TW201425863A - Curvature measurement system and method thereof - Google Patents

Abstract

A curvature measurement method adapted to get the curvature of a sample, includes: generating a first incident light beam and a second incident light beam and emitting those beams to the surface of the sample to form a first reflected light beam and a second reflected light beam; amplifying the first reflected light beam and the second reflected light beam to form a first testing light beam and a second testing light beam; and getting the first testing light beam and the second testing light beam to derive the curvature based on the measured light-spot offset of the incident light beams.

Description

Curvature measurement system and method thereof

A curvature measuring system and method thereof, in particular, a method and system for measuring the curvature of a sample.

The existing curvature measurement method is to pass a laser beam through a rotatable lens, a beam splitter and a focusing lens to form a parallel beam, and then hit a sample by a mirror.

If the sample has a curvature that will shift the reflected light, the reflected light returns to the beam splitter, is reflected back to a Charge-coupled Device (CCD), and the lens is rotated to scan the curvature of the sample.

The above-mentioned laser scanning method can measure the curvature of the sample, but the angle of each lens needs to be constantly adjusted during the measurement, and the resolution of the curvature is related to the number of points scanned, and the scanning position is too much, which takes time and scan position. Too small, the resolution is insufficient, so there is still room for improvement in the existing curvature measurement method.

In one embodiment, the technical method of the present disclosure is to provide a curvature measuring method, including: generating a first incident beam and a second incident beam, and projecting to the sample to form a first reflected beam and a first a second reflected beam; amplifying the first reflected beam and the second reflected beam to form a first detection beam and a second detection beam; and extracting the first detection beam and the second detection beam to obtain the One of the incident beams Quantity and calculate a curvature.

In one embodiment, the present disclosure provides a curvature measurement system including: a light source; a beam splitter; an angle magnifying unit; an image capturing module; and an analyzing unit; wherein the light source generates a An incident beam and a second incident beam, the beam splitter is disposed on the path of the first incident beam and the second incident beam, and forms a first reflected beam and a second reflected beam, and the angle amplifying unit is configured a path of the first reflected beam and the second reflected beam, and forming a first detecting beam and a second detecting beam, wherein the image capturing module is disposed on a path of the first detecting beam and the second detecting beam, The first detection beam and the second detection beam are captured, and a signal is transmitted to the analysis unit to calculate a curvature.

The embodiments of the present disclosure are described below by way of specific embodiments, and those skilled in the art can easily understand the disclosure by the contents disclosed in the specification.

Referring to FIG. 1 , the disclosure is a first embodiment of a curvature measuring system, which has a light source 10 , a beam splitter 11 , an angle amplifying unit 12 , an image capturing module 13 and an analyzing unit . 14.

A light source 10 generates a first incident light beam 100 and a second incident light beam 101. The light source 10 is a single-wavelength light source or a laser light source. The first incident light beam 100 and the second incident light beam 101 are two parallel light beams. The light source 10 has a wavelength, for example, the wavelength is 627 to 638 nm, preferably 632.8 nm, and a light beam generated by the light source 10 passes through an incident angle of 45 degrees. The glass (not shown) produces a first incident beam 100 and a second incident beam 101.

The beam splitter 11 is disposed on the path of the first incident beam 100 and the second incident beam 101. The first incident beam 100 and the second incident beam 101 pass through the beam splitter 11 and are projected to a sample 15 to form a first reflection. The beam 102 and a second reflected beam 103, the first reflected beam 102 and the second reflected beam 103 are reflected by the sample 15 back to the beam splitter 11.

The angle amplifying unit 12 is disposed on the path of the first reflected beam 102 and the second reflected beam 103. The first reflected beam 102 and the second reflected beam 103 pass through the angle amplifying unit 12 to form a first detecting beam 104 and a first The second detecting beam 105, the angle amplifying unit 12 is exemplified by a Mitsubishi mirror.

The image capturing module 13 is disposed on the path of the first detecting beam 104 and the second detecting beam 105, and takes the first detecting beam 104 and the second detecting beam 105 to generate a signal.

The analyzing unit 14 is electrically coupled to the image capturing module 13 and receives a signal from the image capturing module 13 to calculate a curvature.

