TW201802409A - Air conditioner capable of controlling air to be temperature-controlled to a desired temperature in a stable state and promptly - Google Patents

Abstract

To provide an air conditioner capable of controlling air to be temperature-controlled to a desired temperature in a stable state and promptly even when the environmental temperature varies significantly. The air conditioner 1 includes: an air flow passage 30 having an intake port 31 and a discharge port 32 for discharging air taken in from the intake port 31; a blower 60 for flowing the air from the intake port 31 to the discharge port 32; a cooling part 2 received in the air flow passage 30 to cool the air introduced from the intake port 31 with variable refrigeration capacity; a heating part 4 received in the air flow passage 30 to heat the air introduced from the intake port 31 with variable heating capacity; and a return flow path 100 extending from the downstream of the cooling part 2 and the downstream of the heating part 4 to the upstream of the cooling part 2 and the upstream of the heating part 4 to converge the air returned from the return flow path 100 with the external air before being introduced into the intake port 31. In the air flow passage 30, a separator 200 is disposed to divide a part of the air flow passage into a first flow passage and a second flow passage. The cooling part 2 is disposed in the first flow passage and a flow regulation damper 201 is provided to regulate the openness of the first flow passage and the second flow passage. An upstream temperature sensor 44 is used to detect the temperature of the air introduced into the intake port 31 and converged with the air from the return flow path 100. The flow regulation damper 201 is controlled according to the temperature detected by the upstream temperature sensor 44 to regulate the openness of the first flow passage and the second flow passage.

Description

Air conditioner

The present invention relates to an air-conditioning apparatus.

The indoor temperature of a clean room of a semiconductor manufacturing facility is usually strictly controlled by an air-conditioning apparatus. For example, in a clean room provided with a device (coater, etc.) for coating and developing a photoresist, there is a case where the indoor temperature is required to be controlled within an error range of + 0.05 ° C to -0.05 ° C of a target temperature. As an air-conditioning apparatus compatible with such a clean room, various apparatuses have been proposed previously (for example, refer to Patent Document 1). [Prior Art Document] [Patent Document] [Patent Document 1] Japanese Patent Laid-Open No. 2013-108652

