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TW201837321A - Rotating machine and rotors for use therein - Google Patents

Rotating machine and rotors for use therein Download PDF

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Publication number
TW201837321A
TW201837321A TW107108179A TW107108179A TW201837321A TW 201837321 A TW201837321 A TW 201837321A TW 107108179 A TW107108179 A TW 107108179A TW 107108179 A TW107108179 A TW 107108179A TW 201837321 A TW201837321 A TW 201837321A
Authority
TW
Taiwan
Prior art keywords
rotor
bearings
rotary machine
pump
machine according
Prior art date
Application number
TW107108179A
Other languages
Chinese (zh)
Inventor
麥可 亨利 諾斯
菲利浦 諾爾斯
Original Assignee
英商愛德華有限公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 英商愛德華有限公司 filed Critical 英商愛德華有限公司
Publication of TW201837321A publication Critical patent/TW201837321A/en

Links

Classifications

    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08Structural association with bearings
    • H02K7/086Structural association with bearings radially supporting the rotor around a fixed spindle; radially supporting the rotor directly
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01CROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/02Arrangements of bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/30Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members
    • F04C18/34Rotary-piston pumps specially adapted for elastic fluids having the characteristics covered by two or more of groups F04C18/02, F04C18/08, F04C18/22, F04C18/24, F04C18/48, or having the characteristics covered by one of these groups together with some other type of movement between co-operating members having the movement defined in group F04C18/08 or F04C18/22 and relative reciprocation between the co-operating members
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085Prime movers
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04Heating; Cooling; Heat insulation
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K9/00Arrangements for cooling or ventilating
    • H02K9/19Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil
    • H02K9/193Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil with provision for replenishing the cooling medium; with means for preventing leakage of the cooling medium
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/20Rotors
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/50Bearings
    • F04C2240/52Bearings for assemblies with supports on both sides
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/50Bearings
    • F04C2240/56Bearing bushings or details thereof
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04CROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00Components
    • F04C2240/60Shafts
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K1/00Details of the magnetic circuit
    • H02K1/06Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22Rotating parts of the magnetic circuit
    • H02K1/32Rotating parts of the magnetic circuit with channels or ducts for flow of cooling medium
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K16/00Machines with more than one rotor or stator
    • H02K16/02Machines with one stator and two or more rotors
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K5/00Casings; Enclosures; Supports
    • H02K5/04Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
    • H02K5/165Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields radially supporting the rotor around a fixed spindle; radially supporting the rotor directly
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K5/00Casings; Enclosures; Supports
    • H02K5/04Casings or enclosures characterised by the shape, form or construction thereof
    • H02K5/16Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields
    • H02K5/173Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields using bearings with rolling contact, e.g. ball bearings
    • H02K5/1737Means for supporting bearings, e.g. insulating supports or means for fitting bearings in the bearing-shields using bearings with rolling contact, e.g. ball bearings radially supporting the rotor around a fixed spindle; radially supporting the rotor directly

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

A rotating machine and rotor are disclosed. The rotating machine comprises: a stator; a rotor rotatable about an axis of rotation within the stator; at least one fixed supporting member comprising a shaft passing through the rotor and supporting the two bearings, the two bearings being mounted around the at least one fixed supporting member; wherein the rotor is rotatably mounted on an outer surface of the two bearings, and the two bearings are located towards opposing axial ends of the rotor.

Description

旋轉機及用於旋轉機之轉子Rotary machine and rotor for rotating machine

本發明係關於旋轉機及用於旋轉機之轉子之領域。The invention relates to the field of rotary machines and rotors for rotary machines.

本發明係關於旋轉機之領域,且在較佳實施例中係關於泵,且特定而言係關於真空泵。 需要仔細設計並製造旋轉機以便使移動零件彼此精確地協作。舉例而言,在徑向空隙過小時,徑向空隙可導致一旋轉機之移動零件卡住,而在徑向空隙過大時,徑向空隙可導致不良效能。愈來愈期望泵變得更小。一泵愈小,其必須旋轉愈快才能在一給定時間內泵送相同量之流體。較快旋轉可導致移動零件之穩定性較差,此在具有小空隙之情況下可導致問題。此外,增大之速度亦可導致增大之溫度,此可由於組件之不均勻膨脹且由於增大之磨損而導致問題。 習用泵(諸如圖1中所展示之泵)包括位於一定子10內之一轉子20,該轉子經安裝以在軸承30內旋轉。轉子之一增大之旋轉速度可導致轉子撓曲,且當接近轉子之共振頻率時,此撓曲可顯著增大。 針對增大之速度及溫度提供具有一經改良容限之一旋轉機將係合意的。The present invention relates to the field of rotating machines, and in the preferred embodiment relates to pumps, and in particular to vacuum pumps. Rotating machines need to be carefully designed and manufactured to allow the moving parts to collide with each other precisely. For example, when the radial clearance is too small, the radial clearance can cause the moving parts of a rotating machine to get stuck, and when the radial clearance is too large, the radial clearance can lead to poor performance. It is increasingly desirable to make the pump smaller. The smaller a pump, the faster it must be rotated to pump the same amount of fluid for a given period of time. Faster rotation can result in poorer stability of the moving parts, which can cause problems with small gaps. In addition, the increased speed can also result in increased temperatures, which can be problematic due to uneven expansion of the assembly and due to increased wear. A conventional pump, such as the pump shown in FIG. 1, includes a rotor 20 located within a stator 10 that is mounted for rotation within the bearing 30. An increased rotational speed of one of the rotors can cause the rotor to flex, and this deflection can increase significantly as it approaches the resonant frequency of the rotor. It would be desirable to provide a rotating machine with an improved tolerance for increased speed and temperature.

