TW201222034A - An optical waveguide structure and an electronic device - Google Patents

Abstract

The present invention provides an optical waveguide structure equipped with an optical waveguide and an electronic device equipped with the optical waveguide structure. The freedom degree of the pattern shape design of the optical waveguide is broad, and the high size accuracy of the core part (optical path) of the optical waveguide can be formed by the simple method. In addition, the optical waveguide have the flexibility and a long life. An example of the present invention is described below. The optical waveguide structure 1 is equipped with an optical waveguide 9 formed by laminating a core layer 93 and clad layers 91 and 92, a wiring substrate containing a flexible substrate 2 and conductor layer, and a light-emitting element 3 and a light-receiving element 4 arranged at the both ends of the optical waveguide 9. The core layer 93 has a core part constituting an optical path for the transmitted light and a clad part in its layer. The core part is formed by selectively irradiating an active radical ray to the core layer constituted with a composition comprising (A) cyclic olefin resin, (B) at least one of a monomer containing cyclic ether group and an oligomer containing cyclic ether group which have a different refraction index from (A), and a photo-acid-generating agent.

Description

201222034 VI. Description of the Invention: [Technical Field] The present invention relates to an optical waveguide structure and an electronic device. This case is based on Japan's special request 2010- 088097, which was filed in Japan on April 6, 2010, and the Japanese Patent Application No. 2010-089047, which was filed in Japan on April 7, 2010, and claims priority. Used for this. [Prior Art] In recent years, as optical components in the field of optical communication, optical branch combiners (optical couplers), optical multiplexers/demultiplexers, etc. have been developed, and are expected to be used for such optical waveguide type elements. As the optical waveguide type element (by waveguide), a polymer-based optical waveguide which is versatile and has a versatility in addition to the conventional quartz-based optical waveguide, has recently been actively developed. The optical waveguide is generally formed on a substrate by a specific arrangement (pattern) and is formed in the form of an optical waveguide structure. The optical waveguide junction body is formed as a specific electrical wiring circuit formed on the substrate, and is formed by a core < For the light of the part and the coating material, "the other member and the light-receiving element are mounted on the optical waveguide (for example, refer to the patent document. However, the above-mentioned Patent Document 1 has 0 # TP, B5 1 optical waveguide structure exists. The problem of the female. The formation of the waveguide is the design of the pattern shape of the optical path of the Fu-transmission, and the degree of freedom of selection is narrow. 2. The shape of the core is poor in the quality or dimensional accuracy of the pattern. 201222034 3 · Light彳s said that the efficiency of the transmission wheel is low. 4. When the electric wiring pattern is combined, the degree of freedom in the design of the wiring pattern is narrow. [Patent Document 1] JP-A-2004-146602 (Invention) It is an object of the invention to provide a light having a wide degree of freedom in designing a pattern shape and a high dimensional accuracy (optical path), and which is flexible and has excellent optical properties. The guide structure and the electronic device including the optical waveguide structure. Further, it is an object of the present invention to provide a core portion (optical path) having a wide degree of freedom in designing a pattern shape in a simple manner and having high dimensional accuracy. The optical waveguide structure and the electronic device of the optical waveguide which are excellent in light combining efficiency and durability with the light-emitting element or the light-receiving element. The above object is achieved by the present invention (1) to (75) below. An optical waveguide structure comprising: a flexible flexible substrate; a wiring substrate provided with a conductor layer on which at least one surface of the wiring is formed; and a surface side of the wiring substrate And an optical waveguide having a core portion and a cladding portion having different refractive indices, and the core portion is formed into a desired shape by selectively irradiating active radiation to a core layer composed of a composition containing the following components. : (A) CyCnc 〇iefin resin, (B) a monomer having the same refractive index as (a) above, and having a cyclic ether group and an oligomer having a cyclic ether group (2) The optical waveguide structure according to the above (1), wherein the morning (B) is an oxetane group (ox etanyl) (3) The optical waveguide structure according to (1) or (2) above, wherein the J-thin resin of the above (A) is a norb〇inene-based resin. (4) The optical waveguide structure according to any one of (1) to (3) above, wherein the refractive index of the above (B) is lower than the above (a), and the ring-thin resin is provided by the above ( The acid generated by the photoacid generator of C) is detached, and the detachment group of the refractive index of the above (Λ) is lowered by detachment. (5) The optical waveguide structure according to the above (2), wherein (A) the virgin tree has a detachment property in the side chain which is detached by the acid generated by the photoacid generator of the above (c) The above (8) contains the ith monomer described in the following formula (100):

Here, the (B) butyl fluorene heterocyclobutane (6) further contains an epoxy compound and at least one of two oxygen compounds as the second monomer, as in the optical waveguide junction of the above (5). (10) The optical waveguide structure according to (6) above, wherein the above-mentioned

0 — S i — at least one of the structures. (9) The cycloolefin resin of the above (A) is a norbornene-based resin, according to any one of the above (5) to (8). (1) The optical waveguide structure according to the above (9), wherein the norbornene-based resin is a reduced-thinning addition polymer. (11) The optical waveguide structure according to the above (10), wherein the addition polymer of the norbornene has a repeating unit described in the following formula (101):

[where η is an integer of 0 or more and 9 or less]. (12) The optical waveguide structure according to the above (1) or (11), wherein the addition polymer of the norbornene has a repetition described in the following formula (102): 8 201222034 Unit:

The optical waveguide structure according to any one of the above (5) to (12), wherein the content of the first monomer described in the above formula (1) is incompatible with the above-mentioned cycloolefin resin 10 0 parts by weight, 1 part by weight or more, 50 weights, and the following. The optical waveguide structure according to any one of the above (1), wherein the region of the core layer irradiated with active radiation and the unirradiated region are derived from the structure of the above (B) The concentration is different. (15) The optical waveguide structure according to any one of (1) to (14), wherein the refractive index difference between the region irradiated with the active radiation of the core layer and the non-irradiated region is 0.01 or more. (16) The optical waveguide structure according to any one of the above (1) to (15) wherein the region of the core layer irradiated with the active radiation is coated as the above. At least one of the 卩 is such that the unirradiated area is at least a part of the core portion. The optical waveguide structure according to any one of the above aspects, wherein the optical waveguide has an elongated shape, and the optical waveguide has one or two portions in a longitudinal direction thereof. The above is partially fixed to the wiring board described above. (18) The optical waveguide structure according to (17) above, wherein the optical waveguide is fixed by an adhesive. The optical waveguide structure according to any one of the above aspects, wherein the optical waveguide has an elongated shape, and the optical waveguide is partially fixed to two or more portions in a longitudinal direction thereof. In the wiring board, the optical waveguide is provided in a curved portion between the adjacent fixed portions in the fixed portions of the two or more locations. (20) The optical waveguide structure according to any one of the above-mentioned (17), wherein the wiring board has a through hole penetrating the wiring board, and the optical waveguide is partially fixed to the through hole Wiring board. (21) The optical waveguide structure according to (20) above, wherein the through hole has an elongated shape having a long axis along a longitudinal direction of the optical waveguide in a plan view. The optical waveguide structure according to any one of the above-mentioned (1), wherein the optical waveguide structure has a region where the flexibility of the wiring substrate is large and the optical waveguide has a plan view The part that is offset from each other. (23) The optical waveguide structure according to any one of (17) to (22) wherein the wiring substrate has a rigid 201222034 portion having a relatively large flexibility and a relatively small flexibility. The flexible portion is located at the flexible portion in a portion where the optical waveguide is fixed to the wiring board. (B) The optical waveguide structure according to any one of the above-mentioned (a) to (n), wherein the wiring board has an elongated shape, and a part thereof has a hard surface provided on one surface side of the flexible substrate In the rigid substrate, the optical waveguide structure has a hard portion in which the hard substrate is located, and a region other than the hard substrate. (25) The optical waveguide structure according to (24) above, which has a plurality of the flexible portions, and the flexible portion of one of the plurality of flexible portions is constituted only by the optical waveguide. (26) The optical waveguide structure according to (24) or (25) above, wherein the hard portion has an optical signal passing region through which the optical signal is disposed, and the light k is passed through one end of the region The above optical waveguide is constructed by optical connection. (27) The optical waveguide structure according to (26) above, wherein the optical signal passing region is formed to penetrate the hard portion in a thickness direction. (A) The optical waveguide structure according to any one of the above-mentioned (2), comprising: a light-receiving element having a light-receiving portion mounted on the wiring board; and a light-emitting element having a light-emitting portion, wherein the light-receiving portion And the light-emitting portion and the optical waveguide are connected to each other by optical 11 201222034. (29) The optical waveguide structure according to (28) above, comprising a plurality of the optical waveguides, each of the optical waveguides having the light receiving element and the light emitting element. (30) The optical waveguide structure according to (28) or (29) above, wherein the connection portion between the light-receiving element and the optical waveguide and the connection portion between the light-emitting element and the optical waveguide are covered by a resin mold. (3) The optical waveguide structure according to any one of the above-mentioned (28), wherein the light-receiving circuit includes: the light-receiving element; the light-receiving electric element for controlling the operation of the light-receiving element; a part of the electric wiring and the light-receiving electric component; and a light-emitting circuit that includes the light-emitting element, an electric-emitting element that controls operation of the light-emitting element, and the light-emitting element and the light-emitting element Use one of the electrical components. (32) The optical waveguide structure according to the above (31), wherein the light-emitting element, the light-receiving element, the light-receiving electric element, and the light-emitting electrical element are each covered with a resin mold. (33) The optical waveguide structure according to (31) or (32), wherein the illuminating circuit is provided at one end of the flexible substrate, and the illuminating circuit is provided at the other end of the flexible substrate. When at least a part of the electric wiring included in the light receiving circuit and the light emitting circuit is the first electric wiring, the first electric 12 201222034 gas wiring is disposed from one end of the flexible substrate to the other end. . (34) The optical waveguide structure according to (33) above, wherein the i-th electrical wiring is electrically separated from the light-receiving circuit and the light-emitting circuit. (35) The optical waveguide structure according to the above (33) or (34), wherein: the first terminal portion includes one end portion of the flexible substrate, and the light receiving circuit is connected to the outside An external connection terminal and an external connection terminal for connecting the first electric wiring to the outside, and the second terminal portion includes an outer end portion provided on the other end of the flexible substrate to connect the light-emitting circuit to the outside A connection terminal and an external connection terminal for connecting the first electric wiring to the outside. (36) The optical waveguide structure according to (35), wherein the electric wiring includes a second electric wiring that connects the light-emitting circuit and the light-receiving circuit to the external connection terminal. (37) The optical waveguide structure according to the above (35) or (36), wherein the optical waveguide, the light receiving circuit, the light emitting circuit, and the external connection terminal are arranged in a straight line. The optical waveguide structure of any one of the above-mentioned (35) to (37) wherein the wiring board has an elongated shape, and the external connection terminals have a plurality of the plurality of terminals arranged along the longitudinal direction of the wiring board. Solder pad. The optical waveguide structure according to any one of the above-mentioned (35), wherein the wiring substrate has an elongated shape, and the external connection terminals have a plurality of rows arranged along a width direction 13 201222034 of the wiring substrate. Solder pads. (40) The optical waveguide structure according to any one of the above (1) to (39), wherein the multi-layer substrate of the plurality of flexible substrate and the plurality of conductor layers are alternately laminated . (41) An electronic device comprising the optical waveguide structure according to any one of (1) to (4G) above. (42) An optical waveguide structure comprising: an optical waveguide having a core portion and a cladding portion having different refractive indices; and the core portion has a widening of a cross-sectional area continuously increasing toward one end portion, and The core layer composed of the composition containing the following components is selectively irradiated with active radiation to form a desired shape: (A) a cycloolefin resin, (B) having a refractive index different from that of (A) above, and having At least one of a ring-shaped body and an oligomer having a cyclic ether group, and (C) a photoacid generator. (43) The optical waveguide structure according to the above (42), wherein the cyclic bond group is an oxetan group ((tetra)(tetra)gn)) or an epoxy group. (44) The optical waveguide structure according to (42) or (43) above, wherein the cycloolefin resin of the above (A) is a norbornene-based resin. (45) The optical waveguide structure according to any one of (42) to (44), wherein the (B) refractive index is lower than (A), the cycloolefin resin has the above (c) The acid generated by the photoacid generator is detached from ' and the detachment of the refractive index of the above (A) is lowered by detachment 14 201222034. (4) The optical waveguide structure according to (43) above, wherein the cycloaliphatic resin of the above (a) has a debonding group which is detached from the side chain by an acid generated by the photoacid generator of the above (c), The above (B) contains the ith monomer described in the following formula (1):

V, υ 迷 Q 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 46 As described above, (47) 夕μ», « « The first waveguide structure, the middle of the Bu, +, the ratio of the Chu and the first monomer - the weight of the above second / the first monomer Counted as 〇ι ~". The weight of the early body (49) is as described in the above (45) to (47), wherein the above-mentioned detachable group has the optical waveguide structure of the item - Ω Q . , , , , , , , , , , , , , , , , , , , , , , , , , , , — Si — at least one species in the structure. Fang Ji,,,. And (50) as in the above (46) to (49, wherein the ring-shaped resin of the above (Α) is a reduced film: an optical waveguide structure (5)) as in the above (50). The above-mentioned hail 15 201222034 olefinic resin is an alkylene oxide addition polymer β (52), wherein the above-mentioned thinning addition polymer has the following formula; (101) Repeated units recorded: person

(101) [In the formula 101, η is an integer of 〇 or more and 9 or less]. (53) The optical waveguide structure according to (51) or (52) above, wherein the addition polymer of the norbornene has a repeating unit as described in the following formula (1〇2): 16 201222034

The optical waveguide structure of any one of the above-mentioned (53), wherein the content of the ith monomer described in the above formula (100) is i parts by weight or more and 5 Å with respect to 100 parts by weight of the terpene resin. Parts by weight or less. r) The optical waveguide structure according to any one of the above (42) to (54), wherein the region irradiated with the active radiation in the core layer and the unirradiated region 'from the structure of the above (B) The concentration is different. (6) The optical waveguide structure according to any one of (42) to (55), wherein a difference in refractive index between the region irradiated with the active radiation of the core layer and the unirradiated region is 0.01 or more. The optical waveguide structure of any one of (42) to (56) wherein the region irradiated with the active radiation of the core layer is at least a part of the cladding portion, and the unirradiated region is at least a part of the core portion. The optical waveguide structure 'in any of the above-mentioned (42) to (57), wherein the width 17 201222034 of the core portion in the plan view is continuously increased toward one end of the optical waveguide. The optical waveguide structure according to any one of the above-mentioned (42), wherein the thickness of the core portion is continuously increased toward one end of the optical waveguide. (60) as described above (42) The optical waveguide structure of any one of (59), wherein, in the expanding portion, a boundary line between the core portion and the cladding portion in a plan view of the core portion is along an end portion of the optical waveguide Parabolic The optical waveguide structure according to any one of the above-mentioned (42), wherein, in the expanded portion, a boundary line between the core portion and the cladding portion in a plan view of the core portion is formed. Or a boundary line between the core portion and the coating portion in the thickness direction is formed at an angle of not more than 90 degrees with respect to an end surface of the one end portion of the core portion. (62) As described in (42) above (61) The optical waveguide structure of any one of (61), wherein an end surface area of the one end portion is larger than an end surface area of the other end portion. (63) Any one of the above (42) to (62) The optical waveguide structure, wherein a width in a plan view of the one end portion of the core portion is larger than a width of a top view of the other end portion. (64) Any one of the above (42) to (63) The optical waveguide structure of the item, wherein the thickness of the one end portion of the core portion is thicker than the thickness of the other end portion. (65) The optical waveguide according to any one of the above (42) to (64) Structure, body, wherein the core portion further has a And the optical waveguide structure of the above-mentioned (65), wherein the above-mentioned core portion is reduced in the above-mentioned core portion. The width of the core waveguide is reduced toward the other end of the optical waveguide. The optical waveguide structure of the above (65) or (66), wherein the thickness of the core portion faces the optical waveguide The optical waveguide structure according to any one of the above-mentioned (65) to (67), wherein, in the reduced portion, the core portion of the core portion in a plan view and the above The boundary line of the cladding portion is formed along a parabola that opens toward one end of the optical waveguide. The optical waveguide structure according to any one of the above-mentioned (65), wherein, in the reduced portion, the core of the core portion in a plan view "the boundary line between the 包覆 and the cladding portion is The boundary line between the core portion and the coating portion in the thickness direction forms an angle of not more than 9 degrees with respect to the end surface of the end portion of the core portion, and is at least 90 degrees. (70) as described above (42) The optical waveguide junction of any one of (69), wherein the optical waveguide has a plurality of the core portions. (71) The optical waveguide structure of (70) above, wherein the plurality of core portions are connected in parallel Set, the reverse end of the direction is a little bit "squeaky like ^. The position of the gusset and the position of the other end are at least any position-shifted with each other. (72) The optical waveguide structure according to (70) or (71) above, wherein 19 201222034 is at least 9 plus z core portions adjacent to the plurality of core portions, and the position of the tenth and the _ end portions is the same as The position of the other end portion is configured to be an optical path conversion portion in which the optical waveguide structure of any one of the opposite ends is curved, and the light is bent to introduce the light bending and is led to the outside (73) as described above ( 42) to (72) a body, wherein the optical waveguide has a path length such that the optical path conversion portion is configured to be from an outer core portion or propagated to the core portion * (74) as described in (42) above (72) =, the optical waveguide structure of the above-mentioned item, further comprising a wiring provided on at least one surface of the optical waveguide, and having a substrate and a conductor layer provided with at least one surface of the optical wiring (75) An electronic device comprising: the optical waveguide structure according to any one of the above (42) to (74). According to the present invention, the core portion can be patterned by a simple method of light irradiation And get the picture of the core The design of the shape of the case has a wide degree of freedom, and the core portion has a high dimensional accuracy. Moreover, since the dimensional accuracy of the core portion is high, an optical waveguide having excellent optical coupling efficiency to the light-emitting element or the light-receiving element can be obtained. In the case where the core portion is composed of a resin composition mainly composed of a decene-based resin (cycloolefin-based resin), it is difficult to produce a particularly strong defect with respect to the above-described deformation, and the core portion can be further increased. The refractive index of the coating portion is poor, and the heat resistance is excellent. As a result, an optical waveguide having higher performance and more excellent durability can be obtained. 20 201222034 Moreover, it is easy to form an electric circuit and an optical circuit, and various types of optical circuits can be formed with good dimensional accuracy. In particular, with regard to the optical circuit, by selecting the exposure pattern, an optical path (core portion) of any shape or configuration can be formed, and a finer optical path can be formed explicitly, thereby contributing to the product of the circuit. The miniaturization of the device can be achieved. The optical waveguide structure of the present invention, the optical circuit (pattern of the optical waveguide) or the design of the electrical circuit The utility model has the advantages of wide space, good yield, high optical transmission performance, excellent reliability and longevity, and versatility. Therefore, by including the optical waveguide structure of the invention, high reliability can be obtained. Various electronic components and electronic devices. [Implementation of the invention] Hereinafter, the optical waveguide structure and the electronic device of the present invention will be described in detail based on preferred embodiments shown in the accompanying drawings. <First Embodiment: Fig. 1 1 is a cross-sectional view showing a first embodiment of the optical waveguide structure of the present invention. FIG. 2 is a perspective view of the optical waveguide shown in FIG. 1, and FIG. 3 shows an optical waveguide structure of the present invention. In the following description, in the following description, the upper side in FIG. 1 is referred to as "upper" and the lower side is referred to as "lower". Further, Fig. 1 and Fig. 2 exaggerate the thickness direction of the layer (the upper and lower directions of each figure). As shown in FIG. 1, the optical waveguide structure 1 of the present invention includes a substrate 2, a conductor layer 5 provided on the lower surface of the substrate 2, a light-emitting element 3 and a light-receiving element 4 provided on the substrate 2, and a light-emitting element 3. The optical waveguide 9 between the light-emitting portion 31 and the light-receiving portion 41 of the light-receiving element 4. The optical waveguide 9 is formed by sequentially laminating a cladding layer (lower cladding 21 201222034 layer) 91, a core layer 93, and a cladding layer (upper cladding layer) 92 from the lower side in FIG. 2 to form a core layer 93. There is a specific pattern of the core portion 94 and the cladding portion %. The core portion 94 forms part of the optical path for transmitting light, and the cladding portion % is formed on the core layer 93 but does not form an optical path for transmitting light, and functions as the same function as the cladding layers w and %. As a constituent material of the core layer 93, a material which changes its refractive index by irradiation with light (for example, ultraviolet rays) or by stepwise heating can be used. A preferred example of the above-mentioned material is a '"' leaf, and a resin composition containing a cyclopentene polymer such as the present cyclopentene polymer or a reduced rare polymer (resin), etc. The main material is especially suitable for those containing the sage polymer (as the main material). The core layer 93 composed of the above materials is excellent in resistance to deformation such as bending: in particular, even in the case of repeated hip deformation At the same time, it is also difficult to cause the peeling of the second portion &quot;4 with the covering portion 95, or the peeling between the core layer 93 and the adjacent layer (the covering layer 91, 92), or may be prevented from being inside or covered in the core portion 94. A microcrack is generated in #95. The knot is j, the optical transmission of the first waveguide 9 is obtained, and the optical waveguide 9 having excellent durability is obtained. Further, for example, the constituent material of the core layer 93 may contain an anti-corrosion. Oxidation

: refractive index modifier, plasticizer, tackifier, reinforcing agent, sensitizer, leveling agent, defoamer, adhesion aid and difficult M n . The antioxidant is added to improve the high temperature and to improve the weather resistance and to suppress the photodegradation. The above-mentioned antioxidants include, for example, (four) systems, double-dose systems, bifurcations, and the like, or aromatic amines. Further, by adding a plasticizer, a pestle, and a reinforcing agent, the resistance to bending can be further increased. The addition/content ratio represented by the above-mentioned antioxidant (the total amount of two or more kinds of 22, 2012,220,304 in total) is preferably about ～40% by weight, more preferably 3~, with respect to the entire constituent material of the core layer 93. 3〇% by weight. If the amount is too small, the function of the additive cannot be sufficiently exhibited. If the amount is too large, the light transmitted through the core portion 94 (transmission light) t is reduced in transmittance and patterned depending on the type or characteristics of the additive. Poor, unstable refractive index, etc. As a method of forming the core layer 93, a coating method can be mentioned. The coating method may be a method of applying a composition for forming a core layer (such as a varnish) and hardening (curing), and a method of applying a curable monomer composition and curing (curing) the composition. Further, a method other than the coating method, for example, a method of joining sheets produced separately may be employed. The core layer 93 obtained in the above manner is selectively irradiated with light (active radiation) using the L cover to pattern the core portion % of the desired shape:, as the light for exposure, visible light, ultraviolet light Active light rays such as infrared light and laser light. Further, electromagnetic waves such as X-rays or particle beams such as electron beams are used instead of light. In the core layer 9.3, the refractive index of the portion irradiated by the flowering body is reduced, and the refractive index of the portion irradiated with the non-station light is generated. For example, the portion of the core layer 93 that is irradiated with light becomes a cladding portion and is behind the soil.丨95, the portion where the unirradiated portion becomes the core portion The refractive index of the hopper portion 95 is substantially equal to the refractive index of the smear layer 91, 92. After the core layer 93 is irradiated with light, it is advanced. By adding this heating step, the refractive index of 95 can be made poor, so that it is preferable. Further, in the case where the core portion 94 is formed by heating in a specific pattern, the core portion 94 and the cladding portion 23 are further enlarged. 201222034 Further, the principle and the like will be described in detail below. The shape of the core portion 94 to be formed is not particularly limited, and may be a linear shape, a shape including a curved portion, an irregular shape, a branch portion including an optical path, a shape of a merging portion or a cross portion, and a condensing portion ( Any portion in which the width or the like is reduced, or a light diffusing portion (portion A in which the width or the like is increased), or a combination of two or more of these. The present invention is characterized in that the core portion 94 of an arbitrary shape is formed by setting the light, and the pattern is easily formed. The constituent materials of the respective portions of the optical waveguide 9 and the method of forming the core portion 94 will be described in detail below. The substrate 2 is a flexible substrate having flexibility and insulation properties. Examples of the constituent material of the substrate 2 include an epoxy resin, a phenol resin, a bis-butylene diimide resin, a bis-butenylene imide, a three-well resin, a three-seat tree, and a poly-cyanuric acid. An ester (p〇lycyanurate) resin, a polyisocyanuric acid resin, a benzocyclobutene resin, a polyimine resin, a polybenzoic acid resin, a reduced resin, and the like. Further, the materials may be used singly or in combination of plural kinds. Further, the substrate 2 may be a laminate of a plurality of layers. For example, the first layer and the second layer which are formed of a resin material having the same composition (type), and the first layer and the second layer which are composed of resin materials having different compositions (types) may be used. . Further, the layer constitution of the laminate is of course not limited thereto. The thickness of the substrate 2 is not particularly limited, and is usually preferably about 5 to 5 () / / m and more preferably about 10 to 40 / zm. When the thickness of the substrate 2 is within the above range, the light-structure structure 1 can be made sufficiently flexible. 24 201222034 Substrate 2 has the right degree. The concrete gentleness can be easily bent by hand (for example, the Young's modulus of the tensile elastic modulus plate 2 (Y_g, S Μ〇 _)) is Hgp in a normal room temperature environment (2〇~25°). c and the lower surface H of the substrate 2, more preferably about 2 to 12 GPa. The shape of the conductor layer 5 is patterned into a wiring or circuit of a specific person. The conductor layer 5 is exemplified by copper, The material of the steel system is a variety of metal materials such as a thick acoustic aluminum alloy such as the conductor layer 5. The degree of drought is not particularly limited, but is usually about 5 to 7 〇 center, and is preferably about 5 to 7 〇. It can be formed by metallized joints, vapor deposition, sputtering, etc., and metal plating. For the pattern of the conductor layer 5, for example, I insect engraving, printing, masking, or the like can be used. In the patterning example, the substrate 2 is formed with a through hole 21 + filled with a conductive material r in the upper ζ, the beacon hole 2 1 "material (for example, steel, copper-based metal material), and an aluminum alloy % each „ ^ 〇 conductor post 22 . The conductor post 22 is electrically connected to the upper surface of the lead and the substrate 2. Shore conductor layer 5 Light-emitting element 3ι:*·: μ: α. The octagonal base D 30 is provided on the base portion 31, the illuminating metal wire 32 connected to the surface of the illuminating portion Μ, and the external electrode 33 connected to the external circuit of the electrode illuminating surface provided on the base surface. Further, when the light-emitting portion Μ and the surface of the base 30 are stacked &amp; ” 〇Ρ 31 and the metal wire 32 (the surface is stacked and the spherical tree is energized to the external electrode 33, the light-emitting portion 31 emits light. The light-emitting element 3 is mounted on the substrate 2 so as to be connected to the external electrode 3. The column 22 is joined (electrical connection 25 201222034. In addition, the light-receiving element 4 has a base 4〇 and is fixed to the base 4〇. The light-emitting portion 41 and the electrode pad connected to the light-receiving portion 41

