tested is closer to the probe divergent inner side surface than the second main edge. The at least one probe unit includes at least one divergent probe unit, the first end of the inner extension portion of the probe of the divergent probe unit is connected to the probe divergent inner side surface, and the inner extension portion of the outer probe of the divergent probe unit is inclined relative to the reference center axis in a manner that its first end is closer to the reference center axis than the second end, and has a tilt angle relative to the reference center axis, and the tilt angle of the outer probe of the at least one divergent probe unit is smaller than the tilt angle of the outer contact of the unit to be tested.

Thus, when the probe is placed on the probe seat, when the outer extension of the cantilever section of the probe is still at the same angle as the fixing portion and the inner extension, the outer extensions of the divergent probe unit will cross each other due to the tilt angle, but the tilt angle is smaller than the tilt angle of the outer contact of the unit to be tested, so that the intersection position is farther from the probe seat, thereby providing a sufficient distance to set a fixing device between the intersection position and the probe seat, thereby effectively fixing the probe.

In view of the above-mentioned shortcomings, another object of the present invention is to provide a probe module for a unit under test having inclined conductive contacts, which can avoid the problem of difficulty in determining the arrangement position of the probe caused by the outer extension portion of the probe being staggered and overlapped.

To achieve the above-mentioned other purpose, the present invention provides a probe module for a unit to be tested having an inclined conductive contact, comprising a probe holder and a plurality of probe units. Each probe unit comprises a plurality of probes, and the plurality of probes comprises two outer probes which are farthest apart. Each probe comprises a cantilever section and a contact section, the cantilever section comprises a fixed portion fixed to the probe holder, and an inner extension section and an outer extension section respectively connected to two ends of the fixed portion and extending from the probe holder, the inner extension section having a first end connected to the probe holder and a second end connected to the contact section. The probe module can define a reference center axis, and the contact sections of the probes of the same probe unit are arranged in a row perpendicular to the reference center axis. The probe holder has a probe divergent inner side surface, the plurality of probe units include two divergent probe units, the first end of the inner extension portion of the probe of each divergent probe unit is connected to the probe divergent inner side surface, and the inner extension portion of the outer probe of each divergent probe unit is inclined relative to the reference central axis in a manner that the first end is closer to the reference central axis than the second end and has an inclination angle relative to the reference central axis. The two divergent probe units include a low-layer divergent probe unit and a high-layer divergent probe unit located higher than the low-layer divergent probe unit, and the contact section length of the probe of the high-layer divergent probe unit is greater than the contact section length of the probe of the low-layer divergent probe unit. The outer extension of each probe has an inner end connected to the probe seat. The distance between the inner ends of the outer extension of the two outer probes of each probe unit can be defined as an outer extension distance. The outer extension distance of the lower divergent probe unit is greater than the outer extension distance of the higher divergent probe unit.

Thus, the distance between the outer extensions of the lower-level divergent probe units is larger, which is not only conducive to the installation of the fixing device, but also improves the problem of the outer extensions of the probes being crossed and overlapped. This makes it easier to determine the arrangement position of the probes when the outer extensions of the probes are electrically connected to the circuit board later.

Preferably, the probe holder includes a seat body, and a high-layer colloid and a low-layer colloid stacked in sequence along a vertical axis from a lower surface of the seat body; the divergent probe unit of the probe module includes a low-layer divergent probe unit fixed by the low-layer colloid, and a high-layer divergent probe unit located higher than the low-layer divergent probe unit and fixed by the high-layer colloid, and the contact section length of the probe of the high-layer divergent probe unit is greater than that of the low-layer divergent probe unit. The point contact section length of the probe of the probe unit; the low-layer colloid can define a low-layer colloid width parallel to the reference central axis; for the outer probe located on the same side of the reference central axis, a reference distance parallel to the reference central axis can be defined between the first end of the inner extension portion of the outer probe of the low-layer divergent probe unit and the second end of the inner extension portion of the outer probe of the high-layer divergent probe unit, and the low-layer colloid width is smaller than the reference distance.

Thus, the probe module can be provided with high and low layer divergent probe units to correspond to different units to be tested or different rows of conductive contacts of the same unit to be tested. Since the reference distance is determined according to the unit to be tested, the width of the low layer colloid is smaller than the reference distance, so that the corresponding width of the high layer colloid will be smaller than that of the user. In order to avoid the high and low layer colloids protruding excessively from the base body and causing insufficient support for the probe, the width of the base body is usually only slightly smaller than the width of the high layer colloid body. Therefore, through the above-mentioned characteristics, the width of the base body can be smaller than that of the user and still avoid the problem of insufficient support for the probe. Moreover, by virtue of the aforementioned features, the width of the upper and lower layers of the colloid is smaller than that of conventional users, which makes the distance of the outer extension of the probe extending from the colloid larger than that of conventional users. This can improve the problem of the outer extension of the probe interlacing and overlapping. In addition, the reduction in the width of the colloid can also increase the distance between the intersection of the outer extension of the probe and the probe seat, which is more conducive to the installation of the fixing device.

More preferably, the base can define a base width parallel to the reference center axis and a base thickness along the vertical axis, and the base width is less than or equal to half of the base thickness. Thus, since the base thickness is determined in accordance with the test machine, and the widths of the upper and lower layers of the colloid and the base width need to cooperate with each other to produce a good support force for the probe, the base width is reduced to less than or equal to half of the base thickness, and the upper and lower layers of the colloid width can be further reduced under the premise of sufficient support force for the probe, so that the distance from the outer extension of the probe to the point where the colloid extends out is larger, thereby further improving the problem of the outer extension of the probe interlacing and overlapping, and is also more conducive to the installation of the fixing device.

More preferably, the width of the lower layer of colloid is less than 3 mm. Such a size design can make the distance where the outer extension of the probe extends from the colloid larger under the premise that the upper and lower layers of colloid have sufficient support for the probe, thereby further improving the problem of the outer extension of the probe interlacing and overlapping, and is also more conducive to the installation of the fixing device.

Preferably, the divergent probe unit of the probe module includes a lower divergent probe unit and a higher divergent probe unit located higher than the lower divergent probe unit, the contact section length of the probe of the higher divergent probe unit is greater than the contact section length of the probe of the lower divergent probe unit; the outer extension portion of each probe has an inner end connected to the probe seat, and each probe unit can define an outer extension portion distance by the distance between the inner ends of the outer extension portions of the two outer probes; the outer extension portion distance of the lower divergent probe unit is greater than the outer extension portion distance of the higher divergent probe unit. Thus, the distance between the outer extension parts of the lower divergent probe unit is larger, which can improve the aforementioned problem of the outer extension parts of the probe being interlaced and overlapped, and is also more conducive to the installation of the fixing device.