[Problems to be Solved by the Invention] However, in this type of air conditioning device, generally, the use temperature range and temperature control range have been determined. If the included air is a temperature within the use temperature range, the air can be controlled to a temperature The desired set temperature within the control range is supplied with a specific air volume. However, recently, in many areas, there have been many reports of frequent occurrences of significant changes in the ambient temperature caused by the occurrence of a large cold wave or a large heat wave, etc. As a result, the control of the air-conditioning equipment has become unstable. As described above, the significant change in the ambient temperature may cause a significant change in the air incorporated in the air-conditioning device, and there may be a case where it is necessary to drastically change the freezing capacity or heating capacity of the air-conditioning device. Such rapid changes in freezing capacity or heating capacity may be one of the factors that cause the above-mentioned bad conditions. In addition, when the necessity of drastically changing the refrigerating capacity or the heating capacity is generated, there may be a situation in which the air-conditioning apparatus cannot sufficiently follow the desired refrigerating capacity or heating capacity and has to stop its operation. In addition, when the air included in the air conditioning device deviates from the use temperature range due to a significant change in the ambient temperature, it is basically impossible to control the included air to a desired temperature. Here, as a countermeasure against a significant change in the ambient temperature as described above, for example, it is considered to expand the range of the refrigerating capacity and the heating capacity of the air conditioner and to improve the responsiveness when the refrigerating capacity and the heating capacity are changed. However, since such countermeasures may undesirably increase the size of the device with an increase in the freezing capacity or heating capacity or increase in performance, or an unexpected increase in energy required for operation, it cannot be said to be necessarily good. The present invention has been made in consideration of such facts, and an object thereof is to provide an air-conditioning apparatus that can control the air as a temperature control target in a stable state and quickly as desired even when the ambient temperature changes significantly. Temperature can ensure such a better control performance on the one hand, and on the other hand suppress an undesirably large size of the entire device, or an undesired increase in energy for operation. [Technical Means for Solving the Problem] The present invention is an air conditioning device, which is characterized by having an air circulation path having a soak inlet for taking in external air and an ejection outlet for ejecting the air taken in from the above intake; an air blower for making air Circulation flows from the inlet to the outlet; the cooling part is stored in the air circulation path, and the air taken in from the inlet is cooled with a variable freezing capacity; the heating part is stored in the air circulation path Heating the air taken in from the inlet with variable heating capacity; and a return flow path extending from a position on the downstream side of the cooling section and on the downstream side of the heating section to an upstream side of the cooling section and the heating section The upstream position of the cooling section and the upstream of the heating section via the return flow path, and the external air before being incorporated by the inlet or the external air after being incorporated by the inlet Air confluence. According to the present invention, a part of the air passing through the cooling section and the heating section can be supplied to the upstream side of the cooling section and the upstream side of the heating section through the return flow path so as to be integrated with the inlet through the air circulation path. The air may be merged by the air after being incorporated by the inlet. Thus, even when the temperature of the external air taken in by the inlet is greatly changed in accordance with a significant change in the ambient temperature, the temperature of the external air is close to that of the air coming from the return flow path through the temperature control. The temperature should be controlled by temperature. Therefore, even if the refrigerating capacity or the heating capacity is drastically changed in accordance with a large change in the temperature of the outside air, it is easy to control the outside air that merges with the air from the return flow path to a desired temperature. Therefore, even when the ambient temperature fluctuates significantly, the air that is the object of temperature control can be controlled to a specific temperature quickly and in a stable state, and this kind of better control performance can be ensured on the one hand and suppressed on the other hand The entire device is undesirably enlarged, or the energy for operation is increased undesirably. In addition, according to the present invention, by adjusting the air volume of the air returned to the upstream side using the return flow path, the air volume of the blower can be set to a certain value while changing the temperature control from the ejection outlet without returning through the return flow path. The amount of air blowing from the object space. Therefore, if the reliability of the temperature control when the air volume of the blower is set to a certain value is ensured in the air conditioning device, the air volume of the air ejected from the ejection outlet to the temperature control target space is changed to various modes even if required. In such cases, the reliability of temperature control can also be ensured in each mode. Therefore, according to the required air volume, the air conditioning device can be quickly adjusted to a state that can ensure better control performance. Therefore, the air conditioning device can be effectively used both before and after shipment. Moreover, in the air conditioning apparatus of the present invention, a damper for air volume adjustment may be provided in the return flow path to adjust the air volume of the air flowing through the return flow path. In this case, by adjusting the damper for air volume adjustment, it is possible to flexibly set a better return amount of air from the return flow path corresponding to the expected change in the ambient temperature, and the stability of the control can be compared with the effective operation Balance of changes in ambient temperature. For example, in the case where the temperature of the external air taken in from the inlet is greatly changed, and when the return amount of air from the return flow path is large, the included external air is closer to the temperature that should be controlled by temperature. Therefore, when a large change in the temperature of the external air is assumed, the damper for air volume adjustment is used to increase the return amount of air from the return flow path, so that the stability of the control with respect to fluctuations in the ambient temperature can be performed. Increase the setting. In addition, when it is assumed that the temperature of the outside air does not change significantly, the damper for air volume adjustment is adjusted to reduce the return amount of air from the return flow path, so that it can be used to effectively move from the ejection outlet to the temperature control target space. Setting of supply air. In addition, the air volume adjustment damper can also manually and automatically adjust the air volume of the air flowing through the return flow path. Moreover, the said air blower can also change an air volume. In this case, the air volume of the air flowing through the return flow path can be adjusted by changing the air volume of the blower and the damper for air volume adjustment, which can ensure the air flow from the spray outlet to the temperature control target space requested by the user. The amount of air, while flexibly setting the return amount of air from the return flow path. Thereby, the application range of the air conditioning device can be expanded, and the usability can be greatly improved. In addition, it is also possible to connect an intake flow path for allowing external air to circulate at the intake port, a filter device may be provided in the intake flow path, and the above may be communicated with at a position downstream of the filter device in the intake flow path. Return to the flow path. In this case, the air from the return flow path is supplied into the intake flow path without receiving the pressure loss generated when passing through the filter device, so it merges smoothly with the external air passing through the filter device and is suppressed to the blower. The output changes, which can improve the stability of temperature control. In addition, the air from the return flow path is the air that has passed through the filter device, so there is no pollution problem. Further, a partition member is provided in the air circulation path to divide one part of the air circulation path into two, and a part of the air circulation path is divided into a first flow path and a second flow path by the partition member. The cooling section is provided on the first flow path, and a flow adjustment damper for adjusting the opening degree of the first flow path and the second flow path is provided. The upstream temperature sensor detects and comes from the return flow path. The temperature of the air merged by the air inlet before the air inlet or the air after the air inlet is incorporated, the flow adjustment damper adjusts the first air temperature by controlling the temperature based on the temperature detected by the upstream temperature sensor. Opening degree of the 1st flow path and the above 2nd flow path. In this case, according to the temperature of the air before being incorporated by the inlet or the air after being incorporated by the inlet from the return flow path, the refrigeration capacity given to the air after the convergence can be adjusted, so that the The air is effectively controlled to the desired temperature. [Effects of the Invention] According to the present invention, even when the ambient temperature fluctuates significantly, the air as a temperature control object can be controlled in a stable state and quickly to a desired temperature, and on the one hand, such a comparison can be ensured. Good control performance, on the one hand, suppresses the undesirably large size of the entire device, or undesirably increases the energy used for operation.