The gold pads @B and 8 of the electrode pad are placed under the base 4 and are used to connect the external electrode 43 to the external circuit. Further, the light receiving portion 41 and the wire 42 are covered with a hemispherical tree on the surface of the base 4Q. When the light signal is connected to the light signal, it is converted into an electrical signal and outputted from the external electrode 43. The light receiving element 4 is mounted on the substrate 2 such that the external electrode 43 is bonded (electrically connected) to the conductor post 22. The light-emitting portion 31 of the light-emitting element 3 and the light-receiving portion 41 of the light-receiving element 4 may be formed by a plurality of light-emitting points or light-receiving points in addition to one light-emitting point or one light-receiving point. For example, the light-emitting point or the light-receiving point' may be arranged in a column shape (for example, a light-emitting point or a light-receiving point is 1×4, 1χ12) or a matrix (for example, a light-emitting point or a light-receiving point is nXnUgJ: η' claw The one or more of the light-emitting points or the light-receiving points are arranged irregularly. The moon-shaped mold 34 closes the light-emitting portion 31 and the like on the right side of the base 3 of the light-emitting element 3. Since the light-emitting portion 31 is formed so as not to be exposed to the outside and is closed, the light-emitting portion 31 can be protected from contamination, damage, oxidation, etc. As a result, the reliability of the light-emitting element 3 is improved. Further, the resin mold 44 is further improved. On the basis of the light-receiving element 4 On the left side of the fourth side, the light-receiving portion 41 and the like are closed, whereby the structure in which the light-receiving portion 41 is not exposed to the outside can be formed, so that the light-receiving portion 41 can be protected from contamination, damage, oxidation, etc. 26 201222034 Also, the _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ The resin and the hail-reducing decene-based optical waveguide 9 are provided between the light-emitting point of the light-emitting point and the light-receiving portion 1, and between the optical fiber 9 and the telephoto element and the light-receiving element 4 so as to connect the light-receiving point. The coating portion located at the core corrugated portion is formed in each of the viewing time (the refractive index of 92 from the coating layer 91 and the portion 94). In the core portion 94, as shown in Fig. 2, the entire circumference of the outer circumference is surrounded by the coating process. The both ends of the optical waveguide 9 (the connection with the light-emitting element 3 and the light-receiving element 4) Covered by the resin mold 34 provided in the light-emitting element 3 and the resin mold 44 provided on the light-receiving element 4, The light-emitting element 3 and the light-receiving element 4 are formed. Thereby, the optical waveguide 9, the light-emitting element 3, and the light-receiving element 4 can be formed in two parts and operated as one component (optical wiring). The number of the core portions 94 formed by one optical waveguide 9 can be, for example, the number of light-emitting points provided in one light-emitting portion 31, or The number of light receiving points provided by the one light receiving unit 41 is not particularly limited. The optical waveguide structure 1 of the present embodiment is illuminating the tg member 3 via the conductor layer 5 and the conductor 27 201222034 body column 22 When the external electrode 33 is energized, the light-emitting point of the light-emitting portion 31 emits light, and the light emitted to the right in FIG. 1 enters the core portion 94 of the optical waveguide 9. The optical waveguide 9 is repeatedly reflected at the interface between the core portion 94 and the cladding portion (the cladding layer 92 and the lateral cladding portion 95), and is along the longitudinal direction of the core portion 94 (FIG. 1). In the middle right direction) advance. When the light reaches the light receiving point of the light receiving unit 41, the light signal is converted into an electric signal in the light receiving unit 41, and is output from the external electrode 43. The optical waveguide structure described above will be described in detail below. Since the optical waveguide 9 is made of a polymer material, the optical waveguide 9 is flexible and the substrate 2 is also a flexible flexible substrate. Therefore, the tunnel and the tunnel are touched from the ice. Therefore, the waveguide structure 1 as a whole has excellent flexibility. As a result, for example, even if the bending operation is repeated, the optical waveguide structure excellent in durability can be obtained without being broken, and the optical waveguide 9 and the substrate 9 are not directly fixed, so that the optical waveguide is subjected to the bending operation. 9 and the substrate 2 are free, and the goods are narrated & As a result, the local stress concentration can be prevented, and the destruction of the optical waveguide 9 with the tunnel bending operation can be more reliably performed. &lt;Second Embodiment: Fig. 4 &gt; Fig. 4 shows an optical waveguide or the like of the present invention. The second embodiment of the structure 1. In the following, the description of the optical waveguide structure 1 is shown in the same manner as in the first embodiment, and the description of the same is omitted. Fig. 4 is a plan view showing a second embodiment. The optical waveguide structure of the present embodiment, the first waveguide 9, the light-emitting element 3, and the "member 4" are different from the above. 28 201222034 That is, three light beams are provided on one substrate 2, respectively. The waveguide 9, the light-emitting element 3, and the light-receiving element 4. Thereby, optical communication can be simultaneously performed in the three optical waveguides 9, so that the optical communication of the optical waveguide structure 1 can be increased in size. 3 and the light-receiving element 4 can be integrally formed and operated as one component (optical wiring). Therefore, the optical waveguide structure 1 can be easily changed only by appropriately changing the number of optical wirings mounted on the substrate 2. The third embodiment of the optical waveguide structure 1 of the present invention is shown in Fig. 5. The optical waveguide structure 1 will be described below. The same matters as in the first embodiment are omitted. The description will be made focusing on the differences. Fig. 5 is a plan view showing a third embodiment. The optical waveguide structure 1 of the present embodiment, the optical waveguide 9, the light-emitting element 3, and The composition of the light receiving element 4 and the above In other words, three optical waveguides 9, three light-emitting elements 3 including three light-emitting points, and three light-receiving points are provided on one substrate 2. By the light-receiving element 4, optical communication can be simultaneously performed in the three optical waveguides 9, so that the optical communication of the optical waveguide structure can be increased. Further, the three optical waveguides 9, the light-emitting element 3, and the light-receiving element 4 can be realized. It can be integrated and operated in the form of one component (optical wiring). Therefore, the work on the substrate 2 can be easily performed, and the optical waveguide structure can be easily manufactured. [Fourth embodiment: Fig. 6 &gt Fig. 6 shows a fourth embodiment of the optical waveguide structure according to the present invention. 29 201222034 Hereinafter, the optical waveguide structure 1 will be described, and the same matters as those of the above-described embodiment will be omitted. Fig. 6 is a plan view of the fourth embodiment. In the optical waveguide structure 本 of the present embodiment, the optical waveguide 9, the light-emitting element 3, and the light-receiving element 4 have the same configuration as described above. , set on one substrate 2 The optical waveguide 9 having three core materials, the light-emitting element 3 including the light-emitting portions 3 having three light-emitting points, and the light-receiving element 4 including the light-receiving portions 41 having three light-receiving points are provided. Since the three optical waveguides 9 perform optical communication at the same time, the optical communication of the optical waveguide structure can be increased in capacity. Further, the optical waveguide 9' of the light-emitting element 3 and the light-receiving element 4 can be integrated into one component (optical wiring) Therefore, the operation of loading on the substrate 2 becomes easy, and the optical waveguide structure 1 can be easily manufactured. &lt;&lt;Fifth Embodiment: Fig. 7 &gt; Fig. 7 shows the light of the present invention, respectively. The fifth embodiment of the waveguide structure is described below. The optical waveguide structure 1 will be described below, and the description of the same matters as those of the first embodiment will be omitted, and the differences will be mainly described. Fig. 7 is a cross-sectional view showing a fifth embodiment. In the optical waveguide structure 1 of the present embodiment, the configuration of the optical waveguide 9 is the same as that described above. That is, the optical waveguide 9 is formed into a long and thin shape, but the two points which are shifted to the left side from the center in the longitudinal direction and the points which are offset to the right side are partially fixed with respect to the 30 201222034 plate 2 . By doing so, the portion between the station 9 and the substrate 2 is restrained at the fixed portion, but the portion other than the substrate is not restrained. In the optical waveguide structure, the optical waveguide 9 and the substrate can be relatively freely deformed with each other, so that it is easy to alleviate the stress concentration caused by the deformation. For example, the optical waveguide structure! When bending at the center of the longitudinal direction, a positional displacement occurs between the substrate 2 and the optical waveguide 9 due to being located inside or outside the bent portion, but in the longitudinal direction of the optical waveguide structure 1, The 'substrate 2 and the optical waveguide 9 are not constrained in the vicinity, so the above positional shift can be easily accommodated. As a result, local stress concentration accompanying the positional deviation can be prevented, and the optical waveguide structure body can be prevented from being damaged by the bending. The optical waveguide 9 shown in FIG. 7 has two fixing portions with respect to the substrate 2. Solidify; t. The two fixing portions 81 may be any member having a function of a follow-up function, and may be composed of, for example, an adhesive, an adhesive film, or a double-sided adhesive (four). The position of each of the fixing portions 81 is not particularly limited, and is preferably from the end of the substrate 2 to the inner side of the total length of the substrate 2 of about 1 to 4%, and more preferably about 15 to 35% of the inner side. . Further, by partially fixing the optical waveguide 9 and the substrate 2, the optical waveguide 9 can be prevented from being vigorously moved during the bending operation as compared with the case where it is not fixed at all. This hunting can reliably prevent the vigorously moving light 9 from interfering with other members to cause destruction of the light 9 or the optical waveguide 9 and the connection portion between the light-emitting element 3 and the light-receiving element 4 to be separated. In addition, the number or arrangement of the fixing portions 81 is not particularly limited, and may be appropriately set according to the position of the portion of the portion of the operation of 31 201222034. For example, the number of the parts may be three or more. Further, it is preferable that the arrangement of the solid 1 is not disposed in the center 丨... 丨. More preferably, it is arranged so as to be symmetric with respect to the center of the light: distribution: the longitudinal direction. <Sixth embodiment: Fig. 8 9 and 9 respectively show the first embodiment of the optical waveguide structure i of the present invention. Hereinafter, the optical waveguide structure will be described, and the same matters as those of the first '5 embodiment will be described. Fig. 8 is a cross-sectional view showing a sixth embodiment. Fig. 8 is a cross-sectional view showing a sixth embodiment. The optical waveguide structure of the present embodiment has the same configuration as that of the first waveguide 9 described above. That is, the light turbidity shown in Fig. 8 is 0. If the skin guide 9 is fixed to the two fixing portions 81 with respect to the substrate 2, it is fixed between two fixed turns 卩 81, and the optical waveguide 9 is bent. Mode setting. Specifically, the optical waveguide or the like 9 has a U protruding upward. The curved flexible portion 96. A larger gap is formed between the flexible portion 96 and the substrate 2 ant z than between the optical waveguide 9 and the substrate 2 other than the yoke. If the optical waveguide 9 is flexible In the optical waveguide structure 1, the optical waveguide structure 1 is more easily bent in the vicinity of the center in the longitudinal direction of the optical waveguide structure 1 as compared with the case where the flexible portion 96 is not provided. A diagram for explaining a state in which the optical waveguide structure 1 of FIG. 8 is not bent near the center. In FIG. 9, the both ends of the optical waveguide structure are further prevented from being pressed downward. The method of folding 32 201222034 1 is deformed upwards near the center. At this time, the respective contraction forces are located at the bending bend. By the (four) bending operation, the W-wave structure is protruded in a manner (the above is a mountain fold). The optical waveguide 9 on the outer side of the substrate 2 _ portion on the inner side of the f portion is given a tensile force. In the case where the optical waveguide 9 generates tensile stress, the efficiency of the light transmission wheel is lowered, and the optical waveguide 9 is not The flexible portion 96 has the tensile force to be elongated, and the optical waveguide 9 has an unnecessary optical waveguide 9 Shaped danger. In contrast, the optical waveguide 9

When the V* guide 9 has the flexible Q as shown in Fig. 8, the tensile force is given to the vocal of the optical waveguide 4 96, or the flexible portion 96 抜 refers to the shape of '16, which can suppress the obvious The occurrence of tensile force. Therefore, it is possible to suppress the unnecessary deformation of the umbrella channel λ 呷 制 制 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , Further, by providing the flexible portion 96, the folding is easy to leave a gap (... FIG. 9) between the optical waveguide 9 plates 2, so that the optical waveguide 9 can be prevented from interfering with the base, so that the gp can be easily repeated for the bending operation. In the case of the case, it is also possible to prevent the damage of the optical waveguide 9 caused by the interference with the substrate 2 in the case of the blood test tube 4, and as a result, it is possible to improve the optical waveguide structure. The resistance to bending and durability of 1 is further improved by the provision of the flexible portion 96'. The force applied to the hand during the folding operation is only the resistance generated when the bending base 2 is mainly used, as long as the flexible portion 96 is provided. Continuous bending 'The resistance of the optical waveguide 9 is not applied to the hand. Therefore, 'not only the f operation is easier, but also hardly stresses the money guide 9', so the durability can be improved. 33 201222034 Also, by the fixed parts 81 fixing the optical waveguide 9 prevents the restoring force of the flexible portion 96 from directly affecting the light-emitting element 3 or the light-receiving element 4. Therefore, it is possible to prevent the elements from being damaged by the restoring force. Further, the flexible portion 96 can be prevented. The amount of deflection need not be as small as shown in Figure 8, or it can be The portion 96 is described as a flexible amount such as an arc having a circumference of a semicircle or more. Further, in this case, the flexible portion 96 may be wound on an arbitrary axis. Further, the flexible portion may not be provided with the flexible portion 96, the flexible portion is provided on the substrate 2. In this case, when the deformation is caused by the manner in which the vicinity of the center of the optical waveguide structure is protruded downward (in the form of a mountain fold below), the above-described effect can be obtained. Further, the configuration of the flexible portion provided on the substrate 2 is the same as that of the above-described flexible portion 96. <Seventh embodiment: Fig. 1A, Fig. 1 and Fig. 10 and Fig. 11 respectively show the optical waveguide structure of the present invention. In the seventh embodiment, the optical waveguide structure 丨 will be described below, and the description of the same matters as those in the fifth embodiment will be omitted, and the differences will be mainly described. Fig. 10 is a cross section of the seventh embodiment. In the optical waveguide structure 1 of the present embodiment, the configuration of the fixing portion 81 is the same as the above, and the fixing portion 81 shown in Fig. 10 is not a member but is provided on the substrate 2. The through holes 23 are formed. 2 The through hole 23 is provided at the same position as the fixing portion 81 in the fifth embodiment. Further, by inserting the optical waveguide 9 in each of the through holes 23, the optical waveguide 9 is passed from the front side of the substrate 2 to the front side of the substrate 2 at 201222034. The through hole 23 on the left side is disposed on the back side of the substrate 2 and then placed again on the front side of the substrate 2 through the through hole 23 located on the right side. Thus, the optical waveguide 9 is disposed so as to pass through the front side and the back side of the substrate 2, Thereby, the optical waveguide 9 is reliably fixed to the substrate 2 in the vicinity of each of the beacon holes 23. Further, since the optical waveguide 9 is inserted into each of the through holes 23 without using a member such as an adhesive member, the optical waveguide 9 is fixed. The structure of the optical waveguide structure 1 can be simplified and the ease of manufacture can be improved. The long side of the long side is elongated. Fig. 11 is a plan view of the optical waveguide structure 1 shown in Fig. 10. Each of the beacon holes 23 has an elongated shape having a long axis along the direction of the optical waveguide 9 in plan view. When the through holes 23 are formed in such a shape, when the optical waveguide 9 is inserted into each of the through holes 23, it is not necessary to bend the optical waveguide 9 with a small radius of curvature, and it is possible to bend only by bending into a gentle curve. Human optical waveguide 9. As a result, it is possible to prevent the optical waveguide 9 from being broken or peeling between the cladding layers 91, 92 and the core layer 93. Further, when the right through holes 23 are formed in an elongated shape, a gap is formed between the optical waveguide 9 and each of the through holes 23. In the case where the optical waveguide structure i is subjected to the bending operation, the gap is easily shifted in the longitudinal direction between the money guide 9 and each of the through holes U. Even if the tensile force is applied to the optical waveguide 9, It is also possible to surely prevent significant tensile stresses from occurring. Further, the length of the long axis of each of the through holes 23 can be appropriately set according to the twist of the optical waveguide 9, the thickness of the substrate 2, or the like. When the optical waveguide 9 or the substrate 2 is thick, it is preferably changed correspondingly. long. ▲The number and arrangement of the through-holes 23 are not particularly limited, and may be based on the position of the folding part that is accompanied by the bend. For example, the number of through holes 35 23 201222034 23 may be i or three or more. In the case where the number of the through-heads 4 is an odd number, the light-emitting elements 3 and the arrangement of the light-emitting elements 3 and the substrate 2 may be opposite to each other. The configuration of the member through hole 23 is preferably not disposed in the center of the member, and is preferably disposed in relation to the optical waveguide structure 1

配置 Configure the A-symmetric relationship in the center of the direction. <Eighth Embodiment: Fig. 2 &gt; Fig. 12 shows an eighth state of the optical waveguide structure ι of the present invention. Hereinafter, the optical waveguide structure i will be described, and the same matters as those of the above-described first embodiment will be briefly described, and the differences will be mainly described. Figure 12 is a plan view showing an eighth embodiment. In the optical waveguide structure 本 of the present embodiment, the configuration of the substrate 2 is the same as the above, and the other configurations are the same. That is, the substrate 2 shown in FIG. 12 does not overlap the optical waveguide 9 in plan view, and has a portion that is offset from each other. When the optical waveguide structure having the substrate 2 described above is subjected to a bending operation, interference between the optical waveguide 9 and the substrate 2 can be prevented. Therefore, the optical waveguide 9 is hard to be damaged when the bending operation is performed. The substrate 2 shown in Fig. 12(a) has a slit 24 provided near the center, and the portion of the substrate 2 provided with the slit 24 has a width wider than that of the substrate 2 in the longitudinal direction. Therefore, in this portion, the rigidity of the substrate 2 is lowered, so that the optical waveguide structure i can be bent more easily. Further, since the slit 24 is provided so as to overlap the optical waveguide 9 in plan view, the substrate 2 and the optical waveguide 9 are offset from each other in this portion. 36 201222034 Another aspect The substrate 2 shown in Fig. 12(b) has an elongated hole 25 formed in the vicinity of the center and formed along the longitudinal direction of the base 2. In the portion where the through hole 25 is provided, the solid f width of the substrate 2 is still narrower than the width of both end portions in the longitudinal direction of the substrate 2. Further, since the through hole 25 is provided so as to overlap the optical waveguide 9 in plan view, the substrate 2 and the optical waveguide 9 are offset from each other in this portion. Further, the shape of the knife edge 24 and the billet hole 25 is not particularly limited, and for example, the slits 24 may be respectively provided on both sides in the width direction of the substrate 2. &lt;Ninth Embodiment: Fig. 13 &gt; Fig. 13 shows a ninth embodiment of the optical waveguide structure 本 of the present invention. In the following, the optical waveguide structure 丨 will be described, and the description of the same as the fifth embodiment will be omitted, and the description will be focused on the differences. Figure 13 is a cross-sectional view showing a ninth embodiment. In the optical waveguide structure 本 of the present embodiment, the configuration of the wiring board is different from the above, and the same applies to the other. In other words, the wiring board of Fig. 13 has a flexible substrate, the substrate 6 which is laminated on the lower surface of both ends of the substrate 2, and the substrate 6 which is disposed under the substrate 2. The layer 5 and the conductor layer 51 disposed under the substrate 6 are provided. A through hole is formed in the substrate 6, and a conductive material (for example, various metal materials such as copper, a copper alloy, aluminum, or an aluminum alloy) is filled in the through hole 61 to form a conductor post 62. The conductor post 62 is electrically connected to the conductor layer 5 and the conductor layer. 37 201222034 The substrate 6 may be an insulating substrate having a rigidity greater than that of the substrate 2, and examples thereof include paper, glass cloth, and a resin film as a base material, and the base material is impregnated with a phenol resin, a polyester resin, or an epoxy resin. A resin material such as a resin, a cyanate resin, a polyimide resin, or a fluorine resin. Specifically, a glass substrate copper-clad laminate such as a glass cloth-epoxy copper-clad laminate or an insulating substrate used in a composite copper V# laminate such as a glass non-woven fabric or an epoxy copper-clad laminate is used. Examples thereof include a heat-resistant and thermoplastic organic hard substrate such as a polymylon resin substrate, a polyether ketone resin substrate, and a polysulfone resin substrate, or a ceramic substrate such as an alumina substrate, an aluminum nitride substrate, or a carbonized carbide substrate. Hard substrate. Further, the average thickness of the substrate 6 is not particularly limited, and is preferably 3 〇〇 &quot; m

It is preferably about 3 mm, and more preferably, the substrate 6 of 5 〇〇&quot;m becomes sufficiently rigid. The multi-layer substrate (layered substrate) of the board contains a patterned conductive layer between the layers of the board. Thereby, even if the substrate 6 has a small area, the substrate 6 may be a single substrate, or may be a substrate in which a plurality of layers are laminated. With this,

Operation, on the other hand, is difficult at both ends. In this case, any electric power can be formed in the multilayer base, and a complicated 'optical waveguide structure' can be internally constructed to have a relatively high hardness. Since the other side of the structure 1 is attached to the center in the longitudinal direction, the flexible body 1 having a relatively high flexibility is easily bent in the vicinity of the center to be folded. As a result, it is possible to prevent the light-emitting element 3 and the light-receiving element 4 which are disposed at both end portions of the optical waveguide structure 1 from being detached or broken by the bending operation. &lt;Tenth Embodiment: Fig. 14&gt; Fig. 14 shows a first embodiment of the optical waveguide structure 1 of the present invention. In the following, the optical waveguide structure 丨 will be described, and the same matters as those in the ninth embodiment will be omitted, and the differences will be mainly described. Figure 14 is a cross-sectional view showing a tenth embodiment. In the optical waveguide structure 本 of the present embodiment, the configuration of the wiring board is different from the above, and the same applies to the other. In other words, the wiring board shown in FIG. 14 includes a substrate 2 of a flexible substrate, and a substrate 6 which is a rigid hard substrate which is formed on the upper surface and the lower surface of both ends of the substrate 2 in the longitudinal direction. The conductor layer 5 disposed under the substrate 2 is placed on the conductor layer 51 above the uppermost substrate 6, and the conductor layer 51 disposed on the lower surface of the substrate 6 below. Since the substrate 6 is provided at both end portions in the longitudinal direction of the optical waveguide structure 1, the hard portion u having a relatively high rigidity is formed. On the other hand, in the vicinity of the center in the longitudinal direction of the optical waveguide structure ji in which the substrate 6 is not provided, the flexibility of the substrate 2 is maintained, so that the flexible portion 12 having a relatively high flexibility is obtained. Specifically, the 'hard portion n' is formed by sequentially stacking the substrate 6 on the lower mask conductor layer 51, the substrate 2 having the conductor layer 5 on the lower surface, the base 6' optical waveguide 9, and the conductor layer 51 on the upper surface. The substrate 6 is formed by a uniform body. Therefore, the rigidity of the hard portion H can be further increased by the three substrates 6. 39 201222034 - The hard part on the left side of Fig. 14 is mounted on the surface mount type of light-emitting element 3 to drive the light-emitting I of the light-emitting element 3. Gas element) 35. The light-emitting element 3 and the light-receiving element 35 are electrically connected via the conductor layer 51. Thereby, the light emission of the light-emitting element 3 can be controlled by the light-emitting 1C 35. In other words, the hard portion i&quot; on the left side has a light-emitting circuit 3 that has the light-emitting element 3 and the light-emitting 1C 35. &lt;On the other hand, the hard portion 11 on the right side of Fig. 14 is provided with a surface mount type &amp; optical element 4, and a light receiving 1C (light receiving electric element) 45 which is received by the light element 4. Light-receiving element 4 and light-receiving

