TW201913907A - Film flip chip package structure - Google Patents
Film flip chip package structure Download PDFInfo
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- TW201913907A TW201913907A TW106130986A TW106130986A TW201913907A TW 201913907 A TW201913907 A TW 201913907A TW 106130986 A TW106130986 A TW 106130986A TW 106130986 A TW106130986 A TW 106130986A TW 201913907 A TW201913907 A TW 201913907A
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- 239000000758 substrate Substances 0.000 claims abstract 8
- 238000004806 packaging method and process Methods 0.000 claims 10
- 239000010409 thin film Substances 0.000 claims 10
- 230000000149 penetrating effect Effects 0.000 claims 1
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- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
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Abstract
Description
本發明是有關於一種晶片封裝結構,且特別是有關於一種薄膜覆晶封裝結構。The present invention relates to a chip packaging structure, and more particularly, to a thin-film flip-chip packaging structure.
隨著半導體技術的改良,使得液晶顯示器具有低的消耗電功率、薄型量輕、解析度高、色彩飽和度高、壽命長等優點,因而廣泛地應用在行動電話、筆記型電腦或桌上型電腦的液晶螢幕及液晶電視等與生活息息相關之電子產品。其中,顯示器之驅動晶片(driver IC)更是液晶顯示器不可或缺的重要元件。因應液晶顯示裝置驅動晶片各種應用之需求,一般是採用捲帶自動接合(tape automatic bonding, TAB)封裝技術進行晶片封裝,薄膜覆晶(Chip-On-Film, COF)封裝結構便是其中一種應用捲帶自動接合技術的封裝結構。With the improvement of semiconductor technology, liquid crystal displays have the advantages of low power consumption, light weight, high resolution, high color saturation, and long life. Therefore, they are widely used in mobile phones, notebook computers or desktop computers. LCD screens, LCD TVs and other electronic products that are closely related to life. Among them, the driver IC of the display is an indispensable and important component of the liquid crystal display. In response to the needs of various applications of liquid crystal display device driving chips, tape automatic bonding (TAB) packaging technology is generally used for chip packaging, and a chip-on-film (COF) packaging structure is one of the applications Packaging structure with automatic tape and reel technology.
隨著電子產品功能需求越來越多,晶片的積體電路密集度不斷提高,薄膜覆晶封裝結構的可撓性線路基板上的引腳數量也必須跟著增加。原本廣泛使用的單面線路可撓性基板的佈線難度越來越高,因此,可撓性線路基板開始朝向雙面線路的方式設計。目前,雙面線路可撓性基板上的引腳大多是從可撓性基板的上表面上的晶片接合區內向外延伸,再於晶片接合區外的區域透過導電通孔將電路導引至下表面的引腳。一般而言,驅動晶片的輸出端的凸塊數量非常的多,數量龐大的引腳對應連接輸出端凸塊並自晶片接合區內經過晶片邊緣向可撓性基板的外側延伸。然而,受限於晶片的尺寸、引腳寬度與間距的限制,能夠通過的引腳數量有限,而使得晶片的輸出端的凸塊數量難以增加。此外,設置於晶片接合區外的導通孔也佔用了引腳所能分布的區域,因而降低可撓性線路基板上的佈線自由度。With the increasing demand for electronic product functions, the density of integrated circuits on chips has continued to increase, and the number of pins on flexible circuit substrates of thin-film flip-chip packaging structures must also increase. The wiring of single-sided circuit flexible substrates, which are widely used in the past, is getting more and more difficult. Therefore, the flexible circuit substrates are designed to face double-sided circuits. At present, most of the pins on a flexible substrate of a double-sided circuit extend outward from the wafer bonding area on the upper surface of the flexible substrate, and then the circuit is guided to the lower part through conductive vias in the area outside the wafer bonding area. Surface pins. Generally speaking, the number of bumps on the output end of the driving chip is very large, and a large number of pins correspond to the bumps on the output end and extend from the wafer bonding area through the edge of the wafer to the outside of the flexible substrate. However, limited by the size of the chip, the width of the pins, and the spacing, the number of pins that can pass through is limited, making it difficult to increase the number of bumps at the output of the chip. In addition, the vias provided outside the wafer bonding area also occupy the area where the pins can be distributed, thereby reducing the degree of freedom of wiring on the flexible circuit substrate.
本發明提供一種薄膜覆晶封裝結構,其對應連接導通孔的上接墊透過多排的排列方式,可大幅增加引腳數量,且有效縮減引腳的間距。The invention provides a thin-film flip-chip packaging structure. The upper pads corresponding to the connection vias can be arranged in multiple rows, which can greatly increase the number of pins and effectively reduce the pitch of the pins.
本發明的一種薄膜覆晶封裝結構,包括可撓性線路基板以及晶片。可撓性線路基板包括可撓性基材及線路層。可撓性基材具有相對的上表面及下表面,上表面定義出晶片接合區,且晶片接合區具有相對的第一邊與第二邊。線路層包括多個第一上引腳、多個第二上引腳、多個第一導通孔以及多個下引腳。多個第一上引腳與多個第二上引腳位於上表面,各第一上引腳具有第一內接端,這些第一內接端位於晶片接合區內且鄰近第一邊,各第一上引腳自第一內接端向遠離晶片接合區的方向延伸。多個第二上引腳設置於晶片接合區內,各第二上引腳具有相對的第二內接端與上接墊,這些第二內接端鄰近第一邊且較這些第一內接端遠離第一邊,各第二上引腳自第二內接端向第二邊的方向延伸而連接上接墊,各上接墊的寬度大於各第二上引腳其他部分的寬度,這些第二上引腳分為多個群組,各群組中的這些上接墊自鄰近第二內接端處往第二邊的方向逐層排列成至少二排,且離第二內接端最遠的至少一排具有對稱排列於各群組的參考線兩側的至少二個上接墊,其中參考線鄰近或重疊於各群組的中線。多個第一導通孔貫穿可撓性基材且位於晶片接合區內,這些第一導通孔分別對應連接這些上接墊。多個下引腳位於下表面,且透過這些第一導通孔電性連接這些第二上引腳。晶片具有相對的第一側與第二側,且包括靠近第一側的多個第一凸塊及多個第二凸塊。晶片設置於晶片接合區內,這些第一凸塊接合於第一內接端,這些第二凸塊接合於第二內接端。A thin-film flip-chip packaging structure of the present invention includes a flexible circuit substrate and a wafer. The flexible circuit substrate includes a flexible substrate and a circuit layer. The flexible substrate has opposite upper and lower surfaces, the upper surface defines a wafer bonding area, and the wafer bonding area has a first side and a second side opposite to each other. The circuit layer includes a plurality of first upper pins, a plurality of second upper pins, a plurality of first vias, and a plurality of lower pins. A plurality of first upper pins and a plurality of second upper pins are located on the upper surface, and each of the first upper pins has a first internal connection end. These first internal connection ends are located in the wafer bonding area and are adjacent to the first side. The first upper pin extends from the first internal connection end in a direction away from the wafer bonding area. A plurality of second upper pins are disposed in the wafer bonding area, and each second upper pin has opposite second inner terminals and upper pads, and the second inner terminals are adjacent to the first side and are inferior to the first inner terminals. The end is far from the first side, and each second upper pin extends from the second internal end toward the second side to connect the upper pad. The width of each upper pad is larger than the width of the other parts of the second upper pin. These The second upper pins are divided into multiple groups, and the upper pads in each group are arranged in at least two rows layer by layer from the direction adjacent to the second internal end toward the second side, and are separated from the second internal end The furthest at least one row has at least two upper pads arranged symmetrically on both sides of the reference line of each group, wherein the reference line is adjacent to or overlaps the center line of each group. A plurality of first vias penetrates the flexible substrate and are located in the wafer bonding area. These first vias are respectively connected to the upper pads. A plurality of lower pins are located on the lower surface and are electrically connected to the second upper pins through the first vias. The wafer has a first side and a second side opposite to each other, and includes a plurality of first bumps and a plurality of second bumps near the first side. The wafer is disposed in a wafer bonding area. The first bumps are bonded to the first internal connection end, and the second bumps are bonded to the second internal connection end.
