TW201641294A - Method for producing rugged pattern compact article and imprinting apparatus - Google Patents

Abstract

The present invention provides a method for producing a rugged pattern compact article and the likes, which are capable of easily putting on and taking off a mold to/from a roll, and reusing the mold removed from the roll, and the imprinting operation and curing operation do not need to be conducted at the same time. The method for producing a rugged pattern compact article of the present invention contains: a step (1) of removable keeping a film mold having a rugged pattern on a surface thereof on a roll; a step (2) of carrying a transferred article including a transferred article resin layer on a substrate caring part; a step (3) of let the film in contact with a surface of the transferred article resin layer and keeping the roll rotating, for removing the film mold from the cured transferred article resin layer and wrapping it on the transferred article resin layer for imprinting the rugged pattern on the film mold into transferred article resin layer; a step (4) of curing the transferred article resin layer; and a step (5) of contacting a roll with the film mold being cured and laminated on the transferred article resin layer and keep it rotating, for removing the film mold from the cured transferred article resin layer and wrapping it on the roll.

Description

Method for manufacturing concave-convex pattern forming body and imprinting device

The present invention relates to a method for producing a textured pattern forming body and an apparatus used therefor.

The nanoimprint technique is a method in which a mold having a pattern of irregularities is pressed against a liquid resin on a substrate to transfer a pattern of a mold to a resin. The pattern of the unevenness is from the nanometer level of 10 nm to about 100 μm, and is widely used in various fields such as semiconductor materials, optical materials, memory media, micro-machines, biology, and the environment.

The type of the nanoimprint is exemplified by pressing a mold having a predetermined shape on the surface thereof to a thermoplastic resin which is melted at a glass transition temperature or higher, and embossing the surface shape of the mold to a thermoplastic resin. After cooling, the hot nano embossing of the mold is removed; and the same mold is pressure-bonded to the photocurable resin, and the photocurable resin is cured by an energy ray such as ultraviolet ray irradiation, and the photosensitive nanometer of the mold is removed. Embossing, etc.

Fig. 3 is a view showing a device for transferring a shape of a flat mold to a transferable resin layer on a flat substrate as an example of a conventional nanoimprinting apparatus, that is, a so-called plate to plate device. Schematic Figure. In this apparatus, the plate-shaped mold of the arm 101 is fixed, and the arm 101 is pressed in the transfer-substrate resin layer applied to the flat substrate by the arm 101 in the downward direction to perform nanoimprinting. After the printed resin layer is cured, the mold is peeled off from the cured transfer body resin layer by moving the arm 101 in the upward direction.

According to this method, the transfer operation and the hardening operation of the resin layer to be transferred can be independently performed. However, in the method of crimping the plate-shaped mold to the plate-shaped transfer-substrate resin layer, bubbles are allowed to enter between the mold and the transfer-substrate resin layer at the time of pressure bonding, and harden in this state, so that it is difficult The shape of the mold is correctly transferred to the resin layer to be transferred. Further, when the mold body layer is cured and the mold is peeled off from the cured transfer resin layer, it takes a lot of force, so that the mold and the hardened transfer resin layer may be damaged. .

Fig. 4 is a view showing another example of a so-called roll-to-roll type apparatus for transferring a shape of a mold on a roll to a resin on a roll as an example of another conventional nanoimprinting apparatus. . In this apparatus, a mold having a shape on the outer side and being wound and fixed on a roll is pressed against a transfer resin layer on a substrate to perform nanoimprinting.

Fig. 5 is a view showing a so-called roll to plate type apparatus for transferring a shape of a mold on a roll to a resin on a flat substrate as an example of another conventional nanoimprinting apparatus. . In this apparatus, a mold having a shape on the outer side and being wound and fixed on a roll is pressed against a transfer resin layer on a substrate to perform nanoimprinting.

For this type of roll-to-roll and roll-to-plate method, due to the mold Since the contact area with the object to be transferred is small, there is no problem that the above-described plate-to-plate type air bubbles enter, and when the mold is peeled off from the hardened transfer body resin layer, the mold or the product does not Causes damage.

In the method of using the roller, the mold is attached and fixed to the roller. However, if impurities are mixed into the attachment surface or bubbles infiltrate during attachment, there is a problem of becoming a transfer defect, and the attachment is required again. . However, since the mold is fixed to the roll with a strong adhesive, the mold can no longer be used once it is peeled off from the roll.

Therefore, Patent Document 1 discloses an adhesive sheet for fixing an imprint mold which is easy to peel a mold from a roll. Patent Document 1 is a problem in that it is impossible to peel a mold from a roll at the time of imprinting. In addition, the mold is peeled off together with the adhesive sheet.

