TW201703928A - Machining device - Google Patents

Abstract

The present invention relates to a machining device capable of appropriately detecting an abnormality during machining. The machining device comprises: a vibration signal generation means which generates a vibration signal corresponding to vibration; and a control means which determines a state of a machining tool on the basis of the vibration signal generated in the vibration signal generation means. The vibration signal generation means includes an ultrasonic vibrator which is disposed on a tool mount and generates voltage which becomes a vibration signal corresponding to the vibration of the machining tool, and a transmission means which is connected to the ultrasonic vibrator and transmits voltage to the control means, the control means includes a storage means, which includes a reference signal corresponding to a vibration signal caused by the vibration of the machining tool based on the rotation of a spindle, and a determination target signal corresponding to a vibration signal caused by the vibration of the machining tool based on the machining of a machined target object, and a determination means which determines a state of the machining tool on the basis of the signal obtained by removing the reference signal from the determination target signal.

Description

Processing device Field of invention

The present invention relates to a processing apparatus for processing a sheet-like workpiece.

Background of the invention

In a manufacturing process of a semiconductor element typified by an IC, an LSI or the like, a semiconductor tool made of a semiconductor material such as germanium may be used by using a grinding tool in which a plurality of grindstones are fixed on a disk-shaped base. Thinning processing (grinding) such as wafers. In addition, a cutting tool in which a cutting edge (cutter) is fixed to a disk-shaped base is used, and a bump electrode of a semiconductor wafer or a sealing resin of a package substrate is processed (cutting, spiral cutting) into a flat surface. .

In such processing, when the wear of the tool, the sudden change in the machining load, and other abnormalities occur, the workpiece cannot be properly processed. Therefore, the occurrence of an abnormality is determined by a method in which a skilled worker listens to the sound during processing or a method of monitoring the current of the motor for rotating the tool (for example, refer to Patent Document 1).

Advanced technical literature Patent literature

Patent Document 1: Japanese Patent Laid-Open No. 2011-143516

Summary of invention

However, the method of listening to the sound during processing has difficulty in versatility because of the need for a skilled worker, and because there is a bias in judgment based on the feeling. On the other hand, the method of monitoring the current of the motor can reduce the variation of the judgment as compared with the method of listening to the sound during processing, but there is a certain degree of measurement error, and thus it is not suitable for the detection of a slight abnormality.

The present invention has been made in view of the above problems, and an object thereof is to provide a processing apparatus capable of appropriately detecting an abnormality in processing.

A processing apparatus according to the present invention includes a working chuck for holding a workpiece, and a workpiece that processes the workpiece held by the working chuck, and the workpiece has a tool holder fixed at the end and rotatably a main shaft supported by the main shaft housing and a machining tool attached to the tool holder on the lower surface side and having a grinding grindstone, a polishing cloth, or a cutter, wherein the processing device is characterized by: a vibration signal generating member; Generating a vibration signal corresponding to the vibration of the processing tool; and a control member determining the state of the processing tool based on the vibration signal generated by the vibration signal generating member. The vibration signal generating member includes: an ultrasonic vibrator disposed on the tool holder and generating a voltage that is a vibration signal corresponding to vibration of the processing tool; and a transmitting member coupled to the ultrasonic vibrator, and the The voltage is delivered to the control. The conveying member includes: a first coil member disposed on the tool holder side; The second coil member is opposed to the first coil member so as to face the spindle housing side. The control unit includes: a memory, a memory reference signal, and a determination target signal, the reference signal corresponding to a vibration signal resulting from vibration of the processing tool accompanying rotation of the spindle, the determination target signal corresponding to the accompanying workpiece The vibration signal of the vibration of the processing tool is processed; and the determining means determines the state of the processing tool based on the signal obtained by removing the reference signal from the determination target signal.

Further, preferably, in the present invention, the control member further includes an analysis member that performs a Fourier transform on a waveform corresponding to a time change of the vibration signal to distinguish the vibration into frequency components.

