TW201932712A - Actuator structure and micro-fluid control device using the same - Google Patents

Abstract

An actuator structure for using in a micro-fluid control device is disclosed and comprises a suspension plate, a frame, at plurality of supporting parts and a piezoelectric ceramic, the suspension plate is square and has a first surface and a second surface, a protruding potion is disposed on the second surface, the frame is disposed surrounding the outside of the suspension plate, and also has a first surface and a second surface, the second surface of the frame is coplanar with the second surface of the suspension plate except the area of the protruding portion, the plurality of supporting parts are disposed between the square suspension plate and the frame, and the length of each supporting part is between 1.11mm to 1.21mm, and the width is between 0.2mm to 0.6mm, and the side length of the piezoelectric ceramic is not larger than the side length of the suspension plate, and the piezoelectric ceramic sticks on the first surface of the suspension plate.

Description

Piezoelectric actuator and microfluidic control device therefor

The present invention relates to a piezoelectric actuator, and more particularly to a piezoelectric actuator suitable for a miniature ultra-thin and silent microfluidic control device.

At present, in various fields, such as medicine, computer technology, printing, energy and other industries, the products are developing in the direction of refinement and miniaturization. Among them, products such as micro-pumps, sprayers, inkjet heads, industrial printing devices, etc. The fluid transport structure is its key technology, which is how to break through its technical bottleneck with innovative structure and be an important part of development.

For example, in the pharmaceutical industry, many instruments or equipment that require pneumatic power drive are usually used with conventional motors and pneumatic valves to achieve their gas delivery. However, limited by the volume limitations of conventional motors and gas valves, it is difficult for such instruments to reduce the size of their overall devices, that is, it is difficult to achieve the goal of thinning, and it is impossible to achieve portable purposes. In addition, these conventional motors and gas valves also cause noise problems when they are actuated, resulting in inconvenience and discomfort in use.

Therefore, how to develop a microfluidic control device capable of improving the above-mentioned conventional technical defects and enabling the conventional apparatus or device using the fluid control device to be small, miniaturized and muted, thereby achieving a portable and portable purpose Electric actuators are an urgent problem to be solved.

The main purpose of the present invention is to provide a microfluidic control device suitable for use in a portable or wearable instrument or device and a piezoelectric actuator therefor, with the piezoelectric actuator having a suspension plate and a frame And four brackets, each bracket is vertically connected between the suspension plate and the outer frame to provide elastic support, thereby vertically spanning the bracket between the suspension plate and the outer frame to reduce the uneven swing of the suspension plate. It helps to increase the amplitude of the suspension plate on the Z-axis, so that the suspension plate is more stable and consistent when it is actuated, which is beneficial to improve the stability and performance of the piezoelectric actuator.

Another object of the present invention is to provide a microfluidic control device suitable for use in a portable or wearable instrument or device. The suspension plate, the outer frame and the bracket of the piezoelectric actuator are integrally formed into a metal plate structure, and The same depth is used to etch the convex portion of the suspension plate and the bracket requirement type, so that the second surface of the outer frame, the second surface of the bracket and the second surface of the suspension plate are coplanar structures, which can simplify the need for the outer frame in the past. The etching process is performed at different depths, and at the same time, through the adhesive layer disposed between the outer frame and the resonant piece, the rough surface generated by the outer frame after the etching is applied, so that the bonding between the adhesive layer and the outer frame can be increased. The strength, and because the thickness of the outer frame is lower than that of the prior art, the thickness of the adhesive layer coating the gap is increased, and the thickness of the adhesive layer is increased, thereby improving the unevenness of the coating of the adhesive layer. Reduce the assembly error in the horizontal direction of the suspension plate assembly, and improve the kinetic energy utilization efficiency of the suspension plate in the vertical direction, and also assist in absorbing the vibration energy and reducing the noise to achieve the effect of mute, and this micro The piezoelectric actuator of the micro fluid allows more control of the entire apparatus is reduced volume and thickness, to achieve a lightweight portable object Comfort.

