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CN100428458C - Flexible substrate for packaging - Google Patents

Flexible substrate for packaging Download PDF

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Publication number
CN100428458C
CN100428458C CNB2005101204204A CN200510120420A CN100428458C CN 100428458 C CN100428458 C CN 100428458C CN B2005101204204 A CNB2005101204204 A CN B2005101204204A CN 200510120420 A CN200510120420 A CN 200510120420A CN 100428458 C CN100428458 C CN 100428458C
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pins
dummy
edge
mounting area
insulating film
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CN1964033A (en
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李明勋
黄敏娥
洪宗利
陈必昌
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Chipmos Technologies Inc
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Chipmos Technologies Bermuda Ltd
Chipmos Technologies Inc
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Abstract

The invention discloses a flexible substrate for packaging a semiconductor tube core. The flexible substrate comprises a flexible insulating film, a plurality of first functional pins, a first virtual pin, a plurality of second functional pins and a second virtual pin. According to a preferred embodiment of the present invention, the flexible substrate is characterized in that the first front section of the first dummy lead is isolated from and not connected to the second front section of the second dummy lead.

Description

用于封装的柔性基板 Flexible Substrates for Packaging

技术领域 technical field

本发明涉及一种供半导体管芯(Semiconductor die)封装用的柔性基板(Flexible substrate)。The invention relates to a flexible substrate for semiconductor die packaging.

背景技术 Background technique

随着信息电子产品日趋轻薄短小,具备质轻、超薄、柔软、可挠曲、形状自由度大等优点的柔性基板,已广泛应用于笔记型计算机、液晶显示器、数字相机、手机以及许多消费性电子的芯片封装中。As information electronic products become thinner and smaller, flexible substrates with the advantages of light weight, ultra-thin, soft, flexible, and large degree of shape freedom have been widely used in notebook computers, liquid crystal displays, digital cameras, mobile phones and many consumer products. Sexual electronic chip package.

柔性基板的制作,主要是以聚酰亚胺(Polyimide,简称PI)薄膜做为基材,兼具耐寒、抗紫外线、软性轻薄等特点。以聚酰亚胺制成的基材可耐500℃高温,并且燃烧时会产生氮气阻燃。接着,在基材上覆上一层粘结剂后,与铜箔接合成软性铜箔基板。此接合铜箔的基板经过电路显影后,即成为柔性基板。The production of flexible substrates mainly uses polyimide (Polyimide, PI) film as the base material, which has the characteristics of cold resistance, UV resistance, softness, lightness and thinness. The base material made of polyimide can withstand high temperature of 500 ℃, and it will produce nitrogen gas when burning. Next, after coating a layer of adhesive on the substrate, it is bonded with copper foil to form a flexible copper foil substrate. The substrate bonded with copper foil becomes a flexible substrate after circuit development.

请参阅图1,图1绘示一公知柔性基板1的示意图。该柔性基板1供一半导体管芯(未绘示于图中)封装用。该柔性基板1包含一柔性绝缘膜(Flexibleinsulating film)10。该柔性绝缘膜10其上具有一通常呈矩形的管芯安装区(Diemounting area)12。也就是说,该管芯安装区12定义两个第一边缘(Edge)122、两个垂直于该第一边缘122的第二边缘124以及该第一边缘122与该第二边缘124交接的四个角部(Corner)。在图1中,仅绘示出两个角部。Please refer to FIG. 1 , which is a schematic diagram of a conventional flexible substrate 1 . The flexible substrate 1 is used for packaging a semiconductor die (not shown in the figure). The flexible substrate 1 includes a flexible insulating film (Flexible insulating film) 10 . The flexible insulating film 10 has a generally rectangular die mounting area (Diemounting area) 12 thereon. That is to say, the die mounting area 12 defines two first edges (Edge) 122, two second edges 124 perpendicular to the first edges 122, and four intersections of the first edges 122 and the second edges 124. Corner. In Fig. 1, only two corners are depicted.