The turns are electrically connected via the conductor layer 51. Thereby, the light receiving element 4 receives light and converts it into an electrical signal, and then the electrical signal is input to the light receiving IC 45. In other words, the light receiving portion 4 having the light receiving element 4 and the light receiving 1C 45 is constructed in the hard portion u on the right side. In the above-described manner, optical communication is performed between the light-emitting circuit 3A and the light-receiving circuit 4A. Further, a conductive material is filled in the through-holes 61 in the through-holes through which the hard portions 11 are formed in the thickness direction, thereby forming a conductor. Column 62. The conductor posts 62 are electrically connected to the conductor layer 5 and the respective conductor layers $1, respectively. In each of the hard portions, the rigidity is large. Therefore, when the optical waveguide structure is subjected to a folding operation, the hard portion 11 is hard to be bent, so that the light-emitting circuit 300 or the light-receiving circuit 4 can be prevented from being broken. Further, the two substrates 6 on the uppermost layer are aligned with the light-emitting elements 3. The through holes 63 are respectively provided at the positions of the 卩3 1 and the positions of the light-receiving portions 41 of the light-receiving elements 4. 201222034 In the optical waveguide 9 The optical path conversion portion 97 is formed at a position directly below each of the through holes 63. Each of the optical path conversion portions 97 is formed by removing a portion of the optical waveguide 9 and having a portion of the inner surface of the removed portion with respect to the optical waveguide 9 The axis of the core portion 94 is substantially 45. The inclined surface is formed as an inclined surface that functions as a reflection surface that reflects at an angle of 90 to introduce light from the light-emitting portion 31 into the core portion 94. Alternatively, the light is reflected at an angle of 9 导入 so that the light propagating through the core portion 94 is introduced into the light receiving portion 4 j. Further, each of the through holes 63 introduces light from the light emitting portion 31 into the optical path converting portion 97' or from the light. The light of the light conversion unit 97 is introduced into the light passing portion of the light receiving unit 41. The light emitting unit 31 and the light receiving unit are provided by the two optical path converting units 97 and the two optical signal passing regions (through holes 63). The portions 41 are optically connected. On the other hand, in the flexible portion 12', the gap between the thickness of the conductor layer 5 and the thickness of the optical waveguide 9 (four) substrate 6 is sequentially set from the bottom to the bottom of the substrate. That is, the handleable portion 12 is composed of the optical waveguide 9. The flexible portion and the flexible portion formed by the substrate 2 are configured by two flexible portions. The flexible portion can prevent interference between the optical waveguide 9 and the substrate 2, and prevent light from being damaged by the flexible portion. The waveguide 9 is subjected to the configuration described above, and then, the first one can be composed of only the optical waveguide 9. If it is the both ends of the I glazing material 9, it can be confirmed: Fig. 15 and 201222034 show the u-th embodiment of the optical waveguide structure t of the present invention in Figs. 15 and 16. Hereinafter, the optical waveguide structure 丨 will be described.

In the same manner as in the first embodiment, the day of the pottery day &lt;L' and the description of the pot are omitted, and the differences will be mainly described. Figure 15 is a plan view of the eleventh embodiment. In the optical waveguide structure i of the present embodiment, the configuration of the wiring board is different from the above, and the other configurations are the same. That is, the wiring board shown in Fig. 15 includes the substrate 2, and the end from the end in the longitudinal direction of the substrate 2 is disposed to the other end as the i-th electrical wiring (conductor layer) 52. In each of the first! Electrode pads 551 are provided at both ends of the electric wiring 52 to constitute an external connection terminal 55 for electric communication. Further, a light-emitting circuit 3 is provided on the left end portion of the substrate 2, and a light-receiving circuit 400 is provided on the right end portion. An optical waveguide 9 is provided between the light-emitting circuit 3A and the light-receiving circuit 400. The light-emitting circuit 300 has a light-emitting element 3 and a light-emitting element 35 disposed adjacent to the substrate 2, and a g 3 electric wiring 53 electrically connected between the light-emitting elements. Similarly, the light-receiving circuit 400 has the light-receiving element 4 and the light-receiving 1 disposed on the substrate 2 (the 45, and the third electrical wiring 53 electrically connected between the two). The left end of the self-illuminating circuit 300 to the substrate 2 Four second electric wires (conductor layers) 54 are disposed, and electrode pads (5) are provided at the ends thereof. Similarly, four second electric wires (conductor layers) are disposed from the light receiving circuit 400 to the right end of the substrate 2 54' is provided with electrode pads 551 at the ends thereof. 42 201222034 The external communication terminals 55a for optical communication are formed by the electrode pads, and the respective electrode pads 5 5 1 are arranged along the respective end faces. Among the terminals, the electrical communication external terminal 55b located at the left end of the substrate 2 and the optical communication external connection terminal 55a constitute the i-th terminal portion 55, and the electrical communication external terminal 55b located at the right end of the substrate 2 communicates with the optical communication. The second terminal portion 55 is formed by the external connection terminal 55a. In the optical waveguide structure 1, not only optical communication but also electrical communication can be performed between the second terminal portion and the second terminal portion 55. Therefore, electricity can be made The degree of freedom in design is drastically improved, and the degree of integration of the circuit is improved. 'There is also an advantage that it is not necessary to separately prepare a structure for electrical communication. Moreover, each of the first electric wiring 52 and the light-emitting circuit 3 is light-receiving and receiving light. Since the circuit 4 is separated from the electric knife, it is difficult to affect the noise generated by the circuits. Therefore, the first electric wiring 52 can perform highly reliable electrical communication. Further, in the present embodiment, the optical communication is used. The external connection terminal 55a, the optical waveguide 9, the light-emitting circuit 3A, and the light-receiving circuit 4A are arranged in a straight line. The optical waveguide structure 胄i having the above configuration can be, for example, a connector for the circuit arranged in the opposite direction. The cross-sectional view of the eleventh embodiment. As shown in Fig. 16, the light-emitting element 3 constituting the light-emitting circuit 3, the light-emitting 1C 35, and the third electric wiring 53 are covered by the resin mold 34. Similarly, the light-receiving circuit is constructed. The light-receiving element 4, the light-receiving partner, and the third electric wiring 53 are covered with the resin mold 44. By providing the resin molds 34 and 44, the light-emitting circuit 43 201222034 and the light-receiving circuit 400 are not exposed to the outside. Since the structure is closed, the light-emitting circuit 300 and the light-receiving circuit 400 can be protected from contamination, damage, oxidation, etc. As a result, the reliability of each circuit is improved. <1st Embodiment> Fig. 1 7 &gt; Fig. 17 shows a twelfth embodiment of the optical waveguide structure according to the present invention. Hereinafter, the optical waveguide structure 丨 will be described, and the description of the fifth embodiment with respect to the above-described third embodiment will be omitted, and the difference will be centered on Fig. 17 is a plan view showing a twelfth embodiment. In the optical waveguide structure of the present embodiment, the configuration of the i-th terminal portion and the second terminal portion 55' is different from the above. In other words, the first terminal portion 55 and the second terminal portion 55• shown in Fig. 17 are not provided in the vicinity of the end surface in the longitudinal direction of the substrate 2, but are provided on the side surface side of the end portion in the longitudinal direction. Specifically, the electrode pads 551 constituting the first terminal portion 所示 shown in Fig. 17 are arranged along the side end faces of the left end portions of the substrate 2. Similarly, each of the electrode pads 551 constituting the second terminal portion 55 shown in Fig. 7 is arranged along the side end surface in the width direction of the right end portion of the substrate 2. Further, the arrangement of the electrode pads 551 is not limited to the arrangement of FIG. 17, and for example, the second terminal portions 55 may be formed, and the electrode pads 55A may be arranged along the side end faces on the opposite sides to those in FIG. . Further, each of the first electric wires 52 may be provided not on the same surface as the optical waveguide 9 but on the back side of the optical waveguide 9 via the substrate 2 .

The upper optical waveguide structure 1 is, for example, a structure that is useful between two points on the connection plane. ...B 44 201222034 &lt;Third Embodiment 3: Fig. 1 8 &gt; Fig. 18 shows the optical waveguide structure 1 of the present invention, and the rib 13 is implemented. Hereinafter, the optical waveguide structure 1 will be described, and the same matters as those of the above-described fifth embodiment will be omitted, and the same point will be omitted. Fig. 18 is a cross-sectional view showing a third embodiment. In the optical waveguide structure 本 of the present embodiment, the configuration of the wiring board is different from the above, and the same applies to the other. That is, the wiring board shown in Fig. 18 is composed of a laminated substrate (multilayer substrate) having a plurality of substrates 2 and a conductor layer provided on the interlayer or the surface of the layer. Further, a through hole 2 is formed in the substrate 2, and a conductive material is filled in the through hole, and the conductor post 22 is formed. The conductor layer 5 disposed between or under the layers of the laminated substrate is patterned to form an arbitrary electrical circuit. Thereby, the degree of integration of the electric circuit formed on the wiring board can be improved as compared with the case where the substrate 2 is i-layered. Fig. 23 is a cross-sectional view showing a first embodiment of the optical waveguide structure of the present invention. Fig. 24 is a perspective view of the optical waveguide shown in Fig. 23, and Fig. A plan view of the core layer of the guide shown in Fig. 23. In the following description, the upper side in Fig. 23 is set to "up" and the lower side is set to "down". 23 and 24, the thickness direction of the layer is exaggerated (the upper and lower directions of each figure are as shown in FIG. 23, and the optical waveguide structure of the present invention is dirty, and the conductor layer (10) disposed under the substrate _2 is on the substrate. The hairpin (10) and the light-receiving element are detached 45. The optical waveguide 1009 between the light-emitting portion 1031 of the optical element 1003 and the light-receiving portion ι4 of the light-receiving element 1004. The substrate 1002 and the conductor layer i〇〇5 constitute a wiring substrate. The waveguide 1009 is a strip formed by sequentially laminating a cladding layer (lower cladding layer) 1091, a core layer 1093, and a cladding layer (upper cladding layer) 1〇92 from the lower side in FIG. 1093 is formed with a core portion and a cladding portion 1095 which are elongated and specific patterns which are set along the longitudinal direction of the strip-shaped optical waveguide 1009. The core portion 1094 forms a portion of the optical path for transmitting light, and the cladding portion 1095 is formed. Although it is formed in the core layer 1〇93 but does not form an optical path for transmitting light, it functions as the same function as the cladding layers 1091 and 1〇92. The constituent material of the core layer 1093 may be light (for example, ultraviolet light). Irradiation or change of refractive index by further heating A preferred example of the material is a resin composition containing a cycloolefin resin such as a benzenecyclobutene polymer or a norbornene polymer (resin) as a main material, and particularly preferably a halo. The olefin polymer (as a main material). The core layer 1 〇 93 composed of the above materials is excellent in resistance to deformation such as bending, and in particular, it is difficult to generate the core portion 1094 and the package even in the case of repeated bending deformation. The peeling of the covering portion 1095 or the separation between the core layer 1〇93 and the adjacent layers (including the money 1091 and 1092) prevents the occurrence of microcracks in the core portion 1094 or in the covering portion 1〇95. As a result, The light transmission performance of the optical waveguide 1009 is maintained, and the light wave 1009 excellent in durability is obtained. ' Further, for example, the constituent material of the core layer 1〇93 may contain an antioxidant, a refractive index adjuster, a plasticizer, and a tackifier. Additives, sensitizers, additives such as 46 201222034 /k ^ additives and flame retardants. Adding anti-oxidant sentences to improve high temperature stability, and improving the weather resistance and inhibiting photodegradation The effect of the above antioxidant For example, a phenanthrene-based or a bisphenol-based phenol-based or aromatic amine-based compound may be mentioned. Further, a plasticizer, a tackifier, and a reinforcing agent may be added to the bisphenol bismuth oxime, and the bending may be further increased. The content of the additive represented by the above antioxidant (in total of two or more kinds) is generally 0.5 to 40% by weight, more preferably about 0.5 to 40% by weight, based on the total amount of the core layer 1〇9. Living in von 3~30% by weight. If the amount of cough is too small, the function of the additive cannot be fully utilized. #量过2 According to the type or characteristic of the additive, there is light generated in the core part 1〇94 (transmission light) The penetration rate is reduced, and the graph is settled. (4) Poorization and refractive index instability The method of forming the core layer 1093 may be a coating method. The coating method may be a method of applying a core (forming varnish or the like) for forming a core layer, and curing (curing) the core layer, and a method of applying a curable monomer composition and curing (curing) the composition. X, a method other than the coating method, for example, a method of joining separately manufactured sheets may be employed. The core layer obtained in the above manner is selectively irradiated with light (active radiation) using a mask, and the core portion ι 94 of the desired shape is patterned. The light used for exposure includes active energy rays such as visible light, ultraviolet light, infrared light, and laser light. Further, electromagnetic waves such as X-rays or particle beams such as electron beams may be used without using light. In the core layer 1〇93, the refractive index of the portion irradiated with light is lowered, and a refractive index difference is generated between the portion where the light is not irradiated by 47 201222034. For example, the portion of the core layer that is irradiated with light becomes the cladding portion 1095, and the portion that is not irradiated becomes difficult to be the core portion. The refractive index of the covering portion 1095 is substantially equal to the refractive index of the cladding layer ι 9 . Further, the core layer 1 〇 93 is irradiated with light in a specific pattern, and then heated to form the core portion 1G94. By adding this additional step, the difference in refractive index between the core portion 1094 and the cladding portion 1〇95 can be further increased, which is preferable. Furthermore, the principle and the like will be described in detail below. As shown in FIG. 24, the pattern shape of the formed core portion 1094 is a widened portion (expanded portion) 1941 which is continuously enlarged in width toward the left end end _ (end portion in the longitudinal direction), and has a width toward the right end portion ( The other end portion of the long-side direction) is formed by continuously reducing the reduced portion (reduced portion) 1942 and the width-fixed portion of the widened portion 丨 941 and the widened portion 1942. On the other hand, as shown in Fig. 23, the thickness of the core layer 1093 forming the core portion urn is constant. Therefore, the cross-sectional area of the widened portion 1941 &amp; core portion 1094 shown in Fig. 24 is continuously increased toward the left end portion, and the reduced portion 1942 is such that the cross-sectional area of the core portion 1〇94 is continuously reduced toward the right end portion. Part of it. Further, the equal-width portion 194 is a portion in which the cross-sectional area of the core portion is constant. The pattern shape of the core portion 1094 may be a shape having a curved portion, a shape having a branch portion, a merging portion, or a cross portion, or a combination of two or more of the above, in addition to the widened portion 1941 and the reduced portion 1942. Any shape or the like. Further, the present invention is characterized in that in the formation of the patterns, the shape of any of the drawings of Fig. 48 201222034 can be easily realized by setting the illumination pattern of the light. The constituent materials of the respective portions of the optical waveguide 1 009 and the method of forming the core portion 丨〇94 will be described in detail below. The substrate 1 002 is a flexible substrate having flexibility and insulation properties. The constituent material of the substrate 1002 may, for example, be an epoxy resin, a phenol resin, a bis-butadiene diimide resin, or a di-butadiene di-imine-three well tree::, a diazole tree, a poly3 A polycyanate resin, a polyisocyanurate resin, a benzocyclobutene resin, a polyimide resin, a polybenzotriazole resin, a norbornene resin, or the like. Further, the materials may be used singly or in combination of plural kinds. Further, the substrate 1002 may be a laminate of a plurality of layers. For example, the first layer and the second layer which are composed of a resin material having the same composition (type) may be composed of a resin material having a different composition (type), and the second layer may be laminated. Furthermore, it is of course not limited to this. Layer Composition of Body The thickness of the substrate 1002 is not particularly limited, and is usually more preferably 右. ~...m or so. If the thickness of the base 2::: is within the range, the optical waveguide structure 1 is sufficiently flexible: "the degree of the substrate can be taken as an example. Specifically, the Young's mode of the substrate (10) 2 The number of ^: the number of ground phase) is better ^ Erqizhi (tensile elastic modulus) Che Yijia is in the general room temperature environment (about 2 ,, more preferably about 2~l2GPa. Between the underside of the substrate 1002 The shape of the conductor layer is 〇 〇 〇 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The thickness of the metal layer 4 layer i005 is not particularly limited, and is usually preferably about 3 to 12 angstroms, more preferably about 5 to 70. The conductor layer 1005 can be joined by metal (for example), metal plating, for example. A method such as plating, sputtering, or the like is formed. For the rounding of the conductor layer 1 to 5, for example, etching, printing, masking, or the like can be used. In the substrate 1002, a through hole 21 is formed, and the through hole is filled with Conductive materials (for example, various metal materials such as copper 'copper alloy K-based alloys') A conductor post 1022 is provided. The conductor post 1 22 is electrically connected to the conductor layer 1005 and the upper side of the substrate read. The light-emitting 7L member 1003 has a base 1〇3〇, a matte portion 1031 fixed to the surface of the base, and a connection light. The electrode pad of the portion 1031 and the metal wire 1032 of the electrode pad of the base 1030 and the external electrode 1 〇 33 provided on the lower surface of the base 1030 and connected to the external circuit by the illuminating 彳1〇31. The light-emitting element #1031 and the metal and the wire 1〇32 are covered by a resin mold 1034 which is hemispherical on the surface of the base 1〇3〇. When the right external electrode 1033 is energized, the light-emitting portion 1〇31 emits light. The external electrode 1〇33 is mounted on the substrate 1002 in such a manner as to be electrically connected to the conductor post 1〇22. On the other hand, the light receiving element 1〇〇4 has a base 1〇4〇 and is fixed to the base 104〇. The light-receiving portion 1G41 on the surface, the electrode wire connecting the electrode pad of the light-receiving portion 1G41 and the electrode pad of the base 1040, and the metal wire 1〇42 disposed on the base ι〇4〇, and the light-receiving portion and the outside The external electrode 1〇43 of the circuit is connected. Further, the light receiving unit 1041 and the metal wire 1042 are abutted on the base When the light receiving unit 1041 receives the optical signal, it is converted into an electrical signal and is output from the external electrode 1043. The light receiving element 1004 is an external electrode 1〇. 43 is bonded to the substrate 1〇〇2 in a manner of being electrically connected to the conductor post 1〇22. Further, the light-emitting unit 1〇31 in the light-emitting element 1003 and the light-receiving unit 1041 in the light-receiving element urn are respectively In addition to the &quot;solid light-emitting point or i light-receiving points, a plurality of light-emitting points or light-receiving points may be collected. For example, a plurality of light-emitting points or light-receiving points are arranged, for example, a light-emitting point or a light-receiving point is arranged in a column shape (for example, a light-emitting point or a light-receiving point is 1χ4, ΐχΐ2 or determinant (for example, a light-emitting point or a light-receiving point is nxm: η, the claw is an integer of 2 or more, or a plurality of light-emitting points or light-receiving points are irregularly arranged ((10)-ground arrangement, etc. The resin mold 1034 closes the light-emitting portion 1G31 on the right side of the base plate 1〇3〇 of the light-emitting element_ By this, it is possible to form a structure in which the light-emitting portion 1 () 31 is not exposed to the outside and is closed, so that the light-emitting portion 1〇31 can be protected from contamination, damage, oxidation, etc. As a result, the light-emitting element i can be improved. 3 reliability.