Another object of the present invention is to provide a microfluidic control device for use in a portable or wearable instrument or device, wherein the design of the suspension plate square shape of the piezoelectric actuator and the suspension plate have more convex portions Actuating, the fluid can flow from the air inlet hole of the air inlet plate of the base, and flow along the communicating bus hole and the confluence chamber, and pass through the hollow hole of the resonator to make the fluid to the resonance plate and the piezoelectric actuator A pressure gradient is created in the compression chamber formed between the two, so that the fluid flows at a high speed, the flow rate of the fluid does not decrease, and no pressure loss occurs, and the transmission can be continued to achieve a higher discharge pressure.

In order to achieve the above object, a generalized embodiment of the present invention provides a piezoelectric actuator comprising a suspension plate in a square shape and capable of bending vibration from a central portion to an outer peripheral portion; Provided on the outer side of the suspension plate; a plurality of brackets, each of which is vertically connected between the suspension plate and the outer frame to provide elastic support, and the bracket has a length ranging from 1.11 mm to 1.21 mm, and the width is And a piezoelectric ceramic plate having a square shape having a side length not greater than a side length of the suspension plate and attached to the first surface of the suspension plate for applying a voltage The suspension plate is driven to bend and vibrate.

In order to achieve the above object, another broad aspect of the present invention provides a microfluidic control device comprising: a piezoelectric actuator having a suspension plate, an outer frame, a quad bracket, and a piezoelectric ceramic plate. The suspension plate has a square shape and has a first surface and a corresponding second surface, and the second surface has a convex portion, the outer frame is disposed on the outer side of the suspension plate, and has a first a surface and a corresponding one of the second surfaces, and the second surface of the outer frame is coplanar with the area other than the convex portion of the second surface of the suspension plate, and the bracket is coupled to the suspension plate Between the outer frames, and having a length of 1.11 mm to 1.21 mm and a width of 0.2 mm to 0.6 mm, the piezoelectric ceramic plate has a side length not greater than the side length of the suspension plate, and is attached to the suspension plate. And a housing comprising a gas collecting plate and a base, wherein the gas collecting plate has a side wall having a side wall to form a receiving space, and the piezoelectric actuator is disposed on the first surface In the accommodating space, the base is composed of an air inlet plate and a resonating film phase Composed into the accommodating space of the gas collecting plate to close the piezoelectric actuator, the air absorbing plate having at least one air inlet hole and at least one bus bar hole communicating with the same Forming a manifold chamber, the resonator piece is fixedly disposed on the air inlet plate, and has a hollow hole opposite to the confluence chamber of the air inlet plate and corresponding to the convex portion of the suspension plate; wherein Providing a glue layer between the second surface of the outer frame of the piezoelectric actuator and the resonant piece of the base to maintain a requirement between the piezoelectric actuator and the resonant plate of the base The depth of the gap in one of the compression chambers.

Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various aspects, and is not to be construed as a limitation.

The piezoelectric actuator 13 of the present invention is applied to the microfluidic control device 1, and the microfluidic control device 1 can be applied to industries such as medical technology, energy, computer technology, or printing, etc., for transferring fluid, but Not limited to this. Please refer to FIG. 1A, FIG. 1B, FIG. 2A and FIG. 2B. FIG. 1A is a front exploded view of the microfluidic control device of the preferred embodiment of the present invention, and FIG. 1B is a microfluid shown in FIG. 1A. FIG. 2A is a schematic view showing the back side exploded structure of the microfluidic control device shown in FIG. 1A, and FIG. 2B is a schematic view showing the back combined structure of the microfluidic control device shown in FIG. 2A, FIG. The figure shows an enlarged cross-sectional structural view of the microfluidic control device shown in Fig. 1B. As shown in FIG. 1A, FIG. 2A and FIG. 5, the microfluidic control device 1 of the present invention has a housing 1a, a piezoelectric actuator 13, insulating sheets 141, 142, and a conductive sheet 15, and the like. 1a includes a gas collecting plate 16 and a base 10, and the base 10 includes an air inlet plate 11 and a resonance piece 12, but is not limited thereto. The piezoelectric actuator 13 is provided corresponding to the resonance piece 12, and the air intake plate 11, the resonance piece 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate are provided. 16 and the like are sequentially stacked, and the piezoelectric actuator 13 is assembled from a suspension plate 130 and a piezoelectric ceramic plate 133. In the present embodiment, as shown in FIGS. 1A and 5, the gas collecting plate 16 is not only a single plate structure, but also a frame structure having a side wall 168 at the periphery, and the side wall 168 formed by the periphery. An accommodating space 16a is defined in the bottom plate for the piezoelectric actuator 13 to be disposed in the accommodating space 16a. As also mentioned above, the gas collecting plate 16 of the present embodiment has a surface 160 which is recessed to form a gas collecting chamber 162, and the gas which is transported downward by the microfluidic control device 1 temporarily accumulates here. The gas collecting chamber 162 has a first through hole 163 and a second through hole 164 in the gas collecting plate 16 , and one end of the first through hole 163 and the second through hole 164 is connected to the gas collecting chamber 162 . The other end is in communication with the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collecting plate 16, respectively. And a protrusion structure 167 is further added to the first outlet chamber 166, for example, but not limited to a cylindrical structure.