基於上述,本發明的薄膜覆晶封裝結構透過將多個具有第二內接端與上接墊的第二上引腳設置於晶片接合區內,這些第二上引腳分為多個群組,各群組中的多個上接墊向遠離第二內接端的方向逐層/逐排緊密地排列,以在有限尺寸的晶片接合區內配置較多的上接墊。進一步透過第一導通孔對應連接上接墊以及下引腳,使得可撓性線路基板除了具有於可撓性基材的上表面向外側延伸的第一上引腳之外,還具有於晶片接合區內透過上接墊與第一導通孔將電路延伸至可撓性基材的下表面的第二上引腳,第二上引腳進一步透過下引腳向外側延伸。如此,可撓性線路基板上可佈設的引腳數量可大幅增加,以供具有更多凸塊的晶片連接。並且,在上述的配置中,由於上接墊與第二上引腳是在晶片接合區內,不會佔用到可撓性基材在晶片接合區之外的部位,線路層在可撓性基材上的佈局能更具有彈性。Based on the above, the thin-film flip-chip packaging structure of the present invention is configured by arranging a plurality of second upper pins having a second internal end and an upper pad in a chip bonding area, and the second upper pins are divided into multiple groups. A plurality of upper pads in each group are closely arranged layer-by-layer / row-by-row in a direction away from the second internal connection end to arrange more upper pads in a wafer bonding area of a limited size. Further, the upper pad and the lower pin are correspondingly connected through the first via hole, so that the flexible circuit board has a first upper pin extending outward from the upper surface of the flexible substrate, and also has chip bonding. The circuit extends to the second upper pin on the lower surface of the flexible substrate through the upper pad and the first via, and the second upper pin further extends outward through the lower pin. In this way, the number of pins that can be laid on the flexible circuit substrate can be greatly increased for chip connections with more bumps. Moreover, in the above configuration, since the upper pad and the second upper pin are in the wafer bonding area, the portion of the flexible substrate outside the wafer bonding area will not be occupied, and the wiring layer is on the flexible base. The layout on the wood can be more flexible.
為讓本發明的上述特徵和優點能更明顯易懂,下文特舉實施例,並配合所附圖式作詳細說明如下。In order to make the above features and advantages of the present invention more comprehensible, embodiments are hereinafter described in detail with reference to the accompanying drawings.
圖1是依照本發明的一實施例的一種薄膜覆晶封裝結構的示意圖。圖2是圖1的薄膜覆晶封裝結構的線路層的局部放大示意圖。圖3是圖1的薄膜覆晶封裝結構的局部剖面示意圖。需注意的是,圖1所繪示的薄膜覆晶封裝結構,僅示意地簡單繪示並放大一組第二上引腳於晶片接合區內,而僅供參考,其實際的數量以及尺寸比例不會與圖1所示相近。相同地,圖2所繪示的線路層的局部放大示意圖,僅示意地簡單繪示並放大二組第二上引腳,其實際的數量以及比例尺寸不會與圖2所示相近。FIG. 1 is a schematic diagram of a thin-film flip-chip packaging structure according to an embodiment of the present invention. FIG. 2 is a partially enlarged schematic view of a circuit layer of the thin-film flip-chip packaging structure of FIG. 1. FIG. 3 is a schematic partial cross-sectional view of the thin-film flip-chip packaging structure of FIG. 1. It should be noted that the thin-film flip-chip package structure shown in FIG. 1 is only a schematic and simple illustration of and enlarges a set of second upper pins in the chip bonding area, and is for reference only. The actual number and size ratio Will not be similar to that shown in Figure 1. Similarly, the partial enlarged schematic diagram of the circuit layer shown in FIG. 2 is only a schematic simple drawing and enlargement of the two sets of the second upper pins, and the actual number and scale size will not be similar to those shown in FIG. 2.
請先參閱圖1,本實施例的薄膜覆晶封裝結構10包括可撓性線路基板100以及晶片170。可撓性線路基板100包括可撓性基材200以及線路層300。可撓性線路基板100為雙面線路基板。Please refer to FIG. 1 first. The thin-film flip-chip packaging structure 10 of this embodiment includes a flexible circuit substrate 100 and a chip 170. The flexible circuit board 100 includes a flexible substrate 200 and a circuit layer 300. The flexible circuit board 100 is a double-sided circuit board.
請同時參閱圖1及圖3,可撓性基材200具有相對的上表面106以及下表面108。可撓性基材200的上表面106定義出晶片接合區110,且晶片接合區110具有相對的第一邊112與第二邊114。線路層300包括多個第一上引腳150、多個第二上引腳152、多個第一導通孔160、多個第三上引腳154以及多個下引腳156。Referring to FIGS. 1 and 3 at the same time, the flexible substrate 200 has an upper surface 106 and a lower surface 108 opposite to each other. The upper surface 106 of the flexible substrate 200 defines a wafer bonding region 110, and the wafer bonding region 110 has a first side 112 and a second side 114 opposite to each other. The circuit layer 300 includes a plurality of first upper pins 150, a plurality of second upper pins 152, a plurality of first via holes 160, a plurality of third upper pins 154, and a plurality of lower pins 156.
請同時參閱圖1及圖3,在本實施例中,可撓性基材200具有相對的第一端102以及第二端104。多個第一上引腳150位於可撓性基材200的上表面106,各第一上引腳150具有第一內接端122。多個第一內接端122位於晶片接合區110內且鄰近第一邊112。多個第一內接端122沿著平行第一邊112的方向接續地排列。各第一上引腳150自各第一內接端122向遠離晶片接合區110的方向朝第一端102延伸。Please refer to FIG. 1 and FIG. 3 at the same time. In this embodiment, the flexible substrate 200 has a first end 102 and a second end 104 opposite to each other. The plurality of first upper pins 150 are located on the upper surface 106 of the flexible substrate 200, and each of the first upper pins 150 has a first internal connection end 122. The plurality of first internal connection ends 122 are located in the wafer bonding area 110 and are adjacent to the first edge 112. The plurality of first inner connecting ends 122 are successively arranged along a direction parallel to the first side 112. Each first upper pin 150 extends from each first internal connection end 122 toward the first end 102 in a direction away from the wafer bonding area 110.
