CN206211877U - Piezoelectric actuator and micro fluid control device suitable for piezoelectric actuator - Google Patents

Abstract

A piezoelectric actuator for use in a microfluidic control device, comprising: the piezoelectric ceramic plate is in a square shape and provided with a first surface and a corresponding second surface, a convex part is arranged on the second surface, the outer frame is arranged on the outer side of the suspension plate in a surrounding mode and provided with the first surface and the corresponding second surface, the whole area of the second surface of the outer frame and the whole area of the second surface of the suspension plate except the convex part is a coplanar surface, the support is connected between the suspension plate and the outer frame and has the length of 1.11 mm-1.21 mm and the width of 0.2 mm-0.6 mm, and the piezoelectric ceramic plate has the side length not larger than the side length of the suspension plate and is attached to the first surface of the suspension plate.

Description

Piezoelectric Actuator and Its Applicable Micro Fluid Control Device

technical field

The utility model relates to a piezoelectric actuator, in particular to a piezoelectric actuator suitable for a miniature ultra-thin and quiet micro fluid control device.

Background technique

At present, in various fields, whether it is medicine, computer technology, printing, energy and other industries, products are developing towards refinement and miniaturization. Among them, micro pumps, sprayers, inkjet heads, industrial printing devices and other products contain fluid delivery structures. Its key technology, therefore, how to break through its technical bottleneck through innovative structure is an important content of development.

For example, in the pharmaceutical industry, many instruments or equipment that need to be driven by pneumatic power usually use traditional motors and pneumatic valves to achieve the purpose of gas delivery. However, limited by the volume limitations of such traditional motors and gas valves, it is difficult to reduce the overall device volume of such instruments and equipment, that is, it is difficult to achieve the goal of thinning, let alone achieve the purpose of portability. In addition, these traditional motors and gas valves also generate noise during operation, resulting in inconvenience and discomfort in use.

Therefore, how to develop a micro-fluid control device and a micro-fluid control device that can improve the lack of the above-mentioned known technology, and can make the traditional instrument or equipment using a fluid control device small in size, miniaturized and quiet, and then achieve a light and comfortable portable purpose. Piezoelectric actuators are an urgent problem to be solved at present.

Utility model content

The main purpose of the present utility model is to provide a microfluidic control device suitable for portable or wearable instruments or equipment and the piezoelectric actuator used therein, through which the piezoelectric actuator has a suspension plate, Outer frame and four brackets, each bracket is vertically connected between the suspension board and the outer frame to provide elastic support, through the bracket vertically spanning between the suspension board and the outer frame to reduce the uneven swing of the suspension board , helps to increase the vibration amplitude of the suspension board on the Z axis, so that the suspension board moves more stably and consistently, thereby improving the stability and performance of the piezoelectric actuator.

Another object of the present utility model is to provide a microfluidic control device suitable for portable or wearable instruments or equipment, through which the suspension plate, outer frame and support of the piezoelectric actuator are integrally formed into a metal plate structure, And through the same depth to etch the convex part of the suspension board and the required shape of the bracket, so that the second surface of the outer frame, the second surface of the bracket and the second surface of the suspension board are all coplanar structures, which can simplify the previous response The outer frame is etched multiple times at different depths, and at the same time, the adhesive layer between the outer frame and the resonant plate is applied to the rough surface of the outer frame after etching, so that the gap between the adhesive layer and the outer frame can be increased. The bonding strength between the gaps, and because the thickness of the outer frame is reduced compared with the previous manufacturing method, the thickness of the adhesive layer coating the gap is increased, and the unevenness of the adhesive layer coating can be effectively improved by increasing the thickness of the adhesive layer. It can reduce the assembly error in the horizontal direction when the suspension board is assembled, and improve the kinetic energy utilization efficiency of the suspension board in the vertical direction. At the same time, it can also assist in absorbing vibration energy and reduce noise to achieve the effect of silence. This miniaturized piezoelectric actuator Furthermore, the overall volume of the micro-fluid control device can be reduced and thinned, so as to achieve the purpose of being portable and comfortable.

Another object of the present utility model is to provide a micro fluid control device used in portable or wearable instruments or equipment, through the design of the suspension plate square shape of the piezoelectric actuator and the suspension plate also has The action of the convex part allows the fluid to flow in from the air inlet of the air inlet plate of the base, and flow along the connected bus hole and the confluence chamber, and pass through the hollow hole in the resonant sheet to make the fluid flow in the resonant sheet and the piezoelectric actuator. The pressure gradient is generated in the compression chamber formed between the actuators, and then the fluid flows at a high speed, the fluid flow rate will not decrease, and there will be no pressure loss, and it can continue to transmit to obtain a higher discharge pressure.