Hereinafter, each embodiment of the present invention will be described in detail with reference to the attached drawings. (First Embodiment) Fig. 1 is a schematic view of an air-conditioning apparatus 1 according to a first embodiment of the present invention. The air conditioning device 1 of this embodiment is used to supply temperature-controlled air to a device for coating and developing a photoresist, for example, and to maintain a constant temperature in the device. As shown in FIG. 1, the air conditioning device 1 includes an air circulation path 30 having a receiving inlet 31 for air contained in the outside of the device, and an outlet 32 for blowing out air included in the receiving inlet 31; and a blower 60 for supplying air It flows from the inlet 31 to the outlet 32; the cooling part 2 is stored in the air circulation path 30, and the air taken in from the inlet 31 is cooled with a variable refrigerating capacity; the heating part 4 is stored in the air circulation path Within 30, the air taken in from the inlet 31 is heated with a variable heating capacity; the return flow path 100 extends from the downstream side of the cooling section 2 and the downstream side of the heating section 4 to the upstream side of the cooling section 2 and heats A position on the upstream side of the section 4; and a control unit 50 that controls the freezing ability of the cooling section 2 or the heating ability of the heating section 4 and the like. In the air circulation path 30, the cooling section 2 is arranged on the upstream side of the heating section 4, and a humidification device 70 is further provided on the downstream side of the heating section 4. The humidification device 70 is electrically connected to the control unit 50, and can be controlled by the control unit 50 to humidify the air taken in from the inlet 31 with a variable humidification amount. Moreover, in this embodiment, the air blower 60 is installed in the air flow path 30 on the downstream side of the humidifier 70. The air blower 60 is configured to change the air volume, but when the air conditioner 1 is driven, the air blower 60 is driven to output a substantially constant air volume. In the present embodiment, the cooling unit 2 is disposed on the upstream side of the heating unit 4, but the cooling unit 2 may be disposed on the downstream side of the heating unit 4. The position of the blower 60 may be a position different from the illustrated example. A receiving flow path 312 is connected to the receiving inlet 31 of the air circulation path 30 to allow external air to flow toward the receiving inlet 31. A filter device 313 is provided in the receiving flow path 312. In this embodiment, the external air flows from the filter device 313 through the intake flow path 312 by the drive of the blower 60, and flows into the air circulation path 30 from the receiving inlet 31. The above-mentioned filter device 313 is a chemical filter as an example, but it may be a HEPA (High Efficiency Particulate Air) filter or an ULPA (Ultra Low Penetration Air) filter. May include chemical and HEPA filters or ULPA filters. A supply flow path 322 is provided to the ejection port 32 to allow temperature-controlled air to flow toward the use area U. Here, the use area U refers to, for example, a device (coater, etc.) for coating and developing a photoresist. Interior space etc. In the example shown in the figure, a temperature sensor 41 and a humidity sensor 42 are provided in the ejection port 32, and the temperature sensor 41 and the humidity sensor 42 detect the passing of the cooling section 2, the heating section 4, and the heating section 4. The temperature or humidity of the air in the wet device 70. The temperature sensor 41 and the humidity sensor 42 output the detected temperature or humidity to the control unit 50. Accordingly, the control unit 50 controls the cooling unit 2 and the heating unit 4 based on the temperature detected by the temperature sensor 41 And controls the humidification device 70 based on the humidity detected by the humidity sensor 42. In addition, in FIG. 1, for convenience of illustration, the temperature sensor 41 and the humidity sensor 42 are displayed away from the discharge port 32, but the temperature sensor 41 and the humidity sensor 42 are detected to pass through the discharge port 32. Any configuration of the temperature or humidity of the air. The return flow path 100 is provided in this embodiment so as to span the receiving flow path 312 and the supply flow path 322, and the end portion on the downstream side of the return flow path 100 is downstream of the filter device 313 receiving the flow path 312. The position on the side communicates. In the return flow path 100, an air volume adjustment damper 101 is provided to adjust the air volume of the air flowing through the return flow path 100. The air flow adjustment damper 101 of this embodiment can manually and automatically adjust the air flowing through the return flow path 100. The amount of wind. Since the blower 60 is driven while the damper 101 for air volume adjustment is opened, in this embodiment, the air supplied to the upstream side of the cooling section 2 and the upstream side of the heating section 4 via the return flow path 100 and The inlet air 31 merges with the previous external air. Here, the air conditioning device 1 is preferably configured to adjust the air volume adjustment damper 101 or the like to return air having an air volume of 0% to 90% of the air volume output by the blower 60 to the upstream side of the cooling unit 2 and heat it. The position on the upstream side of the section 4 is more preferably configured to return air with an air volume of 0% to 100%. When returning 100% of the air volume to the air, in addition to the air volume adjustment damper 101, a mechanism for adjusting the flow path area of the supply flow path 322 is required. In this embodiment, as described above, the end portion on the downstream side of the return flow path 100 communicates with the position on the downstream side of the filter device 313 incorporated in the flow path 312, but the end on the downstream side of the return flow path 100 The portion may communicate with a position upstream of the filter device 313 incorporated in the flow path 312. Further, an end portion on the downstream side of the return flow path 100 may communicate with a position on the downstream side of the receiving inlet 31. In this case, the air supplied to the upstream side of the cooling section 2 and the upstream side of the heating section 4 via the return flow path 100 merges with the external air after being taken in by the inlet 31. Next, the cooling section 2 and the heating section 4 will be described. If the cooling section 2 is described first, as shown in FIG. 1, the cooling section 2 of this embodiment is composed of a cooling coil 14 of a first cooling unit 10 and a cooling coil 24 of a second cooling unit 20. In the present embodiment, the first cooling unit 10 including the cooling coil 14 is a compressor 11, a condenser 12, an expansion valve 13, and a cooling coil 14 which are to be operated at a variable operating frequency and whose rotation number is adjustable. The method of heating medium circulation is sequentially constituted by piping 15. The second cooling unit 20 including the cooling coil 24 is a compressor 21, a condenser 22, and an expansion valve that will operate at a variable operating frequency and can adjust the number of rotations. 