CN100428458C - Flexible substrate for packaging - Google Patents
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- CN100428458C CN100428458C CNB2005101204204A CN200510120420A CN100428458C CN 100428458 C CN100428458 C CN 100428458C CN B2005101204204 A CNB2005101204204 A CN B2005101204204A CN 200510120420 A CN200510120420 A CN 200510120420A CN 100428458 C CN100428458 C CN 100428458C
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Abstract
Description
技术领域 technical field
本发明涉及一种供半导体管芯(Semiconductor die)封装用的柔性基板(Flexible substrate)。The invention relates to a flexible substrate for semiconductor die packaging.
背景技术 Background technique
随着信息电子产品日趋轻薄短小,具备质轻、超薄、柔软、可挠曲、形状自由度大等优点的柔性基板,已广泛应用于笔记型计算机、液晶显示器、数字相机、手机以及许多消费性电子的芯片封装中。As information electronic products become thinner and smaller, flexible substrates with the advantages of light weight, ultra-thin, soft, flexible, and large degree of shape freedom have been widely used in notebook computers, liquid crystal displays, digital cameras, mobile phones and many consumer products. Sexual electronic chip package.
柔性基板的制作,主要是以聚酰亚胺(Polyimide,简称PI)薄膜做为基材,兼具耐寒、抗紫外线、软性轻薄等特点。以聚酰亚胺制成的基材可耐500℃高温,并且燃烧时会产生氮气阻燃。接着,在基材上覆上一层粘结剂后,与铜箔接合成软性铜箔基板。此接合铜箔的基板经过电路显影后,即成为柔性基板。The production of flexible substrates mainly uses polyimide (Polyimide, PI) film as the base material, which has the characteristics of cold resistance, UV resistance, softness, lightness and thinness. The base material made of polyimide can withstand high temperature of 500 ℃, and it will produce nitrogen gas when burning. Next, after coating a layer of adhesive on the substrate, it is bonded with copper foil to form a flexible copper foil substrate. The substrate bonded with copper foil becomes a flexible substrate after circuit development.
请参阅图1,图1绘示一公知柔性基板1的示意图。该柔性基板1供一半导体管芯(未绘示于图中)封装用。该柔性基板1包含一柔性绝缘膜(Flexibleinsulating film)10。该柔性绝缘膜10其上具有一通常呈矩形的管芯安装区(Diemounting area)12。也就是说,该管芯安装区12定义两个第一边缘(Edge)122、两个垂直于该第一边缘122的第二边缘124以及该第一边缘122与该第二边缘124交接的四个角部(Corner)。在图1中,仅绘示出两个角部。Please refer to FIG. 1 , which is a schematic diagram of a conventional
该柔性基板1其上具有多根第一功能引脚(Functional lead)14、四根第一虚拟引脚(Dummy lead)142、多根第二功能引脚16以及四根第二虚拟引脚162。在图1中,仅绘示出两根第一虚拟引脚142及两根第二虚拟引脚162。该多根第一功能引脚14形成于该柔性绝缘膜10上的第一边缘122处,用以提供该半导体管芯电气连接。该多根第二引脚16形成于该柔性绝缘膜10的该第二边缘124处,用以提供该半导体管芯电气连接。每一根第一虚拟引脚142形成于该柔性绝缘膜10上的该管芯安装区12的一个角部处,并且被安置邻近一群组第一功能引脚14,用以支撑该半导体管芯。每一根第一虚拟引脚142区分为一个第一前区段1422以及一个第一后区段1424,如图1所示。每一根第二虚拟162引脚形成于该柔性绝缘膜10上的该管芯安装区12的一个角部处,并且被安置邻近一根第一虚拟引脚142以及一组第二功能引脚16,用以支撑该半导体管芯。每一根第二虚拟引脚162区分为一第二前区段1622以及一第二后区段1624。The
需强调的是,如图1所示,在该管芯安装区12之外,每一根第一虚拟引脚142的第一前区段1422与相邻的第二虚拟引脚162的第二前区段1622相连接,并且每一根第一虚拟引脚142的第一后区段1424与相邻的第二虚拟引脚162的第二后区段1624相连接。It should be emphasized that, as shown in FIG. 1, outside the die mounting area 12, the first
一般而言,通过一内引脚接合(Inner Lead Bonding,ILB)工艺,该柔性基板1上的所述第一功能引脚14与所述第二功能引脚16与该半导体管芯上的多个凸块热压接合。接着,执行一封胶工艺以将一液体树脂涂敷于该半导体管芯上。并且在约摄氏100度或更高的温度中,放置好几个小时以硬化该液体树脂使其密封该半导体管芯以及所述第一功能引脚14与所述第二功能引脚16。Generally speaking, through an inner lead bonding (Inner Lead Bonding, ILB) process, the first