多個第二上引腳152位於可撓性基材200的上表面106且完全設置於晶片接合區110內。各第二上引腳152具有相對的第二內接端127以及上接墊133、135。詳細地說,多個第二內接端127鄰近第一邊112且較多個第一內接端122遠離第一邊112。多個第二內接端127沿著平行第一邊112的方向接續地排列。各第二上引腳152自第二內接端127向第二邊114的方向延伸而連接上接墊133、135。多個上接墊133、135會分別對應地連接多個第一導通孔160。為配合第一導通孔160的尺寸並確保上接墊133、135與第一導通孔160確實連接,各上接墊133、135的寬度會大於各第二上引腳152的其他部分(包括第二內接端127)的寬度。更詳細地說,各第二上引腳152自寬度較小的第二內接端127向第二邊114的方向延伸而連接寬度較大的上接墊133、135。寬度較大的上接墊133、135若同樣以沿著平行第一邊112的方向接續地排列,將導致第二內接端127的間距增大,在晶片接合區110的第一邊112長度固定的情況下,可佈設的第二上引腳152數量勢必減少,而不利於引腳數增加及微間距的需求。因此,將多個上接墊133、135往第二邊114的方向逐層排列成至少二排。The plurality of second upper pins 152 are located on the upper surface 106 of the flexible substrate 200 and are completely disposed in the wafer bonding area 110. Each second upper pin 152 has a second inner connecting end 127 and upper pads 133 and 135 opposite to each other. In detail, the plurality of second inscribed ends 127 are adjacent to the first side 112 and are farther from the first side 112 than the plurality of first inscribed ends 122. The plurality of second inner connecting ends 127 are successively arranged along a direction parallel to the first side 112. Each second upper pin 152 extends from the second inner end 127 toward the second side 114 and is connected to the upper pads 133 and 135. The plurality of upper pads 133 and 135 are respectively correspondingly connected to the plurality of first via holes 160. In order to match the size of the first via 160 and ensure that the upper pads 133 and 135 are connected to the first via 160, the width of each of the upper pads 133 and 135 will be larger than that of other portions of the second upper pin 152 (including the first The width of the two inner ends 127). In more detail, each second upper pin 152 extends from the second internal connection end 127 with a smaller width toward the second side 114 and connects the upper pads 133 and 135 with a larger width. If the upper pads 133 and 135 having a larger width are also successively arranged in a direction parallel to the first side 112, the pitch of the second inner end 127 will be increased, and the length of the first side 112 of the wafer bonding area 110 will be increased. In a fixed situation, the number of second upper pins 152 that can be laid out is bound to decrease, which is not conducive to the increase in the number of pins and the need for fine pitch. Therefore, the plurality of upper pads 133 and 135 are arranged layer by layer in at least two rows toward the second side 114.
請同時參閱圖1及圖2,在本實施例中,多個第二上引腳152分為多個群組G,各個群組G沿著平行第一邊112的方向接續排列,且各群組G中的多個第二上引腳152大致上是以一參考線L分隔成左右兩邊,而參考線L鄰近或重疊於各群組G的中線,其中各群組G的中線為垂直第一邊112且延伸經過各群組G中央的線。詳細地說,請先參閱圖1,圖1的薄膜覆晶封裝結構10,僅示意地繪示一個群組G的第二上引腳152於晶片接合區110內。圖2的可撓性線路基板100的局部放大圖亦僅示意地繪示二個群組G的第二上引腳152。然而本發明的群組G的數量及各群組G的第二上引腳152的數量並不以此為限制。Please refer to FIG. 1 and FIG. 2 at the same time. In this embodiment, the plurality of second upper pins 152 are divided into a plurality of groups G, and each group G is successively arranged along a direction parallel to the first side 112, and each group The plurality of second upper pins 152 in the group G are roughly separated by a reference line L into left and right sides, and the reference line L is adjacent to or overlaps the center line of each group G, where the center line of each group G is A line perpendicular to the first side 112 and extending through the center of each group G. In detail, please refer to FIG. 1 first. The thin-film flip-chip packaging structure 10 of FIG. 1 only schematically illustrates a second upper pin 152 of a group G in the wafer bonding region 110. A partially enlarged view of the flexible circuit substrate 100 in FIG. 2 also only schematically illustrates the second upper pins 152 of the two groups G. However, the number of the group G and the number of the second upper pins 152 of each group G of the present invention are not limited thereto.
在本實施例中,各群組G的第二上引腳152的多個上接墊133、135自鄰近第二內接端127處往第二邊114的方向逐層排列成至少二排,且離第二內接端127最遠的至少一排具有對稱排列於參考線L的兩側的多個上接墊135。換句話說,多個上接墊133、135沿著垂直第一邊112並往第二邊114的方向排列成至少二排,而最遠離第二內接端127/第一邊112的一排上接墊135的數量為至少二個,這至少二個上接墊135以平行於第二邊114的方向排列,且彼此對稱地排列於參考線L的兩側。在本實施例中,參考線L重疊於各群組G的中線。In this embodiment, the plurality of upper pads 133 and 135 of the second upper pin 152 of each group G are arranged in at least two rows layer by layer from the direction adjacent to the second internal end 127 toward the second side 114. The at least one row furthest from the second inner end 127 has a plurality of upper pads 135 arranged symmetrically on both sides of the reference line L. In other words, the plurality of upper pads 133, 135 are arranged in at least two rows along the direction perpendicular to the first side 112 and toward the second side 114, and the row farthest from the second inner end 127 / the first side 112 The number of the upper pads 135 is at least two. The at least two upper pads 135 are arranged in a direction parallel to the second side 114 and are arranged symmetrically on both sides of the reference line L. In this embodiment, the reference line L overlaps the center line of each group G.
請參閱圖1以及圖2,在本實施例中,各群組G的第二上引腳152的上接墊133、135在往遠離第二內接端127的方向上排列成二排,較鄰近第二內接端127的上接墊133排在最內排Ri ,而最遠離第二內接端127的上接墊135排在最外排Ro ,然而本發明的上接墊的排數並不以此為限。實際上,各群組G的第二上引腳152的數量及上接墊133、135的排數是根據第二上引腳152的總數、晶片接合區110內可用空間的尺寸以及上接墊133、135的可接受最小尺寸作最佳化的佈局。詳細地說,在本實施例中,各群組G中位於最內排Ri 的上接墊133數量為一個,而位於最外排Ro 的上接墊135數量為兩個,且兩個上接墊135對稱並以面對面的方式設置於參考線L的兩側,然而本發明對於各排的上接墊133、135的數量並不作限制。Please refer to FIG. 1 and FIG. 2. In this embodiment, the upper pads 133 and 135 of the second upper pin 152 of each group G are arranged in two rows in a direction away from the second inner terminal 127. The upper pads 133 adjacent to the second inner end 127 are in the innermost row R i , and the upper pads 135 farthest from the second inner end 127 are in the outermost row R o . However, the upper pads of the present invention The number of rows is not limited to this. In fact, the number of the second upper pins 152 and the number of rows of the upper pads 133 and 135 of each group G are based on the total number of the second upper pins 152, the size of the available space in the chip bonding area 110, and the upper pads. Acceptable minimum size of 133,135 for optimized layout. In detail, in this embodiment, the number of the upper pads 133 located in the innermost row R i in each group G is two, and the number of the upper pads 135 located in the outermost row R o is two, and two The upper pads 135 are symmetrical and disposed on both sides of the reference line L in a face-to-face manner. However, the present invention does not limit the number of the upper pads 133 and 135 in each row.
請同時參閱圖1、圖2以及圖3。在本實施例中,多個第一導通孔160貫穿可撓性基材200且位於晶片接合區110內。詳細地說,多個第一導通孔160分別對應地連接多個上接墊133、135。請參閱圖3,多個下引腳156位於可撓性基材200的下表面108,且多個下引腳156透過多個第一導通孔160電性連接多個第二上引腳152。Please refer to FIG. 1, FIG. 2 and FIG. 3 at the same time. In the present embodiment, the plurality of first through holes 160 penetrate the flexible substrate 200 and are located in the wafer bonding region 110. In detail, the plurality of first via holes 160 are respectively connected to the plurality of upper pads 133 and 135 respectively. Referring to FIG. 3, the plurality of lower pins 156 are located on the lower surface 108 of the flexible substrate 200, and the plurality of lower pins 156 are electrically connected to the plurality of second upper pins 152 through the plurality of first vias 160.
請繼續參閱圖3,在本實施例中,各下引腳156具有下接墊137,多個下接墊137分別對應多個上接墊133、135而設置,且多個第一導通孔160分別對應連接多個上接墊133、135與多個下接墊137。Please continue to refer to FIG. 3. In this embodiment, each lower pin 156 has a lower contact pad 137, a plurality of lower contact pads 137 are respectively disposed corresponding to a plurality of upper contact pads 133 and 135, and a plurality of first through holes 160 A plurality of upper pads 133 and 135 and a plurality of lower pads 137 are connected correspondingly.