23, and the cooling coil 24 is constituted by sequentially connecting pipes 25 to circulate the heat medium. In the first and second cooling units 10 and 20, the compressors 11, 21 compress the low-temperature and low-pressure gas heat medium flowing from the cooling coils 14, 24, and use them as the high-temperature and high-pressure gas. The state is supplied to the condensers 12 and 22. The compressors 11 and 21 are variable frequency compressors which operate at a variable operating frequency and whose rotation number can be adjusted according to the operating frequency. In the compressors 11, 21, the higher the operating frequency, the more heat medium is supplied to the condensers 12, 22. As the compressor 11, a scroll-type compressor having an inverter and a motor integrally is preferably used. However, if the number of rotations can be adjusted by adjusting the operating frequency of the inverter to adjust the supply amount (flow rate) of the heat medium, the forms of the compressors 11 and 21 are not particularly limited. In addition, the condensers 12 and 22 cool and condense the heat medium compressed by the compressors 11 and 21 with cooling water, and supply them to the expansion valves 13 and 23 as a high-pressure liquid at a specific cooling temperature. For the cooling water of the condensers 12, 22, water or other refrigerants may be used. The expansion valves 13 and 23 expand the heat medium supplied from the condensers 12 and 22 to depressurize them, and are supplied to the cooling coils 14 and 24 as a low-temperature and low-pressure gas-liquid mixed state. The cooling coils 14 and 24 cool the air by exchanging heat between the supplied heat medium and the air to be controlled by the temperature. The heat medium that exchanges heat with air becomes a low-temperature and low-pressure gas state, flows out from the cooling coils 14, 24, and is compressed by the compressors 11, 21 again. In each of the cooling units 10 and 20 described above, the number of rotations is adjusted by changing the operating frequency of the compressors 11 and 21 to adjust the supply amount of the heat medium to the condensers 12 and 22, and the expansion valve can be adjusted. The opening degree of 13, 23 can adjust the amount of heat medium supplied to the cooling coils 14, 24. By this adjustment, the freezing capacity is made variable. In the present embodiment, the compressor 11 of the first cooling unit 10 is operated at a fixed frequency for the purpose of improving the stability of control. In the case of performing such operation, the compressor 11 may be a compressor that operates at a fixed frequency. In this case, the manufacturing cost can be reduced. In addition, if the arrangement of the cooling unit 2 is described in detail, in this embodiment, as shown in FIG. 1, in the air circulation path 30, a part of the air circulation path 30 is provided along the air stream. The partition member 200 which is extended and divided into two, and a part of the air circulation path 30 is divided into a first flow path 30A and a second flow path 30B by the partition member 200. A cooling section 2 is provided in the first flow path 30A. In addition, a flow adjustment damper 201 that adjusts the opening degree of the first flow path 30A and the second flow path 30B is provided at an end portion on the downstream side of the partition member 200. On the other hand, an upstream temperature sensor 44 is provided in the nano inlet 31, and the upstream temperature sensor 44 detects the temperature of the air taken in by the nano inlet 31 that merges with the air from the return flow path 100. Here, the flow adjustment damper 201 of this embodiment can control the openings of the first flow path 30A and the second flow path 30B by controlling the control unit 50 based on the temperature detected by the upstream temperature sensor 44. If the heating section 4 is described next, the heating section 4 of this embodiment has a structure in which a part of the heat medium flowing from the compressor 11 to the condenser 12 of the first cooling unit 10 is branched, and the heating medium The pipe 16 and the heating amount regulating valve 18 provided on the downstream side thereof return to the condenser 12 on the downstream side of the compressor 11. In detail, the heating coil 16 has a heat medium inlet and a heat medium outlet, and the heat medium inlet and the upstream side of the pipe between the compressor 11 and the condenser 12 are connected through another pipe, the heat medium outlet, and the compression The downstream side of the pipe between the machine 11 and the condenser 12 is further connected by another pipe. In addition, a heating amount adjustment valve 18 is provided on a pipe extending from the heating medium outlet. Thereby, the heating part 4 can branch a part of the heat medium flowing out from the compressor 11 toward the condenser 12 and return to the condenser 12 through the heating coil 16 and the heating amount adjustment valve 18. In the heating unit 4, a heating medium in a high-temperature and high-pressure gas state compressed by the compressor 11 is supplied to the heating coil 16. The heating coil 16 heats the air by exchanging heat between the supplied heat medium and the air to be controlled by the temperature. Then, the heat medium that exchanges heat with air is returned from the heating coil 16 to a pipe between the compressor 11 and the condenser 12. Here, the heating amount adjusting valve 18 can change the heating capacity of the heating coil 16 by adjusting the return amount of the heat medium from the heating coil 16. The more the heat medium is returned, the more heating capacity is increased. The heating capacity of such a heating section 4 can be adjusted according to the operating frequency of the compressor 11 and / or the opening degree of the heating amount adjusting valve 18. Next, the operation of the air-conditioning apparatus 1 according to this embodiment will be described. In the air conditioning apparatus 1 of the present embodiment, the air taken in from the sodium inlet 31 of the temperature control object is cooled by the cooling section 2 and heated by the heating section 4 and is controlled toward a preset target temperature. When the air conditioner 1 of this embodiment is operated, the target temperature and the target humidity are first incorporated in the control unit 50. In addition, by driving the blower 60, the air in the air circulation path 30 flows to the ejection outlet 32 side, so that the temperature control target air is taken in from the inlet 31 of the air circulation path 30. Furthermore, the compressors 11 and 21 of the cooling units 10 and 20 are also driven. In addition, the air volume adjustment damper 101 is adjusted so that the air of a specific proportion of the air volume with respect to the air volume output from the blower 60 returns from