Preferably, the divergent probe unit of the probe module includes a low-layer divergent probe unit and a high-layer divergent probe unit positioned higher than the low-layer divergent probe unit, the contact section length of the probe of the high-layer divergent probe unit is greater than the contact section length of the probe of the low-layer divergent probe unit, and the inclination angle of the probe on the outer side of the low-layer divergent probe unit is greater than or equal to the inclination angle of the probe on the outer side of the high-layer divergent probe unit.

Compared with the low-level divergent probe unit, the total length of the fixing portion and the inner extension portion of the outer probe of the high-level divergent probe unit is longer, so that the outer extension portion crosses closer to the probe seat. With the above-mentioned features, the tilt angle of the outer probe of the high-level divergent probe unit can be smaller than the tilt angle of the outer contact of the unit to be tested, so as to achieve the above-mentioned effect of providing the fixing device to effectively fix the probe during the probe installation process. On the premise that the fixing device can effectively fix the probe, the inclination angle of the probe on the outer side of the low-layer divergent probe unit can be larger, for example, the same as the inclination angle of the contact on the outer side of the unit to be tested, or between the inclination angle of the probe on the outer side of the high-layer divergent probe unit and the inclination angle of the probe on the outer side of the high-layer divergent probe unit, or the inclination angle of the probe on the outer side of the low-layer divergent probe unit can also be the same as the inclination angle of the probe on the outer side of the high-layer divergent probe unit, so as to achieve the characteristic of consistent needle marks.

More preferably, the tilt angle of the outer probe of the lower divergent probe unit and the tilt angle of the outer probe of the higher divergent probe unit have a difference, and the difference is less than or equal to 6 degrees. Further, the tilt angle of the outer probe of the higher divergent probe unit can be 12 degrees, and the tilt angle of the outer probe of the lower divergent probe unit can be greater than or equal to 12 degrees and less than or equal to 18 degrees. Such a size design is more conducive to the fixing device to effectively fix the probe during the installation process of the probe.

Preferably, the probe holder has a probe convergent inner side surface opposite to the probe divergent inner side surface, and when the probe module detects the unit to be tested, the second main edge of the unit to be tested is closer to the probe convergent inner side surface than the first main edge; the at least one probe unit includes at least one convergent probe unit, and the first end of the inner extension portion of the probe of the convergent probe unit is convergent with the probe. The inner side surface is connected, the inner extension portion of the outer side probe of the convergent probe unit is inclined relative to the reference center axis in a manner that the second end thereof is closer to the reference center axis than the first end thereof and has a tilt angle relative to the reference center axis, and the tilt angle of the outer side probe of the convergent probe unit is the same as the tilt angle of the outer side probe of the divergent probe unit.

Thus, the probe module can be provided with a divergent probe unit and a convergent probe unit extending in opposite directions from two opposite inner sides of the probe holder to the unit to be tested, so as to correspond to different units to be tested or different rows of conductive contacts of the same unit to be tested, thereby avoiding the problem that the probes are concentrated on the same side of the probe holder and easily cross and overlap each other. The divergent probe unit and the convergent probe unit have the same probe inclination angle, which can achieve the characteristic of consistent probe marks.

Preferably, the probes of the same probe unit form multiple probe layers at different heights on the probe base, and the contact sections of the probes of different probe layers of the same probe unit extend downward from the second end of the inner extension portion to different lengths to the same height position in a gradually shrinking manner, and every two adjacent probes of the same probe unit belong to different probe layers. Thus, the lengths of the contact sections of every two adjacent probes of the same probe unit are different and gradually shrinking, and this feature allows the distance between adjacent probes to be smaller, thereby meeting the test requirements of fine pitch.

More preferably, every two adjacent probes of the same probe unit do not belong to adjacent probe layers. Thus, every two adjacent probes of the same probe unit do not differ in height by only one probe layer, but by at least two probe layers. This feature allows the distance between adjacent probes to be smaller, and can better meet the testing requirements of fine pitch.

The present invention further provides a testing method for a unit under test having inclined conductive contacts, the steps of which include:

Providing a probe module as described above;

Providing at least one unit to be tested as described above; and

The probe of the probe module is brought into contact with the conductive contact of the at least one unit to be tested, so that the probe module is electrically connected to the at least one unit to be tested.

The present invention further provides a test system, comprising a carrier and a probe card, wherein the carrier is used to carry at least one unit to be tested as described above, and the probe card comprises a probe module as described above, which is used to electrically connect the probe card to the at least one unit to be tested by contacting the conductive contacts of the at least one unit to be tested with the probe of the probe module.

The probe module and the testing method for the unit under test with inclined conductive contacts provided by the present invention, as well as the detailed structure, features, assembly or use of the unit under test and the testing system will be described in the subsequent detailed description of the implementation method. However, those with ordinary knowledge in the field of the present invention should understand that the detailed description and the specific embodiments listed for implementing the present invention are only used to illustrate the present invention and are not used to limit the scope of the patent application of the present invention.

The applicant first explains that in the embodiments and drawings to be introduced below, the same reference numbers represent the same or similar elements or their structural features. It should be noted that the elements and structures in the drawings are for the convenience of illustration and are not drawn according to the actual scale and quantity, and if it is possible in practice, the features of different embodiments can be applied interchangeably.

Please refer to FIG. 3 and FIG. 4 . The probe module 20 provided in a first preferred embodiment of the present invention includes a probe holder 30 and two probe units 40A and 40B. The probe units 40A and 40B respectively include a plurality of probes 50 (including outer probes 50A and 50B).

The probe module of the present invention can be used to detect a single or multiple units under test. For example, the probe module 20 of the present embodiment is used to detect two units under test 60 at the same time, as shown in FIG5. The unit under test 60 in the embodiment of the present invention is the same as the unit under test 10 described in the prior art (as shown in FIG1), but in order to more clearly describe the features of the present invention, the unit under test 60 is further described in the embodiment using a different description method and different component numbers from FIG1.

As shown in FIG5 , each UUT 60 has a first and a second main edge 61, 62 facing in opposite directions (usually long edges, along the X-axis in this embodiment), two side edges 63, 64 connecting the first and the second main edges 61, 62 and facing in opposite directions (usually short edges, along the Y-axis in this embodiment), and a plurality of conductive contacts 65 (including an outer contact 65a), each conductive contact 65 has a first end 651 facing the first main edge 61, and a second end 652 facing the second main edge 62. The unit under test 60 can define a central axis 66 passing through the first and second main edges 61 and 62 along the Y axis. The conductive contacts 65 of the same unit under test 60 are arranged in at least one row. The conductive contacts 65 in the same row are arranged along the X axis. The conductive contacts of each unit under test in the diagram of the present invention are arranged in four rows. The conductive contacts 65 in the same row include two outer contacts 65a closest to the side edges 63 and 64 respectively. Each outer contact 65a is inclined relative to the central axis 66 in a manner that its first end 651 is closer to the central axis 66 than the second end 652, and can define an inclination angle θ1 relative to the central axis 66.