本發明之一第一態樣提供一種旋轉機,該旋轉機包括:一定子;一轉子,其可圍繞該定子內之一旋轉軸旋轉;該轉子可旋轉地安裝於兩個軸承上,該兩個軸承朝向該轉子之相對軸向端定位;至少一個固定支撐部件,其支撐該等軸承中之至少一者,該等軸承中之該至少一者圍繞該至少一個固定支撐部件安裝,使得該轉子可旋轉地安裝於該等軸承中之該至少一者之一外表面上;其中該至少一個固定支撐部件包括穿過該轉子之一軸件,該兩個軸承安裝於朝向該轉子之任一端定位的該軸件之部分上。 本發明之發明者認識到,轉子之共振頻率及剛度與其上安裝轉子之軸件之厚度或直徑有關;軸件之厚度之一增大會增大共振頻率及剛度兩者。然而,發明者亦認識到,軸件之一增大之厚度需要一增大之軸承大小且此導致較高功率消耗及旋轉機中所產生之增加之熱量。發明者藉由將轉子安裝於軸承中之至少一者之外表面上(而非以習用方式,安裝於軸承內表面內)以一簡單而精妙之方式解決了此等相互矛盾之問題。以此方式,相同大小之軸承可支撐一實質上較厚且因此較剛硬之軸件。 為了達成此,至少一個軸承圍繞一固定支撐部件安裝,且轉子安裝於軸承之外表面上,從而允許轉子支撐於外軸承直徑而非內軸承直徑上。以此方式,針對相同大小之軸承,可使用一增大之直徑之轉子支撐件。軸承之內座圈由固定部件支撐且因此係固定的,而外座圈支撐旋轉轉子並移動。此與習用軸承不同,在習用軸承中,外座圈係固定的,內座圈隨旋轉轉子軸件而移動。 轉子朝向任一軸向端安裝以增大對轉子橫向移動之阻力。就此而言,軸承各自遠離一中心位置而定位,使得在某些實施例中,轉子不延伸超出該等軸承,或者僅延伸超出該等軸承達小於轉子之軸向長度之5%之一小量。 此外,固定支撐部件係固定且不可旋轉並且穿過轉子之一軸件。此為轉子提供一穩健支撐。 應注意,習用地,軸承選擇通常因轉子動力學及對某一最小剛度之需求而被軸件直徑驅動,且此可導致軸承之負載能力顯著高於需要。藉由將轉子安裝於軸承中之至少一者之外表面上,軸承選擇可被軸承之負載能力更強烈地驅動。 應注意,轉子可安裝於朝向轉子之任一端之一軸承上或者安裝於朝向任一軸向端之複數個軸承上。軸承可具有若干種形式,且在某些實施例中,可為安裝於一殼體內之滾動元件軸承。 在某些實施例中,該至少一個固定支撐部件包括用於冷卻流體流之一冷卻流體入口、一冷卻流體流動路徑及一冷卻流體出口。 將軸承安裝於一固定支撐件上且允許轉子圍繞軸承旋轉之一個特別有利特徵在於,此提供為固定支撐件提供冷卻流體之機會,從而允許軸承及位於其附近的旋轉機之潛在其他特徵被冷卻。將一冷卻流體施加至經固定之一部件係一簡單問題,而將一冷卻流體施加至一旋轉部件要複雜得多。因此,將軸承安裝於一固定部件上而非安裝於轉子之旋轉軸件上提供將冷卻流體施加至此固定部件之一機會。若軸承不被允許變得過熱,則軸承將較佳地起作用且具有一較長壽命。軸承過熱可導致內部空隙改變且導致金屬變得較軟。此外,位於軸承附近之密封件亦可由冷卻流體冷卻,此同樣可導致一較長壽命且亦導致一較高效密封。就此而言,應注意,軸承在使用期間產生顯著熱量且藉由冷卻軸承之支撐部件,此熱量可被消散。冷卻流體可係能夠將熱量運走之任一流體,但在某些實施例中係水,水具有一高熱容量並且係便宜、無毒且易於獲得的。 在某些實施例中,該流體入口及該流體出口位於該軸件之相對軸向端處。在其他實施例中,入口及出口位於同一端處以用於冷卻整個軸件,或在每一端皆存在一入口及出口以獨立地冷卻軸件之每一端。 使流體入口及出口位於軸件之相對軸向端處允許冷卻流體流動穿過軸件且沿著軸件之整個長度(而非僅在軸承之區域中)傳遞熱量。此繼而對轉子提供一冷卻效應。就此而言,冷卻一旋轉機之定子係通常相當簡單的,而冷卻密封於機器內之轉子係較困難的。將轉子安裝於一固定軸件上且提供冷卻流體以穿過彼軸件係為轉子提供冷卻之一高效且便利之方式。在其他實施例中,入口及出口可位於同一端處,其中一流動路徑沿著軸件延續且向後到達與入口位於同一端處之冷卻流體出口。 在某些實施例中,該軸件在該等軸承安裝部分之間具有一中心部分,該中心部分之一外圓周接近於該轉子之一內圓周。 在軸件穿過轉子之情況下,軸件之中心部分之外圓周接近於轉子之一內圓周,從而允許對軸件之冷卻因對應表面之間的熱傳遞而對轉子具有一冷卻效應。就此而言,該等表面之間的距離應係足夠大的,使得轉子之任一撓曲不會致使該等表面接觸,同時係足夠低的以改良熱傳遞。就此而言,可設想介於100微米與3 mm之間的一距離。 在某些實施例中,該軸件之該中心部分具有比該等軸承安裝部分大之一直徑。 增大轉子內遠離軸承之軸件的直徑可係有利的。就此而言,在支撐軸承的情況下,一較窄軸件導致較小軸承及較低功率需求及較少加熱,然而在軸件正被冷卻的情況下,一較寬軸件可導致經改良熱傳遞及一較低溫度轉子。因此,在某些實施例中,當與安裝軸承之部分相比時,增大中心部分處之軸件的直徑可係有利的。 在某些實施例中,軸件之外表面可經粗糙化,使得軸件表面的熱傳遞得以改良。就此而言,增大表面積會增大此表面之熱傳遞,但亦可導致至少某些表面與轉子之間之一增大的距離。此又將在一定程度上減少轉子與軸件之間的熱傳遞。因此,在軸件之外表面上提供小鰭片(諸如一螺旋圖案)可改良熱傳遞,且可係有利的。 在某些實施例中,旋轉機包括至少一個其他轉子,該至少一個其他轉子可圍繞平行於該旋轉軸之至少一個其他旋轉軸旋轉,該至少一個其他轉子中之每一者係安裝於兩個其他軸承上,該等其他軸承中之至少一者係圍繞至少一個其他固定支撐部件安裝;其中該至少一個其他轉子中之每一者經可旋轉地安裝於該兩個其他軸承中之該至少一者之一外表面上,該兩個其他軸承係朝向該至少一個其他轉子之相對軸向端定位。 雖然本發明之實施例適用於單轉子機器,但該等實施例尤其亦適用於多轉子機器(諸如,雙轉子機器),其中兩個或兩個以上轉子在一定子內旋轉,且其中每一轉子係安裝於固定支撐部件上之軸承上。特定而言,此類雙轉子機器或多轉子機器需要小空隙及因此高容限,且將轉子之至少一端安裝於軸承之外表面上並藉此提供較小撓曲及較大剛度可係極有利的。 在某些實施例中,轉子、固定支撐部件及轉子之軸承與至少一個其他轉子對應且具有相同特徵。 在某些實施例中,該轉子及該其他轉子各自包括徑向突出部且經安裝使得該等徑向突出部相互嚙合。 諸多雙轉子機器或多轉子機器在其轉子上具有相互嚙合之徑向突出部,該等相互嚙合之徑向突出部用以泵送一流體,且此等類型之旋轉機尤其適用於本發明之實施例。 在某些實施例中,旋轉機進一步包括一馬達及由該馬達驅動的用於驅動該轉子之齒輪構件,該馬達相對於該轉子而偏置。 轉子可由一馬達驅動且此馬達可相對於轉子而偏置,其中齒輪用以驅動轉子。在此係一雙轉子機器之情況下,則齒輪將驅動兩個轉子。 在其他實施例中,馬達可直接耦合至轉子;且在存在雙轉子之情況下,則齒輪可用以驅動第二轉子。 在某些實施例中,該轉子在該轉子之任一端上於一經定義非零徑向位置處包括軸向突出部,該等軸向突出部形成一中空圓柱形形狀,該等軸向突出部之一內圓周安裝於該等軸承中之一者之一外圓周上。 為了將馬達安裝於軸承之外表面上,轉子可在一特定徑向位置處具有軸向突出部,該等軸向突出部將具有一中空圓柱體形式且可圍繞軸承安裝。此等突出部提供一安裝表面以用於在軸承之外表面上支撐轉子。 在某些實施例中,該等齒輪構件經構形以接觸該等軸向突出部以驅動該轉子。 在存在用以將轉子安裝於軸承上之軸向突出部之情況下,此等軸向突出部可由齒輪構件驅動以旋轉轉子。 在某些實施例中,該等軸承作為一緊密空隙配合安裝於該固定支撐部件上,且該轉子作為一輕微干涉配合安裝於該等軸承上。 為了提供其中軸承之外表面支撐旋轉部件之軸承,則將該等軸承作為一緊密空隙配合安裝於固定內部支撐部件上且將外轉子作為一輕微干涉配合而安裝使得該外轉子可自由旋轉可係有利的。緊密空隙配合允許由於熱膨脹而引起的軸承在軸件上之軸向移動。輕微干涉配合確保外座圈隨著轉子旋轉。術語「輕微」指示允許發生熱膨脹之某一餘地。 雖然本發明之實施例適用於若干個不同旋轉機,但該等實施例尤其適用於一真空泵,在該真空泵中,空隙較小且因此減小一轉子之撓性係有利的,尤其係在轉子正快速地旋轉或處於高溫條件下時。 真空泵可為若干種不同類型之泵中之一者,該等泵包含諸如一螺旋(單端或雙端)泵或者魯氏(roots)泵或鼓風機之一乾式泵、一渦輪泵或者一葉片泵。在某些實施例中,該泵包括以下各項中之一者:在兩個軸向端處皆包括排放出口之一雙端泵、在一個軸向端處具有一排放口之一單端泵以及在相對徑向側具有一入口之一泵。 一雙端泵可係有利的,此乃因當在兩個方向上發生壓縮時該雙端泵幫助管理熱負載,且軸件上之機械負載在任一方向上且在兩個軸承上相等。然而,與此一泵相關聯之熱量可為高的且此等泵往往係較昂貴的。因此,為該等泵提供額外冷卻設施以及一較剛硬安裝構件可係有利的並且在此一泵中係值得的。 本發明之一第二態樣提供一種用於一泵之轉子,該轉子在該轉子之兩個軸向端上於一經定義非零徑向位置處包括一軸向突出部,該等軸向突出部中之每一者形成一中空圓柱形形狀且經構形以經由位於該中空圓柱形形狀內之軸承而可旋轉地安裝該轉子,其中該轉子包括穿過該轉子之一中心之一圓柱形孔,使得一軸件可穿過該轉子。 在適於安裝於軸承之外表面上之每一端處包括中空圓柱形安裝突出部之一轉子允許軸承被安裝於固定支撐件上且允許充當轉子之支撐軸件之至少一個突出部比安裝於軸承之內表面上之一支撐軸件(如習用情形)寬。轉子之支撐軸件中之一增大之直徑提供剛度及穩定性且增大其共振頻率。 轉子在兩端處皆包括軸向突出部,該等突出部形成中空圓柱形形狀且經構形以經由位於該中空圓柱形形狀內之軸承而可旋轉地安裝該轉子。 轉子係中空的,包括穿過該轉子之一中心之一圓柱形空間,使得一軸件可穿過該轉子。 在轉子具有一中空中心之情況下,則一軸件可穿過該中心。此減少用於製造轉子所需要之材料且減小其重量。此外,在使用冷卻流體之情況下,其為冷卻流體提供用以流動穿過轉子且沿著轉子之長度提供有效冷卻之一潛在通路。 在隨附獨立技術方案及附屬技術方案中陳述其他特定及較佳態樣。附屬技術方案之特徵可視情況與獨立技術方案之特徵組合,且與除申請專利範圍中明確陳述之彼等特徵以外的特徵組合。 在一設備特徵被闡述為可操作以提供一功能之情況下,將瞭解,此包含提供彼功能或者經調適或經構形以提供彼功能之一設備特徵。A first aspect of the present invention provides a rotary machine comprising: a stator; a rotor rotatable about a rotation axis of the stator; the rotor rotatably mounted on two bearings, the two Bearings are positioned toward opposite axial ends of the rotor; at least one fixed support member supporting at least one of the bearings, the at least one of the bearings being mounted about the at least one fixed support member such that the rotor Rotatablely mounted on an outer surface of one of the at least one of the bearings; wherein the at least one fixed support member includes a shaft member that passes through the rotor, the two bearings being mounted for positioning toward either end of the rotor On the part of the shaft. The inventors of the present invention have recognized that the resonant frequency and stiffness of the rotor are related to the thickness or diameter of the shaft member on which the rotor is mounted; an increase in one of the thicknesses of the shaft member increases both the resonant frequency and the stiffness. However, the inventors have also recognized that an increased thickness of one of the shaft members requires an increased bearing size and this results in higher power consumption and increased heat generated in the rotating machine. The inventors have solved these conflicting problems in a simple and subtle manner by mounting the rotor on the outer surface of at least one of the bearings (rather than in a conventional manner, mounted within the inner surface of the bearing). In this way, bearings of the same size can support a substantially thicker and therefore stiffer shaft member. To achieve this, at least one of the bearings is mounted about a fixed support member and the rotor is mounted on the outer surface of the bearing to allow the rotor to be supported on the outer bearing diameter rather than the inner bearing diameter. In this way, an increased diameter rotor support can be used for bearings of the same size. The inner race of the bearing is supported by the fixed component and thus fixed, while the outer race supports the rotating rotor and moves. This is different from conventional bearings in which the outer race is fixed and the inner race moves with the rotating rotor shaft. The rotor is mounted towards either axial end to increase the resistance to lateral movement of the rotor. In this regard, the bearings are each positioned away