the return flow path 100 to the upstream side of the cooling section 2 and the upstream side of the heating section 4. Opening degree. When the blower 60 and the like are driven as described above, after the temperature of the air taken in from the inlet 31 of the air circulation path 30 is detected by the upstream temperature sensor 44, it first passes through the cooling section 2 (the first flow path 30A) and The second flow path 30B passes through the heating unit 4 thereafter. Thereafter, the air is ejected from the ejection port 32 after being humidified by the humidifying device 70, and one part reaches the use area U, and the other part returns to the upstream side of the cooling section 2 and the upstream side of the heating section 4. Here, the air passing through the discharge port 32 detects the temperature with the temperature sensor 41 and the humidity with the humidity sensor 42. Then, the temperature sensor 41 outputs the detected temperature to the control unit 50, and the humidity sensor 42 outputs the detected humidity to the control unit 50. Then, the control unit 50 controls the opening degree of the heating amount adjustment valve 18, the opening degree of the expansion valve 13 of the first cooling unit 10, and the opening degree of the second cooling unit 20 based on the difference between the temperature detected by the temperature sensor 41 and the target temperature. The opening degree of the expansion valve 23 and the operating frequency of the compressor 21 are controlled in such a manner as to output heating capacity and refrigeration capacity corresponding to the above-mentioned differences. In addition, the control unit 50 also controls the humidification capability of the humidification device 70 based on the difference between the humidity detected by the humidity sensor 42 and the target humidity. During such operation, in the air conditioning apparatus 1 of this embodiment, a part of the air passing through the cooling section 2 and the heating section 4 can be supplied to the upstream side of the cooling section 2 and the heating section 4 through the return flow path 100. It is positioned on the upstream side so that it merges with the air before being taken in by the inlet 31 of the air circulation path 30. Thereby, even when the temperature of the external air taken in by the inlet 31 is greatly changed in accordance with a significant change in the ambient temperature, the temperature of the external air is merged with the temperature-controlled air from the return flow path 100, and its temperature It is also close to the temperature that should be temperature controlled. In other words, an influence mitigation effect on the influence of environmental changes occurs. Therefore, even if the refrigerating capacity or the heating capacity is not changed drastically in response to a large change in the temperature of the outside air, the outside air that merges with the air from the return flow path 100 can be easily controlled to a desired temperature. Referring to FIGS. 2 to 6, the effect of mitigating the influence of the air-conditioning apparatus 1 on the environmental change (environmental change reduction effect) will be described. FIG. 2 is a graph showing an example of environmental fluctuation conditions. The horizontal axis represents time, and the vertical axis represents temperature. The change in temperature according to time of external air (open air) taken in from the inlet 31 is shown. The graph in FIG. 2 shows that the temperature of the external air at 22 ° C. rises by 1 ° C. (1.0 ° C./5 min) within 5 minutes, and becomes an environmental condition of 24 ° C. after 10 minutes. 3 to 6 are graphs showing the effect of mitigating the influence of the air volume (return air) returned by the return flow path 100 on the influence of the environmental fluctuation conditions shown in FIG. 2. In the examples of FIGS. 3 to 6, the external air mixed with the return air suppresses the temperature change caused by the influence of environmental changes in the state before flowing into the cooling section 2 and the heating section 4 by the return air mixing. Then, when passing through the cooling part 2 and the heating part 4, it controlled to 23 degreeC. In FIG. 3, it is shown that the opening of the air volume adjustment damper 101 is adjusted so that air with an air volume of 10% of the air volume output from the blower 60 is returned to the upstream side of the cooling section 2 and the upstream side of the heating section 4. In the case of temperature (return rate 10%), the temperature of the mixed air changes. In FIG. 3, when the temperature of the mixed air (mixed air) to be a temperature control object reaches a peak value of 10 minutes after the temperature of the open air reaches 24 ° C, it becomes approximately 23.9 ° C. The change ratio of the temperature of the mixed air becomes 0.9 ° C (0.9 ° C / 5 min) within 5 minutes. In FIG. 4, it is shown that the opening of the air volume adjustment damper 101 is adjusted so that air with an air volume of 30% of the air volume output from the blower 60 is returned to the upstream side of the cooling unit 2 and the upstream side of the heating unit 4. In the case of temperature (return rate 30%), the temperature of the mixed air changes. In FIG. 4, when the temperature of the mixed air (mixed air) that is the object of temperature control reaches a peak value of 10 minutes after the temperature of the open air reaches 24 ° C., it becomes about 23.7 ° C. The change ratio of the temperature of the mixed air becomes 0.7 ° C (0.7 ° C / 5 min) within 5 minutes. In FIG. 5, it is shown that the opening of the air volume adjustment damper 101 is adjusted so that air with an air volume of 60% of the air volume output from the blower 60 is returned to the upstream side of the cooling unit 2 and the upstream side of the heating unit 4. In the case of temperature (return rate 60%), the temperature of the mixed air changes. In FIG. 5, the temperature of the mixed air (mixed air), which is the object of temperature control, reached about 23.4 ° C. when the temperature of the open air reached a peak value of 24 ° C. for 10 minutes. The change ratio of the temperature of the mixed air becomes 0.4 ° C (0.4 ° C / 5 min) within 5 minutes. In FIG. 6, it is shown that the opening of the air volume adjustment damper 101 is adjusted so that the air with respect to 90% of the air volume output by the blower 60 is returned to the upstream side of the cooling section 2 and the upstream side of the heating section 4. In the case of temperature (return rate 90%), the temperature of the mixed air changes. In FIG. 6, when the temperature of the mixed air (mixed air) to be controlled by the temperature reaches a peak value of 10 minutes after the temperature of the open air reaches 24 ° C., it becomes about 23.1 ° C. The change ratio of the temperature of the mixed air becomes 0.1 ° C (0.1 ° C / 5 min) within 5 minutes. As shown in the graphs of FIGS. 3 to 6 above, in the air conditioning apparatus 1 of this embodiment, even when the temperature of the external air taken in by the inlet 31 varies greatly according to a significant change in the