In order to achieve the above purpose, a broad implementation of the present utility model is to provide a piezoelectric actuator, including a suspension plate, which is in the shape of a square, and can bend and vibrate from a central part to a peripheral part; A frame is arranged around the outside of the suspension board; several brackets are vertically connected between the suspension board and the outer frame to provide elastic support, and the brackets have a length ranging from 1.11mm to 1.21mm, a width between 0.2mm and 0.6mm; and a piezoceramic plate, in the form of a square, with a side length not greater than that of the hoverboard, attached to the first surface of the hoverboard for applying Voltage to drive the hoverboard to flex and vibrate.

In order to achieve the above purpose, another broad implementation of the present utility model is to provide a micro fluid control device, including: a piezoelectric actuator with a suspension plate, an outer frame, four brackets and a piezoelectric ceramic board, the suspension board is in the shape of a square, and has a first surface and a corresponding second surface, and there is a convex portion on the second surface, and the outer frame is arranged around the outside of the suspension board, and also It has a first surface and a corresponding second surface, and the second surface of the outer frame is coplanar with the area other than the convex part of the second surface of the suspension board, and the bracket is connected to the Between the suspension board and the outer frame, and its length is between 1.11mm and 1.21mm, and its width is between 0.2mm and 0.6mm. The piezoelectric ceramic board has a side length not greater than the side length of the suspension board and is attached to the On the first surface of the suspension board; and a housing, including a gas collecting plate and a base, the gas collecting plate is a frame structure with a side wall on the periphery to form an accommodating space, so that the piezoelectric The actuator is arranged in the accommodating space, and the base is formed by joining an air inlet plate and a resonant plate, and combined in the accommodating space of the gas collecting plate to close the piezoelectric actuator, The air intake plate has at least one air intake hole and at least one bus hole communicating with it to form a confluence chamber. The confluence chamber of the gas plate corresponds to the protrusion of the suspension plate; wherein, a glue layer is arranged between the second surface of the outer frame of the piezoelectric actuator and the resonant plate of the base, A gap depth forming the required compression chamber is maintained between the piezoelectric actuator and the resonant plate of the base.

Description of drawings

FIG. 1A is a schematic exploded front view of a micro-fluid control device according to a preferred embodiment of the present invention.

FIG. 1B is a schematic diagram of the front assembled structure of the microfluidic control device shown in FIG. 1A .

FIG. 2A is a schematic diagram of the rear exploded structure of the microfluidic control device shown in FIG. 1A .

FIG. 2B is a schematic diagram of the rear assembled structure of the microfluidic control device shown in FIG. 2A .

FIG. 3A is a schematic front view of the piezoelectric actuator of the micro-fluid control device shown in FIG. 1A .

FIG. 3B is a schematic diagram of the rear structure of the piezoelectric actuator of the microfluidic control device shown in FIG. 1A .

FIG. 3C is a schematic cross-sectional structure diagram of the piezoelectric actuator of the micro-fluid control device shown in FIG. 1A .

FIG. 4A to FIG. 4E are partial action diagrams of the micro-fluid control device shown in FIG. 1A .

FIG. 5 is a schematic diagram of a cross-sectional enlarged structure of the microfluidic control device shown in FIG. 1B .

【Symbol Description】

1: Micro fluid control device

1a: Shell

10: base

11: Air intake plate

11a: The second surface of the intake plate

11b: The first surface of the intake plate

110: air intake hole

111: confluence chamber

112: bus hole

12: Resonant plate

12a: Movable part

12b: fixed part

120: hollow hole

121: Compression chamber

13: Piezoelectric Actuator

130: Hoverboard

130a: second surface of the hoverboard

130b: first surface of the hoverboard

130c: convex part

130d: center part

130e: Peripheral part

130f: side

131: Outer frame

131a: the second surface of the outer frame

131b: the first surface of the outer frame

131c: inner edge

132: bracket

132a: Second surface of bracket

132b: first surface of bracket

133: Piezoelectric ceramic plate

134, 151: Conductive pins

135: Void

136: Adhesive layer

141, 142: insulating sheet

15: Conductive sheet

16: Gas collecting plate

16a: Accommodating space

160: surface

161: datum surface

162: Gathering chamber

163: First through hole

164: second through hole

165: the first pressure relief chamber

166: First exit chamber

167: Convex structure

168: side wall

h: gap

detailed description

Some typical embodiments embodying the features and advantages of the utility model will be described in detail in the description of the following paragraphs. It should be understood that the utility model can have various changes in different aspects, none of which departs from the scope of the utility model, and the description and drawings therein are used for illustration in nature rather than for structure To limit the utility model.