from a central position such that in certain embodiments, the rotor does not extend beyond the bearings, or only extends beyond the bearings by a factor of less than 5% of the axial length of the rotor. . Furthermore, the fixed support member is fixed and non-rotatable and passes through one of the shaft members of the rotor. This provides a robust support for the rotor. It should be noted that, conventionally, bearing selection is typically driven by the shaft diameter due to rotor dynamics and the need for a certain minimum stiffness, and this can result in bearings having significantly higher load capacity than needed. By mounting the rotor on the outer surface of at least one of the bearings, the bearing selection can be driven more strongly by the load capacity of the bearing. It should be noted that the rotor can be mounted on one of the bearings facing either end of the rotor or on a plurality of bearings facing either axial end. The bearing can have several forms and, in some embodiments, can be a rolling element bearing mounted within a housing. In certain embodiments, the at least one fixed support member includes a cooling fluid inlet for cooling fluid flow, a cooling fluid flow path, and a cooling fluid outlet. A particularly advantageous feature of mounting the bearing on a stationary support and allowing the rotor to rotate about the bearing is that this provides a chance to provide a cooling fluid for the stationary support, thereby allowing the bearing and other potentially features of the rotating machine located adjacent thereto to be cooled. . Applying a cooling fluid to a fixed component is a simple matter, and applying a cooling fluid to a rotating component is much more complicated. Therefore, mounting the bearing on a stationary component rather than on the rotating shaft of the rotor provides an opportunity to apply cooling fluid to the stationary component. If the bearing is not allowed to become overheated, the bearing will preferably function and have a longer life. Overheating of the bearing can cause internal voids to change and cause the metal to become soft. In addition, the seal located near the bearing can also be cooled by the cooling fluid, which can also result in a longer life and also results in a more efficient seal. In this regard, it should be noted that the bearing generates significant heat during use and this heat can be dissipated by cooling the support members of the bearing. The cooling fluid can be any fluid that is capable of transporting heat away, but in some embodiments is water, the water has a high heat capacity and is inexpensive, non-toxic, and readily available. In certain embodiments, the fluid inlet and the fluid outlet are located at opposite axial ends of the shaft member. In other embodiments, the inlet and outlet are located at the same end for cooling the entire shaft member, or there is an inlet and an outlet at each end to independently cool each end of the shaft member. Having the fluid inlet and outlet at the opposite axial ends of the shaft allows cooling fluid to flow through the shaft and transfer heat along the entire length of the shaft, rather than only in the region of the bearing. This in turn provides a cooling effect to the rotor. In this regard, cooling the stator of a rotating machine is generally quite simple, and cooling the rotor that is sealed within the machine is more difficult. Mounting the rotor on a stationary shaft member and providing a cooling fluid to provide cooling to the rotor through the shaft member is an efficient and convenient way. In other embodiments, the inlet and outlet may be located at the same end, with a flow path continuing along the shaft member and rearwardly reaching the cooling fluid outlet at the same end as the inlet. In some embodiments, the shaft member has a central portion between the bearing mounting portions, one of the central portions having an outer circumference proximate to an inner circumference of the rotor. In the case where the shaft member passes through the rotor, the outer circumference of the central portion of the shaft member is close to the inner circumference of one of the rotors, thereby allowing the cooling of the shaft member to have a cooling effect on the rotor due to heat transfer between the corresponding surfaces. In this regard, the distance between the surfaces should be sufficiently large that any deflection of the rotor does not cause the surfaces to contact, while being sufficiently low to improve heat transfer. In this regard, a distance between 100 microns and 3 mm can be envisaged. In some embodiments, the central portion of the shaft member has a diameter that is larger than the bearing mounting portions. It may be advantageous to increase the diameter of the shaft member within the rotor that is remote from the bearing. In this regard, in the case of a support bearing, a narrower shaft member results in a smaller bearing and lower power requirements and less heating, whereas in the case where the shaft member is being cooled, a wider shaft member can result in an improvement. Heat transfer and a lower temperature rotor. Thus, in certain embodiments, it may be advantageous to increase the diameter of the shaft member at the central portion when compared to the portion in which the bearing is mounted. In some embodiments, the outer surface of the shaft member can be roughened such that heat transfer to the surface of the shaft member is improved. In this regard, increasing the surface area increases the heat transfer of the surface, but can also result in an increased distance from at least some of the surface to the rotor. This in turn will reduce the heat transfer between the rotor and the shaft member to some extent. Thus, providing small fins (such as a spiral pattern) on the outer surface of the shaft member can improve heat transfer and can be advantageous. In certain embodiments, the rotary machine includes at least one other rotor that is rotatable about at least one other rotational axis that is parallel to the rotational axis, each of the at least one other rotor being mounted to two In other bearings, at least one of the other bearings is mounted about at least one other fixed support member; wherein each of the at least one other rotor is rotatably mounted to the at least one of the two other bearings On one of the outer surfaces, the two other bearings are positioned toward opposite axial ends of the at least one other rotor. While embodiments of the present invention are applicable to single rotor machines, such embodiments are particularly applicable to multi-rotor machines (such as dual rotor machines) in which two or more