Referring to FIG. 2, a second embodiment of the present invention provides a light source 20, a beam splitter 21, a concave lens 23, a mirror 24, an image capturing module 25, and an analysis. Unit 26.

The light source 20 generates a first incident beam 200 and a second incident beam 201. The first incident beam 200 and the second incident beam 201 are two parallel beams. The wavelength and type of the source 20 can be equal to the source 10.

The beam splitter 21 is disposed on the path of the first incident beam 200 and the second incident beam 201. The two beams 200, 201 pass through the beam splitter 21 and are projected to the sample 22 to form a first reflected beam 202 and a second reflected beam. 203. The first reflected beam 202 and the second reflected beam 203 are reflected by the sample 22 back to the beam splitter 21, and the sample 22 is exemplified by a wafer or a glass.

The concave lens 23 is disposed on the path of the first reflected light beam 202 and the second reflected light beam 203, and passes through the first reflected light beam 202 and the second reflected light beam 203 of the concave lens 23 to form a first divergent light beam 204 and a second divergent light beam 205.

The mirror 24 is disposed on the path of the first divergent beam 204 and the second divergent beam 205. The first divergent beam 204 and the second divergent beam 205 are reflected by the mirror 24 to form a first detection beam 206 and a second detection. Light beam 207.

The image capturing module 25 is disposed on the path of the first detecting beam 206 and the second detecting beam 207 to capture the first detecting beam 206 and the second detecting beam 207 and generate a signal.

The analyzing unit 26 is electrically coupled to the image capturing module 25 and receives the signal to calculate a curvature.

Referring to FIG. 3, a third embodiment of the present invention discloses a third embodiment of the curvature measuring system. In the present embodiment, the second embodiment of the present invention is used to change only the concave lens 23 described above to the convex lens 27.

As shown in FIG. 3, the convex lens 27 is disposed on the path of the first reflected light beam 202 and the second reflected light beam 203, and passes through the first reflected light beam 202 and the second reflected light beam 203 of the convex lens 27 to form a first focused light beam 270 and a The second focused beam 271.

The mirror 24 is disposed on the path of the first focused beam 270 and the second focused beam 271, and the first focused beam 270 and the second focused beam 271 are reflected by the mirror 24 to form a first detection beam 206 and a second detection. Light beam 207.

In addition, the present disclosure is a curvature measuring method, which includes: together with reference to FIG. 1, a first incident beam 100 and a second incident beam 101 are generated by a light source 10 and passed through a beam splitter. 11. Projected on a sample 15, the first reflected light beam 102 and the second reflected light beam 103 are reflected by the sample 15 back to the beam splitter 11 , wherein a light beam generated by the light source 10 passes through a glass incident at a 45 degree angle. The first incident beam 100 and the second incident beam 101 are generated. For example, the sample 15 is a wafer or a glass.

In the first embodiment described above, as shown in FIG. 1, the first reflected beam 102 and the second reflected beam 103 pass through the angle amplifying unit 12 to form a first detecting beam 104 and a second detecting beam 105.

The first detecting beam 104 and the second detecting beam 105 are captured by an image capturing module 13 , and the captured signals are converted and transmitted to an analyzing unit 14 .

In the second embodiment described above, as shown in FIG. 2, a first divergent beam 204 and a second divergent beam 205 are formed by the first reflected beam 202 and the second reflected beam 203 of the concave lens 23, wherein the concave lens The 23 series is exemplified by a lens, the first divergent beam 204 can be regarded as a first beam, and the second divergent beam 205 can be regarded as a second beam.

The first divergent beam 204 and the second divergent beam 205 are reflected by the mirror 24 to form a first detection beam 206 and a second detection beam 207.

The first detecting beam 206 and the second detecting beam 207 are captured by an image capturing module 25, and the captured signals are transmitted to an analyzing unit 26.

In the third embodiment, as shown in FIG. 3, a first focused beam 270 and a second focused beam 271 are formed by the first reflected beam 202 and the second reflected beam 203 of the convex lens 27, wherein the convex lens For example, a lens, the first focused beam 270 can be regarded as a first beam, and the second focused beam 271 can be regarded as a second beam.