ambient temperature, The temperature of the external air is close to the temperature that should be temperature-controlled by confluence with the air from the return flow path 100 that is temperature-controlled. Thereby, it is possible to easily control the outside air that has merged with the air from the return flow path 100 to a desired temperature. Therefore, according to the air conditioning apparatus 1 of this embodiment, even when the ambient temperature changes significantly, the temperature of the air to be controlled by the temperature can be quickly controlled to a desired temperature in a stable state. Better control performance, on the one hand, suppresses the undesirably large size of the entire device, or undesirably increases the energy used for operation. In addition, according to the air conditioning device 1 of this embodiment, by adjusting the air flow volume of the air returned to the upstream side using the return flow path 100, the air flow volume of the blower 60 can be set to a certain value while changing without using the return flow. The air volume of the air returned from the path 100 and ejected from the ejection outlet 32 to the temperature control target space (use area U). Therefore, if the reliability of the temperature control when the air volume of the blower 60 is set to a certain value is ensured in the air conditioning device 1, the air volume of the air ejected from the ejection outlet 32 to the temperature control target space is changed to In the case of various modes, the reliability of temperature control can also be ensured in each mode. Thereby, the air-conditioning device 1 can be quickly adjusted to a state that can ensure better control performance according to the required air volume, so the air-conditioning device 1 can be effectively used both before and after shipment. In the return flow path 100, an air volume adjustment damper 101 is provided to adjust the amount of air flowing through the return flow path 100. Thereby, by adjusting the damper 101 for air volume adjustment, it is possible to flexibly set a better return amount of the air from the return flow path 100 corresponding to the expected change in the ambient temperature, and it is possible to achieve control stability and effective operation relative Balance of changes in ambient temperature. For example, in the case where the temperature of the external air taken in by the inlet 31 is greatly changed, and when the return amount of the air from the return flow path 100 is large, the included external air is closer to the temperature that should be temperature-controlled. Therefore, when a large change in the temperature of the outside air is assumed, the air volume adjustment damper 101 is adjusted to increase the return amount of air from the return flow path 100, thereby making it possible to control the change from the ambient temperature. Setting to improve stability. In addition, when it is assumed that the temperature of the outside air does not change significantly, the air volume adjustment damper 101 is adjusted to reduce the return amount of air from the return flow path 100, so that the temperature can be controlled from the ejection outlet 32 to the temperature control target. Setting of space to effectively supply air. Moreover, the air blower 60 can change the air volume. Thereby, the air volume of the blower 60 can be changed and the air volume of the air flowing through the return flow path 100 can be adjusted by using the air volume adjustment damper 101, thereby ensuring that the space from the ejection outlet 32 to the temperature control target space requested by the user can be ensured. The amount of air flow can be set flexibly while returning air from the return flow path 100. Thereby, the application range of the air-conditioning apparatus 1 can be expanded, and ease of use can be greatly improved. The intake passage 31 is connected to the intake passage 312 through which external air flows, and a filter device 313 is provided in the intake passage 312. Further, a return flow path 100 is communicated at a position downstream of the filter device 313 incorporated in the flow path 312. Thereby, the air from the return flow path 100 is supplied into the intake flow path 312 without receiving the pressure loss generated when passing through the filter device 313, so that it merges smoothly with the external air passing through the filter device 313 and is suppressed. Changes in the output of the blower 60 can improve the stability of the temperature control. In addition, since the air from the return flow path 100 is air that has passed through the filter device 313, no pollution problem occurs. A partition member 200 is provided in the air circulation path 30 to divide a part of the air circulation path 30 into two. The partition member 200 divides a part of the air circulation path 30 into the first flow path 30A and the second The flow path 30B is provided with a cooling section 2 in the first flow path 30A. A flow rate adjustment damper 201 is provided to adjust the openings of the first flow path 30A and the second flow path 30B. The upstream temperature sensor 44 detects the temperature of the air merged with the air from the return flow path 100 by the inlet 31 and the flow adjustment damper 201 is detected by the upstream temperature sensor 44. The opening temperature is controlled, and the openings of the first flow path 30A and the second flow path 30B are adjusted. Thereby, according to the temperature of the air merged with the air from the return flow path 100 by the inlet 31, the refrigeration capacity given to the air after the merge can be adjusted, whereby the air can be effectively controlled to the desired temperature . (Second Embodiment) Next, an air conditioner 1 'according to a second embodiment of the present invention will be described with reference to Fig. 7. Among the components of the present embodiment, the same components as those of the first embodiment are denoted by the same reference numerals, and descriptions thereof are omitted. As shown in FIG. 7, in the air-conditioning apparatus 1 'of the second embodiment, the second cooling unit 20 described in the first embodiment is not provided. In this air conditioner 1 ′, the freezing capacity is flexibly adjusted by adjusting the frequency of the compressor 11 and the opening degree of the expansion valve 13 of the first cooling unit 10. The other structures are the same as those of the first embodiment. With the air conditioning device 1 'of the second embodiment, when the ambient temperature changes significantly, the air to be temperature-controlled can also be controlled to a desired temperature quickly and in a stable state. On the one hand, this kind of better control performance is ensured, on the other hand, the entire device is prevented from undesirably increasing in size, or the energy for operation is increased undesirably. As mentioned above, although one Embodiment of this invention was described, this invention is not limited to the said embodiment. For example, the numbers of the cooling section 2 and the heating section 4 are not limited to those in the embodiments described above.