rotors are rotated within a stator, and each The rotor system is mounted on a bearing on a fixed support member. In particular, such dual rotor machines or multi-rotor machines require small clearances and therefore high tolerances, and mount at least one end of the rotor on the outer surface of the bearing and thereby provide less deflection and greater stiffness. advantageous. In certain embodiments, the rotor, the stationary support member, and the bearings of the rotor correspond to at least one other rotor and have the same features. In certain embodiments, the rotor and the other rotor each include a radial projection and are mounted such that the radial projections engage one another. A plurality of dual-rotor machines or multi-rotor machines have intermeshing radial projections on their rotors, the intermeshing radial projections for pumping a fluid, and such types of rotary machines are particularly suitable for use in the present invention Example. In some embodiments, the rotary machine further includes a motor and a gear member driven by the motor for driving the rotor, the motor being biased relative to the rotor. The rotor can be driven by a motor and the motor can be biased relative to the rotor, wherein the gears are used to drive the rotor. In the case of a twin rotor machine, the gear will drive the two rotors. In other embodiments, the motor can be directly coupled to the rotor; and in the presence of a dual rotor, the gear can be used to drive the second rotor. In certain embodiments, the rotor includes an axial projection at a defined non-zero radial position on either end of the rotor, the axial projections forming a hollow cylindrical shape, the axial projections One of the inner circumferences is mounted on one of the outer circumferences of one of the bearings. In order to mount the motor on the outer surface of the bearing, the rotor can have axial projections at a particular radial position, the axial projections will have the form of a hollow cylinder and can be mounted around the bearing. These projections provide a mounting surface for supporting the rotor on the outer surface of the bearing. In some embodiments, the gear members are configured to contact the axial projections to drive the rotor. Where there are axial projections for mounting the rotor on the bearing, the axial projections can be driven by the gear member to rotate the rotor. In some embodiments, the bearings are mounted to the fixed support member as a tight clearance fit and the rotor is mounted to the bearings as a slight interference fit. In order to provide bearings in which the outer surface of the bearing supports the rotating member, the bearings are mounted as a tight clearance fit on the fixed inner support member and the outer rotor is mounted as a slight interference fit such that the outer rotor is freely rotatable advantageous. The tight clearance fit allows for axial movement of the bearing on the shaft due to thermal expansion. A slight interference fit ensures that the outer race rotates with the rotor. The term "slight" indicates a certain allowance for allowing thermal expansion. Although embodiments of the invention are applicable to a number of different rotating machines, such embodiments are particularly suitable for use in a vacuum pump in which the clearance is small and thus the flexibility of a rotor is advantageous, particularly in the rotor When rotating rapidly or under high temperature conditions. The vacuum pump can be one of several different types of pumps, such as a spiral (single-ended or double-ended) pump or a dry pump of a roots pump or blower, a turbo pump or a vane pump . In certain embodiments, the pump comprises one of: a double ended pump comprising one of the discharge outlets at both axial ends and a single ended pump having a discharge port at one axial end And a pump having an inlet on the opposite radial side. A double-ended pump can be advantageous because the double-ended pump helps manage the thermal load when compression occurs in both directions, and the mechanical load on the shaft member is equal in either direction and on both bearings. However, the heat associated with such a pump can be high and such pumps tend to be relatively expensive. Therefore, providing additional cooling facilities for the pumps and a stiffer mounting member can be advantageous and is worthwhile in this pump. A second aspect of the present invention provides a rotor for a pump including an axial projection at a defined non-zero radial position on both axial ends of the rotor, the axial projections Each of the portions forms a hollow cylindrical shape and is configured to rotatably mount the rotor via a bearing located within the hollow cylindrical shape, wherein the rotor includes a cylindrical shape through one of the centers of the rotor The hole allows a shaft member to pass through the rotor. The rotor including one of the hollow cylindrical mounting projections at each end adapted to be mounted on the outer surface of the bearing allows the bearing to be mounted on the stationary support and allows at least one projection of the support shaft that acts as the rotor to be mounted to the bearing One of the inner support surfaces of the shaft member (as is customary) is wide. The increased diameter of one of the support shafts of the rotor provides rigidity and stability and increases its resonant frequency. The rotor includes axial projections at both ends, the projections forming a hollow cylindrical shape and configured to rotatably mount the rotor via bearings located within the hollow cylindrical shape. The rotor is hollow and includes a cylindrical space through one of the centers of the rotor such that a shaft member can pass through the rotor. Where the rotor has a hollow center, a shaft member can pass through the center. This reduces the material required to make the rotor and reduces its weight. Moreover, where a cooling fluid is used, it provides a potential path for the cooling fluid to flow through the rotor and provide effective cooling along the length of the rotor. Other specific and preferred aspects are set forth in the accompanying independent technical solutions and the associated technical solutions. The features of the subsidiary technical solutions may be combined with the features of the independent technical solutions and combined with features other than those explicitly stated in the scope of the patent application. Where a device feature is illustrated as being operable to provide a function, it will be appreciated that this includes providing the functionality or adapting or configuring to provide one of the features of the device.