该柔性基板1其上具有多根第一功能引脚(Functional lead)14、四根第一虚拟引脚(Dummy lead)142、多根第二功能引脚16以及四根第二虚拟引脚162。在图1中,仅绘示出两根第一虚拟引脚142及两根第二虚拟引脚162。该多根第一功能引脚14形成于该柔性绝缘膜10上的第一边缘122处,用以提供该半导体管芯电气连接。该多根第二引脚16形成于该柔性绝缘膜10的该第二边缘124处,用以提供该半导体管芯电气连接。每一根第一虚拟引脚142形成于该柔性绝缘膜10上的该管芯安装区12的一个角部处,并且被安置邻近一群组第一功能引脚14,用以支撑该半导体管芯。每一根第一虚拟引脚142区分为一个第一前区段1422以及一个第一后区段1424,如图1所示。每一根第二虚拟162引脚形成于该柔性绝缘膜10上的该管芯安装区12的一个角部处,并且被安置邻近一根第一虚拟引脚142以及一组第二功能引脚16,用以支撑该半导体管芯。每一根第二虚拟引脚162区分为一第二前区段1622以及一第二后区段1624。The flexible substrate 1 has a plurality of first functional leads (Functional leads) 14, four first dummy leads (Dummy leads) 142, a plurality of second functional leads 16 and four second dummy leads 162. . In FIG. 1 , only two first dummy pins 142 and two second dummy pins 162 are shown. The plurality of first functional pins 14 are formed at the first edge 122 on the flexible insulating film 10 for providing electrical connection to the semiconductor die. The plurality of second pins 16 are formed at the second edge 124 of the flexible insulating film 10 for providing electrical connection to the semiconductor die. Each first dummy pin 142 is formed at a corner of the die mounting area 12 on the flexible insulating film 10, and is arranged adjacent to a group of first functional pins 14 for supporting the semiconductor tube. core. Each first dummy pin 142 is divided into a first front section 1422 and a first rear section 1424 , as shown in FIG. 1 . Each second dummy 162 pin is formed at a corner of the die mounting area 12 on the flexible insulating film 10, and is positioned adjacent to a first dummy pin 142 and a set of second function pins 16, used to support the semiconductor die. Each second dummy pin 162 is divided into a second front section 1622 and a second rear section 1624 .

需强调的是,如图1所示,在该管芯安装区12之外,每一根第一虚拟引脚142的第一前区段1422与相邻的第二虚拟引脚162的第二前区段1622相连接,并且每一根第一虚拟引脚142的第一后区段1424与相邻的第二虚拟引脚162的第二后区段1624相连接。It should be emphasized that, as shown in FIG. 1, outside the die mounting area 12, the first front section 1422 of each first dummy pin 142 is connected to the second section of the adjacent second dummy pin 162. The front section 1622 is connected, and the first rear section 1424 of each first dummy pin 142 is connected with the second rear section 1624 of the adjacent second dummy pin 162 .

一般而言,通过一内引脚接合(Inner Lead Bonding,ILB)工艺,该柔性基板1上的所述第一功能引脚14与所述第二功能引脚16与该半导体管芯上的多个凸块热压接合。接着,执行一封胶工艺以将一液体树脂涂敷于该半导体管芯上。并且在约摄氏100度或更高的温度中,放置好几个小时以硬化该液体树脂使其密封该半导体管芯以及所述第一功能引脚14与所述第二功能引脚16。Generally speaking, through an inner lead bonding (Inner Lead Bonding, ILB) process, the first functional pin 14 and the second functional pin 16 on the flexible substrate 1 are connected to the multiple pins on the semiconductor die. bump thermocompression bonding. Next, an encapsulation process is performed to coat a liquid resin on the semiconductor die. And at a temperature of about 100 degrees Celsius or higher, it is left for several hours to harden the liquid resin to seal the semiconductor die and the first functional pin 14 and the second functional pin 16 .