1‧‧‧air conditioner
1'‧‧‧air conditioner
2‧‧‧ Cooling Department
4‧‧‧Heating Department
10‧‧‧The first cooling unit
11‧‧‧compressor
12‧‧‧ condenser
13‧‧‧Expansion valve
14‧‧‧ cooling coil
15‧‧‧Piping
16‧‧‧Heating coil
18‧‧‧Heating volume control valve
20‧‧‧ 2nd cooling unit
21‧‧‧compressor
22‧‧‧ condenser
23‧‧‧Expansion valve
24‧‧‧ Cooling coil
25‧‧‧Piping
30‧‧‧air circulation path
30A‧‧‧The first flow path
30B‧‧‧Second flow path
31‧‧‧Nano Entrance
32‧‧‧ spout
41‧‧‧Temperature sensor
42‧‧‧Humidity sensor
44‧‧‧ upstream temperature sensor
50‧‧‧control unit
60‧‧‧Air blower
70‧‧‧ humidifying device
100‧‧‧ return flow
101‧‧‧ damper for air volume adjustment
200‧‧‧ divider
201‧‧‧Flow Regulating Damper
312‧‧‧ included in the flow path
313‧‧‧Filter device
322‧‧‧ supply channel
U‧‧‧Use area

FIG. 1 is a schematic diagram of an air-conditioning apparatus according to a first embodiment of the present invention. FIG. 2 is a diagram showing an example of environmental fluctuation conditions for explaining the effect of mitigating the influence of the air-conditioning apparatus shown in FIG. 1 on the influence of environmental changes. FIG. 3 is a diagram showing a graph for explaining the effect of mitigating the influence of the air-conditioning apparatus shown in FIG. 1 on the influence of environmental changes. FIG. 4 is a diagram showing a graph for explaining the effect of mitigating the influence of the air-conditioning apparatus shown in FIG. 1 on the influence of environmental changes. FIG. 5 is a diagram showing a graph for explaining the effect of mitigating the influence of the air-conditioning apparatus shown in FIG. 1 on the influence of environmental changes. FIG. 6 is a diagram showing a graph for explaining the effect of mitigating the influence of the air-conditioning apparatus shown in FIG. 1 on the influence of environmental changes. Fig. 7 is a schematic diagram of an air-conditioning apparatus according to a second embodiment of the present invention.