Further, in the method of using the roller, when the timing of the contact of the mold with the transfer target is only transfer, it is necessary to simultaneously perform the transfer operation toward the resin layer of the transfer target and the hardening of the resin layer of the transfer target. operating. Therefore, the state of the imprint apparatus is limited, and the type of the resin to be transferred is limited to the photocurable resin.

In order to solve the problem of the prior art roll type imprint apparatus, Patent Document 2 describes an apparatus for separating a roll from a mold. However, in this device, it is necessary to have a bulky structure for lifting and lowering the mold.

Prior technical literature Patent literature

Patent Document 1: International Publication No. 2013/031710

Patent Document 2: Japanese Patent No. 5232077

An object of the present invention is to provide a method in which a bubble does not enter when a mold is brought into contact with a resin layer to be transferred, and when the mold is peeled off from the hardened transfer resin layer, the mold and the cured portion are A method of producing a concave-convex pattern forming body in which the transfer body resin layer does not cause damage, and an imprint apparatus.

Further, an object of the present invention is to provide a method for producing a concave-convex pattern forming body in which a mold can be easily attached and detached with respect to a roll in an imprint apparatus using a roll as a pressure applying means, and the mold can be reused even if it is peeled off from the roll. And imprinting device.

Further, an object of the present invention is to provide a method and a stamping apparatus for producing a concave-convex pattern forming body which do not require simultaneous transfer operation and hardening operation.

The present invention is, for example, regarding the following [1] to [4].

[1] A method for producing a concave-convex pattern forming body, comprising: a film mold having a concave-convex pattern on a surface thereof, detachably winding and holding on a roll having a locking property on a surface; (1); And a step (2) of depositing the transfer target resin layer formed on the substrate on the substrate mounting portion; and winding the film obtained in the step (1) on the roll film mold Abutting on the surface of the resin layer to be transferred, the roller is rotated to form a film The mold is peeled off from the roll and rolled up onto the transfer body resin layer, and the concave and convex pattern of the surface of the film mold is transferred to the transfer body resin layer step (3); a step (4) of curing the transferred body resin layer in a state in which the surface layer has a film mold by the above step (3); and a step of abutting the roller having the locking ability on the surface in the step (4) The obtained film mold which is laminated on the hardened transfer-resist resin layer is rotated, and the film mold is peeled off from the hardened transfer-substrate resin layer, and is taken up on the roll (5).

[2] The method for producing a concave-convex pattern forming body according to [1], wherein an adhesive layer is present on the surface of the roller.

[3] The method for producing a concave-convex pattern forming body according to [11], wherein the steps (1) to (5) are continuously performed.

[4] An embossing apparatus comprising: a roll having a locking property on a surface thereof; a film mold having a concave-convex pattern on a surface which is detachably held on the surface of the roller and detachably held on the surface of the roller, and a resin hardening means for hardening the resin layer of the transfer body; and transferring the concave-convex pattern formed on the surface of the film mold to the resin layer to be transferred, wherein the roller on which the film mold is wound is disposed The film body of the transfer body is rotated by the roll in the winding direction of the film mold, so that the film mold can be supplied from the surface of the roll to the surface of the resin layer of the transfer body; and hardened by the resin Means to harden the resin layer of the transferred body After the transformation, The roller is disposed on the hardened layer of the transfer target resin layer, and the transfer body resin layer on which the concavo-convex pattern of the film mold is transferred is transferred by rotating the roller toward the winding direction of the film mold. The film mold is peeled off so that the film mold can be taken up and recovered on the surface of the roll.

According to the production method of the present invention, the mold is used as the pressure applying means, and the mold is peeled off from the roll at the time of transfer and laminated on the transfer body resin layer, so that it is not necessary to perform the transfer operation and the hardening operation at the same time. Further, since the peeled mold can be reused, the uneven pattern forming body can be continuously produced. Then, the mold laminated on the hardened transfer-resist resin layer can be peeled off from the cured transfer-receiving resin layer by the peeling angle which is only low in curvature of the roll, so that the mold and the hardening at the time of peeling The subsequent transfer body resin layer does not cause damage. Further, since the mold is transferred to the transfer body resin layer using a roller, the bubbles do not enter between the mold and the transfer body resin layer.

Further, the imprint apparatus of the present invention can reduce the size of the stamping apparatus as compared with the conventional roll-to-plate type apparatus, as in the case of the conventional roll-to-plate type apparatus.

1‧‧‧ Roll

2‧‧‧Rolling surface with locking ability

3‧‧‧film mould

4a‧‧‧Transferd resin layer before hardening

4b‧‧‧ Hardened transfer resin layer

5‧‧‧Substrate

6‧‧‧Substrate placement

7‧‧‧Retention means

8‧‧‧Fixed layer of film mold

101‧‧‧ Arm

Fig. 1 is a schematic view showing the steps of a method of producing a textured pattern forming body of the present invention.