在本實施例中,各下引腳156自下接墊137向外延伸。詳細地說,多個下引腳156自晶片接合區110投影至可撓性基材200的下表面108的區域內向第一端102的方向延伸。更詳細地說,多個下引腳156於可撓性基材200的下表面108的位置可分別對應同樣向第一端102的方向延伸且位於上表面106的多個第一上引腳150的位置。藉此,使得上表面106與下表面108上的金屬線路分佈較一致,可避免受力不均而導致晶片170與引腳接合不良的問題,並減少可撓性線路基板100發生翹曲的情況。然而,在其他實施例中,下引腳156也可往第二端104的方向延伸。In this embodiment, each of the lower pins 156 extends outward from the lower pad 137. In detail, the plurality of lower pins 156 extend from the wafer bonding region 110 to the lower end 108 of the flexible substrate 200 toward the first end 102. In more detail, the positions of the plurality of lower pins 156 on the lower surface 108 of the flexible substrate 200 may respectively correspond to the plurality of first upper pins 150 extending in the direction of the first end 102 and located on the upper surface 106. s position. Thereby, the distribution of the metal circuits on the upper surface 106 and the lower surface 108 is more consistent, which can avoid the problem of poor bonding between the chip 170 and the pins caused by uneven force, and reduce the occurrence of warping of the flexible circuit substrate 100. . However, in other embodiments, the lower pin 156 may also extend in the direction of the second end 104.
請再次參閱圖1以及圖3,在本實施例中,薄膜覆晶封裝結構10的晶片170具有相對的第一側173與第二側174。晶片170包括位於主動面上且靠近第一側173的多個第一凸塊175及多個第二凸塊176,多個第一凸塊175以及多個第二凸塊176分別以單排的方式沿著平行於第一側173的方向排列,且多個第二凸塊176較多個第一凸塊175遠離第一側173。晶片170以主動面朝向上表面106的覆晶方式設置於晶片接合區110內,其中第一側173對應晶片接合區110的第一邊112,第二側174對應第二邊114。如圖3所示,多個第一凸塊175分別接合於多個第一內接端122,多個第二凸塊176分別接合於多個第二內接端127。在本實施例中,多個第一凸塊175及多個第二凸塊176為輸出端接點,且多個第一上引腳150及多個第二上引腳152為輸出端引腳。Please refer to FIG. 1 and FIG. 3 again. In this embodiment, the chip 170 of the thin-film flip-chip package structure 10 has a first side 173 and a second side 174 opposite to each other. The wafer 170 includes a plurality of first bumps 175 and a plurality of second bumps 176 located on the active surface and close to the first side 173. The plurality of first bumps 175 and the plurality of second bumps 176 are respectively arranged in a single row. The method is arranged in a direction parallel to the first side 173, and the plurality of second bumps 176 are farther from the first side 173 than the plurality of first bumps 175. The wafer 170 is disposed in the wafer bonding region 110 in a flip-chip manner with the active surface facing the upper surface 106, wherein the first side 173 corresponds to the first side 112 of the wafer bonding region 110 and the second side 174 corresponds to the second side 114. As shown in FIG. 3, the plurality of first bumps 175 are respectively connected to the plurality of first inner joint ends 122, and the plurality of second bumps 176 are respectively connected to the plurality of second inner joint ends 127. In this embodiment, the plurality of first bumps 175 and the plurality of second bumps 176 are output terminal contacts, and the plurality of first upper pins 150 and the plurality of second upper pins 152 are output terminal pins. .
在本實施例中,線路層300還包括位於上表面106的多個第三上引腳154。各第三上引腳154具有第三內接端145,多個第三內接端145位於晶片接合區110內且鄰近第二邊114。多個第三內接端145沿著平行第二邊114的方向接續地排列。由圖1所示可知,各第三上引腳154自第三內接端145向遠離晶片接合區110的方向延伸。詳細地說,多個第三上引腳154自第三內接端145向第二端104或第一端102的方向延伸。由圖3可知,晶片170包括靠近第二側174的多個第三凸塊177,多個第三凸塊177以單排的方式沿著平行於第二側174的方向排列,且多個第三凸塊177分別接合於多個第三內接端145。在本實施例中,多個第三凸塊177可包括輸入端接點及輸出端接點,且多個第三上引腳154可包括輸入端引腳及輸出端引腳。In this embodiment, the circuit layer 300 further includes a plurality of third upper pins 154 on the upper surface 106. Each third upper pin 154 has a third internal connection end 145, and a plurality of third internal connection ends 145 are located in the wafer bonding area 110 and are adjacent to the second side 114. The plurality of third inner connecting ends 145 are successively arranged along a direction parallel to the second side 114. As can be seen from FIG. 1, each of the third upper pins 154 extends from the third internal connection end 145 in a direction away from the wafer bonding region 110. In detail, the plurality of third upper pins 154 extend from the third internal connection end 145 toward the second end 104 or the first end 102. As can be seen from FIG. 3, the wafer 170 includes a plurality of third bumps 177 near the second side 174, and the plurality of third bumps 177 are arranged in a single row in a direction parallel to the second side 174, and a plurality of The three bumps 177 are respectively connected to the plurality of third inner ends 145. In this embodiment, the plurality of third bumps 177 may include an input terminal point and an output terminal point, and the plurality of third upper pins 154 may include an input terminal pin and an output terminal pin.
請再次參閱圖2,在各群組G中的多個上接墊133、135具有平行於參考線L且相對的多個第一側邊1351以及多個第二側邊1352。第二上引腳152分別對應連接於對稱排列於參考線L兩側的上接墊135的第一側邊1351或第二側邊1352。詳細地說,在本實施例中,各群組G中位於參考線L左側的第二上引腳152連接對應的上接墊135的第一側邊1351,而位於參考線L右側的第二上引腳152連接對應的上接墊135的第二側邊1352,使得各群組G中的上接墊135與對應的第二上引腳152呈現如門字型的排列方式。此外,在本實施例中,第二上引腳152也是對應連接於上接墊133的第一側邊1351或第二側邊1352,但本發明並不以此為限。Please refer to FIG. 2 again, the plurality of upper pads 133 and 135 in each group G have a plurality of first side edges 1351 and a plurality of second side edges 1352 which are parallel to the reference line L and opposite to each other. The second upper pins 152 are respectively connected to the first side 1351 or the second side 1352 of the upper pads 135 arranged symmetrically on both sides of the reference line L. In detail, in this embodiment, the second upper pin 152 on the left side of the reference line L in each group G is connected to the first side 1351 of the corresponding upper pad 135, and the second side on the right side of the reference line L is the second The upper pins 152 are connected to the second sides 1352 of the corresponding upper pads 135, so that the upper pads 135 and the corresponding second upper pins 152 in each group G are arranged in a gate shape. In addition, in this embodiment, the second upper pin 152 is also corresponding to the first side 1351 or the second side 1352 connected to the upper pad 133, but the present invention is not limited thereto.