The piezoelectric actuator 13 of the present utility model is applied in the micro-fluid control device 1, and the micro-fluid control device 1 can be applied to industries such as medical biotechnology, energy, computer technology or printing, in order to transmit fluid, But not limited to this. Please refer to Fig. 1A, Fig. 1B, Fig. 2A and Fig. 2B, Fig. 1A is a schematic diagram of the front exploded structure of the micro-fluid control device according to a preferred embodiment of the present utility model, and Fig. 1B is a front assembly of the micro-fluid control device shown in Fig. 1A Schematic diagram of the structure, Fig. 2A is a schematic diagram of the rear exploded structure of the microfluidic control device shown in Fig. 1A, Fig. 2B is a schematic diagram of the combined structure of the back of the microfluidic control device shown in Fig. 2A, and Fig. 5 is a schematic diagram of the microfluidic control device shown in Fig. 1B The schematic diagram of the enlarged cross-section structure. As shown in Fig. 1A, Fig. 2A and Fig. 5, the micro fluid control device 1 of the present utility model has structures such as housing 1a, piezoelectric actuator 13, insulating sheet 141, 142 and conductive sheet 15, wherein, housing 1a It includes a gas collecting plate 16 and a base 10 , and the base 10 includes an air inlet plate 11 and a resonance plate 12 , but not limited thereto. The piezoelectric actuator 13 is arranged corresponding to the resonant sheet 12, and makes the intake plate 11, the resonant sheet 12, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, another insulating sheet 142, the gas collecting plate 16 and so on are stacked in sequence, and the piezoelectric actuator 13 is assembled from a suspension plate 130 and a piezoelectric ceramic plate 133 . In this embodiment, as shown in Figure 1A and Figure 5, the gas collecting plate 16 is not only a single plate structure, but also a frame structure with a side wall 168 on the periphery, and the side wall 168 formed by the periphery Together with the plate at the bottom, it defines an accommodating space 16a for the piezoelectric actuator 13 to be disposed in the accommodating space 16a. As mentioned above, the gas collecting plate 16 of this embodiment has a surface 160, which is recessed to form a gas collecting chamber 162, and the gas transported downward by the microfluidic control device 1 is temporarily accumulated here In the gas-collecting chamber 162, there are first through holes 163 and second through holes 164 in the gas-collecting plate 16. One end of the first through holes 163 and the second through holes 164 communicates with the gas-collecting chamber 162. One end communicates with the first pressure relief chamber 165 and the first outlet chamber 166 on the reference surface 161 of the gas collecting plate 16 respectively. And, a protrusion structure 167 is further added at the first outlet chamber 166 , such as but not limited to a cylindrical structure.

As shown in Fig. 2A, the piezoelectric actuator 13 includes a piezoelectric ceramic plate 133, a suspension plate 130, an outer frame 131 and four brackets 132, wherein the piezoelectric ceramic plate 133 is a square plate structure, and its side length is not longer than that of the suspension plate. The sides of the board 130 are long and can be attached on the suspension board 130 . In this embodiment, the suspension board 130 is a flexible square plate structure; an outer frame 131 is arranged around the outside of the suspension board 130, and the shape of the outer frame 131 roughly corresponds to that of the suspension board 130, so in this embodiment In the embodiment, the outer frame 131 is also a square hollow frame structure; and four brackets 132 are connected between the suspension board 130 and the outer frame 131 to provide elastic support. And, as shown in Fig. 1A and Fig. 2A, the micro-fluid control device 1 of the present utility model can also include structures such as an insulating sheet 14 and a conductive sheet 15, the insulating sheet 14 can be two insulating sheets 141, 142, and the two insulating sheets 141 and 142 are provided by sandwiching the conductive sheet 15 up and down. When the micro fluid control device 1 of the present utility model is assembled, as shown in Fig. 1A, Fig. 1B, Fig. 2A and Fig. 2B, the insulating sheet 142, the conductive sheet 15, the insulating sheet 141, the piezoelectric actuator 13 and the base 10 and other structures are assembled and accommodated in the accommodation space 16a in the gas collecting plate 16. After making it assembled, as shown in Figure 1B and Figure 2B, a micro fluid control device 1 with small volume and miniaturized appearance can be formed .