As shown in FIG. 2A, the piezoelectric actuator 13 includes a piezoelectric ceramic plate 133, a suspension plate 130, an outer frame 131, and a four-bracket 132. The piezoelectric ceramic plate 133 has a square plate-like structure and has a side length. It is not larger than the side of the suspension plate 130 and can be attached to the suspension plate 130. In the present embodiment, the suspension plate 130 is a flexible square plate-like structure; the outer frame 131 is disposed around the outer side of the suspension plate 130, and the shape of the outer frame 131 also substantially corresponds to the shape of the suspension plate 130. In the embodiment, the outer frame 131 is also a square hollow frame structure; and the suspension plate 130 and the outer frame 131 are connected by four brackets 132 and provide elastic support. As shown in FIG. 1A and FIG. 2A, the microfluidic control device 1 of the present invention may further include an insulating sheet 14 and a conductive sheet 15 and the like. The insulating sheet 14 may be two insulating sheets 141 and 142, and the two insulating layers. The sheets 141 and 142 are provided with the conductive sheets 15 interposed therebetween. When the microfluidic control device 1 of the present invention is assembled, as shown in FIG. 1A, FIG. 1B, FIG. 2A and FIG. 2B, the insulating sheet 142, the conductive sheet 15, the insulating sheet 141, and the piezoelectric actuator are sequentially actuated. The structure of the device 13 and the base 10 is assembled and accommodated in the accommodating space 16a in the gas collecting plate 16, and the combination is as shown in FIG. 1B and FIG. 2B, and can form a miniature and miniaturized shape. Fluid control device 1.

Referring to FIGS. 1A and 2A, the air intake plate 11 of the microfluidic control device 1 has a first surface 11b, a second surface 11a, and at least one air inlet 110. In this embodiment, the air intake The number of the holes 110 is four, but not limited thereto, which is through the first surface 11b and the second surface 11a of the air inlet plate 11, and is mainly used for the gas to comply with the atmospheric pressure from the outside of the device. At least one intake port 110 flows into the microfluidic control device 1. And as shown in FIG. 2A, the first surface 11b of the air inlet plate 11 is visible, and has at least one bus bar hole 112 for the at least one air inlet hole 110 of the second surface 11a of the air inlet plate 11. Corresponding settings. The center of the bus bar 112 has a confluence chamber 111, and the confluence chamber 111 communicates with the bus bar hole 112, thereby entering the bus bar hole 112 from the at least one air inlet hole 110. The gas is directed and confluent to the confluence chamber 111 for delivery downward. In this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a bus bar hole 112, and a confluence chamber 111. When the air inlet plate 11 is assembled with the resonance plate 12, the confluence chamber is assembled. At 111, a chamber of a confluent fluid is formed for temporary storage of the fluid. In some embodiments, the material of the air inlet plate 11 may be, but not limited to, a stainless steel material, and the thickness thereof is between 0.4 mm and 0.6 mm, and the preferred value is 0.5 mm. Not limited to this. In other embodiments, the depth of the chamber formed by the confluence chamber 111 is the same as the depth of the bus bar holes 112, but is not limited thereto.

In this embodiment, the resonant plate 12 is made of a flexible material, but not limited thereto, and has a hollow hole 120 on the resonant plate 12 corresponding to the first surface 11b of the air inlet plate 11. The confluence chamber 111 is provided to allow gas to circulate. In other embodiments, the resonant plate 12 may be made of a copper material, but not limited thereto, and has a thickness of between 0.03 mm and 0.08 mm, and preferably has a thickness of 0.05 mm, but is not This is limited to this.