Fig. 2 is a view showing a method of manufacturing a concave-convex pattern forming body of the present invention. A schematic representation of the retention means of the imprinting device used.

Fig. 3 is a schematic view showing a conventional plate-to-plate type imprint apparatus.

Fig. 4 is a schematic view showing a conventional roll-to-roll type imprint apparatus.

Fig. 5 is a schematic view showing a conventional roll-to-plate type imprint apparatus.

A method for producing a concave-convex pattern forming body according to the present invention, comprising: a film mold having a concave-convex pattern on a surface thereof, and detachably winding and holding the film (1) on a roll having a locking property; and comprising a substrate and a step (2) of placing the transfer target of the transfer-substrate resin layer on the substrate on the substrate mounting portion; and the film mold obtained by winding the film obtained in the step (1) on the roll is in contact with The surface of the transfer-receiving resin layer is rotated by a roll, the film mold is peeled off from the roll and wound up onto the transfer body resin layer, and the uneven pattern on the surface of the film mold is transferred to the transfer body resin. Step (3) of the layer; step (4) of hardening the transferred body resin layer in a state where the surface layer has a film mold by the above step (3); and abutting the roller having the locking ability on the surface The film mold which is laminated on the hardened transfer-resist resin layer obtained in the above step (4) is rotated, and the film mold is peeled off from the hardened transfer-substrate resin layer and taken up on a roll. Step (5).

<step 1)>

As shown in Fig. 1 (1), the film mold 3 is wound around the locking layer 2 of the roller 1 having the locking ability on its surface. At this time, the film mold 3 has the surface having no uneven pattern as the surface side of the roll 1, that is, has a concave-convex pattern. The surface is wound around the roll 1 as the outer side. Thus, the film mold 3 is held on the roller 1. When the length of the outer peripheral direction of the roll of the film mold 3 is shorter than the outer circumference of the roll 1, the entire length of the film mold 3 is wound around the roll 1, and the length of the outer peripheral direction of the roll of the film mold 3 is more than the outer circumference of the roll 1. For a long period of time, the film mold 3 of the outer peripheral length of the roll is wound around the roll 1, and the film mold 3 of a larger amount than the outer circumference of the roll is superposed on the roll 1 to be wound.

First, the roller 1 will be described.

The size of the roller 1 is preferably 23 to 1000 mm in diameter and 10 to 3000 mm in width. Examples of the material of the roller 1 include metal, carbon, plastic, polyoxyethylene rubber, and ceramics. The roller 1 is usually rotated by being connected to a driving means.

The term "locking ability" as used herein means a function of keeping the film mold 3 at a detachable level.

Further, from the viewpoint of reliably locking the film mold 3, it is preferable that the entire surface of the roll 1 has a locking ability.

The locking ability of the surface of the roll 1 is, for example, static electricity, pressure reduction, adhesion, and the like, and it is preferable to use adhesion from the viewpoint of handling.

Examples of the above static electricity include those using a charged row. For example, when polyester is used as the resin for forming a film mold, since the polyester is easily negatively charged, it is preferable to select a glass or lead which is easily positively charged as a material of the roller to enhance the electrostatic force.

Further, a voltage may be applied to the roller to actively apply an electrostatic force. Specifically, a Coulomb force can be generated on the surface of a medium such as polyimide, cerium oxide ceramic, quartz glass, or the like, and this voltage is applied to the roller to adjust the locking ability of the roller.

In the above-described example of the pressure reduction, the fine pores may be provided in the roll, and the vacuum suction may be performed through the fine holes, and the degree of vacuum may be adjusted to 0.1 kPa to 0.1 MPa to thereby adjust the locking ability of the roll.

Examples of the above-mentioned adhesion include a method of applying an adhesive to a surface of a roll, and a method of attaching an adhesive sheet to a surface of a roll.

As the adhesive, an adhesive mainly composed of an acrylic resin, a urethane resin, a polyoxymethylene resin, and a rubber may be used. From the viewpoint of the cost or the ease of adjustment of the adhesive force described later, it is preferred to use an acrylic resin as a main component. Adhesive. Among these adhesives, a crosslinking agent such as an isocyanate compound or a metal chelate compound is preferably used as needed. The method of applying the adhesive to the surface of the roll can be carried out by a generally known method of coating with a bristles or spraying.

Further, the method of attaching the adhesive sheet to the surface of the roller may be exemplified by attaching an adhesive elastic sheet directly to the roller by using an adhesive or using a double-sided tape having an adhesive layer to cover the double-sided tape. One side of the tape is attached to the roller, and the other side is formed as a method of the adhesive layer having the locking ability.

Examples of the material of the elastomer sheet include natural rubber, polyoxyethylene rubber, ethylene-propylene copolymer rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, acrylic rubber, and styrene rubber. , epichlorohydrin rubber, chlorinated polyethylene, chlorinated polyethylene, urethane rubber, fluororubber, isobutylene isoprene rubber and polyester.