The bait board 1044 is difficult to close the light receiving portion on the name of the base 1040 of the light receiving element 1004. Thereby, the structure in which the light receiving portion 1041 is not exposed to the external L seal can be formed, so that the light receiving portion 1G can be protected from damage, oxidation, and the like. As a result, the reliability of the light receiving element (10) 4 can be improved. Further, examples of the material of the constituents of the resin molds 1 to 34 and 1044 include an epoxy resin, a resin resin, a rare resin, a resin, and the like. Light-emitting point and light-receiving portion of 1031 The optical waveguide 1009 is provided between the light-emitting element ι 3 and the light-receiving element 1004 so as to connect the light-receiving portion of the light-emitting portion 51 201222034 1041. Thereby, the light-emitting point and the light-receiving point can be optically connected by the optical waveguide 1〇〇9. The core portion 1 〇 94 of the optical waveguide 1009 is formed in a plan view in which each light-emitting point or each light-receiving point overlaps in a plan view (when viewed from above in Fig. 23). The core portion 1094 has a higher refractive index than the cladding portion 1〇95, and has a higher refractive index with respect to the cladding layers 1091 and 1092. The cladding layers 1〇91 and 1〇92 constitute the cladding portions located at the lower portion and the upper portion of the core portion 1094, respectively. According to the above configuration, the core portion 1〇94 can function as a light guiding path that surrounds the entire circumference of the outer periphery of the envelope portion as shown in Fig. 24 . Both end portions of the optical waveguide 1009 (connecting portions with the light-emitting element 1〇〇3 and the all-optical element 1004) are covered by a resin mold provided in the light-emitting element 1〇〇3 and a resin mold 1〇44 provided in the light-receiving element 1004. It is fixed to the light-emitting element 1003 and the light-receiving element 1〇〇4. Thereby, the optical waveguide 、9, the light-emitting element 1003, and the light-receiving element 1〇〇4 can be integrated and operated in the form of i parts (optical wiring). Furthermore, the optical waveguide 1〇〇9 shown in Fig. 24 includes i core portions 1〇94, but! The number of the core portions ι 94 formed by the optical waveguides 1 〇〇 9 can be, for example, the number of light-emitting points provided by one light-emitting portion 1 〇 31 or the light-receiving points set by the light-receiving portions 1041. The number is set and is not particularly limited. In the optical waveguide structure 1〇〇1 of the present embodiment, when the external electrodes 1〇33 of the light-emitting element (10) 3 are energized via the conductor layer 1〇05 and the conductor post 1022, the light-emitting point of the light-emitting unit 1031 emits light, and FIG. 23 The 52 201222034 light emitted from the right enters the core 1〇94 of the optical waveguide 1009. In the optical waveguide 1〇〇9, the interface between the core portion 1094 and the cladding portion (the cladding layer 109!, 1092 and the side cladding layer 卩1095) is repeatedly reflected, and is along the core portion 1 〇94. Its longitudinal direction (the right direction in Fig. 23) advances. When the light reaches the light receiving point of the light receiving unit 1041, the light signal is converted into an electrical signal ’ in the light receiving unit 1〇41 and outputted from the external electrode 1043. The optical waveguide structure 丨00丨 will be described in detail below. Since the optical waveguide 1009 is made of a polymer material, it has flexibility, and the core portion 1 094 and the cladding portion 1 〇 95 are refracted. Since the rate difference is large, even when the optical waveguide 1009 is bent, sufficient transmission efficiency can be obtained. Further, since the optical waveguide 1009 and the substrate 1〇〇2 are not directly fixed, the optical waveguide 1009 and the substrate 1〇〇2 are freely movable when the bending operation is performed. Further, Τ 'prevents local stress concentration and prevents damage of the optical waveguide 1009 accompanying the bending operation. As a result, the optical waveguide structure 1001 having excellent durability can be obtained. Here, the optical waveguide 1〇〇9 of the optical waveguide structure 1001 has a width in which the width of the core portion 1094 is continuously increased toward the left end portion in plan view. The widened portion 1 941 and the widened portion 1 942 in which the width of the core portion 1 〇 94 is continuously reduced toward the right end portion. The widened portion 1941 shown in Fig. 25 (a) has a width which continuously increases toward the left end portion by a certain ratio. Further, the width of the reduced portion 1942' shown in Fig. 25(a) is continuously reduced toward the right end portion by a constant ratio. As shown in FIG. 23, by arranging the light-emitting points of the light-emitting elements 1 and 3 in a manner opposite to the left end surface of the widened portion 丨91, the light can be incident on the widened portion with a higher efficiency of 2012201234. 1941. That is, the area of the left end surface of the widened portion 194 1 is larger than the right end surface ′, so that the light radiated from the light-emitting point can be efficiently received. In particular, when the semiconductor laser is used as the light-emitting element 1003, the light is made specific. Since the diffusion angle is radiated, the area of the left end surface of the widened portion 1941 is large, which is effective from the viewpoint of improving the light-binding efficiency of the light-emitting element 1003 and the core portion 1094. Further, since the area of the left end surface of the widened portion 1941 is large, even if the position of the light-emitting point is shifted from the left end surface of the widened portion knife 941, the light-emitting element 1003 and the core portion 1〇94 can be suppressed. The light combination efficiency is significantly reduced. Therefore, the positional tolerance amount when the light-emitting element 1〇〇3 is mounted can be increased to improve the ease of mounting. Further, when the width of the leftmost end portion of the widened portion 1941 is W1 and the width of the rightmost end portion is W2, W2 is preferably about W1 to about 9 times, more preferably W1. · 2 ~ 〇 _ 8 times or so. Thereby, a widened portion 1941 that suppresses leakage of light from the core portion 1094 can be formed. As a result, the light combining efficiency of the light-emitting element 1〇〇3 and the core portion 1〇94 can be further improved. Further, in the widened portion 1941, the angle α 1 between the boundary between the core portion 1094 and the covering portion 1〇95 and the end surface of the left end portion of the core portion 1094 is preferably 45 degrees or more and less than 90 degrees. More preferably, it is 5 degrees or more and 85 degrees or less. Thereby, the widened portion 1941 can be formed without deteriorating the reflection condition of the boundary surface between the core portion 1〇94 and the cladding portion 1〇95. As a result, the light combining efficiency between the light-emitting element 1003 and the core portion 1094 can be further improved. Further, the angle formed by the boundary line between the core portion 1094 and the covering portion 1095 and the end surface of the left end portion of the core portion 1〇94 is set to an angle of not less than 9 degrees Celsius 54 201222034 is the above-mentioned α right side two As shown in FIG. 23, by arranging the light receiving point of the light receiving element 1_ so as to face the = surface of the widened portion 1942, the self-reducing portion .1942 Φ Ρ * ^ can be made higher first. The efficiency is incident on the light receiving point. The area of the right end face of the money part A 1942 is smaller than the left end face, so that it can be diverged to a finer light, and can be surely incident on the effective area of the light receiving point. As a result, the light combining efficiency between the core portion 1〇94 and the light receiving element 1〇〇4 can be improved. Further, since the area on the right side of the reduced portion 1942 is small, the light-receiving efficiency of the light-receiving element 1004 and the core portion 1〇94 can be suppressed even if the position of the light-receiving portion is shifted with respect to the position of the right end surface of the widened portion 1942. Significantly lower "Therefore, the positional tolerance when the light-receiving element 1〇〇4 is mounted can be increased, and the ease of installation can be improved. Further, when the width of the leftmost end portion of the widened portion 1942 is W3 and the width of the rightmost end portion is W4, W4 is preferably about 〇1 to 〇9 times W3, more preferably W3. , 2 to 0.8 times or so. Thereby, the widened portion 1942 which suppresses the leakage of light from the core portion 1094 can be formed. As a result, the light combining efficiency of the core portion 1 094 and the light receiving element 1004 can be further improved. Further, in the widened portion 1942, the angle between the boundary line between the core portion 1〇94 and the covering portion 1〇95 and the end surface of the right end portion of the core portion 1094 is preferably 45 degrees or more and less than 90 degrees. 'More preferably 5 degrees or more and 85 degrees or less. Thereby, the widened portion 1942 is formed by the reflection condition of the boundary between the core portion 1094 and the cladding portion 1〇95. In the case of the knot, the light combining efficiency of the core portion 1094 and the light receiving element 1004 can be improved. Further, the angle formed by the boundary line between the core portion 1094 and the covering portion 1095 and the end surface of the right end portion of the core portion 1 〇 94 55 201222034 is the above 〇: 2. The angle setting W1 which is 90 degrees or less is set to be larger than the width W4. Thereby, the area of the left end surface of the widened portion 1941 is larger than the right end surface of the widened portion 1942, and the effect as described above can be obtained more surely. Further, the lengths of the widened portion 1941 and the widened portion 1942 are not particularly different. The limit ^' is preferably about 3 to 1 相对, for example, with respect to the width W2. Fig. 25(b) shows the position of the optical waveguide 1〇〇9 shown in Fig. 25 (the other configuration of the optical waveguide 1〇〇9 shown in Fig. 25(b) except that the widened portion ΐ94ι and the widened portion 1942 are different. In addition, in the same manner as the optical waveguide shown in FIG. 25(a), in FIG. 25(a), the widened portion 1941 is provided at the left end portion of the core portion 1094, and the widened portion 1942 is provided at the right end portion. In contrast, in Fig. 25 (1), the widened portion 1941 is cut from the core portion to the left end portion, and is moved toward the inner side (right side) only by a specific distance, and is further widened. The file 1942 is from the right end of the core portion 1094. , moving only toward the inner side (left side) at a specific distance, and between the widened portion 1941 and the left end surface of the core portion 1094, and between the reduced portion 1942 and the right end surface of the core portion 1〇94, respectively. The equal-width portion 1 940 having a constant sectional area. The optical waveguide 1〇〇9 shown in Fig. 25(b) is widened by the width W1 of the left end portion of the widened portion 1941 and the width W4 of the right end portion of the widened portion 1942. Since the case of Fig. 25(a) is the same, the same effect and effect as those of Fig. 25(a) are exerted. That is, the optical waveguide 1〇 9 is a higher light-binding efficiency to the light-emitting element 1 〇〇3 or the light-emitting element 1〇〇4. 56 201222034 Further, the position and number of the widened portion 1941 and the widened portion 1942 are not particularly limited. A plurality of the optical waveguide structures 1001 of the present invention are shown in Fig. 26. The optical waveguide structure 1 〇〇1 will be described below. The description of the same matters as the above-described fourteenth embodiment is omitted, and the description will be focused on the difference. Fig. 26 is a plan view showing the core layer of the fifth embodiment. The optical waveguide structure 1 of the present embodiment 〇 (H, the configuration of the optical waveguide 1009 is different from the above, and is the same as that of the optical waveguide 1009 shown in Fig. 26(a), the widened portion 1941' and the core portion 1094 of the widened portion 1942' in plan view. A curve is formed with the boundary line of the cladding portion 1095. In the widened portion 1 94 Γ, the curve is a parabola opening toward the left end portion (one end portion) of the core portion 1094. Again, in the reduced portion 1942', the curve Also on the left end of the core 1〇94 In the widened portion 1941, the area of the left end surface is large, so that the incident efficiency of incident light is improved. Further, the light emitted from the light-emitting element 1003 and incident on the core portion 1094 is in the core portion 1094. When the boundary surface of the cladding portion 1095 is reflected, it is reflected so as to be concentrated on the focal point of the parabola. The result can be reduced by the amount of light leakage in the core portion 1094. Further, it is transmitted to the widened portion knife 1942. The light of the core portion is also collected when the boundary between the core portion 1094 and the cladding 邛1 〇9 5 is reflected. As a result, the right end surface of the widened portion 1942' can be shrunk to a finer light. Thereby, the optical waveguide 1009 of 57 201222034 shown in Fig. 26 (a) has a higher light-binding efficiency with respect to the light-emitting element 1003 or the light-receiving element 1004. Fig. 26 (b) is another configuration example of the optical waveguide 1 〇〇 9 shown in Fig. 26 (a). The optical waveguide 1009 shown in Fig. 26 (b) except the widened portion 1941' and the widened 0 knives 1 942 The position is the same as that of the optical waveguide 1 〇〇 9 shown in Fig. 26 (a). That is, in Fig. 26 (a), the widened portion 1941' is disposed at the left end portion of the core portion, and the widened portion 1942 is disposed at the right end portion, and is in phase with this; Fig. 26 (b) 'widened portion 194 Γ From the left side of the core part 1 〇94::, only moves to the inner side (right side) at a specific distance, and further, the partial cedar is widened.右侧 1094 is moved to the right side of the inner side only by a specific distance, and is widened by 1941 between the widened portion 1941 and the left end of the core portion, and reduced by 0h 1942. Between the right end p of the core portion and the right end p of the core portion, there is a width portion 1940 of a certain width width _ Nan 丨 $ #, u .. (horizontal area). On the top of Figure 26 (b), $, Shi, the left side of the t-lead I (H) 9 due to the lateral force of the widened part of the width of the W1 and the reduction of the window 邶 eight W4 and the figure r, ^ 〇 The effect of the width of the right end portion of 42 and w is the same as that of Fig. 26(a). In other words, the optical waveguide 1 或 or the apricot- ing has a higher light-binding efficiency to the light-emitting element 1003. <Sixth embodiment: Fig. 27> Fig. 27 shows light (4) of the present invention. In the following, the optical waveguide structure i is exaggerated: the same matters as those in the sixteenth embodiment and the third embodiment are omitted, and the description thereof will be omitted.乂Different points are in the middle 58 201222034 Fig. 27 is a cross-sectional view showing the i-th embodiment. In the optical waveguide structure 1001 of the present embodiment, the configuration of the optical waveguide 1009 is different from the above, and the other configurations are the same. That is, the optical waveguide 1〇〇9 shown in Fig. 27(a) is a thick film portion (expanded portion) 丨943 which is continuously enlarged from the thickness of the core layer 1093 toward the left end portion thereof, and the thickness of the core layer 1093 is toward the right end. A film portion (reduced portion) 1 944 which is continuously reduced in size, and a portion 1945 which is disposed between the thick film portion 丨 943 and the film portion 丨 944 and has a thickness-constant thickness portion 1945. On the other hand, the width of the core 1094 in plan view is not shown, but it is constant. Therefore, the thick film portion 1943 shown in Fig. 27 (a) is a portion in which the cross-sectional area of the core portion 1 〇 94 is continuously increased toward the left end portion, and the film portion 1944 is the cross-sectional area of the core portion 1 〇 94 toward the right end. The part of the department that has become smaller. $, the equal thickness portion 1945 is a certain part of the cross-sectional area of the core portion 丨094. The light guide point of the light-emitting element 1?3 is disposed so that the optical waveguide 1009' faces the left end surface of the thick film portion 1943, whereby light can be incident on the thick film portion 1943 with a relatively high efficiency. .^ 丨f knows the light combining efficiency of the light-emitting element 10 0 3 and the core portion 1094. Since the area of the left side of the thick film portion 1 943 is large, the position of the left end surface of the thick film portion 1 943 is somewhat offset from the position of the left end surface of the thick film portion 1 943 by 1 ΛΛ / 1 j to suppress the light-emitting elements 1003 and x~. The light combination efficiency is significantly reduced. Therefore, the optical component 1003 B# 夕 &amp; μ can increase the position tolerance when mounting the hair dryer, X, t ^ ^ ^ ν is easy to install. When the thickness of the right end of the right side of the 1943 is set to T2, the thickness of the part is set to T1, and the left and right 'better is T1. .2~. · 8 times left is T1. ~~. This is a 9-fold error, and a thick film portion 1943 that suppresses the leakage of light from the core portion 1094 can be formed. As a result, the light combining efficiency of the light-emitting element 1 003 and the core portion 1 〇 94 can be further improved. Further, in the thick film portion 1 943, the angle between the core portion 1 〇 94 of the longitudinal section and the boundary line of each of the cladding layers 1091 and 1092 and the end surface of the left end portion of the core portion 1 〇 94 is Preferably, the temperature is 45 degrees or more and less than 9 degrees, more preferably 50 degrees or more and 85 degrees or less. Thereby, the thick film portion 1943 can be formed without impairing the reflection conditions of the boundary faces of the core portions 1〇94 and the respective cladding layers 1091 and 1092. As a result, the light-emitting element 1003 can be further improved in bonding efficiency. In addition, the angle formed by the boundary between the core portion 1094 and each of the cladding layers 1091 and 1〇9 and the end surface of the left end portion of the core portion 1〇94 is set to be 90 degrees or less. /51. On the other hand, as shown in Fig. 27 (a), by arranging the light receiving point of the light receiving element 1 004 so as to be inclined to the right end surface of the film portion 1, the film portion 1944 can be obtained. L,, h - The emitted light is incident on the light receiving point with a higher efficiency. That is, the area of the right end surface of the thin film portion 1944 士士 ν, 〇 π 4 4 is smaller than the left end surface, so that it can be condensed to a finer one, and can be surely incident on the effective area of the light receiving point. As a result, the core part of the Α古ΑΑ can be deleted and the light-receiving component Congzhi light knot

• 卜, since the right side of the film portion 1 944 is Μ I, the light-emitting point is smaller than the right side of the film core, so that the offset of the right end surface of the 4 film portion 1944 can also suppress the 氺-μt ^ ^ ^ ^ Also first 7^ pieces 1004 with the core part 1094 $ #纴人q rate dropped significantly. Because 舲 y y4 first combined with the amount of effect, and improve the safety: capacity: 1 plus the position of the installation of the light-receiving element in the wartime, the field will be the part of the left side of the 1944, the right end of the right side of the thickest part 廑 ° ° The thickness is set to Τ3, and the early sigh is Τ4, Τ4 is preferably 乃.!~〇_9 box 60 201222034 or so, more preferably T3 〇_2~0.8 times. Thereby, a film portion 1944 which suppresses leakage of light from the core portion 1094 can be formed. As a result, the light combining efficiency of the core portion 1094 and the light receiving element ι 4 can be further improved. Further, in the film portion 1944, the angle between the core portion 1094 of the longitudinal section and the boundary line between the cladding layers 119 and 092 and the end surface of the right end portion of the core portion 1 〇 94 is preferably 2 It is less than 90 degrees above 45 degrees, more preferably less than 50 degrees and less than 85 degrees. Thereby, the film portion 1 944 can be formed without impairing the reflection conditions of the boundary faces of the core portions 1〇94 and the respective cladding layers 1091 and 1092. As a result, the light combining efficiency of the core portion 94 and the light receiving element 丨〇〇4 can be further improved. Further, the angle ' formed by the boundary between the core portion 1〇94 and each of the cladding layers ι〇9ι, 1092 and the end surface of the right end portion of the core portion 1 () 94 will be an angle of 90 degrees or less. For the above /32. Further, the thickness T1 is set to be larger than the thickness D4. Thereby, the area of the left end surface of the thick film portion 1943 is larger than the case, '''. By dividing the area of the right end face of 1944, the effect as described above can be obtained more surely. Further, each of the thick film #1943 and the film portion 1944 is not particularly limited. For example, the width of the phase material #士士+ relative to the core portion 1094 is preferably about 3 to I U . The thickness of the I cladding layers 1091 and 1092 is constant regardless of the thick film portion, * ^ ^ 1 , l\jy 1943 or the film portion 4 (Fig. 27(b) is Fig. 27 r , an example. (a) The other components of the optical waveguide 1009 shown in Fig. 27(b) are partially different in thickness, and the guide 1009 is different from the optical waveguide 1 shown in Fig. 27(a) except for the respective cladding layers 109. 9 61 a 201222034 is the same. That is, in Fig. 27 (b), in each of the cladding layers 1〇91 and 1092, the thickness of the portion corresponding to the thick film portion 1943 is continuously reduced toward the left end portion of the core portion 1〇94. On the other hand, the thickness of the portion corresponding to the film portion 1944 is continuously increased toward the right end portion of the core portion 1094. Further, the total thickness of the optical waveguide 1009 shown in Fig. 27(b) is generally constant. As shown in Fig. 27(a), the waveguide 1009 can sufficiently improve the light-binding efficiency of the light-emitting element 1003 or the light-receiving element 1004 and the core portion 1〇94, and can improve the mechanical strength of the film portion 1944. The thickness of 1944 is reduced to increase the thickness of each of the cladding layers 1 〇 91 and 1 〇 92, so that the right end portion of the optical waveguide 1 009 can be prevented. The mechanical strength is lowered. Thereby, when the optical waveguide 1009 and the light receiving element 1〇〇4 are assembled, the right end portion can be prevented from being damaged. Fig. 27(c) is the optical waveguide 1〇〇9 shown in Fig. 27(a). Other configuration example 0 The optical waveguide 1〇〇9 shown in Fig. 27(c) is partially different in thickness except for the cladding layer 1〇91, and the thickness of the cladding layer 1092 is kept constant, as shown in Fig. 27(a). The optical waveguide 1 〇〇 9 is the same. That is, in Fig. 27 (c), the thickness of the portion of the cladding layer 1091 corresponding to the thick film portion 1 943 continuously decreases toward the left end portion of the core portion 1 〇 94, and on the other hand, The thickness of the portion corresponding to the thin portion 1944 is continuously increased toward the right end portion of the core portion 1 94. Further, the thickness of the cladding layer 1092 is kept constant regardless of the thick film portion 1943 or the film portion 1944. 1009, the same action and effect as the optical waveguide 1009 shown in Fig. 27(b) can be obtained. 62 201222034 Fig. 27 (d) is another configuration example of the optical waveguide 1009 shown in Fig. 27 (a). Fig. 27 (d) The optical waveguide 1〇〇9 shown is different from the position of the thick film portion 1943 and the film portion 1944, and the optical waveguide 1009 shown in Fig. 27(a). That is, in Fig. 27 (a), the thick film portion 1943 is disposed at the left end portion of the core portion 1094, and the film portion 丨 944 is disposed at the right end portion, whereas in Fig. 27 (d), the thick film portion 1943 The left end portion 'from the left end portion of the core portion 1094 moves toward the inner side (right side) only at a specific distance, and the thin film portion 1944 moves from the right end portion of the core portion 丨〇 94 toward the inner side (left side) only at a specific distance. Further, between the thick film portion i 943 and the left end surface of the core portion 1094 and between the film portion 1944 and the right end surface of the core portion 1094, there is a constant thickness portion 1945 having a constant cross-sectional area. In the optical waveguide 1009 described above, the same actions and effects as those of the optical waveguide 1009 shown in Fig. 27(a) can be obtained. Further, in the fourteenth and fifteenth embodiments, only the width of the core portion 1094 is continuously changed. In the present embodiment (the sixteenth embodiment), only the thickness of the core layer 1093 is continuously changed, and the core portion 1〇94 may be made. The width of the core layer 1093 and the thickness of the core layer 1093 are continuously changed. That is, the thickness of the core layer 1093 of the widened portion 1941 may also vary as the thick film portion 1943, and the thickness of the core layer 1〇93 of the reduced portion 1942 is also It can be changed as the film portion 1944. In this case, the above-described actions and effects are more remarkable than those of the respective embodiments. <Seventeenth Embodiment: Fig. 28> Fig. 28 shows a seventeenth embodiment of the optical waveguide structure 1 of the present invention 63 201222034. Hereinafter, the description will be made on the optical waveguide structure 100, and the same matters as those in the above-described sixteenth embodiment will be omitted, and the differences will be mainly described. Fig. 2 is a cross-sectional view showing the seventh embodiment. In the optical waveguide structure 1〇〇1 of the present embodiment, the configuration of the optical waveguide 1〇〇9 is the same as the above, and is the same as the above. That is, the optical waveguide 1 〇〇 9 shown in Fig. 28 (1), the thick portion (4) of the cross section, and the core portion 1 〇 94 of the thin film portion 1944 form a curve with the boundary line of each of the cladding layers 1091 and 1092. In the thick film portion we, the curve is a parabola two / opening toward the left end (one end) of the core portion 1094, and in the film portion, the curve is also toward the left end of the core portion 1 〇 94 (one end Part) Parabola of the opening.