Further, preferably, in the present invention, the memory member further memorizes an abnormality determination signal corresponding to a vibration signal resulting from vibration of the processing tool when an abnormality occurs in processing, the determining member is The signal obtained by removing the reference signal from the determination target signal is compared with the abnormality determination signal to determine whether there is an abnormality in processing.

The processing apparatus of the present invention includes a vibration signal generator that generates a vibration signal corresponding to the vibration of the processing tool, and a control that determines the state of the processing tool based on the vibration signal generated by the vibration signal generator. The abnormality accompanying the vibration of the processing tool is detected.

2‧‧‧grinding device (processing device)

4‧‧‧Abutment

4a‧‧‧ Opening

6‧‧‧Transportation agency

8a, 8b‧‧‧ piece

10‧‧‧ Alignment agency

11‧‧‧Processed objects

12‧‧‧ Moving into the institution

14‧‧‧ turntable

16, 72‧‧‧Working table

16a, 72a‧‧‧ Keep face

18‧‧‧Support structure

20‧‧‧Z-axis moving mechanism

22‧‧‧Z-axis guide

24‧‧‧Z-axis moving board

26‧‧‧Z-axis ball screw

28‧‧‧Z-axis pulse motor

30‧‧‧Support

32‧‧‧grinding unit (machined parts)

34‧‧‧ Moving out of the institution

36‧‧‧cleaning unit

38, 100‧‧‧Control devices (controls)

38a, 100a‧‧‧ memory (memory)

38b, 100b‧‧‧ Analysis Department (analytical)

38c, 100c‧‧‧Decision Department (decision)

40, 76‧‧‧ spindle housing

42, 78‧‧‧ spindle

44‧‧‧ Fixtures

46, 80‧‧‧ cover unit

46a, 80a‧‧‧ openings

48, 82‧‧·wheel seat (tool seat)

48a, 52a‧‧‧ upper surface

48b, 52b‧‧‧ lower surface

48c‧‧‧ openings

50‧‧‧ grinding wheel (machining tool)

52, 86‧‧ round abutments

52c‧‧‧Threaded Department

54‧‧‧Minestone (grinding grindstone)

56‧‧‧External thread

58, 90‧‧‧Vibration signal generating device (vibration signal generating device)

60, 92‧‧‧ Ultrasonic vibrators

62, 94‧‧‧Transportation channel (transportation)

64, 96‧‧‧1st inductor (1st coil part)

66, 98‧‧‧2nd inductor (2nd coil part)

70‧‧‧Rotary cutting device (processing device)

74‧‧‧Rotary cutting unit (machined parts)

84‧‧‧Rotary turning wheel (machining tool)

88‧‧‧Tools (cutting edge)

V‧‧‧ voltage

t‧‧‧Time

F‧‧‧frequency

X, Y, Z‧‧ Direction

Fig. 1 is a view schematically showing a configuration example of a grinding device.

Fig. 2 is an exploded perspective view schematically showing the configuration of the grinding unit.

Fig. 3 is an exploded perspective view schematically showing the configuration of the grinding unit.

4 is a view schematically showing a cross section and the like of a grinding unit.

Fig. 5(A) is a diagram showing an example of a waveform (waveform in the time domain) of a voltage transmitted to the control device, and Fig. 5(B) is a diagram showing an example of a waveform (waveform in the frequency domain) after Fourier transform.

6(A) is a diagram showing an example of a reference signal, FIG. 6(B) is a diagram showing an example of a determination target signal, and FIG. 6(C) is an example of a signal obtained by removing a reference signal from a determination target signal. Graphics.

Fig. 7 is a view schematically showing a configuration example of a turning device.

Form for implementing the invention

Embodiments of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a view schematically showing a configuration example of a grinding apparatus of the embodiment. As shown in Fig. 1, the grinding device (processing device) 2 is provided with a base 4 that supports each structure. An opening 4a is formed in the front end side of the upper surface of the base 4, and a conveying mechanism 6 for conveying a workpiece 11 (see FIG. 4) to be processed is provided in the opening 4a.

Further, in the region further forward of the opening 4a, the sheets 8a, 8b capable of accommodating the workpiece 11 are placed. The workpiece 11 may be, for example, a semiconductor wafer or a resin substrate in which a disk shape is formed, a ceramic substrate, a package substrate, or the like. However, the workpiece 11 is not limited thereto, and a plate material of any material or shape can be used as the workpiece 11.