由上述描述可以清楚地看出,与柔性较好的柔性绝缘膜10相比,刚性较高的第一虚拟引脚142结合第二虚拟引脚162会将工艺过程中施加于管芯安装区12的第一边缘122处的应力传导至该管芯安装区12的第二边缘124处,并且将工艺过程中施加于管芯安装区12的第二边缘124处的应力传导至该管芯安装区12的第一边缘124处。运用上述柔性基板1在封装半导体管芯时,会经过多次高低温变换的工艺。因此,在温度与压力作用之下,位于管芯安装区12的第一边缘122处的第一功能引脚14经由第一虚拟引脚142与第二虚拟引脚162会承受来自邻近第二边缘124处的侧向拉力,而位于管芯安装区12的第二边缘124处的第二功能引脚16由第一虚拟引脚142与第二虚拟引脚162会承受来自邻近第一边缘122处的侧向拉力。因此,执行过内引脚接合制成的柔性基板1,常发生柔性绝缘膜10挠曲,甚至造成功能引脚、虚拟引脚移位或断裂等不愿见到的情况。尤其是,一般的柔性绝缘膜10其管芯安装区12的第一边缘122(较长边)与第二边缘124(较短边)于工艺过程中,其热胀冷缩以及受力程度不同,更加会发生柔性绝缘膜10挠曲,甚至造成功能引脚、虚拟引脚移位或断裂等不愿见到的情况。It can be clearly seen from the above description that, compared with the more flexible flexible insulating film 10, the first dummy lead 142 with higher rigidity combined with the second dummy lead 162 will apply the process to the die mounting area 12. The stress at the first edge 122 of the die mounting area 12 is transmitted to the second edge 124 of the die mounting area 12, and the stress applied to the second edge 124 of the die mounting area 12 during the process is transmitted to the die mounting area 12 at the first edge 124 . When using the above-mentioned flexible substrate 1 to package the semiconductor die, it will go through multiple high and low temperature switching processes. Therefore, under the action of temperature and pressure, the first functional pins 14 located at the first edge 122 of the die mounting area 12 will be subjected to pressure from adjacent second edges via the first dummy pins 142 and the second dummy pins 162. 124, and the second functional pin 16 located at the second edge 124 of the die mounting area 12 will bear the force from adjacent to the first edge 122 by the first dummy pin 142 and the second dummy pin 162. lateral tension. Therefore, in the flexible substrate 1 made by internal pin bonding, the flexible insulating film 10 often bends, and even causes undesirable situations such as displacement or breakage of functional pins and dummy pins. In particular, the first edge 122 (the longer side) and the second edge 124 (the shorter side) of the die mounting area 12 of the general flexible insulating film 10 undergo thermal expansion and contraction as well as different degrees of stress during the process. , the flexible insulating film 10 will be flexed, and even the functional pins and dummy pins will be shifted or broken, which is undesirable.

因此,本发明旨在提供一种供一半导体管芯封装用的柔性基板,根据本发明的柔性基板可以克服上述的问题。Therefore, the present invention aims to provide a flexible substrate for packaging a semiconductor die. The flexible substrate according to the present invention can overcome the above-mentioned problems.

发明内容 Contents of the invention

为了达成上述目的并且解决以上所讨论的缺点,本发明提供一种供一半导体管芯封装用的柔性基板。In order to achieve the above objects and solve the disadvantages discussed above, the present invention provides a flexible substrate for semiconductor die packaging.

根据本发明的一优选具体实施例的柔性基板,其供一半导体管芯封装之用。该柔性基板包含一柔性绝缘膜、多根第一功能引脚、一第一虚拟引脚、多根第二功能引脚以及一第二虚拟引脚。该柔性绝缘膜其上具有一管芯安装区。该管芯安装区定义一第一边缘、一垂直于该第一边缘的第二边缘以及该第一边缘与该第二边缘交接的一角部。该多根第一功能引脚形成于该柔性绝缘膜上的该第一边缘处,并且用以提供该半导体管芯电气连接。该第一虚拟引脚形成于该柔性绝缘膜上的该管芯安装区的该角部处,并且被安置邻近所述第一功能引脚,用以支撑该半导体管芯。该第一虚拟引脚区分为一第一前区段以及一第一后区段。该多根第二引脚形成于该柔性绝缘膜的该第二边缘处,并且用以提供该半导体管芯电气连接。该第二虚拟引脚形成于该柔性绝缘膜上的该管芯安装区的该角部处,并且被安置邻近该第一虚拟引脚以及所述第二功能引脚,用以支撑该半导体管芯。该第二虚拟引脚区分为一第二前区段以及一第二后区段。该柔性基板的特征在于在该管芯安装区之外该第一虚拟引脚的该第一前区段与该第二虚拟引脚的该第二前区段为隔离而非连接。A flexible substrate according to a preferred embodiment of the present invention is used for packaging a semiconductor die. The flexible substrate includes a flexible insulating film, multiple first functional pins, a first dummy pin, multiple second functional pins and a second dummy pin. The flexible insulating film has a die mounting area thereon. The die mounting area defines a first edge, a second edge perpendicular to the first edge, and a corner where the first edge meets the second edge. The plurality of first functional pins are formed at the first edge on the flexible insulating film, and are used for providing electrical connection to the semiconductor die. The first dummy pin is formed at the corner of the die mounting area on the flexible insulating film and is positioned adjacent to the first functional pin for supporting the semiconductor die. The first dummy pin area is divided into a first front segment and a first rear segment. The plurality of second pins are formed at the second edge of the flexible insulating film, and are used for providing electrical connection to the semiconductor die. The second dummy pin is formed at the corner of the die mounting area on the flexible insulating film, and is positioned adjacent to the first dummy pin and the second functional pin to support the semiconductor tube. core. The second dummy pin area is divided into a second front segment and a second rear segment. The flexible substrate is characterized in that the first front section of the first dummy lead and the second front section of the second dummy lead are isolated rather than connected outside the die mounting area.