由上述描述可以清楚地看出,与柔性较好的柔性绝缘膜10相比,刚性较高的第一虚拟引脚142结合第二虚拟引脚162会将工艺过程中施加于管芯安装区12的第一边缘122处的应力传导至该管芯安装区12的第二边缘124处,并且将工艺过程中施加于管芯安装区12的第二边缘124处的应力传导至该管芯安装区12的第一边缘124处。运用上述柔性基板1在封装半导体管芯时,会经过多次高低温变换的工艺。因此,在温度与压力作用之下,位于管芯安装区12的第一边缘122处的第一功能引脚14经由第一虚拟引脚142与第二虚拟引脚162会承受来自邻近第二边缘124处的侧向拉力,而位于管芯安装区12的第二边缘124处的第二功能引脚16由第一虚拟引脚142与第二虚拟引脚162会承受来自邻近第一边缘122处的侧向拉力。因此,执行过内引脚接合制成的柔性基板1,常发生柔性绝缘膜10挠曲,甚至造成功能引脚、虚拟引脚移位或断裂等不愿见到的情况。尤其是,一般的柔性绝缘膜10其管芯安装区12的第一边缘122(较长边)与第二边缘124(较短边)于工艺过程中,其热胀冷缩以及受力程度不同,更加会发生柔性绝缘膜10挠曲,甚至造成功能引脚、虚拟引脚移位或断裂等不愿见到的情况。It can be clearly seen from the above description that, compared with the more flexible
因此,本发明旨在提供一种供一半导体管芯封装用的柔性基板,根据本发明的柔性基板可以克服上述的问题。Therefore, the present invention aims to provide a flexible substrate for packaging a semiconductor die. The flexible substrate according to the present invention can overcome the above-mentioned problems.
发明内容 Contents of the invention
为了达成上述目的并且解决以上所讨论的缺点,本发明提供一种供一半导体管芯封装用的柔性基板。In order to achieve the above objects and solve the disadvantages discussed above, the present invention provides a flexible substrate for semiconductor die packaging.
根据本发明的一优选具体实施例的柔性基板,其供一半导体管芯封装之用。该柔性基板包含一柔性绝缘膜、多根第一功能引脚、一第一虚拟引脚、多根第二功能引脚以及一第二虚拟引脚。该柔性绝缘膜其上具有一管芯安装区。该管芯安装区定义一第一边缘、一垂直于该第一边缘的第二边缘以及该第一边缘与该第二边缘交接的一角部。该多根第一功能引脚形成于该柔性绝缘膜上的该第一边缘处,并且用以提供该半导体管芯电气连接。该第一虚拟引脚形成于该柔性绝缘膜上的该管芯安装区的该角部处,并且被安置邻近所述第一功能引脚,用以支撑该半导体管芯。该第一虚拟引脚区分为一第一前区段以及一第一后区段。该多根第二引脚形成于该柔性绝缘膜的该第二边缘处,并且用以提供该半导体管芯电气连接。该第二虚拟引脚形成于该柔性绝缘膜上的该管芯安装区的该角部处,并且被安置邻近该第一虚拟引脚以及所述第二功能引脚,用以支撑该半导体管芯。该第二虚拟引脚区分为一第二前区段以及一第二后区段。该柔性基板的特征在于在该管芯安装区之外该第一虚拟引脚的该第一前区段与该第二虚拟引脚的该第二前区段为隔离而非连接。A flexible substrate according to a preferred embodiment of the present invention is used for packaging a semiconductor die. The flexible substrate includes a flexible insulating film, multiple first functional pins, a first dummy pin, multiple second functional pins and a second dummy pin. The flexible insulating film has a die mounting area thereon. The die mounting area defines a first edge, a second edge perpendicular to the first edge, and a corner where the first edge meets the second edge. The plurality of first functional pins are formed at the first edge on the flexible insulating film, and are used for providing electrical connection to the semiconductor die. The first dummy pin is formed at the corner of the die mounting area on the flexible insulating film and is positioned adjacent to the first functional pin for supporting the semiconductor die. The first dummy pin area is divided into a first front segment and a first rear segment. The plurality of second pins are formed at the second edge of the flexible insulating film, and are used for providing electrical connection to the semiconductor die. The second dummy pin is formed at the corner of the die mounting area on the flexible insulating film, and is positioned adjacent to the first dummy pin and the second functional pin to support the semiconductor tube. core. The second dummy pin area is divided into a second front segment and a second rear segment. The flexible substrate is characterized in that the first front section of the first dummy lead and the second front section of the second dummy lead are isolated rather than connected outside the die mounting area.