在更詳細地論述實施例之前,首先將提供一概述。 如先前所注意,一旋轉機上之一小直徑軸件可為一轉子提供一相對低之共振頻率,該相對低之共振頻率可使運行速度折衷。隨著諸如泵或壓縮器等旋轉機變得更小,旋轉機需要更高運行速度來移動相同量之流體。隨著速度增大,可能接近轉子之自然頻率,此導致不穩定性。特定而言,轉子之撓曲導致固定零件與移動零件之間之必要空隙的損失。轉子之任何移動對於具有小空隙的機器而言皆係特別不利的。增大軸件之直徑可改良軸件之剛度,且增大軸件之自然頻率,然而,增大軸件的直徑亦增大其上安裝軸件之軸承的大小,此導致所產生之熱量及所需要之功率之一增大。此已藉由提供一轉子來解決,該轉子係安裝於軸承之一外表面上,從而致使外座圈隨著轉子旋轉且內座圈被固定。以此方式,提供轉子之一增大的安裝直徑,而不會對應地增大軸承的大小。 為了提供可以此方式安裝之一轉子,使用在任一端上具有支撐短軸或突出部之轉子,該等支撐短軸或突出部各自具有一中空圓柱形形狀。此一轉子係安裝於軸承之外表面上,圓柱形短軸環繞該等軸承且允許旋轉。 以此方式安裝轉子之一額外益處在於,可使用冷卻流體來冷卻固定支撐部件,且因此冷卻軸承及其他接近組件(諸如密封件)。此外,提供一固定支撐部件作為延伸穿過轉子之一軸件允許任一冷卻流體沿著整個軸件流動而對整個轉子具有一冷卻效應。一旋轉裝置內(特定而言,一真空泵內)之轉子係難以冷卻的,而以此方式提供冷卻可係有利的。 圖2展示具有水冷卻12之一定子10,該定子環繞兩個泵轉子20及22,該等泵轉子係相互嚙合之泵轉子,且其本身被安裝於軸承30上。泵轉子20及22係經由各別軸向突出部21及23而安裝,該等軸向突出部具有一中空圓柱形形式且自泵轉子之一外軸向邊緣突出。此等軸向突出部21、23係支撐於軸承30之外表面上,且圍繞此等軸承旋轉。 軸承30安裝於一固定軸件40上,該固定軸件具有一冷卻流體入口41及出口42。此冷卻流體允許軸承被冷卻且幫助保護軸承免於過熱。在此實施例中,在定子10與軸承30之間存在軸件密封件50,該等軸件密封件用以阻止或至少防止軸承周圍之油洩漏至泵主體中。在某些實施例中,為了避免轉子上之一額外熱負載,軸件密封件50可併入有活塞環而非唇狀密封件。在其他實施例中,密封件可呈轉子與頂板之間的一機械面密封件之形式,而非轉子之外側上之一徑向唇狀密封件之形式。在此一情形中,頂板將具有與所展示之頂板稍微不同之一形狀以允許安裝機械面密封件。 圖2亦展示齒輪60,該齒輪用以經由軸向突出部21及23而驅動轉子,從而致使轉子在軸承30上旋轉。 因此,在此實施例中,泵轉子20、22經由軸承30而支撐於一固定之經水冷卻軸件40上。軸承之內表面作為一緊密空隙配合安裝於軸件上,而軸承之外表面與其支撐之轉子具有一輕微干涉配合。此使轉子20、22及軸向突出部21、23能夠具有比一習用轉子軸件大之一直徑,此乃因軸承位於支撐軸件內側而非位於軸件之外表面上(如先前技術中之情形) (參見圖1)。 與一習用總成相比,使用較大直徑軸件會增大旋轉塊之自然頻率。 應注意,關於具有兩個或兩個以上轉子之機器,材料之仔細選擇將允許頂板、轉子及定子之熱膨脹經匹配使得可在不同操作條件(其具有不同熱負載條件)下維持轉子與定子之間的徑向空隙。舉例而言,在某些情形中,定子可為鐵或鋼且殼體為鋁,且在此一情形中應當小心,使得在殼體維持處於100℃且定子維持處於200℃之情況下,則軸件與定子內孔將保持彼此對準。在實踐中,鋁殼體亦將盛放用於潤滑軸承及齒輪之油且將需要被維持處於80℃左右作為一最高溫度。 在圖2中,經水冷卻之軸承支撐件用以冷卻離開軸承之油。 在此實施例中,軸承在轉子中係一輕微干涉配合且在軸承支撐件上具有一緊密空隙配合。軸承預負載使用一彈簧施加於支撐軸件上之內座圈,該彈簧可為一波形彈簧或一螺旋彈簧。 圖2展示一雙端泵設計,該雙端泵設計經設計以在兩端處皆具有排放口。此一設計幫助管理轉子及定子上之熱負載以及軸承上之軸向負載。如可見,固定軸承支撐部件40呈一軸件之形式,其中冷卻流體流動至一入口41中且在該軸件之相對軸向端處自一出口42流出。以此方式,冷卻流體不僅為軸承提供一冷卻效應,而且為轉子提供某種程度之冷卻。轉子安裝於軸承上且經塑形使得在轉子之主中心主體之內直徑與固定軸件之間存在一窄間隙。該窄間隙允許轉子及/或軸件之某種程度之撓曲而不會使轉子接觸軸件且卡住泵,同時亦提供兩個主體之間的熱傳遞。 圖3展示在頂部及底部處具有一入口(未展示)之一魯氏鼓風機設計。魯氏鼓風機泵可在使用期間顯著變熱,此可導致過高軸承溫度。因此,為魯氏鼓風機泵提供額外冷卻可係極有利的。在此實施例中,如在圖2之實施例中,軸承30安裝於一貫通軸件40上,該貫通軸件不僅為軸承及軸承周圍之密封件50提供冷卻,而且為轉子20、22自身提供冷卻。 圖4展示由一偏置馬達70驅動之一魯氏鼓風機泵。偏置馬達70經由齒輪60而驅動泵之轉子20、22。 圖5展示其中馬達70直接耦合至轉子22中之一者且齒輪裝置用以驅動另一轉子20之一替代實施例。此替代實施例之一種影響在於,穿過直接驅動之轉子22之軸件40被延長且此導致軸件在具有較大撓曲之可能性之情況下不太良好地被支撐。 圖6展示其中用於安裝軸承30之軸件40在軸承安裝部分周圍具有比在其中心部分處小之一直徑之一泵。在中心部分處提供一增大之直徑允許增大熱容量及流體流量且增大熱傳遞之可能性。此外,被冷卻之轉子20、22之熱容量由於增大之內部直徑而減小。在某些實施例中,在軸件40之外表面上存在小鰭片,該等小鰭片改良外表面之熱傳遞。就此而言,該等鰭片在彼處增大表面積,但不應過大,此乃因此將增大轉子與軸件之主體之間的距離。此特定實施例係一雙端泵,該雙端泵由於其增大之成本及高效率尤其適用於此設計。 雖然本發明之實施例適用於任一類型之旋轉機,但該等實施例尤其適用於其中定子表面溫度通常超過150℃之熱運行半導體真空泵。 雖然在本文中已參考附圖詳細揭示了本發明之說明性實施例,但應理解,本發明並不限於精確實施例,且熟習此項技術者可在不背離如由所附申請專利範圍及其等效內容所定義之本發明之範疇之情況下在該等實施例中實現各種改變及修改。Before discussing the embodiments in more detail, an overview will first be provided. As previously noted, a small diameter shaft member on a rotating machine can provide a relatively low resonant frequency for a rotor that can compromise operating speed. As rotary machines such as pumps or compressors become smaller, rotary machines require higher operating speeds to move the same amount of fluid. As the speed increases, it is likely to approach the natural frequency of the rotor, which leads to instability. In particular, the deflection of the rotor results in a loss of the necessary clearance between the stationary part and the moving part. Any movement of the rotor is particularly detrimental to machines with small gaps. Increasing the diameter of the shaft member improves the stiffness of the shaft member and increases the natural frequency of the shaft member. However, increasing the diameter of the shaft member also increases the size of the bearing on which the shaft member is mounted, which results in the heat generated and One of the required power is increased. This has been solved by providing a rotor that is mounted on one of the outer surfaces of the bearing such that the outer race rotates with the rotor and the inner race is fixed. In this way, an increased mounting diameter of one of the rotors is provided without correspondingly increasing the size of the bearing. In order to provide a rotor that can be mounted in this manner, a rotor having a supporting stub or protrusion at either end is used, each of which has a hollow cylindrical shape. This rotor system is mounted on the outer surface of the bearing, and the cylindrical stub shaft surrounds the bearings and allows for rotation. One additional benefit of installing one of the rotors in this manner is that a cooling fluid can be used to cool the stationary support components, and thus the bearings and other access components (such as seals). In addition, providing a fixed support member as a shaft member extending through the rotor allows any cooling fluid to flow along the entire shaft member to have a cooling effect on the entire rotor. The rotor system within a rotating device (specifically, within a vacuum pump) is difficult to cool, and providing cooling in this manner can be advantageous. 2 shows a stator 10 having a water cooling 12 that surrounds two pump rotors 20 and 22 that are intermeshing with each other, and are themselves mounted to bearings 30. The pump rotors 20 and 22 are mounted via respective axial projections 21 and 23 having a hollow cylindrical shape and projecting from an outer axial edge of one of the pump rotors. These axial projections 21, 23 are supported on the outer surface of the bearing 30 and rotate about these bearings. The bearing 30 is mounted on a stationary shaft member 40 having a cooling fluid inlet 41 and an outlet 42. This cooling fluid allows the bearings to be cooled and helps protect the bearings from overheating. In this embodiment, there is a shaft seal 50 between the stator 10 and the bearing 30 that prevents or at least prevents oil surrounding the bearing from leaking into the pump body. In certain embodiments, to avoid an additional thermal load on the rotor, the shaft seal 50 can incorporate