A positioning mechanism 10 that performs alignment of the workpiece 11 is provided on the placement area of the sheet stack 8a and the rear of the opening 4a. The registration mechanism 10 is carried by, for example, the transport mechanism 6 from the cassette 8a, and placed on the registration mechanism 10. The center of the workpiece 11 is aligned.

At the rear of the registration mechanism 10, a loading mechanism 12 that sucks and holds the workpiece 11 and is rotatable is provided. Behind the loading mechanism 12, a turntable 14 that rotates around a rotation axis parallel to the vertical direction (Z-axis direction) at a predetermined angular range is provided. On the upper surface of the turntable 14, a plurality of (three in the present embodiment) suction holding table 16 for holding the workpiece 11 are provided at substantially equal angular intervals.

The workpiece 11 that has been aligned by the registration mechanism 10 is carried by the loading mechanism 12, and the work chuck 16 that has been positioned at the front loading/unloading position is carried. The turntable 14 is rotated in a predetermined rotation direction, and the work chuck 16 is positioned in the order of loading and unloading the position, the first grinding position, and the second grinding position.

Each of the work chucks 16 is coupled to a rotational drive source (not shown) such as a motor, and is rotated about a rotation axis parallel to the vertical direction. The upper surface of each of the work clamps 16 serves as a holding surface 16a for sucking and holding the workpiece 11. The holding surface 16a is connected to a suction source (not shown) through a flow path (not shown) formed inside the working chuck 16. The workpiece 11 carried into the work chuck 16 is attracted by the negative pressure of the suction source acting on the holding surface 16a.

At the rear of the turntable 14, two support structures 18 formed in a columnar shape are vertically erected. A Z-axis moving mechanism 20 is provided on the front surface side of each of the support structures 18. The Z-axis moving mechanism 20 includes a pair of Z-axis guide rails 22 that are disposed on the front surface of the support structure 18 and that are parallel to the Z-axis direction. A Z-axis moving plate 24 is slidably disposed on the Z-axis guide 22.

On the rear surface side (back side) of the Z-axis moving plate 24, a nut is provided A portion (not shown) is provided with a Z-axis ball screw 26 that is parallel to the Z-axis guide 22 in the nut portion. A Z-axis pulse motor 28 is coupled to one end of the Z-axis ball screw 26. By rotating the Z-axis ball screw 26 with the Z-axis pulse motor 28, the Z-axis moving plate 24 is moved in the Z-axis direction along the Z-axis guide 22.

A support 30 is fixed to the front surface (front surface) of each of the Z-axis moving plates 24. A grinding unit (machining member) 32 that grinds the workpiece 11 is supported on each of the support members 30. The workpiece 11 that is positioned to the first grinding position or the second grinding position together with the work chuck 16 is ground by each grinding unit 32. Details regarding the grinding unit 32 will be described later.

At a position adjacent to the loading mechanism 12, a carry-out mechanism 34 that sucks and holds the workpiece 11 after grinding is provided. A washing unit 36 that cleans the workpiece 11 after grinding is provided in front of the unloading mechanism 34 and behind the opening 4a. The workpiece 11 washed by the cleaning unit 36 is conveyed by the transport mechanism 6 and stored in, for example, the cassette 8b.

The components of the transport mechanism 6, the registration mechanism 10, the loading mechanism 12, the turntable 14, the work chuck 16, the Z-axis moving mechanism 20, the grinding unit 32, the carry-out mechanism 34, and the cleaning unit 36 are connected to the control device. (Control) 38. The control device 38 controls the operation of each unit to appropriately grind the workpiece 11.

2 and 3 are exploded perspective views schematically showing the structure of the grinding unit 32, and FIG. 4 is a view schematically showing a cross section and the like of the grinding unit 32. Further, in FIGS. 2, 3, and 4, a part of the configuration of the grinding unit 32 is omitted.