The first focused beam 270 and the second focused beam 271 are reflected by a mirror 24 to form a first detection beam 206 and a second detection beam 207, which are captured by the image capturing module 25, and After the captured signal is converted, it is sent to the analyzing unit 26 to find a curvature.

As described above, taking FIG. 1 as an example, if the sample 15 has a curvature (for example, a curve caused by strain), when the first incident beam 100 and the second incident beam 101 are projected to the sample 15, the spot of the beam ( For example, the centroid or the centroid may be offset, so that a spot offset is generated, so that the first detecting beam 104 and the second detecting beam 105 will be offset.

The analyzing unit 14 is obtained by using a double incident beam to measure the curvature, and the ratio of the distance between the curvature and the curvature is zero, and the distance between the image capturing module 13 and the sample 15 is obtained. The curvature R, the formula of the curvature R is as follows:

Where L is the distance between the sample 15 and the image capturing module 13, ψ is the angle between the surface of the sample 15 and the incident light beams 100, 101, δ d is the measured spot offset, and d is the curvature The distance between the two light beam spots.

In summary, as described above, the first embodiment of the present invention utilizes an angle amplifying unit to enlarge the ratio of the distance between the spot offset and the curvature to zero at a limited distance, so that the minimum value can be minimized. The curvature measurement and resolution are improved, and the curvature of a sample, such as wafer, glass, etc., is measured.

As above, as in the second embodiment and the third embodiment described above, the present disclosure utilizes a lens such as a concave lens or a convex lens to change the divergence or focus of the detection beam, and optically measures the curvature of a sample at a limited distance. .

However, the specific embodiments described above are only used to illustrate the disclosure, and are not intended to limit the scope of the disclosure, and may be disclosed without departing from the spirit and scope of the disclosure. Equivalent changes and modifications to the content are still covered by the scope of the patent application below.

10‧‧‧Light source

100‧‧‧First incident beam

101‧‧‧second incident beam

102‧‧‧First reflected beam

103‧‧‧second reflected beam

104‧‧‧First detection beam

105‧‧‧Second detection beam

11‧‧‧beam splitter

12‧‧‧Angle magnification unit

13‧‧‧Image capture module

14‧‧‧Analysis unit

15‧‧‧ samples

20‧‧‧Light source

200‧‧‧First incident beam

201‧‧‧second incident beam

202‧‧‧First reflected beam

203‧‧‧second reflected beam

204‧‧‧First divergent beam

205‧‧‧Second divergent beam

206‧‧‧First detection beam

207‧‧‧second detection beam

21‧‧‧beam splitter

22‧‧‧ samples

23‧‧‧ concave lens

24‧‧‧Mirror

25‧‧‧Image capture module

26‧‧‧Analysis unit

27‧‧‧ convex lens

270‧‧‧First focused beam

271‧‧‧second focused beam

1 is a schematic view of a first embodiment of a curvature measuring system according to the present disclosure.

2 is a schematic view of a second embodiment of the curvature measuring system of the present disclosure.

3 is a schematic view of a third embodiment of a curvature measuring system according to the present disclosure.

10‧‧‧Light source

100‧‧‧First incident beam

101‧‧‧second incident beam

102‧‧‧First reflected beam

103‧‧‧second reflected beam

104‧‧‧First detection beam

105‧‧‧Second detection beam

11‧‧‧beam splitter

12‧‧‧Angle magnification unit

13‧‧‧Image capture module

14‧‧‧Analysis unit

15‧‧‧ samples

Claims (27)