In order to simplify the diagram and facilitate explanation, FIG. 3 and FIG. 5 only schematically show the probe holder 30 as a rectangular frame. The structure and size ratio of the probe holder 30 shown in FIG. 4 are closer to the actual one. As shown in FIG. 4, the probe holder 30 of this embodiment includes a rectangular frame-shaped holder 31, and a rectangular frame-shaped colloid 32 disposed on a lower surface 312 of the holder 31. The probe 50 is fixed to the holder 31 by the colloid 32. In detail, the probe 50 is fixed to the base 31 by first placing the probes 50 of the same needle layer (described in detail below) at a predetermined position and at a predetermined angle, and then fixing the probe 50 with a molten adhesive commonly known as black glue, and then baking the black glue to form a local colloid 32. After all the probes 50 are set layer by layer in this way, the black glue of all the needle layers constitutes the colloid 32.

Each probe 50 is formed by bending a straight needle made of a conductive material (such as metal) by machining. Each probe 50 includes a cantilever section 51 and a contact section 52. The cantilever section 51 includes a fixed portion 511 fixed in the colloid 32, an inner extension portion 512 connected to one end of the fixed portion 511 and extending from the probe holder 30 to the inner channel 33 thereof, and an outer extension portion 513 connected to the other end of the fixed portion 511 and extending from the probe holder 30 to the outside thereof. The inner extension portion 512 has a first end 514 connected to the probe holder 30 and a second end 515 opposite to the first end 514. The contact section 52 is connected to the second end 515 of the inner extension portion 512. In FIG. 4 , the contact segments 52 of the probe 50 extend obliquely downward from the second end 515 of the inner extension portion 512 at the same angle (or may extend vertically downward without being inclined), so the contact segments 52 of the probe 50 of the same probe unit overlap each other in FIG. 4 . In FIG. 3 and FIG. 5 , the inner extension portion 512, the fixing portion 511 and the outer extension portion 513 of the cantilever section 51 of each probe 50 are in a straight line, which is the state of the probe 50 in the aforementioned installation process. After the probe 50 is completely set and the gel 32 is completely formed and dried, the outer extension portion 513 of the cantilever section 51 of each probe 50 can be (but not limited to) bent in a desired direction (the inner extension portion 512 and the fixing portion 511 are still in a straight line), so that the free end of the outer extension portion 513 (not shown in the figure) can be electrically connected to a conductive contact (not shown in the figure) of a circuit board 81 (as shown in FIG. 12 ), and the circuit board 81 and the probe module 20 constitute a probe card 80.

As shown in FIG. 3 and FIG. 5 , the probe module 20 can define a reference center axis 22. The second ends 515 of the inner extension portions 512 of the probes 50 of the same probe units 40A and 40B are arranged in a row perpendicular to the reference center axis 22. Therefore, the contact segments 52 of the probes 50 of the same probe units 40A and 40B are also arranged in a row perpendicular to the reference center axis 22 to contact the same row of conductive contacts 65 of the same unit under test 60. As described in the prior art, the farther the conductive contact 65 is from the center axis 66 of the unit under test 60, the greater the tilt angle of the conductive contact 65 relative to the center axis 66. Therefore, the angle between the inner extension portion 512 and the fixing portion 511 of the probe 50 of the probe unit 40A, 40B also changes accordingly. The farther the probe 50 is from the reference center axis 22 of the probe module 20, the greater the tilt angle of the inner extension portion 512 and the fixing portion 511 relative to the reference center axis 22.

It is worth mentioning that the "the contact segments of the probes of the same probe unit are arranged in a row perpendicular to the reference center axis" in the present invention is not limited to the contact segments of the probes of the same probe unit being perfectly arranged in a straight line at the microscopic level, but refers to the contact segments of the probes of the same probe unit whose ends correspond to the same row of conductive contacts, and therefore are arranged in a row perpendicular to the reference center axis at the macroscopic level.

For example, please refer to FIG. 11. In order to simplify the diagram and facilitate explanation, FIG. 11 schematically shows six conductive contacts 65 in the same row of conductive contacts 65 of the same unit under test, and the end of the contact segment 52 of the probe that touches the six conductive contacts 65. In the case where the center spacing required for the probes of the same probe unit is too small to be arranged at the same height, the probes of the same probe unit may be arranged in two rows, one above the other, but the end of the contact segment 52 will still correspond to the range of the same row of conductive contacts 65 of the same unit under test, as shown in FIG. 11. Since the conductive contacts 65 of the unit to be tested are actually very small, the corresponding probes are actually very thin. Therefore, as long as the ends of the contact segments 52 of the probes of the same probe unit correspond to the same row of conductive contacts 65 of the unit to be tested, the contact segments 52 of the probes of the same probe unit will be arranged in a row perpendicular to the reference center axis in a macroscopic sense, which is the state included in the "the contact segments of the probes of the same probe unit are arranged in a row perpendicular to the reference center axis" described in the present invention.

Furthermore, the probe holder 30 of the present embodiment has a probe divergent inner side surface 34 and a probe convergent inner side surface 35 opposite to the probe divergent inner side surface 34. When the probe module 20 detects the unit under test 60, the contact section 52 of the probe 50 of the same probe unit 40A, 40B is located above the same row of conductive contacts 65 of the same unit under test 60, as shown in FIG. 5. At this time, the first main edge 61 of each unit under test 60 is closer to the probe divergent inner side surface 34 than the second main edge 62, and the second main edge 62 of each unit under test 60 is closer to the probe convergent inner side surface 35 than the first main edge 61. The inner extension portion 512 of the probe 50 of the probe unit 40A extends from the probe divergent inner side surface 34 of the probe holder 30, and is tilted in accordance with the conductive contact 65 of the unit to be tested 60, so as to form a state of gradually diverging from the probe divergent inner side surface 34, so the probe unit 40A is also called a divergent probe unit. In contrast, the inner extension portion 512 of the probe 50 of the probe unit 40B extends from the probe convergent inner side surface 35 of the probe holder 30, and is tilted in accordance with the conductive contact 65 of the unit to be tested 60, so as to form a state of gradually converging from the probe convergent inner side surface 35, so the probe unit 40B is also called a converging probe unit.