根据本发明的另一优选具体实施例的柔性基板,其供一半导体管芯封装之用。该柔性基板包含一柔性绝缘膜、多根第一功能引脚、一第一虚拟引脚、多根第二功能引脚以及一第二虚拟引脚。该柔性绝缘膜其上具有一管芯安装区。该管芯安装区定义一第一边缘、一垂直于该第一边缘的第二边缘以及该第一边缘与该第二边缘交接的一角部。该多根第一功能引脚形成于该柔性绝缘膜上的该第一边缘处,并且用以提供该半导体管芯电气连接。该第一虚拟引脚形成于该柔性绝缘膜上的该管芯安装区的该角部处,并且被安置邻近所述第一功能引脚,用以支撑该半导体管芯。该第一虚拟引脚区分为一第一前区段以及一第一后区段,所述第一虚拟引脚的仅所述第一前区段的一部分延伸至所述管芯安装区中,并且所述第一前区段与所述第一后区段形成弯折状。该多根第二引脚形成于该柔性绝缘膜的该第二边缘处,并且用以提供该半导体管芯电气连接。该第二虚拟引脚形成于该柔性绝缘膜上的该管芯安装区的该角部处,并且被安置邻近该第一虚拟引脚以及所述第二功能引脚,用以支撑该半导体管芯。该第二虚拟引脚区分为一第二前区段以及一第二后区段,所述第二虚拟引脚的仅所述第二前区段的一部分延伸至所述管芯安装区中,并且所述第二前区段与所述第二后区段形成弯折状。该柔性基板的特征在于该第一虚拟引脚的该第一后区段与该第二虚拟引脚的该第二后区段为隔离而非连接。According to another preferred embodiment of the present invention, the flexible substrate is used for packaging a semiconductor die. The flexible substrate includes a flexible insulating film, multiple first functional pins, a first dummy pin, multiple second functional pins and a second dummy pin. The flexible insulating film has a die mounting area thereon. The die mounting area defines a first edge, a second edge perpendicular to the first edge, and a corner where the first edge meets the second edge. The plurality of first functional pins are formed at the first edge on the flexible insulating film, and are used for providing electrical connection to the semiconductor die. The first dummy pin is formed at the corner of the die mounting area on the flexible insulating film and is positioned adjacent to the first functional pin for supporting the semiconductor die. The first dummy pin area is divided into a first front section and a first rear section, only a part of the first front section of the first dummy pin extends into the die mounting area, And the first front section and the first rear section form a bent shape. The plurality of second pins are formed at the second edge of the flexible insulating film, and are used for providing electrical connection to the semiconductor die. The second dummy pin is formed at the corner of the die mounting area on the flexible insulating film, and is positioned adjacent to the first dummy pin and the second functional pin to support the semiconductor tube. core. The second dummy pin area is divided into a second front section and a second rear section, only a part of the second front section of the second dummy pin extends into the die mounting area, And the second front section and the second rear section form a bent shape. The flexible substrate is characterized in that the first rear section of the first dummy pin is isolated from but not connected to the second rear section of the second dummy pin.

关于本发明的优点与精神可以通过以下的发明详述及附图得到进一步的了解。The advantages and spirit of the present invention can be further understood through the following detailed description of the invention and the accompanying drawings.

附图说明 Description of drawings

图1为公知柔性基板1的示意图。FIG. 1 is a schematic diagram of a conventional flexible substrate 1 .

图2为根据本发明的一优选具体实施例的柔性基板2的示意图。FIG. 2 is a schematic diagram of a flexible substrate 2 according to a preferred embodiment of the present invention.