a piston ring rather than a lip seal. In other embodiments, the seal may be in the form of a mechanical face seal between the rotor and the top plate, rather than in the form of a radial lip seal on the outer side of the rotor. In this case, the top panel will have a shape that is slightly different than the top panel shown to allow for the installation of a mechanical face seal. Also shown in FIG. 2 is a gear 60 for driving the rotor via axial projections 21 and 23 to cause the rotor to rotate on the bearing 30. Thus, in this embodiment, the pump rotors 20, 22 are supported by a fixed water-cooled shaft member 40 via bearings 30. The inner surface of the bearing is mounted to the shaft member as a tight clearance fit, and the outer surface of the bearing has a slight interference fit with the rotor it supports. This enables the rotors 20, 22 and the axial projections 21, 23 to have a larger diameter than a conventional rotor shaft, since the bearings are located inside the support shaft rather than on the outer surface of the shaft (as in the prior art) The situation) (see Figure 1). The use of larger diameter shafts increases the natural frequency of the rotating block compared to a conventional assembly. It should be noted that for machines with two or more rotors, careful selection of materials will allow the thermal expansion of the top plate, rotor and stator to be matched so that the rotor and stator can be maintained under different operating conditions (which have different thermal load conditions). Radial gap between. For example, in some cases, the stator may be iron or steel and the housing is aluminum, and in this case care should be taken so that if the housing is maintained at 100 ° C and the stator is maintained at 200 ° C, then The shaft and stator bores will remain aligned with each other. In practice, the aluminum housing will also hold the oil used to lubricate the bearings and gears and will need to be maintained at around 80 °C as a maximum temperature. In Figure 2, a water cooled bearing support is used to cool the oil leaving the bearing. In this embodiment, the bearing has a slight interference fit in the rotor and a tight clearance fit on the bearing support. The bearing preload is applied to the inner race on the support shaft using a spring, which may be a wave spring or a coil spring. Figure 2 shows a double ended pump design designed to have a vent at both ends. This design helps manage the thermal load on the rotor and stator as well as the axial load on the bearings. As can be seen, the fixed bearing support member 40 is in the form of a shaft member in which the cooling fluid flows into an inlet 41 and exits from an outlet 42 at the opposite axial ends of the shaft member. In this way, the cooling fluid not only provides a cooling effect to the bearing, but also provides some degree of cooling to the rotor. The rotor is mounted to the bearing and shaped such that there is a narrow gap between the inner diameter of the main central body of the rotor and the stationary shaft member. This narrow gap allows for some degree of deflection of the rotor and/or shaft member without the rotor contacting the shaft member and jamming the pump while also providing heat transfer between the two bodies. Figure 3 shows a design of a Rouer blower with an inlet (not shown) at the top and bottom. The Rouge blower pump can significantly heat up during use, which can result in excessive bearing temperatures. Therefore, it is advantageous to provide additional cooling for the Rogowski blower pump. In this embodiment, as in the embodiment of Fig. 2, the bearing 30 is mounted on a through shaft member 40 which not only provides cooling for the bearing and the seal member 50 around the bearing, but also the rotor 20, 22 itself. Provides cooling. FIG. 4 shows a one-rotor blower pump driven by a biasing motor 70. The bias motor 70 drives the rotors 20, 22 of the pump via a gear 60. FIG. 5 shows an alternate embodiment in which the motor 70 is directly coupled to one of the rotors 22 and the gearing device is used to drive another rotor 20. One effect of this alternative embodiment is that the shaft member 40 that passes through the directly driven rotor 22 is extended and this results in the shaft member being less well supported with the possibility of greater deflection. Figure 6 shows a pump in which the shaft member 40 for mounting the bearing 30 has one of the diameters smaller than the one at its central portion around the bearing mounting portion. Providing an increased diameter at the central portion allows for increased heat capacity and fluid flow and increases the likelihood of heat transfer. Furthermore, the heat capacity of the cooled rotors 20, 22 is reduced by the increased internal diameter. In some embodiments, there are small fins on the outer surface of the shaft member 40 that improve the heat transfer of the outer surface. In this regard, the fins increase the surface area there, but should not be too large, which would therefore increase the distance between the rotor and the body of the shaft member. This particular embodiment is a double ended pump that is particularly suitable for this design due to its increased cost and high efficiency. While embodiments of the present invention are applicable to any type of rotating machine, the embodiments are particularly applicable to thermally operated semiconductor vacuum pumps in which the stator surface temperature typically exceeds 150 °C. Although the present invention has been described in detail with reference to the accompanying drawings, it is understood that the invention is not to be construed as Various changes and modifications can be made in the embodiments in the context of the scope of the invention as defined by the equivalents.