As shown in FIG. 3 , the first end 514 of the inner extension portion 512 of the probe 50 of the divergent probe unit 40A is connected to the divergent inner side surface 34 of the probe, and the inner extension portion 512 of the two outer probes 50A that are farthest apart from each other in the probe 50 of the divergent probe unit 40A is tilted relative to the reference center axis 22 in a manner such that the first end 514 thereof is closer to the reference center axis 22 than the second end 515 thereof, and has a tilt angle θ2 relative to the reference center axis 22, and this tilt angle θ2 is the largest tilt angle in the probe unit 40A. The first end 514 of the inner extension portion 512 of the probe 50 of the convergent probe unit 40B is connected to the convergent inner side surface 35 of the probe. The inner extension portion 512 of the two outer probes 50B that are farthest apart in the probe 50 of the convergent probe unit 40B is tilted relative to the reference center axis 22 in such a way that the second end 515 thereof is closer to the reference center axis 22 than the first end 514, and has a tilt angle θ3 relative to the reference center axis 22. This tilt angle θ3 is the largest tilt angle in the probe unit 40B.

It is worth mentioning that the probe module 20 of the present embodiment uses the probe units 40A and 40B to detect the fourth row of conductive contacts 65 of the two units to be tested 60 at the same time. The probe module 20 as a whole moves relative to the unit to be tested 60 along the Z axis together with the aforementioned circuit board 81 (as shown in FIG. 12 ), and then the end of the contact section 52 of the probe 50 touches the conductive contacts 65. However, the probe module of the present invention can be used to detect a single or multiple units to be tested 60, so the probe module of the present invention can only include a single probe unit to detect a single row of conductive contacts 65 of a single unit to be tested 60. Even if the probe module of the present invention includes multiple probe units, they can be used to detect multiple rows of conductive contacts 65 of a single unit to be tested 60. In other words, there is no limit to the number of probe units of the probe module of the present invention and the number of units to be tested. It is sufficient to set the same number of probe units according to the number of rows of conductive contacts of the units to be tested.

The main technical feature of the present invention is that for the divergent probe unit 40A, the tilt angle θ2 (as shown in FIG. 3 ) of the outer probe 50A of the divergent probe unit 40A is smaller than the tilt angle θ1 (as shown in FIG. 5 ) of the outer contact 65a of the unit under test 60 . In fact, the tilt angle θ1 of the outer contact 65a of the unit to be tested 60 is 18 degrees, so the tilt angle θ2 of the outer probe 50A of the divergent probe unit 40A is less than 18 degrees. In order to ensure that the probe stably touches the conductive contact and prevent the probe from sliding outside the conductive contact when touching the conductive contact, the tilt angle θ2 is preferably greater than or equal to 12 degrees. More preferably, the tilt angle θ2 is 12 degrees, which can achieve the effect described in the next paragraph to the best extent. The tilt angle θ3 of the outer probe 50B of the convergent probe unit 40B can be the same as θ2 to achieve the characteristic of consistent needle marks.

As shown in FIG. 3 , when the probe 50 is placed on the probe holder 30 , when the outer extension 513 of the cantilever section 51 of the probe 50 is still at the same angle as the fixing portion 511 and the inner extension 512 , the outer extension 513 of the probe 50 of the divergent probe unit 40A gradually converges from the outer side surface 36 of the probe holder 30 , so that the outer extension 513 is mutually extended as shown in FIG. 2 . The crossover situation, and the tilt angle θ2 of the outer probe 50A is smaller than the tilt angle θ1 of the outer contact 65a of the unit to be tested 60, is to make the crossover position 42 (as shown in FIG. 2 ) of the divergent probe unit 40A of the present invention farther from the outer side surface 36 of the probe holder 30, so that there can be a sufficient distance between the crossover position 42 and the probe holder 30 to set a fixing device 70 as shown in FIG. 2 . FIG. 2 is only a simplified diagram, used to schematically show the aforementioned crossover situation and the function of the fixing device 70, wherein the size of each component and the relative size or distance between each other do not correspond to the actual proportion, nor do they correspond to the proportion of FIG. 3 . In the process of setting the probe 50 on the probe holder 30, the outer extension portion 513 of the probe 50 is temporarily fixed by the fixing device 70, and then the fixing portion 511 of the probe 50 is fixed by black glue to prevent the probe 50 from deviating from the desired position and angle that has been placed originally during the fixing process. After the probe 50 is completely set, the fixing device 70 will be removed. The fixing device 70 is set between the intersection position 42 of the probe and the probe holder 30, which can achieve a good fixing effect on the probe 50. In other words, the probe module 20 of the present invention is conducive to the fixing device 70 to effectively fix the probe 50 during the installation process of the probe 50.

Please refer to Figures 6 to 8. The probe module 20' provided in the second preferred embodiment of the present invention is similar to the aforementioned probe module 20, but the main difference is that the probe module 20' includes four probe units for detecting four test units 60, including two divergent probe units 40A, 40A', and two convergent probe units 40B, 40B'.

In order to simplify the diagram and facilitate explanation, FIG6 and FIG7 only schematically show the probe holder 30 with a rectangular frame, and the structure and size ratio of the probe holder 30 shown in FIG8 are closer to the actual one. Like the first preferred embodiment, the probe holder 30 of this embodiment also includes a rectangular frame-shaped holder 31. As shown in FIG9, a high-layer colloid 37 and a low-layer colloid 38 are stacked in sequence on the lower surface 312 of the holder 31 along the vertical axis (i.e., the Z axis), and the formation method and function thereof are similar to the colloid 32 in the first preferred embodiment.

The divergent probe unit of the probe module 20' includes a high-layer divergent probe unit 40A fixed by a high-layer colloid 37, and a low-layer divergent probe unit 40A' fixed by a low-layer colloid 38. The convergent probe unit of the probe module 20' includes a high-layer convergent probe unit 40B fixed by a high-layer colloid 37, and a low-layer convergent probe unit 40B' fixed by a low-layer colloid 38. Compared with the low-layer divergent probe unit 40A' and the low-layer convergent probe unit 40B', the high-layer divergent probe unit 40A and the high-layer convergent probe unit 40B are located higher. Compared with the low-level diverging probe unit 40A' and the low-level convergent probe unit 40B', the total length of the fixing portion 511 and the inner extension portion 512 of the cantilever section 51 of the probe 50 of the high-level diverging probe unit 40A and the high-level convergent probe unit 40B is longer, so as to extend further toward the center of the internal channel 33 of the probe holder 30. The contact section 52 of the probe 50 of the high-level diverging probe unit 40A and the high-level convergent probe unit 40B is also longer, so that the ends of the contact sections 52 of the probe 50 of the high-level and low-level diverging probe units 40A, 40A' and the convergent probe units 40B, 40B' are at the same height.