附图标记说明Explanation of reference signs

1、2:柔性基板           10、20:柔性绝缘膜1, 2: flexible substrate 10, 20: flexible insulating film

12、22:管芯安装区       122、222:第一边缘12, 22: Die mounting area 122, 222: First edge

124、224:第二边缘       14、24:第一功能引脚124, 224: second edge 14, 24: first function pin

142、242:第一虚拟引脚   1422、2422:第一前区段142, 242: first virtual pin 1422, 2422: first front section

1424、2424:第一后区段   16、26:第二功能引脚1424, 2424: the first rear section 16, 26: the second function pin

162、262:第二虚拟引脚   1622、2622:第二前区段162, 262: second virtual pin 1622, 2622: second front section

1624、2624:第二后区段1624, 2624: Second rear section

具体实施方式 Detailed ways

本发明提供一种供一半导体管芯封装用的柔性基板。请参阅图2,图2绘示出根据本发明的一优选具体实施例的柔性基板2,该柔性基板供一半导体管芯(未绘示于图中)封装之用。The invention provides a flexible substrate for packaging a semiconductor die. Please refer to FIG. 2 . FIG. 2 illustrates a flexible substrate 2 according to a preferred embodiment of the present invention. The flexible substrate is used for packaging a semiconductor die (not shown in the figure).

如图2所示,该柔性基板2包含一柔性绝缘膜20。该柔性绝缘膜20的厚度约在数十微米,并且具有可挠曲性。该柔性绝缘膜20其上具有一通常呈矩形的管芯安装区22。也就是说,该管芯安装区22定义两个第一边缘222、两个垂直于该第一边缘222的第二边缘224以及该第一边缘222与该第二边缘224交接的四个角部。在图2中,仅绘示出两个角部。As shown in FIG. 2 , the flexible substrate 2 includes a flexible insulating film 20 . The thickness of the flexible insulating film 20 is about tens of microns, and it is flexible. The flexible insulating film 20 has a generally rectangular die mounting area 22 thereon. That is to say, the die mounting area 22 defines two first edges 222, two second edges 224 perpendicular to the first edges 222, and four corners where the first edges 222 meet the second edges 224. . In Fig. 2, only two corners are depicted.

该柔性基板2其上具有多根第一功能引脚24、四根第一虚拟引脚242、多根第二功能引脚26以及四根第二虚拟引脚262。在图2中,仅绘示出两根第一虚拟引脚242及两根第二虚拟引脚262。该多根第一功能引脚24形成于该柔性绝缘膜20上的第一边缘222处,用以提供该半导体管芯电气连接。该多根第二引脚26形成于该柔性绝缘膜20的该第二边缘224处,用以提供该半导体管芯电气连接。每一根第一虚拟引脚242形成于该柔性绝缘膜20上的该管芯安装区22的一个角部处,并且被安置邻近一组第一功能引脚24,用以支撑该半导体管芯。每一根第一虚拟引脚242区分为一个第一前区段2422以及一个第一后区段2424,如图2所示。每一根第二虚拟262引脚形成于该柔性绝缘膜20上的该管芯安装区22的一个角部处,并且被安置邻近一根第一虚拟引脚242以及一群组第二功能引脚26,用以支撑该半导体管芯。每一根第二虚拟引脚262区分为一第二前区段2622以及一第二后区段2624。The flexible substrate 2 has multiple first functional pins 24 , four first dummy pins 242 , multiple second functional pins 26 and four second dummy pins 262 thereon. In FIG. 2 , only two first dummy pins 242 and two second dummy pins 262 are shown. The plurality of first functional pins 24 are formed at the first edge 222 on the flexible insulating film 20 for providing electrical connection to the semiconductor die. The plurality of second pins 26 are formed at the second edge 224 of the flexible insulating film 20 for providing electrical connection to the semiconductor die. Each first dummy pin 242 is formed at a corner of the die mounting area 22 on the flexible insulating film 20 and is positioned adjacent to a set of first functional pins 24 for supporting the semiconductor die. . Each first dummy pin 242 is divided into a first front section 2422 and a first rear section 2424 , as shown in FIG. 2 . Each second dummy 262 pin is formed at a corner of the die mounting area 22 on the flexible insulating film 20, and is positioned adjacent to a first dummy pin 242 and a group of second functional pins. The feet 26 are used to support the semiconductor die. Each second dummy pin 262 is divided into a second front section 2622 and a second rear section 2624 .

需强调的是,根据本发明的优选具体实施例的柔性基板2,在该管芯安装区22之外,其上每一根第一虚拟引脚242的第一前区段2422与相邻的第二虚拟引脚262的第二前区段2622为隔离而非连接,如图2所示。It should be emphasized that, according to the flexible substrate 2 of the preferred embodiment of the present invention, outside the die mounting area 22, the first front section 2422 of each first dummy pin 242 is connected to the adjacent The second front section 2622 of the second dummy pin 262 is isolated rather than connected, as shown in FIG. 2 .