1A and 2A, the air inlet plate 11 of the microfluidic control device 1 has a first surface 11b, a second surface 11a and at least one air inlet 110. In this embodiment, the air inlet 110 The number is 4, but it is not limited thereto. It penetrates through the first surface 11b and the second surface 11a of the intake plate 11, and is mainly used for supplying gas from the outside of the device to comply with the effect of atmospheric pressure from the at least one intake. The hole 110 flows into the microfluidic control device 1 . And as shown in FIG. 2A , it can be seen from the first surface 11 b of the air intake plate 11 that there is at least one bus hole 112 thereon for correspondingly setting the at least one air intake hole 110 on the second surface 11 a of the air intake plate 11 . There is a confluence chamber 111 at the central communication place of these bus holes 112, and the confluence chamber 111 communicates with the bus hole 112, so that the gas that enters the bus hole 112 from the at least one air inlet 110 can be guided and converged to Confluence chamber 111 to pass down. Therefore, in this embodiment, the air inlet plate 11 has an integrally formed air inlet hole 110, a bus hole 112, and a confluence chamber 111, and when the air inlet plate 11 and the resonant plate 12 are assembled correspondingly, at the confluence chamber 111 Constitute a confluence fluid chamber for temporary storage of fluid. In some embodiments, the material of the intake plate 11 can be but not limited to be made of a stainless steel material, and its thickness is between 0.4mm and 0.6mm, and its preferred value is 0.5mm, but This is not the limit. In some other embodiments, the depth of the chamber formed by the confluence chamber 111 is the same as the depth of the bus holes 112 , but not limited thereto.

In this embodiment, the resonant plate 12 is made of a flexible material, but not limited thereto, and has a hollow hole 120 on the resonant plate 12, corresponding to the confluence of the first surface 11b of the air inlet plate 11 The chamber 111 is provided so that the gas can flow through. In some other embodiments, the resonant plate 12 can be made of a copper material, but not limited thereto, and its thickness is between 0.03mm and 0.08mm, and its preferred value is 0.05mm, but it is not limited to This is the limit.

As shown in Figure 4A and Figure 5, there is a gap h between the resonant plate 12 and the piezoelectric actuator 13, in this embodiment, between the resonant plate 12 and the outer frame 131 of the piezoelectric actuator 13 A glue layer 136 is filled in the gap h, such as: conductive glue, but not limited thereto, so that the depth of the gap h can be maintained between the resonant plate 12 and the suspension plate 130 of the piezoelectric actuator 13, and then The airflow can be guided to flow more quickly; and, according to the depth of the gap h, a compression chamber 121 can be formed between the resonant plate 12 and the piezoelectric actuator 13, and then can be guided through the hollow hole 120 in the resonant plate 12 The fluid flows between the chambers more quickly, and because the suspension plate 130 and the resonant plate 12 keep a proper distance, the contact and interference between each other is reduced, so that the generation of noise can be reduced.

In addition, please refer to FIG. 1A and FIG. 2A at the same time. In the microfluidic control device 1, there are also structures such as an insulating sheet 141, a conductive sheet 15, and another insulating sheet 142, which are sandwiched between the piezoelectric actuator 13 and the piezoelectric actuator 13 in sequence. between the gas collecting plates 16 , and its shape roughly corresponds to the shape of the outer frame 131 of the piezoelectric actuator 13 . In some embodiments, the insulating sheets 141, 142 are made of insulating materials, such as plastic, but not limited thereto, for insulation purposes; in other embodiments, the conductive sheet 15 is made of Constructed of conductive materials, such as, but not limited to, metal, for the purpose of conducting electricity. And, in this embodiment, a conductive pin 151 may also be provided on the conductive sheet 15 for electrical conduction.

Please refer to Fig. 3A, Fig. 3B and Fig. 3C at the same time, which are respectively the front structure schematic diagram, the back structure schematic diagram and the cross-sectional structure schematic diagram of the piezoelectric actuator of the micro fluid control device shown in Fig. 1A, as shown in the figure, the piezoelectric actuator The actuator 13 is assembled by a suspension plate 130, an outer frame 131, several brackets 132 and a piezoelectric ceramic plate 133. In this embodiment, the several brackets 132 are four brackets 132, but Not limited thereto, these numbers can be varied according to the actual implementation situation; and, the suspension board 130, the outer frame 131 and the four brackets 132 can be but not limited to an integrated structure, and can be made of a metal plate For example, it can be made of stainless steel, but not limited thereto. Therefore, the piezoelectric actuator 13 of the micro fluid control device 1 of the present utility model is formed by bonding a piezoelectric ceramic plate 133 and a metal plate, but not This is the limit. And as shown in the figure, the suspension board 130 has a first surface 130b and a corresponding second surface 130a, wherein the piezoelectric ceramic plate 133 is attached to the first surface 130b of the suspension board 130 for applying a voltage to drive the suspension board. The hoverboard 130 flexes and vibrates. As shown in Figure 3A, the floating plate 130 has a central portion 130d and an outer peripheral portion 130e, so when the piezoelectric ceramic plate 131 is driven by voltage, the floating plate 130 can bend and vibrate from the central portion 130d to the outer peripheral portion 130e; It is disposed on the outside of the suspension board 130 and has a conductive pin 134 protruding outwards for power supply connection, but not limited thereto.