根据本发明的另一优选具体实施例的柔性基板,其供一半导体管芯封装之用。该柔性基板包含一柔性绝缘膜、多根第一功能引脚、一第一虚拟引脚、多根第二功能引脚以及一第二虚拟引脚。该柔性绝缘膜其上具有一管芯安装区。该管芯安装区定义一第一边缘、一垂直于该第一边缘的第二边缘以及该第一边缘与该第二边缘交接的一角部。该多根第一功能引脚形成于该柔性绝缘膜上的该第一边缘处,并且用以提供该半导体管芯电气连接。该第一虚拟引脚形成于该柔性绝缘膜上的该管芯安装区的该角部处,并且被安置邻近所述第一功能引脚,用以支撑该半导体管芯。该第一虚拟引脚区分为一第一前区段以及一第一后区段,所述第一虚拟引脚的仅所述第一前区段的一部分延伸至所述管芯安装区中,并且所述第一前区段与所述第一后区段形成弯折状。该多根第二引脚形成于该柔性绝缘膜的该第二边缘处,并且用以提供该半导体管芯电气连接。该第二虚拟引脚形成于该柔性绝缘膜上的该管芯安装区的该角部处,并且被安置邻近该第一虚拟引脚以及所述第二功能引脚,用以支撑该半导体管芯。该第二虚拟引脚区分为一第二前区段以及一第二后区段,所述第二虚拟引脚的仅所述第二前区段的一部分延伸至所述管芯安装区中,并且所述第二前区段与所述第二后区段形成弯折状。该柔性基板的特征在于该第一虚拟引脚的该第一后区段与该第二虚拟引脚的该第二后区段为隔离而非连接。According to another preferred embodiment of the present invention, the flexible substrate is used for packaging a semiconductor die. The flexible substrate includes a flexible insulating film, multiple first functional pins, a first dummy pin, multiple second functional pins and a second dummy pin. The flexible insulating film has a die mounting area thereon. The die mounting area defines a first edge, a second edge perpendicular to the first edge, and a corner where the first edge meets the second edge. The plurality of first functional pins are formed at the first edge on the flexible insulating film, and are used for providing electrical connection to the semiconductor die. The first dummy pin is formed at the corner of the die mounting area on the flexible insulating film and is positioned adjacent to the first functional pin for supporting the semiconductor die. The first dummy pin area is divided into a first front section and a first rear section, only a part of the first front section of the first dummy pin extends into the die mounting area, And the first front section and the first rear section form a bent shape. The plurality of second pins are formed at the second edge of the flexible insulating film, and are used for providing electrical connection to the semiconductor die. The second dummy pin is formed at the corner of the die mounting area on the flexible insulating film, and is positioned adjacent to the first dummy pin and the second functional pin to support the semiconductor tube. core. The second dummy pin area is divided into a second front section and a second rear section, only a part of the second front section of the second dummy pin extends into the die mounting area, And the second front section and the second rear section form a bent shape. The flexible substrate is characterized in that the first rear section of the first dummy pin is isolated from but not connected to the second rear section of the second dummy pin.
关于本发明的优点与精神可以通过以下的发明详述及附图得到进一步的了解。The advantages and spirit of the present invention can be further understood through the following detailed description of the invention and the accompanying drawings.
附图说明 Description of drawings
图1为公知柔性基板1的示意图。FIG. 1 is a schematic diagram of a conventional
图2为根据本发明的一优选具体实施例的柔性基板2的示意图。FIG. 2 is a schematic diagram of a flexible substrate 2 according to a preferred embodiment of the present invention.
附图标记说明Explanation of reference signs
1、2:柔性基板 10、20:柔性绝缘膜1, 2:
12、22:管芯安装区 122、222:第一边缘12, 22: Die mounting
124、224:第二边缘 14、24:第一功能引脚124, 224:
142、242:第一虚拟引脚 1422、2422:第一前区段142, 242: first
1424、2424:第一后区段 16、26:第二功能引脚1424, 2424: the first
162、262:第二虚拟引脚 1622、2622:第二前区段162, 262: second
1624、2624:第二后区段1624, 2624: Second rear section
具体实施方式 Detailed ways
本发明提供一种供一半导体管芯封装用的柔性基板。请参阅图2,图2绘示出根据本发明的一优选具体实施例的柔性基板2,该柔性基板供一半导体管芯(未绘示于图中)封装之用。The invention provides a flexible substrate for packaging a semiconductor die. Please refer to FIG. 2 . FIG. 2 illustrates a flexible substrate 2 according to a preferred embodiment of the present invention. The flexible substrate is used for packaging a semiconductor die (not shown in the figure).