When double-sided tape is used, in addition to the adhesive layer formed on both sides of the substrate, those who do not use the substrate may be used (adhesive only Any one of the peelable substrates which are laminated on both sides of the pressure-sensitive adhesive layer after the release treatment is considered to be easy to attach to the film mold or easy to handle when the film mold is replaced, preferably. In order to form a double-sided tape having an adhesive layer on both sides of the substrate, it is particularly preferable to use an adhesive force which is attached to the surface of the adhesive layer on one side of the film mold to adhere to the surface of the roller. Weak double-sided tape.

The base material used for the double-sided tape may have flexibility that can be wound around a roll, and specifically, a thermoplastic resin film, a nonwoven fabric, a foam, or the like can be used. The adhesive used for the adhesive layer constituting the double-sided tape can be an adhesive containing an acrylic resin, a urethane resin, a polyoxymethylene resin, and a rubber as a main component, and the ease of adjustment from the cost or the adhesive force described later can be used. In view of the above, an adhesive mainly composed of an acrylic resin is preferred. Among these adhesives, a crosslinking agent such as an isocyanate compound or a metal chelate compound is preferably used as needed.

The above adhesive layer is subjected to a stretching angle of 90 in accordance with JIS Z 0237. The adhesive force at 23 ° C under the conditions of a peeling speed of 300 mm/min is preferably less than 20 N/25 mm, and the adhesive force at 23 ° C under the same conditions is particularly preferably 0.01 to 10 N/25 mm.

Next, the film mold 3 will be described.

The film mold has a resin layer having a concave-convex pattern on its surface, and preferably has a film substrate, a resin layer formed on the film substrate and having a concave-convex pattern on the surface, and a resin layer formed on the resin layer with a uniform thickness. A release agent layer on the surface having at least a concave-convex pattern.

a film substrate, preferably selected from the group consisting of polyethylene terephthalate a group consisting of diester, polycarbonate, polyester, polymethyl methacrylate, polystyrene, polyolefin, polyimine, polyfluorene, polyether oxime and polyethylene naphthalate Kind of resin.

The thickness of the film substrate is preferably in the range of 25 to 1000 μm in order to achieve flexibility and rigidity at the same time. The resin forming the resin layer may, for example, be a thermoplastic resin, a thermosetting resin or a photocurable resin. Specific examples thereof include acrylic resin, methacrylic resin, styrene resin, olefin resin, cycloolefin resin, polycarbonate resin, polyester resin, epoxy resin, oxetane, etc. . The preferred resin is a photocurable resin, particularly a resin which is cured by ultraviolet rays, and specific examples thereof include an acrylic resin, a methacrylic resin, a cycloolefin resin, a styrene resin, an epoxy resin, and a polycarbonate. Resin, polyester resin.

The resin may contain components such as an antioxidant, a photosensitizer, a filler, and a leveling agent within a range that does not affect the properties of the above resin.

The thickness of the resin layer is usually from 0.5 to 500 μm, preferably from 5 to 250 μm. When the thickness of the resin layer is in the above range, it has strength to withstand embossing, and has good smoothness, flexibility, and easy handling. Here, the thickness of the resin layer means the distance between the bottom surface of the resin layer and the highest surface of the unevenness on the surface.

The concavo-convex pattern on the surface of the resin layer is a pattern repeated at a certain period, preferably having a period of 10 nm to 500 μm and a depth of 10 nm to 500 μm. Specific shapes of the concavities and convexities include a line, a cylinder, a monolith, a cone, a polygonal pyramid, a microlens, a wiring pattern, and a hole shape. The concave and convex shape of the hole.

Examples of the release agent for forming the release agent layer include a fluorine-based decane coupling agent, a perfluoro compound having an amine group or a carboxyl group, and a perfluoroether compound having an amine group or a carboxyl group. The thickness of the release agent layer is preferably in the range of 0.5 to 20 nm. By uniform thickness is meant a substantially uniform thickness, preferably a uniform thickness of 0.1 to 10 standard deviation.

Further, an inorganic layer is preferably provided between the resin layer and the release agent layer. By providing the inorganic layer, the adhesion between the layers can be improved. Therefore, after the transfer, the peelability of the transfer body resin layer and the film mold is improved, and the release agent layer of the film mold does not fall off.

The inorganic layer is preferably composed of at least one inorganic material selected from the group consisting of SiO ₂ , ZrO ₂ , ZnO, Ta ₂ O ₅ , HfO ₂ , ITO, FTO, TiO ₂ , Si, and SiC, and an inorganic layer. The thickness is preferably in the range of 0.5 to 100 nm.

The length of the roll of the film mold in the outer circumferential direction is not particularly limited, and may be shorter or longer than the outer circumference of the roll, and is preferably shorter than the outer circumference of the roll from the viewpoint of stably locking the roll.