The grinding unit 32 is provided with a cylindrical main shaft housing 40. On the spindle Inside the casing 40, a main shaft 42 that rotates about the Z axis is housed. The lower end portion of the main shaft 42 protrudes from the main shaft housing 40 to the outside. A rotary drive source (not shown) such as a motor that rotates the main shaft 42 is coupled to the upper end side of the main shaft 42.

A disk-shaped cover unit 46 is fixed to the lower end portion of the spindle housing 40 through the fixture 44. A circular opening 46a penetrating in the vertical direction is formed in the center of the cover unit 46, and a lower end portion of the main shaft 42 is inserted into the opening 46a.

A disk-shaped wheel base (tool base) 48 is detachably fixed to the lower end of the main shaft 42, and a grinding wheel (machining tool) 50 is mounted on the lower surface 48b side of the wheel base 48. The grinding wheel 50 includes a cylindrical wheel base 52 formed of a metal material such as aluminum or stainless steel, and a plurality of grindstones (grinding grindstones) arranged annularly on the lower surface 52b side of the wheel base 52. 54.

A plurality of (four in the present embodiment) female screw portions 52c are formed on the upper surface 52a side of the wheel base 52, and the female screw portions 52c are formed with threads (thread grooves) on the inner circumferential surface of the recess. On the other hand, in the position corresponding to the internal thread portion 52c of the wheel base 48, a plurality of (four in the present embodiment) openings 48c for penetrating the wheel base 48 from the upper surface 48a to the lower surface 48b are formed. By screwing the external thread 56 to the internal thread portion 52c through the opening 48c, the grinding wheel 50 can be detachably fixed to the lower surface 48b side of the wheel base 48.

As shown in FIG. 4, in the state in which the workpiece 11 is sucked and held by the work chuck 16, the work chuck 16 and the grinding wheel 50 are rotated together, and the grinding liquid such as pure water is supplied while grinding. The stone 54 contacts the upper surface of the workpiece 11, whereby the workpiece 11 can be ground.

Here, the grinding unit 32 is provided to detect the vibration of the grinding wheel 50. Vibration detecting mechanism. The vibration detecting mechanism includes a vibration signal generating device (vibration signal generating member) 58 (FIG. 4) that can generate a vibration signal corresponding to the vibration of the grinding wheel 50.

The vibration signal generating device 58 includes a plurality of (four in the present embodiment) ultrasonic vibrators 60 that are fixed to the inside of the wheel base 48. The ultrasonic vibrator 60 is made of, for example, barium titanate (BaTiO ₃ ), lead zirconate titanate (Pb(Zi, Ti)O ₃ ), lithium niobate (LiNbO ₃ ), lithium niobate (LiTaO ₃ ), or the like. It is formed to convert the vibration of the grinding wheel 50 into a voltage (vibration signal).

The ultrasonic vibrator 60 is configured to resonate with vibration at a predetermined frequency. Therefore, the frequency of the vibration detectable by the vibration detecting mechanism can be determined in accordance with the resonance frequency of the ultrasonic vibrator 60. According to this, by replacing the ultrasonic vibrator 60 and the wheel base 48 together, it is possible to match the type (material, size, weight, etc.) of the grinding wheel 50 or the workpiece 11 and the abnormality of the occurrence frequency. The vibration detection mechanism is optimized.

For example, when the resonant frequency of the ultrasonic vibrator 60 is any one of 50 kHz to 100 kHz, 100 kHz to 300 kHz, and 300 kHz to 500 kHz, the frequency of 50 kHz to 500 kHz can be appropriately detected by appropriately replacing the three types of wheel bases 48. The vibration of the range.

Further, in order to detect vibration in a wide frequency range without changing the wheel base 48, a plurality of ultrasonic vibrators 60 having different resonance frequencies may be provided in one wheel base 48. For example, when three types of ultrasonic vibrators 60 having a resonance frequency of 50 kHz to 100 kHz, 100 kHz to 300 kHz, and 300 kHz to 500 kHz are provided in one wheel base 48, vibrations in a frequency range of 50 kHz to 500 kHz can be detected without exchanging the wheel base 48. .