In the thick film portion 1943, since the area of the left end surface is large, the incident efficiency of incident light is improved. Further, when light emitted from the light-emitting element 1〇〇3 and incident on the core portion 1094 is reflected by the boundary surface between the core portion 1〇94 and the cladding portion ι 95, it is reflected so as to be concentrated on the focal point of the parabola. . As a result, the amount of light leakage in the core portion 1〇94 can be reduced. Further, in the thin portion I944', the light propagating through the core portion 1094 is also collected when the boundary between the core portion 1〇94 and the cladding portion 1095 is reflected. As a result, it is possible to retract from the right end surface of the film portion 1944 to a finer light. Therefore, the optical waveguide 1009 shown in aJ is a light combining efficiency with respect to the light-emitting element 1003 or the light-receiving element 1〇〇4. Fig. 28 (b), Fig. 28 (c), and Fig. 28 (d) These are other structural examples of the optical waveguide 1009 shown in Fig. 28(a). 64 201222034 These thick film portions 1943 and films are shown in Fig. 27 (b), Fig. 27 (c), and Fig. 27 (d), respectively. The core portion 1094 of the portion 1944 and the boundary line between the cladding layers 1091 and 1〇92 form a parabola, which is the same as the optical waveguide 1009 shown in Fig. 8. Further, in the above-mentioned 14th and 15th embodiments In the embodiment, only the width of the core portion 1〇94 is continuously changed. In the present embodiment (the seventh embodiment), only the core is continuously changed in thickness. The width of the core portion 1〇94 and the core layer 1093 can also be made. The thickness of both of the thicknesses, that is, the widened portion 1941 or the widened portion 1941, may be as thick as the thick film portion 1943 or the thick film portion 1943, and the widened portion 1942 may be widened or widened. The thickness of the core layer 1〇93 of the portion 1942' may also vary as the film portion 1944 or the film portion 1944'. In this case The above-described effects and effects are more apparent than those of the respective embodiments. <Embodiment 18: Figs. 29 and 30> Fig. 29 shows a μ-th embodiment of the optical waveguide structure 丨〇〇1 of the present invention. The optical waveguide structure 1 to 1 will be described, and the description of the same matters as those of the above-described fourteenth embodiment will be omitted, and the differences will be mainly described. Fig. 2 is a cross-sectional view showing the eighth embodiment. In the optical waveguide structure 1A1 of the present embodiment, the configuration of the wiring board formed by the substrate 1A2 and the conductor layer 1005 is the same as the above, and the wiring board of FIG. 29 has The substrate 1〇〇2 laminated on the upper surface of the both ends of the optical waveguide 丨〇〇9 and the conductor layer 1〇〇5 provided on the upper surface of each of the substrates 65201222034 and 1002. The substrate on the left side of FIG. 1002 is mounted on the surface-mounting type light-emitting element 1003' and the light-emitting ic (light-emitting electrical element) 1035 for driving the light-emitting element 1〇〇3. The light-emitting element 1003 and the light-emitting 1C are disposed between the light-emitting elements 1003. Layer 1 〇〇5 The gas wiring is electrically connected, whereby the light emission of the light-emitting element 1〇03 can be controlled by the light-emitting 1C 1035. That is, the light-emitting element 1〇〇3 and the light-emitting ic 1035 are formed on the substrate 1002 on the left side. On the other hand, the substrate 1 〇 02 on the right side of FIG. 29 is provided with a surface-mounting type light-receiving element 1004 and a light-receiving ic (light-receiving electric element) for amplifying a signal received by the light-receiving element 1〇〇4. ) 1045. The light-receiving element 1〇〇4 and the 1045 of the calendering 1C are electrically connected via an electric wiring formed on the conductor layer 1〇〇5. As a result, the light receiving element 1004 receives light and converts it into an electrical signal, and then the electrical signal is input to the light receiving IC 1 to 45 to increase the amplitude. In other words, a light receiving circuit 14A having 1045 of the light receiving element 1〇〇4 and the light receiving 1C is formed on the substrate 1002 on the right side. Further, an optical path conversion portion 1971 is formed at a position corresponding to the direct vicinity of the light-emitting portion 1A31 of the light-emitting element 1A3 in the optical waveguide 1009. On the other hand, the optical path converting portion 19 7 2 is formed at a position corresponding to the immediately below the light receiving portion of the light receiving element. Each of the optical path converting portions 1971 and 1972 is formed by removing the portion of the optical waveguide ι 9 and the portion having the inner surface of the removed portion is substantially 45 with respect to the axis of the core portion 1 〇 94 of the optical waveguide 1009. The inclined slope is formed in a manner. This inclined surface functions as a reflecting surface as follows: 9 inches. The angle 66 201222034 is reflected so that the light from the light-emitting portion 1〇31 is introduced into the core portion 1094, or 90. The angle is reflected so that the light propagating through the core portion 1〇94 is introduced into the light receiving portion 1041. Further, the optical path conversion unit 1971, the core portion 1094, and the optical path conversion 卩 1972 can optically connect the light-emitting portion 1 1 and the light-receiving portion 1 to 41. Thereby, optical communication can be performed by transmitting and receiving light between the light-emitting circuit 1300 and the light-receiving circuit 14〇0. Furthermore, when the thickness of the substrate 1〇〇2 is thin or the substrate 1〇〇2 has a light transmissive property, the light-emitting element can be lightly connected by penetrating the substrate 1〇〇2 as shown in FIG. 1〇〇3 or the light-receiving element 1〇〇4 and the optical waveguide 1〇〇9' may form a through-hole along the optical path of the light penetrating the substrate 1002 as needed. Further, a reflective film made of a metal film or the like may be provided on the reflecting surface as needed. Further, it is also possible to remove a material partially filled with a refractive index lower than that of the core portion (7). Fig. 30 is a plan view showing a core layer 1093 of the optical waveguide 11 of the eighteenth embodiment. The core layer 1093 (the optical waveguide (10)" shown in Fig. 30 has a widened portion 1941 in which the width of the core portion urn is continuously increased toward the left end portion in plan view, and the width of the core portion 1〇94 is divided toward the right. The widened portion in which P continuously decreases is further 'the optical path conversion portion 1971 adjacent to the widened portion 1941 includes the left end surface of the widened portion 1941 in a plan view shape, and you p, +, soil β μ &lt; The shape of the light-emitting element 1003 and the core portion can be efficiently reflected by the light-receiving portion of the light-emitting element 1003 67 201222034. The light combining efficiency of 1094. On the other hand, the optical path converting portion 972 adjacent to the widened portion 942 also has a shape in which the shape of the right side of the widened portion 1942 is included in the plan view. Since the light is light, the size of the optical path conversion unit 1972 can be reduced. The optical wiring 1098 is constructed by the optical path conversion units 1971 and 1972 and the core unit 1〇94. Further, in Fig. 29, the optical waveguide 1 is used.两端9 1〇〇2, the size of the substrate 1002 may be a size that covers the entirety of the optical waveguide 1〇〇9. In this case, the conductor layer 1005 is disposed to cover the entire longitudinal direction of the substrate 1〇〇2. By forming electrical wiring in the conductor layer 1A5, electrical communication can be performed simultaneously with the above-described optical communication. Thereby, the degree of freedom in circuit design of the optical waveguide structure 1001 can be greatly improved, and the product of the circuit can be improved. In addition, there is an advantage that it is not necessary to separately prepare a structure for electrical communication. <19th Embodiment: Figs. 31 and 32> Fig. 31 shows a ninth aspect of the optical waveguide structure of the present invention. In the following, the optical waveguide structure 1〇〇1 will be described, and the description of the same items as the above-described U and 18 embodiments will be omitted, and the differences will be mainly described. A plan view of the core layer of the optical waveguide of the embodiment. In the optical waveguide structure of the present embodiment, the configuration of the optical waveguide 689 201222034 is different from the above, and is the same as the above. The core layer 1 〇 93 (optical waveguide 1 〇〇 9) is formed in parallel in plan view, and four (multiple roots) are formed by the core portion 1094 of the eighteenth embodiment and the optical path conversion portions 1971 and 1972 corresponding thereto. The optical wiring 1098. The four optical wirings 1098 each have an optical path conversion unit 1971 and an optical path conversion unit 197 at the end, and are adjacent to each other, and the optical path conversion unit 1 9 7 1 and the light The position of the conversion unit 1972 is reversed. That is, among the four optical wirings 1 to 98, the uppermost portion of FIG. 31 and the third portion from the upper side are located on the left side of the core layer 1093 by the optical path conversion unit 1971. The way is formed. On the other hand, in the four optical wirings 1098, the second and fourth portions are formed from the upper side of Fig. 31 so that the optical path conversion portion 1971 is located on the right side of the core layer 1093. Thus, by making the adjacent ones of the optical wirings 1098 alternate with each other in the longitudinal direction, the widened portions 1941 which are required to have a larger space are not adjacent to each other. Thereby, the optical wirings 1098 can be arranged closer to each other, and the arrangement density of the optical wirings 1098 can be increased. In addition, it is possible to reduce the size and integration of the optical waveguide structure 1〇〇1. Further, in the four optical wirings 1 098, the optical path conversion unit 1 97 1 is formed such that two of the right side and the optical path conversion unit 1971 are located on the left side, and are shifted in the longitudinal direction. Thereby, the distance between the optical wirings 1098 can be made closer to each other. This is because the optical path converting portion 1971 and the optical path converting portion 1972 which are required to have a relatively large space are shifted in the longitudinal direction, so that the interference can be avoided, and the optical wirings 1098 can be sufficiently spaced from each other. Furthermore, the lengths of the four optical wirings 1098 shown in FIG. 31 are the same as the degree of 2012 20123434. When the lengths are different, the left or the right side of the core portion 1〇94 may be offset. The way is formed. Further, in the four optical wirings 1098 of FIG. 31, the optical path conversion unit 1971 is located on the right side and the optical path conversion unit 1971 is located on the left side at the same position in the longitudinal direction, and the like. The long side direction is offset. Thereby, the optical wirings 1 to 98 can be further spaced apart from each other. Figure 32 is a plan view showing a ninth embodiment. The optical waveguide structure 1〇〇1 shown in FIG. 32 has a substrate ι 2 stacked on both ends of the optical waveguide 1009 in the longitudinal direction, and a conductor layer provided on the upper surface of each substrate 1002. 1〇〇5 wiring board. On the substrate 1〇〇2 on the left side of Fig. 32, two surface-mount type light-emitting elements 1〇〇3 and one light-emitting 1C 1035 are mounted in accordance with the position of each optical path conversion unit 1971. Between each of the light-emitting elements 1〇〇3 and 1'35 of the light-emitting ic, the electrical wiring formed on the conductor layer 1〇〇5 is passed through! 〇5 1 is electrically connected to thereby illuminate the light-emitting element 1〇〇3 by the light-emitting 1C 1035. That is, the light-emitting circuit 300 having the light-emitting element 1〇〇3 and the light-emitting 1C 1035 is constructed on the substrate 1〇〇2 on the left side. Further, on the substrate 1 〇〇 2 on the left side, two surface-mounting light-receiving elements 丨0 to 4 and one light-receiving IC 1045 are mounted in accordance with the position of each of the optical path conversion units 1972. The light-receiving element ι4 and the light-receiving ic 1045 are electrically connected via the electric wiring 1051 formed on the conductor layer 1A5. Thereby, the light receiving element 1〇〇4 receives light and converts it into an electrical signal, and then the electrical signal is input to the light receiving 1C at 1045 to increase the amplitude. In other words, the light-receiving circuit 1400 having the light-receiving element 1004 and the light-receiving IC1 045 is formed on the substrate on the left side, and the light-receiving circuit 1300 and the light-receiving circuit 1400 are mixed. On the other hand, similarly to the substrate 1002 on the left side, the light-emitting circuit 1300 and the light-receiving circuit 1400 may be mixed on the substrate 1002 on the right side of Fig. 32. According to the above optical waveguide structure 1001, even if there are a plurality of optical communication channels (optical wiring 1098), the light-emitting circuits 13 corresponding to the plurality of channels can be mixed on the substrate 1〇〇2 having a relatively small area. Light receiving circuit 1400. As a result, it is possible to achieve miniaturization and high integration of the optical waveguide structure 1〇〇1. Μ丄, 対罘 ^ ^ ^ ^ is not limited to these, and may be other constituents as long as the subject matter of the invention is not changed. Furthermore, the present invention may be configured by combining any two or more embodiments having the second to the ninth embodiments. In the optical waveguide structure of the present invention, the substrate or the optical waveguide is bent in a state in which the optical waveguide structure of the present invention can be flexibly folded (f) to bend the substrate or the optical waveguide. Or the state in which the optical waveguide is stretched (extension: electric: because A' can be preferably used for a mobile phone, a game machine, a note-type personal chain or a sliding portion, for example, in the action. When the electronic device is connected via the (10) part of the "2 ^ optical waveguide structure hinge portion, when the optical waveguide structure is shaped, when the optical waveguide structure of the mobile phone is closed, the (four) hinge portion is adopted, thereby the optical waveguide structure The electrical connection and the optical connection of the human body can't be held between the two points of the movable part. Therefore, the mobile power of the optical waveguide structure is improved by the ability of the electronic device. Yes, the optical region is the same as the optical region, and the optical waveguide structure of the present invention has the optical communication structure of the optical disk or the light-receiving element, the optical waveguide, and the optical fiber. Can mention Optical waveguides with optical coupling efficiency, that is, when it is convenient to connect a light-emitting element having a low directivity or a light-receiving light-receiving member, the transmission efficiency can be improved, and the position of the optical waveguide and the optical communication component can be increased. The mounting of the allowable waveguide or the optical communication component is easy, and the manufacturing ease of the structure can be improved. Further, by providing the optical waveguide structure of the present invention, the mouth can be in/out at 92 points. The optical device 4 can provide a highly reliable electronic device (the electronic device of the present invention). Further, the electronic device to which the optical waveguide structure of the present invention is applied is not limited to the above, and can be preferably applied, for example. For mobile phones, game consoles, router devices, WDM devices, personal computers, televisions, home servers, and other electronic devices, high-speed electronic devices must be transmitted at high speed between computing devices such as LSIs and RAM devices. Therefore, by including the optical-electric hybrid substrate of the present invention in the electronic device, it is possible to eliminate problems such as noise and deterioration of the electric wiring. In addition, the optical waveguide portion can be significantly reduced in heat generation compared with the electric wiring. Therefore, the size of the substrate can be increased and the size can be reduced, and the power required for cooling can be reduced, and the electrons can be reduced. [Electric power consumption of the whole device. &lt;Manufacturing method of optical waveguides] 72 201222034 Next, the manufacturing method of the optical waveguide 9, _ (hereinafter also referred to as optical waveguide 9) and the constituent materials of the respective components in the above embodiments are performed. In particular, the core portions 9, 4, and 1 94 (hereinafter also referred to as the core method will be described in detail. Μ First, before the method of forming the core portion 94, the photosensitive resin composition for forming the core portion 94 is described. (Photosensitive Resin Composition) The photosensitive resin composition used in the present embodiment contains: (A) a cycloolefin resin; (B) a refractive index different from (A) and having a cyclic ether group And at least one of the oligomers having a cyclic ether group and (C) a photoacid generator. In the above, it is preferable to contain a cycloolefin resin having a debonding group which is desorbed by an acid generated by the (C) photoacid generator in the side point of the viewpoint of suppressing the generation of light propagation loss. And a monomer of the following formula (100).

(100) The photosensitive resin composition is formed into a film shape to form an optical waveguide, and the film is used as a film having a region having a different refractive index, for example, an optical waveguide film. In other words, by using the above-mentioned photosensitive resin composition, it is possible to provide an optical waveguide film or the like which suppresses generation of light propagation loss. Among them, in the case of forming a curved optical waveguide, the occurrence of light propagation loss can be remarkably suppressed. Further, it is possible to provide an optical wiring using the optical waveguide film, and an optical-electric hybrid substrate including the optical wiring and the electric circuit. According to the optical wiring and the optical-electric hybrid substrate, τ is improved as a problem (electromagnetic interference) which is a problem in the prior electrical wiring, and the signal transmission speed can be greatly improved as compared with the prior art. Further, since the use of the optical waveguide film waveguide film can be provided to save space, it is possible to contribute to downsizing of the electronic device as the above-mentioned electronic device, and specific examples thereof include a computer, a feeding device, a mobile phone, a game device, and a memory. Body tester, visual inspection robot, etc. In the case of the composition of the photosensitive resin composition, the composition of the photosensitive resin composition is sequentially added. ((A) Cycloolefin resin) The moldability of the photosensitive resin composition of Mashio is added, and ruthenium is added, and it is a matrix polymer. Here, the ring-thin resin may be replaced by an unsubstituted one. J j von 虱 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他 其他° is preferably used as a norbornene-based resin, and for example, 74 201222034 (1) addition of a norbornene-type monomer obtained by addition (co)polymerization of a norbornene-type monomer ( Co-polymer, (2) addition copolymer of norbornene type monomer and ethylene monoolefin, (3) norbornene type monomer and non-conjugated diene, and other monomers as needed An addition polymer such as a copolymer, (4) a ring-opening (co)polymer of a norbornene type monomer, and a resin obtained by hydrogenating the (co)polymer as needed, (5) a ring-opening ugly polymer of a cation monomer and ethylene or a thin smog, and a resin obtained by hydrogenating the (co)polymer as needed, (6) a norbornene type monomer and a non-conjugated two A ring-opening polymer such as a ring-opening copolymer of an olefin or another monomer, and a polymer obtained by hydrogenating the (co)polymer as needed. As such polymers, hydrazines include random copolymers, block copolymers, alternating copolymers and the like. The resin can be obtained by, for example, ring-opening metathesis polymerization (ROMP), combination of ROMP and hydrogenation reaction, polymerization using a radical or a cation, polymerization using a cationic palladium polymerization initiator, and polymerization using the same. It is obtained by all known polymerization methods such as polymerization of a ring ^ λ < column such as a polymerization initiator of a spiro or other transition metal. In the middle of the search, as the (four)-based resin, an addition (co)polymer is preferred. Addition (co)polymers are also preferred in terms of transparency, heat, heat resistance and flexibility. For example, an electrical component or the like may be mounted by solder after forming a film by a photosensitive resin composition. In the above case, it is necessary to have the heat resistance of the net, that is, the reflow resistance, so it is preferable to add "(co)poly 75 201222034 compound. Moreover, when forming a film by a photosensitive resin composition and incorporating into a product, it may be used, for example, in the environment of about 80 degreeC. In the above case, an addition (co)polymer is preferred from the viewpoint of ensuring heat resistance. Among them, the norbornene-based resin is preferably a repeating unit containing a norbornene having a substituent containing a polymerizable group or a repeating unit having a norbornene having a substituent of an aryl group. The repeating unit of the norbornene having a substituent containing a polymerizable group is preferably a repeating unit of norbornene having a substituent having an epoxy group, and a rhodium having a substituent containing a (meth)acryl group. One of the repeating units of the alkene and one of the repeating units of the norbornene having a substituent containing an alkoxyfluorenyl group. Among the various polymerizable groups, 'the polymerizable group is preferred in terms of high reactivity. More than the above-mentioned hail containing polymerizable groups

In addition, if a repeating unit containing an olefin is used, on the other hand, by repeating the unit, Nandatian 76 201222034 (4)

(In the formula (1), R! represents the carbon number - ^ Μ 〇., * _ , 10 is the base, a represents the integer '1), the table is not 1 to 3, the weight is ~3, and the Pi/qi is 2 〇The following) The decene-based resin of formula (1) is smashed in the following manner. The error is caused by having 1^, and the side bond &quot; olefin is dissolved in toluene, and, ., has % oxy &lt; 扛, &quot; human Nl compound (A) as 30 牛Therefore, liquid polymerization is carried out to obtain (1). Falling into the catalyst

Ph Ph Η \ /

(A) Further, the method of producing a decene having a ring-forming group and a methoxy group in the side bond is as described in, for example, 77 201222034 (i) (i i ). (Synthesis of terpene decyl sterol (NB-CH2-〇H) cpd (cyclodecadiene) and hydrazine: olefin (CH2=CH-CH2) formed by cleavage of DCPD (dicyclopentadiene) -OH) reacts at high temperature and pressure

Δ 〇

X = CI^OH (ii) Synthesis of epoxy norbornene It is formed by the reaction of norbornene methanol with surface gas alcohol.

Further, in the formula (1), in the case of ... or 3, the fluorenylene sulfhydryl group becomes an ethyl group, a propyl group or the like. In the norbornene-based resin represented by the formula (1), in view of the coexistence of heat resistance, it is particularly preferable that the compound is a compound of a carbon number of 10 and a compound of the compound 1 such as a butyl group. A copolymer of alkene and ketone II, a copolymer of keithing (4), a copolymer of hexyl (tetra)-methyl 4 olefin, a decyl decene and a methyl ether, a hydroxypropyl ether Copolymerization of olefins 78 201222034 and the like.

(2) R3 (in the formula (2), R2 represents a carbon number ι~1〇^^ _ 2 士 "甘 * λ 疋 ' ' R3 represents a hydrogen atom or a thiol group c represents an integer of 0 to 3, a 2 is 2) The following formula (7) of the decyl-based resin can be dissolved in a/benzene by the reduction of the acrylic group and the methyl acrylate group in the side chain of the reduced rare disk having R2, using the above-mentioned Ni compound (a) eucalyptus, office &gt; initial <A) is obtained by solution polymerization as a catalyst. Further, in the norbornene-based polymer represented by 4 (7), flexibility and heat resistance are both established. In view of the above, a compound wherein h is a C 4 to 1 fluorene alkyl group and c is 1, for example, a copolymer of butyl norbornene and 2 - (5 - pentanyl) methyl acrylate, hexyl group Copolymer of norbornene with acrylic acid 2-(5-norzyl) methyl vinegar, copolymer of fluorenyl norbornene with acrylic acid 2~(5_epo-alkenyl)methyl ester, etc. 79 201222034

3 (In the formula (3), R4 represents an alkyl group having a carbon number of 1 to 1 Å, and each of the cores is independently represented by a carbon number of 1 to 3 Å, and an alkane burst of the argon is not an integer of 3, p3/ Q3 $20 or less) &quot; The resin of the formula (3) can be obtained by dissolving the decene having &amp; and the reduced olefin having an alkyloxy group in the side chain in the benzene, using the above-mentioned % compound Color (A) was obtained as a catalyst for solution polymerization. Further, in the norbornene-based polymer represented by the formula (3), it is particularly preferably an anthracene having an inverse number of 4 to 1 Å, and 4 is i or 2, and is a methyl group or an ethyl group. a compound such as a butyl-reduced olefin with a polyether derived from an alkenylethyltrimethoxy-xanthene, a copolymer of hexyl-reduced ene and a (tetra)ethyltrimethoxy-propane, a copolymer of dilute ethyl tributary trioxane, a copolymer of carbene and triethoxy decyl decene, a copolymer of hexyl carbazide and triethoxy decyl (4), Mercapto-decene and triethoxy hydrazine: a copolymer of norbornene, butyl decene and trimethoxy decyl decene = copolymer, hexyl-reduced olefin and trimethoxy-based olefin The copolymer, a copolymer of thiol-reduced U and trimethoxy succinyl (tetra) olefin, and the like. 201222034

4 (wherein Rs represents an alkyl group having 1 to 10 carbon atoms, and oxime independently represents a substituent represented by the following S (5) to (7), but is not the same substituent at the same time. P4/q4 + r is the following). (4) is obtained by dissolving R5, and the side bond having ~ and terpene dissolved in toluene, and using Ni 2 down-liquid polymerization to obtain (4). Chemical. Material (phantom dissolved as a catalyst)

(In the formula (5), e represents an integer of 〇~3, and f represents an integer of 3) 201222034 °V-〇 number)

(in the formula (6

Showing a hydrogen atom or a methyl group, and g means

(Expressed in the formula (7). Integer of ~3) 4 knives are not independently represented by the alkyl group having 1 to 3 carbon atoms, and h is further represented by the formula (4): butyl hydrazine A polymer, for example, a decene, a hexyl decene or a decyl decene #. with an acrylic acid 2 (5 a ping ping 、, a t t ~ a ene ren - a certain (1) 曰Alkenyl ethyltrimethoxy

A ternary copolymer with a dilute or a trimethoxy sulphate (4) J-form; a butyl reduction, a hexyl reduction (tetra) or a thiol reduction, and an acrylic acid 2 —(5—falling (tetra)yl) (d), and f-based epoxypropyl surface-reduced olefinic terpolymer; butyl norbornene, hexyl nordecene 82 201222034 or decyl-decene, Ternary with any of decyl epoxy propyl ether decene, reduced dilute ethyl tridecyl decane, triethoxy decyl decene or tridecyl decyl decene Copolymers, etc.

(In the formula (8), 'I represents an alkyl group of 1 to 10, Rs represents a hydrogen atom, a fluorenyl group or an ethyl group. 'Ar represents an aryl group, 乂丨 represents an oxygen atom or an anthracene group, and ^ represents a carbon atom or a ruthenium atom, i represents an integer of 0 to 3, j represents an integer of 1 to 3, and p5/q5 is 20 or less.) By lowering the decene having R7 and _(CH2)__ χ to X2(R8)3_j in the side chain The terpene of (Ar)j is dissolved in toluene, and solution polymerization is carried out using a Ni compound as a catalyst to obtain (8). Further, in the norbornene-based polymer represented by the formula (8), it is preferred that the parent is an oxygen atom, X2 is a halogen atom, and Ar is a stupid base. Further, from the viewpoint of flexibility, heat resistance and refractive index control, it is particularly preferred that R7 is an alkyl group having 4 to 10 carbon atoms, Χ is an oxygen atom, &amp; is a halogen atom, Ar is a phenyl group, and Rs is a compound in which methyl, i is 1, and j is 2, for example, butyl 83 201222034, a copolymer of dilute and diphenyl fluorenyl, which is a dry-blown decyl decane, hexyl norbornene and diphenyl fluorenyl Descending, a copolymer of knee olefinic methoxy decane, a copolymer of decyl decylene and diphenyl fluorenyl decylene, and a methoxy decane. Specifically, it is preferred that the rabbit # is used to use a norbornene-based resin as follows.

(9) From the viewpoints of the formula (1), :, and the refractive index control, the carbon is also a carbon group, the alkyl group of Xa1 is 〇, the X1 is a methylene group, the compound is 4 groups, and R8 is a gas atom. 1 is a copolymer of 1 = Desc. 2 = 降 (4) and phenylethyl ( (4), hexyl group = = = dilute copolymer, fluorenyl group phenyl group B can be used as the following Ethylene resin. 84 201222034

The base, preferably s: the detachment of the refractive index of the resin is reduced to be -8 di-diphenyl structure and - 〇1 di-diphenyl structure to, for example, the descending (tetra) U compound represented by the formula (1), X1 is Oxygen, \ is a ruthenium atom, and Ar is a phenyl group. Further, in the formula (3), the alkoxy fluorenyl group may be separated. For example, in the case where the rare resin is obtained by the formula (9), the acid generated by the photoacid generator (referred to as PAG) can be measured by the following method, and the reaction is carried out as follows. Here, only the part of the detachment group is shown here, and the case where i = 1 is explained.

Further oxygen. fruit. In addition to the structure of the formula (9), the side chain may have a ring: the film having excellent adhesion can be used as a specific example, and the following are specific examples.

(In the formula (31), the diphenylfluorenylnordecene oxime 7/(17+1*2 is 2 Å or less) represented by the formula (31), and the 0-compound can be reduced by, for example, hexyl group. Alkenyloxydecane (in the side chain containing 86 201222034

The drop of Sl(CH3)(Ph)2 (4)) and the epoxy reduction (4) were obtained by solution polymerization using toluene in the toluene and using Νι 5 as a catalyst. ((B) Monomer having a cyclic ether group, oligomer having a cyclic ether group) Next, the components of S (B) will be described. (B) is at least one of a monomer having a cyclic ether group and an oligo 4 having a cyclic ether group. The component (B) may be a resin having a refractive index different from that of the component (A) and having compatibility with the resin of the component (A). The difference in refractive index between the component (B) and the resin of the product (A) is preferably G.G1 or more. Further, the component (B) may have a higher refractive index than the component (A), but it is preferably a component (B) having a lower refractive index than the component. The monomer having a cyclic squaring group of the component (B) and the oligo group having a cyclic squara group are in the presence of an acid, and are borrowed from the scorpion bow. In consideration of the diffusibility of the monomer and the aroma, the monomer is preferably divided into a thousand limbs (weight average molecular weight) and a molecular weight of the granule (weight average molecule | 丨 10 mile), respectively. 100 or more and 400 or less. Component (B) has, for example, an oxetanyl oximeoxy group. The above cyclic ether soil is preferred because it is easy to open the ring. The monomer having an oxetanyl group and a homogenate of male butyl butyl is preferably selected from the group consisting of the following formulas (11) to (^ 嗲簟, 〇). By using the temple's transparency with a wavelength of around 850 nm..."--the excellent reliability of the moon" can make the flexibility and heat resistance coexist. Moreover, these can be used dry or mixed to make 87 11)201222034 〇2H5

C2H5

(12)

(13)

(14) C2H5

C2h5 88 (15 ) (16 )201222034

Bu 0C2H5, 〇c2hs

(17) (18) (in the formula (18), n is 0 or more and 3 or less) C2H5

C2H5 (19 ) Η 89 201222034 (20 ) C2Hs^&lt;3 In the above monomers and oligomers, from the viewpoint of ensuring a difference in refractive index from the resin of the component (A), it is preferred to use the formula ( 13), (15), (16), (17), (20) compounds. Further, it is preferable to use the formula (2G), in view of the fact that the resin of the component (4) has a refractive index difference, the molecular weight is small, the mobility of the monomer is high, and the monomer is not easily volatilized. (15) The compound represented. Further, as the compounding ratio of the oxetanyl group, the compounds represented by the following formulas (32) and (33) can be used. As the compound represented by the formula (32), a product represented by the formula (3) can be used as the compound represented by the formula (3), and the trade name 〇x-sq of the East Asian synthesis can be used.