Further, as shown in FIGS. 4A and 5, the resonator piece 12 and the piezoelectric actuator 13 have a gap h, which is outside the resonator piece 12 and the piezoelectric actuator 13 in this embodiment. A gap 136 is filled in the gap h between the frames 131, for example, a conductive paste, but not limited thereto, so that the gap h can be maintained between the resonator piece 12 and the suspension plate 130 of the piezoelectric actuator 13. The depth, in turn, can direct the airflow to flow more rapidly; and, in response to the depth of the gap h, the compression chamber 121 can be formed between the resonator piece 12 and the piezoelectric actuator 13, and the hollow of the resonator plate 12 can be transmitted. The holes 120 direct the fluid to flow more rapidly between the chambers, and because the suspension plates 130 are kept at an appropriate distance from the resonator plates 12, the mutual contact interference is reduced, and the noise generation can be reduced.

In addition, referring to FIG. 1A and FIG. 2A, the microfluidic control device 1 further includes an insulating sheet 141, a conductive sheet 15 and another insulating sheet 142, which are sequentially sandwiched between the piezoelectric actuators. 13 is interposed between the gas collecting plate 16 and its shape substantially corresponds to the shape of the outer frame 131 of the piezoelectric actuator 13. In some embodiments, the insulating sheets 141, 142 are made of an insulating material, such as plastic, but not limited thereto for insulation; in other embodiments, the conductive sheet 15 is It is made of a conductive material, such as metal, but not limited to it for electrical conduction. Moreover, in the embodiment, a conductive pin 151 may be disposed on the conductive sheet 15 for electrical conduction.

Please also refer to FIG. 3A, FIG. 3B and FIG. 3C, which are schematic diagrams of the front structure, the back structure and the cross-sectional structure of the piezoelectric actuator of the microfluidic control device shown in FIG. 1A, respectively. As shown, the piezoelectric actuator 13 is assembled by a suspension plate 130, an outer frame 131, a plurality of brackets 132, and a piezoelectric ceramic plate 133. In this embodiment, the plurality of brackets 132 are 4 brackets 132, but not limited thereto, the number can be changed according to the actual application situation; and, the suspension plate 130, the outer frame 131 and the four brackets 132 can be, but are not limited to, one-piece molding The structure of the piezoelectric actuator 13 of the microfluidic control device 1 of the present invention is composed of a piezoelectric plate 133. The structure of the piezoelectric actuator 13 of the microfluidic control device 1 of the present invention is not limited thereto. Bonded to a metal plate, but not limited to this. As shown, the suspension plate 130 has a first surface 130b and a corresponding second surface 130a, wherein the piezoelectric ceramic plate 133 is attached to the first surface 130b of the suspension plate 130 for applying a voltage to drive the The suspension plate 130 is bent and vibrated. As shown in FIG. 3A, the suspension plate 130 has a central portion 130d and an outer peripheral portion 130e. When the piezoelectric ceramic plate 133 is driven by a voltage, the suspension plate 130 can be flexibly vibrated from the central portion 130d to the outer peripheral portion 130e; the outer frame 131 The utility model is disposed on the outer side of the suspension plate 130 and has an outwardly protruding conductive pin 134 for power connection, but is not limited thereto.

In this embodiment, the four brackets 132 are vertically connected between the suspension plate 130 and the outer frame 131 to provide elastic support, that is, the side 130f of the suspension plate 130 and the inner side 131c of the outer frame 131 are Parallelly disposed, one end of each of the brackets 132 is vertically connected to the side 130f of the suspension plate 130, and the other end is perpendicularly connected to the inner side 131c of the outer frame 131, so that the four sides 132 and the side 130f of the suspension plate 130 The inner side 131c of the outer frame 131 is coaxially connected at right angles, and has at least one gap 135 between the bracket 132, the suspension plate 130 and the outer frame 131 for fluid circulation, and the suspension plate 130 and the outer frame 131 And the type and number of brackets 132 are varied. Through the bracket 132 vertically spanning between the suspension plate 130 and the outer frame 131, the uneven angle of the suspension plate 130 during operation is reduced, which helps to increase the amplitude of the suspension plate 130 on the Z-axis and suspend the suspension. The plate 130 can have a better displacement state when vibrating up and down, that is, the suspension plate 130 is more stable and consistent when it is actuated, which is beneficial to improve the stability and performance of the piezoelectric actuator 13.