10‧‧‧定子10‧‧‧ Stator

12‧‧‧冷卻/水冷卻12‧‧‧Cooling/water cooling

20‧‧‧轉子/泵轉子20‧‧‧Rotor/Pump Rotor

21‧‧‧轉子短軸/軸向突出部21‧‧‧Rotor short shaft/axial projection

22‧‧‧轉子/泵轉子22‧‧‧Rotor/Pump Rotor

23‧‧‧轉子短軸/軸向突出部23‧‧‧Rotor short shaft/axial projection

30‧‧‧軸承30‧‧‧ Bearing

40‧‧‧軸承支撐部件/固定軸件/固定之經水冷卻軸件/固定軸承支撐部件/貫通軸件/軸件40‧‧‧Bearing support parts/fixed shaft parts/fixed water-cooled shaft parts/fixed bearing support parts/through shaft parts/shaft parts

41‧‧‧冷卻流體入口/入口41‧‧‧Cooling fluid inlet/inlet

42‧‧‧冷卻流體出口/出口42‧‧‧Cooling fluid outlet/export

50‧‧‧軸件密封件/密封件50‧‧‧Axis seals/seals

60‧‧‧齒輪60‧‧‧ gears

70‧‧‧馬達/偏置馬達70‧‧‧Motor/Offset Motor

現在將進一步參考附圖來闡述本發明之實施例,在該等附圖中: 圖1展示根據先前技術之一泵; 圖2展示根據一實施例之一泵; 圖3展示根據一實施例之在頂部及底部處具有一入口之一魯氏鼓風機設計; 圖4展示根據一實施例之由藉由齒輪耦合至泵之一偏置馬達驅動之一魯氏鼓風機泵; 圖5展示驅動如圖6中所展示之一泵之一直接耦合馬達;且 圖6展示根據一實施例之具有由於一增大之直徑支撐軸件而引起之經改良冷卻之一泵。Embodiments of the present invention will now be further described with reference to the drawings in which: FIG. 1 shows a pump according to the prior art; FIG. 2 shows a pump according to an embodiment; FIG. 3 shows an embodiment according to an embodiment. One of the inlets has a Luis blower design at the top and bottom; FIG. 4 shows one of the Luer blower pumps driven by a biasing motor coupled to the pump by a gear according to an embodiment; FIG. 5 shows the drive as shown in FIG. One of the pumps shown in the pump directly couples the motor; and Figure 6 shows a pump having improved cooling due to an increased diameter support shaft member in accordance with an embodiment.

Claims (23)