同样地,可以通过一内引脚接合工艺,该柔性基板2上的所述第一功能引脚24与所述第二功能引脚26与该半导体管芯上的多个凸块热压接合。接着,一封胶工艺执行以将一液体树脂涂敷于该半导体管芯上。并且于约摄氏100度或更高的温度中,放置好几个小时以硬化该液体树脂使其密封该半导体管芯以及所述第一功能引脚24与所述第二功能引脚26。Likewise, the first functional pins 24 and the second functional pins 26 on the flexible substrate 2 may be thermocompressively bonded to a plurality of bumps on the semiconductor die through an internal pin bonding process. Next, an encapsulation process is performed to coat a liquid resin on the semiconductor die. And placed for several hours at a temperature of about 100 degrees Celsius or higher to harden the liquid resin to seal the semiconductor die and the first functional pin 24 and the second functional pin 26 .

由上述描述可以清楚地看出,相较于挠性较好的柔性绝缘膜20,刚性较高的第一虚拟引脚242结合第二虚拟引脚262仍有可能会将工艺过程中施加于管芯安装区22的第一边缘222处的应力传导至该管芯安装区22的第二边缘224处,并且有可能会将工艺过程中施加于管芯安装区22的第二边缘224处的应力传导至该管芯安装区22的第一边缘224处。但是,通过将每一根第一虚拟引脚242的第一前区段2422与相邻的第二虚拟引脚262的第二前区段2622隔离而非连接,明显地,可以大幅减缓因工艺过程中由热应力、压应力所引发的柔性绝缘膜20挠曲,甚至是功能引脚、虚拟引脚移位或断裂等不愿见到的情况。It can be clearly seen from the above description that, compared with the flexible insulating film 20 with better flexibility, the combination of the first dummy lead 242 with higher rigidity and the second dummy lead 262 may still apply pressure on the tube during the process. The stress at the first edge 222 of the die mounting area 22 is transmitted to the second edge 224 of the die mounting area 22, and may transfer the stress applied to the second edge 224 of the die mounting area 22 during the process. Conducted to the first edge 224 of the die mounting area 22 . However, by isolating rather than connecting the first front section 2422 of each first dummy pin 242 with the second front section 2622 of the adjacent second dummy pin 262, it is obvious that the process due to During the process, the flexible insulating film 20 is deflected caused by thermal stress and compressive stress, and even undesired situations such as functional pins and dummy pins are shifted or broken.

在一具体实施例中,根据本发明的柔性基板2,其上每一根第一虚拟引脚242的该第一后区段2424与相邻的第二虚拟引脚262的第二后区段2624为连结,如图2所示。在另一具体实施例中,根据本发明的柔性基板2,其上每一根第一虚拟引脚242的第一后区段2424与相邻的第二虚拟引脚262的第二后区段2624也为隔离而非连接。In a specific embodiment, according to the flexible substrate 2 of the present invention, the first rear section 2424 of each first dummy pin 242 on it is connected to the second rear section of the adjacent second dummy pin 262 2624 is a link, as shown in Figure 2. In another specific embodiment, according to the flexible substrate 2 of the present invention, the first rear section 2424 of each first dummy pin 242 on it is connected to the second rear section of the adjacent second dummy pin 262 2624 is also isolated rather than connected.

在一具体实施例中,根据本发明的柔性基板2,其上该管芯安装区22呈现一开孔(Open hole)。具有呈现开孔的管芯安装区22的柔性基板2即可应用于带载封装(Tape carrier package,TCP)工艺中。In a specific embodiment, according to the flexible substrate 2 of the present invention, the die mounting area 22 presents an open hole (Open hole). The flexible substrate 2 with the die mounting area 22 having openings can be applied in a tape carrier package (TCP) process.

在另一优选具体实施例中,该柔性基板大体上与图2中的柔性基板2相同。与图2中的柔性基板2不同,根据本发明的另一优选具体实施例的柔性基板,其特征在于每一根第一虚拟引脚的第一后区段与相邻的第二虚拟引脚的第二后区段为隔离而非连接。In another preferred embodiment, the flexible substrate is substantially the same as the flexible substrate 2 in FIG. 2 . Different from the flexible substrate 2 in FIG. 2, the flexible substrate according to another preferred embodiment of the present invention is characterized in that the first rear section of each first dummy pin is connected to the adjacent second dummy pin The second post-section of the isolating rather than connecting.