90 (33) (33)201222034

And VIII, i or 2) Further, as an oligomer having a monomer having an epoxy group and having an oxy group, such as ό]·q / and having a % oxy group, the following are mentioned. And the ancient spectrum and "the existence of T r β /, the monomer having an oxy group, the oligomer is in the presence of an acid, and the oxime is polymerized by ring opening. As the oligomer having an epoxy group, a U-form, an epoxy group-containing oligomer, the following formulas (34) to (39) can be used, and the strain energy is large, and the anti-s... From the viewpoint of the core of the epoxy ring, it is preferred to use the alicyclic epoxy monomer represented by the formula (36)). The compound represented by the above formula (34) is an epoxy norbornene, and as the above-mentioned opening, for example, Ερ· manufactured by Pr〇merus Co., Ltd. can be used. The compound represented by the formula 为) is 7-glycidoxypropyltrimethoxy oxime as the compound, and for example, Z-6040 manufactured by T〇ray D()w C()rning SiHc〇ne Co., Ltd. can be used. . In addition, the compound represented by the formula (36) is a 2 - 'epoxy-5-hexyl)ethyltrimethoxylate, and as the compound, E0327 manufactured by Tokyo Chemical Industry Co., Ltd. can be used. Further, the compound represented by the formula (37) is 3,4-epoxycyclohexenylmethyl~3, '4'-cyclodecene hexene decanoate, and as the compound, for example, Daicel Chemical Co., Ltd. can be used. Celloxide 2021P. Further, the compound represented by the formula (38) is 1,2-epoxy-4-vinylcyclohexane, and as the compound, for example, Cell〇xide 91 manufactured by Daicel Chemical Co., Ltd. 201222034 2000 °: 8, 9 may be used. Further, the compound represented by the formula (39) is 1,2 cimol, and as the compound, for example, Celloxide 3000 manufactured by Daicel can be used.

/°

92 201222034 ο

(3 8)

(3 9) A butyl oligomer, a monomer having an epoxy group, and a component having an oxo group as (Β). /, the support of the oxime has an oxetane oxime, the early body of the butyl group, the uranium group having an oxo group starting to polymerize, although the reaction starts slowly, but the growth reaction Monomers having an epoxy group „ Opposite to the oligomer having a % oxy group, although (5) the initial reaction is faster, the monomer of the heterocyclic butyl group which starts to polymerize at I ^ Λ μ, An oligomer having θ and using an oxime-based oxime group, an early body having an epoxy burst, an epoxy-based emulsion, and a wind-based nutrient, can be used when irradiating light The difference in refractive index of the light-irradiated portion 盥耒 鼾 鼾 - 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 50 parts by weight or less, more preferably 2 parts by weight, and the following is re-read at 0. Thus, it is possible to achieve a coexistence between flexibility and heat resistance by modulating the car between the core and the cladding. ) Photoacid generator) 93 201222034 As a photo-producing agent, as long as it absorbs the energy of light, it produces Brons = or Lewis acid. For example, triphenyl sulfonate can be burned% δ 夂 salt: (4-dibutyl phenyl) rust - trifluoromethanesulfonate and the like sulfonium salt 'p-nitrophenyl diazo hexafluoro Diazo salts such as phosphates; Mingan salts; scale salts; diphenyl sulfonate, tris(phenylidene), tetrakis(pentafluorophenyl)borate, etc.醌 醌 叠 ( 〇 〇 〇 〇 〇 ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; ; a sulfonate group such as a benzamidine group, a N-trans-naphthyldiamine-trifluoromethanesulfonate; a disulfone such as a diphenyldifluorene; and a second (2,4,6-three) Compounds such as three-till and other three-tillage, such as gas, methyl, tetrazolium, 2-(3,4-methylenedioxyphenyl), 4,6-bis-di(dichloromethyl) The photonic acid generator may be used singly or in combination of plural kinds. The content of the photoacid generator is preferably 0.01 parts by weight or more and 〇.3 parts by weight or less based on 1 part by weight of the component (A). 2 parts by weight or more and 0.2 parts by weight or less. Thereby, having reactivity The photosensitive resin composition may contain an additive such as a sensitizer in addition to the components (A), (B), and (c) above. The sensitizer has an increase in the sensitivity of the photoacid generator to light. , a function of reducing the time (or reaction) of activation (reaction or decomposition) of the photoacid generator, or changing the wavelength of light to a wavelength suitable for activation of the photoacid generator. As the above sensitizer, It is not particularly limited as long as it is appropriately selected depending on the sensitivity of the photoacid generator or the peak wavelength of absorption of the sensitizer, and for example, 94, 2012-1234 of 9,10-dibutoxyanthracene (CAS No. 76275 _ 14_4) Anthraquinones, sigma ketones, anthraquinones, phenanthrenes, chopsticks, benzopyrenes, fluoranthenes, red fluorenes, anthraquinones, indanthrene, thiopurine-9 A ketone (thioxanthen-9-ones) or the like, which may be used singly or in the form of a mixture. Specific examples of the sensitizer include, for example, 2-isopropyl- 9h-thiol star- 9-ketone, 4-isopropyl- 9H-sulfur 0-star-9-one, and 5-gas-4. Propoxy oxysulfide d-star, phenothiazine or a mixture of these. The content of the sensitizer is preferably 〇1 by weight and more preferably 1% by weight or more based on the photosensitive resin composition. More than % is more preferably 〇. 5 weight. /. The above upper limit is preferably 5% by weight or less. In the photosensitive resin composition of the first monomer or more described in the production of the photoacid of the mouth (C), it is particularly preferred to contain the cycloolefin resin having the detachable group as the component (A) and the component (c). A photoacid agent and a photosensitive resin composition of the following formula (1) as the component (B).

(A) ' can be used as described above, for example, a resin of the resin (A)': cyclohexene, cycloolefin, cyclooctane 95 201222034 dilute early ring monomer; reduction of rare, reduced dilute Polycyclic compounds such as dicyclopentadiene monohydrogen pentadiene, tetracyclododecene, tricyclopentaene, ruthenium pentoxide, tetrazole _ ketene, dihydrotetracyclopentadiene Single polymer, etc. Among the above-mentioned Λ4, it is preferable to use a cycloolefin resin of more than one kind from the polycyclic monomer. Thereby, the heat resistance of the resin can be improved. In addition, as the polymerization form, a random polymerization, a block polymerization, or the like can be applied. For example, as a specific example of polymerization of a norbornene-type monomer, a copolymer of a (co)polymer of an olefinic type, a norbornene-type monomer, and a copolymer of another monomer such as an olefin; The hydride of the copolymers and the like are in accordance with specific examples. The cycloolefin resin such as 1 hai can be produced by a known polymerization method, and the polymerization method includes an addition polymerization method and a ring-opening polymerization method, and among the above, preferably. A cycloolefin resin obtained by an addition polymerization method (especially an ethylenic resin-reduced), that is, an addition polymer of a decene-based compound, is excellent in transparency, heat resistance, and flexibility. The above-mentioned detachment group means a part which is cleaved by the action of an acid generated by a photoacid generator, and is detached. Specifically, it is preferable to have a molecular structure (side chain) as described above. The at least one of the -0-structure, the -S-arylene structure and the Si-structure. The detachable group as described above is relatively easily detached by the action of the acid (H+). —S i —- poor | a site „ — the base structure and a Ο — at least one of the Si structures The content of the above-mentioned detachable group of the phenyl group is not particularly limited as long as the reticular group of the phenyl group is reduced by the detachment, and it is preferably 10 to 8 in the ring-fried resin having the detachable group of the above-mentioned side 96 201222034 bond. 〇% by weight, 尤立 is more preferably 2〇~60% by weight. When the content is within the above range, in particular, the flexibility and the refractive index modulation function (the effect of increasing the refractive index difference) are excellent. The cycloolefin resin having a cleavable group in the side chain is preferably a repeating unit represented by the following formula (1〇1) and 7 or the following formula (102). Thereby, the refractive index of the resin can be increased.

(In the formula 101, it is an integer of 〇 or more and 9 or less.) 97 201222034

(102) The photosensitive resin composition contains the monomer described in the above formula (hereinafter referred to as "the second monomer"). Thereby, the difference in refractive index between the core and the cladding can be further expanded. The amount of the third monomer is not particularly limited, and is preferably i part by weight or more, and 5 Å or less by weight, and particularly preferably 2 parts by weight, based on the weight of the cycloolefin resin having a debonding group in the side chain. Above '2〇 parts by weight or less. By this, the refractive index modulation between the core and the cladding can be achieved, and flexibility and heat can be coexisted. In the case where the above-mentioned second monomer and the side chain have a debondable cycloaliphatic resin, the balance between the refractive index and the flexibility between the core and the coating is excellent. The reason is as follows: The reactivity of the first monomer is excellent in the use of the acid generated by the above-mentioned centrifugation/coating between the refractive index and the like. When the hardenability of the first body is high, in the case of the ith photo-resin composition, the reason for the difference is that the reactivity of the i-th monomer is excellent when the polymerization reaction is started by using the light 1 monomer. The diffusion of the first 98 201222034 monomer produced by the concentration gradient of the 丨 丨 翠 body gives the refractive index difference of the lifted area.胄6 Increasing the area to be irradiated first and not irradiating, and the first monomer is a uterine energy, the crosslinking density of the polymerizable resin composition is not so high. Therefore: Twins:: Different. The above-mentioned photosensitive resin composition is not particularly limited, and the second monomer which is different from the first monomer is the second precursor of the above. Furthermore, the second monomer, which is different from the above, can be spliced to the Dingmen &lt; Ang 1 has a different composition, and can also be the same monomer. In the file, the second monomer can be used as a component (epoxy compound, disk type ((10)), and the soil 3 can be exemplified by the compound of the formula (100). Compounds, etc. Among these = butyl sinter / ^ 3 〇fe T is preferably a % oxygen compound (especially known as a cyclic epoxy compound) ί罝古9 plus e J and ―s肊 oxetane At least 4 of the compound having two oxetanyl monomers; high reactivity of the first monomer with the cycloolefin resin, transparency, and improved heat resistance of the waveguide. Specific examples thereof include a compound of the above formula (丨5), a compound of the formula (12), a compound of the above formula (11), a compound of the above formula (a compound, a compound of the above formula (19), or a compound thereof. The content of the MS 2 monomer in the above formulas (34) to (39) is not particularly limited, and it is preferably one or more of the weight of the above-mentioned tree sorghum θ s and less than 5 parts by weight. In particular, it is preferably 2 parts by weight or more and 20 啬 θ 八 rt 〇 〇 罝 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 The reactivity of the body. Private 99 201222034 The ratio of the second monomer to the ith monomer is also not particularly limited, and is based on the weight ratio (the weight of the second monomer or the weight of the second monomer). Preferably, the content of the photoacid generator is not particularly limited, and the ratio of the reactivity is preferably equal to the heat resistance of the waveguide. It is preferably 〇〇1 part by weight or more and 0.3 parts by weight or less, and more preferably 〇〇2 parts by weight or more, and 0.2 parts by weight based on 1 part by weight of the cycloolefin-based resin having a cleavable group in the side chain. When the content is less than the lower limit, the reactivity may be lowered. When the content exceeds the above upper limit, the coloring loss may occur in the optical waveguide. The photosensitive resin composition is not limited to the above. The cycloolefin resin, the photoacid generator, the first monomer, and the second monomer may contain a curing catalyst, an antioxidant, etc. Further, the photosensitive resin composition may be used as a core portion 94. Composition (optical waveguide The manufacturing method and the first manufacturing method of the optical waveguide) FIGS. 19, 20, and 21 are cross-sectional views schematically showing an example of the steps of the method for manufacturing the optical waveguide. FIGS. 33 to 35 are schematic diagrams showing the first method of manufacturing the optical waveguide. A cross-sectional view of a step example. Here, a method of manufacturing an optical waveguide using a photosensitive resin composition in which the refractive index of the component (Β) is lower than that of the cycloolefin resin of the component (A) will be described as an example. As shown in Fig. 19 (A) and Fig. 3 3 (A), the photosensitive resin 100 201222034

The composition is dissolved in a solvent to prepare a varnish 900,! 9 〇 (U, Μ, also referred to as main 900) ‘The varnish 900 is applied to the coating layer 91 and the 包覆 ^ ^ cladding layer 91). The following is also referred to as preparing a photosensitive resin composition into a varnish-like shape, and examples thereof include diethyl ether, diisopropyl ether, and 1,2-dioxamethane. 1,4, one, D, THF, tetrahydrofuran (THF), tetrahydrogen D, methane (TH #一^r J, Qinqin, diethylene glycol, diglyme, diethylene glycol Ethers such as upper/drunken ether (carbitol); gluten; methyl celecoxib, ethyl sulphate, benzene (tetra) lusu, etc.; (9), pentylene, gamma, hexidine Aliphatic smoke is dissolved in aromatic solvents such as toluene, diphenyl, benzene, and triterpene; compared to biting, pyridin, biting, &quot;cephene, methyl hydrazine Aromatic heterocyclic compound solvent; N,N-didecyl decylamine (DMF), N _ ° y, 1N monomethyl acetamide (DMA) and other amide-based solvents; dichloromethane, chloroform, Friend ^ , a solvent such as a halogen compound such as lactide; a vinegar solvent such as ethyl acetate, decyl acetate or ethyl citrate; dimethyl hard (DMS oxime), cyclobutyl or the like vulcanization: substance = solvent Various organic solvents Or containing the mixed solvent. 〃 Next, after coating the varnish 9 on the coating layer 91 of the optical waveguide 9, drying is performed to evaporate the solvent (by solvent removal, as shown in Fig. 19 (b), As shown in Fig. 33(B), the varnish 900 is a film 91〇, i9i〇 (hereinafter also referred to as a film 910) for forming an optical waveguide. The film 91 is formed with a core portion 94 by irradiation with light described below. The core layers 93 and 1093 (hereinafter also referred to as the core layer 93) of the covering portions 95 and 1 95 (hereinafter also referred to as the covering portion 95). Here, as a method of applying the varnish 900, for example, Scraper method, spin coating method, dipping method, table coating (table c〇a〇 method, spray method, 101 201222034 dressing y-O method, curtain coating method, die coating method, but also::疋As the coating layer 91, for example, a refractive index lower than that of the lower resin Π:... can be used, for example, a film having a lower (four) braid and an epoxy can be used, and the film 910 can be selectively irradiated with light (for example, ultraviolet rays at this time, such as 20(A) and 34(A), a mask M having an opening formed thereon is disposed above the film 91. The film is irradiated with light through the opening of the mask M. The light used is, for example, a peak wavelength in the range of 2 〇〇 to 4 5 〇 nm. Thus, $ also depends on the composition of the photoacid generator, but the photoacid generator can be activated relatively easily. Further, the amount of irradiation of light is not particularly limited, and is preferably 〇. 〜~9 or so, more preferably about 0.2 to 6 J/cm 2 , and even more preferably 〇 2 to 3 cm 2 or so. In the case of light having a high directivity, the use of a mask may be omitted. In the film 910, an acid is generated by a photoacid generator in a region irradiated with light. The component (Β) is polymerized by the acid produced. In the region which is not irradiated with light, acid is not generated by the photoacid generator, so that the component (Β) is not polymerized. In the irradiated portion, the component (Β) is polymerized to form a polymer, so that the amount of the component (Β) is small. In response to this, the knives (Β) of the unirradiated portion are diffused to the irradiated portion, whereby a refractive index difference is generated between the irradiated portion and the unirradiated portion. Here, when the refractive index of the component (Β) is lower than that of the cycloolefin resin, 102 201222034: the component (8) of the unirradiated portion diffuses to the irradiated portion, and the refractive index of the unirradiated p-knife becomes high, and the irradiation is made The refractive index of the part becomes lower. Further, the difference in refractive index between the polymer obtained by polymerizing the component (B) and the monomer having a cyclic ether group is 〇 or more and 0.001 or less, and it is considered that the refractive index is substantially the same. When the photosensitive resin composition is used as described above, the polymerization of the component (B) can be started by the acid generated by the photoacid generator. Further, the cycloolefin resin to be used in the present invention may not necessarily have a debonding group, and when a cycloaliphatic resin having a debonding group is used as the component (A), the following effects occur. The light emitted by the photoacid generator is such that the detachable group of the bismuth resin is separated from the m-based structure, -Si_diphenyl. In the case of a Q Si-phenyl structure or the like, the refractive index of the resin can be lowered by detachment. Therefore, the refractive index of the irradiated portion is further lowered as compared with that before the detachment of the detached group.

Then, the film 9 10 is heated. In the heating step of the twisting and halving, the component (B) of the irradiated portion irradiated with light is further polymerized. On the other hand, in the heating step, the component (B) of the unirradiated portion is volatilized. When the material is not irradiated, the component (B) is reduced to form a refractive index close to that of the cycloolefin resin. In the film 91, as shown in Figs. 20(b) and 34(b), the region irradiated with light becomes the cladding portion 95, and the unirradiated region becomes the core portion 94. The core portion 94 is derived from the above-mentioned components (the concentration of the structure of the knives and the knives, and the concentration of the components derived from the component (B) in the coating portion 95, which are different from the concentration of the structure. Specifically, the core In the portion 94, the gentleman's enthalpy of the component (b) is less than the structure concentration of the component (B) in the coating portion 95 103 201222034. The difference in refractive index of the nucleus of the cladding portion 95 is 0 1 Π ^ Λ'. The core portion 94 is formed on the film 910 by the above method, and the core layer is obtained by the film "匕." 93. 18〇r . . φ ^ ... The degree of recognition is not particularly limited, preferably about 30 to 180 C, more preferably 4 〇 to 16 〇. 〇 。. Coincidence, heating time is better A - from I The sigh of the sigh of the sigh of the light (B) is approximately..., the formation of the knives, ., '. The bundle is preferably (^~2 hours or so) better (Μ~! hours) 3 〇·1 2 Thereafter, the same film as the cladding layer 91 is attached to the core layer () flying μ a|_ , ^ i , and the film becomes the cladding layer 92, 1 〇 92 ( η ττ ★ Membrane 2 (below It is referred to as a coating layer 92). A pair of 9=9 is set to 2, and the core portion of the cladding portion 95 is also a 'cladding layer 92' or may be attached by a film, but by a core. The liquid material is applied to the layer 93 and hardened (curing 丄, ^ 〜 method to form 0). The optical waveguide 9 shown in FIG. 21 and FIG. 35 can be obtained by the above steps. When the optical waveguide 9 is obtained by the photosensitive resin composition of the present invention, the solder reflow resistance is particularly excellent. Further, even in the case of the curved optical waveguide 9, the light loss can be reduced. The case where the photosensitive resin composition is directly supplied onto the coating layer 91 to form the film 910 (core layer 93) is described, and after the film 910 (core layer 93) is formed on another substrate, The obtained core layer 93 is transferred onto the cladding layer 91 or the cladding layer 92, and then the cladding layer 9i and the cladding layer 92 are overlapped by the core layer 93 via 104 201222034. Next, the effects of the embodiment will be described. When the photosensitive resin composition used in the present embodiment is irradiated with light, acid is generated from the photoacid generator. The polymerization of the component (b) is carried out only in the irradiated portion. Thereby, the amount of the component (B) in the irradiated portion is reduced, so that the non-irradiated P-knife (B) is diffused to the irradiating portion 'by this' in the irradiating portion The refractive index difference is generated from the unirradiated portion. Specifically, in the present embodiment, since a substituted or unsubstituted cycloaliphatic resin having a higher refractive index than the component (8) is used as the matrix polymer, the unirradiated portion is formed. When the portion is irradiated, the refractive index of the unirradiated portion is higher than the refractive index of the irradiated portion: ', and 'when the photosensitive resin composition is heated after the light is irradiated, the component (B) is volatilized from the unirradiated portion. Thereby, a refractive index difference is further generated between the irradiated portion and the unilluminated portion. By using the photosensitive resin composition as described above, the difference in refractive index can be surely formed in the portion where the spot is not irradiated. Further, according to the present invention, the core portion can be patterned only by a simple method of irradiating light. For example, by appropriately selecting the exposure pattern of "etc., it is possible to form light of any shape or arrangement. = Two PXs can also form a finer optical path clearly, which contributes to the integration of the body and reduces the size of the device. The design of the pattern shape of the core part has a wide degree of freedom, and is still the core part of the core. The first time of the Ding is compared with the one that is produced by the hot acid, so that it has an oxetanyl group and the like: However, it is used in the composition of the above-mentioned technique, such as a heterocyclic butyl group, etc. 2012 201234. Further, this composition heats the entire composition to cause a crosslinked structure as a whole of the composition. There is no such technique in the composition, that is, by selectively irradiating light to generate an acid, and selectively generating a polymerization, and diffusing the monomer to a region where the monomer concentration is small, thereby forming a concentration difference. In the photosensitive resin composition used in the present embodiment, it is found that when the irradiation is selectively performed, the amount of the component (B) in the irradiated portion is reduced by the generation of the acid, so that the irradiation is not performed. Part of the component (B) To the irradiated portion, a refractive index difference is generated between the irradiated portion and the unirradiated portion. Further, the cycloolefin resin is provided to have a detachment by the photoacid generator, and the composition is lowered by detachment. In the case of the detachment of the refractive index of the ring-hard resin of (A), the refractive index of the region irradiated with light can be surely lowered as compared with the unirradiated region. On the other hand, the cycloolefin resin is set to When the detachment base is not provided, the 'side chain chemistry becomes stable', so that the refractive index of the core portion and the cladding portion can be suppressed from changing due to conditions such as light irradiation or heating. Further, in the present embodiment The use of a rare resin is used as the component (A). Thereby, the light transmittance at a specific wavelength can be surely improved, and the loss of propagation can be surely reduced. ......WW~ can be y, the straw will be The refractive index difference between the dad 95 and the core portion 94 is set to 0.01 or more, and the light 3 can be enclosed in the core portion 94, thereby suppressing the generation of light propagation loss. On the other hand, 'previously known to contain a polymer, a monomer, and a helper Touch 106 201222034 media precursor As a composition for forming an optical waveguide, a single system forms a reactant by irradiation of light, and the refractive index of the region irradiated with light is different from the refractive index of the unirradiated region. The substance which causes the reaction of the monomer (polymerization reaction, crosslinking reaction, etc.) to start, and which is a substance which changes the activation temperature by the action of the promoter which is activated by irradiation of light. When the temperature changes, the temperature at which the reaction between the light irradiation region and the non-irradiation region starts is different, and as a result, the reactant is formed only in the irradiation region. In contrast, the photosensitive resin composition used in the present embodiment is used. It is not necessary to use the above-mentioned substance containing a large amount of metal elements. Therefore, it is possible to prevent the increase in propagation loss as described above, and to obtain the optical waveguide 9 which is excellent in propagation efficiency and excellent in heat resistance. In other words, when the above-mentioned prior composition is used, the core portion and the cladding portion can be separately formed by light irradiation. However, according to the photosensitive resin composition used in the embodiment, the core portion % can be further expanded. Since the cladding portion 95 has a difference in refractive index and heat resistance is improved, the optical waveguide 9 having higher reliability can be obtained. It is mainly produced by optimizing the composition of the component (A) and the component (b). On the other hand, since the above-mentioned catalyst precursor contains a relatively large amount of metal elements, it causes absorption of light propagating through the optical waveguide to increase the side effect of propagation loss. In particular, this tendency is remarkable when the optical waveguide is bent. Further, since the catalyst precursor is contained, the heat resistance is lowered, and the propagation efficiency at the time of reflow is lowered. In other words, when the above-mentioned prior composition is used, the core portion and the cladding portion can be separately formed by irradiation of the light 107 201222034. However, according to the photosensitive resin composition used in the embodiment, the core portion 1094 can be further enlarged. The difference in refractive index from the cladding portion 1095 and the heat resistance are improved, so that the optical waveguide 1009 having higher reliability can be obtained. It is mainly produced by optimizing the composition of the component (a) and the component (B). (Second Manufacturing Method of Optical Waveguide) In the case of manufacturing the optical waveguide 1009 of the sixteenth embodiment and the seventeenth embodiment, the shape of the core portion 1 〇 94 formed in the plan view by the above method is also The following method forms the shape of the core layer 1〇93 of the longitudinal section. Hereinafter, the second manufacturing method of the optical waveguide will be described, and the same as the i-th manufacturing method except for the shape of the core layer 1〇93 formed in the vertical cross section. Fig. 36 38 is a perspective view schematically showing an example of the second manufacturing method of the optical waveguide. Furthermore, in Figs. 36 to 38, the core layer ic cladding layer 1 092 is penetrated. Further, at _38, a point corresponding to the heart 94 is marked. As shown in Fig. 36 (a), a coating layer 1091 is prepared. The cladding surface forms a 13⁄4 difference in the thickness of the core layer 1〇93 to be manufactured. Here, the latter is used to manufacture the optical waveguide shown in Fig. 27(c). In Fig. 27 (the optical waveguide 1009 shown in Fig. 27), the thick film portion 1943 is provided at the right end portion of the film: thickness is changed: and one: two 'cladding layer' is formed according to the core layer 1 〇 〇 〇 , 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 2012 The base material for the cladding layer is 9丨, and the portion that moves slightly to the right side from the left end surface in the longitudinal direction includes the first surface 91i that is lowered toward the left end portion and gradually lowered, and The second surface 1912 that is raised toward the left and gradually increases in height. Further, the portion that is slightly moved to the left side from the right end surface in the longitudinal direction includes a third surface 1913 that rises upward toward the right end portion and gradually increases in height. And the fourth surface 1914 which is connected to the lower side and gradually lowers to the right. The inclination of the upper surface of the first surface 19li and the third surface 1913 is respectively the same as that of the core layer 1 〇 93 shown in Fig. 27 (c). The thickness of the thick film portion 1 943 and the lower portion of the film portion 1944 corresponds to each other. On the other hand, the second face 1912 and the fourth face The degree of inclination of the upper surface of 1914 is the same as that of the first surface 1911 and the third surface 1913. The surface above the # surface is a horizontal surface. Next, the photosensitive resin composition is dissolved in a solvent. The varnish 1900 is prepared, and the varnish 1900 is applied onto the base material i〇9i of the lower cladding layer. Thereafter, the film 191 is obtained by drying (see FIG. 36(b)). Next, the film 1910 is selectively selected. At this time, as shown in FIG. 36(c), a mask M having an opening is disposed above the film 1910, and the film 1910 is irradiated with light through the opening. Thereby, the irradiated area and the unirradiated area are irradiated with light. In this case, the region irradiated with light becomes the cladding portion 1095, and the unirradiated region becomes the core portion 1〇94 (see Fig. 形成. The core layer 1 is formed on the film 191〇 in the above manner. Next, the laminated body of the film 1910 and the base material for the lower cladding layer 1〇91 which are cut by the two cutting faces s shown in Fig. 37 are shown in Fig. 37. The two cutting faces are $109 201222034. The first surface 1911 and the second surface 1912 on the upper surface of the base material 1091 which is disposed on the lower side The side w蟪, β is sufficient to open the boundary line and the surface of the boundary line between the third surface 1913 and the fourth surface 1914. By cutting the laminated body with the cut surface S, the (lower side) cladding layer 1 〇 91 blood seconds can be obtained. The heart is! η Λ , "nuclear. Layer 1 〇 93 layer body (refer to Figure 37 (f)) ° Next, as shown in Figure 3 8 (g) layer 1092. By the above step 1009. Show 'in the core layer 1093 The optical waveguide shown in Fig. 38 (h) is attached to the top of the package, and the method of manufacturing the optical waveguide shown in Fig. 27 (c) is described above, as long as it is required to dry the film. In the case of MO, the surface of the film 1 0 0 is formed on one side (you can use a drag on the core (for example, machining, embossing, etc.) to dry it, thereby making the film 191 〇j condition 犋iyi〇 Up and down, the optical waveguides 1〇〇9 of Fig. 27(a), Fig. 27(b) and the circle 27ΓγΜ ήί·- 固 "[d) can be manufactured. Further, the order of the steps is not limited to the above, and the test may be performed, for example, after the base material for forming the cladding layer 1092 is attached, and then cut by the cut surface s. The present invention has been described above, but the present invention is not limited to the above embodiments, and modifications, improvements, etc. within the scope of the object of the invention are included in the present invention. Further, the optical waveguide film is formed by using the photosensitive X-ray & yangyang resin composition in the above-described embodiment. However, the present invention is not limited thereto, and it can also be used for the entire image. The above-mentioned photosensitive resin composition is suitable for forming a film in which a region having a refractive index higher than that of a lettuce, a π dry weight, and a region having a low refractive index is mixed. Next, an embodiment of the present invention will be described.制造. Manufacture of optical waveguides 110 201222034 (Example 1) (1) The synthesis of a decene-based resin having a detaching group is controlled in a hand-working box filled with dry nitrogen gas having a moisture and oxygen concentration of less than 1 ppm. 5〇〇mL small glass bottle weighed hexy norbornene (HxNB) 7_2g (40. lmmol ), diphenyl fluorenyl hydrazine decyloxy decane 12.9g (40.1 mmol), dehydrated benzene 6 g and 11 g of ethyl acetate, covering the sea eagle seal (seaier), the top of the dense plug. Next, the Nl catalyst IWg (3.2 mmol) represented by the following chemical formula (B) and the dehydrated hydrazine benzene 1 〇 mL were weighed in a 100 mL vial and placed in a stirrer chip (stinrerehip) and fused (4) Mix the catalyst to dissolve it completely. The catalyst solution K represented by the following chemical formula (B) was accurately weighed by a syringe and quantitatively injected into the above-mentioned glass bottle in which two kinds of reduced and diluted j bottles were dissolved, and stirred at room temperature for 1 hour, and the result was confirmed. The apparent viscosity rises. At this time, the plug was removed and tetrahydropyrene (thf) was added and stirred to obtain a reaction solution. 95 g of acetic acid field, 18 § of agricultural hydrogen peroxide (30%), and 3 gg of ion-exchanged water were added to a 100 mL beaker, and stirring was carried out to prepare an aqueous acetic acid solution on the spot. Next, the total amount of the aqueous solution was added to the above reaction solution, and the reduction treatment of Ni was carried out for 12 hours. Next, the treated reaction solution was transferred to a separatory funnel, and after removing the lower aqueous layer, 3 G% of water-soluble &amp; 丨(10) red of isopropanol was added, and the mixture was vigorously mixed. The aqueous layer was removed after standing for two layers of separation. After repeating the water washing process for 13 times, the oil layer was added dropwise to a very large amount of acetone. 111 201222034 The resulting polymer was again precipitated, separated from the filtrate by filtration, and placed in a vacuum dryer set at 60 C. Heat drying was performed for 2 hours, whereby Polymer #1 was obtained. The molecular weight distribution of the polymer #1 was measured by GPC (Gel Permeatic) n Chromatography 'gel permeation chromatography, and Mw = 100,000 and Mn = 40,000. Further, the molar ratio of each structural unit in the polymer #1 was identified by using NMr, the structural unit of hexylnordecene was 50 m〇1%, and the structural unit of diphenylmethylnordecene methoxydecane was 50 mol%. . Further, the refractive index obtained by Metric〇n was 1.55 (measurement wavelength: 633 nm).