請繼續參閱圖2,各群組G中的多個上接墊133、135位於離參考線L最遠且分別位於參考線L兩側的二個第二上引腳152之間。詳細地說,在本實施例中,各群組G中的多個上接墊133、135位於連接參考線L左側上接墊135的第一側邊1351的第二上引腳152與連接參考線L右側上接墊135的第二側邊1352的第二上引腳152之間。換言之,各群組G以兩邊最外側的二個第二上引腳152界定出佈設空間,而各群組G的所有上接墊133、135及其他第二上引腳152在佈設空間內逐層緊密地排列,以有效利用佈設空間。Please continue to refer to FIG. 2, the plurality of upper pads 133 and 135 in each group G are located farthest from the reference line L and are respectively located between two second upper pins 152 on both sides of the reference line L. In detail, in this embodiment, the plurality of upper pads 133 and 135 in each group G are located at the second upper pin 152 and the connection reference of the first side 1351 of the upper pad 135 on the left side of the reference line L. Between the second upper pins 152 of the second side 1352 of the upper pad 135 on the right side of the line L. In other words, each group G defines the layout space by the two outermost two upper pins 152 on both sides, and all the upper pads 133 and 135 and the other second upper pins 152 of each group G are arranged in the layout space one by one. The layers are arranged closely to make effective use of the layout space.
請再次參閱圖1以及圖2,在本實施例中,在各群組G中各排的多個上接墊133、135的總面積由最靠近第二內接端127的最內排Ri 向遠離第二內接端127的最外排Ro 逐漸增大。詳細地說,位於最內排Ri 的上接墊133的面積小於位於最外排Ro 的多個上接墊135的總面積。也可以說,位於最內排Ri 的上接墊133的寬度小於位於最外排Ro 的多個上接墊135的總寬度,而於俯視的方向上,各群組G的多個上接墊133、135排列成相近於倒三角型的形狀。Please refer to FIG. 1 and FIG. 2 again. In this embodiment, the total area of the plurality of upper pads 133 and 135 in each row of each group G is determined by the innermost row R i closest to the second inner end 127. Ro gradually increases toward the outermost row away from the second inboard end 127. In detail, the pad 133 is located at the inner area of the upper row R i is smaller than the outermost row of contact pads 135 on the total area of the plurality of R o. It can also be said that the width of the upper pads 133 located in the innermost row R i is smaller than the total width of the plurality of upper pads 135 located in the outermost row Ro . The pads 133 and 135 are arranged in a shape close to an inverted triangle shape.
藉此,晶片接合區110內的多個上接墊133、135往遠離第二內接端127的方向上逐排地增加數量及/或總面積/總寬度,並分別透過對應的第一導通孔160與位於可撓性基材200的下表面108的下引腳156電性連接,而不會佔用可撓性基材200於晶片接合區110外用於佈線的表面,也不會使第二內接端127的間距加大。As a result, the plurality of upper pads 133 and 135 in the wafer bonding area 110 increase in a row and / or a total area / a total width in a direction away from the second inner end 127, and respectively pass through the corresponding first conduction. The hole 160 is electrically connected to the lower pin 156 on the lower surface 108 of the flexible substrate 200 without occupying the surface of the flexible substrate 200 outside the wafer bonding area 110 for wiring, and does not cause the second The pitch of the inner ends 127 is increased.
因此,本實施例的薄膜覆晶封裝結構10利用晶片接合區110內的空間佈設第二上引腳152,並透過第一導通孔160連接位於可撓性基材200上表面106與下表面108的第二上引腳152與下引腳156,再將多個與第一導通孔160對應連接的上接墊133、135以分組及分層的方式緊密地排列,有效地增加引腳的腳數,並縮減引腳之間的間距。而將第二上引腳152設置於晶片接合區110內,更可減少利用晶片接合區110外的區域走線的引腳數量,進而增加線路佈局的彈性。Therefore, the thin-film flip-chip packaging structure 10 of this embodiment uses the space in the wafer bonding area 110 to arrange the second upper pin 152, and connects the upper surface 106 and the lower surface 108 of the flexible substrate 200 through the first via 160. The second upper pin 152 and the lower pin 156, and then multiple upper pads 133 and 135 corresponding to the first via 160 are closely arranged in a grouped and layered manner, which effectively increases the pin foot Count and reduce the spacing between the pins. The second upper pin 152 is disposed in the wafer bonding region 110, which can further reduce the number of pins that are routed through the area outside the wafer bonding region 110, thereby increasing the flexibility of the circuit layout.
值得一提的是,在圖1與圖2中,舉出其中一種線路層300的形式,但是線路層300的形式並不以此為限制,下面將介紹其他種的線路層形式。It is worth mentioning that in FIG. 1 and FIG. 2, one form of the circuit layer 300 is listed, but the form of the circuit layer 300 is not limited thereto. Other types of circuit layers will be described below.
圖4至6分別是依照本發明的其它實施例多種薄膜覆晶封裝結構的線路層的局部放大示意圖。需說明的是,在圖4至圖6中以不同形式的線路層300a、300b、300c為例,但並不以此為限。4 to 6 are partial enlarged schematic diagrams of circuit layers of various thin-film flip-chip packaging structures according to other embodiments of the present invention. It should be noted that, in FIG. 4 to FIG. 6, the circuit layers 300 a, 300 b, and 300 c in different forms are taken as examples, but not limited thereto.
請先參閱圖4,圖4的線路層300a與圖2的線路層300的主要差異在於線路層300a的各群組G的多個上接墊133a、135a、135a’排列成更多排。由圖4可知,在本實施例中,線路層300a具有分成多個群組G的多個第二上引腳152a(於圖4中僅示意的分為二個群組G)。各第二上引腳152a具有第二內接端127a以及上接墊133a、135a、135a’。各群組G中的多個上接墊133a、135a、135a’由最靠近第二內接端127a處往遠離第二內接端127a的方向逐層排列成多排。靠近各第二內接端127a處設置有至少兩排的單個且非對稱參考線L兩側設置的上接墊133a。往遠離第二內接端127a的方向接續設置多排對稱排列於參考線L兩側的上接墊135a、135a’。在本實施例中,參考線L重疊於各群組G的中線。Please refer to FIG. 4 first. The main difference between the circuit layer 300a of FIG. 4 and the circuit layer 300 of FIG. 2 is that a plurality of pads 133a, 135a, 135a 'of each group G of the circuit layer 300a are arranged in more rows. As can be seen from FIG. 4, in this embodiment, the circuit layer 300 a has a plurality of second upper pins 152 a divided into a plurality of groups G (divided into two groups G only as shown schematically in FIG. 4). Each second upper pin 152a has a second inner terminal 127a and upper pads 133a, 135a, 135a '. The plurality of upper pads 133a, 135a, 135a 'in each group G are arranged in multiple rows one by one from the closest to the second inner end 127a and away from the second inner end 127a. Near each second inner end 127a, at least two rows of upper and lower pads 133a are provided on both sides of the single and asymmetric reference line L. A plurality of rows of upper contact pads 135a, 135a 'arranged symmetrically on both sides of the reference line L are provided in a direction away from the second inner end 127a. In this embodiment, the reference line L overlaps the center line of each group G.