同样地,在一具体实施例中,根据本发明的另一优选具体实施例的柔性基板,其上每一根第一虚拟引脚的第一前区段与相邻的第二虚拟引脚的第二前区段相连结。Similarly, in a specific embodiment, according to another preferred specific embodiment of the present invention, the flexible substrate, the first front section of each first dummy pin on it and the adjacent second dummy pin The second front section is joined.

同样地,在一具体实施例中,根据本发明的另一优选具体实施例的柔性基板,其上该管芯安装区呈现一开孔。Likewise, in an embodiment, according to another preferred embodiment of the flexible substrate of the present invention, the die mounting area thereon presents an opening.

根据本发明的供半导体管芯封装用的柔性基板,利用改良位于不同方向的引脚间的连结方式,进而消除位于柔性基板角部处的所述引脚受工艺过程中的应力的拉扯。避免因横向与纵向的热胀冷缩程度不一,使位于柔性基板角部处的所述引脚因彼此牵连而造成柔性基板挠曲引脚的断裂,因此能增进封装的可靠性。According to the flexible substrate for semiconductor die packaging of the present invention, by improving the connection mode between the pins in different directions, the pins at the corners of the flexible substrate are eliminated from being pulled by stress during the process. This prevents the pins at the corners of the flexible substrate from interfering with each other due to the difference in thermal expansion and contraction in the horizontal direction and the vertical direction, thereby preventing the flexible substrate from being broken, thereby improving the reliability of the package.

通过以上优选具体实施例的详述,希望能更加清楚描述本发明的特征与精神,而并非以上述所公开的优选具体实施例来对本发明的范畴加以限制。相反地,其目的是希望能涵盖各种改变及具等同性的安排于本发明的权利要求书的范畴内。Through the detailed description of the preferred specific embodiments above, it is hoped that the features and spirit of the present invention can be described more clearly, rather than limiting the scope of the present invention by the preferred specific embodiments disclosed above. On the contrary, the intention is to cover various modifications and equivalent arrangements within the scope of the appended claims of the present invention.

Claims (6)