Here, it is preferable to arrange the plurality of ultrasonic vibrators 60 symmetrically about the axis of the main shaft 42. Thereby, the vibration of the grinding wheel 50 can be detected with high precision. Further, the number, arrangement, shape, and the like of the ultrasonic vibrators 60 are not limited to those shown in FIGS. 3 and 4 . For example, it is also possible that the wheel base 48 is provided with only one ultrasonic vibrator 60.

In the ultrasonic vibrator 60, a non-contact type conveying path (transport member) 62 (Fig. 4) for transmitting a voltage generated by the ultrasonic vibrator 60 is connected. The transmission path 62 includes a first inductor (first coil) 64 connected to the ultrasonic vibrator 60, and a second inductor (second coil) 66 that faces at a predetermined interval with respect to the first inductor 64. .

The first inductor 64 and the second inductor 66 are most typically annular coils in which wires are wound, and are fixed to the upper surface 48a side of the wheel housing 48 and the lower surface side of the cover unit 46, respectively. .

As described above, the first inductor 64 and the second inductor 66 are opposed to each other and magnetically coupled. Therefore, the voltage generated by the ultrasonic vibrator 60 is transmitted to the second inductor 66 side by mutual induction between the first inductor 64 and the second inductor 66.

In the second inductor 66, the control device 38 is connected to the wiring or the like. The control device 38 can determine the vibration state of the grinding wheel 50 based on the voltage transmitted from the second inductor 66.

Specifically, the control device 38 includes a memory unit (memory) 38a that stores information such as a voltage (vibration signal) transmitted from the second inductor 66, and an analysis unit (analyzer) 38b, which is equivalent to each arbitrary one. The time variation waveform (waveform of the time domain) of the voltage (vibration signal) transmitted per unit time is borrowed The spectrum analysis is performed by Fourier transform (for example, fast Fourier transform), and the determination unit (decision) 38c determines the state of the grinding wheel 50.

Further, as the unit time of the spectrum analysis, the time required for grinding the arbitrary thickness of the workpiece 11 (per grinding thickness) and the time required for the grinding of one workpiece 11 can be considered (per 1 workpiece) and other aspects. Details regarding the various parts of the control unit 38 will be described later.

FIG. 5(A) is a diagram showing an example of a waveform (waveform in the time domain) of a voltage transmitted to the control device 38, and FIG. 5(B) is a diagram showing an example of a waveform (waveform in the frequency domain) after Fourier transform. In addition, in FIG. 5(A), the vertical axis represents voltage (V) and the horizontal axis represents time (t), and in FIG. 5(B), the vertical axis represents the amplitude and the horizontal axis represents the frequency. (f).

When the waveform of the voltage (vibration signal) derived from the vibration signal generating device 58 is Fourier transformed by the analyzing unit 38b of the control device 38, the vibration of the grinding wheel 50 is divided into main ones as shown in Fig. 5(B). The frequency component makes it easy to resolve the anomalies that occur during grinding. Thereby, the abnormality in the grinding can be detected instantaneously and accurately.

Hereinafter, a flow of detection of an abnormality performed by the grinding apparatus 2 of the present embodiment will be described. Initially, a reference signal acquisition step is performed as a pre-processing of detection, and the reference signal acquisition step is to acquire a reference signal corresponding to a background level. In the reference signal acquisition step, first, the grinding wheel 50 is rotated in a state where there is no abnormality in each portion.

As a result, a voltage (vibration signal) due to the vibration of the grinding wheel 50 accompanying the rotation of the main shaft 42 is generated from the ultrasonic vibrator 60. A waveform (time domain waveform) equivalent to the time variation of the generated voltage is memorized in control The memory portion 38a of the device 38.

Next, the analyzing unit 38b of the control device 38 reads the waveform of the voltage stored in the memory unit 38a, and performs Fourier transform (Fast Fourier Transform). As a result, the waveform of the voltage (vibration signal) in the time domain is converted into a reference signal (waveform in the frequency domain). Fig. 6(A) is a diagram showing an example of a reference signal. The obtained reference signal is memorized in the memory unit 38a.