It should be noted that the high and low divergent or convergent probe units described in the present invention refer to different probe units, and different probe units are used to detect conductive contacts 65 in different rows. The term "probe layer" mentioned above is used for the same probe unit, that is, the same probe unit used to detect the same row of conductive contacts 65 can be (but not limited to) divided into multiple probe layers. For example, in the first and second preferred embodiments, the probes 50 of the same probe unit form seven probe layers 71-77 of different heights on the probe holder 30. As shown in FIG8 and FIG10, the contact segments 52 of the probes 50 of different needle layers 71-77 of the same probe unit gradually extend downward from the second end 515 of the inner extension portion 512 to the same height position in a gradually decreasing manner, so that the ends of the contact segments 52 of the probes 50 are all at the same height.

FIG. 10 shows seven adjacent probes 50 of the same probe unit. The seven probes 50 are respectively located in the needle layers 71 to 77, but are not arranged in the order of the needle layers 71 to 77. Every two adjacent probes 50 do not belong to the adjacent needle layers, that is, the cantilever sections 51 of every two adjacent probes 50 differ in height by at least two needle layers. For example, the second probe 50 from the left is located in the third needle layer 73, and the first and third probes 50 adjacent to the second probe 50 are not located in the second and fourth needle layers 72 and 74 adjacent to the third needle layer 73, but are located in the sixth and seventh needle layers 76 and 77 which are three and four layers away from the third needle layer 73. Thus, the height position of the cantilever section 51 of the probe 50 located at the lower needle layer in each of the two adjacent probes 50 on the Z axis corresponds to the relatively narrow part of the contact section 52 of the probe 50 located at the higher needle layer, so that the distance between the adjacent probes 50 can be smaller, thereby meeting the test requirements of fine spacing. This effect is not limited to being achieved by the state shown in FIG. 10. The same probe unit does not necessarily have to be divided into seven needle layers, and the cantilever sections 51 of the adjacent probes 50 do not necessarily have to differ in height by at least two needle layers. As long as the same probe unit is divided into at least two needle layers, and each two adjacent probes 50 belong to different needle layers, the effect of reducing the center distance of the probes 50 can be achieved to a certain extent.

As mentioned above, the main technical feature of the present invention is directed to the divergent probe unit, please refer to Figures 6 and 7. In this embodiment, the tilt angle θ2' of the outer probe 50A' of the lower-layer divergent probe unit 40A' is equal to the tilt angle θ2 of the outer probe 50A of the higher-layer divergent probe unit 40A, that is, the tilt angles θ2 and θ2' are both smaller than the tilt angle θ1 of the outer contact 65a of the unit to be tested 60 (as shown in Figure 5). Thus, when the probe 50 is placed on the probe holder 30, both the upper divergent probe unit 40A and the lower divergent probe unit 40A' can provide a sufficient distance between the intersection of the outer extension portion 513 of the probe 50 and the probe holder 30 to set a fixing device 70 as shown in FIG. 2 to effectively fix the probe 50.

As shown in FIGS. 6 and 7 , the outer extension portion 513 of each probe 50 has an inner end 516 connected to the probe holder 30. Each probe unit can define an outer extension portion distance based on the distance between the inner ends of the outer extension portions of its outer probes. For example, the outer extension portion distance d1 of the low-level divergent probe unit 40A′ is the distance between the inner ends 516 of the outer extension portions 513 of its outer probes 50A′, and the outer extension portion distance d2 of the high-level divergent probe unit 40A is the distance between the inner ends 516 of the outer extension portions 513 of its outer probes 50A. In the present embodiment, d1 is greater than d2. Therefore, compared with the high-level divergent probe unit 40A, the crossing position of the probe 50 of the low-level divergent probe unit 40A' is farther from the outer side surface 36 of the probe holder 30. Thus, under the premise that the fixing device 70 shown in FIG. 2 can effectively fix the probe 50, the tilt angle θ2' of the outer side probe 50A' of the low-level divergent probe unit 40A' can be greater than the tilt angle θ2 of the outer side probe 50A of the high-level divergent probe unit 40A, and can even be the same as the tilt angle θ1 of the outer side contact 65a of the unit under test 60. In fact, the tilt angle θ1 of the outer contact 65a of the unit to be tested 60 is 18 degrees, so the tilt angle θ2 of the outer probe 50A of the high-level divergent probe unit 40A is less than 18 degrees, and 12 degrees is the best design, which can achieve the effect of providing the fixing device to effectively fix the probe 50 under the premise of ensuring that the probe stably touches the conductive contact. The difference between the tilt angle θ2' of the outer probe 50A' of the low-level divergent probe unit 40A' and θ2 is preferably less than or equal to 6 degrees, and θ2' is greater than or equal to 12 degrees and less than or equal to 18 degrees. However, as in the embodiment, θ2' is equal to θ2, which can achieve the characteristic of consistent needle marks. In addition, in this embodiment, the tilt angles θ3 and θ3' of the outer probes 50B and 50B' of the high and low layer convergent probe units 40B and 40B' are also equal to θ2, so that the characteristic of consistent needle marks can be achieved.

As shown in FIG. 8 , the lower colloid 38 can define a lower colloid width W1 parallel to the reference center axis 22 (ie, along the Y axis), and the upper colloid 37 can define a upper colloid width W2 parallel to the reference center axis 22 . For the outer probes located on the same side of the reference central axis 22, a reference distance D parallel to the reference central axis 22 can be defined between the first end 514 of the inner extension 512 of the outer probe 50A' of the lower divergent probe unit 40A' and the second end 515 of the inner extension 512 of the outer probe 50A of the upper divergent probe unit 40A. That is, the reference distance D is defined based on the leftmost outer probes 50A and 50A' in FIGS. 6 and 7 , or based on the rightmost outer probes 50A and 50A' in FIGS. 6 and 7 . In FIG. 8 , the reference distance D is indicated by assuming that the outer probe 50A used as the reference is located at the lowest needle layer 77 of the probe unit 40A. As defined above and shown in FIG8 , the reference distance D is not the actual distance between the first end 514 of the outer probe 50A′ and the second end 515 of the outer probe 50A, but the component of the actual distance parallel to the reference center axis 22 (i.e., the component on the Y axis). In addition, the seat 31 can define a seat width W3 parallel to the reference center axis 22, and a seat thickness T along the vertical axis (Z axis). The lower layer colloid width W1, the upper layer colloid width W2 and the base width W3 described in the present invention do not refer to the width of the entire lower layer colloid 38, the upper layer colloid 37 or the base 31, but refer to the effective physical width of the lower layer colloid 38, the upper layer colloid 37 or the base 31 corresponding to the fixing portion 511 of a single probe unit, that is, only the physical portion that has a supporting effect on the probe 50 and does not include the internal channel 33.