In the piezoelectric actuator 13 of the present invention, the different lengths and widths of the brackets 132 will result in a difference in the performance of the piezoelectric actuators 13. The data of each performance is as shown in Table 1 below:

Table I

As can be seen from the data in Table 1, in the embodiment, the length of each of the brackets 132 is between 1.11 mm and 1.21 mm, and the performance is better, and the preferred length of the bracket 132 is 1.16 mm. The performance of the bracket 132 is significantly increased, and the width of each of the brackets 132 is between 0.2 mm and 0.6 mm, and the preferred value is 0.4 mm, but not limited thereto.

As shown in FIGS. 3A and 3C, the second surface 130a of the suspension plate 130 and the second surface 131a of the outer frame 131 and the second surface 132a of the bracket 132 are flat and planar, and in this embodiment For example, the suspension plate 130 is a square structure, and each side of the suspension plate 130 is between 7.5 mm and 12 mm long, and preferably has a thickness of 7.5 to 8.5 mm and a thickness of 0.1 mm to Between 0.4 mm, the preferred value is 0.27 mm, but not limited thereto. The thickness of the outer frame is also between 0.1 mm and 0.4 mm, but not limited thereto. And, the side length of the piezoelectric ceramic plate 133 is not larger than the side length of the suspension plate 130, and is also designed as a square plate structure corresponding to the suspension plate 130, and the thickness of the piezoelectric ceramic plate 133 is between 0.05 mm and 0.3. Between mm, and its preferred value is 0.10 mm, the design of the square piezoelectric ceramic plate 131 and the square suspension plate 130 used in the present invention is due to the circular suspension compared with the conventional piezoelectric actuator. The board design, the square suspension plate 130 of the piezoelectric actuator 13 of the present invention obviously has the advantage of power saving, and the comparison of the power consumption is shown in Table 2 below:

Table II

Therefore, it is known from the above table that the square suspension plate length dimension (8mm to 10mm) of the piezoelectric actuator is smaller than the circular suspension plate diameter of the piezoelectric actuator (8mm to 10mm). More power-saving, the reason for its power saving can be presumed as: due to the capacitive load operating at the resonant frequency, its power consumption will increase with the increase of frequency, and the resonant frequency of the square suspension plate 130 designed by the side length is significantly higher. The same diameter circular suspension plate is low, so its relative power consumption is also significantly lower, that is, the square design of the suspension plate 130 used in this case is more economical than the previous circular suspension plate design. The microfluidic control device 1 adopts the ultra-thin and quiet design trend, and can achieve the effect of low power consumption design, especially for wearing devices, and saving power is a very important design focus.

As described above, in the present embodiment, the suspension plate 130, the outer frame 131, and the bracket 132 disposed perpendicular to the suspension plate 130 and the outer frame 131 may be, but are not limited to, an integrally formed structure. The manufacturing method can be produced by conventional processing, or yellow light etching, or laser processing, electroforming processing, or electric discharge machining, and is not limited thereto. In this embodiment, the suspension plate 130, the outer frame 131, and the four brackets 132 of the piezoelectric actuator 13 of the present invention are integrally formed, that is, a metal plate, and through the outer frame 131 and the four brackets. 132 and the suspension plate 130 are etched at the same depth, so that the second surface 131a of the outer frame 131, the second surface 132a of the four brackets 132, and the second surface 130a of the suspension plate 130 are all coplanar structures; The deep etching process can simplify the etching process in the past according to the different depths of the outer frame 131, and at the same time, through the rubber layer 136 disposed between the outer frame 131 and the resonant film 12, and applied to the outer frame 131. The rough surface generated after etching, so that the bonding strength between the adhesive layer and the outer frame can be increased, and since the thickness of the outer frame 131 is lower than that of the prior art, the thickness of the adhesive layer 136 coated with the gap h is The increase of the thickness of the adhesive layer 136 can effectively improve the unevenness of the coating of the adhesive layer 136, reduce the assembly error in the horizontal direction when the suspension plate 130 is assembled, and improve the kinetic energy utilization efficiency of the suspension plate 130 in the vertical direction. Auxiliary absorption vibration Energy and reduce noise.