The length of the film mold in the width direction of the roll is preferably shorter than the roll width from the viewpoint of embossing.

<Step (2)>

As shown in Fig. 1 (2), the substrate 5 and the transfer target on which the unfixed transfer-substrate resin layer 4a is laminated on the substrate 5 are placed on the substrate mounting portion 6 of the imprint apparatus and fixed.

The substrate 5 is not particularly limited, and examples thereof include a resin substrate, a glass substrate, a tantalum substrate, a sapphire substrate, a gallium nitride substrate, a carbon substrate, and a tantalum nitride substrate, and the adhesion to the transfer resin layer is improved. It can be easily processed (corona treatment, pull-up treatment, etc.) as generally known.

The substrate 5 can be appropriately selected depending on the use of the obtained concave-convex pattern forming body, and is preferably a resin substrate from the viewpoint of flexibility or cost. Examples of the resin used for the resin substrate include polyethylene terephthalate, polycarbonate, polymethyl methacrylate, polystyrene, cyclic polyolefin, polyimine, polyfluorene, and polyether. Bismuth, polyethylene naphthalate. The thickness of the substrate is preferably in the range of 25 to 2000 μm, particularly preferably in the range of 50 to 500 μm.

The transfer target resin forming the transfer body resin layer 4a may, for example, be a thermoplastic resin, a thermosetting resin or a photocurable resin, and a preferred resin is a photocurable resin, particularly a resin which is cured by ultraviolet rays, specifically Examples thereof include an acrylic resin, a methacrylic resin, a cycloolefin resin, a styrene resin, an epoxy resin, a polycarbonate resin, and a polyester resin. In order to obtain an uncured transfer-substrate resin layer, the thermoplastic resin is usually heated before being applied to soften or dissolve in an organic solvent, whereas the photocurable resin does not need to be pretreated. The words are better.

The method of applying the transfer body resin to the substrate 5 is preferably spin coating, spray coating, bar coating, lip coating, slit coating, or infusion coating. The thickness of the transfer target resin layer 4a can be appropriately selected depending on the use of the obtained concavo-convex pattern formation body, and is preferably 0.1. To the range of 100 μm.

As the material of the substrate mounting portion 6, quartz, glass, stone template, metal, plastic, or the like is generally used.

As shown in FIG. 2, the substrate mounting portion 6 is preferably provided with an indwelling means 7 for temporarily blocking the end portion of the film mold 3. It is preferable that the end portion of the substrate 5 on the substrate mounting portion 6 is provided with the indwelling means 7, and it is particularly preferable to provide the indwelling means 7 at both end portions of the substrate 5. Examples of the indwelling means 7 include a releasable adhesive tape, a polyoxyxene rubber, and a locking sheet attached between the film mold and the substrate placing portion.

By providing the indwelling means 7, the positional accuracy of the imprint can be ensured particularly in the case of continuous operation, and the auxiliary film mold 3 can be locked to the transfer body resin layer 4a.

The method of fixing the to-be-transferred body to the substrate mounting portion 6 may, for example, be a vacuum adsorption method, a fixing by a fixing aid, an adhesion method using an adhesive, or the like.

<Step (3)>

Preferably, after fixing the end portion of the film mold 3 by the retention means 7, the film obtained in the step (1) is wound around the film mold 3 of the roll 1 as shown in Fig. 1 (3), and is abutted. The surface of the transfer-receiving resin layer 4a on the substrate 5 prepared in the step (2) is rotated in the winding-out direction while the roller 1 is rotated in the winding-out direction, and the uneven pattern on the surface of the film mold 3 is transferred to the object to be transferred. The surface of the resin layer 4a. As described above, the ability of the transfer body resin layer 4a to lock the film mold 3 is greater than the ability of the roll 1 to lock the film mold 3, so that the unevenness pattern is obtained. At the same time as the transfer of the film, the film mold 3 is peeled off from the surface of the roll 1 and is taken up onto the transfer body resin layer 4a. As a result, the film mold 3 is moved from the roll 1 to the transfer body resin layer 4a. According to this method, the film mold 3 can be laminated on the transfer body resin layer 4a without generating bubbles. The film mold 3 does not have to be completely peeled off from the roll 1, and a part of the film mold 3 can be maintained in a state of being wound around the roll 1.

At this time, from the viewpoint of achieving good transfer, the pressure of the roller 1 is preferably from 1 Pa to 10 kPa, and the rotation speed is preferably from 0.001 to 2 m/min.

<Step (4)>

As shown in Fig. 1 (4), the film mold 3 is wound up in the transfer body resin layer 4a by the step (3), thereby being laminated on the transfer body resin layer 4a. In this state, the transfer body resin layer 4a is cured by a resin curing means (not shown) to be the transferred body resin layer 4b after curing.