In this embodiment, the four brackets 132 are respectively vertically connected between the suspension board 130 and the outer frame 131 to provide elastic support, that is, the side 130f of the suspension board 130 is parallel to the inner side 131c of the outer frame 131 set, and one end of each of the brackets 132 is vertically connected to the side 130f of the suspension board 130, and the other end is vertically connected to the inner side 131c of the outer frame 131, so that the four brackets 132 are connected to the side 130f of the suspension board 130, The inner side 131c of the outer frame 131 is coaxially connected at right angles, and there is at least one gap 135 between the bracket 132, the suspension board 130 and the outer frame 131 for fluid circulation, and the suspension board 130, the outer frame 131 And the type and quantity of the bracket 132 have many changes. Through the bracket 132 vertically straddling the suspension board 130 and the outer frame 131, the non-uniform offset angle of the suspension board 130 during operation is helpful to increase the vibration amplitude of the suspension board 130 on the Z-axis, making the suspension The plate 130 can have a better displacement state when vibrating up and down, that is, the suspension plate 130 is more stable and consistent when it moves, so as to improve the stability and performance of the piezoelectric actuator 13 .

In the piezoelectric actuator 13 of the present utility model, the different lengths and widths of the bracket 132 will cause the performance of the piezoelectric actuator 13 to be different, and the data of its various performances are shown in Table 1 below:

Table I

It can be seen from the data in Table 1 that in this embodiment, the length of each bracket 132 is between 1.11 mm and 1.21 mm, and its performance is better, and the preferred value of the length of the bracket 132 is 1.16 mm. Its performance can be significantly improved, and the width of each bracket 132 is between 0.2 mm and 0.6 mm, preferably 0.4 mm, but not limited thereto.

3A and 3C, the second surface 130a of the suspension board 130, the second surface 131a of the outer frame 131 and the second surface 132a of the bracket 132 are flat coplanar structures, and taking this embodiment as an example, Wherein the suspension board 130 is a square structure, and the length of each side of the suspension board 130 is between 7.5mm to 12mm, and its preferred value is 7.5 to 8.5mm, and the thickness is between 0.1mm to 0.4mm Between, its preferred value is 0.27mm, but not limited thereto. And the thickness of the outer frame is also between 0.1 mm and 0.4 mm, but not limited thereto. And, the side length of the piezoelectric ceramic plate 131 is not greater than the side length of the suspension plate 130, and is also designed as a square plate structure corresponding to the suspension plate 130, and the thickness of the piezoelectric ceramic plate 131 is between 0.05 mm to 0.3 mm. Between mm, and its preferred value is 0.10mm, through the design of the square piezoelectric ceramic plate 131 and the square suspension plate 130 adopted in the utility model, its reason is that compared with the circle of the traditional known piezoelectric actuator Shaped suspension plate design, the square suspension plate 130 of the piezoelectric actuator 13 of the present utility model obviously has the advantage of saving power, and the comparison of its power consumption is shown in Table 2 below:

Table II

Therefore, it can be seen from the above table of the experiment that the design of the side length of the square suspension plate (8mm to 10mm) of the piezoelectric actuator is relatively smaller than the diameter of the circular suspension plate of the piezoelectric actuator (8mm to 10mm). Power saving, the reason for saving power can be inferred as: because of the capacitive load operating at the resonance frequency, its power consumption will increase with the increase of the frequency, and because the resonance frequency of the square suspension board 130 with side length is obviously higher than that of the same The circular suspension board has a low diameter, so its relative power consumption is also significantly lower. That is to say, the suspension board 130 with a square design in the present utility model has the advantage of saving electricity compared with the previous design of the circular suspension board. Under the trend of miniature, ultra-thin and quiet design of the micro-fluid control device 1 , it can achieve the effect of low power consumption design, especially it can be applied to wearable devices. Power saving is a very important design focus.