In the microfluidic control device 1 of the present invention, the different thicknesses of the adhesive layer 136 will result in differences in the performance and defect rate of the microfluidic control device, and the data of each performance and defect rate are as shown in Table 3 below:

Table 3

As is apparent from the data in Table 3, the thickness of the glue layer 136 can significantly affect the performance of the microfluidic control device 1. If the thickness of the glue layer 136 is too thick, although the gap h can maintain a relatively thick depth, it is due to the compression chamber 121. The depth becomes deeper and the volume becomes larger, and the performance of the compression operation will be deteriorated, so that the performance thereof will be degraded; however, if the thickness of the adhesive layer 136 is too thin, the depth of the gap h which can be provided is insufficient. However, the convex portion 130c of the suspension plate 130 and the resonance piece 12 are liable to contact each other, thereby deteriorating performance and generating noise, and the noise problem is also one of the causes of product defects. Therefore, in the embodiment of the present invention, the sampling of 25 microfluidic control devices 1 is performed, and the thickness of the adhesive layer 136 is between 50 and 60 μm. In this numerical interval, not only the performance is significantly improved, but also The defect rate is relatively low, and the preferred value thereof is 55 μm, the performance of the performance is better, and the defect rate is the lowest, but not limited thereto.

As shown in FIG. 3B, in the embodiment, the suspension plate 130 has a square shape and has a stepped surface structure, that is, a convex portion 130c is further disposed on the second surface 130a of the suspension plate 130. It is disposed on the central portion 130d of the second surface 130a, and may be, but is not limited to, a circular convex structure. In some embodiments, the height of the protrusion 130c is between 0.02 mm and 0.08 mm, preferably 0.03 mm, and the diameter is 4.4 mm, but not limited thereto.

Therefore, referring to FIG. 1A, FIG. 4A to FIG. 4E and FIG. 5, the base 10, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, the other insulating sheet 142, and the gas collecting plate are shown. After being stacked and assembled in sequence, as shown in FIGS. 4A and 5, it can be seen that the microfluidic control device 1 can form a chamber for confluent gas together with the upper air inlet plate 11 at the hollow hole 120 of the resonant plate 12. That is, a chamber at the confluence chamber 111 of the first surface 11b of the air inlet plate 11, and a compression chamber 121 is formed between the resonance plate 12 and the piezoelectric actuator 13 for temporarily storing gas, and The compression chamber 121 communicates with the chamber at the confluence chamber 111 of the first surface 11b of the air inlet plate 11 through the hollow hole 120 of the resonator piece 12, and the piezoelectric actuator 13 is controlled to be driven by the microfluidic control device 1 hereinafter. A partial schematic diagram of the state in which the suspension plate 130 performs the operation of the vertical reciprocating vibration will be described.

As shown in FIG. 4B, when the suspension plate 130 that controls the driving of the piezoelectric actuator 13 performs vertical reciprocating vibration and the bending deformation is downwardly displaced, gas is generated from at least one air inlet hole on the air intake plate 11. The 110 enters and is collected by the at least one bus bar hole 112 of the first surface 11b to the central confluence chamber 111. At this time, the resonator piece 12 is a light and thin sheet-like structure due to the introduction of the fluid and The pressing and the vertical reciprocating vibration with the resonance of the suspension plate 130, that is, the movable portion 12a of the resonance piece 12 corresponding to the confluence chamber 111 is also bent and vibrated, as shown in FIG. 4C. The vertical reciprocating vibration of the suspension plate 130 is displaced to a position, so that the movable portion 12a of the resonant plate 12 can be very close to the convex portion 130c of the suspension plate 130, thereby allowing fluid to enter the passage of the compression chamber 121, in the suspension plate 130. When the distance between the region other than the convex portion 130c and the compression chamber 121 between the fixed portions 12b on both sides of the resonator piece 12 does not become small, the flow rate of the fluid flowing between them does not decrease or Produce pressure loss, so compress this more effectively The volume of the chamber 121, as shown in Fig. 4D, causes the fluid in the compression chamber 121 to push to the sides when the piezoelectric actuator 13 continues to perform vertical reciprocating vibration and the bending deformation is upwardly displaced. Flowing and flowing downward through the gap 136 between the brackets 132 of the piezoelectric actuator 13 to obtain a higher discharge pressure, as shown in Fig. 4E, along with the piezoelectric actuator 13 The convex portion 130c of the suspension plate 130 is pushed upward, and the movable portion 12a of the resonance piece 12 is also bent and vibrated upward, so that the volume at the confluence chamber 111 is compressed and is in the bus bar hole 112. The fluid flows to the confluence chamber 111 to become small. Finally, when the suspension plate 130 of the piezoelectric actuator 13 continues to perform the vertical reciprocating vibration, the embodiment shown in Figs. 4B to 4E can be repeated. In this embodiment, it can be seen that the design of the suspension plate 130 of the piezoelectric actuator 13 having the convex portion 130c is applied to the microfluidic control device 1 of the present invention to achieve better fluid transmission efficiency, but the design of the convex portion 130c is The state, quantity and position may be changed according to the actual application situation, and are not limited thereto.