A curvature measuring method for measuring a curvature of a sample, comprising: generating a first incident beam and a second incident beam, and projecting to the sample to form a first reflected beam and a second reflected beam; Amplifying the first reflected beam and the second reflected beam to form a first detection beam and a second detection beam; and extracting the first detection beam and the second detection beam to obtain the incident beam A spot offset and a curvature is calculated. The method of measuring curvature according to claim 1, wherein the first incident beam and the second incident beam are generated by a light source. The curvature measuring method of claim 2, wherein the light source has a wavelength. The method of measuring curvature according to claim 3, wherein the wavelength is from 627 nm to 638 nm. The curvature measuring method of claim 2, wherein the light source generates a light beam that passes through a glass to generate the first incident light beam and the second incident light beam. The method of measuring curvature according to claim 5, wherein the glass is a glass incident at a 45 degree angle. The curvature measuring method of claim 1, wherein the first incident beam and the second incident beam are two parallel beams. The curvature measuring method according to claim 1, wherein the first reflected beam and the second reflected beam are caused by an angle amplifying unit to form the first detecting beam and the second detecting beam. For example, the method for measuring curvature according to claim 1 of the patent application scope The first reflected beam and the second reflected beam are separated by a concave lens and a mirror to form the first detection beam and the second detection beam. The curvature measuring method of claim 1, wherein the first reflected beam and the second reflected beam are enlarged by a convex lens and a mirror to form the first detecting beam and the second detecting beam. . The curvature measuring method according to claim 1, wherein the first detecting beam and the second detecting beam are captured by an image capturing module, and a signal is transmitted to an analyzing unit to calculate the curvature. The curvature measuring method according to claim 11, wherein the curvature R is: L is the distance between the sample and the image capturing module, where ψ is the angle between the sample and the incident beams, δ d is the measured spot offset, and d is the curvature zero. The distance between the incident beam spots. A curvature measuring system for measuring a curvature of a sample, comprising: a light source; a beam splitter; an angle magnifying unit; an image capturing module; and an analyzing unit; wherein the light source generates a first An incident beam and a second incident beam, the beam splitter is disposed on the path of the first incident beam and the second incident beam, and forms a first reflected beam and a second reflection a beam, the angle amplifying unit is disposed on the path of the first reflected beam and the second reflected beam, and forms a first detecting beam and a second detecting beam, wherein the image capturing module is disposed on the first detecting beam And a path of the second detecting beam to capture the first detecting beam and the second detecting beam, and transmitting a signal to the analyzing unit to calculate a curvature. The curvature measuring system of claim 13, further comprising a glass disposed on a path of a light beam generated by the light source to shape the first incident light beam and the second incident light beam. The curvature measuring system of claim 14, wherein the glass is a glass incident at a 45 degree angle. The curvature measuring system of claim 13, wherein the light source has a wavelength. A curvature measuring system according to claim 16, wherein the wavelength is 627 to 638 nm. The curvature measuring system of claim 13, wherein the first incident beam and the second incident beam are two parallel beams. The curvature measuring system of claim 13, wherein the angle amplifying unit is a Mitsubishi mirror. A curvature measuring system for measuring a curvature of a sample, comprising: a light source; a beam splitter; a lens; a mirror; an image capturing module; An analysis unit, wherein the light source generates a first incident beam and a second incident beam, and the beam splitter is disposed on a path of the first incident beam and the second incident beam to form a first reflected beam and a second reflected light beam, the lens is disposed on the path of the first reflected light beam and the second reflected light beam to form a first light beam and a second light beam, wherein the mirror is disposed on the first light beam and the first light beam a path of the two beams to form a first detecting beam and a second detecting beam, wherein the image capturing module is disposed on the path of the first detecting beam and the second detecting beam to capture the first detecting beam And the second detecting beam, and transmitting a signal to the analyzing unit to calculate a curvature. . The curvature measuring system of claim 20, wherein the lens is a concave lens, the first light beam is a first divergent light beam, and the second light beam is a second divergent light beam. The curvature measuring system of claim 20, wherein the lens is a convex lens, the first beam is a first focused beam, and the second beam is a second focused beam. The curvature measuring system of claim 20, further comprising a glass disposed on a path of a light beam generated by the light source to shape the first incident light beam and the second incident light beam. The curvature measuring system of claim 23, wherein the glass is a glass incident at a 45 degree angle. The curvature measuring system of claim 20, wherein the light source has a wavelength. The curvature measuring system according to claim 25, wherein the The wavelength is from 627 nm to 638 nm. The curvature measuring system of claim 20, wherein the first incident beam and the second incident beam are two parallel beams.