一種旋轉機,其包括: 一定子; 一轉子,其可圍繞該定子內之一旋轉軸旋轉; 該轉子經可旋轉地安裝於兩個軸承上,該兩個軸承係朝向該轉子之相對軸向端定位; 至少一個固定支撐部件,其支撐該兩個軸承,該等軸承係圍繞該至少一個固定支撐部件安裝,使得該轉子經可旋轉地安裝於該等軸承中之該至少一者之一外表面上;其中 該至少一個固定支撐部件包括穿過該轉子之一軸件,該兩個軸承經安裝於朝向該轉子之任一端定位之該軸件的部分上。A rotary machine comprising: a stator; a rotor rotatable about a rotational axis of the stator; the rotor being rotatably mounted to two bearings, the two bearings being oriented opposite the rotor Positioning; at least one fixed support member supporting the two bearings, the bearings being mounted about the at least one fixed support member such that the rotor is rotatably mounted outside of the at least one of the bearings The surface; wherein the at least one fixed support member includes a shaft member passing through the rotor, the two bearings being mounted on a portion of the shaft member positioned toward either end of the rotor. 如請求項1之旋轉機,該至少一個固定支撐部件包括用於冷卻流體流之一冷卻流體入口、一冷卻流體流動路徑,及一冷卻流體出口。The rotary machine of claim 1, the at least one fixed support member comprising a cooling fluid inlet for cooling the fluid flow, a cooling fluid flow path, and a cooling fluid outlet. 如請求項2之旋轉機,其中該流體入口及該流體出口處於該軸件之相對軸向端。The rotary machine of claim 2, wherein the fluid inlet and the fluid outlet are at opposite axial ends of the shaft member. 如請求項2之旋轉機,其中該流體入口及該流體出口處於該軸件之同一軸向端。The rotary machine of claim 2, wherein the fluid inlet and the fluid outlet are at the same axial end of the shaft member. 如請求項1至4中任一項之旋轉機,其中該兩個軸承係圍繞該軸件安裝,且該轉子係可旋轉地安裝於該兩個軸承之一外表面上。A rotary machine according to any one of claims 1 to 4, wherein the two bearings are mounted around the shaft member, and the rotor is rotatably mounted on an outer surface of one of the two bearings. 如請求項1至4中任一項之旋轉機,其中該軸件在該等軸承安裝部分之間具有一中心部分,該中心部分之一外圓周接近於該轉子之一內圓周。A rotary machine according to any one of claims 1 to 4, wherein the shaft member has a central portion between the bearing mounting portions, an outer circumference of one of the central portions being close to an inner circumference of the rotor. 如請求項6之旋轉機,其中該軸件之該中心部分具有比其上安裝該等軸承之該等部分大之一直徑。A rotary machine according to claim 6, wherein the central portion of the shaft member has a diameter that is larger than the portion on which the bearings are mounted. 如請求項1至4中任一項之旋轉機,其包括至少一個其他轉子,該至少一個其他轉子可圍繞平行於該旋轉軸之一其他旋轉軸旋轉,該至少一個其他轉子中之每一者係安裝於兩個其他軸承上,該兩個其他軸承中之至少一者係圍繞至少一個其他固定支撐部件安裝;其中該至少一個其他轉子中之每一者經可旋轉地安裝於該兩個其他軸承中之至少一者之一外表面上,該兩個其他軸承係朝向該至少一個其他轉子之相對軸向端定位。A rotary machine according to any one of claims 1 to 4, comprising at least one other rotor rotatable about another axis of rotation parallel to one of the axes of rotation, each of the at least one other rotor Mounted on two other bearings, at least one of which is mounted about at least one other fixed support member; wherein each of the at least one other rotor is rotatably mounted to the two other On the outer surface of at least one of the bearings, the two other bearings are positioned toward opposite axial ends of the at least one other rotor. 如請求項8之旋轉機,其中該其他轉子、該至少一個其他固定支撐部件及該兩個其他軸承具有與該各別轉子、該至少一個固定支撐部件及該兩個軸承對應的特徵。A rotary machine according to claim 8, wherein the other rotor, the at least one other fixed support member, and the two other bearings have features corresponding to the respective rotors, the at least one fixed support member, and the two bearings. 如請求項8之旋轉機,其中該轉子及該其他轉子各自包括徑向突出部且經安裝使得該等徑向突出部相互嚙合。A rotary machine according to claim 8, wherein the rotor and the other rotor each comprise a radial projection and are mounted such that the radial projections mesh with each other. 如請求項1至4中任一項之旋轉機,進一步包括一馬達及由該馬達驅動之用於驅動該轉子之齒輪構件,該馬達係相對於該轉子而偏置。A rotary machine according to any one of claims 1 to 4, further comprising a motor and a gear member driven by the motor for driving the rotor, the motor being biased relative to the rotor. 如請求項11之旋轉機,當依附於請求項8至10中任一項時,其中該馬達係可操作以經由該齒輪構件來驅動該轉子及該其他轉子。The rotary machine of claim 11, when attached to any one of claims 8 to 10, wherein the motor is operable to drive the rotor and the other rotor via the gear member. 如請求項1至4中任一項之旋轉機,進一步包括經直接耦合至該轉子之一馬達。A rotary machine according to any one of claims 1 to 4, further comprising a motor coupled directly to the rotor. 如請求項13之旋轉機,當依附於請求項8至10中任一項且進一步包括由該馬達驅動之齒輪構件時,其中該齒輪構件係可操作以驅動該其他轉子。A rotary machine according to claim 13 when attached to any one of claims 8 to 10 and further comprising a gear member driven by the motor, wherein the gear member is operable to drive the other rotor. 如請求項1至4中任一項之旋轉機,其中該轉子在該轉子之任一端上於一經定義非零徑向位置處包括軸向突出部,該等軸向突出部形成一中空圓柱形形狀,該等軸向突出部之一內圓周係安裝於該等軸承中之一者之一外圓周上。A rotary machine according to any one of claims 1 to 4, wherein the rotor includes an axial projection at a defined non-zero radial position on either end of the rotor, the axial projections forming a hollow cylindrical shape The inner circumference of one of the axial projections is mounted on an outer circumference of one of the bearings. 如請求項15之旋轉機,當依附於請求項12、13或14時,其中該齒輪構件經構形以接觸該等軸向突出部以驅動該轉子。A rotary machine as claimed in claim 15, when attached to claim 12, 13 or 14, wherein the gear member is configured to contact the axial projections to drive the rotor. 如請求項1至4中任一項之旋轉機,其中該等軸承係作為一緊密空隙配合安裝於該固定支撐部件上,且該轉子係作為一輕微干涉配合安裝於該等軸承上。A rotary machine according to any one of claims 1 to 4, wherein the bearings are mounted to the fixed support member as a tight clearance fit, and the rotor is mounted to the bearings as a slight interference fit. 如請求項1至4中任一項之旋轉機,其中該旋轉機包括一真空泵。A rotary machine according to any one of claims 1 to 4, wherein the rotary machine comprises a vacuum pump. 如請求項18之旋轉機,其中該真空泵包括以下各項中之一者:諸如一螺旋泵或者魯氏泵或鼓風機之一乾式泵、一渦輪泵,或一葉片泵。A rotary machine according to claim 18, wherein the vacuum pump comprises one of: a screw pump or a dry pump of a Rouge pump or a blower, a turbo pump, or a vane pump. 如請求項18之旋轉機,其中該泵包括以下各項中之一者:在兩個軸向端處皆包括排放出口之一雙端泵、在一個軸向端處具有一排放口之一單端泵,以及在相對徑向側具有一入口之一泵。A rotary machine according to claim 18, wherein the pump comprises one of: a double-end pump including one of the discharge outlets at both axial ends, and a discharge port at one axial end The end pump, and one of the pumps having an inlet on the opposite radial side. 一種用於一泵之轉子,該轉子在該轉子之兩個軸向端上於一經定義非零徑向位置處包括軸向突出部,該等軸向突出部各自形成一中空圓柱形形狀,且經構形以經由位於該中空圓柱體形狀內之軸承而被可旋轉地安裝該轉子;其中 該轉子包括穿過該轉子之一中心之一圓柱形孔,使得一軸件可穿過該轉子。A rotor for a pump, the rotor including axial projections at a defined non-zero radial position on both axial ends of the rotor, the axial projections each forming a hollow cylindrical shape, and The rotor is configured to be rotatably mounted via a bearing located within the shape of the hollow cylinder; wherein the rotor includes a cylindrical bore through a center of one of the rotors such that a shaft member can pass through the rotor. 如請求項21之轉子,其中該轉子在該轉子之兩個軸向端處於一經定義非零徑向位置處包括該等軸向突出部,該等軸向突出部形成中空圓柱形形狀,且經構形以經由位於該等中空圓柱形形狀內之軸承而被可旋轉地安裝該轉子。The rotor of claim 21, wherein the rotor includes the axial projections at a defined non-zero radial position at the two axial ends of the rotor, the axial projections forming a hollow cylindrical shape and The configuration is rotatably mounted to the rotor via bearings located within the hollow cylindrical shape. 如請求項21或22中任一項之轉子,且其進一步包括經安裝於該等軸向突出部中之每一者內的軸承。The rotor of any of claims 21 or 22, and further comprising a bearing mounted in each of the axial projections.
TW107108179A 2017-03-10 2018-03-09 Rotating machine and rotors for use therein TW201837321A (en)

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