Examples of the resin hardening means include a light irradiation means and a heating means. Examples of the light used in the light irradiation means include active energy rays such as ultraviolet rays, visible rays, infrared rays, and electron beams. The amount of activation energy rays to be irradiated is usually from 1 to 20,000 mJ/cm ² . Examples of the heating means include an electric heater, an infrared heater (lamp), induction heating, and the like. The light irradiation means is used when the transfer target resin is a photocurable resin, and the heating means is used when the transfer target resin is a thermosetting resin.

When the transfer target resin is a thermoplastic resin, the same purpose as the hardening of the present invention can be achieved by curing, so that after curing The thermoplastic resin is configured as the transfer body resin layer 4b.

<Step (5)>

As shown in Fig. 1 (5), the roll 1 having the locking ability on the surface is brought into contact with the film mold 3 laminated on the surface of the cured transfer resin layer 4b in the step (4). Rotate in the winding direction. In this manner, the locking ability of the transfer-form resin layer 4b obtained by curing the transfer-receptor resin layer 4a against the film mold 3 is reduced, and the card body 3b after the hardening is applied to the film mold 3 Since the ability to lock the film mold 3 of the roll 1 is smaller than that of the roll 1, the film mold 3 is peeled off from the hardened transfer body resin layer 4b, and is taken up by the roll 1. In this method, since the peeling angle when the film mold 3 is peeled off from the hardened transfer body resin layer 4b is only the roll curvature, the film mold 3 and the hardened transfer body resin layer 4b are not damaged. .

At this time, from the viewpoint of reliably peeling the film mold 3 from the cured transfer body resin layer 4b, the pressure of the roll 1 is preferably from 1 Pa to 10 kPa, and the rotation speed is preferably from 0.001 to 2 m/min.

The roll used in the step (4) may be a roll in a state in which the film mold 3 is peeled off in the step (3), and a roll different from the roll used in the steps (1) to (3) may be used.

<Structure of Step (3) and Step (5)>

According to the present invention, the interface between the film mold and the resin layer of the transfer body is utilized by the pressure and rotation of the roll 1 and the hardening of the resin layer of the transfer body. The invention is relatively low in strength.

The resin layer to be transferred has fluidity before curing, and therefore has wettability. On the other hand, since the resin body layer to be transferred after curing is a resin-hardened body, it does not have wettability, and the substrate has a strong adhesion to the resin layer to be transferred, so that the roll and the film mold can be densely bonded. The properties (adhesiveness) are set such that the peeling force at the interface between the film mold having a relatively weaker adhesion and the cured transfer resin layer is higher, and the film mold can be taken up on the roll. Therefore, the present invention sets the locking ability of the surface of the roll 1 to be lower than that of the transfer target resin layer 4a and the substrate before hardening, and the hardened film mold and the transfer body resin layer. 4b has a higher card stopping capacity. In other words, the relationship between the locking ability of the surface of the roll 1 and the locking ability of the resin layer to be transferred is caused by the hardening of the resin layer of the transfer body, and the adhesion to the film mold 3 is lowered. turn. As a result, it is preferable that the end portion of the film mold is fixed by the retention means 7, and the transfer body resin layer 4a is embossed by the rotation and pressure of the roller 1, and then the resin layer of the transfer body is hardened. Thereby, the film mold 3 moves back and forth with the transfer body resin layer on the surface of the roll as the locking property of the film mold 3 on the surface of the roll 1 and the adhesion to the resin layer to be transferred are changed.

Specifically, in the step (3), preferably, the end portion of the film mold 3 is fixed to the substrate mounting portion 6 by the retention means 7, and the film mold is brought into contact with the transfer body resin layer before curing. When the locking ability of the surface of the roll 1 is lower than that of the transfer-receiving resin layer 4a before hardening, the film mold is moved from the surface of the roll 1 to hardening by the pressurization and development (rotation) of the roll 1. The front transfer resin layer 4a is transferred. In contrast, the steps (5) When the locking layer on the surface of the roll 1 is brought into contact with the hardened transfer-body resin layer 4b, the locking ability of the surface of the roll 1 is more than that of the transfer-receptive resin layer before curing. Since the capacity is high, the film mold is moved from the hardened transfer-substrate resin layer to the surface of the roll by pressurization and development (rotation) of the roll 1.

With the above structure, the present invention can easily peel the film mold 3 from the surface of the roll, and after the concave-convex pattern forming body is manufactured, the film mold can be recovered to the roll surface. Therefore, according to the manufacturing method of the present invention, the transfer operation and the hardening operation of the transfer body resin layer can be performed individually, and the recovered film mold can be reused.