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can be simultaneously upward or downward, which can be implemented according to actual conditions. Any change is not limited to the mode of operation shown in this embodiment.

In summary, the piezoelectric actuator provided in the present application is applied to a microfluidic control device, the piezoelectric actuator has a suspension plate, an outer frame and four brackets, and each bracket is vertically connected to the suspension plate and the outer portion. Between the frames, the bracket is vertically spanned between the suspension plate and the outer frame to provide elastic support and reduce the uneven oscillation of the suspension plate, thereby helping to increase the amplitude of the suspension plate on the Z axis and suspending the suspension plate. When the plate vibrates up and down, it can have a better displacement state, that is, the suspension plate is more stable and consistent when it is actuated, which is beneficial to improve the stability and performance of the piezoelectric actuator. At the same time, the suspension by the piezoelectric actuator The plate, the outer frame and the bracket are integrally formed into a metal plate structure, and the convex portion of the suspension plate and the bracket requirement type are etched through the same depth, so that the second surface of the outer frame outer frame, the second surface of the bracket and the suspension plate are The second surface is a coplanar structure, which simplifies the etching process in the past due to the different depths of the outer frame, and simultaneously passes through the adhesive layer disposed between the outer frame and the resonant plate, and is applied to the outer frame for etching. Rough surface Therefore, the bonding strength between the adhesive layer and the outer frame can be increased, and since the thickness of the outer frame is lower than that of the prior art, the thickness of the adhesive layer coating the gap is increased, and the thickness of the adhesive layer is increased. It can effectively improve the unevenness of the coating of the rubber layer, reduce the assembly error in the horizontal direction of the suspension plate assembly, and improve the kinetic energy utilization efficiency of the vertical direction of the suspension plate, and also assist in absorbing the vibration energy and reducing the noise to achieve the effect of mute. Moreover, the miniaturized piezoelectric actuator can reduce the overall volume of the microfluidic control device and reduce the thickness thereof for portable and portable purposes; and the suspension plate square by the piezoelectric actuator The design of the type and the suspension plate are further actuated by the convex portion, so that the fluid can flow from the air inlet hole of the air inlet plate of the base, and flow along the communicating bus hole and the confluence chamber, and penetrate the hollow hole of the resonance piece. In order to generate a pressure gradient in the compression chamber formed between the resonator and the piezoelectric actuator, the fluid flows at a high speed, the flow rate of the fluid does not decrease, and no pressure is generated. Loss, and can continue to pass to achieve higher discharge pressure; therefore, the microfluidic control device of the present invention can reduce the overall volume and thinner, in order to achieve portable and portable purposes, which is of great industrial value. submit application.

The present invention has been described in detail by the above-described embodiments, and is intended to be modified by those skilled in the art.