After the reference signal acquisition step, the actual detection step begins. In the actual detection step, the determination target signal acquisition step is performed, and the determination target signal acquisition step is to grind the workpiece 11 to acquire a determination target signal to be determined. In the determination target signal acquisition step, first, the grinding wheel 50 is rotated to grind the workpiece 11.

As a result, a vibration voltage (vibration signal) due to the vibration of the grinding wheel 50 accompanying the grinding of the workpiece 11 is generated from the ultrasonic vibrator 60. A waveform (waveform in the time domain) corresponding to the temporal change of the generated voltage is stored in the memory portion 38a of the control device 38.

Next, the analyzing unit 38b of the control device 38 reads the waveform of the voltage stored in the memory unit 38a, and performs Fourier transform (Fast Fourier Transform). As a result, the waveform of the voltage (vibration signal) in the time domain can be converted into the determination target signal (waveform in the frequency domain). Fig. 6(B) is a diagram showing an example of a determination target signal. The obtained determination target signal is stored in the memory unit 38a.

After the determination target signal acquisition step, a comparison determination step of determining the state of the grinding wheel 50 by comparing the determination target signal with the reference signal is performed. In this comparison determination step, first, The determination unit 38c reads the reference signal and the determination target signal that have been stored in the storage unit 38a, and removes the reference signal from the determination target signal.

Specifically, the signal intensity (amplitude) of the reference signal is subtracted (subtracted) from the signal strength (amplitude) of the determination target signal in the entire frequency range of the detection target. At this time, in order to appropriately remove the reference signal in the determination target signal, the signal strength (amplitude) of the determination target signal or the reference signal may be multiplied by an arbitrary value.

Fig. 6(C) is a diagram showing an example of a signal obtained by removing a reference signal from a determination target signal. As described above, by removing the reference signal from the determination target signal, it is possible to appropriately determine the state of the grinding wheel 50 and detect an abnormality in the grinding.

Specifically, for example, by comparing the signal obtained by removing the reference signal from the determination target signal with the abnormality determination signal previously stored in the memory unit 38a, it is possible to determine whether or not there is an abnormality in the grinding. In other words, when part or all of the vibration mode (vibration component) in the abnormality determination signal matches the vibration mode in the signal obtained by the determination target signal removal reference signal, the determination unit 38c determines that it has occurred. An exception to the vibration mode.

In addition, the abnormality determination signal is subjected to Fourier transform (fast Fourier transform) in the analysis unit 38b by the waveform of the voltage (vibration signal) caused by the vibration of the grinding wheel 50 when an abnormality occurs during the grinding. get.

As described above, the grinding apparatus (processing apparatus) 2 of the present embodiment includes a vibration signal generating device (vibration signal generator) 58 that generates a vibration signal corresponding to the vibration of the grinding wheel 50, and a vibration signal generating device. The control device (controller) 38 that determines the state of the grinding wheel 50 is set by the vibration signal generated by 58. Therefore, the abnormality accompanying the vibration of the grinding wheel 50 can be appropriately detected.

Further, in the grinding apparatus 2 of the present embodiment, since the waveform (time domain waveform) corresponding to the time change of the voltage (vibration signal) is subjected to Fourier transform, the voltage (vibration signal) is directly analyzed. By comparison, it is easy to analyze the abnormality that occurs during grinding. Thereby, the abnormality in grinding can be detected with high precision.

Furthermore, the present invention is not limited to the description of the above embodiments, and various modifications can be made. For example, in the above-described embodiment, the voltage (vibration signal) is subjected to Fourier transform, but the voltage may be analyzed without performing Fourier transform.

Further, by using the configuration of the above-described embodiment, it is possible to automatically find the setting of the reference height of the grinding wheel (machining tool) 50. In this arrangement, for example, the control device 38 gradually lowers the grinding wheel 50 and brings the lower end of the grinding wheel 50 into contact with the holding surface 16a of the working chuck 16.

Further, the control device 38 determines the contact between the grinding wheel 50 and the work chuck 16 based on the voltage (vibration signal) generated by the ultrasonic vibrator 60, and sets the height of the grinding wheel 50 at that time as the reference height. . In addition, when the contact of the grinding wheel 50 with the work chuck 16 is detected, the control device 38 stops the lowering of the grinding wheel 50.