Since the reference distance D is determined according to the unit to be tested 60, the width W1 of the lower layer colloid is smaller than the reference distance D, and the width W2 of the upper layer colloid is correspondingly smaller than that of the conventional user. In order to avoid the upper and lower layers of colloid 37, 38 protruding excessively from the base 30 and causing insufficient support for the probe 50, the base width W3 is usually only slightly smaller than the width W2 of the upper layer colloid. In this embodiment, the width W1 of the lower layer colloid is smaller than the reference distance D, so that the width W3 of the base can be smaller than that of the conventional user and still avoid the problem of insufficient support for the probe 50. Moreover, for the micro-sized unit under test 60, the distance between the outer probes of the corresponding probe module is very small, and the distance between the outer extension 513 of the probe 50 of the divergent probe unit 40A, 40A' extending from the probe holder 30 (i.e., the outer extension distance d1, d2) is even smaller, resulting in the outer extension 513 of the probe 50 being easily staggered and overlapped, causing the probe 50 to be placed incorrectly due to difficulty in determining the arrangement position of the probe 50 in the subsequent stages of the probe card manufacturing process. 0 and the circuit board 81 (as shown in FIG. 12 ) are difficult to perform, and the aforementioned feature makes the widths W2 and W1 of the upper and lower layers of the colloid smaller than those of conventional users, which makes the distances d1 and d2 of the outer extensions larger than those of conventional users, thereby improving the problem of the outer extensions 513 of the probe 50 being crossed and overlapped up and down, and the reduction of the widths W2 and W1 of the upper and lower layers of the colloid can also increase the distance between the intersection position of the outer extensions 513 of the probe 50 and the probe holder 30, which is more conducive to the installation of the fixing device 70. In addition, the aforementioned feature that d1 is greater than d2 also makes the lower divergent probe unit 40A' less likely to have the problem of the outer extensions 513 of the probe 50 being crossed and overlapped up and down.

Furthermore, it is a better design that the width W1 of the lower layer of colloid is less than 3 mm. Such a size design can make the distance of the outer extension portion 513 of the probe 50 extending from the high and low layer of colloid 37 and 38 (i.e. the aforementioned outer extension portion distance d1 and d2) large, under the premise that the high and low layer of colloid 37 and 38 have sufficient support for the probe 50, thereby further improving the problem of the outer extension portion 513 of the probe 50 being intertwined and overlapped, and is also more conducive to the installation of the fixing device.

Furthermore, in this embodiment, the base width W3 is less than or equal to half of the base thickness T. Thus, since the thickness T of the base is determined in accordance with the test machine, and the widths W2 and W1 of the high and low layers of the colloid and the width W3 of the base need to cooperate with each other to generate a good support force for the probe 50, the width W3 of the base is reduced to less than or equal to half of the thickness T of the base, and the widths W2 and W1 of the high and low layers of the colloid can be further reduced under the premise of having sufficient support force for the probe 50, so that the distance of the outer extension portion 513 of the probe 50 extending from the high and low layers of the colloid 37 and 38 (that is, the aforementioned outer extension portion distance d1 and d2) is larger, thereby further improving the problem of the outer extension portion 513 of the probe 50 being interlaced and overlapped, and is also more conducive to the installation of the fixing device.

As mentioned above, the probe modules 20, 20' provided by the present invention are applied to the probe card 80, as shown in FIG. 12, for performing a test procedure on the unit under test 60. Therefore, the present invention further provides a test system, which includes the probe card 80 as mentioned above, and a carrier 83 for carrying at least one unit under test 60, so that the probe 50 of the probe modules 20, 20' contacts the conductive contacts 65 of the unit under test 60 to electrically connect the probe card 80 with the unit under test 60, and then perform the test procedure. In addition, the present invention further provides a test method for a unit under test having inclined conductive contacts, including the following steps a) to c).

a) Providing a probe module 20, 20' as described above.

b) providing at least one unit under test 60 as described above.

In order to simplify the diagram and facilitate explanation, the components in FIG. 12 are only schematically drawn in a simplified manner. The structures of the probe modules 20, 20' and the structure of the unit under test 60 are as described above and shown in FIGS. 1 to 11, so they will not be repeated here.

c) making the probe 50 of the probe module 20, 20' contact the conductive contact 65 of the unit under test 60, so as to electrically connect the probe module 20, 20' and the unit under test 60.

Specifically, the probe modules 20, 20' and the circuit board 81 form a probe card 80. The unit to be tested 60 is placed on a carrier 83. The carrier 83 and/or the probe card 80 are moved by a moving device (not shown). That is, the unit to be tested 60 is stationary while the probe card 80 moves, or the probe card 80 is stationary while the unit to be tested 60 moves, or both move. The end position of the contact section 52 of the probe 50 corresponds to the conductive contact 65 of the unit under test 60 along the vertical axis, and then the probe card 80 and the unit under test 60 are brought close to each other along the vertical axis, so that the end of the contact section 52 of the probe 50 contacts the conductive contact 65 of the unit under test 60, so that the conductive contact 65 of the unit under test 60 is electrically connected to the probe 50 of the probe module 20, 20'. The circuit board 81 of the probe card 80 is used to be electrically connected to a tester (not shown in the figure). The test signal provided by the tester is transmitted to the conductive contact 65 of the unit under test 60 through the circuit board 80 and the probe 50, and then transmitted back to the tester from the conductive contact 65 of the unit under test 60 through the probe 50 and the circuit board 81, so that the unit under test 60 can be tested.

Finally, it must be reiterated that the constituent elements disclosed in the above-mentioned embodiments of the present invention are merely illustrative and are not intended to limit the scope of the present invention. Replacements or modifications of other equivalent elements should also be covered by the scope of the patent application of the present invention.

10: Unit under test 11: First conductive contact 12: Second conductive contact 13: Substrate 131: First long side 132: Second long side 14: Middle block 15,16: Outer block 17: Probe 171: Cantilever section 172: Fixed part 173: Inner extension part 174: Outer extension part 18: Probe seat L: Imaginary dividing axis θ: Tilt angle 20,20’: Probe module 22: Reference center axis 30: Probe seat 31: Seat body 312: Lower surface 32: Colloid 33: Inner channel 34: Probe divergent inner surface 35: Probe convergent inner surface 36: Outer surface 37: High-layer colloid 38: Low-layer colloid 40A: (High-layer) (Divergent) probe unit 40A’: (Low-layer) (Divergent) probe unit 40B: (High-layer) (Convergent) probe unit 40B’: (Low-layer) (Convergent) probe unit 42: Cross position 50: Probe 50A, 50A’, 50B, 50B’: Outer probe 51: Cantilever section 511: Fixed section 512: Inner extension section 513: Outer extension section 514: First end 515: Second end 516: Inner end 52: Touch section 60: Unit under test 61: First main edge 62: Second main edge 63,64: Side edge 65: Conductive contact 65a: External contact 651: First end 652: Second end 66: Center axis 70: Fixing device 71~77: Probe layer 80: Probe card 81: Circuit board 83: Carrier θ1,θ2,θ2’,θ3,θ3’: Tilt angle d1,d2: External extension distance D: Reference distance W1: Width of lower layer colloid W2: Width of upper layer colloid W3: Width of base T: Thickness of base