詳細地說,多個上接墊133a、135a、135a’位於離參考線L最遠且分別位於參考線L兩側的二個第二上引腳152a之間。各上接墊133a、135a、135a’具有相對且平行參考線L的第一側邊1351a以及第二側邊1352a。各第二上引腳152a分別連接對應的上接墊133a、135a、135a’的其中一側邊。詳細地說,在本實施例中,位於參考線L左側的多個第二上引腳152a連接所對應的上接墊135a的第一側邊1351a,而位於參考線L右側的多個第二上引腳152a連接所對應的上接墊135a的第二側邊1352a,使得各群組G中的上接墊135a呈現面對面的方式對稱排列於參考線L的兩側,且與對應的第二上引腳152a呈現如門字型的排列方式。此外,由於各群組G中最遠離第二內接端127a的最外排Ro 具有最大的寬度可設置上接墊,因此本實施例中的各群組G中的最外排Ro 上除了設置有一對面對面對稱排列於參考線L兩側的上接墊135a之外,還包含了一對對稱排列於參考線L兩側的上接墊135a’,其中位於參考線L左側的上接墊135a’是以所對應的第二上引腳152a連接其第二側邊1352a,位於參考線L右側的上接墊135a’則是以所對應的第二上引腳152a連接其第一側邊1351a,使得各群組G中的上接墊135a’呈現背對背的方式對稱排列於參考線L的兩側。In detail, the plurality of upper pads 133a, 135a, and 135a 'are located farthest from the reference line L and located between two second upper pins 152a on both sides of the reference line L, respectively. Each of the upper pads 133a, 135a, and 135a 'has a first side 1351a and a second side 1352a that are opposite and parallel to the reference line L. Each of the second upper pins 152a is connected to one of the corresponding upper pads 133a, 135a, and 135a ', respectively. In detail, in this embodiment, a plurality of second upper pins 152a located on the left side of the reference line L are connected to the first side edges 1351a of the corresponding upper pads 135a, and a plurality of second sides located on the right side of the reference line L The upper pin 152a is connected to the second side 1352a of the corresponding upper pad 135a, so that the upper pads 135a in each group G are arranged symmetrically on both sides of the reference line L in a face-to-face manner, and are in line with the corresponding second The upper pins 152a are arranged like a gate. Further, since each group G is the most remote from the mating end 127a of the second outermost row R o has a maximum width may be provided on the pad, and therefore the present embodiment each group G is the outermost row R o In addition to a pair of upper pads 135a symmetrically arranged face to face on both sides of the reference line L, a pair of upper pads 135a 'symmetrically arranged on both sides of the reference line L are included, and the upper pads on the left of the reference line L The pad 135a 'is connected to the second side 1352a by the corresponding second upper pin 152a, and the upper pad 135a' located on the right side of the reference line L is connected to the first side by the corresponding second upper pin 152a The edge 1351a is such that the upper pads 135a 'in each group G are arranged symmetrically on both sides of the reference line L in a back-to-back manner.
請繼續參閱圖4,在本實施例中,各群組G中各排的多個上接墊133a、135a、135a’的總面積由最靠近第二內接端127a的最內排Ri 向遠離第二內接端127a的最外排Ro 逐漸擴大。因此,俯視的方向上,各群組G的多個上接墊133a、135a、135a’排列成相近於倒三角型的形狀。Please continue to refer to FIG. 4. In this embodiment, the total area of the plurality of upper pads 133a, 135a, and 135a 'in each row of each group G is from the innermost row R i closest to the second inscribed end 127a to away from the second end of the contact 127a of the outermost row R o gradually expanded. Therefore, the plurality of upper pads 133a, 135a, and 135a 'of each group G are arranged in a shape close to an inverted triangle shape in a plan view.
由圖4可知,與多個第一內接端122a接合的多個第一凸塊175a以及與多個第二內接端127a接合的多個第二凸塊176a分別是以單排的方式排列,然而本發明並不以此為限。請參閱圖5,圖5的線路層300b與圖4的線路層300a的主要差異在於,在圖5中,本實施例的多個第一凸塊175b以及多個第二凸塊176b分別沿著平行於晶片170的第一側173(請參考圖1)的方向排列成至少二排,至少二排的第二凸塊176b較至少二排的第一凸塊175b遠離第一側173,且相鄰二排的第一凸塊175b及相鄰二排的第二凸塊176b分別呈交錯排列。相應地,線路層300b的多個第一內接端122b對應接合於多個第一凸塊175b以及多個第二內接端127b對應接合於多個第二凸塊176b。因此,多個第一內接端122b及多個第二內接端127b也分別沿著平行於晶片接合區110的第一邊112(請參考圖1)的方向排列成至少二排,且相鄰二排的多個第一內接端122b及相鄰二排的多個第二內接端127b分別呈交錯排列。由圖5可知,藉由多排呈交錯排列的凸塊以及內接端,本發明可以提供更細微的引腳之間的間距,有效的縮減間距,增加引腳的數量。As can be seen from FIG. 4, the plurality of first bumps 175 a joined to the plurality of first inner joint ends 122 a and the plurality of second bumps 176 a joined to the plurality of second inner joint ends 127 a are arranged in a single row, respectively. However, the present invention is not limited to this. Please refer to FIG. 5. The main difference between the circuit layer 300b of FIG. 5 and the circuit layer 300a of FIG. 4 is that in FIG. 5, the plurality of first bumps 175b and the plurality of second bumps 176b in this embodiment are respectively along The direction parallel to the first side 173 (refer to FIG. 1) of the wafer 170 is arranged in at least two rows, and the second bumps 176 b of the at least two rows are farther away from the first side 173 than the first bumps 175 b of the at least two rows. The first bumps 175b in two adjacent rows and the second bumps 176b in two adjacent rows are staggered, respectively. Accordingly, the plurality of first internal connection ends 122b of the circuit layer 300b are correspondingly bonded to the plurality of first bumps 175b and the plurality of second internal connection ends 127b are correspondingly coupled to the plurality of second bumps 176b. Therefore, the plurality of first internal connection ends 122b and the plurality of second internal connection ends 127b are also arranged in at least two rows along the direction parallel to the first side 112 (refer to FIG. 1) of the wafer bonding area 110, and The plurality of first internal connection ends 122b in the adjacent two rows and the plurality of second internal connection ends 127b in the adjacent two rows are staggered, respectively. As can be seen from FIG. 5, the present invention can provide more fine pitches between pins, effectively reduce the pitch, and increase the number of pins by using multiple rows of staggered bumps and internal terminals.
或者,線路層的形式也可以如圖6所示。圖6的線路層300c與圖5的線路層300b的主要差異在於線路層300c的各群組G的多個上接墊133c、133c’、135c、135c’排列成更多排。除此之外,在圖5中,位於離第二內接端127b最遠的最外排Ro 設置有一對以面對面的方式對稱排列於參考線L兩側的上接墊135b以及一對以背對背的方式對稱排列於參考線L兩側的上接墊135b’。在圖6中,線路層300c中各群組G的最外排Ro 設置有兩對以面對面的方式對稱排列於參考線L1兩側的上接墊135c,也就是說,位於參考線L1左側的第二上引腳152c皆連接位於最外排Ro 對應的上接墊135c的第一側邊1351c,而位於參考線L1右側的第二上引腳152c皆連接位於最外排Ro 對應的上接墊135c的第二側邊1352c。此外,在倒數第二排Rm (即最外排Ro 向內一排)上,由於在設置一對以面對面的方式對稱排列於參考線L1的兩側的上接墊135c後尚有多餘空間,因此另可設置一個單獨配置的上接墊133c’。對應的第二上引腳152c可不連接上接墊133c’的第一側邊1351c與第二側邊1352c,而是連接於上接墊133c’的中央。再者,在圖6中,多排對稱排列的上接墊135c、135c’可對稱排列於不同的參考線L1、L2的兩側。在本實施例中,位於最外排Ro 及倒數第二排Rm 的上接墊135c是位於參考線L1的兩側,其中參考線L1重疊於各群組G的中線。而位於倒數第三、四排的上接墊135c’對稱排列於參考線L2的兩側,其中參考線L2鄰近但稍微偏離各群組G的中線。然而,本發明對於各群組中不同參考線的數量並不加以限制。上面僅是提供數種線路層的形式,線路層的形狀與排列方式並不以上述為限制。Alternatively, the form of the circuit layer may be as shown in FIG. 6. The main difference between the circuit layer 300c of FIG. 6 and the circuit layer 300b of FIG. 5 is that a plurality of pads 133c, 133c ', 135c, and 135c' of each group G of the circuit layer 300c are arranged in more rows. In addition, in FIG. 5, is located away from the second end 127b connected to the outermost row furthest R o is provided with a pair of symmetrically arranged in a face to face on both sides of the reference line L and a pair of pads 135b to The back pads 135b ′ are symmetrically arranged on both sides of the reference line L. In FIG. 6, the outermost row R o wiring layer 300c is provided in each group G are two pairs of face to face relationship to the reference line L1 are arranged symmetrically on both sides of the pad 135c, that is, positioned left of the reference line L1 a second connecting pin 152c are positioned on the outermost row R o corresponding to a first side of the pad 1351c 135c, and the reference line L1 is located on the right side of second connector pins 152c are positioned corresponding to the outermost row R o The second side 1352c of the upper pad 135c. In addition, on the penultimate row R m (that is, the outermost row Ro is inward), there is still a surplus after a pair of upper pads 135c arranged symmetrically on both sides of the reference line L1 in a face-to-face manner. Space, so a separate upper pad 133c 'can be provided. The corresponding second upper pin 152c may not be connected to the first side 1351c and the second side 1352c of the upper pad 133c ', but connected to the center of the upper pad 133c'. Furthermore, in FIG. 6, a plurality of rows of symmetrically arranged upper pads 135 c and 135 c ′ may be symmetrically arranged on both sides of different reference lines L1 and L2. In the present embodiment, the outermost row located at the penultimate row R o and R m is the pad 135c located on both sides of the reference line L1, which overlaps the reference line L1 to the line of each group G. The upper pads 135c ′ located in the third and fourth rows are symmetrically arranged on both sides of the reference line L2, where the reference line L2 is adjacent to but slightly deviates from the center line of each group G. However, the present invention does not limit the number of different reference lines in each group. The above is only the form of providing several circuit layers, and the shape and arrangement of the circuit layers are not limited by the above.