As mentioned above, in this embodiment, these suspension boards 130, the outer frame 131 and the four brackets 132 arranged perpendicular to the suspension board 130 and the outer frame 131 can be but not limited to integrally formed structures. The method can be produced by traditional processing, or yellow photolithography, or laser processing, or electroforming processing, or electrical discharge processing, etc., which are not limited thereto. However, taking the present embodiment as an example, the suspension plate 130, the outer frame 131, and the four brackets 132 of the piezoelectric actuator 13 of the present utility model are integrally formed, which is a metal plate, and the outer frame 131, the four brackets 132 are integrally formed. The brackets 132 and the suspension board 130 are etched at the same depth, so that the second surface 131a of the outer frame 131, the second surface 132a of the four brackets 132, and the second surface 130a of the suspension board 130 are all coplanar structures; The etching process at the same depth can simplify the multiple etching processes in the past in response to the different depths of the outer frame 131, and at the same time, coat the outer frame 131 through the aforementioned adhesive layer 136 disposed between the outer frame 131 and the resonant plate 12 The rough surface produced after etching can increase the bonding strength between the adhesive layer and the outer frame, and since the thickness of the outer frame 131 is reduced compared with the previous manufacturing method, the thickness of the adhesive layer 136 coated with the gap h Increased thickness, through the increase of the thickness of the adhesive layer 136, can effectively improve the inhomogeneity of the adhesive layer 136 coating, reduce the assembly error in the horizontal direction when the suspension board 130 is assembled, and improve the kinetic energy utilization efficiency of the suspension board 130 in the vertical direction. It can help absorb vibration energy and reduce noise.

In the micro-fluid control device 1 of the present utility model, the different thicknesses of the adhesive layer 136 will lead to differences in the performance and defect rate of the micro-fluid control device, and the performance and defect rate data of the micro-fluid control device are shown in Table 3 below:

Table three

It can be clearly seen from the data in Table 3 that the thickness of the adhesive layer 136 can significantly affect the performance of the microfluidic control device 1. If the thickness of the adhesive layer 136 is too thick, although the gap h can maintain a relatively thick depth, it is due to the compression of the chamber 121. If the depth of the adhesive layer 136 becomes deeper and the volume becomes larger, the performance relative to its compression action will become worse, so its performance will decrease; but if the thickness of the adhesive layer 136 is too thin, the depth of the gap h it can provide will also be insufficient , and it is easy to cause the convex portion 130c of the suspension plate 130 and the resonant plate 12 to contact and collide with each other, thereby degrading the performance and generating noise, and the noise problem is also one of the causes of defective products. Therefore, in the embodiment of the present utility model, the thickness of the adhesive layer 136 is between 50 and 60 μm after sampling 25 microfluidic control devices 1 products. In this range of values, not only the performance is significantly improved, but also At the same time, its defect rate is relatively low, and the preferred value is 55 μm, which has better performance and the defect rate is the lowest, but not limited thereto.

As shown in FIG. 3B , in this embodiment, the floating board 130 is a square structure with a stepped surface, that is, there is a convex portion 130c on the second surface 130a of the floating board 130, and the convex portion 130c is arranged on the The central portion 130d of the second surface 130a may be, but not limited to, a circular convex structure. In some embodiments, the height of the protrusion 130c is between 0.02mm and 0.08mm, preferably 0.03mm, and its diameter is 4.4mm, but not limited thereto.

Therefore, please refer to Fig. 1A, Fig. 4A to Fig. 4E and Fig. 5, the base 10, the piezoelectric actuator 13, the insulating sheet 141, the conductive sheet 15, another insulating sheet 142 and the gas collecting plate 16 etc. After stacking and assembling, as shown in Fig. 4A and Fig. 5, it can be seen that the cavity 120 in the cavity 120 of the resonance plate 12 of the microfluidic control device 1 can form a confluence gas chamber together with the gas inlet plate 11 on it, that is, the gas inlet plate. 11 the chamber at the confluence chamber 111 of the first surface 11b, and a compression chamber 121 is also formed between the resonant plate 12 and the piezoelectric actuator 13, which is used to temporarily store gas, and the compression chamber 121 is passed through The hollow hole 120 in the resonant plate 12 communicates with the chamber at the confluence chamber 111 of the first surface 11b of the inlet plate 11, and the microfluidic control device 1 controls and drives the suspension plate 130 of the piezoelectric actuator 13. The partial schematic diagram of the action implementation state of reciprocating vibration is used for illustration.