<Continuous operation of steps (1) to (5)>

In the above step (2), when the substrate mounting portion is fixed, the uneven pattern forming body can be continuously manufactured by moving the roller 1 having the film mold 3 on the surface and curing the transferred body resin layer 4. . At this time, it is also possible to use a roller which rolls up the film mold 3 to the transfer body resin layer 4a and a roller which rolls the film of the film mold 3 from the hardened transfer body resin layer 4b. As the roller 1, it is changed to the moving mode.

In the above step (2), when the substrate mounting portion is movable, the roller 1 and the resin curing means having the locking ability on the surface are fixed, and the substrate mounting portion is moved to continuously manufacture the concave-convex pattern. Form the body.

<concave pattern forming body>

The concave-convex pattern forming body obtained in the present invention, by appropriately adjusting the concave The size of the convex pattern or the composition of the resin to be transferred can be suitably used as an optical member (antireflection film, wire grid type polarizing plate, light-receiving substrate of LED or OLED, light diffusion plate, etc.), cell culture sheet, A water-repellent member and a hydrophilic member are dialed.

<imprinting device>

An imprint apparatus according to a second aspect of the present invention includes: a roll having a locking property on the surface; a film mold having a concave-convex pattern on the surface which is detachably held on the surface of the roll and detachably held on the surface of the roll, And a resin hardening means for hardening the resin layer of the transfer body; and the printing apparatus transfers the uneven pattern formed on the surface of the film mold to the resin layer to be transferred, characterized in that A roll on which the film mold is wound is disposed on the transfer body resin layer, and the film mold is supplied from the roll surface to the transfer body resin by rotating the roll toward the winding direction of the film mold. After the surface of the layer is cured by the resin curing means, the roller is placed on the hardened layer of the transfer body resin and rotated in the winding direction of the film mold. The roller peels the transfer-substrate resin layer on which the concave-convex pattern of the film mold is transferred, and the film mold, and the film mold can be taken up and collected on the surface of the roll.

Example

The present invention will be more specifically described below based on examples. However, the invention is not limited to the embodiments.

[Modulation Example 1: Modulation of double-sided adhesive tape]

Adhesive A: Mixed acrylic polymer (product name: SK Dyne 1435, 30% nonvolatile content) 120 g (solid content), isocyanate crosslinking agent (Tosoh, Coronate HX, non-volatile 100%) 3.6 g (solid content) and 200 g of ethyl acetate.

Adhesive B: Mixed acrylic polymer (manufactured by Soken Chemical Co., Ltd., product name: SK Dyne 1495, nonvolatile content: 30%), 120 g (solid content), isocyanate crosslinking agent (Tosoh, Coronate HX, non-volatiles) 100%) 312 g (solid content) and 200 g of ethyl acetate.

The adhesive A was applied to one side of a polyethylene terephthalate film (manufactured by Toray Co., Ltd., Lumirror T60) having a thickness of 50 μm and dried to form an adhesive layer A. Further, the adhesive layer B was applied to the other surface of the polyethylene terephthalate film on which the adhesive layer A was not formed, and dried to form the adhesive layer B. The thickness of the adhesive layers A and B after drying was 25 μm, and the adhesive layer A was higher than the adhesive layer B.

The adhesion of the adhesive layer A to the stainless steel plate was (7.1 N / 25 mm).

The adhesion of the adhesive layer B to the stainless steel plate was (0.4 N/25 mm).

[Preparation Example 2: Production of Film Mold]

(1) Formation of resin layer

The photocurable resin liquid containing 75 parts by weight of isodecyl acrylate, 15 parts by weight of dipentaerythritol hexaacrylate, and 10 parts by weight of glycidyl methacrylate was spin-coated so as to have a film thickness of 1 μm. After a film having a thickness of 75 μm of polyethylene terephthalate (manufactured by Toyobo Co., Ltd., Cosmo Shine A-4100), it was pressed at 0.4 MPa to a nickel mold having a hole-like unevenness on the surface. (Transfer surface: 100 mm × 100 mm ‧ cycle 250 nm ‧ depth: 200 nm), and the resin film was cured by UV irradiation (10 mW/cm ² , 1 minute), and then the mold was released to obtain a resin sheet to which a hole having a hole was formed.

(2) Formation of inorganic layer

The surface obtained by the above (1) was applied to a resin sheet having a shape, and vacuum-deposited with SiO ₂ for 1 minute at room temperature to form an oxide coating film having a thickness of 10 nm to form an inorganic layer. After the vapor deposition, it was visually confirmed that the surface shape of the inorganic layer did not cause cracks or shape defects.

(3) Formation of release agent layer

The inorganic layer obtained in (2) and the laminate of the photocurable resin layer and the substrate were immersed in a perfluoro-based fluorine-based release agent (manufactured by Daikin Industries, Inc., trade name: Optool DSX) for 1 minute, and then pulled up and The mixture was allowed to stand in a hot and humid environment at 70 ° C and 90% RH for 1 hour. Then, it was rinsed with a fluorine-based solvent (manufactured by Harves Co., Ltd., trade name: HD-TH), and allowed to stand in an environment of 23° C. and 65% RH for 24 hours to complete the treatment of the release agent layer. The thickness of the release agent layer was 3 nm. The uneven shape after the formation of the release agent layer was confirmed, and there was no defect or shape change.