FIG. 1 is a top view schematic diagram of a unit to be tested with an inclined conductive contact, a probe holder and a plurality of probes. FIG. 2 is a top view schematic diagram of a probe holder, a plurality of probes and a fixing device. FIG. 3 is a top view schematic diagram of a probe module provided in a first preferred embodiment of the present invention. FIG. 4 is a cross-sectional schematic diagram of a probe module provided in the first preferred embodiment of the present invention. FIG. 5 is a top view schematic diagram of a probe module provided in the first preferred embodiment of the present invention and two units to be tested. FIG. 6 is a top view schematic diagram of a probe module provided in a second preferred embodiment of the present invention and four units to be tested. FIG. 7 is a top view schematic diagram of a probe module provided in the second preferred embodiment of the present invention. FIG8 is a schematic cross-sectional view of the probe module provided by the second preferred embodiment of the present invention. FIG9 is a schematic three-dimensional view of a probe holder of the probe module provided by the second preferred embodiment of the present invention. FIG10 is a schematic view of the needle layer of the probe module of the present invention. FIG11 is a schematic view of a portion of the probe of the probe module provided by the present invention and a portion of the conductive contacts of a unit to be tested. FIG12 is a schematic view of a test system provided by the present invention and a unit to be tested.

20: Probe module

22: Reference center axis

30: Probe holder

33: Internal passage

34: Probe diverges medially

35: The probe converges on the medial side

36: Outer side

40A: (Divergent) probe unit

40B: (Convergence) probe unit

50:Probe

50A, 50B: External probe

51: Cantilever section

511: Fixed part

512: Inner extension

513:External extension

514: First end

515: Second end

66:Center axis

θ2,θ3: Tilt angle

Claims (20)