1、一种供半导体管芯封装用的柔性基板,所述柔性基板包含:1. A flexible substrate for semiconductor die packaging, the flexible substrate comprising: 柔性绝缘膜,所述柔性绝缘膜其上具有管芯安装区,所述管芯安装区定义第一边缘、垂直于所述第一边缘的第二边缘以及所述第一边缘与所述第二边缘交接的角部;a flexible insulating film having a die mounting area thereon, the die mounting area defining a first edge, a second edge perpendicular to the first edge, and the first edge and the second edge corners where edges meet; 多根第一功能引脚,所述多根第一功能引脚形成于所述柔性绝缘膜上的所述第一边缘处,所述第一功能引脚用以提供所述半导体管芯电气连接;a plurality of first functional pins, the plurality of first functional pins are formed at the first edge of the flexible insulating film, and the first functional pins are used to provide the electrical connection of the semiconductor die ; 第一虚拟引脚,所述第一虚拟引脚形成于所述柔性绝缘膜上的所述管芯安装区的所述角部处,并且所述第一虚拟引脚被安置邻近所述第一功能引脚,所述第一虚拟引脚用以支撑所述半导体管芯,所述第一虚拟引脚区分为第一前区段以及第一后区段;First dummy pins formed at the corners of the die mounting area on the flexible insulating film and disposed adjacent to the first dummy pins Functional pins, the first dummy pins are used to support the semiconductor die, the first dummy pins are divided into a first front section and a first rear section; 多根第二功能引脚,所述多根第二功能引脚形成于所述柔性绝缘膜的所述第二边缘处,所述第二功能引脚用以提供所述半导体管芯电气连接;以及a plurality of second functional pins, the plurality of second functional pins are formed at the second edge of the flexible insulating film, and the second functional pins are used to provide electrical connection to the semiconductor die; as well as 第二虚拟引脚,所述第二虚拟引脚形成于所述柔性绝缘膜上的所述管芯安装区的所述角部处,并且所述第二虚拟引脚被安置邻近所述第一虚拟引脚以及所述第二功能引脚,所述第二虚拟引脚用以支撑所述半导体管芯,所述第二虚拟引脚区分为第二前区段以及第二后区段;A second dummy pin is formed at the corner of the die mounting area on the flexible insulating film, and the second dummy pin is disposed adjacent to the first dummy pins and the second functional pins, the second dummy pins are used to support the semiconductor die, the second dummy pins are divided into a second front section and a second rear section; 其中其特征在于位在所述管芯安装区之外所述第一虚拟引脚的所述第一前区段与所述第二虚拟引脚的所述第二前区段为隔离而非连接。Wherein it is characterized in that the first front section of the first dummy pin located outside the die mounting area and the second front section of the second dummy pin are isolated rather than connected . 2、如权利要求1所述的柔性基板,其中,所述第一虚拟引脚的所述第一后区段与所述第二虚拟引脚的所述第二后区段为连结。2. The flexible substrate as claimed in claim 1, wherein the first rear section of the first dummy pin is connected to the second rear section of the second dummy pin. 3、如权利要求1所述的柔性基板,其中,所述管芯安装区呈现一开孔。3. The flexible substrate of claim 1, wherein the die mounting area presents an opening. 4、一种供半导体管芯封装用的柔性基板,所述柔性基板包含:4. A flexible substrate for semiconductor die packaging, the flexible substrate comprising: 柔性绝缘膜,所述柔性绝缘膜其上具有半导体管芯安装区,所述半导体管芯安装区定义第一边缘、垂直于所述第一边缘的第二边缘以及所述第一边缘与所述第二边缘交接的角部;A flexible insulating film having thereon a semiconductor die mounting region defining a first edge, a second edge perpendicular to the first edge, and a distance between the first edge and the the corner where the second edge meets; 多根第一功能引脚,所述多根第一功能引脚形成于所述柔性绝缘膜上的所述第一边缘处,所述第一功能引脚用以提供所述半导体管芯电气连接;a plurality of first functional pins, the plurality of first functional pins are formed at the first edge of the flexible insulating film, and the first functional pins are used to provide the electrical connection of the semiconductor die ; 第一虚拟引脚,所述第一虚拟引脚形成于所述柔性绝缘膜上的所述管芯安装区的所述角部处,并且所述第一虚拟引脚被安置邻近所述第一功能引脚,所述第一虚拟引脚用以支撑所述半导体管芯,所述第一虚拟引脚区分为第一前区段以及第一后区段,所述第一虚拟引脚的仅所述第一前区段的一部分延伸至所述管芯安装区中,并且所述第一前区段与所述第一后区段形成弯折状;First dummy pins formed at the corners of the die mounting area on the flexible insulating film and disposed adjacent to the first dummy pins Functional pins, the first virtual pins are used to support the semiconductor die, the first virtual pins are divided into a first front section and a first rear section, and only the first virtual pins A portion of the first front section extends into the die mounting area, and the first front section and the first rear section form a bend shape; 多根第二功能引脚,所述多根第二功能引脚形成于所述柔性绝缘膜的所述第二边缘处,所述第二功能引脚用以提供所述半导体管芯电气连接;以及a plurality of second functional pins, the plurality of second functional pins are formed at the second edge of the flexible insulating film, and the second functional pins are used to provide electrical connection to the semiconductor die; as well as 第二虚拟引脚,所述第二虚拟引脚形成于所述柔性绝缘膜上的所述管芯安装区的所述角部处,并且所述第二虚拟引脚被安置邻近所述第一虚拟引脚以及所述第二功能引脚,所述第二虚拟引脚用以支撑所述半导体管芯,所述第二虚拟引脚区分为第二前区段以及第二后区段,所述第二虚拟引脚的仅所述第二前区段的一部分延伸至所述管芯安装区中,并且所述第二前区段与所述第二后区段形成弯折状;A second dummy pin is formed at the corner of the die mounting area on the flexible insulating film, and the second dummy pin is disposed adjacent to the first dummy pins and the second functional pins, the second dummy pins are used to support the semiconductor die, the second dummy pins are divided into a second front section and a second rear section, so Only a part of the second front section of the second dummy pin extends into the die mounting area, and the second front section and the second rear section form a bent shape; 其中,其特征在于所述第一虚拟引脚的所述第一后区段与所述第二虚拟引脚的所述第二后区段为隔离而非连接。Wherein, it is characterized in that the first rear section of the first dummy pin and the second rear section of the second dummy pin are isolated instead of connected. 5、如权利要求4所述的柔性基板,其中,所述第一虚拟引脚的所述第一前区段与所述第二虚拟引脚的所述第二前区段为连结。5. The flexible substrate as claimed in claim 4, wherein the first front section of the first dummy lead is joined to the second front section of the second dummy lead. 6、如权利要求4所述的柔性基板,其中,所述管芯安装区呈现一开孔。6. The flexible substrate of claim 4, wherein the die mounting area presents an opening.
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JPH06163788A (en) * 1992-11-17 1994-06-10 Kyocera Corp Method of manufacturing package for storing semiconductor element
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