As shown in Figure 4B, when the suspension plate 130 driving the piezoelectric actuator 13 performs vertical reciprocating vibration and the bending deformation moves downward, the gas will flow from at least one air inlet 110 on the air inlet plate 11. enter, and collect at the central confluence chamber 111 through at least one bus hole 112 on the first surface 11b. At this time, because the resonant plate 12 is a light and thin sheet structure, it will be brought in and pushed by the fluid and It will also carry out vertical reciprocating vibration with the resonance of the suspension plate 130, that is, the movable part 12a of the resonant plate 12 corresponding to the confluence chamber 111 will also be deformed by bending vibration, and as shown in FIG. 4C, when the suspension plate 130 The vertical reciprocating vibration is displaced to a position, so that the movable part 12a of the resonant plate 12 can be very close to the convex part 130c of the suspension plate 130, and then the fluid enters the channel of the compression chamber 121, and the convex part 130c of the suspension plate 130 If the distance between the compression chamber 121 between the area other than the portion 130c and the fixed portion 12b on both sides of the resonator plate 12 does not become smaller, the flow rate of the fluid flowing between them will not be reduced and pressure will not be generated. loss, so that the volume of the compression chamber 121 can be compressed more effectively. As shown in FIG. The fluid pushes to flow to both sides, and flows downward through the gap 136 between the brackets 132 of the piezoelectric actuator 13 to obtain a higher discharge pressure. At this time, as shown in FIG. 4E , with When the convex part 130c of the suspension plate 130 of the piezoelectric actuator 13 is pushed upward, the movable part 12a of the resonant plate 12 is also bent upward and vibrates and deformed, so that the volume of the confluence chamber 111 is compressed, and The flow of the fluid in the bus hole 112 to the confluence chamber 111 becomes smaller, and finally when the suspension plate 130 of the piezoelectric actuator 13 continues to vibrate vertically, the implementation states shown in Figure 4B to Figure 4E can be repeated . In this embodiment, it can be seen that the design of the suspension plate 130 of the piezoelectric actuator 13 with the convex portion 130c can also achieve good fluid transmission efficiency when applied to the micro fluid control device 1 of the present utility model, but the convex portion 130c The design type, quantity, and location can be changed arbitrarily according to the actual implementation situation, and are not limited thereto.

In addition, in some embodiments, the vertical reciprocating vibration frequency of the resonant plate 12 can be the same as the vibration frequency of the piezoelectric actuator 13, that is, both can go up or down at the same time, which can be determined according to the actual implementation situation. Any changes are not limited to the action shown in this embodiment.

To sum up, the piezoelectric actuator provided by the utility model is applied in a microfluidic control device. The piezoelectric actuator has a suspension board, an outer frame and four brackets, and each bracket is vertically connected to the suspension board. Between the suspension board and the outer frame, the bracket vertically straddles the suspension board and the outer frame to provide elastic support and reduce the uneven swing of the suspension board, which helps to increase the vibration amplitude of the suspension board on the Z axis, so that The suspension board can have a better displacement state when it vibrates up and down, that is, the suspension board is more stable and consistent when it moves, so as to improve the stability and efficiency of the piezoelectric actuator; at the same time, the piezoelectric actuator The suspension board, outer frame, and bracket are integrated into a metal plate structure, and the convex part of the suspension board and the required shape of the bracket are etched at the same depth, so that the second surface of the outer frame, the second surface of the bracket, and the suspension The second surface of the plate has a coplanar structure, which can simplify the multiple etching processes in the past in response to different depths of the outer frame. The rough surface produced after etching can increase the bonding strength between the adhesive layer and the outer frame, and since the thickness of the outer frame is reduced compared with the previous manufacturing method, the thickness of the adhesive layer coating the gap is increased, By increasing the thickness of the adhesive layer, the inhomogeneity of adhesive layer coating can be effectively improved, the assembly error in the horizontal direction can be reduced when the suspension board is assembled, and the kinetic energy utilization efficiency in the vertical direction of the suspension board can be improved. At the same time, it can also assist in absorbing vibration energy and Reduce noise to achieve the effect of silence, and this miniaturized piezoelectric actuator can also reduce the overall size and thickness of the micro fluid control device, so as to achieve the purpose of light and comfortable portability; and, through the piezoelectric actuator The square design of the suspension plate of the actuator and the action of the convex part on the suspension plate allow the fluid to flow in from the air intake hole of the air intake plate of the base, and flow along the connected bus hole and confluence chamber. Through the hollow hole in the resonant plate, the fluid can generate a pressure gradient in the compression chamber formed between the resonant plate and the piezoelectric actuator, so that the fluid can flow at a high speed, the flow rate of the fluid will not decrease, and no pressure loss will occur, and It can continue to transmit to obtain a higher discharge pressure; therefore, the micro fluid control device of the utility model can reduce the overall volume and make it thinner, so as to achieve the purpose of light and comfortable portability, which has great industrial application value.

Even though the present utility model has been described in detail by the above-mentioned embodiments, various modifications can be made by those skilled in the art without departing from the scope of protection defined by the appended claims.

Claims (22)

1. a kind of piezo-activator, comprising：

One suspension board, is foursquare kenel, and can be by a central part to a peripheral part flexural vibrations；

One housing, around the outside for being arranged at the suspension board；

Several supports, each support vertical is connected between the suspension board and the housing, to provide resilient support, and the support With length between the ㎜ of 1.11 ㎜ to 1.21, width between the ㎜ of 0.2 ㎜ to 0.6；And

One piezoelectric ceramic plate, is foursquare kenel, with the length of side for being not more than the suspension board length of side, is attached at the suspension board On first surface, to applied voltage driving the suspension board flexural vibrations.