A probe module for a unit under test having inclined conductive contacts is used to detect at least one unit under test, wherein the unit under test has a first main edge, a second main edge, two side edges connecting the first main edge and the second main edge, and a plurality of conductive contacts, each of which has a first end facing the first main edge and a second end facing the second main edge. The unit under test can define a A central axis passing through the first main edge and the second main edge, the plurality of conductive contacts are arranged in at least one row, the same row of conductive contacts includes two outer contacts closest to the two side edges, each of the outer contacts is inclined relative to the central axis in a manner that the first end is closer to the central axis than the second end, and can define a tilt angle relative to the central axis; the probe module includes: A probe holder; and At least one probe unit, the probe unit includes a plurality of probes, the plurality of probes include two outer probes that are farthest apart, each of the probes includes a cantilever section and a touch section, the cantilever section includes a fixed portion fixed to the probe holder, and an inner extension portion and an outer extension portion respectively connected to two ends of the fixed portion and extending from the probe holder, the inner extension portion having a first end connected to the probe holder and a second end connected to the touch section; The probe module can define a reference center axis, and the contact segments of the probes of the same probe unit are arranged in a row perpendicular to the reference center axis to contact the same row of conductive contacts of the same unit to be tested; the probe seat has a probe divergent inner side surface, and when the probe module detects the unit to be tested, the first main edge of the unit to be tested is closer to the probe divergent inner side surface than the second main edge; the at least one probe unit includes at least one divergent probe Unit, the first end of the inner extension of the probe of the divergent probe unit is connected to the divergent inner side surface of the probe, the inner extension of the outer probe of the divergent probe unit is inclined relative to the reference center axis in a manner that the first end is closer to the reference center axis than the second end and has a tilt angle relative to the reference center axis, and the tilt angle of at least one outer probe of the divergent probe unit is smaller than the tilt angle of the outer contact of the unit to be tested. A probe module for a unit under test having an inclined conductive contact as described in claim 1, wherein the probe seat comprises a base body, and a high-layer colloid and a low-layer colloid stacked in sequence along a vertical axis from a lower surface of the base body; the divergent probe unit of the probe module comprises a low-layer divergent probe unit fixed by the low-layer colloid, and a high-layer divergent probe unit located higher than the low-layer divergent probe unit and fixed by the high-layer colloid, wherein the probe of the high-layer divergent probe unit The point contact section length of the lower layer divergent probe unit is greater than the point contact section length of the probe of the lower layer divergent probe unit; the lower layer colloid can define a lower layer colloid width parallel to the reference central axis; for the outer probe located on the same side of the reference central axis, a reference distance parallel to the reference central axis can be defined between the first end of the inner extension portion of the outer side probe of the lower layer divergent probe unit and the second end of the inner extension portion of the outer side probe of the higher layer divergent probe unit, and the lower layer colloid width is smaller than the reference distance. A probe module for a unit to be tested having an inclined conductive contact as described in claim 1, wherein the divergent probe unit of the probe module includes a low-level divergent probe unit and a high-level divergent probe unit located higher than the low-level divergent probe unit, the contact section length of the probe of the high-level divergent probe unit is greater than the contact section length of the probe of the low-level divergent probe unit; each of the outer extension portions of the probes has an inner end connected to the probe seat, and each of the probe units can be defined as an outer extension distance by the distance between the inner ends of the outer extension portions of the two outer probes; the outer extension distance of the low-level divergent probe unit is greater than the outer extension distance of the high-level divergent probe unit. A probe module for a unit to be tested having a tilted conductive contact as described in claim 1, wherein the divergent probe unit of the probe module includes a low-layer divergent probe unit and a high-layer divergent probe unit positioned higher than the low-layer divergent probe unit, the contact section length of the probe of the high-layer divergent probe unit is greater than the contact section length of the probe of the low-layer divergent probe unit, and the tilt angle of the probe on the outer side of the low-layer divergent probe unit is greater than or equal to the tilt angle of the probe on the outer side of the high-layer divergent probe unit. A probe module for a unit to be tested having an inclined conductive contact as described in claim 1, wherein the probe seat has a probe convergent inner side surface opposite to the probe divergent inner side surface, and when the probe module detects the unit to be tested, the second main edge of the unit to be tested is closer to the probe convergent inner side surface than the first main edge; the at least one probe unit includes at least one convergent probe unit, and the probe of the convergent probe unit The first end of the inner extension portion is connected to the convergent inner side surface of the probe, and the inner extension portion of the outer probe of the convergent probe unit is inclined relative to the reference center axis in a manner that the second end thereof is closer to the reference center axis than the first end thereof and has a tilt angle relative to the reference center axis. The tilt angle of the outer probe of the convergent probe unit is the same as the tilt angle of the outer probe of the divergent probe unit. A probe module for a unit to be tested having an inclined conductive contact, comprising: a probe holder; and a plurality of probe units, each of which comprises a plurality of probes, the plurality of probes comprising two outer probes which are farthest apart, each of which comprises a cantilever section and a point contact section, the cantilever section comprising a fixed portion fixed to the probe holder, and an inner extension section and an outer extension section respectively connected to two ends of the fixed portion and extending from the probe holder, the inner extension section having a first end connected to the probe holder and a second end connected to the point contact section; The probe module can define a reference central axis, and the contact segments of the probes of the same probe unit are arranged in a row perpendicular to the reference central axis; the probe base has a probe divergent inner side surface, and the plurality of probe units include two divergent probe units, and the first end of the inner extension portion of the probe of each divergent probe unit is connected to the probe divergent inner side surface, and the inner extension portion of the outer probe of each divergent probe unit is inclined relative to the reference central axis in a manner that the first end is closer to the reference central axis than the second end, and has a relative to the reference central axis. Tilt angle; the two divergent probe units include a low-level divergent probe unit and a high-level divergent probe unit located higher than the low-level divergent probe unit, the contact section length of the probe of the high-level divergent probe unit is greater than the contact section length of the probe of the low-level divergent probe unit; each of the probe outer extensions has an inner end connected to the probe seat, each of the probe units can be defined as an outer extension distance by the distance between the inner ends of the outer extensions of the two outer probes, and the outer extension distance of the low-level divergent probe unit is greater than the outer extension distance of the high-level divergent probe unit. The probe module for a unit under test having a tilted conductive contact as described in claim 6, wherein the probe seat comprises a base body, and a high-layer colloid and a low-layer colloid stacked in sequence along a vertical axis from a lower surface of the base body, the low-layer divergent probe unit is fixed by the low-layer colloid, the high-layer divergent probe unit is fixed by the high-layer colloid, and the low-layer colloid can define A low-layer colloid width parallel to the reference central axis is defined; for the outer probe located on the same side of the reference central axis, a reference distance parallel to the reference central axis can be defined between the first end of the inner extension portion of the outer probe of the low-layer divergent probe unit and the second end of the inner extension portion of the outer probe of the high-layer divergent probe unit, and the low-layer colloid width is smaller than the reference distance. A probe module for a unit under test having tilted conductive contacts as described in claim 2 or 7, wherein the base can define a base width parallel to the reference center axis and a base thickness along the vertical axis, and the base width is less than or equal to half of the base thickness. A probe module for a unit under test having inclined conductive contacts as described in claim 2 or 7, wherein the width of the lower layer of colloid is less than 3 mm. A probe module for a unit under test having tilted conductive contacts as described in claim 6, wherein the tilt angle of the probe on the outer side of the lower-layer divergent probe unit is greater than the tilt angle of the probe on the outer side of the higher-layer divergent probe unit. A probe module for a unit under test having a tilted conductive contact as described in claim 6, wherein the probe seat has a probe convergent inner side surface opposite to the probe divergent inner side surface, the at least one probe unit includes at least one convergent probe unit, the first end of the inner extension portion of the probe of the convergent probe unit is connected to the probe convergent inner side surface, the inner extension portion of the outer probe of the convergent probe unit is tilted relative to the reference center axis in a manner that the second end thereof is closer to the reference center axis than the first end thereof and has a tilt angle relative to the reference center axis, and the tilt angle of the outer probe of the convergent probe unit is the same as the tilt angle of the outer probe of the divergent probe unit. A probe module for a unit to be tested having an inclined conductive contact as described in claim 1 or 6, wherein the probes of the same probe unit form a plurality of probe layers at different heights on the probe seat, the contact sections of the probes of different probe layers of the same probe unit gradually extend downward from the second end of the inner extension portion to different lengths to the same height position, and every two adjacent probes of the same probe unit belong to different probe layers. A probe module for a unit under test having inclined conductive contacts as described in claim 12, wherein every two adjacent probes of the same probe unit do not belong to adjacent probe layers. A probe module for a unit under test having a tilted conductive contact as described in claim 2, 3, 4 or 6, wherein the tilt angle of the outer probe of the lower-layer divergent probe unit and the tilt angle of the outer probe of the higher-layer divergent probe unit have a difference, and the difference is less than or equal to 6 degrees. A probe module for a unit under test having tilted conductive contacts as described in claim 14, wherein the tilt angle of the outer probe of the high-layer divergent probe unit is 12 degrees, and the tilt angle of the outer probe of the low-layer divergent probe unit is greater than or equal to 12 degrees and less than or equal to 18 degrees. A probe module for a unit under test having tilted conductive contacts as described in claim 1 or 6, wherein the tilt angle of at least one probe on the outer side of the divergent probe unit is greater than or equal to 12 degrees and less than 18 degrees. A probe module for a unit under test having tilted conductive contacts as described in claim 16, wherein the tilt angle of at least one outer probe of the divergent probe unit is 12 degrees. A testing method for a unit under test having inclined conductive contacts, the steps of which include: Providing a probe module as described in claim 1; Providing at least one unit under test, the unit under test having a first main edge, a second main edge, two side edges connecting the first main edge and the second main edge, and a plurality of conductive contacts, each of the conductive contacts having a first end facing the first main edge and a second end facing the second main edge, the unit under test can define a central axis passing through the first main edge and the second main edge, and the plurality of conductive contacts are arranged The conductive contacts in the same row include two outer contacts closest to the two side edges, each of the outer contacts is inclined relative to the center axis in a manner that the first end is closer to the center axis than the second end, and a tilt angle relative to the center axis can be defined, and the tilt angle of the outer contact of the unit to be tested is greater than the tilt angle of the outer probe of at least one of the divergent probe units of the probe module; and Make the probe of the probe module contact the conductive contact of the at least one unit to be tested, so as to electrically connect the probe module to the at least one unit to be tested. A unit under test is subjected to a test procedure using a probe module as described in claim 1. The unit under test has a first main edge, a second main edge, two side edges connecting the first main edge and the second main edge, and a plurality of conductive contacts, each of the conductive contacts having a first end facing the first main edge and a second end facing the second main edge. The unit under test can define a central axis passing through the first main edge and the second main edge. The plurality of conductive contacts are arranged in at least one row, and the conductive contacts in the same row include two outer contacts which are respectively closest to the two side edges, and each of the outer contacts is inclined relative to the central axis in a manner that the first end thereof is closer to the central axis than the second end thereof, so as to define an inclination angle relative to the central axis, and the inclination angle of the outer contact of the unit to be tested is greater than the inclination angle of the outer probe of at least one of the divergent probe units of the probe module. A test system is used to test at least one unit to be tested, and the test system comprises: A carrier for carrying the at least one unit to be tested; and A probe card, comprising a probe module as described in any one of claims 1 to 17, for electrically connecting the probe card to the at least one unit to be tested by contacting the conductive contacts of the at least one unit to be tested with the probe of the probe module.

Images