1‧‧‧Microfluidic control device

1a‧‧‧shell

10‧‧‧Base

11‧‧‧Air intake plate

11a‧‧‧ second surface of the air inlet plate

11b‧‧‧ first surface of the air inlet plate

110‧‧‧Air intake

111‧‧‧Confluence chamber

112‧‧‧ Bus Bars

12‧‧‧Resonance film

12a‧‧‧movable department

12b‧‧‧Fixed Department

120‧‧‧ hollow holes

121‧‧‧Compression chamber

13‧‧‧ Piezoelectric Actuator

130‧‧‧suspension board

130a‧‧‧Second surface of the suspension plate

130b‧‧‧The first surface of the suspension plate

130c‧‧‧ convex

130d‧‧‧ Central Department

130e‧‧‧The outer part

130f‧‧‧ side

131‧‧‧Front frame

131a‧‧‧ second surface of the outer frame

131b‧‧‧ first surface of the outer frame

131c‧‧‧ inside side

132‧‧‧ bracket

132a‧‧‧Second surface of the stent

132b‧‧‧ first surface of the bracket

133‧‧‧ Piezoelectric ceramic plate

134, 151‧‧‧ conductive pins

135‧‧‧ gap

136‧‧‧ glue layer

141, 142‧‧‧ insulating sheet

15‧‧‧Conductor

16‧‧‧ gas collecting plate

16a‧‧‧ accommodating space

160‧‧‧ surface

161‧‧‧ reference surface

162‧‧‧Gas chamber

163‧‧‧First through hole

164‧‧‧Second through hole

165‧‧‧First pressure relief chamber

166‧‧‧First out of the chamber

167‧‧‧ convex structure

168‧‧‧ side wall

H‧‧‧ gap

Fig. 1A is a front exploded view showing the microfluidic control device of the preferred embodiment of the present invention. Fig. 1B is a schematic view showing the front combined structure of the microfluidic control device shown in Fig. 1A. Fig. 2A is a schematic exploded view showing the back side of the microfluidic control device shown in Fig. 1A. Fig. 2B is a schematic view showing the structure of the back side of the microfluidic control device shown in Fig. 2A. Fig. 3A is a front view showing the structure of a piezoelectric actuator of the microfluidic control device shown in Fig. 1A. Fig. 3B is a schematic view showing the structure of the back surface of the piezoelectric actuator of the microfluidic control device shown in Fig. 1A. Fig. 3C is a schematic cross-sectional view showing the piezoelectric actuator of the microfluidic control device shown in Fig. 1A. 4A to 4E are schematic views showing a partial operation of the microfluidic control device shown in Fig. 1A. Fig. 5 is a schematic enlarged cross-sectional view showing the microfluidic control device shown in Fig. 1B.

Claims (9)

A piezoelectric actuator comprising: a suspension plate in a square shape and capable of bending vibration from a central portion to an outer peripheral portion; an outer frame circumferentially disposed on an outer side of the suspension plate; a plurality of brackets, each The bracket has corresponding two end points, one end of which is vertically connected to the suspension plate, and the other end is vertically connected to the outer frame to provide elastic support, and the bracket has a length of 1.11 mm to 1.21. Mm, width between 0.2mm and 0.6mm, wherein the suspension plate, the outer frame and the bracket are made by etching at the same depth, so that one of the second surface of the bracket and the second of the suspension plate are second a surface coplanar; and a piezoelectric ceramic plate having a square shape having a side length not greater than a side length of the suspension plate attached to a first surface of the suspension plate for applying a voltage to drive the suspension The plate bends and vibrates. The piezoelectric actuator of claim 1, wherein the brackets are four brackets. The piezoelectric actuator of claim 1, wherein one end of each of the brackets is vertically connected to one side of the suspension plate, and the other end is vertically connected to one of the inner sides of the outer frame. The piezoelectric actuator of claim 1, wherein the stent has a length of 1.16 mm. The piezoelectric actuator of claim 1, wherein the stent has a width of 0.4 mm. The piezoelectric actuator of claim 1, wherein the piezoelectric ceramic plate has a thickness of between 0.05 mm and 0.3 mm. The piezoelectric actuator of claim 6, wherein the piezoelectric ceramic plate has a thickness of 0.10 mm. The piezoelectric actuator of claim 1, wherein each side of the suspension plate has a length of between 7.5 mm and 12 mm and a thickness of between 0.1 mm and 0.4 mm. The piezoelectric actuator of claim 8, wherein each side of the suspension plate has a length of between 7.5 mm and 8.5 mm and a thickness of 0.27 mm.