2. piezo-activator as claimed in claim 1, it is characterised in that those supports are four supports.

3. piezo-activator as claimed in claim 1, it is characterised in that one end of each support is vertically connected at the suspension One side of plate, the other end is vertically connected at an inner side edge of the housing.

4. piezo-activator as claimed in claim 1, it is characterised in that the stent length is 1.16 ㎜.

5. piezo-activator as claimed in claim 1, it is characterised in that the support width is 0.4 ㎜.

6. piezo-activator as claimed in claim 1, it is characterised in that the piezoelectric ceramic plate has between 0.05mm extremely Thickness between 0.3mm.

7. piezo-activator as claimed in claim 6, it is characterised in that the piezoelectric ceramics plate thickness is 0.10mm.

8. piezo-activator as claimed in claim 1, it is characterised in that each length of side of the suspension board between 7.5mm extremely Between 12mm, and thickness is between 0.1mm to 0.4mm.

9. piezo-activator as claimed in claim 8, it is characterised in that each length of side of the suspension board between 7.5mm extremely Between 8.5mm, and thickness is 0.27mm.

10. a kind of minisize fluid control device, comprising：

One piezo-activator, with a suspension board, a housing, four supports and a piezoelectric ceramic plate, the suspension board is square Kenel, and there is a convex portion with a first surface and a corresponding second surface, and on the second surface, the housing surround Be arranged at the outside of the suspension board, and also there is a first surface and a corresponding second surface, and the housing this second Region outside the convex portion of the second surface of surface and the suspension board is copline, the support be connected to the suspension board with Between the housing, with and its length between the ㎜ of 1.11 ㎜ to 1.21, width between the ㎜ of 0.2 ㎜ to 0.6, piezoelectric ceramic plate tool There is the length of side of the no more than suspension board length of side, be attached on the first surface of the suspension board；And

One housing, including a gas collection plate and a base, the gas collection plate have side wall to constitute the one of an accommodation space for periphery Frame structure, makes the piezo-activator be arranged in the accommodation space, and the base is engaged by an inlet plate and a resonance plate Form, and be incorporated into the accommodation space of the gas collection plate, to close the piezo-activator, the inlet plate has an at least air inlet Hole and at least one logical total string holes is attached thereto, is confluxed chamber with constituting one, the resonance plate sets and is fixed on the inlet plate, and With a hollow bore, relative to the chamber that confluxes of the inlet plate, and corresponding to the convex portion of the suspension board；

Wherein, a glue-line is set between the second surface of the housing of the piezo-activator and the resonance plate of the base, with Make a gap depth of the compression chamber that composition demand is maintained between the piezo-activator and the resonance plate of the base.

11. minisize fluid control devices as claimed in claim 10, it is characterised in that the stent length is 1.16 ㎜.

12. minisize fluid control devices as claimed in claim 10, it is characterised in that the support width is 0.4 ㎜.

13. minisize fluid control devices as claimed in claim 10, it is characterised in that the piezoelectric ceramic plate have between Thickness between 0.05mm to 0.3mm.

14. minisize fluid control devices as claimed in claim 13, it is characterised in that the thickness of the piezoelectric ceramic plate is 0.10mm。

15. minisize fluid control devices as claimed in claim 10, it is characterised in that each length of side of the suspension board between Between 7.5mm to 12mm, and thickness is between 0.1mm to 0.4mm.

16. minisize fluid control devices as claimed in claim 15, it is characterised in that each length of side of the suspension board between Between 7.5mm to 8.5mm, and thickness is 0.27mm.

17. minisize fluid control devices as claimed in claim 10, it is characterised in that the thickness of the glue-line is between 50 μm to 60 Between μm.

18. minisize fluid control devices as claimed in claim 17, it is characterised in that the thickness of the glue-line is 55 μm.

19. minisize fluid control devices as claimed in claim 10, it is characterised in that the thickness of the housing between 0.1mm extremely Between 0.4mm.

20. minisize fluid control devices as claimed in claim 10, it is characterised in that the protrusion height of the suspension board is to be situated between Between 0.02mm to 0.08mm.

21. minisize fluid control devices as claimed in claim 10, it is characterised in that the convex portion of the suspension board is one circular Bulge-structure, a diameter of 4.4mm.

22. minisize fluid control devices as claimed in claim 10, it is characterised in that the suspension board, the housing and the support It is with made by the etching mode of same depth, so that the second surface of the support is put down altogether with the second surface of the suspension board Face.