圖7是依照本發明的另一實施例的一種薄膜覆晶封裝結構的局部剖面示意圖。請參閱圖7,圖7的薄膜覆晶封裝結構10’與圖1的薄膜覆晶封裝結構10的主要差異在於,在本實施例中,薄膜覆晶封裝結構10’的線路層更包括貫穿可撓性基材200’的多個第二導通孔165。多個第二導通孔165遠離晶片接合區110,且分別對應連接多個下引腳156’。在本實施例中,多個第二導通孔165鄰近第一端102’,多個下引腳156’藉由第二導通孔165而導至上表面106’,進而連接設置於上表面106’的外引腳158,以作為對外電性連接。藉此,可讓分別接合於第一凸塊175’與第二凸塊176’的第一上引腳150’與第二上引腳152’的最終對外連接部分皆位於相同的表面(即上表面106’)上。因此薄膜覆晶封裝結構10’在與外部元件(未繪示)連接時,可以僅以薄膜覆晶封裝結構10’的上表面106’與外部元件進行電性連接,簡化了對外連接的方式。然而,本發明對於引腳對外連接部分的位置不作限制。FIG. 7 is a schematic partial cross-sectional view of a thin-film flip-chip packaging structure according to another embodiment of the present invention. Please refer to FIG. 7. The main difference between the thin-film flip-chip packaging structure 10 'of FIG. 7 and the thin-film flip-chip packaging structure 10 of FIG. 1 is that in this embodiment, the circuit layer of the thin-film flip-chip packaging structure 10' further includes The plurality of second via holes 165 of the flexible substrate 200 '. The plurality of second vias 165 are far from the wafer bonding area 110 and are respectively connected to the plurality of lower pins 156 '. In this embodiment, the plurality of second via holes 165 are adjacent to the first end 102 ′, and the plurality of lower pins 156 ′ are guided to the upper surface 106 ′ through the second via holes 165, and then connected to the upper surface 106 ′. The external pin 158 is used as an external electrical connection. Thereby, the final external connection portions of the first upper pin 150 'and the second upper pin 152' which are respectively bonded to the first bump 175 'and the second bump 176' can be located on the same surface (i.e., the upper Surface 106 '). Therefore, when the thin-film flip-chip packaging structure 10 'is connected to an external component (not shown), only the upper surface 106' of the thin-film flip-chip packaging structure 10 'can be electrically connected to the external components, which simplifies the way of external connection. However, the present invention does not limit the position of the external connection portion of the pin.
請一併參閱圖1、圖3以及圖7,本發明更可具有防焊層SR、SR’以及封裝膠體180、180’。防焊層SR、SR’設置於上表面106、106’以及下表面108、108’上,並完全或部分地覆蓋第一上引腳150、150’、第三上引腳154、154’及下引腳156、156’。防焊層SR、SR’分別具有一開口暴露出晶片接合區110,也就是防焊層SR、SR’會暴露出第一內接端122、122’及第二上引腳152、152’。此外,防焊層SR、SR’也會暴露出引腳的對外連接部分。封裝膠體180、180’至少填充於可撓性線路基板100、100’與晶片170、170’之間,以保護線路層與凸塊間的電性接點。此外,上面僅是提供數種薄膜覆晶封裝結構的形式,可撓性線路基板與晶片接合的方式並不以上述為限制。Please refer to FIG. 1, FIG. 3 and FIG. 7 together, the present invention may further include solder resist layers SR, SR 'and encapsulants 180, 180'. The solder resist layers SR, SR 'are disposed on the upper surfaces 106, 106' and the lower surfaces 108, 108 ', and completely or partially cover the first upper pins 150, 150', the third upper pins 154, 154 ', and Lower pins 156, 156 '. The solder resist layers SR, SR 'have an opening respectively to expose the wafer bonding area 110, that is, the solder resist layers SR, SR' will expose the first internal terminals 122, 122 'and the second upper pins 152, 152'. In addition, the solder resist layers SR, SR 'also expose the external connection portions of the pins. The encapsulants 180 and 180 'are filled at least between the flexible circuit substrates 100 and 100' and the chips 170 and 170 'to protect the electrical contacts between the circuit layer and the bumps. In addition, the above is only a form of providing several thin-film flip-chip packaging structures, and the manner in which the flexible circuit substrate is bonded to the chip is not limited to the above.
綜上所述,本發明的薄膜覆晶封裝結構透過將多個具有第二內接端與上接墊的第二上引腳設置於晶片接合區內,這些第二上引腳分為多個群組,各群組中的多個上接墊向遠離第二內接端的方向逐層/逐排緊密地排列,以在有限尺寸的晶片接合區內配置較多的上接墊。進一步透過第一導通孔對應連接上接墊以及下引腳,使得可撓性線路基板除了具有於可撓性基材的上表面向外側延伸的第一上引腳之外,還具有於晶片接合區內透過上接墊與第一導通孔將電路延伸至可撓性基材的下表面的第二上引腳,第二上引腳進一步透過下引腳向外側延伸。如此,可撓性線路基板上可佈設的引腳數量可大幅增加,以供具有更多凸塊的晶片連接。並且,在上述的配置中,由於上接墊與第二上引腳是在晶片接合區內,不會佔用到可撓性基材在晶片接合區之外的部位,線路層在可撓性基材上的佈局能更具有彈性。In summary, the thin-film flip-chip packaging structure of the present invention is configured by arranging a plurality of second upper pins having a second inner terminal and an upper pad in a wafer bonding area. These second upper pins are divided into a plurality of Groups, and multiple upper pads in each group are closely arranged layer-by-layer / row-by-row in a direction away from the second internal connection end to arrange more upper pads in a wafer bonding area of a limited size. Further, the upper pad and the lower pin are correspondingly connected through the first via hole, so that the flexible circuit board has a first upper pin extending outward from the upper surface of the flexible substrate, and also has chip bonding. The circuit extends to the second upper pin on the lower surface of the flexible substrate through the upper pad and the first via, and the second upper pin further extends outward through the lower pin. In this way, the number of pins that can be laid on the flexible circuit substrate can be greatly increased for chip connections with more bumps. Moreover, in the above configuration, since the upper pad and the second upper pin are in the wafer bonding area, the portion of the flexible substrate outside the wafer bonding area will not be occupied, and the wiring layer is on the flexible base. The layout on the wood can be more flexible.