1‧‧‧air conditioner

2‧‧‧ Cooling Department

4‧‧‧Heating Department

10‧‧‧The first cooling unit

11‧‧‧compressor

12‧‧‧ condenser

13‧‧‧Expansion valve

14‧‧‧ cooling coil

15‧‧‧Piping

16‧‧‧Heating coil

18‧‧‧Heating volume control valve

20‧‧‧ 2nd cooling unit

21‧‧‧compressor

22‧‧‧ condenser

23‧‧‧Expansion valve

24‧‧‧ Cooling coil

25‧‧‧Piping

30‧‧‧air circulation path

30A‧‧‧The first flow path

30B‧‧‧Second flow path

31‧‧‧Nano Entrance

32‧‧‧ spout

41‧‧‧Temperature sensor

42‧‧‧Humidity sensor

44‧‧‧ upstream temperature sensor

50‧‧‧control unit

60‧‧‧Air blower

70‧‧‧ humidifying device

100‧‧‧ return flow

101‧‧‧ damper for air volume adjustment

200‧‧‧ divider

201‧‧‧Flow Regulating Damper

312‧‧‧ included in the flow path

313‧‧‧Filter device

322‧‧‧ supply channel

U‧‧‧Use area

Claims (5)

An air conditioning device, characterized by comprising: an air circulation path having a sodium inlet that takes in external air and a jet outlet that ejects the air that is taken in from the nano inlet; a blower that circulates air from the nano inlet to the jet outlet; The cooling section is stored in the air circulation path, and cools the air taken in from the above-mentioned intake port with a variable refrigeration capacity. The heating section is stored in the air circulation path, and heats the air from the above with a variable heating capacity. Receiving the air taken in by the inlet; and a return flow path extending from a position on the downstream side of the cooling section and on the downstream side of the heating section to a position on the upstream side of the cooling section and on the upstream side of the heating section; and via the return The air supplied to the upstream side of the cooling unit and upstream of the heating unit by the flow path merges with the external air before being incorporated by the above-mentioned intake port or the external air after being incorporated by the above-mentioned intake port; in the above-mentioned air circulation path, A partition member is provided to divide one part of the air circulation path into two; A partition member divides a part of the air flow path into a first flow path and a second flow path; the first cooling path is provided with the cooling section; and the first flow path and the second flow path are adjusted to be opened. Degree of flow adjustment damper; detecting the temperature of the air before or after being incorporated by the above-mentioned inlet with the air from the return flow path by the upstream temperature sensor; the above-mentioned flow adjustment damper By controlling based on the temperature detected by the upstream temperature sensor, the openings of the first flow path and the second flow path are adjusted. The air conditioning device of claim 1, wherein a damper for air volume adjustment is provided in the return flow path to adjust the air volume of the air flowing through the return flow path. For example, the air conditioning device of claim 2, wherein the air volume adjustment damper can manually and automatically adjust the air volume of the air flowing through the return flow path. If the air conditioning device of item 2 or 3 is requested, the above-mentioned blower can change the air volume. For example, the air conditioning device of claim 1, wherein a receiving flow path connected to the above-mentioned intake port to allow external air to circulate; and a filter device is provided in the above-mentioned receiving flow path; downstream of the above-mentioned filter device in the receiving flow path The position on the side communicates with the return flow path.