如图2所示,该柔性基板2包含一柔性绝缘膜20。该柔性绝缘膜20的厚度约在数十微米,并且具有可挠曲性。该柔性绝缘膜20其上具有一通常呈矩形的管芯安装区22。也就是说,该管芯安装区22定义两个第一边缘222、两个垂直于该第一边缘222的第二边缘224以及该第一边缘222与该第二边缘224交接的四个角部。在图2中,仅绘示出两个角部。As shown in FIG. 2 , the flexible substrate 2 includes a flexible insulating
该柔性基板2其上具有多根第一功能引脚24、四根第一虚拟引脚242、多根第二功能引脚26以及四根第二虚拟引脚262。在图2中,仅绘示出两根第一虚拟引脚242及两根第二虚拟引脚262。该多根第一功能引脚24形成于该柔性绝缘膜20上的第一边缘222处,用以提供该半导体管芯电气连接。该多根第二引脚26形成于该柔性绝缘膜20的该第二边缘224处,用以提供该半导体管芯电气连接。每一根第一虚拟引脚242形成于该柔性绝缘膜20上的该管芯安装区22的一个角部处,并且被安置邻近一组第一功能引脚24,用以支撑该半导体管芯。每一根第一虚拟引脚242区分为一个第一前区段2422以及一个第一后区段2424,如图2所示。每一根第二虚拟262引脚形成于该柔性绝缘膜20上的该管芯安装区22的一个角部处,并且被安置邻近一根第一虚拟引脚242以及一群组第二功能引脚26,用以支撑该半导体管芯。每一根第二虚拟引脚262区分为一第二前区段2622以及一第二后区段2624。The flexible substrate 2 has multiple first
需强调的是,根据本发明的优选具体实施例的柔性基板2,在该管芯安装区22之外,其上每一根第一虚拟引脚242的第一前区段2422与相邻的第二虚拟引脚262的第二前区段2622为隔离而非连接,如图2所示。It should be emphasized that, according to the flexible substrate 2 of the preferred embodiment of the present invention, outside the die mounting area 22, the
同样地,可以通过一内引脚接合工艺,该柔性基板2上的所述第一功能引脚24与所述第二功能引脚26与该半导体管芯上的多个凸块热压接合。接着,一封胶工艺执行以将一液体树脂涂敷于该半导体管芯上。并且于约摄氏100度或更高的温度中,放置好几个小时以硬化该液体树脂使其密封该半导体管芯以及所述第一功能引脚24与所述第二功能引脚26。Likewise, the first
由上述描述可以清楚地看出,相较于挠性较好的柔性绝缘膜20,刚性较高的第一虚拟引脚242结合第二虚拟引脚262仍有可能会将工艺过程中施加于管芯安装区22的第一边缘222处的应力传导至该管芯安装区22的第二边缘224处,并且有可能会将工艺过程中施加于管芯安装区22的第二边缘224处的应力传导至该管芯安装区22的第一边缘224处。但是,通过将每一根第一虚拟引脚242的第一前区段2422与相邻的第二虚拟引脚262的第二前区段2622隔离而非连接,明显地,可以大幅减缓因工艺过程中由热应力、压应力所引发的柔性绝缘膜20挠曲,甚至是功能引脚、虚拟引脚移位或断裂等不愿见到的情况。It can be clearly seen from the above description that, compared with the flexible insulating
在一具体实施例中,根据本发明的柔性基板2,其上每一根第一虚拟引脚242的该第一后区段2424与相邻的第二虚拟引脚262的第二后区段2624为连结,如图2所示。在另一具体实施例中,根据本发明的柔性基板2,其上每一根第一虚拟引脚242的第一后区段2424与相邻的第二虚拟引脚262的第二后区段2624也为隔离而非连接。In a specific embodiment, according to the flexible substrate 2 of the present invention, the first
在一具体实施例中,根据本发明的柔性基板2,其上该管芯安装区22呈现一开孔(Open hole)。具有呈现开孔的管芯安装区22的柔性基板2即可应用于带载封装(Tape carrier package,TCP)工艺中。In a specific embodiment, according to the flexible substrate 2 of the present invention, the die mounting area 22 presents an open hole (Open hole). The flexible substrate 2 with the die mounting area 22 having openings can be applied in a tape carrier package (TCP) process.