Further, in the above-described embodiment, the grinding device 2 for grinding the workpiece 11 is described. However, the processing device of the present invention may be a polishing device for polishing the workpiece 11. The basic structure of the polishing device (processing device), The same as the grinding device 2. However, in the polishing apparatus, a polishing pad (machining tool) provided with a polishing cloth on the lower surface side is used instead of the grinding wheel 50.

Further, the processing apparatus of the present invention may be a turning device that rotates (screws and cuts) the workpiece 11. Fig. 7 is a view schematically showing a configuration example of a turning device. As shown in FIG. 7, the turning device (processing device) 70 is provided with a work chuck 72 that sucks and holds the workpiece 11. Below the work chuck 72, a horizontal moving mechanism (not shown) is provided, and the work chuck 72 is moved in the horizontal direction by the horizontal moving mechanism.

The upper surface of the work chuck 72 serves as a holding surface 72a for sucking and holding the workpiece 11. This holding surface 72a is connected to a suction source (not shown) through a flow path (not shown) formed inside the work chuck 72. The workpiece 11 carried into the work chuck 72 is sucked by the negative pressure of the suction source acting on the holding surface 72a.

Above the work chuck 72, a turning unit (machined member) 74 that is turned (screw-cut) the workpiece 11 is disposed. The configuration of the turning unit 74 is similar to that of the grinding unit 32 of the above embodiment.

The turning unit 74 is provided with a cylindrical main shaft housing 76. Inside the spindle housing 76, a spindle 78 that rotates about the Z axis is housed. The lower end portion of the main shaft 78 protrudes from the main shaft housing 76 to the outside. A rotary drive source (not shown) such as a motor that rotates the spindle 78 is coupled to the upper end side of the spindle 78.

A disk-shaped cover unit 80 is fixed to the lower end portion of the spindle housing 76. A circular opening 80a penetrating in the vertical direction is formed in the center of the cover unit 80, and a lower end portion of the main shaft 78 is inserted into the opening 80a.

A disc-shaped wheel base is detachably fixed to the lower end of the main shaft 78 A (tool base) 82 is provided with a turning wheel (machining tool) 84 on the lower surface side of the wheel base 82. The turning wheel 84 includes a cylindrical wheel base 86 formed of a metal material such as aluminum or stainless steel, and a cutter (cutting blade) 88 made of diamond or the like fixed to the lower surface side of the wheel base 86.

As shown in FIG. 7, the turning wheel 84 is rotated while the workpiece 11 is attracted and held by the working chuck 72, so that the working chuck 72 is moved in the horizontal direction and the cutter 88 is brought into contact with the workpiece 11. The surface, whereby the workpiece 11 can be turned.

A vibration detecting mechanism for detecting the vibration of the turning wheel 84 is provided in the turning unit 74. The vibration detecting mechanism includes a vibration signal generating device (vibration signal generating member) 90 that can generate a vibration signal corresponding to the vibration of the turning wheel 84.

The vibration signal generating device 90 is provided with a plurality of ultrasonic vibrators 92 fixed to the inside of the wheel base 82. Furthermore, it is also possible that the wheel base 82 is provided with only one ultrasonic vibrator 92.

In the ultrasonic vibrator 92, a non-contact type conveying path (transport member) 94 for transmitting a voltage generated by the ultrasonic vibrator 92 is connected. The transmission path 94 includes a first inductor (first coil) 96 connected to the ultrasonic vibrator 60, and a second inductor (second coil) 98 that faces the first inductor 96 and faces at a predetermined interval. .

The first inductor 96 and the second inductor 98 are most typically annular coils in which wires are wound, and are fixed to the upper surface side of the wheel housing 82 and the lower surface side of the cover unit 80, respectively.

As described above, the first inductor 96 and the second inductor 98 face each other. And magnetically coupled. Therefore, the voltage generated by the ultrasonic vibrator 92 is transmitted to the second inductor 98 side by mutual induction between the first inductor 96 and the second inductor 98.

