TW201612289A - Polishing material, method for producing same, and polishing material composition - Google Patents
Polishing material, method for producing same, and polishing material compositionInfo
- Publication number
- TW201612289A TW201612289A TW104126513A TW104126513A TW201612289A TW 201612289 A TW201612289 A TW 201612289A TW 104126513 A TW104126513 A TW 104126513A TW 104126513 A TW104126513 A TW 104126513A TW 201612289 A TW201612289 A TW 201612289A
- Authority
- TW
- Taiwan
- Prior art keywords
- polishing
- polishing material
- alumina
- producing same
- alpha
- Prior art date
Links
- 238000005498 polishing Methods 0.000 title abstract 8
- 239000000463 material Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 4
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- -1 aluminum compound Chemical class 0.000 abstract 1
- 239000005078 molybdenum compound Substances 0.000 abstract 1
- 150000002752 molybdenum compounds Chemical class 0.000 abstract 1
- 239000002245 particle Substances 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
- C01F7/00—Compounds of aluminium
- C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09G—POLISHING COMPOSITIONS; SKI WAXES
- C09G1/00—Polishing compositions
- C09G1/02—Polishing compositions containing abrasives or grinding agents
-
- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
- C09K3/00—Materials not provided for elsewhere
- C09K3/14—Anti-slip materials; Abrasives
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- Geology (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
Taking into consideration the situation that conventional α-alumina particles for polishing have not been sufficient in terms of polishing speed and with regards to mirror surface processing, provided is an α-alumina for polishing that can be used for mirror surface processing, has low occurrence of scratches at the surface to be polished, has a particularly rapid polishing speed, and has superior polishing characteristics. The polishing material comprising [alpha]-alumina having a BET specific surface area of 0.01-20 m2/g is characterized by the [alpha]-alumina being obtained by baking an aluminum compound in the presence of a molybdenum compound.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014165468 | 2014-08-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
TW201612289A true TW201612289A (en) | 2016-04-01 |
Family
ID=55304251
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104126513A TW201612289A (en) | 2014-08-15 | 2015-08-14 | Polishing material, method for producing same, and polishing material composition |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPWO2016024624A1 (en) |
TW (1) | TW201612289A (en) |
WO (1) | WO2016024624A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI826498B (en) * | 2018-08-30 | 2023-12-21 | 日商Jsr股份有限公司 | Chemical mechanical polishing aqueous dispersion |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106281221B (en) * | 2016-04-26 | 2017-11-03 | 福吉米株式会社 | Grinding-material, composition for polishing and Ginding process |
WO2018194117A1 (en) * | 2017-04-21 | 2018-10-25 | Dic株式会社 | Method for producing spinel particles, method for producing resin composition, and method for producing molded article |
WO2018207679A1 (en) * | 2017-05-11 | 2018-11-15 | Dic株式会社 | Spinel-type composite oxide particles and method for producing same, resin composition containing spinel-type composite oxide particles, and molded article |
US20200239369A1 (en) * | 2017-12-19 | 2020-07-30 | Showa Denko K.K. | Fused alumina grains, method for producing fused alumina grains, grindstone, and coated abrasive |
WO2019194158A1 (en) * | 2018-04-06 | 2019-10-10 | Dic株式会社 | Alumina particle |
CN113165895A (en) * | 2018-12-28 | 2021-07-23 | Dic株式会社 | Plate-like alumina particle, method for producing plate-like alumina particle, and resin composition |
JP2021120337A (en) * | 2019-10-09 | 2021-08-19 | Dic株式会社 | Abrasion resistant agent, coating agent, laminate, manufacturing method of laminate, and coating method of base material |
KR102612361B1 (en) * | 2020-10-07 | 2023-12-08 | 주식회사 티세라 | Polishing material comprising α-alumina particles and method thereof |
KR102726952B1 (en) * | 2021-10-28 | 2024-11-07 | 대홍테크뉴(주) | NANO-SIZED POLYHEDRAL α-ALUMINA PARTICLES AND METHOD THEREOF |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3744006B2 (en) * | 1993-04-13 | 2006-02-08 | 住友化学株式会社 | α-Alumina powder and method for producing the same |
JP3743012B2 (en) * | 1993-11-25 | 2006-02-08 | 住友化学株式会社 | Method for producing α-alumina powder |
JPH07206432A (en) * | 1993-11-25 | 1995-08-08 | Sumitomo Chem Co Ltd | α-alumina powder and method for producing the same |
JP2005034986A (en) * | 2003-06-27 | 2005-02-10 | Showa Denko Kk | Polishing composition and substrate polishing method using the same |
CN104718162B (en) * | 2012-09-28 | 2017-11-21 | Dic株式会社 | Alpha-aluminium oxide particulate and its manufacture method |
-
2015
- 2015-08-13 JP JP2016542608A patent/JPWO2016024624A1/en active Pending
- 2015-08-13 WO PCT/JP2015/072895 patent/WO2016024624A1/en active Application Filing
- 2015-08-14 TW TW104126513A patent/TW201612289A/en unknown
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI826498B (en) * | 2018-08-30 | 2023-12-21 | 日商Jsr股份有限公司 | Chemical mechanical polishing aqueous dispersion |
Also Published As
Publication number | Publication date |
---|---|
JPWO2016024624A1 (en) | 2017-07-06 |
WO2016024624A1 (en) | 2016-02-18 |
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