Ph Ph

Polymer #1 (2) Manufacture of photosensitive resin composition In a glass container of H) 〇mL, weighed 1 〇g of the purified polymer =, and added mesitylene 40g, antioxidant irg_x 1〇76 (1 ~ manufactured by Geigy Co., Ltd.) 〇 〇 lg, cyclohexyl oxacyclobutane monomer (Formula 2 Xenon 100) 帛 1 monomer, manufactured by East Asia Synthetic 112 201222034 CAS#483303— 25- 9, Molecular weight is 186, boiling point is 125 ° C / 1.33 kPa) 2 g, photoacid generator Rhodorsil Photoinitiator 2074 (manufactured by Rhodia Co., Ltd., CAS # 178233 - 72 - 2 ) ( 1.36E - 2g, ethyl acetate in 0.1 mL) After uniformly dissolving, 'filtered by a PTFE filter of 2 μm to obtain a clean photosensitive resin composition varnish V1. (3) Fabrication of an optical waveguide film (production of a lower cladding layer) After a uniform coating of a photosensitive norbornene resin composition (Avatrel 2000P varnish manufactured by Promerus) on a crucible wafer Dryer at 45 ° C for 1 5 minutes. After the solvent was completely removed, the coated surface was irradiated with ultraviolet rays of 100 mJ and 120 in a dryer. (: heating for 1 hour to harden the coating film to form a lower side cladding layer. The thickness of the lower side cladding layer formed was 20# m, and the colorless transparent 'refractive index' was 1.52 (measurement wavelength: 633 nm). Formation of a layer] On the lower cladding layer, the photosensitive resin composition varnish V1 was uniformly applied by a doctor blade, and then placed in a dryer at 45 ° C for 15 minutes. After completely removing the solvent, the pressure mask was crimped. The ultraviolet ray was selectively irradiated at 500 mJ / cm 2 to remove the mask, and the mixture was heated in a drier at 45 ° C for 30 minutes, at 85 ° C for 30 minutes, and at 150 ° C for 1 hour in three stages. After heating, it was confirmed. When a very clear waveguide pattern appears, it is confirmed that the core portion and the cladding portion are formed. (Formation of the upper cladding layer) On the polyether enamel (PES) film, the dry thickness is 2 〇//m in advance. The dry film formed by laminating Avatrel 2000P is adhered to the above core layer, 113 201222034 is put into a vacuum laminator set to 140 ° C for thermocompression bonding. Thereafter, the ultraviolet ray is completely irradiated with 100 Å in the dryer. , heated at 12 〇&lt;&gt;c for 1 hour to harden Avatrel 2000P The upper cladding layer is used to obtain an optical waveguide. At this time, the upper cladding layer is colorless and transparent, and its refractive index is 152. (4) Evaluation (loss evaluation of optical waveguide) The optical fiber via 5 〇V m will be from 850 nm. The light emitted by the VCSEL (surface-emitting laser) is introduced into the optical waveguide, and the light is received by an optical fiber of 2 〇〇vm, and the intensity of the light is measured. Further, the measurement system uses a cutback method. The side direction is plotted as the horizontal axis, and the insertion loss is plotted as the vertical axis. As a result, the measured value is accurately arranged on the straight line, and the propagation loss can be calculated as 〇.〇3 dB/cm. (The core portion and the cladding portion (Refractive Index Difference) The difference in refractive index between the core portions and the cladding portions formed by the above-mentioned (formation of the core layer) in the horizontal direction is obtained by the following method: 〇ptical manufactured by the Canadian company EXF0 The waveguide analyzer 0WA-9500 irradiates the optical waveguide with laser light having a wavelength of 656 nm, and respectively measures the refractive indices of the core region and the cladding region, and calculates the difference therebetween. The result is that the refractive index difference is 0.02. (Example 2) (1) No detachment base The synthesis of the decene-based resin is carried out in a water-jet knives and the oxygen concentration is controlled below 1 ppm and filled with dry nitrogen. The hexyl thiophene (HXNB) 9.4g is weighed in a 5〇〇mL small glass bottle. 53.lmmo1), phenylethyl reduced rare l〇.5g 114 201222034 ethyl acetate 1 1 g, covered with hydrazine (53.1mm〇l), added dehydrated toluene 6〇g and the plugged material, the upper part of the dense inspection . Weigh 2.06g (3.2mm〇1) of the catalyst represented by the above formula (B) and dehydrated toluene in a 1〇〇mL small glass bottle, put it into the mixer chip and sew it Mix the catalyst to dissolve it completely. ImL of the Ni catalyst solution represented by the above chemical formula (8) was weighed in a syringe, and it was quantitatively injected into the above-mentioned two kinds of (four) thin glass bottles, which were stirred at room temperature for one hour, and it was confirmed. The apparent viscosity increases. At this time, the plug was removed and tetrahydrofuran (thf) was added and stirred to obtain a reaction solution. Into a 100 mL beaker, 95 g of acetic anhydride, i8 g of nitrogen peroxide water (concentration: 30%), and 3 〇g of + exchanged water were added to carry out (iv), and an aqueous acetic acid solution was prepared on the spot. Next, the total amount of the aqueous solution was added to the above reaction solution, and the mixture was stirred for 12 hours to carry out a reduction treatment of Ni. Next, the reaction solution which had been subjected to the treatment was transferred to a separatory funnel, and after removing the lower aqueous layer, 1 mL of a 3 % aqueous solution of isopropyl alcohol was added thereto, followed by vigorous stirring. The aqueous layer was removed after standing for two layers of separation. After repeating the water washing process for a total of three times, the oil layer was added dropwise to a very large amount of acetone, and the resulting polymer was again precipitated, separated from the filtrate by filtration, and then heated in a vacuum dryer set at 60 °C. It was dried for 12 hours, whereby Polymer #2 was obtained. The molecular weight distribution of the polymer #2 was measured by GPC, and Mw = 90,000 and Mn = 40,000. Further, the molar ratio of each structural unit in the polymer #2 was determined by NMR, and the structural unit of hexylpentene was 5 〇 m〇i%, and the structural unit of phenylethyl decene was 50 mol%. Further, the refractive index of 115 201222034 obtained by Metricon was 1.54 (measurement wavelength: 633 nm).

(Polymer #2) (2) Production of photosensitive resin composition 100 g of a glass container was weighed and 1 g of the purified polymer #2 was added thereto, and 40 g of mesitylene and an antioxidant irganox i〇76 were added thereto. Ciba - manufactured by Geigy, 〇〇 lg, cyclohexyl oxetane monomer (CH2, manufactured by East Asia Synthetic Co., Ltd., CAS#483303 - 25 - 9, molecular weight 186, boiling point 125 °c) /1.33kpa) 2g, photoacid generator

Rhodorsil Photoinitiator 2074 (manufactured by Rhodia, CAS#178233 - 72- 2 ) ( 1.3 6E- 2g, ethyl acetate 〇.imL), after homogeneous dissolution, filtered by 0.2 # m PTFE filter to obtain clean Photosensitive resin composition varnish V2. (3) Production of optical waveguide film (Production of lower cladding layer) The lower cladding layer was produced in the same manner as in Example 1. (Formation of core layer) On the lower cladding layer, the photosensitive tree 116 201222034 was used to uniformly apply the varnish V2, and then placed in a dryer at 45 ° C for 5 minutes. After completely removing the solvent, the photomask was crimped and the ultraviolet rays were selectively irradiated at 5 〇〇 mJ/cm2. The mask was removed and dried at 45 ° C for 3 minutes in the dryer. After eight hours, the heating was carried out in three stages of 15 (TC 1 hour. After heating, it was confirmed that a very clear waveguide pattern appeared. χ, the formation of the core portion and the cladding portion was confirmed. (Formation of the upper cladding layer) The same upper side cladding layer as in Example 1 was produced. (4) Evaluation was performed by the same method as in Example 1. The propagation loss was calculated to be 0_04 dB/cm. The refractive index difference between the core portion and the cladding portion was 〇〇 1. (Example 3) (1) Synthesis of a decene-based resin having a cleavable group A ruthenium-based resin was produced in the same manner as in Example 1. (2) Production of a photosensitive resin composition was carried out. The glass container of mL is weighed and purified, and the above-mentioned polymerization #1 is added thereto, and 40 g of mesitylene, 90 g of anti-oxidation, Urgan〇xi〇76 (c)-Gelgy, manufactured by the company, 0.01 g, and difunctional oxygen are added thereto. Cyclobutane monomer (Form: ι: no, D东亚x, CAS#i8934—(8) one, component 214, boiling point 119°C /0.67 kPa) 2g, photoacid produces Rh〇dorsilPhotoinitiat〇 r 2〇74 (CAS# 178233 - 72 - 2 manufactured by Chancella Inc.) ( 1.36E- 2g &gt; 7 m ^ g After 0.1 mL is dissolved uniformly, it is filtered by a filter of 〇.2/^m^, "Clean photosensitive resin composition varnish ν" 117 201222034 (3) Manufacture of optical waveguide film (lower side package) (Preparation of coating) The same side cladding layer as in Example 1 was produced. (Formation of Core Layer) After the photosensitive resin composition varnish V3 was uniformly applied to the lower cladding layer by a doctor blade, Inject 45. (: The dryer is 1 5 minutes. After the complete removal / the granules, the 'crimp reticle' is selectively irradiated with ultraviolet rays at 5 〇〇mj/cm2 to remove the mask, 45 〇C3 in the dryer In the minute, the heating was performed in three stages at 85 ° lt; t3 〇 minutes and 1 5 〇 t for 1 hour. After heating, it was confirmed that a very clear waveguide pattern appeared. Further, the formation of the core portion and the cladding portion was confirmed. Formation of coating layer) The same upper side cladding layer as in Example 1 was produced. (4) Evaluation was performed by the same method as in Example 1. The propagation loss was calculated to be 0.04 dB/cm. Core portion and cladding portion The difference in refractive index is 〇〇1. (Example 4) (1) The sparseness of the detachment group Synthesis of Resin The decene-based resin was produced in the same manner as in Example 1. (2) The photosensitive resin composition was produced in a 100 mL glass container, and 1 〇g of the purified polymer was added thereto. Mesitylene 4〇g, antioxidant Irgan〇x 1〇76 (made by Geigy) 〇.〇lg, alicyclic epoxy monomer (shown by formula (37)' Cellexxide2 manufactured by Daicel Chemical 21p, CAS#2386 118 201222034 —87—0, molecular weight 252, boiling point i88°C/4 hPa) 2g, photoacid generator Rhodorsil Photoinitiator 2074 (manufactured by Rhodia, CAS#178233 - 72- 2 ) ( 1.36E- 2 g, ethyl acetate (0.1 mL) was uniformly dissolved, and then filtered through a PTFE filter of 〇·2# m to obtain a clean photosensitive resin composition varnish V4. (3) Fabrication of an optical waveguide film (production of a lower cladding layer). The lower side cladding layer was produced in the same manner as in Example 1. (Formation of Core Layer) On the lower cladding layer, the photosensitive resin composition varnish V4 was uniformly applied to the blade, and then 45 was introduced. (: dryer for 15 minutes) After completely removing the solvent, the photomask was crimped and the ultraviolet rays were selectively irradiated at 5 〇〇cm2. The mask was removed and dried in a dryer at 4 rc for 3 minutes, at 85t for 3 minutes. 150. The heating was carried out in three stages in one hour. After heating, it was confirmed that a very clear waveguide pattern appeared. Further, the formation of the core portion and the cladding portion was confirmed. (Formation of the upper cladding layer) Production and Example 1 The same upper side cladding layer. (4) Evaluation was performed by the same method as in Example 1. The propagation loss was calculated to be 0.04 dB/cm. The refractive index difference between the core portion and the cladding portion was 〇〇1. Example 5) (1) Synthesis of a reduced-resistance resin having a debonding group A norbornene-based resin was produced in the same manner as in Example 1. (2) Production of a photosensitive resin composition 119 201222034 In 100 mL The glass granules were prepared by dissolving 1 〇g of the above-mentioned polymer #1, and adding 40 g of stilbene benzene, antioxidant Irgan 〇 x 1 〇 76 (manufactured by Ciba-Geigy Co., Ltd.) O. Olg, cyclohexyloxyheterocycle Butane monomer (CHOX of East Asia Synthetic Co., Ltd.) Ring epoxy monomer (manufactured by Daicel Chemical, Celloxide 2021P) ig, photoacid generator Rhodorsil Photoinitiator 2074 (manufactured by Rhodia, CAS#178233 - 72-2) ( 1.36E-2g, ethyl acetate in 1mL), After uniformly dissolving, the transition was carried out by a 0.2/zm PTFE filter to obtain a clean photosensitive resin composition varnish V5. (3) Production of optical waveguide film (production of lower cladding layer) Production was the same as in Example 1. Lower side cladding layer (Formation of core layer) The photosensitive resin composition varnish V5 was uniformly applied onto the lower cladding layer by a knife, and then placed in a dryer at 45 ° C for 15 minutes. After the solvent, the film is crimped and selectively irradiated with ultraviolet light at 5 〇〇mj/cm2. The mask is removed and dried in a dryer at 45 ° C for 30 minutes, at 85 ° C for 30 minutes, at 15 ° C for 1 hour. The heating was carried out in three stages. After heating, it was confirmed that a very clear waveguide pattern appeared. Further, the formation of the core portion and the cladding portion was confirmed. (Formation of the upper cladding layer) The same upper side cladding as in Example 1 was produced. (4) Evaluation by the same as Example 1 The same method was used for evaluation. The propagation loss was calculated to be 0.03 dB/cm. The difference in refractive index between the core and the cladding was 〇.〇i. 120 201222034 (Example 6) (1) Decane having a detachment group Synthesis of a resin The decene-based resin was produced in the same manner as in Example 1. (2) Production of a photosensitive resin composition In a 100 mL glass container, 1 〇g of the above-mentioned polymer #1 was purified. Among them, 40 g of mesitylene, 0.01 g of an antioxidant-made by Geigy Co., Ltd., a cyclohexyloxetane monomer (CHOX of East Asia Synthetic Co., Ltd. shown in Formula 2) i.5 g, photoacid generator Rhodorsil Photoinitiator 2074 (Manufactured by Rhodia, CAS#178233 - 72-2) ( 1.36E_2g, ethyl acetate in 1 mL), after homogeneous dissolution, filtration through a 0.2 μm PTFE filter to obtain a clean photosensitive resin composition Varnish V6. (3) Production of optical waveguide film (Production of lower cladding layer) The lower cladding layer was produced in the same manner as in Example 1. (Formation of Core Layer) On the lower cladding layer, the photosensitive resin composition varnish V6 was uniformly applied by a doctor blade, and then 45 was introduced. (: dryer for 15 minutes. After completely removing the solvent, 'press the reticle and selectively irradiate the ultraviolet ray at 500 mJ/cm2. Remove the mask and dry at 45 ° C for 30 minutes at 85 ° C for 30 minutes. The heating was carried out in three stages at 1 50 ° C for 1 hour. After heating, it was confirmed that a very clear waveguide pattern appeared. Further, the formation of the core portion and the cladding portion was confirmed. (Formation of the upper cladding layer) The same upper side cladding layer of Example 1. 121 201222034 (4) Evaluation was carried out by the same method as in Example 1. The J-emission propagation loss was 0.03 dB/cm, and the core portion and the cladding portion were folded, and the left was left. Horse 0.01. (Example 7) (1) Synthesis of a decene-based resin having a detaching group, in a hand-working box filled with a dry nitrogen film with a moisture and oxygen concentration of less than 1 ppm, &amp; 500 mL of a small glass Bottle weighing hexyl hydrazine (HxNB) SJgUHmm. 〖), diphenylmethyl _ methoxy 夕 烦 (diPhNB) 8.7g (27.1 〇 1), epoxy olefin (EpNB) 4 ^ ( 27.1 mmol) 'Addition of dehydrated hydrazine 6 〇g and ethyl acetate i ·: The plug was prepared and the upper part was tightly packed. ' Stone Next, weigh the above formula (B) in a 100 mL vial to measure 1.75 g (3.2 mmol) of Νι catalyst and dehydrated hydrazine benzene, put it into a stirrer wafer and sew it tightly, stir well The catalyst is completely dissolved. Accurately weigh 1 mL of the catalyst solution represented by the above chemical formula (8) in a syringe, and quantitatively inject it into the above-mentioned three kinds of reduced glass bottles, which are dissolved in a small glass bottle at room temperature (four) for a few hours. Significantly increased. At this time, the stopper was pulled out, tetrahydrogenated (THF) was added, and the mixture was stirred to obtain a reaction solution. An acetic acid aqueous solution was prepared by adding acetic anhydride 9_5 g of hydrogen peroxide (18 g (concentration: 30%) and ion-exchanged water of 3Qg) to a red beaker. Then, the total amount of the aqueous solution was added to the above reaction solution for 12 hours to carry out a reduction treatment of Ni. Then, the reaction solution that has been processed is transferred to a separatory funnel, and 122 201222034 is added to the lower aqueous layer, and then a 30% aqueous solution of i% mL is added, and the mixture is vigorously mixed. After standing still, the water layer was removed after the two-eighth to nine-knife separation. After repeating the water washing process for a total of three times, the oil smashing layer was dropped into a very large amount of acetone to precipitate the polymer again, and the 蕻-, 错 was separated from the filtrate by filtration, and the enthalpy was set to 60°. In a vacuum dryer of C, 埶..., dry for 12 hours, thereby obtaining polymerization #3. The molecular weight distribution of the polymer #3 was measured by GPC, and Mw = 80,000 and 140,000. Further, the molar ratio of each structural unit in the polymer #3 is determined by NMR, and the hexyl decanoene is at a position of 40 mol%, and the second structure is reduced to 40 mol%. The unit of the base stone smoldering structure is 30 mol% in the early position and 30 mol/〇 in the early structure of the epoxy decene structure. Further, using Mptr;, the refractive index obtained by Metncon was 1.53 (measurement wavelength: 633 nm).