雖然本發明已以實施例揭露如上,然其並非用以限定本發明,任何所屬技術領域中具有通常知識者,在不脫離本發明的精神和範圍內,當可作些許的更動與潤飾,故本發明的保護範圍當視後附的申請專利範圍所界定者為準。Although the present invention has been disclosed as above with the examples, it is not intended to limit the present invention. Any person with ordinary knowledge in the technical field can make some modifications and retouching without departing from the spirit and scope of the present invention. The protection scope of the present invention shall be determined by the scope of the attached patent application.
10、10’‧‧‧薄膜覆晶封裝結構10, 10’‧‧‧ thin-film flip-chip packaging structure
100、100’‧‧‧可撓性線路基板100, 100’‧‧‧ flexible circuit board
102、102’‧‧‧第一端102、102’‧‧‧first end
104、104’‧‧‧第二端104、104’‧‧‧Second end
106、106’‧‧‧上表面106, 106’‧‧‧ upper surface
108、108’‧‧‧下表面108, 108’‧‧‧ lower surface
110‧‧‧晶片接合區110‧‧‧ Wafer Land
112‧‧‧第一邊112‧‧‧First side
114‧‧‧第二邊114‧‧‧Second side
122、122a、122b、122c、122’‧‧‧第一內接端122, 122a, 122b, 122c, 122 ’‧‧‧ first internal end
127、127a、127b、127c、127’‧‧‧第二內接端127, 127a, 127b, 127c, 127’‧‧‧Second Inner End
133、133a、133b、133c、133c’、133’、135、135a、135a’、135b、135b’、135c、135c’、135’‧‧‧上接墊133, 133a, 133b, 133c, 133c ’, 133’, 135, 135a, 135a ’, 135b, 135b’, 135c, 135c ’, 135’‧‧‧
137、137’‧‧‧下接墊137, 137’‧‧‧ under pad
1351、1351a、1351b、1351c‧‧‧第一側邊1351, 1351a, 1351b, 1351c‧‧‧ First side
1352、1352a、1352b、1352c‧‧‧第二側邊1352, 1352a, 1352b, 1352c‧‧‧ Second side
145、145’‧‧‧第三內接端145, 145’‧‧‧ the third internal end
150、150a、150b、150c、150’‧‧‧第一上引腳150, 150a, 150b, 150c, 150’‧‧‧‧ the first upper pin
152、152a、152b、152c、152’‧‧‧第二上引腳152, 152a, 152b, 152c, 152’‧‧‧ second upper pin
154、154’‧‧‧第三上引腳154, 154’‧‧‧ third upper pin
156、156’‧‧‧下引腳156, 156’‧‧‧ under pins
158‧‧‧外引腳158‧‧‧outer pin
160、160a、160b、160c、160’‧‧‧第一導通孔160, 160a, 160b, 160c, 160’‧‧‧first via
165‧‧‧第二導通孔165‧‧‧second via
170、170’‧‧‧晶片170, 170’‧‧‧ chips
173‧‧‧第一側173‧‧‧first side
174‧‧‧第二側174‧‧‧second side
175、175a、175b、175c、175’‧‧‧第一凸塊175, 175a, 175b, 175c, 175’‧‧‧ first bump
176、176a、176b、176c、176’‧‧‧第二凸塊176, 176a, 176b, 176c, 176’‧‧‧ second bump
177、177’‧‧‧第三凸塊177, 177’‧‧‧ third bump
180、180’‧‧‧封裝膠體180, 180’‧‧‧ encapsulated colloid
200、200’‧‧‧可撓性基材200, 200’‧‧‧ flexible substrate
300、300a、300b、300c‧‧‧線路層300, 300a, 300b, 300c‧‧‧ Line layer
G‧‧‧群組G‧‧‧Group
L、L1、L2‧‧‧參考線L, L1, L2‧‧‧ reference line
Ri‧‧‧最內排R i ‧‧‧ innermost row
Rm‧‧‧倒數第二排R m ‧‧‧ penultimate row
Ro‧‧‧最外排R o ‧‧‧ Outer row
SR、SR’‧‧‧防焊層SR, SR’‧‧‧ solder mask
圖1是依照本發明的一實施例的一種薄膜覆晶封裝結構的示意圖。 圖2是圖1的薄膜覆晶封裝結構的線路層的局部放大示意圖。 圖3是圖1的薄膜覆晶封裝結構的局部剖面示意圖。 圖4至圖6分別是依照本發明的其他實施例的多種薄膜覆晶封裝結構的線路層的局部放大示意圖。 圖7是依照本發明的另一實施例的一種薄膜覆晶封裝結構的局部剖面示意圖。FIG. 1 is a schematic diagram of a thin-film flip-chip packaging structure according to an embodiment of the present invention. FIG. 2 is a partially enlarged schematic view of a circuit layer of the thin-film flip-chip packaging structure of FIG. 1. FIG. 3 is a schematic partial cross-sectional view of the thin-film flip-chip packaging structure of FIG. 1. 4 to 6 are partial enlarged schematic diagrams of circuit layers of various thin-film flip-chip packaging structures according to other embodiments of the present invention. FIG. 7 is a schematic partial cross-sectional view of a thin-film flip-chip packaging structure according to another embodiment of the present invention.
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TW106130986A TWI653717B (en) | 2017-09-11 | 2017-09-11 | Film flip chip package structure |
CN201711239736.4A CN109494208B (en) | 2017-09-11 | 2017-11-30 | Chip-on-Film Package Structure |
US15/886,851 US10211142B1 (en) | 2017-09-11 | 2018-02-02 | Chip-on-film package structure |
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TW106130986A TWI653717B (en) | 2017-09-11 | 2017-09-11 | Film flip chip package structure |
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TWI736096B (en) * | 2019-12-31 | 2021-08-11 | 頎邦科技股份有限公司 | Circuit board |
TWI796550B (en) * | 2020-02-26 | 2023-03-21 | 頎邦科技股份有限公司 | Flexible circuit board |
TWI776142B (en) * | 2020-04-16 | 2022-09-01 | 南茂科技股份有限公司 | Chip on film package structure |
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JP4641141B2 (en) * | 2003-05-28 | 2011-03-02 | ルネサスエレクトロニクス株式会社 | Semiconductor device, TCP type semiconductor device, TCP tape carrier, printed wiring board |
CN1963600A (en) * | 2005-11-10 | 2007-05-16 | 群康科技(深圳)有限公司 | Liquid crystal display panel |
CN100428458C (en) * | 2005-11-10 | 2008-10-22 | 南茂科技股份有限公司 | Flexible substrate for packaging |
TWI483361B (en) * | 2012-03-23 | 2015-05-01 | Chipmos Technologies Inc | Chip packaging substrate and chip packaging structure |
TWI578487B (en) * | 2015-09-24 | 2017-04-11 | 聯詠科技股份有限公司 | Chip-on-film package |
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2017
- 2017-09-11 TW TW106130986A patent/TWI653717B/en active
- 2017-11-30 CN CN201711239736.4A patent/CN109494208B/en active Active
-
2018
- 2018-02-02 US US15/886,851 patent/US10211142B1/en active Active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI703686B (en) * | 2019-04-10 | 2020-09-01 | 南茂科技股份有限公司 | Chip on film package structure |
Also Published As
Publication number | Publication date |
---|---|
TWI653717B (en) | 2019-03-11 |
US10211142B1 (en) | 2019-02-19 |
US20190080996A1 (en) | 2019-03-14 |
CN109494208A (en) | 2019-03-19 |
CN109494208B (en) | 2020-06-09 |
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