In the second inductor 98, the control device 100 is connected via a wiring or the like. The control device 100 can determine the vibration state of the turning wheel 84 based on the voltage transmitted from the second inductor 98.

Specifically, the control device 100 includes a memory unit (memory) 100a that stores information such as a voltage (vibration signal) transmitted from the second inductor 98, and an analysis unit (analyzer) 100b that corresponds to each arbitrary unit. The waveform of the time change of the voltage (vibration signal) transmitted by the time (waveform in the time domain) is subjected to spectrum analysis by Fourier transform (for example, fast Fourier transform), and the determination unit (decision) 100c determines the state of the rotary wheel 84. The functions of the storage unit 100a, the analysis unit 100b, and the determination unit 100c are the same as those of the storage unit 38a, the analysis unit 38b, and the determination unit 38c of the above-described embodiment.

The turning device (processing device) 70 configured as described above also includes a vibration signal generating device (vibration signal generating device) 90 that generates a vibration signal corresponding to the vibration of the turning wheel (machining tool) 84, and is generated based on the vibration signal. The control device (controller) 100 that determines the state of the turning wheel 84 by the vibration signal generated by the device 90 can appropriately detect the abnormality accompanying the vibration of the turning wheel 84.

In addition, the configuration, the method, and the like of the above-described embodiments can be appropriately modified without departing from the scope of the invention.

2‧‧‧grinding device (processing device)

11‧‧‧Processed objects

16‧‧‧Working table

16a‧‧‧ Keep face

32‧‧‧grinding unit (machined parts)

38‧‧‧Control device (control)

38a‧‧‧Memory (memory)

38b‧‧‧analysis department (analytical part)

38c‧‧‧Decision Department (Decision)

40‧‧‧ spindle housing

42‧‧‧ Spindle

46‧‧‧ Cover unit

46a‧‧‧ openings

48‧‧·wheel seat (tool seat)

50‧‧‧ grinding wheel (machining tool)

52‧‧‧ wheel abutment

54‧‧‧Minestone (grinding grindstone)

58‧‧‧Vibration signal generator (vibration signal generator)

60‧‧‧Ultrasonic vibrator

62‧‧‧Transport channel (transportation)

64‧‧‧1st inductor (1st coil part)

66‧‧‧2nd inductor (2nd coil part)

Claims (3)

A processing device includes a working clamping table for holding a workpiece, and a processing member for processing a workpiece to be held by the working clamping table, and the machining member has a tool holder fixed at an end portion thereof and is rotatably received by the spindle housing a supporting main shaft and a processing tool mounted on the tool holder and having a grinding stone, a polishing cloth, or a cutter on the lower surface side, wherein the processing device is characterized in that: the vibration signal generating member is generated to generate a vibration signal of the vibration of the processing tool; and a control member for determining a state of the processing tool according to the vibration signal generated by the vibration signal generating member, the vibration signal generating member comprising: an ultrasonic vibration device disposed on the tool holder And generating a voltage that is a vibration signal corresponding to the vibration of the processing tool; and a transmitting member coupled to the ultrasonic vibrator and transmitting the voltage to the control member, the transmitting member comprising: the first coil member, And the second coil member is disposed on the spindle housing side at a distance from the first coil member, and the control member includes a memory member and a memory reference No. and determination target signal, the reference signal corresponding to the vibration caused accompanying the rotation of the main shaft of the processing tool a vibration signal corresponding to a vibration signal of the vibration of the processing tool associated with the processing of the workpiece; and a determining unit that determines the signal obtained by removing the reference signal from the determination target signal The status of the processing tool. The processing device of claim 1, wherein the control member is further provided with a parsing member that performs a Fourier transform on a waveform corresponding to a time variation of the vibration signal to distinguish the vibration into frequency components. The processing device of claim 1 or 2, wherein the memory member further memorizes an abnormality determination signal corresponding to a vibration signal resulting from vibration of the processing tool when an abnormality occurs in processing, the determining member is The signal obtained by removing the reference signal from the determination target signal is compared with the abnormality determination signal to determine whether there is an abnormality in processing.