Polymer #3 Weighed 1 〇 of the above-mentioned polymer #3 in a glass container of 100 mL, and added thereto a sulphuric acid Irganox 1076 (manufactured by Ciba-Geigy Co., Ltd.) 01.01g, The ring has its _ oxetane monomer (expressed by Formula 20, manufactured by East Asia Synthetic CH〇x, Λ

RhodorsilPhotoinitiator 2074 X ), photoacid generator

Rh〇dia manufactures 123 201222034 CAS#178233- 72 - 2 ) ( 1.36E — 2g, ethyl acetate 〇 1mL), after homogeneous dissolution, it is filtered by 〇.2/zm PTFE filter to obtain cleanliness. The photosensitive resin composition varnish V7. (3) Production of optical waveguide film (Production of lower cladding layer) The lower cladding layer was produced in the same manner as in Example 1. (Formation of Core Layer) On the lower cladding layer, the photosensitive resin composition varnish V7 was uniformly applied by a doctor blade, and then placed in a dryer at 45 ° C for 15 minutes. After completely removing the solvent, the photomask was crimped and the ultraviolet rays were selectively irradiated at 500 mj/cm2. The mask was removed, and heating was carried out in a drier at 45 ° C for 30 minutes, at 85 ° C for 3 minutes, and at 150 ° C for 1 hour in three stages. After heating, it was confirmed that a very distinctive waveguide pattern appeared. Further, it was confirmed that the core portion and the cladding portion were formed. ° (Formation of Upper Side Coating Layer) The same upper layer coating layer as in Example 1 was produced. (4) Evaluation Evaluation was carried out by the same method as in Example 1. The propagation loss can be calculated as 〇_〇4 dB/cm. The difference in refractive index between the core portion and the cladding portion is 〇 〇2. The evaluation results of the optical waveguide films obtained in the above Examples 1 to 7 are shown in Table 1. 〇不于 124 201222034

Polymer monomer propagation loss [dB/cm] Core/cladding refractive index difference oxetane epoxy Example 1 (4 \1 U \ CHOX (20 phr relative to polymer) No 0.03 0.02 Implementation Example 2 Η IQ\ \〇] CHOX 20 phr No 0.04 0.01 Example 3 Same as Example 1 DOX 20 phr No 0.04 0.01 Example 4 The same as Example 1 alicyclic epoxy 20 phr 0.04 0.01 Example 5 Example 1 Same CHOX 10 phr alicyclic epoxy 10 phr 0.03 0.01 Example 6 Same as Example 1 CHOX 15 phr No 0.03 0.01 Example 7 / \ / \ / \ . CHOX 10 phr No 0.04 0.02 HMti In the examples 1 to 7, when the photosensitive resin composition is irradiated with light, an acid is generated by the photo-acid generator, and polymerization of the monomer having a cyclic ether group is carried out only in the irradiated portion. Further, due to the unreacted single in the irradiated portion The amount of the body is reduced, so that the concentration gradient generated between the irradiated portion and the unirradiated portion is eliminated, 125 201222034 The unirradiated portion of the monomer diffuses to the irradiated portion. Further, if the heating is performed after the light irradiation, the monomer is not irradiated. Partially evaporated. According to the above, Between the core portion and the cladding portion, the concentration of the structure derived from the monomer is different, and the structure derived from the monomer having a cyclic ether group is increased in the coating portion, and the core portion is derived from the cyclic ether. The structure of the monomer of the base is small. The reason for this is that a relatively large refractive index difference of 0.01 or more is generated between the core portion and the coated portion. Further, in Examples 1 to 7, a linear shape is formed. In the case of forming an optical waveguide having a curved shape (having a radius of curvature of about 1 mm), the optical loss is remarkably small. Further, the optical waveguide films obtained in Examples 1 to 7 have high heat resistance and have 260. Reflow resistance of °C. (Example 8) (1) Synthesis of a norbornene resin having a debonding group. Synthesis of a norbornene-based resin having a debonding group. The same operation as in Example 1 was carried out except that the decyl oxide was burned to 4 g (40.1 mmol) instead of diphenyl carbazide methoxy methoxy sulphate 12.9 g (40.1 mmol). The molecular weight of the side chain having a detachment-based slab-type resin B (formula 1 〇 3) is determined by Gpc, Mw = upper! Μη 50,000. In addition, the identification of the Moerby of each structural unit, the unit of the olefin structure is 5〇m〇1%, and the phenyl dimethyl group is reduced by the weak methoxyl structure unit A 50m〇1% Further, the refractive index obtained by MetHc〇n is (measurement wavelength: 633 nm) e 126 201222034 (2) Production of photosensitive resin composition except that decene-based resin B is used instead of polymer #1' 1 A photosensitive resin composition was obtained similarly. (3) Production of optical waveguide film An optical waveguide film was obtained in the same manner as in Example 1 except that the above-mentioned photosensitive resin composition containing a norbornene-based resin B was used. The propagation loss of the optical waveguide film obtained as a result of the evaluation of the loss of the optical waveguide in the same manner as in the first embodiment was 〇.3 dB/cm.

(Example 9) (1) The same operation as in Example 1 was carried out except that the following was used as the photosensitive resin composition. The olefinic resin obtained in Example 1 was weighed in a 100 mL glass container, and 40 g of stilbene was added thereto, and Irgan 〇x 1〇76 (manufactured by Ciba — Geigy Co., Ltd.) was added thereto. Cyclohexyloxycyclobutane monomer (the first monomer represented by Formula 127 201222034 (100), CH〇x ' CAS#483303 - 25 -9 manufactured by East Asia Synthetic, having a molecular weight of 186 and a boiling point of 125〇c /133 kPa) lg, difunctional oxetane monomer (the second monomer represented by formula (104), DOX, CAS#18934~〇〇-4, manufactured by East Asia Synthetic, having a molecular weight of 214 and a boiling point of U9 〇c / 〇·67 kPa) lg, photoacid generator Rhodorsil Photoinitiator 2074 (manufactured by Rhodia, CAS#178233 - 72- 2 ) (i_36E_2g, hexanoic acid 〇 mL lmL), so that it dissolves evenly 'borrowed from 0.2 &quot The pTFE filter of m is filtered to prepare a photosensitive resin composition varnish for the clean core layer. (2) Production of optical waveguide film An optical waveguide film was obtained in the same manner as in Example 1 except that the photosensitive resin composition of the above (1) was used. The loss of the optical waveguide was evaluated in the same manner as in Example 1. As a result, the propagation loss of the obtained optical waveguide film was 〇.4 dB/cm.

(104) (Example 1 〇) Operation: The same as Example 1 except that M is used as the cycloolefin. (1) The synthesis of the decene-based resin c is carried out using a known hand. JP-A-2003-252963, No. 128 201222034 Ring metathesis polymerization C. In the case of the phenylethyl norbornene (PENB) monomer, the norbornene-based resin represented by the following formula (105) is obtained. (2) The photosensitive resin composition is produced except that the norbornene-based resin C is used. A photosensitive resin composition was obtained in the same manner as in Example 1 except for the polymer #1. (3) Production of optical waveguide film An optical waveguide film was obtained in the same manner as in Example 1 except that the photosensitive resin composition containing the rare resin c was used. The loss of the optical waveguide was evaluated in the same manner as in Example 1. As a result, the propagation loss of the obtained optical waveguide film was 〇.05 dB/cm.

(Example 11) An optical waveguide film was produced in the same manner as in Example 1 except that the amount of the first monomer was changed to 〇. 5 g. Further, the propagation loss of the obtained optical waveguide film was 0.10 dB/cm. 129 201222034 (Example 12) An optical waveguide film was produced in the same manner as in Example 1 except that the amount of the first monomer was changed to 4. 〇g. Further, the propagation loss of the obtained optical waveguide film was 〇.1 〇 dB/cm. (Comparative Example 1) An optical waveguide film was produced in the same manner as in Example 1 except that the first monomer was not used. Further, the propagation loss of the obtained optical waveguide film was 0.90 dB/cm. (Comparative Example 2) (1) Synthesis of each component &lt;catalyst precursor: synthesis of Pd(OAc) 2 (P(Cy) 3) 2 &gt; 2-neck round bottom flask equipped with a funnel, at 7 8. (: A reddish brown suspension consisting of pd(〇Ac) 2 (5.00 g '22.3 mmol) and CH2C12 (30 mL) was stirred under stirring. P (Cy) 3 ( 13.12 mL ( 44.6 mmol)) of CH2C12 Valley was added to the funnel. Liquid·(30 mL) 'And, it was added dropwise to the above-mentioned mixing suspension in 15 minutes. As a result, it gradually turned from reddish brown to yellow. After 1 hour of application at 7 8 C, the suspension was warmed. The mixture was stirred at room temperature for 2 hours and diluted with hexane (20 mL). The yellow solid was filtered in air and washed with pentane (5 xi0 mL). The mixture was cooled to 〇°c and separated, and washed and dried in the same manner as above to obtain a catalyst precursor. (2) Production of photosensitive resin composition 130 201222034 Weigh 1 〇g in a 100 mL glass container The above-mentioned polymer #1 was purified, and 10 g of sulphate, 40 g of an antioxidant, Irgan 〇x 1 〇 76 (manufactured by Geigy Co., Ltd.), 0.01 g, and dimethyl bis(northene methoxy) decane (SO) were added. 〇2.4g, the above catalyst precursor (2 6E-2g), photoacid generator Rhodorsil Photoinitiator 2074 ( Rh〇dia Manufactured, CAS#m233 - 72- 2 ) ( 1.36E - 2g, acetic acid B 3 〇 imL), after homogeneous dissolution, 'by 〇. 2ym PTFE filter to obtain clean photosensitive resin (3) Fabrication of optical waveguide film (production of lower cladding layer) The same lower cladding layer as in Example 1 was produced. (Formation of core layer) On the lower cladding layer, The prepared varnish was uniformly applied by a doctor blade, and then placed in a 45 C dryer for 15 minutes. After completely removing the solvent, the mask was crimped, and ultraviolet rays were selectively irradiated at 500 mJ/cm 2 to remove the mask in the dryer. The heating was carried out in three stages at 45,130 minutes, 85 t3 〇 minutes, and 15 〇 ti hours. After heating, it was confirmed that the waveguide pattern appeared. Further, the formation of the core portion and the cladding portion was confirmed. The same as in Example 1, the evaluation of the upper side cladding layer (4) was carried out in the same manner as in Example 1. The propagation loss was calculated to be 0.05 dB/cm. The difference in refractive index between the core portion and the cladding portion was 〇 〇〇 5. B• Optical Waveguide Evaluation 131 201222034 For each application and The optical waveguide obtained in the comparative example was subjected to the following evaluation. The item was shown together with the contents. The results obtained are shown in Table 2. 1 · Light loss is transmitted from the light source of the 850 nm VCSEL (surface emitting laser) 5〇Mm "The optical fiber is introduced into the above optical waveguide, and the intensity of the light is fixed by the optical fiber of 2"ym". Further, the measurement system employs a truncation method in which the waveguide length is plotted on the horizontal axis and the insertion loss is plotted on the vertical axis. As a result, the measured values are accurately arranged on the straight line, and the propagation loss is calculated from the slope. 2. Heat resistance The optical waveguide was placed in a high-temperature and high-humidity bath (85 〇 c, 85% RH), and the propagation loss after the wet heat treatment of 500, j and time was evaluated. At the same time, it is also confirmed whether there is any deterioration of the propagation loss caused by the reflow process (maximum temperature 26 (rC//6 〇 second) in the N2 environment. Furthermore, the measurement of the propagation loss here and the loss of the light of 丨The measurement method is the same. 3. The bending loss of the optical waveguide evaluates the bending loss of the light intensity of the optical waveguide film having a radius of curvature of 10 mm. The light emitted from the VCSEL (surface luminescence laser) of (4) (10) is passed through 50&quot; The optical fiber is introduced into the end surface of the optical waveguide film, and the optical fiber is received from the other end by an optical fiber of 200//, and the intensity of the light is measured (refer to the following formula). The incremental definition of the loss caused by bending the optical waveguide film having the same length is defined. In the case of the "bending loss", as shown in Figs. 22 and 39, the difference between the insertion loss in the case where the optical film is formed into a curved shape and the insertion loss in the case where the optical waveguide film is formed in a straight line indicates "the ridge loss." 132 201222034 Insertion loss [dB] 21 lOlog (exit light intensity / incident light intensity) Bending loss == (insertion loss under the curve) 1 (insertion loss under the line) [Table 2] Polymer monomer light loss [dB] /cm] bend Flex loss [dB/cm] Heat resistance penetration price 85〇C85% RH 500hr 260〇C Reflow example 1 Round CHOX 0.03 0.7 0.05 0.04 Example 8 ^(h) \ ύΐ CHOX 0.03 0.8 0.05 0.05 Example 9 Example 1 Same CHOX DOX 0.04 0.9 0.04 0.05 Example 10 \〇) CHOX 0.05 0.9 0.10 0.36 Example 11 Same as Example 1 CHOX 0,10 1.2 0.11 0.11 Example 12 Same as Example 1 CHOX 0.10 U 0.12 0.11 Comparison Example 1 Same as Example 1 No 0.90 2.5 0.99 1.12 Comparative Example 2 Same as Example 1 SiX 0.05 1.9 1.35 1.50 It can be clearly shown from Table 2 that the light loss of Examples 1, 8 to 12 is low, and the performance of the optical waveguide Further, it is shown that the light loss after the high-temperature and high-humidation treatment and the reflow treatment of Examples 1 and 8 to 12 is also small, and the heat resistance is also excellent. 133 201222034 Further, it is suggested that, in particular, Examples 1, 8, and 9, The bending loss of 10 is also small, and sufficient performance is exhibited even when the optical waveguide is bent. Further, the optical waveguide structure obtained in each of the examples and the comparative examples is used to produce the optical waveguide structure according to the first embodiment, and the result and use are obtained. Income from each comparative example In the optical waveguide structure of the optical waveguide film, the optical waveguide structure of the optical waveguide film obtained in each of the embodiments can be used to obtain a lower transmission loss. Further, the optical waveguide structure using the optical waveguide film obtained in each of the embodiments can be used. Since it has excellent flexibility, and since the optical waveguide film has a low loss of curvature as described above, high-quality optical communication can be maintained even if the bending operation is repeated. Further, an optical waveguide film including a widened portion and a reduced portion was produced by the same method as in each of the examples and the comparative examples, and as a result, the width of the core portion produced by the same method as that of the respective examples and comparative examples was constant. The optical waveguide film can be confirmed to have a reduction in light loss. Further, in the same manner as in the respective examples and comparative examples, an optical waveguide film including a thick film portion and a thin film portion was produced, and as a result, a decrease in light loss was confirmed. [Industrial Applicability] The optical waveguide structure system of the present invention has a wide space for designing an optical circuit (pattern of an optical waveguide) or an electric circuit, and has a high yield, and can maintain optical transmission performance, reliability, and durability at a high level. Excellent and versatile. Therefore, by the optical waveguide structure of the present invention, various electronic components and electronic devices having high reliability can be obtained. Thus, the present invention is extremely useful in the industry. 134 201222034 [Brief Description of the Drawings] Fig. 1 is a cross-sectional view showing a first embodiment of the optical waveguide structure of the present invention. Fig. 2 is a perspective view showing the optical waveguide shown in Fig. 1. Fig. 3 is a plan view showing a first embodiment of the optical waveguide structure of the present invention. Fig. 4 is a plan view showing a second embodiment of the optical waveguide structure of the present invention. Fig. 5 is a plan view showing a third embodiment of the optical waveguide structure of the present invention. Fig. 6 is a plan view showing a fourth embodiment of the optical waveguide structure of the present invention. Fig. 7 is a cross-sectional view showing a fifth embodiment of the optical waveguide structure of the present invention. Fig. 8 is a cross-sectional view showing a sixth embodiment of the optical waveguide structure of the present invention. Fig. 9 is a view for explaining a state in which the optical waveguide structure shown in Fig. 8 is bent near the center. Fig. 10 is a cross-sectional view showing a seventh embodiment of the optical waveguide structure of the present invention. Fig. 11 is a plan view showing the optical waveguide structure shown in Fig. 10. Fig. 12 is a plan view showing an eighth embodiment of the optical waveguide structure of the present invention. Fig. 13 is a cross-sectional view showing the 135 201222034 of the ninth embodiment of the optical waveguide structure of the present invention. Fig. 14 is a cross-sectional view showing a tenth embodiment of the optical waveguide structure of the present invention. Fig. 15 is a plan view showing an eleventh embodiment of the optical waveguide structure of the present invention. Fig. 16 is a cross-sectional view showing a third embodiment of the optical waveguide structure of the present invention. Fig. 1 is a plan view showing a twelfth embodiment of the optical waveguide junction of the present invention. Fig. 18 is a cross-sectional view showing a thirteenth embodiment of the optical waveguide structure of the present invention. Fig. 19 is a cross-sectional view schematically showing an example of the steps of a method of manufacturing an optical waveguide. Fig. 20 is a cross-sectional view schematically showing an example of the steps of a method of manufacturing an optical waveguide. Fig. 2 is a cross-sectional view schematically showing an example of the steps of a method of manufacturing an optical waveguide. Fig. 22 is a view schematically showing a method of measuring the bending loss in the embodiment. Figure 23 is a cross-sectional view showing a fourteenth embodiment of the optical waveguide structure of the present invention. Fig. 24 is a perspective view showing the optical waveguide shown in Fig. 23. Figure 25 is a plan view showing the core layer of the optical waveguide shown in Figure a. Fig. 26 is a plan view showing the core layer of the fifteenth embodiment 136 201222034 of the optical waveguide structure of the present invention. Fig. 28 is a cross-sectional view showing the light wave of the present invention. Fig. 29 is a cross-sectional view showing the light wave of the present invention. Fig. 29 is a cross-sectional view showing the light wave of the present invention. Fig. 30 is a plan view showing the core layer of the light wave of the present invention. Fig. 31 shows the core layer of the light wave of the present invention. The ninth embodiment of the present invention is the plan view of the optical waveguide structure of the present invention. The _3 3 system of the method example shows the 丨 manufacturing side profile of the optical waveguide. The blue 阖34 system schematically shows a cross-sectional view of a step example of each method of the optical waveguide. The _35 system schematically shows a cross-sectional view of the first example of the π rugged optical waveguide. FIG. 36 schematically shows Second manufacture of optical waveguide

&lt;Turning of the trampoline step J squint angle 阖37 is a perspective view showing a step scale of the second manufacturing method of the optical waveguide. The circle 38 is a perspective view showing a step 126 201222034 of the second manufacturing method of the optical waveguide. Fig. 39 is a curved view schematically showing the embodiment. [Description of main components] 1 Optical waveguide structure 2 Substrate 21 Through-hole 22 Conductor post 23 Through-hole 24 Cut-out 25 Through-hole 3 Light-emitting element 30 Base 31 Light-emitting portion 32 Metal wire 33 External electrode 34 Resin mold 35 Light-emitting 1C ( Light 300 Light-emitting circuit 4 Light-receiving element 41 Light-receiving unit 42 Metal wire 43 External electrode 44 Electrical component for resin mold) 138 201222034 45 Light-receiving IC (light-receiving electric component 400 Light-receiving circuit 5 Conductor layer 51 Conductor layer 52 First electric wiring 53 3 electric wiring 54 second electric wiring 551 electrode pad 5 5a optical communication external connection terminal 55b electrical communication external connection terminal 55 first terminal portion 55' second terminal portion 6 substrate 61 through hole 62 conductor post 63 through hole ( Optical signal passage area) 81 Fixing portion 9 Optical waveguide 91 Covering layer 92 Covering layer 93 Core layer 94 Core portion 95 Covering portion 96 Flexible portion 139 201222034 97 900 910 Μ 1001 1002 1021 1022 1003 1030 1031 1032 1033 1034 1035 1300 1004 1040 1041 1042 1043 1044 1045 1400 Optical path conversion part varnish film cover light Waveguide structure substrate through-hole conductor column light-emitting device base light-emitting portion metal wire external electrode resin mold light-emitting 1C (light-emitting electrical component) light-emitting circuit light-receiving element base light-receiving part metal wire external electrode resin mold light-receiving 1C (electricity for light-receiving Element) Light-receiving circuit 140 201222034 1005 Conductor layer 105 1 Electrical wiring 1009 Optical waveguide 1091 Coating layer 109 Γ Lower cladding layer base material 1911 First surface 1912 Second surface 1913 Third surface 1914 Fourth surface 1092 Coating layer 1093 Core layer 1094 core portion 1940 isometric portion 1941, 1941' widened portion (expanded portion) 1942, 1942' reduced portion (reduced portion) 1943, 1943' thick film portion (expanded portion) 1944, 1944' film portion (reduced Part) 1945 equal thickness part 1095 cladding part 1971, 1972 optical path conversion part 1098 optical wiring 1900 varnish 1910 film S cutting surface 141

Claims (1)

201222034 VII. Patent application scope: 1. An optical waveguide structure having an optical waveguide having a core portion and a cladding portion having different refractive indices, the core portion having an expanded portion whose cross-sectional area continuously increases toward one end portion' And by selectively irradiating the core layer composed of the composition containing the following components with active radiation to form a desired shape, _ (A) a cyclic olefin resin, (B) a refractive index and the (A) And having at least one of a ring-ringing monomer and an oligomer having a cyclic butterfly group, and (C) a phosphor acid generating agent. 2. The optical waveguide structure according to claim i, wherein the cyclic ether group of (B) is an oxetanyl gr〇up or an epoxy group. 3. The optical waveguide structure according to claim 2, wherein the cycloolefin resin of (a) has a debonding group which is detached from the side chain by the photoacid generator of (c) (B) contains the ith monomer described in the following formula (1〇〇): Ο(100) 4. The optical waveguide junction 142 201222034 in the structure of the invention, wherein the width of the core portion in the plan view is toward the optical waveguide The optical waveguide structure according to any one of claims 1 to 4, wherein, in the expanded portion, the thickness of the core portion is continuous toward one end of the optical waveguide 6. The optical waveguide structure according to any one of items 1 to 5 of the patent specification, wherein the core portion and the core portion are in a plan view of the core portion a boundary line formed in a parabola along an opening toward the end of the optical waveguide. 7. The optical waveguide structure of any one of claims 1 to 6 Partially, the boundary line of the core 4 and the sinuous cladding portion in the plan view or the boundary between the core portion and the cladding in the thickness direction, and the end of the line relative to the core portion The end face of the part is formed at an angle of 45 degrees or more and less than 90 degrees. 8·If applying for a patent (4), items 1 to 7 In the optical waveguide structure of any of the items, the end surface area of the one end portion of the bobbin portion is larger than the end surface area of the other end portion. &quot;. Patent range 帛j to item 8 The optical waveguide structure of the item, wherein a width in a plan view of the end portion of the core portion is larger than a width in a plan view of the other end portion. 1〇. The optical waveguide structure of the middle-item, wherein the thickness of the end portion of the core portion is thicker than the thickness of the other end portion. The first to the first items of the patent target range of Shishen Kiss An optical waveguide 143 201222034 structure, wherein the core portion further has a reduced portion which is disposed on the other end side of the expanded portion and which is continuously smaller toward the other end portion. An optical waveguide structure of the eleventh aspect, wherein a width of the reduced portion "the core portion in a plan view is continuously reduced toward the other end of the optical waveguide. 13. The light of the item or the item a of claim The waveguide structure 'where' is in the reduced portion, the core The thickness of the portion is continuously reduced toward the other end of the optical waveguide. 14. The optical waveguide structure of any one of clauses 11 to n of the patent application, wherein the reduced portion is a top view of the core portion The boundary line between the core portion and the cladding portion is formed along a parabola opening toward one end of the optical waveguide. 15. As in any one of claims 1-4 to 14 The optical waveguide structure, wherein, in the reduced portion, a boundary line between the core portion and the cladding portion in a plan view or a boundary line between the core portion and the cladding portion in a thickness direction of the core portion is opposite to the The end face of the one end portion of the core portion forms an angle of not more than 9 degrees above 45 degrees. 16. The optical waveguide structure of any one of clauses 1 to 15, wherein the optical waveguide has a plurality of the core portions. 17. The optical waveguide structure of claim 16, wherein the plurality of core portions are arranged in parallel, and at least two of the plurality of core portions are adjacent to each other and the other end At least one position of the portion is offset from each other in the longitudinal direction 144 201222034 18. The optical waveguide structure of claim 16 or 17, wherein at least two cores adjacent to the core portion In the portion, the position of the one end portion and the position of the other end portion are opposite to each other. The optical waveguide structure according to any one of the preceding claims, wherein the optical waveguide has an optical path conversion portion that bends the optical path, and the optical path conversion portion is externally The light is bent and introduced into the core portion', or the light propagating through the core portion is bent and led to the outside. The optical waveguide junction body of any one of the above-mentioned items, wherein the wiring substrate is provided on at least one side of the optical waveguide and includes a substrate, and A conductor layer provided on at least one side thereof and having electrical wiring formed thereon. An electronic device comprising the optical waveguide structure according to any one of claims 1 to 2. An optical waveguide structure comprising: a flexible flexible substrate; a wiring substrate provided with a conductor layer on at least one surface of which is formed with electrical wiring; and a surface side provided on one side of the wiring substrate And an optical waveguide having a core portion and a cladding portion having different refractive indices, the core portion being formed into a desired shape by selectively irradiating the active layer with a core layer composed of a composition containing the following components. : (A) a cycloolefin resin, (B) at least one of a monomer 145 201222034 having a refractive index different from the (A) and having a cyclic ether group, and an oligomer having a cyclic ether group (c) Photoacid generator. 146