In this manner, a film mold in which a substrate, a resin layer, an inorganic layer, and a release agent layer are laminated in this order is obtained.

[Example 1]

The double-sided adhesive tape was attached to the surface of the SUS304 roll having a diameter of 100 mm and a width of 200 mm through the adhesive A of the double-sided adhesive tape obtained in Preparation Example 1.

The film mold prepared in Preparation Example 2 was wound around the surface of the roll by the adhesive B of the double-sided adhesive tape to obtain a roll in which the film mold was wound and held on the surface.

A polyethylene terephthalate substrate (manufactured by Toray Co., Ltd., Lumirror U10) having a thickness of 100 μm was placed on the substrate mounting portion by a tape fixing method.

A photocurable resin (PAK-02, manufactured by Toyo Kasei Co., Ltd.) was applied onto the substrate by a bar coating method to form a transfer body resin layer having a thickness of 1.5 μm.

Roller having the surface of the mold held by the film mold, abutting against the transferred resin layer at a pressure of 250 Pa, and rotating in a winding direction at a rotational speed of 0.06 m/min, in the film mold and the aforementioned adhesive tape At the interface of the adhesive layer B, the film mold is peeled off and rolled up to the surface of the transferred resin layer at the entire width, and the pattern of the film mold is transferred to the transferred resin layer, and the transferred resin layer is obtained. A laminate with a film mold.

The laminate of the transfer resin layer and the film mold was irradiated with ultraviolet rays of 1,000 mJ/cm ² to cure the transferred resin.

Then, when the roll in which the film mold was peeled off was brought into contact with the film mold of the above laminate at a pressure of 250 Pa and rotated in the winding direction at a rotation speed of 0.06 m/min, the film mold was from the cured resin layer. Stripped and It is taken up on the adhesive layer B on the surface of the roll. The pattern of the film mold and the resin layer after the transfer was not broken.

[Comparative Example 1]

The same operation as in Example 1 was carried out except that the irradiation amount of the ultraviolet ray on the laminate of the transfer resin layer and the film mold was changed to 40 mJ/cm ² , and the transferred resin was not cured. When the film mold is rotated in the winding direction of the roll, the pattern in which the resin layer is scattered is deformed or broken.

1‧‧‧ Roll

2‧‧‧Rolling surface with locking ability

3‧‧‧film mould

4a‧‧‧Transferd resin layer before hardening

4b‧‧‧ Hardened transfer resin layer

5‧‧‧Substrate

6‧‧‧Substrate placement

Claims (4)

A method for producing a concave-convex pattern forming body, comprising: a film mold having a concave-convex pattern on a surface thereof, detachably winding a step (1) held on a roller having a locking property on a surface; and comprising a substrate and being formed on the substrate a step (2) of placing the transfer target of the transfer target resin layer on the substrate mounting portion; and the film mold obtained by winding the film obtained in the step (1) is held in the roll The surface of the printing resin layer is rotated by a roller, and the film mold is peeled off from the roll to be wound up onto the transfer body resin layer, and the uneven pattern on the surface of the film mold is transferred to the transfer body resin layer. (3) a step (4) of curing the transferred body resin layer in a state in which the surface layer has a film mold by the above step (3); and a step of abutting the roller having the locking ability on the surface (4) The film mold which is laminated on the hardened transfer-resist resin layer is rotated, and the film mold is peeled off from the hardened transfer-substrate resin layer, and is taken up on a roll ( 5). The method for producing a concave-convex pattern forming body according to claim 1, wherein an adhesive layer is present on the surface of the roller. The method for producing a concave-convex pattern forming body according to claim 1 or 2, wherein the steps (1) to (5) are continuously performed. An embossing device comprising: a roller having a locking property on a surface thereof; a film mold having a concave-convex pattern on a surface detachably held on the surface of the roller and detachably held on the surface of the roller; and Ink a resin hardening means for hardening a resin layer; and the embossing apparatus transfers the uneven pattern formed on the surface of the film mold to the transfer body resin layer, wherein the roll around which the film mold is wound is disposed in the aforementioned On the transfer body resin layer, by rotating the roller toward the winding direction of the film mold, the film mold can be supplied from the surface of the roller to the surface of the resin layer to be transferred; and by the resin hardening means After the transfer resin layer is cured, the roller is placed on the cured transfer resin layer, and the concave and convex pattern of the film mold is transferred by rotating the roller toward the winding direction of the film mold. The transfer body resin layer is peeled off from the film mold, and the film mold can be taken up and recovered on the surface of the roll.