在另一优选具体实施例中,该柔性基板大体上与图2中的柔性基板2相同。与图2中的柔性基板2不同,根据本发明的另一优选具体实施例的柔性基板,其特征在于每一根第一虚拟引脚的第一后区段与相邻的第二虚拟引脚的第二后区段为隔离而非连接。In another preferred embodiment, the flexible substrate is substantially the same as the flexible substrate 2 in FIG. 2 . Different from the flexible substrate 2 in FIG. 2, the flexible substrate according to another preferred embodiment of the present invention is characterized in that the first rear section of each first dummy pin is connected to the adjacent second dummy pin The second post-section of the isolating rather than connecting.
同样地,在一具体实施例中,根据本发明的另一优选具体实施例的柔性基板,其上每一根第一虚拟引脚的第一前区段与相邻的第二虚拟引脚的第二前区段相连结。Similarly, in a specific embodiment, according to another preferred specific embodiment of the present invention, the flexible substrate, the first front section of each first dummy pin on it and the adjacent second dummy pin The second front section is joined.
同样地,在一具体实施例中,根据本发明的另一优选具体实施例的柔性基板,其上该管芯安装区呈现一开孔。Likewise, in an embodiment, according to another preferred embodiment of the flexible substrate of the present invention, the die mounting area thereon presents an opening.
根据本发明的供半导体管芯封装用的柔性基板,利用改良位于不同方向的引脚间的连结方式,进而消除位于柔性基板角部处的所述引脚受工艺过程中的应力的拉扯。避免因横向与纵向的热胀冷缩程度不一,使位于柔性基板角部处的所述引脚因彼此牵连而造成柔性基板挠曲引脚的断裂,因此能增进封装的可靠性。According to the flexible substrate for semiconductor die packaging of the present invention, by improving the connection mode between the pins in different directions, the pins at the corners of the flexible substrate are eliminated from being pulled by stress during the process. This prevents the pins at the corners of the flexible substrate from interfering with each other due to the difference in thermal expansion and contraction in the horizontal direction and the vertical direction, thereby preventing the flexible substrate from being broken, thereby improving the reliability of the package.
通过以上优选具体实施例的详述,希望能更加清楚描述本发明的特征与精神,而并非以上述所公开的优选具体实施例来对本发明的范畴加以限制。相反地,其目的是希望能涵盖各种改变及具等同性的安排于本发明的权利要求书的范畴内。Through the detailed description of the preferred specific embodiments above, it is hoped that the features and spirit of the present invention can be described more clearly, rather than limiting the scope of the present invention by the preferred specific embodiments disclosed above. On the contrary, the intention is to cover various modifications and equivalent arrangements within the scope of the appended claims of the present invention.
Claims (6)
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CN100580913C (en) * | 2007-07-10 | 2010-01-13 | 南茂科技股份有限公司 | Tape carrier semiconductor package and substrate thereof |
TWI653717B (en) * | 2017-09-11 | 2019-03-11 | 南茂科技股份有限公司 | Film flip chip package structure |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH06163788A (en) * | 1992-11-17 | 1994-06-10 | Kyocera Corp | Method of manufacturing package for storing semiconductor element |
US5424577A (en) * | 1993-04-01 | 1995-06-13 | Mitsubishi Denki Kabushiki Kaisha | Lead frame for semiconductor device |
JPH07211846A (en) * | 1995-02-23 | 1995-08-11 | Ngk Spark Plug Co Ltd | Lead frame |
JPH07297338A (en) * | 1994-04-27 | 1995-11-10 | Hitachi Cable Ltd | Lead frame |
US5825081A (en) * | 1995-11-06 | 1998-10-20 | Kabushiki Kaisha Toshiba | Tape carrier and assembly structure thereof |
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2005
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Publication number | Priority date | Publication date | Assignee | Title |
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JPH06163788A (en) * | 1992-11-17 | 1994-06-10 | Kyocera Corp | Method of manufacturing package for storing semiconductor element |
US5424577A (en) * | 1993-04-01 | 1995-06-13 | Mitsubishi Denki Kabushiki Kaisha | Lead frame for semiconductor device |
JPH07297338A (en) * | 1994-04-27 | 1995-11-10 | Hitachi Cable Ltd | Lead frame |
JPH07211846A (en) * | 1995-02-23 | 1995-08-11 | Ngk Spark Plug Co Ltd | Lead frame |
US5825081A (en) * | 1995-11-06 | 1998-10-20 | Kabushiki Kaisha Toshiba | Tape carrier and assembly structure thereof |
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